Sensors and electronic devices

Abstract

To provide sensors and electronic devices capable of improving performance. [Solution] According to the embodiment, the sensor includes a first structure, a first intermediate member, a sensor part, and a first fixing member. The first intermediate member includes a first intermediate fixed region fixed to a first member region of the first structure, and a first intermediate movable part supported by the first intermediate fixed region. The sensor part includes a sensor base and the first sensor part. The sensor base includes a first, a second region, and a first end. The first region is located between the second region and the first end. The first fixing member fixes the second region to the first intermediate movable part. The first fixing member does not overlap with the first region. The first sensor part includes a first support part, a first movable part, and a first fixed electrode. At least a portion of the first support part is fixed to the first region. The first fixing part is fixed to the first region and faces the first movable electrode of the first movable part. The first end is a free end.

Description

Technical Field

[0001] Embodiments of the present invention relate to a sensor and an electronic device. Background Art

[0002] For example, acceleration and the like are detected by a sensor having a MEMS structure. Improvement in performance of such sensors is desired. Prior Art Literature Patent Literature

[0003] Patent Literature 1 Japanese Unexamined Patent Publication No. 2020-11375 Summary of the Invention Problem to be Solved by the Invention

[0004] Embodiments of the present invention provide a sensor and an electronic device whose performance can be improved. Means for Solving the Problem

[0005] According to embodiments of the present invention, the sensor includes a first structure, a first intermediate member, a sensor portion, and a first fixing member. The first structure includes a first member region. The first intermediate member includes a first intermediate fixed region fixed to the first member region and a first intermediate movable portion supported by the first intermediate fixed region. A first gap is provided between the first member region and the first intermediate movable portion. The sensor portion includes a sensor base and a first sensor portion. The sensor base includes a first region, a second region, and a first end. The first intermediate movable portion is located between the first member region and the second region in a first direction. The second region is fixed to the first intermediate movable portion. The first region is located between the second region and the first end in a second direction intersecting the first direction. The first fixing member is located between the first intermediate movable portion and the second region. The first fixing member fixes the second region to the first intermediate movable portion. The first fixing member does not overlap with the first region in the first direction. The first sensor portion includes a first support portion, a first movable portion, and a first fixed electrode. At least a portion of the first support portion is fixed to the first region. The first movable portion is supported by the first support portion. The first movable portion includes a first movable electrode. The first fixed electrode is fixed to the first region and faces the first movable electrode. A second gap is provided between the first region and the first movable portion. The first end is a free end. [Brief explanation of the drawing]

[0006] [Figure 1] Figures 1(a) and 1(b) are schematic cross-sectional views illustrating a sensor according to the first embodiment. [Figure 2] Figures 2(a) and 2(b) are schematic cross-sectional views illustrating a sensor according to the first embodiment. [Figure 3] Figure 3 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 4] Figures 4(a) and 4(b) are schematic planes illustrating the sensor according to the first embodiment. [Figure 5] Figure 5 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 6] Figure 6 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 7] Figure 7 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 8] Figures 8(a) and 8(b) are schematic plan views illustrating a part of the sensor according to the first embodiment. [Figure 9] Figures 9(a) to 9(c) are schematic cross-sectional views illustrating a part of the sensor according to the first embodiment. [Figure 10] Figure 10 is a schematic diagram illustrating an electronic device according to the second embodiment. [Figure 11] Figures 11(a) to 11(g) are schematic diagrams illustrating applications of the electronic device according to the embodiment. [Figure 12] Figures 12(a) and 12(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. [Modes for carrying out the invention]

[0007] The embodiments of the present invention will be described below with reference to the drawings. Drawings are schematic or conceptual, and the relationships between the thickness and width of each part, as well as the ratios of the sizes of different parts, are not necessarily identical to those of reality. Even when representing the same part, the dimensions and ratios may be depicted differently in different drawings. In this specification and in each figure, elements similar to those described above are denoted by the same reference numerals with respect to previously shown figures, and detailed explanations are omitted as appropriate.

[0008] (First Embodiment) Figures 1(a) and 1(b) are schematic cross-sectional views illustrating a sensor according to the first embodiment. Figures 2(a) and 2(b) are schematic cross-sectional views illustrating a sensor according to the first embodiment. Figure 3 is a schematic plan view illustrating a sensor according to the first embodiment. Figures 4(a) and 4(b) are schematic planes illustrating the sensor according to the first embodiment. Fig. 1(a) is a cross-sectional view taken along line X1-X2 in Fig. 3, Fig. 4(a) and Fig. 4(b). Fig. 1(b) is a cross-sectional view taken along line X3-X4 in Fig. 3, Fig. 4(a) and Fig. 4(b). Fig. 2(a) is a cross-sectional view taken along line X5-X6 in Fig. 3, Fig. 4(a) and Fig. 4(b). Fig. 2(b) is a cross-sectional view taken along line X7-X8 in Fig. 3, Fig. 4(a) and Fig. 4(b).

[0009] As shown in these figures, a sensor 110 according to the embodiment includes a first structure 60, a first intermediate member 41, a sensor unit 10E, and a first fixing member 45. The first structure 60 includes a first member region 61. The first structure 60 may further include another member region. Examples of the other member region will be described later.

[0010] The first intermediate member 41 includes a first intermediate fixed region 41F and a first intermediate movable portion 41M. The first intermediate fixed region 41F is fixed to the first member region 61. In this example, the first intermediate fixed region 41F is fixed to the first member region 61 via a first mounting fixing member 61F described later. The first intermediate movable portion 41M is supported by the first intermediate fixed region 41F. A first gap g1 is provided between the first member region 61 and the first intermediate movable portion 41M.

[0011] The sensor unit 10E includes a sensor base 50s and a first sensor portion 10Ea. The sensor base 50s includes a first region 50a, a second region 50b, and a first end 50e. The first intermediate movable portion 41M is located between the first member region 61 and the second region 50b in a first direction D1.

[0012] Let the first direction D1 be the Z-axis direction. Let one direction perpendicular to the Z-axis direction be the X-axis direction. Let a direction perpendicular to both the Z-axis direction and the X-axis direction be the Y-axis direction.

[0013] The second region 50b is fixed to the first intermediate movable portion 41M. The first region 50a is located between the second region 50b and the first end 50e in a second direction D2. The second direction D2 intersects the first direction D1. The second direction D2 may be, for example, the X-axis direction.

[0014] As shown in FIG. 2(b), the first fixing member 45 is located between the first intermediate movable portion 41M and the second region 50b. The first fixing member 45 fixes the second region 50b to the first intermediate movable portion 41M. The first fixing member 45 does not overlap the first region 50a in the first direction D1. The position of the first region 50a in the second direction D2 is between the position of the first fixing member 45 in the second direction D2 and the position of the first end portion 50e in the second direction D2.

[0015] The first sensor unit 10Ea includes a first support portion 11s, a first movable portion 10A, and a first fixed electrode 21. At least a part of the first support portion 11s is fixed to the first region 50a. The first movable portion 10A is supported by the first support portion 11s. The first movable portion 10A includes a first movable electrode 11. The first fixed electrode 21 is fixed to the first region 50a and faces the first movable electrode 11. As shown in FIG. 1(b), a second gap g2 is provided between the first region 50a and the first movable portion 10A. A part of the layer forming the first support portion 11s may overlap the second region 50b in the first direction D1.

[0016] As shown in FIGS. 1(a), 1(b), 2(a) and 2(b), the first end portion 50e is a free end.

[0017] FIG. 3 is a plan view on the X-Y plane including the first support portion 11s and the first movable portion 10A. FIG. 4(a) is a plan view on the X-Y plane including the sensor base body 50s. FIG. 4(b) is a plan view on the X-Y plane including the first intermediate member 41.

[0018] In one example, when acceleration is applied to the sensor unit 10E, displacement occurs in the first movable part 10A. When acceleration is applied to the sensor unit 10E, for example, the mechanical properties of the first movable electrode 11 included in the first movable part 10A change. For example, if the first movable electrode 11 is beam-shaped, the vibration characteristics of the beam change. The applied acceleration can be detected by detecting the displacement or vibration characteristics of the first movable part 10A. Changes in displacement or vibration characteristics can be detected by detecting changes in capacitance between the first movable electrode 11 and the first fixed electrode 21. Changes in displacement or vibration characteristics may also be detected optically, for example. Sensor 110 is, for example, an acceleration sensor.

[0019] In the sensor 110, for example, when a temperature change occurs, the sensor part 10E may be subjected to stress due to differences in the coefficient of thermal expansion, etc. For example, in the reference example, if the entire sensor base 50s is fixed, deformation is likely to occur in the sensor base 50s due to thermal stress, etc. Due to deformation, the detection characteristics may change. In the reference example, it is difficult to obtain sufficiently high detection accuracy.

[0020] In contrast, in this embodiment, the second region 50b of the sensor base 50s is fixed to the first intermediate movable part 41M. On the other hand, the first region 50a, where the first sensor part 10Ea is provided, is not fixed to the first intermediate movable part 41M. Since the first end 50e is a free end, the first end 50e can be freely displaced in response to temperature changes. In this embodiment, resonance due to temperature changes can be suppressed.

[0021] Furthermore, the first intermediate movable part 41M is supported by the first intermediate fixed region 41F. The first intermediate movable part 41M is not directly fixed to the first member region 61. The relative positional relationship between the first intermediate movable part 41M and the first member region 61 is changeable. For example, even if the first member region 61 deforms, the effect of that deformation on the first intermediate movable part 41M is suppressed. The effect of the deformation on the second region 50b is suppressed. The first intermediate movable part 41M functions as a stress relaxation layer.

[0022] In this embodiment, the influence of various deformations on the detection characteristics is suppressed. In this embodiment, high detection accuracy can be stably obtained. According to this embodiment, a sensor capable of improving performance can be provided.

[0023] In this embodiment, the first rate of change with respect to temperature of the first curvature in the second direction D2 of the first region 50a is smaller than the second rate of change with respect to temperature of the second curvature in the second direction D2 of the second region 50b. Deformation is suppressed in the first region 50a.

[0024] As shown in Figures 1(a), 1(b), 2(a), and 2(b), the position of the first region 50a in the first direction D1 is between the position of the first member region 61 in the first direction D1 and the position of the first movable part 10A in the first direction D1. At least a portion of the first intermediate fixed region 41F may be located between the first member region 61 and the second region 50b in the first direction D1.

[0025] A third void g3 may be provided between the first intermediate fixed region 41F and the second region 50b. For example, heat conduction through the second region 50b and the first intermediate fixed region 41F is suppressed. This makes it easier to obtain more stable characteristics.

[0026] As shown in Figures 1(b) and 4(b), the first intermediate member 41 may further include a first intermediate connection portion 41C. The first intermediate connection portion 41C is provided between the first intermediate fixed region 41F and the first intermediate movable portion 41M. The first intermediate connection portion 41C connects the first intermediate movable portion 41M to the first intermediate fixed region 41F. The length of the first intermediate connection portion 41C along the first extending direction is longer than the length of the first intermediate connection portion 41C along the first extending crossing direction intersecting the first extending direction. The first intermediate connection portion 41C may have, for example, a meander structure. Low thermal conductivity and high flexibility can be obtained.

[0027] The first intermediate member 41 may further include a second intermediate fixed region 42F fixed to the first member region 61. The second intermediate fixed region 42F supports the first intermediate movable portion 41M. The first intermediate movable portion 41M is located between the first intermediate fixed region 41F and the second intermediate fixed region 42F in an intersecting direction (e.g., a second direction D2) that intersects the first direction D1.

[0028] As shown in Figures 1(b) and 4(b), the first intermediate member 41 may further include a second intermediate connecting portion 42C provided between the first intermediate movable portion 41M and the second intermediate fixed region 42F. The second intermediate connecting portion 42C connects the first intermediate movable portion 41M to the second intermediate fixed region 42F. The length of the second intermediate connecting portion 42C along the second extending direction is longer than the length of the second intermediate connecting portion 42C along the second extending crossing direction intersecting the second extending direction. The first intermediate connecting portion 41C may have, for example, a meander structure. Low thermal conductivity and high flexibility are obtained.

[0029] As shown in Figure 4(b), the first intermediate member 41 may further include a third intermediate fixed region 43F fixed to the first member region 61. The third intermediate fixed region 43F supports the first intermediate movable portion 41M. The direction from the first intermediate fixed region 41F to the first intermediate movable portion 41M intersects the direction from the third intermediate fixed region 43F to the first intermediate movable portion 41M. In this example, the direction from the first intermediate fixed region 41F to the first intermediate movable portion 41M is along the second direction D2. The direction from the third intermediate fixed region 43F to the first intermediate movable portion 41M is along the third direction D3. The third direction D3 intersects the plane containing the first direction D1 and the second direction D2.

[0030] The first intermediate member 41 may further include a third intermediate connecting portion 43C provided between the first intermediate movable portion 41M and the third intermediate fixed region 43F. The third intermediate connecting portion 43C connects the first intermediate movable portion 41M to the third intermediate fixed region 43F. The length of the third intermediate connecting portion 43C along the third extending direction is longer than the length of the third intermediate connecting portion 43C along the third extending crossing direction intersecting the third extending direction. The first intermediate connecting portion 41C may have, for example, a meander structure. Low thermal conductivity and high flexibility are obtained.

[0031] As shown in Figure 4(b), the first intermediate member 41 may further include a fourth intermediate fixed region 44F fixed to the first member region 61. The fourth intermediate fixed region 44F supports the first intermediate movable portion 41M. The first intermediate movable portion 41M is located between the third intermediate fixed region 43F and the fourth intermediate fixed region 44F.

[0032] The first intermediate member 41 may further include a fourth intermediate connecting portion 44C provided between the first intermediate movable portion 41M and the fourth intermediate fixed region 44F. The fourth intermediate connecting portion 44C connects the first intermediate movable portion 41M to the fourth intermediate fixed region 44F. The length of the fourth intermediate connecting portion 44C along the fourth extending direction is longer than the length of the fourth intermediate connecting portion 44C along the fourth extending crossing direction intersecting the fourth extending direction. The first intermediate connecting portion 41C may have, for example, a meander structure. Low thermal conductivity and high flexibility are obtained.

[0033] The first intermediate fixed region 41F, the second intermediate fixed region 42F, the third intermediate fixed region 43F, and the fourth intermediate fixed region 44F may be continuous with each other. The boundaries of these regions may be clear or unclear.

[0034] As shown in Figures 1(a) and 3, the sensor 110 may include a first mounting and fixing member 61F. The first mounting and fixing member 61F fixes a first intermediate fixing region 41F to the first member region 61. The first mounting and fixing member 61F may fix a second intermediate fixing region 42F to the first member region 61. The first mounting and fixing member 61F may fix a third intermediate fixing region 43F to the first member region 61. The first mounting and fixing member 61F may fix a fourth intermediate fixing region 44F to the first member region 61.

[0035] As shown in Figure 1(a) and other figures, the first intermediate member 41 may include a first intermediate member layer 41s and a first interlayer 41L. The first interlayer 41L is located between the first member region 61 and the first intermediate member layer 41s. The first intermediate member layer 41s may include, for example, silicon. The first interlayer 41L may include, for example, metal. The first mounting and fixing member 61F may include, for example, solder.

[0036] As shown in Figures 1(a) and 4(b), the first structure 60 may include a second member region 62, a third member region 63, a fourth member region 64, and a fifth member region 65. These member regions may be connected to the first member region 61. For example, the first intermediate member 41 and the sensor unit 10E are located between the second member region 62 and the third member region 63 in the second direction D2. For example, the first intermediate member 41 and the sensor unit 10E are located between the fourth member region 64 and the fifth member region 65 in the third direction D3.

[0037] As shown in Figure 1(a) and other figures, the first structure 60 may further include an opposing member region 66. The first intermediate member 41 and the sensor unit 10E are provided between the first member region 61 and the opposing member region 66. A fourth gap g4 is provided between the sensor unit 10E and the opposing member region 66. The opposing member region 66 is omitted in Figures 3, 4(a), and 4(b). The opposing member region 66 may be connected to the second member region 62, the third member region 63, the fourth member region 64, and the fifth member region 65. The first intermediate member 41 and the sensor unit 10E are provided in a space surrounded by such multiple member regions. The space may be depressurized. This allows for more stable detection.

[0038] The first support portion 11s and the first movable portion 10A are conductive. A portion of the first movable portion 10A may function as the first movable electrode 11. The first support portion 11s and the first movable portion 10A may contain conductive silicon or the like.

[0039] As shown in Figure 3, the sensor 110 may be provided with a control unit 70. The control unit 70 may be included in the sensor 110. The control unit 70 may be provided separately from the sensor 110. The control unit 70 may be configured to detect a first signal Sg1 generated between the first movable electrode 11 and the first fixed electrode 21. The first signal Sg1 changes in accordance with the acceleration applied to the sensor unit 10E.

[0040] As shown in Figure 3, the first sensor unit 10Ea may further include a first fixed electrode 31 fixed in the first region 50a. The first movable electrode 11 is located between the first fixed electrode 31 and the first fixed electrode 21. In this example, the direction from the first fixed electrode 31 to the first fixed electrode 21 is along the third direction D3.

[0041] In one example, a first AC signal (first AC voltage) is applied between the first fixed electrode 31 and the first movable electrode 11. This may cause the first movable electrode 11 to vibrate. The vibration characteristics of the first movable electrode 11 may be detected by the first fixed electrode 21. The functions of the first fixed electrode 21 and the first other fixed electrode 31 may be swapped.

[0042] In the example shown in Figure 3, the first movable part 10A includes a first movable component 18X. In this example, the first movable component 18X is connected to the first movable electrode 11. For example, in the second direction D2, the first movable electrode 11 is located between the first support part 11s and the first movable component 18X. The first movable component 18X is, for example, a proof mass. It can detect acceleration with high sensitivity. The length of the first movable component 18X in the third direction D3 is longer than the length of the first movable electrode 11 in the third direction D3.

[0043] As shown in Figure 1(a), a first intermediate layer 51i may be provided between the first region 50a and the first support portion 11s. The first intermediate layer 51i may be an insulating layer.

[0044] As shown in Figures 3, 4(a), and 4(b), in the example of the sensor 110, the first intermediate member 41 includes a plurality of first fixing members 45. The number of the plurality of first fixing members 45 is arbitrary. The first fixing members 45 may include, for example, Si. The first fixing members 45 may include a metal (for example, at least one selected from the group consisting of Au and Cu).

[0045] Figures 5 and 6 are schematic plan views illustrating a sensor according to the first embodiment. As shown in Figures 5 and 6, the sensors 111 and 112 according to this embodiment are provided with a single first fixing member 45. The planar shape of the first fixing member 45 may be a polygon or a circle, etc.

[0046] The following describes other examples of the first sensor unit 10Ea. Figures 7, 8(a), and 8(b) are schematic plan views illustrating a part of the sensor according to the first embodiment. Figures 9(a) to 9(c) are schematic cross-sectional views illustrating a part of the sensor according to the first embodiment. Figure 9(a) is a cross-sectional view taken along line A1-A2 in Figure 8(a). Figure 9(b) is a cross-sectional view taken along line A3-A4 in Figure 8(a). Figure 9(c) is a cross-sectional view taken along line A5-A6 in Figure 8(a). In these figures, the first structure 60 and the first intermediate member 41 are omitted.

[0047] As shown in Figure 7, in the sensor 120 according to this embodiment, the sensor portion 10E also includes a sensor base 50s and a first sensor portion 10Ea. The sensor base 50s includes a first region 50a, a second region 50b, and a first end portion 50e. The first region 50a is located between the second region 50b and the first end portion 50e.

[0048] As shown in Figure 8(a), the first sensor unit 10Ea includes a first support unit 11s, a first movable unit 10A, and a first fixed electrode 21. As shown in Figure 9(b), the first support unit 11s is fixed to the first region 50a. The first movable unit 10A is supported by the first support unit 11s. The first fixed electrode 21 is fixed to the first region 50a. A second gap g2 is provided between the first region 50a and the first movable unit 10A.

[0049] As shown in Figure 8(a), in the sensor 120, the first movable part 10A may further include a first movable base 18A, a second movable base 18B, and a first beam 11M. The first movable base 18A is connected to the first support 11s. A portion of the first beam 11M is connected to the first movable base 18A. Another portion of the first beam 11M is connected to the second movable base 18B. For example, the first beam 11M extends along a third direction D3. The third direction D3 intersects a plane containing the first direction D1 and the second direction D2. The third direction D3 may be, for example, the Y-axis direction. The first movable electrode 11 is connected to the first beam 11M.

[0050] For example, the resonant frequency of the first beam 11M may change due to the acceleration applied to the sensor unit 10E. The change in resonant frequency may be detected by a first signal Sg1 generated between the first movable electrode 11 and the first fixed electrode 21. By detecting the change in resonant frequency, acceleration may be detected.

[0051] As shown in Figure 8(a), the first movable part 10A may include a first movable connector 18P. The first movable connector 18P is provided between the first movable base 18A and the first support 11s. The first support 11s supports the first movable connector 18P. The first movable connector 18P supports the first movable base 18A. The length (width) of the first movable connector 18P along the third direction D3 is shorter than the length (width) of the first movable base 18A along the third direction D3. For example, the first movable base 18A may be deformed (or displaced) to rotate in the XY plane around the first movable connector 18P.

[0052] For example, deformation (or displacement) of the first movable base 18A applies stress to the first beam 11M. The stress generated in the first beam 11M changes the resonant frequency of the first beam 11M. Acceleration is detected by detecting the change in resonant frequency. By providing a narrow first movable connection part 18P, the deformation (displacement) of the first movable base 18A due to acceleration becomes larger. High sensitivity is obtained.

[0053] As shown in Figure 8(a), the first movable part 10A may include a first movable component 18X. The first movable component 18X is connected to the first movable base 18A. For example, in the second direction D2, the first movable base 18A is provided between the first movable component 18X and the first support part 11s. In the second direction D2, the first movable connecting part 18P is provided between the first movable base 18A and the first support part 11s.

[0054] The length (width) of the first movable part 18X along the third direction D3 is longer than the length (width) of the first movable base 18A along the third direction D3. By providing the first movable part 18X, the deformation (displacement) of the first movable base 18A in response to acceleration can be increased. The first movable part 18X functions, for example, as a proof mass.

[0055] As shown in Figures 8(a) and 9(c), the first sensor portion 10Ea may further include a second fixed electrode 22. The second fixed electrode 22 is fixed to the first region 50a. The first movable portion 10A may further include a second movable electrode 12. The second movable electrode 12 faces the second fixed electrode 22 in the second direction D2.

[0056] The first movable part 10A may further include a second other movable base 18BM and a second beam 12M. A portion of the second beam 12M is connected to the second other movable base 18BM. Another portion of the second beam 12M is connected to the first movable base 18A. The second beam 12M extends along a third direction D3. In this example, the direction from the second beam 12M to the first beam 11M is along the third direction D3.

[0057] The second movable electrode 12 is connected to the second beam 12M. For example, the first resonant frequency of the first beam 11M and the second resonant frequency of the second beam 12M change in accordance with the acceleration applied to the sensor unit 10E. The change in resonant frequency corresponds, for example, to a change in the stress applied to the beam.

[0058] In one state of acceleration, when the first resonant frequency increases, the second resonant frequency decreases. In another state of acceleration, when the first resonant frequency decreases, the second resonant frequency increases. By detecting the change in the difference between the two resonant frequencies, acceleration can be detected with higher sensitivity. Acceleration can be detected with higher precision. The detected acceleration includes a component in the direction intersecting the first direction D1. In this example, the detected acceleration includes, for example, a component in the third direction D3.

[0059] As shown in Figure 8(a), the first sensor unit 10Ea may further include a first fixed electrode 31 and a second fixed electrode 32. The first fixed electrode 31 and the second fixed electrode 32 are fixed in the first region 50a. The first fixed electrode 31 faces the first movable electrode 11. The second fixed electrode 32 faces the second movable electrode 12. In this example, in the second direction D2, at least a portion of the first movable electrode 11 is between the first fixed electrode 21 and the first fixed electrode 31. In the second direction D2, at least a portion of the second movable electrode 12 is between the second fixed electrode 22 and the second fixed electrode 32.

[0060] For example, an AC signal is applied between the first movable electrode 11 and the first fixed electrode 31. This AC signal causes the first beam 11M to vibrate. The change in the first resonant frequency of the first beam 11M due to acceleration may be detected by the first signal between the first fixed electrode 21 and the first movable electrode 11.

[0061] For example, an AC signal is applied between the second movable electrode 12 and the second fixed electrode 32. This AC signal causes the second beam 12M to vibrate. The change in the second resonant frequency of the second beam 12M due to acceleration may be detected by a second signal between the second fixed electrode 22 and the second movable electrode 12.

[0062] The first fixed electrode 31 and the second fixed electrode 32 are, for example, drive electrodes. The first fixed electrode 21 and the second fixed electrode 22 are, for example, detection electrodes.

[0063] As shown in Figure 8(a), in this example, the first sensor unit 10Ea further includes a first opposing fixed electrode 21A, a second opposing fixed electrode 22A, a first opposing other fixed electrode 31A, and a second opposing other fixed electrode 32A. These fixed electrodes are fixed to the first region 50a.

[0064] As shown in Figure 2(a), in this example, the first movable part 10A includes a first opposing movable electrode 11A and a second opposing movable electrode 12A. The first opposing fixed electrode 21A faces the first opposing movable electrode 11A in the second direction D2. The first opposing other fixed electrode 31A faces the first opposing movable electrode 11A in the second direction D2. In this example, the first opposing movable electrode 11A is located between the first opposing fixed electrode 21A and the first opposing other fixed electrode 31A. The second opposing fixed electrode 22A faces the second opposing movable electrode 12A in the second direction D2. The second opposing other fixed electrode 32A faces the second opposing movable electrode 12A in the second direction D2. In this example, the second opposing movable electrode 12A is located between the second opposing fixed electrode 22A and the second opposing other fixed electrode 32A.

[0065] As shown in Figure 9(b), for example, the first movable part 10A may include the first movable part electrode 11E. The first movable part electrode 11E is electrically connected to the first movable electrode 11, the second movable electrode 12, the first opposing movable electrode 11A, and the second opposing movable electrode 12A.

[0066] As shown in Figure 8(b), a control unit 70 may be provided. The control unit 70 may be configured to supply drive signals (e.g., AC signals) to, for example, the first other fixed electrode 31, the second other fixed electrode 32, the first opposing other fixed electrode 31A, and the second opposing other fixed electrode 32A.

[0067] The control unit 70 may be electrically connected to, for example, the first fixed electrode 21, the second fixed electrode 22, the first opposing fixed electrode 21A, and the second opposing fixed electrode 22A. The control unit 70 may be configured to detect signals between each of these fixed electrodes and the first movable part 10A.

[0068] In this embodiment, acceleration may be detected based on the detection result of the difference between the first resonant frequency of the first beam 11M and the second resonant frequency of the second beam 12M. As already described, in this embodiment, for example, adverse effects due to thermal stress are mitigated. For example, stress relaxation due to creep is suppressed. For example, changes in resonant frequency caused by thermal stress are suppressed.

[0069] For example, changes in the distance between the first movable electrode 11 and the first fixed electrode 21 due to temperature changes are suppressed. For example, the influence of changes in the soft spring effect due to the electrostatic spring is suppressed.

[0070] In this embodiment, the sensor unit 10E may include other sensor units (such as a second sensor unit).

[0071] (Second Embodiment) The second embodiment relates to an electronic device. Figure 10 is a schematic diagram illustrating an electronic device according to the second embodiment. As shown in Figure 10, the electronic device 310 according to the embodiment includes a sensor according to the first embodiment and a circuit control unit 170. In this example, a sensor 110 is depicted as the sensor. The circuit control unit 170 can control a circuit 180 based on a signal S1 obtained from the sensor. The circuit 180 is, for example, a control circuit for a drive device 185. According to the embodiment, for example, a circuit 180 for controlling a drive device 185 can be controlled with high precision.

[0072] Figures 11(a) to 11(g) are schematic diagrams illustrating applications of the electronic device according to the embodiment. As shown in Figure 11(a), the electronic device 310 may be at least part of a robot. As shown in Figure 11(b), the electronic device 310 may be at least part of a machine robot installed in a manufacturing plant or the like. As shown in Figure 11(c), the electronic device 310 may be at least part of an automated guided vehicle in a factory or the like. As shown in Figure 11(d), the electronic device 310 may be at least part of a drone (unmanned aerial vehicle). As shown in Figure 11(e), the electronic device 310 may be at least part of an airplane. As shown in Figure 11(f), the electronic device 310 may be at least part of a ship. As shown in Figure 11(g), the electronic device 310 may be at least part of an automobile. The electronic device 310 may include, for example, at least one of a robot and a mobile body.

[0073] Figures 12(a) and 12(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. As shown in Figure 12(a), the sensor 430 according to the embodiment includes the sensor according to the first embodiment and a transmitting / receiving unit 420. In the example in Figure 12(a), the sensor 110 is depicted as the sensor. The transmitting / receiving unit 420 can transmit the signal obtained from the sensor 110 by, for example, at least one of wireless and wired methods. The sensor 430 is installed, for example, on a slope surface 410 of a road 400. The sensor 430 can monitor the state of, for example, a facility (e.g., infrastructure). The sensor 430 may be, for example, a state monitoring device.

[0074] For example, the sensor 430 detects changes in the condition of the slope surface 410 of the road 400 with high accuracy. Changes in the condition of the slope surface 410 include, for example, changes in the inclination angle and changes in the vibration state. The signal (inspection result) obtained from the sensor 110 is transmitted by the transmitting / receiving unit 420. The condition of the facility (e.g., infrastructure) can be monitored, for example, continuously.

[0075] As shown in Figure 12(b), the sensor 430 is installed, for example, on a part of a bridge 460. The bridge 460 is built over a river 470. For example, the bridge 460 includes at least one of a main girder 450 and a pier 440. The sensor 430 is installed on at least one of the main girder 450 and the pier 440. For example, the angle of at least one of the main girder 450 and the pier 440 may change due to deterioration or other reasons. For example, the vibration state may change in at least one of the main girder 450 and the pier 440. The sensor 430 can detect these changes with high accuracy. The detection results can be transmitted to any location by the transmitting / receiving unit 420. Anomalies can be effectively detected.

[0076] The embodiments may include the following technical proposals. (Technical proposal 1) A first structure including a first member region, A first intermediate member, wherein the first intermediate member is A first intermediate fixing region fixed to the first member region, The first intermediate movable part is supported in the first intermediate fixed region, The first intermediate member includes a first member region and a first intermediate movable portion, and a first gap is provided between the first intermediate member and the first intermediate movable portion. Sensor unit, First fixing member and Equipped with, The sensor unit includes a sensor base and a first sensor unit. The sensor substrate includes a first region, a second region, and a first end, The first intermediate movable portion is located between the first member region and the second region in the first direction. The second region is fixed to the first intermediate movable part, The first region is located between the second region and the first end in a second direction intersecting the first direction. The first fixing member is located between the first intermediate movable part and the second region. The first fixing member fixes the second region to the first intermediate movable part, The first fixing member does not overlap with the first region in the first direction. The first sensor unit is, A first support portion, wherein at least a part of the first support portion is fixed to the first region, and A first movable part supported by the first support part, the first movable part includes a first movable electrode, A first fixed electrode fixed in the first region and facing the first movable electrode, Includes, A second gap is provided between the first region and the first movable part. The aforementioned first end is a free end, which is the sensor.

[0077] (Technical proposal 2) The sensor according to Technical Proposal 1, wherein the position of the first region in the first direction is between the position of the first member region in the first direction and the position of the first movable part in the first direction.

[0078] (Technical proposal 3) The sensor according to Technical Proposal 2, wherein at least a portion of the first intermediate fixed region is located between the first member region and the second region in the first direction.

[0079] (Technical proposal 4) A sensor according to any one of the technical proposals 1 to 3, wherein a third gap is provided between the first intermediate fixed region and the second region.

[0080] (Technical proposal 5) The sensor according to any one of Technical Proposals 1 to 4, wherein the position of the first region in the second direction is between the position of the first fixing member in the second direction and the position of the first end in the second direction.

[0081] (Technical proposal 6) The sensor according to technical proposal 5, wherein the first intermediate member includes a plurality of the first fixing members.

[0082] (Technical proposal 7) The first intermediate member further includes a first intermediate connecting portion provided between the first intermediate fixed region and the first intermediate movable portion, The first intermediate connection part connects the first intermediate movable part to the first intermediate fixed area, The sensor according to any one of Technical Proposals 1 to 6, wherein the length of the first intermediate connection portion along the first extending direction is longer than the length of the first intermediate connection portion along the first extending crossing direction intersecting the first extending direction.

[0083] (Technical proposal 8) The first intermediate member further includes a second intermediate fixing region fixed to the first member region, The second intermediate fixed region supports the first intermediate movable portion, The first intermediate movable portion is located between the first intermediate fixed region and the second intermediate fixed region in an intersecting direction that intersects the first direction, and is a sensor according to any one of Technical Proposals 1 to 7.

[0084] (Technical proposal 9) The first intermediate member further includes a second intermediate connecting portion provided between the first intermediate movable portion and the second intermediate fixed region, The second intermediate connection part connects the first intermediate movable part to the second intermediate fixed area. The sensor according to Technical Proposal 8, wherein the length of the second intermediate connection portion along the second extending direction is longer than the length of the second intermediate connection portion along the second extending crossing direction intersecting the second extending direction.

[0085] (Technical proposal 10) The first intermediate member further includes a third intermediate fixing region fixed to the first member region, The third intermediate fixed region supports the first intermediate movable portion, The sensor according to any one of Technical Proposals 1 to 7, wherein the direction from the first intermediate fixed region to the first intermediate movable portion intersects with the direction from the third intermediate fixed region to the first intermediate movable portion.

[0086] (Technical proposal 11) The first intermediate member further includes a third intermediate connecting portion provided between the first intermediate movable portion and the third intermediate fixed region, The third intermediate connection part connects the first intermediate movable part to the third intermediate fixed area, The sensor according to technical proposal 10, wherein the length of the third intermediate connection portion along the third extending direction is longer than the length of the third intermediate connection portion along the third extending crossing direction intersecting the third extending direction.

[0087] (Technical proposal 12) The first intermediate member further includes a fourth intermediate fixing region fixed to the first member region, The fourth intermediate fixed region supports the first intermediate movable portion, The first intermediate movable portion is located between the third intermediate fixed region and the fourth intermediate fixed region, as described in Technical Proposal 10 or 11.

[0088] (Technical proposal 13) The first intermediate member further includes a fourth intermediate connecting portion provided between the first intermediate movable portion and the fourth intermediate fixed region, The fourth intermediate connection part connects the first intermediate movable part to the fourth intermediate fixed area, The sensor according to technical proposal 12, wherein the length of the fourth intermediate connection portion along the fourth extending direction is longer than the length of the fourth intermediate connection portion along the fourth extending crossing direction intersecting the fourth extending direction.

[0089] (Technical proposal 14) The first structure further includes an opposing member region, The first intermediate member and the sensor portion are provided between the first member region and the opposing member region. A sensor according to any one of the technical proposals 1 to 13, wherein a fourth gap is provided between the sensor portion and the opposing member region.

[0090] (Technical proposal 15) The sensor according to any one of Technical Proposals 1 to 14, wherein the first rate of change with respect to temperature of the first curvature in the second direction of the first region is smaller than the second rate of change with respect to temperature of the second curvature in the second direction of the second region.

[0091] (Technical proposal 16) The sensor according to any one of Technical Proposals 1 to 15, further comprising a first mounting fixing member for fixing the first intermediate fixing region to the first member region.

[0092] (Technical proposal 17) The first sensor portion further includes a first fixed electrode fixed in the first region, The first movable electrode is located between the first fixed electrode and the first fixed electrode, and is a sensor according to any one of Technical Proposals 1 to 16.

[0093] (Technical proposal 18) The first signal generated between the first movable electrode and the first fixed electrode changes in accordance with the acceleration applied to the sensor unit, as described in any one of Technical Proposals 1 to 17.

[0094] (Technical proposal 19) The first movable part further includes a first movable base, a second movable base, and a first beam. A portion of the first beam is connected to the first movable base, Another part of the first beam is connected to the second movable base, The first beam extends along the third direction, The third direction intersects the plane including the first and second directions, The first movable electrode is connected to the first beam, The first sensor unit further includes a second fixed electrode fixed in the first region, The first movable part further includes a second movable electrode, The second movable electrode faces the second fixed electrode in the second direction, The first movable part further includes a second other movable base and a second beam, A portion of the second beam is connected to the second other movable base, Another part of the second beam is connected to the first movable base, The second beam extends along the third direction, The second movable electrode is connected to the second beam, The sensor according to any one of Technical Proposals 1 to 17, wherein the first resonant frequency of the first beam and the second resonant frequency of the second beam change in accordance with the acceleration applied to the sensor unit.

[0095] (Technical proposal 20) A sensor described in any one of Technical Proposals 1 to 19, A circuit control unit capable of controlling the circuit based on the signal obtained from the sensor, An electronic device equipped with [a specific feature / feature].

[0096] According to the embodiment, sensors and electronic devices capable of improving performance are provided.

[0097] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configuration of each element included in the sensor, such as the first structure, sensor part, sensor base, support part, fixed electrode, movable part, fixed member, and control unit, is included within the scope of the present invention as long as those skilled in the art can appropriately select from the known range to implement the present invention in the same way and obtain similar effects.

[0098] Furthermore, combinations of two or more elements from any of the specific examples, to the extent technically feasible, are also included within the scope of the present invention, insofar as they encompass the gist of the present invention.

[0099] Furthermore, all sensors and electronic devices that a person skilled in the art can implement by appropriately modifying the design based on the sensors and electronic devices described above as embodiments of the present invention also fall within the scope of the present invention, insofar as they encompass the gist of the present invention.

[0100] Furthermore, within the scope of the concept of the present invention, a person skilled in the art could conceive of various modifications and alterations, and it is understood that such modifications and alterations also fall within the scope of the present invention.

[0101] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of Symbols]

[0102] 10A: First movable part, 10E: Sensor part, 10Ea: First sensor part, 11, 21: First and second movable electrodes, 11A, 12A: First and second opposing movable electrodes, 11E: First movable part electrode, 11M, 12M: First and second beams, 11s: First support part, 18A, 18B: First and second movable base parts, 18BM: Second other movable base part, 18P: First movable connection part, 18X: First movable part, 21, 22: First and second fixed electrodes, 21A, 22A: First and second opposing fixed electrodes, 31, 32: First and second other fixed electrodes, 31A, 32A: First and second opposing other fixed electrodes, 41: First intermediate member, 41C~44C: First to fourth intermediate connection parts, 41F~44F: 1st to 4th intermediate fixed regions, 41L: 1st interlayer, 41M: 1st intermediate movable part, 41s: 1st intermediate member layer, 45: 1st fixed member, 50a, 50b: 1st and 2nd regions, 50e: 1st end, 50s: sensor base, 51i: 1st intermediate layer, 60: 1st structure, 61~65: 1st to 5th member regions, 61F: 1st mounting fixed member, 66: Opposing member region, 70: control unit, 110~112, 120: sensors, 170: circuit control unit, 180: circuit, 185: drive unit, 310: electronic device, 400: road, 410: slope surface, 420: transmitting / receiving unit, 430: sensor, 440: bridge pier, 450: main girder, 460: Bridge, 470: River, D1~D3: 1st~3rd direction, S1: Signal, Sg1: 1st signal, g1~g4: 1st~4th gap

Claims

1. A first structure including a first member region, A first intermediate member, wherein the first intermediate member is A first intermediate fixing region fixed to the first member region, The first intermediate movable part is supported in the first intermediate fixed region, The first intermediate member includes a first gap provided between the first member region and the first intermediate movable portion, Sensor unit, First fixing member and Equipped with, The sensor unit includes a sensor base and a first sensor unit. The sensor substrate includes a first region, a second region, and a first end, The first intermediate movable portion is located between the first member region and the second region in the first direction. The second region is fixed to the first intermediate movable part, The first region is located between the second region and the first end in a second direction intersecting the first direction. The first fixing member is located between the first intermediate movable part and the second region. The first fixing member fixes the second region to the first intermediate movable part, The first fixing member does not overlap with the first region in the first direction, The first recovery unit is, A first support portion, wherein at least a part of the first support portion is fixed to the first region, and A first movable part supported by the first support part, the first movable part includes a first movable electrode, A first fixed electrode fixed in the first region and facing the first movable electrode, Includes, A second gap is provided between the first region and the first movable part. The first end is a free end of the sensor.

2. The sensor according to claim 1, wherein the position of the first region in the first direction is between the position of the first member region in the first direction and the position of the first movable part in the first direction.

3. The sensor according to claim 2, wherein at least a portion of the first intermediate fixed region is located between the first member region and the second region in the first direction.

4. The sensor according to claim 3, wherein a third gap is provided between the first intermediate fixed region and the second region.

5. The sensor according to claim 4, wherein the position of the first region in the second direction is between the position of the first fixing member in the second direction and the position of the first end in the second direction.

6. The first intermediate member further includes a first intermediate connecting portion provided between the first intermediate fixed region and the first intermediate movable portion, The first intermediate connection part connects the first intermediate movable part to the first intermediate fixed area. The sensor according to any one of claims 1 to 5, wherein the length of the first intermediate connection portion along the first extending direction is longer than the length of the first intermediate connection portion along the first extending crossing direction intersecting the first extending direction.

7. The sensor according to any one of claims 1 to 5, wherein the first rate of change with respect to temperature of the first curvature in the second direction of the first region is smaller than the second rate of change with respect to temperature of the second curvature in the second direction of the second region.

8. The sensor according to any one of claims 1 to 5, further comprising a first mounting fixing member for fixing the first intermediate fixing region to the first member region.

9. The sensor according to any one of claims 1 to 5, wherein the first signal generated between the first movable electrode and the first fixed electrode changes in accordance with the acceleration applied to the sensor unit.

10. The sensor according to claim 1, A circuit control unit capable of controlling the circuit based on the signal obtained from the sensor, An electronic device equipped with [a specific feature / feature].

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