Pumping device

Abstract

The present invention provides a pump device that can suppress the deterioration of the transferred fluid due to thermal effects. [Solution] The pump device of the present disclosure comprises a pump for drawing in and discharging a transfer fluid, a housing having a housing space for housing the pump, and a heat-generating component arranged in the housing space in conjunction with the pump, wherein the housing has an air intake port for introducing gas for cooling the heat-generating component into the housing space, and an exhaust port above the air intake port for discharging the gas around the heat-generating component to the outside of the housing.

Description

[Technical Field]

[0001] The present disclosure relates to a pump device. [Background Art]

[0002] For example, in a manufacturing process of semiconductors and the like, a diaphragm pump described in Patent Document 1, for example, is known as a pump for feeding a chemical liquid (such as a resist liquid). In this diaphragm pump, when a motor is driven to reciprocate a piston in a cylinder, a rolling diaphragm deforms to change the volume of a pump chamber, so that the chemical liquid is sucked into the pump chamber and discharged to the outside. [Prior Art Literature] [Patent Literature]

[0003] [Patent Document 1] Japanese Unexamined Patent Application Publication No. 2024-075196 [Summary of the Invention] [Problem to be Solved by the Invention]

[0004] Generally, the above-mentioned diaphragm pump is housed in a housing together with components attached to the pump in order to improve transportability and protect driving components. However, components attached to the pump may include heat-generating components such as a pressure sensor that detects the pressure of a transferred fluid. In such a case, when the temperature inside the housing rises due to heat generated from the heat-generating component, the temperature of the chemical liquid inside the pump rises, which may cause deterioration of the chemical liquid.

[0005] The present disclosure has been made in view of such circumstances, and an object of the present disclosure is to provide a pump device capable of suppressing deterioration of a transferred fluid due to thermal influence. [Means for Solving the Problem]

[0006] (1) The pump device of the present disclosure comprises a pump for drawing in and discharging a transfer fluid, a housing having a housing space for housing the pump, and a heat-generating component arranged in the housing space in conjunction with the pump, wherein the housing has an air intake port for introducing gas for cooling the heat-generating component into the housing space, and an exhaust port above the air intake port for discharging the gas around the heat-generating component to the outside of the housing.

[0007] According to the pump device of this disclosure, heat-generating components arranged in the housing space are cooled by gas introduced through the housing's air intake. The gas heated around the heat-generating components is discharged to the outside of the housing through the exhaust port. This makes it difficult for the temperature of the heat-generating components to rise, thereby suppressing the rise in the temperature of the transferred fluid caused by the temperature rise of the heat-generating components. As a result, it is possible to suppress the deterioration of the transferred fluid due to thermal effects.

[0008] (2) The pump device described in (1) is preferably provided with a heat dissipation section that is located in the housing space and dissipates heat generated from the heat-generating components. In this case, the heat dissipation section further reduces the temperature rise of the heat-generating components, thus further suppressing the rise in the temperature of the transferred fluid caused by the temperature rise of the heat-generating components.

[0009] (3) The pump device of (1) or (2) is preferably equipped with a flow straightening section that straightens the flow of the gas introduced into the containment space from the air intake. In this case, the airflow introduced from the air intake into the enclosure's interior space is straightened by the flow straightening section, allowing for efficient cooling of heat-generating components.

[0010] (4) In the pump device of (3) above, the housing preferably has a first side wall and a second side wall facing each other across the housing space, the air intake port is provided on the lower side of the first side wall, the heat generating component is a pressure sensor located on the upper side of the housing space and on the second side wall side for detecting the pressure of the fluid being transferred, and the flow straightening section preferably has a first flow straightening member that guides the gas introduced into the housing space from the air intake port from the lower side of the housing space and on the first side wall side to the upper side of the housing space and on the second side wall side. In this case, the gas introduced into the containment space from the air intake can be efficiently directed towards the pressure sensor by the first rectifier. This allows for efficient cooling of the pressure sensor.

[0011] (5) In the pump device of (4) above, the housing has a bottom wall located below the housing space, and further comprises a support member provided on the bottom wall that supports the pump at a predetermined height from the bottom wall in the housing space, wherein the support member also serves as the first flow straightening member. In this case, the support member that supports the pump at a predetermined height from the bottom wall of the housing also serves as a first flow straightening member that guides the gas flow, thus simplifying the configuration of the pump device.

[0012] (6) The pump device of (4) or (5) is preferably disposed between the pressure sensor and the second side wall in the housing space and includes piping through which the transfer fluid flows, and the flow straightening section has a second flow straightening member that separates the pressure sensor and the piping. In this case, the second rectifier can suppress the flow of gas heated around the pressure sensor into the piping. This prevents the temperature of the transferred fluid flowing through the piping from rising.

[0013] (7) The pump device of (6) is arranged in the housing space and includes a heat dissipation section for dissipating heat generated from the heat-generating components, wherein the heat dissipation section includes a first heat dissipation member that covers the pressure sensor and a second heat dissipation member that dissipates heat generated from the pressure sensor to the housing from the end of the first heat dissipation member on the piping side, and preferably the second heat dissipation member also serves as the second flow straightening member. In this case, the second heat dissipation member, which dissipates heat generated from the pressure sensor from the first heat dissipation member to the housing, also serves as the second flow rectifier member that separates the pressure sensor from the piping, thus further simplifying the configuration of the pump device.

[0014] (8) In any of the pump devices described in (4) to (7) above, the exhaust port is provided on the first side wall above the air intake port, and the rectifier has a third rectifier member that extends vertically and is arranged on the first side wall side of the containment space above the air intake port, and a discharge channel is formed between the third rectifier member and the first side wall for guiding the gas to the exhaust port. In this case, the exhaust channel formed between the first side wall and the third rectifier member guides the gas to the exhaust port. This allows the gas heated around the pressure sensor to be efficiently discharged from the exhaust port to the outside of the housing.

[0015] (9) The pump device of (8) comprises a motor positioned above the pump in the housing space, and a connecting member positioned in the housing space and extending vertically to connect the ends of the pump and the motor on the first side wall side, wherein the connecting member also serves as the third flow straightening member. In this case, the connecting member that connects the ends of the pump and motor on the first side wall also serves as a third flow straightening member that forms a discharge channel that guides gas to the exhaust port, thus further simplifying the configuration of the pump device.

[0016] (10) In the pump device of (8) or (9) above, it is preferable that the flow straightening section has a fourth flow straightening member which is positioned between the lower end of the third flow straightening member and the first side wall and closes the lower end of the discharge passage. In this case, the fourth flow rectifying member can prevent the gas flowing from the upper side toward the lower side of the discharge flow path from merging with the gas introduced from the air supply port. Accordingly, circulation of the gas heated around the pressure sensor in the accommodation space can be suppressed.

[0017] (11) In the pump device according to any one of (3) to (10) above, it is preferable that the exhaust ports are a plurality of slits formed in the housing and extending in one direction, and the flow rectifying portion includes a plurality of fin members provided to protrude toward the accommodation space from edges of the respective slits extending in the one direction, and extending along the one direction. In this case, gas is rectified by the plurality of fin members extending along one direction at edges of the plurality of slits that serve as exhaust ports of the housing, so that retention of gas in the accommodation space can be suppressed. Effects of the Invention

[0018] According to the present disclosure, deterioration of a transfer fluid due to thermal influence can be suppressed. Brief Description of the Drawings

[0019] [Figure 1] It is a perspective view showing the pump device according to the first embodiment of the present disclosure. [Figure 2] It is a cross-sectional view showing the pump of the pump device and components around the pump. [Figure 3] It is a cross-sectional view showing the pump in a state where the piston of the pump device has moved to the rearmost position. [Figure 4] It is a side view of the pump device viewed from the front. [Figure 5] It is a side view of the pump device viewed from the rear. [Figure 6] It is a plan view of the pump device viewed from above. [Figure 7] It is a perspective view of a top wall of a housing in a pump device according to a second embodiment of the present disclosure, viewed from the accommodation space side. [Figure 8]This is a perspective view of the first side wall of the enclosure, as seen from the side of the housing space. [Modes for carrying out the invention]

[0020] Next, preferred embodiments will be described with reference to the attached drawings. <First Embodiment> Figure 1 is a perspective view showing a pump device P according to the first embodiment of this disclosure. The pump device P comprises a pump 1, a motor 11, a connecting member 12, a transmission mechanism 13, a pressure sensor 14, a pair of pipes 40, and a housing 50. Hereinafter, in this specification, directions such as "up," "down," "right," "left," "front," and "rear" refer to the directions shown in Figure 1.

[0021] Pump 1 draws in and discharges the fluid to be transferred. The motor 11, connecting member 12, transmission mechanism 13, pressure sensor 14, and piping 40 are components attached to pump 1. Pump 1, motor 11, connecting member 12, transmission mechanism 13, pressure sensor 14, and a portion of piping 40 are housed in the housing 50.

[0022] [pump] Figure 2 is a cross-sectional view showing pump 1 and its surrounding components. In Figures 1 and 2, pump 1 is a diaphragm pump (dispense pump) that supplies a fixed amount of a transfer fluid, such as a chemical solution used in semiconductor manufacturing equipment. Pump 1 comprises a housing 2, a piston 3, a shaft 4, a rolling diaphragm 5, a mounting frame 6, and a linear motion mechanism 7.

[0023] The housing 2 comprises a cylinder 2a and a pump head 2b. The cylinder 2a is formed in the shape of a bottomed rectangular tube and opens to the rear. The pump head 2b is formed in the shape of a bottomed rectangular tube and opens to the front. The pump head 2b is attached to the cylinder 2a so as to close the rear opening of the cylinder 2a. The internal space of the pump head 2b, together with the internal space of the cylinder 2a, constitutes a space for housing the piston 3.

[0024] A first connection port 2c is formed through the upper side of the peripheral wall of the pump head 2b. A first pipe 41 (described later) is connected to the first connection port 2c. A second connection port 2d is formed through the lower side of the peripheral wall of the pump head 2b. A second pipe 44 (described later) is connected to the second connection port 2d. Of the first connection port 2c and the second connection port 2d, one functions as an inlet through which the transfer fluid is drawn in, and the other functions as an outlet through which the transfer fluid is discharged.

[0025] The piston 3 is located within the housing 2 and is capable of reciprocating in the front-rear direction relative to the housing 2. The piston 3 is cylindrical in shape. The shaft 4 extends in the front-rear direction, passing through the cylinder 2a. The front end of the shaft 4 is connected to the piston 3. The rear end of the shaft 4 is in contact with the front end of the connecting body 35 (described later) of the linear motion mechanism 7.

[0026] The rolling diaphragm 5 is located inside the housing 2. The rolling diaphragm 5 is made of a resin such as PTFE (polytetrafluoroethylene). The rolling diaphragm 5 has a fixed part 5a attached to the housing 2, a movable part 5b attached to the piston 3, and a connecting part 5c that connects the fixed part 5a and the movable part 5b.

[0027] The fixed part 5a is formed in an annular shape and is sandwiched and fixed between the cylinder 2a and the pump head 2b. The movable part 5b is formed in a disc shape and is fixed to the front end face of the piston 3. The movable part 5b moves back and forth integrally with the piston 3. The connecting part 5c is formed in a thin (thin film) form and is flexible. The connecting part 5c connects the radial inner end of the fixed part 5a and the radial outer end of the movable part 5b.

[0028] As shown in Figure 2, when the piston 3 is in its foremost position, the connecting portion 5c deforms into a cylindrical shape along the outer circumferential surface of the piston 3, and the entire inner circumferential surface of the connecting portion 5c is in close contact with the outer circumferential surface of the piston 3. From this state, when the piston 3 moves to its rearmost position (see Figure 3), the connecting portion 5c deforms so as to bend into a U-shape in cross-section between the inner circumferential surface of the cylinder 2a and the outer circumferential surface of the piston 3. In this state, the connecting portion 5c is in close contact with the inner circumferential surface of the cylinder 2a and the outer circumferential surface of the piston 3, respectively.

[0029] Figure 3 is a cross-sectional view showing the pump 1 with the piston 3 moved to its rearmost position. In Figures 2 and 3, a pump chamber 2e is formed within the housing 2, partitioned by a rolling diaphragm 5. The pump chamber 2e is enclosed by the rolling diaphragm 5 and the pump head 2b. The pump chamber 2e communicates with the first connection port 2c and the second connection port 2d of the pump head 2b, respectively. The volume of the pump chamber 2e changes with the reciprocating movement of the piston 3.

[0030] In Figures 1 and 2, the mounting frame 6 is a frame on which the linear motion mechanism 7 is mounted at the rear of the housing 2. The mounting frame 6 has a first partition plate 21, a second partition plate 22, a third partition plate 23, a plurality of first spacers 25, a plurality of second spacers 26, and a plurality of third spacers 27. The first partition plate 21, the second partition plate 22, and the third partition plate 23 are all formed in the same square shape. The first spacers 25, the second spacers 26, and the third spacers 27 are all formed in the cylindrical shape and extend in the front-rear direction.

[0031] Behind cylinder 2a, a first partition plate 21, a plurality of first spacers 25, a second partition plate 22, a plurality of second spacers 26, a third partition plate 23, and a plurality of third spacers 27 are arranged in this order from the front. The plurality of first spacers 25 are positioned between the four corners of the first partition plate 21 and the four corners of the second partition plate 22. The plurality of second spacers 26 are positioned between the four corners of the second partition plate 22 and the four corners of the third partition plate 23. The plurality of third spacers 27 are positioned at the four corners of the third partition plate 23.

[0032] The mounting frame 6 is fixed to the housing 2 together with the connecting member 12 by a plurality of bolts 15. Each bolt 15 passes through the connecting member 12, the third spacer 27, the third partition plate 23, the second spacer 26, the second partition plate 22, the first spacer 25, and the first partition plate 21 in this order, and is tightened into a threaded hole (not shown) formed in the cylinder 2a.

[0033] The linear motion mechanism 7 is a mechanism that converts the rotational motion of the motor 11 into linear motion to move the piston 3 back and forth. In this embodiment, the linear motion mechanism 7 is, for example, a ball screw mechanism and has a support part 31, a shaft body 32, a nut 34, a connecting body 35, and a plurality of balls (not shown).

[0034] The support portion 31 is formed in a cylindrical shape and is fixed to the mounting frame 6 at the rear of the housing 2. In this embodiment, the support portion 31 is fixed to the third partition plate 23 with a through hole 23a formed in the third partition plate 23.

[0035] The shaft body 32 is positioned coaxially with the axis C of the shaft 4. The shaft body 32 has a male threaded portion 32a, a shaft body portion 32b supported by a support portion 31, and a connecting portion 32c to which the transmission mechanism 13 is connected.

[0036] The shaft body portion 32b is inserted through the through hole 22a formed in the second partition plate 22 and into the inner circumference of the support portion 31. The shaft body portion 32b is rotatably supported with respect to the support portion 31. The shaft body portion 32b is rotatably supported with respect to the support portion 31. The male thread portion 32a extends forward from the front end of the shaft body portion 32b and is positioned between the first partition plate 21 and the second partition plate 22.

[0037] The rear end of the shaft body portion 32b protrudes rearward through the connecting member 12. The connecting portion 32c extends rearward from the rear end of the shaft body portion 32b. The driven pulley 13b (described later) of the transmission mechanism 13 is connected to the connecting portion 32c. As a result, the shaft body 32 is rotationally driven by the motor 11 via the transmission mechanism 13.

[0038] In Figures 2 and 3, the nut 34 is screwed onto the male threaded portion 32a of the shaft 32 via a plurality of balls. The nut 34 is prevented from rotating around axis C together with the male threaded portion 32a by a regulating means (not shown) provided on the mounting frame 6. As a result, when the shaft 32 rotates around axis C relative to the support portion 31, the male threaded portion 32a rotates, allowing the nut 34 to reciprocate axially relative to the male threaded portion 32a (see also Figure 3).

[0039] The connecting body 35 connects the nut 34 and the shaft 4. The connecting body 35 is formed in a bottomed cylindrical shape with an open rear end. The nut 34 is inserted and fixed to the inner circumference of the rear portion of the connecting body 35. The front portion of the connecting body 35 is inserted into the through hole 21a formed in the first partition plate 21. The front end of the connecting body 35 is fixed to the rear end of the shaft 4. As a result, the piston 3 reciprocates in the front-rear direction together with the nut 34 via the shaft 4 and the connecting body 35.

[0040] The motor 11 is a drive source that rotationally drives the shaft 32 of the linear motion mechanism 7. The motor 11 is located above the rear of the pump 1. The motor 11 has a motor body 11a and an output shaft 11b. The motor body 11a is fixed to the connecting member 12 by a plurality of bolts 16, in contact with the upper front surface of the connecting member 12. The output shaft 11b protrudes rearward from the motor body 11a, passing through the connecting member 12. Behind the connecting member 12, the output shaft 11b of the motor 11 is arranged parallel to the connection portion 32c of the shaft 32.

[0041] The connecting member 12 is, for example, a rectangular plate member and extends vertically at the rear of the pump 1. The lower part of the connecting member 12 is fixed to the housing 2 of the pump 1 via the mounting frame 6 by bolts 15, as described above. The motor body 11a of the motor 11 is fixed to the upper part of the connecting member 12 by bolts 16, as described above. In this way, the connecting member 12 connects the rear ends of the pump 1 and the motor 11 and holds the motor 11 in an upwardly separated position relative to the pump 1.

[0042] The transmission mechanism 13 is a mechanism that transmits the rotation of the output shaft 11b of the motor 11 to the connection portion 32c of the shaft body 32. The transmission mechanism 13 is located behind the connecting member 12. The transmission mechanism 13 includes a drive pulley 13a, a driven pulley 13b, and a belt 13c.

[0043] The drive pulley 13a is connected to the output shaft 11b of the motor 11 and is rotationally driven by the output shaft 11b. The driven pulley 13b is connected to the connection portion 32c of the shaft body 32 and is rotatable around axis C together with the connection portion 32c. The outer diameter of the driven pulley 13b is larger than the outer diameter of the drive pulley 13a. The belt 13c is formed in an endless shape and is stretched between the drive pulley 13a and the driven pulley 13b.

[0044] When the output shaft 11b of the motor 11 is rotated, the rotation of the output shaft 11b is transmitted to the connection portion 32c of the shaft body 32 via the drive pulley 13a, belt 13c, and driven pulley 13b. At this time, since the outer diameter of the driven pulley 13b is larger than the outer diameter of the drive pulley 13a, the rotation of the output shaft 11b is reduced by a predetermined reduction ratio and transmitted to the connection portion 32c of the shaft body 32.

[0045] With the above configuration, when the motor 11 is driven, the shaft 32 of the linear motion mechanism 7 rotates around axis C via the transmission mechanism 13 from its output shaft 11b. When the shaft 32 rotates, its rotational motion is converted into linear motion in the axial direction by the nut 34, and the piston 3 reciprocates in the axial direction via the connecting body 35 and shaft 4. When the piston 3 reciprocates, the rolling diaphragm 5 deforms, and the volume of the pump chamber 2e changes.

[0046] When the piston 3 moves backward, an intake process (see Figure 3) is performed in which the fluid to be transferred is drawn into the pump chamber 2e from the first connection port 2c (or the second connection port 2d). When the piston 3 moves forward, a discharge process (see Figure 2) is performed in which the fluid to be transferred from the pump chamber 2e is discharged from the second connection port 2d (or the first connection port 2c). In this way, the intake process and the discharge process are repeated alternately, thereby supplying a constant amount of fluid to be transferred from the pump 1.

[0047] [Piping and pressure sensors] Figure 4 is a side view of the pump device P as seen from the front. Note that the fourth side wall 54 (see Figure 5), which will be described later, of the housing 50 is not shown in Figures 1 and 4. In Figures 1 and 4, the pair of pipes 40 in the pump device P consist of a first pipe 41 and a second pipe 44 connected to the pump 1. The fluid to be transferred flows through the first pipe 41 and the second pipe 44, respectively. The first pipe 41 has a lower pipe section 42 and an upper pipe section 43 connected to the lower pipe section 42.

[0048] The lower pipe section 42 is, for example, a T-shaped joint pipe and has a first connecting end 42a opening downwards, a second connecting end 42b opening upwards, and a third connecting end 42c opening backwards. The first connecting end 42a and the third connecting end 42c of the lower pipe section 42 are located in the housing space 50a of the housing 50. The lower pipe section 42 is located in the housing space 50a between the pressure sensor 14 and the lower plate portion 52b of the second side wall 52, which will be described later.

[0049] The first connecting end 42a of the lower pipe section 42 is connected to the first connecting port 2c (see Figure 2) of the housing 2 of the pump 1. The second connecting end 42b of the lower pipe section 42 penetrates the stepped plate section 52c (described later) of the second side wall 52 and is located outside the housing 50.

[0050] The upper pipe section 43 of the first pipe 41 is, for example, an elbow-type joint pipe and is located outside the housing 50. One end of the upper pipe section 43 is connected to the second connecting end 42b of the lower pipe section 42. The other end of the upper pipe section 43 is open toward the front.

[0051] The second pipe 44 is, for example, an elbow-shaped joint pipe, and has a first connecting end 44a that opens upward and a second connecting end 44b that opens forward. The first connecting end 44a of the second pipe 44 is connected to the second connection port 2d (see Figure 2) of the housing 2 of the pump 1. The second connecting end 44b of the second pipe 44 penetrates the lower plate portion 52b (described later) of the second side wall 52 and is located outside the housing 50.

[0052] The pressure sensor 14 is attached to the third connection end 42c of the lower pipe section 42 in the first piping 41. The external shape of the pressure sensor 14 is, for example, cylindrical. The pressure sensor 14 detects the pressure of the transfer fluid flowing through the lower pipe section 42.

[0053] The pressure sensor 14 contains an electronic component (not shown) that generates heat when energized. Therefore, the pressure sensor 14 is a heat-generating component that is attached to the pump 1 and placed in the housing space 50a of the housing 50. Here, a heat-generating component is a component that generates heat and is placed in the housing space 50a of the housing 50, attached to the pump 1, and is positioned in a location where the transfer fluid sucked in and discharged by the pump 1 is affected by heat.

[0054] [Cabinet] The housing 50 is formed in a roughly rectangular parallelepiped shape. Inside the housing 50, there is a housing space 50a that accommodates the pump 1, motor 11, connecting member 12, transmission mechanism 13, pressure sensor 14, and part of the piping 40. The housing 50 has a first side wall 51, a second side wall 52, a third side wall 53, a fourth side wall 54 (see Figure 5), a top wall 55, and a bottom wall 56. The first side wall 51, the second side wall 52, the third side wall 53, the fourth side wall 54, the top wall 55, and the bottom wall 56 are each made of plate material.

[0055] The first side wall 51 is the rear side wall of the housing 50. The second side wall 52 is the front side wall of the housing 50. The first side wall 51 and the second side wall 52 face each other across the housing space 50a. The second side wall 52 has an upper plate portion 52a and a lower plate portion 52b that extend in the vertical direction, and a stepped plate portion 52c that extends in the front-rear direction. The upper plate portion 52a is located behind the lower plate portion 52b and is shorter in the vertical direction than the lower plate portion 52b. The stepped plate portion 52c connects the lower end of the upper plate portion 52a and the upper end of the lower plate portion 52b.

[0056] The third side wall 53 is the right side wall of the housing 50. The rear edge of the third side wall 53 is connected to the right edge of the first side wall 51. The front edge of the third side wall 53 is connected to the right edge of the second side wall 52. The vertical dimension of the third side wall 53 is the same as the vertical dimension of the first side wall 51 (second side wall 52). The front-to-back dimension of the third side wall 53 is longer than the left-to-right dimension of the first side wall 51 (second side wall 52).

[0057] Figure 5 is a side view of the pump device P as seen from the rear. In Figures 4 and 5, the fourth side wall 54 is the left side wall of the housing 50. The fourth side wall 54 faces the third side wall 53 across the housing space 50a. The rear edge of the fourth side wall 54 is connected to the left edge of the first side wall 51. Although not shown in the illustration, the front edge of the fourth side wall 54 is connected to the left edge of the second side wall 52. The vertical and horizontal dimensions of the fourth side wall 54 are the same as the vertical and horizontal dimensions of the third side wall 53.

[0058] Figure 6 is a plan view of the pump device P as seen from above. In Figures 4 to 6, the top wall 55 is positioned above the housing space 50a of the housing 50. The rear and front edges of the top wall 55 are connected to the upper edges of the first side wall 51 and the second side wall 52 (upper plate portion 52a), respectively. The right and left edges of the top wall 55 are connected to the upper edges of the third side wall 53 and the fourth side wall 54, respectively.

[0059] The bottom wall 56 is located below the housing space 50a of the housing 50. The bottom wall 56 is longer in the front-to-back direction than the top wall 55. The lower edge of the first side wall 51 is connected to the rear end of the upper surface of the bottom wall 56. The lower edge of the second side wall 52 (lower plate portion 52b) is connected to the front end of the upper surface of the bottom wall 56. The lower edges of the third side wall 53 and the fourth side wall 54 are connected to the right and left edges of the bottom wall 56, respectively.

[0060] [Support member] In Figures 1 and 4, the pump device P includes a support member 17 that supports the pump 1 at a predetermined height from the bottom wall 56 within the housing space 50a of the housing 50. In this embodiment, the support member 17 supports the housing 2 of the pump 1 at a height position where the second connection end 44b of the second pipe 44 does not abut against the bottom wall 56. The support member 17 is formed from a plate member having substantially the same dimensions in the left-right direction as the bottom wall 56 and is provided on the upper surface of the bottom wall 56. The support member 17 has, in order from the rear to the front, a first mounting portion 17a, a first leg portion 17b, a mounting portion 17c, a second leg portion 17d, and a second mounting portion 17e.

[0061] The first mounting portion 17a and the second mounting portion 17e each extend in the front-rear direction. The first mounting portion 17a is fixed in surface contact with the upper surface of the bottom wall 56 near the first side wall 51. The second mounting portion 17e is fixed in surface contact with the upper surface of the bottom wall 56 near the second side wall 52.

[0062] The first leg portion 17b extends upward and forward from the front edge of the first mounting portion 17a, inclined. The second leg portion 17d extends upward and backward from the rear edge of the second mounting portion 17e, inclined. The first leg portion 17b is longer in the front-rear direction than the second leg portion 17d and is inclined more gently than the second leg portion 17d.

[0063] The mounting portion 17c extends in the front-rear direction parallel to the bottom wall 56. The rear end edge of the mounting portion 17c is connected to the front end edge of the first leg portion 17b. The front end edge of the mounting portion 17c is connected to the rear end edge of the second leg portion 17d. The housing space 50a of the housing 50 is formed by being surrounded by the support member 17, the first side wall 51, the second side wall 52, and the top wall 55.

[0064] The cylinder 2a of the pump 1 is mounted on the upper surface of the mounting section 17c. The cylinder 2a is fixed to the mounting section 17c by a plurality of bolts 18. As a result, the support member 17 supports the pump 1 at a predetermined height from the bottom wall 56 within the housing space 50a of the housing 50.

[0065] With the pump 1 supported by the support member 17, the pressure sensor 14 connected to the third connection end 42c of the first pipe 41 is located on the upper and front side (second side wall 52 side) of the housing space 50a. A portion (rear part) of the pressure sensor 14 is located above the front end of the first leg portion 17b of the support member 17, with the mounting frame 6 in between. The motor 11 is located behind the pressure sensor 14. The connecting member 12 is arranged parallel to and opposite the first side wall 51, with the transmission mechanism 13 in between.

[0066] [Air intake and exhaust vents] In Figures 1, 5, and 6, the housing 50 has an air intake port 57, a first exhaust port (exhaust port) 58, and a second exhaust port (exhaust port) 59. The air intake port 57 is located on the lower side of the first side wall 51. In this embodiment, the air intake port 57 is a circular hole formed through the lower end of the first side wall 51 in the front-rear direction.

[0067] The first exhaust port 58 is located in the first side wall 51, above the air intake port 57. In this embodiment, the first exhaust port 58 is composed of a plurality of slits 58a formed in the first side wall 51 above the air intake port 57, at equal intervals in the left-right direction and penetrating in the front-rear direction. Each slit 58a extends vertically at a position in the first side wall 51 facing the connecting member 12.

[0068] The second exhaust port 59 is provided in the top wall 55, which is located above the air intake port 57. In this embodiment, the second exhaust port 59 is composed of a plurality of slits 59a and a plurality of slits 59b formed in the top wall 55. The plurality of slits 59a are formed on the rear side of the top wall 55, at equal intervals in the left-right direction and penetrating vertically. The plurality of slits 59b are formed on the front side of the top wall 55, at equal intervals in the left-right direction and penetrating vertically. Each of the slits 59a and 59b extends in the front-rear direction in the top wall 55.

[0069] As described above, a gas that cools the heat-generating component, the pressure sensor 14, is introduced into the housing space 50a of the housing 50 from the air intake port 57. This gas is, for example, air. In the housing space 50a of the housing 50, the gas heated around the pressure sensor 14 is discharged to the outside of the housing 50 from the first exhaust port 58 and the second exhaust port 59.

[0070] [Heat dissipation part] In Figures 1 and 4, the pump device P includes a heat dissipation section 70 that dissipates heat generated from the pressure sensor 14 within the housing space 50a of the housing 50. The heat dissipation section 70 in this embodiment has a first heat dissipation member 71, a second heat dissipation member 72, and a third heat dissipation member 73 arranged in the housing space 50a.

[0071] The first heat dissipation member 71 is provided on the pressure sensor 14. The first heat dissipation member 71 consists of a pair of left and right divided pieces 71a and 71b formed in a substantially semi-cylindrical shape. These divided pieces 71a and 71b cover the outer circumferential surface of the pressure sensor 14. Above the pressure sensor 14, one end of each divided piece 71a and 71b that is adjacent in the circumferential direction is fixed to each other by a bolt 74. Below the pressure sensor 14, the other end of each divided piece 71a and 71b that is adjacent in the circumferential direction is fixed to each other by a bolt 75.

[0072] The second heat dissipation member 72 dissipates heat generated from the pressure sensor 14 from the first heat dissipation member 71 to the housing 50. The second heat dissipation member 72 connects the front end (first pipe 41 side) of the first heat dissipation member 71 to the top wall 55 of the housing 50. In this embodiment, the second heat dissipation member 72 is made of a plate member whose dimensions in the left-right direction are approximately the same as those of the top wall 55.

[0073] The second heat dissipation member 72 is formed in an inverted L shape when viewed from the side and has a horizontal plate portion 72a and a vertical plate portion 72b. The horizontal plate portion 72a is fixed to the top wall 55 by a pair of left and right bolts 76 while in contact with the lower surface of the top wall 55. Each bolt 76 is driven through the slit 59b from above the top wall 55 and tightened into a screw hole (not shown) formed in the horizontal plate portion 72a.

[0074] The vertical plate portion 72b of the second heat dissipation member 72 extends downward from the rear end of the horizontal plate portion 72a. The lower part of the vertical plate portion 72b is positioned between the third connection end 42c of the first pipe 41 and the pressure sensor 14. The pressure sensor 14 is connected to the third connection end 42c by passing through the vertical plate portion 72b. The rear surface of the lower part of the vertical plate portion 72b abuts against the front ends of each segmented piece 71a, 71b of the first heat dissipation member 71. The heat generated from the pressure sensor 14 is dissipated from the front end of the first heat dissipation member 71 through the second heat dissipation member 72 to the top wall 55 of the housing 50.

[0075] The third heat dissipation member 73, like the second heat dissipation member 72, dissipates heat generated from the pressure sensor 14 from the first heat dissipation member 71 to the housing 50. The third heat dissipation member 73 connects the upper end of the first heat dissipation member 71 to the top wall 55 of the housing 50. In this embodiment, the third heat dissipation member 73 is made of a plate member and is positioned behind the second heat dissipation member 72, perpendicular to the vertical plate portion 72b of the second heat dissipation member 72. The front side surface of the third heat dissipation member 73 abuts against the rear surface of the vertical plate portion 72b.

[0076] The upper end of the third heat dissipation member 73 is fixed to the top wall 55 by a pair of front and rear bolts 77, with the bolts in contact with the lower surface of the top wall 55. Each bolt 77 passes through the slit 59b from above the top wall 55 and is tightened into a threaded hole (not shown) formed in the third heat dissipation member 73.

[0077] The lower end of the third heat dissipation member 73 is integrally provided with the segmented piece 71a of the first heat dissipation member 71. The heat generated from the pressure sensor 14 is dissipated from the upper end of the first heat dissipation member 71 through the third heat dissipation member 73 to the top wall 55 of the housing 50. The lower end of the third heat dissipation member 73 may be provided separately from the segmented piece 71a of the first heat dissipation member 71, or it may be provided integrally with or separately from the segmented piece 71b of the first heat dissipation member 71.

[0078] [Rectification section] In Figure 4, the pump device P includes a flow straightening section 80 that straightens the flow of gas introduced into the containment space 50a from the air intake port 57 of the housing 50. In Figure 4, the direction of gas flow is indicated by white arrows. The flow straightening section 80 in this embodiment has a first flow straightening member 81, a second flow straightening member 82, a third flow straightening member 83, and a fourth flow straightening member 84, which are arranged in the containment space 50a of the housing 50.

[0079] The first rectifier member 81 is a member that guides the gas introduced into the containment space 50a from the air intake port 57 from the lower and rear side (first side wall 51 side) of the containment space 50a to the upper and front side (second side wall 52 side) of the containment space 50a. In this embodiment, the first leg portion 17b of the support member 17 that supports the pump 1 also serves as the first rectifier member 81.

[0080] Therefore, the gas introduced into the containment space 50a from the air intake port 57 is guided from the lower and rear side (first side wall 51 side) of the containment space 50a along the first leg portion 17b to the upper and front side of the containment space 50a. As a result, the pressure sensor 14 located on the upper and front side of the containment space 50a is cooled by the gas. Note that the first rectifier member 81 may be a separate, dedicated member from the support member 17.

[0081] The second rectifier member 82 is a member that separates the pressure sensor 14 from the lower pipe section 42 of the first pipe 41. The second rectifier member 82 suppresses the flow of gas heated around the pressure sensor 14 towards the first pipe 41. In this embodiment, the vertical plate portion 72b of the second heat dissipation member 72, which dissipates heat generated from the pressure sensor 14 to the housing 50, also serves as the second rectifier member 82.

[0082] Therefore, the vertical plate portion 72b can suppress the flow of gas heated around the pressure sensor 14 towards the first pipe 41. By suppressing the flow towards the first pipe 41 side, a portion of the gas heated around the pressure sensor 14 is discharged to the outside of the housing 50 through the second exhaust port 59 of the top wall 55. The remaining gas heated around the pressure sensor 14 flows rearward along the top wall 55 above the housing space 50a. The second rectifier member 82 may be a separate, dedicated member from the second heat dissipation member 72.

[0083] The third rectifier member 83 is a member that extends vertically and is positioned on the rear side (first side wall 51 side) of the containment space 50a and above the air intake port 57. In this embodiment, the connecting member 12 that connects the rear ends of the pump 1 and the motor 11 also serves as the third rectifier member 83. Between the connecting member 12 and the first side wall 51, a discharge passage 85 is formed that guides gas to the first exhaust port 58. The discharge passage 85 is formed extending vertically between the connecting member 12 and the first side wall 51.

[0084] As described above, the gas flowing backward along the top wall 55 above the containment space 50a flows into the discharge channel 85 and is discharged to the outside of the housing 50 from the first exhaust port 58 of the first side wall 51. The third rectifier member 83 may be a separate, dedicated member from the connecting member 12.

[0085] The fourth rectifier member 84 is a member positioned between the lower end of the third rectifier member 83 and the first side wall 51. In this embodiment, the fourth rectifier member 84 is integrally formed with the lower end of the connecting member 12 (third rectifier member 83). The fourth rectifier member 84 protrudes rearward from the lower end of the connecting member 12. The rear protruding end face of the fourth rectifier member 84 abuts against the front surface of the first side wall 51. As a result, the fourth rectifier member 84 closes the lower end of the discharge passage 85. The fourth rectifier member 84 may be integrally formed with the first side wall 51, or it may be provided separately from the first side wall 51 and the third rectifier member 83.

[0086] [Effects and Effects] According to the pump device P of the first embodiment, the pressure sensor 14, which is a heat-generating component located in the housing space 50a of the housing 50, is cooled by gas introduced from the air intake port 57 of the housing 50. The gas heated around the pressure sensor 14 is discharged to the outside of the housing 50 from the first exhaust port 58 and the second exhaust port 59. As a result, the temperature of the pressure sensor 14 is less likely to rise, and the rise in the temperature of the transferred fluid caused by the temperature rise of the pressure sensor 14 can be suppressed. Consequently, the deterioration of the transferred fluid due to thermal effects can be suppressed.

[0087] A heat dissipation unit 70 is positioned in the housing space 50a of the housing 50 to dissipate the heat generated from the pressure sensor 14. Therefore, the heat dissipation unit 70 makes it even more difficult for the temperature of the pressure sensor 14 to rise, thus further suppressing the rise in the temperature of the transferred fluid caused by the temperature rise of the pressure sensor 14.

[0088] The gas flow introduced into the containment space 50a from the air intake port 57 of the housing 50 is straightened by the flow straightening unit 80. This allows the pressure sensor 14 to be cooled efficiently.

[0089] The first rectifier member 81 guides the gas introduced into the containment space 50a from the air intake port 57 of the housing 50 from the lower and rear side of the containment space 50a to the upper and front side of the containment space 50a. Therefore, the first rectifier member 81 can efficiently direct the gas introduced into the containment space 50a from the air intake port 57 towards the pressure sensor 14. This allows the pressure sensor 14 to be cooled even more efficiently.

[0090] The support member 17, which supports the pump 1 at a predetermined height from the bottom wall 56 of the housing 50, also serves as a first flow straightening member 81 that guides the flow of gas. This simplifies the configuration of the pump device P.

[0091] The second rectifier member 82 separates the pressure sensor 14 from the first pipe 41. Therefore, the second rectifier member 82 can suppress the flow of gas heated around the pressure sensor 14 towards the first pipe 41. This suppresses the rise in temperature of the transfer fluid flowing through the first pipe 41.

[0092] The second heat dissipation member 72, which dissipates heat generated from the pressure sensor 14 from the first heat dissipation member 71 to the top wall 55 of the housing 50, also serves as the second flow straightening member 82 that separates the pressure sensor 14 from the first pipe 41. This further simplifies the configuration of the pump device P.

[0093] The third rectifier member 83 is positioned extending vertically at the rear of the housing space 50a of the housing 50 and above the air intake port 57. A discharge channel 85 is formed between the third rectifier member 83 and the first side wall 51 to guide the gas to the first exhaust port 58. Therefore, the discharge channel 85 allows the gas heated around the pressure sensor 14 to be efficiently discharged from the first exhaust port 58 of the first side wall 51 to the outside of the housing 50.

[0094] The connecting member 12 that connects the rear ends of the pump 1 and the motor 11 also serves as a third flow straightening member 83 that forms the discharge passage 85. This further simplifies the configuration of the pump device P.

[0095] The fourth rectifier member 84 is positioned between the lower end of the connecting member 12 (third rectifier member 83) and the first side wall 51, and closes the lower end of the discharge passage 85. Therefore, the fourth rectifier member 84 prevents the gas flowing from the top to the bottom of the discharge passage 85 from merging with the gas introduced from the air intake port 57. This suppresses the circulation of the gas heated around the pressure sensor 14 in the housing space 50a of the housing 50.

[0096] <Second Embodiment> Figure 7 is a perspective view of the top wall 55 of the housing 50 in the pump device P according to the second embodiment of this disclosure, viewed from the housing space 50a side. Figure 8 is a perspective view of the first side wall 51 of the housing 50 in the second embodiment, viewed from the housing space 50a side. This embodiment differs from the first embodiment in that the flow straightening section 80 further comprises a plurality of first fin members 86 and a plurality of second fin members 87.

[0097] In Figure 7, the multiple first fin members 86 are provided on the top wall 55. Specifically, the multiple first fin members 86 are provided on the edges of the multiple slits 59a and 59b, which are the second exhaust ports 59, extending in the front-rear direction (one direction). In this embodiment, each first fin member 86 is provided on the right edge of each slit 59a and 59b. Each first fin member 86 is provided projecting downward from the aforementioned edge of each slit 59a and 59b toward the storage space 50a (see Figure 4).

[0098] Each first fin member 86 extends in the front-rear direction along the edges of each slit 59a, 59b. In this embodiment, each first fin member 86 extends along the edges of each slit 59a, 59b over its entire length in the front-rear direction. Each first fin member 86 guides the gas near the top wall 55 on the upper side of the containment space 50a (see Figure 4) to flow from front to back.

[0099] Furthermore, at least one of the multiple first fin members 86 may be provided on the left edge of the slits 59a and 59b. Also, the first fin members 86 may be provided on a portion of the edge of the slits 59a and 59b in the front-rear direction.

[0100] In Figure 8, the multiple second fin members 87 are provided on the first side wall 51. Specifically, the multiple second fin members 87 are provided on the edges of the multiple slits 58a, which constitute the first exhaust port 58, extending in the vertical direction (one direction). In this embodiment, each second fin member 87 is provided on the left edge of each slit 58a. Each second fin member 87 is provided projecting forward from the aforementioned edge of each slit 58a toward the housing space 50a (see Figure 4).

[0101] Each second fin member 87 extends vertically along the edge of each slit 58a. In this embodiment, each second fin member 87 extends along the entire vertical length of the edge of each slit 58a. Each second fin member 87 guides the gas near the first side wall 51 in the discharge channel 85 (see Figure 4) to flow from top to bottom.

[0102] Furthermore, at least one of the multiple second fin members 87 may be provided on the right edge of the slit 58a. Also, the second fin members 87 may be provided on a portion of the edge of the slit 58a in the vertical direction.

[0103] Other components of this embodiment are the same as those of the first embodiment, and therefore are denoted by the same reference numerals, and their descriptions are omitted. The pump device P of the second embodiment also provides the same effects as the first embodiment. Furthermore, the gas is rectified by a plurality of first fin members 86 that extend along the front-rear direction at the edges of the plurality of slits 59a, 59b, which are the second exhaust ports 59 of the top wall 55. This makes it possible to suppress the stagnation of gas near the top wall 55 of the containment space 50a.

[0104] Furthermore, the gas is rectified by a plurality of second fin members 87 that extend vertically along the edges of the plurality of slits 58a, which are the first exhaust ports 58 of the first side wall 51. This makes it possible to suppress the accumulation of gas near the first side wall 51 of the containment space 50a. The rectifier 80 only needs to have at least one of the first fin member 86 and the second fin member 87.

[0105] <Other> In the pump device P of this embodiment, the pump 1 housed in the housing 50 is a diaphragm pump, but it may be a pump other than a diaphragm pump. The heat-generating component is not limited to the pressure sensor 14. For example, since the motor 11 has a stator that generates heat when energized, the motor 11 may be used as the heat-generating component if the motor 11 is positioned where the transferred fluid is affected by heat.

[0106] The embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. The scope of the invention is indicated by the claims, not in the sense described above, and is intended to include all modifications in the sense and scope equivalent to the claims. [Explanation of Symbols]

[0107] 1 pump 11 Motor 12 Connecting members 14. Pressure sensor (heat-generating component) 17 Support Member 40 Piping 50 cabinets 50a Accommodation space 51 First side wall 52 Second side wall 56 Bottom wall 57 Air supply port 58. First exhaust port (exhaust port) 58a Slit 59. Second exhaust port (exhaust port) 59a, 59b Slit 70 Heat radiation part 71 First heat dissipation member 72 Second heat dissipation member 80 Rectifier 81 First rectifier 82 Second rectifier member 83 Third rectifier member 84 Fourth rectifier member 85 Discharge channel 86 First fin member (fin member) 87. Second fin member (fin member) P pump device

Claims

1. A pump device comprising: a pump for drawing in and discharging a transfer fluid; a housing having a housing space for housing the pump; and a heat-generating component arranged in the housing space in conjunction with the pump, The aforementioned enclosure is An air intake port for introducing gas to cool the heat-generating component into the containment space, A pump device having, above the air intake port, an exhaust port for discharging the gas surrounding the heat-generating component to the outside of the housing.

2. The pump device according to claim 1, further comprising a heat dissipation unit arranged in the aforementioned containment space for dissipating heat generated from the heat-generating component.

3. The pump device according to claim 1 or claim 2, further comprising a flow straightening unit for straightening the flow of the gas introduced into the containment space from the air intake port.

4. The housing has a first side wall and a second side wall that face each other across the housing space, The air intake opening is provided on the lower side of the first side wall, The heat-generating component is a pressure sensor located above the containment space and on the second side wall side, which detects the pressure of the transferred fluid. The pump device according to claim 3, wherein the rectifier section has a first rectifier member that guides the gas introduced into the containment space from the air intake port from the lower side of the containment space and the first side wall side to the upper side of the containment space and the second side wall side.

5. The housing has a bottom wall located below the housing space, The storage space further comprises a support member provided on the bottom wall, which supports the pump at a predetermined height from the bottom wall, The pump device according to claim 4, wherein the support member also serves as the first flow straightening member.

6. The aforementioned containment space is provided with a pipe through which a transfer fluid flows, located between the pressure sensor and the second side wall. The pump device according to claim 4, wherein the flow straightening section has a second flow straightening member that separates the pressure sensor and the piping.

7. The aforementioned housing space is provided with a heat dissipation section that dissipates heat generated from the heat-generating component, The heat dissipation section is A first heat dissipation member covering the pressure sensor, The system includes a second heat dissipation member that dissipates heat generated from the pressure sensor to the housing from the end of the first heat dissipation member on the piping side, The pump device according to claim 6, wherein the second heat dissipation member also serves as the second rectifier member.

8. The exhaust port is provided on the first side wall above the air intake port. The rectifier section has a third rectifier member that extends vertically and is positioned on the first side wall side of the containment space and above the air intake port. The pump device according to claim 4, wherein a discharge channel for guiding the gas to the exhaust port is formed between the third rectifier member and the first side wall.

9. A motor is positioned above the pump in the aforementioned housing space, The facility includes a connecting member that is arranged in the aforementioned housing space, extends in the vertical direction, and connects the ends of the pump and the motor on the first side wall side, The pump device according to claim 8, wherein the connecting member also serves as the third flow straightening member.

10. The pump device according to claim 8, wherein the flow straightening section is disposed between the lower end of the third flow straightening member and the first side wall and has a fourth flow straightening member that closes the lower end of the discharge passage.

11. The exhaust port is a plurality of slits formed in the housing and extending in one direction. The pump device according to claim 3, wherein the flow straightening portion is provided projecting toward the housing space from the edge of each slit extending in the one direction and has a plurality of fin members extending along the one direction.

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