Processing unit

Abstract

To provide a processing device that reliably and cleanly removes tape from an object to be adhered to, without causing any minor damage to the object after tape removal, thereby improving the reusability of the object to be adhered to. [Solution] The processing device is a device that transports a flat plate-shaped workpiece W, which has magnetic attraction properties, by supporting it from one side on the conveying surface of a magnetic conveyor belt, and sequentially sprays a medium (pressurized water) onto the other side.

Description

Technical Field

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[0001] The present disclosure relates to a processing apparatus.

Background Art

[0002] A tape peeling method is known in which pressurized water is sprayed onto a tape of an adherent body to which a tape is attached using a tape peeling device to peel the tape from the adherent body.

Prior Art Document

Patent Document

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] According to the tape peeling method described in Patent Document 1, the tape attached to the adherent body could be peeled off surely and neatly. However, the adherent body after tape peeling may be scratched finely, and there is room for improvement in terms of reusing the adherent body. The present disclosure improves at least one of the problems of the above prior art.

Means for Solving the Problems

[0005] The first processing apparatus of the present disclosure is a processing apparatus that conveys a flat workpiece having an adsorptivity to a magnet while supporting it from one side on the conveying surface of a conveyor belt with built-in magnetic force, and sequentially sprays a medium onto the other side.

Effects of the Invention

[0006] According to the present disclosure, at least one of the problems of the above prior art can be improved.

Brief Description of the Drawings

[0007] [Figure 1]This diagram illustrates each module of a processing system incorporating the processing device of this disclosure. [Figure 2] This is a perspective view of the workpiece being transported. [Figure 3] This is a side view of the supply device and the processing device. [Figure 4] This is a side view of the supply device and the processing device. [Figure 5] This is a plan view of the processing unit. [Figure 6] This is a cross-sectional view along line AA in Figure 1. [Figure 7] This is a magnified side view of the belt tension adjustment mechanism. [Figure 8] This is a perspective view of a conveyor belt. [Figure 9] This is a close-up view of a section of the drive pulley. [Figure 10] This is a view from the direction of arrow X in Figure 9. [Figure 11] This is a perspective view of the chamber unit. [Figure 12] This is an explanatory diagram showing a pressurized water jet gun. [Figure 13] This is a magnified view of the nozzle head. [Figure 14] This is a flowchart illustrating the procedure for transporting and cleaning workpieces using a processing device. [Modes for carrying out the invention]

[0008] The first processing apparatus of this disclosure is a processing apparatus that conveys a flat plate-shaped workpiece that is attracted to magnets, supporting it from one side on the conveying surface of a magnetic conveyor belt, and sequentially spraying a medium onto the other side.

[0009] In the first processing device, a magnetic conveyor belt securely holds the workpiece using magnetic force, so the workpiece hardly moves or shakes unnecessarily on the belt during transport. This stable transport minimizes the stress on the workpiece surface during transport compared to conventional methods that rely on mechanical clamping or friction. As a result, the workpiece is less likely to be damaged and is suitable for reuse after processing.

[0010] The second processing apparatus is a processing apparatus in which, in the first processing apparatus, the magnetic conveyor belt comprises a conveyor belt body and magnets provided along the entire circulating direction of the conveyor belt body.

[0011] In the second processing device, the magnetic conveyor belt is configured to have magnets provided along the entire circulation direction of the conveyor belt body. This configuration ensures that the magnetic force is uniformly exerted across the entire belt, making it possible to stably hold the workpiece during transport. Furthermore, by adopting a magnet arrangement that is appropriate for the shape and material of the workpiece, flexible adaptation is possible. This reduces damage to the workpiece during transport and improves the stability of transport.

[0012] The third processing apparatus is a processing apparatus in which, in the second processing apparatus, the conveyor belt body has a structure formed by joining thin sheets of non-magnetic metal in the longitudinal direction to form a loop, and the joint portion is oblique to the circulation direction of the conveyor belt body.

[0013] In the third processing device, the conveyor belt body has a structure formed by joining thin plates of non-magnetic metal in the longitudinal direction into a loop shape, and the joint part is configured to be oblique to the circulation direction. By making the joint part oblique to the circulation direction, impacts and uneven loads at the joints when the conveyor belt circulates are dispersed, and the effect of suppressing vibrations and impacts on the workpieces during conveyance is achieved. Also, by using thin plates of non-magnetic metal, it becomes possible to achieve both the durability of the belt body and conveyance stability without impairing the magnetic force characteristics of the magnet. Further, as a result of suppressing the influence of the "warp" of the belt that occurs during welding of the thin plates, conveyance with high reliability can be realized even in long-term use.

[0014] The fourth processing device is a processing device that, in the second processing device, is configured to wind up the ends of the magnetic force built-in conveyor belt and hold the magnetic force built-in conveyor belt stretched in a loop shape, and includes at least two pulleys and a tension adjustment mechanism that moves the pulley in the circulation direction to adjust the tension of the conveyor belt.

[0015] In the fourth processing device, the magnetic force built-in conveyor belt has a configuration in which the ends are wound up and it is held by at least two pulleys in a state of being stretched in a loop shape. Further, it includes a tension adjustment mechanism that adjusts the tension of the magnetic force built-in conveyor belt by moving the pulley in the circulation direction. With this tension adjustment mechanism, an operator can easily adjust the tension of the magnetic force built-in conveyor belt, and the work of easily removing and replacing the magnetic force built-in conveyor belt can be efficiently performed. Also, with this structure, it is possible to quickly and appropriately respond to the aging deterioration and elongation during use of the magnetic force built-in conveyor belt, so that the maintainability and operation efficiency of the entire conveying device can be improved. Further, by being able to accurately perform tension adjustment, sagging and slipping of the magnetic force built-in conveyor belt during conveyance are suppressed, and stable conveyance is realized.

[0016] The fifth processing apparatus is a processing apparatus that, in the fourth processing apparatus, comprises a chamber that surrounds a predetermined area on the conveying surface of the magnetic conveyor belt at the spraying position of the medium, and an opening and closing mechanism that tilts and opens the chamber with one end of the magnetic conveyor belt in the width direction as a pivot point.

[0017] In the fifth processing apparatus, a chamber is provided at the medium spraying position, enclosing a predetermined area on the conveying surface of the magnetic conveyor belt. The chamber is equipped with an opening and closing mechanism that allows it to tilt and open using one end of the magnetic conveyor belt in the width direction as a pivot point. This configuration allows the chamber to effectively suppress scattering that occurs when the medium is sprayed, improving the cleanliness and safety of the working environment. Furthermore, by tilting and opening the chamber to one side, the tension-adjusted conveyor belt can be easily removed, thus improving the efficiency of belt maintenance and replacement work. In addition, the use of the opening and closing mechanism improves access to the inside of the apparatus during the medium spraying process, contributing to an overall improvement in the maintainability of the apparatus.

[0018] The sixth processing apparatus is a fifth processing apparatus that is positioned at an intermediate position in the circulation direction and at the medium spraying position, and includes an auxiliary fixing mechanism that reinforces the fixing of the workpiece to the transport surface when the medium is sprayed.

[0019] The sixth processing device is configured to include an auxiliary fixing mechanism that reinforces the workpiece's position on the conveying surface when the medium is sprayed at an intermediate position in the circulation direction. This auxiliary fixing mechanism effectively suppresses the effect of the pressure generated during medium spraying on the workpiece, preventing misalignment and vibration of the workpiece. In particular, anticipating the effects of high pressure during spraying, the device provides additional fixing force in addition to fixing by the magnetic conveyor belt, thereby achieving stable transport of the workpiece. Furthermore, this reduces the risk of damage to the back surface of the workpiece and improves the accuracy and quality of the medium spraying process.

[0020] The seventh processing apparatus is a processing apparatus that, in the sixth processing apparatus, is equipped with an auxiliary fixing mechanism which is arranged on the back side of the magnetic conveyor belt and holds the workpiece by magnetic attraction via the magnetic conveyor belt from the back side.

[0021] The seventh processing device has an auxiliary fixing mechanism positioned on the back side of the magnetic conveyor belt, which magnetically attracts and holds the workpiece from the back side via the magnetic conveyor belt. This configuration enables non-contact auxiliary fixing, significantly reducing the risk of damage to the workpiece surface or back surface due to physical contact. Furthermore, because it is non-contact, it is possible to maintain the surface quality of the workpiece while maintaining the fixing force, and it is particularly effective for workpieces where scratches are unacceptable. By adopting such an auxiliary fixing mechanism, quality and stability in the conveying and media spraying processes can be improved.

[0022] The eighth processing apparatus is the sixth or seventh processing apparatus, wherein the chamber is equipped with a shutter that blocks the gap between it and the magnetic conveyor belt, and the blocking of the gap by the shutter and the reinforcement of the fixing to the workpiece by the auxiliary fixing mechanism are performed as an interrelated sequence.

[0023] In the eighth processing apparatus, the chamber is equipped with a shutter that seals the gap between it and the magnetic conveyor belt. The sealing of the gap by the shutter and the securing and reinforcement of the workpiece by the auxiliary fixing mechanism are executed as an interconnected sequence. This sequence unifies the timing of gap sealing and securing and reinforcement, dramatically improving the accuracy of workpiece holding in the media spraying process. Furthermore, the coordinated operation of the shutter and the auxiliary fixing mechanism prevents problems such as media leakage from the gap and workpiece displacement, thereby increasing the reliability of the entire media spraying process. Moreover, this coordinated operation allows for the synchronization of multiple processes with a single control system, optimizing the operational efficiency of the apparatus while maximizing the role of each process. As a result, the uniformity and accuracy of media spraying are improved, contributing to the maintenance of workpiece surface quality and increased productivity of the entire process.

[0024] The ninth processing apparatus is a processing apparatus that, in the first processing apparatus, comprises a magnetic belt arranged on the back surface of the magnetic conveyor belt and formed in a loop shape along the circulation direction of the magnetic conveyor belt, and a cleaning unit installed at a position opposite to the magnetic belt and fixed relative to the circulating conveying surface.

[0025] In the ninth processing apparatus, a magnetic belt formed in a loop along the circulation direction is arranged on the back of the magnetic conveyor belt, and a cleaning unit is installed opposite the magnetic belt. The magnetic belt is positioned on the back side of the conveyor belt, and the cleaning unit is positioned on the opposite side of the magnetic belt, with the conveyor belt in between, to clean the conveying surface. This arrangement allows the cleaning unit to effectively clean the conveying surface in the area affected by the magnetic belt, thereby maintaining and improving the magnetic force. Furthermore, this configuration allows the cleaning unit to efficiently remove dirt adhering to the conveying surface and stabilize the magnetic force, ensuring reliable workpiece retention during conveyance and contributing to the maintenance of the durability and quality of the conveying surface. The relative arrangement of the magnetic belt and the cleaning unit plays an important role in enhancing conveying and magnetic attraction performance.

[0026] Embodiments will be described in detail below with reference to the attached drawings. The following examples illustrate apparatuses and methods for realizing the technical concept of the disclosure, and the technical concept of this disclosure is not limited to those described below. The technical concept of this disclosure can be modified in various ways within the scope of the claims. In particular, it should be noted that the drawings are schematic and may differ from actual ones.

[0027] Figure 1 is an explanatory diagram of each module of a processing system incorporating the processing apparatus 14 of this disclosure. The processing system 10 is a tape peeling system for peeling tape attached to the surface of a plate-shaped workpiece that has magnetic attraction properties by spraying a medium (pressurized water) onto the workpiece. The processing system 10 comprises a supply device 12, a processing apparatus 14, an inspection device 16, a washing device 18, a drying device 20, and a storage device 22. It also includes a transport line 24 for continuously transporting workpieces W (see Figure 2) from the supply device 12 to the storage device 22. Each of these parts is controlled by a controller (not shown).

[0028] Figure 2 is a perspective view of the transported workpiece W. Workpiece W is a transport frame configured to be transported as a single unit with electronic components mounted on it. Workpiece W is a thin sheet of ferromagnetic metal (for example, ferritic stainless steel or martensitic stainless steel) and has an opening H in the center for mounting electronic components. Tape T is attached around the opening H to secure and protect the mounted electronic components. Workpiece W is the frame portion after the mounted electronic components have been removed. This frame portion is reused after the tape T is removed, it is cleaned and dried. The processing system is a group of devices that automatically perform the above-mentioned reuse processing.

[0029] The supply device 12 supplies the workpiece W to the processing device 14. The processing device 14 sprays pressurized water onto the workpiece W received from the supply device 12 to peel the tape T from the workpiece W. The inspection device 16 is equipped with an imaging means (such as a CCD camera) to image the surface of the workpiece W and checks whether the tape T has been peeled off from the workpiece W by analyzing the imaging results. Workpiece W with incomplete tape peeling is then removed from the transport line 24. The washing device 18 has a pressurized water washing device for washing the back surface of the workpiece W, and washes the back surface of the workpiece W after tape peeling. The drying device 20 dries the workpiece W after the back surface has been washed. The storage device 22 receives the dried workpiece W one by one and loads and stores them in racks (not shown). The transport line 24 only needs to be able to continuously transport the workpiece W. The transport method of each device does not need to be the same. The medium that the processing device 14 sprays onto the workpiece is not limited to pressurized water M. Other examples of mediums include compressed air, cleaning fluid, paint, and cooling mediums (gas / liquid). Furthermore, the purpose of the processing device may include not only tape removal, but also drying, cleaning, painting, and cooling.

[0030] Furthermore, the supply device 12, inspection device 16, washing device 18, drying device 20, and storage device 22 in the processing system 10 can be the same as those described in Japanese Patent Publication No. 2020-88094. A detailed explanation of these will be omitted. Below, we will describe the structure and usage of the processing device 14, which is a characteristic part of the processing system 10.

[0031] Figures 3 and 4 are side views of the supply device 12 and the processing device 14. Figure 3 shows the state in which pressurized water M is sprayed from the nozzle head 63 onto a workpiece W during transport to perform a cleaning process. Figure 4 shows the state in which the cleaning process is completed and the workpiece W is being transported by the conveyor belt 43. Figure 5 is a plan view of the processing device 14. Figure 6 is a cross-sectional view taken along line AA.

[0032] Workpieces W are supplied one by one from the supply device 12 to the processing device 14. The supply device 12 is equipped with a robot arm 12A for supplying workpieces W. The robot arm 12A is equipped with a plurality of suction parts 12B at its tip. The supply device 12 brings the robot arm 12A close to the workpieces W stacked on the main body 12C and makes contact with the suction parts 12B. Next, the robot arm 12A is moved to place the workpieces W onto the conveying surface of the conveyor belt 43 of the processing device 14.

[0033] The processing device 14 transports the workpiece W, which is placed on the conveyor belt 43, in the Y-axis direction, and at intermediate positions, sprays pressurized water M from a nozzle head 63 to clean the surface of the workpiece W. The processing device 14 is composed of three main parts. First, there is the housing section 14A, which is formed from columns, beams, and a table. The housing section 14A is the framework of the processing device 14, and various parts are fixed to the housing section 14A directly or indirectly. Next is the transport section 14B, which is responsible for transporting the workpiece W by a belt conveyor including the conveyor belt 43. The transport section 14B is located almost in the center of the housing section 14A. Finally, there is the cleaning section 14C, which includes a chamber unit 14D and a cleaning unit 14E, and is responsible for cleaning the workpiece W. The chamber unit 14D is located on the transport section 14B, and the cleaning unit 14E is located at the top of the housing section 14A.

[0034] Next, we will explain the details of each part. First, we will explain the structure of the housing part 14A. Each part of the processing apparatus 14 is arranged on the base 32. Six short support columns (base support columns 33) extend from the base 32 in the Z-axis direction (vertical direction), and the pool 34 is supported on top of them. The pool 34 has a flat bottom and a rimmed structure. The pool 34 functions as a drain for pressurized water M sprayed from the nozzle head 63 and as a receptacle for temporarily collecting tape T peeled off from the workpiece W.

[0035] Within the pool 34, two first lower beams 35A and 35B are spaced apart from each other across the entire width in the X direction (horizontal direction). Similarly, two second lower beams 36A and 36B are spaced apart from each other across the entire width in the Y direction (vertical direction) (see Figure 3). The first lower beams 35A and 35B and the second lower beams 36A and 36B intersect each other to form a grid-like (well-frame-like) lower beam structure. The edges of the pool 34 and the ends of the lower beams are welded together. Furthermore, support members 39A, 39B, 40A, and 40B that support the conveying section extend from the second lower beams 36A and 36B in the Z-axis direction to a height of approximately half the height of the processing device 14.

[0036] Meanwhile, four long vertical support columns (37A, 37B, 37C, 37D) are provided around the edge of the pool 34. Columns 37A and 37B are located at the two front corners of Figure 3 and extend in the Z-axis direction. A first upper beam 38 spans their upper ends. Columns 37C and 37D extend in the Z-axis direction from the middle and corners of the rear edge, with a second upper beam 46A spanning their upper ends. Both the first upper beam 38 and the second upper beam 46A are structured to extend parallel to the Y-direction. The washing unit 14E is placed on top of these upper beams. The housing 14A, thus configured, is a frame with a roughly rectangular exterior, comprising a lower beam and an upper beam. The transport unit 14B is then placed and fixed on top of the lower beam.

[0037] Next, the conveying section 14B will be described. The conveying section 14B consists of a conveyor belt 43 stretched in a loop, three drive pulleys 51, 52, 51 that wind up and hold both ends of the conveyor belt 43, three driven pulleys 53, 54, 53, and a frame structure for fixing and holding these pulleys at both ends.

[0038] The frame structure consists of a first frame member 41A, a second frame member 41B, and a table 45. Both the first frame member 41A and the second frame member 41B are plate-shaped and identical in form. These frame members are supported vertically in the Z-axis direction by support members 39A, 39B, and 40A, 40B, respectively, and are arranged parallel to each other along the YZ plane. Furthermore, a table 45 is placed on top of the first frame member 41A and the second frame member 41B. The entire frame structure has a U-shape in the XZ plane, with its cross-section opening downwards.

[0039] At one end of the frame structure are three drive pulleys 51, 52, 51 connected to a motor 70 via a reduction gear 71. These three drive pulleys 51, 52, 51 are each fixed to a rotating shaft 72 and rotate in sync with the rotation of the rotating shaft 72. The rotating shaft 72 is connected to the motor 70 via a reduction gear 71. The rotating shaft 72 is inserted through two opposing bare cases 59. The bare cases 59 are each fixed to mounting plates 58 which are fixed to the first frame member 41A and the second frame member 41B. In this configuration, the three drive pulleys 51, 52, 51 are rotatably fixed between the first frame member 41A and the second frame member 41B.

[0040] The drive pulleys 51, 51 are flat type (flat pulleys), and the drive pulley 52 is crown type (crown pulley). These are mounted on the rotating shaft 72 in the order of drive pulley 51, drive pulley 52, drive pulley 51, starting from the motor 70 side. The crown shape of the drive pulley 52 is intended for centering the conveyor belt 43, and when combined with the flat type drive pulleys 51, 51, stable belt drive is possible.

[0041] On the other hand, driven pulleys 53, 54, and 53 are fixed to the other end of the frame structure via a belt tension adjustment mechanism 60 provided at the ends of the first frame member 41A and the second frame member 41B. Similar to the drive side, the pulleys are arranged in a triple configuration, with a crown-shaped driven pulley 54 in the center and driven pulleys 53 and 53 on either side. The purpose of this configuration is the same as that of the drive side.

[0042] Figure 7 is a magnified side view of the belt tension adjustment mechanism 60. A fixed shaft 60B is inserted through the centers of the driven pulleys 53, 54, and 53. The fixed shaft 60B is inserted into a slit 60C provided in the center of the mounting plate 60A, which is fixed to the first frame member 41A. Ball bearings 74 (Figure 6) are fitted in the centers of the driven pulleys 53, 54, and 53 to support the fixed shaft 60B. The fixed shaft 60B is held in place by being sandwiched between the slits 60C of the mounting plate 60A and does not rotate, but the driven pulleys 53, 54, and 53 rotate smoothly relative to the fixed shaft 60B due to the action of the ball bearings 74.

[0043] A female thread 60H is formed in the center of the fixed shaft 60B, and an adjustment screw 60G with a head 60J that has a male thread along its entire length is screwed into this female thread. The adjustment screw 60G extends in the Y-axis direction. A stopper 60D is also positioned at the open end of the slit 60C of the mounting plate 60A. The stopper 60D has a through hole 60F (without threads) optimized for the diameter of the adjustment screw 60G, and the adjustment screw 60G is inserted through this through hole, with the head 60J positioned at its end. An adjustment nut 60E is screwed between the head 60J and the stopper 60D.

[0044] The belt tension adjustment mechanism 60 is provided on both sides of the driven pulleys 53, 54, 53 and is fixed to the first frame member 41A and the second frame member 41B. As a result, the driven pulleys 53, 54, 53 are supported between the first frame member 41A and the second frame member 41B and rotate around the fixed shaft 60B. With the belt tension adjustment mechanism 60, by rotating the adjustment nut 60E while keeping the head 60J of the adjustment screw 60G fixed, the center position 60K of the fixed shaft 60B can be slid in the Y-axis direction. The driven pulleys 53, 54, 53 follow this movement, so the tension of the conveyor belt 43 can be easily adjusted.

[0045] Next, the structure of the conveyor belt 43 will be described. Figure 8 is a perspective view of the conveyor belt 43. The body of the conveyor belt 43 (conveyor belt body) is formed by joining thin sheets of non-magnetic metal in the longitudinal direction to create a loop shape. The material is not particularly limited, but examples include aluminum, non-magnetic stainless steel, copper, copper alloys, titanium, magnesium alloys, nickel, nickel alloys, zinc, and zinc alloys.

[0046] The joint 43C is positioned diagonally with respect to the circulation direction (Y-axis direction) of the conveyor belt 43. When thin metal plates are welded together to form a loop, the finished product is prone to twisting. By positioning this joint 43C diagonally with respect to the circulation direction, the effect of twisting due to welding can be minimized. On the other hand, the closer the diagonal direction is to the circulation direction, the longer the joint 43C becomes. From the viewpoint of minimizing twisting and improving manufacturing efficiency, the angle between the joint 43C and the circulation direction of the conveyor belt 43 is preferably greater than 0° and less than 90° (assuming 0° is parallel and 90° is orthogonal), more preferably greater than 20° and less than 70°, and even more preferably greater than 30° and less than 60°. With such a joint structure, twisting of the conveyor belt 43 is less likely to occur, contributing to smoother transport.

[0047] The conveying surface 43A of the conveyor belt 43 is a flat surface. On the other hand, on the back surface, two loop-shaped magnetic belts 43B, which are narrower than the conveyor belt 43, are arranged parallel to each other at a predetermined distance apart. The magnetic belts 43B circulate in the same way as the conveyor belt 43. The magnetic belts 43B generate a magnetic attraction force, which attracts and fixes the workpiece W to the conveying surface 43A. With this structure, the workpiece W does not slide during transport, and damage is suppressed. The conveyor belt 43 is made magnetic by the magnetic belts 43B. The arrangement of the magnets is not limited to the above and can be appropriately selected according to the shape of the workpiece, etc. For example, the magnets may be arranged on the entire back surface or the entire conveying surface of the conveyor belt 43. In this case, the attraction force on the workpiece W by the magnets is exerted uniformly over the entire surface, so there is no unevenness in the attraction force and the workpiece W can be held stably. On the other hand, the number of magnets increases, so the magnetic belts 43B are more advantageous in terms of cost.

[0048] Alternatively, magnets can be arranged at regular intervals on the underside of the conveyor belt 43. In this case, the magnetic force is exerted only partially, allowing for weight reduction and cost savings. Furthermore, since the magnetic force is used only where needed, it can be implemented with the minimum necessary materials. This is particularly effective when the workpiece W is small and only specific points of attraction need to be held.

[0049] Furthermore, a configuration in which the magnetic belt 43B is arranged perpendicular or oblique to the circulation direction can also be adopted. In this case, the attractive force can be exerted uniformly in a certain direction, and a wider range can be covered than in the embodiment. This is preferable because it can be more flexibly adapted to different sizes and shapes of the workpiece W.

[0050] Alternatively, a configuration in which magnets are arranged in a checkerboard pattern on the underside of the conveyor belt 43 can also be adopted. In this case, the magnetic force can be distributed over a wide area while reducing the amount of material used. Since the attractive force tends to be uniform, this is advantageous when multiple workpieces are transported simultaneously or when holding workpieces with irregular shapes.

[0051] Since the conveyor belt 43 is configured as a magnetic conveyor belt equipped with a magnetic belt 43B, it suppresses the formation of scratches on the workpiece W. On the other hand, since the magnetic belt 43B exerts a magnetic attraction force on the workpiece W from the back surface of the conveyor belt 43, depending on the operating environment, dirt may adhere to the conveying surface 43A, reducing the attraction force. Furthermore, dirt adhering to the conveying surface 43A may cause scratches on the surface of the workpiece W.

[0052] The processing apparatus 14 of this disclosure solves the above problems by employing a brush unit. The brush unit will now be described.

[0053] Figure 9 is a magnified view of the drive pulley, and Figure 10 is a view taken from the direction of arrow X in Figure 9. Two brush units 85 are positioned in the space between the conveyor belt 43 and the pool 34 so as to be in contact with the conveying surface 43A of the conveyor belt 43. Each brush unit 85 is fixed to a brush fixing plate 85B that extends in the X direction, at a position below the Z axis of the conveyor belt 43.

[0054] The brush fixing plate 85B supports two brush units 85 and is positioned in the X-axis direction. The brush fixing plate 85B is connected to height adjusters 85A at both ends. The height adjusters 85A extend in the Z-axis direction and are fixed to the first frame member 41A and the second frame member 41B. The height adjusters 85A are also provided with elongated holes for inserting fixing bolts, allowing for fine adjustment of their mounting position relative to the first frame member 41A and the second frame member 41B. This structure allows for adjustment of the strength of contact between the brush units 85 and the transport surface 43A.

[0055] The brush unit 85 is positioned opposite the magnetic belt 43B, which is located on the underside of the conveyor belt 43. The brush unit 85 cleans the conveying surface 43A of the conveyor belt 43, and in particular removes dirt from the conveying surface 43A that faces the magnetic belt 43B. This ensures that the workpiece W is securely attracted to the conveying surface 43A, enabling stable conveyance.

[0056] Returning to Figures 3-6, an auxiliary fixing mechanism 14F is provided at the center of the frame structure of the transport section 14B to reinforce the fixing of the workpiece W to the transport surface 43A. The auxiliary fixing mechanism 14F consists of two magnets 55, cylinders 56 that move the magnets 55 up and down in the Z-axis direction, and cylinder mounting plates 57 that fix the cylinders 56 to the first frame member 41A and the second frame member 41B.

[0057] The auxiliary fixing mechanism 14F corresponds to the area (spraying position Pos) partitioned by the chamber 44, which will be described later, and is positioned on the back side of the conveyor belt 43. When the cylinder 56 is fully extended, the magnet is closest to the back side of the conveyor belt 43 and is configured to exert magnetic attraction force toward the conveying surface 43A. On the other hand, when the cylinder 56 is retracted, the magnet 55 moves away from the conveyor belt 43, and the magnetic attraction force has almost no effect toward the conveying surface 43A.

[0058] The auxiliary fixing mechanism 14F attracts the workpiece W, which has been transported to the spraying position, from its underside, assisting in its fixation to the transport surface 43A. At the spraying position Pos, pressurized water M is sprayed onto the workpiece W from the nozzle head 63. At this time, a stronger pressure is applied to the workpiece W compared to during transport. At this time, the auxiliary fixing mechanism 14F reinforces the fixation, preventing the workpiece W from shifting on the transport surface 43A. At the spraying position Pos, the transport of the workpiece W is temporarily stopped and cleaning is performed. With the workpiece W fixed from the underside of the conveyor belt 43 by the magnet 55, the circulation of the conveyor belt 43 is also stopped, thus preventing friction between the workpiece W and the conveyor belt 43 and preventing damage to the workpiece W. After cleaning is completed, the cylinder 56 retracts. As a result, the fixation by the auxiliary fixing mechanism 14F is released, and the workpiece W is attracted only to the conveyor belt 43, and is transported in the Y-axis direction by the conveyor belt 43, which has resumed operation.

[0059] Next, the structure of the cleaning section 14C will be described. The cleaning section 14C consists of a cleaning unit 14E positioned on the upper beam and a chamber unit 14D positioned on the table 45 of the conveying section 14B. Figure 11 is a perspective view of the chamber unit 14D. The chamber unit 14D includes a chamber 44 and a chamber tilting mechanism 50 that can tilt and open / close the chamber 44.

[0060] The cleaning unit 14E includes a spray gun 61 with a nozzle head 63, an X-stage 48 for moving the spray gun 61 in the X direction, and a Y-stage 47 for moving it in the Y direction. The X-stage 48 is positioned on the second upper beam 46A. Furthermore, an X-guide 49 is positioned on the first upper beam 38. A Y-stage base 46B is placed between these two parallel upper beams. The Y-stage base 46B can be freely moved in the X direction by the X-stage 48. A Y-stage 47 is positioned on the Y-stage base 46B. The spray gun 61 is fixed to the Y-stage 47. With this configuration, the spray gun 61 can be moved independently in the X and Y directions. Pressurized water M can be sprayed over the entire workpiece W at the spraying position Pos while moving the spray gun 61.

[0061] On the other hand, the chamber 44 is formed in a rectangular cylindrical shape and is positioned to surround the workpiece W on all four sides at the spraying position Pos where pressurized water M is sprayed onto the workpiece W. In other words, the chamber 44 is configured to be large enough to completely enclose one of the workpieces W inside. The chamber 44 is fixed in the direction of circulation of the conveyor belt 43. That is, the area surrounded by the chamber 44 is the spraying position Pos, and the workpiece W that has moved to this position becomes the workpiece W to be processed.

[0062] Multiple sub-nozzles 83 are arranged on the inner wall 44A of the chamber. All of the sub-nozzles 83 are facing the workpiece W that has moved to the spraying position Pos. Various media can be sprayed from the sub-nozzles 83. In addition, pressurized water M is sprayed onto the workpiece W from the nozzle head 63 of the cleaning unit described later, and the tape T attached to the workpiece W is removed. The media sprayed from the sub-nozzles 83 may be the same as or different from the media (pressurized water M) sprayed from the nozzle head 63.

[0063] Table 45 is configured in a cross shape in plan view. In other words, its width in the X direction is widened in a certain area. This widened area of ​​table 45 in the X direction corresponds to the spraying position Pos of pressurized water M. Chamber 44 is configured to be wider than the conveyor belt 43 at the spraying position Pos. The portion of table 45 enclosed by the chamber 44 that extends beyond the conveyor belt 43 is provided with a waste port 45B for discharging wastewater and peeled tape T generated in the chamber 44 into pool 34. The waste port 45B is formed as a through-hole in table 45 located within the area enclosed by chamber 44 and outside the range of the conveyor belt 43. Wastewater and the like that that falls into pool 34 from the waste port 45B can be recovered from a drain port 34B provided at the bottom 34A of pool 34.

[0064] The outer wall 44B of the chamber 44 is provided with two shutters 81 that open and close vertically by a drive cylinder 80. The shutters 81 are positioned opposite each other on the outer wall 44B perpendicular to the circulation direction of the conveyor belt 43. The shutters 81 are formed to open and close openings (gaps) of similar size provided in the outer wall 44B. When the workpiece W is transported to the spraying position Pos, the shutters 81 are opened. When pressurized water M is sprayed at the spraying position Pos, the shutters 81 are closed. Then, when the cleaning is completed, the shutters 81 are opened again and the workpiece W is discharged.

[0065] Next, the chamber tilting mechanism 50 will be described. The chamber tilting mechanism 50 comprises a tilting shaft 50C fixed to the chamber 44 and a cylinder 50G for rotating the tilting shaft 50C. The tilting shaft 50C is inserted through and fixed to a shaft holder 50A provided on a bracket 44C extending to the rear of the chamber 44. The shaft holder 50A is mounted from two brackets 44C in a direction facing each other, with two bare cases 50B positioned in between.

[0066] The tilting shaft 50C is inserted through the shaft holder 50A and the bare case 50B, and is rotatable relative to the bare case 50B. The bare case 50B is fixed to the table 45, and in this configuration, when the tilting shaft 50C rotates, the chamber 44 tilts and opens relative to the table 45, with the bracket 44C as the pivot point.

[0067] Furthermore, a T-shaped bracket 50J for fixing the cylinder 50G is positioned on a support member 40B provided on the second frame member 41B. The cylinder 50G is fixed to the T-shaped bracket 50J using a pin 50H so that it can rotate in the Z-axis direction. The other end of the cylinder 50G is connected to the inclined shaft 50C via a fork 50E and a handle 50D.

[0068] The handle 50D is fixed to the tilt axis 50C and secured by a pin 50F so that it can rotate in the Z-axis direction while being held between the forks 50E. In this configuration, the reciprocating motion of the cylinder 50G is converted into rotational motion of the tilt axis 50C, causing the chamber 44 to tilt and open relative to the table 45.

[0069] In addition to the chamber tilting mechanism 50 and the belt tension adjustment mechanism 60, the processing device 14 employs a conveyor belt 43 with a built-in magnetic force, which makes it even easier to remove the conveyor belt 43.

[0070] The conveyor belt 43 has a magnetic belt 43B built into its underside that generates magnetic force, and this magnetic force securely attracts the workpiece W to the conveying surface 43A. As a result, the workpiece W does not shift during conveyance, and there is no need to provide guides on the edge of the conveyor belt 43. This configuration allows the conveyor belt 43 to be easily removed from the side.

[0071] Furthermore, by using the chamber tilting mechanism 50, the chamber 44 can be tilted relative to the table 45, thereby avoiding interference with the chamber 44 on the conveyor belt 43. In addition, the tension of the conveyor belt 43 can be relaxed by operating the adjustment screw 60G using the belt tension adjustment mechanism 60.

[0072] With the above configuration, the use of a conveyor belt 43 with built-in magnetism, and the combination of the chamber tilting mechanism 50 and the belt tension adjustment mechanism 60, allows the conveyor belt 43 to be easily removed from the side (X direction, i.e., the side where the chamber 44 is lifted), thereby improving the efficiency of maintenance work and reducing working time.

[0073] Figure 12 is an explanatory diagram showing the spray gun 61. Figure 13 is an enlarged view of the nozzle head 63. The spray gun 61 mainly comprises the following components: a nozzle head 63 for spraying pressurized water, and an oscillating rotation mechanism 61P for oscillating rotation of the nozzle head 63. Here, "oscillating rotation" refers to a complex rotational motion that combines the motion of the nozzle head 63 rotating around its axis (rotation) and the motion of the nozzle head 63's axis moving in a circular orbit (revolution).

[0074] As shown in Figure 12, the nozzle head 63 is held by a holder 61A. The holder 61A is box-shaped, and a rocking rotation mechanism 61P and a motor 61B that drives the rocking rotation mechanism 61P are arranged inside it. In addition, an upper opening and a lower opening are provided on one of the upper and lower surfaces of the holder 61A, respectively.

[0075] The oscillating rotation mechanism 61P is centered around a bearing member 61F located at the top opening inside the holder 61A. A hollow spindle 61G is supported on the bearing member 61F so as to be able to rotate vertically. A pressurized water pipe 61L is connected to the upper end of the spindle 61G via a rotary joint, and a pressurized water hose 62 is further connected to it. With this configuration, even when the spindle 61G rotates, the pressurized water pipe 61L and pressurized water hose 62 remain fixed.

[0076] The pressurized water hose 62 is connected to a pressurized water supply means such as an ultra-high pressure plunger pump, and supplies high-pressure pressurized water to the nozzle head 63. The appropriate water pressure for the pressurized water is preferably 30 to 100 MPa, and particularly optimal at 30 to 50 MPa. The water flow rate is preferably 15 to 25 liters / minute, and the distance between the nozzle head 63's discharge surface and the workpiece W is preferably 20 to 30 mm.

[0077] A disc-shaped eccentric plate 61J, having the same rotation axis 61M, is fixed to the lower end of the spindle 61G. The upper surface of this eccentric plate 61J is hollow and communicates with the spindle 61G to form a flow path for pressurized water. The sides of the eccentric plate 61J serve as balance weights to maintain rotational balance.

[0078] On the underside of the eccentric plate 61J, a nozzle pipe 61K is connected at a position on the eccentric axis 61N, which is offset from the rotation axis 61M of the spindle 61G. This nozzle pipe 61K is connected to the nozzle head 63 and plays a role in causing the nozzle head 63 to oscillate and rotate in an eccentric state.

[0079] A pulley 61D is attached to the lower end of the spindle 61G. A motor 61B is provided inside the holder 61A, and a timing belt 61E is stretched between a pulley 61C attached to the motor 61B and a pulley 61D on the spindle 61G. With this configuration, driving the motor 61B rotates the spindle 61G, causing the nozzle head 63 to oscillate and rotate via the eccentric plate 61J.

[0080] The nozzle head 63 is cylindrical, and multiple ejection nozzles 63A are formed on the ejection surface. In this embodiment, nine ejection nozzles 63A are arranged in a grid pattern.

[0081] In this configuration, the nozzle head 63 performs a complex oscillating rotation that combines rotational motion (on its axis) and circumferential motion (on its axis). This causes the trajectories of the pressurized water to overlap, increasing the collision density. Furthermore, by providing multiple ejection nozzles 63A, the collision density can be further increased, thereby improving the force that peels the tape T from the workpiece W.

[0082] Next, the method of using the processing device 14 will be described. Figure 14 is a flowchart showing the procedure for transporting and cleaning workpieces W using the processing device 14. The processing device 14 operates under the control of a controller (not shown). First, in step S10, the workpieces W are placed on the transport surface 43A of the conveyor belt 43. The workpieces W are placed one by one on the transport surface 43A by the supply device 12. At this time, the transport section 14B (belt conveyor) may be running or stopped. From the viewpoint of further suppressing damage to the workpieces W, it is preferable that the belt conveyor is stopped.

[0083] Next, in step S11, the workpiece W is transported to the spraying position Pos by the transport unit 14B (belt conveyor). The workpiece W is fixed in a predetermined position on the transport surface 43A by the magnetic force of the magnetic belt 43B. Therefore, it remains relatively stationary with respect to the conveyor belt 43 even during transport, suppressing the generation of scratches.

[0084] Next, in step S12, the operation of the belt conveyor is temporarily stopped. At this time, a sequence may be taken in which a new workpiece W is placed on the conveying surface 43A.

[0085] Next, in step S13, the gap between the chamber 44 and the conveyor belt 43 is closed by the shutter 81. Subsequently, in step S14, the fixing of the workpiece W is reinforced by the auxiliary fixing mechanism 14F. Specifically, the cylinder 56 extends and the magnet 55 approaches the back of the workpiece W, reinforcing the attraction force of the magnet belt 43B. Steps S12, S13, and S14 are performed when the workpiece W arrives at the spraying position. In this example, steps S12, S13, and S14 are performed in that order, but they do not have to be performed in this order; they may be performed in a different order or simultaneously. These may be performed as a cleaning preparation process, in an interrelated sequence.

[0086] Next, in step S15, pressurized water M (medium) is sprayed onto the workpiece W from the nozzle head 63 at the spraying position Pos. At this time, the X stage and Y stage may be operated to move the position of the nozzle head 63 while spraying.

[0087] Next, in step S16, the workpiece W is released from being fixed by the auxiliary fixing mechanism 14F. Specifically, the cylinder 56 retracts, the magnet 55 moves away from the conveyor belt 43, and the magnetic attraction is released. On the other hand, the magnetic belt 43B exerts an attractive force on the workpiece W, so the workpiece W remains stationary relative to the conveyor belt 43.

[0088] Next, in step S17, the shutter 81 opens, and the gap between the chamber 44 and the conveyor belt 43 is opened. Then, in step S18, the belt conveyor resumes operation, and the workpiece W is discharged from the spraying position.

[0089] Steps S16, S17, and S18 are performed when the workpiece W arrives at the spraying position. In this example, steps S16, S17, and S18 are performed in that order, but they do not have to be performed in this order; they may be performed in a different order or simultaneously. These may be performed as a related sequence of post-cleaning treatments.

[0090] This flow chart represents the processing flow for one workpiece W. In practice, this flow chart is executed for each workpiece W as it is transported sequentially. After the cleaning is complete, the workpiece W is transported to the drying device 20 and subjected to the next processing step. [Explanation of Symbols]

[0091] 10 Processing system, 14 Processing device, 14A Housing section, 14B Conveying section, 14C Washing section, 14D Chamber unit, 14E Washing unit, 14F Auxiliary fixing mechanism, 43 Conveyor belt, 43A Conveying surface, 43B Magnetic belt, 43C Joint section, 44 Chamber, 60 Belt tension adjustment mechanism, 61 Spray gun, 63 Nozzle head, 85 Brush unit

Claims

1. A processing device that transports a flat, magnetic workpiece while supporting it from one side on the conveying surface of a magnetic conveyor belt, and sequentially sprays a medium onto the other side.

2. The processing apparatus according to claim 1, wherein the magnetic conveyor belt comprises a conveyor belt body and magnets provided along the entire circulating direction of the conveyor belt body.

3. The apparatus according to claim 2, wherein the conveyor belt body has a structure formed by joining thin sheets of non-magnetic metal in the longitudinal direction to form a loop, and the joint portion is oblique to the circulation direction of the conveyor belt body.

4. At least two pulleys are configured to wind up the end of the magnetic conveyor belt and hold the magnetic conveyor belt stretched in a loop, The apparatus according to claim 2, further comprising a tension adjustment mechanism that moves the pulley in the circulation direction to adjust the tension of the magnetic conveyor belt.

5. At the spraying position of the aforementioned medium, a chamber surrounds a predetermined area on the conveying surface of the magnetic conveyor belt, The processing apparatus according to claim 4, further comprising an opening and closing mechanism that tilts and opens the chamber with one end of the magnetic conveyor belt in the width direction as a pivot point.

6. At an intermediate position in the circulation direction, and positioned at the spraying location of the medium, The processing apparatus according to claim 5, further comprising an auxiliary fixing mechanism for reinforcing the fixing of the workpiece to the transport surface when the medium is sprayed onto it.

7. The processing apparatus according to claim 6, further comprising the auxiliary fixing mechanism disposed on the back side of the magnetic conveyor belt, which magnetically attracts and holds the workpiece via the magnetic conveyor belt from the back side.

8. The apparatus according to claim 6 or 7, wherein the chamber is provided with a shutter that blocks the gap between it and the magnetic conveyor belt, and the blocking of the gap by the shutter and the reinforcement of the fixing to the workpiece by the auxiliary fixing mechanism are performed as an interrelated sequence.

9. A magnetic belt is positioned on the back surface of the magnetic conveyor belt and is formed in a loop shape along the circulation direction of the magnetic conveyor belt, The apparatus according to claim 1, comprising: a cleaning unit installed at a position opposite to the magnetic belt and fixed relative to the circulating conveying surface.

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