Sensor device and method for manufacturing a sensor device

Abstract

The temperature gradient between the two pressure sensors during heating by the heater is defined as the desired temperature gradient. [Solution] The bracket 80 of the sensor device 10 is formed in a cup shape and houses the sensor head 30 and heater 50 with the pressure sensing pipe 40 passing through it. The bracket 80 has bracket members 81 and 82 facing each other in the left-right direction, sandwiching the pressure sensing pipe 40. Bracket member 81 has a plurality of openings 81AB and 81BB that are opened with an opening ratio A1. Bracket member 82 has a plurality of openings 82AB and 82BB that are opened with an opening ratio A2 different from the opening ratio A1.

Description

Technical Field

[0001] The present invention relates to a sensor device such as a vacuum gauge and a method for manufacturing the sensor device.

Background Art

[0002] As disclosed in Patent Document 1, a sensor device (vacuum gauge) for measuring the pressure of a gas is known. Such a sensor device includes a pressure sensor and a heater for heating the pressure sensor.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The measurement range of pressure measurement of the sensor device is determined. Therefore, when pressure measurement over a wider range is required, a plurality of sensor devices with different measurement ranges are used in combination. Also, for ensuring redundancy in case the pressure sensor fails, it is conceivable to use in combination a plurality of sensor devices having the same measurement range. The combined use of a plurality of sensor devices results in poor space efficiency of the installation space, and improvement thereof is desired. For example, in semiconductor manufacturing equipment, a compact pressure adjustment chamber tends to be adopted, and improvement of the above space efficiency is important. For improving the space efficiency, it is conceivable to mount at least two pressure sensors on one sensor device. In such a case, the temperature gradient between the two pressure sensors heated by the heater may not become the desired temperature gradient. For example, the two pressure sensors are not heated evenly, and a temperature gradient occurs between the two pressure sensors. For example, a temperature gradient = ࡨ is not obtained as the desired temperature gradient.

[0005] The present invention aims to achieve a desired temperature gradient between two pressure sensors during heating by a heater. [Means for solving the problem]

[0006] The sensor device according to this invention comprises a sensor head including a first pipe extending in a first direction, a first pressure sensor fixed to a first end of the first pipe, and a second pressure sensor fixed to a second end of the first pipe different from the first end; a second pipe extending in a second direction different from the first direction and connected to the middle of the first pipe, which guides the pressure of the fluid to be measured to the first pressure sensor and the second pressure sensor via the first pipe; a heater for heating the first pressure sensor and the second pressure sensor; and a cup-shaped bracket having a bottom that contacts the second pipe when it passes through it, which houses the sensor head and the heater, wherein the bracket has a first part and a second part that face each other across the second pipe in the first direction, the first part has a first heat dissipation property, and the second part has a second heat dissipation property different from the first heat dissipation property.

[0007] Furthermore, the method for manufacturing the sensor device according to this invention comprises a sensor head including a first pipe extending in a first direction, a first pressure sensor fixed to a first end of the first pipe, and a second pressure sensor fixed to a second end of the first pipe different from the first end; a second pipe extending in a second direction different from the first direction and connected to the middle of the first pipe, which guides the pressure of the fluid to be measured to the first pressure sensor and the second pressure sensor via the first pipe; a heater for heating the first pressure sensor and the second pressure sensor; and a cup-shaped bracket having a bottom that contacts the second pipe when it passes through it, which houses the sensor head and the heater, wherein the bracket has a first part and a second part that face each other across the second pipe in the first direction, the first part having first heat dissipation properties, and the second part having second heat dissipation properties. [Effects of the Invention]

[0008] According to the present invention, the temperature gradient between the two pressure sensors during heating by the heater becomes a desired temperature gradient. [Brief explanation of the drawing]

[0009] [Figure 1] This is an exploded perspective view of a sensor device relating to one embodiment of the present invention. [Figure 2] This is an exploded perspective view of the sensor section of the sensor device. [Figure 3] This is an exploded perspective view of the heater covering the sensor head of the sensor unit. [Figure 4] This is a schematic cross-sectional view of the sensor device, showing only the cut end face of the sensor head's interior. [Figure 5] This is a schematic cross-sectional view of the sensor device. [Figure 6] This diagram shows how the bracket is screwed onto the housing of the control unit of the sensor device. [Figure 7] This diagram shows how the bracket is rotated relative to the housing of the sensor device's control unit before being screwed in. [Figure 8] This is a flowchart showing the manufacturing method of a sensor device. [Modes for carrying out the invention]

[0010] (Summary of the embodiment) The inventors of this invention have found the following: First, by using a dual number of pressure sensors in a sensor device (e.g., a vacuum gauge), the overall size can be reduced compared to multiple sensor devices each equipped with a single pressure sensor. In a sensor device with dual pressure sensors, the sensor head includes a first pipe extending in a first direction, and first and second pressure sensors fixed to both ends of this first pipe, respectively. Furthermore, a second pipe is connected to the first pipe to guide the pressure of the fluid to be measured to the first and second pressure sensors via the first pipe. For the heater that heats the first and second pressure sensors, miniaturization of the sensor device can be promoted by, for example, making it a shared, integrated unit or by using a simple installation structure. However, due to the structure of a sensor device with dual pressure sensors, a trade-off occurs in that the heating balance between the first and second pressure sensors tends to be poor. To resolve this trade-off, the inventors focused on the use of a bracket around the heater and adjusted the heat dissipation of this bracket for each part of the bracket to adjust the temperature gradient between the two pressure sensors during heating. The bracket is generally formed in a mesh shape consisting of multiple openings. The heat dissipation performance is adjusted, for example, by the ratio of the openings.

[0011] (Details of the embodiment) The embodiments of the present invention will now be described in detail with reference to the drawings. In this embodiment, mutually orthogonal vertical, horizontal, and front-to-back directions are defined, but these directions are not intended to indicate the mounting direction of the sensor device. For example, the vertical direction may coincide with the horizontal direction depending on the orientation of the sensor device 10. Also, in the drawings, in cases where multiple elements have similar functions, only some of them may be given reference numerals.

[0012] The sensor device 10 shown in Figure 1 is connected to piping connected to a pressure adjustment chamber (e.g., a vacuum chamber) in semiconductor manufacturing equipment, and is configured as a diaphragm vacuum gauge that measures the pressure of the fluid to be measured (e.g., the atmospheric pressure of a process gas) introduced into the piping from the pressure adjustment chamber using a diaphragm that receives this pressure.

[0013] The sensor device 10 includes a sensor unit 20 that detects the pressure of the fluid to be measured by converting the pressure of the fluid to be measured into an electric signal and outputs the detected pressure, that is, the electric signal indicating the pressure, as a pressure detection signal, and a control unit 90 that controls the operation of the sensor unit 20, processes the pressure detection signal from the sensor unit 20, derives the pressure of the fluid to be measured indicated by the pressure detection signal, and outputs it externally. By deriving this pressure, the pressure of the fluid to be measured is measured. The control unit 90 includes a circuit board, a connector, a communication module, etc. for deriving and externally outputting the pressure, and a housing 91 that houses these. The housing 91 is simplified in FIG. 1. Actually, it has a vent for cooling the circuit board and various connectors are attached to it.

[0014] As shown in FIGS. 1 to 3, the sensor unit 20 includes a sensor head 30, a pressure guiding pipe 40, a heater 50, a fixing mechanism 60, a heat insulating member 70, and a bracket 80.

[0015] As shown in FIGS. 3 and 4, the sensor head 30 includes a cylindrical pressure guiding pipe 31 extending in the left - right direction, pressure sensors 32 and 33 respectively fixed to each opening at both the left and right ends of the pressure guiding pipe 31, and insulators 34 and 35 respectively fixed to the pressure sensors 32 and 33 by a fixing tool (not shown) or an arbitrary joining method.

[0016] In the middle of the pressure guiding pipe 31 (here, the central part in the left - right direction), the upper end of a cylindrical pressure guiding pipe 40 extending in the up - down direction is connected. The combination of the pressure guiding pipe 31 and the pressure guiding pipe 40 is formed in a T - shape with the pressure guiding pipe 31 as the horizontal bar of the T and the pressure guiding pipe 40 as the vertical bar of the T.

[0017] As shown in FIGS. 2 and 3, the pressure guiding pipe 40 has a joint 41 at its lower end. This joint 41 is connected to the above piping. The fluid to be measured and its pressure introduced into the pressure guiding pipe 40 from the piping through the joint 41 are introduced into the pressure sensors 32 and 33 through the pressure guiding pipe 31 (see also the cross - sectional view in FIG. 4).

[0018] As shown in FIG. 4, the pressure sensor 32 includes a housing 32A, a support diaphragm 32B, a sensor element 32C, a plurality of conductive pins 32D, a plurality of spring contacts 32E, and a seal member 32F. In the cross-sectional view of FIG. 4, the plurality of conductive pins 32D and the plurality of spring contacts 32E are drawn as elevation views rather than cross-sections. The number of the conductive pins 32D and the spring contacts 32E is arbitrary.

[0019] The housing 32A forms, inside thereof, a reference pressure chamber (e.g., a vacuum chamber) R11 having a reference pressure (e.g., a vacuum pressure) and a measured pressure chamber R12 that communicates with the pressure guiding pipe 31 and into which the pressure of the fluid to be measured is pressure-guided. The reference pressure chamber R11 and the measured pressure chamber R12 are partitioned by a support diaphragm 32B and a sensor element 32C housed in the housing 32A.

[0020] The support diaphragm 32B is supported by the housing 32A, for example, by being sandwiched between housing members constituting the housing 32A. The support diaphragm 32B supports the sensor element 32C.

[0021] The sensor element 32C introduces the pressure of the fluid to be measured introduced into the measured pressure chamber R12 therein. The sensor element 32C includes a pressure-receiving diaphragm 32CA that receives the pressure of the fluid to be measured introduced therein. The pressure-receiving diaphragm 32CA faces the reference pressure chamber R11 and is displaced by a displacement degree corresponding to the difference between the pressure of the fluid to be measured and the reference pressure in the reference pressure chamber R11. The sensor element 32C converts the displacement amount of the pressure-receiving diaphragm 32CA into an electric signal and outputs it. The sensor element 32C may be composed of any type of pressure-sensitive element. The sensor element 32C may be a capacitive pressure-sensitive element that converts the displacement amount of the pressure-receiving diaphragm 32CA into an electric signal indicating a change in capacitance, or may be a pressure-sensitive element of a type that converts the displacement amount of the pressure-receiving diaphragm 32CA into an electric signal by one or more piezoelectric elements (not shown). In the former case, the sensor element 32C in FIG. 4 further has a member that forms a capacitance chamber into which the air pressure in the reference pressure chamber R11 is introduced on the right side of the pressure-receiving diaphragm 32CA.

[0022] Each of the multiple spring contacts 32E is connected to the sensor element 32C. Multiple conductive pins 32D are connected one-to-one with the multiple spring contacts 32E. The multiple conductive pins 32D are supported by the housing 32A, for example, by a hermetic seal that penetrates the housing 32A. Each portion of the multiple conductive pins 32D that protrudes outside the housing 32A is covered and insulated by an insulator 34 fixed to the pressure sensor 32 and is connected to the control unit 90 via wiring (not shown).

[0023] The sealing member 32F seals the through-hole 32AA in the wall surface forming the reference pressure chamber R11 of the housing 32A. During the manufacturing of the pressure sensor 32, the reference pressure chamber R11 is evacuated through the through-hole 32AA. The sealing member 32F is provided to seal the through-hole 32AA after the evacuation is complete.

[0024] With the above configuration, the pressure sensor 32 converts the pressure of the fluid to be measured, introduced via the pressure-sensing pipes 40 and 31, into an electrical signal indicating the displacement of the pressure-receiving diaphragm 32CA, and supplies this electrical signal to the control unit 90 via wiring. The control unit 90 processes the electrical signal and derives the pressure of the fluid to be measured indicated by the electrical signal. This enables pressure measurement. The control unit 90 outputs the derived, i.e., measured, pressure to an external device via a connector (not shown).

[0025] The pressure sensor 33 has a similar configuration to the pressure sensor 32. Specifically, the pressure sensor 33 comprises a housing 33A, a support diaphragm 33B, a sensor element 33C, a plurality of conductive pins 33D, a plurality of spring contacts 33E, and a sealing member 33F. The housing 33A, together with the support diaphragm 33B and the sensor element 33C, forms a reference pressure chamber R21 and a pressure chamber to be measured R22. The sensor element 33C includes a pressure-receiving diaphragm 33CA. Each portion of the plurality of conductive pins 33D that protrudes outside the housing 33A is covered and insulated by an insulator 35 fixed to the pressure sensor 33 and connected to the control unit 90 via wiring (not shown). With this configuration, the pressure sensor 33 converts the pressure of the fluid to be measured, introduced via the pressure-sensing pipes 40 and 31, into an electrical signal indicating the displacement of the pressure-receiving diaphragm 33CA, and supplies this electrical signal to the control unit 90 via the plurality of wires. The control unit 90 processes the electrical signal, derives the pressure of the fluid being measured indicated by the electrical signal, and outputs it externally via a connector (not shown) or the like.

[0026] The pressure sensors 32 and 33 have, for example, different detection ranges for the pressure of the fluid being measured. For example, one has a high-pressure detection range and the other has a low-pressure detection range. The detection range is adjusted, for example, by the thickness of the pressure-receiving diaphragm. The pressure sensors 32 and 33 may be provided, for example, for redundancy, and their detection ranges may be the same.

[0027] The sensor head 30 also includes baffles 36 and 37 (see Figure 5 for baffle 36). Baffles 36 and 37 are located inside the pressure sensing pipe 31. Baffles 36 and 37 face the respective sensor elements 32C and 33C (in particular, the pressure-receiving diaphragms 32CA and 33CA) of the pressure sensors 32 and 33. When the pressure of the fluid to be measured is being sensed, baffles 36 and 37 divert the flow of the fluid to be measured from the pressure sensing pipe 31 into the pressure sensors 32 and 33, thereby preventing solid foreign objects from directly hitting the pressure-receiving diaphragms 32CA and 33CA. Baffles 36 and 37 may also be located on the pressure sensors 32 and 33, respectively.

[0028] As shown in Figures 3 to 5, the heater 50 is formed in a cylindrical shape that covers the sensor head 30 which extends in the left-right direction. Specifically, the central axis of the cylindrical heater 50 extends along the left-right direction. The heater 50 heats the sensor head 30, in particular the pressure sensors 32 and 33, when measuring the pressure of the fluid to be measured. The heater 50 operates as a single heater and is shared for heating the pressure sensing pipe 31 and the pressure sensors 32 and 33. For this shared heating, the heater 50 is formed to extend from one of the pressure sensors 32 and 33 to the other, and is formed to cover both pressure sensors 32 and 33.

[0029] The heating of the heater 50 is controlled by the control unit 90 shown in Figure 1. Specifically, the control unit 90 uses the temperature detected by the temperature sensor S (see Figure 4), which is located in the sensor head 30 and connected to the control unit 90 via wiring not shown, as a feedback value to feedback control the power supplied to the heater 50 so that the detected temperature approaches the target temperature. The target temperature is preset as the temperature at which the temperature of the sensor head 30, in particular, the pressure sensors 32 and 33, is the same as the temperature of the fluid being measured. The position of the temperature sensor S is arbitrary. The temperature sensor S may be located inside the sensor head 30, for example, in the reference pressure chamber R11 or R21, or inside the pressure sensing pipe 31, or on the heater 50. Since the heater 50 is configured as a single heater, it is controlled by one temperature control using one temperature sensor S.

[0030] The heater 50 comprises a heater body 51 and 52 that generates heat, and support members 53 and 54 that support the heater body 51 and 52, respectively.

[0031] Each of the heater bodies 51 and 52 is formed in a semi-cylindrical shape, which is the shape obtained by cutting a cylinder extending in the left-right direction with planes extending in the up-down and left-right directions. The heater bodies 51 and 52 are connected to the control unit 90 by wiring (not shown), and are uniformly heated by power supplied from the control unit 90 via the feedback control described above. This heat heats the sensor head 30, particularly the pressure sensors 32 and 33 and the pressure-conducting pipe 31. The power supplied by the feedback control is the same for both the heater bodies 51 and 52. Thus, both the heater bodies 51 and 52 are configured as a single heating element. The heater bodies 51 and 52 have a structure in which, for example, a heating wire passes through their interior. The heating wire generates heat due to the power from the control unit 90, causing the heater bodies 51 and 52 to heat up. Note that the cross-sections of the heater bodies 51 and 52 in Figure 5 are shown in a manner that omits the internal structure such as the heating wire.

[0032] The support member 53 is formed in a semi-cylindrical shape to match the shape of the heater body 51. The support member 53 supports the heater body 51 in such a manner that its outer circumferential surface supports the inner circumferential surface of the heater body 51. Support methods include joining the outer and inner circumferential surfaces with adhesive or adhesive tape, or fixing with screws. Similarly, the support member 54 is formed in a semi-cylindrical shape to match the shape of the heater body 52. ​​The support member 54 supports the heater body 52 in such a manner that its outer circumferential surface supports the inner circumferential surface of the heater body 52.

[0033] The heater 50 is fixed to the sensor head 30 by a fixing mechanism 60. The fixing mechanism 60 has cylindrical bosses 61 and 62 that project in the front-rear direction from the outer circumferential surface of the sensor head 30, and screws 63 and 64 that are screwed into the bosses 61 and 62, respectively. The bosses 61 and 62 project from the left-right center of the sensor head 30, that is, from the left-right center of the outer circumferential surface of the pressure sensing pipe 31. The bosses 61 and 62 are integrally formed with the pressure sensing pipe 31. In Figure 5, the screws 63 and 64 are shown in elevation views, not cross-sections.

[0034] The heater 50 is fixed to the sensor head 30 by screwing the support members 53 and 54 of the heater 50 to bosses 61 and 62 with screws 63 and 64, respectively, while the support members 53 and 54 of the heater 50 support the heater body 51 and 52, respectively. The support members 53 and 54 each have flat screw fastening portions 53A and 54A, respectively. The screw fastening portions 53A and 54A each have through holes 53AA and 54AA that penetrate in the thickness direction.

[0035] The boss 61 to which the support member 53 is attached has a flat surface 61A at its top and a protrusion 61B that extends from the flat surface 61A. Furthermore, the boss 61 also has a screw hole 61C that opens in the center of the top surface of the protrusion 61B and engages with the screw 63.

[0036] When the support member 53, with the heater body 51 supported, is attached to the boss 61, the protrusion 61B is inserted into the through hole 53AA, as shown in Figure 5. At this time, the through hole 53AA (screw-fastening portion 53A) into which the protrusion 61B is inserted is exposed to the outside of the heater 50 through the through hole 51A formed in the heater body 51. By screwing the screw 63 into the screw hole 61C through this through hole 51A, the head of the screw 63 and the flat surface 61A sandwich the screw-fastening portion 53A of the support member 53. Therefore, the support member 53 is tightened and fixed to the boss 61 (especially the flat surface) by the screw 63, i.e., screwed in. Note that the shape of the protrusion 61B and the through hole 53AA can be approximately the same. This positions the heater body 51 relative to the boss 61 when the protrusion 61B is inserted into the through hole 53AA.

[0037] The boss 62 to which the support member 54 is attached has the same configuration as the boss 61. Specifically, the boss 62 comprises a flat surface 62A, a protrusion 62B, and a screw hole 62C. When the support member 54, with the heater body 52 supported, is attached to the boss 62, the protrusion 62B is inserted into the through hole 54AA, similar to the boss 61. At this time, the through hole 54AA (screw-fastening portion 54A) into which the protrusion 62B is inserted is exposed to the outside of the heater 50 through the through hole 52A formed in the heater body 52. ​​The support member 53 is screwed to the boss 62 by screwing a screw 64 into the screw hole 62C through this through hole 52A.

[0038] As described above, the heater 50 has a cylindrical shape and covers the outer circumference of the sensor head 30. However, to prevent interference with the pressure sensing pipe 40 connected to the sensor head 30, it is provided with an opening 50A, which is a through-hole through which the pressure sensing pipe 40 passes, at the lower part of the central part in the left-right direction. The opening 50A is formed with a gap between its inner wall and the outer surface of the pressure sensing pipe 40. As shown in Figure 5, this opening 50A is made up of semicircular notches 51B, 52B, 53B, and 54B provided in the heater body 51 and 52 and the support members 53 and 54, respectively.

[0039] The heat insulating member 70 surrounds the sensor head 30 and the heater 50, reducing the heat dissipation from the heater 50 to the outside when heating the sensor head 30. As shown in Figures 2 and 4, the heat insulating member 70 comprises a substantially disc-shaped insulating material 71 that covers the sensor head 30 and the heater 50 from above, a support member 72 that supports the insulating material 71 from below, and a cylindrical support member 73 that supports the support member 72. The heat insulating member 70 further comprises a cylindrical insulating material 74 that surrounds the sensor head 30 and the heater 50 in the front, back, left, and right directions, and a substantially disc-shaped insulating material 75 that covers the sensor head 30 and the heater 50 from below.

[0040] The thermal insulation materials 74 and 75 are placed inside the support member 73. Thermal insulation material 74 is positioned on top of thermal insulation material 75. The support member 72 is provided with through-holes 72A through which multiple wires that electrically connect the control unit 90 and the sensor head 30 pass. Part of the through-holes 72A is blocked by the thermal insulation material 74, and the wires pass through the remaining part that is not blocked by the thermal insulation material 74. The thickness of the thermal insulation material 74 may be increased so that it completely covers the through-holes 72A. In this case, the wires are arranged to pass through the through-holes 72A, pushing aside the thermal insulation material 74.

[0041] The thermal insulation materials 71, 74, and 75 may consist of a combination of a flexible thermal insulation material body that provides thermal insulation and a thin plate member that adds rigidity to the thermal insulation material body. The thermal insulation material 75 has a through hole 75A in the center into which the pressure sensing pipe 40 is inserted. The thermal insulation material 75 also has a notch 75B for expanding the diameter of the through hole 75A. This allows the joint 41 to pass through the through hole 75A by expanding the diameter of the through hole 75A when the pressure sensing pipe 40 is passed through the thermal insulation material 75.

[0042] As shown in Figures 1, 2, 4, and 6, the bracket 80 is formed in a cup shape and is fixed to the control unit 90 while housing the sensor head 30, the upper part of the pressure sensing pipe 40, the heater 50, the fixing mechanism 60, and the heat insulating member 70. Note that the pressure sensors 32 and 33 and the heater 50, which are shown by dotted lines in Figure 6, are simplified as blocks to indicate their positions (the same applies to Figure 7).

[0043] The bracket 80 comprises a plate-shaped (in this case, octagonal plate-shaped) bottom portion 80A that supports the heat insulating member 70, a cylindrical (in this case, octagonal cylindrical) side portion 80B extending upward from the outer circumference of the bottom portion, and four mounting plates 80C that protrude in four directions from four locations on the upper end of the side portion 80B.

[0044] Each mounting plate 80C is screwed to the housing 91 of the control unit 90 by screws N (Figure 6). Specifically, each mounting plate 80C is provided with a screw-through hole 80CA (see enlarged view of Figure 6) through which the screw N passes when screwing it in. The screw-through hole 80CA is formed as a notch. In each mounting plate 80C, the mounting plate 80C is screwed in when the screw N passes through the screw-through hole 80CA and engages with the screw hole 91A of the housing 91. This screw fastening fixes the bracket 80 to the control unit 90.

[0045] Bracket 80 includes a plurality of bracket members 81 and 82 that face each other in the left-right direction from which the sensor head 30 extends and combine with each other. Bracket member 81 is located on the pressure sensor 32 side of the sensor head 30 and covers the pressure sensor 32 from below (the side of the pressure sensing pipe 40) and to the right (the side in the direction from pressure sensor 33 toward pressure sensor 32). Bracket member 82 is located on the pressure sensor 33 side of the sensor head 30 and covers the pressure sensor 33 from below (the side of the pressure sensing pipe 40) and to the left (the side in the direction from pressure sensor 32 toward pressure sensor 33).

[0046] Bracket member 81 comprises a plate-shaped bottom portion 81A and a semi-cylindrical side portion 81B extending upward from the outer peripheral edge of the bottom portion 81A. Bracket member 82 comprises a plate-shaped bottom portion 82A and a semi-cylindrical side portion 82B extending upward from the outer peripheral edge of the bottom portion 82A. The bottom portions 81A and 82A constitute the bottom portion 80A. The side portions 81B and 82B constitute the side portion 80B.

[0047] The side portions 81B and 82B each have overlapping portions 81BA and 82BA that overlap each other in the thickness direction. The bracket members 81 and 85 are combined by the overlapping and engagement of the overlapping portions 81BA and 82BA to form the bracket 80. For engagement, for example, one of the overlapping portions 81BA and 82BA is provided with a protrusion P that is inserted into the opening O of the other.

[0048] The bottom portions 81A and 82A are provided with semicircular notches 81AA and 82AA. The bracket members 81 and 82 are assembled with the edges of the notches 81AA and 82AA inserted between two annular protrusions 42 and 43 formed on the outer circumferential surface of the pressure sensing pipe 40. The edges of the notches 81AA and 82AA contact the portions of the pressure sensing pipe 40 where the annular protrusions 42 and 43 are formed. As a result, the pressure sensing pipe 40 passes through the bottom portion 80A of the bracket 80, which consists of the bottom portions 81A and 82A, through holes formed by the notches 81AA and 82AA, and the bottom portion 80A and the pressure sensing pipe 40 are in contact. The annular protrusions 42 and 43 position and support the bracket 80 immovably in the vertical direction in which the pressure sensing pipe 40 extends relative to the pressure sensing pipe 40 (and further, the sensor head 30 and heater 50). Furthermore, because the notches 81AA and 82AA are semicircular, the bracket 80 is positioned to be rotatable relative to the pressure sensing pipe 40 (which also enables the relative rotation described later in Figure 7). The axis of rotation during this rotation is the central axis C of the pressure sensing pipe 40, which passes through the centers of the semicircular notches 81AA and 82AA.

[0049] Bracket member 81 has a plurality of openings 81AB formed in its bottom portion 81A and a plurality of openings 81BB formed in its side portion 81B. The plurality of openings 81AB and 81BB form a mesh shape in bracket member 81. Similarly, bracket member 82 has a plurality of openings 82AB formed in its bottom portion 82A and a plurality of openings 82BB formed in its side portion 82B. The plurality of openings 82AB and 82BB form a mesh shape in bracket member 82. Each of the openings 81AB, 81BB, 82AB, and 82BB may be a through hole or a notch.

[0050] As shown in Figure 6, in this embodiment, the opening patterns of the multiple openings 81AB of the bracket member 81 and the opening patterns of the multiple openings 82AB of the bracket member 82 are different. More specifically, when one of the two opening patterns is rotated around the central axis C of the pressure sensing pipe 40 as the axis of rotation, that one does not coincide with the other. In other words, it is formed to be asymmetrical with respect to the central axis C, and as non-linearly symmetrical with respect to the front-to-back direction passing through the central axis C as the axis of symmetry. The technical significance of this will be explained below.

[0051] First, it is preferable that the heater 50 uniformly heats the sensor head 30, particularly the pressure sensors 32 and 33, so that the internal temperature of each pressure sensor 32 and 33 becomes the same as the temperature of the fluid being measured. In other words, it is desirable that no temperature gradient occurs between the pressure sensors 32 and 33 when heating by the heater 50. However, due to misalignment of the heater 50 relative to the sensor head 30, uneven heating of the heater 50, etc., it may not be possible to heat the pressure sensors 32 and 33 uniformly.

[0052] Here, the heat from the sensor head 30 (especially the pressure sensors 32 and 33) heated by the heater 50 escapes through the pressure sensing pipe 40 that passes through the heater 50 (see arrow AR). In order to heat the pressure sensors 32 and 33 uniformly and make the temperature gradient between them zero, it is advisable to adjust the amount of heat transferred Q1 from the pressure sensor 32 side (right side) to the pressure sensing pipe 40 and the amount of heat transferred Q2 from the pressure sensor 33 side (left side) to the pressure sensing pipe 40.

[0053] A portion of the heat transmitted from the pressure sensor 32 to the pressure-conducting pipe 40 is transferred to the bottom 81A of the bracket member 81 (see arrow AR1 in Figure 4). The heat transferred to the bottom 81A is dissipated by spreading radially from this bottom 81A (see arrow AR3 in Figure 6). Similarly, a portion of the heat transmitted from the pressure sensor 33 to the pressure-conducting pipe 40 is transferred to the bottom 82A of the bracket member 82 (see arrow AR2 in Figure 4). The heat transferred to the bottom 82A is dissipated by spreading radially from this bottom 82A (see arrow AR4 in Figure 6). As shown in Figure 6, a gap is provided between the bottoms 82A and 82B, making it difficult for heat to propagate between them. In other words, some of the heat transmitted from the pressure sensor 32 to the pressure sensing pipe 40 propagates mainly through the bottom 81A, and some of the heat transmitted from the pressure sensor 33 to the pressure sensing pipe 40 propagates mainly through the bottom 82A.

[0054] In this embodiment, the heat dissipation properties (in other words, the ease of heat dissipation) of the bottom 81A of the bracket member 81 on the pressure sensor 32 side and the heat dissipation properties of the bottom 81B of the bracket member 82 on the pressure sensor 33 side are adjusted. For example, if the temperature of pressure sensor 32 is lower when pressure sensors 32 and 33 are heated, the heat dissipation properties of the bottom 81A, to which heat from pressure sensor 32 is transferred, are reduced. As a result, the amount of heat dissipated from the bottom 81A of the bracket member 81 out of the amount of heat transferred to pressure sensor 32 from heater 50 is reduced, and the amount of heat remaining in pressure sensor 32 increases accordingly. This raises the temperature of pressure sensor 32 and reduces the temperature gradient. In this way, in this embodiment, the temperature gradient between pressure sensors 32 and 33 during heating by heater 50 can be adjusted by adjusting the heat dissipation properties.

[0055] The heat dissipation performance of bracket member 81 changes according to the opening ratio A1, which is the ratio of the area occupied by the entire opening 81AB to the entire bottom 81A of bracket member 81. The heat dissipation performance of bracket member 82 changes according to the opening ratio A2, which is the ratio of the area occupied by the entire opening 82AB to the entire bottom 82A of bracket member 82. For example, if the opening ratio A1 is increased, the cross-sectional area of ​​the heat transfer path from the pressure sensing pipe 40 propagating through bracket member 81 becomes smaller, and the heat dissipation performance decreases. The same applies to the opening ratio A2. The bracket 80 in Figures 2 and 6 has a shape that allows the temperature of pressure sensor 32 to be lower when pressure sensors 32 and 33 are heated. For this reason, the opening ratio A1 of bracket member 81 on the pressure sensor 32 side is higher than the opening ratio A2 of bracket member 82 on the pressure sensor 33 side. The opening ratio can be adjusted by the number of openings, the size of the openings, etc. Furthermore, the heat dissipation can be adjusted by, in addition to or instead of, the aperture ratio, by using different materials for the bracket members 81 and 82, or by using different thicknesses for the bracket members 81 and 82.

[0056] In the examples shown in Figures 2 and 6, the heat dissipation (in this case, the opening ratio) is adjusted only at the bottoms 81A and 82A of the bracket members 81 and 82. This is because heat dissipation in bracket members 81 and 82 occurs at the bottoms 81A and 82A. Depending on the amount of heat transferred to the pressure-sensing pipe 40, the heat transmitted through the bottoms 81A and 82A may reach the sides 81B and 82B. In such cases, the heat dissipation of bracket member 81 may be adjusted not only at the bottom 81A but also at the sides 81B. The same applies to bracket member 82.

[0057] As described above, the sensor device 10 according to this embodiment comprises a sensor head 30, a pressure sensing pipe 40, a heater 50, and a bracket 80. The sensor head 30 includes a pressure sensing pipe 31 extending in the left-right direction (first direction), and pressure sensors 32 and 33 fixed to both the left and right ends of the pressure sensing pipe 31 (one end in the left-right direction and the other end different from this end (in this case, the opposite end)). The pressure sensing pipe 40 extends in the up-down direction (second direction) perpendicular to the left-right direction and is connected to the middle of the pressure sensing pipe 31, and guides the pressure of the fluid to be measured to the pressure sensors 32 and 33 via the pressure sensing pipe 31. The heater 50 heats the sensor head 30, in particular the pressure sensors 32 and 33. The bracket 80 is formed in a cup shape. The bracket 80 has a bottom portion 80A that contacts the pressure sensing pipe 40 when the pressure sensing pipe 40 passes through it. The bracket 80 houses the sensor head 30 and the heater 50. Furthermore, the bracket 80 has a first part and a second part facing each other in the left-right direction with the pressure sensing pipe 40 in between, and the first part and the second part have different heat dissipation properties (for example, at least one of the aperture ratio, material, or thickness). The first part is, here, the bottom 81A and / or side 81B of the bracket member 81. The second part is, here, the bottom 82A and / or side 82B of the bracket member 82. The first part and the second part are, for example, the same size, and more specifically, their respective outer shapes are congruent. The first part can be said to be, for example, the part on the side of the pressure sensor 32 of two parts obtained by dividing the bracket 80 (especially the entire bottom 80A) by a virtual line AX that intersects the central axis C of the pressure sensing pipe 40 and extends in the front-rear direction perpendicular to the up-down and left-right directions in which the pressure sensing pipes 31 and 40 extend, respectively. The second part can be said to be, for example, the part on the side of the two parts mentioned above that is the pressure sensor 33. Note that the directions in which the pressure sensing pipe 31 and the pressure sensing pipe 40 extend (the first direction and the second direction) do not have to be orthogonal. The two parts can also be said to be parts obtained by dividing the bracket 80 (especially the bottom part 80A) with a virtual plane that passes through the central axis C of the pressure sensing pipe 40 and a virtual line AX that extends in a direction perpendicular to the direction in which the pressure sensing pipe 31 extends (the direction of the central axis) and the direction in which the pressure sensing pipe 40 extends (the direction of the central axis C).

[0058] With the above configuration, the heat dissipation of the first or second part (for example, the right-hand first part, which is in the same direction as the pressure sensor 32) on the side of the pressure sensor 32 and 33 heated by the heater 50 that has a lower temperature (for example, pressure sensor 32) can be reduced. Therefore, the temperature gradient that occurs between the pressure sensors 32 and 33 when the heater 50 is heated can be made smaller than when the heat dissipation is the same. In other words, a desired temperature gradient (which does not have to be zero) can be obtained. Note that the heat dissipation of the first part and the second part do not need to be different from each other. By having different heat dissipation properties, the temperature gradient between the pressure sensors 32 and 33 when heated can be set to a desired temperature gradient (in some cases, a larger temperature gradient may be obtained than when the heat dissipation properties are the same). Note that by adjusting the opening ratio as described above, the heat dissipation can be easily adjusted by the shape of the bracket 80. Furthermore, the above-mentioned heat dissipation properties may include not only the heat dissipation properties of the entire part (the first or second part), but also the heat dissipation properties per unit volume or per unit area when viewed from the thickness direction of that part.

[0059] The shape of the heater 50 may be other than that of the above embodiment, but it is preferable that it be formed in a single cylindrical shape, having an opening 50A through which the pressure sensing pipe 40 passes, extending in the left-right direction, and covering the pressure sensors 32 and 33, as in the above embodiment. This allows the pressure sensors 32 and 33 to be heated by a single heater 50, and the heater 50 can heat them from all directions around the outer circumference. Furthermore, the cylindrical shape may be a polygonal cylindrical shape, but it is preferable that it be cylindrical. The cylindrical shape enables uniform heating from all directions.

[0060] Furthermore, the bracket 80 includes a bracket member 81 having at least the first portion described above, and a bracket member 82 having at least the second portion described above. The first and second portions may be the entirety of the bracket member 81 or 82, or a part thereof. By employing the bracket members 81 and 82, for example, the following becomes possible. First, a plurality of first candidates of bracket members that can be used as the bracket member 81 and have different heat dissipation properties of the first portion are prepared, and a plurality of second candidates of bracket members that can be used as the bracket member 82 and have different heat dissipation properties of the second portion are prepared. During or after the manufacture of the sensor device 10, the manufacturer or user selects from the plurality of first and second candidates the first and second candidates that will result in the desired temperature gradient. The manufacturer or user can make the temperature gradient the desired temperature gradient by configuring the bracket 80 using the selected first and second candidates as the bracket members 81 and 82. The desired temperature gradient may be, for example, a temperature gradient smaller than the temperature gradient that would occur if the heat dissipation properties of the bracket members 81 and 82 were the same. The method for selecting the first and second candidates is arbitrary. For example, the positional relationship between the sensor head 30 and the heater 50 may be measured, and the first and second candidates may be selected by simulation based on the measured positional relationship. The selection of the first and second candidates may also be performed experimentally during manufacturing. For example, various first and second candidates for bracket members may be tried while measuring the temperature of the pressure sensors 32 and 33 that are actually heated by the heater 50, and the most suitable first and second candidates may be selected.

[0061] Furthermore, the sensor device 10 includes a control unit 90 that processes pressure detection signals from the pressure sensors 32 and 33, respectively. The bracket 80 is fixed to the housing 91 of the control unit 90. This allows the bracket 80, which fixes the sensor head 30 and the like to the housing 91, to be used for adjusting the temperature gradient.

[0062] The bracket 80 may be configured to allow adjustment of its relative rotational position to the housing 91 when it is fixed to the housing 91. For example, as shown in Figure 7, each screw through hole 80CA may be formed in an arc shape. This allows screws N to be inserted into the screw through holes 80CA and lightly screwed into the screw holes 91A of the housing 91, temporarily fixing the bracket 80 to the housing 91. In this state, the bracket 80 can rotate relative to the housing 91, sensor head 30, heater 50, heat insulating member 70, etc., with the central axis C of the pressure sensing pipe 40 as the axis of rotation, with the screws N guided by the arc-shaped screw through holes 80CA. Therefore, the bracket 80 can be rotated relative to the housing 91, sensor head 30, heater 50, heat insulating member 70, etc., during or after the manufacture of the sensor device 10, as shown in Figure 7. This makes it possible to make the heat dissipation properties (e.g., opening pattern or opening ratio) of the first part U1 and second part U2 facing each other in the left-right direction with the pressure sensing pipe 40 in between different (adjust) the relative rotation of the bracket 80. Here, the first part U1 consists of the part on the side of the pressure sensor 32, which is one of two parts obtained by dividing the bracket 80 (the entire bracket 80 or the bottom part 80A) by a virtual line AX when viewed from the vertical direction in which the pressure sensing pipe 40 extends. The second part U2 consists of the part on the side of the pressure sensor 33, which is one of the two parts. By the relative rotation, each of the first part U1 and the second part U2 can be composed of parts of bracket members 81 and 82, respectively, and the proportion of parts of bracket members 81 and 82 with different heat dissipation properties can be made different in the first part U1 and the second part U2. This allows the heat dissipation in the first part U1 and the second part U2 to be adjusted. (Note that in Figure 7, the distance between the bottom parts 81A and 82A is narrower than in Figure 6 to increase this effect.) As described above, the temperature gradient between the pressure sensors 32 and 33 when heated by the heater 50 can also be adjusted by the relative rotation. This adjustment involves, for example, rotating the bracket 80 while measuring the temperatures of the pressure sensors 32 and 33, which are actually heated by the heater 50, and then securing the bracket 80 with screws N at the rotation angle where the temperature gradient becomes the desired gradient. Alternatively, the rotation angle may be determined by analysis using simulation, and the screws may be fastened at this rotation angle.This configuration, which allows the bracket 80 to rotate, also makes it possible to set the temperature gradient between the pressure sensors 32 and 33 when the heater 50 is heated to a desired temperature gradient (which does not have to be zero).

[0063] In Figure 7, the heat dissipation properties of bracket members 81 and 82 are shown to be different, but they may be made to be different. In the former case, after adjusting the temperature gradient using the respective heat dissipation properties of bracket members 81 and 82, the temperature gradient can be finely adjusted by relative rotation. Even in the latter case, by making the opening pattern of at least one of the bracket members 81 and 82 different at the front and rear (not making it a symmetrical shape with a line passing through the central axis C in the left-right direction as the axis of symmetry), it becomes possible to adjust the heat dissipation properties of the first part U1 and the second part U2 by relative rotation.

[0064] Furthermore, the bracket 80 also houses the heat insulating member 70 that covers the sensor head 30 and the heater 50. This allows the bracket 80, which houses the heat insulating member 70, to be used for adjusting the temperature gradient.

[0065] As described above, for example, the first and second parts of the bracket 80 are provided in such a way that the temperature gradient between the pressure sensors 32 and 33 when the heater 50 heats the pressure sensors 32 and 33 can be adjusted by adjusting the heat dissipation properties of the first and second parts. Adjustability includes at least one of being adjustable at the time of manufacture of the sensor device 10 and being adjustable after manufacture when the sensor device 10 is actually in use. If only adjustment is to be made at the time of manufacture of the sensor device 10, the screw N is a screw that cannot be loosened after manufacture. With the above configuration, the temperature gradient between the two pressure sensors when heated by the heater can be set to a desired temperature gradient.

[0066] Here, the manufacturing method of the sensor device 10 will be explained with reference to Figure 8. First, the manufacturer of the sensor device 10 prepares the sensor head 30 and the heater 50 (step S11). The sensor head 30 is connected to the pressure sensing pipe 40 and is provided with bosses 61 and 62 of the fixing mechanism 60. In the manufacturing of the sensor head 30, for example, a metal member is prepared in which the pressure sensing pipe 31, the pressure sensing pipe 40, and the bosses 61 and 62 are integrally formed, and the pressure sensors 32 and 33 are fixed to both the left and right ends of the pressure sensing pipe 31 by welding or the like, thereby preparing the unit of the sensor head 30, the pressure sensing pipe 40, and the bosses 61 and 62.

[0067] Subsequently, the manufacturer fixes the heater 50 to the sensor head 30 by fixing it to the fixing mechanism 60 (step S12). Specifically, the manufacturer first inserts the protrusions 61B and 62B of the bosses 61 and 62 into the through holes 53AA and 54AA of the support members 53 and 54 of the heater 50. Then, the manufacturer screws the screws 63 and 64 into the screw holes 61C and 62C, and screws the heater 50 to the bosses 61 and 62. This positions and fixes the heater 50.

[0068] In steps S11 to S12, the heater 50 is positioned relative to the sensor head 30, which is connected to the pressure sensing pipe 31 by the pressure sensing pipe 40.

[0069] Subsequently, the manufacturer connects the wiring between the sensor head 30 and the heater 50 and the control unit 90, and covers the sensor head 30 and the heater 50 with the heat insulating member 70 (step S13).

[0070] Subsequently, the manufacturer identifies a bracket 80 having a first part and a second part that adjust the temperature gradient generated in the sensor head 30 when the pressure sensors 32 and 33 are heated by the heater 50 to a desired gradient, and then positions the identified bracket 80 (step S14). This adjusts the heat dissipation of the first part and the second part. As a result of such adjustment, the heat dissipation of both parts may be made the same.

[0071] For example, the bracket 80 is identified and positioned by selecting a first candidate (a candidate including a first part that realizes the desired gradient) and a second candidate (a candidate including a second part that realizes the desired gradient) from a pre-prepared list of multiple first candidates for bracket member 81 and multiple second candidates for bracket member 82, which set the temperature gradient to the desired gradient. Positioning includes combining the bracket members 81 and 82 with the pressure sensing pipe 40 in between, and fixing the resulting bracket 80 to the housing 91 of the control unit 90 while housing the sensor head 30, heater 50, and heat insulating member 70.

[0072] In step S14, in addition to or instead of the above, the following may be performed. First, when positioning the bracket 80, the bracket 80 is temporarily fixed to the housing 91 of the control unit 90 with the sensor head 30, heater 50, and heat insulating member 70 housed in it. Then, the bracket 80 is rotated relative to the housing 91 (and the sensor head 30, etc.) to determine the relative rotation position that makes the temperature gradient a desired gradient. By determining this relative rotation position, the heat dissipation performance (e.g., aperture ratio) of the first part and the second part is determined, and the bracket 80 having the first part and the second part is identified. Then, the bracket 80 is permanently fixed in place, and the bracket 80 is positioned.

[0073] As described above, the sensor device 10 is completed. With this manufacturing method, step S14 above makes it possible to set the temperature gradient between the pressure sensors 32 and 33 during heating by the heater 50 to a desired temperature gradient (including a gradient of 0).

[0074] In addition to being composed of two bracket members 81 and 82 as described above, the bracket 80 may consist of one member or three or more members.

[0075] The present invention has been described above with reference to embodiments and modifications, but the present invention is not limited to the above embodiments and modifications. The shapes of each of the above elements can be changed as appropriate. Furthermore, the present invention includes various modifications to the above embodiments and modifications that can be understood by those skilled in the art within the scope of the technical concept of the present invention. The configurations listed in the above embodiments and modifications can be combined as appropriate within a non-contradictory range.

[0076] (Note) A configuration based on the above embodiment and its modifications is described below as an example. (Note 1) A sensor head including a first pipe extending in a first direction, a first pressure sensor fixed to a first end of the first pipe, and a second pressure sensor fixed to a second end of the first pipe different from the first end, A second pipe extending in a second direction different from the first direction and connected to the middle of the first pipe, which guides the pressure of the fluid to be measured to the first pressure sensor and the second pressure sensor via the first pipe, A heater for heating the first pressure sensor and the second pressure sensor, The device comprises a cup-shaped bracket having a bottom that contacts the second pipe while it is passing through it, and which houses the sensor head and the heater, The bracket has a first portion and a second portion that face each other in the first direction, with the second pipe in between. The first part has a first heat dissipation property, The second part has a second heat dissipation property different from the first heat dissipation property. Sensor device. (Note 2) The first portion has the first heat dissipation performance by having a plurality of first openings that are opened with a first aperture ratio, The second portion has the second heat dissipation capability by having a plurality of second openings that are opened with a second opening ratio different from the first opening ratio. The sensor device described in Appendix 1. (Note 3) The first portion, when viewed from the second direction, is the portion on the side of the first pressure sensor, which is one of two portions obtained by dividing the bottom of the bracket by a virtual line that intersects the central axis of the second pipe and is perpendicular to the first and second directions. The second part is the part of the two parts that is on the side of the second pressure sensor. The sensor device described in Appendix 1 or 2. (Note 4) The first portion, when viewed from the second direction, is the portion on the side of the first pressure sensor, of the two portions obtained by dividing the entire bracket by a virtual line that intersects the central axis of the second pipe and is perpendicular to the first and second directions. The second part is the part of the two parts that is on the side of the second pressure sensor. The sensor device described in Appendix 1 or 2. (Note 5) The bracket comprises a first bracket member having at least the first portion and a second bracket member having at least the second portion. A sensor device as described in any of the appendices 1 to 4. (Note 6) The system further includes a control unit that processes pressure detection signals from the first pressure sensor and the second pressure sensor, respectively. The bracket is fixed to the housing of the control unit. A sensor device as described in any of the appendices 1 to 5. (Note 7) The bracket is configured to allow adjustment of its relative rotational position to the housing when it is fixed to the housing. The first part and the second part face each other in the bracket after the adjustment of the relative rotational position, with the second pipe in between in the first direction. The sensor device described in Appendix 6. (Note 8) The bracket is provided with screw holes through which screws for fastening the bracket to the housing pass, The screw passage hole is formed in an arc shape so that the screw can move relative to the screw passage hole when adjusting the relative rotation position. The sensor device described in Appendix 7. (Note 9) The bracket further houses a heat insulating member that covers the sensor head and the heater. A sensor device as described in any of the appendices 1 to 8. (Note 10) A sensor head including a first pipe extending in a first direction, a first pressure sensor fixed to a first end of the first pipe, and a second pressure sensor fixed to a second end of the first pipe different from the first end, A second pipe extending in a second direction different from the first direction and connected to the middle of the first pipe, which guides the pressure of the fluid to be measured to the first pressure sensor and the second pressure sensor via the first pipe, A heater for heating the first pressure sensor and the second pressure sensor, The device comprises a cup-shaped bracket having a bottom that contacts the second pipe while it is passing through it, and which houses the sensor head and the heater, The bracket has a first portion and a second portion that face each other in the first direction, with the second pipe in between. The first part has a first heat dissipation property, The aforementioned second part has a second heat dissipation function, A method for manufacturing a sensor device, A first step is to position the heater relative to the sensor head, which has the second pipe connected to the first pipe, A second step involves adjusting the temperature gradient between the first and second pressure sensors when the heater heats the first and second pressure sensors by adjusting the first heat dissipation of the first part and the second heat dissipation of the second part, A method for manufacturing a sensor device having the following characteristics. (Note 11) The first portion has the first heat dissipation performance by having a plurality of first openings that are opened with a first aperture ratio, The second portion has the second heat dissipation capability by having a plurality of second openings that are opened with a second aperture ratio. A method for manufacturing the sensor device described in Appendix 10. (Note 12) The first portion is, when viewed from the second direction, the bottom of the bracket or the entire bracket, divided by a virtual line that intersects the central axis of the second pipe and is perpendicular to the first and second directions, and is the portion on the side of the first pressure sensor. The second part is the part of the two parts that is on the side of the second pressure sensor. A method for manufacturing the sensor device described in Appendix 10 or 11. (Note 13) The bracket comprises a first bracket member having at least the first portion and a second bracket member having at least the second portion. In the second step, a first candidate and a second candidate are selected from a plurality of types of first candidates for the first bracket member and a plurality of types of second candidates for the second bracket member, such that the temperature gradient is a desired gradient, and the first heat dissipation and the second heat dissipation are adjusted by arranging the brackets with the selected first candidate and second candidate as the first bracket member and second bracket member. A method for manufacturing a sensor device as described in any of Appendix 10 to 12. (Note 14) The sensor device further comprises a control unit that processes pressure detection signals from the first pressure sensor and the second pressure sensor. The bracket is fixed to the housing of the control unit, and is configured to allow adjustment of its relative rotational position to the housing when it is fixed to the housing. In the second step, the bracket is rotated relative to the housing to determine a relative rotation position that sets the temperature gradient to a desired gradient, and the bracket is fixed to the housing at the determined relative rotation position to adjust the first heat dissipation and the second heat dissipation. A method for manufacturing a sensor device as described in any of the appendices 10 to 13. [Explanation of Symbols]

[0077] 10...Sensor device, 20...Sensor unit, 30...Sensor head, 31...Pressure sensing pipe, 32...Pressure sensor, 32A...Housing, 32AA...Through hole, 32B...Support diaphragm, 32C...Sensor element, 32CA...Pressure receiving diaphragm, 32D...Conductive pin, 32E...Spring contact, 32F...Sealing member, 33...Pressure sensor, 33A...Housing, 33B...Support diaphragm, 33C...Sensor element, 33CA...Pressure receiving diaphragm, 33D...Conductive pin, 33E ...Spring contact, 33F...Sealing member, 34...Insulator, 35...Insulator, 36...Baffle, 37...Baffle, 40...Pressure sensing pipe, 41...Joint, 42...Annular protrusion, 43...Annular protrusion, 50...Heater, 50A...Opening, 51...Heater body, 51A...Through hole, 52...Heater body, 52A...Through hole, 53...Support member, 53A...Screw fastening part, 53AA...Through hole, 54...Support member, 54A...Screw fastening part, 54AA...Through hole, 60...Fixed Mechanism, 61...Boss, 61A...Flat surface, 61B...Protrusion, 61C...Screw hole, 62...Boss, 62A...Flat surface, 62B...Protrusion, 62C...Screw hole, 63...Screw, 64...Screw, 70...Insulation member, 71...Insulation material, 72...Support member, 72A...Through hole, 73...Support member, 74...Insulation material, 75...Insulation material, 75A...Through hole, 80...Bracket, 80A...Bottom, 80B...Side, 80C...Mounting plate, 80CA...Screw through hole, 81...Bracket member, 81A...Bottom, 81AB ...opening, 81B...side part, 81BA...overlapping part, 81BB...opening, 82...bracket member, 82A...bottom part, 82AB...opening, 82B...side part, 82BA...overlapping part, 82BB...opening, 90...control unit, 91...housing, 91A...screw hole, C...central axis, D1...distance, D2...distance, N...screw, O...opening, P...protrusion, R11...reference pressure chamber, R12...measured pressure chamber, R21...reference pressure chamber, R22...measured pressure chamber, S...temperature sensor, U1...first part, U2...second part.

Claims

1. A sensor head including a first pipe extending in a first direction, a first pressure sensor fixed to a first end of the first pipe, and a second pressure sensor fixed to a second end of the first pipe different from the first end, A second pipe extending in a second direction different from the first direction and connected to the middle of the first pipe, which guides the pressure of the fluid to be measured to the first pressure sensor and the second pressure sensor via the first pipe, A heater for heating the first pressure sensor and the second pressure sensor, The device comprises a cup-shaped bracket having a bottom that contacts the second pipe while it is passing through it, and which houses the sensor head and the heater, The bracket has a first portion and a second portion that face each other in the first direction, with the second pipe in between. The first part has a first heat dissipation property, The second part has a second heat dissipation property different from the first heat dissipation property. Sensor device.

2. The first portion has the first heat dissipation performance by having a plurality of first openings that are opened with a first aperture ratio, The second portion has the second heat dissipation capability by having a plurality of second openings that are opened with a second opening ratio different from the first opening ratio. The sensor device according to claim 1.

3. The first portion, when viewed from the second direction, is the portion on the side of the first pressure sensor, which is one of two portions obtained by dividing the bottom of the bracket by a virtual line that intersects the central axis of the second pipe and is perpendicular to the first and second directions. The second part is the part of the two parts that is on the side of the second pressure sensor. The sensor device according to claim 1.

4. The first portion, when viewed from the second direction, is the portion on the side of the first pressure sensor, of the two portions obtained by dividing the entire bracket by a virtual line that intersects the central axis of the second pipe and is perpendicular to the first and second directions. The second part is the part of the two parts that is on the side of the second pressure sensor. The sensor device according to claim 1.

5. The system further comprises a control unit that processes pressure detection signals from the first pressure sensor and the second pressure sensor, respectively. The bracket is fixed to the housing of the control unit. The sensor device according to claim 1.

6. The bracket is configured to allow adjustment of its relative rotational position to the housing when it is fixed to the housing. The first part and the second part face each other in the bracket after the adjustment of the relative rotational position, with the second pipe in between in the first direction. The sensor device according to claim 5.

7. The bracket is provided with screw holes through which screws for fastening the bracket to the housing pass, The screw passage hole is formed in an arc shape so that the screw can move relative to the screw passage hole when adjusting the relative rotation position. The sensor device according to claim 6.

8. A sensor head including a first pipe extending in a first direction, a first pressure sensor fixed to a first end of the first pipe, and a second pressure sensor fixed to a second end of the first pipe different from the first end, A second pipe extending in a second direction different from the first direction and connected to the middle of the first pipe, which guides the pressure of the fluid to be measured to the first pressure sensor and the second pressure sensor via the first pipe, A heater for heating the first pressure sensor and the second pressure sensor, The device comprises a cup-shaped bracket having a bottom that contacts the second pipe while it is passing through it, and which houses the sensor head and the heater, The bracket has a first portion and a second portion that face each other in the first direction, with the second pipe in between. The first part has a first heat dissipation property, The second part has a second heat dissipation property, A method for manufacturing a sensor device, The first step is to position the heater relative to the sensor head, which has the second pipe connected to the first pipe, A second step involves adjusting the temperature gradient between the first and second pressure sensors when the heater heats the first and second pressure sensors by adjusting the first heat dissipation of the first part and the second heat dissipation of the second part, A method for manufacturing a sensor device having the following characteristics.

9. The bracket comprises a first bracket member having at least the first portion and a second bracket member having at least the second portion. In the second step, from a plurality of first candidates for the first bracket member and a plurality of second candidates for the second bracket member, a first candidate and a second candidate that give the temperature gradient a desired gradient are selected, and the first heat dissipation and the second heat dissipation are adjusted by arranging the brackets with the selected first candidate and second candidate as the first bracket member and second bracket member. A method for manufacturing the sensor device according to claim 8.

10. The sensor device further comprises a control unit that processes pressure detection signals from the first pressure sensor and the second pressure sensor. The bracket is fixed to the housing of the control unit, and is configured to allow adjustment of its relative rotational position to the housing when it is fixed to the housing. In the second step, the bracket is rotated relative to the housing to determine a relative rotation position that sets the temperature gradient to a desired gradient, and the bracket is fixed to the housing at the determined relative rotation position to adjust the first heat dissipation and the second heat dissipation. A method for manufacturing the sensor device according to claim 9.

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