Dicing method and jig

Abstract

To enable stable dicing of workpieces with protrusions arranged on the surface side. [Solution] One embodiment of the dicing method divides a workpiece W, which has a plurality of protrusions 72 arranged on the surface side of a plate-shaped body, into elements for each protrusion 72. This dicing method comprises the steps of filling the spaces between the plurality of protrusions with a reversible material R that undergoes a phase change between solid and liquid in a liquefied state, and then solidifying it, and dividing the workpiece W, in a state where the reversible material R has solidified as a whole, into elements by cutting it from the back side.

Description

Technical Field

[0001] The present invention relates to a dicing method for dividing a workpiece having a plurality of convex portions formed on the surface side into elements for each convex portion.

Background Art

[0002] Dicing devices may be used for applications other than wafer cutting. For example, in the manufacture of micro lenses and the like, there is a need to fragment a workpiece having a convex shape arranged on the surface by blade dicing. By cutting the workpiece into elements for each convex portion, a dome-shaped product (lens) can be obtained (see Patent Document 1).

[0003] In the dicing process, generally, a dicing tape is adhered to the surface of the workpiece opposite to the surface where the blade cuts. Thereby, the elements separated by dicing can be held on the dicing tape.

Prior Art Documents

Patent Documents

[0004] [[ID=5 | 25]] [[ID=6 | 26]]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] [[ID=6 | 38]] However, when targeting a workpiece on which a large number of small convex portions are formed, since the strength of the workpiece itself is small and the holding force of the dicing tape is also small, the workpiece may bend when the blade hits during dicing, making it difficult to make a highly accurate cut. In particular, when the workpiece has a hollow dome structure in which the back surface of the convex portion has a concave portion, the installation area on the dicing tape adhered to the back surface of the workpiece becomes small, so there is a concern that dicing becomes more unstable.

[0006] This invention has been made in view of these circumstances, and one of its objectives is to enable stable dicing of workpieces having protrusions arranged on their surface. [Means for solving the problem]

[0007] One aspect of the present invention is a dicing method for dividing a workpiece having a plurality of protrusions arranged on the surface side of a plate-shaped body into elements for each protrusion. This dicing method comprises the steps of filling the spaces between the plurality of protrusions with a reversible material that undergoes a phase change between solid and liquid in a liquefied state, and then solidifying it, and dividing the workpiece, in a state where the reversible material has solidified as a whole, into elements by cutting it from the back side.

[0008] Another aspect of the present invention is a dicing method for dividing a workpiece having a plate-shaped body with a plurality of protrusions arranged on its surface into elements for each protrusion. This dicing method comprises: an immersion step in which a workpiece is mounted in a jig having an immersion tank for storing a reversible material that undergoes a phase change between solid and liquid depending on the temperature, such that the surface is immersed in the liquefied reversible material in the immersion tank and the reversible material fills the spaces between the plurality of protrusions; a cooling step in which the reversible material is cooled and solidified integrally with the workpiece; and a dicing step in which, with the reversible material solidified, the workpiece is cut along a predetermined dividing line set on the back surface of the workpiece, thereby dividing it into elements for each protrusion.

[0009] Another aspect of the present invention is a dicing method for dividing a workpiece having a plate-shaped body with a plurality of protrusions arranged on its surface into elements for each protrusion. This dicing method comprises: a mounting step of attaching a workpiece to a jig having an immersion frame for holding a reversible material that undergoes a phase change between solid and liquid depending on the temperature, such that the surface fits within the immersion frame; an immersion step of pouring the reversible material into the immersion frame in a liquefied state and immersing the surface so that the reversible material fills the spaces between the plurality of protrusions; a cooling step of cooling the reversible material to solidify it integrally with the workpiece; and a dicing step of cutting the workpiece along a predetermined division line set on the back surface of the workpiece while the reversible material has solidified, thereby dividing it into elements for each protrusion.

[0010] A further aspect of the present invention is a jig used in a dicing apparatus for dividing a workpiece having a plurality of protrusions arranged on the surface side of a plate-shaped body into elements corresponding to each protrusion. This jig comprises an immersion tank for storing a reversible material that undergoes a phase change between solid and liquid depending on the temperature, and a support part for supporting the workpiece so that its surface is immersed in the immersion tank. [Effects of the Invention]

[0011] According to the present invention, it becomes possible to stably dic a workpiece in which protrusions are arranged on the surface side. [Brief explanation of the drawing]

[0012] [Figure 1] This is a perspective view showing the schematic configuration of a dicing apparatus according to an embodiment. [Figure 2] This is a perspective view showing the general configuration of the machining section. [Figure 3] This is a perspective view showing the support structure of the workpiece. [Figure 4] This is a diagram showing the configuration of the jig. [Figure 5] This is a diagram illustrating the structure of the workpiece. [Figure 6] This is a cross-sectional view showing the method of fixing the workpiece. [Figure 7] This is a cross-sectional view showing the method of fixing the workpiece. [Figure 8] This is a diagram illustrating the dicing process. [Figure 9] This is a flowchart illustrating the processing flow before and after dicing. [Figure 10] This is a flowchart illustrating the procedure for extracting elements. [Figure 11] This is a diagram showing the structure of the workpiece in the modified form. [Modes for carrying out the invention]

[0013] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the following embodiments and their modifications, substantially the same components are denoted by the same reference numerals, and the description thereof will be omitted as appropriate.

[0014] In this embodiment, when performing dicing to divide a workpiece having a plurality of convex portions arranged on the surface side into elements for each convex portion, a dedicated jig is prepared. This jig has an immersion tank in which wax is stored. By immersing the surface side of the workpiece in the wax of the immersion tank, wax is filled between the plurality of convex portions and solidified. Thereby, the workpiece is stably fixed to the jig. By applying a blade from the back side of the workpiece fixed by wax, dicing can be performed stably. The divided elements can be taken out by melting the wax after dicing. Hereinafter, the details will be described.

[0015] (Overall Configuration of Dicing Device) FIG. 1 is a perspective view showing a schematic configuration of a dicing device according to an embodiment. Hereinafter, for convenience of explanation, the front-rear direction, left-right direction, and up-down direction when viewing the dicing device from the front will be described as the X direction, Y direction, and Z direction, respectively.

[0016] The dicing device 1 includes a load port 10, a transfer mechanism 12, a processing unit 14, and a cleaning unit 16. A jig 22 supporting a workpiece W is placed on the load port 10. The transfer mechanism 12 transfers the workpiece W to each part of the device. The processing unit 14 performs dicing on the workpiece W. The cleaning unit 16 cleans the workpiece W after dicing. A control unit 20 is provided inside the housing 18 of the dicing device 1. <00​​​

[0018] The transport mechanism 12 grasps the jig 22 holding the workpiece W and transports it to the processing section 14. The workpiece W is a transparent material with multiple protrusions formed on its surface, and in this embodiment, it is made of a resin such as silicone or glass. The processing section 14 performs dicing (cutting) on ​​the workpiece W, dividing it into multiple elements. After that, the workpiece W is transported by the transport mechanism 12 to the washing section 16 for washing. Then, it is transported by the transport mechanism 12 to the load port 10 and discharged from the dicing device 1.

[0019] Figure 2 is a perspective view showing the schematic configuration of the machining section 14. The processing unit 14 is a so-called twin-spindle dicer and includes a pair of blades 24, a workpiece holding unit 26 for holding the workpiece W, and the like. The blades 24 are disc-shaped dicing saws. The pair of blades 24 are arranged opposite each other in the Y direction and are each rotatably supported by a spindle 32. The blades 24 have a rotation axis extending in the Y direction. The spindles 32 have a built-in high-frequency motor that rotates the blades 24 at high speed around the rotation axis. Each spindle 32 is supported so as to be movable in the Y and Z directions by a moving mechanism described later.

[0020] The workpiece holding section 26 includes a chuck table 34, a rotary table 36, and an X table 38. The chuck table 34 has a holding surface 34a that suctions and holds a jig 22 (see Figure 1) on which the workpiece W is fixed. The holding surface 34a is provided with numerous suction holes through which vacuum is applied to attract the back surface of the jig 22. By driving a vacuum suction source (not shown), the jig 22 can be attracted to and fixed to the holding surface 34a.

[0021] A base 40 is provided on the base (not shown) of the dicing apparatus 1, and a pair of guide rails 42 extending in the X direction are provided on the upper surface of the base 40. The X table 38 is installed horizontally so that it can move in the X direction along the guide rails 42. The X table 38 is driven by an X movement mechanism 44. In this embodiment, the X movement mechanism 44 is implemented by a linear motor, but it may also be implemented by a screw feed mechanism and a servo motor that drives it.

[0022] The rotary table 36 is rotatably supported by the X table 38, and the chuck table 34 is fixed to the upper surface of the rotary table 36. The rotary table 36 can rotate around its own axis (in the θ direction around the axis L extending in the Z direction) by a rotation mechanism 46. The rotation mechanism 46 is implemented, for example, by a spindle motor. With this configuration, the chuck table 34 is movable in the X direction and the θ direction.

[0023] On the other hand, an arch-shaped column 50 is erected on the base, and a pair of blades 24 are supported by the column 50. Specifically, a pair of guide rails 52 extending in the Y direction are provided on the front of the column 50, and a pair of Y tables 54 are installed so that they can move in the Y direction along the guide rails 52. The Y tables 54 are driven by a Y movement mechanism 56. The Y movement mechanism 56 is realized, for example, by a screw feed mechanism and a servo motor that drives it, and the pair of Y tables 54 can be driven individually.

[0024] Each Y-table 54 is provided with a pair of guide rails 58 extending in the Z direction on its front surface, and a pair of Z-tables 60 are positioned to move in the Z direction along the guide rails 58. The Z-tables 60 support the spindle 32 and the blade 24. The Z-tables 60 are driven by a Z-movement mechanism 62. The Z-movement mechanism 62 is implemented, for example, by a screw feed mechanism and a servo motor that drives it.

[0025] In the above configuration, the X-movement mechanism 44, the Y-movement mechanism 56, the Z-movement mechanism 62, and the rotation mechanism 46 function as "movement mechanisms" that move the pair of blades 24 and the chuck table 34 (i.e., the workpiece W) relative to each other.

[0026] (Jig configuration) Figure 3 is a perspective view showing the support structure of the workpiece W. A jig 22 holding the workpiece W is supported on the upper surface (holding surface 34a) of the chuck table 34. The workpiece W is fixed to the jig 22 via wax R. The jig 22 has an immersion tank 70 for accumulating wax R. The workpiece W is obtained by processing a transparent resin such as silicone, and is a rectangular plate-like body in plan view, with a plurality of protrusions 72 arranged vertically and horizontally on its surface. In this embodiment, the protrusions 72 are hollow dome-shaped, but are not limited to this (details will be described later).

[0027] The immersion tank 70 holds wax R, which has been liquefied by heating. The workpiece W is attached to the jig 22 with its surface facing downwards. As a result, the surface of the workpiece W is immersed in the wax R in the immersion tank 70, and the wax R fills the spaces between the multiple protrusions 72. Subsequently, as the jig 22 cools, the wax R solidifies, and the workpiece W is firmly fixed to the jig 22.

[0028] Furthermore, the chuck table 34 is equipped with a heating and cooling structure (not shown) for heating or cooling the upper surface of the chuck table 34 and, consequently, the jig 22. By operating this heating and cooling structure, the wax R inside the jig 22 placed on the chuck table 34 can be heated to liquefy it, and also cooled to solidify it (details will be described later).

[0029] Figure 4 is a diagram showing the configuration of the jig. Figure 4(A) is a perspective view. Figure 4(B) is a cross-sectional view taken along arrow AA in Figure 4(A), and Figure 4(C) is a cross-sectional view taken along arrow BB in Figure 4(A). As shown in Figure 4(A), the jig 22 is a metal plate-like body having a predetermined thickness, and an immersion tank 70, which is roughly rectangular in plan view, is formed therein, including the center of its upper surface. Support parts 76 are formed at each of the four corners of the immersion tank 70 by steps. These four support parts 76 support the four corners of the workpiece W from below (see Figure 3). With the workpiece W supported in this state, four openings 71 for adjusting the liquid level are formed between the inner circumferential surface of the immersion tank 70 and the circumferential end surface of the workpiece W.

[0030] As shown in Figures 4(B) and (C), the upper surface of the jig 22 is provided with a raised embankment 78 along its outer edge. The support portion 76 is formed by partially cutting out the surface of the jig 22.

[0031] (Work structure) Figure 5 shows the structure of the workpiece W. Figure 5(A) is a perspective view of the workpiece W from the surface side, and Figure 5(B) is a perspective view of the elements separated from the workpiece W. Figure 5(C) is a partially cutaway cross-sectional view of the workpiece W.

[0032] As shown in Figure 5(A), the workpiece W has a plate-shaped body 80 on which numerous protrusions 72 are formed and arranged. As also shown in Figures 5(B) and (C), the protrusions 72 form a hollow dome shape (hemispherical shape) with a concave shape on the back side. In this embodiment, the workpiece W is provided with ten rows of protrusions 72 vertically and horizontally, but their shape and number are not limited to this.

[0033] A linear gap S is formed between the protrusions 72 in each row, and in the dicing process, the blade 24 passes through this gap S to cut the workpiece W. The workpiece W is divided into elements 72e, one for each protrusion 72. As shown in Figure 5(B), the elements 72e are cut out in a square shape surrounding the protrusions 72 in a plan view. In this embodiment, the elements 72e are microlenses.

[0034] (Dicing method) Figures 6 and 7 are cross-sectional views illustrating the method of fixing the workpiece W. Figures 6(A) to 6(C) show the process of fixing the workpiece W to the jig 22. Figures 6(A) and 6(B) correspond to the cross-section of Figure 4(C), and Figure 6(C) corresponds to the cross-section of Figure 4(B). Figure 7(A) is an enlarged view of section C in Figure 6(B), and Figure 7(B) is an enlarged view of section D in Figure 6(C).

[0035] As shown in Figures 6(A) to (C), the workpiece W is fixed to the jig 22 prior to dicing. In this embodiment, the jig 22 is prepared in advance by injecting wax R into the immersion tank 70 and allowing it to solidify at room temperature. After attaching the jig 22 to the chuck table 34 (see Figure 3), the jig 22 is heated by the heating and cooling structure described above, thereby liquefying the wax R.

[0036] Next, the workpiece W is attached to the jig 22 with the surface side where the protrusions 72 are arranged facing downwards (Figure 6(A)). At this time, the four corners of the workpiece W are supported by the support parts 76, and all the protrusions 72 are immersed in the wax R (Figure 6(B)). The liquefied wax R fills the spaces between adjacent protrusions 72 (Figure 6(C)).

[0037] As shown in Figure 7(A), the vertices of each protrusion 72 are separated from the bottom surface 70a of the immersion tank 70 by a small gap Δh. In other words, the depth d1 of the immersion tank 70 and the depth d2 of the support portion 76 are set so that there is a gap Δh relative to the height h0 of the protrusion 72. The depth d2 of the support portion 76 is smaller than the thickness t of the main body 80 (plate-shaped portion) of the workpiece W. Therefore, the height h2 of the back surface of the workpiece W relative to the bottom surface 70a is greater than the depth d1 of the immersion tank 70.

[0038] The amount of wax R injected is set so that the liquid level h when the workpiece W is attached to the jig 22 does not exceed the height (depth d1) of the immersion tank 70. Therefore, as shown in Figure 7(B), the wax R does not reach the back side of the workpiece W. This prevents the wax R from adhering to the back side of the workpiece W. In other words, the height (depth d2) of the support part 76 is set so that the back side of the workpiece W is not immersed in the wax R.

[0039] Figure 8 is a diagram illustrating the dicing process. Figures 8(A) and (B) show the dicing process. After the workpiece W is attached to the jig 22 as described above, the jig 22 is cooled by the heating and cooling structure described above to solidify the wax R and firmly fix the workpiece W. Then, as shown in Figure 8(A), the blade 24 is driven to perform the dicing process. At this time, the jig 22 is fixed to the chuck table 34.

[0040] On the back surface of the workpiece W, multiple division lines L1 and L2 are set at positions corresponding to the gap S on the front surface (see Figure 5(C)). Division lines L1 and L2 are orthogonal to each other and arranged in a grid pattern. Each region demarcated by these division lines L1 and L2 corresponds to element 72e (see Figure 5(B)).

[0041] As shown in Figure 8(B), dicing is performed along the planned division lines L1 and L2. Specifically, first, the rotation angle of the chuck table 34 is adjusted so that one of the planned division lines L1 and L2 is facing in the X direction, and then the cutting is performed with the blade 24 (see Figure 2). After that, the chuck table 34 is rotated 90 degrees so that the other of the planned division lines L1 and L2 is facing in the X direction, and the cutting is performed with the blade 24.

[0042] As a result, the workpiece W is divided into elements 72e, each containing one protrusion 72. However, the cutting depth by the blade 24 is set to be slightly greater than the thickness of the main body 80 (plate-like portion) of the workpiece W. Therefore, the cutting edge of the blade 24 only reaches a portion of the wax R (near the upper surface).

[0043] Immediately after dicing, the workpiece W is divided into individual elements 72e, but is fixed to the jig 22 by solidified wax R. Subsequently, by heating the jig 22 using the heating and cooling structure described above to liquefy the wax R, the individual elements 72e can be removed from the jig 22.

[0044] Figure 9 is a flowchart illustrating the processing flow before and after dicing. The following explanation will be based on Figure 9, with references to Figures 1 to 8 as appropriate. The control unit 20 sets the jig 22, in which the wax R has solidified in the immersion tank 70, onto the chuck table 34 (S10). Then, the heating and cooling structure heats the jig 22 to melt the wax R (S12: liquefaction step).

[0045] Next, the control unit 20 sets the workpiece W in the jig 22 (S14). At this time, the workpiece W is attached to the jig 22 with its surface facing downwards, and the protrusions 72 are immersed in the wax R liquefied in the immersion tank 70 (immersion step). Then, the jig 22 is cooled by the heating and cooling structure, and the wax R solidifies together with the workpiece W (S16: cooling step).

[0046] The control unit 20 performs alignment processing based on the planned division lines L1 and L2 set on the workpiece W (S18). This alignment processing aligns the direction of the planned division lines with the cutting direction by the blade 24. Then, the blade 24 is moved along the planned division lines to perform dicing, dividing the workpiece into elements 72e for each protrusion 72 (S20: dicing step).

[0047] Figure 10 is a flowchart illustrating the procedure for removing elements after dicing. After dicing, the workpiece W is divided into multiple elements 72e, but is held on the jig 22 by the solidified wax R. In this state, the jig 22 is removed from the dicing apparatus 1 and transported to the downstream process equipment (referred to as "successor equipment" for convenience).

[0048] The subsequent device has a chuck table for fixing the jig 22. Inside the chuck table is a heating structure for heating the jig 22. In this subsequent device, the transported jig 22 is set on the chuck table (S30), and adhesive tape is applied to the entire back surface of the workpiece W (S32). Next, the jig 22 is heated by the heating structure to melt the wax R (S34). As a result, the wax R liquefies, and the bond between the workpiece W and the jig 22 is released. In other words, it becomes possible to detach the element 72e of the workpiece W from the jig 22 and remove the wax R from the element 72e.

[0049] The subsequent device detaches each element 72e from the jig 22 along with the adhesive tape and removes it (S36). Then, the adhesive tape is peeled off to separate each element 72e (S38). Finally, the separated elements 72e are cleaned (S40).

[0050] As described above, in this embodiment, the workpiece is held stably by filling and solidifying wax R between multiple protrusions formed on the surface side of the workpiece, and dicing is performed from the back side of the workpiece in that state. Therefore, bending of the workpiece due to contact with the blade during dicing can be suppressed, and stable cutting is possible. In particular, when the protrusions have a hollow dome structure, the stability can be significantly improved. As a result, the processing accuracy of the cut elements can be maintained at a high level.

[0051] Furthermore, since the jig 22 has an immersion tank 70 to hold the wax R, and the heating and cooling structure enables liquefaction and solidification of the wax R, the workpiece W can be easily attached to and removed from the jig 22. As the wax R solidifies in the immersion tank 70, it can be stored and managed together with the jig 22, making it easy to handle. Since the wax R undergoes a phase change between solid and liquid depending on the temperature, it can also be reused. As a result, the running costs associated with the dicing process described above can be reduced.

[0052] Although preferred embodiments of the present invention have been described above, it goes without saying that the present invention is not limited to these specific embodiments, and various modifications are possible within the scope of the technical concept of the present invention.

[0053] [Differentiation] Figure 11 shows the structure of a modified workpiece. Figure 11(A) is a partially cutaway cross-sectional view of the workpiece, and Figure 11(B) is a perspective view showing the workpiece mounted on the jig. In this modified example, the workpiece W2 has a solid dome structure in which the convex portion 73 does not have a concave shape on the back side (Figure 11(A)). Even for such a workpiece W2, dividing lines L1 and L2 are set on the back side, and the same dicing method as in the above embodiment can be applied (Figure 11(B)).

[0054] In the above embodiment, as shown in Figure 4, an example is shown in which a jig 22 is provided with an immersion tank 70 for accumulating wax R. The workpiece W is attached to the immersion tank 70 with the surface side where the protrusions 72 are arranged facing downwards. In a modified example, the workpiece may be attached to the jig with the surface side where the protrusions are arranged facing upwards, and liquefied wax may be injected and solidified.

[0055] For example, a frame-shaped jig (immersion frame) may be attached to the workpiece W shown in Figure 5(A) so as to surround the arrangement of protrusions 72, and liquefied wax may be injected into the immersion frame from above. At this time, a sealing member may be interposed between the workpiece W and the jig to prevent the wax from leaking. After the wax has solidified, the workpiece W, which is integrated with the jig, may be inverted and attached to a chuck table, and dicing may be performed from the back surface of the workpiece W.

[0056] In the above embodiment, a heat-softening wax was given as an example of a "reversible material" that undergoes a phase change between solid and liquid. In a modified example, a material that undergoes a phase change between solid and liquid upon light irradiation may be used. For example, a material that solidifies or liquefies depending on the wavelength of light may be used, and the phase change may be induced by controlling the wavelength of the irradiated light.

[0057] The above embodiments and modifications show examples of the shape of the workpiece W, but are not limited thereto. The shape of the convex portion of the element may be elliptical in plan view, or polygonal in plan view. The outer shape of the plate-like portion of the element may be rectangular, triangular, or other polygonal in plan view.

[0058] In the above embodiment, as explained in relation to Figure 6, an example was shown in which the wax R, which had been solidified in advance in the jig 22, was melted and liquefied before the workpiece W was attached to the jig 22. In a modified example, the liquefied wax may be poured into the immersion tank 70 of the jig 22 and the workpiece W may be attached to the jig 22 before it solidifies (attachment step). In other words, the liquefaction step may be omitted.

[0059] Alternatively, the workpiece W may be attached to the jig 22 before the wax is injected into the immersion tank 70, and then the liquefied wax may be injected through the opening 71 (see Figure 3). This dicing method comprises: an attachment step of attaching the workpiece so that the surface having protrusions fits inside the immersion tank; an immersion step of injecting the wax in a liquefied state into the immersion tank and immersing the surface so that the wax fills the spaces between the multiple protrusions; a cooling step of cooling the wax to solidify it integrally with the workpiece; and a dicing step of cutting the workpiece along the planned division lines set on the back surface while the wax has solidified, dividing it into elements for each protrusion.

[0060] In the above embodiment, the dicing apparatus 1 is exemplified as an apparatus that performs blade dicing, in which cutting is performed by pressing a blade against the wafer. In a modified example, the above dicing method using wax may be applied to laser dicing or other dicing processes that separate the surface of the wafer using laser light.

[0061] It should be noted that the present invention is not limited to the embodiments and modifications described above, and the components can be modified and implemented without departing from the spirit of the invention. Various inventions may be formed by appropriately combining the multiple components disclosed in the embodiments and modifications described above. In addition, some components may be deleted from all the components shown in the embodiments and modifications described above. [Explanation of Symbols]

[0062] 1 Dicing device, 14 Processing section, 16 Cleaning section, 20 Control section, 22 Jig, 24 Blade, 26 Workpiece holding section, 34 Chuck table, 70 Immersion tank, 70a Bottom surface, 72 Protrusion, 72e Element, 73 Protrusion, 76 Support section, 80 Main body, L1 Dividing line, L2 Dividing line, R Wax, W Workpiece, W2 Workpiece.

Claims

1. A dicing method for dividing a workpiece having multiple protrusions arranged on the surface side of a plate-shaped body into elements corresponding to each of the protrusions, The steps include filling the spaces between the multiple protrusions with a reversible material that undergoes a phase change between solid and liquid in a liquefied state, and then solidifying it, A dicing method comprising the step of dividing the workpiece, in which the reversible material has been solidified as a whole, into elements by cutting it from the back side.

2. A dicing method for dividing a workpiece having multiple protrusions arranged on the surface side of a plate-shaped body into elements corresponding to each of the protrusions, An immersion step involves attaching a workpiece to a jig having an immersion tank for storing a reversible material that undergoes a phase change between solid and liquid depending on the temperature, such that the surface is immersed in the liquefied reversible material in the immersion tank and the reversible material fills the spaces between the multiple protrusions. A cooling step of cooling the reversible material to solidify it integrally with the workpiece, A dicing method comprising: a dicing step of cutting the workpiece along a division line set on the back surface of the workpiece while the reversible material has solidified, thereby dividing it into elements for each of the protrusions.

3. The jig is prepared in which the reversible material is pre-filled and solidified in the immersion tank. The dicing method according to claim 2, wherein the immersion step includes a liquefaction step of heating the jig prior to immersing the workpiece to liquefy the reversible material.

4. A dicing method for dividing a workpiece having multiple protrusions arranged on the surface side of a plate-shaped body into elements corresponding to each of the protrusions, A mounting step involves attaching the workpiece to a jig having an immersion frame for storing a reversible material that undergoes a phase change between solid and liquid depending on the temperature, such that the surface is contained within the immersion frame, An immersion step in which the reversible material is poured into the immersion frame in a liquefied state, and the surface is immersed so that the reversible material fills the spaces between the plurality of protrusions, A cooling step of cooling the reversible material to solidify it integrally with the workpiece, A dicing method comprising: a dicing step of cutting the workpiece along a division line set on the back surface of the workpiece while the reversible material has solidified, thereby dividing it into elements for each of the protrusions.

5. The dicing method according to any one of claims 1 to 4, wherein the convex portion has a dome structure in which the back side is concave.

6. A jig used in a dicing device that divides a workpiece, which has multiple protrusions arranged on the surface side of a plate-shaped body, into elements corresponding to each of the protrusions, An immersion tank for storing reversible materials that undergo a phase change between solid and liquid depending on the temperature, A support portion for supporting the workpiece so as to immerse its surface in the reversible material liquefied in the immersion tank, A jig equipped with the following features.

7. The jig according to claim 6, wherein the height of the support portion is set so that the back surface of the workpiece is not immersed in the reversible material.

8. The support portion is provided at each of the multiple corners of the immersion tank, The jig according to claim 7, wherein, when the workpiece is supported by a plurality of the support parts, an opening for adjusting the liquid level is formed between the inner circumferential surface of the immersion tank and the circumferential end surface of the workpiece.

9. The jig according to any one of claims 6 to 8, wherein, prior to use in the dicing apparatus, the reversible material is stored in the immersion tank and provided in a state in which the reversible material has solidified at room temperature.

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