Coating apparatus and method for manufacturing articles

Abstract

To provide a coating apparatus with a configuration advantageous for effective use of space. [Solution] A coating apparatus for coating a substrate with droplets comprises: a plurality of heads for discharging droplets; a transport mechanism for transporting the plurality of heads in a first direction such that one of the plurality of heads is positioned in a first region and the other heads are positioned in a second region; a move mechanism for moving one of the plurality of heads between the first region and the coating region; and a scanning mechanism for scanning the substrate in the first direction such that droplets are coated onto the substrate by the head positioned in the coating region, wherein at least a portion of the second region is positioned above the scanning mechanism.

Description

[Technical Field]

[0001] The present invention relates to a coating apparatus and a method for manufacturing an article. [Background Art]

[0002] Patent Document 1 describes a droplet discharge apparatus for drawing droplets on a workpiece such as a glass substrate. The droplet discharge apparatus includes a droplet discharge unit, two maintenance units, a table, a first moving unit, a second moving unit, a plurality of carriages, and the like. The first moving unit includes a base extending in the X direction, a slide member driven in the X direction by a linear motor on the base, and a table driven in the X direction by a linear motor on the slide member, and the workpiece is held by the table. The entire first moving unit has an elongated shape in the X direction. The second moving unit extends in the Y direction so as to be orthogonal to the first moving unit, and moves each of the carriages along the Y direction.

[0003] As described in Patent Document 1, in a configuration in which a second moving unit extending in the Y direction is disposed on a first moving unit extending in the X direction, the space above the first moving unit cannot be effectively used. [Prior Art Documents] [Patent Documents]

[0004] [Patent Document 1] Japanese Unexamined Patent Application Publication No. 2006-187758 [Summary of the Invention] [Problem to be Solved by the Invention]

[0005] An object of the present invention is to provide a coating apparatus having a configuration that is advantageous for effectively utilizing space. [Means for Solving the Problem]

[0006] One aspect of the present invention relates to a coating apparatus for coating a substrate with droplets, the coating apparatus comprising: a plurality of heads for discharging droplets; a transport mechanism for transporting the plurality of heads in a first direction such that one of the plurality of heads is positioned in a first region and the other heads are positioned in a second region; a move mechanism for moving one of the plurality of heads between the first region and the coating region; and a scanning mechanism for scanning the substrate in the first direction such that droplets are coated onto the substrate by the head positioned in the coating region, wherein at least a portion of the second region is positioned above the scanning mechanism. [Effects of the Invention]

[0007] According to the present invention, a coating apparatus having a configuration advantageous for effective use of space is provided. [Brief explanation of the drawing]

[0008] [Figure 1] A schematic perspective view showing the configuration of the coating apparatus according to the first to fourth embodiments. [Figure 2] A schematic cross-sectional view showing the configuration of the coating apparatus of the first embodiment. [Figure 3] A schematic cross-sectional view showing the configuration of the coating apparatus of the first embodiment. [Figure 4] A schematic cross-sectional view showing the configuration of the coating apparatus of the first embodiment. [Figure 5] A schematic cross-sectional view showing the configuration of the coating apparatus of the first embodiment. [Figure 6] A schematic cross-sectional view showing the configuration of the coating apparatus of the first embodiment. [Figure 7] A schematic cross-sectional view showing the configuration of the coating apparatus of the first embodiment. [Figure 8] A schematic cross-sectional view showing the configuration of the coating apparatus of the first embodiment. [Figure 9] A schematic cross-sectional view showing the configuration of the coating apparatus of the first embodiment. [Figure 10] A schematic cross-sectional view showing the configuration of the coating apparatus of the second embodiment. [Figure 11]Cross-sectional view schematically illustrating the configuration of the coating apparatus according to the second embodiment. [Figure 12] Cross-sectional view schematically illustrating the configuration of the coating apparatus according to the second embodiment. [Figure 13] Cross-sectional view schematically illustrating the configuration of the coating apparatus according to the second embodiment. [Figure 14] Cross-sectional view schematically illustrating the configuration of the coating apparatus according to the second embodiment. [Figure 15] Cross-sectional view schematically illustrating the configuration of the coating apparatus according to the second embodiment. [Figure 16] Cross-sectional view schematically illustrating the configuration of the coating apparatus according to the second embodiment. [Figure 17] Cross-sectional view schematically illustrating the configuration of the coating apparatus according to the second embodiment. [Figure 18] Cross-sectional view schematically illustrating the configuration of the coating apparatus according to the third embodiment. [Figure 19] Cross-sectional view schematically illustrating the configuration of the coating apparatus according to the third embodiment. [Figure 20] Cross-sectional view schematically illustrating the configuration of the coating apparatus according to the fourth embodiment. [Figure 21] Cross-sectional view schematically illustrating the configuration of the coating apparatus according to the fourth embodiment. [Figure 22] Cross-sectional view schematically illustrating the configuration of the coating apparatus according to the fourth embodiment. MODES FOR CARRYING OUT THE INVENTION

[0009] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The following embodiments do not limit the claimed invention. Although a plurality of features are described in the embodiments, not all of these plurality of features are essential to the invention, and the plurality of features may be combined arbitrarily. Furthermore, in the accompanying drawings, the same or similar configurations are denoted by the same reference numerals, and redundant descriptions are omitted.

[0010] FIG. 1 is a perspective view schematically showing the configuration of a coating apparatus 100 according to a first embodiment. FIGS. 2 to 9 are cross-sectional views schematically showing the configuration and operation of the coating apparatus 100 according to the first embodiment. In the present specification and drawings, the configuration of each component, the mutual positional relationship between components, the movement direction of components, and the like are described under an XYZ coordinate system. The XY plane in the XYZ coordinate system is parallel to the horizontal plane. Directions respectively parallel to the X-axis, Y-axis, and Z-axis of the XYZ coordinate system are the X-axis direction, Y-axis direction, and Z-axis direction. The X-axis direction includes the positive direction and negative direction of the X-axis, the Y-axis direction includes the positive direction and negative direction of the Y-axis, and the Z-axis direction includes the positive direction and negative direction of the Z-axis. In the following description, the first direction is the Y-axis direction, and the second direction is the X-axis direction.

[0011] The coating apparatus 100 applies droplets to a substrate 1. Applying droplets to the substrate 1 means disposing droplets at target positions or target regions of the substrate 1. The droplets may be composed of a liquid containing an organic substance. The droplets are sometimes referred to as ink. The organic substance is, for example, a material for forming an organic film of an organic electroluminescence (OLED) display. The organic film may be, for example, any one of a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer. A process for manufacturing an OLED display may include a step of forming each organic film such as a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer on a substrate.

[0012] The coating apparatus 100 may include heads 111a and 111b as a plurality of heads that apply droplets. In the following description, matters common to the heads 111a and 111b will be described as the head 111. Further, when the heads 111a and 111b are described while being distinguished from each other, they will be described as the head 111a and the head 111b. In the coating apparatus 100 according to the first embodiment, while a coating process of applying droplets to the substrate 1 is performed using one head 111 among the plurality of heads 111, maintenance can be performed on another head 111 among the plurality of heads 111. Therefore, according to the coating apparatus 100 of the first embodiment, downtime due to the implementation of maintenance can be suppressed, and the coating apparatus 100 can be operated with high operation efficiency.

[0013] The coating apparatus 100 may include a transport mechanism 120 that transports a plurality of heads 111 in a first direction (Y-axis direction) such that one head 111 of the plurality of heads 111 is positioned in a first region R1 and the other heads 111 of the plurality of heads 111 are positioned in a second region R2. The coating apparatus 100 may also include a moving mechanism 130 that moves one head 111 of the plurality of heads 111 between the first region R1 and the coating region R3. The coating apparatus 100 may also include a scanning mechanism 140 that scans the substrate 1 in a first direction (Y-axis direction) such that droplets are coated onto the substrate 1 (at each target position) by the head 111 positioned in the coating region R3. At least a portion of the second region R2 may be positioned above the scanning mechanism 140. Such a configuration is advantageous for efficient use of space. The moving mechanism 130 is, for example, a lifting mechanism. The first region R1 is, for example, a position above the coating region R3 (positive Z-axis direction).

[0014] The scanning mechanism 140 may include a stage 142 that holds the substrate 1 and a drive mechanism 144 that moves the stage 142 along a movement path MP parallel to a first direction (Y-axis direction). In an orthogonal projection (plan view) onto the XY plane, the first region R1 and the second region R2 are separated in the first direction (Y-axis direction). It is preferable that the dimensions of the multiple heads 111 in the second direction (X-axis direction), which is perpendicular to the first direction (Y-axis direction), are greater than the dimensions of the substrate 1 in the second direction when held by the scanning mechanism 140. Such a configuration is advantageous in reducing the time required to coat droplets at multiple target positions on the substrate 1.

[0015] In the second region R2, maintenance may be performed on the heads 111 located in the second region R1 from among the multiple heads 111. Maintenance may include, for example, at least one of cleaning, inspection, and replacement. The coating apparatus 100 may include a cleaning unit 161 for cleaning the heads 111 located in the second region R2 from among the multiple heads 111. The coating apparatus 100 may include an inspection unit 162 for inspecting the heads 111 located in the second region R2 from among the multiple heads 111.

[0016] Figure 2 schematically shows a state in which the cleaning unit 161 is performing cleaning on the head 111a located in the second region R2 among the multiple heads 111. Cleaning by the cleaning unit 161 may include suctioning the liquid inside the multiple nozzles of the head 111. Alternatively, cleaning by the cleaning unit 161 may include removing foreign matter adhering to the head end face by supplying cleaning fluid to the head end face where the multiple nozzles are located, and / or wiping the head end face. In the coating apparatus 100, while the cleaning unit 161 is cleaning the head 111a, droplets can be applied to the substrate 1 using the head 111b. Figure 3 schematically shows a state in which the inspection unit 162 is performing inspection on the head 111a located in the second region R2 among the multiple heads 111. In the coating apparatus 100, while the inspection unit 162 is inspecting the head 111a, droplets can be applied to the substrate 1 using the head 111b.

[0017] The cleaning unit 161 and the inspection unit 162 may constitute a maintenance unit 152 that performs maintenance on the head 111 located in the second region R2 among the multiple heads 111. The maintenance unit 152 may consist of at least one maintenance element of the cleaning unit 161 and the inspection unit 162, or it may be replaced by other maintenance elements, or other maintenance elements may be added.

[0018] The coating apparatus 100 may include a second transport mechanism 150 for moving the maintenance unit 152 in a first direction (Y-axis direction). The second region R1 may include a first area Z1 and a second area Z2. In this case, the first region R1 may be located between the first area Z1 and the second area Z2. The first area Z1 and the second area Z2 are separated from each other in the first direction (Y-axis direction). The second transport mechanism 150 may be configured to allow the maintenance unit 152 to be located in either the first area Z1 or the second area Z2.

[0019] The inspection unit 162 can, for example, inspect whether droplets are ejected from the nozzle of the head 111. The inspection unit 162 may also include a measuring unit 163 that measures the characteristics of a head 111 located in the second region R2 among a plurality of heads 111. The measuring unit 163 can measure, for example, at least one of the droplet ejection speed from the nozzle of the head 111, the volume of the droplet ejected from the nozzle of the head 111, the ejection angle of the droplet from the nozzle of the head 111, and the landing position of the droplet from the nozzle of the head 111. The measuring unit 163 is useful for reducing variations in coating characteristics due to individual differences in the heads 111 and changes in the characteristics of the heads 111 over time. The measuring unit 163 may include, for example, at least one of a camera, an interferometer, and a phase Doppler measuring instrument. The coating apparatus 100 may further include a processor 190 that generates correction data to control the operation of the head 111, measured by the measurement unit 163, in coating droplets onto the substrate 1 in the coating area R3, based on the results measured by the measurement unit 163.

[0020] The processor 190 may consist of, for example, a PLD (Programmable Logic Device) such as an FPGA (Field Programmable Gate Array), an ASIC (Application Specific Integrated Circuit), a general-purpose or dedicated computer with a program built in, or a combination of all or part thereof. The processor 190 may be configured as a control unit that controls the operation of the coating apparatus 100 by controlling each component of the coating apparatus 100, or it may be provided separately from the control unit.

[0021] The coating apparatus 100 may further include a second measurement unit 171 that measures the head 111 held by the moving mechanism 130 among a plurality of heads 111. The processor 190 may generate correction data to control the operation of the head 111 in which it coats droplets onto the substrate 1 in the coating area R3, based on the results measured by the measurement unit 163 and the second measurement unit 171. The second measurement unit 171 can measure, for example, at least one of the position and orientation of the head 111 held by the moving mechanism 130. This is useful for reducing variations in coating characteristics due to positioning errors of the head 111 that exist when the head 111, which has been placed in the first area R1 by the transport mechanism 120, is held by the moving mechanism 130.

[0022] Multiple heads 111, a transport mechanism 120, a moving mechanism 130, a scanning mechanism 140, a second transport mechanism 150, and a maintenance unit 152 may be arranged in the internal space of the chamber 180. The internal space of the chamber 180 may be divided into a first layer and a second layer by a separator 185 having an opening OP for positioning selected heads 111 from among the multiple heads 111 in a first region R1 and a coating region R3. The scanning mechanism 140 is arranged in the first layer, and the transport mechanism 120, moving mechanism 130, scanning mechanism 140, second transport mechanism 150, and maintenance unit 152 may be arranged in the second layer. The chamber 180 is provided with a gate 183 for transporting the substrate 1 from the external space to the internal space of the chamber 180, and from the internal space to the external space. The substrate 1 processed in the previous process is transported from the gate 183, and the transfer of the substrate 1 to the scanning mechanism 140 may occur on the gate 183 side of the first layer. Furthermore, the position of the substrate 1 can be measured by a measuring instrument (not shown), and the relative positional relationship between the substrate 1 and the scanning mechanism 140 can be adjusted. Therefore, space is required in the Y-axis direction of the first layer, and arranging the transport mechanism 120 to extend in the Y direction is useful for utilizing space.

[0023] The coating apparatus 100 may be configured to allow the replacement of one of the multiple heads 111 located in the second region R2 with another head (e.g., a new head or a refurbished head). The replacement of the head 111 may be performed by a robot (not shown) or by an operator. The chamber 180 is provided with access sections 181, 182 (e.g., doors) for accessing the internal space from the external space of the chamber 180, and the head 111 can be replaced with another head through the access sections 181, 182.

[0024] The following describes, in an illustrative manner, the operation of replacing head 111b, which was used to apply droplets to substrate 1, with head 111a. First, as schematically shown in Figure 4, head 111b, which was located in the coating area R3, can be moved to the first area R1 by the moving mechanism 130. Next, as schematically shown in Figure 5, head 111b, which was located in the first area R1, can be moved to the second area Z2 of the second area R2 by the transport mechanism 120. Also, the maintenance unit 152, which was located in the first area Z1 of the second area R2, can be moved to the second area Z2 of the second area R2 by the second transport mechanism 150. Also, head 111a, which was located in the first area Z1 of the second area R2, can be moved to the first area R1 by the transport mechanism 120. Next, as schematically shown in Figure 6, head 111a, which was located in the first area R1, can be moved to the coating area R3 by the moving mechanism 130.

[0025] At this time, the second measurement unit 171 can measure the state of the head 111a held by the moving mechanism 130. The processor 190 can also generate correction data to control the operation of the head 111a to apply droplets to the substrate 1 in the coating area R3, based on the results measured by the measurement unit 163 and the second measurement unit 171. This completes the operation of replacing the head 111b with the head 111a. In this state, it is possible to apply droplets to the substrate 1 using the head 111a positioned in the coating area R3.

[0026] In the state schematically shown in Figure 6, the cleaning unit 161 can further clean the head 111b located in the second area Z2 of the second region R1 among the multiple heads 111. Then, as schematically shown in Figure 7, the inspection unit 162 can inspect the head 111b located in the second area Z2 of the second region R2 among the multiple heads 111. The cleaning of the head 111b by the cleaning unit 161 can be performed in parallel with the coating operation in which droplets are applied to the substrate 1 using the head 111a located in the coating region R3. Similarly, the inspection of the head 111b by the inspection unit 162 can be performed in parallel with the coating operation in which droplets are applied to the substrate 1 using the head 111a located in the coating region R3. In other words, the maintenance of the head 111b by the maintenance unit 152 can be performed in parallel with the coating operation in which droplets are applied to the substrate 1 using the head 111a located in the coating region R3.

[0027] Figure 8 schematically shows the state in which head 111b, located in the second area Z2 of the second region R1, is replaced through the access unit 182. Figure 9 schematically shows the state in which head 111a, located in the first area Z1 of the second region R1, is replaced through the access unit 181.

[0028] The configuration and operation of the coating apparatus 100 of the second embodiment will be described below with reference to Figures 10 to 17. Matters not described with respect to the coating apparatus 100 of the second embodiment may be described in accordance with the description of the first embodiment. In the second embodiment, the plurality of heads 111 include heads 111a and heads 111b. A first maintenance unit 152a for maintaining head 111a and a second maintenance unit 152b for maintaining head 111b may be arranged in the second region R2. More specifically, the first maintenance unit 152a may be arranged in the first area Z1 of the second region R2, and the second maintenance unit 152b may be arranged in the second area Z2 of the second region R2. The first maintenance unit 152a and the second maintenance unit 152b may have the same configuration as the maintenance unit 152 in the first embodiment. The first maintenance section 152a may be transported by the second transport mechanism 150a, and the second maintenance section 152b may be transported by the second transport mechanism 150b. The coating device 100 may also be configured without the first transport mechanism 150a and the second transport mechanism 150b.

[0029] In the state shown in Figure 10, the process of applying droplets to the substrate 1 using the head 111b may be performed in parallel with the process of cleaning the head 111a by the cleaning unit 161 of the first maintenance unit 152a. In the state shown in Figure 11, the process of applying droplets to the substrate 1 using the head 111b may be performed in parallel with the process of inspecting the first head 111a by the inspection unit 162 of the first maintenance unit 152. This inspection may also include measurement by the measurement unit 163 provided in the inspection unit 162 of the first maintenance unit 152.

[0030] The following describes, in an illustrative manner, the operation of replacing head 111b, which was used to apply droplets to substrate 1, with head 111a. First, as schematically shown in Figure 12, head 111b, which was located in the coating area R3, can be moved to the first area R1 by the moving mechanism 130. Next, as schematically shown in Figure 13, head 111b, which was located in the first area R1, can be moved to the second area Z2 of the second area R2 by the transport mechanism 120. Also, head 111a, which was located in the first area Z1 of the second area R2, can be moved to the first area R1 by the transport mechanism 120. Next, as schematically shown in Figure 14, head 111a, which was located in the first area R1, can be moved to the coating area R3 by the moving mechanism 130.

[0031] At this time, the second measurement unit 171 can measure the state of the head 111a held by the moving mechanism 130. The processor 190 can also generate correction data to control the operation of the head 111a to apply droplets to the substrate 1 in the coating area R3, based on the results measured by the measurement unit 163 and the second measurement unit 171. This completes the operation of replacing the head 111b with the head 111a. In this state, it is possible to apply droplets to the substrate 1 using the head 111a positioned in the coating area R3.

[0032] In the state schematically shown in Figure 14, the head 111b located in the second area Z2 of the second region R1 may be cleaned by the cleaning unit 161 of the second maintenance unit 152b. Then, as schematically shown in Figure 15, the head 111b located in the second area Z2 of the second region R1 may be inspected by the inspection unit 162 of the second maintenance unit 152b.

[0033] The cleaning of the head 111b by the cleaning unit 161 of the second maintenance unit 152b can be performed in parallel with the coating operation in which droplets are applied to the substrate 1 using the head 111a located in the coating area R3. Furthermore, the inspection of the head 111a by the inspection unit 162 of the second maintenance unit 152b can be performed in parallel with the coating operation in which droplets are applied to the substrate 1 using the head 111a located in the coating area R3. In other words, maintenance of the head 11b by the maintenance unit 152 can be performed in parallel with the coating operation in which droplets are applied to the substrate 1 using the head 111a located in the coating area R3.

[0034] Figure 16 schematically shows the state in which head 111a, located in the first area Z1 of the second region R1, is replaced through the access section 181. Figure 17 schematically shows the state in which head 111b, located in the second area Z2 of the second region R1, is replaced through the access section 182.

[0035] The configuration and operation of the coating apparatus 100 of the third embodiment will be described below with reference to Figures 18 and 19. Matters not described with respect to the coating apparatus 100 of the third embodiment may be described in accordance with the description of the first or second embodiment. In the third embodiment, the coating area R3 includes a first position P1 in which the head 111a is positioned to coat droplets onto the substrate 1 by the head 111a, and a second position P2 in which the head 111b is positioned to coat droplets onto the substrate 1 by the head 111b. The first position P1 and the second position P2 are different from each other, and in particular, different from each other with respect to the first direction (Y-axis direction). The third embodiment is advantageous for reducing the stroke of the transport mechanism 120.

[0036] The configuration and operation of the coating apparatus 100 of the fourth embodiment will be described below with reference to Figures 20 to 22. Matters not described with respect to the coating apparatus 100 of the fourth embodiment can be described in accordance with the descriptions of the first to third embodiments. In the fourth embodiment, the coating apparatus 100 is equipped with three heads 111a, 111b, and 111c. The coating apparatus 100 may be equipped with four or more heads 111. In the state shown in Figure 20, heads 111a and 111b are located in the first area Z1 of the second region R2, and head 111c is located in the coating region R3. In the state shown in Figure 21, head 111a is located in the first area Z1 of the second region R2, head 111b is located in the coating region R3, and head 111c is located in the second area Z2 of the second region R2. In the state shown in Figure 22, head 111a is located in the coating region R3, and heads 111b and 111c are located in the second area Z2 of the second region R2.

[0037] The following describes, in principle, an article manufacturing method for producing articles such as organic EL (OLED) displays using a coating apparatus 100. The article manufacturing method may include, for example, a coating step of applying droplets to a substrate 1 such as a glass substrate or a resin substrate using the coating apparatus 100, and a processing step of obtaining an article by processing the substrate 1 after the coating step. The processing step may include, for example, a step of drying the droplets applied to the substrate 1 by the coating step to form a dried film, and a step of firing the dried film to form an organic film. The processing step may also include a step of forming an upper electrode on the organic film, and a step of forming a sealing film that covers the upper electrode. The article manufacturing method may also include, before the coating step, a step of forming a drive circuit on the substrate 1, and a step of forming a lower electrode on the drive circuit.

[0038] This specification and accompanying drawings include the following disclosures: (Item 1) A coating apparatus for applying liquid droplets to a substrate, Multiple heads that dispense droplets, A conveying mechanism that conveys the plurality of heads in a first direction such that one of the plurality of heads is placed in a first region and the other heads are placed in a second region, A moving mechanism for moving one of the plurality of heads between the first region and the coating region, The system includes a scanning mechanism that scans the substrate in a first direction so that droplets are applied to the substrate by a head positioned in the coating area among the plurality of heads, At least a portion of the aforementioned second region is located above the scanning mechanism, A coating apparatus characterized by the following features. (Item 2) The scanning mechanism includes a stage for holding the substrate and a drive mechanism for moving the stage along a movement path parallel to the first direction. At least a portion of the second region is located on the movement path, The coating apparatus according to item 1, characterized by the features described herein. (Item 3) In a plan view, the first region and the second region are separated in the first direction. The coating apparatus according to item 1 or 2, characterized in that it is a coating apparatus. (Item 4) The plurality of heads have dimensions in a second direction perpendicular to the first direction that are greater than the dimensions of the substrate in the second direction when it is held by the scanning mechanism. The coating apparatus according to item 1 or 2, characterized in that it is a coating apparatus. (Item 5) In the second region, maintenance is performed on the heads among the plurality of heads that are located in the second region. A coating apparatus according to any one of items 1 to 4, characterized by the above. (Item 6) The system further includes a cleaning unit for cleaning the heads among the plurality of heads that are located in the second region. The coating apparatus according to item 5, characterized in that it is a coating apparatus. (Item 7) The system further includes an inspection unit for inspecting the heads among the plurality of heads that are located in the second region. The coating apparatus according to item 5, characterized in that it is a coating apparatus. (Item 8) The inspection unit includes a measuring unit that measures the characteristics of the heads arranged in the second region among the plurality of heads. The coating apparatus according to item 7, characterized by the features described herein. (Item 9) The system further includes a processor that generates correction data to control the operation of the head measured by the measurement unit in applying liquid droplets to the substrate in the coating area, based on the results measured by the measurement unit. The coating apparatus according to item 8, characterized in that it is a coating apparatus. (Item 10) A second measuring unit that measures the head held by the moving mechanism among the plurality of heads, A processor that generates correction data for controlling the operation of the head to apply liquid droplets to the substrate in the coating area, based on the results measured by the measurement unit and the second measurement unit, The coating apparatus according to item 8, further comprising the following: (Item 11) The second measuring unit measures at least one of the position and orientation of the head held by the moving mechanism. The coating apparatus according to item 10, characterized in that (Item 12) In the second region, the heads among the plurality of heads that are located in the second region are replaceable. A coating apparatus according to any one of items 5 to 11, characterized by the features described herein. (Item 13) The plurality of heads include a first head and a second head, The second region includes a first maintenance unit for maintaining the first head and a second maintenance unit for maintaining the second head. A coating apparatus according to any one of items 5 to 12, characterized in that it is a coating apparatus. (Item 14) A maintenance unit for performing maintenance on the heads arranged in the second region among the plurality of heads, The system further comprises a second transport mechanism for moving the maintenance unit in the first direction. A coating apparatus according to any one of items 1 to 13, characterized by the features described herein. (Item 15) The second area includes the first area and the second area, The first region is located between the first region and the second region. The second transport mechanism is configured such that the maintenance unit can be located in either the first or second area. The coating apparatus according to item 14, characterized by the features described herein. (Item 16) The aforementioned moving mechanism is a lifting mechanism. A coating apparatus according to any one of items 1 to 15, characterized by the features described herein. (Item 17) The first region is located above the coating region. The coating apparatus according to item 16, characterized in that (Item 18) The plurality of heads include a first head and a second head, The coating area includes a first position where the first head is positioned to apply droplets to the substrate by the first head, and a second position where the second head is positioned to apply droplets to the substrate by the second head, wherein the first position and the second position are different from each other. A coating apparatus according to any one of items 1 to 17, characterized by the features described herein. (Item 19) A coating step of applying droplets to a substrate using a coating apparatus described in any one of items 1 to 18, A processing step to obtain an article by processing the substrate that has undergone the coating step, A method for manufacturing articles, characterized by including the following: (others) The invention is not limited to the embodiments described above, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, claims are attached to disclose the scope of the invention. [Explanation of Symbols]

[0039] 100: Coating device, 111: Head, 120: Conveying mechanism, 130: Moving mechanism, 140: Scanning mechanism, R1: First area, R2: Second area, R3: Coating area, MP: Moving path

Claims

1. A coating apparatus for applying liquid droplets to a substrate, Multiple heads that dispense droplets, A transport mechanism that transports the plurality of heads in a first direction such that one of the plurality of heads is placed in a first region and the other heads are placed in a second region, A moving mechanism for moving one of the multiple heads between the first region and the coating region, The system includes a scanning mechanism that scans the substrate in a first direction so that droplets are applied to the substrate by a head positioned in the coating area among the plurality of heads, At least a portion of the aforementioned second region is located above the scanning mechanism, A coating apparatus characterized by the following features.

2. The scanning mechanism includes a stage for holding the substrate and a drive mechanism for moving the stage along a movement path parallel to the first direction. At least a portion of the second region is located on the movement path, The coating apparatus according to feature 1.

3. In a plan view, the first region and the second region are separated in the first direction. The coating apparatus according to feature 1.

4. The plurality of heads have dimensions in a second direction perpendicular to the first direction that are greater than the dimensions of the substrate in the second direction when it is held by the scanning mechanism. The coating apparatus according to feature 1.

5. In the second region, maintenance is performed on the heads among the plurality of heads that are located in the second region. The coating apparatus according to feature 1.

6. The system further includes a cleaning unit for cleaning the heads among the plurality of heads that are located in the second region. The coating apparatus according to feature 5.

7. The system further includes an inspection unit for inspecting the heads among the plurality of heads that are located in the second region. The coating apparatus according to feature 5.

8. The inspection unit includes a measuring unit that measures the characteristics of the heads arranged in the second region among the plurality of heads. The coating apparatus according to feature 7.

9. The system further includes a processor that generates correction data to control the operation of the head measured by the measurement unit in applying liquid droplets to the substrate in the coating area, based on the results measured by the measurement unit. The coating apparatus according to feature 8.

10. A second measuring unit that measures the head held by the moving mechanism among the plurality of heads, A processor that generates correction data for controlling the operation of the head to apply liquid droplets to the substrate in the coating area, based on the results measured by the measurement unit and the second measurement unit, The coating apparatus according to claim 8, further comprising the following:

11. The second measuring unit measures at least one of the position and orientation of the head held by the moving mechanism. The coating apparatus according to feature 10.

12. In the second region, the heads among the plurality of heads that are located in the second region are replaceable. The coating apparatus according to feature 5.

13. The plurality of heads include a first head and a second head, The second region includes a first maintenance unit for maintaining the first head and a second maintenance unit for maintaining the second head. The coating apparatus according to feature 5.

14. A maintenance unit for performing maintenance on the heads arranged in the second region among the plurality of heads, The system further comprises a second transport mechanism for moving the maintenance unit in the first direction. The coating apparatus according to feature 1.

15. The second area includes the first area and the second area, The first region is located between the first region and the second region. The second transport mechanism is configured such that the maintenance unit can be placed in either the first or second area. The coating apparatus according to feature 14.

16. The aforementioned moving mechanism is a lifting mechanism. The coating apparatus according to feature 1.

17. The first region is located above the coating region. The coating apparatus according to feature 16.

18. The plurality of heads include a first head and a second head, The coating area includes a first position where the first head is positioned to apply droplets to the substrate by the first head, and a second position where the second head is positioned to apply droplets to the substrate by the second head, wherein the first position and the second position are different from each other. The coating apparatus according to feature 1.

19. A coating step of applying droplets to a substrate using a coating apparatus according to any one of claims 1 to 18, A processing step to obtain an article by processing the substrate that has undergone the coating step, A method for manufacturing articles, characterized by including the following:

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