Nut member, support member, ball screw device, and processing device

Abstract

We propose a new technology for greasing (replacing lubricant) nut components. [Solution] A nut member moves by the rotation of a screw shaft, and when the nut member moves and comes into contact with a support member that supports one end of the screw shaft, grease is supplied from the support member into the nut member. Furthermore, the supplied grease pushes the grease inside the nut member into the support member.

Description

[Technical Field]

[0001] The present invention relates to a method for greasing a ball screw device. [Background Art]

[0002] Conventionally, as described in, for example, Patent Document 1, it is known that processing apparatuses such as grinding apparatuses, cutting apparatuses, and laser processing apparatuses include a holding unit that holds a workpiece and a processing unit that processes the workpiece.

[0003] These holding unit and processing unit are fixed to a moving base, and the holding unit and the processing unit are moved to predetermined positions by rotating a screw shaft with a motor to linearly move the moving base.

[0004] The moving base is fixed to a nut member, and the nut member moves in the axial direction by the rotation of the screw shaft. Grease (lubricant) is supplied between the nut member and the screw shaft to prevent wear of the balls in the nut member, the circulation groove, and the rolling groove of the screw shaft.

[0005] Since this grease deteriorates, it needs to be replaced with new grease through a maintenance operation called greasing after a predetermined period of time has elapsed. [Prior Art Documents] [Patent Documents]

[0006] [Patent Document 1] Japanese Unexamined Patent Publication No. 2022-172752 [Patent Document 2] Japanese Unexamined Patent Publication No. 2016-215338 [Patent Document 3] Japanese Unexamined Patent Publication No. 2016-146403 [Summary of the Invention] [Problem to be Solved by the Invention]

[0007] Maintenance work for greasing required cumbersome manual labor by the worker. Specifically, this involved tasks such as preparing a grease gun to inject grease into the nut component, connecting the grease gun to the nut component's injection port, and operating the grease gun with both hands.

[0008] Furthermore, during maintenance work, it is necessary to move the nut components (mobile stand) to a position that facilitates work and to perform the work while avoiding interference with other equipment. In addition, the management of work manuals and grease guns imposes a great deal of operational burden, and the skill level of the workers also affects the reliability of the greasing process.

[0009] In view of the above problems, this invention proposes a novel technology for greasing (replacing lubricant) nut components. [Means for solving the problem]

[0010] The problems that this invention aims to solve are as described above, and the means for solving these problems will now be explained.

[0011] According to one aspect of the present invention, a nut member is provided that moves by the rotation of a screw shaft, and when the nut member moves and comes into contact with a support member that supports one end of the screw shaft, grease is supplied from the support member into the nut member.

[0012] Furthermore, according to one aspect of the present invention, the supplied grease pushes the grease inside the nut member into the support member.

[0013] Furthermore, according to one aspect of the present invention, the nut member has a circulation groove formed inside the nut member, a first nipple and a second nipple that connect the outside of the nut member to the circulation groove, and a pressing part for pressing the pressed part of the support member, wherein by pressing the pressed part, grease is pushed out from the support member, the pushed-out grease is supplied into the circulation groove through the first nipple, and the grease in the circulation groove is pushed into the support member through the second nipple.

[0014] Furthermore, according to one aspect of the present invention, there is a support member that supports one end of a screw shaft, wherein when a nut member moves due to the rotation of the screw shaft and comes into contact with the support member, grease is supplied from the support member into the nut member.

[0015] Furthermore, according to one aspect of the present invention, the supplied grease pushes the grease inside the nut member into the support member.

[0016] Furthermore, according to one aspect of the present invention, the support member has a supply chamber and a recovery chamber for containing grease, a supply chamber-side nipple and a recovery chamber-side nipple provided in the supply chamber and the recovery chamber, respectively, and a pressed portion that is pressed by the pressing portion to push grease out from the supply chamber-side nipple, wherein when the pressed portion is pressed by the pressing portion, grease is pushed out from the supply chamber, the pushed-out grease is supplied into the nut member through the supply chamber-side nipple, and the grease in the nut member is pushed out into the recovery chamber port through the recovery chamber-side nipple.

[0017] Further, according to one aspect of the present invention, the supply chamber is provided with an external grease supply port, the recovery chamber is provided with an external grease discharge port, unused grease is supplied from the external grease supply port, used grease is discharged from the external grease discharge port, a cartridge containing unused grease is connected to the external grease supply port, and a cartridge for storing used grease is connected to the external grease discharge port.

[0018] Further, according to one aspect of the present invention, there is provided a ball screw device including a nut member and a support member.

[0019] Further, according to one aspect of the present invention, there is provided a processing device including the ball screw device. Effects of the Invention

[0020] The present invention achieves the following effects. That is, according to one aspect of the present invention, maintenance work for greasing can be easily performed without forcing an operator to perform complicated manual work. In addition, many operational burdens can be reduced, for example, a work manual can be simplified and management of a grease gun becomes unnecessary. Further, regardless of the skill level of the worker, uniform greasing can be performed by anyone, and reliability can be ensured. Brief Description of the Drawings

[0021] [Figure 1] Schematic diagram of a cutting device which is an example of a processing device used for implementing the present invention. [Figure 2] Schematic diagram showing the configuration of a moving mechanism. [Figure 3] Partial cross-sectional view showing the internal structure and the like of a support member. [Figure 4] Partial cross-sectional view taken in direction of arrow A in FIG. 3. [Figure 5] Partial cross-sectional view taken in direction of arrow B in FIG. 3. [Figure 6] Diagram for explaining a state after greasing is started. [Figure 7] A diagram illustrating how the nut component moves to its end position. [Figure 8] A diagram illustrating how the nut component moves away from its end position. [Figure 9] A diagram illustrating the state when the nut component is separated from the support component. [Modes for carrying out the invention]

[0022] Embodiments of the present invention will be described below with reference to the drawings. Figure 1 is a schematic diagram of a cutting apparatus 1, which is an example of a processing apparatus used in carrying out the present invention.

[0023] As shown in Figure 1, the base 4 of the cutting device 1 is provided with a gate-shaped column 6, and a pair of processing units 8 are mounted opposite each other on the column 6. Each processing unit 8 has a cutting blade 8b that is rotationally driven by a motor 8a. Each processing unit 8 is fixed to a moving mechanism 9, 9 and is configured to be positioned at predetermined locations in the Y-axis and Z-axis directions.

[0024] The base 4 is provided with a holding table 12 for holding the wafer W, which is the workpiece. The holding table 12 is fed in the X-axis direction by a moving mechanism 20 that constitutes a ball screw device.

[0025] The moving mechanism 20 is located below the bellows 14, with one end of the screw shaft 21 connected to the support member 22 and the other end connected to the motor 24. When the motor 24 rotates the screw shaft 21, the nut member 23 moves in the X-axis direction. The nut member 23 is fixed to the frame of the holding table 12, and the holding table 12 moves in the X-axis direction together with the nut member 23.

[0026] By positioning the processing unit 8 at predetermined positions in the Y-axis and Z-axis directions, and by feeding the holding table 12 that holds the wafer W in the X-axis direction, the cutting blade cuts into the wafer W and cutting is performed.

[0027] The cutting device 1 is equipped with a controller 3 for controlling each drive unit, such as the motor 8a that drives the processing unit 8 and the motor 24 of the moving mechanism 20.

[0028] The cutting device 1 is equipped with a touch panel 5. By operating the touch panel 5, the operator can arbitrarily make various settings for control by the controller 3. The operator can monitor the operating status of each drive unit and the operating status of the device using the touch panel 5.

[0029] Figure 2 is a schematic diagram showing the configuration of the moving mechanism 20. The moving mechanism 20 constitutes a so-called ball screw device and is composed of a screw shaft 21, a nut member 23 through which the screw shaft 21 is inserted, a support member 22 that supports one end of the screw shaft 21, a support member 25 that supports the other end of the screw shaft 21, and a motor 24 connected to the other end of the screw shaft 21.

[0030] As shown in Figure 2, support members 22 and 25 are installed on a horizontal base member 4a fixed to the base 4 (Figure 1) at intervals in the X-axis direction. Both ends of the screw shaft 21 are supported by bearings (not shown) provided on each support member 22 and 25, and the screw shaft 21 is positioned to extend horizontally. A motor 24 is fixed to one of the support members 25, and the screw shaft 21 is rotationally driven by the motor 24.

[0031] Rolling grooves 21a are formed on the outer surface of the screw shaft 21 so as to extend spirally in the X-axis direction. The screw shaft 21 is inserted through the through hole of the nut member 23, and as the screw shaft 21 rotates, the balls inside the nut member 23 roll in the rolling grooves 21a, causing the nut member 23 to move in the X-axis direction.

[0032] The nut member 23 is fixed to the frame 12a on which the holding table 12 that holds the workpiece is mounted. As a result, the holding table 12 moves in the X-axis direction together with the nut member 23.

[0033] In this embodiment, an example of a moving mechanism 20 for moving the holding table 12 was used for explanation. However, the technology relating to the ball screw device of the present invention can also be applied to, for example, a moving mechanism 9 for moving the processing unit 8 shown in Figure 1, and thus has a wide range of applications.

[0034] Figure 3 is a partial cross-sectional view showing the internal structure of the support member 22, Figure 4 is a partial cross-sectional view in the direction of arrow A in Figure 3, and Figure 5 is a partial cross-sectional view in the direction of arrow B in Figure 3.

[0035] As shown in Figures 3 to 5, the support member 22 has a box-shaped housing 22a equipped with a bearing 22j that supports one end of the screw shaft 21. Inside the housing 22a, there are two spaces separated by an isolation wall 22k. One space is configured as a supply chamber 31 for supplying unused grease, and the other space is configured as a recovery chamber 32 for discharging and recovering used, deteriorated grease. The opening of the housing 22a is closed by a lid 22b, making the supply chamber 31 and the recovery chamber 32 sealed spaces. Note that the housing 22a may not be provided with a bearing 22j.

[0036] The supply chamber 31 side of the housing 22a is provided with a supply chamber port 31a that communicates with the outside, allowing unused grease to be supplied to the outside from the supply chamber port 31a. The supply chamber port 31a is provided with a valve body 31b, a valve seat 31c (O-ring) against which the valve body 31b is pressed, a spring 31d that biases the valve body 31b toward the valve seat 31c, and a valve cylinder portion 31e that houses the valve body 31b and the spring 31d. Except during maintenance, which will be described later, the valve body 31b is configured to close the supply chamber port 31a by the spring 31d.

[0037] A cylindrical portion 31v that communicates with the outside is provided on the supply chamber 31 side of the housing 22a. The cylinder portion 31v is provided with a pressed portion 31g that is pressed by a pressing portion 23g on the nut member 23 side, a valve seat 31h (O-ring) against which the pressed portion 31g is pressed, and a spring 31i that biases the pressed portion 31g toward the valve seat 31h. The pressed portion 31g is composed of, for example, a ball-shaped valve body.

[0038] An external grease supply port 31m is provided on the supply chamber 31 side of the housing 22a, which communicates with the outside. The external grease supply port 31m is provided with a valve body 31n, a valve seat 31p (O-ring) against which the valve body 31n is pressed, a spring 31q that biases the valve body 31n toward the valve seat 31p, and a valve cylinder portion 31r that houses the valve body 31n and the spring 31q, and is configured so that the valve body 31n functions as a check valve.

[0039] The valve cylinder portion 31r of the external grease supply port 31m has a communication hole 31s that connects to the outside, and is configured so that unused grease can be supplied into the external grease supply port 31m through the communication hole 31s. In this embodiment, a resin cartridge 35 that expands and contracts by a bellows is connected to the communication hole 31s, and as will be described in detail later, when the internal pressure of the supply chamber 31 decreases, the cartridge 35 contracts, and the unused grease filled inside is supplied into the supply chamber 31 through the external grease supply port 31m.

[0040] The housing 22a is provided with a recovery chamber port 32a on the recovery chamber 32 side, which is open to the outside, and is configured to allow grease to be recovered into the recovery chamber 32 from the recovery chamber port 32a. The recovery chamber port 32a is provided with a valve body 32b, a valve seat 32c (O-ring) against which the valve body 32b is pressed, a spring 32d that biases the valve body 32b toward the valve seat 32c, and a valve cylinder portion 32e that houses the valve body 32b and the spring 32d. Except during maintenance, which will be described later, the valve body 32b is configured to close the recovery chamber port 32a by the spring 32d.

[0041] An external grease discharge port 32m is provided on the recovery chamber 32 side of the housing 22a, which is connected to the outside. The external grease discharge port 32m is provided with a valve body 32n, a valve seat 32p (O-ring) against which the valve body 32n is pressed, a spring 32q that biases the valve body 32n toward the valve seat 32p, and a valve cylinder portion 32r that houses the valve body 32n and the spring 32q, and is configured so that the valve body 32n functions as a check valve.

[0042] The valve cylinder portion 32r of the external grease discharge port 32m has a communication hole 32s that connects to the outside, and is configured so that deteriorated grease can be discharged to the outside from the external grease discharge port 32m through the communication hole 32s. In this embodiment, a resin cartridge 36 that expands and contracts by a bellows is connected to the communication hole 32s, and as will be described in detail later, when the internal pressure of the recovery chamber 32 increases, deteriorated grease in the recovery chamber 32 can be discharged into the cartridge 36 through the external grease discharge port 32m.

[0043] As shown in Figures 3 to 5, the main body portion 23h of the nut member 23 is formed with a plurality of balls (not shown) that pass through the helical rolling groove 21a (Figure 3) of the screw shaft 21, and an infinite circulation path 23p that causes the balls to roll.

[0044] Both ends of the infinite circulation path 23p, that is, both ends of the screw shaft 21 in the axial direction, and the space between the screw shaft 21 and the screw shaft 21 are sealed with a seal (not shown), preventing the grease inside the infinite circulation path 23p from leaking to the outside. In this embodiment, since it is not necessary to discharge degraded grease through the gap between the infinite circulation path 23p and the screw shaft 21, the sealing performance can be enhanced by making the gap as narrow as possible. Furthermore, by making the gap narrow, the ingress of foreign matter into the infinite circulation path 23p is prevented, and by making the amount of grease adhering to the screw shaft 21 small (thin film), grease scattering is also prevented.

[0045] Furthermore, the main body 23h has an infinite circulation path 23p and flow paths 23x and 23y that connect to the outside, respectively. Check valves 23m and 23n are provided in flow paths 23x and 23y, respectively.

[0046] The check valve 23m provided in one of the flow paths 23x allows unused grease to flow from the support member 22 into the main body 23h (infinite circulation path 23p) of the nut member 23.

[0047] The check valve 23n, provided in the other flow path 23y, allows the flow of deteriorated grease from the main body 23h (infinite circulation path 23p) of the nut member 23 towards the support member 22.

[0048] The main body portion 23h of the nut member 23 is provided with an axial pressing portion 23g for pressing the pressed portion 31g of the support member 22. As will be described in detail later, grease is applied by pressing the pressed portion 31g with the pressing portion 23g.

[0049] The main body portion 23h of the nut member 23 is provided with a first nipple 23b, which is a cylindrical member for pressing the valve body 31b of the supply chamber port 31a of the support member 22. The cylindrical hole of the first nipple 23b forms a port 23c for communicating the flow path 23x with the outside. When the first nipple 23b presses the valve body 31b, the tip of the cylindrical hole of the first nipple 23b opens into the supply chamber 31, allowing grease to move between the supply chamber port 31a and port 23c.

[0050] The main body portion 23h of the nut member 23 is provided with a second nipple 23d, which is a cylindrical member for pressing against the valve body 32b of the recovery chamber port 32a of the support member 22. The cylindrical hole of the second nipple 23d constitutes a port 23e for communicating the flow path 23y with the outside. When the second nipple 23d presses against the valve body 32b, the tip of the cylindrical hole of the second nipple 23d opens into the recovery chamber 32, allowing grease to move between the recovery chamber port 32a and port 23e.

[0051] In the above configuration, for example, the pressing portion 23g (Figure 3) may be integrally provided with the pressed portion 31g on the support member 22 side, and the pressing portion 23g may be pressed by the nut member 23. Alternatively, for example, the first nipple 23b (Figure 3) may be integrally provided on the valve body 31b on the support member 22 side as a supply chamber side nipple, and the supply chamber side nipple may be pressed by the nut member 23. Alternatively, for example, the second nipple 23d (Figure 5) may be integrally provided on the valve body 32b on the support member 22 side as a recovery chamber side nipple, and the recovery chamber side nipple may be pressed by the nut member 23.

[0052] Next, we will explain how to perform greasing using the above configuration. This greasing process involves replacing the grease that lubricates the inside of the nut components, and can be performed as part of regular maintenance or at any time at the user's discretion.

[0053] For example, during maintenance, the operator can activate the greasing mode by operating the touch panel 5 shown in Figure 1. Alternatively, this mode may be automatically executed by the controller 3 according to a predetermined schedule, rather than being activated by the operator. As described below, for example, the series of operations shown in Figures 6 to 9 may be performed automatically (fully automatic) by the controller 3 (Figure 1) through touch panel operation by the operator (automatic greasing).

[0054] To explain in more detail, as shown in Figure 1, when the greasing mode is started, the controller 3 drives the motor 24 of the moving mechanism 20 to move the nut member 23 toward the support member 22.

[0055] Then, as shown in Figure 6, when the nut member 23 reaches the support member 22, the pressing part 23g presses against the pressed part 31g, increasing the pressure of the unused grease filled in the supply chamber 31. At the same time, the first nipple 23b presses against the valve body 31b, opening the port 23c to the supply chamber 31, and the increased-pressure unused grease flows into the port 23c. The unused grease then pushes open the check valve 23m and is supplied into the infinite circulation path 23p.

[0056] On the other hand, as shown in Figure 6, the other second nipple 23d presses against the valve body 32b, opening the port 23e to the recovery chamber 32. At this time, the degraded grease, which has been pushed out of the infinite circulation path 23p by the supply of unused grease, pushes open the check valve 23n and is discharged into the recovery chamber 32 through the port 23e.

[0057] Furthermore, when the degraded grease is discharged into the recovery chamber 32, the pressure of the degraded grease that originally filled the recovery chamber 32 is increased. The increased pressure of the degraded grease pushes open the valve body 32n and is discharged into the cartridge 36.

[0058] As described above, unused grease is supplied from the supply chamber 31 to the nut member 23 (infinite circulation path 23p), and deteriorated grease is discharged from the nut member 23 (infinite circulation path 23p) to the recovery chamber 32, and further discharged to the cartridge 36, thereby enabling the nut member 23 to be greased.

[0059] As shown in Figure 7, the controller 3 (Figure 1) moves the nut member 23 to the end position (the position closest to the support member 22) and then stops driving the motor 24. Greasing continues until the nut member 23 reaches the end position.

[0060] Next, the controller 3 (Figure 1) moves the nut member 23 away from the support member 22 so that it changes from the state in Figure 7 to the state in Figure 8. At this time, the pressed portion 31g is pressed by the spring 31i and the valve body 31b is pressed by the spring 31d, which reduces the pressure of the unused grease in the supply chamber 31. Consequently, the valve body 31n opens and the unused grease in the cartridge 35 is supplied into the supply chamber 31.

[0061] Furthermore, in this process, the degraded grease recovered in the recovery chamber 32 does not flow back into the nut member 23 due to the check valve 23n, and the degraded grease recovered in the cartridge 36 does not flow back into the recovery chamber 32 due to the valve body 32n (check valve).

[0062] Next, the controller 3 (Figure 1) moves the nut member 23 further away from the support member 22 so that it changes from the state in Figure 8 to the state in Figure 9. In the state in Figure 9, the valve seat 31h is closed by the pressed portion 31g, and the valve seat 31c (supply chamber port 31a) is closed by the valve body 31b, thereby sealing the supply chamber 31. Similarly, the recovery chamber 32 is sealed by the valve seat 32c (recovery chamber port 32a) being closed by the valve body 32b.

[0063] As described above, by performing the steps from Figure 6 to Figure 9, the grease lubricating the infinite circulation path 23p within the nut member 23 can be replaced. Alternatively, for example, by repeating the steps from Figure 6 to Figure 9 multiple times, a larger amount of grease can be replaced.

[0064] When the amount of unused grease in cartridge 35 decreases due to greasing, it is replaced with a new cartridge containing unused grease, or removed and refilled. Also, when deteriorated grease accumulates in cartridge 36, it is replaced with an empty cartridge, or removed and the deteriorated grease is discarded.

[0065] Furthermore, since the timing for replacing the cartridges depends on the number of times the process from Figure 6 to Figure 9 is performed (the number of times the nut member moves back and forth, i.e., the number of times grease is applied), the number of times this process is performed can be counted, and when a predetermined number is reached, the touch panel 5 (Figure 1) can be displayed to indicate that it is time to replace cartridges 35 and 36, prompting the user to replace them.

[0066] Furthermore, in configurations using resin cartridges 35 and 36 that expand and contract using bellows, touch sensors may be provided to detect the expansion and contraction state of cartridges 35 and 36. These sensors can detect the remaining amount of unused grease and the amount of degraded grease recovered, and the touch panel 5 (Figure 1) may display that it is time to replace cartridges 35 and 36, prompting the user to replace them.

[0067] The present invention can be implemented in the manner described above. In other words, in the configuration shown in Figure 1, the nut member 23 is moved by the rotation of the screw shaft 21, and when the nut member 23 comes into contact with the support member 22 that supports one end of the screw shaft 21, grease is supplied from the support member 22 into the nut member, thereby greasing the nut member, thus providing a method for greasing a ball screw device.

[0068] This eliminates the need for cumbersome manual work by operators, making greasing maintenance easy. Furthermore, it simplifies the work manual and eliminates the need for grease gun management, significantly reducing operational burden. Additionally, it ensures consistent greasing regardless of the operator's skill level, guaranteeing reliability. [Explanation of symbols]

[0069] 1 Cutting equipment 3 Controllers 5 Touch panel 6 Columns 8 Processing Units 9 Moving mechanism 12 Holding Table 12a Mounting frame 14 Bellows 20 Moving mechanism 21 Screw shaft 21a Rolling groove 22 Support member 22a Housing 22b Lid 23 Nut component 23b First Nipple 23c port 23d Second nipple 23e port 23g pressure point 23m Check valve 23n Check valve 23p infinite circulation path 23x flow path 23y flow path 24 motors 25 Support member 31 Supply room 31a Supply room port 31b Valve body 31c valve seat 31d spring 31e Valve cylinder part 31g Pressed area 31h valve seat 31i Springs 31m external grease supply port 31n valve body 31p valve seat 31q Spring 31r Valve cylinder part 31s communication hole 31V Cylinder section 32 Collection Room 32a Recovery Room Port 32b Valve body 32c valve seat 32d spring 32e Valve cylinder part 32m external grease discharge port 32n valve body 32p valve seat 32q spring 32r Valve cylinder part 32s communication hole 35 cartridges 36 cartridges Mg unused grease Rg degraded grease W wafer

Claims

1. A nut member that moves by the rotation of the screw shaft, When the nut member moves and comes into contact with the support member that supports one end of the screw shaft, Grease is supplied from the support member into the nut member. Nut component.

2. The supplied grease pushes the grease inside the nut member into the support member. The nut member according to feature 1.

3. The nut member is, A circulation groove formed inside the nut member, A first nipple and a second nipple connect the outside of the nut member to the circulation groove, respectively. A pressing portion for pressing the portion of the support member to be pressed, It has, By pressing the part to be pressed with the pressing part, grease is pushed out from the support member. The extruded grease is supplied into the circulation groove through the first nipple. The grease in the circulation groove is pushed out into the support member through the second nipple. The nut member according to claim 1 or 2.

4. A support member that supports one end of a screw shaft, When the nut member moves due to the rotation of the screw shaft and comes into contact with the support member, Grease is supplied from the support member into the nut member. Support member.

5. The supplied grease pushes the grease inside the nut member into the support member. The support member according to feature 4.

6. The support member is, Each has a supply chamber and a recovery chamber for storing grease, The supply chamber and the recovery chamber are provided with a supply chamber-side nipple and a recovery chamber-side nipple, respectively. A pressed portion that is pressed by the pressing portion to push grease out from the supply chamber side nipple, It has, When the pressed portion is pressed by the pressing portion, grease is pushed out from the supply chamber. The extruded grease is supplied into the nut member through the supply chamber side nipple. The grease inside the nut member is pushed out into the recovery chamber port through the recovery chamber side nipple. The support member according to claim 4 or 5.

7. The supply chamber is provided with an external grease supply port. The recovery chamber is provided with an external grease discharge port. Unused grease is supplied from the external grease supply port. Used grease is discharged from the external grease discharge port. An unused grease cartridge is connected to the external grease supply port. A cartridge for collecting used grease is connected to the external grease discharge port. The nut member according to feature 6.

8. A ball screw device comprising a nut member according to claim 1 or claim 2 and a support member according to claim 4 or claim 5.

9. A ball screw device comprising a nut member according to claim 3 and a support member according to claim 6.

10. A ball screw device comprising a nut member according to claim 1 or claim 2 and a support member according to claim 7.

11. A ball screw device comprising a nut member according to claim 3 and a support member according to claim 7.

12. A processing apparatus characterized by comprising the ball screw device described in claim 8.

13. A processing apparatus characterized by comprising the ball screw device described in claim 9.

14. A processing apparatus characterized by comprising the ball screw device described in claim 10.

15. A processing apparatus characterized by comprising the ball screw device described in claim 11.

16. The nut component is moved by the rotation of the screw shaft. When the nut member comes into contact with the support member that supports one end of the screw shaft, By supplying grease from the support member into the nut member, A method for greasing a ball screw device, specifically for greasing the nut component.

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