Vibration device, method for manufacturing a vibration device

Abstract

To provide a vibration device that can accurately mount a vibrating element. [Solution] The vibration device 1 comprises a base substrate 2, an electrode pattern 6 disposed on the base substrate 2, a bonding member 7 disposed on the electrode pattern 6, and a vibrating piece 5 attached to the electrode pattern 6 via the bonding member 7. The electrode pattern 6 has, in plan view, an overlapping region C that overlaps with both or one of the bonding member 7 and the vibrating piece 5, and a non-overlapping region NC that does not overlap with both or one of the bonding member 7 and the vibrating piece 5. The non-overlapping region NC includes a first protrusion T1 that protrudes along the Y-axis and a second protrusion T2 that protrudes along the X-axis.

Description

Technical Field

[0001] The present invention relates to a vibration device and a method for manufacturing a vibration device. Background Art

[0002] Patent Literature 1 discloses a quartz crystal device including a routing wiring formed on an upper surface of a base substrate and a bump for mounting a piezoelectric vibrating piece onto the routing wiring, wherein an alignment mark for aligning the bump is formed on the upper surface of the base substrate separately from a routing electrode. According to the device described in Patent Literature 1, since a bump formed based on the position of the alignment mark can be positioned with high accuracy, electrical conduction between the piezoelectric vibrating piece and an electrode pattern can be ensured. Prior Art Literature Patent Literature

[0003] Patent Literature 1 Japanese Unexamined Patent Publication No. 2012-169862 Summary of Invention Problem to be Solved by Invention

[0004] The alignment mark in Patent Literature 1 is formed at a position overlapping the piezoelectric vibrating piece, which makes it difficult to recognize the alignment mark after the piezoelectric vibrating piece is mounted. Therefore, there has been a problem that the alignment mark cannot be used when inspecting the mounting state of the piezoelectric vibrating piece. Means for Solving the Problem

[0005] A vibration device according to one aspect of the present application comprises a base, an electrode pattern disposed on the base, a bonding member disposed on the electrode pattern, and a vibrating piece attached to the electrode pattern via the bonding member, wherein the electrode pattern has, in plan view, an overlapping region that overlaps with both or one of the bonding member and the vibrating piece, and a non-overlapping region that does not overlap with both or one of the bonding member and the vibrating piece, and the non-overlapping region includes a first projection protruding along a first direction and a second projection protruding along a second direction intersecting the first direction.

[0006] A method for manufacturing a vibration device according to one aspect of the present application includes the steps of: preparing a base on which an electrode pattern is arranged; applying a bonding member on the electrode pattern; mounting a vibrating piece to the electrode pattern via the bonding member; and inspecting the mounting state of the vibrating piece, wherein the electrode pattern is provided in a non-overlapping region that does not overlap with either or both of the bonding member and the vibrating piece in a plan view, and has a first projection protruding along a first direction and a second projection protruding along a second direction intersecting the first direction, and the bonding member application step, the mounting step, and the inspection step are performed by detecting a part of the outer edge of the first projection and a part of the outer edge of the second projection. [Brief explanation of the drawing]

[0007] [Figure 1] A perspective view showing the external appearance of the vibration device according to this embodiment. [Figure 2] Figure 1 shows an exploded perspective view of the vibration device. [Figure 3] Plan view of a vibration device. [Figure 4] A magnified view of a part of the vibration device. [Figure 5] Flowchart relating to the manufacturing method of a vibration device. [Figure 6] Flowchart related to the bonding member coating process S2. [Figure 7] A plan view showing an aspect of the joint member coating process S2. [Figure 8]Flowchart related to the mounting process S3. [Figure 9] A plan view showing an aspect of the mounting process S3. [Figure 10] Flowchart related to inspection process S4. [Figure 11] A plan view showing the configuration of inspection process S4. [Modes for carrying out the invention]

[0008] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings, the dimensions of each component may be shown on a different scale to make them easier to see. Furthermore, for the sake of clarity, in the following explanation, the three mutually orthogonal axes will be referred to as the X-axis, Y-axis, and Z-axis. The direction parallel to the X-axis will also be called the "X-axis direction," the direction parallel to the Y-axis will be called the "Y-axis direction," and the direction parallel to the Z-axis will be called the "Z-axis direction." Additionally, the end of the arrow on each axis will be called the "positive side," and the opposite side will be called the "negative side." Furthermore, in the following, viewing from the positive Z-axis side toward the negative Z-axis side will be referred to as a "planar view." Furthermore, in the following explanation, "top surface" refers to the surface on the positive Z-axis side, and "bottom surface" refers to the surface on the negative Z-axis side.

[0009] 1. Embodiment 1 1.1. About Vibration Device 1 Figure 1 is a perspective view showing the external appearance of the vibration device 1 of Embodiment 1, with the internal schematic configuration indicated by dashed lines. Figure 2 is an exploded perspective view of the vibration device 1 of Figure 1. Figure 3 is a plan view of the vibration device 1, with the lid substrate 3 made transparent. Figure 4 is a partially enlarged view of Figure 3.

[0010] The vibration device 1 is an oscillator in which a vibrating element 5 is housed in a housing space S within a package 4. The vibration device 1 is mounted on electronic equipment such as quartz clocks, communication equipment, computers, display devices, printing equipment, industrial robots, automobiles, and aircraft, and is used as a timing source for time sources, control signals, reference signals, etc.

[0011] The vibrating element 5 is a tuning fork-shaped vibrating element formed of quartz, a piezoelectric material, and vibrates when a predetermined voltage is applied. The vibrating element 5 has a pair of parallel vibrating arms 5a and 5b extending from the base 50 in the positive direction in the Y-axis direction, a base 50 that integrally fixes the base ends of the pair of vibrating arms 5a and 5b, and electrodes (not shown) that vibrate the pair of vibrating arms 5a and 5b. The vibrating element 5 may be a MEMS (Micro Electro Mechanical Systems) resonator, such as a quartz resonator formed from an AT-cut quartz substrate or a silicon resonator formed using a silicon substrate.

[0012] Package 4 comprises a base substrate 2 and a lid substrate 3. The base substrate 2 is an insulating ceramic substrate made of various ceramics such as aluminum oxide. The lid substrate 3 has a cavity 31. By joining the base substrate 2 and the lid substrate 3 via a sealing member 8 such as a sealing ring, a housing space S is formed within the package 4. The housing space S is airtight and under reduced pressure, preferably closer to a vacuum. This reduces viscous resistance and allows the vibrating piece 5 to be driven stably. However, the atmosphere of the housing space S is not particularly limited. In this embodiment, the base substrate 2 is an example of a base.

[0013] As shown in Figure 2, an electrode pattern 6 is provided on the upper surface of the base substrate 2. The electrode pattern 6 has a first electrode pattern 61 and a second electrode pattern 62. An external electrode 9 is provided below the lower surface of the base substrate 2.

[0014] A conductive bonding member 7 is disposed at a predetermined position on the upper surface of the electrode pattern 6. The bonding member 7 is, for example, a silver filler-containing silicone-based conductive adhesive, and the bonding member 7 is applied to a predetermined position on the upper surface of the electrode pattern 6 by a coating device in the method for manufacturing the vibrating device 1 described later.

[0015] The vibrating piece is attached to a predetermined position on the upper surface of the electrode pattern 6 after the bonding member 7 is applied onto the upper surface of the electrode pattern 6. The vibrating piece 5 is mounted at a predetermined position on the upper surface of the electrode pattern 6 by a mounting device in the method for manufacturing the vibrating device 1 described later.

[0016] In the present embodiment, in order to apply the bonding member 7 and mount the vibrating piece 5 at a predetermined position on the upper surface of the electrode pattern 6, the electrode pattern 6 includes a first protruding portion T1 and a second protruding portion T2. The first protruding portion T1 and the second protruding portion T2 are used to detect a predetermined position on the upper surface of the electrode pattern 6 in the method for manufacturing the vibrating device 1 described later.

[0017] As shown in FIG. 3, the first protruding portions T1 include a first protruding portion T11 provided on the first electrode pattern 61 and protruding along the Y-axis direction, and a first protruding portion T12 provided on the second electrode pattern 62 and protruding along the Y-axis direction. In the present embodiment, the Y-axis direction is an example of the first direction.

[0018] The second protruding portions T2 include a second protruding portion T21 provided on the first electrode pattern 61 and protruding along the X-axis direction, and a second protruding portion T22 provided on the second electrode pattern 62 and protruding along the X-axis direction. In the present embodiment, the X-axis direction is an example of the second direction.

[0019] The first protruding portion T1 and the second protruding portion T2 are provided in the non-overlapping region NC of the electrode pattern 6. The non-overlapping region NC is a region that does not overlap with the vibrating piece 5 in plan view, and the overlapping region C is a region that overlaps with the vibrating piece 5 in plan view.

[0020] The electrode pattern 6 has a first outer edge portion E1 and a second outer edge portion E2 along its outer edge in the Y-axis direction. The first outer edge E1 and the second outer edge E2 are used to apply the bonding member 7 to predetermined positions on the upper surface of the electrode pattern 6. The first outer edge E1 and the second outer edge E2 are detected by an edge detection device mounted on the bonding member 7 application device in the manufacturing method of the vibration device 1 described later. In other words, the first outer edge E1 and the second outer edge E2 function as alignment marks for applying the bonding member 7 to predetermined positions on the upper surface of the electrode pattern 6.

[0021] The first outer edge E1 and the second outer edge E2 are used to attach the vibrating piece 5 to a predetermined position on the upper surface of the electrode pattern 6. The first outer edge E1 and the second outer edge E2 are detected by an edge detection device mounted on the mounting device for the vibrating piece 5 in the manufacturing method of the vibration device 1 described later. In other words, the first outer edge E1 and the second outer edge E2 function as alignment marks for mounting the vibrating piece 5 to a predetermined position on the upper surface of the electrode pattern 6.

[0022] The first outer edge E1 and the second outer edge E2 are used to inspect the mounting state of the vibrating piece 5. The first outer edge E1 and the second outer edge E2 are detected by an edge detection device mounted on an inspection device in the manufacturing method of the vibration device 1 described later. In other words, the first outer edge E1 and the second outer edge E2 function as alignment marks for inspecting the mounting state of the vibrating piece 5.

[0023] The first outer edge portion E1 includes the outer edge of the first protrusion T1 provided in the non-overlapping region NC. Therefore, the edge detection device can reliably detect edges along the Y-axis direction of the electrode pattern 6 by the first outer edge portion E1 exposed in the non-overlapping region NC. Furthermore, the first outer edge portion E1 is a linearly extending portion that includes the outer edge of the first protrusion T1. In other words, the length of the first outer edge portion E1 is extended by including the outer edge of the first protrusion T1. Therefore, the detectability of the edge of the first outer edge portion E1 by the edge detection device can be improved.

[0024] The second outer edge portion E2 includes the outer edge of the second protrusion T2 provided in the non-overlapping region NC. Therefore, the edge detection device can reliably detect edges along the X-axis direction of the electrode pattern 6 by the second outer edge portion E2 exposed in the non-overlapping region NC. Furthermore, the second outer edge portion E2 is a linearly extending portion that includes the outer edge of the second protrusion T2. ​​In other words, the length of the second outer edge portion E2 is extended by including the outer edge of the second protrusion T2. ​​Therefore, the edge detection capability of the second outer edge portion E2 by the edge detection device can be improved.

[0025] The first outer edge E1 and the second outer edge E2 are provided on the electrode pattern 6. In other words, the first outer edge E1 and the second outer edge E2 are provided close together. Therefore, the effect of the θ rotational shift between the edge of the first outer edge E1 and the edge of the second outer edge E2 detected by the edge detection device can be reduced.

[0026] In this embodiment, it is preferable that the first outer edge portion E1 has a length of 0.2 mm or more. More preferably, the first outer edge portion E1 has a length of 0.3 mm or more. Here, a length of 0.2 mm or more, or a length of 0.3 mm or more, is the length of the portion of the first outer edge E1 that is exposed to the non-overlapping region NC, or in other words, the length of the portion that the edge detection device can photograph with its camera.

[0027] The inventors of the present application have found that by setting the length of each first outer edge portion E1 to 0.2 mm or more, the edges of the first outer edge portion E1 extending linearly in the Y-axis direction can be accurately detected by an edge detection device. Furthermore, they have found that by setting the length of each first outer edge portion E1 to 0.3 mm or more, the accuracy can be further improved. Here, accurately detecting the edges of the first outer edge portion E1 means detecting the linear edges of the linear first outer edge portion E1.

[0028] The reason for setting the length of the first outer edge portion E1 to 0.2 mm or more is that it improves the linearity of the first outer edge portion E1. It is preferable that the outer edge of the first outer edge portion E1 is free from irregularities and sagging, but the electrode pattern 6 formed on the base substrate 2, which is a ceramic substrate, has irregularities and sagging at its edges. Furthermore, if the length of the first outer edge E1 is less than 0.2 mm, the linearity of the first outer edge E1 will be reduced due to the irregularities and sagging. Consequently, the edge detection device will be unable to accurately detect the edge of the first outer edge E1.

[0029] Furthermore, the length of the first outer edge E1, which is necessary for accurate detection of the first outer edge E1, does not change even if the size of the vibration device 1 changes slightly. In other words, it is preferable that it be 0.2 mm or more. In this embodiment, the size of the vibration device 1 is 3.2 mm on the long side and 1.5 mm on the short side, but even if the size of the vibration device 1 becomes a fraction of or several times that of the vibration device 1 in this embodiment, the degree of unevenness and sagging of the edge of the electrode pattern 6 will not change.

[0030] The second outer edge portion E2, like the first outer edge portion E1, preferably has a length of 0.2 mm or more, and more preferably has a length of 0.3 mm or more. Here, the lengths of 0.2 mm or more or 0.3 mm or more are the lengths of the portion exposed in the non-overlapping region NC at the second outer edge E2, and specifically, the lengths of lengths D1 and D2.

[0031] Length D1 is the length of the portion of the second outer edge E21 of the first electrode pattern 61 that is exposed to the non-overlapping region NC1. Length D2 is the length of the portion of the second outer edge E22 of the second electrode pattern 62 that is exposed to the non-overlapping region NC2.

[0032] If lengths D1 and D2 are each less than 0.2 mm, the sum of lengths D1 and D2 must be 0.2 mm or more. If the sum of lengths D1 and D2 is 0.2 mm or more, the edge of the second outer edge E2, which extends linearly in the X-axis direction, can be accurately detected by the edge detection device.

[0033] The first electrode pattern 61 has a first protrusion T11 that protrudes toward the negative side in the Y-axis direction and a second protrusion T21 that protrudes toward the negative side in the X-axis direction, and its outer edge has a first outer edge portion E11 that includes the outer edge of the first protrusion T11 and a second outer edge portion E21 that includes the outer edge of the second protrusion T21.

[0034] The second electrode pattern 62 has a first protrusion T12 that protrudes toward the negative side in the Y-axis direction and a second protrusion T22 that protrudes toward the positive side in the X-axis direction, and its outer edge has a first outer edge portion E12 that includes the outer edge of the first protrusion T12 and a second outer edge portion E22 that includes the outer edge of the second protrusion T22.

[0035] In other words, the first electrode pattern 61 and the second electrode pattern 62 have a shape that is symmetrical with respect to the virtual center line VC. Therefore, position detection by an edge detection device and condition inspection by an inspection device can be performed with high accuracy. The virtual center line VC is a line that passes through the midpoint between the opposing sides 61a and 62a of the first electrode pattern 61 and the second electrode pattern 62. Alternatively, the virtual center line VC may be a line that passes through the midpoint between the first outer edge E11 and the first outer edge E12.

[0036] As shown in Figure 4, the base 50 of the vibrating piece 5 has a first portion 51, a second portion 52, and a third portion 53. The first part 51 overlaps with the electrode pattern 6 and is joined to the electrode pattern 6 via the joining member 7. The second part 52 integrally fixes the base ends of the vibrating arms 5a and 5b that extend along the Y-axis. The third part 53 is the part between the first part 51 and the second part 52.

[0037] The length W3 of the third part 53 along the X-axis is shorter than the length W1 of the first part 51 along the X-axis. In the example shown in Figure 4, the first portion 51 of the vibrating piece 5 overlaps with the second outer edge E2, so in a plan view, the length of the second outer edge E2 exposed in the non-overlapping region NC is either length D1 or length D2.

[0038] On the other hand, although not shown in the diagram, if the second outer edge E2 is located between the first portion 51 and the second portion 52 of the vibrating piece 5, then in a plan view, the length of the second outer edge E2 exposed in the non-overlapping region NC is a length D3 that is longer than the length D1 or length D2. In other words, by mounting the vibrating piece 5 on the electrode pattern 6 such that the first portion 51 of the vibrating piece 5 does not overlap with the second outer edge E2, the length of the exposed second outer edge E2 can be increased. Therefore, the detection of the second outer edge E2 by the edge detection device can be easily performed.

[0039] 1.2. Method for manufacturing the vibration device 1 Figure 5 is a flowchart relating to the manufacturing method of the vibration device 1. Figure 6 is a flowchart relating to the bonding member coating process S2. Figure 7 is a plan view showing an aspect of the bonding member coating process S2. Figure 8 is a flowchart relating to the mounting process S3. Figure 9 is a plan view showing an aspect of the mounting process S3. Figure 10 is a flowchart relating to the inspection process S4. Figure 11 is a plan view showing an aspect of the inspection process S4.

[0040] As shown in Figure 5, the manufacturing method of the vibration device 1 includes a base substrate preparation step S1, a bonding member coating step S2, a mounting step S3, an inspection step S4, a lid substrate preparation step S5, and a bonding step S6.

[0041] <Base board preparation process> In the base substrate preparation step S1, as shown in Figure 7, a base substrate 2 is prepared on which an electrode pattern 6 is provided, which includes a first electrode pattern 61 having a first protrusion T11 and a second protrusion T21, and a second electrode pattern 62 having a first protrusion T12 and a second protrusion T22.

[0042] <Joining component coating process> As shown in Figure 6, the joining member coating process S2 includes an edge detection process S21, a position detection process S22, and a coating process S23. In the bonding member coating step S2, the bonding member 7 is coated at predetermined positions on the upper surface of the electrode pattern 6 using a bonding member coating device (not shown). In the bonding member coating step S2, the predetermined positions on the upper surface of the electrode pattern 6 are the positions indicated by points M1 and M2. The bonding member coating device is equipped with an edge detection device and determines the predetermined positions on the upper surface of the electrode pattern 6 by detecting the edges of the first outer edge E1 and the second outer edge E2.

[0043] In the edge detection step S21, the edges of the first outer edge E1 and the second outer edge E2 are detected. The edge detection device photographs the preset detection areas A1, A2, B1, and B2. Since the color of the electrode pattern 6 is different from the color of the base substrate 2, the edge detection device detects the edges of the outer edge based on the boundary between these colors. For example, if the base substrate 2 is recognized as black and the electrode pattern 6 as white, the edge detection device detects the edges of the first outer edge E1 and the second outer edge E2 based on the boundary between black and white.

[0044] In the position detection step S22, the edge detection device creates line Y1 based on the detected edge of the first outer edge E11, creates line Y2 based on the detected edge of the first outer edge E12, and creates line Y3 passing through the midpoint between line Y1 and line Y2. The edge detection device also creates line X1 based on the detected edges of the second outer edge E21 and the second outer edge E22. Next, using point P1 where line Y3 and line X1 intersect as a reference, points M1 and M2, which are located a predetermined distance from point P1 in the X-axis direction and Y-axis direction, are determined as predetermined positions. Point M1 corresponds to the first electrode pattern 61, and point M2 corresponds to the second electrode pattern 62.

[0045] In the coating step S23, a bonding member coating device applies a predetermined amount of bonding member 7 to the predetermined positions determined in the position detection step S22. As shown in Figure 9, in the coating step S23, bonding member 71 is placed on the upper surface of the first electrode pattern 61 and bonding member 72 is placed on the upper surface of the second electrode pattern 62.

[0046] <Installation process> As shown in Figure 8, the mounting process S3 includes an edge detection process S31, a position detection process S32, and a vibrating piece mounting process S33. In the mounting process S3, the vibrating piece 5 is mounted to a predetermined position by a vibrating piece mounting device (not shown). In the mounting process S3, the predetermined position is the position indicated by point P2 in Figure 9. The vibrating piece mounting device is equipped with an edge detection device and determines the predetermined position by detecting the edges of the first outer edge E1 and the second outer edge E2 of the electrode pattern 6.

[0047] In the edge detection step S31, the edges of the first outer edge E1 and the second outer edge E2 are detected. The edge detection step S31 can be performed in the same manner as the edge detection step S21 described above.

[0048] In position detection step S32, lines Y1, Y2, Y3, and X1 are created in the same manner as in position detection step S22 described above. Next, the point P2 where line Y3 and line X1 intersect is determined as a predetermined position.

[0049] In the vibrating piece mounting process S33, the vibrating piece 5 is attached to the predetermined position determined in the position detection process S32 by the vibrating piece mounting device. By aligning the direction in which the vibrating arms 5a and 5b extend with the extension direction of line Y3, deviations in the mounting angle of the vibrating piece 5 can be suppressed. In the vibrating piece mounting process S33, the vibrating piece 5 is attached to the upper surface of the electrode pattern 6 via the joining member 7, as shown in Figure 11.

[0050] <Inspection Process> As shown in Figure 10, inspection step S4 includes an edge detection step S41, a position detection step S42, and a state inspection step S43. In inspection step S4, the mounting state of the vibrating piece 5 is inspected by an inspection device (not shown). The inspection of the mounting state of the vibrating piece 5 is performed by inspecting the deviation between a predetermined position and the mounting position of the vibrating piece 5. In inspection step S4, the predetermined position is the position indicated by point P3 in Figure 11. The inspection device is equipped with an edge detection device and determines the predetermined position by detecting the edges of the first outer edge E1 and the second outer edge E2.

[0051] In the edge detection step S41, the edges of the first outer edge E1 and the second outer edge E2 are detected. The edge detection device photographs the preset detection areas A1, A2, B1s, and B2s. The edge detection device detects the edges of the first outer edge E1 and the second outer edge E2 based on the color boundary between the base substrate 2 and the electrode pattern 6.

[0052] The detection area B1s is set only in the region corresponding to the length D1 of the second outer edge E2, and the detection area B2s is set only in the region corresponding to the length D2 of the second outer edge E2. In other words, the detection area B1s is set in the part of the detection area B1 shown in Figure 7 that is not likely to overlap with the vibrating piece 5, and the detection area B2s is set in the part of the detection area B2 shown in Figure 7 that is not likely to overlap with the vibrating piece 5. Therefore, the accuracy of edge detection of the second outer edge E2 can be improved.

[0053] In position detection step S42, lines Y1, Y2, Y3, and X1 are created in the same manner as in position detection step S22 described above. Next, the point P3 where line Y3 and line X1 intersect is determined as a predetermined position.

[0054] In the condition inspection process S43, the misalignment between point P3 and the mounting position of the vibrating piece 5 is inspected. By inspecting the misalignment between the direction in which the vibrating arms 5a and 5b extend and the direction of extension of line Y3, the misalignment of the mounting angle of the vibrating piece 5 can be detected. Based on the inspection results, the inspection device can determine whether the product is good or defective.

[0055] <Lid Substrate Preparation Process> In the lid substrate preparation step S5, a lid substrate having a cavity 31 is prepared as shown in Figure 2.

[0056] <Joining process> In the bonding process S6, as shown in Figure 1, the base substrate 2 and the lid substrate 3 are bonded together via a sealing member 8 such as a sealing ring to manufacture a vibration device 1 in which the vibrating piece 5 is housed within the package 4.

[0057] As described above, the vibration device 1 of this embodiment comprises a base substrate 2 as a base, an electrode pattern 6 disposed on the base substrate 2, a bonding member 7 disposed on the electrode pattern 6, and a vibrating piece 5 attached to the electrode pattern 6 via the bonding member 7. The electrode pattern 6 has, in a plan view, an overlapping region C that overlaps with both or one of the bonding member 7 and the vibrating piece 5, and a non-overlapping region NC that does not overlap with both or one of the bonding member 7 and the vibrating piece 5. The non-overlapping region NC includes a first protrusion T1 that protrudes along the Y-axis direction as a first direction, and a second protrusion T2 that protrudes along the X-axis direction as a second direction intersecting the Y-axis direction.

[0058] Thus, the vibration device 1 of this embodiment includes a first protrusion T1 projecting along the Y-axis direction and a second protrusion T2 projecting along the X-axis direction in the non-overlapping region NC of the electrode pattern 6. In other words, the first protrusion T1 and the second protrusion T2 are not hidden even after the vibration piece 5 is mounted.

[0059] Therefore, the vibration device 1 of this embodiment can accurately detect the position using the first protrusion T1 and the second protrusion T2 at all stages, including when applying the bonding member 7 to the electrode pattern 6, when mounting the vibrating piece 5 to the electrode pattern 6, and after mounting the vibrating piece 5 to the electrode pattern 6.

[0060] In the vibration device 1 of this embodiment, the outer edge of the non-superposition region NC of the electrode pattern 6 includes a first outer edge portion E1 that includes the outer edge of the first protrusion T1 and extends linearly along the Y-axis, and a second outer edge portion E2 that includes the outer edge of the second protrusion T2 and extends linearly along the X-axis.

[0061] Thus, the first outer edge portion E1 includes the outer edge of the first projection T1 and extends linearly along the Y-axis direction, and the second outer edge portion E2 includes the outer edge of the second projection T2 and extends linearly along the X-axis direction. Therefore, the lengths of the first outer edge E1 and the second outer edge E2 can be increased, making it easier to detect the first outer edge E1 and the second outer edge E2. Furthermore, the first outer edge E1 and the second outer edge E2 are located close together. Therefore, the effect of the θ rotational displacement between the edge of the first outer edge E1 and the edge of the second outer edge E2, as detected by the edge detection device, can be reduced.

[0062] In the vibration device 1 of this embodiment, the length of the first outer edge E1 is 0.2 mm or more. Therefore, the first outer edge E1 can be easily detected.

[0063] In the vibration device 1 of this embodiment, the length of the first outer edge E1 is 0.3 mm or more. Therefore, the first outer edge E1 can be detected more accurately.

[0064] In the vibration device 1 of this embodiment, the electrode pattern 6 includes a first electrode pattern 61 and a second electrode pattern 62 arranged along the X-axis direction, and the first electrode pattern 61 and the second electrode pattern 62 have a shape that is symmetrical with respect to a virtual center line VC passing through the midpoint between the opposing sides 61a and 62a.

[0065] By making the first electrode pattern 61 and the second electrode pattern 62 symmetrical in this way, position detection and condition inspection can be performed with even greater accuracy.

[0066] In the vibration device 1 of this embodiment, if the length of the second outer edge E21 of the first electrode pattern 61 is length D1 and the length of the second outer edge E22 of the second electrode pattern 62 is length D2, then the sum of length D1 and length D2 is 0.2 mm or more.

[0067] Therefore, the length of the second outer edge E2 can be set to 0.2 mm or more, and the second outer edge E2 can be easily detected.

[0068] In the vibration device 1 of this embodiment, the vibrating piece 5 is a tuning fork-type vibrating piece comprising a base portion 50 including a first portion 51 that overlaps with the superposition region C of the electrode pattern 6, and a pair of vibrating arms 5a and 5b extending from the base portion 50 along the Y-axis direction, wherein the pair of vibrating arms 5a and 5b extend in the positive Y-axis direction, opposite to the negative Y-axis direction in which the first protrusion T1 of the electrode pattern 6 protrudes. Therefore, the tuning fork-shaped vibrator can be mounted with high precision.

[0069] In the vibration device 1 of this embodiment, the base 50 includes a second portion 52 connected to a pair of vibrating arms 5a and 5b, and a third portion 53 located between the first portion 51 and the second portion 52, having a shorter length W3 along the X-axis than the first portion 51. In this way, by mounting the vibrating piece 5 such that the base portion 50 has a third portion 53 and the second outer edge portion E2 is located between the first portion 51 and the second portion 52, the length of the exposed second outer edge portion E2 can be increased, making it easier to detect the second outer edge portion E2.

[0070] The manufacturing method of the vibration device 1 of this embodiment includes a base substrate preparation step S1, which is a step of preparing a base substrate 2 as a base on which an electrode pattern 6 is arranged; a bonding member coating step S2, which is a step of placing a bonding member 7 on the electrode pattern 6; a mounting step S3, which is a step of attaching a vibrating piece 5 to the electrode pattern 6 via the bonding member 7; and an inspection step S4, which is a step of inspecting the mounting state of the vibrating piece 5. The electrode pattern 6 is provided in a non-overlapping region NC that does not overlap with both or one of the bonding member 7 and the vibrating piece 5 in a plan view, and has a first protrusion T1 that protrudes along the Y-axis direction as a first direction, and a second protrusion T2 that protrudes along the X-axis direction as a second direction intersecting the Y-axis direction. The bonding member coating step S2, the mounting step S3, and the inspection step S4 are performed by detecting a part of the outer edge of the first protrusion T1 and a part of the outer edge of the second protrusion T2.

[0071] Thus, in the manufacturing method of the vibration device 1, the first protrusion T1 and the second protrusion T2 are detected in each of the following steps: the bonding member coating step S2, the mounting step S3, and the inspection step S4. In other words, because the same configuration is used, variations in position detection and other operations performed in each step can be suppressed, improving the accuracy of each step and enabling the manufacture of high-quality vibration devices.

[0072] In the manufacturing method of the vibration device 1 of this embodiment, the outer edge of the non-superposition region NC of the electrode pattern 6 includes a first outer edge portion E1 that includes the outer edge of the first protrusion T1 and extends linearly along the Y-axis direction, and a second outer edge portion E2 that includes the outer edge of the second protrusion T2 and extends linearly along the X-axis direction. The bonding member coating step S2, the mounting step S3, and the inspection step S4 are performed by detecting the first outer edge portion E1 and the second outer edge portion E2.

[0073] Therefore, since the lengths of the first outer edge E1 and the second outer edge E2 can be increased, detection of the first outer edge E1 and the second outer edge E2 becomes easier, and thus the accuracy of each process can be improved. Furthermore, the first outer edge E1 and the second outer edge E2 are located close together. Therefore, the influence of the θ rotational displacement between the edge of the first outer edge E1 and the edge of the second outer edge E2 detected by the edge detection device can be reduced, thereby improving the accuracy of each process.

[0074] Although the present invention has been described above based on preferred embodiments, the present invention is not limited to the embodiments described above. Furthermore, the configuration of each part of the present invention can be replaced with any configuration that performs a similar function to the embodiments described above, and any configuration can be added. [Explanation of Symbols]

[0075] 1…Vibration device, 2…Base substrate, 3…Lid substrate, 31…Cavity, 4…Package, 5…Vibrating piece, 5a, 5b…Vibrating arm, 50…Base, 51…First part, 52…Second part, 53…Third part, 6…Electrode pattern, 61…First electrode pattern, 62…Second electrode pattern, 61a, 62a…Edge, 7, 71, 72…Jointing member, 8…Sealing member, 9…External electrode, A1, A2, B1, B2, B1 s, B2s... detection area, D1, D2, D3... length, E1, E11, E12... first outer edge, E2, E21, E22... second outer edge, P1, P2, P3... point, M1, M2... point, T1, T11, T12... first protrusion, T2, T21, T22... second protrusion, W1, W3... length, X1, Y1, Y2, Y3... line, VC... virtual centerline, NC, NC1, NC2... non-overlapping area, C... overlapping area, S... containment space.

Claims

1. Bass and, An electrode pattern arranged on the base, A bonding member arranged on the electrode pattern, The electrode pattern comprises a vibrating piece attached to the electrode pattern via the connecting member, The electrode pattern has, in a plan view, an overlapping region that overlaps with both or one of the joining member and the vibrating piece, and a non-overlapping region that does not overlap with both or one of the joining member and the vibrating piece. The non-overlapping region includes a first projection protruding along a first direction and a second projection protruding along a second direction intersecting the first direction. Vibration device.

2. The outer edge of the non-overlapping region of the electrode pattern includes a first outer edge portion that includes the outer edge of the first protrusion and extends linearly along the first direction, and a second outer edge portion that includes the outer edge of the second protrusion and extends linearly along the second direction. The vibration device according to claim 1.

3. The length of the first outer edge is 0.2 mm or more. The vibration device according to claim 2.

4. The length of the first outer edge is 0.3 mm or more. The vibration device according to claim 2.

5. The electrode pattern includes a first electrode pattern and a second electrode pattern arranged along the second direction, The first electrode pattern and the second electrode pattern have a shape that is symmetrical with respect to a virtual center line passing through the midpoint between the sides of each other. The vibration device according to claim 2.

6. The length of the second outer edge of the first electrode pattern is defined as length D1. If the length of the second outer edge of the second electrode pattern is denoted as length D2, The sum of lengths D1 and D2 is 0.2 mm or more. The vibration device according to claim 5.

7. The vibrating piece is a tuning fork-type vibrating piece comprising a base portion including a first portion that overlaps with the superimposed region of the electrode pattern, and a vibrating arm extending from the base portion along the first direction. The vibrating arm extends in a direction opposite to the direction in which the first protrusion of the electrode pattern protrudes. The vibration device according to claim 1 to claim 6.

8. The base includes a second portion connected to the vibrating arm, and a third portion located between the first portion and the second portion, having a shorter length along the second direction than the first portion. The vibration device according to claim 7.

9. The process involves preparing a base on which an electrode pattern is arranged, A bonding member coating step in which a bonding member is placed on the electrode pattern, A mounting step of attaching a vibrating piece to the electrode pattern via the bonding member, The process includes an inspection step for inspecting the mounting condition of the vibrating piece, The electrode pattern is provided in a non-overlapping region that does not overlap with either or both of the joining member and the vibrating piece in a plan view, and has a first projection that protrudes along a first direction and a second projection that protrudes along a second direction intersecting the first direction. The joining member coating step, the mounting step, and the inspection step are performed by detecting a part of the outer edge of the first protrusion and a part of the outer edge of the second protrusion. A method for manufacturing a vibration device.

10. The outer edge of the non-overlapping region of the electrode pattern includes a first outer edge portion that includes the outer edge of the first protrusion and extends linearly along the first direction, and a second outer edge portion that includes the outer edge of the second protrusion and extends linearly along the second direction. The bonding member coating step, the mounting step, and the inspection step are performed by detecting the first outer edge and the second outer edge. A method for manufacturing a vibration device according to claim 9.

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