Positioning device

Abstract

The position of the substrate is determined without applying significant force to it. [Solution] The positioning device for determining the position of the substrate 9 includes a support part having a Y roller 41 that supports the substrate 9 from below in a state that it can move in the Y direction, which is the positioning direction; a first pressing member 51 facing the first end 921 of the substrate 9; a second pressing member 61 facing the second end 922 of the substrate 9; a first moving mechanism 52 that moves the first pressing member 51 toward the first end 921, thereby bringing the first pressing member 51 into contact with the first end 921 and moving the second end 922 toward the second pressing member 61, and then moving the first pressing member 51 away from the first end 921; and a second moving mechanism 62 that moves the second pressing member 61 toward the second end 922, thereby bringing the second pressing member 61 into contact with the second end 922 and moving the second end 922 to a predetermined reference position.

Description

[Technical Field]

[0001] The present invention relates to a technique for determining the position of a substrate. [Background Art]

[0002] Conventionally, before a substrate is carried into an apparatus that forms a fine pattern or processes a substrate on which a fine pattern has been formed, an operation of determining the position of the substrate, that is, an operation of aligning the position of the substrate to a predetermined position is performed. Positioning of a substrate is normally performed by placing the substrate between a pair of positioning members, fixing the position of one positioning member, moving the other positioning member toward the substrate, and clamping the substrate between the pair of positioning members. For example, in Patent Document 1, the substrate on a conveyance path is clamped by substrate width-aligning means from a direction perpendicular to the conveyance direction, thereby aligning the substrate at a desired position. [Prior Art Documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Unexamined Patent Application Publication No. 2004-165524 [Summary of the Invention] [Problem to be Solved by the Invention]

[0004] By the way, when a substrate is clamped by positioning members, there is a risk that the substrate may be distorted if the rigidity of the substrate is low. Further, if there is a large error in the outer shape of the substrate, there is a risk that some substrates cannot be clamped even if the movement amount of the positioning members is adjusted.

[0005] The present invention has been made in view of the above problems, and an object thereof is to determine the position of a substrate without applying a large force to the substrate, without depending on the accuracy of the outer shape of the substrate. [Means for Solving the Problem]

[0006] One aspect of the present invention is a positioning device for determining the position of a substrate on which a fine pattern is formed or on which a fine pattern has been formed, comprising: a support portion that supports the substrate from below in a positioning direction perpendicular to a first edge of the substrate and parallel to the main surface of the substrate; a first pressing member facing the first edge of the substrate; a second pressing member facing a second edge of the substrate parallel to the first edge; a first moving mechanism that moves the first pressing member toward the first edge, thereby bringing the first pressing member into contact with the first edge and moving the second edge toward the second pressing member to a position where it does not contact the second pressing member, and then moves the first pressing member away from the first edge; and a second moving mechanism that, after the first pressing member has moved away from the first edge, moves the second pressing member toward the second edge, thereby bringing the second pressing member into contact with the second edge and moving the second edge to a predetermined reference position.

[0007] A second aspect of the present invention is a positioning device according to aspect 1, wherein the support portion comprises a plurality of rollers that are in contact with the lower surface of the substrate and are rotatable about an axis perpendicular to the positioning direction.

[0008] A third aspect of the present invention is the positioning device of the second aspect, wherein, when supported by the support portion, the position of the first end of the substrate in the height direction is higher than the position of the second end in the height direction.

[0009] A fourth aspect of the present invention is a positioning device according to aspect 2 or 3, wherein some of the plurality of rollers have greater rotational resistance than the other rollers.

[0010] Aspect 5 of the present invention is a positioning device according to aspect 4, wherein an auxiliary roller is in contact with a portion of the rollers, and a pushing force acts between the portion of the rollers and the auxiliary roller.

[0011] Aspect 6 of the present invention is a positioning device for determining the position of a substrate on which a fine pattern is formed or on which a fine pattern has been formed, comprising: a transport mechanism that supports the substrate from below and transports the substrate in a transport direction perpendicular to one end of the substrate and parallel to the main surface of the substrate; a positioning member disposed in the transport area of ​​the substrate and retractable from the transport area; a retraction mechanism for retracting the positioning member from the transport area; and a control unit that, with the positioning member retracted from the transport area, transports the substrate to one side in the transport direction by the transport mechanism to pass the positioning member, positions the positioning member in the transport area, and transports the substrate to the other side in the transport direction by the transport mechanism to bring the substrate into contact with the positioning member. [Effects of the Invention]

[0012] According to the present invention, the position of the substrate can be determined without applying a large force to the substrate. [Brief explanation of the drawing]

[0013] [Figure 1] This is a simplified plan view illustrating the drawing system. [Figure 2] This is a plan view showing the main structure of the positioning device. [Figure 3A] This is a right side view showing the main structure of the positioning device. [Figure 3B] This is a right side view showing the main structure of the positioning device. [Figure 4] This is a diagram showing the control unit of the positioning device. [Figure 5] This diagram shows the operation flow of the positioning device. [Figure 6A] This diagram shows a simplified representation of a positioning device during operation. [Figure 6B] This diagram shows a simplified representation of a positioning device during operation. [Figure 6C] This diagram shows a simplified representation of a positioning device during operation. [Figure 7A] This diagram shows a simplified representation of a positioning device during operation. [Figure 7B] Fig. 1 is a simplified view of the positioning device during operation. [Figure 7C] Fig. 2 is a simplified view of the positioning device during operation. [Figure 7D] Fig. 3 is a simplified view of the positioning device during operation. [Figure 7E] Fig. 4 is a simplified view of the positioning device during operation. [Figure 8] Fig. 5 is a view showing the double rollers. MODE FOR CARRYING OUT THE INVENTION

[0014] FIG. 1 is a simplified plan view showing a drawing system 100 including a positioning device 1 according to one embodiment of the present invention. The drawing system 100 includes the positioning device 1, a drawing device 101, and an unloading device 102. The positioning device 1 has a function as a carrying-in device. The X direction and Y direction in FIG. 1 are horizontal directions perpendicular to each other, and the Z direction is a vertical direction perpendicular to the X direction and the Y direction.

[0015] The substrate 9 is, for example, a printed wiring board, and a fine pattern is formed on the substrate 9 by the drawing device 101. The upper surface of the substrate 9 is a surface of a photosensitive material, and the drawing device 101 emits spatially modulated light toward the substrate 9, and draws a pattern on the photosensitive material by moving the irradiation position of the light. As indicated by arrow 901, the substrate 9 is conveyed by a conveyor in the (+X) direction from the left side to the right side of FIG. 1 and carried into the positioning device 1. In FIG. 1, the outer shape of the substrate 9 is shown by a solid line or a two-dot chain line, but in reality, the substrate 9 moves through the internal spaces of the covers of the positioning device 1, the drawing device 101, and the unloading device 102.

[0016] In the positioning device 1, the X and Y directions of the substrate 9 are determined. Specifically, the upper left vertex of the substrate 9 is used as the reference point, and the X and Y directions of the reference point are determined. After positioning, the substrate 9 is lifted by its top surface by the suction part of a transport device (not shown), transported above the holding part 111 of the drawing device 101, and placed on the holding part 111. The substrate 9 is held from below by the holding part 111.

[0017] The substrate 9 moves in the (+Y) direction as indicated by arrow 902, along with the holding unit 111, and a pattern is drawn by a drawing unit (not shown). Once drawing is complete, the substrate 9 moves in the (-Y) direction back to its original position, and the suction by the holding unit 111 is released. Then, the top surface of the substrate 9 is attracted by the suction unit of the transport device, lifted up, and transported above the discharge device 102, where it is placed on the conveyor inside the discharge device 102. The substrate 9 is transported in the (+X) direction from left to right in Figure 1 as indicated by arrow 903 and discharged to the outside of the discharge device 102.

[0018] Figure 2 is a plan view showing the main structure of the positioning device 1, and Figures 3A and 3B are right side views showing the main structure of the positioning device 1. In Figures 2, 3A, and 3B, the main structure of the positioning device 1 is shown in a simplified manner as appropriate. The positioning device 1 has an X-direction transport mechanism 11, an X-reference mechanism 12, a Y-roller mechanism 13, a first pushing mechanism 14, and a second pushing mechanism 15.

[0019] The X-transport mechanism 11 transports the substrate 9 in the X-direction, which is the transport direction. The transport direction is perpendicular to the (-X) end of the substrate 9 and parallel to the main surface of the substrate 9. As shown in Figures 2 and 3A, the X-transport mechanism 11 has a plurality of X-rollers 21. Each X-roller 21 rotates around an axis 22 that faces the Y-direction, which is perpendicular to the transport direction and parallel to the main surface of the substrate 9. The plurality of axes 22 are arranged in the X-direction. A plurality of X-rollers 21 are arranged on each axis 22. The substrate 9 is transported in the transport direction while being supported from below by the plurality of X-rollers 21.

[0020] As shown in Figure 2, the X-transport mechanism 11 includes a motor 23 and a magnetic gear group 24, which is a non-contact power transmission device. In Figure 2, the cover of the magnetic gear group 24 is shown as an elongated rectangle. When the motor 23 rotates, each shaft 22 rotates via the magnetic gear group 24, causing the X-rollers 21 to rotate. As a result, the substrates 9 located on the multiple X-rollers 21 move in the (+X) and (-X) directions.

[0021] The X-reference mechanism 12 includes an X-positioning member 31 shown in Figure 2 and a retraction mechanism (see reference numeral 32 in Figure 6A) located below the X-positioning member 31. The X-positioning member 31 is a positioning member used to position the substrate 9 in the X direction. In the example in Figure 2, the X-positioning member 31 has a plurality of pins 311 facing the Z direction, and these pins 311 are connected at the bottom of the X-positioning member 31 by a member that is long in the Y direction. The plurality of pins 311 move up and down simultaneously by the retraction mechanism. The X-positioning member 31 may be composed of multiple members. In this case, the plurality of members may move up and down individually.

[0022] The retraction mechanism is, for example, an air cylinder. Various other mechanisms such as electric actuators may be used as the retraction mechanism. Multiple pins 311 move upward from between the two-dimensionally arranged X rollers 21. Multiple pins 311 are arranged in the Y direction and are positioned at the (-X) end of the two-dimensionally arranged set of X rollers 21. The X positioning member 31 (and its pins 311) may be positioned between the multiple X rollers 21 as shown in Figure 2, or it may be positioned on the (-X) side of the set of X rollers 21.

[0023] The Y-roller mechanism 13 has multiple Y-rollers 41, as shown in Figures 2 and 3A. Each Y-roller 41 rotates around an axis facing the X direction. Each Y-roller 41 is positioned between the X-rollers 21, as shown in Figure 3A, and arranged in two dimensions as shown in Figure 2. In Figure 3A, for ease of understanding, the Y-rollers 41 are drawn in front of the rotation axis of the X-rollers 21. Note that, as shown in Figure 3A, on the (+Y) side, there are two Y-rollers 41 arranged vertically, but these rollers will be described later.

[0024] In the Y-roller mechanism 13, as shown in Figure 3A, each Y-roller 41 is supported by the upper end of a support rod 42 that protrudes upward from below. The lower end of the support rod 42 is fixed to a support base 43, and the support base 43 is raised and lowered by a lifting mechanism 44 such as a cylinder. The lifting mechanism 44 is, for example, an air cylinder. Various other mechanisms such as an electric actuator may be used as the lifting mechanism 44. In Figure 3A, the lifting mechanism 44 is depicted as two cylinders, but it may be a single cylinder. In Figure 3A, the upper end of the Y-roller 41 is located below the upper end of the X-roller 21, and the lower surface of the substrate 9 is in contact only with the X-roller 21. In this state, the main surface of the substrate 9 is parallel to the X and Y directions.

[0025] Figure 3B shows the state in which the Y-roller 41 (and support rod 42 and support base 43) has been raised by the lifting mechanism 44. The upper end of the Y-roller 41 is located above the upper end of the X-roller 21, and the lower surface of the substrate 9 is in contact only with the Y-roller 41. The position of the upper end of the Y-roller 41 is highest on the (-Y) side and gradually decreases toward the (+Y) direction. Therefore, the substrate 9 is tilted and supported by the Y-roller 41. The actual tilt is very slight, and the main surface of the substrate 9 is parallel to the X direction and substantially parallel to the Y direction. The tilt of the substrate 9 is exaggerated in Figure 3B.

[0026] The substrate 9 is supported by multiple Y-rollers 41 and is movable in the Y direction (approximately in the Y direction when considering the inclination). As will be described later, the Y-direction positioning of the substrate 9 is performed in this state. The multiple Y-rollers 41 are rollers that can rotate around an axis perpendicular to the positioning direction (Y direction) while in contact with the lower surface of the substrate 9. The positioning direction is perpendicular to the (+Y) side (and (-Y) side) edges of the substrate 9 and parallel to the main surface of the substrate 9. The multiple Y-rollers 41 and the support rods 42 and support bases 43 that support them are support parts that support the substrate 9 from below in a state where it can move in the positioning direction.

[0027] The first pressing mechanism 14 includes a first pressing member 51 as shown in Figures 2 and 3A, and a first moving mechanism 52 located below the first pressing member 51 as shown in Figure 3A. In the example of Figure 2, the first pressing member 51 has a plurality of pins 511 facing the Z direction, and these pins 511 are connected downwards in the first pressing member 51. The plurality of pins 511 move simultaneously in the Y direction by the first moving mechanism 52. The first pressing member 51 may be composed of a plurality of members. In this case, the plurality of members may move individually in the Y direction. When the substrate 9 is supported by a plurality of Y rollers 41, the first pressing member 51 faces the (-Y) side end of the substrate 9 (hereinafter also referred to as the "first end") in the Y direction.

[0028] The first moving mechanism 52 is, for example, a mechanism in which a motor is connected to a ball screw. Various other mechanisms such as a linear motor or an air cylinder may be used as the first moving mechanism 52. The multiple pins 511 are arranged in the X direction and are movable in the Y direction between the two-dimensionally arranged X rollers 21. The upper ends of the pins 511, which are the upper ends of the first pressing member 51, protrude above the upper ends of the raised Y rollers 41 shown in Figure 3B, and preferably protrude above the upper surface of the substrate 9 on the Y rollers 41.

[0029] The second pressing mechanism 15 includes a second pressing member 61 as shown in Figures 2 and 3A, and a second moving mechanism 62 located below the second pressing member 61 as shown in Figure 3A. In the example of Figure 2, the second pressing member 61 is a plate member perpendicular to the Y direction. As shown in Figure 3B, when the substrate 9 is supported by a plurality of Y rollers 41, the second pressing member 61 faces the (+Y) side end of the substrate 9 (hereinafter also referred to as the "second end") in the Y direction. The second end is the end on the rectangular substrate 9 opposite to the first end and is parallel to the first end.

[0030] The second pushing member 61 is moved in the Y direction by the second moving mechanism 62. The second pushing member 61 may be composed of multiple members. The second moving mechanism 62 is, for example, an air cylinder. Various other mechanisms such as an electric actuator may be used as the second moving mechanism 62. The second pushing member 61 is positioned on the (+Y) side of the arrangement of the X roller 21 and the Y roller 41. The upper end of the second pushing member 61 protrudes above the upper end of the raised Y roller 41 shown in Figure 3B, and preferably above the upper surface of the substrate 9 on the Y roller 41.

[0031] Figure 4 shows the control unit 8 and its surrounding configuration of the positioning device 1. The control unit 8 is implemented by a general computer system and other configurations such as interfaces and dedicated circuits. The control unit 8 controls the operation of the X transport mechanism 11, the X reference mechanism 12, the Y roller mechanism 13, the first push mechanism 14, and the second push mechanism 15. The control unit 8 mainly controls the operation of the motor 23 of the X transport mechanism 11, the retraction mechanism of the X reference mechanism 12, the lifting mechanism 44 of the Y roller mechanism 13, the first movement mechanism 52 of the first push mechanism 14, and the second movement mechanism 62 of the second push mechanism 15, and receives operation confirmation signals from these actuators. The control unit 8 also receives signals from a sensor that detects the position of the substrate 9 in the X transport mechanism 11.

[0032] Figure 5 shows the operation flow of the positioning device 1. The operation shown in Figure 5 is achieved by the control unit 8 controlling the X transport mechanism 11, the X reference mechanism 12, the Y roller mechanism 13, the first pushing mechanism 14, and the second pushing mechanism 15.

[0033] First, as shown in Figure 6A, with the X-positioning member 31 in a lowered state, that is, with the X-positioning member 31 retracted from the transport area of ​​the substrate 9, the X-roller 21 of the X-transport mechanism 11 rotates, causing the substrate 9 to be transported in the (+X) direction (one side of the transport direction) as indicated by the arrow 91 (step S11). The "transport area" of the substrate 9 is the area (space) through which the transported substrate 9 passes, and if an object exists in this area, it will interfere with the transported substrate 9.

[0034] When a sensor (not shown, e.g., a photoelectric sensor) detects that the substrate 9 has passed above the X-positioning member 31, the substrate 9 stops, and the retraction mechanism 32 raises the X-positioning member 31 (step S12), as shown in Figure 6B. This positions the pins 311 of the X-positioning member 31 in the transport area of ​​the substrate 9. Note that the passage of the substrate 9 above the X-positioning member 31 may also be detected by other means, for example, based on the rotational speed of the motor 23.

[0035] Subsequently, the X-roller 21 of the X-transport mechanism 11 rotates in the opposite direction, transporting the substrate 9 in the (-X) direction (the other side of the transport direction) as indicated by the arrow 92 in Figure 6C. When the (-X) side end 911 of the substrate 9 comes into contact with the pin 311 of the X-positioning member 31, the rotation of the X-roller 21 stops (step S13). As a result, the end 911 of the substrate 9 (i.e., one side of the rectangle) is positioned at the reference position in the X direction.

[0036] Next, as shown in Figure 3B, the Y-roller 41 is raised by the lifting mechanism 44, and the substrate 9 is supported by the Y-roller 41 (step S14). In this state, the first pressing member 51 is moved in the (+Y) direction by the first moving mechanism 52. That is, from the state shown in Figure 7A, the first pressing member 51 moves toward the first end 921 on the (-Y) side of the substrate 9. As a result, as shown in Figure 7B, the first pressing member 51 contacts the first end 921 of the substrate 9, pushing the substrate 9 toward the (+Y) direction (step S15), and the second end 922 on the (+Y) side moves toward the second pressing member 61. The movement of the substrate 9 is smoothly guided by the Y-roller 41.

[0037] As shown in Figure 7B, the substrate 9 moves toward the second pressing member 61 to a position where the second end 922 does not touch the second pressing member 61. As a result, the second end 922 of the substrate 9 approaches the second pressing member 61. "Approaching" the second end 922 of the substrate 9 means that it is at a distance where the second pressing member 61 can press the second end 922 in step S16, which will be described later. Subsequently, as shown in Figure 7C, the first moving mechanism 52 moves the first pressing member 51 in the (-Y) direction, and the first pressing member 51 moves away from the first end 921 of the substrate 9.

[0038] The substrate 9 is in contact with the pin 311 of the X-positioning member 31 when it moves in the Y-direction. The pin 311 is a roller pin that can rotate around an axis facing the Z-direction, so dust generation is suppressed even when the substrate 9 moves in the Y-direction while in contact with the pin 311.

[0039] Next, from the state shown in Figure 7C, the second pressing member 61 moves in the (-Y) direction by the second moving mechanism 62. That is, the second pressing member 61 moves toward the second end 922 of the substrate 9. As a result, as shown in Figure 7D, the second pressing member 61 comes into contact with the second end 922 of the substrate 9 and the substrate 9 is pushed in the (-Y) direction (step S16). As the second pressing member 61 moves precisely to a predetermined position, the second end 922 of the substrate 9 moves to a predetermined reference position in the Y direction. Step S16 prevents the first end 921 from coming into contact with the first pressing member 51.

[0040] Through the above operations, the (-X) side end and the (+Y) side end of the substrate 9, that is, the left end 911 and the upper end (second end) 922 of the substrate 9 in Figure 2, are positioned at predetermined reference positions. As shown in Figure 7E, the second pressing member 61 moves in the (+Y) direction by the second moving mechanism 62 and returns to its original position, and the second pressing member 61 moves away from the second end 922 of the substrate 9.

[0041] Subsequently, the Y-roller 41 is lowered by the lifting mechanism 44, and the substrate 9 is placed on the X-roller 21 (step S17). As already explained, in the drawing system 100 of Figure 1, the substrate 9 is lifted by the suction part of a transport device (not shown), transported above the holding part 111 of the drawing device 101, and placed on the holding part 111 (step S18). In the positioning device 1, the X-positioning member 31 is lowered and waits to be loaded into the positioning device 1 (step S19).

[0042] As described above, the positioning device 1 can position the substrate 9 in the X and Y directions without pinching the substrate 9. This allows the position of the substrate 9 to be determined without applying a large force to the substrate 9. As a result, damage such as distortion to the substrate 9 is prevented. Furthermore, the positioning of the substrate 9 can be performed without depending on the accuracy of the substrate 9's outer shape. Regarding positioning in the X direction, by retracting the X positioning member 31, the (-X) side edge of the substrate 9 can be positioned even if the substrate 9 is fed in the (+X) direction. In addition, when positioning in the Y direction, the Y roller 41 rotates, allowing the substrate 9 to be positioned while suppressing dust generation.

[0043] In the positioning device 1, the Y-roller 41 can rotate very smoothly. Therefore, when the positioning device 1 positions the substrate 9 in the Y-direction using the second pressing member 61, two measures are taken to prevent the substrate 9 from moving too far due to inertia. These measures ensure that the positioning of the substrate 9 in the Y-direction is accurate.

[0044] The first countermeasure, as shown in Figure 3B, involves arranging the Y rollers 41 in the Y direction while tilted, such that the position of the Y roller 41 on the first pressing member 51 side is slightly higher than the position of the Y roller 41 on the second pressing member 61 side, while the substrate 9 is supported by the Y roller mechanism 13. As a result, the height of the (-Y) side end of the substrate 9, while supported by the Y roller mechanism 13, is higher than the height of the (+Y) side end. Consequently, when the second pressing member 61 positions the substrate 9 in the Y direction, excessive movement due to inertia is prevented.

[0045] The second countermeasure, as shown in Figure 3A, involves placing two Y-rollers 41 side by side on the (+Y) side, one above the other, to provide resistance to the rotation of the Y-rollers 41. Figure 8 shows the Y-rollers 41 arranged side by side (hereinafter referred to as "double roller 45"). The upper Y-roller of the double roller 45 is denoted by the numeral 41a, and the lower Y-roller by the numeral 41b. Hereafter, the lower roller 41b, which does not directly support the substrate 9, will be referred to as the "auxiliary roller".

[0046] In each Y-roller 41 (41a, 41b), a resin layer 412 is formed on the outer circumference of a cylindrical member 411 that rotates around an axis facing the X direction. In the double roller 45, the Y-roller 41a and the auxiliary roller 41b are in contact, and a pushing force acts between the Y-roller 41a and the auxiliary roller 41b. That is, the distance between the centers of the Y-rollers 41a and 41b is slightly smaller than the diameter of the Y-roller 41. As a result, the resin layers 412 of the Y-rollers 41a and 41b undergo slight elastic deformation at the contact point, creating slight resistance to the rotation of the Y-rollers 41a and 41b.

[0047] The double roller 45 creates resistance to rotation, preventing the substrate 9 from moving too far due to inertia when the second pressing member 61 positions the substrate 9 in the Y direction. Furthermore, since there is no significant friction between the Y roller 41a and the auxiliary roller 41b, dust generation due to rotational resistance is suppressed. Thus, the positioning device 1 achieves resistance to the rotation of the Y roller 41a with a simple structure. Even when substrates of various sizes are loaded, the (+Y) end of the substrate 9 is used for positioning; therefore, in the arrangement of the Y rollers 41, the double roller 45 is provided only at the (+Y) end. Note that the number of double rollers 45 can be one or more.

[0048] In Figure 1, the substrate 9 flows from left to right from the positioning device 1 on the left toward the holding unit 111 of the drawing device 101. Hereafter, this type of transport will be referred to as "rightward flow". Depending on the drawing system 100, the positioning device 1 may be placed to the right of the holding unit 111, and the unloading device 102 may be placed to the left of the holding unit 111, so that the substrate 9 is transported from right to left. Hereafter, this type of transport will be referred to as "leftward flow". In the case of leftward flow, the positioning device 1 completes the positioning of the substrate 9 in the X direction simply by bringing the substrate 9, which has been transported in the leftward direction ((-X) direction), into contact with the X positioning member 31 without raising or lowering the X positioning member 31.

[0049] When the positioning device 1 is used for leftward flow, the retraction mechanism 32 is omitted in the X reference mechanism 12, and the position of the X positioning member 31 (and pin 311) is fixed relative to the base of the positioning device 1. In this way, the positioning device 1 is designed to accommodate leftward flow.

[0050] The configuration and operation of the positioning device 1 may be modified in various ways.

[0051] In Figures 6A and 6B, the X-positioning member 31 moves away from the transport area of ​​the substrate 9 (i.e., the area through which the substrate 9 passes) by descending. However, the X-positioning member 31 may also be retracted in directions other than downward by the retraction mechanism 32. For example, it may be retracted upward. The X-positioning member 31 may be retracted to various positions as long as it does not interfere with the substrate 9 being transported in the (+X) direction. The portion of the X-positioning member 31 that moves forward and backward relative to the transport area does not have to be pin-shaped. Various shapes of X-positioning members 31 may be used as long as they are positioned in the transport area of ​​the substrate 9 and can be retracted from the transport area.

[0052] When the substrate 9 is picked up from the positioning device 1 and placed on the holding part 111 of the drawing device 101, the second pressing member 61 may not retract from the substrate 9, and the substrate 9 may be lifted by the suction part of the transport device while the second pressing member 61 is in contact with the substrate 9. In this case, the second pressing member 61 returns to its original position after the substrate 9 has been lifted.

[0053] The double roller structure 45 may be used in various other applications where it is necessary to provide resistance to the rotation of the rollers while avoiding dust generation. The method of making the rotational resistance of some Y rollers 41 greater than that of other Y rollers 41 in order to ensure the positioning of the substrate 9 in the Y direction is not limited to the double roller structure. For example, the rotational resistance in the bearing structure of some Y rollers 41 may be greater than that of other rollers. Rotational resistance may be provided by bringing a friction member into contact with some of the Y rollers 41. Some of the Y rollers 41 with increased rotational resistance may be provided at any position as long as they are in contact with the lower surface of the substrate 9. Preferably, such rollers are provided near the second pressing member 61 where the substrate 9 is reliably located.

[0054] In the positioning device 1, the Y-roller mechanism 13 supports the substrate 9 at a slight incline to prevent it from moving too far due to inertia when positioning the substrate 9 in the Y direction, but this function may be omitted. The double roller 45 may also be omitted.

[0055] In positioning device 1, if positioning in the X direction is required, the configuration for positioning in the Y direction may be omitted. Similarly, if positioning in the Y direction is required, the configuration for positioning in the X direction may be omitted.

[0056] Furthermore, the X-transport mechanism 11 may be a transport mechanism that does not utilize the X-roller 21, and the Y-roller mechanism 13 may be replaced with a mechanism that does not utilize the Y-roller 41. For example, the X-transport mechanism 11 may transport the substrate 9 in the X direction by a belt. Various mechanisms may be employed for the X-transport mechanism 11 that support the substrate 9 from below and transport the substrate 9 in a transport direction perpendicular to one end of the substrate 9 (the end in the X direction) and parallel to the main surface of the substrate 9. The Y-roller mechanism 13 may be replaced with other support parts that support the substrate 9 from below in a state that allows movement in the positioning direction. For example, multiple support members having surfaces with very low friction may be used as support parts.

[0057] The drawing device 101 of the drawing system 100 may be a device that performs drawing by means other than light.

[0058] The substrate 9 may be a substrate with a fine pattern already drawn on it, or a substrate on which a fine pattern is planned to be drawn. Here, "fine pattern" refers to a pattern that is generally considered fine, but preferably a pattern that is fine enough that if the substrate 9 is positioned between a pair of positioning members, distortion or other effects may occur in the pattern. Furthermore, the substrate 9 is not limited to a circuit board, but may be a substrate for other applications. The fine pattern is not limited to a circuit pattern, but may be, for example, a mask pattern.

[0059] The positioning device 1 may be used as a loading device for the inspection machine instead of the drawing device 101.

[0060] The configurations in the above embodiments and each modified example may be combined as appropriate, as long as they do not contradict each other. [Explanation of Symbols]

[0061] 1 Positioning device 8 Control Unit 9 circuit boards 11 X transport mechanism 13. Y-roller mechanism (support section) 21 X Roller 22 axes 31 X-positioning member 32 Evacuation mechanism 41,41a Y Roller 41b Auxiliary roller 51 First pressing member 52 1st movement mechanism 61 Second pressing member 62 Second movement mechanism 911 End 921 First end 922 Second end

Claims

1. A positioning device for determining the position of a substrate on which a fine pattern is formed or on which a fine pattern is formed, A support portion that supports the substrate from below in a positioning direction that is perpendicular to the first end of the substrate and parallel to the main surface of the substrate, A first pressing member facing the first end of the substrate, A second pressing member facing the second end of the substrate which is parallel to the first end, A first moving mechanism moves the first pressing member toward the first end, thereby bringing the first pressing member into contact with the first end and moving the second end toward the second pressing member to a position where it does not come into contact with the second pressing member, and then moves the first pressing member away from the first end. A second moving mechanism moves the second pressing member toward the second end after the first pressing member has moved away from the first end, thereby bringing the second pressing member into contact with the second end and moving the second end to a predetermined reference position. A positioning device equipped with the following features.

2. A positioning device according to claim 1, The support portion comprises a plurality of rollers that are in contact with the lower surface of the substrate and are rotatable about an axis perpendicular to the positioning direction.

3. A positioning device according to claim 2, A positioning device in which, when supported by the support portion, the position in the height direction of the first end of the substrate is higher than the position in the height direction of the second end.

4. A positioning device according to claim 2 or 3, A positioning device in which some of the aforementioned multiple rollers have greater rotational resistance than the other rollers.

5. A positioning device according to claim 4, A positioning device in which an auxiliary roller contacts some of the aforementioned rollers, and a pushing force acts between the aforementioned rollers and the auxiliary roller.

6. A positioning device for determining the position of a substrate on which a fine pattern is formed or on which a fine pattern is formed, A transport mechanism that supports the substrate from below and transports the substrate in a transport direction perpendicular to one end of the substrate and parallel to the main surface of the substrate, A positioning member is placed in the transport area of ​​the substrate and is retractable from the transport area, A retraction mechanism for retracting the positioning member from the transport area, A control unit that, with the positioning member retracted from the transport area, transports the substrate by the transport mechanism to one side in the transport direction, allowing it to pass the positioning member, positions the positioning member in the transport area, and transports the substrate by the transport mechanism to the other side in the transport direction, bringing the substrate into contact with the positioning member, A positioning device equipped with the following features.

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