Vibrating element and vibrating device

Abstract

To provide a vibrating piece and a vibrating device capable of obtaining high vibration characteristics. [Solution] The invention provides a quartz substrate 100 that is rectangular in plan view and has a first surface 110 along the X and Z' axes of the quartz crystal, and a first outer edge 130 intersecting the X axis; a first excitation electrode 210 that is rectangular in plan view and is positioned on the first surface 110 of the quartz substrate 100 and has a first side 211 intersecting the X axis; a first mounting electrode 310 that is positioned on the side of the first outer edge 130 of the quartz substrate 100 and connected to the first excitation electrode 210; and a first extraction electrode 410 that connects the first excitation electrode 210 and the first mounting electrode 310, wherein there is an electrodeless region 500 in which the quartz substrate 100 is exposed between the first outer edge 130 of the quartz substrate 100 and the first side 211 of the first excitation electrode 210.

Description

Technical Field

[0001] The present invention relates to a vibrating piece and a vibration device.

Background Art

[0002] In Patent Document 1, excitation electrodes and a routing pattern connected to the excitation electrodes are provided on both main surfaces of a crystal piece. In the excitation electrodes, a configuration of a crystal vibration element is disclosed in which the contour on the side where the routing pattern is provided is formed as a curve. By forming the excitation electrodes as a curve, even when the crystal resonator is miniaturized, it is possible to secure the area of the excitation electrodes, and the CI (Crystal Impedance) value can be reduced.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the configuration described in Patent Document 1, although the CI value can be reduced, there is a problem that spurious (unwanted vibrations other than the main vibration) and Q value (Quality factor) are not considered at all.

Means for Solving the Problems

[0005] The vibrating element comprises a quartz substrate that is rectangular in plan view and has planes along the X and Z' axes of the quartz crystal, including a first outer edge intersecting the X axis; an excitation electrode that is rectangular in plan view and is positioned on the plane of the quartz substrate and includes a first side intersecting the X axis; a mounting electrode positioned on the side of the first outer edge of the quartz substrate and connected to the excitation electrode; and a lead electrode connecting the excitation electrode and the mounting electrode, wherein there is an electrodeless region between the first outer edge of the quartz substrate and the first side of the excitation electrode in which the quartz substrate is exposed.

[0006] The vibration device comprises the vibrating piece described above and a base substrate to which the vibrating piece is attached. [Brief explanation of the drawing]

[0007] [Figure 1] A plan view showing the configuration of the vibration device. [Figure 2] A cross-sectional view of the vibration device shown in Figure 1, along AA. [Figure 3] A plan view showing the configuration of the vibrating elements that make up the vibration device. [Figure 4] A perspective view showing the configuration of the vibrating element. [Figure 5] A plan view showing an enlarged view of section B of the vibrating piece shown in Figure 3. [Figure 6] A graph showing the relationship between the width of the extraction electrode and the Q value. [Figure 7A] Plan view showing the configuration of other vibrating elements. [Figure 7B] Plan view showing the configuration of other vibrating elements. [Figure 8A] A plan view showing the spurious emissions generated in a conventional vibrating piece. [Figure 8B] A plan view showing the state of spurious emissions generated in the vibrating piece of the embodiment. [Figure 9] A graph showing a comparison of the Q values ​​of different vibrating elements. [Modes for carrying out the invention]

[0008] The configuration of the vibrating piece 10 and the vibrating device 1 will be explained below with reference to the drawings. In the following figures, the three mutually orthogonal axes will be described as the X-axis, Y'-axis, and Z'-axis. The direction along the X-axis will be called the "X-axis direction," the direction along the Y'-axis will be called the "Y'-axis direction," and the direction along the Z'-axis will be called the "Z'-axis direction." The direction of the arrow is the + direction, and the direction opposite to the + direction is the - direction. Also, the plane parallel to the X-axis and Y'-axis is called the "XY' plane," the plane parallel to the X-axis and Z'-axis is called the "XZ' plane," and the plane parallel to the Y'-axis and Z'-axis is called the "Y'Z' plane." A plan view from the +Y'-axis direction is simply called a "plan view."

[0009] First, the configuration of the vibration device 1 will be explained with reference to Figures 1 and 2. Note that the vibration device 1 shown in Figure 1 is in the state with the cover 21 (see Figure 2) removed.

[0010] As shown in Figures 1 and 2, the vibration device 1 is a surface-mount component in which the vibrating element 10 is packaged. In this embodiment, an oscillator is described as an example of the vibration device 1.

[0011] The vibration device 1 comprises a vibrating piece 10 and a package 20.

[0012] The package 20 comprises a container 22 and a lid 21. The container 22 is a box-shaped member with a recess 23 formed therein. The internal space S of the package 20 is partitioned by joining the container 22 and the lid 21. The vibrating piece 10 is housed in the internal space S of the package 20.

[0013] The container 22 has a base substrate 24 which is the bottom of the recess 23, a frame-shaped frame portion 25 which is placed on the base substrate 24, and mounting electrodes 30 which serve as terminals for mounting the vibrating piece 10. In plan view, the container 22 is a substantially rectangular shape with a pair of sides along the X-axis and a pair of sides along the Z'-axis. The recess 23 of the container 22 opens to the +Y' side.

[0014] The mounted electrode 30 is fixed to the crystal substrate 100 via the joining member 33. Specifically, a first exciting electrode 210 is provided on the first surface 110 (see FIG. 3) of the crystal substrate 100. The first exciting electrode 210 is electrically connected to the joining member 33 via the mount electrode 300.

[0015] A second exciting electrode 220 is provided on the second surface 120 (see FIG. 3) of the crystal substrate 100. The second exciting electrode 220 is electrically connected to the joining member 33 via the mount electrode 300.

[0016] As described above, the mount electrode 300 is electrically connected to the exciting electrode 200 and is disposed on the side of the first outer edge 130 of the crystal substrate 100. The mount electrode 300 has a first mount electrode 310 electrically connected to the first exciting electrode 210 and a second mount electrode 320 electrically connected to the second exciting electrode 220.

[0017] The mounted electrode 30 has a first mounted electrode 31 and a second mounted electrode 32. The first mounted electrode 31 is disposed at the corner 28 on the +X side and -Z' side of the recess 23. The second mounted electrode 32 is disposed at the corner 27 on the +X side and +Z' side of the recess 23.

[0018] On the surface of the container 22 opposite to the surface on which the mounted electrode 30 of the base substrate 24 is disposed, an external electrode (not shown) is provided. The external electrode is electrically connected to the mounted electrode 30 by wiring inside the base substrate 24.

[0019] The materials of the base substrate 24 and the frame portion 25 are not particularly limited, but are, for example, insulating materials. Examples of the insulating materials include various ceramics such as alumina.

[0020] The lid body 21 is substantially rectangular in plan view and is in the form of a plate parallel to the XZ' plane. The lid body 21 is joined to the opening of the container 22 via a sealing material 26 to seal the recess 23. The sealing material 26 is sometimes called a sealing ring.

[0021] The lid 21 is made of Kovar as the base material. The Kovar is nickel (Ni) plated. However, the material of the lid 21 is not limited to this, and may be, for example, 42 alloy, stainless steel, glass, ceramic, or silicon.

[0022] Next, the configuration of the vibrating piece 10 will be described with reference to Figures 3 and 4.

[0023] As shown in Figures 3 and 4, the vibrating element 10 is made of a quartz substrate 100 and has planes along the X and Z' axes of the quartz crystal, i.e., XZ' planes. The vibrating element 10 is formed in a rectangular plate shape in plan view, parallel to the XZ' planes. The vibrating element 10 has a first outer edge 130 that intersects the X axis, i.e., along the Z' axis.

[0024] The vibrating element 10 includes a quartz substrate 100, an excitation electrode 200 disposed on the quartz substrate 100, a mounting electrode 300, and a lead electrode 400 that electrically connects the excitation electrode 200 and the mounting electrode 300.

[0025] The quartz substrate 100 has a first surface 110 and a second surface 120 that are parallel to the XZ' plane and are in a front-to-back relationship with each other. The first surface 110 and the second surface 120 are the AT cut surfaces of the quartz.

[0026] The excitation electrode 200 includes a first excitation electrode 210 provided on the first surface 110 and a second excitation electrode 220 provided on the second surface 120.

[0027] The first excitation electrode 210 is formed in a rectangular shape in plan view and has a first side 211 that intersects with respect to the X axis, i.e., along the Z' axis, a second side 212 and a third side 213 that intersect with the first side 211, and a fourth side 214 that is opposite the first side 211 and intersects with the second side 212 and the third side 213.

[0028] The mounting electrode 300 is electrically connected to the excitation electrode 200 and is located on the side of the first outer edge 130 of the quartz substrate 100. The mounting electrode 300 includes a first mounting electrode 310 electrically connected to the first excitation electrode 210 and a second mounting electrode 320 electrically connected to the second excitation electrode 220.

[0029] Furthermore, between the first outer edge 130 of the quartz substrate 100 and the first side 211 of the first excitation electrode 210, there is an electrodeless region 500 in which the quartz substrate 100 is exposed. Specifically, the electrodeless region 500 is a region in which, for example, the excitation electrode 200, the mounting electrode 300, the extraction electrode 400, etc., are not formed.

[0030] The first mounted electrode 310 is positioned on one side of the electrodeless region 500 in the Z' axis direction. The second mounted electrode 320 is positioned on the other side of the electrodeless region 500 in the Z' axis direction.

[0031] The extraction electrode 400 includes a first extraction electrode 410 that electrically connects the first excitation electrode 210 and the first mounting electrode 310, and a second extraction electrode 420 that electrically connects the second excitation electrode 220 and the second mounting electrode 320.

[0032] The first lead electrode 410 has a first portion 411 extending along the Z' axis from the second side 212, and a second portion 412 extending along the X axis from the first portion 411 and connected to the first mount electrode 310 (see Figure 5).

[0033] As described above, since there is an electrodeless region 500 where the quartz substrate 100 is exposed between the first outer edge 130 and the first side 211, in other words, there is no first extraction electrode 410 having a first portion 411 and a second portion 412 between the first outer edge 130 and the first side 211, even if spurious signals are generated in the quartz substrate 100, the first extraction electrode 410 is less susceptible to the effects of spurious signals. That is, the first extraction electrode 410 does not couple with spurious signals. Therefore, it is possible to suppress the leakage of vibration energy from the first extraction electrode 410 to, for example, the mounting electrode 300, and a stable Q value can be obtained.

[0034] Similarly, the first mounting electrode 310 and the second mounting electrode 320 are positioned so as not to overlap with the electrodeless region 500, which is susceptible to spurious emissions, in a plan view. Furthermore, the bonding member 33 is also positioned so as not to overlap with the electrodeless region 500 in a plan view. As a result, even if spurious emissions occur in the quartz substrate 100, the mounting electrodes 310, 320 and the bonding member 33 are less susceptible to spurious emissions. Therefore, variations in the Q value in the vibrating piece 10 can be suppressed.

[0035] The Q-value indicates the maximum amplitude value in vibration. In other words, the Q-value represents the difference between vibration and noise, and a large value is preferable. That is, a value that indicates low noise is preferable.

[0036] As shown in Figure 4, the vibrating element 10 has a quartz substrate 100 as described above. The first surface 110 of the quartz substrate 100 is provided with a first excitation electrode 210, a first extraction electrode 410, and a first mounting electrode 310A. The first surface 110 is also provided with a second mounting electrode 320A which is electrically connected to the second excitation electrode 220.

[0037] The second surface 120 of the quartz substrate 100 is provided with a second excitation electrode 220, a second extraction electrode 420, and a second mounting electrode 320B. The second surface 120 is also provided with a first mounting electrode 310B which is electrically connected to the first excitation electrode 210.

[0038] The quartz substrate 100 has a side surface 140 that connects the first surface 110 and the second surface 120. The side surface 140 has a first side surface 141 that runs along the first outer edge 130, a second side surface 142 and a third side surface 143 that intersect with the first side surface 141, and a fourth side surface 144 that faces the first side surface 141 and intersects with the second side surface 142 and the third side surface 143.

[0039] The first side surface 141 is provided with a first side electrode 610 that electrically connects the first mounting electrode 310A of the first side surface 110 and the first mounting electrode 310B of the second side surface 120. The first side electrode 610 may also be provided on the second side surface 142. The first side surface 141 is also provided with a second side electrode 620 that electrically connects the second mounting electrode 320A of the first side surface 110 and the second mounting electrode 320B of the second side surface 120. The second side electrode 620 may also be provided on the third side surface 143.

[0040] The vibrating element 10 is attached to the base substrate 24 by being connected to the mounted electrode 30 (see Figure 1) via a bonding member 33. Specifically, the first mounted electrode 31 is electrically connected to the first mounted electrode 310B via the bonding member 33. The second mounted electrode 32 is electrically connected to the second mounted electrode 320B via the bonding member 33. The bonding member 33 is conductive.

[0041] A voltage is supplied to the vibration device 1 from an external terminal (not shown). The supplied voltage is applied to the first excitation electrode 210 via the first mounted electrode 31, the joining member 33, and the first mounting electrodes 310A and 310B. The supplied voltage is also applied to the second excitation electrode 220 via the second mounted electrode 32, the joining member 33, and the second mounting electrode 320B. When voltage is applied to the first excitation electrode 210 and the second excitation electrode 220, vibration is excited and the vibrating piece 10 oscillates.

[0042] Mount electrodes 310A, 310B, 320A, and 320B include a tungsten (W) base layer and a nickel (Ni) plating layer as a surface layer. The constituent materials of mount electrodes 310A, 310B, 320A, and 320B are not particularly limited; for example, the base layer may be molybdenum (Mo) or the surface layer may be gold (Au).

[0043] Furthermore, the second excitation electrode 220, the second extraction electrode 420, and the second mounting electrode 320B, which are provided on the second surface 120 of the quartz substrate 100, are arranged in a similar shape to the first excitation electrode 210, the first extraction electrode 410, and the first mounting electrode 310A, although their orientation is different from that of the first surface 110.

[0044] Next, the configuration of the first extraction electrode 410 will be specifically described with reference to Figures 5, 6, 7A, and 7B.

[0045] As shown in Figure 5, the first lead electrode 410 has, as described above, a first portion 411 extending from the second side 212 along the -Z' axis, and a second portion 412 extending from the first portion 411 along the X axis and connected to the first mount electrode 310.

[0046] The graph in Figure 6 shows the relationship between the wiring width of the first lead electrode 410 and the Q value of the vibrating piece 10. The horizontal axis of the graph shows the position of the vibrating piece 10 in the X-axis direction. The vertical axis of the graph shows the Q value. Wiring widths M1 to M4 differ in the width of the first lead electrode 410. Wiring width M1 has the narrowest width of the first lead electrode 410. Wiring width M2 has a wider width of the first lead electrode 410 than wiring width M1. Wiring width M3 has a wider width of the first lead electrode 410 than wiring width M2. Wiring width M4 has the widest width of the first lead electrode 410.

[0047] As shown in the graph of Figure 6 for wiring width M1, narrowing the width of the first lead electrode 410 results in a higher overall Q value, although some locations may show a lower Q value. On the other hand, as the width of the first lead electrode 410 increases to the wiring width M4, the effect of spurious emissions weakens, but the overall Q value decreases. Based on these results, in Figures 5, 7A, and 7B, the placement position and width of the first lead electrode 410 are defined to approach the wiring width M1.

[0048] As shown in Figure 7A, in the vibrating piece 10A, the length in the X-axis direction of the first excitation electrode 210 is Ex, and the distance in the X-axis direction between the first portion 411 of the first extraction electrode 410A and the first side 211 of the first excitation electrode 210 is D1. In this case, it is preferable to set D1 such that the relationship 0 ≤ D1 / Ex ≤ 0.18 is satisfied. That is, it is preferable to draw out the first extraction electrode 410A from a region of low vibration in the first excitation electrode 210.

[0049] Furthermore, as shown in Figure 7B, in the vibrating piece 10B, the length in the X-axis direction of the first excitation electrode 210 is Ex, and the distance in the X-axis direction between the first portion 411 of the first extraction electrode 410B and the fourth side 214 of the first excitation electrode 210 is D2. In this case, it is preferable to set D2 such that the relationship 0 ≤ D2 / Ex ≤ 0.18 is satisfied. That is, it is preferable to draw out the first extraction electrode 410 from a region of the first excitation electrode 210 where the vibration is low.

[0050] Furthermore, as shown in Figure 7A, it is preferable that the length Hx in the X-axis direction of the first portion 411 of the first extraction electrode 410A is shorter than the length D3 in the Z'-axis direction of the first excitation electrode 210. With this configuration, the length in the X-axis direction of the first portion 411 of the first extraction electrode 410A is shorter than the length in the Z'-axis direction of the first excitation electrode 210, that is, the width of the first extraction electrode 410A is narrower, so the Q value can be increased.

[0051] Furthermore, as shown in Figure 5, it is preferable that the length Hx in the X-axis direction of the first portion 411 of the first extraction electrode 410 is shorter than the length D4 in the Z'-axis direction of the first mounting electrode 310A. With this configuration, the length Hx in the X-axis direction of the first portion 411 of the first extraction electrode 410 is shorter than the length D4 in the Z'-axis direction of the first mounting electrode 310A, that is, the width of the first extraction electrode 410 is narrower, so the Q value can be increased. In addition, it becomes possible to make the first mounting electrode 310A larger so as not to overlap with the electrodeless region 500, for example, it is possible to improve conductivity with the bonding member 33.

[0052] Further, as shown in FIG. 7A, when the length of the first excitation electrode 210 in the X-axis direction is Ex and the length of the first portion 411 of the first extraction electrode 410A in the X-axis direction is Hx, it is preferable to satisfy the relationship of 0 < Hx / Ex ≦ 0.18.

[0053] The length Ex of the first excitation electrode 210 in the X-axis direction is, for example, 562 μm. The length Hx of the first extraction electrode 410A in the X-axis direction is, for example, 100 μm or less. According to this configuration, since the first extraction electrode 410 is set so as to satisfy the above relationship, the width of the first extraction electrode 410 can be narrowed, and the Q value can be increased.

[0054] Also, as described above, when the length of the first excitation electrode 210 in the X-axis direction is Ex and the length of the first portion 411 of the first extraction electrode 410 in the X-axis direction is Hx, it is more preferable to satisfy the relationship of 0 < Hx / Ex ≦ 0.09.

[0055] In this case, the length Ex of the first excitation electrode 210 in the X-axis direction is, for example, 562 μm. The length Hx of the first extraction electrode 410A in the X-axis direction is, for example, 50 μm or less. According to this configuration, since the first extraction electrode 410 is set so as to satisfy the above relationship, the width of the first extraction electrode 410 can be narrowed, and the Q value can be increased. Also, by narrowing the width of the first extraction electrode 410, the vibrating piece 10 and the vibration device 1 can be miniaturized.

[0056] Next, referring to FIGS. 8A, 8B, and 9, the influence of spurious and the Q value in the conventional vibrating piece 10Z and the influence of spurious and the Q value in the vibrating piece 10 of the present embodiment will be compared and described.

[0057] As shown in FIG. 8A, in the conventional vibrating piece 10Z, the first extraction electrode 410Z is disposed between the first excitation electrode 210 and the first outer edge 130. In other words, the first extraction electrode 410Z is disposed in the +X-axis direction of the first excitation electrode 210.

[0058] In the conventional vibrating piece 10Z, spurious G is transmitted to the first excitation electrode 210 in the X-axis direction, indicating that the first extraction electrode 410Z is affected by spurious G. As a result, it is conceivable that vibration energy may leak from the first extraction electrode 410Z to the first mounting electrode 310.

[0059] As shown in Figure 8B, in this embodiment, the vibrating piece 10 does not have the first extraction electrode 410 positioned between the first excitation electrode 210 and the first outer edge 130. In other words, the first extraction electrode 410 is positioned to avoid the electrodeless region 500 (see Figure 3) in the +X axis direction of the first excitation electrode 210.

[0060] In the vibrating piece 10 of this embodiment, although spurious G is transmitted to the first excitation electrode 210 in the X-axis direction, as in the conventional case, it can be seen that the first extraction electrode 410 is not affected by spurious G. As a result, it is thought that vibration energy is less likely to leak from the first extraction electrode 410 to the first mounting electrode 310.

[0061] Furthermore, the graph shown in Figure 9 shows the Q value C2 of the conventional vibrating element 10Z and the Q value C1 of the vibrating element 10 of this embodiment, for each region of vibrating element 10 and 10Z. As shown in Figure 9, it can be seen that the vibrating element 10 of this embodiment exhibits a stable Q value across the entire region compared to the conventional vibrating element 10Z. In addition, it can be seen that the vibrating element 10 of this embodiment does not experience a significant decrease in Q value depending on the region, and exhibits a generally high Q value.

[0062] In this way, since the first extraction electrode 410 is positioned to avoid the electrodeless region 500 in the X-axis direction of the first excitation electrode 210, even if spurious signals are generated in the quartz substrate 100, the first extraction electrode 410 is less susceptible to the effects of the spurious signals. Therefore, it is possible to suppress the leakage of vibrational energy from the first extraction electrode 410, and a stable Q value, for example, a value of 100K or higher, can be obtained.

[0063] As described above, the vibrating piece 10 of this embodiment comprises a quartz substrate 100 that is rectangular in plan view and has a first surface 110 along the X and Z' axes of the quartz crystal and a first outer edge 130 intersecting the X axis; a first excitation electrode 210 that is rectangular in plan view and is arranged on the first surface 110 of the quartz substrate 100 and has a first side 211 intersecting the X axis; a first mounting electrode 310 that is arranged on the side of the first outer edge 130 of the quartz substrate 100 and connected to the first excitation electrode 210; and a first extraction electrode 410 that connects the first excitation electrode 210 and the first mounting electrode 310, and has an electrodeless region 500 in which the quartz substrate 100 is exposed between the first outer edge 130 of the quartz substrate 100 and the first side 211 of the first excitation electrode 210.

[0064] With this configuration, there is an electrodeless region 500 where the quartz substrate 100 is exposed between the first outer edge 130 and the first side 211. In other words, since the first extraction electrode 410 is not provided between the first outer edge 130 and the first side 211, even if spurious signals are generated in the quartz substrate 100, the first extraction electrode 410 is less susceptible to the effects of spurious signals. Therefore, it is possible to suppress the leakage of vibrational energy from the first extraction electrode 410 to, for example, the first mounting electrode 310, and a stable Q value can be obtained.

[0065] Furthermore, even if the dimensions of the vibrating piece 10 vary, the first extraction electrode 410 is not provided to couple with spurious signals, thus suppressing the deterioration of the Q value and making it easier to manufacture the vibrating piece 10.

[0066] Furthermore, in the vibrating piece 10 of this embodiment, a first mounting electrode 310 connected to a first extraction electrode 410 is arranged on the side of the first outer edge 130, the first excitation electrode 210 has a second side 212 and a third side 213 that intersect the first side 211, and the first extraction electrode 410 preferably has a first portion 411 extending along the Z' axis from the second side 212 or the third side 213, and a second portion 412 extending along the X axis from the first portion 411 and connected to the first mounting electrode 310. With this configuration, the first extraction electrode 410 is provided having the first portion 411 and the second portion 412, that is, it is arranged so that the first extraction electrode 410 is not provided between the first outer edge 130 and the first side 211, so that even if spurious emissions occur in the quartz substrate 100, the first extraction electrode 410 can be suppressed from being affected by spurious emissions.

[0067] Furthermore, in the vibrating piece 10 of this embodiment, the first excitation electrode 210 has a fourth side 214 that faces the first side 211 and intersects with the second side 212 and the third side 213. When the length of the first excitation electrode 210 in the X-axis direction is Ex, the distance in the X-axis direction between the first portion 411 of the first extraction electrode 410A and the first side 211 of the first excitation electrode 210 is D1, and the distance in the X-axis direction between the first portion 411 of the first extraction electrode 410B and the fourth side 214 of the first excitation electrode 210 is D2, it is preferable that the relationship 0 ≤ D1 / Ex ≤ 0.18 or 0 ≤ D2 / Ex ≤ 0.18 is satisfied. With this configuration, the arrangement positions of the first extraction electrodes 410A and 410B are set to satisfy the relationship in the above equation, so that the first extraction electrodes 410A and 410B are suppressed from being affected by spurious signals, and a stable Q value can be obtained.

[0068] Furthermore, in the vibrating piece 10 of this embodiment, it is preferable that the length Hx in the X-axis direction of the first portion 411 of the first extraction electrode 410A is shorter than the length D3 in the Z'-axis direction of the first excitation electrode 210. With this configuration, the length Hx in the X-axis direction of the first portion 411 of the first extraction electrode 410A is shorter than the length D3 in the Z'-axis direction of the first excitation electrode 210, that is, the width of the first extraction electrode 410A is narrower, so the Q value can be increased.

[0069] Also, in the vibrating piece 10 of the present embodiment, it is preferable that the length Hx in the X-axis direction of the first portion 411 of the first lead electrode 410 is shorter than the length D4 in the Z'-axis direction of the first mounting electrode 310A. According to this configuration, since the length Hx in the X-axis direction of the first portion 411 of the first lead electrode 410 is shorter than the length D4 in the Z'-axis direction of the first mounting electrode 310A, that is, the width of the first lead electrode 410 is narrow, the Q value can be increased. In addition, the first mounting electrode 310A can be made large enough not to overlap the non-electrode region 500. For example, the conductivity with the joining member 33 can be enhanced.

[0070] Also, in the vibrating piece 10 of the present embodiment, when the length in the X-axis direction of the first exciting electrode 210 is Ex and the length in the X-axis direction of the first portion 411 of the first lead electrode 410A is Hx, it is preferable to satisfy the relationship of 0 < Hx / Ex ≤ 0.18. According to this configuration, since the first lead electrode 410A is set so as to satisfy the above relationship, the width of the first lead electrode 410 can be narrowed, and the Q value can be increased.

[0071] Also, in the vibrating piece 10 of the present embodiment, when the length in the X-axis direction of the first exciting electrode 210 is Ex and the length in the X-axis direction of the first portion 411 of the first lead electrode 410A is Hx, it is preferable to satisfy the relationship of 0 < Hx / Ex ≤ 0.09. According to this configuration, since the first lead electrode 410A is set so as to satisfy the above relationship, the width of the first lead electrode 410A can be narrowed, and the Q value can be increased.

[0072] Furthermore, in the vibrating piece 10 of this embodiment, the surface includes a first surface 110 and a second surface 120 that are in a front-back relationship, the excitation electrode 200 includes a first excitation electrode 210 arranged on the first surface 110 and a second excitation electrode 220 arranged on the second surface 120, the mounting electrode 300 includes a first mounting electrode 310 connected to the first excitation electrode 210 and a second mounting electrode 320 connected to the second excitation electrode 220, and it is preferable that the first mounting electrode 310 is arranged on one side in the Z' axis direction of the electrodeless region 500 and the second mounting electrode 320 is arranged on the other side in the Z' axis direction of the electrodeless region 500. With this configuration, since the first mounting electrode 310 is arranged on one side of the electrodeless region 500 and the second mounting electrode 320 is arranged on the other side, even if spurious signals are generated in the quartz substrate 100, the first mounting electrode 310 and the second mounting electrode 320 are less susceptible to the effects of spurious signals. Therefore, a stable Q value can be obtained.

[0073] Furthermore, in the vibrating piece 10 of this embodiment, it is preferable that the extraction electrode 400 includes a first extraction electrode 410 arranged on the first surface 110 and connecting the first excitation electrode 210 and the first mounting electrode 310, and a second extraction electrode 420 arranged on the second surface 120 and connecting the second excitation electrode 220 and the second mounting electrode 320. With this configuration, since the first extraction electrode 410 is arranged on the first surface 110 and the second extraction electrode 420 is arranged on the second surface 120, even if spurious signals are generated in the quartz substrate 100, the first extraction electrode 410 and the second extraction electrode 420 are less susceptible to the effects of spurious signals. Therefore, a stable Q value can be obtained.

[0074] Furthermore, the vibration device 1 of this embodiment includes the vibrating pieces 10, 10A, and 10B described above, and a base substrate 24 to which the vibrating pieces 10, 10A, and 10B are attached. With this configuration, it is possible to provide a vibration device 1 that can obtain a stable Q value.

[0075] Furthermore, in the vibration device 1 of this embodiment, it is preferable that the device includes a mounted electrode 30 provided on the base substrate 24 and a bonding member 33 connecting the mounted electrode 300 and the mounted electrode 30, wherein the bonding member 33 is positioned so as not to overlap with the electrodeless region 500 in a plan view. With this configuration, since the bonding member 33 is positioned so as not to overlap with the electrodeless region 500, even if spurious signals are generated in the quartz substrate 100, the bonding member 33 is less susceptible to the effects of spurious signals. Therefore, it is possible to suppress the leakage of vibration energy and obtain a stable Q value. [Explanation of symbols]

[0076] 1…Vibration device, 10, 10A, 10B, 10Z…Vibrating piece, 20…Package, 21…Lid, 22…Container, 23…Recess, 24…Base substrate, 25…Frame, 26…Sealing material, 27, 28…Corner, 30…Mounted electrode as terminal, 31…First mounted electrode, 32…Second mounted electrode, 33…Bonding member, 100…Crystal substrate, 110…First surface, 120…Second surface, 130…First outer edge, 140…Side, 141…First side, 142…Second side, 143…Third side, 144…Fourth side, 200…Energy Vibration electrode, 210...First excitation electrode, 211...First side, 212...Second side, 213...Third side, 214...Fourth side, 220...Second excitation electrode, 300...Mount electrode, 310, 310A, 310B...First mount electrode, 320, 320A, 320B...Second mount electrode, 400...Draw-out electrode, 410, 410A, 410B, 410Z...First draw-out electrode, 411...First part, 412...Second part, 420...Second draw-out electrode, 500...Electrode-free region, 610...First side electrode, 620...Second side electrode.

Claims

1. A quartz substrate having planes along the X and Z' axes of the quartz crystal, and a rectangular quartz substrate in plan view including a first outer edge intersecting the X axis, An excitation electrode, which is arranged on the surface of the quartz substrate and has a rectangular shape in plan view including a first side that intersects with the X-axis, A mounting electrode is positioned on the first outer edge side of the quartz substrate and connected to the excitation electrode, A lead electrode connecting the excitation electrode and the mounting electrode, Equipped with, A vibrating piece having an electrodeless region between the first outer edge of the quartz substrate and the first side of the excitation electrode, in which the quartz substrate is exposed.

2. A vibrating piece according to claim 1, The mounting electrode, which is connected to the extraction electrode, is located on the side of the first outer edge. The excitation electrode has a second side and a third side that intersect the first side, The extraction electrode is, A first portion extending from the second or third side along the Z' axis, A vibrating piece having a second portion extending from the first portion along the X-axis and connected to the mounting electrode.

3. The vibrating piece according to claim 2, The excitation electrode has a fourth side that faces the first side and intersects with the second and third sides, Let Ex be the length in the X-axis direction of the excitation electrode. Let D1 be the distance in the X-axis direction between the first portion of the extraction electrode and the first side of the excitation electrode. When the distance in the X-axis direction between the first portion of the extraction electrode and the fourth side of the excitation electrode is D2, A vibrating piece that satisfies the relationship 0 ≤ D1 / Ex ≤ 0.18 or 0 ≤ D2 / Ex ≤ 0.

18.

4. The vibrating piece according to claim 2, The length of the first portion of the extraction electrode in the direction of the X axis is, A vibrating piece shorter than the length in the Z' axis direction of the excitation electrode.

5. The vibrating piece according to claim 2, The length of the first portion of the extraction electrode in the direction of the X axis is, A vibrating piece shorter than the length in the Z' axis direction of the mounted electrode.

6. The vibrating piece according to claim 2, Let Ex be the length of the excitation electrode in the direction of the X axis. When the length of the first portion of the extraction electrode in the direction of the X axis is Hx, A vibrating piece that satisfies the relationship 0 < Hx / Ex ≤ 0.

18.

7. The vibrating piece according to claim 2, Let Ex be the length of the excitation electrode in the direction of the X axis. When the length of the first portion of the extraction electrode in the direction of the X axis is Hx, A vibrating piece that satisfies the relationship 0 < Hx / Ex ≤ 0.

09.

8. A vibrating piece according to claim 1, The aforementioned surface includes the first surface and the second surface which are in a front-back relationship, The excitation electrode includes a first excitation electrode disposed on the first surface and a second excitation electrode disposed on the second surface. The mount electrode includes a first mount electrode connected to the first excitation electrode and a second mount electrode connected to the second excitation electrode. The first mounting electrode is positioned on one side in the direction of the Z' axis in the electrodeless region. The second mounted electrode is a vibrating piece positioned on the other side in the direction of the Z' axis within the electrodeless region.

9. A vibrating piece according to claim 8, The extraction electrode is, A first extraction electrode is arranged on the first surface and connects the first excitation electrode and the first mounting electrode, A second extraction electrode is arranged on the second surface and connects the second excitation electrode and the second mounting electrode, A vibrating piece, including a vibrating element.

10. The vibrating piece according to claim 1, A base substrate to which the vibrating element is attached, A vibrating device having the following characteristics.

11. A vibration device according to claim 10, Terminals provided on the base substrate, A connecting member that connects the mounting electrode and the terminal, It has, The aforementioned joining member is positioned in a location that does not overlap with the electrodeless region in a plan view, and is a vibration device.

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