Frame structures and industrial robots

Abstract

The present invention provides an industrial robot equipped with a frame structure that suppresses the decrease in the relative positional accuracy of the guide rails, even if the frame becomes larger and its dimensional accuracy decreases. [Solution] The frame structure 5 for movably holding the robot body of an industrial robot includes guide rails 6-8 for guiding the robot body in the Y direction, a rail fixing plate 25 for fixing the guide rail 6, a frame 9 to which the rail fixing plate 25 and guide rails 7 and 8 are fixed, an adjustment screw for adjusting the position of the rail fixing plate 25 relative to the frame 9 in the X direction, and a fixing screw for fixing the rail fixing plate 25 to the frame 9. The rail fixing plate 25 is fixed to one end of the frame 9 in the Z direction, and the guide rails 7 and 8 are fixed to the other end of the frame 9 in the Z direction. Multiple adjustment screws and fixing screws are arranged at intervals in the Y direction.

Description

Technical Field

[0001] The present invention relates to a frame structure. Further, the present invention relates to an industrial robot.

Background Art

[0002] Conventionally, an industrial robot for transporting an object to be transported such as a semiconductor wafer has been known (see, for example, Patent Document 1). The industrial robot described in Patent Document 1 includes a transport unit that transports an object to be transported, three guide rails that guide the movement of the transport unit in the left - right direction, a frame that supports the three guide rails, and a support unit that holds the transport unit so as to be movable in the vertical direction. The frame is composed of a left frame member and a right frame member that are connected in a state of being arranged side by side in the left - right direction. The left frame member and the right frame member are formed in a rectangular frame shape composed of a right frame portion, a left frame portion, an upper frame portion, and a lower frame portion.

[0003] In the industrial robot described in Patent Document 1, two of the three guide rails are fixed to the lower frame portions of the left frame member and the right frame member, and the remaining one guide rail is fixed to the upper frame portions of the left frame member and the right frame member. The guide rail is composed of a left rail member, a central rail member, and a right rail member arranged side by side in the left - right direction. The left rail member is fixed to the left frame member, the right rail member is fixed to the right frame member, and the central rail member is fixed to the left frame member and the right frame member.

[0004] In the industrial robot described in Patent Document 1, the frame size is relatively large. Therefore, in the case of this industrial robot, after assembling the industrial robot at the assembly plant and performing various tests, the central rail member is removed from the left frame member and the right frame member, and the left frame member and the right frame member are separated before transporting the industrial robot. Furthermore, after transporting the industrial robot to the destination factory in this state, the left frame member and the right frame member are connected at the destination factory, and the central rail member is attached to the left frame member and the right frame member, and the industrial robot is reassembled. [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2024-49156 [Overview of the Initiative] [Problems that the invention aims to solve]

[0006] In the case of the industrial robot described in Patent Document 1, if the frame becomes larger (i.e., if the right frame member and the left frame member become larger), it may become difficult to ensure the dimensional accuracy of the frame. If the dimensional accuracy of the frame is not ensured, for example, the front-to-back position of the guide rail fixed to the lower frame and the guide rail fixed to the upper frame may be significantly misaligned, which may reduce the relative positional accuracy of the two guide rails. Furthermore, if the relative positional accuracy of the two guide rails is reduced, it may become difficult to properly guide the transport section in the left-to-right direction using the guide rails.

[0007] Therefore, the first object of the present invention is to provide a frame structure comprising a first guide rail and a second guide rail for linearly guiding a robot body for transporting an object in a predetermined first direction, and a frame to which the first guide rail and the second guide rail are attached, that can suppress a decrease in the relative positional accuracy between the first guide rail and the second guide rail even if the frame becomes larger and the dimensional accuracy of the frame decreases. Another object of the present invention is to provide an industrial robot equipped with such a frame structure.

[0008] Furthermore, in the case of the industrial robot described in Patent Document 1, after assembling the industrial robot at the assembly plant and performing various tests, the central rail member is removed and the left frame member and right frame member are separated before transporting the industrial robot. At the destination factory, the left frame member and right frame member are reconnected and the central rail member is attached to the left frame member and right frame member. Therefore, it is preferable that the state of the industrial robot at the assembly plant can be easily reproduced at the destination factory.

[0009] Therefore, a second object of the present invention is to provide a frame structure comprising a guide rail for linearly guiding a robot body for transporting an object in a predetermined first direction, and a frame to which the guide rail is attached, such that even when the guide rail and frame are disassembled after assembly at an assembly plant and transported to a destination factory, the state at the assembly plant can be easily reproduced at the destination factory. Another object of the present invention is to provide an industrial robot equipped with such a frame structure. [Means for solving the problem]

[0010] To solve the first problem described above, a frame structure according to one aspect of the present invention is a frame structure for movably holding a robot body for transporting an object, comprising a first guide rail and a second guide rail for linearly guiding the robot body in a predetermined first direction, a rail fixing plate to which the first guide rail is fixed, and a frame to which the rail fixing plate and the second guide rail are fixed, wherein the direction perpendicular to the first direction is defined as the second direction, and the direction perpendicular to the first and second directions is defined as the third direction, the frame structure comprises an adjustment member for adjusting the position of the rail fixing plate relative to the frame in the second direction, and a fixing member for fixing the rail fixing plate to the frame, wherein the rail fixing plate is fixed to one end of the frame in the third direction, the second guide rail is fixed to the other end of the frame in the third direction, and a plurality of adjustment members and fixing members are arranged at intervals in the first direction.

[0011] In this embodiment of the frame structure, the first guide rail is fixed to a rail fixing plate, and the rail fixing plate and the second guide rail are fixed to the frame. Furthermore, this embodiment of the frame structure is equipped with adjustment members for adjusting the position of the rail fixing plate relative to the frame in the second direction, and multiple adjustment members are arranged at intervals in the first direction. Therefore, in this embodiment, even if the frame becomes larger and the dimensional accuracy of the frame decreases, it is possible to suppress the decrease in relative positional accuracy between the first guide rail, which is fixed to one end of the frame in the third direction via the rail fixing plate, and the second guide rail, which is fixed to the other end of the frame in the third direction, by adjusting the position of the rail fixing plate relative to the frame using multiple adjustment members.

[0012] The frame structure of this embodiment can be used in an industrial robot that includes a robot body held by the frame structure and a drive mechanism for moving the robot body in a first direction relative to the frame structure. In this industrial robot, even if the frame becomes larger and the dimensional accuracy of the frame decreases, it is possible to suppress the decrease in the relative positional accuracy between the first guide rail, which is fixed to one end of the frame in a third direction via a rail fixing plate, and the second guide rail, which is fixed to the other end of the frame in a third direction.

[0013] Furthermore, in order to solve the second problem described above, a frame structure according to one aspect of the present invention is a frame structure for movably holding a robot body for transporting an object, comprising a plurality of guide rails for linearly guiding the robot body in a predetermined first direction, and a frame having a first frame member and a second frame member formed separately and adjacent in the first direction, and if the direction perpendicular to the first direction is defined as the second direction, and the direction perpendicular to the first and second directions is defined as the third direction, then comprising a plurality of first positioning mechanisms for positioning the first frame member and the second frame member in the second direction, and a second positioning mechanism for positioning the first frame member and the second frame member in the third direction, wherein the plurality of guide rails are in the third direction The guide rails are arranged at intervals, and each guide rail comprises a seventh rail member attached to a first frame member, an eighth rail member attached to a second frame member, and a ninth rail member positioned between the seventh and eighth rail members and attached to the first and second frame members. The first positioning mechanism comprises a first positioning part fixed to the first frame member and a second positioning part fixed to the second frame member and engaging with the first positioning part. The second positioning mechanism comprises a third positioning part fixed to the first frame member and a fourth positioning part fixed to the second frame member and engaging with the third positioning part. The plurality of first positioning mechanisms are arranged at intervals in the third direction.

[0014] The frame structure of this embodiment includes a plurality of first positioning mechanisms for positioning the first frame member and the second frame member in a second direction, and a plurality of second positioning mechanisms for positioning the first frame member and the second frame member in a third direction, wherein the plurality of first positioning mechanisms are arranged at intervals in the third direction. Therefore, in this embodiment, after the frame structure is assembled in the assembly plant, the plurality of first positioning mechanisms and second positioning mechanisms can be used to accurately position the first frame member and the second frame member in the second and third directions.

[0015] Therefore, in this embodiment, even if the frame structure is assembled at the assembly plant, and then the ninth rail member is removed from the first and second frame members, and the first frame member to which the seventh rail member is attached and the second frame member to which the eighth rail member is attached are separated, and the frame structure is transported to the destination factory, and then reassembled at the destination factory, the first positioning mechanism and the second positioning mechanism make it possible to easily reproduce the state of the frame structure at the assembly plant. As a result, in this embodiment, even if the guide rails and frame are disassembled after the frame structure is assembled at the assembly plant and then transported to the destination factory, it becomes possible to easily reproduce the state of the frame structure at the assembly plant at the destination factory.

[0016] The frame structure of this embodiment can be used in an industrial robot that includes a robot body held by the frame structure and a drive mechanism that moves the robot body in a first direction relative to the frame structure. In this industrial robot, even if the frame structure is assembled at an assembly plant and then the guide rails and frame are disassembled and transported to a destination factory, it becomes possible to easily reproduce the state of the frame structure at the assembly plant at the destination factory. [Effects of the Invention]

[0017] As described above, in one aspect of the present invention, in a frame structure including a first guide rail and a second guide rail for linearly guiding a robot body for transporting an object to be transported in a predetermined first direction, and a frame to which the first guide rail and the second guide rail are attached, even if the frame is enlarged and the dimensional accuracy of the frame decreases, it is possible to suppress a decrease in the relative positional accuracy between the first guide rail and the second guide rail.

[0018] Also, in one aspect of the present invention, in a frame structure including a guide rail for linearly guiding a robot body for transporting an object to be transported in a predetermined first direction, and a frame to which the guide rail is attached, even when the frame structure is assembled in an assembly factory and then the guide rail and the frame are disassembled and transported to a factory at the destination, it is possible to easily reproduce the state of the frame structure in the assembly factory at the factory at the destination.

Brief Description of the Drawings

[0019] [Figure 1] FIG. 1 is a perspective view of an industrial robot according to an embodiment of the present invention. [Figure 2] FIG. 2 is a front view of the state where the robot body is removed from the industrial robot shown in FIG. 1. [Figure 3] FIG. 3 is an enlarged perspective view of part E in FIG. 2. [Figure 4] FIG. 4 is an enlarged view of part E in FIG. 2. [Figure 5] FIG. 5A is an enlarged view of part F in FIG. 2, and FIG. 5B is an enlarged view of part G in FIG. 2. [Figure 6] FIG. 6 is an enlarged perspective view of part H in FIG. 2. [Figure 7] FIG. 7 is an enlarged view of part H in FIG. 2. [Figure 8] FIG. 8 is a plan view of the first positioning mechanism shown in FIG. 6. [Figure 9] FIG. 9 is a front view of the second positioning mechanism shown in FIG. 6. [Figure 10] FIG. 10 is an enlarged view of part J in FIG. 7. [Figure 11] Figure 11 is a cross-sectional view of the K-K cross-section of Figure 10. [Figure 12] Figure 12 is a cross-sectional view of the M-M cross-section of Figure 7. [Figure 13] Figure 13 is an enlarged view of part N of Figure 1. [Figure 14] Figure 14 is a perspective view of the state where a dial gauge is attached to the slider shown in Figure 2. [Figure 15] Figure 15 is a perspective view of the state where a dial gauge is attached to the slider shown in Figure 5B.

Embodiments for Carrying Out the Invention

[0020] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0021] (Overall Configuration of Industrial Robot) Figure 1 is a perspective view of an industrial robot 2 according to an embodiment of the present invention. Figure 2 is a front view of the state where the robot body 4 is removed from the industrial robot 2 shown in Figure 1.

[0022] The industrial robot 2 of this embodiment (hereinafter referred to as "robot 2") is a transfer robot that transfers the semiconductor wafer 3 which is an object to be transferred. The robot 2 is incorporated and used in a semiconductor manufacturing system. The robot 2 includes a robot body 4 for transferring the semiconductor wafer 3 and a frame structure 5 that holds the robot body 4 movably. The frame structure 5 of this embodiment is a large structure, and the robot 2 is a large robot.

[0023] In the following explanation, the X direction in Figure 1, etc., will be referred to as the "front-back direction," the Y direction in Figure 1, etc., which is perpendicular to the front-back direction, will be referred to as the "left-right direction," and the Z direction in Figure 1, etc., which is perpendicular to both the front-back and left-right directions, will be referred to as the "up-down direction." Furthermore, in the following explanation, one side of the front-back direction, the X1 direction side in Figure 1, etc., will be referred to as the "front" side, and the opposite side, the X2 direction side in Figure 1, etc., will be referred to as the "back" side, one side of the left-right direction, the Y1 direction side in Figure 1, etc., will be referred to as the "right" side, and the opposite side, the Y2 direction side in Figure 1, etc., will be referred to as the "left" side, one side of the up-down direction, the Z1 direction side in Figure 1, etc., will be referred to as the "up" side, and the opposite side, the Z2 direction side in Figure 1, etc., will be referred to as the "down" side. In this embodiment, the left-right direction (Y direction) is the first direction, the front-back direction (X direction) is the second direction, and the up-down direction (Z direction) is the third direction.

[0024] Robot 2 is positioned so that its vertical (Z-direction) and vertical directions coincide. The robot body 4 is movable in the left-right direction relative to the frame structure 5. The frame structure 5 includes multiple guide rails 6-8 for linearly guiding the robot body 4 in the left-right direction, and a frame 9 to which the guide rails 6-8 are attached. In this embodiment, the frame structure 5 is equipped with three guide rails 6-8.

[0025] In addition to the robot body 4 and frame structure 5, robot 2 includes a drive mechanism 10 for moving the robot body 4 in the left-right direction relative to the frame structure 5, sliders (guide blocks) 11-13 (see Figures 2 and 5B) that engage with guide rails 6-8 and are movable in the longitudinal direction of the guide rails 6-8, and slider fixing members 14 (see Figures 5B and 13) for fixing the sliders 11-13 to the frame 9.

[0026] The robot body 4 is a horizontally articulated robot and includes a hand 18 for holding semiconductor wafers 3 and an arm 19 to which the hand 18 is rotatably connected at its tip. The robot body 4 also includes an arm support 20 to which the base end of the arm 19 is rotatably connected, a lifting section 21 to which the arm support 20 is rotatably connected, and a holding frame 22 that holds the lifting section 21 so that it can move up and down. The robot body 4 also includes an arm drive mechanism for extending and retracting the arm 19, a rotation mechanism for rotating the arm support 20 relative to the lifting section 21, and a lifting mechanism for raising and lowering the lifting section 21 relative to the holding frame 22.

[0027] The retaining frame 22 is formed in a vertically elongated columnar shape. Multiple sliders 23 are fixed to the retaining frame 22, which engage with each of the guide rails 6 to 8 and are movable in the longitudinal direction of the guide rails 6 to 8. The drive mechanism 10 includes, for example, a belt, part of which is fixed to the lower end of the retaining frame 22, multiple pulleys over which the belt is stretched, and a motor that rotates the pulleys. The drive mechanism 10 moves the retaining frame 22 in the left-right direction relative to the frame structure 5. Note that the sliders 23 that engage with the guide rails 7 and 8 are not shown in the illustration.

[0028] (Overall structure of the frame) Figure 3 is an enlarged perspective view of section E in Figure 2. Figure 4 is an enlarged view of section E in Figure 2. Figure 5A is an enlarged view of section F in Figure 2, and Figure 5B is an enlarged view of section G in Figure 2. Figure 6 is an enlarged perspective view of section H in Figure 2. Figure 7 is an enlarged view of section H in Figure 2.

[0029] As described above, the frame structure 5 comprises three guide rails 6-8 and a frame 9. The frame 9 is formed as a rectangular frame overall. When viewed from the front or back, the outer shape of the frame 9 is rectangular with the left-right direction as the longer side. The guide rails 6-8 are formed as elongated straight lines in the left-right direction. The frame structure 5 includes a rail fixing plate 25 to which the guide rails 6 are fixed. The rail fixing plate 25 is formed as an elongated rectangular flat plate in the left-right direction.

[0030] The rail fixing plate 25 is fixed to the upper end of the frame 9. The guide rails 7 and 8 are fixed to the lower end of the frame 9. In other words, the rail fixing plate 25 and the guide rails 7 and 8 are fixed to the frame 9. Guide rail 6 is fixed to the upper end of the frame 9 via the rail fixing plate 25. Guide rail 7 is positioned above guide rail 8. The three guide rails 6 to 8 are positioned with a gap between them in the vertical direction. In this embodiment, guide rail 6 is the first guide rail, and guide rails 7 and 8 are the second guide rails.

[0031] Frame 9 comprises a right frame member 26 and a left frame member 27 adjacent to each other in the left-right direction. The right frame member 26 and the left frame member 27 are formed separately. In this embodiment, frame 9 is composed of the right frame member 26 and the left frame member 27. The right frame member 26 constitutes the right side of frame 9, and the left frame member 27 constitutes the left side of frame 9. In this embodiment, the right frame member 26 is the first frame member, and the left frame member 27 is the second frame member.

[0032] The right frame member 26 and the left frame member 27 are formed in a rectangular frame shape. The right frame member 26 includes an upper frame portion 26b that constitutes the upper end of the right frame member 26, a lower frame portion 26c that constitutes the lower end of the right frame member 26, a right frame portion 26d that constitutes the right end of the right frame member 26, and a left frame portion 26e that constitutes the left end of the right frame member 26. The left frame member 27 includes an upper frame portion 27b that constitutes the upper end of the left frame member 27, a lower frame portion 27c that constitutes the lower end of the left frame member 27, a right frame portion 27d that constitutes the right end of the left frame member 27, and a left frame portion 27e that constitutes the left end of the left frame member 27.

[0033] The right frame member 26 and the left frame member 27 are fixed to each other by a connecting member 30. The connecting member 30 is positioned at two locations: the lower ends of the right frame member 26 and the left frame member 27, and the upper ends of the right frame member 26 and the left frame member 27. When the right frame member 26 and the left frame member 27 are connected, the left side of the right frame member 26 and the right side of the left frame member 27 are in contact.

[0034] The rail fixing plate 25 comprises a right plate member 28 and a left plate member 29 that are adjacent to each other in the left-right direction. The right plate member 28 and the left plate member 29 are formed as separate parts. In this embodiment, the rail fixing plate 25 is composed of the right plate member 28 and the left plate member 29. The right plate member 28 constitutes the right side of the rail fixing plate 25, and the left plate member 29 constitutes the left side of the rail fixing plate 25. In this embodiment, the right plate member 28 is the first plate member, and the left plate member 29 is the second plate member.

[0035] The right plate member 28 and the left plate member 29 are formed in the shape of elongated rectangular flat plates in the left-right direction. The thickness direction of the right plate member 28 and the left plate member 29 coincides with the front-rear direction. The right plate member 28 is fixed to the front surface of the upper frame portion 26b of the right frame member 26. The left plate member 29 is fixed to the front surface of the upper frame portion 27b of the left frame member 27. The left end surface of the right plate member 28 and the right end surface of the left plate member 29 are in contact. Alternatively, a small gap is formed between the left end surface of the right plate member 28 and the right end surface of the left plate member 29.

[0036] The guide rail 6 is fixed to the front surface of the rail fixing plate 25. The vertical width of the guide rail 6 is narrower than the vertical width of the rail fixing plate 25. The guide rail 6 is fixed at an intermediate position on the rail fixing plate 25 in the vertical direction. The guide rail 6 comprises a right rail member 31 fixed to the right plate member 28, a left rail member 32 fixed to the left plate member 29, and a central rail member 33 positioned between the right rail member 31 and the left rail member 32. The central rail member 33 is fixed to the right plate member 28 and the left plate member 29.

[0037] Specifically, the right rail member 31 is attached to the right frame member 26 via the right plate member 28, the left rail member 32 is attached to the left frame member 27 via the left plate member 29, and the central rail member 33 is attached to the right frame member 26 and the left frame member 27 via the right plate member 28 and the left plate member 29. The guide rail 6 in this embodiment is composed of the right rail member 31, the left rail member 32, and the central rail member 33. The length of the central rail member 33 is significantly shorter than the lengths of the right rail member 31 and the left rail member 32.

[0038] The guide rail 7 is fixed to the front surfaces of the lower frame portion 26c of the right frame member 26 and the lower frame portion 27c of the left frame member 27. The guide rail 7 comprises a right rail member 34 fixed to the right frame member 26, a left rail member 35 fixed to the left frame member 27, and a central rail member 36 positioned between the right rail member 34 and the left rail member 35. The central rail member 36 is fixed to the right frame member 26 and the left frame member 27. In this embodiment, the guide rail 7 is composed of the right rail member 34, the left rail member 35, and the central rail member 36. The length of the central rail member 36 is significantly shorter than the lengths of the right rail member 34 and the left rail member 35.

[0039] Similar to the guide rail 7, the guide rail 8 is fixed to the front surfaces of the lower frame portion 26c of the right frame member 26 and the lower frame portion 27c of the left frame member 27. The guide rail 8 comprises a right rail member 37 fixed to the right frame member 26, a left rail member 38 fixed to the left frame member 27, and a central rail member 39 positioned between the right rail member 37 and the left rail member 38. The central rail member 39 is fixed to the right frame member 26 and the left frame member 27. In this embodiment, the guide rail 8 is composed of the right rail member 37, the left rail member 38, and the central rail member 39. The length of the central rail member 39 is significantly shorter than the lengths of the right rail member 37 and the left rail member 38.

[0040] Guide rail 6 is fixed to rail fixing plate 25 by multiple fixing screws arranged in the left-right direction. Guide rails 7 and 8 are fixed to lower frame portions 26c and 27c by multiple fixing screws arranged in the left-right direction. Screw placement holes are formed in guide rails 6 to 8, where some of the fixing screws are placed. These screw placement holes are elongated holes with the vertical direction as the longitudinal direction.

[0041] Therefore, it is possible to adjust the fixing position of the guide rail 6 to the rail fixing plate 25 in the vertical direction, and to adjust the fixing positions of the guide rails 7 and 8 to the frame 9 in the vertical direction. It is also possible to adjust the inclination of the guide rail 6 relative to the rail fixing plate 25 when viewed from the front and rear directions, and to adjust the inclination of the guide rail 7 relative to the frame 9 when viewed from the front and rear directions. However, in this embodiment, since the lower surface of the guide rail 8 contacts the stepped surface 9b formed on the frame 9 (described later), it is not possible to adjust the inclination of the guide rail 8 relative to the frame 9 when viewed from the front and rear directions.

[0042] In this configuration, the right rail member 31 is both the first rail member and the seventh rail member. The left rail member 32 is both the second rail member and the eighth rail member, and the central rail member 33 is both the third rail member and the ninth rail member. Furthermore, the right rail members 34 and 37 are both the fourth rail member and the seventh rail member, the left rail members 35 and 38 are both the fifth rail member and the eighth rail member, and the central rail members 36 and 39 are both the sixth rail member and the ninth rail member.

[0043] The frame structure 5 includes a first positioning mechanism 42 for positioning the right frame member 26 and the left frame member 27 in the front-rear direction, and a second positioning mechanism 43 for positioning the right frame member 26 and the left frame member 27 in the up-down direction. The frame structure 5 in this embodiment includes a plurality of first positioning mechanisms 42 and a plurality of second positioning mechanisms 43. Specifically, the frame structure 5 includes two first positioning mechanisms 42 and two second positioning mechanisms 43. The specific configurations of the first positioning mechanisms 42 and the second positioning mechanisms 43 will be described later.

[0044] Furthermore, the frame structure 5 includes an adjustment member 44 for adjusting the position of the rail fixing plate 25 relative to the frame 9 in the front-rear direction, and a fixing member 45 for fixing the rail fixing plate 25 to the frame 9 (see Figures 10 and 11). Specifically, the frame structure 5 includes an adjustment member 44 for adjusting the position of the right plate member 28 relative to the upper frame portion 26b in the front-rear direction, an adjustment member 44 for adjusting the position of the left plate member 29 relative to the upper frame portion 27b in the front-rear direction, a fixing member 45 for fixing the right plate member 28 to the upper frame portion 26b, and a fixing member 45 for fixing the left plate member 29 to the upper frame portion 27b.

[0045] In this embodiment, the adjustment member 44 is an adjustment screw, and the fixing member 45 is a fixing screw. Therefore, below, the adjustment member 44 will be referred to as "adjustment screw 44" and the fixing member 45 as "fixing screw 45". Multiple adjustment screws 44 and fixing screws 45 are arranged at intervals in the left-right direction. The adjustment screws 44 and fixing screws 45 are also arranged on both sides of the guide rail 6 in the up-down direction. The adjustment screws 44 are arranged adjacent to the fixing screws 45 in the left-right direction. In addition, adjustment screws 44 are arranged adjacent to both sides of the fixing screws 45 in the left-right direction.

[0046] The portion where two adjustment screws 44 and a fixing screw 45 are located adjacent to each other forms an adjustment and fixing section 46 for adjusting the position of the rail fixing plate 25 relative to the frame 9 in the front-rear direction and fixing the rail fixing plate 25 to the frame 9. The frame structure 5 in this embodiment includes 15 adjustment and fixing sections 46 located on the upper side of the guide rail 6 and 15 adjustment and fixing sections 46 located on the lower side of the guide rail 6. In other words, the frame structure 5 in this embodiment includes 60 adjustment screws 44 and 30 fixing screws 45.

[0047] The 15 adjustment and fixing parts 46 positioned on the upper side of the guide rail 6 and the 15 adjustment and fixing parts 46 positioned on the lower side of the guide rail 6 are spaced apart in the left-right direction and are arranged across the entire left-right range of the guide rail 6. Furthermore, the 15 adjustment and fixing parts 46 positioned on the upper side of the guide rail 6 and the 15 adjustment and fixing parts 46 positioned on the lower side of the guide rail 6 are located at the same position in the left-right direction. The specific configuration of the adjustment and fixing parts 46 will be described later.

[0048] The frame structure 5 includes a positioning member 47 for positioning the guide rail 6 relative to the rail fixing plate 25 in the vertical direction, and a positioning member 48 for positioning the guide rail 7 relative to the frame 9 in the vertical direction. The frame structure 5 in this embodiment includes two positioning members 47 and two positioning members 48. The lower surface of the guide rail 6 is in contact with the positioning member 47. The lower surface of the guide rail 7 is in contact with the positioning member 48. The frame 9 has a stepped surface 9b that is in contact with the lower surface of the guide rail 8.

[0049] The frame structure 5 includes a pressing mechanism 49 for pressing the guide rail 6 against the positioning member 47, a pressing mechanism 50 for pressing the guide rail 7 against the positioning member 48, and a pressing mechanism 51 for pressing the guide rail 8 against the stepped surface 9b. The frame structure 5 in this embodiment includes two pressing mechanisms 49, two pressing mechanisms 50, and two pressing mechanisms 51. The specific configurations of the positioning members 47 and 48, the stepped surface 9b, and the pressing mechanisms 49 to 51 will be described later.

[0050] (Configuration of the first positioning mechanism and the second positioning mechanism) Figure 8 is a plan view of the first positioning mechanism 42 shown in Figure 6. Figure 9 is a front view of the second positioning mechanism 43 shown in Figure 6.

[0051] As described above, the frame structure 5 comprises two first positioning mechanisms 42 and two second positioning mechanisms 43. The two first positioning mechanisms 42 are arranged with a gap between them in the vertical direction. One of the two first positioning mechanisms 42 is located at the upper end of the frame 9, and the other first positioning mechanism 42 is located at the lower end of the frame 9. In other words, the first positioning mechanisms 42 are located at both ends of the frame 9 in the vertical direction. The first positioning mechanism 42 located at the upper end of the frame 9 is located on the upper surface of the frame 9. The first positioning mechanism 42 located at the lower end of the frame 9 is located above the guide rail 7.

[0052] The two second positioning mechanisms 43 are arranged with a gap between them in the vertical direction. One of the two second positioning mechanisms 43 is located at the upper end of the frame 9, and the other second positioning mechanism 43 is located at the lower end of the frame 9. The second positioning mechanism 43 located at the upper end of the frame 9 is located at the upper ends of the left frame section 26e and the right frame section 27d, and is located below the upper frame section 26b and the upper frame section 27b. The second positioning mechanism 43 located at the lower end of the frame 9 is located above the first positioning mechanism 42 located at the lower end of the frame 9.

[0053] The first positioning mechanism 42 includes a first positioning portion 55 fixed to the right frame member 26 and a second positioning portion 56 fixed to the left frame portion 27 and engaging with the first positioning portion 55. The first positioning portion 55 of the first positioning mechanism 42, located at the upper end of the frame 9, is fixed to the left end of the upper surface of the upper frame portion 26b, and the second positioning portion 56 of the first positioning mechanism 42 is fixed to the right end of the upper surface of the upper frame portion 27b. The first positioning portion 55 of the first positioning mechanism 42, located at the lower end of the frame 9, is fixed to the front surface of the left frame portion 26e, and the second positioning portion 56 of the first positioning mechanism 42 is fixed to the front surface of the right frame portion 27d.

[0054] The second positioning mechanism 43 includes a third positioning part 57 fixed to the right frame member 26, and a fourth positioning part 58 fixed to the left frame part 27 and engaging with the third positioning part 57. The third positioning part 57 is fixed to the front surface of the left frame part 26e. The fourth positioning part 58 is fixed to the front surface of the right frame part 27d.

[0055] The first positioning section 55 is equipped with a cylindrical engagement pin 59 that rises upward. The second positioning section 56 is equipped with an engagement plate 60 in which an engagement groove 60b is formed. The engagement plate 60 is formed in a flat plate shape with the vertical direction as the thickness direction. When viewed from the vertical direction, the shape of the engagement groove 60b is U-shaped with the right side open. The width of the engagement groove 60b in the front-rear direction is approximately equal to the outer diameter of the engagement pin 59. A part of the engagement pin 59 is positioned in the engagement groove 60b.

[0056] The third positioning section 57 is equipped with a cylindrical engagement pin 61 that rises toward the front. The fourth positioning section 58 is equipped with an engagement plate 62 in which an engagement groove 62b is formed. The engagement plate 62 is formed in a flat plate shape with the front-rear direction as the thickness direction. When viewed from the front-rear direction, the shape of the engagement groove 62b is U-shaped with the right side open. The vertical width of the engagement groove 62b is approximately equal to the outer diameter of the engagement pin 61. A part of the engagement pin 61 is positioned in the engagement groove 62b.

[0057] (Configuration of the adjustment and fixing part) Figure 10 is an enlarged view of section J in Figure 7. Figure 11 is a cross-sectional view of section KK in Figure 10.

[0058] The adjustment screw 44 is a hex socket set screw. The fixing screw 45 is a hex socket bolt. The frame structure 5 in this embodiment is equipped with a hex socket nut 65 to prevent the adjustment screw 44 from rotating. The frame 9 has a screw hole 9c into which the fixing screw 45 engages. Specifically, the upper frame portions 26b and 27b have screw holes 9c. The rail fixing plate 25 has a screw hole 25b into which the adjustment screw 44 engages, a screw placement hole 25c into which part of the fixing screw 45 is placed, and a nut placement hole 25d into which the hex socket nut 65 is placed. Specifically, the right plate member 28 and the left plate member 29 have screw holes 25b, screw placement holes 25c, and nut placement holes 25d.

[0059] The screw placement holes 25c penetrate the rail fixing plate 25 in the front-to-back direction. The screw placement holes 25c are elongated holes with the vertical direction as their longitudinal direction. Therefore, in this embodiment, it is possible to adjust the position of the rail fixing plate 25 relative to the frame 9 in the vertical direction (i.e., the positions of the right plate member 28 and the left plate member 29 relative to the frame 9). It is also possible to adjust the inclination of the rail fixing plate 25 relative to the frame 9 when viewed from the front-to-back direction (i.e., the inclination of the right plate member 28 and the left plate member 29 relative to the frame 9).

[0060] The screw hole 25b is formed in the rear portion of the rail fixing plate 25. The nut placement hole 25d is formed in front of the screw hole 25b. The screw hole 25b and the nut placement hole 25d form a through hole that penetrates the rail fixing plate 25 in the front-to-back direction. The adjustment screw 44 is screwed into the screw hole 25b from the front. The tip (rear end) of the adjustment screw 44 is in contact with the frame 9. Specifically, the tip of the adjustment screw 44 is in contact with the front surfaces of the upper frame portions 26b and 27b. The socket head cap nut 65 is engaged with the front end of the adjustment screw 44. The rear end surface of the socket head cap nut 65 is in contact with the stepped surface formed at the boundary between the screw hole 25b and the nut placement hole 25d.

[0061] (Configuration of positioning member, stepped surface, and pressing mechanism) Figure 12 is a cross-sectional view of the MM section in Figure 7.

[0062] The positioning member 47 is formed in the shape of a rectangular parallelepiped that is elongated in the left-right direction. Two positioning members 47 are fixed to the front surface of the rail fixing plate 25. Specifically, one of the two positioning members 47 is fixed to the front surface of the left end portion of the right plate member 28, and the other positioning member 47 is fixed to the front surface of the right end portion of the left plate member 29. The positioning member 47 fixed to the front surface of the right plate member 28 is in contact with the lower surface of the left end portion of the right rail member 31 and the lower surface of the right end portion of the central rail member 33. The positioning member 47 fixed to the front surface of the left plate member 29 is in contact with the lower surface of the right end portion of the left rail member 32 and the lower surface of the left end portion of the central rail member 33.

[0063] The positioning member 48 is formed in the shape of a rectangular parallelepiped that is elongated in the left-right direction. One of the two positioning members 48 is fixed to the front surface of the left end portion of the lower frame portion 26c of the right frame member 26, and the other positioning member 48 is fixed to the front surface of the right end portion of the lower frame portion 27c of the left frame member 27. The positioning member 48 fixed to the front surface of the lower frame portion 26c is in contact with the lower surface of the left end portion of the right rail member 34 and the lower surface of the right end portion of the central rail member 36. The positioning member 48 fixed to the front surface of the lower frame portion 27c is in contact with the lower surface of the right end portion of the left rail member 35 and the lower surface of the left end portion of the central rail member 36.

[0064] The stepped surface 9b is a plane perpendicular to the vertical direction. The stepped surface 9b is formed over the entire area of ​​the lower frame portions 26c and 27c in the left-right direction. The entire lower surface of the guide rail 9 is in contact with the stepped surface 9b. That is, the entire lower surface of the right rail member 37, the entire lower surface of the left rail member 38, and the entire lower surface of the central rail member 39 are in contact with the stepped surface 9b.

[0065] The two pressing mechanisms 49 are attached to the front surface of the rail fixing plate 25. Specifically, one of the two pressing mechanisms 49 is attached to the front surface of the left end portion of the right plate member 28, and the other pressing mechanism 49 is attached to the front surface of the right end portion of the left plate member 29. The pressing mechanisms 49 are positioned above the guide rail 6. The pressing mechanisms 49 are positioned in the same position as the positioning member 47 in the left-right direction.

[0066] The pressing mechanism 49 includes a fixing member 66 fixed to the rail fixing plate 25, a contact member 67 positioned below the fixing member 66 and in contact with the upper surface of the guide rail 6, and a plurality of adjustment screws 68 that engage with screw holes 66b formed in the fixing member 66. This embodiment of the pressing mechanism 49 includes three adjustment screws 68. The three adjustment screws 68 are spaced apart in the left-right direction. The adjustment screws 68 are hex socket head screws.

[0067] The contact member 67 is fixed to the rail fixing plate 25 by a plurality of fixing screws 69 (see Figure 7) arranged in the left-right direction. The contact member 67 has screw arrangement holes formed therein, in which some of the fixing screws 69 are placed. These screw arrangement holes penetrate the contact member 67 in the front-to-back direction. Furthermore, these screw arrangement holes are elongated holes with the vertical direction as the longitudinal direction. Therefore, the fixing position of the contact member 67 relative to the rail fixing plate 25 can be adjusted in the vertical direction.

[0068] The screw hole 66b penetrates the fixing member 66 in the vertical direction. The adjustment screw 68 is screwed into the screw hole 66b from above. The tip (lower end) of the adjustment screw 68 is in contact with the upper surface of the contact member 67. The lower surface of the contact member 67 of the pressing mechanism 49 attached to the front of the right plate member 28 is in contact with the upper surface of the left end portion of the right rail member 31 and the upper surface of the right end portion of the central rail member 33. The lower surface of the contact member 67 of the pressing mechanism 49 attached to the front of the left plate member 29 is in contact with the upper surface of the right end portion of the left rail member 32 and the upper surface of the left end portion of the central rail member 33.

[0069] One of the two pressing mechanisms 50 is attached to the front of the left end portion of the lower frame 26c, and the other pressing mechanism 50 is attached to the front of the right end portion of the lower frame 27c. The pressing mechanisms 50 are positioned above the guide rail 7. The pressing mechanisms 50 are positioned in the same position as the positioning member 48 in the left-right direction. The pressing mechanism 50 is configured similarly to the pressing mechanism 49. The pressing mechanism 50 includes a fixing member 66 fixed to the lower frame portions 26c and 27c, a contact member 67 positioned below the fixing member 66 and in contact with the upper surface of the guide rail 7, and three adjustment screws 68.

[0070] The contact member 67 of the pressing mechanism 50 is fixed to the lower frame portions 26c and 27c by a plurality of fixing screws 69. Similar to the pressing mechanism 49, the fixing position of the contact member 67 relative to the lower frame portions 26c and 27c is adjustable in the vertical direction in the pressing mechanism 50. The tip (lower end) of the adjustment screw 68 is in contact with the upper surface of the contact member 67. The lower surface of the contact member 67 of the pressing mechanism 50, which is attached to the front of the lower frame portion 26c, is in contact with the upper surface of the left end portion of the right rail member 34 and the upper surface of the right end portion of the central rail member 36. The lower surface of the contact member 67 of the pressing mechanism 50, which is attached to the front of the lower frame portion 27c, is in contact with the upper surface of the right end portion of the left rail member 35 and the upper surface of the left end portion of the central rail member 36.

[0071] One of the two pressing mechanisms 51 is attached to the front of the left end portion of the lower frame 26c, and the other pressing mechanism 51 is attached to the front of the right end portion of the lower frame 27c. The pressing mechanism 51 is positioned above the guide rail 8. The pressing mechanism 51 is positioned in the same location as the pressing mechanism 50 in the left-right direction. The pressing mechanism 51 is configured similarly to the pressing mechanisms 49 and 50. The pressing mechanism 51 includes a fixing member 66 fixed to the lower frame portions 26c and 27c, a contact member 67 positioned below the fixing member 66 and in contact with the upper surface of the guide rail 8, and three adjustment screws 68.

[0072] The contact member 67 of the pressing mechanism 51 is fixed to the lower frame portions 26c and 27c by a plurality of fixing screws 69. Similar to the pressing mechanism 50, the fixing position of the contact member 67 relative to the lower frame portions 26c and 27c is adjustable in the vertical direction in the pressing mechanism 51. The tip (lower end) of the adjustment screw 68 is in contact with the upper surface of the contact member 67. The lower surface of the contact member 67 of the pressing mechanism 51, which is attached to the front of the lower frame portion 26c, is in contact with the upper surface of the left end portion of the right rail member 37 and the upper surface of the right end portion of the central rail member 39. The lower surface of the contact member 67 of the pressing mechanism 51, which is attached to the front of the lower frame portion 27c, is in contact with the upper surface of the right end portion of the left rail member 38 and the upper surface of the left end portion of the central rail member 39.

[0073] (Configuration of slider fixing member, and configuration related to the slider) Figure 13 is an enlarged view of section N in Figure 1. Figure 14 is a perspective view showing the dial gauge 76 attached to sliders 12 and 13 shown in Figure 2. Figure 15 is a perspective view showing the dial gauge 76 attached to slider 11 shown in Figure 5B.

[0074] As described above, robot 2 is equipped with sliders 11-13 in addition to slider 23 fixed to the holding frame 22 of the robot body 4. Robot 2 is also equipped with a slider fixing member 14. Slider 11 engages with guide rail 6. Slider 12 engages with guide rail 7. Slider 13 engages with guide rail 8. The slider fixing member 14 for fixing sliders 12 and 13 is detachably attached to the right end of the lower frame portion 26c by fixing screws 72. This slider fixing member 14 consists of a fixing portion 14b to which sliders 12 and 13 are fixed, and a fixed portion 14c that is fixed to the lower frame portion 26c by fixing screws 72. Sliders 12 and 13 are fixed to the fixing portion 14b by fixing screws 73.

[0075] A slider fixing member 14 for securing the slider 11 is detachably attached to the right end of the right plate member 28 by fixing screws. This slider fixing member 14 consists of a fixing part to which the slider 11 is fixed and a fixed part that is fixed to the right plate member 28. The slider 11 is fixed to the fixing part by fixing screws. The slider 11 is fixed to the upper frame part 26b via the right plate member 28.

[0076] Sliders 11-13 are used during the assembly and adjustment of robot 2, and once the assembly and adjustment of robot 2 is complete, they are fixed to the frame 9 by slider fixing members 14. Sliders 11-13, fixed by slider fixing members 14, are positioned outside the range of motion of the robot body 4 in the left-right direction. Dial gauges 76 can be attached to sliders 11-13 via dial gauge stands 75. During the assembly and adjustment of robot 2, the dial gauge stands 75 and dial gauges 76 are attached to sliders 11-13 as needed, and once the assembly and adjustment of robot 2 is complete, the dial gauge stands 75 and dial gauges 76 are removed from sliders 11-13.

[0077] During the assembly and adjustment of robot 2, the step difference between the right rail member 31 and the central rail member 33, and the step difference between the left rail member 32 and the central rail member 33 are measured by a dial gauge 76 attached to slider 11 (see Figure 15). Also during the assembly and adjustment of robot 2, the step difference between the right rail member 34 and the central rail member 36, and the step difference between the left rail member 35 and the central rail member 36 are measured by a dial gauge 76 attached to slider 12, and the step difference between the right rail member 37 and the central rail member 39, and the step difference between the left rail member 38 and the central rail member 39 are measured by a dial gauge 76 attached to slider 13 (see Figure 14).

[0078] (Method of assembling the frame structure) In this configuration, the robot 2 is assembled at an assembly plant and various tests are performed before the robot 2 is transported to the destination factory where it will actually be used. Before transporting the robot 2, the robot body 4 is removed from the frame structure 5, the central rail members 33, 36, and 39 are removed, and the right frame member 26 and the left frame member 27 are separated. After transporting the robot 2 in this state to the destination factory, the right frame member 26 and the left frame member 27 are connected, the central rail members 33, 36, and 39 are attached, and the robot body 4 is attached to the frame structure 5, and the robot 2 is reassembled and installed.

[0079] In the assembly plant, the guide rails 6-8, frame 9, and rail fixing plate 25 are assembled in the following procedure. First, the right frame member 26 and the left frame member 27 are connected. Specifically, the right frame member 26 and the left frame member 27 are connected using the lower frame sections 26c and 27c as references. After that, the guide rail 8 is fixed to the frame 9. That is, the right rail member 37, the left rail member 38, and the central rail member 39 are fixed to the lower frame sections 26c and 27c. At this time, the guide rail 8 is fixed with its lower surface pressed against the stepped surface 9b.

[0080] Next, the guide rail 7 is fixed to the frame 9. That is, the right rail member 34, the left rail member 35, and the central rail member 36 are fixed to the lower frame sections 26c and 27c. At this time, the guide rail 7 is fixed to the frame 9 so that the vertical distance between the guide rail 7 and the guide rail 8 is a predetermined distance, and the guide rail 7 and the guide rail 8 are parallel. Then, the two positioning members 48 are fixed to the lower frame sections 26c and 27c. At this time, the positioning members 48 are fixed with their upper surfaces pressed against the lower surfaces of the guide rail 7.

[0081] After that, the rail fixing plate 25, with the guide rail 6 temporarily fixed, is temporarily fixed to the frame 9. For example, the right plate member 28, with the right rail member 31 temporarily fixed, is temporarily fixed to the upper frame 26b, and the left plate member 29, with the left rail member 32 temporarily fixed, is temporarily fixed to the upper frame 27b, and then the central rail member 33 is temporarily fixed to the right plate member 28 and the left plate member 29. After that, the rail fixing plate 25 is permanently fixed to the frame 9, and the guide rail 6 is permanently fixed to the rail fixing plate 25.

[0082] When permanently fixing the guide rail 6 and rail fixing plate 25, the position of the rail fixing plate 25 relative to the frame 9 is adjusted using 60 adjustment screws 44 so that the vertical distance between the guide rail 6 and the guide rail 8 is a predetermined distance, the guide rail 6 and the guide rail 8 are parallel, and the guide rail 6 is not twisted or warped. After the adjustment with the adjustment screws 44 is completed, hex socket nuts 65 are attached. Then, the two positioning members 47 are fixed to the rail fixing plate 25. At this time, the positioning members 47 are fixed with their upper surfaces pressed against the lower surfaces of the guide rail 6.

[0083] Subsequently, the two first positioning mechanisms 42 and the two second positioning mechanisms 43 are attached to the frame 9. Specifically, the two first positioning units 55 and the two third positioning units 57 are fixed to the right frame member 26, while the two second positioning units 56 and the two fourth positioning units 58 are fixed to the left frame member 27. Before transporting the robot 2 to the destination factory, the central rail members 33, 36, and 39 are removed, and the right frame member 26 and the left frame member 27 are separated.

[0084] The right frame member 26, which is separated from the left frame member 27, has the right plate member 28, right rail members 31, 34, 37, positioning members 47, 48, first positioning section 55, and third positioning section 57 attached to it. The left frame member 27, which is separated from the right frame member 26, has the left plate member 29, left rail members 32, 35, 38, positioning members 47, 48, second positioning section 56, and fourth positioning section 58 attached to it.

[0085] At the destination factory, the frame structure 5 is assembled and installed in the following procedure. First, the right frame member 26 and the left frame member 27 are connected. At this time, the right frame member 26 and the left frame member 27 are positioned using two first positioning mechanisms 42 and two second positioning mechanisms 43. After that, the central rail members 33, 36, and 39 are fixed in place. At this time, the lower surface of the central rail member 33 is pressed against the upper surface of the positioning member 47, the lower surface of the central rail member 36 is pressed against the upper surface of the positioning member 48, and the lower surface of the central rail member 39 is pressed against the stepped surface 9b.

[0086] Specifically, the pressing mechanism 49 presses the lower surface of the central rail member 33 against the upper surface of the positioning member 47, the pressing mechanism 50 presses the lower surface of the central rail member 36 against the upper surface of the positioning member 48, and the pressing mechanism 51 presses the lower surface of the central rail member 39 against the stepped surface 9b. In this embodiment, with the fixing screw 69 loosened, the adjustment screw 68 is screwed into the screw hole 66b until the tip of the adjustment screw 68 contacts the upper surface of the contact member 67 with a predetermined contact pressure, and the lower surface of the contact member 67 contacts the upper surfaces of the guide rails 6 to 8 with a predetermined contact pressure.

[0087] Once the assembly of robot 2 is completed at the destination factory, dial gauge stands 75 and dial gauges 76 are attached to sliders 11-13. The dial gauge 76 attached to slider 11 is used to measure the step difference between the right rail member 31 and the central rail member 33, and the step difference between the left rail member 32 and the central rail member 33. The dial gauge 76 attached to slider 12 is used to measure the step difference between the right rail member 34 and the central rail member 36, and the step difference between the left rail member 35 and the central rail member 36. The dial gauge 76 attached to slider 13 is used to measure the step difference between the right rail member 37 and the central rail member 39, and the step difference between the left rail member 38 and the central rail member 39.

[0088] (Main effects of this form) As described above, in this embodiment, the guide rail 6 is fixed to the rail fixing plate 25, and the rail fixing plate 25 and guide rails 7 and 8 are fixed to the frame 9. In addition, in this embodiment, the frame structure 5 is equipped with adjustment screws 44 for adjusting the position of the rail fixing plate 25 relative to the frame 9 in the front-rear direction, and multiple adjustment screws 44 are arranged at intervals in the left-right direction, which is the longitudinal direction of the guide rail 6. Therefore, in this embodiment, even if the frame 9 is enlarged and the dimensional accuracy of the frame 9 decreases, it is possible to suppress the decrease in relative positional accuracy between the guide rail 6, which is fixed to the upper end of the frame 9 via the rail fixing plate 25, and the guide rails 7 and 8, which are fixed to the lower end of the frame 9, by adjusting the position of the rail fixing plate 25 relative to the frame 9 using multiple adjustment screws 44.

[0089] In this embodiment, the adjustment screws 44 and fixing screws 45 are positioned on both the vertical and horizontal sides of the guide rail 6. Therefore, in this embodiment, even if the dimensional accuracy of the frame 9 deteriorates, the position of the rail fixing plate 25 relative to the frame 9 can be adjusted using the multiple adjustment screws 44, thereby suppressing, for example, twisting or warping of the guide rail 6. Consequently, in this embodiment, it is possible to further suppress the deterioration of the relative positional accuracy between the guide rail 6 and the guide rails 7 and 8.

[0090] In this embodiment, the screw placement hole 25c is an elongated hole with the vertical direction as its longitudinal direction. Therefore, in this embodiment, it is possible to suppress the misalignment of the relative position between the guide rail 6 and the guide rails 7 and 8 in the vertical direction, and to ensure the parallelism between the guide rail 6 and the guide rails 7 and 8 when viewed from the front and rear directions. Consequently, in this embodiment, it is possible to effectively suppress the decrease in the relative positional accuracy between the guide rail 6 and the guide rails 7 and 8.

[0091] In this configuration, adjustment screws 44 are positioned adjacent to both sides of the fixing screw 45 in the left-right direction. Therefore, in this configuration, deformation of the rail fixing plate 25 when the fixing screw 45 is tightened into the screw hole 9c of the frame 9 can be suppressed.

[0092] In this embodiment, the frame structure 5 includes two first positioning mechanisms 42 for positioning the right frame member 26 and the left frame member 27 in the front-rear direction, and a second positioning mechanism 43 for positioning the right frame member 26 and the left frame member 27 in the up-down direction. The two first positioning mechanisms 42 are arranged with a gap between them in the up-down direction. Therefore, in this embodiment, after assembling the frame structure 5 at the assembly plant, the first positioning mechanisms 42 and the second positioning mechanisms 43 can be used to accurately position the right frame member 26 and the left frame member 27 in both the front-rear and up-down directions.

[0093] Therefore, in this embodiment, even if the frame structure 5 is assembled at the assembly plant, and the central rail members 33, 36, and 39 are removed from the right frame member 26 and the left frame member 27, and the right frame member 26 to which the right rail members 31, 34, and 37 are attached is separated from the left frame member 27 to which the left rail members 32, 35, and 38 are attached, the frame structure 5 is transported to the destination factory, and the frame structure 5 is reassembled at the destination factory, the first positioning mechanism 42 and the second positioning mechanism 43 make it easy to reproduce the state of the frame structure 5 at the assembly plant. As a result, in this embodiment, even if the guide rails 6-8 and the frame 9 are disassembled after the frame structure 5 is assembled at the assembly plant and then transported to the destination factory, the state of the frame structure 5 at the assembly plant can be easily reproduced at the destination factory.

[0094] In this embodiment, the first positioning mechanism 42 is positioned at both ends of the frame 9 in the vertical direction. Therefore, in this embodiment, the two first positioning mechanisms 42 make it possible to position the right frame member 26 and the left frame member 27 with greater precision in the front-to-back direction. Furthermore, in this embodiment, since the second positioning mechanism 43 is positioned at a distance from each other in the vertical direction, it is possible to position the right frame member 26 and the left frame member 27 with greater precision in the vertical direction.

[0095] In this embodiment, the robot 2 is equipped with sliders 11 to 13 that engage with guide rails 6 to 8. Therefore, in this embodiment, as described above, the step difference between the right rail member 31 and the central rail member 33, the step difference between the left rail member 32 and the central rail member 33, the step difference between the right rail member 34 and the central rail member 36, the step difference between the left rail member 35 and the central rail member 36, the step difference between the right rail member 37 and the central rail member 39, and the step difference between the left rail member 38 and the central rail member 39 can be easily measured using the dial gauge 76 attached to the sliders 11 to 13.

[0096] Furthermore, in this configuration, since the robot 2 is equipped with a slider fixing member 14 for fixing the sliders 11 to 13 to the frame 9, after the measurement of the step difference between the right rail member 31 and the central rail member 33 is completed, the sliders 11 to 13 can be fixed in place by the slider fixing member 14 in a position that does not interfere with the operation of the robot body 4.

[0097] (Other embodiments) The above-described embodiments are examples of preferred embodiments of the present invention, but are not limited thereto, and various modifications can be made without altering the essence of the invention.

[0098] In the above-described configuration, the rail fixing plate 25 may be fixed to the lower end of the frame 9, and the guide rails 7 and 8 may be fixed to the upper end of the frame 9. Also, in the above-described configuration, the frame structure 5 does not need to be equipped with a socket head nut 65. In this case, the adjustment screw 44 may be a socket head screw. Furthermore, in the above-described configuration, the adjustment screw 44 may be adjacent to only one side of the fixing screw 45 in the left-right direction, or the adjustment screw 44 and the fixing screw 45 may not be adjacent to each other in the left-right direction.

[0099] In the above-described configuration, the frame 9 may be composed of three or more frame members arranged in the left-right direction. For example, the frame 9 may be composed of a right frame member that constitutes the right side of the frame 9, a left frame member that constitutes the left side of the frame 9, and a central frame member positioned between the right frame member and the left frame member. In this case, for example, the rail fixing plate 25 is composed of a right plate member fixed to the right frame member, a left plate member fixed to the left frame member, and a central plate member fixed to the central frame member. Also in this case, for example, the guide rails 6 to 8 are composed of five rail members.

[0100] Furthermore, if the frame 9 is composed of a right frame member, a left frame member, and a central frame member, for example, the frame structure 5 includes a first positioning mechanism for positioning the right frame member and the central frame member in the front-rear direction, a first positioning mechanism for positioning the left frame member and the central frame member in the front-rear direction, a second positioning mechanism for positioning the right frame member and the central frame member in the up-down direction, and a second positioning mechanism for positioning the left frame member and the central frame member in the up-down direction.

[0101] In the above-described configuration, the adjustment screw 44 and fixing screw 45 may be located only on the upper side of the guide rail 6, or they may be located only on the lower side of the guide rail 6. Also, in the above-described configuration, the screw placement hole 25c does not have to be an elongated hole. Furthermore, in the above-described configuration, the frame structure 5 may have one or more additional guide rails in addition to the three guide rails 6-8. Also, in the above-described configuration, the frame structure 5 does not have to have guide rail 7 or guide rail 8.

[0102] In the above-described configuration, the frame 9 may be composed of a single component. In this case, the rail fixing plate 25 may be composed of a single component, or at least one of the guide rails 6 to 8 may be composed of a single component. Furthermore, in the above-described configuration, the frame structure 5 may be equipped with only one second positioning mechanism 43, or only one first positioning mechanism 42. Moreover, in the above-described configuration, the frame structure 5 may not be equipped with a first positioning mechanism 42, nor may it be equipped with a second positioning mechanism 43.

[0103] In the above-described configuration, the frame structure 5 does not need to be equipped with rail fixing plates 25. In this case, the guide rails 6 are fixed to the front surfaces of the upper frame portions 26b and 27b. Also, in the above-described configuration, the robot 2 does not need to be equipped with sliders 11 to 13. In this case, the robot 2 does not have slider fixing members 14. Furthermore, in the above-described configuration, the object to be transported by the robot 2 may be something other than semiconductor wafers 3. Also, in the above-described configuration, the robot 2 may be installed with its Z-direction tilted relative to the vertical direction.

[0104] (Configuration of this technology) Furthermore, this technology can be configured as follows: (1) A frame structure that movably holds the robot body for transporting objects, The robot body comprises a first guide rail and a second guide rail for linearly guiding the robot body in a predetermined first direction, a rail fixing plate to which the first guide rail is fixed, and a frame to which the rail fixing plate and the second guide rail are fixed, If we define the direction perpendicular to the first direction as the second direction, and the direction perpendicular to both the first and second directions as the third direction, The system includes an adjustment member for adjusting the position of the rail fixing plate relative to the frame in the second direction, and a fixing member for fixing the rail fixing plate to the frame. The rail fixing plate is fixed to one end of the frame in the third direction, The second guide rail is fixed to the other end of the frame in the third direction, The frame structure is characterized in that the adjusting member and the fixing member are arranged in multiple quantities at intervals in the first direction. (2) The frame structure according to (1), characterized in that the adjusting member and the fixing member are arranged on both sides of the first guide rail in the third direction. (3) The adjustment member is an adjustment screw, The aforementioned fixing member is a fixing screw, The frame has screw holes formed in which the fixing screws engage. The rail fixing plate is formed with screw holes into which the adjustment screws engage and screw placement holes into which a portion of the fixing screws are positioned. The frame structure according to (1) or (2), characterized in that the tip of the adjustment screw is in contact with the frame. (4) The frame structure according to (3), characterized in that the adjustment screw is arranged adjacent to the fixing screw in the first direction. (5) The frame structure according to (4), characterized in that the adjustment screws are arranged adjacent to both sides of the fixing screw in the first direction. (6) The frame structure according to any one of (3) to (5), characterized in that the screw placement holes are elongated holes with the third direction as the longitudinal direction. (7) The frame comprises a first frame member and a second frame member that are formed separately and are adjacent to each other in the first direction, The rail fixing plate is formed separately and comprises a first plate member and a second plate member adjacent to each other in the first direction. The first plate member is fixed to the first frame member, The second plate member is fixed to the second frame member, The first guide rail comprises a first rail member fixed to the first plate member, a second rail member fixed to the second plate member, and a third rail member positioned between the first rail member and the second rail member and fixed to the first plate member and the second plate member. The frame structure according to any one of (1) to (6), characterized in that the second guide rail comprises a fourth rail member fixed to the first frame member, a fifth rail member fixed to the second frame member, and a sixth rail member disposed between the fourth rail member and the fifth rail member and fixed to the first frame member and the second frame member. (8) A frame structure that movably holds the robot body for transporting objects, The robot body comprises a plurality of guide rails for linearly guiding the robot body in a predetermined first direction, and a frame formed separately and having a first frame member and a second frame member adjacent to each other in the first direction, If we define the direction perpendicular to the first direction as the second direction, and the direction perpendicular to both the first and second directions as the third direction, The system comprises a plurality of first positioning mechanisms for positioning the first frame member and the second frame member in the second direction, and a second positioning mechanism for positioning the first frame member and the second frame member in the third direction. Multiple guide rails are arranged at intervals in the third direction. The guide rail comprises a seventh rail member attached to the first frame member, an eighth rail member attached to the second frame member, and a ninth rail member positioned between the seventh rail member and the eighth rail member and attached to the first frame member and the second frame member. The first positioning mechanism comprises a first positioning portion fixed to the first frame member and a second positioning portion fixed to the second frame member and engaging with the first positioning portion. The second positioning mechanism comprises a third positioning portion fixed to the first frame member and a fourth positioning portion fixed to the second frame member and engaging with the third positioning portion. A frame structure characterized in that the plurality of first positioning mechanisms are arranged at intervals in the third direction. (9) The frame structure according to (8), characterized in that the first positioning mechanism is arranged at both ends of the frame in the third direction. (10) The frame structure according to (8) or (9), characterized by comprising a plurality of the second positioning mechanisms arranged at intervals in the third direction. (11) An industrial robot comprising a frame structure as described in any of (1) to (7), a robot body held by the frame structure, and a drive mechanism for moving the robot body in a first direction relative to the frame structure. An industrial robot comprising a frame structure as described in any of (12)(8) to (10), a robot body held by the frame structure, and a drive mechanism for moving the robot body in a first direction relative to the frame structure. (13) The industrial robot according to (12), characterized by comprising a slider that engages with the guide rail and is movable in the longitudinal direction of the guide rail, and a slider fixing member for fixing the slider to the frame.

[0105] In this technology, it is preferable that the adjustment member and the fixing member are arranged on both sides of the first guide rail in the third direction. With this configuration, even if the dimensional accuracy of the frame decreases, the position of the rail fixing plate relative to the frame can be adjusted by the multiple adjustment members, thereby suppressing, for example, twisting or warping of the first guide rail. Therefore, it becomes possible to further suppress the decrease in the relative positional accuracy between the first guide rail and the second guide rail.

[0106] In this technology, for example, the adjustment member is an adjustment screw, the fixing member is a fixing screw, the frame has screw holes formed in which the fixing screws engage, and the rail fixing plate has screw holes formed in which the adjustment screws engage and screw placement holes in which a part of the fixing screws are placed, and the tip of the adjustment screw is in contact with the frame. In this case, it becomes possible to adjust the position of the rail fixing plate relative to the frame in a second direction with a relatively simple configuration, and to fix the rail fixing plate to the frame.

[0107] In this technology, for example, the adjustment screw is positioned adjacent to the fixing screw in the first direction. In this case, it is preferable that the adjustment screws are positioned adjacent to both sides of the fixing screw in the first direction. With this configuration, it is possible to suppress deformation of the rail fixing plate when the fixing screw is tightened into the screw hole of the frame.

[0108] In this technology, the screw placement holes are preferably elongated holes with the third direction as the longitudinal direction. With this configuration, it is possible to suppress the misalignment of the relative positions of the first guide rail and the second guide rail in the third direction, and to ensure the parallelism between the first guide rail and the second guide rail when viewed from the second direction. Therefore, it is possible to effectively suppress the decrease in the relative positional accuracy between the first guide rail and the second guide rail.

[0109] In this technology, it is preferable that the frame comprises a first frame member and a second frame member which are formed separately and adjacent in a first direction, the rail fixing plate comprises a first plate member and a second plate member which are formed separately and adjacent in a first direction, the first plate member is fixed to the first frame member, the second plate member is fixed to the second frame member, the first guide rail comprises a first rail member which is fixed to the first plate member, a second rail member which is fixed to the second plate member, and a third rail member which is positioned between the first rail member and the second rail member and fixed to the first plate member and the second plate member, and the second guide rail comprises a fourth rail member which is fixed to the first frame member, a fifth rail member which is fixed to the second frame member, and a sixth rail member which is positioned between the fourth rail member and the fifth rail member and fixed to the first frame member and the second frame member.

[0110] With this configuration, the third and sixth rail members can be removed from the first and second frame members, and the frame structure can be transported with the first frame member, to which the first rail member, first plate member, and fourth rail member are fixed, separated from the second frame member, to which the second rail member, second plate member, and fifth rail member are fixed. Therefore, even if the frame and other components become larger and the frame structure becomes larger, the frame structure can be easily transported.

[0111] In this technology, it is preferable that the first positioning mechanism is located at both ends of the frame in the third direction. With this configuration, the two first positioning mechanisms enable more precise positioning of the first frame member and the second frame member in the second direction.

[0112] In this technology, the frame structure preferably includes a plurality of second positioning mechanisms arranged at intervals in the third direction. With this configuration, the plurality of second positioning mechanisms make it possible to position the first frame member and the second frame member with greater precision in the third direction.

[0113] In this technology, the industrial robot includes, for example, a slider that engages with a guide rail and is movable in the longitudinal direction of the guide rail, and a slider fixing member for fixing the slider to the frame. In this case, for example, a dial gauge attached to the slider makes it easy to measure the step difference between the 7th rail member and the 9th rail member, and the step difference between the 8th rail member and the 9th rail member. In this case, after measuring the step difference between the 7th rail member and the 9th rail member, and the step difference between the 8th rail member and the 9th rail member, the slider can be fixed in place by the slider fixing member so as not to interfere with the operation of the robot body. [Explanation of Symbols]

[0114] 2. Robots (Industrial Robots) 3. Semiconductor wafers (objects to be transported) 4. Robot body 5 Frame structure 6 Guide rail (first guide rail) 7, 8 Guide rail (second guide rail) 9 frames 9c screw hole 10 Drive mechanism 11-13 Sliders 14 Slider fixing member 25 Rail fixing plate 25b Screw hole 25c Screw placement holes 26 Right frame member (first frame member) 27 Left frame member (second frame member) 28 Right plate member (first plate member) 29 Left plate member (second plate member) 31 Right rail member (1st rail member, 7th rail member) 32 Left rail member (2nd rail member, 8th rail member) 33. Central rail members (third rail member, ninth rail member) 34, 37 Right rail members (4th rail member, 7th rail member) 35, 38 Left rail members (5th rail member, 8th rail member) 36, 39 Central rail members (6th rail member, 9th rail member) 42 First positioning mechanism 43. Second positioning mechanism 44. Adjustment screw (adjustment component) 45. Fixing screws (fixing components) 55 First positioning section 56 Second positioning section 57 Third positioning section 58 Fourth positioning section X 2nd direction Y First direction Z 3rd direction

Claims

1. A frame structure that movably holds the robot body for transporting objects, The robot body comprises a first guide rail and a second guide rail for linearly guiding the robot body in a predetermined first direction, a rail fixing plate to which the first guide rail is fixed, and a frame to which the rail fixing plate and the second guide rail are fixed, If we define the direction perpendicular to the first direction as the second direction, and the direction perpendicular to both the first and second directions as the third direction, The system includes an adjustment member for adjusting the position of the rail fixing plate relative to the frame in the second direction, and a fixing member for fixing the rail fixing plate to the frame. The rail fixing plate is fixed to one end of the frame in the third direction, The second guide rail is fixed to the other end of the frame in the third direction, The frame structure is characterized in that the adjusting member and the fixing member are arranged in multiple quantities at intervals in the first direction.

2. The frame structure according to claim 1, characterized in that the adjusting member and the fixing member are arranged on both sides of the first guide rail in the third direction.

3. The adjustment member is an adjustment screw, The aforementioned fixing member is a fixing screw, The frame has screw holes formed in which the fixing screws engage. The rail fixing plate is formed with screw holes into which the adjustment screws engage and screw placement holes into which a portion of the fixing screws are positioned. The frame structure according to claim 1 or 2, characterized in that the tip of the adjustment screw is in contact with the frame.

4. The frame structure according to claim 3, characterized in that the adjustment screw is arranged adjacent to the fixing screw in the first direction.

5. The frame structure according to claim 4, characterized in that the adjustment screws are arranged adjacent to both sides of the fixing screw in the first direction.

6. The frame structure according to claim 3, characterized in that the screw placement holes are elongated holes with the third direction as the longitudinal direction.

7. The frame comprises a first frame member and a second frame member that are formed separately and are adjacent to each other in the first direction. The rail fixing plate is formed separately and comprises a first plate member and a second plate member adjacent to each other in the first direction. The first plate member is fixed to the first frame member, The second plate member is fixed to the second frame member, The first guide rail comprises a first rail member fixed to the first plate member, a second rail member fixed to the second plate member, and a third rail member positioned between the first rail member and the second rail member and fixed to the first plate member and the second plate member. The frame structure according to claim 1 or 2, characterized in that the second guide rail comprises a fourth rail member fixed to the first frame member, a fifth rail member fixed to the second frame member, and a sixth rail member disposed between the fourth rail member and the fifth rail member and fixed to the first frame member and the second frame member.

8. A frame structure that movably holds the robot body for transporting objects, The robot body comprises a plurality of guide rails for linearly guiding the robot body in a predetermined first direction, and a frame formed separately and having a first frame member and a second frame member adjacent to each other in the first direction, If we define the direction perpendicular to the first direction as the second direction, and the direction perpendicular to both the first and second directions as the third direction, The system comprises a plurality of first positioning mechanisms for positioning the first frame member and the second frame member in the second direction, and a second positioning mechanism for positioning the first frame member and the second frame member in the third direction. Multiple guide rails are arranged at intervals in the third direction. The guide rail comprises a seventh rail member attached to the first frame member, an eighth rail member attached to the second frame member, and a ninth rail member positioned between the seventh rail member and the eighth rail member and attached to the first frame member and the second frame member. The first positioning mechanism comprises a first positioning portion fixed to the first frame member and a second positioning portion fixed to the second frame member and engaging with the first positioning portion. The second positioning mechanism comprises a third positioning portion fixed to the first frame member and a fourth positioning portion fixed to the second frame member and engaging with the third positioning portion. A frame structure characterized in that the plurality of first positioning mechanisms are arranged at intervals in the third direction.

9. The frame structure according to claim 8, characterized in that the first positioning mechanism is arranged at both ends of the frame in the third direction.

10. The frame structure according to claim 8 or 9, characterized by comprising a plurality of the second positioning mechanisms arranged at intervals in the third direction.

11. An industrial robot comprising a frame structure according to claim 1 or 2, a robot body held by the frame structure, and a drive mechanism for moving the robot body in a first direction relative to the frame structure.

12. An industrial robot comprising a frame structure according to claim 8 or 9, a robot body held by the frame structure, and a drive mechanism for moving the robot body in a first direction relative to the frame structure.

13. The industrial robot according to claim 12, further comprising a slider that engages with the guide rail and is movable in the longitudinal direction of the guide rail, and a slider fixing member for fixing the slider to the frame.

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