Vertical heat treatment apparatus and installation method

Abstract

This technology provides a way to easily and accurately install tubular members. [Solution] The vertical heat treatment apparatus includes a reaction tube capable of accommodating a plurality of substrates arranged vertically, a heating unit provided outside the reaction tube for heating the plurality of substrates housed in the reaction tube, a tubular member installed inside or outside the reaction tube, and a fixing structure for fixing the tubular member to the top portion above the heating unit. The reaction tube has a tubular port that protrudes above the top portion and has an internal placement hole through which the tubular member can be inserted. The fixing structure includes a first fixing member fixed to the top portion and arranged around the tubular port, and a second fixing member fixed to the upper end of the first fixing member and capable of holding the tubular member inserted into the placement hole.

Description

[[Technical Field]]

[0001] The present disclosure relates to a vertical heat treatment apparatus and an installation method. [[Background Art]]

[0002] Some vertical heat treatment apparatuses adopt a piping structure in which a tubular member (injector tube) for introducing gas into a processing container is suspended from the ceiling of the processing container. When installing an injector tube in this type of vertical heat treatment apparatus, it is necessary to adjust the position of the gas discharge holes while sealing between the injector tube and each component of the processing container.

[0003] Note that Patent Document 1 discloses a vertical heat treatment apparatus (substrate processing apparatus) which does not have a structure in which an injector tube is inserted from the ceiling of the processing container, but has a structure in which an O-ring is attached to the outer peripheral surface of the injector and connected to a gas introduction pipe. [[Prior Art Documents]] [[Patent Documents]]

[0004] [[Patent Document 1]] Japanese Patent Laying-Open No. 2016-176584 [[Summary of the Invention]] [[Problem to be Solved by the Invention]]

[0005] The present disclosure provides a technique that allows a tubular member to be installed easily and with high accuracy. [[Means for Solving the Problem]]

[0006] According to one aspect of the present disclosure, a vertical heat treatment apparatus is provided, comprising: a reaction tube capable of accommodating a plurality of substrates arranged vertically; a heating unit provided outside the reaction tube for heating the plurality of substrates housed in the reaction tube; a tubular member installed inside or outside the reaction tube; and a fixing structure for fixing the tubular member to the top portion above the heating unit, wherein the reaction tube has a tubular port that protrudes above the top portion and has an internal placement hole through which the tubular member can be inserted; and the fixing structure comprises a first fixing member fixed to the top portion and arranged around the tubular port; and a second fixing member fixed to the upper end of the first fixing member and capable of holding the tubular member inserted into the placement hole. [Effects of the Invention]

[0007] According to one embodiment, tubular members can be installed easily and accurately. [Brief explanation of the drawing]

[0008] [Figure 1] This is a view of the vertical heat treatment apparatus according to the embodiment, seen from an oblique angle above. [Figure 2] This is a view of the vertical heat treatment apparatus according to the embodiment, seen from a diagonal downward angle. [Figure 3] This is a vertical cross-sectional view showing a vertical heat treatment apparatus 1 according to an embodiment. [Figure 4] The cross-section shown is taken along the line IV-IV in Figure 3. [Figure 5] This is a partial cross-sectional view showing the fixed structure and its surrounding area. [Figure 6] Figure 6(A) is a perspective view showing the first fixing member of the fixing structure. Figure 6(B) is a partial cross-sectional view showing the bellows of the body portion of the first fixing member. [Figure 7] This is a perspective view showing the installation of the first fixing member in the tubular port at the top. [Figure 8] Figure 8(A) is a first longitudinal cross-sectional view showing the procedure for installing the first fixing member to the top. Figure 8(B) is a second longitudinal cross-sectional view showing the procedure for installing the first fixing member to the top. [Figure 9] Figure 9(A) is a third longitudinal cross-sectional view showing the procedure for installing the first fixing member to the top. Figure 9(B) is a fourth longitudinal cross-sectional view showing the procedure for installing the first fixing member to the top. [Figure 10] Figure 10(A) is a first perspective view showing the assembly procedure between the injector tube and the second fixing member. Figure 10(B) is a second perspective view showing the assembly procedure between the injector tube and the second fixing member. Figure 10(C) is a third perspective view showing the assembly procedure between the injector tube and the second fixing member. Figure 10(D) is a fourth perspective view showing the assembly procedure between the injector tube and the second fixing member. [Figure 11] This is a partial side cross-sectional view showing the state in which the second fixing member is assembled to the first fixing member installed on the top. [Figure 12] This is a perspective view showing the assembled state of the first fixing member and the second fixing member. [Figure 13] This is a partial cross-sectional view showing the gas introduction duct and injector tube with their height adjusted. [Modes for carrying out the invention]

[0009] The following describes embodiments for implementing this disclosure with reference to the drawings. In each drawing, the same reference numeral is used for identical components, and redundant explanations may be omitted.

[0010] (Substrate processing equipment) Referring to Figures 1 to 4, the vertical heat treatment apparatus 1 according to the embodiment will be described. Figure 1 is a perspective view of the vertical heat treatment apparatus 1 according to the embodiment, and is a view of the vertical heat treatment apparatus 1 from diagonally above. Figure 2 is a perspective view of the vertical heat treatment apparatus 1 according to the embodiment, and is a view of the vertical heat treatment apparatus 1 from diagonally below. Figure 3 is a vertical cross-sectional view of the vertical heat treatment apparatus 1 according to the embodiment. Figure 4 is a horizontal cross-sectional view of the vertical heat treatment apparatus 1 according to the embodiment, and shows the cross-section along the line IV-IV in Figure 3.

[0011] The vertical heat treatment apparatus 1 is a batch-type apparatus that collectively performs various heat treatments on a plurality of substrates W. The heat treatment includes, for example, a film formation process for forming a film on a substrate W by atomic layer deposition (ALD: Atomic Layer Deposition) and chemical vapor deposition (CVD: Chemical Vapor Deposition). The heat treatment may include an etching process for removing a film formed on the substrate W.

[0012] The vertical heat treatment apparatus 1 includes a reaction tube 10, a gas introduction part 20, a vacuum pipe 30, an exhaust duct 40, a casing 50, a heating part 60, a pressure reduction part 70, a pressure increasing part 80, and an apparatus casing 90. In FIG. 1 and FIG. 2, illustrations of the casing 50, the heating part 60, the pressure reduction part 70, the pressure increasing part 80, and the apparatus casing 90 are omitted. The reaction tube 10, the vacuum pipe 30, and the exhaust duct 40 are joined to each other by, for example, welding or the like, and are integrally configured. The reaction tube 10, the vacuum pipe 30, and the exhaust duct 40 are formed of, for example, quartz.

[0013] The reaction tube 10 is formed in a cylindrical shape having a ceiling portion while the lower end thereof is open. A plurality of introduction openings 10a and exhaust openings 10b are provided on the side wall of the reaction tube 10.

[0014] Each of the introduction openings 10a penetrates through the side wall of the reaction tube 10. Each of the introduction openings 10a is provided at a position where gas introduction ducts 211 to 218, which will be described later, are attached in the circumferential direction of the reaction tube 10. Each of the introduction openings 10a is provided along the vertical direction from the vicinity of the upper end to the vicinity of the lower end of the reaction tube 10 at each position in the circumferential direction of the reaction tube 10. Thereby, the gas introduction ducts 211 to 218 can uniformly supply gas to the range from the upper end to the lower end in the reaction tube 10.

[0015] The exhaust opening 10b penetrates through the side wall of the reaction tube 10. The exhaust opening 10b is provided at a position where the exhaust duct 40 is attached in the circumferential direction of the reaction tube 10. The exhaust opening 10b is a rectangular opening extending along the vertical direction from the vicinity of the upper end to the vicinity of the lower end of the reaction tube 10. Thereby, the exhaust duct 40 can uniformly exhaust gas from the range from the upper end to the lower end in the reaction tube 10.

[0016] An opening at the lower end of the reaction tube 10 is hermetically closed by a lid (not shown). The lid is formed of a metal such as stainless steel, for example. A substrate holder 11 is housed inside the reaction tube 10. The substrate holder 11 holds a plurality of substrates W arranged in multiple stages in the vertical direction in a horizontal posture. The number of substrates W is not limited, and is, for example, 25 to 200 sheets. In FIG. 3, illustration of some substrates W is omitted. The substrate holder 11 is formed of quartz, for example.

[0017] The gas introduction unit 20 includes a plurality of gas introduction ducts 210 (gas introduction ducts 211 to 218), a plurality of injector tubes 220 (injector tubes 221 to 228), gas introduction pipes 231 to 238, and on-off valves 241 to 248. In FIG. 3, the gas introduction pipes 231 to 235 and the on-off valves 241 to 245 are shown.

[0018] Each of the gas introduction ducts 211 to 218 is formed in a cylindrical shape and provided along the circumferential direction of the reaction tube 10. Each of the gas introduction ducts 211 to 218 is arranged spaced apart from each other in the circumferential direction of the reaction tube 10, whereby thermal influence from adjacent gas introduction ducts 211 to 218 can be reduced. Inside each of the gas introduction ducts 211 to 218, a cylindrical injector tube 220 formed to be one size smaller (thinner) is respectively housed. Each of the gas introduction ducts 211 to 218 introduces the gas supplied via each of the injector tubes 221 to 228 into the interior of the reaction tube 10.

[0019] Each of the gas introduction ducts 211 to 218 has multiple discharge holes 211a to 218a along the vertical direction. Each discharge hole 211a to 218a has an introduction opening 10a on the inner circumferential surface of the reaction tube 10. The gas holes 221a to 228a of each injector tube 221 to 228 inserted into each gas introduction duct 211 to 218 are positioned opposite each discharge hole 211a to 218a. This allows the gas introduced through each injector tube 221 to 228 to be supplied into the reaction tube 10 via the gas holes 221a to 228a and the discharge holes 211a to 218a. For example, as shown by the arrows in Figure 4, gases such as raw material gas, reaction gas, etching gas, and purge gas are supplied into the reaction tube 10 from multiple positions in the circumferential direction of the reaction tube 10. This makes it easy to adjust the in-plane shape of the substrate during film formation and etching. Furthermore, the vertical heat treatment apparatus 1 can adjust the residence time and gas concentration distribution of the gas supplied to the surface of the substrate W by adjusting the gas supply position and the amount of gas supplied. Therefore, it is easier to control the in-plane shape of film deposition and etching than with a unidirectional gas flow.

[0020] The reaction tube 10 has each gas introduction duct 211-218 fixed to the outer surface of its side wall, shortening the distance from the gas introduction ducts 211-218 to the substrate. As a result, the efficiency of gas supply to adjacent substrates W in the vertical direction is improved. These gas introduction ducts 211-218 may be integrally molded with the reaction tube 10. The gas introduction ducts 211-218 are formed of, for example, quartz.

[0021] Each gas introduction duct 211-218 has a tubular shape with a closed lower end and an open upper end. The upper ends of each gas introduction duct 211-218 extend above the upper surface of the reaction tube 10 and penetrate the housing 50. This allows each injector tube 221-228, each gas introduction pipe 231-238, and each on-off valve 241-248 to be installed above the ceiling of the reaction tube 10. Therefore, the piping distance from each on-off valve 241-248 to the reaction tube 10 can be shortened.

[0022] Each injector tube 221-228 is detachably inserted into each gas introduction duct 211-218. The vertical heat treatment apparatus 1 can change the shape of each injector tube 221-228 according to the type of treatment, allowing the use of the optimal injector tube 221-228 for each type of treatment. The inner surface of each gas introduction duct 211-218 has a shape corresponding to, for example, the outer surface of the injector tube 221-228. A gap is provided between the inner surface of each gas introduction duct 211-218 and the outer surface of the injector tube 221-228.

[0023] Each injector tube 221-228 is connected to a gas source (not shown) via connected gas introduction pipes 231-238. Gas from the gas source is introduced from the upper end of each injector tube 221-228 into the internal flow path 220a (see Figure 5) of the injector tube 221-228 and discharged into the reaction tube 10 via gas holes 221a-228a and discharge holes 211a-218a.

[0024] Each gas introduction pipe 231-238 is located in the space above the housing 50. One end of each gas introduction pipe 231-238 is connected to the corresponding injector pipes 221-228, and the other end penetrates the device housing 90 and extends to the outside of the device housing 90. On / off valves 241-248 are provided at intermediate positions along each gas introduction pipe 231-238. Flow controllers such as mass flow controllers may be provided along each gas introduction pipe 231-238.

[0025] Each of the on-off valves 241-248 is a valve that switches the gas flow on and off, and is installed in the upper space of the housing 50. Each of the on-off valves 241-248 is mounted, for example, on the inner surface of the device housing 90.

[0026] The vacuum piping 30 is formed in a cylindrical shape with a top section and an open bottom section. The vacuum piping 30 is provided at a distance from the reaction tube 10. An opening 30a is provided in the side wall of the vacuum piping 30 at the same position as the exhaust duct 40 in the circumferential direction of the vacuum piping 30. The opening 30a is a rectangular opening that extends vertically from near the upper end to near the lower end of the vacuum piping 30. The vertical length of the opening 30a may be the same as the vertical length of the exhaust opening 10b of the reaction tube 10. The pipe axis of the vacuum piping 30 may be parallel to the pipe axis of the reaction tube 10. The lower end of the vacuum piping 30 is connected to an exhaust device (not shown), such as a vacuum pump, via piping (not shown). The flow path cross-sectional area of ​​the vacuum piping 30 may be greater than or equal to the flow path cross-sectional area of ​​the exhaust duct 40. This results in a uniform exhaust flow velocity in the vertical direction, forming a uniform laminar flow in the vertical direction. Therefore, the inter-plane uniformity of film deposition and etching is improved.

[0027] The exhaust duct 40 connects the reaction tube 10 and the vacuum piping 30. The exhaust duct 40 connects the inside of the reaction tube 10 to the inside of the vacuum piping 30. One end of the exhaust duct 40 is connected to the side wall of the reaction tube 10 so as to cover the exhaust opening 10b, and the other end is connected to the side wall of the vacuum piping 30 so as to cover the opening 30a. In this case, compared to the case where the vacuum piping 30 is directly connected to the reaction tube 10 without the exhaust duct 40, the area occupied by the exhaust duct 40 in the circumferential direction of the reaction tube 10 can be shortened. Therefore, the area in the circumferential direction of the reaction tube 10 where gas introduction ducts 211 to 218 can be attached is widened. This makes it possible to increase the number of gas introduction ducts 211 to 218 installed on the reaction tube 10. The exhaust duct 40 may be divided into multiple sections in the vertical direction. In this case, the gas flow from inside the reaction tube 10 toward the vacuum pipe 30 is rectified, and the uniformity of the gas flow at different vertical positions inside the reaction tube 10 is improved.

[0028] The housing 50 houses the reaction tube 10, gas introduction section 20, vacuum piping 30, exhaust duct 40, and heating section 60. The housing 50 is also called a heater shell because it houses the heating section 60, which includes a heater. The housing 50 has a bottom section 51, a top section 52, and side sections 53. The bottom section 51, top section 52, and side sections 53 are constructed as separate parts, for example. The bottom section 51, top section 52, and side sections 53 may be constructed as a single unit.

[0029] The bottom portion 51 supports the reaction tube 10 and the vacuum piping 30. The top portion 52 is positioned above the top of the reaction tube 10 and the top of the vacuum piping 30, and covers these top portions. The side portions 53 surround the reaction tube 10, the gas inlet 20, the vacuum piping 30, and the exhaust duct 40.

[0030] The heating section 60 is located inside the housing 50. The heating section 60 includes a first side heater 61, a second side heater 62, a third side heater 63, a first ceiling heater 64, a second ceiling heater 65, and a lower heater 66. The first side heater 61, the second side heater 62, the third side heater 63, the first ceiling heater 64, the second ceiling heater 65, and the lower heater 66 are, for example, carbon wire heaters. This allows the substrate W housed inside the reaction tube 10 to be rapidly heated and cooled.

[0031] Multiple first side heaters 61 are provided around the reaction tube 10. The multiple first side heaters 61 are provided at intervals from each other in the circumferential direction of the reaction tube 10. Each first side heater 61 is provided at a different position from the exhaust duct 40 in the circumferential direction of the reaction tube 10. Each first side heater 61 may be divided into multiple parts in the vertical direction. In this case, the temperature in the vertical direction can be adjusted independently by independently controlling the divided first side heaters 61. The first side heaters 61 heat the substrate W housed inside the reaction tube 10 from outside the reaction tube 10 by thermal radiation.

[0032] The second side heater 62 is provided at a different position from the multiple first side heaters 61 in the circumferential direction of the reaction tube 10. For example, the second side heater 62 is provided at the same position as the exhaust duct 40 (around the vacuum piping 30). That is, the second side heater 62 is provided at a position further from the center C1 of the reaction tube 10 than the first side heaters 61. As an example, in a plan view, the second side heater 62 is provided on a virtual straight line extending from the center of the reaction tube 10 through the center of the vacuum piping 30. The second side heater 62 may be divided into multiple sections in the vertical direction. The second side heater 62 heats the vacuum piping 30 and the exhaust duct 40 by thermal radiation, and also heats the substrate W housed inside the reaction tube 10. As a result, the substrate W housed inside the reaction tube 10 is heated from all directions around the reaction tube 10 by the first side heater 61 and the second side heater 62, improving the uniformity of the in-plane temperature.

[0033] Multiple third side heaters 63 are provided at intervals in the circumferential direction around the vacuum pipe 30. For example, each third side heater 63 is provided at a symmetrical position on either side of the second side heater 62 in the circumferential direction of the vacuum pipe 30. Each third side heater 63 may be divided into multiple sections in the vertical direction. In this case, the temperature in the vertical direction can be adjusted independently by independently controlling the divided third side heaters 63.

[0034] The first ceiling heater 64 is installed between the ceiling of the reaction tube 10 and the top 52 of the housing 50. The first ceiling heater 64 heats the substrate W housed inside the reaction tube 10 from above by thermal radiation. There may be one or more first ceiling heaters 64.

[0035] The second ceiling heater 65 is installed between the ceiling portion of the vacuum piping 30 and the top portion 52 of the housing 50. The second ceiling heater 65 heats the vacuum piping 30 from above by thermal radiation. There may be one or two or more second ceiling heaters 65.

[0036] Multiple lower heaters 66 are provided around the lower part of the reaction tube 10, spaced apart in the circumferential direction. These lower heaters 66 are located below the substrate holder 11. The lower heaters 66 heat the lower part of the reaction tube 10 by thermal radiation, suppressing heat dissipation from the opening at the lower end of the reaction tube 10.

[0037] The pressure reducing unit 70 reduces the pressure inside the housing 50. The pressure reducing unit 70 includes piping 71, a safety valve 72, an on / off valve 73, and a vacuum pump 74.

[0038] The piping 71 is connected to a port 53a provided on the side 53 of the housing 50. The piping 71 extends through the side 53 and the device housing 90 to the outside of the device housing 90. A safety valve 72, an on-off valve 73, and a vacuum pump 74 are provided along the piping 71, in that order from the housing 50 side. The safety valve 72, on-off valve 73, and vacuum pump 74 are provided, for example, on the outside of the device housing 90.

[0039] The safety valve 72 opens from a closed state when the internal pressure of the housing 50 exceeds a set pressure, thereby maintaining the internal pressure of the housing 50 below the set pressure. The on / off valve 73 is a valve that switches the gas flow on and off. The vacuum pump 74 reduces the pressure inside the housing 50 through the piping 71.

[0040] When the on-off valve 73 is opened, the vacuum pump 74 reduces the pressure inside the housing 50. When the pressure inside the housing 50 is reduced, heat transfer by convection is suppressed. As a result, heat transfer to the outside of the housing 50 is suppressed. In addition, insulation material becomes unnecessary, and the distance between the reaction tube 10 and the housing 50 can be reduced. Furthermore, if the side heaters (first side heater 61, second side heater 62, third side heater 63) are divided into multiple sections in the vertical direction, there is no influence of convection inside the housing 50, so it becomes less susceptible to the influence of other heaters in the vertical direction. Therefore, the temperature controllability between surfaces (vertical direction) is improved.

[0041] The pressure boosting unit 80 restores the pressure inside the depressurized housing 50 to atmospheric pressure. The pressure boosting unit 80 includes piping 81, a gas source 82, a flow controller 83, and an on / off valve 84.

[0042] The piping 81 is connected to a port 53b provided on the side 53 of the housing 50. The piping 81 extends through the side 53 and the device housing 90 to the outside of the device housing 90. At intermediate points along the piping 81, a gas source 82, a flow controller 83, and an on-off valve 84 are provided in order from the upstream side to the downstream side in the direction of gas flow. The gas source 82, flow controller 83, and on-off valve 84 are provided, for example, outside the device housing 90.

[0043] The gas source 82 is, for example, a source of inert gas. Inert gases include, for example, nitrogen gas and argon gas. The flow controller 83 controls the flow rate of the gas flowing through the piping 81. The flow controller 83 is, for example, a mass flow controller. The on-off valve 84 is a valve that switches the gas flow on and off. When the on-off valve 84 is open, the flow rate of the gas from the gas source 82 is controlled by the flow controller 83, and the controlled flow rate of gas is supplied to the inside of the housing 50. This restores the pressure inside the housing 50, which had been reduced, to atmospheric pressure.

[0044] The device housing 90 surrounds the housing 50 and covers the entire housing 50. The device housing 90 supports the bottom 51 of the housing 50.

[0045] As described above, the vertical heat treatment apparatus 1 is equipped with gas introduction ducts 211 to 218 on the side walls of the reaction tube 10, and injector tubes 221 to 228 are arranged inside these gas introduction ducts 211 to 218. This allows for efficient supply of gas between each substrate W of the reaction tube 10. Furthermore, since the vertical heat treatment apparatus 1 can supply gas from multiple positions (multiple directions) in the circumferential direction of the reaction tube 10, the in-plane shape for film deposition and etching can be easily adjusted.

[0046] The vertical heat treatment apparatus 1 described above requires that, during installation and maintenance, each injector tube 221 to 228 be inserted into each gas introduction duct 211 to 218, and that each injector tube 221 to 228 be sealed and fixed. Furthermore, when installing each injector tube 221 to 228 into each gas introduction duct 211 to 218, it is necessary to align the gas holes 221a to 228a of the injector tubes 221 to 228 with the discharge holes 211a to 218a of the gas introduction ducts 211 to 218. For this reason, the vertical heat treatment apparatus 1 according to this embodiment is configured to adjust and fix each of the tubular injector tubes 220 using a fixing structure 250 (see Figure 5). Note that the fixing structure 250 is not shown in Figure 3.

[0047] The configuration of this fixing structure 250 will be explained in detail below with reference to Figures 5 to 13. Figure 5 is a partial cross-sectional view showing the fixing structure 250 and its surrounding area. As shown in Figure 5, the fixing structure 250 is fixed to the top 52 of the housing 50. The fixing structure 250 includes a first fixing member 260 fixed to the top 52 and a second fixing member 270 capable of holding each injector tube 220 (injector tubes 221 to 228) and fixed to the first fixing member 260. The fixing structure 250 involves inserting the injector tubes 220 into the through holes 260a of the first fixing member 260, which has been positioned and fixed to the top 52, and then placing and fixing the second fixing member 270 on the upper end of the first fixing member 260. This allows the fixed structure 250 to properly position the injector tube 220, which is held by the second fixed member 270, relative to each gas introduction duct 210 (gas introduction ducts 211 to 218) of the reaction tube 10.

[0048] The gas introduction duct 210 of the reaction tube 10 is equipped with tubular ports 2101 that protrude from the top of the reaction tube 10 above the top 52 of the housing 50. Therefore, through holes 52a are pre-provided at the top 52 opposite the gas introduction duct 210, through which each tubular port 2101 can be inserted and positioned. The tubular ports 2101 have positioning holes 2102 that are common (linearly continuous) with the main body of the gas introduction duct 210. The fixing structure 250 is designed to suspend and hold the injector tube 220 by inserting it through these positioning holes 2102.

[0049] Figure 6(A) is a perspective view showing the first fixing member 260 of the fixing structure 250. Figure 6(B) is a partial cross-sectional view showing the bellows 2621 of the body portion 262 of the first fixing member 260. As shown in Figure 6(A), the first fixing member 260 is formed in a substantially cylindrical shape overall. The first fixing member 260 comprises a lower flange 261, a body portion 262, and an upper flange 263, in order from the lower vertical side to the upper vertical side. The first fixing member 260 also has a through hole 260a in its axial center that penetrates the lower flange 261, the body portion 262, and the upper flange 263.

[0050] The lower flange 261 is positioned on the upper surface of the top portion 52. The lower surface of the lower flange 261 is in surface contact with the upper surface of the top portion 52. An annular groove is formed on the lower surface of the lower flange 261, and an O-ring 261a capable of airtight sealing with the upper surface of the top portion 52 is provided in this groove (see Figure 5). In addition, multiple positioning recesses 2612 (for example, four) are provided on the outer circumferential surface of the lower flange 261 for positioning the first fixing member 260 on the top portion 52.

[0051] Furthermore, the lower flange 261 has multiple (three in Figure 6) downward projections 2611 that protrude radially outward from the outer circumferential surface. The three downward projections 2611 are formed at equal intervals (every 120°) along the circumferential direction of the lower flange 261. Each downward projection 2611 has a hole formed through it into which the height adjustment screw 2641 of the first fixing member 260 described later is inserted. A lower nut 2642, washer 2643, etc., which are fitted onto the height adjustment screw 2641, are arranged on the upper surface of each downward projection 2611.

[0052] The body portion 262 is connected to the upper surface of the lower flange 261. The body portion 262 has an outer diameter smaller than the outer diameter of the lower flange 261, while extending long in the vertical direction (axial direction of the first fixing member 260). As shown in Figure 6(B), the body portion 262 is equipped with a bellows-shaped bellows 2621 between the upper ring 2622 and the lower ring 2623 of the body portion 262. The bellows 2621 allows the body portion 262 to expand and contract in the axial direction of the first fixing member 260 while maintaining airtightness of the through hole 260a. This allows the first fixing member 260 to vary the relative height position of the upper flange 263 with respect to the lower flange 261.

[0053] The upper flange 263 is connected to the upper ring 2622 of the body portion 262 and constitutes the portion that fixes the second fixing member 270 at the upper end of the first fixing member 260 (see also Figure 12). The upper surface of the upper flange 263 is formed to be substantially flat. Although not shown in the figures, the upper flange 263 has female screw holes for screwing in the second fixing member 270. In addition, positioning recesses 2632 are provided on the outer circumferential surface of the upper flange 263 at positions corresponding to (overlapping with) the positioning recesses 2612 of the lower flange 261.

[0054] Furthermore, the upper flange 263 has multiple (three in Figure 6) upward protrusions 2631 that project radially outward from the outer circumferential surface. The three upward protrusions 2631 are formed at equal intervals (every 120°) along the circumferential direction of the upper flange 263. Each upward protrusion 2631 has a hole formed through it into which the height adjustment screw 2641 of the first fixing member 260 is inserted. Above each upward protrusion 2631, an upper double nut 2644, a spacer 2645, etc., which are fitted onto the height adjustment screw 2641 are arranged. Below each upward protrusion 2631, a lower double nut 2646 and a spacer 2647, etc., which are fitted onto the height adjustment screw 2641 are arranged.

[0055] One of the upper protrusions 2631 is marked with a marking 2631m to allow the worker to visually confirm the circumferential position of the first fixing member 260. The type of marking 2631m is not particularly limited and may be a straight line extending vertically on the outer circumferential surface of the protruding end of the upper protrusion 2631, as shown in Figure 6.

[0056] The first fixing member 260 is provided with height adjustment parts 264 at locations corresponding to each of the lower protrusions 2611 and upper protrusions 2631. Three height adjustment parts 264 are provided in the circumferential direction of the cylindrical first fixing member 260, corresponding to the three lower protrusions 2611 and three upper protrusions 2631. In addition to each of the lower protrusions 2611 and upper protrusions 2631, the height adjustment parts 264 include height adjustment screws 2641, lower nuts 2642, washers 2643, upper double nuts 2644, spacers 2645, lower double nuts 2646, and spacers 2647.

[0057] The height adjustment screw 2641 is a rod that extends linearly along the vertical direction and has a male threaded portion 2641a on its outer circumferential surface. The male threaded portion 2641a is formed over the entire range from the upper end to the lower end of the height adjustment screw 2641. The axial length of the height adjustment screw 2641 is longer than the axial length of the lower flange 261, the body portion 262, and the upper flange 263 added together. Therefore, when the first fixing member 260 is fixed to the top portion 52, the height adjustment screw 2641 protrudes above the upper flange 263.

[0058] The lower nut 2642 is screwed onto the male threaded portion 2641a of the height adjustment screw 2641 above the lower protrusion 2611. The lower nut 2642 is fixed to the upper surface of the lower protrusion 2611 via a washer 2643, thereby fixing the lower end of the height adjustment screw 2641. The height position of the lower end of the height adjustment screw 2641 is defined by the fastening of the lower nut 2642 and the height adjustment screw 2641.

[0059] The upper double nut 2644 consists of two nuts and is screwed onto the male threaded portion 2641a of the height adjustment screw 2641 above the upper protrusion 2631. The upper double nut 2644 is fixed to the upper surface of the upper protrusion 2631 via the spacer 2645, thereby defining the height position of the upper end of the upper flange 263.

[0060] Similarly, the lower double nut 2646 consists of two nuts and is screwed onto the male threaded portion 2641a of the height adjustment screw 2641 below the upper protrusion 2631. The lower double nut 2646 is fixed so as to support the lower surface of the upper protrusion 2631 via the spacer 2647, thereby defining the height position of the lower end of the upper flange 263.

[0061] Each height adjustment section 264 configured in this way allows for adjustment of the height position of the upper flange 263. As described above, the upper flange 263 is movable relative to the lower flange 261 in the vertical direction by the bellows 2621, so that, for example, the upper end of the gas introduction duct 210 and the upper surface of the upper flange 263 can be set to the same height position. In addition, each height adjustment section 264 can stably maintain the height position of the upper flange 263 by fixing the adjusted upper flange 263 with multiple nuts (upper double nuts 2644, lower double nuts 2646).

[0062] The first fixing member 260 is placed on the top 52 of the housing 50 by an operator inserting the tubular port 2101 of the gas introduction duct 210, which protrudes from the top 52 of the housing 50 in advance, into the through hole 260a (see also Figure 5). In other words, the first fixing member 260 is fixed to the top 52 with the tubular port 2101 inserted through it. Before installing the first fixing member 260, an O-ring 261a is pre-installed in the groove on the lower surface of the lower flange 261 (see also Figure 8(A)).

[0063] Figure 7 is a perspective view showing the installation of the first fixing member 260 on the tubular port 2101 of the top section 52. The worker sequentially attaches the first fixing member 260 to the tubular port 2101 of each gas introduction duct 210 in the circumferential direction (for example, clockwise). In other words, in Figure 7, the first fixing member 260 is attached to the gas introduction ducts 218, 217, 216, 215, 214, 213, 212, and 211 in that order. Although Figure 7 shows the tubular ports 2101 exposed from the top section 52, it is preferable to attach a cylindrical cover (not shown) around each tubular port 2101 before extrapolating the first fixing member 260 when installing the first fixing member 260. This prevents the first fixing member 260 from contacting the tubular port 2101 and damaging it.

[0064] When installing the first fixing member 260, the worker orients the marking 2631m of the first fixing member 260 toward the center of the reaction tube 10 (top section 52). As a result, each first fixing member 260 is installed on the top section 52 with one upward protrusion 2631 facing the center. At the center of the top section 52, there is a conduit for supplying power to the heating section 60, and this conduit can be used as an indicator. Once each first fixing member 260 is installed on the upper surface of the top section 52, bolts 251 (see Figure 5) are temporarily fastened to each positioning recess 2612 of the lower flange 261. Female screw holes for screwing each bolt 251 are pre-formed in the top section 52. The bolts 251 are preferably temporarily fastened through an arc-shaped plate fitting (not shown) that holds the lower flange 261 from above.

[0065] Figure 8(A) is a first longitudinal cross-sectional view showing the procedure for installing the first fixing member 260 on the top 52. Figure 8(B) is a second longitudinal cross-sectional view showing the procedure for installing the first fixing member 260 on the top 52. Figure 9(A) is a third longitudinal cross-sectional view showing the procedure for installing the first fixing member 260 on the top 52. Figure 9(B) is a fourth longitudinal cross-sectional view showing the procedure for installing the first fixing member 260 on the top 52. After placing and temporarily fixing the first fixing member 260 on the upper surface of the top 52, the worker attaches the block jig 265 to the upper end of the first fixing member 260 as shown in Figure 8(A).

[0066] The block jig 265 has a disc portion 2651 and a cylindrical portion 2652 that protrudes briefly from the lower surface of the disc portion 2651. The disc portion 2651 has a diameter approximately the same as the upper flange 263 of the first fixing member 260. The disc portion 2651 is supported by the upper surface of the upper flange 263 when the block jig 265 is installed.

[0067] The cylindrical portion 2652 is inserted into the through hole 260a of the first fixing member 260 when the block jig 265 is attached. The cylindrical portion 2652 has a stepped shape so as to enter between the outer circumferential surface of the tubular port 2101 and the inner circumferential surface of the upper flange 263. The inner diameter of the cylindrical portion 2652 is approximately the same as the outer diameter of the tubular port 2101. As a result, the cylindrical portion 2652 is attached in close contact with the outer circumferential surface of the upper end of the tubular port 2101.

[0068] The worker can align the axis of the tubular port 2101 with the axis of the first fixing member 260 by attaching this block jig 265 between the tubular port 2101 and the first fixing member 260. With the block jig 265 attached, the worker loosens the bolts 251 that were temporarily fastened in the positioning recesses 2612 described above. However, even when loosened, the bolts 251 are still temporarily fastened to the extent that the O-ring 261a of the first fixing member 260 is compressed.

[0069] Then, in this state, as shown in Figure 8(B), the upper double nut 2644 is rotated downwards until the upper end of the tubular port 2101 and the upper surface of the upper flange 263 are at the same height, thereby determining the position of the upper double nut 2644. The upper flange 263 of the first fixing member 260 is supported by the bellows 2621 of the body portion 262, allowing for smooth height adjustment. Furthermore, because the block jig 265 is attached to the tubular port 2101, the upper double nut 2644 can be accurately positioned in the appropriate location while monitoring the positional relationship between the upper surface of the upper flange 263 and the disc portion 2651.

[0070] After positioning the upper double nut 2644, the worker rotates the lower double nut 2646 upwards to determine its position. However, the position of the lower double nut 2646 should be adjusted so that a small gap C is created between it and the lower surface of the upper flange 263 in order to later float the bellows 2621. If the upper double nut 2644 is fixed, the lower double nut 2646 may be removed and then fixed. After positioning the upper double nut 2644 and the lower double nut 2646, it is preferable for the worker to check whether the upper flange 263 can move slightly vertically (float).

[0071] Subsequently, as shown in Figure 9(A), the worker rotates the block jig 265 around its axis to align the axis of the first fixing member 260, whose height has been adjusted by each height adjustment section 264, with the axis of the tubular port 2101 of the gas introduction duct 210. When the axis of the first fixing member 260 and the axis of the tubular port 2101 are aligned, the spacing of the gap into which the cylindrical portion 2652 of the block jig 265 is inserted becomes uniform, and the block jig 265 makes surface contact with strong frictional force. As a result, the more the axes align, the greater the rotational torque of the block jig 265 becomes, and the worker can determine that the axes are aligned by feeling this rotational torque.

[0072] If the axes are aligned, the worker tightens each bolt 251 that was temporarily fastened in that state, and fixes the lower flange 261 to the top part 52. This allows the first fixing member 260 to adjust its height position based on the tubular port 2101, and to align the axis of the tubular port 2101 with the axis of the first fixing member 260.

[0073] After alignment, the worker removes the block jig 265 from the upper end of the first fixing member 260. Then, after removing the block jig 265, the worker checks whether the upper flange 263 can move slightly in the vertical and horizontal directions. In other words, the worker determines whether the upper flange 263 is floating or not.

[0074] Furthermore, if the upper flange 263 is floating, an O-ring 266 is attached as shown in Figure 9(B). The O-ring 266 is mounted on the outer circumferential surface of the tubular port 2101, from the axial upper side to the axial lower side. The O-ring 266 also contacts an inner protrusion formed on the inner circumferential surface of the upper flange 263, forming a seal between this inner protrusion and the outer circumferential surface of the tubular port 2101. As a result, the through hole 260a and the insertion hole 52a of the housing 50 are airtightly closed by the O-ring 266. The installation of the first fixing member 260 to the top portion 52 of the housing 50 is basically carried out as described above.

[0075] Next, the second fixing member 270, which is the other part of the fixing structure 250, will be described with reference to Figures 5 and 10(A) to 10(D). As shown in Figure 5, the second fixing member 270 is configured to hold the injector tube 220 by assembling a plurality of individually separable parts. In detail, the second fixing member 270 includes a first outer cylinder 271, a second outer cylinder 272, an inner cylinder 273, a lower seal 274, and an upper seal 275.

[0076] The worker constructs an integrated form by assembling the components of the second fixing member 270 axially around the upper end of the injector tube 220. Therefore, the description of the second fixing member 270 will explain each component in accordance with the assembly procedure. Figure 10(A) is a first perspective view showing the assembly procedure between the injector tube 220 and the second fixing member 270. Figure 10(B) is a second perspective view showing the assembly procedure between the injector tube 220 and the second fixing member 270. Figure 10(C) is a third perspective view showing the assembly procedure between the injector tube 220 and the second fixing member 270. Figure 10(D) is a fourth perspective view showing the assembly procedure between the injector tube 220 and the second fixing member 270.

[0077] As shown in Figure 10(A), in the assembly of the injector tube 220 and the second fixing member 270, the injector tube 220 is laid on a trolley (not shown). The upper end of the injector tube 220 has a lower groove 2201 and an upper groove 2202 formed in advance, into which the lower seal 274 and upper seal 275 can be fitted. The lower groove 2201 and the upper groove 2202 are formed in an endless manner that circumferentially wraps around the outer surface of the cylindrical injector tube 220. The lower groove 2201 is formed further from the upper end of the injector tube 220 than the upper groove 2202.

[0078] In the assembly of the injector tube 220 and the second fixing member 270, the first outer cylinder 271 is first fitted onto the upper end of the injector tube 220. The first outer cylinder 271 has a cylindrical base 2711 that is slightly thicker than the injector tube 220, and a mounting flange 2712 that protrudes radially outward from one end of the cylindrical base 2711. A through hole 271a is formed on the inside of the cylindrical base 2711, which penetrates the first outer cylinder 271 in the axial direction.

[0079] The mounting flange 2712 is the part that is fixed to the upper flange 263 of the first fixing member 260 described above. For this reason, the mounting flange 2712 is provided with a plurality of bolt recesses 2712a that can accommodate bolts 276 (see Figure 12) for fastening to the first fixing member 260. In addition, a plurality of positioning recesses 2712b are formed on the outer circumferential surface of the mounting flange 2712 in order to align its circumferential phase with the upper flange 263 of the first fixing member 260.

[0080] In assembling the injector tube 220 and the second fixing member 270, the inner cylinder 273 is then fitted onto the upper end of the injector tube 220, as shown in Figure 10(B). However, before assembling the inner cylinder 273, the lower seal 274 (see Figure 5) is first installed in the lower groove 2201 of the injector tube 220. The lower seal 274 is an O-ring that can airtightly seal the space between the outer surface of the injector tube 220 (the bottom surface of the lower groove 2201) and the inner surface of the inner cylinder 273. As shown in Figure 5, the lower seal 274 is positioned to be sandwiched between the inner protrusion of the first outer cylinder 271 and the boundary between the inner cylinder 273.

[0081] In other words, in Figure 10(B), when the inner cylinder 273 is fitted onto the injector tube 220 and reaches the lower seal 274, the first outer cylinder 271, which was inserted earlier, is moved toward the inner cylinder 273. As a result, the lower seal 274 is sandwiched between the inside of the first outer cylinder 271 and the inside of the inner cylinder 273. The diameter of the inner circumferential surface of the first outer cylinder 271 on the tip side of the inner protrusion matches the outer circumferential surface of the inner cylinder 273. Therefore, by inserting the inner cylinder 273 into the through hole 271a of the first outer cylinder 271, the first outer cylinder 271 is fitted with approximately half of the inner cylinder 273. Figure 10(C) shows the configuration in which the upper end of the injector tube 220 is supported by the support jig 280 of the trolley in this fitted state of the first outer cylinder 271 and the inner cylinder 273. The support jig 280 has a semicircular support space 281 capable of accommodating the mounting flange 2712 of the first outer cylinder 271.

[0082] In assembling the second fixing member 270, the second outer cylinder 272 is attached to the first outer cylinder 271 and inner cylinder 273, which are supported by the support jig 280. However, before assembling the second outer cylinder 272, the upper seal 275 (see Figure 5) is first attached to the upper groove 2202 of the injector tube 220. The upper seal 275, like the lower seal 274, is an O-ring and can airtightly seal the space between the outer surface of the injector tube 220 (the bottom surface of the upper groove 2202) and the inner surface of the inner cylinder 273. As shown in Figure 5, the upper seal 275 is positioned to be sandwiched between the inner protrusion of the second outer cylinder 272 and the boundary between the inner cylinder 273.

[0083] As shown in Figure 10(D), the second outer cylinder 272 includes a cylindrical base 2721, an extension pipe 2722 extending for a predetermined length from the center of the end face of the cylindrical base 2721, and a connector 2723 provided at the extension end of the extension pipe 2722. The connector 2723 is a device for airtight connection to each gas introduction pipe 231-238 (see Figure 3). The extension pipe 2722 is a pipe through which gas flows between the connector 2723 and the injector pipe 220. This extension pipe 2722 may be made rigid or flexible.

[0084] The cylindrical base 2721 of the second outer cylinder 272 is the portion connected to the cylindrical base 2711 of the first outer cylinder 271. For this reason, the cylindrical base 2721 is provided with multiple bolt recesses 2721a capable of accommodating bolts 276 (see Figure 12) for fastening to the first outer cylinder 271.

[0085] The second fixing member 270, while housing the inner cylinder 273, lower seal 274, and upper seal 275 inside as described above, connects the first outer cylinder 271 and the second outer cylinder 272, thereby enabling airtight and firm fixing of the injector tube 220. Therefore, even when the injector tube 220 is raised from a lying position to a vertical position, the injector tube 220 is prevented from falling from the second fixing member 270. The second fixing member 270 can hold the injector tube 220 in a suspended state.

[0086] Figure 11 is a partial side cross-sectional view showing the state of assembling the second fixing member 270 to the first fixing member 260 installed on the top 52. As shown in Figure 11, when assembling the second fixing member 270 to the first fixing member 260, the injector tube 220 is inserted from the upper end of the tubular port 2101 and the upper end of the first fixing member 260. At this time, the worker aligns the axis of the injector tube 220 with the axis of the tubular port 2101 and gradually lowers the injector tube 220 vertically downward.

[0087] Then, the first outer cylinder 271 of the second fixing member 270 is placed on the upper flange 263 of the first fixing member 260 provided on the top portion 52, thereby connecting the first fixing member 260 and the second fixing member 270. As a result, a fixing structure 250 connecting the first fixing member 260 and the second fixing member 270 is formed on the upper part of the top portion 52.

[0088] For example, markings 270m are inscribed on the first outer cylinder 271 and the second outer cylinder 272 of the second fixing member 270 (see Figure 12). In assembly with the injector tube 220, the markings 270m on the first outer cylinder 271 and the second outer cylinder 272 are assembled together such that their circumferential phases coincide with the gas holes 221a to 228a of the injector tube 220.

[0089] Furthermore, when connecting the first fixing member 260 and the second fixing member 270, it is preferable to adjust the circumferential position so that the marking 270m coincides with the marking 2631m of the first fixing member 260. As described above, the marking 270m coincides with the circumferential position of the gas holes 221a to 228a of the injector tube 220. Therefore, by aligning the markings 270m and 2631m, the discharge holes 211a to 218a of the gas introduction duct 210 and the gas holes 221a to 228a of the injector tube 220 can be reliably positioned to face each other.

[0090] Figure 12 is a perspective view showing the assembled state of the first fixing member 260 and the second fixing member 270. The first fixing member 260 and the second fixing member 270 are firmly fixed together by bolts 276 screwed into the respective bolt recesses 2721a. As described above, the first fixing member 260 is pre-adjusted by the height adjustment parts 264 so that the height position of the upper flange 263 coincides with the upper end of the tubular port 2101. Therefore, there is no need to adjust the height position after connecting the second fixing member 270 to the first fixing member 260.

[0091] Figure 13 is a partial cross-sectional view showing the state of the gas introduction duct 210 and injector tube 220 with their height positions adjusted. By adjusting the height position of the first fixing member 260, the gas holes 221a to 228a of the injector tube 220, which is held by the second fixing member 270, are positioned to directly face the discharge holes 211a to 218a of the gas introduction duct 210. That is, when the gas flowing through the internal flow path 220a of the injector tube 220 is discharged to the outside of the injector tube 220 from the gas holes 221a to 228a, it immediately moves to the gas holes 221a to 228a of the gas introduction duct 210. Then it is discharged into the reaction tube 10 from the discharge holes 211a to 218a.

[0092] As described above, the vertical heat treatment apparatus 1, with its fixing structure 250 including the first fixing member 260 and the second fixing member 270, can position the injector tube 220 inserted into the gas introduction duct 210 at an appropriate height and firmly maintain that height. In particular, the first fixing member 260 and the second fixing member 270 can hold and fix the injector tube 220 so that its axis aligns with the axis of the gas introduction duct 210. As a result, damage to the members can be reduced as much as possible, and misalignment of the discharge holes 211a to 218a and the gas holes 221a to 228a due to the tilt of the injector tube 220 can be suppressed.

[0093] The vertical heat treatment apparatus 1 according to this embodiment is not limited to the above embodiment and can take various modifications. For example, in the above embodiment, the injector tube 220 and gas introduction duct 210, which are tubular members, are arranged outside the reaction tube 10. However, the vertical heat treatment apparatus 1 may be configured in which the injector tube 220 is arranged inside the reaction tube 10. Alternatively, the vertical heat treatment apparatus 1 may be configured in which the gas introduction duct 210 is not provided in the portion below the ceiling of the reaction tube 10, and the injector tube 220 is exposed.

[0094] Furthermore, the vertical heat treatment apparatus 1 is not limited to an injector tube 220 for tubular members installed outside or inside the reaction tube 10. For example, when installing a tubular member on which multiple detectors of a temperature sensor are arranged to detect the temperature outside or inside the reaction tube 10, the fixing structure 250 may be applied to this tubular member.

[0095] <Note> The technical concept and effects of this disclosure, as described in the embodiments above, are described below.

[0096] A first aspect of the present disclosure is a vertical heat treatment apparatus 1 comprising: a reaction tube 10 capable of accommodating a plurality of substrates W arranged vertically; a heating unit 60 provided outside the reaction tube 10 for heating the plurality of substrates W housed in the reaction tube 10; a tubular member (injector tube 220) installed inside or outside the reaction tube 10; and a fixing structure 250 for fixing the tubular member to a top portion 52 above the heating unit 60, wherein the reaction tube 10 is provided with a tubular port 2101 that protrudes above the top portion 52 and has an internal placement hole 2102 through which the tubular member can be inserted; and the fixing structure 250 comprises a first fixing member 260 fixed to the top portion 52 and arranged around the tubular port 2101; and a second fixing member 270 fixed to the upper end of the first fixing member 260 and capable of holding the tubular member (injector tube 220) inserted into the placement hole 2102.

[0097] The vertical heat treatment apparatus 1 allows for easy and precise installation of the tubular member (injector tube 220) into the reaction tube 10 using the fixing structure 250. Specifically, positioning can be facilitated by first positioning and fixing the lightweight first fixing member 260 to the tubular port 2101. Furthermore, by fixing the second fixing member 270, which holds the heavy tubular member, to the upper end of the positioned first fixing member 260, the position of the tubular member can be adjusted with high precision.

[0098] Furthermore, the first fixing member 260 is equipped with a height adjustment section 264 that can adjust the height position of the second fixing member 270. As a result, the vertical heat treatment apparatus 1 can adjust the height position of the tubular member (injector tube 220) held by the second fixing member 270 by first adjusting the height position of the first fixing member 260 using the height adjustment section 264.

[0099] Furthermore, the first fixing member 260 has a lower flange 261 at one end in the axial direction and an upper flange 263 at the other end in the axial direction, and the height adjustment section 264 includes a height adjustment screw 2641 that connects the lower flange 261 and the upper flange 263, and a plurality of nuts that are screwed onto the height adjustment screw 2641 and define the height positions of the lower flange 261 and the upper flange 263. This allows the worker to more easily adjust the height position of the upper flange 263 using the height adjustment section 264.

[0100] Furthermore, the first fixing member 260 has a bellows 2621 that can extend and retract in the axial direction between the lower flange 261 and the upper flange 263. This allows the fixing structure 250 to maintain the continuity of the first fixing member 260 even when the height position of the first fixing member 260 is adjusted.

[0101] Furthermore, the height adjustment unit 264 adjusts the height position of the upper flange 263 so that the upper surface of the upper flange 263 coincides with the upper end of the tubular port 2101. This simplifies the adjustment of the height position of the first fixing member 260 and improves work efficiency when installing the tubular member (injector tube 220).

[0102] Furthermore, the first fixing member 260 and the second fixing member 270 are formed in a cylindrical shape through which a tubular member (injector tube 220) can be inserted. The first fixing member 260 is fixed to the top portion 52 such that its axis coincides with the axis of the tubular port 2101. The second fixing member 270 is fixed to the first fixing member 260 by inserting the tubular member inside the first fixing member 260 while holding the outer circumferential surface of the tubular member via sealing members (lower seal 274, upper seal 275). As a result, the fixing structure 250 can easily install the tubular member inside the cylindrical first fixing member 260 and second fixing member 270.

[0103] Furthermore, the second fixing member 270 holds the tubular member (injector tube 220) by assembling multiple components such that the sealing members (lower seal 274, upper seal 275) are in contact with the outer surface of the tubular member and sandwiched between them. This enables the second fixing member 270 to hold the tubular member airtightly and stably.

[0104] Furthermore, the tubular member is an injector tube 220 having multiple gas holes 221a to 228a for discharging gas into the reaction tube 10. This allows the vertical heat treatment apparatus 1 to efficiently install the injector tube 220 in the reaction tube 10.

[0105] Furthermore, the reaction tube 10 is equipped with a gas introduction duct 210 that is continuous in the axial direction of the tubular port 2101 and has a plurality of discharge holes 211a to 218a, and the fixing structure 250 holds the injector tube 220 such that a plurality of gas holes 221a to 228a face the plurality of discharge holes 211a to 218a. As a result, the vertical heat treatment apparatus 1 can smoothly introduce the gas discharged from the injector tube 220 into the reaction tube 10 through each of the discharge holes 211a to 218a.

[0106] Furthermore, a second aspect of the present disclosure is a method for installing a tubular member in a vertical heat treatment apparatus 1, which includes a reaction tube 10 capable of accommodating a plurality of substrates W arranged vertically, a heating unit 60 provided outside the reaction tube 10 for heating the plurality of substrates W housed in the reaction tube 10, and a tubular member (injector tube 220) installed inside or outside the reaction tube 10, wherein the reaction tube 10 is provided with a tubular port 2101 that protrudes above a top portion 52 above the heating unit 60 and has an internal placement hole 2102 through which the tubular member can be inserted, and the method comprises the steps of arranging a first fixing member 260 around the tubular port 2101 and fixing the first fixing member 260 to the top portion 52, and inserting the tubular member held by a second fixing member 270 into the placement hole 2102 and fixing the second fixing member 270 to the upper end of the first fixing member 260. Even in this case, the installation method allows for easy and precise installation of the tubular member.

[0107] The vertical heat treatment apparatus 1 and installation method according to the embodiments disclosed herein are illustrative and not restrictive in all respects. The embodiments can be modified and improved in various ways without departing from the scope and spirit of the appended claims. The matters described in the above embodiments can be otherwise configured and combined in a non-consistent manner. [Explanation of Symbols]

[0108] 1. Vertical heat treatment apparatus 10 reaction tubes 52 Heavenly Beings 60 Heating section 220 Injector Tubes 250 Fixed structure 260 First fixing member 270 Second fixing member 2101 Tubular Port 2102 Placement hole W board

Claims

1. A reaction tube capable of housing multiple substrates arranged vertically, A heating unit provided outside the reaction tube for heating the plurality of substrates housed in the reaction tube, A tubular member installed inside or outside the reaction tube, A vertical heat treatment apparatus comprising a fixing structure for fixing the tubular member to the top portion above the heating section, The reaction tube is provided with a tubular port that protrudes above the top and has an internal mounting hole through which the tubular member can be inserted. The aforementioned fixed structure is A first fixing member is fixed to the top portion and positioned around the tubular port, The first fixing member is fixed to the upper end of the first fixing member and includes a second fixing member capable of holding the tubular member inserted through the placement hole, Vertical heat treatment apparatus.

2. The first fixing member includes a height adjustment section that can adjust the height position of the second fixing member. The vertical heat treatment apparatus according to claim 1.

3. The first fixing member has a lower flange at one end in the axial direction and an upper flange at the other end in the axial direction. The height adjustment section includes a height adjustment screw connecting the lower flange and the upper flange, and a plurality of nuts screwed onto the height adjustment screw to define the height positions of the lower flange and the upper flange. The vertical heat treatment apparatus according to claim 2.

4. The first fixing member has a bellows that can expand and contract in the axial direction between the lower flange and the upper flange. The vertical heat treatment apparatus according to claim 3.

5. The height adjustment unit adjusts the height position of the upper flange so that the upper surface of the upper flange coincides with the upper end of the tubular port. The vertical heat treatment apparatus according to claim 3.

6. The first fixing member and the second fixing member are formed in a cylindrical shape through which the tubular member can be inserted, The first fixing member is fixed to the top portion such that its axis coincides with the axis of the tubular port. The second fixing member holds the outer circumferential surface of the tubular member via a sealing member, and the tubular member is inserted inside the first fixing member and fixed to the first fixing member. A vertical heat treatment apparatus according to any one of claims 1 to 5.

7. The second fixing member holds the tubular member by assembling a plurality of components so as to sandwich the sealing member while bringing the sealing member into contact with the outer surface of the tubular member. The vertical heat treatment apparatus according to claim 6.

8. The tubular member is an injector tube having a plurality of gas holes for discharging gas into the reaction tube. A vertical heat treatment apparatus according to any one of claims 1 to 5.

9. The reaction tube comprises a gas introduction duct that is continuous in the axial direction of the tubular port and has a plurality of discharge holes. The fixing structure holds the injector tube such that the gas holes face the discharge holes. The vertical heat treatment apparatus according to claim 8.

10. A reaction tube capable of housing multiple substrates arranged vertically, A heating unit provided outside the reaction tube for heating the plurality of substrates housed in the reaction tube, A method for installing a tubular member in a vertical heat treatment apparatus, which includes a tubular member installed inside or outside the reaction tube, The reaction tube has a tubular port that protrudes above the top portion above the heating section and has an internal mounting hole through which the tubular member can be inserted. The steps include: arranging the first fixing member around the tubular port and fixing the first fixing member to the top portion; The process includes inserting the tubular member held by the second fixing member into the placement hole and fixing the second fixing member to the upper end of the first fixing member. Installation method.

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