Optical equipment and laser processing equipment

Abstract

In an optical device in which a light-reflecting mirror substrate is driven by an actuator, the contact between the mirror substrate and the actuator is maintained. [Solution] The optical device 30 includes a mirror substrate 32 having a reflective portion that reflects light, a plurality of actuators 34 each having a movable end 34a that is movable in non-fixed contact with the portion of the mirror substrate 32 excluding the reflective portion, and at least one elastic member 36 that biases the mirror substrate 32 toward the movable end 34a of each of the plurality of actuators 34 and maintains contact between the mirror substrate 32 and the movable end 34a of each of the plurality of actuators 34.

Description

Technical Field

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[0001] The present disclosure relates to an optical device that reflects laser light and a laser processing device including the optical device.

Background Art

[0002] Conventionally, a laser processing device that performs laser processing using an optical device that reflects laser light is known. For example, Patent Document 1 discloses a laser processing device that performs laser cutting using an optical device that reflects laser light. The optical device includes a mirror substrate and a plurality of piezo elements (actuators) each having a tip fixed to the mirror substrate to drive the mirror substrate. When each of the plurality of actuators expands and contracts, the mirror substrate is driven.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the case of the laser processing device described in Patent Document 1, the actuator pushes and pulls the mirror substrate by expanding and contracting. When the actuator pulls the mirror substrate, tensile stress is generated in the fixing portion therebetween. When the actuator repeatedly expands and contracts at high speed, tensile stress is repeatedly generated in the fixing portion between the mirror substrate and the actuator. Due to the repeated tensile stress, the fixing portion may finally undergo fatigue failure and the mirror substrate and the actuator may separate.

[0005] Therefore, an object of the present disclosure is to continuously maintain the contact between a mirror substrate that reflects light and an actuator in an optical device that drives the mirror substrate by the actuator.

Means for Solving the Problems

[0006] To solve the above-mentioned problems, according to one aspect of this disclosure A mirror substrate having a reflective part that reflects light, Multiple actuators, each having a movable end that is movable while in non-fixed contact with the portion of the mirror substrate excluding the reflective portion, An optical device is provided, comprising at least one elastic member that biases the mirror substrate toward the movable end of each of the plurality of actuators and maintains contact between the mirror substrate and the movable end of each of the plurality of actuators.

[0007] Furthermore, according to another aspect of this disclosure, The optical device described above, A laser processing apparatus is provided, which includes a laser output device that irradiates laser light toward the reflective surface of the mirror substrate of the optical apparatus. [Effects of the Invention]

[0008] According to this disclosure, in an optical device in which a light-reflecting mirror substrate is driven by an actuator, the contact between the mirror substrate and the actuator can be maintained. [Brief explanation of the drawing]

[0009] [Figure 1] Schematic diagram of the laser processing apparatus according to Embodiment 1 of this disclosure. [Figure 2] Perspective view of the optical device according to Embodiment 1 [Figure 3] Top view of the optical device according to Embodiment 1 [Figure 4] Cross-sectional view of the optical device along line AA shown in Figure 2. [Figure 5] Cross-sectional view of an optical device in which the mirror substrate is tilted by multiple actuators. [Figure 6] Diagram showing the trajectory of the laser spot during wobbling welding. [Figure 7] Perspective view of the optical device according to Embodiment 2 of this disclosure [Figure 8] Cross-sectional view of the optical device along line B-B shown in FIG. 7 [Figure 9] Top view of the optical device according to Embodiment 3 of the present disclosure [Figure 10] Cross-sectional view of the optical device along line C-C shown in FIG. 9 [Figure 11] Cross-sectional view of the optical device according to Embodiment 4 of the present disclosure [Figure 12] Cross-sectional view of the optical device according to Embodiment 5 of the present disclosure [Figure 13] Schematic diagram of the optical device according to Embodiment 6 of the present disclosure

Embodiments for Carrying Out the Invention

[0010] Hereinafter, embodiments will be described in detail with reference to the drawings as appropriate. However, a more detailed description than necessary may be omitted. For example, a detailed description of well-known matters or a redundant description of substantially the same configuration may be omitted. This is to avoid making the following description unnecessarily redundant and to facilitate the understanding of those skilled in the art.

[0011] Note that the inventor(s) provide the accompanying drawings and the following description so that those skilled in the art can fully understand the present disclosure, and do not intend to limit the subject matter described in the claims thereby.

[0012] Hereinafter, an imaging device according to an embodiment of the present disclosure will be described with reference to the drawings.

[0013] (Embodiment 1) FIG. 1 is a schematic view of a laser processing apparatus according to Embodiment 1 of the present disclosure. Further, FIG. 2 is a perspective view of an optical device according to Embodiment 1. Furthermore, FIG. 3 is a top view of the optical device according to Embodiment 1. And FIG. 4 is a cross-sectional view of the optical device taken along line A-A shown in FIG. 2. The X-Y-Z orthogonal coordinate system shown in the figures is for facilitating the understanding of the present disclosure and does not limit the present disclosure. The Z-axis direction is, although details will be described later, the extending direction of the reference axis CA of the optical device, and the X-axis direction and the Y-axis direction are directions intersecting the reference axis CA.

[0014] As shown in FIG. 1, the laser processing apparatus 10 according to Embodiment 1 of the present embodiment is a laser welding apparatus that performs laser welding on a workpiece W, and includes a welding head 12 that relatively moves with respect to the workpiece W, and a stage 14 on which the workpiece W is set. For example, the welding head 12 moves with respect to the stage 14, or the stage 14 moves with respect to the welding head 12.

[0015] Further, the welding head 12 of the laser processing apparatus 10 includes a laser output device 16 that emits a laser beam L, a mirror substrate 18 that reflects the laser beam L, and a lens 20 that condenses the laser beam L. Also, an optical device 30 that reflects the laser beam L from the laser output device 16 toward the mirror substrate 18 is disposed on the optical path between the laser output device 16 and the mirror substrate 18.

[0016] As shown in FIGS. 2 to 4, the optical device 30 includes a mirror substrate 32 that reflects the laser beam L, a plurality of actuators 34 that drive the mirror substrate 32, a plurality of elastic members �6 that bias the mirror substrate 32, and a base member 38.

[0017] The mirror substrate 32 comprises a reflective surface 32a and a back surface 32b opposite to the reflective surface 32a. The mirror substrate 32 is manufactured, for example, by forming a dielectric film on one surface of a glass substrate having a thickness of 5 to 10 mm and a diameter of 25 to 150 mm. Alternatively, the mirror substrate 32 may be made by applying a mirror coating to one surface of a metal substrate such as silicon or aluminum. Furthermore, as long as the mirror substrate 32 has a flat reflective surface 32a, it may have a hollow structure, such as a honeycomb structure, for weight reduction.

[0018] The multiple actuators 34 drive the mirror substrate 32, specifically by tilting the mirror substrate 32 to change the reflection direction of the laser beam L. In this embodiment, as shown in Figure 3, there are three actuators. The reference axis CA extends in the direction normal to the reflective surface 32a when the actuators 34 are not driving the mirror substrate 32 and the mirror substrate 32 is not tilted, and passes through the center of the mirror substrate 32. Viewed in the direction of the extension of the reference axis CA (Z-axis direction), the multiple actuators 34 are arranged in a ring shape at regular intervals so as to surround the reference axis CA (i.e., the center of the mirror substrate 32). Thus, in this embodiment 1, the mirror substrate 32 is supported at three points by the multiple actuators 34.

[0019] Furthermore, each of the multiple actuators 34 includes a movable end 34a that contacts the back surface 32b of the mirror substrate 32 and a fixed end 34b that is fixed to the base member 38. That is, the multiple actuators 34 are arranged in the space between the mirror substrate 32 and the base member 38. Moreover, in this embodiment 1, each of the multiple actuators 34 is a piezoelectric actuator constructed by stacking multiple piezoelectric elements. By controlling the applied voltage to the piezoelectric elements, the actuator 34 expands and contracts in the extending direction (Z-axis direction) of the reference axis CA, and its movable end 34a moves in the extending direction of the reference axis CA. In other words, the extending direction of the reference axis CA is the direction of movement of the movable end 34a of the actuator 34. Note that the actuators of this disclosure are not limited to piezoelectric actuators, but may be any actuator equipped with a movable end capable of reciprocating in one direction.

[0020] Each of the multiple actuators 34 has a movable end 34a that moves in non-fixed contact with the back surface 32b of the mirror substrate 32. "Non-fixed" here means that the movable end 34a is not bonded to the mirror substrate 32, and the mirror substrate 32 can detach from the movable end 34a non-destructively. Therefore, the mirror substrate 32 can move away from the movable end 34a of the actuator 34 in the direction of movement of the movable end 34a (Z-axis direction).

[0021] In this embodiment 1, the multiple elastic members 36 are coil springs that bias the mirror substrate 32 toward the movable end 34a of each of the multiple actuators 34. The reason for this will be explained.

[0022] Figure 5 is a cross-sectional view of an optical device in which the mirror substrate is tilted by multiple actuators.

[0023] As described above, the movable ends 34a of each of the multiple actuators 34 are not fixed to the mirror substrate 32. When the movable end 34a of the actuator 34 moves forward (when the actuator 34 extends), the movable end 34a and the mirror substrate 32 can remain in contact with each other, so the actuator 34 can push the mirror substrate 32. On the other hand, when the movable end 34a moves backward (when the actuator 34 retracts), the movable end 34a moves away from the mirror substrate 32, so the actuator 34 cannot pull the mirror substrate 32 closer.

[0024] Multiple elastic members 36 continuously bias the mirror substrate 32 toward the movable end 34a in order to maintain contact between the movable end 34a and the mirror substrate 32 when the movable end 34a of the actuator 34 retracts. Therefore, when the movable end 34a of the mirror substrate 32 retracts, the portion of the mirror substrate 32 facing the movable end 34a also displaces by the same amount as the movement of the movable end 34a. Thus, by controlling the amount of movement of the movable ends 34a of the multiple actuators 34, the tilt of the mirror substrate 32 can be reliably controlled.

[0025] Furthermore, in this embodiment 1, the multiple elastic members 36 bias the reflective surface 32a of the mirror substrate 32, specifically the outer peripheral portion of the reflective surface 32a excluding the central portion of the reflective surface 32a that is struck by the laser beam L. Also, in this embodiment 1, each of the multiple elastic members 36 is supported by a plurality of inverted "L" shaped retainer members 40 that extend from the base member 38 to a position facing the reflective surface 32a of the mirror substrate 32. That is, the multiple elastic members 36 are arranged in a compressed and deformed state between the corresponding retainer member 40 and the mirror substrate 32. As shown in Figure 4, each retainer member 40 has a recess 40a formed therein that accommodates a portion of the elastic member 36.

[0026] Furthermore, in this embodiment 1, as shown in Figures 2 and 4, a plurality of actuators 34 and a plurality of elastic members 36 sandwich the mirror substrate 32. Specifically, the plurality of actuators 34 are positioned on the back surface 32b side of the mirror substrate 32 (i.e., one side in the direction of movement (Z-axis direction) of the movable end 34a of the actuator 34), and the plurality of elastic members 36 are positioned on the reflective surface 32a side of the mirror substrate 32 (the other side in the direction of movement of the movable end 34a of the actuator 34). As a result, the mirror substrate 32 is held in a movable manner.

[0027] In this embodiment 1, as shown in Figures 3 and 4, the number of elastic members 36 is the same as the number of actuators 34. Furthermore, each of the elastic members 36 faces the movable end 34a of the corresponding actuator 34, with the mirror substrate 32 in the direction of extension of the reference axis CA (Z-axis direction), i.e., the direction of movement of the movable end 34a. As a result, the portion of the mirror substrate 32 biased by the elastic member 36 is supported from behind by the corresponding actuator 34. Consequently, deflection deformation of the mirror substrate 32 due to the biasing of the elastic member 36 is suppressed.

[0028] Furthermore, in this embodiment 1, the mirror substrate 32, which is sandwiched between a plurality of actuators 34 and a plurality of elastic members 36, is restricted from moving in directions intersecting the reference axis CA (X-axis direction, Y-axis direction).

[0029] Specifically, in this first embodiment, a hemispherical protrusion 32c is provided on the back surface 32b of the mirror substrate 32, and a curved recess 34c is provided on the movable end 34a of the actuator 34, which rotatably engages with the hemispherical protrusion 32c. This restricts the movement of the mirror substrate 32 in the direction in which the actuator 34 intersects the reference axis CA. The protrusion 32c may be integrally provided on the mirror substrate 32, or it may be a separate component bonded to the mirror substrate 32. Alternatively, the recess may be provided on the mirror substrate 32 and the protrusion on the actuator 34.

[0030] In this first embodiment, the reflective surface 32a of the mirror substrate 32 is provided with a protrusion 32d that enters into the elastic member 36 (coil spring). This allows the elastic member 36 to restrict the movement of the mirror substrate 32 in directions intersecting the reference axis CA (X-axis direction, Y-axis direction). Alternatively, the mirror substrate 32 may be provided with a recess that accommodates a portion of the elastic member 36, similar to the recess 40a of the retainer member 40.

[0031] Furthermore, the method for restricting the movement of the mirror substrate 32 in directions intersecting the reference axis CA (X-axis direction, Y-axis direction) is not limited to the method described above, and other methods are also possible.

[0032] Furthermore, if the optical device 30 is used in a position where the reference axis CA extends vertically, that is, if the mirror substrate 32 cannot move in the direction intersecting the reference axis CA (X-axis direction, Y-axis direction) due to being sandwiched between multiple actuators 34 and multiple elastic members 36, then it is not necessary to restrict the movement of the mirror substrate 32 in the direction intersecting the reference axis CA (X-axis direction, Y-axis direction).

[0033] However, considering the need to tilt the mirror substrate 32 without deforming it, it is preferable that the movable end 34a of the actuator 34 and the mirror substrate 32 avoid planar contact via a large contact surface. That is, it is preferable that each of the movable ends 34a of the multiple actuators 34 and the mirror substrate 32 make contact via curved surface contact or point contact between the hemispherical convex portion 32c and the curved recess 34c, or via point contact between the hemispherical convex portion and the plane.

[0034] By using such an optical device 30, the laser processing apparatus 10 shown in Figure 1 is capable of wobbling welding.

[0035] Figure 6 shows the trajectory of the laser spot during wobbling welding.

[0036] During wobbling welding, multiple actuators 34 of the optical device 30 continuously change the tilt direction of the mirror substrate 32 so that the normal vector of the reflective surface 32a of the mirror substrate 32 is tilted with respect to the reference axis CA and that the normal vector rotates around the reference axis CA. When the welding head 12 moves relative to the workpiece W in the direction of arrow M shown in Figure 1 in this state, the trajectory of the laser spot LS as shown in Figure 6 is obtained. To achieve this, during wobbling welding, each of the multiple actuators 34 reciprocates its movable end 34a with the same period but in a phase-shifted manner.

[0037] According to this embodiment 1, in an optical device in which a mirror substrate that reflects laser light is driven by an actuator, the contact between the mirror substrate and the actuator can be maintained.

[0038] Specifically, the movable end 34a of the actuator 34 and the mirror substrate 32 are not fixed to each other, and the contact between the movable end 34a and the mirror substrate 32 is maintained by the elastic member 36. Therefore, fatigue failure of the fixed part due to repeated tensile stress when pulling the mirror substrate 32, which occurred when the actuator 34 and the mirror substrate 32 were fixed to each other, does not occur between the mirror substrate 32 and the actuator 34 in this embodiment 1. As a result, in this embodiment 1, the contact between the mirror substrate 32 and the movable end 34a can be maintained.

[0039] (Embodiment 2) This second embodiment is an improved version of the first embodiment described above. Therefore, this second embodiment will be described focusing on the differences from the first embodiment. Components in this second embodiment that are substantially the same as those in the first embodiment are denoted by the same reference numerals.

[0040] Figure 7 is a perspective view of the optical device according to Embodiment 2 of this disclosure. Figure 8 is a cross-sectional view of the optical device along the line BB shown in Figure 7.

[0041] As shown in Figures 7 and 8, the optical device 110 according to this second embodiment also has a plurality of elastic members 36, similar to the optical device 30 according to the first embodiment described above. In the first embodiment described above, a retainer member 40 corresponding to each elastic member 36 is provided. That is, in the first embodiment described above, the number of elastic members 36 and the number of retainer members 40 are the same. In contrast, in this second embodiment, the optical device 110 has one retainer member 140 common to the plurality of elastic members 36. The retainer member 140 is a bottomed cylindrical member, and its bottom 140a is provided with a through hole 140b that exposes the reflective surface 32a of the mirror substrate 32, i.e., through which the laser beam L passes. The plurality of elastic members 36 are arranged in a compressed state between the bottom 140a of the retainer member 140 and the mirror substrate 32. The mirror substrate 32 and a plurality of actuators 34 are housed inside the cylindrical retainer member 140.

[0042] Similar to Embodiment 1 described above, this second embodiment is an optical device in which a mirror substrate that reflects laser light is driven by an actuator, and it is possible to maintain contact between the mirror substrate and the actuator.

[0043] (Embodiment 3) In the above-described Embodiment 1, each of the multiple actuators 34 faces the corresponding elastic member 36 with the mirror substrate 32 in between, in the direction of movement (Z-axis direction) of the movable end 34a of the actuator 34. However, Embodiment 3 differs from this. Therefore, Embodiment 3 will be described focusing on the differences from Embodiment 1 described above. Note that components of Embodiment 3 that are substantially the same as components of Embodiment 1 described above are denoted by the same reference numerals.

[0044] Figure 9 is a top view of the optical device according to Embodiment 3 of this disclosure. Figure 10 is a cross-sectional view of the optical device along the CC line shown in Figure 9.

[0045] As shown in Figures 9 and 10, in the optical device 230 according to this third embodiment, each of the multiple actuators 34 is not facing the elastic member 36 in the direction of movement of the movable end 34a of the actuator 34 (Z-axis direction). In this third embodiment, in the view in the direction of extension of the reference axis CA (view in the direction of movement of the movable end 34a of the actuator 34 (view in the Z-axis direction)), the multiple actuators 34 are arranged in a ring at regular intervals so as to surround the reference axis CA (i.e., the center of the mirror substrate 32). Furthermore, the multiple elastic members 36 are arranged in a ring at regular intervals so as to surround the multiple actuators 34. In addition, each actuator 34 is positioned between the elastic member 36 and the reference axis CA.

[0046] Therefore, in the case of the optical device 230 according to this third embodiment, the multiple actuators 34 are arranged close to the reference axis CA (i.e., the center of the mirror substrate 32). This allows the mirror substrate 32 to be tilted more significantly compared to when the multiple actuators 34 are far from the reference axis CA. As a result, when the laser processing device performs wobbling welding, for example as shown in Figure 6, it is possible to perform welding with a wide weld mark.

[0047] Similar to Embodiment 1 described above, this third embodiment is an optical device in which a mirror substrate that reflects laser light is driven by an actuator, and it is possible to maintain contact between the mirror substrate and the actuator.

[0048] (Embodiment 4) This fourth embodiment is an improved version of the first embodiment described above. Therefore, this fourth embodiment will be described focusing on the differences from the first embodiment described above. Components in this fourth embodiment that are substantially the same as those in the first embodiment described above are denoted by the same reference numerals.

[0049] Figure 11 is a cross-sectional view of an optical device according to Embodiment 4 of this disclosure.

[0050] As shown in Figure 11, in the case of the optical device 330 according to this fourth embodiment, the mirror substrate 332 includes a reflective member 342 having a reflective portion that reflects light, and a holder 344 that holds the outer edge of the reflective member 342. The holder 344 holds the reflective member 342 such that the reflective portion that reflects laser light is exposed. The movable ends 34a of each of the multiple actuators 34 are in non-fixed contact with the holder 344, and multiple elastic members 36 bias the holder 344 toward the movable ends 34a of each of the multiple actuators 34.

[0051] This fourth embodiment, like the first embodiment described above, is an optical device in which a mirror substrate that reflects laser light is driven by an actuator, and it is possible to maintain contact between the mirror substrate and the actuator.

[0052] (Embodiment 5) This fifth embodiment is an improved version of the second embodiment described above. Therefore, this fifth embodiment will be described focusing on the differences from the second embodiment described above. Components in this fifth embodiment that are substantially the same as those in the second embodiment described above are denoted by the same reference numerals.

[0053] Figure 12 is a cross-sectional view of an optical device according to Embodiment 5 of this disclosure.

[0054] In the optical device 430 according to this 5th embodiment, the elastic member 436 is not provided in the same number as the actuators 34, but there is only one. The elastic member 436 is an annular elastic member and is made of, for example, a sponge material. The annular elastic member 436 is positioned between the outer peripheral portion of the mirror substrate 32 and the retainer member 140 and is compressed and deformed. Each of the multiple actuators 34 faces a different portion of the annular elastic member 436 across the mirror substrate 32 when viewed in the direction of extension of the reference axis CA (viewed in the direction of movement of the movable end 34a of the actuator 34).

[0055] This embodiment 5, like embodiment 2 described above, is an optical device in which a mirror substrate that reflects laser light is driven by an actuator, and it is possible to maintain contact between the mirror substrate and the actuator.

[0056] Although several embodiments have been described above, the embodiments of this disclosure are not limited to these.

[0057] For example, in the first embodiment described above, the elastic member 36 presses the mirror substrate 32, thereby biasing the mirror substrate 32 toward the movable end 34a of each of the multiple actuators 34. However, the embodiments of this disclosure are not limited to this.

[0058] Figure 13 is a schematic diagram of an optical device according to Embodiment 6 of the present disclosure.

[0059] As shown in Figure 13, in the case of the optical device 530 according to this embodiment 6, the elastic member 536 is a coil spring, with one end fixed to the central portion of the back surface 32b of the mirror substrate 32 and the other end fixed to the base member 38. The elastic member 536 is positioned between the mirror substrate 32 and the base member 38 in an extended state. The elastic member 536 pulls the mirror substrate 32 toward the base member 38, causing the mirror substrate 32 to continuously contact the movable ends 34a of each of the multiple actuators 34 positioned between the mirror substrate 32 and the base member 38.

[0060] Furthermore, when pulling the mirror substrate, one end of the elastic member, which is a coil spring, may be fixed to the outer edge of the mirror substrate.

[0061] Finally, in the first embodiment described above, the optical device 30 is used in the laser processing apparatus 10 to reflect laser light. However, the uses of the optical device 30 are not limited to this in the embodiments of the present disclosure. The optical device according to the embodiments of the present disclosure can be used for applications that change the direction of light propagation.

[0062] In other words, the optical device according to the embodiment of the present disclosure is, in a broad sense, an optical device comprising: a mirror substrate having a reflective portion that reflects light; a plurality of actuators each having a movable end that is movable in a non-fixed contact with the portion of the mirror substrate excluding the reflective portion; and at least one elastic member that biases the mirror substrate toward the movable end of each of the plurality of actuators and maintains contact between the mirror substrate and the movable end of each of the plurality of actuators.

[0063] As described above, the embodiments described in this disclosure have been explained as examples of the technology. For this purpose, drawings and a detailed description are provided. Therefore, among the components described in the drawings and detailed description, there may be not only components that are essential for solving the problem, but also components that are not essential for solving the problem, in order to illustrate the technology described above. For this reason, the mere fact that these non-essential components are described in the drawings and detailed description should not be immediately assumed to be essential.

[0064] Furthermore, since the embodiments described above are for illustrative purposes of the technology described herein, various modifications, substitutions, additions, omissions, etc., can be made within the scope of the claims or equivalents thereof. [Industrial applicability]

[0065] This disclosure is applicable to optical devices that drive a light-reflecting mirror substrate with an actuator. [Explanation of symbols]

[0066] 30 Optical equipment 32 Mirror substrate 34 Actuators 34a Movable end 36 Elastic members

Claims

1. A mirror substrate having a reflective part that reflects light, Multiple actuators, each having a movable end that is movable while in non-fixed contact with the portion of the mirror substrate excluding the reflective portion, An optical device comprising at least one elastic member that biases the mirror substrate toward the movable end of each of the plurality of actuators and maintains contact between the mirror substrate and the movable end of each of the plurality of actuators.

2. The at least one elastic member is a plurality of elastic members, The plurality of actuators are arranged on one side of the direction of movement of the movable end of the actuator relative to the mirror substrate. The optical apparatus according to claim 1, wherein the plurality of elastic members are arranged on the other side of the movement direction relative to the mirror substrate.

3. The optical device according to claim 2, wherein each of the plurality of elastic members faces the movable end of the corresponding actuator with the mirror substrate in between in the direction of movement.

4. The optical device according to claim 2, wherein, in the view in the direction of movement, the plurality of actuators are arranged in an annular shape, and the plurality of elastic members are arranged in an annular shape so as to surround the plurality of actuators.

5. The optical apparatus according to claim 2, further comprising a common retainer member for receiving the plurality of elastic members.

6. A hemispherical protrusion is provided on one of the movable ends of each of the plurality of actuators and on one of the plurality of contact portions of the mirror substrate that contacts the movable end. The optical device according to claim 2, wherein each of the plurality of actuators is provided with a curved recess that engages with the convex portion on the other of the movable end and the contact portion of the mirror substrate.

7. The plurality of elastic members are coil springs, The optical apparatus according to claim 2, wherein the mirror substrate is provided with a protrusion that enters into the coil spring or a recess that accommodates a part of the coil spring.

8. The mirror substrate includes a reflective member having the reflective portion and a holder that holds the outer edge of the reflective member, Each of the plurality of actuators has a movable end that is in contact with the holder without being fixed. The optical apparatus according to claim 1, wherein the elastic member biases the holder toward the movable end of each of the plurality of actuators.

9. An optical apparatus according to any one of claims 1 to 8, A laser processing apparatus including a laser output device that irradiates laser light toward the reflective surface of the mirror substrate of the optical device.

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