Supporting organizations

Abstract

This provides a support mechanism that reduces the likelihood of the sphere falling off and improves work efficiency. [Solution] The support mechanism of the present disclosure is a support mechanism for supporting a base plate on which an optical member is placed on a stand, comprising: a mounting member that can be attached to the stand; a sphere located on the mounting member; and a fixing member located above the sphere and that can be attached to the base plate. The fixing member has a first projection that extends toward the mounting member so as to surround the sphere, and the first projection has a first distance from the sphere.

Description

Technical Field

[0001] The present disclosure relates to a support mechanism applicable to, for example, a position adjustment mechanism using a kinematic clamp. Background Art

[0002] Optical members such as adaptive optical devices are required to have advanced position adjustment mechanisms. Patent Document 1 describes a table that can be tilted to two or more predetermined positions by arranging kinematic supports (cone and sphere, V-groove and sphere, and flat surface and sphere) between a top element and a base element. That is, changing the sphere that supports the top element allows the top element to be tilted. Prior Art Literature Patent Literature

[0003] Patent Document 1 Japanese Unexamined Patent Application Publication No. 2002-364799 Summary of Invention Problem to be Solved by the Invention

[0004] In the technique of position adjustment using spheres as described in Patent Document 1, when placing the top element (e.g., a surface plate) at a desired position relative to the base element (e.g., a frame), the spheres may fall off, which is expected to reduce work efficiency. Therefore, in a position adjustment mechanism using spheres, there is a need for a support mechanism that reduces falling off of spheres and enables easy position adjustment of the top element relative to the base element.

[0005] Accordingly, an object of the present disclosure is to provide a support mechanism that reduces the risk of falling off of spheres and can improve work efficiency. Means for Solving the Problem

[0006] The support mechanism of the present disclosure for solving the above problems is a support mechanism for supporting a base plate on which an optical member is placed on a stand, comprising: a mounting member that can be attached to the stand; a sphere located on the mounting member; and a fixing member located above the sphere and that can be attached to the base plate. The fixing member has a first projection that extends toward the mounting member so as to surround the sphere, and the first projection has a first distance from the sphere. [Effects of the Invention]

[0007] According to this disclosure, since the lower surface of the fixing member has a first projection surrounding the sphere, the risk of the sphere moving horizontally and falling off the mounting member can be reduced. As a result, the work efficiency when placing the fixing member on the mounting member is improved. Furthermore, since the first projection has a first distance from the sphere, it does not restrict the movement of the sphere. [Brief explanation of the drawing]

[0008] [Figure 1] This is a schematic diagram showing a part of a support mechanism using a Kelvin clamp in one embodiment of the present disclosure. [Figure 2A] This is a schematic diagram showing the relationship between the surface plate and the stand. [Figure 2B] This is a schematic diagram illustrating the position adjustment mechanism of a Kelvin clamp that rotates around the Z-axis. [Figure 3] This is a schematic diagram showing a position adjustment mechanism equipped with a connecting member in one embodiment of the present disclosure. [Figure 4] This is a schematic diagram showing the actuator connected to the connecting member. [Figure 5] This is a schematic diagram showing an enlarged view of the actuator in Figure 4. [Figure 6] This is an exploded perspective view showing the mounting structure of the connecting members. [Figure 7] This is a schematic diagram showing a support mechanism having a fixed member according to one embodiment of the present disclosure. [Figure 8] This is a cross-sectional view taken along line II in Figure 7. [Figure 9] This is a cross-sectional view taken along line II-II in Figure 7. [Figure 10] This is a cross-sectional view taken along line III-III in Figure 7. [Figure 11] This is an exploded view showing the position adjustment mechanism for an optical element using the support mechanism of this embodiment. [Modes for carrying out the invention]

[0009] The support mechanism according to the embodiments of this disclosure will be described below with reference to Figures 1 to 10. However, the figures referenced below are simplified representations of the embodiments of this disclosure for the sake of clarity. Therefore, the support mechanism disclosed below may include any components not shown in the referenced figures. Furthermore, the dimensions of the components in each figure do not faithfully represent the dimensions of the actual components or the dimensional ratios of each component.

[0010] The support mechanism according to the embodiment of this disclosure is applicable to a position adjustment mechanism that supports a platen on which an optical member is placed on a stand, and adjusts the position of the platen relative to the stand. The position adjustment mechanism includes a kinematic clamp that supports the platen on the stand. A kinematic clamp is generally known as a mechanism that can perform high-precision positioning by appropriately constraining the six degrees of freedom between two objects. Kinematic clamps include a Kelvin clamp in which three spheres are fixed in a cone, a V-groove, and a plane, respectively, and a Maxwell clamp in which three spheres are placed and fixed in three V-grooves, respectively.

[0011] Specifically, in order to position a surface plate on which an optical member is placed, a kinematic clamp is interposed between the surface plate and a pedestal, and the surface plate is supported on the pedestal by the kinematic clamp. The kinematic clamp according to the present disclosure is rotatable about not only the X-axis direction and Y-axis direction parallel to the plane of the pedestal, but also the height direction (Z-axis direction) extending perpendicularly from the pedestal toward the surface plate. Conventionally, it has been necessary to provide a separate member (mechanism) for performing rotation about the Z-axis. In the position adjustment mechanism of the present disclosure, since a rotation mechanism is imparted to the kinematic clamp that performs position adjustment, there is no need to use a separate member (mechanism). This enables space saving in the Z-axis direction and allows size reduction of the support mechanism.

[0012] Hereinafter, a support mechanism according to an embodiment of the present disclosure will be specifically described with reference to FIGS. 1 to 10. FIG. 1 is a schematic diagram showing a part of a support mechanism using a Kelvin clamp. As shown in FIG. 1, the support mechanism includes first, second and third mounting members 2a, 2b, 2c attachable to a pedestal 1, and spherical bodies 3 respectively positioned on the first, second and third mounting members 2a, 2b, 2c.

[0013] A third surface 21a of the first mounting member 2a may have a conical recess 4. A third surface 21b of the second mounting member 2b may have a groove portion 5 having a V-shaped cross section (hereinafter may be referred to as V-groove portion 5). A third surface 21c of the third mounting member 2c may have a flat portion 6 (flat surface). The first, second and third mounting members 2a, 2b, 2c can be arranged, for example, at respective vertices of an isosceles triangle, but are not limited thereto. As another embodiment, they may be arranged at respective vertices of an equilateral triangle.

[0014] The first and third mounting members 2a, 2c may be fixed to the pedestal 1. The V-groove portion 5 of the second mounting member 2b may extend along a first direction indicated by arrow A in FIG. 1 in a top view. That is, in top view, an extension line in the first direction may extend in the illustrated direction (direction of arrow A) passing through the center of the recess 4 in the first mounting member 2a. When thermal expansion occurs, the generated thermal stress acts radially around the recess 4. Since the extension line in the first direction passes through the center of the recess 4, the direction in which the thermal stress acts matches the extending direction of the V-groove 5. Therefore, the sphere 3 can move along the V-groove 5 without unnecessarily colliding with the wall surface of the V-groove 5. This reduces the influence of thermal stress generated between the sphere 3 and the V-groove 5.

[0015] Further, the second mounting member 2b may be movable relative to the gantry 1 in a second direction which is a direction including the planar component of the flat portion 6 of the third upper surface 21c and excludes the first direction. This allows a Z-axis rotation mechanism to be provided in the configuration of a Kelvin clamp that enables position adjustment by fixing one point (the cone portion) during mounting, thereby providing a position adjustment mechanism with high work efficiency. Further, the second mounting member 2b may be movable relative to the gantry 1 in a predetermined second direction on a plane including the flat portion 6 of the third upper surface 21c. This allows the second mounting member 2b to have a single movement plane, further improving the accuracy of position adjustment.

[0016] FIG. 2A shows a state where a first mounting member 2a having a conical recess 4 supports a surface plate 7 on the gantry 1. FIG. 2B schematically shows an example of a rotation mechanism centered on the Z axis in the first mounting member 2a by means of three spheres 3a, 3b, and 3c. As shown in FIG. 2B, when the sphere 3b of the second mounting member 2b moves in the direction of arrow B toward the sphere 3c of the third mounting member 2c with the sphere 3a of the first mounting member 2a as the rotation center, the surface plate 7 also rotates about the Z axis.

[0017] As described above, in this embodiment, in the configuration of the Kelvin clamp for position adjustment, rotational position adjustment centered on the Z axis is further enabled, which improves work efficiency. In addition, the use of the Kelvin clamp allows positioning to be easily performed because the conical cone portion serving as the rotation center can be used as a reference during mounting. As a result, work efficiency can be improved.

[0018] Here, the first, second, and third mounting members 2a, 2b, and 2c, and each of the spheres 3, should all have smooth contact surfaces so as not to hinder their movement. Furthermore, the first, second, and third mounting members 2a, 2b, and 2c should be made of materials that can be treated to increase their hardness. This reduces the occurrence of deformation at the points where the mounting members 2a, 2b, and 2c come into contact with the spheres 3, where the stress on these materials is high. Specifically, for example, carbon tool steel (SK3) can be used for the first, second, and third mounting members 2a, 2b, and 2c.

[0019] Furthermore, to reduce the risk of these spheres breaking under load, it is necessary to either increase the size of sphere 3 itself or use a material with a high allowable stress for sphere 3. For example, ceramics such as silicon nitride may be used as a material with a high allowable stress for sphere 3. Using such a material makes it possible to reduce the size of sphere 3. Furthermore, the frame 1 may be made of a metal material such as aluminum, stainless steel, or steel. The surface plate 7 may be made of a ceramic material such as cordierite (2MgO·2Al2O3·5SiO2).

[0020] As shown in Figure 3, the first mounting member 2a and the second mounting member 2b may be connected by a connecting member 8. The connecting member 8 allows the distance and orientation of the V-groove 5 and the conical recess 4 to be kept constant, thereby reducing displacement during movement. This allows the V-groove 5 of the second mounting member 2b to rotate around the center of the conical recess 4 (the fixed point of thermal displacement). Furthermore, by having a connecting member 8, when moving the V-groove 5, force can be applied not only to the second mounting member 2b having the V-groove 5 but also to the connecting member 8, thereby improving work efficiency during positioning.

[0021] As shown in Figure 4, the connecting member 8 may have a first hole 8a at one end for inserting the first mounting member 2a, and a second hole 8b at the other end located on the upper surface of the second mounting member 2b, with an arm 8c connecting them. The first mounting member 2a may have, for example, a stepped portion 21aa on its outer circumferential surface, as shown in Figure 1. The first hole 8a of the connecting member 8 may be locked onto this stepped portion 21aa. The height of the stepped portion 21aa from the base 1 may be configured to be, for example, equal to the height of the second mounting member 2b. This allows the connecting member 8 to be parallel to the base 1. The arm 8c only needs to have a length at least between the recess 4 and the V-groove 5, and may be longer than that. Furthermore, the connecting member 8 is not limited to the form shown in Figure 4, and various shapes can be used.

[0022] An actuator 9 may be connected to the end portion of the connecting member 8 beyond the second hole 8b. The actuator 9 connects the frame 1 to which the first, second, and third mounting members 2a, 2b, and 2c can be attached to the connecting member 8, and has the function of moving the connecting member 8. That is, the actuator 9 has a rod-shaped operating part 91 that extends to the rear, and as shown in Figures 3 and 4, it has a mounting part 10 at the rear end of the operating part 91. As shown in Figure 7, the mounting part 10 can be attached to the end face 1a of the frame 1. The operating part 91 is slidable relative to the mounting part 10. This enables the sliding operation shown by arrow (1) in Figure 4. The sliding of the operating part 91 may be done manually or by a control device (not shown). The connecting member 8, including the arm 8c, can be made of a metal material such as stainless steel. The actuator 9 can be made of a metal material such as stainless steel or steel.

[0023] The connecting member 8 may have a hole 11 that penetrates through the first hole 8a in the Z-axis direction (height direction) towards its end. On the other hand, the actuator 9 may have a projection 12 at its tip. By slidably engaging this projection 12 with the hole 11, the actuator 9 and the connecting member 8 can be connected at the hole 11.

[0024] As shown in Figures 4 and 5, the hole 11 may have an elongated shape that is inclined with respect to the sliding direction of the operating part 91 (the direction indicated by arrow (1)). As a result, as shown in Figure 4, when the operating part 91 is slid in the direction indicated by arrow (1), the connecting member 8 slides in the direction indicated by arrow (2), and the arm 8c can be rotated in the direction indicated by arrow (3).

[0025] In this way, the actuator 9 makes it easy to adjust the position of the second mounting member 2b by rotating it around the first mounting member 2a, thereby increasing work efficiency. Furthermore, because the projection 12 is located inside the hole 11, the force of the actuator 9 can be transmitted to the connecting member 8. This allows the connecting member 8 to be moved efficiently, improving work efficiency.

[0026] The elongated hole portion 11 may have a predetermined length, indicated by arrow (4) in Figure 5, to facilitate control of the movable position of the connecting member 8. Furthermore, the width of the hole portion 11 perpendicular to the length indicated by arrow (4) may be sufficient to adjust the range of motion of the projection portion 12. Additionally, the direction in which the arm 8c extends (lengthwise direction) may intersect with the direction indicated by arrow (4) corresponding to the straight portion of the hole portion 11. Note that the hole 11 is not limited to an elongated hole formed by two semicircles and two parallel lines as shown in Figure 4, but may be circular, elliptical, or the like. If it is an elongated hole, as shown in Figure 4, the lateral displacement can be reduced when the arm 8c rotates in the direction of arrow (3).

[0027] The first mounting member 2a and the third mounting member 2c may be fixed to the surface of the frame 1. Fixing can be done, for example, by bonding the back surfaces of each mounting member 2a and 2c to the surface of the frame 1 with an adhesive. The second mounting member 2b can be fixed as shown in Figure 6. That is, as shown in Figure 6, a support member 13 and a first fixing bolt 14 may be located below the frame 1 on which the second mounting member 2b is positioned. The support member 13 is block-shaped and has a first bolt insertion hole 17 through which the first bolt 14 is inserted.

[0028] The frame 1 may have a through hole 15 through which the first bolt 14 is inserted. The second mounting member 2b may have a screw hole 16 that engages with the first bolt 14. By screwing the first bolt 14, which has been inserted through the first bolt insertion hole 17 and the through hole 15, into the screw hole 16 of the second mounting member 2b, the second mounting member 2b and the support member 13 can be fastened via the frame 1. This allows the second mounting member 2b to be firmly fixed onto the frame 1. When moving the second mounting member 2b, it is possible to move it simply by loosening the first bolt 14. This allows for greater freedom of movement during position adjustment while maintaining the strength when fixed. Furthermore, since the work can be done without removing the first bolt 14, work efficiency is improved.

[0029] The method for fixing the second mounting member 2b and the connecting member 8 will now be described. As shown in Figure 6, the second bolt 18 is inserted through the second bolt insertion hole 19 provided in the connecting member 8 and screwed into the screw hole 20 provided on the upper surface of the second mounting member 2b, thereby fastening the connecting member 8 to the second mounting member 2b. By fixing the second mounting member 2b and the connecting member 8 to the frame 1 with the support member 13 and the first and second bolts 14 and 18, the position of the second mounting member 2b can be firmly fixed.

[0030] Furthermore, the method for fixing the second mounting member 2b is not limited to the method using the first bolt 14, but may also be a method using magnetic force such as an electromagnetic magnet, or a method using other means. Furthermore, as shown in Figure 6, the through hole 15 may be an elongated hole extending in the second direction. This allows the first bolt 14 to be moved within the range of the elongated hole. This allows the V-groove 5 to be moved by loosening the first bolt 14 without removing it. Therefore, the degree of freedom of movement during position adjustment can be greatly increased while maintaining the strength when fixed. Note that the elongated hole of the through hole 15 referred to here means a shape consisting of a straight line longer than the radius of the circle as shown in Figure 6. In this case, a part of the straight line may have a curve. Furthermore, while this embodiment uses an elongated hole formed by two semicircles and two parallel lines as shown in Figure 6, it is not limited to this. For example, a shape in which multiple holes are arranged in the movable region may also be used. Also, although multiple first bolts 14 and second bolts 18 are used, at least one of each is sufficient.

[0031] Next, a support mechanism according to an embodiment of the present disclosure will be described with reference to Figures 7 to 10. Figure 7 shows a support mechanism having fixing members according to one embodiment of the present disclosure. In Figure 7, the first, second, and third fixing members 25a, 25b, and 25c are located above the sphere 3, respectively, in the support mechanism shown in Figure 3. These fixing members 25a, 25b, and 25c can be attached to a surface plate 7, for example, with screws, as shown in Figure 11. Also, Figure 7 shows the case of a Kelvin clamp, but is not limited to this. For example, a Maxwell clamp may also be used.

[0032] Figure 8 shows the arrangement of the first mounting member 2a, the sphere 3, and the first fixing member 25a in the first hole 8a. As shown in the figure, the sphere 3 is positioned on the third surface 21a of the first mounting member 2a, and the fixing member 25a is positioned above the sphere 3. The fixing member 25a has a first projection 26 on its lower surface that extends toward the first mounting member 2a so as to surround the sphere 3. The first projection 26 has a first gap 27 between it and the sphere 3.

[0033] In this way, the first projection 26, which surrounds the sphere 3 and is positioned at a distance from the sphere 3, reduces the risk of the sphere 3 moving horizontally and falling off the first mounting member 2a. As a result, the work efficiency when placing the first fixing member 25a on the first mounting member 2a is improved. The first interval 27 may be, for example, 3 to 10 mm. The height of the first projection 26 may be, for example, 10 to 30 mm from the lower end to the upper end. Furthermore, the fixing members 25a, 25b, and 25c may be made of a metal material with a low coefficient of thermal expansion, such as Superinvar.

[0034] Furthermore, as shown in Figure 8, the first mounting member 2a may have a second projection 29 that extends upward so as to surround the first projection 26, and the second projection 29 may have a second gap 30 between it and the first projection 26. This reduces the risk of the sphere 3 moving horizontally and falling off the first mounting member 2a. As a result, the work efficiency when placing the first fixing member 25a on the first mounting member 2a is improved. The second interval 27 may be, for example, 2 to 20 mm. The height of the second projection 29 may be, for example, 10 to 20 mm from the third surface of the first mounting member 2a to its upper end.

[0035] Furthermore, as shown in Figure 8, the first fixing member 25a has a first surface 32a facing the first mounting member 2a, and may have a recess 31 that opens upward on the first surface 32a. By having the recess 31 in this way, when the first fixing member 25a is placed on the first mounting member 2a, the sphere 3 can be stably supported by the first fixing member 25a, and work efficiency can be improved. The taper (diameter) P of the inner surface of the recess 31 may be larger than the diameter (R / 2) of the sphere 3. As a result, at least the upper part of the sphere 3 is housed in the recess 31 and makes point contact with the inner surface of the recess 31 in cross-sectional view. Therefore, the sphere 3 can be supported more stably by the first fixing member 25a. The recess 31 can have shapes such as a cone or a triangular pyramid.

[0036] Furthermore, the sum of the depth d1 of the recess 31 and the length d2 of the first projection 26 is preferably greater than the radius (R / 2) of the sphere 3. This allows the fixing member 32 to stably support the sphere 3 when it is placed on the first mounting member 2a. In addition, by supporting the sphere 3 with the first projection 26 and the recess 31, the taper angle of the recess 31 can be reduced. Therefore, the support mechanism can be miniaturized in the height direction. In optical components such as telescopes, it is necessary to match the height of the incident light with the optical axis of the device, so a low profile is required, and the support mechanism of this embodiment can be used in optical systems. Note that the taper angle of the recess 31 and the taper angle of the conical recess 4 of the first mounting member 2a may be the same. The taper angle of the V-groove 5 of the second mounting member 2b, as explained in Figure 9, may also be the same as the taper angle of the recess 31.

[0037] The first fixing member 25a may have a first surface 32a facing the first mounting member 2a, a second surface 32b located on the opposite side of the first surface 32a, and a through hole 33 extending from the first surface 32a to the second surface 32b. By having the through hole 33 in this way, when the first fixing member 25a is placed on the first mounting member 2a, the position of the sphere 3 can be seen through the through hole 33, making it easier to position the first mounting member 2a.

[0038] Figure 9 is a cross-sectional view taken along line II-II of Figure 7, showing the arrangement of the second fixing member 25b on the second mounting member 2b. Figure 10 is a cross-sectional view taken along line III-III of Figure 7, showing the arrangement of the third fixing member 25c on the third mounting member 2c. The structure and arrangement of the second and third fixing members 25b and 25c are the same as those of the first fixing member 25a, and they can achieve the same effect. Therefore, the same reference numerals are used for each part of the second and third fixing members 25b and 25c as for the first fixing member 25a, and detailed explanations are omitted.

[0039] In this embodiment, the first, second, and third mounting members 2a, 2b, and 2c may each have three sets of support structures, each comprising a sphere 3 and respective fixing members 25a, 25b, and 25c. Here, the third surface 21a of the first mounting member 2a may have a conical recess 4. The third surface 21b of the second mounting member 2b may have a V-groove 5 in cross-sectional view. The third surface 21c of the third mounting member 2c may have a flat portion 6 (flat surface).

[0040] By making the third surfaces 21a, 21b, and 21c Kelvin clamps having a conical recess 4, a V-groove 5, and a flat section 6, respectively, it is possible to fix a single point with the conical recess 4 and adjust the position when placing the object, thereby improving work efficiency.

[0041] As described above, the first, second, and third mounting members 2a, 2b, and 2c each have a second projection 29 that extends upward so as to surround the first projection 26, and the second projection 29 is positioned with a second spacing 30 between it and the first projection 26. In this case, the second spacing 30 of the third mounting member 2c may be larger than the second spacing 30 of the first mounting member 2a and the second mounting member 2b. When the sphere 3 moves during position adjustment, by making the second spacing 30 of the third support structure (third mounting member 2c) having a flat portion 6 larger than the others, it is possible to move the sphere 3 necessary for position adjustment in the third support structure (third mounting member 2c) and reduce the chance of the sphere 3 falling off in the other support structures (first and second mounting members 2a and 2b). In other words, the second interval 30 in the third mounting member 2c may be the amount of movement of the sphere 3 necessary for position adjustment. The second spacing 30 of the third mounting member 2c is, for example, 10 to 20 mm, and the second spacing 30 of the first mounting member 2a and the second mounting member may be, for example, 5 to 10 mm. Furthermore, the first, second, and third fixing members 25a, 25b, and 25c each have a first surface 32a facing the first, second, and third mounting members 2a, 2b, and 2c, and a second surface 32b located on the opposite side of the first surface 32a, the second surface 32b may be a flat surface. This allows for a wider area to be attached to the base plate 7, enabling firm fixation to the base plate 7, and also reduces the thickness of the first, second, and third fixing members 25a, 25b, and 25c, resulting in a smaller size in the thickness direction. In this case, it is sufficient if any one of the first, second, and third fixing members 25a, 25b, and 25c has a flat surface.

[0042] The third surfaces 21a, 21b, and 21c of the first, second, and third mounting members 2a, 2b, and 2c may have, as shown in Figures 8 to 10, first regions 21aa, 21bb, and 21ca that are in contact with the sphere 3, and second regions 21ab, 21ba, and 21cb located between the first regions 21aa, 21bb, and 21cc and the second projection 29. The surface roughness of the first regions 21aa, 21bb, and 21cc may be less than the surface roughness of the second regions 21ab, 21ba, and 21cb. This allows for smoother movement of the sphere 3 during position adjustment and reduces the movement of the sphere 3 beyond the desired range.

[0043] Figure 11 shows a position adjustment mechanism for an optical element using a support mechanism. As shown in the figure, the first mounting member 2a is preferably positioned below the focal point 21 on the base plate 7 of the optical element. This allows the base plate 7 to rotate around the Z-axis with respect to the focal point 21, which serves as the adjustment reference. Therefore, adjustment can be performed without shifting the other adjustment axes (X-axis and Y-axis), improving work efficiency. Furthermore, as shown in Figure 9, the connecting member 8 may be configured as part of the second projection 29. This allows the connecting member 8 to function as part of the second projection 29 while also functioning as part of the second projection 29, thereby saving space. Furthermore, this support mechanism allows for the provision of optical components that are more space-saving by placing the optical components on the base plate 7. The optical components referred to here include, for example, adaptive optical components or lenses and mirrors that adjust the position of light fluctuations.

[0044] In one embodiment, (1) the support mechanism is a support mechanism that supports a base plate on which an optical member is placed on a stand, A mounting member that can be attached to the aforementioned frame, A sphere located on the mounting member, It comprises a fixing member located above the sphere and attachable to the surface plate, The fixing member has a first projection that extends toward the fixing member so as to surround the sphere, and the first projection has a first distance between it and the sphere.

[0045] (2) The support mechanism described in (1) above, wherein the mounting member described above surrounds the first projection and has a second projection extending upward, The second projection has a second gap between it and the first projection.

[0046] (3) The support mechanism described in (1) or (2) above is characterized in that the fixing member has a first surface facing the mounting member described above, and has a recess opening into the first surface.

[0047] (4) In the support mechanism described in (3) above, the sum of the depth of the recess and the length of the first projection is greater than the radius of the sphere.

[0048] (5) The support mechanism described in any of (1) to (3) above, wherein the fixing member is The first surface facing the mounting member, The second surface is located on the opposite side of the first surface, A through hole extending from the first surface to the second surface, It holds.

[0049] (6) The support mechanism described in any of (1) to (5) above, wherein the fixing member has a first surface facing the sphere, The system has three sets of support structures, each comprising the aforementioned mounting member, the aforementioned sphere, and the aforementioned fixing member. Each of the aforementioned mounting members has a third surface facing the fixing member, which is located inward of the second projection. The third surface of the first mounting member has a conical recess, The fifth surface of the second mounting member has a V-shaped groove in cross-sectional view, The fifth surface of the third mounting member has a flat surface.

[0050] (7) In the support mechanism described in any of (1) to (6) above, the second spacing of the third mounting member is greater than the second spacing of the first mounting member and the second spacing of the second mounting member.

[0051] (8) The support mechanism described in any of (3) to (7) above is wherein the fixing member has a first surface facing the sphere and a second surface located on the opposite side of the first surface, and the second surface is a flat surface.

[0052] (9) The support mechanism described in (6) above has a third surface facing the mounting member described above, The third surface has a first region that contacts the sphere, It has a second region located between the first region and the second projection, The surface roughness of the first region is less than the surface roughness of the second region.

[0053] While embodiments of the present disclosure have been described above, the disclosure is not limited to the embodiments described above, and various modifications or improvements are possible within the scope of the disclosure. In the embodiments described above, a support mechanism using a Kelvin clamp was described as an example, but it can be similarly applied to other kinematic clamps, such as Maxwell clamps. [Explanation of Symbols]

[0054] 1. Stand 1a End section 2a First mounting member, 2b Second mounting member, 2c Third mounting member 21a, 21b, 21c 3rd side 21aa stepped section 3, 3a, 3b, 3c sphere 4 Conical recess 5 V groove (groove) 6 Flat area 7 Surface plate 8. Connecting Members 8a 1st hole 8b 2nd hole 8c arm 9 Actuators 91 Operation section 10 Mounting part 11 Hole 12 Protrusion 13 Support Member 14. First bolt 15 Through holes 16, 20 screw holes 17 First bolt insertion hole 18. Second bolt 19 Second bolt insertion hole 21 focus 25a First fixing member, 25b Second fixing member, 25c Third fixing member 26 1st protrusion 27 1st gap 29 Second protrusion 30 Second interval 32a 1st page 32b 2nd side 31 Recess 33 Through hole

Claims

1. A support mechanism for supporting a base plate on which optical components are placed, A mounting member that can be attached to the aforementioned frame, A sphere located on the mounting member, It comprises a fixing member located above the sphere and attachable to the surface plate, The support mechanism wherein the fixing member has a first projection that extends toward the fixing member so as to surround the sphere, and the first projection has a first distance from the sphere.

2. The mounting member surrounds the first projection and has a second projection extending upward. The support mechanism according to claim 1, wherein the second projection has a second gap between it and the first projection.

3. The aforementioned fixing member has a first surface facing the previously described mounting member, The support mechanism according to claim 1 or 2, having a recess that opens to the first surface.

4. The support mechanism according to claim 3, wherein the sum of the depth of the recess and the length of the first projection is greater than the radius of the sphere.

5. The aforementioned fixing member is The first surface facing the sphere, The second surface is located on the opposite side of the first surface, A through hole extending from the first surface to the second surface, A support mechanism according to claim 1 or 2, having the following features.

6. The aforementioned fixing member has a first surface facing the previously described mounting member, The support structure comprises three sets of the aforementioned mounting member, the aforementioned sphere, and the aforementioned fixing member. Each of the aforementioned mounting members has a third surface facing the fixing member, which is located inward of the second projection. The third surface of the first mounting member has a conical recess, The third surface of the second mounting member has a V-shaped groove in cross-sectional view. The support mechanism according to claim 1 or 2, wherein the third surface of the third mounting member has a flat surface.

7. The support mechanism according to claim 6, wherein the second spacing of the third mounting member is greater than the second spacing of the first mounting member and the second spacing of the second mounting member.

8. The support mechanism according to claim 1 or 2, wherein the fixing member has a first surface facing the sphere and a second surface located on the opposite side of the first surface, and the second surface is a flat surface.

9. The mounting member has a third surface facing the fixing member, The third surface has a first region that contacts the sphere, It has a second region located between the first region and the second projection, The support mechanism according to claim 1 or 2, wherein the surface roughness of the first region is less than the surface roughness of the second region.

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