Load port device
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- TDK CORP
- Filing Date
- 2025-01-24
- Publication Date
- 2026-08-05
Smart Images
Figure 2026126913000001_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to a load port device used in a semiconductor manufacturing factory or the like.
Background Art
[0002] In a semiconductor manufacturing factory or the like that manufactures semiconductor products or the like, a load port device is used that docks a transport container that houses a transport object such as a substrate to a processing device or the like that performs various processes, and makes the object in the transport container deliverable to the processing device or the like (see Patent Document 1, etc.). In such a load port device, in order to maintain the cleanliness and pressure inside the processing device that receives the transport object, the opening area of the opening is designed according to the type and size of the container.
[0003] On the other hand, in recent years at the site of semiconductor manufacturing factories, along with the diversification of transport objects, there is a desire to deliver transport objects to processing devices or the like using different types of transport containers. However, in a conventional load port device, for example, when docking a container with a narrow lid area, the gap between the container and the opening becomes large, making it difficult to maintain the cleanliness and pressure inside the processing device that receives the transport object. Also, as a measure to dock different types of transport containers to one load port device, an idea of attaching an adapter to the transport container has been proposed (see Patent Document 2, etc.). However, the idea of attaching an adapter to the container has problems in terms of manufacturing efficiency, such as an increase in the number of steps and time loss required for attaching and detaching the adapter.
Prior Art Documents
Patent Documents
[0004]
Patent Document 1
Patent Document 2
Summary of the Invention
Problems to be Solved by the Invention
[0005] This disclosure provides a load port device that enables docking of multiple types of containers with different lid areas while maintaining the cleanliness and pressure of the docked equipment. [Means for solving the problem]
[0006] To achieve the above objectives, the load port device relating to this disclosure is A mounting section having a container mounting surface on which a container with a lid on its side is placed, An opening having a first opening area is formed, and a frame is erected with respect to the container mounting surface, The aforementioned lid and the door that opens and closes the aforementioned opening, It has a shutter mechanism that operates to shield and open a part of the aforementioned opening, The shutter mechanism shields a portion of the opening when the area of the lid of the container placed on the aforementioned mounting section is less than or equal to a predetermined ratio to the first opening area.
[0007] The load port device according to this disclosure has a shutter mechanism that operates to shield and open a portion of the opening, and the shutter mechanism shields a portion of the opening when the area of the container lid is less than or equal to a predetermined ratio of the first opening area. Therefore, the load port device according to this disclosure operates the shutter mechanism according to the area of the lid, and the shutter mechanism appropriately shields the gap formed between the opening of the frame and the container. As a result, the load port device according to this disclosure can dock multiple types of containers with different lid areas while maintaining the cleanliness and pressure of the docked equipment.
[0008] Furthermore, for example, the door may have a first registration pin and a first suction pad for holding the lid when the area of the lid is a first value, and a second registration pin and a second suction pad for holding the lid when the area of the lid is a second value.
[0009] Since such load port devices have different registration pins and suction pads to accommodate different lid areas (types), they can suitably dock multiple types of containers that differ not only in the lid area but also in the arrangement of the pin engagement portion on the lid.
[0010] Furthermore, for example, the load port device may have a detection unit that detects information from the container relating to the area of the lid of the container placed on the aforementioned mounting unit. The shutter mechanism may operate according to the detection result from the detection unit.
[0011] In such a load port device, the detection unit can recognize the area of the lid and the type of container to be docked. Therefore, even if the load port device does not have prior storage of information regarding the type of container to be docked, it can operate the shutter mechanism according to the container to be docked. Furthermore, by detecting the area of the lid and the type of container, the shutter mechanism can reliably perform operations according to the container to be docked.
[0012] Furthermore, for example, the portion of the opening that the shutter mechanism opens and closes may be within the region above the center of the opening. The shutter mechanism may, when the gap between the upper edge of the lid of the container placed on the aforementioned mounting unit and the upper edge of the opening is greater than or equal to a predetermined length, shield a portion of the opening so as to fill at least a portion of the gap.
[0013] Such load port devices can dock containers while maintaining the cleanliness and pressure of the docked containers, even in situations where shorter containers are transported together with taller containers. Furthermore, such shutter mechanisms can effectively shield the gap formed between the opening and the container with a simple mechanism.
[0014] Also, for example, the door is The center of the door may be connected to the lid of the container at a first position where it is at a first height from the container mounting surface, and the area of the lid is the first value. The center of the door may be connected to the lid of the container at a second position where it is at a second height from the container mounting surface, and the area of the lid is the second value.
[0015] Such a load port device adjusts the height at which the door connects to the container lid, depending on the area of the container lid and the type of container. This allows the load port device to accommodate containers of different heights without changing the height of the mounting surface, and, in conjunction with the operation of the shutter mechanism, effectively shields the gap formed between the opening and the container.
[0016] Furthermore, for example, the second opening area, which is the opening area of the unshielded portion of the opening when the shutter mechanism shields a part of the opening, may be narrower than either the first value or the second value, and wider than the other of either the first value or the second value.
[0017] Such a load port device allows the shutter mechanism to appropriately adjust the unshielded opening area according to the area of the container lid, thereby ensuring an opening area large enough for the lid to pass through while effectively shielding the gap formed between the opening and the container. [Brief explanation of the drawing]
[0018] [Figure 1] Figure 1 is a schematic perspective view of a load port device according to one embodiment, seen from the front and slightly above. [Figure 2] Figure 2 is a schematic perspective view of the load port device shown in Figure 1, viewed from the rear and diagonally above. [Figure 3] Figure 3 is a conceptual diagram illustrating the operation of the shutter mechanism and door when opening and closing the lid of the first container in the load port device shown in Figure 1, as seen from the rear side. [Figure 4]FIG. 4 is a conceptual diagram for explaining the movement of the shutter mechanism and the door when opening and closing the lid of the first container in the load port device shown in FIG. 1, as viewed from the front side. [Figure 5] FIG. 5 is a conceptual diagram for explaining the movement of the shutter mechanism and the door when opening and closing the lid of the second container in the load port device shown in FIG. 1, as viewed from the back side. [Figure 6] FIG. 6 is a conceptual diagram for explaining the movement of the shutter mechanism and the door when opening and closing the lid of the second container in the load port device shown in FIG. 1, as viewed from the front side. [Figure 7] FIG. 7 is a schematic diagram showing the lid holding mechanism of the door of the load port device shown in FIG. 1. [Figure 8] FIG. 8 is a schematic cross-sectional view showing the internal structure of the lid holding mechanism shown in FIG. 8. [Figure 9] FIG. 9 is a schematic perspective view showing the shutter mechanism of the load port device shown in FIG. 1.
Embodiments for Carrying Out the Invention
[0019] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In each drawing, for the sake of easy viewing of the drawings and facilitating understanding of the invention, the scales of each component may be appropriately changed. Further, hereinafter, specific descriptions will be made using embodiments, but the present disclosure is not limited only to these embodiments, and the scope within which those skilled in the art can recognize based on common technical knowledge from the embodiments is also included in the technical scope of the present disclosure.
[0020] FIG. 1 is a schematic perspective view of a load port device 10 according to an embodiment of the present disclosure, as viewed obliquely upward from the front. FIG. 1(a) is a view showing a state where the first container 91 is docked, and FIG. 1(b) is a view showing a state where the second container 96 is docked. The load port device 10 is, for example, attached and used at the object loading / unloading ports of various processing devices and EFEMs (not shown) in a semiconductor factory or the like, and functions as an interface device that can transfer the objects to be transported in the containers 91 and 96 to various processing devices and the like.
[0021] As shown in Figures 1(a) and 1(b), the load port device 10 can dock both a first container 91 and a second container 96, which have different areas for their lids (first lid 93 and second lid 98, see Figure 2). As shown in Figure 1, the load port device 10 includes a lower support section 12, a mounting section 20, a frame 30, a shutter mechanism 50, a detection section 60, and the like.
[0022] Figure 2 is a schematic perspective view of the load port device 10 shown in Figure 1, viewed from the rear oblique angle. Figure 2(a) shows the state in which the first container 91 is docked, similar to Figure 1(a), and Figure 2(b) shows the state in which the second container 96 is docked, similar to Figure 2(b). As shown in Figure 2, the load port device 10 further includes a door 40, a door drive unit 70, a mapping arm 76, etc.
[0023] As shown in Figure 2, the load port device 10 can dock both a first container 91, whose lid 93 faces the door 40 when placed, with a first value S3, and a second container 96, whose lid 98 faces the door 40 when placed, with a second value S4, which is smaller than the first value S3. In Figures 2(a) and 2(b), the first lid 93 and the second lid 98 are held by the lid holding mechanism 42 of the door 40 (see Figure 7, etc.) and are hidden behind the door 40. Therefore, in Figures 2(a) and 2(b), the first lid 93 and the second lid 98 are shown offset to a position different from their actual position in order to show their size and approximate shape.
[0024] The first container 91 shown in Figures 1(a) and 2(a) is a FOUP (Floor Opening Up) compatible with 300 mm silicon wafers. The first container 91 has a first lid 93 on its side, and the opening formed on the side of the first container 91 is closed by the first lid 93 during transport, etc.
[0025] The second container 96 shown in Figures 1(b) and 2(b) is a transport container compatible with a φ300mm wafer ring frame FOUP. The second container 96 has a second lid 98 on its side, and the opening formed on the side of the second container 96 is closed by the second lid 98 during transport, etc.
[0026] In this embodiment, the first container 91 is for 300 mm wafers and the second container 96 is for a φ300 mm wafer ring frame compatible FOUP. However, the load port device 10 is not limited to just the first container 91 and the second container 96 as two or more types of containers that can be docked. The load port device 10 can be applied to any two or more types of containers with different lid areas by arranging the shutter mechanism 50 and the lid holding mechanism 42 of the door 40, which will be described later.
[0027] Figures 4 and 6 are schematic perspective views showing the load port device 10 without containers such as the first container 91 and the second container 96 placed on it. As can be seen by comparing Figures 1 and 2 with Figures 4 and 6, the loading section 20 of the load port device 10 has a container loading surface 22 on which containers such as the first container 91 and the second container 96 are placed. The loading section 20 is composed of a transport table or the like that has a container loading surface 22 and can move forward and backward horizontally toward the frame 30.
[0028] In other words, the mounting section 20 can place the first container 91 and the second container 96 on it, and can move the placed first container 91 and the second container 96 to the dock position shown in Figures 1 and 2. Although not shown in Figure 4, the container mounting surface 22 of the mounting section 20 is provided with a locking mechanism for fixing the placed first container 91 and the second container 96 to the container mounting surface 22. The mounting section 20 may also have a sensor for identifying the type of the placed first container 91 and the second container 96. The mounting section 20 is supported by a lower support section 12, and is capable of placing the first container 91 and the second container 96 at a predetermined height.
[0029] As shown in Figures 2 and 4(b), the load port device 10 has an opening 32 having a first opening area S1 and a frame 30 erected substantially perpendicular to the container mounting surface 22. The opening 32 is substantially rectangular, and the frame 30 has a frame-like shape surrounding the opening 32.
[0030] Figure 3 is a conceptual diagram illustrating the arrangement of the shutter mechanism 50 and the movement of the door 40 when opening and closing the first lid 93 (see Figure 2(a)), which is the lid of the first container 91, in the load port device 10 shown in Figure 1, as viewed from the rear. Figure 4 is a conceptual diagram of the arrangement of the shutter mechanism 50 and the movement of the door 40 shown in Figure 3, as viewed from the front of the load port device 10. Figures 3(a) and 4(a) show the state in which the door 40 is closed over the first lid 93 and the opening 32, while Figures 3(b) and 4(b) show the state in which the door 40 is open over the first lid 93 and the opening 32. Note that in Figures 4(a) and 4(b), the first container 91 (see Figure 3(b)), which is actually placed on the mounting section 20, is not shown in order to make the position of the door 40 and the state of the opening 32 easier to see.
[0031] As shown in Figures 4(a) and 4(b), the opening 32 is located in a region above the mounting section 20, at roughly the same height as the mounting section 20. As a result, when the first container 91 having the first lid 93 is positioned in the dock position in the load port device 10, the opening of the first container 91 and the first lid 93 face the opening 32 of the frame 30.
[0032] Figure 5 is a conceptual diagram illustrating the arrangement of the shutter mechanism 50 and the movement of the door 40 when opening and closing the second lid 98 (see Figure 2(b)), which is the lid of the second container 96, in the load port device 10 shown in Figure 1, as seen from the rear. Figure 6 is a conceptual diagram showing the movement of the door 40 shown in Figure 5 and the movement of the door 40 shown in Figure 3, as seen from the front. Figures 5(a) and 6(a) show the state in which the door 40 is closed, closing the second lid 98 and the opening 32, while Figures 5(b) and 6(b) show the state in which the door 40 is open, opening the second lid 98 and the opening 32. Note that in Figures 6(a) and 6(b), the second container 96 (see Figure 5(b)), which is actually placed on the mounting section 20, is not shown in order to make the position of the door 40 and the state of the opening 32 easier to see.
[0033] As can be seen from Figures 6(a) and 6(b), when the second container 96 having the second lid 98 is positioned in the dock location in the load port device 10, the opening of the second container 96 and the second lid 98 face the opening 32 of the frame 30, similar to the opening of the first container 91 and the first lid 93 shown in Figure 4.
[0034] As shown in Figures 3 and 5, the door 40 of the load port device 10 opens and closes the first lid 93 and the second lid 98, which are the lids of the container, and the opening 32. The door 40 is driven by a door drive unit 70 located below the door 40, and is at least vertically movable. The door 40 closes the opening 32 when positioned so as to overlap the opening 32 when viewed from the horizontal, as shown in Figures 3 to 6(a). The door 40 also opens the opening 32 when positioned below the opening 32 when viewed from the horizontal.
[0035] The area of the door 40 shown in the embodiment (area opposite the opening 32) is approximately the same as the first opening area S1, which is the area of the opening 32. However, the area of the door 40 may be larger than the first opening area S1, or conversely, slightly smaller than the first opening area S1. That is, as shown in Figures 3(a), 4(a), 5(a), and 6(a), when the opening 32 is closed, the door 40 does not necessarily have to completely seal the opening 32.
[0036] For example, in the load port device 10 according to the embodiment shown in Figures 1 and 2, a gap of an appropriate width is formed between the frame 30 and the shutter mechanism 50 (described later) that form the outer periphery of the opening 32, and the door 40. In such a load port device 10, the gap in the opening 32 forms an airflow that flows from the rear side to the front side (outside) of the load port device 10, making it possible to appropriately maintain the cleanliness of the EFEM and processing equipment from which the transported objects are discharged from the containers 91 and 96.
[0037] Furthermore, as shown in Figures 4(a) and 6(a), the door 40 has a lid holding mechanism 42 that is detachably connected to the first lid 93 and the second lid 98 of the first container 91 and the second container 96, and holds the first lid 93 and the second lid 98. The lid holding mechanism 42 also has multiple lid holding mechanism parts, each consisting of a combination of registration pins (hereinafter simply referred to as "pins") that engage with the lids 93 and 98, suction pads that adhere to the lids 93 and 98, a suction mechanism that creates negative pressure inside the suction pads, and a drive unit that moves the pins and suction pads forward and backward. As will be described later, the multiple lid holding mechanism parts of the lid holding mechanism 42 of the load port device 10 include a first lid holding mechanism part 44 and a second lid holding mechanism part 46. The pins, suction pads, suction mechanism and drive unit that constitute the lid holding mechanism parts will be described later with reference to Figures 7 and 8.
[0038] As can be seen from the comparison between Figure 2(a) and Figure 4(a), and between Figure 2(b) and Figure 6(a), the lid holding mechanism 42 has a first lid holding mechanism part 44 which is part of a plurality of lid holding mechanism parts, and a second lid holding mechanism part 46 which is another part, and the first lid 93 and the second lid 98 are held by selectively using these parts.
[0039] Specifically, as shown in Figure 2(a), when a first container 91 with a lid area of a first value S3 is placed on the mounting section 20, the lid holding mechanism 42 uses the first lid holding mechanism portion 44 to hold the first lid 93 of the first container 91. On the other hand, as shown in Figure 2(b), when a second container 96 with a lid area of a second value S4 is placed on the mounting section 20, the lid holding mechanism 42 uses the second lid holding mechanism portion 46 to hold the second lid 98 of the second container 96.
[0040] The first lid holding mechanism portion 44 is connected to the first lid 93 that closes the first container 91 when the door 40 is closed over the opening 32 as shown in Figure 3(a), and the first lid holding mechanism portion 44 holds the first lid 93. Furthermore, while the first lid holding mechanism portion 44 holds the first lid 93, the door 40 moves to a lower position that does not overlap with the opening 32 as shown in Figure 3(b), thereby opening the opening of the first container 91 and simultaneously opening the opening 32. As a result, the load port device 10 connects the inside of the first container 91 with the space on the rear side of the load port device 10, allowing a robot arm or the like, positioned on the EFEM or the like on the rear side of the load port device 10, to access the object inside the first container 91.
[0041] As shown in Figure 3(a), the door 40 is connected to the first lid 93 (see Figure 2(a)) of the first container 91, which has a lid area of a first value S3, at a first position P1 where the center 48 of the door 40 is at a first height H1 from the container mounting surface 22. That is, as shown in Figure 4(a), the pin 44a (see Figure 8) of the first lid holding mechanism portion 44 that holds the first lid 93 is positioned at a height corresponding to the pin engagement hole 94 (see Figure 2(a)) formed in the first lid 93 of the first container 91 that is mounted on the mounting portion 20, when the door 40 is at the first position P1.
[0042] Furthermore, the second lid holding mechanism portion 46 is connected to the second lid 98 that closes the second container 96 when the door 40 is closed over the opening 32 as shown in Figure 5(a), and the second lid holding mechanism portion 46 holds the second lid 98. In addition, while the second lid holding mechanism portion 46 holds the second lid 98, the door 40 moves to a lower position that does not overlap with the opening 32 as shown in Figure 5(b), thereby opening the opening of the second container 96 and simultaneously opening the opening 32. As a result, the load port device 10 connects the inside of the second container 96 to the space on the rear side of the load port device 10, allowing a robot arm or the like, positioned on the EFEM or the like on the rear side of the load port device 10, to access the object inside the second container 96.
[0043] As shown in Figure 5(a), the door 40 connects to the second lid 98 (see Figure 2(b)) of the second container 96, whose lid area is a second value S4, at a second position P2 where the center 48 of the door 40 is at a second height H2, which is lower than the first height H1 from the container mounting surface 22. That is, as shown in Figure 6(a), the pin of the second lid holding mechanism portion 46 that holds the second lid 98 is positioned at a height corresponding to the pin engagement hole 99 (see Figure 2(b)) formed in the second lid 98 of the second container 96 that is mounted on the mounting portion 20, when the door 40 is at the second position P2.
[0044] Figure 7 is a schematic perspective view showing the detailed structure of the lid retaining mechanism 42 located inside the door 40. As shown in Figure 7, the lid retaining mechanism 42 has two first lid retaining mechanism parts 44. The two first lid retaining mechanism parts 44 are located one in the upper part and one in the lower part of the door 40, sandwiching the latch mechanism 49, which is located at approximately the same height as the center 48 of the door 40, in the vertical direction.
[0045] Furthermore, the lid holding mechanism 42 has two second lid holding mechanism parts 46. Similar to the first lid holding mechanism part 44, the two second lid holding mechanism parts 46 are positioned one on the upper part and one on the lower part of the door 40, sandwiching the latch mechanism 49 in the vertical direction. As shown in Figure 7, the second lid holding mechanism parts 46 are positioned closer to the center 48 of the door 40 than the first lid holding mechanism part 44 in the height direction. Also, the second lid holding mechanism parts 46 are positioned further from the center 48 of the door 40 than the first lid holding mechanism part 44 in the horizontal direction.
[0046] Figure 8 is a conceptual diagram illustrating one of the internal structures and operations of the first lid holding mechanism portion 44 shown in Figure 7. As shown in Figure 8, the first lid holding mechanism portion 44 includes a pin 44a (first registration pin) that engages with the first lid 93 and a suction pad 44b (first suction pad) that adheres to the first lid 93. The first lid holding mechanism portion 44 also includes a suction mechanism 44c that creates negative pressure inside the suction pad 44b and a drive unit 44d that moves the pin 44a and the suction pad 44b forward and backward.
[0047] The pin 44a is made of a metal pin or the like that engages with the pin engagement hole 94 of the first lid 93 (see Figure 2(a)). The suction pad 44b is positioned to cover the pin 44a and adheres to the first lid 93 by contact. The suction pad 44b is made of resin or the like. The suction mechanism 44c consists of a negative pressure generating unit (not shown), such as a negative pressure pump, and a negative pressure passage that transmits the negative pressure generated by the negative pressure generating unit to the inside of the suction pad 44b. The suction mechanism 44c shown in Figure 8 has a negative pressure passage that transmits negative pressure through the inside of the pin 44a, but the suction mechanism 44c is not limited to this and may have a negative pressure passage that does not pass through the pin 44a.
[0048] The drive unit 44d, which moves the pin 44a and the suction pad 44b forward and backward from the door body 41, is composed of a pair of air cylinders. However, the drive unit 44d may be composed of something other than air cylinders, such as an electric motor. Figure 8(a) shows the state in which the drive unit 44d has moved the pin 44a and the suction pad 44b backward, and Figure 8(b) shows the state in which the drive unit 44d has moved the pin 44a and the suction pad 44b forward.
[0049] The first lid holding mechanism portion 44 normally drives the drive unit 44d so that the pin 44a and suction pad 44b are retracted (housed inside the door body portion 41) as shown in Figure 8(a). Then, when the door 40 moves to a position facing the first lid 93 in order to open and close and hold the first lid 93, the first lid holding mechanism portion 44 drives the drive unit 44d to advance the pin 44a and suction pad 44b (exposing them from inside the door body portion 41) (see Figure 8(b)). As a result, the pin 44a and suction pad 44b come into contact with the first lid 93, and the first lid holding mechanism portion 44 can hold the first lid 93. When the first lid holding mechanism portion 44 holds the first lid 93, the drive unit of the second lid holding mechanism portion 46 maintains the pin and suction pad of the second lid holding mechanism portion 46 in the retracted state shown in Figure 8(a).
[0050] In Figure 8, the first lid holding mechanism portion 44 was used as an example for explanation, but the second lid holding mechanism portion 46 shown in Figure 7 has a similar structure to the first lid holding mechanism portion 44. That is, the second lid holding mechanism portion 46 has a pin (second registration pin) that engages with the second lid 98 and a suction pad (second suction pad) that adheres to the second lid 98. The second lid holding mechanism portion 46 also has a suction mechanism that creates negative pressure inside the suction pad and a drive unit that moves the pin and suction pad forward and backward. The detailed structure of the pin, suction pad, suction mechanism and drive unit of the second lid holding mechanism portion 46 is the same as that of the first lid holding mechanism portion 44, so an explanation is omitted.
[0051] When the door 40 moves to a position facing the second lid 98 in order to open and close and hold the second lid 98, the second lid holding mechanism portion 46 drives the drive unit of the second lid holding mechanism portion 46 to advance the pin and suction pad (see Figure 8(b)). As a result, the pin and suction pad of the second lid holding mechanism portion 46 come into contact with the second lid 98, and the second lid holding mechanism portion 46 can hold the second lid 98. When the second lid holding mechanism portion 46 holds the second lid 98, the drive unit 44d of the first lid holding mechanism portion 44 maintains the pin 44a and suction pad 44b of the first lid holding mechanism portion 44 in the retracted state shown in Figure 8(a).
[0052] The latch mechanism 49 shown in Figure 8 engages with the first lid 93 and the second lid 98 to unlock and lock the opening and closing mechanisms of the first lid 93 and the second lid 98. The first lid holding mechanism portion 44 and the second lid holding mechanism portion 46 are used selectively depending on whether the target is the first container 91 or the second container 96, but the latch mechanism 49 is common regardless of whether the target is the first container 91 or the second container 96.
[0053] As shown in Figure 2, the shutter mechanism 50 is provided on the rear side of the frame 30 and operates to shield and open a portion 32a of the opening 32. As can be seen from comparing Figure 2(a) and Figure 2(b), the shutter mechanism 50 includes a movable shielding plate 52 and a shutter drive unit 54 that operates the movable shielding plate 52.
[0054] Figure 9 is a schematic perspective view showing an enlarged view of the surrounding area of the shutter mechanism 50. The shutter drive unit 54 is composed of an air cylinder or the like, and can move the movable shielding plate 52 up and down. However, the shutter drive unit 54 is not limited to an air cylinder, and may be composed of a mechanism within the air cylinder, such as an electric motor.
[0055] Figure 2(a) shows the state in which the movable shielding plate 52 is moved upward by the shutter drive unit 54. In the state shown in Figure 2(a), the movable shielding plate 52 is hidden behind the frame 30 and does not (or hardly) shield the opening 32. On the other hand, Figure 2(b) shows the state in which the movable shielding plate 52 is moved downward by the shutter drive unit 54. In the state shown in Figure 2(b), the movable shielding plate 52 is in a position that overlaps with the opening 32 when viewed from the horizontal direction and shields a part 32a of the opening 32.
[0056] The shutter mechanism 50 shields a portion 32a of the opening 32 when the area of the lids (first lid 93 and second lid 98) of the containers (first container 91 and second container 96) placed on the mounting section 20 is less than or equal to a predetermined ratio of the first opening area S1 of the opening 32 (see Figure 4(b)).
[0057] For example, as in the first container 91 shown in Figures 1(a) and 2(a), if the area of the first lid 93 (first value S3) exceeds a predetermined ratio to the first opening area S1, the shutter mechanism 50 does not shield the opening 32. On the other hand, as in the second container 96 shown in Figures 1(b) and 2(b), if the area of the second lid 98 (second value S4) is smaller than or equal to a predetermined ratio to the first opening area S1, the shutter mechanism 50 shields a portion 32a of the opening 32.
[0058] The predetermined ratio that determines whether the shutter mechanism 50 shields or not shields a portion 32a of the opening 32 is not particularly limited, but for example, the area of the lid (S3 or S4) relative to the first opening area S1 can be 50% or less. Also, if the area of the second lid 98 of the second container 96 (second value S4, see Figure 2(b)) is wider than that shown in the embodiment and closer to the area of the first lid 93, the predetermined ratio can be 65% or less or 80% or less.
[0059] Furthermore, as shown in Figure 5(b), a portion 32a of the opening 32 that the shutter mechanism 50 opens and closes is within the region 32b above the opening center 33 of the opening 32. With such a shutter mechanism 50, when open, it is easy to position the movable shielding plate 52 behind the frame 30, avoiding interference with other members, as shown in Figure 2(a).
[0060] Furthermore, the shutter mechanism 50 may operate the movable shielding plate 52 by considering, in addition to or instead of, the ratio of the first opening area S1 of the opening 32 to the areas (S3, S4) of the lids 93, 98, and the size of the gap G1 between the upper edges of the lids 93, 98 and the upper edge of the opening 32. That is, as shown in Figure 5(b), the shutter mechanism 50 can shield a part 32a of the opening 32 by moving the movable shielding plate 52 to fill at least a portion of the gap G1 when the gap G1 between the upper edge 98a of the second lid 98 of the second container 96 and the upper edge 34 of the opening 32 is greater than or equal to a predetermined length.
[0061] Furthermore, as shown in Figure 6(b), the second opening area S2, which is the opening area of the unshielded portion of the opening 32 when the shutter mechanism 50 shields a portion 32a of the opening 32, is narrower than either the first value S3 or the second value S4 (the first value S3 in the embodiment) and wider than either the other of the first value S3 or the second value S4 (the second value S4 in the embodiment). A load port device 10 in which the second opening area S2 is narrower than the first value S3 and wider than the second value S4 uses the shutter mechanism 50 to appropriately manage the gap formed between the opening 32 and the containers 91 and 93, while ensuring that the container lids 93 and 98 do not obstruct the passage of the opening 32, and shielding it with the shutter mechanism 50 if it is too wide. As a result, the load port device 10 can dock multiple types of containers 91 and 96 with different lid areas 93 and 98, while maintaining the cleanliness and pressure of the docked device.
[0062] As shown in Figures 1, 4, and 6, the detection unit 60 of the load port device 10 detects information regarding the area of the lids (first lid 93, second lid 98) of the containers (first container 91, second container 96) placed on the mounting unit 20 from the containers. For example, the detection unit 60 shown in Figures 1, 4, and 6 is composed of a sensor that detects the height of the container placed on the mounting unit 20, and detects whether the container placed on the mounting unit 20 is the first container 91 or the second container 96. Note that the detection unit 60 is not limited to detecting the height of the container, and may be composed of, for example, a sensing pad that reads information from the information holding parts of the first container 91 and the second container 96.
[0063] The shutter mechanism 50 of the load port device 10 operates in accordance with the detection results from the detection unit 60, allowing multiple types of containers 91 and 96 to be docked while appropriately managing the gap formed between the opening 32 and the containers 91 and 93. However, the load port device 10 does not necessarily have a detection unit 60, and it is also possible to operate the shutter mechanism 50 without using the detection results from the detection unit 60. For example, the load port device 10 may receive information from a host computer or the like regarding the area of the containers or lids placed on the mounting section 20, and use such information to operate the shutter mechanism 50.
[0064] The following describes an example of the operation of the load port device 10. When a container is placed on the loading section 20 by a container transport device such as an OHT, the load port device 10 uses a detection unit 60 to identify the container placed on the loading section 20. The load port device 10 performs different operations depending on whether it recognizes the container placed on the loading section 20 as the first container 91 (see Figure 1(a)) or as the second container 96 (see Figure 1(b)).
[0065] When the container placed on the mounting section 20 is the first container 91, the load port device 10 positions the door 40 so that its center 48 is at a first height H1, as shown in Figure 3(a), and prepares to connect the door 40 to the first lid 93. In this state, the position of the center 48 of the door 40 approximately coincides with the opening center 33 of the opening 32, and the door 40 closes the opening 32. In addition, the gap between the door 40 and the frame 30 is of an appropriate size, or the opening 32 is sealed by the door 40.
[0066] Furthermore, as shown in Figure 3(a), the shutter mechanism 50 determines that the area of the first lid 93 (first value S3) is not less than a predetermined ratio to the first opening area S1. Therefore, the shutter mechanism 50 positions the movable shielding plate 52 in an upper position that does not overlap with the opening 32, and the shutter mechanism 50 does not shield the opening 32. Next, with the door 40 positioned as shown in Figure 3(a), the mounting part 20 moves the first container 91 to the dock position, and the first lid holding mechanism part 44 shown in Figure 4(a) faces the pin engagement hole 94 of the lid 93 of the first container 91.
[0067] Furthermore, as shown in Figure 8(b), the pin 44a and suction pad 44b of the first lid holding mechanism portion 44 advance toward the first lid 93, the pin 44a engages with the pin engagement hole 94 of the first lid 93, and the suction pad 44b attracts the first lid 93, causing the door 40 to connect and hold the first lid 93. In addition, the latch mechanism 49 of the door 40 releases the lock of the first lid 93 from the main body portion of the first container 91.
[0068] Finally, as shown in Figure 3(b), the door 40 holding the first lid 93 moves to a lower position where it does not overlap with the opening 32 when viewed from the horizontal, thereby completely opening the first lid 93 of the first container 91. In the state shown in Figure 3(b), the door 40 does not close the opening 32, but most of the opening 32 is closed by the main body of the first container 91, and the gap between the opening 32 and the first container 91 is controlled to an appropriate size.
[0069] To close the first lid 93, perform the reverse operation of the opening operation described above.
[0070] On the other hand, if the container placed on the mounting section 20 is the second container 96, the load port device 10 positions the door 40 so that its center 48 is at the second height H2, as shown in Figure 5(a), and prepares for the door 40 to connect to the second lid 98. In this state, the position of the center 48 of the door 40 is shifted downward from the opening center 33 of the opening 32. Therefore, although the door 40 closes the opening 32, the distance between the top edge of the door 40 and the top edge 34 of the frame 30 is greater than in the state shown in Figure 3(a).
[0071] In the state shown in Figure 5(a), the shutter mechanism 50 determines that the area of the second cover 98 (second value S4) is less than or equal to a predetermined ratio to the first opening area S1. Therefore, the shutter mechanism 50 lowers the movable shielding plate 52 to a position where it overlaps with the opening 32, and the shutter mechanism 50 ends up shielding a portion 32a of the opening 32. As a result, the gap between the top edge of the door 40 and the top edge 34 of the frame 30 is filled by the movable shielding plate 52 of the shutter mechanism 50, and the gap between the door 40 and the frame 30 is of an appropriate size. The movable shielding plate 52 of the shutter mechanism 50 has been lowered to a position where a portion of it overlaps with the door 40, whose center 48 is at the second height H2, when viewed from the horizontal direction (the lower end of the movable shielding plate 52 is below the top edge of the door 40) (see Figure 6).
[0072] Next, with the door 40 positioned as shown in Figure 5(a), the mounting section 20 moves the second container 96 to the dock position, and the second lid holding mechanism section 46 shown in Figure 6(a) faces the pin engagement hole, etc., of the lid 98 of the second container 96. Furthermore, the pin and suction pad of the second lid holding mechanism section 46 advance toward the second lid 98, the pin engages with the pin engagement hole of the second lid 98, and the suction pad attracts the second lid 98, causing the door 40 to connect and hold the second lid 98. In addition, the latch mechanism 49 of the door 40 releases the lock of the second lid 98 from the main body of the second container 96.
[0073] Finally, as shown in Figure 5(b), the door 40 holding the second lid 98 moves to a lower position where it does not overlap with the opening 32 when viewed from the horizontal, thereby completely opening the second lid 98 of the second container 96. In the state shown in Figure 5(b), the door 40 does not close the opening 32, and the second container 96 is smaller than the first container 91, so the main body of the second container 96 cannot close a wide area of the opening 32. However, as shown in Figure 5(b), the movable shielding plate 52 of the shutter mechanism 50 has descended to a position where it overlaps with the opening 32, so the shutter mechanism 50 closes a part 32a of the opening 32. As a result, in the load port device 10, even when the second container 96 is docked, the gap between the opening 32 and the second container 96 (the width of the gas passage) is controlled to an appropriate size, just as when the first container 91 is docked.
[0074] To close the second lid 98, perform the reverse of the opening operation described above.
[0075] As described above, the load port device 10 operates the shutter mechanism 50 according to the area of the lids 93 and 98 of the containers 91 and 96 placed on the mounting section 20, and the shutter mechanism 50 appropriately shields the gap formed between the frame 30 and the containers 91 and 96 if it is too wide. As a result, the load port device 10 can dock multiple types of containers 91 and 96 with different lid areas 93 and 98 while maintaining the cleanliness and pressure of the docking target equipment such as EFEM.
[0076] Furthermore, the load port device 10 has a lid holding mechanism 42 in the door 40 that has multiple lid holding mechanism parts (in this embodiment, two parts: a first lid holding mechanism part 44 and a second lid holding mechanism part 46), and each of the lid holding mechanism parts 44 and 46 is used according to the area of the lids 93 and 98 of the containers 91 and 96 placed on the loading section 20. As a result, the load port device 10 can appropriately dock multiple types of containers 91 and 96 with different areas and shapes of lids 93 and 98.
[0077] Furthermore, the door 40 of the load port device 10 appropriately accommodates the difference in height between containers 91 and 96 by having a different height at which it connects to the first lid 93 of the first container 91 and the second lid 98 of the second container 96. In conjunction with this, when the shutter mechanism 50 operates, the movable shielding plate 52 shields the gap that widens between the frame 30 and the door 40 as the position of the door 40 changes, thereby appropriately controlling the width of the gap that is not shielded in the opening 30. In addition, in the first and second lid holding mechanism parts 44 and 46 that constitute the lid holding mechanism 42, the drive unit 44d (see Figure 8) enables the selective forward and backward movement of the pin 44a and the suction pad 44b, so that the lid holding mechanism 42 can connect and hold the lids 93 and 98 while avoiding collision with the movable shielding plate 52.
[0078] The load port device 10 according to this disclosure has been described above with reference to embodiments, but it goes without saying that the load port device 10 according to this disclosure includes many other embodiments and examples. For example, in the load port device 10, the shutter mechanism 50 shields the upper portion 32b of the opening 32, but the shutter mechanism 50 may also shield the left portion and / or right portion of the opening 32. Alternatively, the shutter mechanism 50 may also shield the lower portion of the opening 32. [Explanation of Symbols]
[0079] 10…Load port device 12...Lower support part 20… Mounting section 22…Container placement surface 30...frames 32…Opening S1... First opening area S2…Second opening area 33…Aperture center 32a...some 32b... Upper part of the region G1... Gap 34…Top 40...door 42…Lid holding mechanism 44...First lid holding mechanism part 44a...Pin (First registration pin) 44b... Adhesive pad (first adhesive pad) 44c... Suction mechanism (first suction mechanism) 44d... Drive unit (first drive unit) 46…Second lid holding mechanism part 48…center P1…1st position H1...First height P2…Second position H2...Second height 49...Latch mechanism 50... Shutter mechanism 52...Movable shielding plate 54... Shutter drive unit 60...Detection unit 70... Door drive unit 76…Mapping Arm 91... First container 93...First lid 94, 99… Pin engagement holes 96... Second container 98...Second Lid S3...First value S4...Second value
Claims
1. A mounting section having a container mounting surface on which a container with a lid on its side is placed, An opening having a first opening area is formed, and a frame is erected with respect to the container mounting surface, The aforementioned lid and the door that opens and closes the aforementioned opening, It has a shutter mechanism that operates to shield and open a part of the aforementioned opening, The shutter mechanism is a load port device that shields a portion of the opening when the area of the lid of the container placed on the aforementioned mounting section is less than or equal to a predetermined ratio to the first opening area.
2. The load port device according to claim 1, wherein the door comprises a first registration pin and a first suction pad for holding the lid when the area of the lid is a first value, and a second registration pin and a second suction pad for holding the lid when the area of the lid is a second value.
3. The system includes a detection unit that detects information from the container relating to the area of the lid of the container placed on the mounting unit, The load port device according to claim 1, wherein the shutter mechanism operates according to the detection result of the detection unit.
4. The portion of the opening that the shutter mechanism opens and closes is within the region above the center of the opening. The load port device according to claim 1, wherein the shutter mechanism shields a portion of the opening to fill at least a portion of the gap when the gap between the upper edge of the lid of the container placed on the aforementioned mounting section and the upper edge of the opening is greater than or equal to a predetermined length.
5. The aforementioned door is The center of the door is at a first position where it is at a first height from the container mounting surface, and the lid of the container has an area of the first value, The load port device according to claim 2, wherein the center of the door is connected to the lid of the container, the lid area of the container is the second value, at a second position where the center of the door is at a second height from the container mounting surface.
6. The load port device according to claim 2, wherein the second opening area, which is the opening area of the unshielded portion of the opening when the shutter mechanism shields a part of the opening, is narrower than either the first value or the second value, and wider than either the first value or the second value.