Inspection device, inspection method, and battery manufacturing method

Abstract

The present invention provides an inspection device, an inspection method, and a battery manufacturing method that enable high-precision inspection. [Solution] According to the embodiment, the inspection device includes an acquisition unit that acquires data obtained from an object to be inspected, and a processing unit that processes the data. The data includes first magnetic field data relating to a first plane and second magnetic field data relating to a second plane. The first plane includes a first region and a first other region. The direction from the first region to the first other region is along a first direction. The first magnetic field data includes first region data relating to the first region and first other region data relating to the first other region. The processing unit inspects the object to be inspected based on the derived data. The derived data includes first other region inverted data obtained by inverting the first other magnetic field value included in the first other region data in a first direction, first inspection data including the first difference between the first region data and the second inspection data based on the second magnetic field data.

Description

Technical Field

[0001] Embodiments of the present invention relate to an inspection apparatus, an inspection method, and a method for manufacturing a battery.

Background Art

[0002] For example, an inspection target such as a battery is inspected by detecting a magnetic field generated from the inspection target. Higher-precision inspection is desired.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Embodiments provide an inspection apparatus, an inspection method, and a method for manufacturing a battery that enable high-precision inspection.

Means for Solving the Problems

[0005] According to one embodiment, the inspection apparatus includes an acquisition unit configured to acquire data obtained from an object to be inspected, and a processing unit configured to perform a first operation to process the data acquired by the acquisition unit. The data includes first magnetic field data relating to a first plane and second magnetic field data relating to a second plane. The first plane is along a first direction and a second direction intersecting the first direction. The second plane is along the second and third directions. The third direction intersects a plane including the first and second directions. The first plane includes a first region and a first other region. The direction from the first region to the first other region is along the first direction. The first magnetic field data includes first region data relating to the first region and first other region data relating to the first other region. In the first operation, the processing unit is configured to inspect the object to be inspected based on the derived data. The derived data includes first inverted data of another region obtained by inverting the first other magnetic field value included in the first other region data in a first direction, first inspection data including a first difference between the first region data and the first region data, and second inspection data based on the second magnetic field data. [Brief explanation of the drawing]

[0006] [Figure 1] Figures 1(a) and 1(b) are schematic diagrams illustrating an inspection apparatus according to the first embodiment. [Figure 2] Figure 2 is a flowchart illustrating the operation of the inspection apparatus according to the first embodiment. [Figure 3] Figure 3 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. [Figure 4] Figure 4 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. [Figure 5] Figure 5 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. [Figure 6] Figure 6 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. [Figure 7] Figure 7 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. [Figure 8]Figure 8 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. [Figure 9] Figure 9 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. [Figure 10] Figure 10 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. [Figure 11] Figure 11 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. [Figure 12] Figure 12 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. [Figure 13] Figure 13 is a flowchart illustrating a method for manufacturing a battery according to the third embodiment. [Modes for carrying out the invention]

[0007] The embodiments of the present invention will be described below with reference to the drawings. Drawings are schematic or conceptual, and the relationships between the thickness and width of each part, as well as the ratios of the sizes of different parts, are not necessarily identical to those of reality. Even when representing the same part, the dimensions and ratios may be depicted differently in different drawings. In this specification and in each figure, elements similar to those described above are denoted by the same reference numerals with respect to previously shown figures, and detailed explanations are omitted as appropriate.

[0008] (First Embodiment) Figures 1(a) and 1(b) are schematic diagrams illustrating an inspection apparatus according to the first embodiment. Figure 2 is a flowchart illustrating the operation of the inspection apparatus according to the first embodiment. Figure 3 is a schematic diagram illustrating an inspection apparatus according to the first embodiment.

[0009] As shown in Figure 1, the inspection apparatus 110 according to this embodiment includes an acquisition unit 71 and a processing unit 70. The acquisition unit 71 is configured to acquire data 10A obtained from the object to be inspected 80. The processing unit 70 is configured to perform a first operation to process the data 10A acquired by the acquisition unit 71. The acquisition unit 71 is, for example, an interface. The processing unit 70 may be, for example, a processor circuit (for example, an electrical circuit). In the first operation, the processing unit 70 is configured to inspect the object to be inspected 80 based on the derived data Dr1.

[0010] Figure 2 illustrates an inspection method performed by the inspection device 110. As shown in Figure 2, for example, the acquisition unit 71 acquires data 10A (step S111). For example, the processing unit 70 processes the data 10A (step S112). For example, the processing unit 70 outputs the processing result (step S113). The processing result includes the inspection result.

[0011] In one example, the object under inspection 80 may be a battery 80C. The battery 80C may include, for example, a first electrode 81, a second electrode 82, and a battery section 83. The battery section 83 is provided, for example, between the first electrode 81 and the second electrode 82.

[0012] In one example, during the inspection of battery 80C, a voltage is applied between the first electrode 81 and the second electrode 82. The application of voltage causes a current to flow between the first electrode 81 and the second electrode 82. The current generates a magnetic field. The generated magnetic field is detected by a magnetic field sensor 85. The magnetic field sensor 85 may include a sensor element 86 and a control unit 87. The relative position between the sensor element 86 and the object to be inspected 80 is changed.

[0013] In this example, the sensor element 86 includes a first sensor element 86a, a second sensor element 86b, a third sensor element 86c, and the like. The first sensor element 86a detects a magnetic field along, for example, one surface. The second sensor element 86b detects a magnetic field along, for example, another surface. The third sensor element 86c detects a magnetic field along, for example, yet another surface. Each of the first sensor element 86a, the second sensor element 86b, and the third sensor element 86c may be scanned. Alternatively, each of the first sensor element 86a, the second sensor element 86b, and the third sensor element 86c may include a plurality of elements.

[0014] The control unit 87 may be configured to control, for example, a change in the relative position between the sensor element 86 and the inspection target 80. The control unit 87 may be configured to control, for example, the orientation of the sensor element 86. The sensor element 86 may be configured to detect a magnetic field in any direction. The control unit 87 may be configured to process, for example, a signal obtained from the sensor element 86. The signal processing may include, for example, amplification. The signal processing may include any processing including, for example, A / D conversion and the like. The above magnetic field data (such as the first magnetic field data 11D and the second magnetic field data 12D) is supplied from the control unit 87 to the acquisition unit 71, for example.

[0015] For the communication (data transfer) between the magnetic field sensor 85 and the acquisition unit 71, any method of wired or wireless may be applied. The magnetic field data may be stored in, for example, the storage unit 70M or the like.

[0016] The magnetic field sensor 85 is configured to acquire the first magnetic field data 11D and the second magnetic field data 12D from the inspection target 80. The magnetic field sensor 85 may be further configured to acquire the third magnetic field data 13D and the fourth magnetic field data 14D from the inspection target 80. The magnetic field sensor 85 may be further configured to acquire the fifth magnetic field data 15D from the inspection target 80. These magnetic field data may be two-dimensional data.

[0017] Data 10A includes first magnetic field data 11D relating to the first plane PL1 and second magnetic field data 12D relating to the second plane PL2. Data 10A may further include third magnetic field data 13D relating to the third plane PL3. Data 10A may further include fourth magnetic field data 14D relating to the fourth plane PL4. Data 10A may further include fifth magnetic field data 15D relating to the fifth plane PL5.

[0018] As shown in Figure 1(b), the first plane PL1 lies along the first direction D1 and the second direction D2 which intersects the first direction D1. The second plane PL2 lies along the second direction D2 and the third direction D3. The third direction D3 intersects the plane containing the first direction D1 and the second direction D2.

[0019] Let the first direction D1 be the X-axis direction. Let one direction perpendicular to the X-axis direction be the Y-axis direction. Let the direction perpendicular to both the X-axis and Y-axis directions be the Z-axis direction. The second direction D2 can be, for example, the Y-axis direction. The third direction D3 can be, for example, the Z-axis direction.

[0020] As already explained, the processing unit 70 is configured to inspect the object to be inspected 80 in the first operation based on the derived data Dr1 (see Figure 1(a)). The derived data Dr1 includes the first inspection data DD1 and the second inspection data DD2. The first inspection data DD1 is derived from the first magnetic field data 11D. The second inspection data DD2 is based on the second magnetic field data 12D.

[0021] Figure 3 schematically illustrates the region relating to the two-dimensional first magnetic field data 11D. As shown in Figures 1(b) and 3, the first plane PL1 includes the first region p1 and the first other region q1. The direction from the first region p1 to the first other region q1 is along the first direction D1. The first magnetic field data 11D includes the first region data Dp1 relating to the first region p1 and the first other region data Dq1 relating to the first other region q1.

[0022] The first inspection data DD1 includes the first difference between the first inverted data of the first other region, which is obtained by inverting the first other magnetic field value included in the first other region data Dq1 in the first direction D1, and the first region data Dp1.

[0023] By using the first inspection data DD1, which includes the first difference between the first inverted data of the other region and the first region data Dp1, the location of abnormal parts of the inspection target 80 can be estimated with high accuracy. Furthermore, by using the second inspection data DD2, which is based on the second magnetic field data 12D relating to a different plane, the location of abnormal parts of the inspection target 80 can be detected with high accuracy.

[0024] For example, in the normal and abnormal parts of the object under inspection 80, the difference in the detected magnetic field may be small, making it difficult to distinguish between signals originating from the abnormal part and noise. In such cases, it is difficult to detect the abnormal part based on the magnitude of the detected magnetic field. Furthermore, if electrodes or the like are provided on the object under inspection 80 and the current path has a unique shape, it may be difficult to distinguish between the abnormal part and the unique shape of the current path.

[0025] In this embodiment, the difference between the inverted magnetic field data obtained by inverting the magnetic field data of the first other region q1 and the magnetic field data of the first region p1 is calculated. This suppresses the influence of noise. It also suppresses the influence of the unique shape of the current path. As a result, the location of the abnormal portion in the first plane PL1 is detected with high sensitivity. When only the first inspection data DD1 relating to the first plane PL1 is used, it is difficult to distinguish whether the abnormal portion is located in the first region p1 or in the first other region q1. In this embodiment, in addition to the first inspection data DD1, the second inspection data DD2 is used. As a result, for example, the location of the abnormal portion can be accurately detected. According to this embodiment, an inspection device capable of high-precision inspection can be provided.

[0026] The following explains an example of data inversion. Figures 4 to 6 are schematic diagrams illustrating an inspection apparatus according to the first embodiment. Figure 4 schematically illustrates the two-dimensional first magnetic field data 11D. As already explained, the two-dimensional first magnetic field data 11D pertains to the first plane PL1, which includes the first direction D1 and the second direction D2. In Figure 4, the magnetic field strength in the first direction D1 and the second direction D2 is shown by the grayscale of the image.

[0027] Figure 5 shows the positional relationship between the two-dimensional first magnetic field data 11D and the battery 80C in this example. As shown in Figure 5, the first magnetic field data 11D may include information about the magnetic field over a wider area than the battery 80C.

[0028] As shown in Figures 4 and 5, the first magnetic field data 11D obtained from the object under inspection 80 may include magnetic fields originating from terminals that supply voltage (signals) to the first electrode 81 and the second electrode 82. In this example, the two-dimensional first magnetic field data 11D includes a first terminal magnetic field 81H originating from a first terminal 81T electrically connected to the first electrode 81, and a second terminal magnetic field 82H originating from a second terminal 82T electrically connected to the second electrode 82.

[0029] As shown in Figure 4, the first plane PL1 includes a first region p1 and a first other region q1. The direction from the first region p1 to the first other region q1 is along the first direction D1. The first magnetic field data 11D includes first region data Dp1 relating to the first region p1 and first other region data Dq1 relating to the first other region q1.

[0030] As shown in Figure 4, the first plane PL1 includes a first position a1, a first opposing position b1, and a first other position c1. For example, the first other position c1 may be the first midpoint between the first position a1 and the first opposing position b1 in the first direction D1. The first region p1 lies between the first position a1 and the first other position c1 in the first direction D1. The first other region q1 lies between the first other position c1 and the first opposing position b1 in the first direction D1.

[0031] Figure 6 illustrates the first other-domain inverted data Dqx1, which is obtained by inverting the first other-domain magnetic field value contained in the first other-domain data Dq1 in the first direction D1. In the first other-domain inverted data Dqx1, the first other-domain data Dq1 exemplified in Figure 4 is inverted with respect to the first direction D1. The difference data between this first other-domain inverted data Dqx1 (Figure 6) and the first domain data Dp1 (see Figure 4) is calculated. For example, if the difference data exceeds a threshold, it is determined that there is a defect.

[0032] In this embodiment, the second inspection data DD2 may include inverted data obtained by inverting some of the data contained in the second magnetic field data 12D.

[0033] Figure 7 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. Figure 7 illustrates the region relating to the second magnetic field data 12D with respect to the second plane PL2. The second plane PL2 includes the second region p2 and the second other region q2. The direction from the second region p2 to the second other region q2 follows the first intersecting direction Dx1 which intersects the first direction D1 (see Figure 1(b)). The first intersecting direction Dx1 may be, for example, a direction along the Z-axis.

[0034] The second magnetic field data 12D includes the second region data Dp2 relating to the second region p2 and the second other region data Dq2 relating to the second other region q2. The second inspection data DD2 includes the second difference between the second other region inverted data, obtained by inverting the second other magnetic field value contained in the second other region data Dq2 in the first crossing direction Dx1, and the second region data Dp2. The location of the anomaly can be detected with high sensitivity from the second magnetic field data 12D relating to the second plane PL2. The location of the anomaly can be detected with high accuracy.

[0035] As shown in Figure 7, the second plane PL2 may include the second position a2, the second opposing position b2, and the second other position c2. The second other position c2 may be the second midpoint between the second position a2 and the second opposing position b2 in the first intersecting direction Dx1. The second region p2 lies between the second position a2 and the second other position c2 in the first intersecting direction Dx1. The second other region q2 lies between the second other position c2 and the second opposing position b2 in the first intersecting direction Dx1.

[0036] As already explained, data 10A may further include third magnetic field data 13D relating to the third plane PL3 (see Figure 1(b)). Figure 8 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. Figure 8 illustrates the region relating to the third magnetic field data 13D with respect to the third plane PL3. The third plane PL3 aligns with the first direction D1 and the second direction D2. The object under inspection 80 is located between the first plane PL1 and the third plane PL3 (see Figure 1(b)).

[0037] As shown in Figure 8, the third plane PL3 includes the third region p3 and the third other region q3. The direction from the third region p3 to the third other region q3 is along the first direction D1. The third magnetic field data 13D includes the third region data Dp3 relating to the third region p3 and the third other region data Dq3 relating to the third other region q3.

[0038] The derived data Dr1 (see Figure 1(a)) further includes the third inspection data DD3. The third inspection data DD3 includes the third difference between the third other-domain inverted data, which is obtained by inverting the third other-domain magnetic field value contained in the third other-domain data Dq3 in the first direction D1, and the third domain data Dp3. By using such third inspection data DD3, higher accuracy inspection is possible.

[0039] As shown in Figure 8, the third plane PL3 may include the third position a3, the third opposing position b3, and the third other position c3. The third other position c3 may be the third midpoint between the third position a3 and the third opposing position b3 in the first direction D1. The third region p3 lies between the third position a3 and the third other position c3 in the first direction D1. The third other region q3 lies between the third other position c3 and the third opposing position b3 in the first direction D1.

[0040] As already explained, data 10A may further include fourth magnetic field data 14D relating to the fourth plane PL4 (see Figure 1(b)). Figure 9 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. Figure 9 illustrates the region relating to the fourth magnetic field data 14D for the fourth plane PL4. The fourth plane PL4 aligns with the second direction D2 and the third direction D3. The object under inspection 80 is located between the fourth plane PL4 and the second plane PL2 (see Figure 1(b)).

[0041] As shown in Figure 9, the fourth plane PL4 includes the fourth region p4 and the fourth other region q4. The direction from the fourth region p4 to the fourth other region q4 is along the first intersecting direction Dx1. The fourth magnetic field data 14D includes the fourth region data Dp4 relating to the fourth region p4 and the fourth other region data Dq4 relating to the fourth other region q4. The derived data Dr1 may include the fourth check data DD4.

[0042] The fourth inspection data DD4 (see Figure 1(a)) includes the fourth difference between the fourth other-domain inverted data, obtained by inverting the fourth other-domain magnetic field value contained in the fourth other-domain data Dq4 in the first crossing direction Dx1, and the fourth domain data Dp4. By using such fourth inspection data DD4, higher accuracy inspection is possible.

[0043] As shown in Figure 9, the fourth plane PL4 includes the fourth position a4, the fourth opposing position b4, and the fourth other position c4. The fourth other position c4 may be the fourth midpoint between the fourth position a4 and the fourth opposing position b4 in the first intersecting direction Dx1. The fourth region p4 lies between the fourth position a4 and the fourth other position c4 in the first intersecting direction Dx1. The fourth other region q4 lies between the fourth other position c4 and the fourth opposing position b4 in the first intersecting direction Dx1.

[0044] In this embodiment, data 10A may include first magnetic field data 11D relating to the first plane PL1 and third magnetic field data 13D relating to the third plane PL3. In this case, data 10A does not need to include second magnetic field data 12D relating to the second plane PL2.

[0045] In the embodiment, the first magnetic field data 11D may include data relating to the component in the second direction D2. The second magnetic field data 12D may include data relating to the component in the second direction D2.

[0046] As already explained, data 10A may further include fifth magnetic field data 15D relating to the fifth plane PL5 (see Figure 1(b)). Figure 10 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. Figure 10 illustrates the region relating to the fifth magnetic field data 15D with respect to the fifth plane PL5. The fifth plane PL5 aligns with the first direction D1 and the third direction D3. The direction from the object under inspection 80 to the fifth plane PL5 aligns with the second direction D2. The battery section 83 is located between the first electrode 81 and the fifth plane PL5, and between the second electrode 82 and the fifth plane PL5 (see Figure 1(b)).

[0047] As shown in Figure 10, the fifth plane PL5 includes the fifth region p5 and the fifth other region q5. The direction from the fifth region p5 to the fifth other region q5 is along the first direction D1. The fifth magnetic field data 15D includes the fifth region data Dp5 relating to the fifth region p5 and the fifth other region data Dq5 relating to the fifth other region q5. The derived data Dr1 may include the fifth check data DD5.

[0048] The fifth inspection data DD5 (see Figure 1(a)) includes the fifth difference between the fifth other-domain inverted data, which is obtained by inverting the fifth other-domain magnetic field value included in the fifth other-domain data Dq5 in the first direction D1, and the fifth domain data Dp5. By using such fifth inspection data DD5, higher accuracy inspection is possible.

[0049] As shown in Figure 10, the fifth plane PL5 includes the fifth position a5, the fifth opposing position b5, and the fifth other position c5. The fifth other position c5 may be the fifth midpoint between the fifth position a5 and the fifth opposing position b5 in the first direction D1. The fifth region p5 lies between the fifth position a5 and the fifth other position c5 in the first direction D1. The fifth other region q5 lies between the fifth other position c5 and the fifth opposing position b5 in the first direction D1.

[0050] The following describes an example of the processing in the embodiment. Figures 11 and 12 are schematic diagrams illustrating an inspection apparatus according to the first embodiment. Figure 11 illustrates the first magnetic field data 11D, the second magnetic field data 12D, the fourth magnetic field data 14D, and the fifth magnetic field data 15D. The first magnetic field data 11D relates to the first plane PL1. The second magnetic field data 12D relates to the second plane PL2. The fourth magnetic field data 14D relates to the fourth plane PL4. The fifth magnetic field data 15D relates to the fifth plane PL5. In Figure 11, the magnetic field strength is shown by the grayscale of the image. Figure 11 corresponds to the data before the inversion process.

[0051] Figure 12 illustrates the first inspection data DD1, the second inspection data DD2, the fourth inspection data DD4, and the fifth inspection data DD5. These inspection data include the difference between the inverted data of other regions and the data of the first region in the first plane PL1, the second plane PL2, the fourth plane PL4, and the fifth plane PL5. In Figure 12, the magnetic field strength is shown by the grayscale of the image. As shown in Figure 12, a location DPx1 is observed where the image density changes locally and significantly. This location DPx1 corresponds, for example, to the location of a defect.

[0052] (Second Embodiment) The second embodiment relates to an inspection method. In the inspection method, data 10A obtained from the object to be inspected 80 is acquired (step S111 in Figure 2). The data 10A is processed (step S112 in Figure 2).

[0053] Data 10A includes first magnetic field data 11D relating to the first plane PL1 and second magnetic field data 12D relating to the second plane PL2. The first plane PL1 lies along a first direction D1 and a second direction D2 intersecting the first direction D1.

[0054] The second plane PL2 aligns with the second direction D2 and the third direction D3. The third direction D3 intersects with the plane containing the first direction D1 and the second direction D2. Alternatively, the second plane PL2 aligns with the first direction D1 and the second direction D2. If the second plane PL2 aligns with the first direction D1 and the second direction D2, then the second plane PL2 may be considered as the third plane PL3 described above.

[0055] As explained with respect to Figure 3, the first plane PL1 includes the first region p1 and the first other region q1. The direction from the first region p1 to the first other region q1 is along the first direction D1. The first magnetic field data 11D includes the first region data Dp1 relating to the first region p1 and the first other region data Dq1 relating to the first other region q1.

[0056] In the inspection method according to the embodiment, the object to be inspected 80 is inspected based on derived data Dr1. Derived data Dr1 includes first inspection data DD1 and second inspection data DD2. First inspection data DD1 includes the first difference between first other-domain inverted data Dqx1, which is obtained by inverting the first other-domain magnetic field value included in first other-domain data Dq1 in the first direction D1, and first domain data Dp1. Second inspection data DD2 is based on second magnetic field data 12D. According to the embodiment, an inspection method capable of high-precision inspection can be provided.

[0057] If the second plane PL2 aligns with the second direction D2 and the third direction D3, the data inversion described with respect to Figure 7 may be applied. For example, the second plane PL2 includes the second region p2 and the second other region q2. The direction from the second region p2 to the second other region q2 aligns with the first intersecting direction Dx1, which intersects with the first direction D1. The second magnetic field data 12D includes the second region data Dp2 relating to the second region p2 and the second other region data Dq2 relating to the second other region q2. The second check data DD2 includes the second difference between the second other region inverted data, obtained by inverting the second other magnetic field value contained in the second other region data Dq2 in the first intersecting direction Dx1, and the second region data Dp2.

[0058] In the second embodiment, the second plane PL2 may include a second position a2, a second opposing position b2, and a second other position c2. The second other position c2 may be the second midpoint between the second position a2 and the second opposing position b2 in the first intersecting direction Dx1. The second region p2 lies between the second position a2 and the second other position c2 in the first intersecting direction Dx1. The second other region q2 lies between the second other position c2 and the second opposing position b2 in the first intersecting direction Dx1.

[0059] In another example, if the second plane PL2 aligns with the first direction D1 and the second direction D2, the object to be inspected 80 may be located between the second plane PL2 and the first plane PL1.

[0060] In the second embodiment, for example, the first magnetic field data 11D may be with respect to the component in the second direction D2. The object under inspection 80 may be a battery 80C. The battery 80C includes a first electrode 81, a second electrode 82, and a battery section 83 between the first electrode 81 and the second electrode 82. The direction from the first electrode 81 to the second electrode 82 is along the first direction D1. For example, the first magnetic field data 11D may include the distribution of the magnetic field generated from the battery 80C when an AC voltage (AC signal) is applied between the first electrode 81 and the second electrode 82.

[0061] (Third embodiment) Figure 13 is a flowchart illustrating a method for manufacturing a battery according to the third embodiment. As shown in Figure 13, a battery 80C to be inspected is manufactured (step S100). The battery 80C is inspected according to the inspection method of the second embodiment (step S110). In the inspection, the processes described with respect to the first and second embodiments may be performed. High-precision inspection can be performed.

[0062] For example, the battery 80C may include a first electrode 81, a second electrode 82, and a battery section 83 between the first electrode 81 and the second electrode 82. The direction from the first electrode 81 to the second electrode 82 is along the first direction D1 of the first magnetic field data 11D. For example, the first magnetic field data 11D includes the distribution of the magnetic field generated from the battery 80C when an AC voltage is applied between the first electrode 81 and the second electrode 82.

[0063] As shown in Figure 13, repairs may be performed based on the inspection results (step S120). The repaired inspection target 80 (battery 80C) may be inspected again.

[0064] As shown in Figure 13, the conditions may be changed based on the inspection results (step S130). For example, the conditions include the formation conditions of the battery 80C. For example, changing the conditions may include changing the material of the battery 80C. For example, changing the conditions may include changing the design of the battery 80C. The inspection apparatus 110 and inspection method according to the embodiment may be used for defect analysis of the inspection target 80.

[0065] The embodiments may include the following technical proposals. (Technical proposal 1) An acquisition unit configured to acquire data obtained from the object being inspected, A processing unit configured to perform a first operation to process the data acquired by the acquisition unit, Equipped with, The aforementioned data is First magnetic field data relating to the first plane, Second magnetic field data relating to the second plane, Includes, The first plane is along a first direction and a second direction intersecting the first direction, The second plane is along the second and third directions, The third direction intersects the plane including the first and second directions, The first plane includes the first region and the first other region, The direction from the first region to the first other region is along the first direction, The first magnetic field data includes first region data relating to the first region and first other region data relating to the first other region. The processing unit is configured to inspect the object to be inspected based on the derived data in the first operation. The derived data is, A first inspection data including a first difference between the first other region data and the first other region data, obtained by inverting the first other magnetic field value included in the first other region data in the first direction, The second inspection data based on the second magnetic field data, Inspection equipment, including...

[0066] (Technical proposal 2) The first plane includes a first position, a first opposing position, and a first other position. The aforementioned first other position is the first midpoint between the first position and the first opposing position in the first direction. The first region is located between the first position and the first other position in the first direction. The inspection apparatus according to Technical Proposal 1, wherein the first other region is located between the first other position and the first opposing position in the first direction.

[0067] (Technical proposal 3) The second plane includes the second region and the second other region, The direction from the second region to the second other region follows the first intersecting direction that intersects with the first direction. The second magnetic field data includes second region data relating to the second region and second other region data relating to the second other region, The inspection apparatus according to Technical Proposal 1 or 2, wherein the second inspection data includes a second difference between the second other region inverted data, which is obtained by inverting the second other magnetic field value included in the second other region data in the first crossing direction, and the second region data.

[0068] (Technical proposal 4) The second plane includes a second position, a second opposing position, and a second other position. The aforementioned second other position is the second midpoint between the second position and the second opposing position in the first intersecting direction. The second region is located between the second position and the second other position in the first intersecting direction. The inspection apparatus according to Technical Proposal 3, wherein the second other region is located between the second other position and the second opposing position in the first intersecting direction.

[0069] (Technical proposal 5) The aforementioned data further includes third magnetic field data relating to the third plane, The third plane is aligned with the first and second directions, The object to be inspected is located between the first plane and the third plane. The third plane includes the third region and the third other region, The direction from the third region to the third other region is along the first direction, The third magnetic field data includes third region data relating to the third region and third other region data relating to the third other region, The inspection apparatus according to Technical Proposal 3 or 4, wherein the derived data further includes a third inspection data which includes a third difference between the third other region inverted data obtained by inverting the third other magnetic field value included in the third other region data in the first direction and the third region data.

[0070] (Technical proposal 6) The third plane includes a third position, a third opposing position, and a third other position. The aforementioned third other position is the third midpoint between the third position and the third opposing position in the first direction. The third region is located between the third position and the third other position in the first direction. The inspection apparatus according to Technical Proposal 5, wherein the third other region is located between the third other position and the third opposing position in the first direction.

[0071] (Technical proposal 7) The aforementioned data further includes fourth magnetic field data relating to the fourth plane, The fourth plane is aligned with the second and third directions, The object to be inspected is located between the fourth plane and the second plane. The fourth plane includes the fourth region and the fourth other region, The direction from the fourth region to the fourth other region is along the first intersecting direction, The fourth magnetic field data includes fourth region data relating to the fourth region and fourth other region data relating to the fourth other region, The inspection apparatus according to proposal 5 or 6, wherein the derived data further includes fourth inspection data which includes a fourth difference between the fourth other region data and fourth other region inverted data obtained by inverting the fourth other magnetic field value included in the fourth other region data in the first crossing direction.

[0072] (Technical proposal 8) The fourth plane includes the fourth position, the fourth opposing position, and the fourth other position. The fourth other position is the fourth midpoint between the fourth position and the fourth opposing position in the first intersecting direction. The fourth region is located between the fourth position and the fourth other position in the first intersecting direction. The inspection apparatus according to Technical Proposal 7, wherein the fourth other region is located between the fourth other position and the fourth opposing position in the first intersecting direction.

[0073] (Technical proposal 9) An acquisition unit configured to acquire data obtained from the object being inspected, A processing unit configured to perform a first operation to process the data acquired by the acquisition unit, Equipped with, The aforementioned data is First magnetic field data relating to the first plane, Third magnetic field data relating to the third plane, Includes, The first plane is along a first direction and a second direction intersecting the first direction, The third plane is aligned with the first and second directions, The object to be inspected is located between the first plane and the third plane. The first plane includes the first region and the first other region, The direction from the first region to the first other region is along the first direction, The first magnetic field data includes first region data relating to the first region and first other region data relating to the first other region. The processing unit is configured to inspect the object to be inspected based on the derived data in the first operation. The derived data is, A first inspection data including a first difference between the first other region data and the first other region data, obtained by inverting the first other magnetic field value included in the first other region data in the first direction, The third inspection data based on the aforementioned third magnetic field data, Inspection equipment, including...

[0074] (Technical proposal 10) The first plane includes a first position, a first opposing position, and a first other position. The aforementioned first other position is the first midpoint between the first position and the first opposing position in the first direction. The first region is located between the first position and the first other position in the first direction. The inspection apparatus according to Technical Proposal 9, wherein the first other region is located between the first other position and the first opposing position in the first direction.

[0075] (Technical proposal 11) The third plane includes the third region and the third other region, The direction from the third region to the third other region is along the first direction, The third magnetic field data includes third region data relating to the third region and third other region data relating to the third other region, The inspection apparatus according to proposal 9 or 10, wherein the data based on the third magnetic field data includes a third inspection data which includes a third difference between the third other-region inverted data obtained by inverting the third other-region magnetic field value included in the third other-region data in the first direction and the third region data.

[0076] (Technical proposal 12) The third plane includes a third position, a third opposing position, and a third other position. The aforementioned third other position is the third midpoint between the third position and the third opposing position in the first direction. The third region is located between the third position and the third other position in the first direction. The inspection apparatus according to technical proposal 11, wherein the third other region is located between the third other position and the third opposing position in the first direction.

[0077] (Technical proposal 13) The first magnetic field data relates to the component in the second direction, and is obtained using the inspection apparatus described in any one of Technical Proposals 1 to 12.

[0078] (Technical proposal 14) The inspection device described in any one of Technical Proposals 1 to 13, wherein the object to be inspected is a battery.

[0079] (Technical proposal 15) The battery includes a first electrode, a second electrode, and a battery section between the first electrode and the second electrode. The inspection apparatus according to Technical Proposal 14, wherein the direction from the first electrode to the second electrode is along the first direction.

[0080] (Technical proposal 16) The inspection apparatus according to Technical Proposal 15, wherein the first magnetic field data includes the distribution of the magnetic field generated from the battery when an alternating voltage is applied between the first electrode and the second electrode.

[0081] (Technical proposal 17) We obtain data from the subjects of the test, Processing the aforementioned data, The aforementioned data is First magnetic field data relating to the first plane, Second magnetic field data relating to the second plane, Includes, The first plane is along a first direction and a second direction intersecting the first direction, The second plane is along the second and third directions, or along the first and second directions. The third direction intersects the plane including the first and second directions, The first plane includes the first region and the first other region, The direction from the first region to the first other region is along the first direction, The first magnetic field data includes first region data relating to the first region and first other region data relating to the first other region. The object to be inspected is inspected based on the derived data. The derived data is, A first inspection data including a first difference between the first other region data and the first other region data, obtained by inverting the first other magnetic field value included in the first other region data in the first direction, The second inspection data based on the second magnetic field data, Testing methods, including those mentioned above.

[0082] (Technical proposal 18) The second plane is aligned along the first and second directions, The inspection object is located between the second plane and the first plane, and the inspection method is as described in Technical Proposal 17.

[0083] (Technical proposal 19) The batteries to be inspected are manufactured, A method for manufacturing a battery, comprising inspecting the battery using the inspection method described in Technical Proposal 17 or 18.

[0084] (Technical proposal 20) The battery includes a first electrode, a second electrode, and a battery section between the first electrode and the second electrode. A method for manufacturing a battery according to Technical Proposal 19, wherein the direction from the first electrode to the second electrode is along the first direction.

[0085] According to the embodiment, an inspection device capable of high-precision inspection, an inspection method, and a method for manufacturing a battery can be provided.

[0086] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configuration of each element, such as the acquisition unit and processing unit included in the inspection device, is included within the scope of the present invention as long as it can be implemented in the same way and similar effects can be obtained by appropriately selecting from the range known to those skilled in the art.

[0087] Furthermore, combinations of two or more elements from any of the specific examples, to the extent technically feasible, are also included within the scope of the present invention, insofar as they encompass the gist of the invention.

[0088] Furthermore, all inspection devices, inspection methods, and battery manufacturing methods that can be appropriately designed and implemented by those skilled in the art based on the above-described embodiments of the present invention also fall within the scope of the present invention, insofar as they encompass the gist of the present invention.

[0089] Furthermore, within the scope of the concept of the present invention, a person skilled in the art could conceive of various modifications and alterations, and it is understood that such modifications and alterations also fall within the scope of the present invention.

[0090] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of symbols]

[0091] 10A: Data, 11D~15D: 1st~5th magnetic field data, 70: Processing unit, 70M: Memory unit, 71: Acquisition unit, 80: Inspection target, 80C: Battery, 81, 82: 1st, 2nd electrodes, 81H, 82H: 1st, 2nd terminal magnetic fields, 81T, 82T: 1st, 2nd terminals, 83: Battery unit, 85: Magnetic field sensor, 86: Sensor element, 86a~86c: 1st~3rd sensor elements, 87: Control unit, 110: Inspection device, D1~D3: 1st~D3 directions, DD1~DD5: 1st~5th inspection data, Dp1~DP5: 1st~5th region data, DPx1: Position, Dq1~Dq5: 1st~5th other region data, Dqx1: 1st other region inversion data, Dr1: Derived data, Dx1: 1st intersecting direction, PL1-PL5: 1st-5th plane, a1-a5: 1st-5th position, b1-b5: 1st-5th opposing position, c1-c5: 1st-5th other position, p1-p5: 1st-5th area, q1-q5: 1st-5th other area

Claims

1. An acquisition unit configured to acquire data obtained from the object being inspected, A processing unit configured to perform a first operation to process the data acquired by the acquisition unit, Equipped with, The aforementioned data is First magnetic field data relating to the first plane, Second magnetic field data relating to the second plane, Includes, The first plane is along a first direction and a second direction intersecting the first direction, The second plane is aligned with the second and third directions, The third direction intersects the plane including the first and second directions, The first plane includes the first region and the first other region, The direction from the first region to the first other region is along the first direction, The first magnetic field data includes first region data relating to the first region and first other region data relating to the first other region, The processing unit is configured to inspect the object to be inspected based on the derived data in the first operation. The derived data is, A first inspection data including a first difference between the first other region data and the first region data, obtained by inverting the first other magnetic field value included in the first other region data in the first direction, The second inspection data based on the second magnetic field data, Inspection equipment, including...

2. The first plane includes a first position, a first opposing position, and a first other position. The first other position is the first midpoint between the first position and the first opposing position in the first direction. The first region is located between the first position and the first other position in the first direction. The inspection apparatus according to claim 1, wherein the first other region is located between the first other position and the first opposing position in the first direction.

3. The second plane includes the second region and the second other region, The direction from the second region to the second other region follows the first intersecting direction that intersects with the first direction. The second magnetic field data includes second region data relating to the second region and second other region data relating to the second other region, The inspection apparatus according to claim 1, wherein the second inspection data includes a second difference between the second other region inverted data, which is obtained by inverting the second other magnetic field value included in the second other region data in the first crossing direction, and the second region data.

4. The second plane includes a second position, a second opposing position, and a second other position. The second other position is the second midpoint between the second position and the second opposing position in the first intersecting direction. The second region is located between the second position and the second other position in the first intersecting direction. The inspection apparatus according to claim 3, wherein the second other region is located between the second other position and the second opposing position in the first intersecting direction.

5. The aforementioned data further includes third magnetic field data relating to the third plane, The third plane is aligned with the first and second directions, The object to be inspected is located between the first plane and the third plane. The aforementioned third plane includes the third region and the third other region, The direction from the third region to the third other region is along the first direction, The third magnetic field data includes third region data relating to the third region and third other region data relating to the third other region, The inspection apparatus according to claim 3, wherein the derived data further includes a third inspection data which includes a third difference between the third other region data and third other region inverted data obtained by inverting the third other magnetic field value included in the third other region data in the first direction.

6. The aforementioned data further includes fourth magnetic field data relating to the fourth plane, The fourth plane is aligned with the second and third directions, The object to be inspected is located between the fourth plane and the second plane. The fourth plane includes the fourth region and the fourth other region, The direction from the fourth region to the fourth other region is along the first intersecting direction, The fourth magnetic field data includes fourth region data relating to the fourth region and fourth other region data relating to the fourth other region, The inspection apparatus according to claim 5, wherein the derived data further includes a fourth inspection data which includes a fourth difference between the fourth other region data and the fourth other region data, obtained by inverting the fourth other magnetic field value included in the fourth other region data in the first crossing direction.

7. The fourth plane includes the fourth position, the fourth opposing position, and the fourth other position. The fourth other position is the fourth midpoint between the fourth position and the fourth opposing position in the first intersecting direction. The fourth region is located between the fourth position and the fourth other position in the first intersecting direction. The inspection apparatus according to claim 6, wherein the fourth other region is located between the fourth other position and the fourth opposing position in the first intersecting direction.

8. An acquisition unit configured to acquire data obtained from the object being inspected, A processing unit configured to perform a first operation to process the data acquired by the acquisition unit, Equipped with, The aforementioned data is First magnetic field data relating to the first plane, Third magnetic field data relating to the third plane, Includes, The first plane is along a first direction and a second direction intersecting the first direction, The third plane is aligned with the first and second directions, The object to be inspected is located between the first plane and the third plane. The first plane includes the first region and the first other region, The direction from the first region to the first other region is along the first direction, The first magnetic field data includes first region data relating to the first region and first other region data relating to the first other region, The processing unit is configured to inspect the object to be inspected based on the derived data in the first operation. The derived data is, A first inspection data including a first difference between the first other region data and the first region data, obtained by inverting the first other magnetic field value included in the first other region data in the first direction, The third inspection data based on the aforementioned third magnetic field data, Inspection equipment, including...

9. We obtain data from the subjects of the test, Processing the aforementioned data, The aforementioned data is First magnetic field data relating to the first plane, Second magnetic field data relating to the second plane, Includes, The first plane is along a first direction and a second direction intersecting the first direction, The second plane is aligned with the second and third directions, or aligned with the first and second directions. The third direction intersects the plane including the first and second directions, The first plane includes the first region and the first other region, The direction from the first region to the first other region is along the first direction, The first magnetic field data includes first region data relating to the first region and first other region data relating to the first other region, The object to be inspected is inspected based on the derived data. The derived data is, A first inspection data including a first difference between the first other region data and the first region data, obtained by inverting the first other magnetic field value included in the first other region data in the first direction, The second inspection data based on the second magnetic field data, Testing methods, including those mentioned above.

10. The batteries to be inspected are manufactured, A method for manufacturing a battery, comprising inspecting the battery using the inspection method described in claim 9.

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