Plasma panel unit
Patent Information
- Application Number
- JP2025028851
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2025-02-26
- Publication Date
- 2026-09-07
AI Technical Summary
【0007】 本開示は、大型化を抑制しつつ放電効果を高め得るプラズマパネルユニットを提供できる。
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Figure 2026142016000001_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to a plasma panel unit.
Background Art
[0002] The plasma reactor disclosed in Patent Document 1 includes an electrode panel. The electrode panel includes a dielectric layer and a built-in electrode arranged in the dielectric layer.
Prior Art Literature
Patent Literature
[0003]
Patent Document 1
Summary of the Invention
Problem to be Solved by the Invention
[0004] In a plasma reactor like that of Patent Document 1, it is conceivable to use a plurality of electrode panels arranged side by side in order to enhance the discharge effect. However, it is necessary to connect power supply wiring to each individual electrode panel, and there is a concern that the overall apparatus may increase in size due to complications of wiring and the like.
[0005] The present disclosure has been made in view of the above circumstances, and an object thereof is to provide a plasma panel unit capable of enhancing a discharge effect while suppressing an increase in size. The present disclosure can be implemented in the following modes.
Means for Solving the Problem
[0006] The plasma panel unit of the present disclosure includes: A plasma panel unit comprising a plurality of ceramic plasma panels that generate plasma by discharge, wherein The ceramic plasma panel includes: a plate-shaped dielectric body made of ceramic; a first electrode embedded in the dielectric body; A plurality of first electrode terminals that are electrically connected to the first electrode and exposed to the outside from the edge of the dielectric, It has, The edge of the dielectric overlaps with the dielectric of another ceramic plasma panel in the thickness direction. A plasma panel unit in which, between two overlapping ceramic plasma panels, the edge of one dielectric and the edge of the other dielectric are overlapped, and the first electrode terminal exposed from the edge of one dielectric is connected to the first electrode terminal exposed from the edge of the other dielectric. [Effects of the Invention]
[0007] This disclosure provides a plasma panel unit that can enhance the discharge effect while suppressing an increase in size. [Brief explanation of the drawing]
[0008] [Figure 1] This is a perspective view of a plasma panel unit according to a first embodiment of the present disclosure. [Figure 2] Figure 1 is a perspective view of the plasma panel. [Figure 3] This is a side cross-sectional view of the connection point between the first electrode terminals and the surrounding area in Figure 2. [Figure 4] Figure 2 shows a side cross-sectional view of the connection point between the second electrode terminals and the surrounding area. [Figure 5] Figure 2 is a perspective view showing the plasma panel unit with the frame attached. [Figure 6] This is a perspective view of a plasma panel according to a second embodiment of the present disclosure. [Figure 7] Figure 6 shows a side cross-sectional view of the connection point between the first electrode terminals and the surrounding area in a plasma panel unit using the plasma panel shown in Figure 6. [Figure 8] This is a side cross-sectional view of the connection point between the first electrode terminals and the surrounding area in a plasma panel unit of the third embodiment of the present disclosure. [Figure 9]It is a perspective view of the plasma panel according to the fourth embodiment of the present disclosure. [Figure 10] It is a side cross-sectional view of a connection portion between first electrode terminals and the periphery thereof in a plasma panel unit using the plasma panel of FIG. 9. [Figure 11] It is a perspective view of the plasma panel according to the fifth embodiment of the present disclosure.
Mode for Carrying Out the Invention
[0009] Hereinafter, embodiments of the present disclosure are listed and exemplified. [1] A plasma panel unit comprising a plurality of ceramic plasma panels that generate plasma by discharge, The ceramic plasma panel comprises: a plate-shaped dielectric body made of ceramics; a first electrode embedded in the dielectric body; a plurality of first electrode terminals electrically connected to the first electrode and exposed to the outside from an edge of the dielectric body; and, the edge of the dielectric body overlaps the dielectric body of another ceramic plasma panel in a plate thickness direction, between the mutually overlapping ceramic plasma panels, in a state where the edge of one dielectric body and the edge of the other dielectric body overlap each other, the first electrode terminal exposed from the edge of the one dielectric body and the first electrode terminal exposed from the edge of the other dielectric body are connected to each other. A plasma panel unit.
[0010] According to the plasma panel unit of [1] above, the plurality of ceramic plasma panels are electrically connected and combined with each other in a state where edges of the dielectric bodies overlap each other. Accordingly, the discharge effect can be enhanced by the plurality of plasma panels while suppressing an increase in size of the plasma panel unit.
[0011] [2] The ceramic plasma panel comprises: a second electrode disposed spaced apart from the first electrode in the plate thickness direction in the dielectric body; a plurality of second electrode terminals that are conductive to the second electrode and exposed to the outside from the edge portion of the dielectric; and comprising: The plasma panel unit according to claim 1, wherein between the mutually overlapping ceramic plasma panels, in a state where an edge portion of one dielectric and an edge portion of the other dielectric overlap each other, the second electrode terminal exposed from the edge portion of the one dielectric and the second electrode terminal exposed from the edge portion of the other dielectric are connected to each other.
[0012] According to the plasma panel unit of [2] above, plasma utilizing creeping discharge between a pair of electrodes (a first electrode and a second electrode) can be generated.
[0013] [3] The dielectric has a main body portion in which the first electrode is embedded, the edge portion is recessed in the plate thickness direction with respect to the main body portion, The plasma panel unit according to claim 1 or 2, wherein between the mutually overlapping ceramic plasma panels, the ceramic plasma panels overlap such that a bottom surface of the recess in the edge portion of one dielectric faces a bottom surface of the recess in the edge portion of the other dielectric.
[0014] According to the plasma panel unit of [3] above, as compared with a configuration in which no recess is provided in the edge portion, a step caused by overlapping between ceramic plasma panels can be less likely to occur.
[0015] [4] The plasma panel unit according to claim 1, wherein between the mutually overlapping ceramic plasma panels, the first electrode terminal disposed on one dielectric and the first electrode terminal disposed on the other dielectric are connected via solder.
[0016] According to the plasma panel unit of [4] above, as compared with a configuration using press fit, caulking, or the like for connecting the first electrode terminals, bulkiness in the plate thickness direction can be suppressed.
[0017] [5] The plasma panel unit according to claim 2, wherein, between the ceramic plasma panels that overlap each other, the first electrode terminal disposed on one dielectric and the first electrode terminal disposed on the other dielectric are connected via solder, and the second electrode terminal disposed on one dielectric and the second electrode terminal disposed on the other dielectric are connected via solder.
[0018] According to the plasma panel unit described in [5] above, in a configuration that generates plasma using creepage discharge between a pair of electrodes (first electrode and second electrode), bulkiness in the thickness direction can be suppressed compared to configurations that use press-fitting, crimping, etc., for connecting terminals.
[0019] [6] The edge portion of the dielectric includes a first edge portion and a second edge portion, At least one of the first electrode terminals is exposed to the outside from the first edge, At least one of the first electrode terminals is exposed to the outside from the second edge, A plasma panel unit according to claim 1 or claim 4, wherein, between the ceramic plasma panels that overlap each other, the first edge of one dielectric and the second edge of the other dielectric overlap, and the first electrode terminal exposed from the first edge of one dielectric and the first electrode terminal exposed from the second edge of the other dielectric are connected.
[0020] According to the plasma panel unit described in [6] above, a desired number of ceramic plasma panels can be arranged and combined in a desired array while being electrically connected.
[0021] [7] The edge portion of the dielectric includes a first edge portion and a second edge portion, At least one of the first electrode terminals and at least one of the second electrode terminals are exposed to the outside from the first edge, At least one of the first electrode terminals and at least one of the second electrode terminals are exposed to the outside from the second edge. A plasma panel unit according to claim 2 or 5, wherein, between the ceramic plasma panels that overlap each other, the first edge of one dielectric and the second edge of the other dielectric overlap, and a first electrode terminal exposed from the first edge of one dielectric is connected to the first electrode terminal exposed from the second edge of the other dielectric, and a second electrode terminal exposed from the first edge of one dielectric is connected to the second electrode terminal exposed from the second edge of the other dielectric.
[0022] According to the plasma panel unit described in [7] above, in a configuration that generates plasma using surface discharge between a pair of electrodes (first electrode and second electrode), a desired number of ceramic plasma panels can be electrically connected and arranged in a desired configuration.
[0023] <First Embodiment> 1. Configuration of the plasma panel unit 100 Hereinafter, a plasma panel unit 100 of a first embodiment embodying the present invention will be described with reference to Figures 1-5. The plasma panel unit 100 of the first embodiment shown in Figures 1-5 is an example of the plasma panel unit of this disclosure. In the following description, for the sake of explanation, the vertical direction shown in Figures 1-5 will be defined as the vertical direction, but it does not have to coincide with the vertical direction in the actual arrangement of the plasma panel unit 100. The vertical direction corresponds to the thickness direction of the ceramic plasma panel 10.
[0024] The plasma panel unit 100 comprises multiple ceramic plasma panels 10 (hereinafter also simply referred to as plasma panels 10). Figure 1 shows a plasma panel unit 100 in which two plasma panels 10 are combined. The plasma panels 10 generate plasma by discharge. The plasma panel unit 100 can be used, for example, to promote plant growth by plasma irradiation.
[0025] 2. Configuration of the ceramic plasma panel 10 As shown in Figure 2, the plasma panel 10 includes a dielectric 20, a first electrode 30, and a second electrode 40. The plasma panel 10 generates plasma by creepage discharge between the first electrode 30 and the second electrode 40.
[0026] The dielectric 20 is made of ceramics. The dielectric 20 is formed of, for example, alumina (Al2O3). The dielectric 20 is in the form of a plate. For example, the dielectric 20 is a plate with a rectangular (or similar) shape when viewed from above.
[0027] The dielectric 20 has a main body portion 21, a first edge portion 22, and a second edge portion 23. The first edge portion 22 and the second edge portion 23 correspond to examples of "edge portions" in this disclosure. The main body portion 21 constitutes the central portion of the dielectric 20 in a predetermined direction (left-right direction in Figure 2). The main body portion 21 is, for example, a rectangular (square, etc.) plate in plan view.
[0028] The first edge portion 22 and the second edge portion 23 are the four edges of the dielectric 20 that are located on opposite sides of each other in a predetermined direction (left-right direction in Figure 2). The first edge portion 22 and the second edge portion 23 extend parallel to each other. The first edge portion 22 and the second edge portion 23 are elongated plates of the same dimensions.
[0029] The first edge portion 22 is recessed in the thickness direction relative to the main body portion 21. Specifically, the first edge portion 22 is recessed upward relative to the lower surface 21A of the main body portion 21. That is, a step is formed between the lower surface 21A of the main body portion 21 and the bottom surface (lower surface) 22A of the first edge portion 22. A circular hole 22B is provided near one end of the first edge portion 22 in the longitudinal direction (the rear end of the paper in Figure 2), where the first electrode terminal 31, which will be described later, is provided. A circular hole 22C is provided near the other end of the first edge portion 22 in the longitudinal direction (the front end of the paper in Figure 2), where the second electrode terminal 41, which will be described later, is provided.
[0030] The second edge portion 23 is recessed in the thickness direction relative to the main body portion 21. Specifically, the second edge portion 23 is recessed downward relative to the upper surface 21B of the main body portion 21. In other words, a step is formed between the upper surface 21B of the main body portion 21 and the bottom surface (upper surface) 23A of the second edge portion 23.
[0031] The first electrode 30 is made of a metal such as tungsten (W). The first electrode 30 is, for example, a rectangular (square, etc.) plate in plan view. The first electrode 30 is embedded in the main body 21 of the dielectric 20.
[0032] The second electrode 40 is formed of a metal such as tungsten (W). The second electrode 40 is, for example, a rectangular (square, etc.) plate in plan view. The second electrode 40 is arranged in the dielectric 20 at a distance from the first electrode 30 in the thickness direction (vertical direction). The second electrode 40 is arranged on the upper surface of the dielectric 20. At least a portion of the second electrode 40 is exposed to the outside of the dielectric 20. In the example of this first embodiment, the entire upper surface of the second electrode 40 is exposed to the outside of the dielectric 20. At least a portion of the second electrode 40 overlaps with the first electrode 30 in the vertical direction.
[0033] The plasma panel 10 further includes first electrode terminals 31 and 32, and conductive parts 33 and 34. The first electrode 30, the first electrode terminals 31 and 32, and the conductive parts 33 and 34 are integrally formed from, for example, the same metal material.
[0034] The first electrode terminal 31 is electrically connected to the first electrode 30. The first electrode terminal 31 is exposed to the outside from the first edge 22 of the dielectric 20. The first electrode terminal 31 is located near one end of the first edge 22 in the longitudinal direction (the rear edge of the paper in Figure 2). The first electrode terminal 31 is circular ring-shaped and formed as a pad (land). The first electrode terminal 31 covers the inner wall surface and the upper and lower peripheral surfaces of the hole 22B (see Figure 3) in the first edge 22. The first electrode terminal 31 is connected to the first electrode 30 via a strip-shaped conductive portion 33. The conductive portion 33 is embedded in the dielectric 20 (the main body portion 21 and the first edge portion 22).
[0035] The first electrode terminal 32 is electrically connected to the first electrode 30. The first electrode terminal 32 is exposed to the outside from the second edge 23 of the dielectric 20. The first electrode terminal 32 is located near one end of the second edge 23 in the longitudinal direction (the rear edge of the paper in Figure 2). The first electrode terminal 32 is strip-shaped and formed as a pad (land). The first electrode terminal 32 is exposed to the outside from the bottom surface (top surface) 23A of the second edge 23. The first electrode terminal 32 is connected to the first electrode 30 via a strip-shaped conductive portion 34. The conductive portion 34 is embedded in the dielectric 20 (main body portion 21). The first electrode terminal 32 and the conductive portion 34 are strip-shaped with the same width (the width in the front-to-back direction of the paper in Figure 2).
[0036] The plasma panel 10 further includes second electrode terminals 41 and 42, and conductive parts 43 and 44. The second electrode 40, the second electrode terminals 41 and 42, and the conductive parts 43 and 44 are integrally formed from, for example, the same metal material.
[0037] The second electrode terminal 41 is electrically connected to the second electrode 40. The second electrode terminal 41 is exposed to the outside from the first edge 22 of the dielectric 20. The second electrode terminal 41 is located near the other end in the longitudinal direction of the first edge 22 (the front edge of the paper in Figure 2). The second electrode terminal 41 is circular ring-shaped and formed as a pad (land). The second electrode terminal 41 covers the inner wall surface and the upper and lower peripheral surfaces of the hole 22C (see Figure 4) in the first edge 22. The second electrode terminal 41 is connected to the second electrode 40 via a strip-shaped conductive portion 43. The conductive portion 43 is exposed from the outer surface of the dielectric 20 (main body portion 21 and first edge portion 22).
[0038] The second electrode terminal 42 is electrically connected to the second electrode 40. The second electrode terminal 42 is exposed to the outside from the second edge 23 of the dielectric 20. The second electrode terminal 42 is located near the other end in the longitudinal direction of the second edge 23 (the front side of the paper in Figure 2). The second electrode terminal 42 is a rectangular plate shape and is formed as a pad (land). The second electrode terminal 42 is exposed to the outside from the bottom surface 23A of the second edge 23. The second electrode terminal 42 is connected to the second electrode 40 via a strip-shaped conductive portion 44. The conductive portion 44 has a first conductive path 44A and a second conductive path 44B. The first conductive path 44A is a strip-shaped object extending horizontally from the second electrode terminal 42. The second conductive path 44B extends vertically and is connected to the first conductive path 44A and the second electrode 40. The portion of the first conductive path 44A on the side of the second electrode 40 is embedded in the dielectric 20 (main body 21). The portion of the first conductive path 44A on the side of the second electrode terminal 42 is exposed from the bottom surface (top surface) 23A of the second edge 23. The conductive portion 44 is narrower in width (width in the front-to-back direction of the paper in Figure 2) than the second electrode terminal 42.
[0039] 3. Combination configuration of the ceramic plasma panel 10 The plasma panel unit 100 is composed of multiple plasma panels 10 combined together. The number of plasma panels 10 that can be combined is not limited, and below, we will explain combinations of two plasma panels 10 using Figures 1 to 4. For the sake of simplicity, in Figure 1, the plasma panel 10 on the left will be referred to as plasma panel 11, and the plasma panel 10 on the right will be referred to as plasma panel 12.
[0040] As shown in Figure 1, the plasma panel 11 and the plasma panel 12 are combined such that parts of them overlap each other. The first edge 22 of the plasma panel 11 overlaps with the second edge 23 of the dielectric 20 of the plasma panel 12 in the thickness direction (vertical direction). Specifically, as shown in Figures 3 and 4, the bottom surface (lower surface) 22A of the recess in the first edge 22 of the plasma panel 11 and the bottom surface (upper surface) 23A of the recess in the second edge 23 of the plasma panel 12 overlap so as to face each other. As a result, the upper surface of the dielectric 20 (main body 21, first edge 22) of the plasma panel 11 and the upper surface of the dielectric 20 (main body 21, first edge 22) of the plasma panel 12 are flush. Also, the lower surface of the dielectric 20 (main body 21, second edge 23) of the plasma panel 11 and the lower surface of the dielectric 20 (main body 21, second edge 23) of the plasma panel 12 are flush.
[0041] As shown in Figure 3, the first electrode terminal 31 exposed from the first edge 22 of the dielectric 20 of the plasma panel 11 is connected to the first electrode terminal 32 exposed from the second edge 23 of the dielectric 20 of the plasma panel 12. The lower end surface of the first electrode terminal 31 of the plasma panel 11 is in contact with the upper surface of the first electrode terminal 32 of the plasma panel 12. The first electrode terminal 31 of the plasma panel 11 and the first electrode terminal 32 of the plasma panel 12 are connected via solder 50. The solder 50 is located inside the first electrode terminal 31 of the plasma panel 11 and is in contact with the upper surface of the first electrode terminal 32 of the plasma panel 12 and the inner wall surface of the first electrode terminal 31 of the plasma panel 11. The solder 50 may also be in contact with the upper peripheral surface of the first electrode terminal 31 of the plasma panel 11.
[0042] As shown in Figure 4, the second electrode terminal 41 exposed from the first edge 22 of the dielectric 20 of the plasma panel 11 is connected to the second electrode terminal 42 exposed from the second edge 23 of the dielectric 20 of the plasma panel 12. The lower end surface of the second electrode terminal 41 of the plasma panel 11 is in contact with the upper surface of the second electrode terminal 42 of the plasma panel 12. The second electrode terminal 41 of the plasma panel 11 and the second electrode terminal 42 of the plasma panel 12 are connected via solder 50. The solder 50 is located inside the second electrode terminal 41 of the plasma panel 11 and is in contact with the upper surface of the second electrode terminal 42 of the plasma panel 12 and the inner wall surface of the second electrode terminal 41 of the plasma panel 11. The solder 50 may also be in contact with the upper peripheral surface of the second electrode terminal 41 of the plasma panel 11.
[0043] As described above, between the overlapping plasma panels 11 and 12, the first edge 22 of plasma panel 11 and the second edge 23 of plasma panel 12 are in an overlapping state, and the first electrode terminal 31 exposed from the first edge 22 of plasma panel 11 and the first electrode terminal 32 exposed from the second edge 23 of plasma panel 12 are electrically connected.
[0044] The above describes the combination of two plasma panels 10, but any number of plasma panels 10 can be combined using a similar connection method. Specifically, the first edge 22 of one plasma panel 10 can be superimposed and connected to the second edge 23 of one plasma panel 11 as shown in Figure 1, allowing the other plasma panel 10 to be combined to the left of one plasma panel 11. Similarly, the second edge 23 of another plasma panel 10 can be superimposed and connected to the first edge 22 of one plasma panel 12 as shown in Figure 1, allowing the other plasma panel 10 to be combined to the right of one plasma panel 12. In this way, any number of plasma panels 10 can be arranged and combined in a straight line.
[0045] 4. Configuration using frame 60 As shown in Figure 5, the plasma panel unit 100 may include a pair of frames 60. The frames 60 are frames for connecting a plurality of plasma panels 10. The frames 60 are formed of, for example, resin. The frames 60 are prismatic in shape, and grooves 61 are formed along the longitudinal direction on the back-to-back surfaces of each frame.
[0046] The frame 60 is assembled along each edge (edge along the direction of alignment) of any number of plasma panels 10 arranged in a straight line. In Figure 5, in a plurality of integrated plasma panels 10, the frame 60 is assembled to each of a pair of edges along the direction of alignment. The edges (edge along the direction of alignment) of each plasma panel 10 are fitted into grooves 61 of the frame 60. Wiring 70 is connected to terminals (first electrode terminals 31, 32, second electrode terminals 41, 42) on the plasma panels 10 at both ends of the plurality of integrated plasma panels 10.
[0047] 5. Effects of the First Embodiment The plasma panel unit 100 of the first embodiment comprises a plurality of plasma panels 10 that generate plasma by discharge. Each plasma panel 10 has a plate-shaped dielectric 20 made of ceramic, a first electrode 30 embedded in the dielectric 20, a first electrode terminal 31 that is electrically connected to the first electrode 30 and exposed to the outside from the edge (first edge 22) of the dielectric 20, and a first electrode terminal 32 that is electrically connected to the first electrode 30 and exposed to the outside from the edge (second edge 23) of the dielectric 20. The edges (first edge 22, second edge 23) of the dielectric 20 overlap with the dielectric 20 of other plasma panels 10 in the thickness direction. Between two overlapping plasma panels 10 (for example, plasma panel 11 and plasma panel 12), with the edges of one dielectric 20 (first edge 22) and the other dielectric 20 (second edge 23) overlapping, a first electrode terminal 31 exposed from the edge of one dielectric 20 (first edge 22) and a first electrode terminal 32 exposed from the edge of the other dielectric 20 (second edge 23) are connected.
[0048] In this plasma panel unit 100, multiple plasma panels 10 (for example, plasma panel 11 and plasma panel 12) are electrically connected and combined while their edges (first edge 22, second edge 23) of the dielectric 20 overlap. This allows for an increased discharge effect using multiple plasma panels 10 while suppressing an increase in the size of the plasma panel unit 100.
[0049] Conventionally, increasing the size of ceramic plasma panels has been difficult due to factors such as reduced quality and complicated production processes. Furthermore, relatively large plasma panels have problems such as unstable dimensions and susceptibility to warping and bending. These problems can be solved by adopting the configuration of the plasma panel unit 100 of the first embodiment. In addition, the plasma panel unit 100 of the first embodiment does not require separate wiring between panels or between panels and the power supply, which suppresses the impact on capacitance, and the plasma panel unit 100 can be formed with easy assembly work.
[0050] In the plasma panel unit 100 of the first embodiment, the plasma panel 10 includes a second electrode 40 arranged in the dielectric 20 at a distance from the first electrode 30 in the thickness direction, a second electrode terminal 41 that is electrically connected to the second electrode 40 and exposed to the outside from the edge (first edge 22) of the dielectric 20, and a second electrode terminal 42 that is electrically connected to the second electrode 40 and exposed to the outside from the edge (second edge 23) of the dielectric 20. Between two overlapping plasma panels 10 (for example, plasma panel 11 and plasma panel 12), the second electrode terminal 41 exposed from the edge (first edge 22) of one dielectric 20 and the second electrode terminal 42 exposed from the edge (second edge 23) of the other dielectric 20 are connected when the edges (first edge 22) of one dielectric 20 and the edges (second edge 23) of the other dielectric 20 overlap.
[0051] This plasma panel unit 100 makes it possible to generate plasma using surface discharge between a pair of electrodes (first electrode 30 and second electrode 40).
[0052] In the plasma panel unit 100 of the first embodiment, the dielectric 20 has a main body portion 21 in which the first electrode 30 is embedded. The first edge portion 22 and the second edge portion 23 are recessed in the thickness direction relative to the main body portion 21. Between the plasma panels 10 that overlap each other (for example, plasma panel 11 and plasma panel 12), the bottom surface 22A of the recess at the edge portion (first edge portion 22) of one dielectric 20 and the bottom surface 23A of the recess at the edge portion (second edge portion 23) of the other dielectric 20 overlap so as to face each other.
[0053] With this plasma panel unit 100, compared to a configuration in which recesses are not provided on the edges (first edge 22, second edge 23), it is possible to make it less likely for steps to occur due to overlapping between the plasma panels 10 (for example, plasma panel 11 and plasma panel 12).
[0054] In the plasma panel unit 100 of the first embodiment, a first electrode terminal 31 located on one dielectric 20 and a first electrode terminal 32 located on the other dielectric 20 are connected via solder 50 between two overlapping plasma panels (for example, plasma panel 11 and plasma panel 12).
[0055] This plasma panel unit allows for reduced bulk in the thickness direction compared to configurations using press-fitting, crimping, etc., for connecting the first electrode terminals 31. Furthermore, using solder 50 is inexpensive and reduces the load on the plasma panel 10.
[0056] In the plasma panel unit 100 of the first embodiment, a first electrode terminal 31 located on one dielectric 20 and a first electrode terminal 32 located on the other dielectric 20 are connected via solder 50 between two overlapping plasma panels (for example, plasma panel 11 and plasma panel 12), and a second electrode terminal 41 located on one dielectric 20 and a second electrode terminal 42 located on the other dielectric 20 are connected via solder 50.
[0057] According to this plasma panel unit 100, in a configuration that generates plasma using creepage discharge between a pair of electrodes (first electrode 30 and second electrode 40), bulkiness in the thickness direction can be suppressed compared to configurations that use press-fitting, crimping, etc., for connecting terminals.
[0058] In the plasma panel unit 100 of the first embodiment, the edge of the dielectric 20 includes a first edge 22 and a second edge 23. At least one first electrode terminal (first electrode terminal 31 in the first embodiment) is exposed to the outside from the first edge 22. At least one first electrode terminal (first electrode terminal 32 in the first embodiment) is exposed to the outside from the second edge 23. Between two overlapping ceramic plasma panels (e.g., plasma panel 11 and plasma panel 12), the first electrode terminal 31 exposed from the first edge 22 of one dielectric 20 and the first electrode terminal 32 exposed from the second edge 23 of the other dielectric 20 are connected while the first edge 22 of one dielectric 20 and the second edge 23 of the other dielectric 20 are overlapping.
[0059] This plasma panel unit 100 allows a desired number of plasma panels 10 to be electrically connected and arranged in a desired configuration.
[0060] In the plasma panel unit 100 of the first embodiment, the edge of the dielectric 20 includes a first edge 22 and a second edge 23. At least one first electrode terminal (first electrode terminal 31 in the first embodiment) and at least one second electrode terminal (second electrode terminal 41 in the first embodiment) are exposed to the outside from the first edge 22. At least one first electrode terminal (first electrode terminal 32 in the first embodiment) and at least one second electrode terminal (second electrode terminal 42 in the first embodiment) are exposed to the outside from the second edge 23. Between two overlapping plasma panels (for example, plasma panel 11 and plasma panel 12), with the first edge 22 of one dielectric 20 and the second edge 23 of the other dielectric 20 overlapping, a first electrode terminal 31 exposed from the first edge 22 of one dielectric 20 and a first electrode terminal 32 exposed from the second edge 23 of the other dielectric 20 are connected, and a second electrode terminal 41 exposed from the first edge 22 of one dielectric 20 and a second electrode terminal 42 exposed from the second edge 23 of the other dielectric 20 are connected.
[0061] According to this plasma panel unit 100, in a configuration that generates plasma using creepage discharge between a pair of electrodes (first electrode 30 and second electrode 40), a desired number of plasma panels 10 can be electrically connected and arranged in a desired configuration.
[0062] <Second Embodiment> A second embodiment of this disclosure will be described below with reference to Figures 6 and 7. The plasma panel unit of the second embodiment differs from that of the first embodiment in the terminal connection configuration, but is otherwise similar. Components identical to those of the first embodiment are denoted by the same reference numerals, and detailed explanations are omitted.
[0063] As shown in Figure 6, the ceramic plasma panel (hereinafter also simply referred to as the plasma panel) 210 of the second embodiment has a first electrode terminal 232 instead of the first electrode terminal 32, and a second electrode terminal 242 instead of the second electrode terminal 42. In the second embodiment, the terminals are connected to each other by crimping using eyelets 250.
[0064] As shown in Figures 6 and 7, the first electrode terminal 232 is exposed to the outside from the second edge 23 of the dielectric 20. The first electrode terminal 232 is circular ring-shaped and formed as a pad (land). The first electrode terminal 232 is shaped to cover the inner wall surface and the upper and lower peripheral surfaces of the hole 223B (see Figure 7) formed in the second edge 23. The first electrode terminal 232 is connected to the first electrode 30 via a strip-shaped conductive portion 234. The portion of the conductive portion 234 on the first electrode 30 side is embedded in the dielectric 20 (main body portion 21). The portion of the conductive portion 234 on the first electrode terminal 232 side is exposed from the bottom surface (upper surface) 23A of the second edge 23.
[0065] As shown in Figure 6, the second electrode terminal 242 is exposed to the outside from the second edge 23 of the dielectric 20. The second electrode terminal 242 is circular ring-shaped and formed as a pad (land). The second electrode terminal 242 is shaped to cover the inner wall surface and the upper and lower peripheral surfaces of a hole (not shown) formed in the second edge 23. The second electrode terminal 242 is connected to the second electrode 40 via a strip-shaped conductive portion 244. The portion of the conductive portion 244 on the second electrode 40 side is embedded in the dielectric 20 (main body portion 21). The portion of the conductive portion 244 on the second electrode terminal 242 side is exposed from the bottom surface (upper surface) 23A of the second edge 23.
[0066] Similar to the first embodiment, for the sake of clarity, in Figure 7, the plasma panel 210 on the left will be referred to as plasma panel 211, and the plasma panel 210 on the right will be referred to as plasma panel 212.
[0067] The lower end surface of the first electrode terminal 31 of the plasma panel 211 and the upper surface of the first electrode terminal 232 of the plasma panel 12 are in contact. The first electrode terminal 31 of the plasma panel 211 and the first electrode terminal 232 of the plasma panel 12 are connected by crimping using an eyelet 250. The eyelet 250 is crimped so as to penetrate the first edge 22 of the plasma panel 211 and the second edge 23 of the plasma panel 212. The eyelet 250 is in contact with the inner wall surface and the lower peripheral surface of the first electrode terminal 232 of the plasma panel 212, and with the inner wall surface and the upper peripheral surface of the first electrode terminal 31 of the plasma panel 211.
[0068] Although not shown in the diagram, the connection between the second electrode terminal 41 of the plasma panel 211 and the second electrode terminal 242 of the plasma panel 212 is similar, and they are connected by crimping using a grommet similar to the grommet 250.
[0069] <Third Embodiment> A third embodiment of this disclosure will be described below with reference to Figure 8. The plasma panel unit of the third embodiment differs from that of the second embodiment in the terminal connection configuration, but is otherwise similar. Components identical to those of the second embodiment are denoted by the same reference numerals, and detailed explanations are omitted.
[0070] As shown in Figure 8, in the plasma panel unit of the third embodiment, the terminals are connected to each other using press-fit fittings 350. The press-fit fittings 350 have a pair of elastic pieces 351. The ends of the elastic pieces 351 are provided with hooking portions 352.
[0071] A pair of elastic pieces 351 are press-fitted into the inside of the first electrode terminal 31 of the plasma panel 211 and the inside of the first electrode terminal 232 of the plasma panel 12. The hook portion 352 hooks onto the lower peripheral surface of the first electrode terminal 232 of the plasma panel 212.
[0072] Although not shown in the diagram, the connection between the second electrode terminal 41 of the plasma panel 211 and the second electrode terminal 242 of the plasma panel 212 is the same as the connection between the first electrode terminal 31 and the first electrode terminal 232, and is connected via a press-fit fitting 350.
[0073] <Fourth Embodiment> A fourth embodiment embodying this disclosure will be described below with reference to Figures 9 and 10. The plasma panel unit of the third embodiment differs from that of the first embodiment in that recesses are not provided on the first and second edges, but otherwise it is the same. Components identical to those of the first embodiment are denoted by the same reference numerals, and detailed explanations are omitted.
[0074] As shown in Figures 9 and 10, the plasma panel 410 of the fourth embodiment is configured such that the first edge portion 22 and the second edge portion 23 of the first embodiment do not have recesses.
[0075] As shown in Figure 10, the first electrode terminal 432 has an upper terminal 432A exposed on the upper surface of the second edge portion 23 and a lower terminal 432B exposed on the lower surface of the second edge portion 23. The upper terminal 432A and the lower terminal 432B are connected to the conductive portion 434 via a conductive portion 435 that extends in the vertical direction. The solder 50 is in contact with the upper terminal 432A of the first electrode terminal 432.
[0076] Figure 10 illustrates a configuration in which the first edge 22 of the left plasma panel 411 is positioned above the second edge 23 of the right plasma panel 412. However, it is also possible to configure the plasma panel 411 so that the first edge 22 is positioned below the second edge 23 of the plasma panel 412 and connected to it. In this case, the lower terminal 432B of the first electrode terminal 432 will be in contact with the upper peripheral surface and solder 50 of the first electrode terminal 31 of the plasma panel 411.
[0077] Although not shown in the diagram, the connection between the second electrode terminal 41 of plasma panel 411 and the second electrode terminal 442 of plasma panel 412 is the same as the connection between the first electrode terminal 31 and the first electrode terminal 432.
[0078] <Fifth Embodiment> A fifth embodiment of this disclosure will be described below with reference to Figure 11. The plasma panel unit of the fifth embodiment differs from that of the first embodiment in that it does not have a second electrode, but is otherwise similar. Components identical to those of the first embodiment are denoted by the same reference numerals, and detailed explanations are omitted.
[0079] As shown in Figure 11, the ceramic plasma panel (hereinafter also simply referred to as plasma panel) 510 of the fifth embodiment has a second electrode 40 in the plasma panel 10 of the first embodiment, and the plasma panel 510 has a dielectric 20, a first electrode 30, first electrode terminals 31, 32, and conductive parts 33, 34, similar to the first embodiment. The arrangement of the first electrode terminals 31, 32 and conductive parts 33, 34 in the dielectric 20 is not particularly limited and may be in different positions from the first embodiment, for example, as shown in Figure 11.
[0080] <Other Embodiments> This disclosure is not limited to the embodiments described above and in the drawings. For example, any combination of the features of the embodiments described above or below is possible as long as it does not contradict each other. Furthermore, any feature of the embodiments described above or below may be omitted unless explicitly stated as essential. In addition, the embodiments described above may be modified as follows.
[0081] In the first to fifth embodiments described above, a configuration was shown in which multiple plasma panels were arranged in a straight line and combined. However, by changing the position where the edges are provided, they can be combined in various arrangements. For example, by appropriately changing the position where the edges are provided, multiple plasma panels may be combined in an L-shape, T-shape, cross shape, etc. The edges on which the terminals are provided can be provided on any of the four edges of the dielectric 20.
[0082] In the first to fifth embodiments described above, a single plasma panel was provided with two first electrode terminals that conduct to the first electrode, but three or more may be provided. For example, the first electrode terminals may be exposed from other edges of the dielectric 20 in addition to the first and second edges. The same applies to the second electrode terminals that conduct to the second electrode in the first to fourth embodiments described above.
[0083] In the first and fourth embodiments described above, the terminals were connected via solder 50, but they may also be connected by brazing or via electrically conductive members.
[0084] In the above-described first to third embodiments, the edges (first edge 22, second edge 23) were recessed on one side in the thickness direction of the plate. However, it is also possible to have a configuration in which the edges are recessed on both sides in the thickness direction, that is, a configuration in which steps are formed on both the upper and lower surfaces relative to the main body 21. [Explanation of symbols]
[0085] 10,11,12: Ceramic plasma panel 20: Dielectrics 21: Main body 21A: Bottom side 21B: Top surface 22: First edge (edge) 22A: Bottom surface (lower surface) 22B: Hole 22C: Hole 23: Second margin (margin) 23A: Bottom 23A: Bottom (Top) 30: 1st electrode 31,32: 1st electrode terminal 33,34: Conductive parts 40: 2nd electrode 41,42: 2nd electrode terminal 43,44: Conductive parts 44A: First conductive path 44B: Second conductive path 60: Frame 61: Groove 70: Wiring 100: Plasma panel unit 210, 211, 212: Ceramic plasma panel 223B: Hole 232: 1st electrode terminal 234: Conductive part 242: 2nd electrode terminal 244: Conductive part 250: Eyelet 350: Press-fit hardware 351: Elastic piece 352: Hook part 410, 411, 412: Plasma panel 432: 1st electrode terminal 432A: Upper terminal 432B: Lower terminal 434,435: Conductive parts 442: 2nd electrode terminal 510: Ceramic Plasma Panel
Claims
1. A plasma panel unit comprising multiple ceramic plasma panels that generate plasma by discharge, The aforementioned ceramic plasma panel is A plate-shaped dielectric made of ceramics, A first electrode embedded in the dielectric, A plurality of first electrode terminals that are electrically connected to the first electrode and exposed to the outside from the edge of the dielectric, It has, The edge of the dielectric overlaps with the dielectric of another ceramic plasma panel in the thickness direction. A plasma panel unit in which, between two overlapping ceramic plasma panels, the edge of one dielectric and the edge of the other dielectric are overlapped, and the first electrode terminal exposed from the edge of one dielectric and the first electrode terminal exposed from the edge of the other dielectric are connected.
2. The aforementioned ceramic plasma panel is In the dielectric, a second electrode is disposed at a distance from the first electrode in the thickness direction, A plurality of second electrode terminals that are electrically connected to the second electrode and exposed to the outside from the edge of the dielectric, It has, The plasma panel unit according to claim 1, wherein, between the ceramic plasma panels that overlap each other, the edge of one dielectric and the edge of the other dielectric overlap, and the second electrode terminal exposed from the edge of one dielectric and the second electrode terminal exposed from the edge of the other dielectric are connected.
3. The dielectric material has a main body portion in which the first electrode is embedded, The aforementioned edge portion is recessed in the thickness direction relative to the main body portion. A plasma panel unit according to claim 1 or claim 2, wherein, between the ceramic plasma panels that overlap each other, the bottom surface of the recess in the edge of one dielectric and the bottom surface of the recess in the edge of the other dielectric overlap each other so as to face each other.
4. The plasma panel unit according to claim 1, wherein the first electrode terminal disposed on one dielectric and the first electrode terminal disposed on the other dielectric are connected via solder between the ceramic plasma panels that overlap each other.
5. The plasma panel unit according to claim 2, wherein, between the ceramic plasma panels that overlap each other, the first electrode terminal disposed on one dielectric and the first electrode terminal disposed on the other dielectric are connected via solder, and the second electrode terminal disposed on one dielectric and the second electrode terminal disposed on the other dielectric are connected via solder.
6. The edge portion of the dielectric includes a first edge portion and a second edge portion. At least one of the first electrode terminals is exposed to the outside from the first edge, At least one of the first electrode terminals is exposed to the outside from the second edge, A plasma panel unit according to claim 1 or claim 4, wherein, between the ceramic plasma panels that overlap each other, the first edge of one dielectric and the second edge of the other dielectric overlap, and the first electrode terminal exposed from the first edge of one dielectric and the first electrode terminal exposed from the second edge of the other dielectric are connected.
7. The edge portion of the dielectric includes a first edge portion and a second edge portion. At least one of the first electrode terminals and at least one of the second electrode terminals are exposed to the outside from the first edge. At least one of the first electrode terminals and at least one of the second electrode terminals are exposed to the outside from the second edge. A plasma panel unit according to claim 2 or claim 5, wherein, between the ceramic plasma panels that overlap each other, the first edge of one dielectric and the second edge of the other dielectric overlap, and the first electrode terminal exposed from the first edge of one dielectric and the first electrode terminal exposed from the second edge of the other dielectric are connected, and the second electrode terminal exposed from the first edge of one dielectric and the second electrode terminal exposed from the second edge of the other dielectric are connected.
Citation Information
Patent Citations
Plasma reactor and manufacturing method of electrode panel
JP2023142323A