Vacuum drying apparatus

Abstract

The gas inside the drying chamber is sucked out, reducing the pressure in the chamber and drying the workpiece. [Solution] The vacuum drying apparatus 10 comprises a first case 11 and a second case 12 that combine and separate by relative movement, and a vacuum unit 14 for reducing the pressure of the drying chamber 13 formed between the combined first case 11 and second case 12. At least one of the first case 11 and the second case 12 is a movable case that moves for the relative movement. The vacuum unit 14 comprises a vacuum mechanism 15 and a suction piping section 16 that connects the vacuum mechanism 15 and the drying chamber 13. The suction piping section 16 comprises a fixed pipe 17 connected to the vacuum mechanism 15 and a movable pipe 18 connected to the movable case 11 and moving together with the movable case 11. As the movable case 11 moves, the movable pipe 18 switches between a connected state connected to the fixed pipe 17 and an open state separated from the fixed pipe 17.

Description

Technical Field

[0006] ,

[0001] The present invention relates to a vacuum drying apparatus for drying a workpiece.

Background Art

[0002] For example, in the manufacture of perovskite solar cells, a coating process and a drying process are included, in which a liquid is applied to a workpiece to form a发电层 (it should be noted that this might be a wrong expression, perhaps it should be "power generation layer" or other correct terms). In the coating process, a coating film is formed on the workpiece by a coating apparatus having, for example, a slit die. In the drying process, the drying apparatus dries the coating film. The result in the drying process affects the power generation efficiency. Patent Document 1 discloses a vacuum drying apparatus.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] As vacuum drying apparatuses, a gate shutter method and an upper lid lifting method are known. In the case of the gate shutter method, since a lift pin or a stage for holding a substrate moves up and down, the volume of the drying chamber (chamber) expands. On the other hand, in the case of the upper lid lifting method, it is possible to reduce the volume of the drying chamber, and it is easy to improve the drying efficiency.

[0005] In the upper lid lifting method, in order to further improve the drying efficiency, when a suction pipe connecting the drying chamber and a vacuum pump is connected to the upper lid, since the upper lid moves up and down, measures such as including a flexible pipe in the suction pipe are required. In particular, in order to cope with a large workpiece (substrate), the diameter of the suction pipe becomes large, and it may be difficult to take the above measures.

[0006] Therefore, the present invention aims to provide a vacuum drying apparatus that is similar to a top lid lifting method and has new technical means. [Means for solving the problem]

[0007] The vacuum drying apparatus of the present invention comprises a first case and a second case that combine and separate by relative movement, and a vacuum unit for reducing the pressure of the drying chamber formed between the combined first case and the second case. At least one of the first case and the second case is a movable case that moves for the relative movement. The vacuum unit comprises a vacuum mechanism and a suction piping section that connects the vacuum mechanism and the drying chamber. The suction piping section comprises a fixed pipe connected to the vacuum mechanism and a movable pipe connected to the movable case and moving together with the movable case. By moving the movable case, the movable pipe is switched between a connected state, connected to the fixed pipe, and an open state, separated from the fixed pipe. [Effects of the Invention]

[0008] When the first and second cases are joined together by the movement of the mobile case, a connected state is achieved in which the mobile piping and the fixed piping are connected. Through the suction piping section having these mobile and fixed pipes, gas in the drying chamber is drawn in, making it possible to reduce the pressure in the drying chamber. [Brief explanation of the drawing]

[0009] [Figure 1] Figure 1 is an explanatory diagram showing a first form of a pressure reducing device. [Figure 2] Figure 2 is an explanatory diagram showing the connection between the movable piping and the first fixed piping. [Figure 3] Figure 3 is an explanatory diagram showing the connection between the movable piping and the first fixed piping. [Figure 4] Figure 4 is an explanatory diagram showing a second form of the vacuum drying apparatus. [Figure 5] Figure 5 is an explanatory diagram showing a third form of a vacuum drying apparatus. [Figure 6] Figure 6 is an explanatory diagram showing a fourth configuration of the vacuum drying apparatus. [Figure 7] Figure 7 is an explanatory diagram showing a fifth configuration of the vacuum drying apparatus. [Figure 8] Figure 8 is an explanatory diagram showing a sixth configuration of the vacuum drying apparatus. [Figure 9] Figure 9 is an explanatory diagram showing a seventh configuration of the vacuum drying apparatus. [Figure 10] Figure 10 is an explanatory diagram showing an eighth configuration of a vacuum drying apparatus. [Figure 11] Figure 11 is an explanatory diagram showing the ninth form of a vacuum drying apparatus. [Modes for carrying out the invention]

[0010] <Summary of Embodiments of the Invention> The embodiments of the present invention are outlined below. (1) The vacuum drying apparatus of the present invention comprises a first case and a second case that combine and separate by relative movement, and a vacuum unit for reducing the pressure of the drying chamber formed between the combined first case and the second case. At least one of the first case and the second case is a movable case that moves for the relative movement. The vacuum unit comprises a vacuum mechanism and a suction piping section that connects the vacuum mechanism and the drying chamber. The suction piping section comprises a fixed pipe connected to the vacuum mechanism and a movable pipe connected to the movable case and moving together with the movable case. By moving the movable case, the movable pipe is switched between a connected state, connected to the fixed pipe, and an open state, separated from the fixed pipe.

[0011] According to the vacuum drying device having the above structure, in order to take in and out the workpiece to be dried with respect to the drying chamber, the moving case is configured to move. Even if a moving pipe is attached to the moving case, when the first case and the second case are combined by the movement of the moving case, a connected state in which the moving pipe and the fixed pipe are connected is obtained. By means of the vacuum mechanism, the gas in the drying chamber can be sucked through the suction pipe portion having these moving pipes and fixed pipes, and the drying chamber can be depressurized.

[0012] (2) In the vacuum drying device of (1) above, among the first case and the second case, one is the moving case and the other is a fixed case that does not move, and the suction pipe portion has a second fixed pipe connected to the fixed case. According to this structure, the gas in the drying chamber is sucked from both the first case side and the second case side, and the drying chamber is depressurized.

[0013] (3) In the vacuum drying device of (2) above, the vacuum mechanism has a first vacuum pump to which a first fixed pipe that can be switched between the connected state and the open state in relation to the moving pipe is connected, and a second vacuum pump to which the second fixed pipe is connected. According to this structure, it is possible to independently suck the gas from the first case side and the gas from the second case side.

[0014] (4) In any one of the vacuum drying devices of (1) to (3) above, the suction pipe portion has, as the moving pipe, a first moving pipe connected to the first part of the moving case and a second moving pipe connected to a second part different from the first part of the moving case. According to this structure, it is possible to suck the gas in the drying chamber from a plurality of locations (two locations) of the moving case.

[0015] (5) In any one of the vacuum drying apparatuses according to (1) to (4) above, the moving pipe is composed of a rigid pipe, the moving pipe is fixed to the moving case, and relative movement between the moving pipe and the moving case is impossible. According to this configuration, for example, it becomes possible to provide the moving pipe along the moving case, and it becomes possible to suppress the lengthening of the moving pipe. The moving pipe does not need to have a flexible pipe.

[0016] (6) In any one of the vacuum drying apparatuses according to (1) to (5) above, the decompression mechanism and the fixed pipe are immovable and in a fixed state. According to this configuration, it becomes possible to reduce the mechanism for moving.

[0017] (7) In any one of the vacuum drying apparatuses according to (1) to (6) above, the suction pipe portion includes a moving block provided at an end of the moving pipe and having a first contact surface, a fixed block provided at an end of the fixed pipe and having a second contact surface capable of contacting the first contact surface, and a seal member provided on at least one of the first contact surface and the second contact surface, and sealing between the first contact surface and the second contact surface in the connected state. According to this configuration, when the first case and the second case are combined, the connected state is obtained.

[0018] <Details of Embodiments of the Present Invention> Hereinafter, details of embodiments of the present invention will be described. [Regarding the Vacuum Drying Apparatus of the Present Invention] The vacuum drying apparatus of the present invention is used to dry a liquid applied to a workpiece. For example, in the manufacture of a perovskite solar cell, a coating process and a drying process for applying a liquid to form a power generation layer on a workpiece are included. In the coating process, for example, a coating apparatus having a slit die discharges a liquid, and a coating film is formed on the workpiece with this liquid. In the case of this embodiment, the workpiece is plate-shaped, and the liquid is applied so as to spread over the entire upper surface of the workpiece. In the drying process, the drying apparatus dries the coating film formed by the liquid. As the drying apparatus, the vacuum drying apparatus of the present invention is used.

[0019] [First form of vacuum drying apparatus] Figure 1 is an explanatory diagram showing a first configuration of the vacuum drying apparatus 10. The vacuum drying apparatus 10 comprises a first case 11, a second case 12, and a vacuum unit 14. The first case 11 and the second case can be joined and separated by relative vertical movement. Figure 1 shows the separated state just before joining. The vacuum unit 14 is equipment for reducing the pressure in the drying chamber 13 formed between the joined first case 11 and second case 12.

[0020] The pressure reducing unit 14 has a pressure reducing mechanism 15 and a suction piping section 16 that connects the pressure reducing mechanism 15 to the drying chamber 13. In this embodiment, the pressure reduction mechanism 15 is a pressure reduction pump. The pressure reduction mechanism 15 shown in Figure 1 is configured to have one pressure reduction pump. The pressure reduction mechanism 15 sucks the gas from the drying chamber 13 through the suction piping section 16, thereby reducing the pressure in the drying chamber 13. By reducing the pressure in the drying chamber 13, the drying of the liquid applied to the workpiece W is accelerated. The suction piping section 16 includes a first fixed pipe 17 connected to the pressure reducing mechanism 15 and a movable pipe 18 connected to the first case 11. The specific configuration of the suction piping section 16 will be described later.

[0021] One of the first case 11 and the second case 12 is a movable case that moves for the relative movement described above. The other of the first case 11 and the second case 12 is a fixed case that remains stationary and does not move. In this embodiment, the second case 12, located below, is the fixed case, and the first case 11, located above it, is the movable case that moves vertically. In the following description, the first case 11 will be referred to as the "movable case 11," and the second case 12 will be referred to as the "fixed case 12."

[0022] The movable pipe 18 of the suction piping section 16 is connected to the movable case 11 and moves vertically together with the movable case 11. Furthermore, the second case 12 shown below may also be movable in the vertical direction. In other words, at least one of the first case 11 and the second case 12 may be a movable case that moves for the purpose of relative movement. However, in order to reduce the number of mechanisms required to move each part, it is preferable that the second case 12, the pressure reducing mechanism 15, and the first fixed piping 17 (and the second fixed piping 19 described later) connected to the pressure reducing mechanism 15 are immovable and fixed in place.

[0023] The movable case 11, located above, has an upper wall 51 and side walls 52 provided around the upper wall 51, and has a lid shape that opens downwards. The fixed case 12, located below, has a lower wall 55. The movable case 11 moves vertically relative to the fixed case 12. This allows the movable case 11 and the fixed case 12 to combine and separate. The vertical movement of the movable case 11 is performed by an actuator (not shown). The movable case 11 becomes the upper lid, and the fixed case 12 becomes the lower lid.

[0024] A drying chamber 13 is formed between the combined mobile case 11 and the fixed case 12. The workpiece W to be dried is placed in the drying chamber 13. The drying chamber 13 is then depressurized by a depressurization unit 14.

[0025] Multiple support members (support pins) 56 are provided in the drying chamber 13. The support members 56 are provided in the fixing case 12 and support the plate-shaped workpiece W from below. As described above, the vacuum drying apparatus 10 is a lifting type in which the movable case 11 moves vertically. In this embodiment, it is a lifting type apparatus in which the movable case (first case) 11, which corresponds to the top lid, moves up and down.

[0026] Next, we will describe the suction piping section 16 that connects the processing unit, which includes the movable case 11 and the fixed case 12, with the pressure reducing mechanism 15. The suction piping section 16 has a first fixed pipe 17 connected to the pressure reducing mechanism 15 and a movable pipe 18 connected to the movable case 11. In the configuration shown in Figure 1, the suction piping section 16 has a second fixed pipe 19 connected to the fixed case 12. The first fixed pipe 17 and the second fixed pipe 19 merge, and the pipe 20 formed by the merging of these two pipes is connected to the pressure reducing mechanism 15. The pipe 20 is part of the first fixed pipe 17. Gas in the drying chamber 13 is drawn in from both the movable case 11 side and the fixed case 12 side, and the pressure in the drying chamber 13 is reduced.

[0027] The first fixed pipe 17 and the second fixed pipe 19 are each made of rigid piping, for example, metal piping, and are fixed to an apparatus frame or apparatus base (not shown). The end 171 of the first fixed pipe 17 that can be connected to the movable pipe 18 is attached to the fixed case 12 (lower wall 55). The second fixed pipe 19 has a control valve 41 to adjust the flow rate of the gas passing through it. The movable pipe 18 has a control valve 42 to adjust the flow rate of the gas passing through it. The opening of these control valves 41 and 42 is controlled by a controller (control device) not shown in the figure.

[0028] The movable piping 18 will now be described. The movable piping 18 is not flexible piping, but is composed entirely of rigid piping. In other words, the movable piping 18 does not include any flexible piping. The movable piping 18 is fixed to the movable case 11 and cannot move relative to the movable case 11. As a result, the movable piping 18 moves together with the movable case 11. The movable piping 18 is installed, for example, along the movable case 11 (part of the upper wall 51 and the side wall 52). This prevents the movable piping 18 from becoming too long.

[0029] Of the movable pipe 18, the end 181 that can be connected to the first fixed pipe 17 is attached to the movable case 11. When the movable case 11 and the fixed case 12 are combined, the end 181 of the movable pipe 18 and the end 171 of the first fixed pipe 17 become connected. This connected state is called the "connected state". When the movable case 11 and the fixed case 12 are separated, the end 181 of the movable pipe 18 and the end 171 of the first fixed pipe 17 become separated and unconnected. This unconnected state is called the "open state".

[0030] Figures 2 and 3 are explanatory diagrams showing the connection J between the end 181 of the movable pipe 18 and the end 171 of the first fixed pipe 17. Figure 2 shows the open state, and Figure 3 shows the connected state. The suction pipe section 16 includes a movable block 28, a fixed block 27, and a sealing member 29. The movable block 28 shown in Figure 2 is located on the side of the movable case 11. The movable block 28 is attached to the side wall 52 of the movable case 11. The end 181 of the movable pipe 18 is attached to the movable block 28. The end 181 opens downwards.

[0031] The fixing block 27 is located on the side of the fixing case 12. The fixing block 27 shown in Figure 2 is part of the lower wall 55 of the fixing case 12, but it may be a separate component from the lower wall 55 and attached to the lower wall 55. The end 171 of the first fixing pipe 17 is attached to the fixing block 27. The end 171 opens upwards.

[0032] A movable block 28 is provided at the end 181 of the movable pipe 18, and the movable block 28 has a flat first contact surface 281. A fixed block 27 is provided at the end 171 of the fixed pipe 17, and the fixed block 27 has a flat second contact surface 271. The second contact surface 271 can contact the first contact surface 281.

[0033] In the configurations shown in Figures 2 and 3, the sealing member 29 is provided on the second contact surface 271. The sealing member 29 is an O-ring. The sealing member 29 only needs to be provided on at least one of the first contact surface 281 and the second contact surface 271. In the connection state shown in Figure 3, the sealing member 29 seals the space between the first contact surface 281 and the second contact surface 271. In the connection state, the inside of the suction piping section 16 is kept under reduced pressure.

[0034] As the mobile case 11 moves, the mobile piping 18 is selectively switched between a connected state, where it is connected to the first fixed piping 17 (see Figure 3), and an open state, where it is separated from the first fixed piping 17 (see Figure 2). When the movable case 11 and the fixed case 12 are combined (see Figure 3), the first contact surface 281 and the second contact surface 271 come into contact, and the aforementioned connection state is obtained in which the movable pipe 18 and the first fixed pipe 17 are connected. The movable block 28 functions as a flange member attached to the end 181 of the movable pipe 18, and the fixed block 27 functions as a flange member attached to the end 171 of the first fixed pipe 17. The sealing member 29 is interposed between these flange members.

[0035] As shown in Figure 1, the movable pipe 18 is connected to the central part of the movable case 11, and the first fixed pipe 17 is connected to the central part of the fixed case 12. The workpiece W is plate-shaped and is placed in the center of the drying chamber 13. The distance from the connection point Q between the second fixed pipe 19 and the fixed case 12 to the peripheral edge We of the workpiece W is smaller than the distance from the connection point Q to the central part Wc of the workpiece W. Therefore, it is conceivable that the liquid at the peripheral edge We of the workpiece W will dry faster than the liquid at the central part Wc of the workpiece W, according to the gas drawn in from the second fixed pipe 19. However, the connection point R between the movable pipe 18 and the movable case 11 is located above the central part Wc of the workpiece W. Therefore, the liquid at the central part Wc of the workpiece W can also be dried without delay compared to the liquid at the peripheral edge We of the workpiece W. This makes it possible to dry the entire surface uniformly in a short time.

[0036] [Second form of vacuum drying apparatus] Figure 4 is an explanatory diagram showing a second configuration of the vacuum drying apparatus 10. The same reference numerals are used for the same components in each of the configurations described later, including this second configuration, and in the first configuration shown in Figure 1; therefore, explanations of these identical components are omitted. In the second form of the vacuum drying apparatus 10, the vacuum mechanism 15 has multiple (two in the illustrated example) vacuum pumps 15A and 15B. The two vacuum pumps 15A and 15B are connected in parallel to the piping 20.

[0037] As mentioned above, the first fixed pipe 17 and the second fixed pipe 19 are joined together, and the pipe 20 is the pipe that these two pipes merge into to form a single pipe. According to the vacuum drying apparatus 10 shown in Figure 4, a high-capacity vacuum mechanism 15 can be obtained without increasing the capacity (output) of a single vacuum pump 15A (15B).

[0038] [Third form of vacuum drying apparatus] Figure 5 is an explanatory diagram showing a third embodiment of the vacuum drying apparatus 10. In the third embodiment of the vacuum drying apparatus 10, as in the first and second embodiments, the suction piping section 16 has a second fixed pipe 19 connected to the fixed case 12.

[0039] The third form of the pressure reducing mechanism 15, like the second form, has two pressure reducing pumps (21, 22), but the connection configuration in the suction piping section 16 differs from that of the second form. In the third form, the first pressure reducing pump 21 is a pressure reducing pump to which the first fixed piping 17, which can be switched between the connected state and the open state in relation to the movable piping 18, is connected. The second pressure reducing pump 22, which is different from the first pressure reducing pump 21, is another pressure reducing pump to which the second fixed piping 19 is connected. The first fixed piping 17 and the second fixed piping 19 are not connected.

[0040] In the third form of the vacuum drying apparatus 10, it becomes possible to independently suction gas from the first case 11 and from the second case 12. This makes it easy to create a difference between the amount of gas drawn in (discharged) from the mobile case 11 side by the first pressure reducing pump 21 and the amount of gas drawn in (discharged) from the fixed case 12 side by the second pressure reducing pump 22.

[0041] Gas is drawn in from the mobile case 11, from the top surface of the workpiece W. In contrast, gas is drawn in from the fixed case 12, from the bottom surface of the workpiece W. A liquid is applied to the top surface of the workpiece W. By differentiating the amount of gas drawn in from the top surface of the workpiece W and from the bottom surface of the workpiece W, uniform drying of the surface becomes possible, and drying efficiency can be improved.

[0042] [Fourth form of vacuum drying apparatus] Figure 6 is an explanatory diagram showing a fourth configuration of the vacuum drying apparatus 10. The suction piping section 16 of the fourth configuration has multiple pipes as movable pipes 18. Specifically, the suction piping section 16 has a first movable pipe 31 connected to the first part 111 of the movable case 11, and a second movable pipe 32 connected to the second part 112 of the movable case, as movable pipes 18. The first part 111 and the second part 112 are separate parts of the movable case 11. The first part 111 and the second part 112 are parts that are at the same distance from the central position C1 of the movable case 11.

[0043] The first movable pipe 31 and the second movable pipe 32 move together with the movable case 11, similar to the movable pipe 18 shown in Figure 1. Furthermore, the suction piping section 16 has multiple first fixed pipes 17 connected to the pressure reducing mechanism 15, and multiple second fixed pipes 19 connected to the fixed case 12. The number of first fixed pipes 17 and second fixed pipes 19 is the same as the number of movable pipes 18 (first movable pipes 31 and second movable pipes 32). In the configuration shown in Figure 6, there are two first fixed pipes 17 and two second fixed pipes 19.

[0044] In Figure 6, the reference numeral for one of the first fixed pipes 17 is shown as "17A," and the reference numeral for the other first fixed pipe 17 is shown as "17B." The reference numeral for one of the second fixed pipes 19 is shown as "19A," and the reference numeral for the other second fixed pipe 19 is shown as "19B." As the movable case 11 moves, the first movable pipe 31 is selectively switched between a connected state, where it is connected to one of the first fixed pipes 17A, and an open state, where it is separated from the first fixed pipe 17A. As the movable case 11 moves, the second movable pipe 32 is selectively switched between a connected state, where it is connected to the other second fixed pipe 17B, and an open state, where it is separated from the second fixed pipe 17B.

[0045] The connection point J between the end of the first movable pipe 31 and the end of one of the first fixed pipes 17A, and the connection point J between the end of the second movable pipe 32 and the end of the other first fixed pipe 17B, are the same as the configuration of the connection point J shown in Figures 2 and 3. However, both the first movable pipe 31 and the second movable pipe 32 are attached to a common movable block 28, and both the one second fixed pipe 17A and the other second fixed pipe 17B are attached to a common fixed block 27.

[0046] In the fourth configuration, one first fixed pipe 17A and one second fixed pipe 19A merge, and the pipe 20A formed by the merger of these two pipes is connected to the first pressure reducing mechanism 15 (151). The other first fixed pipe 17B and the other second fixed pipe 19B merge, and the pipe 20B formed by the merger of these two pipes is connected to the second pressure reducing mechanism 15 (152). The pipe 20A is a part of one first fixed pipe 17A, and the pipe 20B is a part of the other first fixed pipe 17B.

[0047] The first pressure reducing mechanism 151 has multiple (two in the illustrated example) pressure reducing pumps 15A, 15B. The second pressure reducing mechanism 152 has multiple (two in the illustrated example) pressure reducing pumps 15A, 15B. The two pressure reducing pumps 15A and 15B of the first pressure reducing mechanism 151 are connected in parallel to the piping 20A. The two pressure reducing pumps 15A and 15B of the second pressure reducing mechanism 152 are connected in parallel to the piping 20B. According to the fourth form of the vacuum drying apparatus 10, it becomes possible to suction the gas from the drying chamber 13 from multiple locations (two locations) of the mobile case 11, and also to suction the gas from the drying chamber 13 from multiple locations (two locations) of the fixed case 12.

[0048] [Fifth form of vacuum drying apparatus] Figure 7 is an explanatory diagram showing a fifth configuration of the vacuum drying apparatus 10. The fifth configuration is a modified example of the third configuration shown in Figure 5. The vacuum mechanism 15 of the fifth configuration has multiple (four in this example) vacuum pumps 15A, 15B, 15C, and 15D. The first vacuum pump 15A and the second vacuum pump 15B are connected in parallel to the first fixed piping 17. The third vacuum pump 15C and the fourth vacuum pump 15D are connected in parallel to the second fixed piping 19. The first fixed piping 17 and the second fixed piping 19 are not connected.

[0049] According to the vacuum drying apparatus 10 shown in Figure 7, a high-capacity vacuum mechanism 15 can be obtained without increasing the capacity (output) of a single vacuum pump. Gas suction from the first case 11 and gas suction from the second case 12 can be performed independently.

[0050] [Sixth form of vacuum drying apparatus] Figure 8 is an explanatory diagram showing a sixth embodiment of the vacuum drying apparatus 10. In each of the above embodiments, the suction piping section 16 has a second fixed pipe 19 connected to the fixed case 12, but in the fifth embodiment, the suction piping section 16 does not have the second fixed pipe 19. It is also possible to configure the vacuum drying apparatus 10 in embodiments other than those shown in Figure 8 so that the suction piping section 16 does not have the second fixed pipe 19.

[0051] In the sixth configuration, the movable piping 18 has branch pipes 182 and 183. The first branch pipe 182 is connected to the first part 111 of the movable case 11, and the second branch pipe 183 is connected to the second part 112 of the movable case 11. The first part 111 and the second part 112 are separate parts. The first part 111 and the second part 112 are the same distance from the central position C1 of the movable case 11. Note that the number of branch pipes is not limited to two, but may be three or more.

[0052] According to the vacuum drying apparatus 10 shown in Figure 8, the gas in the drying chamber 13 is drawn in only from the upper moving case 11 side, but from multiple points that are separated from each other (two points, the first part 111 and the second part 112). As a result, the liquid in the central part Wc of the workpiece W can be dried without delay compared to the liquid in the peripheral part We of the workpiece W. In other words, it is possible to dry the entire surface uniformly.

[0053] [Seventh form of vacuum drying apparatus] Figure 9 is an explanatory diagram showing a seventh configuration of the vacuum drying apparatus 10. The seventh configuration is a modified version of the sixth configuration shown in Figure 8. In the seventh configuration, the movable piping 18 is not branched, and the movable piping 18 is connected to the movable case 11 at one point.

[0054] [The eighth form of a vacuum drying apparatus] Figure 10 is an explanatory diagram showing an eighth configuration of the vacuum drying apparatus 10. In the configuration shown in Figure 1, the movable piping 18 is connected to the movable case 11 at one point, and the second fixed piping 19 is connected to the fixed case 12 at one point. In contrast, in the configuration shown in Figure 10, similar to the sixth configuration shown in Figure 8, the movable piping 18 has branch pipes 182 and 183. The first branch pipe 182 is connected to the first part 111 of the movable case 11, and the second branch pipe 183 is connected to the second part 112 of the movable case 11.

[0055] The second fixed piping 19 has branch pipes 192 and 193. The first branch pipe 192 is connected to the first part 121 of the fixed case 12, and the second branch pipe 193 is connected to the second part 122 of the fixed case 12. In addition, in the vacuum drying apparatus 10 of the other forms shown in Figure 10, one or both of the following configurations may be adopted: a configuration in which the movable piping 18 has branch pipes 182 and 183 connected to the movable case 11, and a configuration in which the second fixed piping 19 has branch pipes 192 and 193 connected to the fixed case 12. By drawing gas from the drying chamber 13 from multiple locations, it becomes possible to uniformly dry the liquid on the workpiece W across its surface, and also to improve drying efficiency.

[0056] [The ninth form of a vacuum drying apparatus] Figure 11 is an explanatory diagram showing the ninth form of the vacuum drying apparatus 10. In the ninth form, similar to the fourth form shown in Figure 6, the suction piping section 16 has, as movable piping 18, a first movable piping 31 connected to the first part 111 of the movable case 11, and a second movable piping 32 connected to the second part 112 of the movable case.

[0057] The suction piping section 16 has multiple first fixed pipes 17 connected to the pressure reducing mechanism 15. One of the first fixed pipes 17 is denoted as "17A," and the other first fixed pipe 17 is denoted as "17B." One first fixed pipe 17A and the other first fixed pipe 17B merge and connect to pipe 20. As the movable case 11 moves, the first movable pipe 31 is selectively switched between a connected state, where it is connected to one of the first fixed pipes 17A, and an open state, where it is disconnected from the first fixed pipe 17A. As the movable case 11 moves, the second movable pipe 32 is selectively switched between a connected state, where it is connected to the other first fixed pipe 17B, and an open state, where it is disconnected from the first fixed pipe 17B.

[0058] The second fixed piping 19 has branch pipes 192 and 193, similar to the eighth configuration shown in Figure 10. The first branch pipe 192 is connected to the first part 121 of the fixed case 12, and the second branch pipe 193 is connected to the second part 122 of the fixed case 12. The pressure reducing mechanism 15 has multiple (four in the illustrated example) pressure reducing pumps. The four pressure reducing pumps are connected in parallel to the piping 20.

[0059] [Regarding each type of vacuum drying apparatus 10] As described above, in each of the above-described forms of vacuum drying apparatus 10, the movable case 11 moves in order to move the workpiece W to be dried into and out of the drying chamber 13. A movable pipe 18 is attached to the movable case 11. When the first case 11 and the second case 12 are joined together by the movement of the movable case 11, a connected state is obtained in which the movable pipe 18 and the first fixed pipe 17 are connected. In this connected state, a sealed state is obtained at the connection part J between the end 181 of the movable pipe 18 and the end 171 of the first fixed pipe 17.

[0060] The pressure reduction mechanism 15 draws gas from inside the drying chamber 13 through the suction piping section 16, which has the movable pipes 18 and fixed pipes 17, thereby reducing the pressure inside the drying chamber 13. This makes it possible to dry the liquid in the workpiece W placed inside the drying chamber 13.

[0061] The movable piping 18 is installed along the movable case 11, so the length of the movable piping 18 does not increase. If the workpiece W is a large substrate and the vacuum drying apparatus 10 is for drying large substrates, the diameter of the suction piping section 16 becomes larger. Even in this case, the vacuum drying apparatus 10 of each of the above forms has the configuration of the connecting section J (see Figures 2 and 3), and it is not necessary to provide flexible piping in the suction piping section 16, so the configuration does not become complicated.

[0062] If the movable pipe 18 has a control valve 42, and the second fixed pipe 19 has a control valve 41, the opening degrees of these control valves 41 and 42 are adjusted. This adjusts the depressurization rate in each region of the drying chamber 13 (especially the upper and lower regions surrounding the workpiece W). This makes it possible to dry the liquid applied to the workpiece W uniformly across the surface of the workpiece W.

[0063] 〔others〕 The embodiments disclosed herein are illustrative and not restrictive in all respects. The technical scope of the present invention is not limited to the embodiments described above and includes all modifications within the scope equivalent to the configurations described in the claims. [Explanation of Symbols]

[0064] 10 Vacuum drying apparatus 11. Mobile Case (First Case) 12 Fixed Case (Second Case) 13 Drying room 14 Pressure Reducing Unit 15. Pressure reduction mechanism 15A, 15B, 15C, 15D Pressure Reducing Pumps 16 Suction piping section 17 First fixed piping 18 Mobile piping 19 Second fixed piping 21 Pressure Reducing Pump 22 Pressure pump 27 Fixed Blocks 28 Moving Blocks 29. Sealing member 31 First mobile piping 32 Second mobile piping 111 Part 1 112 Part 2 171 End 181 End 271 Second contact surface 281 First contact surface

Claims

1. The first and second cases involve merging and disintegrating through relative movement, It includes a vacuum unit for reducing the pressure of the drying chamber formed between the combined first case and the second case, At least one of the first case and the second case is a moving case that moves for the relative movement, The vacuum unit comprises a vacuum mechanism and a suction piping section connecting the vacuum mechanism and the drying chamber. The aforementioned suction piping section is A fixed pipe connected to the pressure reducing mechanism, A movable pipe connected to the aforementioned movable case and moving together with the aforementioned movable case, It has, As the mobile case moves, the mobile piping switches between a connected state, where it is connected to the fixed piping, and an open state, where it is separated from the fixed piping. Vacuum drying apparatus.

2. Of the first case and the second case, one is the movable case and the other is the fixed case that does not move. The aforementioned suction piping section is Having a second fixed pipe connected to the aforementioned fixed case, The vacuum drying apparatus according to claim 1.

3. The aforementioned pressure reduction mechanism is A first pressure reducing pump to which the first fixed piping, which can be switched between the connected state and the open state in relation to the movable piping, is connected, The second pressure reducing pump to which the second fixed piping is connected, Having, The vacuum drying apparatus according to claim 2.

4. The aforementioned suction piping section is, as the movable piping, A first movable pipe connected to a part of the aforementioned movable case, A second movable pipe connected to a second part which is separate from the first part of the movable case, Having, A vacuum drying apparatus according to any one of claims 1 to 3.

5. The aforementioned movable piping is composed of rigid piping, The movable piping is fixed to the movable case and cannot move relative to the movable case. A vacuum drying apparatus according to any one of claims 1 to 3.

6. The pressure reducing mechanism and the fixed piping are immovable and in a fixed state. A vacuum drying apparatus according to any one of claims 1 to 3.

7. The aforementioned suction piping section is A movable block having a first contact surface is provided at the end of the movable pipe, A fixed block provided at the end of the fixed piping and having a second contact surface that can contact the first contact surface, A sealing member is provided on at least one of the first contact surface and the second contact surface, and in the connected state, seals the space between the first contact surface and the second contact surface. Having, A vacuum drying apparatus according to any one of claims 1 to 3.

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