Modularized gas pollutant treatment device and method for assembling the same

Abstract

The present invention provides a modularized gas pollutant treatment device and a method for assembling the same. [Solution] A modularized gaseous pollutant processing apparatus comprising a frame 101, a pump assembly 20, a reactor assembly 40, an electronic and control assembly 50, a second fluid transport assembly 80, and a housing. The frame comprises a first region, a second region adjacent to the first region, and a third region adjacent to the first region, each of which has an external mounting opening. The reactor assembly is detachably connected to the pump assembly. The electronic and control assembly is detachably connected to the reactor assembly. The processing apparatus allows the pump assembly, reactor assembly, and electronic and control assembly to be mounted laterally into the first region, second region, and third region, respectively, through the mounting openings.

Description

Technical Field

[0001] The present invention relates to the technical field of gas pollutant treatment devices, and in particular to a modular gas pollutant treatment device and an assembling method therefor.

Background Art

[0002] Manufacturing, electronic and chemical processes, such as processes for semiconductors, displays, solar panels, thin films and the like, all generate gas pollutants containing various chemical substances harmful to the human body or the environment, so it is necessary to additionally provide a gas pollutant treatment device. Combustion type, plasma type, water washing type, catalytic type and the like are common, and conventionally, devices such as those disclosed in U.S. Patent Publication Nos. US5769626A, US11512688B2, US11519401B2, US11530694B2 and U.S. Patent Application Publication No. US20240310041A1 are known.

[0003] Combustion and water-washing type gas pollutant treatment devices frequently used in semiconductor processes need to be equipped with a reactor, a scrubber, a gas supply assembly, a fluid supply assembly, a water tank, an electronic control device and the like, and further require pipe connection and housing assembly, which involve a large amount of mechanical assembly, fluid pipe connection, electronic wiring and the like, have a complicated structural configuration, are difficult to assemble, require a lot of labor, time and other costs. In addition, there is a tendency that dimensions are increasingly required to be compactly designed, the density of hardware in a box body becomes higher and higher, which further increases the difficulty in assembly.

Summary of the Invention

Problem to be Solved by the Invention

[0004] The main object of the present invention is to solve the problem that conventional gas pollutant treatment devices are not easy to assemble.

Means for Solving the Problem

[0005] To solve the above problems, the present invention discloses a modularized gaseous contaminant processing apparatus, comprising a frame, a pump assembly, a reactor assembly, electronic and control assemblies, a fluid transport assembly, and a housing. The frame comprises a plurality of connecting members assembled together and a plurality of spaces defined by these connecting members, comprising a first region, a second region adjacent to the first region, and a third region adjacent to the first region, each of which has an external mounting opening. The pump assembly is provided in the first region. The reactor assembly comprises an exhaust gas guide, a first-stage reactor, a second-stage reactor, and a water tank, wherein the exhaust gas guide is detachably connected to the first-stage reactor to introduce exhaust gas into the first-stage reactor, the water tank is connected downstream of the first-stage reactor, and the second-stage reactor is connected to the water tank to receive the exhaust gas that has passed through the water tank, where the reactor assembly is detachably connected to the pump assembly and is provided in the second region. The electronic and control assembly is detachably connected to the reactor assembly and is located in the third region. The fluid transport assembly is detachably connected to the reactor assembly and includes a plurality of conduits configured to supply cooling water to the reactor assembly, discharge the cooling water from the reactor assembly, supply fresh water to the first-stage reactor and / or the second-stage reactor, and supply circulating water to the water tank. The housing is provided in the frame and seals these spaces and includes a plurality of cover plates which are detachably mounted on the connecting members to expose or close the mounting openings, where the cover plates include an exhaust gas inlet, an exhaust gas outlet, and a gas inlet, the exhaust gas inlet being connected to the exhaust gas guide device, the exhaust gas outlet being connected downstream of the second-stage reactor, and the gas inlet being connected to the fluid transport assembly. Here, the frame extends along the first transverse direction, the second transverse direction, and the vertical direction to define the boundary between the housing and the modularized gas pollutant treatment device.Here, the modularized gaseous contaminant processing apparatus is configured such that when the cover plate is removed and the mounting opening is opened, the pump assembly, the reactor assembly, and the electronic and control assemblies are mounted laterally into the first, second, and third regions, respectively, through the mounting opening.

[0006] To solve the above problems, the present invention further discloses a method for assembling a gas pollutant treatment apparatus, providing a frame comprising a plurality of connecting members assembled together and a plurality of spaces defined by these connecting members, the spaces comprising a bottom space, a first upper space located above the bottom space and a second upper space laterally adjacent to the first upper space, the spaces each having laterally connected mounting openings communicating with the outside; feeding a pump assembly, a reactor assembly and an electronic and control assembly into the bottom space, the first upper space and the second upper space, respectively, through these mounting openings, wherein the mounting orientations into these spaces for the reactor assembly, the electronic and control assembly and the pump assembly are independent of each other; connecting one or more accessory assemblies to the pump assembly, the reactor assembly and the electronic and control assembly; and forming a box by mounting a plurality of removable plates to the frame and closing the mounting openings. [Brief explanation of the drawing]

[0007] [Figure 1] This is a schematic perspective view of one embodiment of the present invention. [Figure 2] This is a schematic perspective view of one embodiment of the present invention with the housing removed. [Figure 3] This is an exploded schematic diagram of the frame and housing in one embodiment of the present invention. [Figure 4A] This is a schematic perspective view of a frame according to one embodiment of the present invention. [Figure 4B] This is a schematic perspective view of a frame according to one embodiment of the present invention. [Figure 5A] This is a schematic top view of Figure 4B. [Figure 5B] Figure 4B is a schematic side view. [Figure 6A] This is a schematic assembly diagram of one embodiment of the present invention. [Figure 6B] This is a schematic assembly diagram of one embodiment of the present invention. [Figure 6C] This is a schematic assembly diagram of one embodiment of the present invention. [Figure 6D] This is a schematic assembly diagram of one embodiment of the present invention. [Figure 6E] This is a schematic assembly diagram of one embodiment of the present invention. [Figure 6F] This is a schematic assembly diagram of one embodiment of the present invention. [Figure 6G] This is a schematic assembly diagram of one embodiment of the present invention. [Figure 6H] This is a schematic assembly diagram of one embodiment of the present invention. [Figure 7] This is a schematic perspective view of another embodiment of the present invention. [Figure 8A] This is a schematic perspective view of another embodiment of the present invention with the housing removed. [Figure 8B] This is a schematic perspective view of another embodiment of the present invention with the housing removed. [Figure 9A] This is a schematic perspective view of a frame of another embodiment of the present invention. [Figure 9B] This is a schematic perspective view of a frame of another embodiment of the present invention. [Modes for carrying out the invention]

[0008] In this specification, the terms used in the description of each embodiment are intended to describe specific examples and are not intended to be limiting. Unless the context clearly suggests otherwise, or unless the number of components is intentionally limited, the singular forms “one,” “one,” and “the” used herein also include the plural forms. On the other hand, the terms “equipped with” and “include” are intended to include and mean that additional components other than those described may exist. When one component is described as being “connected” or “joined” to another component, that component may be connected or joined to the other component directly or via an intermediate component. When a component of a layer, region, or substrate is said to be “on” another component, it means that it is directly on the other component or that there are intermediate components between them; conversely, when a component is said to be “directly on another component,” there are no intermediate components between them. Furthermore, the order in which the descriptions of each embodiment are described should not be construed as suggesting that operations or steps must necessarily depend on a literal order, and in alternative embodiments, steps, operations, methods, etc., may be performed in an order different from that described herein.

[0009] One aspect of the present invention discloses a gas pollutant treatment device, which is applicable to the treatment of effluent streams, such as exhaust gases, from processes such as semiconductors, display panels, and solar panels. Figures 1 and 2 show an example of a gas pollutant treatment device according to the present invention, which is a combustion and water-wash type exhaust gas treatment device, and furthermore, the exhaust gas treatment device may employ a technology that uses a plasma flame or a flame generated by a fuel for combustion. For example, pollutants such as silane, arsine, and phosphine generated in chemical vapor deposition (CVD) processes are suitable for use with a combustion and water-wash type exhaust gas treatment device. The present invention is not limited thereto, and the gas pollutant treatment device may be a combustion type exhaust gas treatment device, a wet type exhaust gas treatment device, a plasma type exhaust gas treatment device, a plasma vaporization exhaust gas treatment device, or any combination thereof. For example, for perfluorocarbon (PFC) gases (e.g., CF4) or other pollutants such as SF6, NF3, and N2O, a plasma type exhaust gas treatment device is suitable.

[0010] Gas contaminant treatment systems typically include hardware such as gas pipelines, reactors, scrubbers, water tanks, pumps, pipelines for transporting fluids (e.g., fuel, air, water, etc.), valves, gas panels, detectors, and electronic control systems. This hardware is assembled within a casing to form a point-of-use abatement system. Due to considerations such as clients' demands for space utilization efficiency and maximizing production capacity, the volume occupied by gas contaminant treatment systems tends to become more compact, which increases the difficulty of assembly. In other words, a considerable amount of manpower and labor is required to install and connect the above-mentioned hardware within the casing. The gas contaminant treatment system disclosed in this invention adopts a modular structural design, making it easy to assemble and significantly reducing the assembly time and manpower required.

[0011] FIG. 1 shows an apparatus for treating gaseous pollutants, comprising a box body 10 and a plurality of modules, wherein the box body 10 comprises a frame body 101 and a housing 102, the housing 102 comprises a plurality of plate bodies, and the housing 102 is detachably attached to the frame body 101; FIG. 2 shows the apparatus for treating gaseous pollutants after the housing 102 is removed. The modules comprise a pump assembly 20, one or more microwave sources 30, a reactor assembly 40, an electronic and control assembly 50, a gas supply system 60, a first fluid transport assembly 70 and a second fluid transport assembly 80. Since this example is a plasma exhaust gas treatment apparatus, it comprises the microwave source 30, and other examples of the present invention are not limited thereto.

[0012] FIG. 3 is an exploded schematic view of the frame body 101 and the housing 102, wherein the housing 102 comprises a plurality of cover plates, and the cover plates comprise a right cover plate 1021, a left cover plate 1022, a top cover plate 1023, a front end cover plate 1024, a rear end cover plate 1025 and a bottom cover plate 1026. In this example, the front end cover plate 1024 serves as an operation area and the top cover plate 1023 serves as a gas inlet and outlet area, and the front end cover plate 1024 comprises a right side portion 1024a and a left side portion 1024b. The front end cover plate 1024 can further be provided with one or more physical buttons and an operation interface, for example a combination of a display screen and an input interface, or a display screen provided with an input interface, such as a touch screen. An exhaust gas inlet portion 1023a, an exhaust gas outlet portion 1023b and a gas inlet portion 1023c are provided on the top cover plate 1023. In one example, a drainage portion is further provided on the cover plate, and the drainage portion is connected to the pump assembly 20.

[0013] FIG. 4A shows the structural arrangement of the frame body 101, the frame body 101 includes a plurality of connecting members, the connecting members may be rod bodies, and these connecting members are combined to form a bottom structure 101a, a top structure 101b and an intermediate structure 101c, the bottom structure 101a includes a bottom outer frame 101a-1 and one or more bottom cross rods 101a-2, the top structure 101b includes a top outer frame 101b-1, and may selectively include one or more top cross rods, the intermediate structure 101c includes an intermediate outer frame 101c-1, the intermediate outer frame 101c-1 is composed of a plurality of straight rods, these straight rods are erected between the bottom outer frame 101a-1 and the top outer frame 101b-1, the frame body 101 may further include one or more cross rods connected to the intermediate outer frame 101c-1, thereby defining a plurality of regions located in the box body 10 and openings for communicating these regions with the outside.

[0014] Referring to FIG. 4B, a plurality of spaces 110 are defined in the box body 10, the spaces 110 include a first bottom space 1101, a second bottom space 1102, a third space 1103, a fourth space 1104 and a top space 1105, these spaces are cubes with different dimensions and are adjacent to each other, forming a compact arrangement. Furthermore, the third space 1103 and the fourth space 1104 are respectively located above the first bottom space 1101 and the second bottom space 1102 and adjacent to each other in the longitudinal direction (Z-axis direction), the third space 1103 is adjacent to the fourth space 1104 in the transverse direction (X-axis direction), the top space 1105 is located above the fourth space 1104 and adjacent to each other in the longitudinal direction (Z-axis direction), and the top space 1105 is adjacent to the third space 1103 in the transverse direction (X-axis direction). The right side portion 1024a of the front end cover plate 1024 corresponds to the first bottom space 1101 and the third space 1103, and the left side portion 1024b corresponds to the second bottom space 1102, the fourth space 1104 and the top space 1105.

[0015] In this example, the frame 101 adopts a cubic arrangement and has a top surface 10a, a bottom surface 10b, a front surface 10c, a rear surface 10d, a left side surface 10e, and a right side surface 10f. As shown in Figures 5A and 5B, the frame 101 has a first length L1, a second length L2, and a third length L3. Referring also to Figure 4A, the lateral rods of the frame 101 include a first lateral rod 101d-1, a second lateral rod 101d-2, a third lateral rod 101d-3, a fourth lateral rod 101d-4, a fifth lateral rod 101d-5, and a sixth lateral rod 101d-6. The first lateral rod 101d-1 and the second lateral rod 101d-2 are located below the front surface 10c and the rear surface 10d, and the third lateral rod 101 d-3 and the fourth transverse rod 101d-4 are provided above the front side surface 10c and the rear side surface 10d, the fifth transverse rod 101d-5 is mounted on the first transverse rod 101d-1 and the second transverse rod 101d-2, is located between the left side surface 10e and the right side surface 10f and is close to the right side surface 10f, and the sixth transverse rod 101d-6 is located on the left side surface 10e and is mounted on the intermediate outer frame 101c-1.

[0016] The length of the first bottom space 1101, the second bottom space 1102, the third space 1103, the fourth space 1104, and the top space 1105 in the Y-axis is from the front side surface 10c to the rear side surface 10d, i.e., approximately equal to the second length L2. The length of the first bottom space 1101, the second bottom space 1102, the third space 1103, and the fourth space 1104 in the X-axis is from the right side surface 10f and the left side surface 10e, respectively, to 30% to 70% of the first length L1, and these lengths may vary depending on the design. The X-axis lengths of the first bottom space 1101 and the second bottom space 1102 may be complementary to each other, and the X-axis lengths of the third space 1103 and the fourth space 1104 may also be complementary to each other, for example the lengths of the first bottom space 1101 and the second bottom space 1102 are 45% and 55% of the first length L1, respectively, and they may also be independent of each other, for example 40% each. On the other hand, the X-axis lengths of the first bottom space 1101 and the third space 1103 may be the same or different, and the X-axis lengths of the second bottom space 1102 and the fourth space 1104 may be the same or different.

[0017] The length of the first bottom space 1101 and the second bottom space 1102 along the Z axis is from the bottom surface 10b to 10% to 30% of the third length L3, and this length may vary depending on the different design, for example it may be between 5% and 50%, and in this example it is between approximately 10% and 15%, and the lengths of the first bottom space 1101 and the second bottom space 1102 along the Z axis may be the same or different, and the third space 1103 and the second The length of the four spaces 1104 along the Z axis starts from the tops of the first bottom space 1101 and the second bottom space 1102, respectively, the length of the third space 1103 along the Z axis extends to the top surface 10a, and the length of the fourth space 1104 along the Z axis ends between 50% and 90% of the third length L3, the length of which may vary depending on the different design, for example, between 40% and 95%, and in this example between approximately 75% and 85%.

[0018] The length of the top space 1105 in the X-axis is from the left side surface 10e to 30% to 70% of the first length L1, and this length may vary depending on the different design, for example it may be between 20% and 80%, and in this example it is between approximately 45% and 55%, and the lengths of the top space 1105 and the third space 1103 in the X-axis may be complementary or independent of each other. The length of the top space 1105 in the Z-axis is from the top of the fourth space 1104 to the top surface 10a.

[0019] The frame 101 also defines a plurality of openings that communicate with these areas, including a first front opening 1010, a second front opening 1011, a third front opening 1012, a first right-side opening 1013, a second right-side opening 1014, a first left-side opening 1015, a second left-side opening 1016, a first rear-side opening 1017, a second rear-side opening 1018, and a third rear-side opening 1019.

[0020] Returning to Figure 2, in the spatial arrangement of the modules of the gas pollutant treatment apparatus, the main volume is occupied by the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, and the gas supply system 60. In the present invention, these modules employ a modular design, particularly the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, and the gas supply system 60, where the pump assembly 20 is located in the first bottom space 1101, the microwave source 30 is located in the second bottom space 1102, the reactor assembly 40 is located in the third space 1103, the electronic and control assembly 50 is located in the fourth space 1104, and the gas supply system 60 is located in the top space 1105. By aligning the spatial arrangement of these areas and the relative positions of these modules, a more compact structural arrangement can be achieved. At the same time, these openings can be utilized to facilitate assembly by assembly workers or robotic arms, significantly reducing assembly time and the amount of manpower required.

[0021] The connections between these modules relate to fluid and electrical connections, and the pump assembly 20, the microwave source 30, the reactor assembly 40, and the gas supply system 60 are electrically connected to and controlled by the electronics and control assembly 50. The reactor assembly 40 includes an exhaust gas guide 41, a first-stage reactor 42, a second-stage reactor 43, and a water tank 44, the first-stage reactor 42 and the second-stage reactor 43 being removablely mounted above the water tank 44, the exhaust gas guide 41 being connected to the exhaust gas source of the process and removablely connected above the first-stage reactor 42, the exhaust gas guide 41 being used to introduce exhaust gas from the semiconductor process equipment from top to bottom into the first-stage reactor 42, the water tank 44 being connected downstream of the first-stage reactor 42, the exhaust gas flowing from the first-stage reactor 42 from top to bottom into the water tank 44, and further flowing from the water tank 44 from bottom to top into the second-stage reactor 43, and finally being discharged from the exhaust port of the second-stage reactor 43.

[0022] The first-stage reactor 42 and the second-stage reactor 43 each include one or more interconnected reaction modules that are independent of each other, and the reaction modules may, but are not limited to, combustion reactors, wet reactors, plasma combustion reactors, plasma vaporization reactors, and / or thermal reactors. In this example, the first-stage reactor 42 is a combustion reactor, which may be a plasma combustion reactor or a plasma vaporization reactor, and the second-stage reactor 43 is a packed scrubber.

[0023] In the gas contaminant treatment apparatus of this example, the required gases include an inert gas (e.g., nitrogen gas) and compressed air (CDA), and the required liquids include fresh water and cooling water. The inert gas can be used for purposes such as opening and closing fluid valve switches, detecting differential pressure, and / or cleaning the gas inside. The compressed air can be used in the plasma reactor, for example, to collide with the exhaust gas after it has been plasma-formed, thereby further decomposing the exhaust gas and / or providing airflow, taking advantage of the formation of a swirling airflow on the inner wall of the pipe, thereby avoiding the problem of the inner wall overheating and being damaged. In some embodiments, the compressed air may be replaced with an inert gas. The gases are connected to the reactor assembly 40 and / or fluid valves via the gas supply system 60 and piping, the fresh water is used for the water curtain and / or water tank 44 of the reactor (the first-stage reactor 42 and / or the second-stage reactor 43), and the cooling water is used to cool the reactor assembly 40.

[0024] The pump assembly 20 is connected to the water tank 44 of the reactor assembly 40 via one or more conduits and can be electrically connected to the electronic and control assembly 50, and the pump assembly 20 is used for circulating and / or discharging the water flow in the water tank 44, and the microwave source 30 is connected to one or more plasma modules of the first stage reactor 42, in this example there are two sets of microwave sources 30 and plasma modules, and they can be connected via waveguides or cables. The electronic and control assembly 50 is electrically connected to an external control interface and to one or more of the modules and their associated assemblies, for example, to the pump assembly 20, the microwave source 30, the valves and detectors of the reactor assembly 40, the gas supply system 60, the valves and detectors of the first fluid transport assembly 70 and the second fluid transport assembly 80, etc.

[0025] Figures 6A to 6H show schematic assembly flowcharts of this example. When assembling, the housing 102 is removed from the frame 101, i.e., the housing 102 is not attached to the frame 101, as shown in Figure 6A. The housing 102 may be partially connected to the frame 101, but one or more of these openings are exposed. The gas contaminant processing device employs a modular assembly, i.e., the modules such as the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, and the gas supply system 60 are first provided separately, in other words, the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, and the gas supply system 60 are independent modules that are not (physically) connected to each other before being placed in the frame 101. In this example, the bottom cover plate 1026 is first attached to the bottom surface 10b of the frame 101, and then attached to or fixed to the bottom outer frame 101a-1.

[0026] Referring to Figures 6A and 6B, the pump assembly 20 is placed laterally into the first bottom space 1101 through the first right-side opening 1013 (operation O1), and the pump assembly 20 can be placed on or fixed to the bottom cover plate 1026 or the bottom outer frame 101a-1. The pump assembly 20 may be placed in the first bottom space 1101 along the negative X direction through the first right-side opening 1013, along the negative Y direction through the first front-side opening 1010, or along the positive Y direction through the first rear-side opening 1017, or it may be placed in the first bottom space 1101 along the positive X direction through the first left-side opening 1015.

[0027] The microwave source 30 is positioned laterally in the second bottom space 1102 through the first left-side opening 1015 (operation O2). In this example, the microwave source 30 includes a first microwave source 31 and a second microwave source 32, which are stacked on top of each other. The first microwave source 31 can be placed on or fixed to the bottom cover plate 1026 or the bottom outer frame 101a-1, and the second microwave source 32 can be placed on or fixed above the first microwave source 31. The first microwave source 31 and the second microwave source 32 may be supported on a shelf, which may first be attached to or fixed to the frame 101 and / or the housing 102, or the first microwave source 31 and the second microwave source 32 may first be attached to or fixed to the shelf and then attached to or fixed to the frame 101 and / or the housing 102. The microwave source 30 is positioned in the second bottom space 1102 along the negative X direction through the first left-side opening 1015, along the negative Y direction through the first front-side opening 1010, or along the positive Y direction through the first rear-side opening 1017.

[0028] In the reactor assembly 40, the water tank 44 is a rectangular parallelepiped and has a front end 44a and a tail end 44b, the front end 44a and the tail end 44b being adjacent to the front side 10c and the rear side 10d, respectively, the first stage reactor 42 includes two reactors 42a and 42b, each located at the front end 44a, and the second stage reactor 43 is located at the tail end 44b.

[0029] The reactor assembly 40 is placed laterally into the third space 1103 through the second right-side opening 1014 (operation O3), the reactor assembly 40 is located above the pump assembly 20, and the reactor assembly 40 can be fixed or attached to the fifth transverse rod 101d-5. Figures 6C to 6E show the reactor assembly 40 being assembled in the third space 1103 in stages. In Figure 6C, the water tank 44 is first placed laterally into the third space 1103 along the negative X direction from the second right-side opening 1014 and placed or fixed to the fifth transverse rod 101d-5, the first-stage reactor 42 and the second-stage reactor 43 are further placed laterally into the third space 1103 along the negative X direction from the second right-side opening 1014 and attached to the water tank 44, as shown in Figures 6D and 6E. Subsequently, the exhaust gas guide device 41 is further attached to the first stage reactor 42 from the second right-side opening 1014 or from above along the negative X direction, as shown in Figure 6F. However, in other examples, the reactor assembly 40 may, after being assembled, be placed in the third space 1103 along the negative X direction through the second right-side opening 1014.

[0030] The electronic and control assembly 50 is positioned laterally in the front region of the fourth space 1104 through the second left-side opening 1016 (operation O4), and the electronic and control assembly 50 has a cabinet 51, the front panel of the cabinet 51 is integrated into the left portion 1024b of the front end cover plate 1024, and the side panel 510 of the cabinet 51 is attached to the intermediate outer frame 101c-1 adjacent to the front region of the fourth space 1104. In some examples, the electronic and control assembly 50 may be attached or fixed to the frame 101 and / or the housing 102 via the cabinet 51, for example, to the side structure or other directional structure. The electronic and control assembly 50 is positioned in the front region of the fourth space 1104 along the negative X direction through the second left-side opening 1016, along the negative Y direction through the second front opening 1011, or along the positive Y direction through the second rear opening 1018.

[0031] The gas supply system 60 is positioned laterally from the second left-side opening 1016 into the top space 1105 (operation O5), and the gas supply system 60 may be a gas panel and includes a mounting base plate 61 and a gas distribution manifold assembly 62, the gas distribution manifold assembly 62 being mounted on the mounting base plate 61, and the gas distribution manifold assembly 62 may include a gas distribution manifold, a flow controller and a monitoring system, etc., and the mounting base plate 61 of the gas supply system 60 is attached to the intermediate outer frame 101c-1 adjacent to the top space 1105. In some examples, the gas supply system 60 is attached or fixed to the frame 101 and / or the housing 102 via the mounting base plate 61, for example, to the side structure or other directional structure. The gas supply system 60 is located in the rear region of the fourth space 1104 via the second left-side opening 1016 along the negative X direction, or via the second rear-side opening 1018 and the third rear-side opening 1019 along the positive Y direction.

[0032] The first fluid transport assembly 70 is located in the rear region of the fourth space 1104, and the second fluid transport assembly 80 is located in the space between the reactor assembly 40 and the right-side cover plate 1021 in the third space 1103.

[0033] The first fluid transport assembly 70 includes a mounting base plate 71, a plurality of conduits 72, 73, 74 provided on the mounting base plate 71, and one or more valves provided on the conduits 72, 73, 74, the conduits 72, 73, 74 each configured to transport cooling water to the gas contaminant treatment device and supply it to the reactor assembly 40, to discharge the cooling water from the reactor assembly 40 from the gas contaminant treatment device and to drain the water tank 44, the second fluid transport assembly 80 includes a first part 81 and a second part 82, each used to supply fresh water to the first stage reactor 42 and / or the second stage reactor 43 and to supply circulating water to the water tank 44.

[0034] The mounting of the first fluid transport assembly 70 and the second fluid transport assembly 80 can take place in various ways. For example, the first fluid transport assembly 70 may enter the space 110 laterally from the second left opening 1016 or the second rear opening 1018, and the mounting base plate 71 may be attached to the intermediate outer frame 101c-1 adjacent to the rear region of the fourth space 1104. Alternatively, the first fluid transport assembly 70 may be connected to the reactor assembly 40 and the water tank 44 via the conduits 72, 73, 74 and fixed or provided in the rear region of the fourth space 1104.

[0035] The second fluid transport assembly 80 can enter the space 110 (the third space 1103) laterally from the second right opening 1014 or the second rear opening 1018, the first portion 81 can be attached to the rear end cover plate 1025, and the second portion 82 can be attached to the right side cover plate 1021, as understood to be, the first portion 81 and the second portion 82 are first attached to the rear end cover plate 1025 and the right side cover plate 1021, and then the rear end cover plate 1025 and the right side cover plate 1021 are further attached to the frame 101, thereby fixing the first fluid transport assembly 70 in the rear region of the fourth space 1104 Alternatively, the first portion 81 and the second portion 82 may be attached to the rear end cover plate 1025 and the right side cover plate 1021 when the rear end cover plate 1025 and the right side cover plate 1021 are attached to the frame 101, or the second fluid transport assembly 80 may be connected to the first stage reactor 42 and / or the second stage reactor 43 via the first portion 81, and the second portion 82 may be connected to the water tank 44 and fixed or provided in the rear area of ​​the fourth space 1104, and the first portion 81 and the second portion 82 may be attached to the rear end cover plate 1025 and the right side cover plate 1021.

[0036] With regard to the installation of the pump assembly 20, microwave source 30, reactor assembly 40, electronic and control assembly 50 and gas supply system 60 described above, in one example the operations are performed in the order of operations O1, O2, O3, O4, and O5, but in other examples the operations may be performed in a different order, for example, operations O1, O3, O2, O4, and O5, or operations O2, O4, O1, O3, and O5. In addition, in some examples some operations may be performed simultaneously, for example, operations O1 and O2 may be performed simultaneously first, then operations O3 and O4, then operation O5, and again operations O1, O3, O2, O4, and O5 may be performed simultaneously.

[0037] After the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, and the gas supply system 60 are mounted in the space 110 of the box 10, the first fluid transport assembly 70 and the second fluid transport assembly 80 can be mounted first before the cover plate is mounted on the frame 101, and the first fluid transport assembly 70 and the second fluid transport assembly 80 can also be mounted in conjunction with the mounting of the cover plate, and since the cover plate is removablely attached to the frame 101, it is also possible to mount all or part of the cover plate first and then mount the first fluid transport assembly 70 and the second fluid transport assembly 80. The space occupied by the first fluid transport assembly 70 and the second fluid transport assembly 80 is small, which provides flexibility in terms of mounting.

[0038] In this example, the openings on the rear side 10d, left side 10e, and right side 10f of the frame 101 are used as mounting openings, and include the first right opening 1013, the second right opening 1014, the first left opening 1015, the second left opening 1016, the first rear opening 1017, the second rear opening 1018, and the third rear opening 1019. The opening on the front side 10c of the frame 101 may also be used as a mounting opening and may also be used as a maintenance opening after assembly, including the first front opening 1010, the second front opening 1011, and the third front opening 1012.

[0039] After the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, the gas supply system 60, the first fluid transport assembly 70, and the second fluid transport assembly 80 are installed in the space 110 of the box body 10, the right cover plate 1021, the left cover plate 1022, the top cover plate 1023, and the rear cover plate 1025 can be fixed to the frame body 101, where fixing means removable fixing, and can be screw connectors (e.g., screws, bolts, machine screws), insert connectors (e.g., retaining pins, mortise and tenon joints), fasteners (e.g., engaging claws, fasteners), high-speed removal members, or interlock members, and the fixing between the front cover plate 1024 and the frame body 101 is fixed in a removable manner. This takes into consideration that when the gas contaminant treatment device is assembled and working at the client's factory, it is less necessary to open the right cover plate 1021, the left cover plate 1022, the top cover plate 1023, and the rear cover plate 1025, and more often necessary to open the front cover plate 1024. In one example, the right portion 1024a and the left portion 1024b of the front cover plate 1024 are the left door and the right door, respectively, and the hinges for the left door and the right door are provided at the left and right ends of the frame 101, respectively, and the left portion 1024b includes the upper left door 1024b-1, the middle left door 1024b-2, and the lower left door 1024b-3, and when the upper left door 1024b-1 is opened, the gas supply system 60 is exposed, and the middle left door 1024b- Opening the 2 exposes the electronic and control assembly 50, and opening the lower left door 1024b-3 exposes the microwave source 30. Since the gas supply system 60, the electronic and control assembly 50, and the microwave source 30 relate to the main electronic assembly of the gas contaminant processing device, maintenance workers can easily perform electrical inspections through the first front opening 1010, the second front opening 1011, and the third front opening 1012.In one example, opening the left portion 1024b exposes a first maintenance opening, opening the right portion 1024a exposes a second maintenance opening, and the area of ​​either the first or second maintenance opening is less than or equal to the area of ​​either opening exposed after opening or removing the left cover plate 1022 or the right cover plate 1021.

[0040] In this example, the space in which the pump assembly 20 is installed is called the first region, the space in which the reactor assembly 40 is installed is called the second region, and the space in which the electronic and control assembly 50 is installed is called the third region. The first, second, and third regions are the first bottom space 1101, the third space 1103, and the fourth space 1104, respectively. In terms of relative position, the first region is called the bottom space, and the second and third regions are called the first upper space and the second upper space, respectively. The portions into which the pump assembly 20, the reactor assembly 40, and the electronic and control assembly 50 enter and are installed are the first installation opening, the second installation opening, and the third installation opening, which may be the first right-side opening 1013, the second right-side opening 1014, and the second left-side opening 1016, respectively.

[0041] Returning to Figure 6A, and considering the process by which the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, and the gas supply system 60 are mounted in the space 110 of the box 10, the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, and the gas supply system 60 each have a defined mounting rear position and each has a cross-sectional area in the lateral direction, which in this example may be the area projected onto a plane perpendicular to the X-axis, for example A20-X, A30-X, A40-X, A50-X, A60-X, and may also be the area projected onto a plane perpendicular to the Y-axis, for example A20-Y, A30-Y, A40-Y, A50-Y, A60-Y. In this example, there are two microwave sources 30, and areas A30-X and A30-Y refer to the area of ​​either the first microwave source 31 or the second microwave source 32.

[0042] In one example, area A20-X is less than or equal to the area of ​​the first right-side opening 1013, area A30-X is less than or equal to the area of ​​the first left-side opening 1015, area A40-X is less than or equal to the area of ​​the second right-side opening 1014, area A50-X is less than or equal to the area of ​​the second left-side opening 1016, and area A60-X is less than or equal to the area of ​​the second left-side opening 1016.

[0043] Area A20-Y is less than or equal to the area of ​​the right portion of the first front opening 1010, area A30-Y is less than or equal to the area of ​​the left portion of the first front opening 1010, area A40-Y is less than or equal to the area of ​​the right portion of the second front opening 1011, area A50-Y is less than or equal to the area of ​​the left portion of the second front opening 1011, and area A60-Y is less than or equal to the area of ​​the third front opening 1012.

[0044] In this way, the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, and the gas supply system 60 can each be easily made into modular units, which can be assembled individually in advance before being assembled into the space 110 of the frame 101, and the whole can then be directly moved into the space 110 through these openings for assembly, saving not only work time but also reducing the chance of assembly errors. Conventional gas contaminant treatment devices, such as combustion and water-wash type exhaust gas treatment devices, require at least two assembly workers and require at least five workdays to assemble one unit. In contrast, in the above embodiment, two assembly workers can complete the assembly of one unit in just one workday.

[0045] Each module has a maximum dimension before assembly, and since the module is generally not a perfect cube, it may have multiple lengths, widths, and heights, and considering that it will be placed in the space 110 through these openings, the maximum dimension is defined for the module, and refers to the maximum length, width, and height of the module as measured in the space. The pump assembly 20 has a first maximum dimension, which includes a first length L20, a first width W20, and a first height H20; the microwave source 30 has a second maximum dimension, which includes a second length L30, a second width W30, and a second height H30; the reactor assembly 40 has a third maximum dimension, which includes a third length L40, a third width W40, and a third height H40; the electronic and control assembly 50 has a fourth maximum dimension, which includes a fourth length L50, a fourth width W50, and a fourth height H50; and the gas supply system 60 has a fifth maximum dimension, which includes a fifth length L60, a fifth width W60, and a fifth height H60.

[0046] The first length L20 and first height H20 of the pump assembly 20 are less than or equal to the first right-side opening 1013; the second length L30 and second height H30 of the microwave source 30 are less than or equal to the first left-side opening 1015; the third length L40 and third height H40 of the reactor assembly 40 are less than or equal to the second right-side opening 1014; the fourth length L50 and fourth height H50 of the electronic and control assembly 50 are less than or equal to the second left-side opening 1016; and the fifth length L60 and fifth height H60 of the gas supply system 60 are less than or equal to the second left-side opening 1016. In one example, the sum of the fourth height H50 of the electronic and control assembly 50 and the fifth height H60 of the gas supply system 60 is less than or equal to the second left-side opening 1016.

[0047] Figures 7 to 9B show a gas pollutant treatment apparatus in another example, which is another arrangement of the frame 101, the frame 101 including a plurality of connecting members, the connecting members may be rods, and these connecting members include a bottom structure 101a, a top structure 101b, an intermediate structure 101c, a first straight rod 101e-1, a second straight rod 101e-2, a first horizontal rod 101g-1, a second horizontal rod 101g-2, a third horizontal rod 101g-3, a first partition plate 101f-1, a second partition plate 101f- The two are combined to form 2, and the space 110 within the box 10 includes a first half 110a and a second half 110b, and as understood, the half does not mean that the first half 110a or the second half 110b are each half of the space 110, but merely to indicate that they belong to a part of the space 110, the connecting member divides the space 110 into a plurality of regions, and the right cover plate 1021 includes a first right cover plate 1021a and a second right cover plate 1021b. The first half 110a is used to mount the reactor assembly 40, and the second half 110b is used to mount the pump assembly 20, the microwave source 30, the electronic and control assembly 50 and the gas supply system (not shown), the second half 110b includes a bottom region 110b-1, a first intermediate region 110b-2, a second intermediate region 110b-3 and a top region 110b-4. The openings defined by the frame 101 include a first front opening 1030, a second front opening 1031, a third front opening 1032, a fourth front opening 1033, a first right-side opening 1034, a second right-side opening 1035, a first left-side opening 1036, a second left-side opening 1037, a first rear-side opening 1038, a second rear-side opening 1039, a third rear-side opening 1040, and a fourth rear-side opening 1041.

[0048] The pump assembly 20 can be positioned laterally in the bottom region 110b-1 of the second half 110b along the positive X direction from the first left-side opening 1036, or it can be positioned in the bottom region 110b-1 of the second half 110b through the second front opening 1031 or the second rear opening 1039.

[0049] The microwave source 30 includes a first microwave source 31 and a second microwave source 32, which are stacked on top of each other. The microwave source 30 can be positioned laterally in the first intermediate region 110b-2 of the second half 110b along the positive X direction from the second left opening 1037, and can also be positioned laterally in the first intermediate region 110b-2 of the second half 110b via the third front opening 1032 or the third rear opening 1040.

[0050] The reactor assembly 40 includes an exhaust gas guide device 41, a first-stage reactor 42, a second-stage reactor 43, and a water tank 44, wherein the first-stage reactor 42 consists of two reactors 42a and 42b. In this example, the first-stage reactor 42, the second-stage reactor 43, and the water tank 44 can first be assembled together and then placed laterally in the first half 110a along the negative X direction from the first right-side opening 1034, or the water tank 44 can first be placed laterally in the first half 110a along the negative X direction from the first right-side opening 1034, and then the first-stage reactor 42 and the second-stage reactor 43 can be attached to the water tank 44. The exhaust gas guide device 41 is then attached to the first-stage reactor 42.

[0051] The electronic and control assembly 50 can be positioned laterally in the second intermediate region 110b-3 of the second half 110b along the positive X direction from the second left-side opening 1037, or it can be positioned in the second intermediate region 110b-3 of the second half 110b through the fourth front opening 1033 or the fourth rear opening 1041.

[0052] The gas supply system 60 can be positioned laterally in the top region 110b-4 of the second half 110b along the positive X direction from the second left opening 1037, and can also be positioned via other orientations.

[0053] As described above, the present invention makes the pump assembly, reactor assembly, electronic and control assembly, microwave source, and gas supply system each a single modular unit, allowing them to be assembled into assemblies before being assembled into the space of the frame, and then these assemblies to be assembled into the space through the frame openings, thereby significantly improving assembly efficiency and solving the problem of conventional gas pollutant treatment devices which require a great deal of manual labor and assembly time. [Explanation of Symbols]

[0054] 10 box body 10a top surface 10b Bottom 10c front side 10d Posterior side 10e Left side 10f Right side 101 Frame 101a Bottom structure 101a-1 Bottom outer frame 101a-2 Bottom lateral rod 101b Top structure 101b-1 Top outer frame 101c intermediate structure 101c-1 Intermediate outer frame 101d-1 First transverse rod 101d-2 Second transverse rod 101d-3 Third transverse rod 101d-4 4th transverse rod 101d-5 Fifth transverse rod 101d-6 6th transverse rod 101e-1 First Straight Rod 101e-2 Second Straight Rod 101g-1 First horizontal rod 101g-2 Second horizontal rod 101g-3 Third horizontal rod 101f-1 First partition plate 101f-2 Second partition plate 1010 1st front opening 1011 2nd front opening 1012 Third front opening 1013 1st right opening 1014 2nd right opening 1015 1st left opening 1016 2nd left opening 1017 First rear opening 1018 Second rear opening 1019 Third rear opening 102 cabinets 1021 Right side cover plate 1021a First right-side cover plate 1021b Second Right Side Cover Plate 1022 Left side cover plate 1023 Top cover plate 1023a Exhaust gas inlet 1023b Exhaust gas outlet 1023c Gas inlet 1024 Front end cover plate 1024a Right side part 1024b Left side part 1024b-1 Upper left door 1024b-2 Middle left door 1024b-3 Lower left door 1025 Rear end cover plate 1026 Bottom cover plate 1030 1st front opening 1031 2nd front opening 1032 Third front opening 1033 4th front opening 1034 1st right opening 1035 2nd right opening 1036 1st left opening 1037 2nd left opening 1038 First rear opening 1039 Second rear opening 1040 Third rear opening 1041 Fourth rear opening 110 Space 110a 1st half 110b Second half 110b-1 Bottom area 110b-2 1st intermediate area 110b-3 Second intermediate area 110b-4 Top area 1101 1st bottom space 1102 2nd bottom space 1103 Third space 1104 4th space 1105 Top space 20 Pump Assembly 30 Microwave Sources 31. First Microwave Source 32. Second microwave source 40 Reactor Assembly 41 Exhaust gas guide device 42 First-stage reactor 42a, 42b Reactors 43 Second-stage reactor 44 Water Tanks 44a Front end 44b Tail end 50 Electronic and Control Assemblies 51 Cabinet 510 Side Panel 60 Gas supply systems 61 Mounting board 62 Gas distribution manifold assembly 70 First Fluid Transport Assembly 71 Mounting board 72, 73, 74 conduit 80. Second Fluid Transport Assembly 81 Part 1 82 Part 2 L1 First length L2 Second length L3 Third length L20 First length W20 1st width H20 1st Height L30 Second length W30, 2nd width H30 2nd Height L40 Third length W40 3rd width H40 3rd height L50 4th length W50 4th width H50 4th height L60 5th length W60 5th width H60 5th height

Claims

1. A modularized gas pollutant treatment device, A frame comprising a plurality of connecting members assembled together and a plurality of spaces defined by these connecting members, wherein these spaces include a first region, a second region adjacent to the first region, and a third region adjacent to the first region, and each of these regions has an attachment opening that communicates with the outside, A pump assembly provided in the first region, A reactor assembly comprising an exhaust gas guide, a first-stage reactor, a second-stage reactor, and a water tank, wherein the exhaust gas guide is detachably connected to the first-stage reactor to introduce exhaust gas into the first-stage reactor, the water tank is connected downstream of the first-stage reactor, and the second-stage reactor is connected to the water tank to receive the exhaust gas that has passed through the water tank, wherein the reactor assembly is detachably connected to the pump assembly and is provided in the second region, An electronic and control assembly, which is detachably connected to the reactor assembly, and which is provided in the third region, A fluid transport assembly, which is removably connected to a reactor assembly, the fluid transport assembly includes a plurality of conduits configured to supply cooling water to the reactor assembly, to discharge the cooling water from the reactor assembly, to supply fresh water to the first-stage reactor and / or the second-stage reactor, and to supply circulating water to a water tank, A housing, provided on the frame and sealing these spaces, the housing includes a plurality of cover plates, which are removably attached to the connecting member to expose or close the mounting opening, wherein the cover plates include an exhaust gas inlet, an exhaust gas outlet, and a gas inlet, the exhaust gas inlet being connected to the exhaust gas guide device, the exhaust gas outlet being connected downstream of the second stage reactor, and the gas inlet being connected to the fluid transport assembly, Here, the frame extends along the first transverse direction, the second transverse direction and the vertical direction to define the boundary between the housing and the modularized gas pollutant treatment device, and A modularized gaseous pollutant processing apparatus is configured such that when the cover plate is removed and the mounting opening is opened, the pump assembly, the reactor assembly, and the electronic and control assembly are mounted laterally into the first, second, and third regions, respectively, through the mounting opening.

2. The modularized gas pollutant processing apparatus according to claim 1, characterized in that the second region and the third region are adjacent to each other in the lateral direction, and the first region is located below the second region.

3. The modularized gaseous contaminant processing apparatus according to claim 2, characterized in that the second region and the first region are separated in the longitudinal direction by a spacer, and the spacer supports the water tank of the reactor assembly.

4. The modularized gas pollutant processing apparatus according to claim 2, characterized in that the first region is a bottom space, and the second region and the third region are a first upper space and a second upper space, respectively.

5. The modularized gaseous contaminant processing apparatus according to claim 3, wherein the cover plate includes a right cover plate, a left cover plate, a top cover plate, a front cover plate, and a rear cover plate, the right cover plate adjacent to the reactor assembly located in the second region and the pump assembly located in the first region, the left cover plate adjacent to the electronics and control assembly located in the third region, wherein the right cover plate, after being detached from the frame, exposes a first mounting opening located below the spacer and a second mounting opening located above the spacer, allowing the pump assembly and the reactor assembly to enter and be mounted in the space through the first and second mounting openings, respectively, and the left cover plate, after being detached from the frame, exposes a third mounting opening, allowing the electronics and control assembly to enter and be mounted in the space through the third mounting opening.

6. The modularized gaseous contaminant processing apparatus according to claim 5, wherein the front end cover plate includes a right portion and a left portion, the right portion being adjacent to the reactor assembly located in the second region and the pump assembly located in the first region, and the left portion being adjacent to the electronic and control assembly located in the third region, wherein the right portion and the left portion expose a first maintenance opening and a second maintenance opening, respectively, after being detached from the frame, and the area of ​​either the first maintenance opening or the second maintenance opening is less than or equal to the area of ​​either the second mounting opening or the third mounting opening.

7. The modularized gaseous contaminant processing apparatus according to claim 5, characterized in that the pump assembly has a first maximum dimension, the first maximum dimension including a first length, a first width, and a first height; the reactor assembly has a second maximum dimension, the second maximum dimension including a second length, a second width, and a second height; the electronics and control assembly has a third maximum dimension, the third maximum dimension including a third length, a third width, and a third height, wherein the first length and first height of the pump assembly are less than or equal to the first mounting opening; the second length and second height of the reactor assembly are less than or equal to the second mounting opening; and the third length and third height of the electronics and control assembly are less than or equal to the third mounting opening.

8. The modularized gaseous pollutant processing apparatus according to claim 1, characterized in that the first-stage reactor and the second-stage reactor each include one or multiple interconnected reaction modules, the reaction modules being combustion reactors, wet reactors, plasma combustion reactors, plasma vaporization reactors and / or thermal reactors.

9. The modularized gas pollutant processing apparatus according to claim 1, characterized in that the reactor assembly, the electronic and control assembly, and the pump assembly are each configured as modular units, and the cross-sectional area of ​​these modular units in the lateral direction is less than or equal to the mounting opening, so that they enter the first region, the second region, and the third region from the mounting opening.

10. A method for assembling a gas pollutant treatment device, A frame is provided, the frame comprising a plurality of connecting members assembled together and a plurality of spaces defined by these connecting members, the spaces comprising a bottom space, a first upper space located above the bottom space and a second upper space laterally adjacent to the first upper space, the spaces each having a laterally connected mounting opening that communicates with the outside, The pump assembly, reactor assembly, and electronic and control assembly are fed into the bottom space, the first upper space, and the second upper space, respectively, through their respective mounting openings, wherein the mounting orientations in which the reactor assembly, the electronic and control assembly, and the pump assembly enter these spaces are independent of each other. The steps include connecting one or more accessory assemblies to the pump assembly, the reactor assembly, and the electronic and control assembly, A method for assembling a gas pollutant treatment device, comprising the step of forming a box by attaching a plurality of removable plates to the frame and closing the mounting openings.

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