Position adjustment mechanism

Abstract

The present invention provides a position adjustment mechanism that allows rotation around the Z-axis relative to the surface of the mounting frame and also saves space. [Solution] The position adjustment mechanism of the present disclosure is a position adjustment mechanism for an optical member, and has a kinematic clamp located between a base plate on which the optical member is placed and a stand, and supporting the base plate on the stand, the kinematic clamp being rotatable about a Z-axis extending from the base plate toward the stand.

Description

[Technical Field]

[0001] The present disclosure relates to a position adjustment mechanism that can be used for optical members and the like. [Background Art]

[0002] Optical members such as adaptive optical devices are required to have advanced position adjustment mechanisms. Patent Document 1 describes a table that can be tilted to two or more predetermined positions by arranging kinematic supports (cone and sphere, V-groove and sphere, and flat surface and sphere) between a top element and a base element. That is, changing the spheres supporting the top element enables the top element to tilt. [Prior Art Literature] [Patent Literature]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2002-364799 [Summary of Invention] [Problem to be Solved by the Invention]

[0004] The position adjustment mechanism described in Patent Document 1 can adjust the inclination of a top element (for example, a surface plate), that is, the inclination caused by rotation about the X-axis and Y-axis along the surface of a base element (for example, a gantry). However, it cannot perform position adjustment by rotation about the Z-axis (the axis perpendicular to the surface of the base element), which is required for position adjustment of optical members. In addition, in position adjustment for optical members, height restrictions are sometimes strict, and miniaturization of position adjustment mechanisms for optical members is required.

[0005] Accordingly, an object of the present disclosure is to provide a position adjustment mechanism that can rotate about the Z-axis perpendicular to the gantry surface and can save space. [Means for Solving the Problem]

[0006] The position adjustment mechanism disclosed herein for solving the above problems is a position adjustment mechanism for an optical member, which is located between a base plate on which the optical member is placed and a stand, and has a kinematic clamp that supports the base plate to the stand, and the kinematic clamp is rotatable about a Z-axis extending from the base plate toward the stand. [Effects of the Invention]

[0007] According to this disclosure, by providing the kinematic clamp itself with a rotation mechanism centered on the Z axis, it becomes unnecessary to provide a separate rotation mechanism in the Z axis direction (height direction), thus enabling space savings. [Brief explanation of the drawing]

[0008] [Figure 1] This is a schematic diagram showing a position adjustment mechanism using a Kelvin clamp according to one embodiment of the present disclosure. [Figure 2A] This is a schematic diagram showing the relationship between the base plate and the support in one embodiment of the present disclosure. [Figure 2B] This is a schematic diagram illustrating a position adjustment mechanism that rotates around the Z-axis in one embodiment of the present disclosure. [Figure 3] This is a schematic diagram showing a position adjustment mechanism equipped with a connecting member used in one embodiment of the present disclosure. [Figure 4] This is a schematic diagram showing the actuator connected to the connecting member. [Figure 5] This is a schematic diagram showing an enlarged view of the actuator in Figure 4. [Figure 6] This is an exploded perspective view showing the mounting structure of the connecting members. [Figure 7] This is a schematic perspective view showing the mounting state of the connecting members. [Figure 8] This is a schematic perspective view showing the mounting state of the connecting members from a different angle. [Figure 9] This is a schematic perspective view showing through holes for mounting connecting members. [Figure 10]This is a schematic diagram showing a position adjustment mechanism using a Maxwell clamp according to another embodiment of the present disclosure. [Figure 11] This is a schematic diagram showing a position adjustment mechanism with connecting members used in other embodiments of the present disclosure. [Figure 12] This disclosure presents an exploded perspective view showing the rotation state of the surface plate. [Modes for carrying out the invention]

[0009] The position adjustment mechanism according to the embodiment of this disclosure will be described below with reference to Figures 1 to 13. However, the figures referenced below are simplified representations of the embodiment of this disclosure for the sake of clarity. Therefore, the position adjustment mechanism disclosed below may include any components not shown in the referenced figures. Furthermore, the dimensions of the components in each figure do not faithfully represent the dimensions of the actual components or the dimensional ratios of each component.

[0010] The position adjustment mechanism according to the embodiment of the present disclosure is located between a base plate on which an optical member is placed and the stand, and includes a kinematic clamp that supports the base plate to the stand, wherein the kinematic clamp is rotatable about a Z-axis extending from the base plate to the stand. A kinematic clamp is generally known as a mechanism that can perform highly accurate positioning by appropriately constraining the six degrees of freedom between two objects. Kinematic clamps include a Kelvin clamp in which three spheres are fixed in a cone portion, a V-groove, and a plane, respectively, and a Maxwell clamp in which three spheres are placed and fixed in three V-grooves, respectively.

[0011] The position adjustment mechanism of the present disclosure can be used for, for example, optical members. Specifically, in order to position a surface plate on which an optical member is placed, it is preferable that a kinematic clamp is disposed between the surface plate and a gantry, and the surface plate is supported on the gantry by the kinematic clamp. The kinematic clamp according to the present disclosure is preferably rotatable not only in the X-axis direction and Y-axis direction parallel to the plane of the gantry, but also around the height direction (Z-axis direction) extending from the gantry toward the surface plate. Conventionally, it has been necessary to provide a separate member (mechanism) to enable rotation about the Z-axis. In the position adjustment mechanism of the present disclosure, a rotation mechanism is provided to the kinematic clamp that performs position adjustment, thereby eliminating the need for using a separate member (mechanism). This makes it possible to save space in the Z-axis direction and achieve downsizing of the position adjustment mechanism.

[0012] Hereinafter, a position adjustment mechanism according to an embodiment of the present disclosure will be specifically described with reference to FIGS. 1 to 7. FIG. 1 is a schematic diagram showing a position adjustment mechanism using a Kelvin clamp. As shown in FIG. 1, the position adjustment mechanism preferably comprises first, second and third mounting members 2a, 2b, 2c attachable to a gantry 1, and spherical bodies 3 respectively disposed on the first, second and third mounting members 2a, 2b, 2c.

[0013] A first upper surface 21a of the first mounting member 2a preferably has a conical recess 4. A second upper surface 21b of the second mounting member 2b preferably has a groove portion 5 having a V-shaped cross-section (hereinafter sometimes referred to as V-groove portion 5). A third upper surface 21c of the third mounting member 2c preferably has a flat portion 6 (flat surface). The first, second and third mounting members 2a, 2b, 2c can be disposed, for example, at respective vertices of an isosceles triangle, but are not limited thereto. In another embodiment, they may be disposed at respective vertices of an equilateral triangle.

[0014] Preferably, the first and third placement members 2a, 2c are fixed to the gantry 1. Preferably, the V-groove portion provided on the second placement member 2b extends along the first direction indicated by arrow A in FIG. 1 when viewed from above. That is, when viewed from above, it is preferable that an extension line in the first direction passes through the center of the recessed portion 4 in the first placement member 2a in the direction shown in the figure (direction of arrow A). Thermal stress generated when thermal expansion occurs acts radially around the recessed portion 4. Since the extension line in the first direction passes through the center of the recessed portion 4, the direction in which the thermal stress acts coincides with the extending direction of the V-groove portion 5. Therefore, the spherical body 3 can move along the V-groove portion 5 without unnecessarily colliding with the wall surface of the V-groove portion 5. This makes it possible to reduce the influence of thermal stress generated between the spherical body 3 and the V-groove portion 5.

[0015] Furthermore, the second placement member 2b may be movable relative to the gantry 1 in a second direction, which is a direction including a planar component of the flat portion 6 of the third upper surface 21c excluding the first direction. This allows a Z-axis rotation mechanism to be provided in the Kelvin clamp configuration that enables position adjustment by fixing one point (the recessed portion 4) during placement, thereby providing a position adjustment mechanism with high work efficiency. Furthermore, the second placement member 2b may be movable relative to the gantry 1 in a predetermined second direction on a plane including the flat portion 6 of the third upper surface 21c. This makes it possible to use a single moving plane for the second placement member 2b, thereby further improving the accuracy of position adjustment.

[0016] FIG. 2A shows a state where the first placement member 2a having a conical recessed portion 4 supports the surface plate 7 on the gantry 1. FIG. 2B schematically shows, with three spherical bodies 3a, 3b, 3c, an example of a rotation mechanism centered on the Z-axis in the first placement member 2a. As shown in FIG. 2B, when the spherical body 3b of the second placement member 2b moves in the direction of arrow B toward the spherical body 3c of the third placement member 2c with the spherical body 3a of the first placement member 2a as the center of rotation, the surface plate 7 also rotates around the Z-axis.

[0017] Thus, in this embodiment, by further enabling rotational position adjustment around the Z-axis in the configuration of the Kelvin clamp used for position adjustment, a position adjustment mechanism with excellent work efficiency can be provided. Furthermore, by using a Kelvin clamp among several kinematic clamps, the conical cone portion that serves as the center of rotation can be used as a reference when placing the object, making positioning easier. As a result, work efficiency can be increased.

[0018] Here, the first, second, and third mounting members 2a, 2b, and 2c, and each of the spheres 3, should all have smooth contact surfaces so as not to hinder their movement. Furthermore, the first, second, and third mounting members 2a, 2b, and 2c should be made of materials that can be treated to increase their hardness. This reduces the occurrence of deformation at the points where the mounting members 2a, 2b, and 2c come into contact with the spheres 3, where the stress on these materials is high. Specifically, for example, carbon tool steel (SK3) can be used for the first, second, and third mounting members 2a, 2b, and 2c.

[0019] Furthermore, in order to prevent these spheres 3 from breaking under load, it is necessary to either increase the size of the spheres 3 themselves or use a material with a high allowable stress for the spheres 3. For example, ceramics such as silicon nitride can be used as a material with a high allowable stress for the spheres 3. Using such a material makes it possible to reduce the size of the spheres 3. Furthermore, the frame 1 can be made of a metal material such as aluminum, stainless steel, or steel. The surface plate 7 can be made of a ceramic material such as cordierite (2MgO·2Al2O3·5SiO2).

[0020] As shown in Figure 3, the first mounting member 2a and the second mounting member 2b may be connected by a first connecting member 8. The first connecting member 8 allows the distance and orientation of the V-groove 5 and the recess 4 to be kept constant, thereby reducing displacement during movement. As a result, the V-groove 5 of the second mounting member 2b can rotate around the center of the conical recess 4 (the fixed point of thermal displacement). Furthermore, by having the first connecting member 8, when moving the V-groove 5, force can be applied not only to the second mounting member 2b having the V-groove 5 but also to the first connecting member 8, thereby improving work efficiency during positioning.

[0021] As shown in Figure 4, the first connecting member 8 may have a first hole 8a at one end for inserting the first mounting member 2a, and a second hole 8b at the other end located on the upper surface of the second mounting member 2b, with an arm 8c connecting them. The first mounting member 2a may have a stepped portion 21aa on its outer circumferential surface, as shown in Figure 1. The first hole 8a of the first connecting member 8 may be locked onto this stepped portion 21aa. The height of the stepped portion 21aa from the base 1 may be configured to be equal to the height of the second mounting member 2b. This allows the first connecting member 8 to be parallel to the base 1. The arm 8c only needs to have a length at least between the recess 4 and the V-groove 5, and may be longer than that. Furthermore, the first connecting member 8 is not limited to the form shown in Figure 4, and various shapes can be used.

[0022] An actuator 9 may be connected to the end portion of the first connecting member 8 beyond the second hole 8b. The actuator 9 connects the first connecting member 8 to the frame 1 to which the first, second, and third mounting members 2a, 2b, and 2c can be attached, and has the function of moving the first connecting member 8. That is, the actuator 9 has a rod-shaped operating part 91 that extends to the rear, and as shown in Figures 3 and 4, it has a mounting part 10 at the rear end of the operating part 91. As shown in Figure 7, the mounting part 10 can be attached to the end face 1a of the frame 1. The operating part 91 is slidable relative to the mounting part 10. This enables the sliding operation shown by arrow (1) in Figure 4. The sliding of the operating part 91 may be done manually or by a control device (not shown). The first connecting member 8, including the arm 8c, can be made of a metal material such as stainless steel. The actuator 9 can be made of a metal material such as stainless steel or steel.

[0023] The first connecting member 8 may have a hole 11 that penetrates through the first hole 8a in the Z-axis direction (height direction) towards its end. On the other hand, the actuator 9 may have a projection 12 at its tip. By slidably engaging this projection 12 with the hole 11, the actuator 9 and the first connecting member 8 can be connected at the hole 11.

[0024] As shown in Figures 4 and 5, the hole 11 may have an elongated shape that is inclined with respect to the sliding direction of the operating part 91 (the direction indicated by arrow (1)). As a result, as shown in Figure 4, when the operating part 91 is slid in the direction indicated by arrow (1), the first connecting member 8 slides in the direction indicated by arrow (2), and the arm 8c can be rotated in the direction indicated by arrow (3).

[0025] In this way, the actuator 9 makes it easy to adjust the position of the second mounting member 2b by rotating it around the first mounting member 2a, thereby increasing work efficiency. Furthermore, because the projection 12 is located inside the hole 11, the force of the actuator 9 can be transmitted to the first connecting member 8. This allows the first connecting member 8 to be moved efficiently, improving work efficiency.

[0026] The elongated hole portion 11 preferably has a predetermined length, indicated by arrow (4) in Figure 5, for controlling the movable position of the first connecting member 8. Furthermore, the width of the hole portion 11 perpendicular to the length indicated by arrow (4) may be sufficient to adjust the range of motion of the projection portion 12. Also, the direction in which the arm 8c extends (lengthwise direction) may intersect with the direction indicated by arrow (4) corresponding to the straight portion of the hole portion 11. The hole 11 is not limited to an elongated hole; for example, it may be circular, elliptical, or the like. For example, an elongated hole can reduce lateral displacement when the arm 8c rotates in the direction of arrow (3). For example, the hole 11 may be formed by two semicircles and two parallel straight lines, as shown in Figure 4.

[0027] The first mounting member 2a and the third mounting member 2c may be fixed to the surface of the frame 1. Fixing can be done, for example, by bonding the back surfaces of each mounting member 2a and 2c to the surface of the frame 1 with an adhesive. The second mounting member 2b can be fixed as shown in Figures 6 to 9. Specifically, as shown in Figure 6, a fixing member 13 and a first fixing bolt 14 are preferably located below the frame 1 on which the second mounting member 2b is positioned. The fixing member 13 is block-shaped and has a first bolt insertion hole 17 through which the first bolt 14 is inserted.

[0028] The frame 1 may have a through hole 15 through which the first bolt 14 is inserted. The second mounting member 2b may have a screw hole 16 that engages with the first bolt 14. By screwing the first bolt 14, which has been inserted through the first bolt insertion hole 17 and the through hole 15, into the screw hole 16 of the second mounting member 2b, the second mounting member 2b and the fixing member 13 can be fastened via the frame 1. As a result, the second mounting member 2b can be firmly fixed onto the frame 1, as shown in Figures 7 and 8. Figure 7 shows the fastening state between the second mounting member 2b and the fixing member 13 from below the frame 1, and Figure 8 shows it from the side of the frame 1. When moving the second mounting member 2b, it is possible to move it simply by loosening the first bolt 14. This allows for greater freedom of movement during position adjustment while maintaining the strength when fixed. Furthermore, since the work can be done without removing the first bolt 14, work efficiency is improved.

[0029] The method for fixing the second mounting member 2b to the first connecting member 8 will now be described. As shown in Figure 6, the second bolt 18 is inserted through the second bolt insertion hole 19 provided in the first connecting member 8 and screwed into the screw hole 20 provided on the upper surface of the second mounting member 2b, thereby fastening the first connecting member 8 to the second mounting member 2b. Figure 9 shows the state in which the second mounting member 2b has been fastened to the first connecting member 8. By fixing the second mounting member 2b and the first connecting member 8 to the frame 1 with the fixing member 13 and the first and second bolts 14 and 18, the position of the second mounting member 2b can be firmly fixed.

[0030] Furthermore, the method for fixing the second mounting member 2b is not limited to the method using the first bolt 14, but may also be a method using magnetic force such as an electromagnetic magnet, or a method using other means. Furthermore, as shown in Figure 9, the through hole 15 may be an elongated hole extending in the second direction. This allows the first bolt 14 to be moved within the range of the elongated hole. This allows the V-groove 5 to be moved by loosening the first bolt 14 without removing it. Therefore, the degree of freedom of movement during position adjustment can be greatly increased while maintaining the strength when fixed. Note that the elongated hole of the through hole 15 referred to here means a shape consisting of a straight line longer than the radius of a circle, as shown in Figure 6. In this case, a part of the straight line may have a curve. Furthermore, while this embodiment uses an elongated hole formed by two semicircles and two parallel lines as shown in Figure 6, it is not limited to this. For example, a shape in which multiple holes are arranged in the movable region may also be used. Also, although multiple first bolts 14 and second bolts 18 are used, at least one of each is sufficient.

[0031] Next, other embodiments of the present disclosure will be described with reference to Figures 10 and 11. Figure 10 shows a position adjustment mechanism using a Maxwell clamp as a kinematic clamp. This position adjustment mechanism preferably includes three mounting members 30 having a V-shaped groove 35 (hereinafter sometimes referred to as V-groove 35) in cross-section, which can be attached to a frame 1, and three spheres 31 positioned on each of these mounting members 30. Since the three spheres 31 are in point contact with the V-groove 35 of the mounting members 30, they are less susceptible to the effects of thermal expansion and contraction during use. This improves durability.

[0032] Each V-groove 35 is preferably positioned to extend toward the rotation center (Z-axis) of the Maxwell clamp in a top view (extending in the direction D, as shown by the dashed line in Figure 10). The three mounting members 30 are movable along an arc centered on the rotation center O, as shown by the arrows in Figure 10. The three mounting members 30 can be positioned, for example, at the vertices of an equilateral triangle centered on the rotation center, but they may also be positioned at appropriate intervals along a single arc. The movement of the three mounting members 30 may be, for example, done manually or by providing wheels on the three mounting members 30, and is not limited to these methods. The rotation center O corresponds to the center of the arc. By moving the three mounting members 30 along the arc, the base plate 7 can be rotated around the rotation center O (Z axis). The three mounting members 30 move such that the line segments extending from the three V-grooves 35 (in the direction D shown in Figure 10) intersect at a single point. However, the center of rotation O does not necessarily have to coincide with the intersection point. When thermal expansion occurs, the resulting force (thermal displacement) acts radially around the center of rotation O. However, with the configuration and arrangement as in this embodiment, the sphere 31 can move along the V-groove 35. Therefore, the influence of thermal stress between the sphere 31 and the V-groove 35 can be reduced. Here, the center of rotation O becomes a fixed point that is not affected by thermal displacement.

[0033] This embodiment may further include a second connecting member 32 that connects the three mounting members 30 to each other, as shown in Figure 11. The second connecting member 32 may have an arc-shaped first portion 32a centered on the rotation center O of the Maxwell clamp, and three second portions 32b that connect the rotation center O to each mounting member 30.

[0034] The second connecting member 32 allows the spacing between the three mounting members 30 to be kept constant, thereby reducing misalignment between the mounting members 30 during movement. Furthermore, the presence of the connecting member 8 allows the three mounting members 30 to be moved not only by applying force to the mounting members 30 but also to the second connecting member 32, thereby improving work efficiency during positioning. Furthermore, the first part 32a is not limited to an arc shape; it may have other shapes as long as the spacing between the three mounting members 30 can be kept constant.

[0035] Figure 12 shows an optical element positioning mechanism using a Kelvin clamp. As shown in the figure, the first mounting member 2a is preferably positioned below the focal point 21 on the surface plate 23 of the optical element. This allows the surface plate 23 to rotate around the Z-axis with respect to the focal point 21, which serves as the adjustment reference. Therefore, adjustment can be performed without shifting the other adjustment axes (X-axis and Y-axis), improving work efficiency. Similarly, a mechanism for adjusting the position of optical components using a Maxwell clamp can also improve work efficiency. In another embodiment, the first and third mounting members 2a and 2c are fixed to the frame 1. In this case, the V-groove 5 of the second mounting member 2b may extend in a direction different from the first direction shown by arrow A in Figure 1 when viewed from above. That is, the V-groove 5 may be positioned so that the extension line in the first direction does not pass through the center of the recess 4, so that the sphere can move. Even in this case, a position adjustment mechanism with excellent work efficiency can be provided. By using the above position adjustment mechanism to place the optical components on the base plate 23, it is possible to provide an optical component that is more space-saving. The optical components referred to here mean, for example, adaptive optical components or lenses and mirrors that adjust the position of light fluctuations, or other components that require position adjustment.

[0036] In one embodiment, (1) the position adjustment mechanism is a position adjustment mechanism for an optical member, It has a kinematic clamp positioned between the base plate on which the optical component is placed and the stand, and which supports the base plate to the stand, The kinematic clamp is rotatable about a Z-axis that extends from the base plate toward the frame.

[0037] (2) The position adjustment mechanism described in (1) above comprises a kinematic clamp which is a Kelvin clamp, three mounting members which can be attached to the frame, and three spheres which are each located on the upper surface of the mounting members, The first upper surface of the first mounting member has a conical recess, The second upper surface of the second mounting member has a V-shaped groove in cross-section. The third upper surface of the third mounting member has a flat portion of a flat surface, The groove extends along the first direction when viewed from above. The first and third mounting members are located on the frame, The second mounting member is movable relative to the frame in a second direction, excluding the first direction, that includes the planar component of the flat portion of the third upper surface.

[0038] (3) The position adjustment mechanism described in (2) above allows the second mounting member to move relative to the frame in a second direction other than the first direction on a plane including the flat surface of the third upper surface.

[0039] (4) In the position adjustment mechanism described in (2) or (3) above, when viewed from above, the extension line in the first direction of the second mounting member passes through the center of the recess in the first mounting member.

[0040] (5) The position adjustment mechanism described in any of (2) to (4) above further comprises a first connecting member that connects the first mounting member and the second mounting member.

[0041] (6) The position adjustment mechanism described in (5) above further comprises an actuator that connects the frame and the first connecting member, The first connecting member has a hole that penetrates in the Z-axis direction, The actuator and the first connecting member are connected at the hole.

[0042] (7) The position adjustment mechanism described in any of (2) to (6) above further comprises a fixing member and a bolt below the second mounting member, The aforementioned frame has a through hole that penetrates in the Z-axis direction, The bolt passes through the through hole and connects the second mounting member and the fixing member.

[0043] (8) The position adjustment mechanism described in (7) above is such that the opening of the through hole is an elongated hole extending in the second direction.

[0044] (9) The position adjustment mechanism described in (1) above is such that the kinematic clamp is Three mounting members having a V-shaped groove in cross-section, which can be attached to the aforementioned frame, Three spheres are positioned on the upper surface of the mounting member, This is a Maxwell clamp that has [a specific feature / feature].

[0045] (10) The position adjustment mechanism described in (9) above has such that each groove extends toward the rotation center of the Maxwell clamp when viewed from above, The three mounting members described above are movable along an arc centered on the rotation center of the Maxwell clamp.

[0046] (11) The position adjustment mechanism described in (9) or (10) above further comprises a second connecting member that connects the three previously described position members to each other. The second connecting member is The first part of the Maxwell clamp is an arc shape centered on the center of rotation, Three second parts connecting the rotation center and the three aforementioned mounting members, It has.

[0047] (12) The optical member comprises the position adjustment mechanism described in any of (1) to (11) above and an optical component.

[0048] (13) The optical member is an optical member equipped with the position adjustment mechanism described in (12) above, wherein the first mounting member is located at the focal point of the optical member.

[0049] While embodiments of this disclosure have been described above, this disclosure is not limited to the embodiments described above, and various modifications and improvements are possible within the scope of this disclosure. [Explanation of symbols]

[0050] 1. Stand 1a End section 2a First mounting member, 2b Second mounting member, 2c Third mounting member 21a 1st top surface, 21b 2nd top surface, 21c 3rd top surface 21aa stepped section 3, 3a, 3b, 3c sphere 4 recesses 5 V groove (groove) 6 Flat area 7 Surface plate 8. First connecting member 8a 1st hole 8b 2nd hole 8c arm 9 Actuators 91 Operation section 10 Mounting part 11 Hole 12 Protrusion 13 Fixing member 14. First bolt 15 Through holes 16, 20 screw holes 17 First bolt insertion hole 18. Second bolt 19 Second bolt insertion hole 21 focus 23 Surface plate 30 Mounting member 31 Spheres 32 Second connecting member 32a Part 1 32b Part 2 35 V groove (groove)

Claims

1. An optical component positioning mechanism, It has a kinematic clamp positioned between the base plate on which the optical component is placed and the stand, and which supports the base plate to the stand, The kinematic clamp is a position adjustment mechanism that is rotatable about a Z-axis extending from the base plate toward the frame.

2. The kinematic clamp is a Kelvin clamp, It has three mounting members that can be attached to the aforementioned frame, and three spheres that are each located on the upper surface of the mounting members, The first upper surface of the first mounting member has a conical recess, The second upper surface of the second mounting member has a V-shaped groove in cross-section. The third upper surface of the third mounting member has a flat portion of a flat surface, The groove extends along the first direction when viewed from above. The first and third mounting members are located on the frame, The position adjustment mechanism according to claim 1, wherein the second mounting member is movable with respect to the frame in a second direction other than the first direction, which includes the planar component of the flat portion of the third upper surface.

3. The position adjustment mechanism according to claim 2, wherein the second mounting member is movable relative to the frame in a second direction other than the first direction on a plane including the flat surface of the third upper surface.

4. The position adjustment mechanism according to claim 2 or 3, wherein, in a top view, the extension line in the first direction of the second mounting member passes through the center of the recess in the first mounting member.

5. The position adjustment mechanism according to claim 2 or 3, further comprising a first connecting member that connects the first mounting member and the second mounting member.

6. The system further includes an actuator that connects the frame and the first connecting member. The first connecting member has a hole that penetrates in the Z-axis direction, The position adjustment mechanism according to claim 5, wherein the actuator and the first connecting member are connected at the hole.

7. Below the second mounting member, a fixing member and a bolt are further provided. The aforementioned frame has a through hole that penetrates in the Z-axis direction, The position adjustment mechanism according to claim 2 or 3, wherein the bolt passes through the through hole and connects the second mounting member and the fixing member.

8. The position adjustment mechanism according to claim 7, wherein, in a top view, the opening of the through hole is an elongated hole extending in the second direction.

9. The kinematic clamp is, Three mounting members having a V-shaped groove in cross-section, which can be attached to the aforementioned frame, Three spheres are positioned on the upper surface of the mounting member, The position adjustment mechanism according to claim 1, which is a Maxwell clamp having

10. Each of the grooves extends toward the center of rotation of the Maxwell clamp when viewed from above. The position adjustment mechanism according to claim 9, wherein the three aforementioned positioning members are movable along an arc centered on the rotation center of the Maxwell clamp.

11. The device further comprises a second connecting member that connects the three previously described mounting members to each other. The second connecting member is, The first part of the Maxwell clamp is an arc shape centered on the center of rotation, Three second parts connecting the rotation center and the three aforementioned mounting members, A position adjustment mechanism according to claim 9 or 10, having the following features.

12. An optical member comprising the position adjustment mechanism described in claim 1 and an optical component.

13. An optical member comprising the position adjustment mechanism described in claim 12, wherein the first mounting member is located at the focal point of the optical member.

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