Method and apparatus for verifying a control system

Abstract

This technology provides a way to verify the operation of a control system, including image recognition functionality, without using actual hardware. [Solution] This verification method is a method for verifying a control system that controls the operation of a device based on a camera image provided on the device, and repeatedly performs the following steps: inputting a command signal Co output from the control system 2 into a simulator 32 to simulate the operation of the operating parts that constitute the device; generating a simulated image Im that simulates a camera image corresponding to the position of the operating parts in the simulator 32; and inputting the simulated image Im into the control system 2. This makes it possible to verify the operation of the control system 2, including the image recognition function, without using the actual device.

Description

[Technical Field]

[0001] The present invention relates to a method for verifying a control system of an apparatus without using an actual machine. [Background Art]

[0002] Conventionally, when verifying the operation of a control system for performing operation control on various types of apparatuses, verification has been performed using an actual machine. However, in this case, the control system cannot be verified at the design stage when the actual machine has not been completed. Accordingly, in recent years, a method of forming a three-dimensional simulation model in a virtual space using design data such as CAD data of an apparatus to verify the operation of a control system has been practiced.

[0003] However, in a control system of a type that performs operation control using an image captured by an imaging device provided in the apparatus, a captured image cannot be acquired on a simulation model. Accordingly, in Patent Document 1, in a simulation using a three-dimensional model, operation check is performed by simulating detection of a two-dimensional position by performing pattern recognition instead of image recognition. [Prior Art Documents] [Patent Documents]

[0004] [Patent Document 1] Japanese Unexamined Patent Publication No. 2011-65399 [Summary of the Invention] [Problem to be Solved by the Invention]

[0005] However, although the method of Patent Document 1 enables checking the operation of each part of the apparatus, it cannot perform verification including the image recognition function of the apparatus.

[0006] An object of the present invention is to provide a technique for performing operation verification of a control system including an image recognition function without using an actual machine. [Means for solving the problem]

[0007] To solve the above problems, the first invention is a verification method for a control system that controls the operation of a device based on a camera image provided on the device, the method comprising repeatedly performing the following steps: a) inputting a command signal output from the control system into a simulator to simulate the operation of the operating parts constituting the device; b) generating a simulated image that simulates the camera image corresponding to the position of the operating parts in the simulator in step a); and c) inputting the simulated image generated in step b) into the control system.

[0008] The second invention is a verification method of the first invention, wherein in step b), the simulated image corresponding to the position of the operating unit in the simulator is taken from a data table in which the position of the operating unit and the simulated image are linked.

[0009] The third invention is a verification method of the first invention, wherein in step b), a region corresponding to the position of the operating part in the simulator is extracted from a pre-stored large image to generate the simulated image.

[0010] The fourth invention is a verification method for any one of the first to third inventions, further comprising d) an anomaly detection step of monitoring whether the simulator is able to perform the operation corresponding to the command signal in step a).

[0011] The fifth invention is a method for verifying any one of the first to third inventions, wherein in step b), a simulated image containing an abnormality is generated.

[0012] The sixth invention is a verification device for a control system that controls the operation of a device based on a camera image provided in the device, comprising: a simulator that performs an operation simulation of an operating part constituting the device based on a command signal output from the control system; an image generation unit that generates a simulated image that simulates the camera image corresponding to the position of the operating part in the simulator; and a simulated image transmission unit that transmits the simulated image generated by the image generation unit to the control system. [Effects of the Invention]

[0013] According to the first to sixth inventions, the operation of a control system, including an image recognition function, can be verified without using an actual device.

[0014] In particular, according to the fourth invention, it is possible to confirm the operation of the control system when an abnormality occurs. [Brief explanation of the drawing]

[0015] [Figure 1] This is a block diagram showing the configuration of the verification device. [Figure 2] This is a functional block diagram of the verification device. [Figure 3] This flowchart shows the process of verifying a control system using a verification device. [Figure 4] This is a perspective view showing an exposure apparatus, which is an example of the equipment to be analyzed. [Modes for carrying out the invention]

[0016] Embodiments of the present invention will be described below with reference to the attached drawings. Note that the components described in these embodiments are merely illustrative and are not intended to limit the scope of the present invention to them alone. In the drawings, for ease of understanding, the dimensions and number of parts may be exaggerated or simplified as needed.

[0017] <1. Verification Equipment> FIG. 1 is a block diagram showing a conceptual configuration of a verification apparatus 1 according to an embodiment of the present invention. The verification apparatus 1 is an apparatus for verifying whether a control system 2 for controlling the operation of an apparatus 9 can be normally executed. The apparatus 9 operates an operating unit 9a and an imaging unit 9b provided in the apparatus 9 in accordance with a command signal Co from the control system 2. Specific examples of the apparatus 9, the operating unit 9a, and the imaging unit 9b will be described later.

[0018] As shown in FIG. 1, the verification apparatus 1 is configured to be able to communicate with a control system 2 to be verified via a network N. Note that the verification apparatus 1 and the control system 2 may be directly communicably connected via a wired connection or the like without going through the network N. The control system 2 outputs, based on a control program Pp, a command signal Co for causing a controlled apparatus, which will be described later, to perform operation control.

[0019] The verification apparatus 1 includes a computer main body 11, a display unit 12, and an input unit 13. The computer main body 11 includes a processor 111 such as a CPU, a memory 112 such as a RAM, and a storage unit 113 such as a hard disk drive. The display unit 12 displays an image output from the computer main body 11. The display unit 12 is, for example, a liquid crystal display such as a PC monitor. The input unit 13 is capable of inputting commands to the computer main body 11. The input unit 13 is, for example, a keyboard and a mouse.

[0020] The memory 112 and the storage unit 113 are connected to the processor 111 via bus wiring (not shown). The storage unit 113 stores a computer program Pe. The processor 111 loads the computer program Pe stored in the storage unit 113 into the memory 112, and sequentially executes codes included in the computer program Pe. Accordingly, the verification apparatus 1 verifies whether the control system 2 and the control program Pp that executes the control system 2 can be normally executed.

[0021] The computer program Pe is application software for causing the computer main body 11 to execute various processes related to the above verification processing. The computer program Pe is read from a storage medium 100 such as a CD or DVD and installed in the computer main body 11. However, the computer program Pe may be downloaded to the computer main body 11 via a network N such as the Internet.

[0022] Figure 2 is a functional block diagram of the verification unit 30 of the verification apparatus 1. The verification apparatus 1 includes the verification unit 30 as a processing unit implemented by software on the computer main body 11. The verification unit 30 includes a simulation execution unit 31, a simulator 32, a simulated image generation unit 33, and a simulated image transmission unit 34. The verification unit 30 also includes an image storage unit 300. The image storage unit 300 may use the storage unit 113 in the computer main body 11, or may include another memory.

[0023] The simulation execution unit 31 causes the simulator 32 to execute a simulation in accordance with a simulation execution instruction from a user input from the input unit 13. Specifically, after the apparatus 9 is commercialized, the simulation execution unit 31 inputs, to the control system 2, the same type of signal that is input to the control system 2 when controlling the operation of the apparatus 9. Accordingly, the control system 2 outputs a command signal Co for controlling the operation of each unit of the apparatus 9.

[0024] The apparatus 9, which is a controlled object in the control system 2, operates one or more operating units 9a in accordance with the command signal Co from the control system 2, and causes an imaging unit 9b to perform imaging. Then, the control system 2 analyzes a camera image Ic captured by the imaging unit 9b, checks the operation of the operating unit, and checks the situation after the operation. Then, the analysis result of the camera image Ic is fed back to subsequent control of the apparatus.

[0025] The simulator 32 constructs a virtual device M as a three-dimensional model of the device 9, which is the controlled object of the control system 2, on a virtual space S. This virtual space S is created on a computer. In this embodiment, the simulator 32 is created on the computer that constitutes the verification device 1, but it may also be created on another computer or on the cloud connected to the verification device 1 via a network N. The virtual device M, which is the three-dimensional model of the simulator 32, is a reproduction of the device 9 on the virtual space and has a virtual operating unit M1 corresponding to each operating unit 9a and a virtual imaging unit M2 corresponding to the imaging unit 9b.

[0026] When the command signal Co output from the control system 2 is input to the simulator 32, the virtual operating unit M1 moves in the virtual space S according to the instructions of the command signal Co. At this time, the positional relationship between the virtual imaging unit M2 and the various parts of the virtual device M changes, and therefore the image acquired by the virtual imaging unit M2 also changes.

[0027] The simulator 32 displays the operation of the virtual device M, which is generated by the command signal Co, on the display unit 12. The simulator 32 also passes the positional relationship between each part of the virtual device M and the virtual imaging unit M2 to the simulated image generation unit 33.

[0028] The simulated image generation unit 33 generates a simulated image Im that simulates a camera image corresponding to the position of the virtual operating unit M1 in the simulator 32. That is, based on the positional relationship between each part of the virtual device M and the virtual imaging unit M2 in the simulator 32, it generates a simulated image Im that would be acquired by the imaging unit 9b, which is in a similar positional relationship in the actual device 9.

[0029] In this embodiment, the image storage unit 300 stores a data table DT which links the relative positional relationships within the device 9 with the images that would be captured by the imaging unit 9b at those positional relationships. The simulated image generation unit 33 then selects an image from the data table DT that corresponds to the positional relationships input from the simulator 32, and sets that image as the simulated image Im.

[0030] The simulated image transmission unit 34 transmits the simulated image Im generated by the simulated image generation unit 33 to the control system 2. The control system 2 then analyzes the simulated image Im as if it were a camera image Ic captured by the imaging unit 9b in the device 9, and performs feedback control.

[0031] In such a verification apparatus 1, if the virtual operating unit M1 comes into contact with or collides with other components within the virtual apparatus M in the simulator 32, an error signal E1 is sent from the simulator 32 to the simulation execution unit 31. Also, if any malfunction occurs in the control system 2, an error signal E2 is sent from the control system 2 to the simulation execution unit 31.

[0032] This allows the simulation execution unit 31 to verify whether the control system 2 is performing appropriate control over the virtual device M.

[0033] <2. Verification of the control system> The verification process for control system 2 using verification device 1 will be explained with reference to Figure 3. Figure 3 is a flowchart showing the verification process for control system 2 using verification device 1.

[0034] When performing verification processing of control system 2, an operation simulation by control system 2 is performed as shown in Figure 3. First, the input unit 13 issues a simulation start instruction to the simulation execution unit 31. As a result, the simulation execution unit 31 starts the operation control processing of device 9 in control system 2. Consequently, the command signal Co that would normally be output from control system 2 to device 9 is output to simulator 32 (step S101).

[0035] As a result, the simulator 32 performs an operation simulation (step S102). Specifically, the simulator 32 operates the virtual operating unit M1 of the virtual device M according to the command signal Co, and displays the operation on the display unit 12. The simulator 32 also outputs the positional relationship between the virtual imaging unit M2 and each part of the virtual device M after the operation of the virtual operating unit M1 to the simulated image generation unit 33.

[0036] During the execution of step S102, the simulation execution unit 31 receives error signals E1 from the control system 2 and the simulator 32. In other words, the simulation execution unit 31 monitors whether or not an abnormality has occurred in the control system 2 and the simulator 32.

[0037] For example, when the virtual device M of the simulator 32 performs an action in response to a command signal Co from the control system 2, if the moved virtual operating part M1 comes into contact with another component, the simulator 32 outputs an error signal E1 to the simulation execution unit 31 and the control system 2. The simulation execution unit 31 monitors whether such an error signal E1 is input.

[0038] Following step S102, the simulated image generation unit 33 generates a simulated image Im based on the positional relationships input from the simulator 32 (step S103). Specifically, the simulated image generation unit 33 retrieves the image corresponding to the positional relationships input from the simulator 32 from the data table DT stored in the image storage unit 300. Then, the simulated image generation unit 33 hands over the generated simulated image Im to the simulated image transmission unit 34.

[0039] Here, each image included in the data table DT may be an image of an actual component, equivalent to an image acquired in the actual device 9, or it may be a simulated image created based on 3D data similar to that which constitutes the simulator 32.

[0040] In Figure 2, the image storage unit 300 stores three data tables DT, DT', and DT''. In this way, multiple images under different conditions may be used in the verification process. For example, the first data table DT contains an image equivalent to that acquired by the device 9 under normal conditions. The second data table DT' contains an image that was acquired in a normal positional relationship but has image acquisition problems such as being out of focus. The third data table DT'' contains an image that does not have a normal positional relationship. By checking the operation of the control system 2 using these simulated images Im in various states, the operation of the control system 2 in relation to phenomena that may occur in the actual device can be confirmed and verified.

[0041] Next, the simulated image transmission unit 34 transmits the simulated image Im generated by the simulated image generation unit 33 to the control system 2 (step S104). The control system 2 analyzes the received simulated image Im in the same way as the camera image Ic captured by the imaging unit 9b of the device 9 (step S105). Then, returning to step S101, the control system 2 outputs the next command signal Co.

[0042] For example, if the control system 2 aligns the operating unit 9a based on the position of a marker detected using the camera image Ic captured by the imaging unit 9b of the device 9, then in this operation simulation, the control system 2 generates the following command signal Co in order to align the virtual operating unit M1 based on the image analysis results of the simulated image Im in step S105.

[0043] Thus, in this verification device 1, the simulated image generation unit 33 can generate a simulated image Im equivalent to the camera image Ic obtained by the imaging unit 9b in the actual device 9, according to the position information from the simulator 32 having a virtual device M in the virtual space S. As a result, the control system 2 can generate a command signal Co by performing the same processing as for the actual device 9 when controlling the operation of the virtual device M in the virtual space S. In other words, the operation of the control system 2, including the image recognition function, can be verified without preparing the actual device 9.

[0044] Furthermore, by using not only images of normal conditions but also images of various abnormal conditions as simulated images (Im), it is possible to verify the operation of the control system 2 when an abnormality occurs in the actual device 9. In this case, the user can also verify the control system 2 by comparing the operation of the control system 2 when using images of normal conditions with the operation of the control system 2 when using images of abnormal conditions.

[0045] Furthermore, in the above description, the data tables DT' and DT'' which recorded simulated images Im in abnormal states had different types of abnormalities, but the present invention is not limited to this. For problems such as out-of-focus images or malfunctions in image acquisition conditions such as insufficient lighting, multiple data tables with varying degrees of problems may be prepared. For example, multiple data tables with varying degrees of out-of-focus images, such as normal images with no out-of-focus, slightly out-of-focus images, moderately out-of-focus images, and significantly out-of-focus images, can be prepared to verify what degree of out-of-focus the control system 2 can handle.

[0046] Furthermore, although the above description used data table DT recording a simulated image Im in a normal state and data tables DT' and DT'' recording a simulated image Im in an abnormal state, the present invention is not limited thereto. If the command signal Co of the control system 2 includes shooting conditions such as the exposure time in the imaging unit 9b and the brightness of the lighting during shooting, data tables may be prepared for each shooting condition. In this way, if the control system 2 has a function to change the shooting conditions using the analysis results of the camera image Ic when controlling the device 9, the effectiveness of this function can be verified in the simulation as well.

[0047] Furthermore, to address potential image recognition issues such as image roughness and noise levels in the camera image Ic acquired by the imaging unit 9b, multiple data tables with appropriately different characteristics may be prepared. By verifying these differences in conditions, it is possible to consider whether the type of imaging device used in the imaging unit 9b is appropriate.

[0048] <3. Examples of Target Equipment / Substrate Processing Equipment> Figure 4 is a perspective view showing an exposure apparatus 9A, which is an example of an apparatus 9 to be analyzed in the verification apparatus 1 according to the first embodiment of the present invention. The exposure apparatus 9A is a substrate processing apparatus for processing a substrate W, and is an apparatus that irradiates light onto the upper surface of a substrate W on which a layer of photosensitive material such as a resist (photosensitive layer) is formed, to draw a pattern. The substrate W is, for example, a semiconductor substrate, a printed circuit board, a substrate for a color filter, a glass substrate for a flat panel display used in a liquid crystal display device or a plasma display device, or a substrate for an optical disc.

[0049] As shown in Figure 4, the exposure apparatus 9A comprises a base 91, a stage 92, a stage moving mechanism 93, a gantry 94, an exposure unit 95, an imaging unit 96, and a control unit 90. In this exposure apparatus 9A, the stage moving mechanism 93 and the exposure unit 95 correspond to the operating unit 9a. The imaging unit 96 corresponds to the imaging unit 9b. The control unit 90 that controls each part of the exposure apparatus 9A uses the control system 2 that has been completed after operational verification.

[0050] The base 91 has a rectangular shape when viewed from above. The base 91 supports the stage 92, the stage moving mechanism 93, and the gantry 94 from below.

[0051] Stage 92 includes a support stage 921, an X stage 923, and a Y stage 925. The support stage 921 supports the substrate W. The X stage 923 rotatably supports the support stage 921 below it. The Y stage 925 supports the X stage 923 and the sub-scanning mechanism 932 below it.

[0052] The stage movement mechanism 93 is a mechanism that moves the support stage 921 in the main scanning direction (Y direction), the sub-scanning direction (X-axis direction), and the rotation direction (rotation direction around the Z-axis (θ-axis direction)). The stage movement mechanism 93 includes a sub-scanning mechanism 932, a main scanning mechanism 934, and a rotation mechanism 935.

[0053] The sub-scanning mechanism 932 moves the X-stage 923 in the X-direction, which is the sub-scanning direction, relative to the Y-stage 925. The main scanning mechanism 934 moves the Y-stage 925 in the Y-direction, which is the main scanning direction, relative to the base 91. The rotation mechanism 935 is mounted on the X-stage 923 and rotates the support stage 921 about a rotation axis extending in the Z-direction. The sub-scanning mechanism 932, the main scanning mechanism 934, and the rotation mechanism 935 operate based on control commands from the control unit 90.

[0054] The gantry 94 is fixed to the base 91. The gantry 94 has two support columns 941 whose lower parts are fixed to the base 91, and a beam 943 that connects the upper parts of the two support columns 941. The two support columns 941, which extend in the Z direction, are spaced apart in the X direction. The gantry 94 is a member that supports the exposure unit 95. Each exposure head 951 of the exposure unit 95, which will be described later, is fixed to the beam 943 in the gantry 94. The imaging unit 96 is also fixed to the beam 943.

[0055] The exposure unit 95 has one or more exposure heads 951. In this example, five exposure heads 951 are arranged along the X-axis. Each exposure head 951 has a spatial light modulator 950. The spatial light modulator 950 modulates the laser light based on strip data corresponding to the drawing pattern.

[0056] The exposure unit 95 has a light irradiation unit 953. The light irradiation unit 953 irradiates the exposure head 951 with laser light. The light irradiation unit 953 is housed, for example, inside the gantry 94. The laser light emitted from the light irradiation unit 953 irradiates the spatial light modulator 950 of each exposure head 951.

[0057] The spatial light modulator 950 spatially modulates the laser light emitted from the light irradiation unit 953 on a channel-by-channel basis, causing the necessary light that contributes to pattern drawing and the unnecessary light that does not contribute to pattern drawing to be reflected in different directions. Spatial modulation of light means changing the spatial distribution of the light (amplitude, phase, polarization, etc.). The exposure head 951 directs the modulated laser light onto the substrate W moving directly below the exposure head 951. As a result, the drawing pattern is exposed on the untreated substrate W.

[0058] The imaging unit 96 photographs the support stage 921 and the substrate W on the support stage 921 and acquires a camera image Ic. The acquired camera image Ic is analyzed by the control unit 90 and used to determine the positions of the support stage 921 and the substrate W. The control unit 90 can also use the camera image Ic taken by the imaging unit 96 of the substrate W after exposure to confirm the pattern drawn on the substrate W.

[0059] The control unit 90 controls the stage movement mechanism 93 to move the support stage 921 relative to the exposure head 951 in the Y direction (main scanning direction) and the X direction (sub-scanning direction). The control unit 90 then confirms the position of the substrate W using the camera image Ic acquired by the imaging unit 96. Specifically, for example, the control unit 90 confirms the position of the substrate W by detecting positioning marks provided on the surface of the substrate W or the support stage 921 from the camera image Ic. If the position of the substrate W is not within the set range, the control unit 90 operates the stage movement mechanism 93 again to move the position of the support stage 921. If the position of the substrate W is within the set range, the positioning operation by the stage movement mechanism 93 is terminated.

[0060] Subsequently, the control unit 90 controls the light irradiation unit 953 of the exposure unit 95 to emit a line beam of light toward the exposure head 951. Then, based on the drawing recipe stored in the memory unit 900 and the position information of the support stage 921, it controls the spatial light modulator 950 of the exposure head 951. As a result, a pattern light corresponding to the drawing pattern is formed, and this pattern light is emitted from the exposure head 951.

[0061] The drawing recipe includes, for example, pattern data indicating the drawing pattern to be formed on the substrate W, and various conditions for drawing (such as the amount of light emitted from the exposure unit 95 and the movement speed of the support stage 921), described in a predetermined data format. The pattern data is, for example, rasterized data obtained from CAD (Computer Aided Design), and the positional information on the substrate W to be irradiated with light is recorded on a pixel-by-pixel basis.

[0062] In the exposure apparatus 9A, when exposing a substrate W, the Y stage 925 is moved in the Y direction, thereby performing a main scanning movement that moves the substrate W supported by the support stage 921 in the Y direction (main scanning direction). Then, the exposure head 951 irradiates the substrate W, which is moving in the Y direction, with pattern light. After the main scanning movement, the X stage 923 is moved in one direction in the X direction by the width of the pattern light, thereby performing a sub-scanning movement that moves the substrate W. The exposure apparatus 9A exposes the photosensitive layer of the substrate W by repeatedly performing these main scanning movements and sub-scanning movements.

[0063] <4. Variation> Although embodiments have been described above, the present invention is not limited to those described above, and various modifications are possible.

[0064] In the above embodiment, in step S103, the simulated image generation unit 33 generates a simulated image Im by referencing the data table DT, but the present invention is not limited thereto. In step S103, the simulated image generation unit 33 may generate a simulated image Im by cutting out a region corresponding to the position of the virtual operating unit M1 in the simulator 32 from a large image previously stored in the image storage unit 300. If the operation of the operating unit 9a changes only the relative position between the object to be photographed and the imaging unit 9b, and there are no other changes, the image cut out from the large image in this way can be used as the simulated image Im.

[0065] Furthermore, in the above embodiment, an exposure apparatus 9A was given as an example of the device 9 controlled by the control system 2 verified by the verification apparatus 1. However, the device controlled by the control system verified by the verification apparatus of the present invention is not limited to an exposure apparatus. The control system verified by the verification apparatus of the present invention can be applied to any device that performs control using images acquired by the imaging unit.

[0066] The device 9 controlled by the control system 2 may be, for example, a so-called wafer-on-wafer device that bonds two semiconductor wafers together. Alternatively, the device 9 controlled by the control system 2 may be, for example, a wafer detection device that inspects the pattern of a manufactured semiconductor wafer.

[0067] Although this invention has been described in detail, the above description is illustrative in all respects and does not limit the invention. It is understood that countless variations not illustrated can be envisioned without falling outside the scope of this invention. The components described in each of the above embodiments and variations can be combined or omitted as appropriate, as long as they do not contradict each other. [Explanation of Symbols]

[0068] 1. Verification device 2. Control System 9 Equipment 9A Exposure apparatus 9a Operating part 9b Imaging Unit 30 Verification Department 31 Simulation Execution Unit 32 Simulators 33 Simulated Image Generation Unit 34 Simulated Image Transmission Unit 90 Control Unit 93 Stage Movement Mechanism 95 Exposure Unit 96 Imaging Department 300 Image storage unit Co command signal DT,DT',DT” Data Table E1, E2 Error Signals IC camera image Im (Simulated Image) M Virtual Device M1 Virtual Unit M2 Virtual Imaging Unit

Claims

1. A method for verifying a control system that controls the operation of a device based on a camera image provided on the device, a) A step of inputting command signals output from the control system into a simulator and performing an operation simulation of the operating parts that constitute the device, b) A step of generating a simulated image that simulates the camera image corresponding to the position of the operating unit in the simulator in step a), c) A step of inputting the simulated image generated in step b) into the control system, A verification method that involves repeatedly executing the process.

2. A verification method according to claim 1, A verification method in step b) above, wherein the simulated image corresponding to the position of the operating unit in the simulator is retrieved from a data table in which the position of the operating unit and the simulated image are linked.

3. A verification method according to claim 1, A verification method comprising, in step b) above, extracting a region corresponding to the position of the operating unit in the simulator from a pre-stored large image to generate the simulated image.

4. A verification method according to any one of claims 1 to 3, d) An anomaly detection step in which the simulator is monitored to see whether it is able to perform the operation in accordance with the command signal in step a) above. A verification method that further enhances this.

5. A verification method according to any one of claims 1 to 3, A verification method comprising generating the simulated image containing abnormalities in step b) above.

6. A verification device for a control system that controls the operation of the device based on a camera image provided in the device, A simulator that performs an operation simulation of the operating parts constituting the device based on the command signals output from the control system, An image generation unit generates a simulated image that simulates the camera image corresponding to the position of the operating unit in the simulator, A simulated image transmission unit transmits the simulated image generated by the image generation unit to the control system, A verification device equipped with the following features.

Images