Storage system for storing multiple circuit board holders

Abstract

The present invention provides a storage system for a substrate handling platform of a reactor assembly, as well as a reactor assembly equipped with the substrate handling platform and the storage system. [Solution] The storage system (100) includes a pin (308) extending along a rotation axis and at least two shelves (110) positioned along a direction substantially parallel to the rotation axis. Each shelf is adapted to support at least one removable housing (120), which is pivotally connected to the pin around the rotation axis and rotates independently of each other around the rotation axis. Each removable housing is adapted to support at least one substrate holder (130) suitable for supporting a substrate (616) for semiconductor film deposition, and the removable housing is removablely coupled to and pulled out from the shelf.

Description

Technical Field

[0001] The present invention relates to a storage system for a substrate handling platform of a reactor assembly, as well as a reactor assembly comprising a substrate handling platform and such a storage system.

Background Art

[0002] Substrates intended to undergo deposition processing of semiconductor materials within a reactor are generally stored and transported within cassettes, where the substrates are stacked horizontally and spaced from each other.

[0003] These cassettes generally include an open face accessible from the outside for placement and removal of substrates, and a rear face that is entirely or at least partially enclosed on the opposite side.

[0004] Prior to being processed within the reaction chamber of a reactor, substrates are coupled to substrate holders, which are used to prevent direct contact with the substrates when being handled and displaced within the reactor assembly. Thus, the substrate holders protect the substrates from contamination and scratching.

[0005] Substrate holders may be handled with or without substrates, manually or using specially designed automated means such as robotic arms adapted to grasp and displace the substrate holders within the reactor assembly.

[0006] Typically, substrate holders exhibit a substantially circular shape adapted to hold substrates without unwanted displacement and optionally orient the substrates according to a predetermined reference.

[0007] The substrate holder may have a flat or concave bottom surface, and may be closed, open, or partially open. The substrate is preferably placed on the substrate holder, but the contact points between the substrate and the substrate holder should be limited to several peripheral points, segments, or small areas.

[0008] The substrate holder may further include and be covered by a ring (removable or fixed) to protect the edges of the substrate during deposition.

[0009] Typically, the substrate holder and substrate are contained in one or more cassettes and placed on a substrate handling platform equipped with a centering unit.

[0010] In the centering unit, the substrate is placed on the substrate holder (and optionally centered and / or oriented in a predetermined manner) before being further displaced for processing.

[0011] The substrate holders are typically arranged on a rack, positioned above each other for easy handling, and spaced apart from each other to avoid particle generation.

[0012] The substrate holder may require replacement for cleaning and disposal after a certain number of uses in the reaction chamber.

[0013] For example, in SiC epitaxial reactors, the replacement of individual substrate holders can occur very frequently if there are parasitic deposits on components exposed to process gases. These exposed components often include the upper protective ring of the substrate holder, if present.

[0014] In the racks used in this technology field, all board holders included in the rack are uploaded and retrieved together from the board handling platform.

[0015] However, this “bulk” upload and retrieval of board holders does not allow them to be replaced individually or in smaller batches of up to 1 to 6 board holders, preferably 1 to 4, based on their actual need for handling or replacement.

[0016] Furthermore, racks used in this art typically have a front surface accessible from the outside for loading and unloading substrate holders, and an opposite rear surface that is at least partially closed. The relative position and orientation of the front and rear surfaces are fixed and the same for all substrate holders, regardless of the type of operation performed (loading / unloading operations related to handling substrates for replacement and handling of substrate holders by the operator).

[0017] Therefore, there is a need to provide a storage system for substrate holders that can optimize the replacement of substrate holders in the substrate handling platform of the reactor assembly.

[0018] Furthermore, there is a need for a storage system that simplifies the loading and unloading of one or more substrate holders.

[0019] Furthermore, there is a need for storage systems that simplify the transportation of circuit board holders.

[0020] Furthermore, a storage system is required that minimizes the risk of contamination or damage to the substrate holders used before and after the deposition process.

[0021] Furthermore, there is a need for a circuit board handling platform equipped with a storage system that provides multiple access points to the circuit board holder.

[0022] The substrate handling platform also needs to have a reactor assembly that is provided with it. [Overview of the Initiative]

[0023] This summary is provided to introduce some concepts in a simplified form. These concepts are further described in more detail in the detailed description of the exemplary embodiments of the present disclosure below. This summary is not intended to identify the key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

[0024] The object of the present invention is to overcome the drawbacks of the prior art.

[0025] In particular, the object of the present invention is to provide a storage system that can improve the replacement of the substrate holder in the substrate handling platform of the reactor assembly. <ooo0081>

[0026] Another object of the present invention is to provide a storage system that can simplify the placement, removal, and transportation of one or more substrate holders.

[0027] Another object of the present invention is to provide a storage system that can minimize the risk of contamination or damage to the substrate holder before or after use in a deposition process.

[0028] Another object of the present invention is to provide a substrate handling platform with a storage system that can provide multiple access points to the substrate holder.

[0029] Another object of the present invention is to provide a reactor assembly with a substrate handling platform.

[0030] The above-mentioned main object is achieved by the present invention described in the appended claims, which form an essential part of this specification.

[0031] It should be noted that the use of reference numerals in the claims does not limit their scope. The sole purpose of the reference numerals is to make the understanding of the claims easier.

Brief Description of the Drawings

[0032] The examples presented herein are not intended to represent the actual appearance of any particular material, structure, or device, but are merely idealized representations used to describe embodiments of the present disclosure.

[0033] [Figure 1] Figure 1 shows a schematic diagram of a storage system 100 according to one embodiment of the present invention. [Figure 2] Figure 2 shows a schematic diagram of a storage system 100 according to one embodiment of the present invention. [Figure 3] Figure 3 shows a schematic diagram of a storage system 100 according to one embodiment of the present invention. [Figure 4] Figure 4 shows a schematic diagram of a part of a storage system 100 according to one embodiment of the present invention. [Figure 5] Figure 5 shows a schematic diagram of a storage system 100 according to one embodiment of the present invention. [Figure 6] Figure 6 shows a schematic diagram of a reactor assembly 600 according to one embodiment of the present invention. [Modes for carrying out the invention]

[0034] While certain embodiments and examples are disclosed below, it will be understood by those skilled in the art that the scope of the invention extends beyond the specifically disclosed embodiments and / or uses of the invention, as well as obvious modifications and equivalents thereof. Therefore, the scope of the invention disclosed is not intended to be limited by the specific embodiments disclosed below.

[0035] Here, similar reference numerals refer to figures that identify similar structural features or embodiments of the present disclosure. Note that the use of reference numerals in this description does not limit the description to the embodiments illustrated.

[0036] In particular, it will be understood that elements in the drawings are illustrated for simplification and clarity. Some elements may be omitted or not drawn to scale. For example, some dimensions of elements in the drawings may be exaggerated relative to other elements to help improve understanding of the illustrated embodiments of this disclosure.

[0037] Other technical configurations may be readily apparent to those skilled in the art from the following drawings, description, and claims.

[0038] In one embodiment, the present invention relates to a storage system 100 suitable for storing and arbitrarily displacing a plurality of substrate holders 130.

[0039] The storage system includes a pin 308 extending along the axis of rotation (z), and at least two shelves 110 are stacked in a direction parallel or substantially parallel to the axis of rotation (z).

[0040] "Stacked in a direction parallel to the axis of rotation (z)" means, as is clear from Figures 1 to 5, that the shelves are arranged overlapping each other along the direction z (not necessarily in direct contact), while each shelf extends in a plane that is substantially perpendicular to z and parallel to it.

[0041] "Substantially parallel" or "substantially perpendicular" means parallel or perpendicular directions or planes with a tolerance of + / - 5%, respectively.

[0042] The shelves are pivotally connected to pins around a rotation axis and are configured to rotate independently of each other around the rotation axis.

[0043] Each shelf is adapted to support at least one removable housing 120.

[0044] Each removable housing is adapted to support at least one substrate holder 130 suitable for supporting a substrate 616 for semiconductor film deposition.

[0045] Each removable housing is configured to be removablely attached to a shelf and pulled out therefrom, for example, via mechanical (automatic) and / or manual means. "Removable coupling" means that when the removable housing is placed on a shelf, it can do the following: (a) When the latter is in operation, it moves with the shelf (the shelf can be set to rotate around the pin, either manually or through a drive motor connected to each shelf), (b) Freeing the item from the shelf by an operator or automated means, such as a robotic arm equipped with an end effector at will.

[0046] Steps (a) and (b) can be repeated multiple times without damaging either the shelf or the removable housing.

[0047] Particle generation during steps (a) and (b) is preferably minimized by advantageously using a simple coupling mechanism that requires little or no friction and / or vibration of the components involved (i.e., the removable housing and shelf).

[0048] For example, step (a) may ensure that the substrate holder moves integrally with the shelf, relying on gravity. Alternatively, simple interlocking means, such as matching protrusions and recesses on the contact surfaces of the removable housing and the shelf, may ensure that the substrate holder does not displace from its nominal position during rotation of the shelf. These matching protrusions and recesses may also be used to guide the nominal placement of the removable housing on the shelf. A stopping mechanism may also be used.

[0049] Advantageously, the storage system according to the present invention allows for the retrieval and movement of only a subset of substrate holders, for example, those housed in removable housings detachably coupled to shelves, thereby improving the efficiency and continuity of the deposition process.

[0050] In contrast to storage systems known in the art that require cleaning and / or replacing all substrate holders at once, the storage system according to the present invention allows for the replacement and handling of only a portion of the substrate holders, more efficiently following the actual deposition process, using fewer substrate holders, and reducing / avoiding downtime.

[0051] An exemplary embodiment of the storage system 100 according to the present invention, or a selected portion thereof, is schematically shown in Figures 1 to 5.

[0052] Each removable housing is preferably adapted to support 1 to 6 board holders, and more preferably 1 to 4.

[0053] The substrate 616 is preferably suitable for epitaxial or CVD deposition of semiconductor films.

[0054] Each shelf is preferably adapted to support one to three removable housings, and more preferably each shelf is adapted to support one removable housing. This limits the number of removable housings that are removed / inserted in the storage system, as each shelf rotates around a pin to access its contents. The removable housings may be adapted to stack one on top of the other.

[0055] The number of shelves is preferably 2 to 20, and more preferably 3 to 10.

[0056] Advantageously, the storage system according to the present invention can improve the replacement of substrate holders in the substrate handling platform of the reactor assembly.

[0057] Minimizing contact and friction between adjacent shelves can be advantageous. This can be achieved by avoiding direct rubbing between shelves (or their parts, such as the hub 140) during rotation. This can be achieved in several ways.

[0058] For example, frictionless or low-friction separators may be interposed between adjacent shelves. Non-limiting examples of suitable separators include rolling bearings (such as ball and / or roller bearing systems) and / or Seegers inserted into or mounted on pins. In the latter case, the pins may feature appropriate recesses for partially supporting each Seeger positioned between two adjacent shelves.

[0059] Each shelf preferably provides a support surface parallel to a plane (xy) substantially perpendicular to the axis of rotation.

[0060] The pins are preferably made of stainless steel.

[0061] The shelves are preferably made of aluminum or stainless steel.

[0062] The removable housing is preferably made of aluminum or plastic, such as commercial plastics like PVC, polypropylene, polyethylene, POM-C, nylon, and / or Teflon®.

[0063] The axis of rotation (z) may be oriented vertically, and the plane (xy) is a horizontal plane perpendicular to (z).

[0064] In one embodiment, each removable housing 120 of the storage system 100 features a front surface 123, the front surface facing the outside of the storage system.

[0065] In principle, both the board holder and the removable housing may be optionally removed from the front manually or by automated means such as a robotic arm equipped with an end effector.

[0066] Preferably, the front surface is adapted to engage with any automated means configured to optionally pick up a robotic arm with an end effector or a substrate holder and displace it, for example, to a substrate centering unit 610 of a reactor assembly 600.

[0067] Advantageously, this minimizes the risk of the substrate holder being contaminated before it is connected to the substrate for processing.

[0068] Preferably, the front surface may also be adapted to work with an operator for manual removal / insertion of one or more removable housings from / into the storage system 100, particularly from its shelves. The operator can then displace the removable housing and proceed to remove and move the substrate holder contained therein for cleaning or replacement.

[0069] Advantageously, this minimizes the risk of contaminating the board holder by having the operator handle the removable housing instead of the board holder itself.

[0070] Therefore, a further advantage is that the operator can easily remove and move a subset of substrate holders housed in a removable housing instead of all the substrate holders in the storage system, thereby improving the efficiency and continuity of the deposition process.

[0071] Preferably, at least one side of the removable housing 120 parallel to the (xy) plane is open or substantially open (i.e., exposing more than 80% of the top and / or bottom surface of the substrate holder when placed in the removable housing). More preferably, at least its upper (top) side is open or substantially open in the (xy) plane. Advantageously, this facilitates access to the substrate holder.

[0072] In the preferred embodiment described above, the removable housing may further include a lid adapted to close the top surface of the removable housing when the removable housing is displaced. The lid may be advantageously configured to be removablely coupled to the removable housing, for example, by a releaseable locking mechanism, and may optionally be configured to include one or more handles for facilitating transport.

[0073] Alternatively, the removable housing may be closed in a plane (xy) or substantially (i.e., at least 95%) closed, thereby preventing particles from contaminating the substrate holder positioned below.

[0074] In one embodiment, the removable housing 120 includes at least one support element 122 for supporting at least one substrate holder 130.

[0075] Each support element preferably has one or more protrusions or recesses that define one or more contact areas or points having the ability to hold the substrate holder and prevent undesirable displacement.

[0076] Each support element is preferably configured to support a substrate holder that is circular or substantially circular in shape. A substantially circular shape means a substrate having a circular projection on at least one plane, wherein the local deviation from a certain radius in that plane is 10% or less of that radius.

[0077] Advantageously, the use of protrusions and recesses to support the substrate holder facilitates its manual or automatic insertion and removal, making it cost-effective to manufacture.

[0078] The removable housing 120 preferably comprises 1 to 6 support elements, preferably 1 to 4, each support element being adapted to support a single substrate holder and comprising a plurality of protrusions.

[0079] The support element can be manufactured on the inner surface of the removable housing, i.e., the surface that faces the substrate holder when the latter is inside the removable housing.

[0080] The support element is preferably fitted to contact a very small portion of the substrate holder, for example, less than 20% of its bottom surface, preferably less than 10%, and even more preferably less than 5%. The inventors have observed that reducing the overlap between the substrate holder and the support element makes it possible to reduce dust or contamination generated by friction between the contact parts.

[0081] In one embodiment, each shelf 110 is adapted to rotate from at least a first predetermined position to at least a second predetermined position, and vice versa.

[0082] Advantageously, a storage system that rotates the shelf between at least two predetermined positions provides different access points to the removable housings and / or board holders, as well as different ways of accessing them. These allow for the physical separation of the area where the machine or user handles the removable housings from the area where the same or different machines or users handle the board holders.

[0083] In one embodiment, each shelf 110 can be removably locked to the first predetermined position and / or the second predetermined position.

[0084] For example, the stopping mechanism may be used alone or in combination with a magnetic locking system. The storage system may include a column 508 made of ferromagnetic material, and the shelves may be equipped with magnets. The magnets and column made of ferromagnetic material may be positioned to magnetically attract shelves in the vicinity of the column to a removable locking position.

[0085] Advantageously, this magnetic locking mechanism is effective from the standpoint of cost, use, and manufacture.

[0086] In one embodiment, each shelf 110 includes hubs 140, 140a, and 140b configured to be pivotably connected to a pin 308.

[0087] Advantageously, this design provides a particularly stable storage system by avoiding or minimizing shelf fluctuations during the movement of removable housings or under their weight, with or without the presence of a board holder. This is especially important when using automated handling means to grasp and displace the removable housings and / or boards, ensuring reliable and repeatable positioning of the shelves and their contents.

[0088] Preferably, all hubs 140, 140a, and 140b include a bush 302.

[0089] Advantageously, bushings can minimize friction between the hub and the pin.

[0090] In one embodiment, the storage system 100 further includes at least one separator 306 positioned between two adjacent hubs 140a, 140b.

[0091] As an optional configuration, each separator 304 is equipped with a rolling bearing (such as a ball and / or roller bearing system) that contacts the adjacent hub.

[0092] Advantageously, the above embodiment minimizes friction and therefore minimizes the risk of generating debris that is a source of contamination on the substrate.

[0093] In one embodiment, the storage system 100 further includes a first sensor 502 configured to detect when all shelves 110 are in a first predetermined position and / or a second predetermined position.

[0094] As an optional configuration, the first sensor may be connected to means for notifying the user when a state is met or not met. For example, the first sensor may be connected to a processing unit and optionally to a user interface, an acoustic device, and / or an indicator light.

[0095] In one embodiment, the storage system 100 further includes a second sensor 504 configured to detect the displacement of one or more substrate holders 130 from a predetermined position when all shelves are in either a first predetermined position or a second predetermined position.

[0096] The first sensor and / or the second sensor are preferably optical sensors, such as laser sensors.

[0097] In a second aspect, the present invention relates to a substrate handling platform 602 for a reactor assembly 600. The PCB handling platform is: Support surface 506 and A storage system 100 according to any of the embodiments described above, At least one board centering unit 610, The system comprises at least one automatic component 612 adapted to grip and displace the substrate holder 130.

[0098] The storage system, substrate centering unit, and automated components are positioned on a support surface and are arranged relative to each other so that both the storage system and the substrate centering unit can be accessed by the automated components. For example, the automated component 612 may be arranged to grasp and transport the substrate holder 130 from the storage system 100 to the substrate centering unit 610 and / or vice versa.

[0099] The automated component can be a robot, for example, an articulated arm with an end effector that can be adjusted at will.

[0100] A substrate centering unit is a device adapted to connect a substrate to a substrate holder.

[0101] As an optional configuration, the centering unit may be adapted to align or center the substrate on the substrate holder according to a predetermined position and / or orientation.

[0102] The support surface is a substantially flat surface, such as a tabletop, adapted to support the storage system, centering unit, and automated components.

[0103] This may optionally include a damping mechanism for absorbing and dissipating vibrational energy over a wide range of frequencies.

[0104] For example, the board handling platform 602 may be used as follows: When the shelf 110 of the storage system 100 is in a first predetermined position and the board holder is inserted into a removable housing on the shelf, the automatic component 612 may grasp the board holder 130 from the removable housing 120 and move it to the board centering unit 610 to connect with the board 616.

[0105] When the shelf 110 is in a second predetermined position, the operator may insert a removable housing 120 to house a new or cleaned board holder for further use. Alternatively, the operator may remove the removable housing containing the used board holder for cleaning or disposal.

[0106] As an optional configuration, the removable housing 120 may be provided with a lid or cover to protect the substrate holder when the removable housing 120 is handled and / or displaced by the operator.

[0107] When each removable housing has a front 123 and the front faces the outside of the storage system, it is convenient to have the front face the automatic component 612 when it is in a predetermined position such as the first predetermined position.

[0108] Advantageously, the PCB handling platform 602 provides a compact and automated solution for connecting (and optionally aligning) PCBs with PCB holders.

[0109] In one embodiment, the substrate handling platform 602 further comprises a substrate management station 614 for receiving and storing substrates 616. For example, the substrate management station 614 may be adapted to receive a cassette containing multiple substrates.

[0110] The board management station 614 is positioned on the support surface 506 and is arranged to be accessible by the automated components 612.

[0111] Preferably, the board management station 614 may be configured to interface with an automated loading and unloading system such as an SMIF, AGV, or AMR system, or with an operator. The operator's access point or the automated loading and unloading system may, advantageously, be different from the access point of the automated component 612. This can be achieved by providing a rotating mechanism in the board management station 614.

[0112] Advantageously, this embodiment provides a compact and fully automated solution for linking (and, optionally, aligning) the substrate holder with the substrate from the substrate management station 614 before processing (and vice versa, for unlinking them after the deposition process).

[0113] In a third aspect, the present invention relates to a reactor assembly 600, wherein the reactor assembly 600 is The above-mentioned board handling platform 602, A reactor for depositing a semiconductor film on a substrate 616, comprising a reactor with at least one reaction chamber 608, A load lock chamber 604 for adjusting the circuit board, The system comprises a reaction chamber 608 and at least one transfer chamber 606 connected to a load lock chamber 604.

[0114] The load lock chamber may, advantageously, be equipped with means for depressurizing and flushing the chamber with argon in order to prepare the substrate before processing.

[0115] The transport chamber 606 is equipped with an automatic component 612.

[0116] This automated component can be used to grasp and transport the substrate holder 130, typically supporting the substrate 616 and transporting it in and out of the reaction chamber.

[0117] This automatic component may preferably be used to displace the substrate holder to and from the reaction chamber 608 between the load lock chamber 604.

[0118] This operation can be carried out directly or indirectly by positioning the substrate holder on the cooling station 618 and / or the heating station 620, which may be optionally provided within the reactor assembly 600.

[0119] The reactor may further include any other suitable additional elements to ensure its correct operation. For example, the reactor may include a heating device configured to heat the reaction chamber, a gas panel for delivering process gases into the reaction chamber, and one or more vacuum pumps for controlling pressure, valves, the gas panel, and the circuitry.

[0120] In a non-limiting example, the reactor is an epitaxial reactor for the deposition of silicon carbide. The reaction chamber may be horizontal, optionally have high-temperature walls, or be a single-substrate reaction chamber. The heating device may be an induction heating system.

[0121] Figure 6 schematically shows an exemplary embodiment of the reactor assembly 600 and the substrate handling platform 602 included therein according to the present invention.

[0122] The subject matter of this disclosure includes all novel and non-obvious combinations and partial combinations of the various processes, systems, and configurations disclosed herein, as well as all their equivalents, as well as any other configurations, functions, operations, and / or characteristics disclosed herein.

[0123] Description of the drawing Figure 1 shows a schematic diagram of a storage system 100 according to one embodiment of the present invention. Not all elements are numbered or shown. The storage system 100 comprises six shelves 110. Five shelves each support a removable housing 120 and are positioned in a first predetermined position. One empty shelf 110 is rotated 90° relative to the others and positioned in a second predetermined position. Each removable housing comprises a plurality of support elements 122 adapted to support a substrate holder 130. Each shelf is rotatably connected to pins (not shown) via hubs 140a, hubs 140b, etc. The pins are covered by end gaskets 141, which press down on the hubs by their weight and fastening means 142 (in this case, the latter being screws).

[0124] Figure 2 provides a schematic diagram of the storage system 100 of Figure 1, in which all six removable housings are positioned on six shelves. The removable housing 120a, positioned in a first predetermined location, can be distinguished from the removable housing 120b, positioned in a second predetermined location in the (xy) plane perpendicular to the axis of rotation (z). Each removable housing has a front 123 adapted to facilitate access to the substrate holder contained therein, if present.

[0125] Figure 3 provides a section of the storage system 100 of Figure 1, where all six shelves are in the same fixed position and support a removable housing 120. The removable housing is configured with support elements 122. The four bottom support elements each have three protrusions and include four substrate holders 130. Each shelf 110 is fitted to rotate around a pin 308 and along the axis of rotation (z) together with the hub 140. Bushings (302) are positioned between each hub and pin to reduce friction. For similar reasons, adjacent hubs are separated by separators 306 having roller bearings (not shown).

[0126] The pin 308 is covered by the end gasket 141 and pushes down the hub via the fastening means 142. The spacer 304 ensures the correct height of the shelf 110 relative to the support surface.

[0127] Figure 4 provides a diagram of a shelf 110 equipped with a hub 140 and a bush 302.

[0128] The shelf 110 supports a removable housing 120 having a front surface 123. The removable housing has several protrusions that constitute a support element 122 and is adapted in this embodiment to support two substrate holders (not shown) at one time.

[0129] Figure 5 shows a schematic diagram of a storage system 100 according to one embodiment of the present invention. The storage system is positioned on a support surface 506, which includes a first sensor 502 positioned in such a manner as to detect whether a shelf is positioned in a predetermined location, and in particular whether it is rotated in such a way that it is oriented along the x-direction of the drawing.

[0130] The storage system also includes a second sensor 504 configured to detect the displacement of at least one substrate holder 130 from a predetermined location when all shelves (and removable housings) are oriented along the y-direction of the drawing.

[0131] The storage system also includes a column 508 which can be used, for example, by magnetic or electromagnetic force to attract shelves in the vicinity of the column to a releaseable locking position. This can be done by selecting an appropriate magnetic or electromagnetic material for the column 508 and shelves 110 (or by adding components made of such material).

[0132] Figure 6 shows a schematic diagram of a reactor assembly 600 according to one embodiment of the present invention. The reactor assembly comprises a substrate handling platform 602, a load lock chamber 604, a transport chamber 606, and a reaction chamber 608, all of which are in communication with each other.

[0133] The substrate handling platform 602 has a support surface 506, and the support surface 506 is A storage system 100 comprising a substrate holder 130, a magnet 622, and a column 508, PCB centering unit 610, A circuit board management station 614 for storing circuit board 616, The first automatic component 612 supports the following.

[0134] In this case, the latter is an articulated arm adapted to grasp a substrate from the substrate management station 614, grasp a substrate holder 130 from the storage system 100, and displace them to the substrate centering unit 610 to connect and center them.

[0135] This first automatic component is also configured to grasp the substrate holder and displace it into / from the load lock chamber 604 while the substrate is centered in the centering unit.

[0136] The load lock chamber 604 is fitted to prepare the substrate before processing and to connect the substrate handling platform 602 to the transport chamber 606.

[0137] The latter comprises a cooling station 618, a heating station 620, and a second automatic component 612 adapted to displace a substrate holder having a substrate between the load lock chamber 604, the cooling station 618, the heating station 620, and the reaction chamber 608. [Explanation of Symbols]

[0138] 100 Storage Systems 110 shelves 120, 120a, 120b Housing 122 Support elements 123 Front 130 PCB holder 140, 140a, 140b hubs 141 End gasket 142 Fastening means 302 Bush 304 Separator, Spacer 306 Separator 308 pins 502 First Sensor 504 Second Sensor 506 Support surface 508 columns 600 Reactor Assembly 602 Platform 604 Load Lock Chamber 606 Conveyor Chamber 608 Reaction Chamber 610 PCB Centering Unit 612 Automatic Components 614 Circuit Board Management Station 616 circuit boards 618 Cooling Station 620 Heating Stations 622 Magnets

Claims

1. A storage system (100) suitable for storing multiple substrate holders (130), A pin (308) extending along the axis of rotation (z), The system comprises at least two shelves (110) positioned above each other in a direction parallel to the rotation axis (z), each shelf being adapted to support at least one removable housing (120), The shelves are pivotably connected to the pins around the rotation axis and are configured to rotate independently of each other around the rotation axis. A storage system (100) wherein each removable housing is adapted to support at least one substrate holder suitable for supporting a substrate (616) for semiconductor film deposition, and the removable housings are configured to be removablely coupled to a shelf and pulled out therefrom.

2. The storage system (100) according to claim 1, wherein each removable housing (120) has a front surface (123) the front surface facing the outer surface of the storage system.

3. The storage system (100) according to claim 1, wherein the removable housing (120) comprises at least one support element (122) adapted to support at least one substrate holder (130), and each support element comprises one or more protrusions or recesses.

4. The storage system (100) according to claim 1, wherein each shelf (110) is adapted to rotate from a first predetermined position to a second predetermined position and vice versa.

5. The storage system (100) according to claim 4, wherein each shelf (110) is removablely lockable in the first predetermined position and / or the second predetermined position.

6. The storage system (100) according to claim 1, wherein each shelf (110) is provided with hubs (140, 140a, 140b) configured to be pivotably connected to the pins (308).

7. The storage system (100) according to claim 6, further comprising at least one separator (306), each separator positioned between two adjacent hubs (140, 140a, 140b).

8. The storage system (100) according to claim 4, further comprising a first sensor (502) configured to detect when all shelves (110) are in the first predetermined position and / or the second predetermined position.

9. The storage system (100) according to claim 4, further comprising a second sensor (504) configured to detect the displacement of at least one substrate holder (130) from a predetermined position when all shelves are in the first predetermined position or the second predetermined position.

10. A substrate handling platform (602) for a reactor assembly (600), Support surface (506) and A storage system (100) according to claim 1, At least one substrate centering unit (610) and The system comprises at least one automatic component (612) adapted to grasp and move a substrate holder (130), A substrate handling platform (602) wherein the at least one storage system, the at least one substrate centering unit, and the at least one automated component are positioned on the support surface, and both the at least one storage system and the at least one substrate centering unit are arranged relative to each other so that they can be accessed by the at least one automated component.

11. The substrate handling platform (602) according to claim 10, further comprising a substrate management station (614) for receiving and storing substrates (616) positioned on the support surface (506) and arranged to be accessible by the at least one automated component (612).

12. A reactor assembly (600), At least one substrate handling platform (602) according to claim 10 or 11, A reactor for depositing a semiconductor film on a substrate (616), comprising a reactor including at least one reaction chamber (608), At least one load lock chamber (604) for adjusting the circuit board, The system comprises the reaction chamber (608) and at least one transport chamber (606) connected to the load lock chamber (604), A reactor assembly (600) wherein the transport chamber (606) includes at least one automated component (612) for positioning a substrate holder (130) inside and outside the reaction chamber.

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