Supporting organizations

Abstract

To provide an inexpensive and highly durable support mechanism without increasing the size of the support members. [Solution] The support mechanism of the present disclosure supports a platen on which an optical member is placed on a stand and comprises a kinematic clamp having three first support parts that can be attached to the stand and can support the platen, and a second support part located away from the kinematic clamp, which can be attached to the stand and can support the platen. The second support part includes an elastic member, which has a first tip located opposite the platen. The first tip deforms in the direction in which the kinematic clamp supports the platen.

Description

Technical Field

[0001] The present disclosure relates to a support mechanism applicable to, for example, position adjustment mechanisms for optical members.

Background Art

[0002] Optical members such as adaptive optical devices are required to have advanced position adjustment mechanisms. Patent Document 1 describes a table that can be tilted to two or more predetermined positions by arranging kinematic supports (cone and sphere, V-groove and sphere, and flat surface and sphere) between a top element and a base element. That is, changing the sphere that supports the top element allows the top element to be tilted.

[0003] Patent Document 2 describes a support mechanism for an optical element that supports the optical element using a plurality of adjustment screws and enables adjustment of the position and posture of the optical element.

Prior Art Literature

Patent Literature

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problem to be Solved by the Invention

[0005] When a surface plate on which optical components are placed is mounted on a stand, a position adjustment mechanism is sometimes placed between the surface plate and the stand. However, as optical components have become larger, the load on the support members (such as the sphere and its support in Patent Document 1, or the adjustment screw in Patent Document 2) increases when the surface plate on which the optical components are mounted is placed on the stand, which could cause the support members to break. While it is possible to reduce breakage by increasing the size of the support members, this leads to increased costs and the need for larger support members. Therefore, there is a need for an inexpensive and highly durable support mechanism that does not require increasing the size of the support members.

[0006] The objective of this disclosure is to provide an inexpensive and highly durable support mechanism without increasing the size of the support members. [Means for solving the problem]

[0007] The support mechanism of this disclosure for solving the above problems supports a platen on which an optical member is placed on a stand and comprises a kinematic clamp having three first support parts that can be attached to the stand and can support the platen, and a second support part located separately from the kinematic clamp, which can be attached to the stand and can support the platen. The second support part includes an elastic member, which has a first tip located opposite the platen. The first tip deforms in the direction in which the kinematic clamp supports the platen. [Effects of the Invention]

[0008] According to this disclosure, the positioning and support mechanism has a kinematic clamp having three first support parts, and a second support part capable of supporting a surface plate is provided separately from the first support parts. As a result, the load on the first support parts can be reduced by the second support part, and the durability of the support mechanism can be improved. [Brief explanation of the drawing]

[0009] [Figure 1] This is a schematic diagram showing a support mechanism according to one embodiment of the present disclosure. [Figure 2]This is a schematic diagram showing three first support parts that constitute a kinematic clamp (Kelvin clamp) in one embodiment of the present disclosure. [Figure 3A] This is a schematic diagram showing the relationship between the base plate and the support in one embodiment of the present disclosure. [Figure 3B] This is a schematic diagram illustrating a support mechanism that rotates around the Z-axis in one embodiment of the present disclosure. [Figure 4] This is a schematic diagram showing a kinematic clamp equipped with a connecting member used in one embodiment of the present disclosure. [Figure 5] This is a schematic diagram showing the actuator connected to the connecting member. [Figure 6] This is a schematic diagram showing an enlarged view of the actuator in Figure 5. [Figure 7] This is an exploded perspective view showing the mounting structure of the connecting members. [Figure 8] This is a perspective view showing a second support portion in one embodiment of the present disclosure. [Figure 9] This is a front view showing an example of a plunger that can be used as a second support. [Figure 10] This is a cross-sectional view of the second support section using a plunger. [Figure 11] This is a perspective view showing the mounting state on the surface plate. [Figure 12] This is an enlarged view showing the plate in contact with the plunger of the second support. [Modes for carrying out the invention]

[0010] The support mechanism according to the embodiments of this disclosure will be described below with reference to Figures 1 to 12. However, the figures referenced below are simplified representations of the embodiments of this disclosure for the sake of clarity. Therefore, the support mechanism disclosed below may include any components not shown in the referenced figures. Furthermore, the dimensions of the components in each figure do not faithfully represent the dimensions of the actual components or the dimensional ratios of each component.

[0011] A support mechanism according to an embodiment of the present disclosure, as shown in FIG. 1, supports a surface plate 100 on a gantry 101, and preferably comprises: a kinematic clamp 102 having three first support portions 1A, 1B, 1C that can be attached to the gantry 101 and can support the surface plate 100; and a second support portion 2 positioned apart from the kinematic clamp 102, attachable to the gantry 101 and capable of supporting the surface plate. A kinematic clamp 102 is generally known as a mechanism that enables high-precision positioning by appropriately constraining 6 degrees of freedom between two objects.

[0012] In this configuration, while having a positioning mechanism using the kinematic clamp 102, the load applied to the first support portions 1A, 1B, 1C can be reduced by the second support portion 2 provided separately from the first support portions 1A, 1B, 1C, thereby improving the durability of the support mechanism. The second support portion 2 may be adjacent to the kinematic clamp 102, but is preferably positioned apart from each other without overlapping.

[0013] The kinematic clamp 102 shown in the embodiment of FIG. 1 is preferably a positioning mechanism called a Kelvin clamp, in which three spheres are respectively fixed by a cone portion, a V-groove, and a flat surface, for example. As another embodiment of a kinematic clamp, there is, for example, a Maxwell clamp in which three spheres are respectively placed and fixed in three V-grooves. As shown in FIG. 2, the three first support portions 1A, 1B, 1C of the kinematic clamp 102 may each comprise first, second and third mounting members 20a, 20b, 20c attachable to the gantry 101, and spheres 3 respectively positioned on these mounting members 20a, 20b, 20c.

[0014] In the present disclosure, the kinematic clamp 102 is preferably rotatable not only in the X-axis direction and Y-axis direction parallel to the plane of the gantry 101, but also around the height direction (Z-axis direction) extending from the gantry 101 toward the surface plate 100. Conventionally, a separate member (mechanism) has been required to enable rotation about the Z-axis. In the support mechanism according to the present embodiment, a rotation mechanism is provided to the kinematic clamp 102 that performs position adjustment, which eliminates the need for using a separate member (mechanism). This makes it possible to save space in the Z-axis direction and achieve downsizing of the position adjustment mechanism.

[0015] As shown in FIG. 2, the first upper surface 21a of the first mounting member 20a may have a conical recess 4. The second upper surface 21b of the second mounting member 20b may have a groove 5 having a V-shaped cross-section (hereinafter referred to as V-groove 5). The third upper surface 21c of the third mounting member 20c may have a flat portion 6 (flat surface). The first, second, and third mounting members 20a, 20b, 20c can be arranged, for example, at respective vertices of an isosceles triangle, but are not limited thereto. In another embodiment, they may be arranged at respective vertices of an equilateral triangle.

[0016] The first and third mounting members 20a, 20c may be fixed to the gantry 101. The V-groove 5 of the second mounting member 20b may extend along the first direction indicated by arrow A in FIG. 1 in a top view. That is, in top view, an extension line in the first direction may extend in the illustrated direction (direction of arrow A) passing through the center of the recess 4 in the first mounting member 20a. Thermal stress generated when thermal expansion occurs acts radially around the recess 4. When the extension line in the first direction passes through the center of the recess 4, the direction in which the thermal stress acts matches the extending direction of the V-groove 5. Therefore, the sphere 3 can move along the V-groove 5 without unnecessarily colliding with the wall surface of the V-groove 5. This makes it possible to reduce the influence of thermal stress generated between the sphere 3 and the V-groove 5.

[0017] Furthermore, the second mounting member 20b may be movable relative to the frame 101 in a second direction other than the first direction, which includes the planar component of the flat portion 6 of the third upper surface 21c. This allows the Kelvin clamp configuration, which can be fixed at one point (recess 4) during mounting and allows for position adjustment, to be equipped with a Z-axis rotation mechanism, providing a position adjustment mechanism with high work efficiency. Moreover, by using the Kelvin clamp, the conical cone portion that serves as the center of rotation can be used as a reference during mounting, making positioning easier. As a result, work efficiency can be increased. Furthermore, the second mounting member 20b may be movable in a predetermined second direction on a plane including the flat portion 6 of the third upper surface 21c relative to the frame 101. This allows the second mounting member 20b to have only one movable plane, further improving the accuracy of position adjustment.

[0018] Figure 3A shows the state in which the first mounting member 20a, which has a conical recess 4, supports the surface plate 100 on the frame 101. Figure 3B schematically shows an example of a rotation mechanism about the Z axis in the first mounting member 20a using three spheres 3a, 3b, and 3c. As shown in Figure 3B, when the sphere 3b of the second mounting member 20b moves in the direction of arrow B toward the sphere 3c of the third mounting member 20c, with the sphere 3a of the first mounting member 20a as the center of rotation, the surface plate 100 also rotates about the Z axis.

[0019] As shown in Figure 1, the first mounting member 20a may be located below the focal point 21 on the surface plate 100 of the optical element. Because thermal displacement due to thermal expansion or contraction is likely to occur radially from the focal point, this position makes it easier for the surface plate 100 to rotate around the Z-axis with respect to the focal point 21, which serves as the adjustment reference. As a result, adjustment can be made without shifting the other adjustment axes (X-axis and Y-axis), improving work efficiency. Thus, in this embodiment, by further enabling rotational position adjustment around the Z-axis in the configuration of the kinematic clamp 102 that performs position adjustment, a support mechanism with excellent work efficiency can be provided.

[0020] Here, the first, second, and third mounting members 20a, 20b, and 20c, and each of the spheres 3, should have smooth contact surfaces so as not to hinder their movement. Furthermore, the first, second, and third mounting members 20a, 20b, and 20c should be made of materials that can be treated to increase their hardness. This reduces the occurrence of deformation at the points where the mounting members 20a, 20b, and 20c come into contact with the spheres 3, where the stress on these members is high. Specifically, for example, carbon tool steel (SK3) can be used for the first, second, and third mounting members 20a, 20b, and 20c.

[0021] Furthermore, as a way to prevent the spheres 3 from breaking under load, possible methods include making the spheres 3 themselves larger or using a material with a high allowable stress for the spheres 3. For example, ceramics such as silicon nitride can be used as a material with a high allowable stress for the spheres 3. Using such a material makes it possible to reduce the size of the spheres 3. Furthermore, the frame 101 can be made of a metal material such as aluminum, stainless steel, or steel. The surface plate 100 can be made of a ceramic material such as cordierite (2MgO·2Al2O3·5SiO2).

[0022] As shown in Figures 1 and 4, the first mounting member 20a and the second mounting member 20b may be connected by a connecting member 8. The connecting member 8 allows the distance and orientation of the V-groove 5 and the recess 4 to be kept constant, thereby reducing displacement during movement. This allows the V-groove 5 of the second mounting member 20b to rotate around the center of the conical recess 4 (the fixed point of thermal displacement). Furthermore, by having a connecting member 8, when moving the V-groove 5, force can be applied not only to the second mounting member 20b having the V-groove 5, but also to the connecting member 8, thereby improving work efficiency during positioning.

[0023] As shown in Figure 5, the connecting member 8 may have a first hole 8a at one end for inserting the first mounting member 20a, and a second hole 8b at the other end located on the upper surface of the second mounting member 20b, with an arm 8c connecting them. The first mounting member 20a may have a stepped portion 21aa on its outer circumferential surface, as shown in Figure 2. The first hole 8a of the connecting member 8 may be locked onto this stepped portion 21aa. The height of the stepped portion 21aa from the base 101 may be configured to be equal to the height of the second mounting member 20b. This allows the connecting member 8 to be parallel to the base 101. The arm 8c only needs to have a length at least between the recess 4 and the V-groove 5, and may be longer than that. Furthermore, the connecting member 8 is not limited to the form shown in Figure 5, and various shapes can be used.

[0024] An actuator 9 may be connected to the end portion of the connecting member 8 beyond the second hole 8b. The actuator 9 connects the frame 101 and the connecting member 8 and has the function of moving the connecting member 8. That is, the actuator 9 has a rod-shaped operating part 91 that extends to the rear, and as shown in Figures 4 and 5, it has a mounting part 10 at the rear end of the operating part 91. As shown in Figure 4, the mounting part 10 can be attached to the end face portion 101a of the frame 101. The operating part 91 is slidable relative to the mounting part 10. This enables the sliding operation shown by arrow (1) in Figure 5. The sliding of the operating part 91 may be done manually or by a control device (not shown). The connecting member 8, including the arm 8c, can be made of a metal material such as stainless steel. The actuator 9 can be made of a metal material such as stainless steel or steel.

[0025] The connecting member 8 may have a through hole 11 that penetrates through the Z-axis direction (height direction) from the end of the second hole 8b. The actuator 9 may also have a projection 12 at or near its tip. By slidably engaging this projection 12 with the through hole 11, the actuator 9 and the connecting member 8 can be connected through the through hole 11.

[0026] As shown in Figures 5 and 6, the through hole 11 may have an elongated shape that is inclined with respect to the sliding direction of the operating part 91 (the direction indicated by arrow (1)). As a result, as shown in Figure 5, when the operating part 91 is slid in the direction indicated by arrow (1), the connecting member 8 slides in the direction indicated by arrow (2), and the arm 8c can be rotated in the direction indicated by arrow (3).

[0027] In this way, the actuator 9 makes it easy to adjust the position of the second mounting member 20b by rotating it around the first mounting member 20a, thereby increasing work efficiency. Furthermore, because the projection 12 is located inside the through hole 11, the force of the actuator 9 can be transmitted to the connecting member 8. This allows the connecting member 8 to be moved efficiently, improving work efficiency.

[0028] The elongated through-hole 11 may have a predetermined length, indicated by arrow (4) in Figure 6, for controlling the movable position of the connecting member 8. Furthermore, the width of the through-hole 11 perpendicular to the longitudinal direction indicated by arrow (4) may be sufficient to adjust the range of motion of the projection 12. Additionally, the direction in which the arm 8c extends (longitudinal direction) may intersect with the direction indicated by arrow (4) corresponding to the straight portion of the through-hole 11. Note that the through-hole 11 is not limited to an elongated hole formed by two semicircles and two parallel lines, as shown in Figure 5, but may also be circular, elliptical, or the like. If it is an elongated hole, the lateral displacement can be reduced when the arm 8c rotates in the direction of arrow (3).

[0029] The first mounting member 20a and the third mounting member 20c may be fixed to the surface of the frame 101. For example, this can be done by bonding the back surfaces of each mounting member 20a and 20c to the surface of the frame 101 with an adhesive. The second mounting member 20b can be fixed as shown in Figure 7. Specifically, as shown in Figure 7, a fixing member 13 and a first fixing bolt 14 are located below the frame 101 on which the second mounting member 20b is positioned. The fixing member 13 is block-shaped and has a first bolt insertion hole 17 through which the first bolt 14 is inserted.

[0030] The frame 101 may have a through hole 15 through which the first bolt 14 is inserted. The second mounting member 20b may have a screw hole 16 that engages with the first bolt 14. By screwing the first bolt 14, which has been inserted through the first bolt insertion hole 17 and the through hole 15, into the screw hole 16 of the second mounting member 20b, the second mounting member 20b and the fixing member 13 can be fastened via the frame 101. This allows the second mounting member 20b to be firmly fixed onto the frame 101. When moving the second mounting member 20b, it is possible to move it simply by loosening the first bolt 14. This allows for greater freedom of movement during position adjustment while maintaining the strength when fixed. Furthermore, since the work can be done without removing the first bolt 14, work efficiency is improved.

[0031] The method for fixing the second mounting member 20b and the connecting member 8 will now be described. As shown in Figure 7, the second bolt 18 is inserted through the second bolt insertion hole 19 provided in the connecting member 8 and screwed into the screw hole 24 provided on the upper surface of the second mounting member 20b, thereby fastening the connecting member 8 to the second mounting member 20b. By fixing the second mounting member 20b and the connecting member 8 to the frame 101 with the fixing member 13 and the first and second bolts 14 and 18, the position of the second mounting member 20b can be firmly fixed.

[0032] Furthermore, the method of fixing the second mounting member 20b is not limited to the method using the first bolt 14, but may also be a method using magnetic force such as an electromagnetic magnet, or a method using other means. Also, although an arc-shaped elongated hole was used as the through hole 15 in this embodiment, a shape in which multiple holes are arranged in the movable area may also be used. Multiple first bolts 14 and second bolts 18 were used, but at least one of each is sufficient.

[0033] Next, the second support portion 2 will be described. The second support portion 2 is preferably located on the frame 101, away from the kinematic clamp 102, and capable of supporting the base plate 100. The second support portion 2 is preferably made up of an elastic member. The elastic member has a first tip portion located opposite the base plate 100, and this first tip portion is elastic, and can deform in the direction in which the kinematic clamp 102, which has three first support portions 1A, 1B, and 1C, supports the base plate 100. As a result, the second support portion 2 is located away from the kinematic clamp 102, and the load on the kinematic clamp 102 can be distributed and reduced. In this context, "deformation" refers to the displacement of the first tip due to the load. Furthermore, after the base plate 100 separates from the first tip and is released from the load, the first tip of the second support part 2 can be restored to its original position. Examples of elastic members having a first tip include springs, air cylinders, and hard rubber (not shown). These elastic members may be used in place of the plunger 25 described below, or in conjunction with the plunger 25.

[0034] Figure 8 is a perspective view showing an example of the second support portion 2 in this embodiment. As shown in Figure 8, the second support portion 2 may have a base portion 26 that can be attached to the frame 101 and a plurality of plungers 25 located on the base portion 26. This allows the kinematic clamp 102 to be supported by a plurality of plungers 25, thus distributing and reducing the load on the kinematic clamp 102 compared to the case with a single plunger 25. Furthermore, in Figure 8, the second support section is composed entirely of plungers 25 having a ball shape. However, in other embodiments, while having multiple plungers 25 having a ball shape, some of the elastic members may be other members such as air cylinders. In that case as well, the load can be distributed. Furthermore, as shown in Figure 9, the plunger 25 has a second tip portion 25a and a rear end portion 25b located on the opposite side of the second tip portion 25a, and may have a screw groove 27 on its outer circumferential surface. The second support portion 2 can be made of a metal material such as a superinvar, and can be attached to the frame 101 by welding, screwing, or the like.

[0035] Furthermore, as shown in Figure 10, the plunger 25 includes a spring 29, and the second tip portion 25a may be positioned facing the base plate 100. The second tip portion 25a is positioned facing the base plate 100 and is elasticized by the spring 29. As a result, the second support portion 2 deforms in the direction in which the kinematic clamp 102 supports the base plate 100. This reduces the load on the first support portions 1A, 1B, and 1C, and improves the durability of the support mechanism. The second tip portion 25a may also have a ball shape, for example. This allows the tip to rotate and slide relative to the base plate 100. As a result, thermal displacement in the second support portion 2 can be reduced. In this context, "deformation" refers to the displacement of the second tip 25a of the plunger 25 due to the load, specifically to the compression of the spring 29. Furthermore, after the base plate 100 separates from the second support 2 and is released from the load, the second tip 25a of the second support 2 can be restored to its original position.

[0036] Furthermore, even when the base plate 100 rotates (indicated by the arrow in Figure 10), the second tip 25a of the second support part 2 may be ball-shaped. This allows the second tip 25a to move smoothly and slide relative to the base plate 100, thereby reducing thermal displacement in the second support part 2. For the plunger 25, for example, a commercially available ball plunger can be used.

[0037] As shown in Figure 10, the base portion 26 may have a plunger insertion hole 28. When the plunger 25 is installed, the rear end portion 25b of the plunger 25 may protrude from the plunger insertion hole 28 of the base portion 26 and be located within the opening 101b in the frame 101. The plunger 25 may have a hole 33 at its rear end 25b. The hole 33 can be used, for example, to engage a tool such as a screwdriver. Having the hole 33 allows a tool such as a screwdriver (not shown) to be inserted to tighten or loosen the plunger 25. As a result, the load can be distributed effectively while the surface plate is stably supported.

[0038] One method for installing the plunger 25 is to insert the plunger 25 into the plunger insertion hole 28 of the base 26 from below the frame 101, screw the nut 30 onto it from above the base 26, and then insert a jig into the hole 33 at the rear end 25b of the plunger 25 to tighten the plunger 25. At this time, the position of the second support part 2 in the support direction (height direction) can be adjusted. Therefore, the load can be distributed while stably supporting the surface plate 100. The nut 30 may also be fixed to the upper surface of the base 26 by welding or the like.

[0039] In Figure 1, the second support portion 2 is arranged in three locations. This is mainly due to the fact that the base plate 100 in this embodiment has a rib structure. Therefore, as long as the load on the kinematic clamp 102 can be distributed, the second support portion 2 is not limited to three locations; at least one location is sufficient, and two or more locations are also acceptable. The second support portion 2 may be arranged in an appropriate number so as to receive a load of at least 50% of the total load on the kinematic clamp 102.

[0040] Furthermore, the second support portion 2 may be located away from the focal point 21 in a plan view. By positioning the second support portion 2 away from the focal point 21, the influence of thermal expansion or contraction on the accuracy of the position adjustment mechanism can be reduced. If multiple second support portions 2 are arranged, they may be arranged, for example, at equidistant distances from the focal point 21.

[0041] As shown in Figure 11, this embodiment further includes a plate 31 that can be attached to the surface plate 100. Figure 12 shows a state in which multiple plungers 25 are in contact with the plate 31. By placing the plate 31 that abuts against the second support portion 2 on the base plate 100, it is possible to provide multiple plungers 25 or plungers 25 of a larger diameter regardless of the shape of the base plate 100, thereby distributing the load. Furthermore, if the base plate 100 has a rib shape as shown in Figure 12, the risk of the plungers 25 falling off the second support portion 2 (falling into the rib-removed portion 32) when the base plate 100 and the frame 101 are reversed can be reduced.

[0042] Furthermore, as shown in Figure 12, the plate 31 may have at least one opening 34. Having an opening 34 allows the plate 31 to expand by the amount of the opening 34 when thermal expansion occurs, thus reducing the risk of stress concentration in the plate 31. Therefore, durability can be improved. The shape of the opening 34 may be, for example, an elongated hole composed of two semicircles and two straight lines, as shown in Figure 12, or it may be a circle or an ellipse. The plate 31 can be made of a metal material such as Super Invar.

[0043] The support mechanism according to this disclosure may be applied, for example, to an optical member having a position adjustment mechanism using the kinematic clamp 102 described above. Furthermore, this support mechanism allows for the provision of optical components that are more space-saving by placing the optical components on the base plate 7. The optical components referred to here include, for example, adaptive optical components or lenses and mirrors that adjust the position of light fluctuations.

[0044] In one embodiment, (1) the support mechanism is a support mechanism that supports a base plate on which an optical member is placed on a stand, A kinematic clamp having three first support parts that can be attached to the aforementioned frame and can support the aforementioned surface plate, A second support portion is located separately from the kinematic clamp, is attachable to the frame, and is capable of supporting the base plate. Equipped with, The second support portion includes an elastic member, The elastic member has a first tip portion positioned opposite the surface plate, The first tip portion is elastic, The kinematic clamp deforms in the direction that supports the surface plate.

[0045] (2) In the support mechanism described in (1) above, the second support portion is located away from the focal point of the optical member in a plan view.

[0046] (3) The support mechanism described in (1) or (2) above, wherein the second support portion has one or more plungers, and the plungers have a ball-shaped second tip.

[0047] (4) The support mechanism described in any of (1) to (3) above, wherein the second support portion comprises a base that can be attached to the frame and one or more plungers located on the base.

[0048] (5) The support mechanism described in (3) or (4) above, wherein the plunger has a second tip and a rear end located opposite to the second tip, The rear end has a hole, which protrudes from the base.

[0049] (6) The support mechanism described in any of (1) to (5) above further comprises a plate that can be attached to the surface plate, the plate in contact with the second support portion.

[0050] While embodiments of the present disclosure have been described above, the present disclosure is not limited to these embodiments, and various modifications or improvements are possible within the scope of the present disclosure. For example, in the above embodiments, a support mechanism using a Kelvin clamp was described as an example of a kinematic clamp, but it is also applicable to other kinematic clamps, such as Maxwell clamps. [Explanation of Symbols]

[0051] 1A, 1B, 1C 1st support part 2 Second support part 20a First mounting member, 20b Second mounting member, 20c Third mounting member 21a 1st top surface, 21b 2nd top surface, 21c 3rd top surface 21aa stepped section 3, 3a, 3b, 3c sphere 4 recesses 5 V groove (groove) 6 Flat area 7 Surface plate 8. First connecting member 8a 1st hole 8b 2nd hole 8c arm 9 Actuators 91 Operation section 10 Mounting part 11 Through hole 12 Protrusion 13 Fixing member 14. First bolt 15 Through holes 16, 24 screw holes 17 First bolt insertion hole 18. Second bolt 19 Second bolt insertion hole 21 focus 23 Surface plate 25 plungers 25a 2nd tip 25b Rear end 26 base 27 Screw grooves 28 Plunger insertion hole 29 Spring 30 nuts 31 Plates 32 Rib-removed section 33 Hole 34 Opening 100 Surface Plate 101 Stand 101a End section 101b Aperture 102 Kinematic Clamp

Claims

1. A support mechanism for supporting a base plate on which optical components are placed, A kinematic clamp having three first support parts that can be attached to the aforementioned frame and can support the aforementioned surface plate, A second support portion is located separately from the kinematic clamp, is attachable to the frame, and is capable of supporting the base plate. Equipped with, The second support portion includes an elastic member, The elastic member has a first tip portion positioned opposite the surface plate, The first tip portion is elastic, A support mechanism in which the kinematic clamp deforms in a direction that supports the surface plate.

2. The support mechanism according to claim 1, wherein the second support portion is located away from the focal point of the optical member in a plan view.

3. The support mechanism according to claim 1 or 2, wherein the second support portion has one or more plungers, and the plungers have a ball-shaped second tip portion.

4. The support mechanism according to claim 3, wherein the second support portion comprises a base that can be attached to the frame and one or more plungers located on the base.

5. The plunger has a second tip and a rear end located on the opposite side of the second tip. The support mechanism according to claim 3, wherein the rear end portion has a hole, and the hole portion protrudes from the base portion.

6. The support mechanism according to claim 1 or 2, further comprising a plate that can be attached to the surface plate, the plate in contact with the second support portion.

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