Inspection equipment

Abstract

This technology provides the ability to accurately inspect objects without unnecessarily increasing the size of the equipment. [Solution] An inspection device for an object to be inspected, which is a flexible plate-like body having a curved surface to be inspected and designed based on design data, comprises a mounting table on which the object to be inspected is placed; a position calculation unit that calculates the position coordinates and angle of the object to be inspected when the object to be inspected is placed on the mounting table from data relating to the design data of the object to be inspected; an imaging unit that images the object to be inspected placed on the mounting table so that the imaging axis is perpendicular to the object to be inspected, based on the position coordinates and angle; and a defect detection unit that detects defects from the image of the object to be inspected captured by the imaging unit.

Description

Technical Field

[0001] The present invention relates to an inspection apparatus for inspecting defects in an inspection object.

Background Art

[0002] Inspection apparatuses that use members of industrial products such as steel plates and glass plates as inspection objects, and detect defects such as scratches, cracks, and irregularities formed on the inspection object by analyzing images captured of the inspection object are widely known. For example, as such an inspection apparatus, there is an apparatus disclosed in Patent Document 1.

[0003] The inspection apparatus disclosed in Patent Document 1 is capable of inspecting concave-convex defects formed on the surface of a vehicle body panel. Patent Document 1 discloses that when the inspection apparatus inspects for defects, it images an inspection surface of the vehicle body panel such that the imaging angle is larger than the irradiation angle of illumination light and is an acute angle. Furthermore, Patent Document 1 discloses that when the inspection surface of the vehicle body panel is curved, the irradiation angle and the imaging angle are adjusted based on CAD information such as various dimensions of the vehicle body panel. That is, when the inspection apparatus of Patent Document 1 images each part of the vehicle body panel while moving the vehicle body panel in one direction, the curvature of the inspection surface is calculated based on the CAD information. Then, when the inspection surface moves along with the movement of the vehicle body panel, and the imaging position on the inspection surface sequentially changes accordingly, the orientations of the light irradiation unit and the camera are changed according to the curvature (inspection surface shape) of the imaging position, so that the irradiation angle and the imaging angle are always kept constant.

Prior Art Literature

Patent Literature

[0004]

Patent Document 1

Summary of the Invention

Problem to be Solved by the Invention

[0005] In the conventional inspection device described above, when inspecting flexible components, that is, components that deform beyond a certain amount due to their own weight, the shape of the component identified by CAD information and the actual shape of the component (the shape of the component during inspection) sometimes differed. As a result, the above-mentioned inspection device had the problem that the irradiation angle and imaging angle could not be properly adjusted depending on the component being inspected.

[0006] Therefore, one possible solution to this problem is to equip the inspection device with measuring means such as sensors, measure the shape of the moving object being inspected, and adjust the irradiation angle and imaging angle based on the measurement results. However, this method requires measuring means to be placed in multiple locations on the inspection device, which results in a large and cumbersome device. In other words, even when the object being inspected is a flexible material, there was a desire to perform accurate inspections with a simple configuration without making the inspection device large and cumbersome.

[0007] Therefore, the objective of this invention is to provide a technology that enables accurate inspection of objects to be inspected without unnecessarily increasing the size of the apparatus. [Means for solving the problem]

[0008] One aspect of the present invention for solving the above-mentioned problems is an inspection device for an object to be inspected, which is a flexible plate-like body having a curved inspection surface and is designed based on design data, comprising: a mounting table on which the object to be inspected is placed; a position calculation unit that calculates the position coordinates and angle of the inspection surface when the object to be inspected is placed on the mounting table from data relating to the design data of the object to be inspected; an imaging unit that images the inspection surface of the object to be inspected placed on the mounting table based on the position coordinates and angle, such that the imaging axis is perpendicular to the inspection surface of the object to be inspected; and a defect detection unit that detects defects from the image of the inspection surface captured by the imaging unit.

[0009] This inspection device includes a position calculation unit that calculates the position coordinates and angle of the inspection surface when the inspection object is placed on a mounting table, based on design data of the inspection object. Therefore, even when the inspection object is a flexible plate-like body with a curved surface, and the inspection surface of the inspection object is deformed by its own weight, it is not always necessary to measure each inspection object with a sensor, and the defective part can be accurately photographed. Furthermore, by imaging the inspection surface so that the imaging axis is perpendicular to the inspection surface of the inspection object placed on the mounting table, even a flexible plate-like body with a curved surface can be captured in an image in a way that makes it easy to recognize the defective part.

[0010] Preferably, the system includes a linking unit that links the position coordinates calculated by the position calculation unit to the image captured by the imaging unit, and a marking unit that marks the inspection target surface at positions corresponding to the defect locations in the image of the inspection target surface.

[0011] According to this design, after the defect detection unit has completed detecting the location of a defect, it becomes easier to identify the location of the defect (candidate defect) previously detected by the inspection device when a person visually checks the defect again or when another device checks the defect again. In other words, the inspection device in this design makes it easier to re-check the defects detected by the inspection device, enabling easy and accurate inspection of objects throughout the entire manufacturing site.

[0012] Preferably, the marking portion is marked by affixing a seal to the surface to be inspected at a position corresponding to the defect location in the image.

[0013] According to this configuration, after the defect detection unit has completed detecting the location of a defect, it becomes possible to move the object being inspected to a location away from the inspection device to perform further work to confirm the detected defect. In other words, it becomes possible to improve the degree of freedom in the work location (factory layout freedom) in the manufacturing site when performing work to confirm defects again in production sites such as factories.

[0014] More preferably, the marking portion has an adsorption portion for adsorbing the seal and a main body portion, and the marking portion is attached to the surface to be inspected by pressing the seal adsorbed by the adsorption portion against it, and the adsorption portion is able to move or change its orientation relative to the main body portion due to the reaction force from the surface to be inspected.

[0015] According to this method, even a flexible plate-like body with a curved surface to be inspected can have a seal properly applied to it.

[0016] A more preferred configuration includes a robot having the imaging unit and the marking unit.

[0017] According to this pattern, the number of parts in the inspection device can be reduced, and the manufacturing cost of the inspection device itself can be lowered.

[0018] Another more preferred configuration comprises a first robot having the imaging unit and a second robot having the marking unit.

[0019] This configuration allows for the simultaneous execution of imaging the surface to be inspected and marking the surface to be inspected.

[0020] Preferably, the object to be inspected is a solar cell module.

[0021] According to this aspect, inspections targeting solar cell modules can be suitably performed.

[0022] More preferably, the object to be inspected is a solar cell module having a transparent substrate, a back substrate, and solar cells between the transparent substrate and the back substrate, and the defect detection unit detects defects on the back substrate side of the transparent substrate rather than on the solar cell side.

[0023] According to this configuration, it is possible to suitably perform inspections to determine whether or not there are defects on the back side of the transparent substrate rather than on the side facing the solar cell.

[0024] Another aspect of the present invention comprises: a mounting table for mounting an inspection object; an imaging unit for imaging an inspection target surface of the inspection object mounted on the mounting table; a defect detection unit for detecting defects from an image of the inspection target surface captured by the imaging unit; and a marking unit for physically marking a part of the inspection target surface at a position corresponding to a defect position in the image of the inspection target surface. The phrase "physically marking" as used herein refers to applying a mark that can be physically touched by a person (allowing physical contact) to the inspection target surface of the inspection object. Specifically, the marking as used herein includes marking in which characters, numbers, symbols, or the like are written on the inspection target surface with a physically touchable coating liquid such as water-based ink, and marking in which a physically touchable marking material such as a sticker is disposed on the inspection target surface. In other words, the marking as used herein is different from virtual marking such as displaying a marked image on a display device such as a display or a projection screen, or projecting (projecting) a marked image with the inspection object as a projected portion.

[0025] According to this aspect, when rechecking a detected defect after the detection of a defect position by the defect detection unit is completed, it is possible to carry the inspection object to a location away from the inspection device and perform the work. That is, at a production site such as a factory, it is possible to improve the degree of freedom of the work place (the degree of freedom of factory layout) when performing work to reconfirm defects. Effects of the Invention

[0026] The present invention provides a technology that enables accurate inspection of an inspection object without unnecessarily increasing the scale of an apparatus. Brief Description of the Drawings

[0027] [Figure 1] It is a block diagram showing an inspection apparatus according to an embodiment of the present invention. [Figure 2] It is a diagram showing a solar cell module that is an inspection object of the inspection apparatus of FIG. 1, where (a) is a perspective view, and (b) is an end view schematically showing a part of a cross-section obtained by cutting (a) along the A-A cross-section. [Figure 3] Figure 1 is a perspective view showing the devices and components belonging to the inspection unit. [Figure 4] Figure 3 is an explanatory diagram showing the marking section of the robot. (a) shows the base end side and the holding part aligned vertically in the natural state, and (b) shows the state in which the holding part has moved upward from the state shown in (a). [Figure 5] Figure 3 is an explanatory diagram showing the marking section of the robot. (a) shows the base end side and the holding part aligned vertically in the natural state, and (b) shows the state in which the holding part has moved diagonally upward from the state shown in (a). (c) shows the state in which the holding part has moved diagonally upward from the state shown in (a) in a different direction than in (b). [Figure 6] Figure 3 is a schematic diagram illustrating the marking material supply device. [Figure 7] Figure 1 is an explanatory diagram showing an example of deformation prediction data calculated by computer simulation for an inspection device, and it also shows an example of the display format when displaying the deformation prediction data on a screen such as a display. [Figure 8] Figure 1 is a schematic diagram illustrating how the imaging unit moves on the solar cell module when the inspection device performs the imaging process. [Figure 9] This diagram schematically illustrates how the imaging unit moves on the solar cell module when the inspection device in Figure 1 performs the imaging process. It shows the view from a different direction than Figure 8, and the unit moves in the order of (a) to (c). [Figure 10] Figure 1 is a schematic diagram illustrating how the marking unit picks up adhesive tape from the marking material supply device when the inspection device performs the marking process, picking up in the order of (a) to (c). [Figure 11] Figure 1 is a schematic diagram illustrating how the marking unit of the inspection device applies adhesive tape to the designated position during the marking process, in the order of (a) to (c). [Modes for carrying out the invention]

[0028] Embodiments of the present invention will be described in detail below.

[0029] The inspection device 1 of this embodiment inspects a solar cell module 100 (a plate-shaped object, the object to be inspected). In detail, as shown in Figure 1, the inspection device 1 mainly consists of a control unit 2 that controls each operation in the inspection, and an inspection unit 3 that automatically performs tasks such as photographing (imaging) the solar cell module 100 and marking the solar cell module 100 (details will be described later).

[0030] Here, the solar cell module 100, which is the object to be inspected, is a laminate having a surface substrate 101 (transparent substrate), solar cells 102 (see Figure 2(b)), a sealing material 103 (see Figure 2(b)), and a back substrate 104, as shown in Figure 2. In other words, the solar cell module 100 has multiple solar cells 102 arranged between the surface substrate 101 and the back substrate 104, electrically connected by wiring members (not shown), and the sealing material 103 is filled in the gap between the surface substrate 101 and the back substrate 104. For the sake of drawing convenience, some solar cells 102 are labeled with symbols, while others are omitted. Similarly, in the following explanations, if the same object is depicted multiple times in each drawing, some symbols will be omitted as needed.

[0031] The surface substrate 101 is a plate-shaped or sheet-shaped member having light-transmitting and insulating properties, and can be suitably made from transparent resin, glass, or the like. In this embodiment, the surface substrate 101 is a glass substrate made from glass. The surface substrate 101 has a curved surface on one side in the thickness direction, which is the outer main surface, and on the other side, which is the inner main surface. In other words, the surface substrate 101 is a curved substrate with a three-dimensionally extended curved surface. That is, the surface substrate 101 has a portion where both the outer main surface, which is the light-receiving surface, and the inner main surface, which is the inner surface, are curved with a predetermined curvature.

[0032] The sealing material 103 is a translucent adhesive that has light-transmitting and adhesive properties.

[0033] The back substrate 104 is an insulating plate-shaped or sheet-shaped material, and can be made of glass, resin, a laminate of resin sheet and metal foil, etc. The back substrate 104 may be translucent, or it may be opaque, meaning it does not transmit sunlight or does not transmit sunlight substantially. "Substantially opaque" means that the transmittance of sunlight is 10 percent or less. The back substrate 104 also has curved surfaces on both main surfaces, and is a curved substrate with a three-dimensionally extended curved surface. The solar cell module 100 of this embodiment is not particularly limited, but it can be used as a roof member that forms at least a part of the roof of an automobile (vehicle) and incorporates a solar cell (solar cell 102).

[0034] Here, as shown in Figure 2(a), a virtual plane D1 is defined as a virtual plane that includes the center of the solar cell module 100 in a plan view and is parallel to the line of sight. In this embodiment, the virtual plane D1 is also the plane that includes the centers of the two sides that extend parallel to each other in a plan view. The solar cell module 100 of this embodiment has a first module forming section 100a located on one side of the virtual surface D1 and a second module forming section 100b located on the other side, and these are formed as a single unit. The first module forming section 100a and the second module forming section 100b have symmetrical shapes with respect to the virtual surface D1. In other words, the solar cell module 100 is composed of the first module forming section 100a and the second module forming section 100b, which are symmetrical with respect to the virtual surface D1. In this case, the virtual surface D1 is also the surface that divides the solar cell module 100 into two (equal parts).

[0035] Control Unit 2 is a computer with a hardware configuration comprising a central processing unit consisting of an arithmetic unit that performs calculations on data, a storage device for storing data, an input device for receiving data from the outside, an output device for outputting data to the outside, and a display device for displaying various information. It functions as a control device that controls each device that makes up Inspection Apparatus 1 and each operation in inspection. Control Unit 2 is connected to the robot 21 and marking material supply device 23 (details to be described later) of Inspection Unit 3 via a network, enabling the transmission and reception of signals (information).

[0036] As shown in Figure 1, the control unit 2 has a data input unit 10, an image input unit 11, a position calculation unit 12, a defect detection unit 13, and a linking unit 14 as functional units. A functional unit is, for example, a function realized by the central processing unit (processor) of the control unit 2 reading programs and data stored in the memory and performing calculations.

[0037] The data input unit 10 is the part into which the design data of the solar cell module 100, which is the object to be inspected, is input.

[0038] The design data is information necessary when designing the solar cell module 100, and includes information indicating the final target shape of the solar cell module 100 and / or at least some of the components constituting the solar cell module 100 upon completion of manufacturing. The "final target shape" here refers to the design shape that is not affected by external forces or its own weight. For example, the design data may include information indicating the coordinates (position coordinates) of each part on the main surface (light-receiving surface and / or back surface) of the solar cell module 100, and information indicating the curvature (angle) or bending angle of each part on the same main surface. In this case, the coordinates of each part may be 3D coordinates. "3D coordinates" are an index for specifying a position in 3D space, and a 3D coordinate space is set with a specific reference point as the zero point, and the position is specified in the X, Y, and Z coordinates within that 3D coordinate space. The curvature angle is the angle between a virtual tangent at a predetermined point on the main surface and the horizontal plane. Similarly, the design data may include information indicating the coordinates (position coordinates) of one or more parts selected from the surface substrate 101 and the back substrate 104, and information indicating the curvature angle (angle) of each part. Furthermore, the design data also includes information indicating the weight of the solar cell module 100 and / or at least some of the components constituting the solar cell module 100. For example, the design data may include information indicating the weight per unit volume of the solar cell module 100, etc., and information indicating the volume. Furthermore, the design data also includes information indicating the material properties (flexibility evaluation values) of at least some of the components constituting the solar cell module 100 and / or the solar cell module 100.

[0039] The image input unit 11 is the part into which image data formed by imaging (capturing) by the imaging device 36 (imaging unit, which will be described in more detail later) is input.

[0040] The position calculation unit 12 includes an application that can perform computer simulations based on design data, and a 3D CAD application that can take in (input) data showing the results of the computer simulations. Specifically, the position calculation unit 12 calculates the amount of deflection (change) of the main surface (light-receiving surface) when the solar cell module 100 is placed on the mounting base 22 by computer simulation, as will be described in more detail later. Furthermore, based on the calculated amount of deflection and design data, the position calculation unit 12 calculates the coordinates (position coordinates) and curvature angle (angle) of each part of the deformed solar cell module 100 using a 3D CAD application.

[0041] The defect detection unit 13, as will be described in more detail later, is the part that detects defects in the solar cell module 100 based on image data input to the image input unit 11.

[0042] The linking unit 14, as will be described in more detail later, is the part that links the coordinates of each part of the deformed solar cell module 100 calculated by the position calculation unit 12 with a predetermined part of the solar cell module 100 in the image data input to the image input unit 11.

[0043] As shown in Figure 3, the inspection unit 3 includes a robot 21, a mounting table 22, and a marking material supply device 23 (marking material supply unit).

[0044] The robot 21 has a base portion 30, an arm portion 31 supported by the base portion 30, and a hand portion 32 attached to the tip of the arm portion 31.

[0045] The arm 31 is a multi-joint robot arm that allows the hand 32 to move freely. In other words, the robot 21 of this embodiment can move the entire hand 32 in three dimensions, and can also change the posture (orientation) of the entire hand 32 in three dimensions.

[0046] The hand unit 32 includes a member support unit 35, an imaging device 36, an illumination device 37, and a marking unit 38.

[0047] The member support portion 35 is a metal frame-shaped member fixed to the tip of the arm portion 31. In this embodiment, the hand portion 32 is formed by attaching the imaging device 36, the illumination device 37, and the marking portion 38 to the member support portion 35.

[0048] The imaging device 36 is a camera with a shooting function that captures an object and outputs a still image (image data).

[0049] The lighting device 37 has a light-emitting section that uses an LED as a light source, and is capable of emitting light from the light-emitting section. Although detailed illustrations are omitted for brevity, the lighting device 37 of this embodiment is generally formed in an annular (ring-shaped) form and has a central hole, and has one continuous light-emitting section in an annular shape. In this embodiment, as shown in Figure 3, the hand portion 32 is positioned such that the imaging device 36 is located at a predetermined distance from the central hole of the illumination device 37. Therefore, as shown in Figure 3, the hand portion 32 can be positioned such that the imaging device 36 is positioned above the central hole of the illumination device 37 and overlaps with the central hole in a plan view.

[0050] The marking portion 38 is a part capable of holding adhesive tape (marking material), and as shown in Figure 4, it has a base end portion 43 (main body portion), an extended portion 44, and a holding portion 45 (adhesion portion).

[0051] The base end portion 43 and the extension portion 44 are cylindrical parts with internal space, and both extend in the same direction (up and down in Figure 4), with a portion of the extension portion 44 (the upper portion in Figure 4) housed inside the base end portion 43. The extension portion 44 is constantly biased toward the tip side (the side with the holding portion 45, which is the lower side in Figure 4) by a biasing means such as a spring (not shown). The holding portion 45 is attached to the tip of the extension portion 44 (the end opposite to the base end portion 43 in the longitudinal direction). Therefore, as shown in Figure 4, the extension portion 44 and the holding portion 45 are movable relative to the base end portion 43. That is, by moving the extension portion 44 and the holding portion 45 relative to the base end portion 43 against the biasing force of the biasing means so that the holding portion 45 is closer to the base end portion 43, the amount that the extension portion 44 penetrates into the base end portion 43 increases. At this time, the overall length of the marking portion 38 is shortened as a larger portion of the extension portion 44 is pushed into the base end portion 43 (see Figure 4(b)). That is, the holding portion 45 is movable relative to the base end portion 43 in the direction of approaching and moving away from it, and the marking portion 38 expands and contracts in accordance with the relative movement of the holding portion 45 relative to the base end portion 43.

[0052] Furthermore, as shown in Figure 5, the marking portion 38 of this embodiment has an extension portion 44 that is pivotably attached to the base end portion 43, and the orientation of the extension portion 44 and the holding portion 45 relative to the base end portion 43 (the posture of the extension portion 44 and the holding portion 45) can be changed. The marking portion 38 of this embodiment is configured to swing (rotate) around an axis that extends in a direction intersecting the direction of alignment of the extended portion 44 and the holding portion 45 (vertical direction in Figure 5) (front-back direction in Figure 5). Therefore, the marking portion 38 can change its orientation from a standard state in which the base end portion 43 and the holding portion 45 are aligned vertically (see Figure 5(a)) to an inclined position (see Figures 5(b) and 5(c)). The inclined position is a position in which the holding portion 45 moves to a position away from the standard position in the vertical and horizontal directions, while the suction surface side (the lower side in the standard position) faces diagonally downward. In this embodiment, the marking portion 38 is configured to swing freely around an axis extending in the front-to-back direction in Figure 5 (around a hypothetical pivot axis not shown). However, the marking portion 38 may be configured to swing freely around multiple (two or more) axes. In this case, all of the multiple axes may extend in a direction intersecting the direction in which the extension portion 44 and the holding portion 45 are aligned. For example, the marking portion 38 may be configured to swing freely around an axis extending in the front-to-back direction in Figure 5, as described above, and also swing freely around an axis extending in the left-to-right direction in Figure 5. That is, the marking portion 38 may be configured so that the holding portion 45 swings not only in the left-to-right direction in Figure 5, but also in the front-to-back direction.

[0053] The holding portion 45 is a suction cup member attached to the tip side of the extension portion 44, and is made of an elastic material such as rubber or synthetic resin. Although detailed illustration is omitted, this holding portion 45 is a bowl-shaped portion that protrudes toward the base end portion 43, and is the part that attracts (holds) the adhesive tape (more details will be described later), which is the object to be attracted (held).

[0054] Although detailed illustrations are omitted, the holding portion 45 has a suction hole (not shown) at the bottom (bowl-shaped bottom) of the inner recess, which allows for a suction operation to draw air from the inner space of the suction cup when adsorbing an object. In other words, the marking portion 38 has a suction device (detailed illustration omitted) and a suction path (not shown) formed between the opening of the suction hole (suction port) and the suction device. Thus, the marking portion 38 of this embodiment can perform an adsorption operation by adhering the tip portion of the holding portion 45 (suction cup member) to the object to be adsorbed and sucking the air inside the suction cup from the opening, thereby adsorbing the object by negative pressure.

[0055] As shown in Figure 3, the mounting base 22 has a flat mounting section 22a on which the solar cell module 100 can be mounted, and legs 22b. The upper surface of the mounting section 22a is a horizontal plane perpendicular to the vertical direction (or a substantially horizontal plane that is substantially perpendicular), and is the mounting surface for the solar cell module 100. It is supported by the legs 22b at a position away from the floor surface (installation surface) of the installation location. In this embodiment, the inspection device 1 is assumed to perform inspection by placing the solar cell module 100 on the mounting table 22 in a position where the surface substrate 101 faces upward (a position in which the entire module is curved so as to be convex upward).

[0056] As shown in Figure 6, the marking material supply device 23 is a device that can house or attach in a predetermined position an adhesive tape winding body 48, which is formed by winding adhesive tape around a core member to form a roll. This marking material supply device 23 has a dispensing device (not shown) that dispenses the leading end portion of the adhesive tape from the adhesive tape winding body 48, and a cutting device 50 that cuts the dispensed leading end portion of the adhesive tape to a predetermined length. Furthermore, the marking material supply device 23 has a tape placement table 23a on which the leading edge portion of the adhesive tape (or a piece of tape formed by cutting) is temporarily placed. The upper surface of the tape placement table 23a, which is the surface on which the adhesive tape is placed, is inclined. In other words, the marking material supply device 23 cuts the adhesive tape at a predetermined distance from the leading edge of the dispensed adhesive tape, thereby separating the leading edge portion from the base edge portion and forming an adhesive tape (marking material) of a predetermined length.

[0057] Next, the procedure for inspecting the solar cell module 100 using the inspection device 1 of this embodiment and the operation of each part will be described in detail with reference to the drawings.

[0058] (Data entry process) The inspection device 1 of this embodiment performs a data input process in which the design data of the solar cell module 100 to be inspected is input to the data input unit 10. While the inspection device 1 of this embodiment is not particularly limited, it is assumed that it will sequentially inspect multiple different solar cell modules 100 created based on the same design data.

[0059] (Simulation process) Next, the inspection device 1 performs a simulation process in which the position calculation unit 12 performs a computer simulation (hereinafter also simply referred to as simulation) based on the design data. To explain in detail, the inspection device 1 of this embodiment is intended to inspect a flexible solar cell module 100. Here, when such a solar cell module 100 is placed on the mounting base 22 (mounting part 22a) (see Figure 3), it is conceivable that it will bend due to its own weight, resulting in a shape different from its original shape (design shape). Therefore, the inspection device 1 of the present invention performs a simulation based on the above-mentioned design data and calculates predicted values ​​for the deformation of each part of the solar cell module 100 when placed on the mounting base 22.

[0060] In detail, as shown in Figure 7, the position calculation unit 12 divides the target solar cell module 100 into multiple regions and calculates the amount of change for each region. Here, as described above, the solar cell module 100 of this embodiment is composed of a first module forming section 100a and a second module forming section 100b that are symmetrical to each other in terms of plane. Therefore, the inspection device 1 performs a simulation on one of the first module forming section 100a and the second module forming section 100b, and does not perform a simulation on the other, instead reflecting the simulation results for the one.

[0061] To explain in detail, the first module forming section 100a and the second module forming section 100b are parts that are symmetrical to each other in terms of plane, and are identical (or very similar in shape) parts with different orientations. From this, it can be considered that the amount of change in each part of the first module forming section 100a and the amount of change in each part of the corresponding second module forming section 100b across the virtual plane D1 (see Figure 2) are similar (or approximately the same). Therefore, when the inspection device 1 performs a simulation, it runs the simulation on only one of the first module forming section 100a and the second module forming section 100b (for example, the first module forming section 100a). This allows the amount of change in each part of either the first module forming section 100a or the second module forming section 100b to be calculated. In this case, if the simulation was performed on the first module forming section 100a, the amount of change in each part of the second module forming section 100b will be the same as the amount of change in the corresponding part of the first module forming section 100a calculated in the simulation. By having this configuration, the inspection device 1 of this embodiment reduces the computational load of the simulation and reduces the load on the control unit 2.

[0062] In other words, the inspection device 1 of this embodiment obtains deformation prediction data (see Figure 7), which is data indicating the predicted deformation amount of each part of the solar cell module 100, by performing such a simulation process. That is, the deformation prediction data is data that helps to identify the predicted shape (predicted shape after deformation) of the solar cell module 100 when it is placed on the mounting table 22.

[0063] (Position calculation process) Next, the position calculation unit 12 performs a position calculation process to calculate the coordinates (position coordinates) and curvature angles (angles) of each part of the deformed solar cell module 100 when placed on the mounting base 22, based on the design data and deformation amount prediction data. In other words, the position calculation process is a process of calculating predicted coordinate values ​​and predicted curvature angles for at least each part of the main surface of the deformed solar cell module 100. In other words, the position calculation process calculates information that allows for the identification of the predicted shape of the solar cell module 100 when it is placed on the mounting base 22, and the predicted shape of at least a part of the solar cell module 100 (and / or each component constituting the solar cell module 100).

[0064] (Filming process) Next, the inspection device 1 performs an imaging process to photograph each part of the solar cell module 100. Specifically, as shown in Figures 8 and 9, the inspection device 1 moves the imaging device 36 (hand unit 32) over the solar cell module 100 while photographing each part.

[0065] More specifically, the inspection device 1 performs a first imaging operation in which it moves the imaging device 36 in a first direction that is a predetermined direction in a plan view and takes an image. The first direction is the direction along the shorter side of the solar cell module 100 in a plan view (the left-right direction in Figure 8), and is the direction from one end to the other end in that direction (the direction from left to right in Figure 8). Here, in a plan view, the rectangle with the smallest area among the virtual rectangles that encompass the entire solar cell module 100 placed on the mounting base 22 is defined as the minimum encompassing rectangle D2 (minimum encompassing quadrilateral). In this case, the first direction is the direction along the shorter side of the minimum encompassing rectangle D2, and is also the direction from one end to the other end in the same direction. More specifically, in the first imaging operation of this embodiment, in a plan view, the imaging device 36 moves so as to straddle the solar cell module 100 in the first direction.

[0066] More specifically, in the first imaging operation, as shown in Figure 9, the inspection device 1 moves the imaging device 36 (hand portion 32) in a direction along the curved surface of the solar cell module 100 while moving it in the first direction. More specifically, the inspection device 1 pre-calculates (determines) the position and orientation of the imaging device 36 relative to the solar cell module 100 when moving the imaging device 36 (hand portion 32) in the first direction, based on the predicted coordinate values ​​and the predicted curvature angle calculated in the position calculation step described above. At this time, the inspection device 1 calculates (determines) the position and orientation of the imaging device 36 such that the distance between the main surface of the solar cell module 100 (surface substrate 101) and the light-receiving surface of the imaging device 36 is a constant distance, and the imaging axis of the imaging device 36 is perpendicular to each part of the main surface of the solar cell module 100. The "imaging axis" is the axis line passing through the center of the light-receiving surface (the light-receiving surface of the image sensor, which is the imaging surface) of the imaging device 36.

[0067] Furthermore, in the first imaging operation, the inspection device 1 moves the imaging device 36 and takes images at multiple locations. In this embodiment, when the inspection device 1 performs the first imaging operation, it temporarily stops the imaging device 36 to take images and then moves the imaging device 36, repeating this process. However, it is also possible to perform an operation in which the imaging device 36 is moved without being temporarily stopped while taking images.

[0068] Next, as shown in Figure 8, the inspection device 1 performs an intermediate movement operation to move the imaging device 36 in a direction that includes a directional component intersecting the first direction in a plan view (in this embodiment, a direction perpendicular to the first direction). The intermediate movement operation in this embodiment is in a direction along the longitudinal direction of the solar cell module 100 in a plan view (the vertical direction in Figure 8), and is an operation to move from one end of the longitudinal direction to the other end (the direction from top to bottom in Figure 8).

[0069] Furthermore, the inspection device 1 performs a second imaging operation, which involves moving the imaging device 36 in a second direction that is a predetermined one direction in a plan view while taking an image. The second imaging operation involves moving the imaging device 36 in a direction along the curved surface of the solar cell module 100 while moving it in a second direction, and then performing imaging. The second direction is the opposite direction to the first direction, and is along the shorter side of the solar cell module 100 in a plan view (left-right direction in Figure 8), and is a direction from the other end to the one end in the same direction (a direction from right to left in Figure 8). The second shooting operation is almost identical to the first shooting operation, except for the direction of movement; therefore, a detailed explanation that would be redundant will be omitted.

[0070] In this embodiment, the imaging process involves performing an intermediate movement after the second imaging operation, and then similarly performing the first imaging operation, intermediate movement operation, second imaging operation, and so on. In other words, the inspection device 1 images the solar cell module 100 by alternately performing the first imaging operation and the second imaging operation, with an intermediate movement operation in between. As described above, the shooting process of this embodiment involves performing multiple shots in each of the first and second shooting operations, thereby creating multiple image data. The "image data" referred to here is data of the captured portion of the solar cell module 100 that can be handled by a computer (for example, by visualizing it on a display device such as a display). In this embodiment, the "image data" is not particularly limited, but it is defined as data that constitutes a "still image".

[0071] In other words, the imaging process of this embodiment involves dividing and imaging the entire solar cell module 100 to be inspected (the entire main surface of the solar cell module 100, and the entire outer surface of the surface substrate 101) to create multiple image data. Here, "divided imaging" means that instead of capturing the target as a single image, the target is divided into multiple regions, and each of these divided regions is captured. In this embodiment, as described above, the imaging device 36 is positioned so that the imaging axis is perpendicular to the portion of the solar cell module 100 that is to be captured, and each region is captured. At this time, the multiple regions may overlap predetermined portions of the solar cell module 100 (predetermined portions of the solar cell module 100 may be located within the multiple regions). In other words, the shooting process should be performed such that at least each part (each position) of the upper main surface of the solar cell module 100 placed on the mounting table 22 is included in the target area of ​​any image data.

[0072] (Defect detection process) Next, the inspection device 1 performs a defect detection process to detect defects (potential defects) in the solar cell module 100. In other words, when multiple image data created in the shooting process are input to the image input unit 11, the defect detection unit 13 analyzes the input multiple image data. The defect detection unit 13 then examines each image data and determines whether or not there is a portion that satisfies predetermined conditions. These predetermined conditions include the existence of a portion with a brightness above a predetermined value that extends over a predetermined area, or the existence of a portion with a brightness below a predetermined value that extends over a predetermined area, etc. If a portion that satisfies the predetermined conditions exists, the defect detection unit 13 determines that there is a defective portion (a portion that is a candidate for a defect) in the solar cell module 100.

[0073] The defect detection step in this embodiment is a step that detects defects on the back substrate 104 side of the solar cell module 100, rather than on the inner surface (the side facing the solar cell 102) of the front substrate 101 (see Figure 2(b)). In other words, the defects (candidate defects) to be detected in the defect detection step may be defects in the solar cell 102, such as cracks in the cell, or defects in the back substrate 104. Furthermore, the predetermined conditions described above may be changed depending on the type of defect to be detected.

[0074] (Linking process) Next, the inspection device 1 performs a linking process to identify the coordinates (position coordinates) and curvature angle (angle) of the location corresponding to the defective portion (potential defect) detected in the defect detection process. The "location corresponding to the defective portion" is a part of the main surface (outer surface of the surface substrate 101) of the solar cell module 100, and is the location of the portion that overlaps with the detected defective portion in the thickness direction of the solar cell module 100. In other words, the "location corresponding to the defective portion" is also the location of the part of the main surface of the solar cell module 100 that is closest to the detected defective portion. In other words, the linking unit 14 identifies the coordinates and curvature angles of the positions corresponding to the defective parts in the image data detected in the defect detection process, based on the coordinates and curvature angles of each part of the deformed solar cell module 100 calculated by the position calculation unit 12. To put it another way, the linking unit 14 identifies and associates (links) the positions corresponding to the defective parts in the image data detected in the defect detection process with which part of the deformed solar cell module 100 calculated based on the simulation results. This results in coordinate assignment to the positions corresponding to the defective parts. If there are multiple detected defective parts, the linking process assigns coordinates to the positions corresponding to each defective part.

[0075] (Marking process) Next, the inspection device 1 performs a marking process in which it marks the location of the defective part of the solar cell module 100. In the marking process, the inspection device 1 performs an operation (pickup process) to pick up the adhesive tape from the marking material supply device 23, as shown in Figure 10. Specifically, as shown in Figure 10(a), the inspection device 1 brings the marking unit 38 (hand unit 32) close to the marking material supply device 23 and performs an operation to bring the holding unit 45 into contact with the adhesive tape on the tape placement table unit 23a. At this time, the inspection device 1 is positioned so that the marking section 38 (holding section 45) is tilted according to the inclined surface (adhesive tape placement surface) of the tape placement table section 23a. More specifically, the inspection device 1 is positioned so that the tip surface (suction surface) of the holding section 45 of the marking section 38 is parallel to the inclined surface of the tape placement table section 23a, and the suction direction during the suction operation of the holding section 45 is perpendicular to the inclined surface of the tape placement table section 23a. The action of bringing the holding portion 45 into contact with the adhesive tape on the tape mounting base portion 23a is also an action of moving the marking portion 38 (holding portion 45) in a direction perpendicular to the inclined surface of the tape mounting base portion 23a.

[0076] Next, as shown in Figure 10(b), the inspection device 1 moves the hand portion 32 toward the tape mounting base portion 23a. As a result, the marking portion 38 moves toward the base end portion 43 without the holding portion 45 moving, and a part of the extension portion 44 is pushed into the base end portion 43, shortening its overall length. In other words, the extension portion 44 and the holding portion 45 move relative to each other toward the base end portion 43 due to the reaction force from the tape mounting base portion 23a. Before, during, or after this movement of the hand portion 32, the marking portion 38 performs an adsorption operation by sucking air from inside the holding portion 45 (suction cup), thereby adsorbing the adhesive tape by negative pressure.

[0077] Furthermore, as shown in Figure 10(c), the inspection device 1 moves the hand portion 32 away from the tape mounting base portion 23a. This releases the state in which a part of the extension portion 44 of the marking portion 38 is pushed into the base end portion 43, and the overall length increases. Then, with the adhesive tape still attached to the marking portion 38, the inspection device 1 transports the adhesive tape toward the position corresponding to the defective portion of the solar cell module 100 (hereinafter also simply referred to as the corresponding position). In detail, the inspection device 1 moves the marking portion 38 (holding portion 45) toward the inclined surface of the tape mounting base portion 23a, and then moves the marking portion 38 toward the corresponding position while changing its orientation.

[0078] Next, as shown in Figure 11, the inspection device 1 performs an attachment operation (attachment process) in which adhesive tape is attached to the corresponding position on the solar cell module 100. In other words, as shown in Figure 11(a), the inspection device 1 brings the hand portion 32 close to the corresponding position and places the adhesive tape held by the holding portion 45 on the corresponding position. Then, as shown in Figure 11(b), the inspection device 1 moves the hand portion 32 toward the solar cell module 100 (corresponding position). As a result, the marking portion 38 moves toward the holding portion 45, with the base end portion 43 moving toward the holding portion 45, and a part of the extension portion 44 is pushed into the base end portion 43, shortening its overall length. In other words, the extension portion 44 and the holding portion 45 move relative to each other toward the base end portion 43 due to the reaction force from the corresponding position. Furthermore, after placing the adhesive tape on the corresponding position, the inspection device 1 performs a suction release operation to release the suction (adhesion) of the adhesive tape before, during, or after the operation of moving the hand portion 32.

[0079] At this time, the inspection device 1 performs the operation of moving the marking unit 38 (hand unit 32) and the operation of changing the orientation of the marking unit 38 based on the coordinates and curvature angle of the corresponding position calculated in advance in the linking process. Specifically, before placing the adhesive tape on the corresponding position, the inspection device 1 changes the orientation of the marking unit 38 based on the curvature angle of the corresponding position so that the suction surface of the holding unit 45 (the adhesive tape held by suction) faces the corresponding position. Specifically, this orientation is such that the suction direction of the adhesive tape is perpendicular to the part that becomes the corresponding position, and the suction direction of the adhesive tape and the normal direction of the part that becomes the corresponding position are in the same direction. Then, after changing the orientation of the marking section 38, the inspection device 1 moves the marking section 38 (holding section 45) in a direction along the normal direction of the corresponding position, so that the adhesive tape is placed on the corresponding position.

[0080] Here, the inspection device 1 moves the marking section 38 based on the coordinates and curvature angle of the corresponding position calculated in advance during the linking process. However, there is a possibility that errors may occur in the values ​​calculated when determining the coordinates and curvature angle of the corresponding position. As a result, when the marking section 38 (the suction surface of the holding section 45) is moved with the calculated coordinates of the corresponding position as the target, the adhesive tape may not reach the corresponding position, or the marking section 38 may move too far towards the solar cell module 100. In other words, it is possible that the adhesive tape may not be accurately positioned on the corresponding position, or the marking section 38 may move too far towards the solar cell module 100, potentially causing damage to the marking section 38 or the solar cell module 100.

[0081] Therefore, as described above, the inspection device 1 of this embodiment has a structure in which the holding part 45 can move relative to the base end side part 43 of the marking part 38, and a part of the extended part 44 can be pushed into the base end side part 43, thereby shortening the overall length. As a result, the inspection device 1 can prevent the occurrence of problems caused by the above-mentioned errors by moving the suction surface of the holding part 45 to a coordinate that is slightly further inside (inside in the thickness direction) of the solar cell module 100 than the coordinate of the calculated corresponding position. In other words, even if the hand part 32 is moved in the direction toward the inside of the solar cell module 100 while the adhesive tape is placed on the corresponding position, the overall length of the marking part 38 is shortened, and no unnecessary load is placed on the solar cell module 100 from the marking part 38. For this reason, the inspection device 1 of this embodiment can prevent damage to the marking part 38 and the solar cell module 100 caused by the above-mentioned errors.

[0082] By moving the marking portion 38 in this way, the adhesive tape is attached to the portion of the solar cell module 100 that overlaps with the corresponding position. Then, as shown in Figure 11(c), the inspection device 1 moves the hand portion 32 away from the corresponding position on the solar cell module 100. As a result, the marking portion 38 is released from the state in which a part of the extension portion 44 is pushed into the base end portion 43, and its overall length increases. Similarly, if multiple defects are detected, adhesive tape is applied to the corresponding location for each defect. The marking process is completed when adhesive tape has been applied to all corresponding locations.

[0083] The inspection device 1 of this embodiment is intended to be used in a manufacturing plant or the like, and when the defect detection unit 13 detects a defect, it is assumed that the detected defect is actually a defect. In other words, the inspection device 1 is intended to be used in combination with other devices that perform reconfirmation (re-detection) of the defect, or for an operator to visually reconfirm the defect after it has been detected by the inspection device 1. Therefore, the inspection device 1 of this embodiment performs the marking process described above and actually (physically) marks the solar cell module 100 that is the object to be inspected. With this configuration, it is possible to move the solar cell module 100 from the mounting base 22 to another location for work. This makes it possible to improve the degree of freedom of the work location (freedom of factory layout) when performing work to reconfirm defective parts in production sites such as factories. In addition, since the location of the defective part (candidate defective part) detected by the inspection device 1 is easy to understand, the reconfirmation work becomes easier.

[0084] In the above-described embodiment, the inspection apparatus 1 (inspection unit 3) is configured such that one robot 21 has an imaging device 36 and a marking unit 38, but the present invention is not limited to this. The inspection apparatus of the present invention may have multiple robots, and may be configured to include a first robot whose hand portion has an imaging device 36 and an illumination device 37, and a second robot whose hand portion has a marking unit 38. With such a configuration, the inspection apparatus can perform an imaging process targeting one solar cell module 100 using the first robot, while performing a marking process targeting other solar cell modules 100 using the second robot. In other words, with such a configuration, the inspection efficiency can be improved when sequentially inspecting multiple solar cell modules 100 that are different from each other in a manufacturing site.

[0085] The marking process in the above-described embodiment involves applying adhesive tape to the corresponding location of the defective portion, but the present invention is not limited to this. For example, the marking process may involve marking the corresponding location with an applicator such as a water-based pen that can be erased later (forming a marked portion). In this case, the marked portion may include the pen (applicator). In other words, the marked portion only needs to be a part of the solar cell module 100 that can be physically marked.

[0086] The inspection unit 3 described above may be configured to have a safety fence that is continuous in a ring shape in plan view, and the robot 21, mounting platform 22, and marking material supply device 23 may be arranged in the area enclosed by the safety fence. In this case, the safety fence may be configured to have an opening and closing entrance for workers to enter and exit. The inspection device may be configured to perform the imaging process and marking process after the worker places the solar cell module 100 on the mounting platform 22, then exits through the entrance and closes the entrance. In other words, the imaging process and marking process may be configured to be started (executed) with the condition that the entrance and exit of the safety fence are closed. That is, the imaging process and marking process may be configured to be performed when the worker is not near the robot 21 or the mounting platform 22. In addition, the inspection device may be configured to include a transport robot (transportation means) for transporting the solar cell modules 100, which automatically places the solar cell modules 100 onto the mounting table 22 and automatically moves them to a position away from the mounting table 22. [Explanation of symbols]

[0087] 1. Inspection device 12 Position calculation section 13 Defect detection unit 14 Linking section 21 Robots 22 Mounting platform 36. Imaging device (imaging unit) 38 Marking section 43 Base end side (main body) 45 Holding part (adsorption part) 100 Solar cell modules (plate-shaped objects, objects to be inspected) 101 Surface substrate (transparent substrate) 102 solar cells 104 Rear circuit board

Claims

1. An inspection device for an object to be inspected, which is a plate-like body having a curved surface for inspection and possessing flexibility, and is designed based on design data. A platform on which the object to be inspected is placed, A position calculation unit calculates the position coordinates and angle of the surface of the object to be inspected when the object to be inspected is placed on the aforementioned stand, based on the design data of the object to be inspected. Based on the position coordinates and angles, an imaging unit captures the surface of the object to be inspected, which is placed on the aforementioned stand, such that the imaging axis is perpendicular to the surface of the object to be inspected, An inspection apparatus comprising a defect detection unit that detects defects from an image of the surface to be inspected captured by the imaging unit.

2. A linking unit that links the position coordinates calculated by the position calculation unit to the image captured by the imaging unit, The inspection apparatus according to claim 1, further comprising a marking section for marking the surface to be inspected at a position corresponding to the location of a defect in the image of the surface to be inspected.

3. The inspection apparatus according to claim 2, wherein the marking portion is marked by affixing a seal to the surface to be inspected at a position corresponding to the defect location in the image.

4. The marking portion has an adsorption portion for adsorbing the seal and a main body portion. The inspection apparatus according to claim 3, wherein the marking portion is attached to the surface to be inspected by pressing the seal, which has been adsorbed by the adsorption portion, against it, and the adsorption portion is able to move or change its orientation relative to the main body portion due to the reaction force from the surface to be inspected.

5. The inspection apparatus according to claim 2 or 3, comprising a robot having the imaging unit and the marking unit.

6. The inspection apparatus according to claim 2 or 3, comprising a first robot having the imaging unit and a second robot having the marking unit.

7. The inspection apparatus according to any one of claims 1 to 4, wherein the object to be inspected is a solar cell module.

8. The object to be inspected is a solar cell module having a transparent substrate, a back substrate, and solar cells between the transparent substrate and the back substrate. The inspection apparatus according to claim 7, wherein the defect detection unit detects defects on the back surface of the transparent substrate rather than on the solar cell side.

9. A platform on which the object to be inspected is placed, An imaging unit that images the surface of the object to be inspected, which is placed on the aforementioned mounting platform, A defect detection unit that detects defects from the image of the surface to be inspected captured by the imaging unit, An inspection device comprising a marking unit for physically marking a portion of the surface to be inspected that corresponds to a defect location in an image of the surface to be inspected.

Images