Collet and pickup device

Abstract

The present invention provides a collet that suppresses indentation of the thin film member to be held and reliably adsorbs and holds the thin film member, and a pickup device using the same. [Solution] A collet for adsorbing and holding a thin film member, comprising a collet body having an adsorption surface that contacts one main surface of the thin film member in a planar manner when adsorbing and holding the thin film member, the adsorption surface including a flat portion and a recess, the collet body having a suction port communicating with the recess, and the area of ​​the adsorption surface being 50 mm 2 The collet is as described above, wherein, when the adsorption surface is viewed from above, within the region composed only of the recess, the diameter ds of the virtual inscribed circle with the largest diameter among the inscribed circles inscribed around the outer edge of the region is 0.4 to 1.7 mm.

Description

[Technical Field]

[0001] The present invention relates to a collet for adsorbing and holding a thin film member, and a pickup device equipped therewith. [Background technology]

[0002] In the process of picking up semiconductor components such as semiconductor chips, collets are known to be used to adsorb and hold the semiconductor components. As an example of a collet, one is known that has vertical protrusions formed in an annular shape along its periphery, as described in Patent Document 1. In this case, the object to be adsorbed is adsorbed and held in contact with the tip of the protrusion. A collet is also known in which the above-mentioned ridge is sloped so that it becomes thinner as it moves away from the collet. In this case, the object to be adsorbed is adsorbed and held by the collet with its peripheral edge in contact with the sloped surface of the ridge.

[0003] On the other hand, there are also collets that do not have protrusions on the suction surface and hold the object by making a flat portion of the suction surface contact with the main surface of the object to be held in a planar manner. For example, Patent Document 2 describes collets with X-shaped recesses and Y-shaped recesses formed on a flat suction surface without protrusions. [Prior art documents] [Patent Documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2013-33788 [Patent Document 2] Japanese Patent Application Publication No. 11-233592 [Overview of the project] [Problems that the invention aims to solve]

[0005] In recent years, while the surface area of ​​semiconductor products such as semiconductor chips has increased, their thinning has progressed. For example, semiconductor chips with a length of 8 mm, a width of 8 mm, and a thickness of 10 μm are known to be extremely thin relative to their planar size. Therefore, there is a need to reliably pick up such thin-film components without causing deformation or damage.

[0006] However, the collet described in Patent Document 1 has a suction port in the center and a periphery surrounded by protrusions, so when adsorbing and holding a thin film member, there are few points of physical contact between the collet and the thin film member. For this reason, when disturbances such as vibration occur, the thin film member may detach, causing a pickup failure. In addition, because the thin film member is thin, the central part of the thin film member may become indented due to suction, which can lead to deformation and damage of the thin film member.

[0007] Furthermore, the first collet described in Patent Document 2 has five suction ports that communicate with the intersection of the two linear recesses that make up the X-shaped recess and with the four ends of the X-shaped recess, and the second collet described in Patent Document 2 has suction ports that communicate with the three ends of the Y-shaped recess. As a result, when adsorbing and holding a thin film member with these collets, there is a risk of pickup failure if the suction pressure of the total of five or total of three suction ports becomes uneven, and there is a problem in that it is difficult to control the pressure.

[0008] Thus, with conventionally proposed collets, when picking up the thin film member, there is a risk of indentation occurring in the part of the thin film member facing the reduced pressure space, failure to pick up the thin film member, or deformation or damage to the thin film member, and improvements were needed.

[0009] In view of the above problems, the present invention aims to provide a collet that suppresses indentation of a thin film member, which is the object to be held, and reliably adsorbs and holds the thin film member, and a pickup device using the same. [Means for solving the problem]

[0010] The inventors of the present invention conducted extensive research to solve the above problems and found that the above problems can be solved by setting the area of ​​the adsorption surface to a predetermined level and the area of ​​the recesses on the adsorption surface to a predetermined range, thereby completing the present invention. In other words, the present invention provides the following [1] to [9].

[0011] [1] A collet for adsorbing and holding a thin film member, The collet body has an adsorption surface that contacts one of the main surfaces of the thin film member in a planar manner when adsorbing and holding the thin film member, The adsorption surface includes a flat portion and a recessed portion. The collet body has a suction port that communicates with the recess, The area of ​​the adsorption surface is 50 mm 2 That's all. A collet in which, when the adsorption surface is viewed from above, the diameter ds of the virtual inscribed circle with the largest diameter among the virtual inscribed circles inscribed within the region consisting only of the recess is 0.4 to 1.7 mm. [2] The collet according to [1] above, wherein the recess includes a first linear recess and a second linear recess intersecting the first linear recess. [3] The collet according to [2], wherein the recess further includes a peripheral recess formed along a virtual frame surrounding a central intersection where the first and second linear recesses intersect. [4] The collet according to [3] above, wherein the recess includes a first peripheral connection portion in which the peripheral recess is connected to the first linear recess, and a second peripheral connection portion in which the peripheral recess is connected to the second linear recess. [5] The collet according to [3] or [4] above, wherein the peripheral recess is a continuous annular shape. [6] The collet according to [5] above, wherein the peripheral recess is in a continuous circular shape. [7] The collet according to any one of [2] to [6] above, wherein the suction port communicates with the central intersection where the first and second linear recesses intersect. [8] The collet according to any one of the above [1] to [7], wherein a width of the recessed portion orthogonal to an extending direction of the recessed portion is 0.3 to 2.0 mm when the suction surface is viewed in a plan view. [9] A pickup device comprising the collet according to any one of the above [1] to [8], and a suction device connected to the suction port. Advantageous Effects of Invention

[0012] According to the present invention, there are provided a collet that suppresses sinking of a thin film member that is an object to be held, and reliably sucks and holds the thin film member, and a pickup device using the same. Brief Description of Drawings

[0013] [Figure 1] It is a see-through side view showing an example of the overall configuration of a collet. [Figure 2] They are a plan view and a cross-sectional view showing a configuration example of a collet. [Figure 3] It is a plan view for explaining the shape of the suction surface of a collet. [Figure 4] It is a plan view showing another configuration example of a collet. [Figure 5] It is a plan view showing another configuration example of a collet. [Figure 6] It is a plan view showing another configuration example of a collet. [Figure 7] It is a plan view showing another configuration example of a collet. [Figure 8] It is a plan view showing another configuration example of a collet. [Figure 9] It is a plan view showing another configuration example of a collet. [Figure 10] It is a plan view showing another configuration example of a collet. [Figure 11] It is a schematic diagram showing a configuration of a pickup device. [Figure 12] It is a plan view showing a comparative example of a collet. Mode for Carrying Out the Invention

[0014] In this specification, any provision deemed preferable can be selected at will, and any combination of preferred provisions is considered more preferable. In this specification, the notation "XX~YY" means "XX or greater and YY or less". In this specification, the lower and upper limits described in steps for a preferred numerical range (e.g., range of content, etc.) can be combined independently. For example, from the description "preferably 10 to 90, more preferably 30 to 60", the "preferred lower limit (10)" and the "more preferred upper limit (60)" can be combined to arrive at "10 to 60". In this specification, diagrams are used in various places to facilitate understanding, but the present invention is not limited to what is shown in the diagrams. Also, each diagram is a schematic diagram and is shown with exaggerated dimensions compared to the actual dimensions for ease of understanding. Unless otherwise specified, the upper surface of each cross-sectional view is referred to as the "top surface" and the lower surface of each cross-sectional view is referred to as the "bottom surface". In this specification, in Figure 1 described later, the left-right direction may be referred to as the x-direction, the direction perpendicular to the plane of the paper as the y-direction, and the up-down direction as the z-direction. The following describes collets and pickup devices according to one or more embodiments of the present invention (hereinafter sometimes referred to as "these embodiments").

[0015] 1. Colette The collet according to an embodiment of the present invention is a collet for adsorbing and holding a thin film member, and has a collet body having an adsorption surface that contacts one main surface of the thin film member in a planar manner when adsorbing and holding the thin film member, the adsorption surface includes a flat portion and a recess, and the collet body has a suction port that communicates with the recess, and the area of ​​the adsorption surface is 50 mm² 2 In addition, when the adsorption surface is viewed from above, within the region composed only of the recess, the diameter ds of the inscribed circle with the largest diameter among the virtual inscribed circles inscribed at the outer edge of the region is 0.4 to 1.7 mm. Note that the "area of ​​the adsorption surface" refers to the area when the adsorption surface is viewed from above.

[0016] According to our investigations, when using a collet with a flat suction surface without protrusions and a recess communicating with a suction port, and bringing the flat portion of the collet into contact with the object to be held for suction and holding, there are no particular problems with suction and holding for thick semiconductor chips or small-area semiconductor chips, but the area is 50 mm 2 In summary, it was found that when thin film components such as semiconductor chips with a thickness of 50 μm or less are adsorbed and held, the portion of the thin film component facing the reduced pressure space collapses. This is thought to be partly due to the fact that when the thin film component is strongly attracted to the recess by adsorption, if the opening diameter of the recess is large, a load is placed on a wide area of ​​the thin film component, resulting in increased deflection of the thin film component.

[0017] In the collet according to the embodiment of the present invention, the area of ​​the adsorption surface is 50 mm 2 Furthermore, when viewing the adsorption surface from above, within the region composed solely of the recess, by setting the diameter ds of the inscribed circle with the largest diameter among the virtual inscribed circles inscribed around the outer edge of the region to 0.4 to 1.7 mm, it is believed that the necessary adsorption force for holding the object to be held is secured while avoiding excessive load on the thin film member that is to be held, thereby suppressing indentation of the thin film member and reliably adsorbing and holding the thin film member. In the following, when the adsorption surface S1 is viewed from above, the inscribed circle with the largest diameter among the virtual inscribed circles that are inscribed within the outer edge of the region, which is composed only of recesses, may be simply referred to as the "largest inscribed circle."

[0018] Furthermore, the object to be held by the collet according to the embodiment of the present invention is not limited in type or shape, as long as it is a part or component that should be picked up by suction in the manufacturing of electronic components and electronic devices. The collet according to the embodiment of the present invention can reliably hold thin film members, such as thin chip components, which were difficult to pick up with conventional collets without causing indentation, deformation, and damage, while suppressing indentation, deformation, and damage. Here, the thin film member has a main surface area of ​​50 mm². 2 Preferably 50 mm 2400 mm or more 2 below, more preferably 50 mm 2 or more and 100 mm 2 or less, and has a thickness of 50 µm or less, preferably 5 µm or more and 30 µm or less, more preferably 10 µm or more and 20 µm or less. Note that the collet according to the embodiment of the present invention has excellent holding force not only for the aforementioned thin film member but also for thick chip components, and therefore can be suitably used regardless of the thickness of the object to be held.

[0019] The aforementioned thin film member is made of materials such as silicon wafers, glass substrates, quartz substrates, and metals, and is, for example, a semiconductor chip, an insulating material, or a sealing material.

[0020] The area of the suction surface of the aforementioned collet is 50 mm 2 From the viewpoint of satisfactorily holding a thin film member having the above area, it is preferably 50 mm 2 or more and 400 mm 2 or less, more preferably 50 mm 2 or more and 250 mm 2 or less, still more preferably 50 mm 2 or more and 90 mm 2 or less, even more preferably 50 mm 2 or more and 70 mm 2 or less.

[0021] On the suction surface of the aforementioned collet, the diameter ds of the aforementioned maximum inscribed circle is 1.4 to 1.7 mm. From the viewpoints of more easily securing suction force and more easily avoiding depression of the thin film member, the diameter ds is preferably 0.7 to 1.5 mm, more preferably 0.9 to 1.4 mm, and still more preferably 1.1 to 1.3 mm.

[0022] 1-1. Configuration Example of Collet Hereinafter, a configuration example of the collet will be described based on the drawings. Figure 1 shows a specific example of a collet according to an embodiment of the present invention. The collet 100 shown in Figure 1 has a collet body 10 with an adsorption surface S1. A recess 10b is provided on the lower surface of the collet body 10, facing the adsorption surface S1. In addition, a suction port 10a communicating with the recess 10b is provided inside the collet body 10. An adapter 20 having a through hole 20a communicating with the suction port 10a is attached to the upper surface of the collet body 10. The collet 100 is connected to a suction device via the adapter 20, and when the suction device draws in air, the adsorption surface S1 approaches the thin film member, the pressure inside the suction port 10a and recess 10b is reduced, and the thin film member is adsorbed and held to the suction surface S1. Then, by stopping the suction or reversing the airflow and discharging air from the suction port 10a, the thin film member is released from the adsorption surface S1.

[0023] Next, an example of the configuration of the suction surface S1 formed on the lower surface of the collet body 10 will be explained with reference to a diagram.

[0024] Figure 2 is a plan view and a cross-sectional view of a collet 100A according to one embodiment of the present invention. More specifically, Figure 2(a) is a plan view of the bottom side of the collet 100A, Figure 2(b) is a cross-sectional view along the line IB-IB' in Figure 2(a), and Figure 2(c) is a cross-sectional view along the line IC-IC' in Figure 2(a). As shown in Figures 2(a) to 2(c), the suction surface S1 of the collet 100A has a pair of linear recesses 10b1 and 10b2 that intersect each other to form an X-shaped recess, and an annular recess 10c that serves as a peripheral recess, surrounding the central intersection X0, which is the intersection of the first linear recess 10b1 and the second linear recess 10b2. A suction port 10a is provided that communicates with the central intersection X0 and extends in the z direction. The area on the suction surface S1 other than the first linear recess 10b1, the second linear recess 10b2, and the annular recess 10c is a flat area PL that is in planar contact with one main surface of the thin film member that is to be held. Hereinafter, the entire area consisting only of recesses may be collectively referred to as the "recess RC".

[0025] Figure 3 is a plan view illustrating the configuration of the suction surface S1 of the collet body 10. As shown in Figure 3, the adsorption surface S1 includes a first linear recess 10b1, a second linear recess 10b2, and an annular recess 10c, with the remaining area being a flat portion PL. For ease of understanding, in Figure 3, the flat area PL, which is the region on the adsorption surface S1 other than the recess, is shaded. This also applies to Figures 4-10 and 12, which will be discussed later.

[0026] As shown in Figure 3, the adsorption surface S1 is square when viewed from above, with its length wa in the vertical direction (y direction) and its length wb in the horizontal direction (x direction) being equal. The area of ​​the adsorption surface S1 is 50 mm². 2 That's all. The first linear recess 10b1 extends from one of the four corners of the suction surface S1 toward the diagonally opposite corner. The second linear recess 10b2 is formed on a straight line connecting the remaining two corners and extends perpendicularly to the first linear recess 10b1. The first linear recess 10b1 and the second linear recess 10b2 intersect at the center of the suction surface S1. A suction port 10a is formed to communicate with the central intersection X0, which is the intersection of the first linear recess 10b1 and the second linear recess 10b2.

[0027] The annular recess 10c is formed to surround the central intersection X0 and intersects with the first linear recess 10b1 at a position between one end of the first linear recess 10b1 and the central intersection X0 (peripheral connection Y1), and at a position between the other end of the first linear recess 10b1 and the central intersection X0 (peripheral connection Y3). Furthermore, the annular recess 10c intersects with the second linear recess 10b2 at a position between one end of the second linear recess 10b2 and the central intersection X0 (peripheral connection Y2), and at a position between the other end of the second linear recess 10b2 and the central intersection X0 (peripheral connection Y4). In this specification, the term "connection part" is used to refer collectively to shapes in which two linear recesses intersect (for example, the central connection part X0 and peripheral connection parts Y1-Y4 shown in Figure 3), and shapes in which one linear recess connects to another linear recess without intersecting (for example, the peripheral connection parts Y1-Y4 shown in Figure 7 and peripheral connection parts Y5-Y8 shown in Figure 10, which will be described later). The collet 100A has a total of five connection parts.

[0028] In the collet 100A, both ends of the first linear recess 10b1 and both ends of the second linear recess 10b2 are rounded when viewed from above. The shape of the ends of each linear recess 10b1 and 10b2 is not limited to this, and may be a straight line perpendicular to the direction of extension of the linear recess, or a polygon. In the case of a polygon, it is preferable that the angle between the two sides constituting the corner of the polygon is 90° or more, and more preferably 90° or more and less than 180°.

[0029] In collet 100A, the width w1 of the first linear recess 10b1 in the direction perpendicular to its extension direction, the width w2 of the second linear recess 10b2 in the direction perpendicular to its extension direction, and the width w3 of the annular recess 10c in the direction perpendicular to its extension direction are all equal. In the following, the width of a recess in the direction perpendicular to its longitudinal direction (extension direction) may be abbreviated as "width of the recess." For example, the width w1 described above may be referred to as "width w1 of the first linear recess 10b1."

[0030] The recess RC of the collet 100A is symmetrical with respect to the center line along the extending direction of the first linear recess 10b1, and also symmetrical with respect to the center line along the extending direction of the second linear recess 10b2. In the collet 100A, the maximum inscribed circle in the recess RC is located at the central intersection X0 where the two linear recesses 10b1 and 10b2 that constitute the X-shaped recess intersect. The diameter of the suction port 10a may be smaller than or equal to the maximum inscribed circle. In the latter case, the outer edge of the suction port 10a corresponds to the maximum inscribed circle. Furthermore, in the collet 100A, since the width w1 of the first linear recess 10b1, the width w2 of the second linear recess 10b2, and the width w3 of the annular recess 10c are the same, it can be said that the maximum inscribed circle also substantially exists in the peripheral connection parts Y1 to Y4. In Figure 3, the maximum inscribed circle of the recess is shown by dashed lines at the central intersection X0 and the peripheral connection points Y1 to Y4, respectively. Here, the diameter ds of the maximum inscribed circle in the recess RC is 0.4 to 1.7 mm. In the following diagrams, the largest inscribed circle is shown with a dashed line. Due to the symmetry of the structure of the adsorption surface S1, if the distance from the outer edge of the adsorption surface S1 to each recess, or the width of each recess, is common to multiple locations, the dimensions and symbols are shown only at representative locations to avoid complicating the diagram. The dimensions g1 to g3 in Figure 3 will be explained later.

[0031] Figure 4 is a plan view showing another example of a collet. The collet 100B shown in Figure 4 has an X-shaped recess composed of two linear recesses 10b1 and 10b2, similar to the collet 100A described above, and a regular octagonal annular recess 10c as a peripheral recess. The area of ​​the suction surface S1 other than the linear recesses 10b1 and 10b2 and the annular recess 10c is the flat portion PL. The regular octagonal annular recess 10c is formed to surround the central intersection X0 and intersects with the first linear recess 10b1 at a position between one end of the first linear recess 10b1 and the central intersection X0 (peripheral connection Y1), and at a position between the other end of the first linear recess 10b1 and the central intersection X0 (peripheral connection Y3). Furthermore, the regular octagonal annular recess 10c intersects with the second linear recess 10b2 at a position between one end of the second linear recess 10b2 and the central intersection X0 (peripheral connection Y2), and at a position between the other end of the second linear recess 10b2 and the central intersection X0 (peripheral connection Y4). In other words, the collet 100B has a total of five connection points. The recess RC of collet 100B is symmetrical with respect to the center line of the first linear recess 10b1 and the center line of the second linear recess 10b2. In the recess RC of the suction surface S1 of collet 100B, the maximum inscribed circle exists with substantially the same outer diameter at a total of five locations: the central intersection X0 and the peripheral connection parts Y1 to Y4. The diameter ds of the maximum inscribed circle is 0.4 to 1.7 mm. The width w4 of the regular octagonal annular recess 10c is the same as the widths w1 to w3 described above. The dimension g2 in Figure 5 will be explained later. The other configurations are the same as those described for collets 100 and 100A, so a detailed explanation will be omitted.

[0032] Figure 5 is a plan view showing another example of a collet. The collet 100C shown in Figure 5 has an X-shaped recess composed of two linear recesses 10b1 and 10b2, similar to the collet 100A described above, and four discontinuous arc-shaped peripheral recesses 10c1, 10c2, 10c3, and 10c4 that extend along a virtual circle surrounding the central intersection X0. The area of ​​the suction surface S1 other than the linear recesses 10b1 and 10b2 and the peripheral recesses 10c1 to 10c4 is the flat area PL. The arc-shaped peripheral recesses 10c1 to 10c4 each intersect with two linear recesses 10b1 and 10b2 that form an X-shaped recess at their central positions. These intersections are the peripheral connection points Y1 to Y4. The collet 100C has a total of five connection points. The recess RC of the collet 100C is symmetrical with respect to the center line of the first linear recess 10b1 and the center line of the second linear recess 10b2. In the recess RC of the suction surface S1 of the collet 100C, the maximum inscribed circle exists with substantially the same outer diameter at a total of five locations: the central intersection X0 and the peripheral connection parts Y1 to Y4. The diameter ds of the maximum inscribed circle is 0.4 to 1.7 mm. The width (symbol omitted) of the arc-shaped peripheral recesses 10c1 to 10c4 is the same as the width w3 described above. The other configurations are the same as those described for collets 100 and 100A, so a detailed explanation will be omitted.

[0033] Figure 6 is a plan view showing another example of a collet. The collet 100D shown in Figure 6, like the collet 100C described above, has an X-shaped recess composed of two linear recesses 10b1 and 10b2, and four discontinuous arc-shaped peripheral recesses 10c1 to 10c4 that extend along a virtual circle surrounding the central intersection X0. However, the positions of the peripheral recesses 10c1 to 10c4 differ from those of collet 100C, and one end of each peripheral recess 10c1 to 10c4 is connected to either the linear recess 10b1 or 10b2 that constitutes the X-shaped recess without protruding. These connection points are peripheral connection points Y1 to Y4. In other words, collet 100D has a total of five connection points. Furthermore, discontinuities are formed between the other ends of the peripheral recesses 10c1 to 10c4 and the adjacent linear recesses 10b1 or 10b2. The recess RC is formed by the linear recesses 10b1 and 10b2 and the peripheral recesses 10c1 to 10c4 of the adsorption surface S1, and the remaining area is the flat portion PL. In the recess RC of the suction surface S1 of the collet 100D, the maximum inscribed circle is located at the central intersection X0. The diameter ds of the maximum inscribed circle is 0.4 to 1.7 mm. The width (symbol omitted) of the arc-shaped peripheral recesses 10c1 to 10c4 is the same as the width w3 described above. The other configurations are the same as those described for collets 100 and 100A, so a detailed explanation will be omitted.

[0034] Figure 7 is a plan view showing another example of a collet. The collet 100E shown in Figure 7 has an X-shaped recess composed of two linear recesses 10b1 and 10b2, similar to the collet 100A described above, and four linear peripheral recesses 10c1 to 10c4 that intersect the two linear recesses 10b1 or 10b2 that make up the X-shaped recess. Peripheral connection parts Y1 to Y4 are formed by the intersection of these peripheral recesses and linear recesses. In other words, the collet 100E has a total of five connection parts. The area of ​​the suction surface S1 other than the linear recesses 10b1 and 10b2 and the peripheral recesses 10c1 to 10c4 is the flat part PL. In the recess RC of the suction surface S1 of the collet 100E, the maximum inscribed circle exists with the same outer diameter at a total of five locations: the central intersection X0 and the peripheral connection parts Y1 to Y4. The diameter ds of the maximum inscribed circle is 0.4 to 1.7 mm. The width w5 of the surrounding recesses 10c1 to 10c4 is the same as the widths w1 to w3 described above. The other configurations are the same as those described for collets 100 and 100A, so a detailed explanation will be omitted.

[0035] Figure 8 is a plan view showing another example of a collet. The collet 100F shown in Figure 8, like the collet 100E described above, has an X-shaped recess composed of two linear recesses 10b1 and 10b2, and linear peripheral recesses that intersect the two linear recesses 10b1 and 10b2 that make up the X-shaped recess. However, unlike the collet 100E, the peripheral recesses are arranged in multiple layers along the extending direction of the linear recesses 10b1 and 10b2, and have outer peripheral recesses 10c1 to 10c4 closer to the outer edge of the suction surface, and inner peripheral recesses 10d1 to 10d4 further inside. The outer peripheral recesses 10c1 to 10c4 and the linear recesses 10b1 and 10b2 intersect to form peripheral connection sections Y1 to Y4, and the inner peripheral recesses 10d1 to 10d4 and the linear recesses 10b1 and 10b2 intersect to form peripheral connection sections Y5 to Y8. In other words, the collet 100F has a total of nine connection points. The flat portion PL is the area of ​​the adsorption surface S1 other than the linear recesses 10b1 and 10b2, the outer peripheral recesses 10c1 to 10c4, and the inner peripheral recesses 10d1 to 10d4. In the recess RC of the suction surface S1 of collet 100F, the maximum inscribed circle exists with the same outer diameter at a total of nine locations: the central intersection X0 and the peripheral connection parts Y1 to Y8. The diameter ds of the maximum inscribed circle is 0.4 to 1.7 mm. The widths of the peripheral recesses 10c1 to 10c4 and the peripheral recesses 10d1 to 10d4 (all with their reference numerals omitted) are the same as the widths w1 to w3 described above. The other configurations are the same as those described for collets 100 and 100A, so a detailed explanation will be omitted.

[0036] Figure 9 is a plan view showing another example of a collet. The collet 100G shown in Figure 9 has an X-shaped recess composed of two linear recesses 10b1 and 10b2, similar to the collet 100A described above. On the suction surface S1 of collet 100G, the recess consists only of the linear recesses 10b1 and 10b2, and there are no annular recesses like those in collets 100A and 100B, nor peripheral recesses like those in collets 100C to 100F. The recess RC of collet 100G has a symmetrical shape with respect to the respective centerlines along the extension direction of each linear recess 10b1 and 10b2. Furthermore, the width w1 of the first linear recess 10b1 and the width w2 of the second linear recess 10b2 that constitute the X-shaped recess are equal, just as in collet 100A. Therefore, in the recess RC of collet 100G, the maximum inscribed circle is located at the center intersection X0. In other words, collet 100G has only one connection point. The above ds is 0.4 to 1.7 mm. The other components are the same as those described for the Colette 100, so a detailed explanation will be omitted.

[0037] Figure 10 is a plan view showing another example of a collet. The collet 100H shown in Figure 10 has a rectangular adsorption surface S1 when viewed from above. That is, in collet 100H, the length wa in the vertical direction and the length wb in the horizontal direction of the adsorption surface S1 are in the relationship wa > wb. The aspect ratio (wa / wb) of the adsorption surface S1 is set, for example, according to the size of the thin film member to be held. The adsorption surface S1 has an X-shaped recess composed of two linear recesses 10b1 and 10b2, and an elliptical outer annular recess 10c surrounding the central intersection X0 as a peripheral recess. Furthermore, in the region where the angle between the two linear recesses 10b1 and 10b2 that constitute the X-shaped recess is acute, inner peripheral recesses 10d1 and 10d2 are provided in the shape of an elliptical arc that surrounds the central intersection X0 and follows a virtual ellipse with a smaller diameter than the elliptical outer annular recess 10c. One end of the inner peripheral recesses 10d1 and 10d2 is connected to the first linear recess 10b1, and the other end is connected to the second linear recess 10b2. The outer annular recess 10c and the linear recesses 10b1 and 10b2 intersect to form peripheral connection sections Y1 to Y4, and the inner peripheral recesses 10d1 and 10d2 and the linear recesses 10b1 and 10b2 intersect to form peripheral connection sections Y5 to Y8. In other words, the collet 100H has a total of nine connection points. The recess RC is formed by the linear recesses 10b1 and 10b2, the outer annular recess 10c, and the inner peripheral recesses 10d1 and 10d2 of the adsorption surface S1, while the remaining area is the flat portion PL. The recess of the collet 100H is symmetrical with respect to a straight line passing through the center of the adsorption surface S1 and parallel to the long side of the adsorption surface, and also symmetrical with respect to a straight line passing through the center of the adsorption surface S1 and parallel to the short side of the adsorption surface. Here, the location of the largest inscribed circle in the recess RC can vary depending on the width of each recess in the direction perpendicular to the extension direction, the ellipticity of each surrounding recess, and the aspect ratio of the collet's adsorption surface. Therefore, the largest inscribed circle is determined based on the actual shape of the recess on the adsorption surface. The diameter ds of the largest inscribed circle is between 0.4 and 1.7 mm. The widths of the first linear recess 10b1, the second linear recess 10b2, the outer annular recess 10c, and the inner peripheral recesses 10d1 and 10d2 (all without reference numerals) are the same as the widths w1 to w3 described above. The other configurations are the same as those described for collets 100 and 100A, so a detailed explanation will be omitted.

[0038] As described above for collets 100A to 100H, it is preferable that the recess includes a first linear recess and a second linear recess intersecting the first linear recess. Having two intersecting linear recesses makes it easier to apply the adsorption force to the edges of the thin film member. When the adsorption surface is rectangular, the linear recess is preferably such that it extends from one corner to the diagonally opposite corner, as in the collets 100A to 100H described above. In this case, it becomes easier to apply the adsorption force to the edges of the thin film member.

[0039] Furthermore, as with the collets 100A to 100F and 100H described above, it is preferable that the recess further includes a peripheral recess formed along a virtual frame surrounding the central intersection where the first and second linear recesses intersect. Having a peripheral recess in addition to two intersecting linear recesses makes it easier to apply an adsorption force throughout the entire thin film member.

[0040] Furthermore, as described above for collets 100A to 100F and 100H, it is preferable that the recess includes a first peripheral connection portion in which the peripheral recess connects to the first linear recess, and a second peripheral connection portion in which the peripheral recess connects to the second linear recess. The presence of peripheral recesses connected to two intersecting linear recesses prevents the area of ​​the flat portion on the adsorption surface from becoming too large, and makes it easier to distribute the depressurized space within the adsorption surface.

[0041] Furthermore, as with the collets 100A, 100B, and 100H described above, the peripheral recesses may be continuous and annular in shape. If the peripheral recesses are continuous and annular, it becomes easier to improve the uniformity of the suction force acting on the thin film member within the adsorption surface.

[0042] As with the collets 100A and 100H described above, the peripheral recess may be in a continuous circular shape. Having a continuous circular shape for the peripheral recess allows it to be located closer to the periphery of the thin film member, making it easier to apply an attractive force to the periphery of the thin film member.

[0043] Furthermore, as with the collet 100B described above, the peripheral recesses may be a continuous annular polygon. Having a continuous polygonal shape for the peripheral recesses makes it easier to lengthen the recesses located near the periphery other than the corners of the suction surface. When the annular recesses are made into a continuous polygon, they are not limited to octagons, but may be a continuous annular polygon of octagons or more, such as a nonagon, decagon, eleven-sided polygon, or dodecagon, or a continuous annular polygon of pentagon, hexagon, or heptagon.

[0044] Furthermore, as shown in collets 100C to 100F above, the peripheral recesses along the virtual annular frame may be discontinuous. The annular recess may also be discontinuous if it has a polygonal shape, as shown in collet 100B. The presence of discontinuities makes it easier to ensure the flatness of the thin film member through the discontinuity and the flat areas surrounding it.

[0045] Furthermore, by forming the recess with only straight recesses, as in the collet 100G mentioned above, or by forming both the X-shaped recess and the surrounding recess with only straight recesses, as in the collets 100E and 100F, it becomes easier to improve the machining accuracy when manufacturing collets.

[0046] Furthermore, as with the collet 100F described above, by forming multiple peripheral recesses in the direction of extension of the linear recesses that constitute the X-shaped recess, the area of ​​the thin film member facing the reduced pressure space increases, making it easier to adsorb and hold the thin film member with a more uniform suction force.

[0047] Furthermore, if the length of the adsorption surface differs in the vertical and horizontal directions, as in the collet 100H described above, by making the linear recess and surrounding recess elongated in the longitudinal direction to match the shape of the adsorption surface, it is possible to ensure the adsorption and retention of the thin film member while suppressing the occurrence of lifting at the periphery of the thin film member. Furthermore, if the diameter dc of the maximum inscribed circle becomes too large due to differences in the length and width of the adsorption surface, it is desirable to provide an inner peripheral recess, as in the collet 100H described above, to avoid this problem. In the collet 100H, the outer annular recess 10c may be a polygonal recess, or the outer annular recess 10c may be discontinuous.

[0048] In the collets according to the embodiment of the present invention, it is preferable that the suction port communicates with the central intersection where the first and second linear recesses intersect, as in the central intersection X0 of the collets 100A to 100H. When the suction port communicates with the central intersection, it becomes easier to uniformly reduce the pressure throughout the recess, and even if the position of the thin film member and the adsorption surface is misaligned, pickup failures are less likely to occur. Furthermore, as with the collets 100A to 100H described above, it is more preferable that the suction port communicates only with the central intersection where the first and second linear recesses intersect. In this case, the symmetry of the adsorption performance on the adsorption surface is maintained, and the number of suction ports and the suction pressure are reduced to the minimum necessary for adsorption of the thin film member. As a result, the structure of the collet is simplified while maintaining its adsorption performance.

[0049] In a collet according to an embodiment of the present invention, from the viewpoint of ease of manufacturing and suppression of lifting of the peripheral edge of the thin film member, when the adsorption surface is viewed in plan, the width of the recess perpendicular to the extending direction of the recess is preferably 0.3 to 2.0 mm, more preferably 0.4 to 1.5 mm, and even more preferably 0.5 to 1.0 mm. In Figure 3, the width of the first linear recess 10b1 is indicated by the symbol w1, the width of the second linear recess 10b2 is indicated by the symbol w2, and the width of the annular recess 10c is indicated by the symbol w3. In Figure 3, the center line of the annular recess 10c is shown by a dashed line, and the width of the recess in the direction perpendicular to the center line is the width w3. The widths w1 to w3 may be the same or different, but from the viewpoint of ease of manufacturing and uniformity of suction force within the suction surface, it is preferable that they be the same. The same applies to the width w4 of the octagonal annular recess 10c of collet 100B shown in Figure 4, the width w5 of the linear peripheral recesses 10c1 to 10c4 of collet 100E shown in Figure 7, and the widths of the recesses of each collet shown in Figures 5, 6, 8 to 10.

[0050] There are no particular restrictions on the thickness of the collet; however, from the standpoint of appropriate rigidity and ease of handling, it is typically between 1 and 10 mm.

[0051] There are no particular restrictions on the shape of the adsorption surface when viewed from above, and it can be made into various shapes to match the shape of the thin film material to be held. Specific shapes include, for example, squares such as collets 100A to 100G mentioned above, and rectangles such as collet 100H mentioned above, as well as polygons with more corners than a square, such as hexagons and octagons; circular shapes; and elliptical shapes. If the collet's suction surface is square or polygonal, the corners of the collet may be chamfered.

[0052] The material constituting the collet is not particularly limited and can be, for example, natural rubber, synthetic rubber, resin, metal, glass, silicon, or ceramic. In particular, it is preferable that the collet be a rubber-like elastic body such as natural rubber or synthetic rubber with a rubber hardness (JIS-A hardness) of 40° to 90° or less. When the collet is a rubber-like elastic body, it is preferable in that it has good absorption of irregularities when the thin film member has irregularities on the main surface to be adsorbed. The material constituting the collet may contain additives such as antistatic agents (conductive components), degradation inhibitors, and softeners as needed. The above rubber hardness (JIS-A hardness) is measured at 25°C using a Type A durometer in accordance with JIS K6253-3 (2012) "Vulcanized rubber and thermoplastic rubber - Method for determining hardness - Part 3: Durometer hardness".

[0053] The value of the adsorption surface length wa (or wb) / diameter dc of the maximum inscribed circle of the flat portion is preferably 3.00 to 6.00, more preferably 3.50 to 5.50, and even more preferably 4.00 to 5.00, from the viewpoint of retaining the thin film member and suppressing lifting of the peripheral edge of the thin film member.

[0054] The value of the area of ​​the adsorption surface / diameter dc of the maximum inscribed circle of the flat portion is preferably 25 to 50, more preferably 30 to 40, and even more preferably 33 to 36, from the viewpoint of retaining the thin film member and suppressing lifting of the peripheral edge of the thin film member.

[0055] The distance of the linear recess from the edge of the adsorption surface S1 (indicated by the symbol g1 in Figure 3) is preferably 0.5 to 2.5 mm, more preferably 0.5 to 2.0 mm, and even more preferably 0.6 to 1.8 mm, from the viewpoint of making it easier to prevent the thin film member from lifting. Furthermore, the distance of the linear recess from the corner of the adsorption surface S1 (indicated by the symbol g3 in Figure 3) is preferably 0.5 to 2.5 mm, more preferably 0.7 to 2.0 mm, and even more preferably 0.8 to 1.8 mm, from the viewpoint of making it easier to prevent the thin film member from lifting.

[0056] The distance of the peripheral recess from the edge of the adsorption surface S1 (indicated by the symbol g2 in Figures 3 and 4) is preferably 0.5 to 2.5 mm, more preferably 0.5 to 2.0 mm, and even more preferably 0.6 to 1.8 mm, from the viewpoint of making it easier to prevent the thin film member from lifting.

[0057] The wall surfaces constituting each of the recesses described above may be formed perpendicular to the suction surface, or they may be formed with a predetermined incline, or the suction surface side of the recess may be formed perpendicular to the suction surface and the incline may increase as it approaches the bottom of the recess.

[0058] 1-2. Method for manufacturing a collet There are no particular restrictions on the method of manufacturing collets, and various conventionally known manufacturing methods can be used. Examples include injection molding, 3D printing, and machining of bulk collet material. When the material constituting the collet is natural rubber, synthetic rubber, or resin, injection molding is preferred. When the material constituting the collet is metal, glass, silicon, or ceramic, machining is preferred.

[0059] 2. Pickup device A pickup device according to an embodiment of the present invention comprises a collet having any of the above-described configurations, and, if necessary, a suction device connected to the suction port via, for example, the adapter described above. The pickup device adsorbs and holds a thin film member onto the adsorption surface of the collet by performing suction through the suction port of the collet using the suction device, and releases the adsorption of the thin film member by stopping the suction by the adsorption device.

[0060] Figure 11 shows a specific configuration example of a pickup device according to one embodiment of the present invention. The pickup device 200 shown in Figure 11 comprises a collet 100, an adapter 20, an air suction supply device 210, and a moving device 220. The air suction supply device 210 includes a connecting pipe 211 and a cap member 212. The cap member 212 has its tip opening fitted into the adapter 20, forming a sealed space between it and the adapter 20. A through-hole is formed in the wall surface of the cap member 212, which connects to the connecting pipe 211. Therefore, when the air suction supply device 210 is activated and the suction operation is started, suction is performed from the suction port 10a of the collet 100 through the through-hole 20a provided in the connecting pipe 211, the cap member 212, and the adapter 20. As a result, the inside of the suction port 10a and the recess 10b is depressurized, and the thin film member is adsorbed and held on the adsorption surface S1. Furthermore, when separating semiconductor wafers attached to adhesive tape and picking up the resulting semiconductor chips, the adhesive tape may be pushed up from the bottom side with a pin when picking up the semiconductor chips.

[0061] The suction force provided by the air suction supply device 210 is such that, from the viewpoint of reliably holding the thin film member while avoiding irreversible deformation or damage to the thin film member, the pressure in the recess when the thin film member is adsorbed onto the suction surface of the collet is preferably 0.001 to 0.200 MPa, more preferably 0.004 to 0.100 MPa, and even more preferably 0.007 to 0.030 MPa.

[0062] The moving device 220 includes an XY moving mechanism 221 and a Z moving mechanism 222. The XY movement mechanism 221 comprises an arm 223 and a clamp 225 connected to the arm 223. The clamp 225 grips the cap member 212. The XY movement mechanism 221 moves the clamp 225 to any position in the x and y directions by extending and retracting the arm 223. The Z-movement mechanism 222 includes an arm 224 connected to the XY-movement mechanism 221. The Z-movement mechanism 222 moves the XY-movement mechanism 221 to any position in the z-direction by extending or retracting the arm 224. The moving mechanism 200 operates the XY moving mechanism 221 and the Z moving mechanism 222, thereby moving the thin film member adsorbed to the suction surface S1 of the collet 100 to any desired position. Then, when the air suction supply device 210 stops suction or supplies air towards the collet 100, the thin film member detaches from the suction surface. In this way, the thin film member adsorbed and held by the collet 100 is moved to any desired position. [Examples]

[0063] Next, specific embodiments of the present invention will be described, but the present invention is not limited in any way by these examples. The evaluation of the indentation of the thin film members for the collets fabricated in the examples and comparative examples described later was performed using the following procedure.

[0064] [Indentation of thin film material] A silicon wafer measuring 8 mm in length, 8 mm in width, and 10 μm in thickness was used as the thin film component to be held. The collets of the examples and comparative examples were mounted on a pickup device, and the thin film component was adsorbed onto the suction surface of the collet by applying suction under conditions where the suction pressure in the recess was 0.01 MPa. In this state, the underside of the thin film component was visually inspected, and images were taken from the side of the collet using a high-speed camera. The distance between the tip furthest from the suction surface and the suction surface was measured to determine whether or not the thin film component had been indented and to what extent (depth relative to the flat portion of the suction surface).

[0065] Then, the indentation of the chip as a thin-film component was evaluated according to the following criteria. • Passed: The depth of the depression is 90 μm or less, and there are no problems in practical use. • Failed: The depth of the depression exceeds 90 μm, making it unsuitable for practical use.

[0066] [Example 1] A rubber collet with a square-shaped suction surface was fabricated by injection molding a rubber composition (rubber hardness JIS-A 30) obtained by adding 0.1 parts by mass of carbon black to 100 parts by mass of nitrile butadiene rubber (NBR). The suction surface of the collet was flat without protrusions, and was formed with an X-shaped recess and an O-shaped annular recess (hereinafter also referred to as the "O-shaped recess") corresponding to the shapes shown in Figures 2 and 3. Hereinafter, the recess of Example 1 may be referred to as the "XO type". The size of the collet's suction surface was set to 8 mm in both the vertical and horizontal directions. The thickness of the collet perpendicular to the suction surface was set to 3 mm. The width of the recess perpendicular to the direction of extension of the recess was set to 0.8 mm for both the X-shaped recess and the O-shaped recess. The length of the straight line forming the X-shaped recess was set to 8.5 mm. The distances g1 and g2 between the outer edge of the suction surface and the straight recess were set to 0.6 mm. The distance g3 between the corner of the suction surface and the straight recess was set to 1 mm. The O-shaped recess is a perfect circle with an outer diameter of 6 mm, positioned so that its center coincides with the center of the suction surface. The depth of all recesses was uniformly set to 0.3 mm. A suction port with a diameter of 1 mm and a perfectly circular cross-section was formed at the central intersection of the X-shaped recess. The diameter ds of the maximum inscribed circle, as described above, was 1.17 mm.

[0067] [Example 2] A rubber collet with an 8mm x 8mm square suction surface was fabricated by injection molding using the same material as in Example 1. The suction surface is flat and free of protrusions. The suction surface S1, corresponding to the collet 100G shown in Figure 9, has X-shaped recesses 10b1 and 10b2, but no surrounding recesses. Hereinafter, the recess in Example 2 may be referred to as "X-shaped". The shape, length, width, and depth of the X-shaped recess, as well as the shape and diameter of the suction port, were set in the same manner as in the collet of Example 1. The diameter ds of the maximum inscribed circle, as described above, was 1.17 mm.

[0068] [Comparative Example 1] A rubber collet with an 8mm x 8mm square suction surface was fabricated by injection molding using the same material as in Example 1. The suction surface was made flat without protrusions, and had X-shaped recesses 10b1 and 10b2 and cross-shaped recesses 10b3 and 10b4 formed on it, corresponding to the collet 101 shown in Figure 12. Hereinafter, the recesses of Comparative Example 1 may be referred to as "X-shaped." The shape, length, width, and depth of the X-shaped recess were the same as in Example 1. The length of each straight line forming the cross-shaped recess was set to 6 mm. The distance g4 between the outer edge of the suction surface and the cross-shaped recess was set to 0.6 mm. The widths w6 and w7 of the recesses perpendicular to the extension direction of the cross-shaped recesses were both set to 0.8 mm. The diameter ds of the inscribed circle mentioned above was 2.18 mm. The depth of all the cross-shaped recesses was uniformly set to 0.3 mm. Otherwise, the settings were the same as for the collet in Example 1.

[0069] Table 1 shows the shape of the adsorption surface, the size of each part, and the measurement and evaluation results for the collets of each example and comparative example.

[0070] [Table 1]

[0071] As shown in Table 1, in the region consisting only of recesses, the collets of Example 1 and Example 2, in which the diameter ds of the virtual inscribed circle with the largest diameter among those inscribed in the outer edge of the region is in the range of 0.4 to 1.7 mm, showed a smaller value of indentation of the thin film member compared to the collet of Comparative Example 1. It was confirmed that the thin film member chip was adsorbed and held well without being adsorbed in a state of significant deformation. On the other hand, the collet of Comparative Example 1, whose diameter ds was outside the range of 0.4 to 1.7 mm, showed a large value of indentation of the thin film member, which was about twice as large as that of the example. [Explanation of Symbols]

[0072] 10: Colette body 10a: Suction port 10b: recess 10b1: First straight recess constituting an X-shaped recess 10b2: Second straight recess forming an X-shaped recess 10b3: First linear recess constituting a cross-shaped recess 10b4: Second linear recess constituting a cross-shaped recess 10c: Annular recess (peripheral recess) 10c1, 10c2, 10c3, 10c4, 10d1, 10d2, 10d3, 10d4: Peripheral recesses X0: Center intersection Y1, Y2, Y3, Y4, Y5, Y6, Y7, Y8: Peripheral connection section 100, 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H: Colette 101: Colette's comparative example 20: Adapter 20a: Through hole 200: Pickup device 210: Air suction supply device 211: Connecting pipe 212: Cap 220: Mobile device 221:XY movement mechanism 222:Z movement mechanism 223, 224: Arm 225: Clamp ds: Diameter of the largest inscribed circle inscribed at the outer edge of the region composed solely of recesses. g1: Distance between the X-shaped recess and the outer edge of the suction surface g2: Distance between the peripheral recess and the outer edge of the adsorption surface g3: Distance between the X-shaped recess and the corner of the suction surface g4: Distance between the cross-shaped recess and the outer edge of the suction surface S1: Adsorption surface w1, w2, w3, w4, w5: Width of the recess in a direction perpendicular to the extension direction of the recess. wa: Length of the adsorption surface in the vertical direction (y direction) wb: Length of the adsorption surface in the lateral direction (x direction) PL: Flat area

Claims

1. A collet for adsorbing and holding a thin film member, The collet body has an adsorption surface that contacts one of the main surfaces of the thin film member in a planar manner when adsorbing and holding the thin film member, The adsorption surface includes a flat portion and a recessed portion. The collet body has a suction port that communicates with the recess, The area of ​​the adsorption surface is 50 mm ２ That's all. A collet in which, when the adsorption surface is viewed from above, the diameter ds of the virtual inscribed circle with the largest diameter among the virtual inscribed circles inscribed within the region composed only of the recess is 0.4 to 1.7 mm.

2. The collet according to claim 1, wherein the recess includes a first linear recess and a second linear recess intersecting the first linear recess.

3. The collet according to claim 2, wherein the recess further includes a peripheral recess formed along a virtual frame surrounding the central intersection where the first and second linear recesses intersect.

4. The collet according to claim 3, wherein the recess includes a first peripheral connection portion in which the peripheral recess is connected to the first linear recess, and a second peripheral connection portion in which the peripheral recess is connected to the second linear recess.

5. The collet according to claim 3 or 4, wherein the peripheral recess is a continuous annular shape.

6. The collet according to claim 5, wherein the surrounding recess is in a continuous circular shape.

7. The collet according to claim 2, wherein the suction port communicates with the central intersection where the first and second linear recesses intersect.

8. The collet according to claim 1, wherein, when the adsorption surface is viewed from above, the width of the recess perpendicular to the extending direction of the recess is 0.3 to 2.0 mm.

9. A pickup device comprising a collet according to claim 1 and a suction device connected to the suction port.

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