Collet and pickup device

Abstract

The present invention provides a collet that suppresses lifting of the peripheral edge of a thin film member, which is the object to be held, and securely adsorbs and holds the thin film member, and a pickup device using the same. [Solution] A collet for adsorbing and holding a thin film member, When adsorbing and holding the thin film member, the collet body has an adsorption surface that contacts one main surface of the thin film member in a planar manner, the adsorption surface includes a flat portion and a recess, the collet body has a suction port that communicates with the recess, and the area of ​​the adsorption surface is 50 mm². 2 The collet is as described above, wherein, when the adsorption surface is viewed from above, within the region composed only of the flat portion, the diameter dc of the virtual inscribed circle with the largest diameter among the inscribed circles inscribed around the outer edge of the region is 1.57 to 3.00 mm.

Description

[Technical Field]

[0001] The present invention relates to a collet for adsorbing and holding a thin film member, and a pickup device equipped therewith. [Background technology]

[0002] In the process of picking up semiconductor components such as semiconductor chips, collets are known to be used to adsorb and hold the semiconductor components. As an example of a collet, one is known that has vertical protrusions formed in an annular shape along its periphery, as described in Patent Document 1. In this case, the object to be adsorbed is adsorbed and held in contact with the tip of the protrusion. A collet is also known in which the above-mentioned protrusion is sloped so that it becomes thinner as it moves away from the collet. In this case, the object to be adsorbed is held by the collet with its peripheral edge in contact with the sloped surface of the protrusion.

[0003] On the other hand, there are also collets that do not have protrusions on the suction surface and hold the object by making a flat portion of the suction surface contact with the main surface of the object to be held in a planar manner. For example, Patent Document 2 describes collets with X-shaped recesses and Y-shaped recesses formed on a flat suction surface without protrusions. [Prior art documents] [Patent Documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2013-33788 [Patent Document 2] Japanese Patent Application Publication No. 11-233592 [Overview of the project] [Problems that the invention aims to solve]

[0005] In recent years, while the surface area of ​​semiconductor products such as semiconductor chips has increased, their thinning has progressed. For example, semiconductor chips with a length of 8 mm, a width of 8 mm, and a thickness of 10 μm are known to be extremely thin relative to their planar size. Therefore, there is a need to reliably pick up such thin-film components without causing deformation or damage.

[0006] However, the collet described in Patent Document 1 has a suction port in the center and a periphery surrounded by protrusions, so when adsorbing and holding a thin film member, there are few points of physical contact between the collet and the thin film member. For this reason, when disturbances such as vibration occur, the thin film member may detach, causing a pickup failure. In addition, because the thin film member is thin, the central part of the thin film member may become concave due to suction, causing deformation or damage to the thin film member, or the peripheral part may lift up from the protrusions. If lifting occurs at the peripheral part of the thin film member, the reduced pressure necessary for adsorption cannot be secured, resulting in a pickup failure or the thin film member coming into contact with other members during the pickup operation.

[0007] Furthermore, the first collet described in Patent Document 2 has five suction ports that communicate with the intersection of the two linear recesses that make up the X-shaped recess and with the four ends of the X-shaped recess, and the second collet described in Patent Document 2 has suction ports that communicate with the three ends of the Y-shaped recess. As a result, when adsorbing and holding a thin film member with these collets, there is a risk of pickup failure if the suction pressure of the total of five or total of three suction ports becomes uneven, and there is a problem that pressure control is difficult. In addition, when a thin film member is adsorbed as described above, the thin film member is strongly sucked along the recess, resulting in the peripheral edge of the thin film member separating from the adsorption surface, which causes the peripheral edge of the thin film member to float.

[0008] Thus, with conventionally proposed collets, when picking up the thin film material, there is a risk of lifting at the periphery of the thin film material, failure to pick up the thin film material, or deformation or damage to the thin film material, and improvements were needed.

[0009] In view of the above problems, the present invention aims to provide a collet that suppresses lifting of the peripheral edge of a thin film member, which is the object to be held, and reliably adsorbs and holds the thin film member, and a pickup device using the same. [Means for solving the problem]

[0010] The inventors of the present invention have conducted extensive research to solve the above problems and have found that the above problems can be solved by setting the area of ​​the adsorption surface to a predetermined level and the area of ​​the flat portion on the adsorption surface to a predetermined range, thereby completing the present invention. In other words, the present invention provides the following [1] to [9].

[0011] [1] A collet for adsorbing and holding a thin film member, When adsorbing and holding the thin film member, the collet body has an adsorption surface that contacts one of the main surfaces of the thin film member in a planar manner, The adsorption surface includes a flat portion and a recessed portion. The collet body has a suction port that communicates with the recess, The area of ​​the adsorption surface is 50 mm 2 That's all. A collet in which, when the adsorption surface is viewed from above, the diameter dc of the virtual inscribed circle with the largest diameter among the virtual inscribed circles inscribed within the region consisting only of the flat portion is 1.57 to 3.00 mm. [2] The collet according to [1] above, wherein the recess includes a first linear recess and a second linear recess intersecting the first linear recess. [3] The collet according to [2], wherein the recess further includes a peripheral recess formed along a virtual frame surrounding a central intersection where the first and second linear recesses intersect. [4] The collet according to [3] above, wherein the recess includes a first peripheral connection portion in which the peripheral recess is connected to the first linear recess, and a second peripheral connection portion in which the peripheral recess is connected to the second linear recess. [5] The collet according to [3] or [4], wherein the peripheral recess is a continuous annular shape. [6] The collet according to [5], wherein the peripheral recess is a continuous circular shape. [7] The collet according to any one of [2] to [6], wherein the suction port communicates with a central intersection where the first and second linear recesses intersect. [8] The collet according to any one of [1] to [7], wherein when the suction surface is viewed in a plan view, a width of the recess perpendicular to an extending direction of the recess is 0.3 to 2.0 mm. [9] A pickup device comprising the collet according to any one of [1] to [8] and a suction device connected to the suction port. Effects of the Invention

[0012] According to the present invention, there are provided a collet that suppresses lifting of a peripheral edge portion of a thin film member that is an object to be held, and reliably sucks and holds the thin film member, and a pickup device using the same. Brief Description of the Drawings

[0013] [Figure 1] It is a perspective side view showing an example of the overall configuration of a collet. [Figure 2] They are a plan view and a cross-sectional view showing a configuration example of a collet. [Figure 3] It is a plan view for explaining the shape of the suction surface of a collet. [Figure 4] It is a plan view showing another configuration example of a collet. [Figure 5] It is a plan view showing another configuration example of a collet. [Figure 6] It is a plan view showing another configuration example of a collet. [Figure 7] It is a plan view showing another configuration example of a collet. [Figure 8] It is a plan view showing another configuration example of a collet. [Figure 9] It is a plan view showing another configuration example of a collet. [Figure 10]This is a plan view showing another example of the collet configuration. [Figure 11] This is a schematic diagram showing the configuration of the pickup device. [Figure 12] This is a plan view showing a comparative example of collets. [Modes for carrying out the invention]

[0014] In this specification, any provision deemed preferable can be selected at will, and any combination of preferred provisions is considered more preferable. In this specification, the notation "XX~YY" means "XX or greater and YY or less". In this specification, the lower and upper limits described in steps for a preferred numerical range (e.g., range of content, etc.) can be combined independently. For example, from the description "preferably 10 to 90, more preferably 30 to 60", the "preferred lower limit (10)" and the "more preferred upper limit (60)" can be combined to arrive at "10 to 60". In this specification, diagrams are used in various places to facilitate understanding, but the present invention is not limited to what is shown in the diagrams. Also, each diagram is a schematic diagram and is shown with exaggerated dimensions compared to the actual dimensions for ease of understanding. Unless otherwise specified, the upper surface of each cross-sectional view is referred to as the "top surface" and the lower surface of each cross-sectional view is referred to as the "bottom surface". In this specification, in Figure 1 described later, the left-right direction may be referred to as the x-direction, the direction perpendicular to the plane of the paper as the y-direction, and the up-down direction as the z-direction. The following describes collets and pickup devices according to one or more embodiments of the present invention (hereinafter sometimes referred to as "these embodiments").

[0015] 1. Colette The collet according to an embodiment of the present invention is a collet for adsorbing and holding a thin film member, and has a collet body having an adsorption surface that contacts one main surface of the thin film member in a planar manner when adsorbing and holding the thin film member, the adsorption surface includes a flat portion and a recess, and the collet body has a suction port that communicates with the recess, and the area of ​​the adsorption surface is 50 mm² 2 In addition, when the adsorption surface is viewed from above, within the region composed only of the flat portion, the diameter dc of the inscribed circle with the largest diameter among the virtual inscribed circles inscribed at the outer edge of the region is 1.57 to 3.00 mm. Note that the "area of ​​the adsorption surface" above refers to the area when the adsorption surface is viewed from above.

[0016] According to our investigations, when using a collet with a flat suction surface without protrusions and a recess communicating with a suction port, and bringing the flat portion of the collet into contact with the object to be held for suction and holding, there are no particular problems with suction and holding for thick semiconductor chips or small-area semiconductor chips, but the area is 50 mm 2 In summary, it has been found that when thin film components, such as semiconductor chips with a thickness of 50 μm or less, are adsorbed and held, the peripheral edges of the thin film components tend to lift away from the adsorption surface. This is thought to be due in part to the fact that the thin film component is strongly attracted to the recesses by adsorption, but insufficient suction force acts on the peripheral edges of the thin film component (particularly the peripheral edges of the flat region formed between a pair of intersecting linear recesses when such a pair is provided on the adsorption surface), resulting in poor adhesion between the adsorption surface and the thin film component.

[0017] In the collet according to the embodiment of the present invention, the area of ​​the adsorption surface is 50 mm 2As described above, by further setting the diameter dc of the largest inscribed circle among virtual inscribed circles inscribed to the outer edge of the region within the region formed only by the flat portion when the suction surface is viewed in a plan view to be 1.57 to 3.00 mm, the suction surface has a sufficiently large area relative to the area of the object to be held, and an excessively large flat portion is prevented from existing in the suction surface. It is considered that this allows the suction force generated by reduced pressure to act uniformly over the entire suction surface, suppresses floating of the peripheral edge of the thin film member that is the object to be held, and reliably sucks and holds the thin film member. Hereinafter, among virtual inscribed circles inscribed to the outer edge of the region within the region formed only by the flat portion when the suction surface S1 is viewed in a plan view, the inscribed circle having the largest diameter may be simply referred to as the "maximum inscribed circle".

[0018] Note that the type and shape of the object to be held by the collet according to the embodiment of the present invention are not particularly limited as long as it is a component or member to be picked up by suction in the manufacture of electronic components and electronic devices. The collet according to the embodiment of the present invention can reliably hold thin film members such as thin chip components, which are difficult to pick up while suppressing floating of the peripheral edge with conventional collets, while suppressing floating of the peripheral edge. Here, the thin film member has a main surface area of 50 mm 2 or more, preferably 50 mm 2 or more and 400 mm 2 or less, more preferably 50 mm 2 or more and 100 mm 2 or less, and has a thickness of 50 μm or less, preferably 5 μm or more and 30 μm or less, more preferably 10 μm or more and 20 μm or less. Note that the collet according to the embodiment of the present invention has excellent holding force not only for the above thin film members but also for thick chip components, so it can be suitably used regardless of the thickness of the object to be held.

[0019] The thin film member is made of materials such as silicon wafer, glass substrate, quartz substrate, and metal, and is, for example, a semiconductor chip, an insulating material, or a sealing material.

[0020] The surface area of ​​the suction surface of the above collet is 50 mm². 2 From the viewpoint of properly holding thin film members having the above area, 50 mm is preferable. 2 400mm or more 2 More preferably 50mm 2 More than 250mm 2 More preferably 50 mm 2 90mm or more 2 More preferably 50 mm 2 70mm or more 2 The following applies:

[0021] On the adsorption surface of the collet, the diameter dc of the maximum inscribed circle is 1.57 to 3.00 mm. From the viewpoint of making it easier to suppress lifting of the thin film member from the adsorption surface at the periphery of the thin film member and making it easier to prevent deformation and damage of the thin film member, the diameter dc is preferably 1.65 to 2.50 mm, more preferably 1.73 to 2.00 mm, and even more preferably 1.80 to 1.95 mm.

[0022] 1-1. Example of Colette Configuration The following describes an example of a collet configuration based on the diagram. Figure 1 shows a specific example of a collet according to an embodiment of the present invention. The collet 100 shown in Figure 1 has a collet body 10 with an adsorption surface S1. A recess 10b is provided on the lower surface of the collet body 10, facing the adsorption surface S1. In addition, a suction port 10a communicating with the recess 10b is provided inside the collet body 10. An adapter 20 having a through hole 20a communicating with the suction port 10a is attached to the upper surface of the collet body 10. The collet 100 is connected to a suction device via the adapter 20, and when the suction device draws in air, the adsorption surface S1 approaches the thin film member, the pressure inside the suction port 10a and recess 10b is reduced, and the thin film member is adsorbed and held to the suction surface S1. Then, by stopping the suction or reversing the airflow and discharging air from the suction port 10a, the thin film member is released from the adsorption surface S1.

[0023] Next, an example of the configuration of the suction surface S1 formed on the lower surface of the collet body 10 will be explained with reference to a diagram.

[0024] Figure 2 is a plan view and a cross-sectional view of a collet 100A according to one embodiment of the present invention. More specifically, Figure 2(a) is a plan view of the bottom side of the collet 100A, Figure 2(b) is a cross-sectional view along the line IB-IB' in Figure 2(a), and Figure 2(c) is a cross-sectional view along the line IC-IC' in Figure 2(a). As shown in Figures 2(a) to 2(c), the suction surface S1 of the collet 100A has a pair of linear recesses 10b1 and 10b2 that intersect each other to form an X-shaped recess, and an annular recess 10c that serves as a peripheral recess, surrounding the central intersection X0, which is the intersection of the first linear recess 10b1 and the second linear recess 10b2. A suction port 10a is provided that communicates with the central intersection X0 and extends in the z direction. The area on the suction surface S1 other than the first linear recess 10b1, the second linear recess 10b2, and the annular recess 10c is a flat area PL that is in planar contact with one main surface of the thin film member that is to be held. Hereinafter, the entire area consisting only of recesses may be collectively referred to as the "recess RC".

[0025] Figure 3 is a plan view illustrating the configuration of the suction surface S1 of the collet body 10. As shown in Figure 3, the adsorption surface S1 includes a first linear recess 10b1, a second linear recess 10b2, and an annular recess 10c, with the remaining area being a flat portion PL. For ease of understanding, in Figure 3, the flat area PL, which is the region on the adsorption surface S1 other than the recess, is shaded. This also applies to Figures 4-10 and 12, which will be discussed later.

[0026] As shown in Figure 3, the adsorption surface S1 is square when viewed from above, and its length in the vertical direction (y direction) wa and its length in the horizontal direction (x direction) wb are equal. The area of ​​the adsorption surface S1 is 50 mm². 2 That's all. The first linear recess 10b1 extends from one of the four corners of the suction surface S1 toward the diagonally opposite corner. The second linear recess 10b2 is formed on a straight line connecting the remaining two corners and extends perpendicularly to the first linear recess 10b1. The first linear recess 10b1 and the second linear recess 10b2 intersect at the center of the suction surface S1. A suction port 10a is formed to communicate with the central intersection X0, which is the intersection of the first linear recess 10b1 and the second linear recess 10b2.

[0027] The annular recess 10c is formed to surround the central intersection X0 and intersects with the first linear recess 10b1 at a position between one end of the first linear recess 10b1 and the central intersection X0 (peripheral connection Y1), and at a position between the other end of the first linear recess 10b1 and the central intersection X0 (peripheral connection Y3). Furthermore, the annular recess 10c intersects with the second linear recess 10b2 at a position between one end of the second linear recess 10b2 and the central intersection X0 (peripheral connection Y2), and at a position between the other end of the second linear recess 10b2 and the central intersection X0 (peripheral connection Y4). In this specification, the term "connection part" is used to refer collectively to shapes in which two linear recesses intersect (for example, the central connection part X0 and peripheral connection parts Y1-Y4 shown in Figure 3), and shapes in which one linear recess connects to another linear recess without intersecting (for example, the peripheral connection parts Y1-Y4 shown in Figure 7 and peripheral connection parts Y5-Y8 shown in Figure 10, which will be described later). The collet 100A has a total of five connection parts.

[0028] In the collet 100A, both ends of the first linear recess 10b1 and both ends of the second linear recess 10b2 are rounded when viewed from above. The shape of the ends of each linear recess 10b1 and 10b2 is not limited to this, and may be a straight line perpendicular to the direction of extension of the linear recess, or a polygon. In the case of a polygon, it is preferable that the angle between the two sides constituting the corner of the polygon is 90° or more, and more preferably 90° or more and less than 180°.

[0029] In collet 100A, the width w1 of the first linear recess 10b1 in the direction perpendicular to its extension direction, the width w2 of the second linear recess 10b2 in the direction perpendicular to its extension direction, and the width w3 of the annular recess 10c in the direction perpendicular to its extension direction are all equal. In the following, the width of a recess in the direction perpendicular to its longitudinal direction (extension direction) may be abbreviated as "width of the recess." For example, the width w1 described above may be referred to as "width w1 of the first linear recess 10b1."

[0030] The recess RC of collet 100A has a shape symmetrical with respect to the center line along the extending direction of the first linear recess 10b1, and also symmetrical with respect to the center line along the extending direction of the second linear recess 10b2. Therefore, in collet 100A, the largest inscribed circle exists with the same outer diameter in four regions of the flat portion PL, enclosed by the two linear recesses 10b1 and 10b2 that constitute the X-shaped recess and the annular recess 10c. In Figure 3, the maximum inscribed circle is shown by a dashed line in each of the following regions: (1) the region enclosed by the first linear recess 10b1 including the peripheral connection part Y1, the second linear recess 10b2 including the peripheral connection part Y2, and the annular recess 10c; (2) the region enclosed by the second linear recess 10b2 including the peripheral connection part Y2, the first linear recess 10b1 including the peripheral connection part Y3, and the annular recess 10c; (3) the region enclosed by the first linear recess 10b1 including the peripheral connection part Y3, the second linear recess 10b2 including the peripheral connection part Y4, and the annular recess 10c; and (4) the region enclosed by the second linear recess 10b2 including the peripheral connection part Y4, the first linear recess 10b1 including the peripheral connection part Y1, and the annular recess 10c. Here, the diameter dc of the maximum inscribed circle is between 1.57 and 3.00 mm. In the following diagrams, the largest inscribed circle is shown with a dashed line. Due to the symmetry of the structure of the adsorption surface S1, if the distance from the outer edge of the adsorption surface S1 to each recess, or the width of each recess, is common across multiple locations, dimensions and symbols are shown only at representative locations to avoid complicating the diagram. Dimensions g1 to g3 in Figure 3 will be explained later.

[0031] Figure 4 is a plan view showing another example of a collet. The collet 100B shown in Figure 4 has an X-shaped recess composed of two linear recesses 10b1 and 10b2, similar to the collet 100A described above, and a cross-shaped recess composed of two linear recesses 10b3 and 10b4 that overlap at a position corresponding to when the X-shaped recess is rotated by 45°. The area of ​​the suction surface S1 other than the X-shaped recess and the cross-shaped recess is the flat portion PL. The intersection of the linear recesses 10b1 and 10b2 and the intersection of the linear recesses 10b3 and 10b4 coincide at the central intersection X0. The connection point in collet 100B is at the central intersection X0. The recesses RC of the collet 100B are all symmetrical in shape with respect to the respective centerlines along the extension direction of each linear recess 10b1 to 10b4. Therefore, in the collet 100B, the maximum inscribed circle exists in eight regions within the flat portion PL, enclosed by one of the two linear recesses 10b3 and 10b4 that constitute the cross-shaped recess, one of the two linear recesses 10b1 and 10b2 that constitute the X-shaped recess, and the outer edge of the suction surface S1. The diameter dc of the maximum inscribed circle is 1.57 to 3.00 mm. The width w4 of the first linear recess 10b3 and the width w5 of the second linear recess 10b4 that constitute the cross-shaped recess are the same as the widths w1 to w3 described above. The dimension g4 in Figure 4 will be described later. The other configurations are the same as those described for collets 100 and 100A, so a detailed explanation will be omitted.

[0032] Figure 5 is a plan view showing another example of a collet. The collet 100C shown in Figure 5 has an X-shaped recess composed of two linear recesses 10b1 and 10b2, similar to the collet 100A described above, and a regular octagonal annular recess 10c as a peripheral recess. The area of ​​the suction surface S1 other than the linear recesses 10b1 and 10b2 and the annular recess 10c is the flat portion PL. The regular octagonal annular recess 10c is formed to surround the central intersection X0 and intersects with the first linear recess 10b1 at a position between one end of the first linear recess 10b1 and the central intersection X0 (peripheral connection Y1), and at a position between the other end of the first linear recess 10b1 and the central intersection X0 (peripheral connection Y3). Furthermore, the regular octagonal annular recess 10c intersects with the second linear recess 10b2 at a position between one end of the second linear recess 10b2 and the central intersection X0 (peripheral connection Y2), and at a position between the other end of the second linear recess 10b2 and the central intersection X0 (peripheral connection Y4). In other words, the collet 100C has a total of five connection points. The recess RC of the collet 100C is symmetrical with respect to the center line of the first linear recess 10b1 and the center line of the second linear recess 10b2. On the flat portion PL of the suction surface S1 of the collet 100C, the maximum inscribed circle exists with the same outer diameter in four regions enclosed by the two linear recesses 10b1 and 10b2 that constitute the X-shaped recess and the regular octagonal annular recess 10c. The diameter dc of the maximum inscribed circle is 1.57 to 3.00 mm. The width w6 of the regular octagonal annular recess 10c is the same as the widths w1 to w3 described above. The dimension g2 in Figure 5 will be explained later. The other configurations are the same as those described for collets 100 and 100A, so a detailed explanation will be omitted.

[0033] Figure 6 is a plan view showing another example of a collet. The collet 100D shown in Figure 6 has an X-shaped recess composed of two linear recesses 10b1 and 10b2, similar to the collet 100A described above, and four discontinuous arc-shaped peripheral recesses 10c1, 10c2, 10c3, and 10c4 that extend along a virtual circle surrounding the central intersection X0. The area of ​​the suction surface S1 other than the linear recesses 10b1 and 10b2 and the peripheral recesses 10c1 to 10c4 is the flat area PL. The arc-shaped peripheral recesses 10c1 to 10c4 each intersect with two linear recesses 10b1 and 10b2 that form an X-shaped recess at their central positions, forming peripheral connection sections Y1 to Y4. In other words, the collet 100D has a total of five connection sections. The recess RC of the collet 100D is symmetrical with respect to the center line of the first linear recess 10b1 and the center line of the second linear recess 10b2. In the flat portion PL of the suction surface S1 of the collet 100D, the maximum inscribed circle exists with the same outer diameter in four regions enclosed by the two linear recesses 10b1 and 10b2 that constitute the X-shaped recess, and a pair of adjacent arc-shaped peripheral recesses (10c1 and 10c2, 10c2 and 10c3, 10c3 and 10c4, or 10c4 and 10c1) that intersect the two linear recesses 10b1 and 10b2. The diameter dc of the maximum inscribed circle is 1.57 to 3.00 mm. The width (symbol omitted) of the arc-shaped peripheral recesses 10c1 to 10c4 is the same as the width w3 described above. The other configurations are the same as those described for collets 100 and 100A, so a detailed explanation will be omitted.

[0034] Figure 7 is a plan view showing another example of a collet. The collet 100E shown in Figure 7, like the collet 100D described above, has an X-shaped recess composed of two linear recesses 10b1 and 10b2, and four discontinuous arc-shaped peripheral recesses 10c1 to 10c4 that extend along a virtual circle surrounding the central intersection X0. However, the positions of the peripheral recesses 10c1 to 10c4 differ from those of collet 100D, as one end of each peripheral recess 10c1 to 10c4 connects to either the linear recess 10b1 or 10b2 that constitutes the X-shaped recess without protruding. These connection points are peripheral connection points Y1 to Y4. In other words, collet 100E has a total of five connection points. Furthermore, discontinuities are formed between the other ends of the peripheral recesses 10c1 to 10c4 and the adjacent linear recesses 10b1 or 10b2. The flat portion PL of the adsorption surface S1 is the area other than the linear recesses 10b1 and 10b2 and the peripheral recesses 10c1 to 10c4. In the flat portion PL of the suction surface S1 of the collet 100E, the maximum inscribed circle exists with the same outer diameter in four regions enclosed by two linear recesses 10b1 and 10b2 that constitute the X-shaped recess, and one of the arc-shaped peripheral recesses 10c1 to 10c4 that are connected to one of these linear recesses. The diameter dc of the maximum inscribed circle is 1.57 to 3.00 mm. The width (symbol omitted) of the arc-shaped peripheral recesses 10c1 to 10c4 is the same as the width w3 described above. The other configurations are the same as those described for collets 100 and 100A, so a detailed explanation will be omitted.

[0035] Figure 8 is a plan view showing another example of a collet. The collet 100F shown in Figure 8 has an X-shaped recess composed of two linear recesses 10b1 and 10b2, similar to the collet 100A described above, and four linear peripheral recesses 10c1 to 10c4 that intersect the two linear recesses 10b1 or 10b2 that make up the X-shaped recess. Peripheral connection parts Y1 to Y4 are formed by the intersection of these peripheral recesses and linear recesses. In other words, the collet 100F has a total of five connection parts. The area of ​​the suction surface S1 other than the linear recesses 10b1 and 10b2 and the peripheral recesses 10c1 to 10c4 is the flat part PL. In the flat portion PL of the suction surface S1 of the collet 100F, the maximum inscribed circle exists with the same outer diameter in four regions enclosed by two linear recesses 10b1 and 10b2 that constitute the X-shaped recess, and a pair of adjacent peripheral recesses (10c1 and 10c2, 10c2 and 10c3, 10c3 and 10c4, or 10c4 and 10c1) that intersect these linear recesses. The diameter dc of the maximum inscribed circle is 1.57 to 3.00 mm. The width w7 of the surrounding recesses 10c1 to 10c4 is the same as the widths w1 to w3 described above. The other configurations are the same as those described for collets 100 and 100A, so a detailed explanation will be omitted.

[0036] Figure 9 is a plan view showing another example of a collet. The collet 100G shown in Figure 9, like the collet 100F described above, has an X-shaped recess composed of two linear recesses 10b1 and 10b2, and linear peripheral recesses that intersect the two linear recesses 10b1 and 10b2 that make up the X-shaped recess. However, unlike the collet 100F, the peripheral recesses are arranged in multiple layers along the extending direction of the linear recesses 10b1 and 10b2, and have outer peripheral recesses 10c1 to 10c4 closer to the outer edge of the suction surface, and inner peripheral recesses 10d1 to 10d4 further inside. The outer peripheral recesses 10c1 to 10c4 and the linear recesses 10b1 and 10b2 intersect to form peripheral connection sections Y1 to Y4, and the inner peripheral recesses 10d1 to 10d4 and the linear recesses 10b1 and 10b2 intersect to form peripheral connection sections Y5 to Y8. In other words, the Colette 100G has a total of nine connection points. The flat portion PL is the area of ​​the adsorption surface S1 other than the linear recesses 10b1 and 10b2, the outer peripheral recesses 10c1 to 10c4, and the inner peripheral recesses 10d1 to 10d4. On the flat portion PL of the suction surface S1 of collet 100G, the maximum inscribed circle exists with the same outer diameter in four regions enclosed by a pair of adjacent outer peripheral recesses (10c1 and 10c2, 10c2 and 10c3, 10c3 and 10c4, or 10c4 and 10c1) and a pair of adjacent inner peripheral recesses (10d1 and 10d2, 10d2 and 10d3, 10d3 and 10d4, or 10d4 and 10d1). The diameter dc of the maximum inscribed circle is 1.57 to 3.00 mm. The widths of the peripheral recesses 10c1 to 10c4 and the widths of the peripheral recesses 10d1 to 10d4 (all with their reference numerals omitted) are the same as the widths w1 to w3 described above. The other configurations are the same as those described for collets 100 and 100A, so a detailed explanation will be omitted.

[0037] Figure 10 is a plan view showing another example of a collet. The collet 100H shown in Figure 10 has a rectangular adsorption surface S1 when viewed from above. That is, in collet 100H, the length wa in the vertical direction and the length wb in the horizontal direction of the adsorption surface S1 are in the relationship wa > wb. The aspect ratio (wa / wb) of the adsorption surface S1 is set, for example, according to the size of the thin film member to be held. The adsorption surface S1 has an X-shaped recess composed of two linear recesses 10b1 and 10b2, and an elliptical outer annular recess 10c surrounding the central intersection X0 as a peripheral recess. Furthermore, in the region where the angle between the two linear recesses 10b1 and 10b2 that constitute the X-shaped recess is acute, inner peripheral recesses 10d1 and 10d2 are provided in the shape of an elliptical arc that surrounds the central intersection X0 and follows a virtual ellipse with a smaller diameter than the elliptical outer annular recess 10c. One end of the inner peripheral recesses 10d1 and 10d2 is connected to the first linear recess 10b1, and the other end is connected to the second linear recess 10b2. The outer annular recess 10c and the linear recesses 10b1 and 10b2 intersect to form peripheral connection sections Y1 to Y4, and the inner peripheral recesses 10d1 and 10d2 and the linear recesses 10b1 and 10b2 intersect to form peripheral connection sections Y5 to Y8. In other words, the collet 100H has a total of nine connection points. The flat portion PL is the area of ​​the adsorption surface S1 other than the linear recesses 10b1 and 10b2, the outer annular recess 10c, and the inner peripheral recesses 10d1 and 10d2. The recess RC of the collet 100H is symmetrical with respect to a straight line parallel to the long side of the suction surface passing through the center of the suction surface S1, and also symmetrical with respect to a straight line parallel to the short side of the suction surface passing through the center of the suction surface S1. Therefore, in the flat portion PL of the suction surface S1, the maximum inscribed circle exists with the same outer diameter in two regions within the area enclosed by the two linear recesses 10b1 and 10b2 and the outer annular recess 10c, where the angle between the two linear recesses 10b1 and 10b2 constituting the X-shaped recess is obtuse. The diameter dc of the maximum inscribed circle is 1.57 to 3.00 mm. The widths of the first linear recess 10b1, the second linear recess 10b2, the outer annular recess 10c, and the inner peripheral recesses 10d1 and 10d2 (all without reference numerals) are the same as the widths w1 to w3 described above. The other configurations are the same as those described for collets 100 and 100A, so a detailed explanation will be omitted.

[0038] As described above for collets 100A to 100H, it is preferable that the recess includes a first linear recess and a second linear recess intersecting the first linear recess. Having two intersecting linear recesses makes it easier to apply the adsorption force to the edges of the thin film member. When the adsorption surface is rectangular, the linear recess is preferably such that it extends from one corner to the diagonally opposite corner, as in the collets 100A to 100H described above. In this case, it becomes easier to apply the adsorption force to the edges of the thin film member.

[0039] Furthermore, as described above with collets 100A, 100C to 100H, it is preferable that the recess further includes a peripheral recess formed along a virtual frame surrounding the central intersection where the first and second linear recesses intersect. Having a peripheral recess in addition to two intersecting linear recesses makes it easier to apply an adsorption force throughout the entire thin film member.

[0040] Furthermore, as described above for collets 100A, 100C to 100H, it is preferable that the recess includes a first peripheral connection portion in which the peripheral recess connects to the first linear recess, and a second peripheral connection portion in which the peripheral recess connects to the second linear recess. The presence of peripheral recesses connected to two intersecting linear recesses prevents the area of ​​the flat portion on the adsorption surface from becoming too large, and makes it easier to distribute the depressurized space within the adsorption surface.

[0041] Furthermore, as with the collets 100A, 100C, and 100H described above, the peripheral recesses may be continuous and annular. If the peripheral recesses are continuous and annular, it becomes easier to improve the uniformity of the suction force acting on the thin film member within the adsorption surface.

[0042] As with the collets 100A and 100H described above, the peripheral recess may be in a continuous circular shape. Having a continuous circular shape for the peripheral recess allows it to be located closer to the periphery of the thin film member, making it easier to apply an attractive force to the periphery of the thin film member.

[0043] Furthermore, as with the collet 100C mentioned above, the peripheral recesses may be a continuous annular polygon. Having a continuous polygonal shape for the peripheral recesses makes it easier to lengthen the recesses located near the periphery other than the corners of the suction surface. When the annular recesses are made into a continuous polygon, they are not limited to octagons, but may be a continuous annular polygon of octagons or more, such as a nonagon, decagon, eleven-sided polygon, or dodecagon, or a continuous annular polygon of pentagon, hexagon, or heptagon.

[0044] Furthermore, as shown in collets 100D and 100E above, the peripheral recess along the virtual annular frame may be discontinuous. The annular recess may also be discontinuous if it has a polygonal shape, as shown in collet 100C. The presence of discontinuities makes it easier to ensure the flatness of the thin film member through the discontinuity and the flat areas surrounding it.

[0045] Furthermore, by forming the recess with only straight recesses, as in the collet 100B mentioned above, or by forming both the X-shaped recess and the surrounding recess with only straight recesses, as in the collets 100F and 100G, it becomes easier to improve the machining accuracy when manufacturing collets.

[0046] Furthermore, as with the collet 100G described above, by forming multiple peripheral recesses in the direction of extension of the linear recesses that constitute the X-shaped recess, the area of ​​the thin film member facing the reduced pressure space increases, making it easier to adsorb and hold the thin film member with a more uniform suction force.

[0047] Furthermore, if the length of the adsorption surface differs in the vertical and horizontal directions, as in the collet 100H described above, by making the linear recess and surrounding recess elongated in the longitudinal direction to match the shape of the adsorption surface, it is possible to ensure the adsorption and retention of the thin film member while suppressing the occurrence of lifting at the periphery of the thin film member. Furthermore, if the diameter dc of the maximum inscribed circle becomes too large due to differences in the length and width of the adsorption surface, it is desirable to provide an inner peripheral recess, as in the collet 100H described above, to avoid this problem. In the collet 100H, the outer annular recess 10c may be a polygonal recess, or the outer annular recess 10c may be discontinuous.

[0048] In the collets according to the embodiment of the present invention, it is preferable that the suction port communicates with the central intersection where the first and second linear recesses intersect, as in the central intersection X0 of the collets 100A to 100H. When the suction port communicates with the central intersection, it becomes easier to uniformly reduce the pressure throughout the recess, and even if the position of the thin film member and the adsorption surface is misaligned, pickup failures are less likely to occur. Furthermore, as with the collets 100A to 100H described above, it is more preferable that the suction port communicates only with the central intersection where the first and second linear recesses intersect. In this case, the symmetry of the adsorption performance on the adsorption surface is maintained, and the number of suction ports and the suction pressure are reduced to the minimum necessary for adsorption of the thin film member. As a result, the structure of the collet is simplified while maintaining its adsorption performance.

[0049] In a collet according to an embodiment of the present invention, from the viewpoint of ease of manufacturing and suppression of lifting of the peripheral edge of the thin film member, when the adsorption surface is viewed in plan, the width of the recess perpendicular to the extending direction of the recess is preferably 0.3 to 2.0 mm, more preferably 0.4 to 1.5 mm, and even more preferably 0.5 to 1.0 mm. In Figure 3, the width of the first linear recess 10b1 is indicated by the symbol w1, the width of the second linear recess 10b2 is indicated by the symbol w2, and the width of the annular recess 10c is indicated by the symbol w3. In Figure 3, the center line of the annular recess 10c is shown by a dashed line, and the width of the recess in the direction perpendicular to the center line is the width w3. The widths w1 to w3 may be the same or different, but from the viewpoint of ease of manufacture and uniformity of suction force within the suction surface, it is preferable that they be the same. The same applies to the widths of the linear recesses 10b3 and 10b4 of collet 100B shown in Figure 4, the width of the octagonal annular recess 10c of collet 100C shown in Figure 5, the widths of the linear peripheral recesses 10c1 to 10c4 of collet 100F shown in Figure 8, and the widths of the recesses of each collet shown in Figures 6, 7, 9 to 10.

[0050] There are no particular restrictions on the thickness of the collet; however, from the standpoint of appropriate rigidity and ease of handling, it is typically between 1 and 10 mm.

[0051] There are no particular restrictions on the shape of the adsorption surface when viewed from above, and it can be made into various shapes to match the shape of the thin film material to be held. Specific shapes include, for example, squares such as collets 100A to 100G mentioned above, and rectangles such as collet 100H mentioned above, as well as polygons with more corners than a square, such as hexagons and octagons; circular shapes; and elliptical shapes. If the collet's suction surface is square or polygonal, the corners of the collet may be chamfered.

[0052] The material constituting the collet is not particularly limited and can be, for example, natural rubber, synthetic rubber, resin, metal, glass, silicon, or ceramic. In particular, it is preferable that the collet be a rubber-like elastic body with a rubber hardness (JIS-A hardness) of 40° to 90°, such as natural rubber or synthetic rubber. When the collet is a rubber-like elastic body, it is preferable in that it has good absorption of irregularities when the thin film member has irregularities on the main surface to be adsorbed. The material constituting the collet may contain additives such as antistatic agents (conductive components), degradation inhibitors, and softeners as needed. The above rubber hardness (JIS-A hardness) is measured at 25°C using a Type A durometer in accordance with JIS K6253-3 (2012) "Vulcanized rubber and thermoplastic rubber - Method for determining hardness - Part 3: Durometer hardness".

[0053] The value of the adsorption surface length wa (or wb) / diameter dc of the maximum inscribed circle of the flat portion is preferably 3.00 to 6.00, more preferably 3.50 to 5.50, and even more preferably 4.00 to 5.00, from the viewpoint of retaining the thin film member and suppressing lifting of the peripheral edge of the thin film member.

[0054] The value of the area of ​​the adsorption surface / diameter dc of the maximum inscribed circle of the flat portion is preferably 25 to 50, more preferably 30 to 40, and even more preferably 33 to 36, from the viewpoint of retaining the thin film member and suppressing lifting of the peripheral edge of the thin film member.

[0055] The distance of the linear recess from the edge of the adsorption surface S1 (indicated by the symbol g1 in Figure 3) is preferably 0.5 to 2.5 mm, more preferably 0.5 to 2.0 mm, and even more preferably 0.6 to 1.8 mm, from the viewpoint of making it easier to prevent the thin film member from lifting. Furthermore, the distance of the linear recess from the corner of the adsorption surface S1 (indicated by the symbol g3 in Figure 3) is preferably 0.5 to 2.5 mm, more preferably 0.7 to 2.0 mm, and even more preferably 0.8 to 1.8 mm, from the viewpoint of making it easier to prevent the thin film member from lifting.

[0056] The distance of the peripheral recess from the edge of the adsorption surface S1 (indicated by the symbol g2 in Figures 3 and 5) is preferably 0.5 to 2.5 mm, more preferably 0.5 to 2.0 mm, and even more preferably 0.6 to 1.8 mm, from the viewpoint of making it easier to prevent the thin film member from lifting.

[0057] In the collet 100B described above, the distances from the outer edge and corners (all denoted by symbols) of the first linear recess 10b1 and the second linear recess 10b2 that constitute the X-shaped recess are the same as described above. In the collet 100B, the distances from the outer edge of the suction surface S1 (indicated by symbol g4 in Figure 4) of the linear recesses 10b3 and 10b4 that constitute the cross-shaped recess are the same as the distances g1 to g3 described above.

[0058] The wall surfaces constituting each of the recesses described above may be formed perpendicular to the suction surface, or they may be formed with a predetermined incline, or the suction surface side of the recess may be formed perpendicular to the suction surface and the incline may increase as it approaches the bottom of the recess.

[0059] 1-2. Method for manufacturing a collet There are no particular restrictions on the method of manufacturing collets, and various conventionally known manufacturing methods can be used. Examples include injection molding, 3D printing, and machining of bulk collet material. When the material constituting the collet is natural rubber, synthetic rubber, or resin, injection molding is preferred. When the material constituting the collet is metal, glass, silicon, or ceramic, machining is preferred.

[0060] 2. Pickup device A pickup device according to an embodiment of the present invention comprises a collet having any of the above-described configurations, and, if necessary, a suction device connected to the suction port via, for example, the adapter described above. The pickup device adsorbs and holds a thin film member onto the adsorption surface of the collet by performing suction through the suction port of the collet using the suction device, and releases the adsorption of the thin film member by stopping the suction by the adsorption device.

[0061] Figure 11 shows a specific configuration example of a pickup device according to one embodiment of the present invention. The pickup device 200 shown in Figure 11 comprises a collet 100, an adapter 20, an air suction supply device 210, and a moving device 220. The air suction supply device 210 includes a connecting pipe 211 and a cap member 212. The cap member 212 has its tip opening fitted into the adapter 20, forming a sealed space between it and the adapter 20. A through-hole is formed in the wall surface of the cap member 212, which connects to the connecting pipe 211. Therefore, when the air suction supply device 210 is activated and the suction operation is started, suction is performed from the suction port 10a of the collet 100 through the through-hole 20a provided in the connecting pipe 211, the cap member 212, and the adapter 20. As a result, the inside of the suction port 10a and the recess 10b is depressurized, and the thin film member is adsorbed and held on the adsorption surface S1. Furthermore, when separating semiconductor wafers attached to adhesive tape and picking up the resulting semiconductor chips, the adhesive tape may be pushed up from the bottom side with a pin when picking up the semiconductor chips.

[0062] The suction force provided by the air suction supply device 210 is such that, from the viewpoint of reliably holding the thin film member while avoiding irreversible deformation or damage to the thin film member, the pressure in the recess when the thin film member is adsorbed onto the suction surface of the collet is preferably 0.001 to 0.200 MPa, more preferably 0.004 to 0.100 MPa, and even more preferably 0.007 to 0.030 MPa.

[0063] The moving device 220 includes an XY moving mechanism 221 and a Z moving mechanism 222. The XY movement mechanism 221 comprises an arm 223 and a clamp 225 connected to the arm 223. The clamp 225 grips the cap member 212. The XY movement mechanism 221 moves the clamp 225 to any position in the x and y directions by extending and retracting the arm 223. The Z-movement mechanism 222 includes an arm 224 connected to the XY-movement mechanism 221. The Z-movement mechanism 222 moves the XY-movement mechanism 221 to any position in the z-direction by extending or retracting the arm 224. The moving mechanism 200 operates the XY moving mechanism 221 and the Z moving mechanism 222, thereby moving the thin film member adsorbed to the suction surface S1 of the collet 100 to any desired position. Then, when the air suction supply device 210 stops suction or supplies air towards the collet 100, the thin film member detaches from the suction surface. In this way, the thin film member adsorbed and held by the collet 100 is moved to any desired position. [Examples]

[0064] Next, specific embodiments of the present invention will be described, but the present invention is not limited in any way by these examples. The lifting of the peripheral portion of the thin film member for the collets fabricated in the examples and comparative examples described later was performed using the following procedure.

[0065] [Lifting of the peripheral edge of the thin film member] A silicon wafer measuring 8 mm in length, 8 mm in width, and 10 μm in thickness was used as the thin film component to be held. The collets of the examples and comparative examples were mounted on a pickup device, and the thin film component was adsorbed onto the suction surface of the collet by applying suction under conditions where the suction pressure in the recess was 0.01 MPa. In this state, the underside of the thin film component was visually inspected, and images were taken from the side of the collet using a high-speed camera. The distance between the tip furthest from the suction surface and the suction surface was measured to determine the presence and degree of lifting of the peripheral edge of the thin film component.

[0066] Then, tip lift was evaluated according to the following criteria. • Passed: The tip lift is 170 μm or less, and there are no problems in practical use. • Failed: The tip lift exceeds 170 μm, making it unsuitable for practical use.

[0067] [Example 1] A rubber collet with a square-shaped suction surface was fabricated by injection molding a rubber composition (rubber hardness JIS-A 30) obtained by adding 0.1 parts by mass of carbon black to 100 parts by mass of nitrile butadiene rubber (NBR). The suction surface of the collet was flat without protrusions, and had X-shaped and O-shaped recesses formed, corresponding to the shapes shown in Figures 2 and 3. Hereinafter, the recess of Example 1 may be referred to as "XO type". The size of the collet's suction surface was set to 8 mm in both the vertical and horizontal directions. The thickness of the collet perpendicular to the suction surface was set to 3 mm. The width of the recess perpendicular to the direction of extension of the recess was set to 0.8 mm for both the X-shaped recess and the O-shaped annular recess (hereinafter also referred to as the "O-shaped recess"). The length of the straight line forming the X-shaped recess was set to 8.5 mm. The distances g1 and g2 between the outer edge of the suction surface and the straight recess were set to 0.6 mm. The distance g3 between the corner of the suction surface and the straight recess was set to 1 mm. The O-shaped recess was a perfect circle with an outer diameter of 6 mm, positioned so that its center coincided with the center of the suction surface. The diameter dc of the maximum inscribed circle, as described above, was 1.90 mm. The depth of all recesses was uniformly set to 0.3 mm. A suction port with a diameter of 1 mm and a perfectly circular cross-section was formed at the central intersection of the X-shaped recesses.

[0068] [Example 2] A rubber collet with an 8mm x 8mm square suction surface was fabricated by injection molding using the same material as in Example 1. The suction surface was made flat without protrusions, and had an X-shaped recess and a cross-shaped recess formed, corresponding to the shape shown in Figure 4. Hereinafter, the recess in Example 2 may be referred to as the "X-shaped cross type". The shape, length, width, and depth of the X-shaped recess were the same as in Example 1. The length of each straight line forming the cross-shaped recess was set to 6 mm. The distance g4 between the outer edge of the suction surface and the cross-shaped recess was set to 0.6 mm. The width of all recesses perpendicular to the extension direction of the cross-shaped recesses was set to 0.8 mm. The diameter dc of the maximum inscribed circle, as described above, was 1.83 mm. The depth of all the cross-shaped recesses was uniformly set to 0.3 mm. Otherwise, the settings were the same as for the collet in Example 1.

[0069] [Comparative Example 1] A rubber collet with an 8mm x 8mm square suction surface was fabricated by injection molding using the same material as in Example 1. The adsorption surface was flat and free of protrusions. X-shaped recesses 10b1 and 10b2 were formed on the adsorption surface S1, corresponding to the collet 101 shown in Figure 12, and no surrounding recesses were formed. Hereinafter, the recess of Comparative Example 1 may be referred to as "X-type". The shape, length, width, and depth of the X-shaped recess, as well as the shape and diameter of the suction port, were set in the same manner as in the collet of Example 1. The diameter dc of the maximum inscribed circle, as described above, was 3.05 mm.

[0070] Table 1 shows the shape of the adsorption surface, the size of each part, and the measurement and evaluation results for the collets of each example and comparative example.

[0071] [Table 1]

[0072] As shown in Table 1, in the region consisting only of flat parts, the collets of Examples 1 and 2, in which the diameter dc of the virtual inscribed circle with the largest diameter among those inscribed around the outer edge of the region is in the range of 1.57 to 3.00 mm, showed a smaller tip floating value compared to the collet of Comparative Example 1, confirming that the thin film material tip was adsorbed and held well. On the other hand, the collet of Comparative Example 1, whose diameter dc was outside the range of 1.57 to 3.00 mm, showed a large amount of tip lift, which was about twice as large as that of the example. [Explanation of symbols]

[0073] 10: Colette body 10a: Suction port 10b: recess 10b1: First straight recess constituting an X-shaped recess 10b2: Second straight recess forming an X-shaped recess 10b3: First linear recess constituting a cross-shaped recess 10b4: Second linear recess constituting a cross-shaped recess 10c: Annular recess (peripheral recess) 10c1, 10c2, 10c3, 10c4, 10d1, 10d2, 10d3, 10d4: Peripheral recesses X0: Center intersection Y1, Y2, Y3, Y4, Y5, Y6, Y7, Y8: Peripheral connection section 100, 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H: Colette 101: Colette's comparative example 20: Adapter 20a: Through hole 200: Pickup device 210: Air suction supply device 211: Connecting pipe 212: Cap 220: Mobile device 221:XY movement mechanism 222:Z movement mechanism 223, 224: Arm 225: Clamp dc: The diameter of the largest inscribed circle inscribed within the outer edge of a region consisting only of flat areas. g1: Distance between the X-shaped recess and the outer edge of the suction surface g2: Distance between the peripheral recess and the outer edge of the adsorption surface g3: Distance between the X-shaped recess and the corner of the suction surface g4: Distance between the cross-shaped recess and the outer edge of the suction surface S1: Adsorption surface w1, w2, w3, w4, w5: Width of the recess in a direction perpendicular to the extension direction of the recess. wa: Length of the adsorption surface in the vertical direction (y direction) wb: Length of the adsorption surface in the lateral direction (x direction) PL: Flat part

Claims

1. A collet for adsorbing and holding a thin film member, When adsorbing and holding the thin film member, the collet body has an adsorption surface that contacts one of the main surfaces of the thin film member in a planar manner, The adsorption surface includes a flat portion and a recessed portion. The collet body has a suction port that communicates with the recess, The area of ​​the adsorption surface is 50 mm ２ That's all. A collet in which, when the adsorption surface is viewed from above, the diameter dc of the virtual inscribed circle with the largest diameter among the virtual inscribed circles inscribed within the region consisting only of the flat portion is 1.57 to 3.00 mm.

2. The collet according to claim 1, wherein the recess includes a first linear recess and a second linear recess intersecting the first linear recess.

3. The collet according to claim 2, wherein the recess further includes a peripheral recess formed along a virtual frame surrounding the central intersection where the first and second linear recesses intersect.

4. The collet according to claim 3, wherein the recess includes a first peripheral connection portion in which the peripheral recess is connected to the first linear recess, and a second peripheral connection portion in which the peripheral recess is connected to the second linear recess.

5. The collet according to claim 3 or 4, wherein the peripheral recess is a continuous annular shape.

6. The collet according to claim 5, wherein the surrounding recess is in a continuous circular shape.

7. The collet according to claim 2, wherein the suction port communicates with the central intersection where the first and second linear recesses intersect.

8. The collet according to claim 1, wherein, when the adsorption surface is viewed from above, the width of the recess perpendicular to the extending direction of the recess is 0.3 to 2.0 mm.

9. A pickup device comprising a collet according to claim 1 and a suction device connected to the suction port.

Images