Conveying equipment

Abstract

When a transport system includes a first transport vehicle, a second transport vehicle, a first transport area, and a second transport area, it is desirable to realize a technology that can drive both the first and second transport vehicles using electricity to ensure proper operation while reducing the cost of the equipment. [Solution] The transport equipment 100 is equipped with a power supply device along the route. A power supply device along the route is provided in the first transport area A1, and a power supply device along the route is not provided in at least a part of the second transport area A2. The first transport vehicle 10 is configured to be able to travel using the power supplied from the power supply device along the route. The second transport vehicle 20 is configured to be able to travel in both the first transport area A1 and the second transport area A2 and to receive power from the power supply device along the route, and is equipped with a power storage device that stores the power supplied from the power supply device along the route, and is configured to be able to travel in the second transport area A2 using the power stored in the power storage device.

Description

Technical Field

[0001] The present invention relates to a conveyance facility including a conveyance vehicle that conveys objects to be conveyed, and an on-route power supply device that is provided along a travel route of the conveyance vehicle and supplies power to the conveyance vehicle located on the travel route.

Background Art

[0002] An example of the conveyance facility as described above is disclosed in Japanese Unexamined Patent Application Publication No. 2001-218307 (Patent Document 1). Hereinafter, in the description of this background art, reference numerals in Patent Document 1 are cited in parentheses. The conveyance facility of Patent Document 1 includes a conveyance cart (24) and a travel power supply unit (27A). A power supply line (22) is housed in a rail (21) on which the conveyance cart (24) travels, and the travel power supply unit (27A) is configured to supply power to the conveyance cart (24) located on the rail (21) by passing a high-frequency current through the power supply line (22). The conveyance cart (24) is equipped with a battery (93) that is charged with electric power supplied from the power supply line (22), and is configured to travel using the battery (93) as a power source in a non-power-supply section.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Incidentally, it is conceivable that the conveying equipment may be configured to include a first conveyor vehicle for conveying a first object, a second conveyor vehicle for conveying a second object different from the first object, a first conveying area on which the first conveyor vehicle travels to convey the first object, and a second conveying area on which the second conveyor vehicle travels to convey the second object. In such a case, it is desirable to be able to appropriately drive both the first and second conveyor vehicles with electricity while reducing the cost of the equipment. However, Patent Document 1 does not describe conveying equipment with such a configuration.

[0005] Therefore, when a transport system includes a first transport vehicle, a second transport vehicle, a first transport area, and a second transport area, it is desirable to realize a technology that can drive both the first and second transport vehicles using electricity to ensure proper operation while reducing the cost of the equipment. [Means for solving the problem]

[0006] The transport equipment according to this disclosure comprises a first transport vehicle for transporting a first transport object, a second transport vehicle for transporting a second transport object different from the first transport object, a first transport area which is the area on which the first transport vehicle travels to transport the first transport object, a second transport area which is the area on which the second transport vehicle travels to transport the second transport object, and a path-side power supply device provided along the travel path of the first transport vehicle or the second transport vehicle, which supplies power to the first transport vehicle or the second transport vehicle while it is on the travel path, wherein the path-side power supply device is provided in the first transport area, and the path-side power supply device is not provided in at least a part of the second transport area, the first transport vehicle is configured to be able to travel using power supplied from the path-side power supply device, the second transport vehicle is configured to be able to travel in both the first transport area and the second transport area and to receive power from the path-side power supply device, and is equipped with a power storage device that stores the power supplied from the path-side power supply device, and is configured to be able to travel in the second transport area using the power stored in the power storage device.

[0007] According to this configuration, in the first transport area where a power supply device is provided along the transport route, the first transport vehicle can be driven by electricity and moved appropriately. Furthermore, the second transport vehicle, which can travel in both the first and second transport areas, is equipped with a power storage device that stores the electricity supplied from the power supply device along the transport route. Therefore, the second transport vehicle can be driven by electricity and moved appropriately not only in the first transport area where a power supply device along the transport route is provided, but also in the second transport area where a power supply device along the transport route is not provided in at least a part of it.

[0008] Thus, this configuration makes it possible to drive both the first and second transport vehicles using electricity to ensure proper operation without installing a power supply device along the route in at least a portion of the second transport area. Therefore, it is easier to reduce the cost of the transport equipment compared to the case where a power supply device is installed along the route throughout the entire second transport area.

[0009] As described above, with this configuration, when the transport equipment includes a first transport vehicle, a second transport vehicle, a first transport area, and a second transport area, it is possible to reduce the cost of the equipment while driving both the first and second transport vehicles with electricity to ensure proper operation.

[0010] Further features and advantages of the conveying equipment will become clear from the following description of the embodiment described with reference to the drawings. [Brief explanation of the drawing]

[0011] [Figure 1] Diagram showing the layout of the conveying equipment according to the embodiment. [Figure 2] Figure showing the first and second transport vehicles according to the embodiment. [Figure 3] Diagram showing a power supply device along a power path according to an embodiment. [Figure 4] Control block diagram according to the embodiment [Modes for carrying out the invention]

[0012] The embodiment of the conveying equipment will be described with reference to the drawings. Note that the drawings simplify the various parts as appropriate, and do not necessarily accurately represent the actual shape or dimensional ratios.

[0013] As shown in Figure 1, the transport equipment 100 comprises a first transport vehicle 10, a second transport vehicle 20, a first transport area A1, and a second transport area A2. In this embodiment, the transport equipment 100 is equipped with multiple first transport vehicles 10 and one or more (in this case, multiple) second transport vehicles 20. In this embodiment, the number of second transport vehicles 20 is less than the number of first transport vehicles 10. However, it is also possible to configure the system so that the number of second transport vehicles 20 is equal to or greater than the number of first transport vehicles 10.

[0014] As shown in Figure 2, the first transport vehicle 10 is a transport vehicle (in this case, an automated guided vehicle) that transports the first transported object W1. The second transport vehicle 20 is a transport vehicle (in this case, an automated guided vehicle) that transports the second transported object W2, which is different from the first transported object W1. The first transported object W1 and the second transported object W2 are transported objects of different types. As shown in Figure 1, in this embodiment, the transport equipment 100 includes a first storage device 70 for storing the first transported object W1 and a second storage device 80 for storing the second transported object W2. In Figure 1, the first storage device 70 and the second storage device 80 are shown as examples of storage devices equipped with an in / out section (in / out port), but these storage devices (70, 80) may be other types of storage devices (for example, storage shelves installed near the ceiling for temporarily storing transported objects).

[0015] The first storage device 70 includes a first receiving / discharging section 71 where the first transported goods W1 are received and transferred (specifically, into and out of storage). The first storage device 70 stores the first transported goods W1 received by the first receiving / discharging section 71 and transfers the stored first transported goods W1 from the first receiving / discharging section 71 to the first transport vehicle 10. The first receiving / discharging section 71 can be used as both an receiving and a dispatching section, or separate first receiving / discharging sections 71 for receiving and dispatching can be provided.

[0016] The second storage device 80 includes a second receiving / discharging section 81 where the second transported goods W2 are received and transferred (specifically, into and out of storage). The second storage device 80 stores the second transported goods W2 received by the second receiving / discharging section 81 and transfers the stored second transported goods W2 from the second receiving / discharging section 81 to the second transport vehicle 20. The second receiving / discharging section 81 can be used as both an receiving and a dispatching section, or separate second receiving / discharging sections 81 for receiving and dispatching can be provided.

[0017] The types of the first transport object W1 and the second transport object W2 are not limited to those shown, but as shown in Figure 2, in this embodiment, the first transport object W1 is a container for housing a semiconductor substrate 1 (semiconductor wafer), and the second transport object W2 is a container for housing a photoresist mask 2. The photoresist mask 2 (e.g., a reticle) is used for processing the semiconductor substrate 1 (specifically, exposure processing). An example of the first transport object W1 is a FOUP (Front Opening Unified Pod), and an example of the second transport object W2 is a reticle pod.

[0018] As shown in Figure 1, in this embodiment, the transport equipment 100 includes a processing device 60 that performs processing (such as thin-film formation and etching) on ​​the semiconductor substrate 1. The processing device 60 is equipped with a first port 61 where the first transport object W1 is received and transferred. The processing device 60 processes the semiconductor substrate 1 taken out of the first transport object W1 received at the first port 61. The processing device 60 then transfers the first transport object W1 containing the processed semiconductor substrate 1 from the first port 61 to the first transport vehicle 10.

[0019] In the present embodiment, the transport facility 100 includes a plurality of processing apparatuses 60. The plurality of processing apparatuses 60 include an exposure processing apparatus 60a that performs exposure processing on the semiconductor substrate 1 using a photoresist mask 2. The exposure processing apparatus 60a includes, in addition to a first port 61, a second port 62 through which a second transported object W2 is transferred. The exposure processing apparatus 60a performs exposure processing on the semiconductor substrate 1 taken out from the first transported object W1 received at the first port 61, using the photoresist mask 2 taken out from the second transported object W2 received at the second port 62. The exposure processing apparatus 60a delivers the first transported object W1 that accommodates the semiconductor substrate 1 subjected to the exposure processing from the first port 61 to the first transport vehicle 10. Further, the exposure processing apparatus 60a delivers the second transported object W2 that accommodates the photoresist mask 2 used for the processing of the semiconductor substrate 1 from the second port 62 to the second transport vehicle 20.

[0020] The first transport area A1 is an area in which the first transport vehicle 10 travels to transport the first transported object W1. That is, the first transport vehicle 10 travels at least in the first transport area A1 to transport the first transported object W1. The second transport area A2 is an area in which the second transport vehicle 20 travels to transport the second transported object W2. That is, the second transport vehicle 20 travels at least in the second transport area A2 to transport the second transported object W2. The first transport area A1 and the second transport area A2 are areas different from each other. In Figure 1, an area other than the second transport area A2 is defined as the first transport area A1.

[0021] The first transport vehicle 10 is assigned a first transport task that specifies the source and destination of the first transported object W1. The first transport vehicle 10, having been assigned the first transport task, executes the first transport task. Specifically, the first transport vehicle 10 travels to the source specified in the first transport task, receives the first transported object W1 from the source, and then travels to the destination specified in the first transport task to deliver the first transported object W1 to the destination. Thus, the first transport task and the second transport task described later include movement from the current position to the transport source and movement from the transport source to the transport destination. In this embodiment, the first port 61 provided in the processing device 60 and the first inbound / outbound unit 71 provided in the first storage device 70 are designated as the transport source and destination of the first transported object W1.

[0022] In this embodiment, the first transport vehicle 10 travels only within the first transport area A1 to transport the first transport object W1. Therefore, both the source and destination of the first transport object W1 are set within the first transport area A1. In this embodiment, as shown in Figure 2, the first transport vehicle 10 has a larger vertical dimension Z (vertical direction) than the second transport vehicle 20, and the lower Z2 portion of the first transport vehicle 10 may interfere with a device provided in the second transport area A2. Therefore, in this embodiment, the first transport vehicle 10 is prohibited from entering the second transport area A2, and the first transport vehicle 10 travels only within the first transport area A1. Alternatively, the first transport vehicle 10 may travel only within the first transport area A1 by prohibiting its entry into the second transport area A2, which is an area where no transport requests to the first transport vehicle 10 occur.

[0023] A second transport task that designates the transport source and transport destination for a second transported object W2 is assigned to the second transport vehicle 20. The second transport vehicle 20 to which the second transport task has been assigned executes the second transport task. Specifically, the second transport vehicle 20 travels to the transport source designated in the second transport task, receives the second transported object W2 from the transport source, then travels to the transport destination designated in the second transport task, and delivers the second transported object W2 to the transport destination. In the present embodiment, the second port 62 provided in the exposure processing apparatus 60a and the second loading / unloading section 81 provided in the second storage apparatus 80 are designated as the transport source and transport destination of the second transported object W2.

[0024] In the present embodiment, both the transport source and the transport destination of the second transported object W2 are set within the second transport area A2. Therefore, the second transport vehicle 20 travels, for example, only in the second transport area A2 to transport the second transported object W2. Note that the second transport vehicle 20 is capable of traveling in both the first transport area A1 and the second transport area A2. That is, the first transport area A1 and the second transport area A2 are connected such that the second transport vehicle 20 can move between the first transport area A1 and the second transport area A2. Therefore, the second transport vehicle 20 can also travel in the first transport area A1 in addition to the second transport area A2 to transport the second transported object W2. For example, for reasons such as avoiding congestion, the second transport vehicle 20 travels in the first transport area A1 in addition to the second transport area A2 to transport the second transported object W2.

[0025] The transport facility 100 may be configured not to include the second storage apparatus 80, and the second transported object W2 may be stored in the first storage apparatus 70 in the same manner as the first transported object W1. In this case, the second transport vehicle 20 travels in the first transport area A1 and the second transport area A2 to transport the second transported object W2 between the first storage apparatus 70 (specifically, the first loading / unloading section 71) and the exposure processing apparatus 60a (specifically, the second port 62).

[0026] In this embodiment, the first transport vehicle 10 and the second transport vehicle 20 travel along a predetermined travel path 5. The travel path 5 is composed of a collection of multiple paths (inter-point paths connecting points). The first transport vehicle 10 travels along the travel path 5 within the first transport area A1, and the second transport vehicle 20 travels along the travel path 5 within the second transport area A2. The travel path 5 within the first transport area A1 and the travel path 5 within the second transport area A2 are connected so that the second transport vehicle 20 can move between the first transport area A1 and the second transport area A2. Therefore, the second transport vehicle 20 can also travel along the travel path 5 within the first transport area A1 (the travel path 5 of the first transport vehicle 10). As shown in Figure 1, a forward direction F is set for each part of the travel path 5, and the first transport vehicle 10 and the second transport vehicle 20 basically travel along each part of the travel path 5 in the forward direction F. The travel path 5 shown in Figure 1 includes a merging section where multiple paths merge into one path, and a branching section where one path branches into multiple paths. The total length of the travel path 5 of the first transport vehicle 10 in the first transport area A1 is defined as the first travel path length, and the total length of the travel path 5 of the second transport vehicle 20 in the second transport area A2 is defined as the second travel path length. In this embodiment, the second travel path length is shorter than the first travel path length. However, it is also possible to configure the system so that the second travel path length is equal to or greater than the first travel path length.

[0027] As shown in Figure 2, in this embodiment, the travel path 5 is formed by rails 50. Here, the direction along the travel path 5 is defined as the longitudinal direction X, and the direction perpendicular to both the longitudinal direction X and the vertical direction Z is defined as the left-right direction Y. As shown in Figure 3, in this embodiment, the travel path 5 is formed by a pair of rails 50 arranged with a gap between them in the left-right direction Y. In this embodiment, the first transport vehicle 10 and the second transport vehicle 20 have the same basic configuration. Therefore, in Figure 3, the reference numerals for the first transport vehicle 10 and the second transport vehicle 20 are shown together.

[0028] In this embodiment, the rail 50 is suspended and supported from the ceiling 9. Therefore, in this embodiment, the first transport vehicle 10 and the second transport vehicle 20 are overhead transport vehicles that travel along a travel path 5 formed along the ceiling 9. Note that the travel path 5 is not limited to the ceiling 9, but may also be formed on the floor or the like. Furthermore, the travel path 5 may be set without using the rail 50, for example, the travel path 5 may be set to connect a plurality of detectable objects (such as 2D codes or wireless tags) provided on the floor or the like.

[0029] The first transport vehicle 10 is driven by electricity and travels along the travel path 5. Specifically, as shown in Figure 2, the first transport vehicle 10 is equipped with a first travel section 12 that is driven by electricity and travels along the travel path 5. In the example shown in Figure 2, the first travel section 12 is equipped with a plurality of first travel wheels 12a that roll on the rail 50. At least a portion of the plurality of first travel wheels 12a are rotationally driven by an electric drive unit (not shown) (for example, an electric motor such as a servo motor, the same applies hereinafter), so that the first travel section 12 travels along the rail 50.

[0030] The first transport vehicle 10 is powered by electricity to transfer the first transported object W1 between the transfer target location (for example, the first port 61 or the first inbound / outbound section 71). Specifically, as shown in Figure 2, the first transport vehicle 10 is equipped with a first transfer section 13 that is powered by electricity to transfer the first transported object W1. The first transfer section 13 is connected to the first travel section 12. Here, the first travel section 12 is positioned above the first transfer section 13 at Z1.

[0031] Although a detailed explanation is omitted, in the example shown in Figure 2, the first transfer unit 13 includes a first holding unit for holding the first transported object W1, and a first lifting unit for raising and lowering the first holding unit relative to the first traveling unit 12. The first holding unit is driven by an electric drive unit (not shown) to perform a holding operation to hold the first transported object W1 and a release operation to release the first transported object W1. The first lifting unit is driven by an electric drive unit (not shown) to perform a lowering operation to lower the first holding unit to the transfer target location and an raising operation to raise the first holding unit from the transfer target location.

[0032] When the first transfer unit 13 delivers the first transported object W1 to the transfer target location, the first lifting unit performs a downward movement, the first holding unit performs a release movement, and the first lifting unit performs an upward movement, starting from a state where the first holding unit is holding the first transported object W1 (see Figure 2). Also, when the first transfer unit 13 receives the first transported object W1 from the transfer target location, the first lifting unit performs a downward movement, the first holding unit performs a holding movement, and the first lifting unit performs an upward movement, starting from a state where the first holding unit is not holding the first transported object W1.

[0033] The second transport vehicle 20 is driven by electricity and travels along the travel path 5. Specifically, as shown in Figure 2, the second transport vehicle 20 is equipped with a second travel section 22 that is driven by electricity and travels along the travel path 5. In the example shown in Figure 2, the second travel section 22 is equipped with a plurality of second travel wheels 22a that roll on the rail 50. At least a portion of the plurality of second travel wheels 22a are rotationally driven by an electric drive unit (not shown), causing the second travel section 22 to travel along the rail 50.

[0034] The second transport vehicle 20 is powered by electricity to transfer the second transport item W2 between the transfer target location (for example, the second port 62 or the second inbound / outbound section 81). Specifically, as shown in Figure 2, the second transport vehicle 20 is equipped with a second transfer section 23 that is powered by electricity to transfer the second transport item W2. The second transfer section 23 is connected to the second travel section 22. Here, the second travel section 22 is positioned above the second transfer section 23 at Z1.

[0035] Although a detailed explanation is omitted, in the example shown in Figure 2, the second transfer unit 23 includes a second holding unit for holding the second transported object W2, and a second lifting unit for raising and lowering the second holding unit relative to the second travel unit 22. The second holding unit is driven by an electric drive unit (not shown) to perform a holding operation to hold the second transported object W2 and a release operation to release the second transported object W2. The second lifting unit is driven by an electric drive unit (not shown) to perform a lowering operation to lower the second holding unit to the transfer target location and an raising operation to raise the second holding unit from the transfer target location.

[0036] When the second transfer unit 23 delivers the second transported object W2 to the transfer target location, the second lifting unit performs a downward movement, the second lifting unit performs a release movement, and the second lifting unit performs an upward movement, starting from a state where the second holding unit is holding the second transported object W2 (see Figure 2). Also, when the second transfer unit 23 receives the second transported object W2 from the transfer target location, the second lifting unit performs a downward movement, the second holding unit performs a holding movement, and the second lifting unit performs an upward movement, starting from a state where the second holding unit is not holding the second transported object W2.

[0037] The transport equipment 100 is equipped with a control system 3 (see Figure 4) that controls the second transport vehicle 20. The control system 3 further controls the first transport vehicle 10. As shown in Figure 4, in this embodiment, the control system 3 consists of a first control device 11 provided on the first transport vehicle 10, a second control device 21 provided on the second transport vehicle 20, and a higher-level control device 30 that can communicate with the first control device 11 and the second control device 21. Each of these control devices (11, 21, 30) is equipped with an arithmetic processing unit such as a microcomputer and peripheral circuits such as memory, and the function of each control device is realized through the cooperation of hardware such as the arithmetic processing unit and a program executed on that hardware.

[0038] The control system 3 (specifically, the higher-level control device 30) is aware of the current position of each of the multiple first transport vehicles 10 and each of the multiple second transport vehicles 20. In this embodiment, the first transport vehicles 10 are configured to recognize their own current position, and the second transport vehicles 20 are configured to recognize their own current position. The higher-level control device 30 then obtains information on the current position of the first transport vehicles 10 from the first transport vehicles 10 and information on the current position of the second transport vehicles 20 from the second transport vehicles 20.

[0039] The control system 3 (specifically, the higher-level control device 30) executes a first task assignment process to assign a first transport task to the first transport vehicle 10, specifying the source and destination for the first transport object W1. The first control device 11 of the first transport vehicle 10, which has been assigned the first transport task, controls the first transport vehicle 10 to execute the first transport task. The control system 3 (specifically, the higher-level control device 30) also executes a second task assignment process to assign a second transport task to the second transport vehicle 20, specifying the source and destination for the second transport object W2. The second control device 21 of the second transport vehicle 20, which has been assigned the second transport task, controls the second transport vehicle 20 to execute the second transport task.

[0040] In Figure 1, the second transport vehicle 20, denoted as "20a," is the second transport vehicle 20 performing a second transport task in which the second port 62 of the exposure processing apparatus 60a is the transport source and the second inbound / outbound section 81 of the second storage apparatus 80 is the transport destination. The path P in Figure 1 shows the transport path of the second transported object W2 by this second transport task. In this embodiment, the second transport task corresponds to the "transport task," and the second task assignment process corresponds to the "task assignment process."

[0041] The transport equipment 100 is equipped with a route-based power supply device 4 (see Figure 3). Although the route-based power supply device 4 is omitted in Figures 1 and 2, it is installed along the travel path 5 of the first transport vehicle 10 or the second transport vehicle 20. Specifically, the power supply unit (power supply line 40, described later in this embodiment) of the route-based power supply device 4 is installed along the travel path 5. The route-based power supply device 4 then supplies power to the first transport vehicle 10 or the second transport vehicle 20 that is on the travel path 5. The route-based power supply device 4 can supply power to the first transport vehicle 10 or the second transport vehicle 20 at any position in the section of the travel path 5 where the route-based power supply device 4 is installed. Furthermore, the route-based power supply device 4 can supply power to the first transport vehicle 10 in both stopped and moving states, and can also supply power to the second transport vehicle 20 in both stopped and moving states. Thus, the on-route power supply device 4 is not a device that is positioned at a specific location on the travel route 5 to supply power to a stationary transport vehicle, but rather a device that is installed along the travel route 5 so that it can supply power to a transport vehicle at any position on the travel route 5.

[0042] As shown in Figure 3, the on-path power supply device 4 comprises a power supply line 40 installed along the travel path 5 and a power supply device 41 that supplies power to the power supply line 40. In this embodiment, the power supply line 40 is arranged along the rails 50 that form the travel path 5. Specifically, a pair of power supply lines 40 are arranged along a pair of rails 50 with a gap between them in the left-right direction Y.

[0043] The method of supplying power from the power supply line 40 to the first transport vehicle 10 and the second transport vehicle 20 may be either a contact method or a non-contact method. In this embodiment, the method of supplying power from the power supply line 40 to the first transport vehicle 10 and the second transport vehicle 20 is a non-contact method, and power is supplied to the first transport vehicle 10 and the second transport vehicle 20 from the power supply line 40, which acts as a guide line.

[0044] As shown in Figures 3 and 4, the first transport vehicle 10 is equipped with a first power receiving device 14 that receives power from a power supply device 4 along the route, and the second transport vehicle 20 is equipped with a second power receiving device 24 that receives power from the power supply device 4 along the route. As shown in Figure 3, in this embodiment, the first power receiving device 14 is provided at the connection between the first travel section 12 and the first transfer section 13, and the second power receiving device 24 is provided at the connection between the second travel section 22 and the second transfer section 23. In this embodiment, the first power receiving device 14 and the second power receiving device 24 are positioned between a pair of power supply lines 40 and receive power from these pair of power supply lines 40 in a non-contact manner. The first power receiving device 14 and the second power receiving device 24 are equipped with, for example, pickup coils. AC power is induced in the pickup coil by the magnetic field generated around the power supply line 40 to which AC current is supplied. This alternating current power is converted to direct current, for example, and used to drive the first transport vehicle 10 and the second transport vehicle 20.

[0045] In this transport equipment 100, a power supply device 4 is provided along the route in the first transport area A1. Specifically, the power supply device 4 is provided along the travel route 5 (the travel route 5 of the first transport vehicle 10) within the first transport area A1. While the power supply device 4 does not need to be provided at some locations such as the merging and branching points along the travel route 5, the power supply device 4 is provided throughout the entire travel route 5 within the first transport area A1. As will be described later, in this embodiment, the power supply device 4 is not provided in the second transport area A2. Therefore, in this embodiment, the area where the power supply device 4 is provided becomes the first transport area A1.

[0046] The first transport vehicle 10 is configured to be able to travel using power supplied from the on-route power supply device 4. Specifically, the first transport vehicle 10 travels when the first travel unit 12 is driven by power received by the first power receiving device 14 from the on-route power supply device 4. The first transport vehicle 10 is also configured to be able to transfer the first transported object W1 between the transport vehicle 10 and the transfer target location using power supplied from the on-route power supply device 4. Specifically, the first transfer unit 13 is driven by power received by the first power receiving device 14 from the on-route power supply device 4, thereby transferring the first transported object W1 between the transport vehicle 10 and the transfer target location.

[0047] As will be described later, the second transport vehicle 20 is equipped with a power storage device 25 that stores electricity supplied from the on-route power supply device 4. In contrast, in this embodiment, the first transport vehicle 10 is not equipped with a power storage device that stores electricity supplied from the on-route power supply device 4. Here, "not equipped with a power storage device" means that it is not equipped with a power storage device with a capacity capable of storing electricity for normal travel along the travel route 5. Therefore, for example, the first transport vehicle 10 may be equipped with a power storage device (low-capacity power storage device) to allow it to travel a short distance in emergencies such as when it is unable to receive power from the on-route power supply device 4 due to a malfunction.

[0048] The second transport vehicle 20 is configured to receive power from the on-route power supply device 4 (in this embodiment, the on-route power supply device 4 located in the first transport area A1). As shown in Figure 4, the second transport vehicle 20 is equipped with a power storage device 25 that stores the power supplied from the on-route power supply device 4. The power storage device 25 is a power storage device with a capacity capable of storing the power necessary for normal travel along the travel path 5. The power storage device 25 is configured to be able to be charged and discharged. The power storage device 25 may be, for example, a battery, a capacitor, or a combination of a battery and a capacitor. The power storage device 25 is equipped with a power storage amount sensor for detecting the amount of power stored. The power storage amount sensor may include, for example, one or both of a voltage sensor and a current sensor.

[0049] In this transport equipment 100, the on-path power supply device 4 is not provided in at least a portion of the second transport area A2. In this embodiment, the on-path power supply device 4 is not provided in the second transport area A2. Specifically, the on-path power supply device 4 is not provided in the travel path 5 (travel path 5 of the second transport vehicle 20) within the second transport area A2. The second transport vehicle 20 is configured to be able to travel in the second transport area A2 using the power stored in the power storage device 25. Specifically, the second travel unit 22 is driven by the power stored in the power storage device 25, causing the second transport vehicle 20 to travel. The second transport vehicle 20 is also configured to be able to transfer the second transport object W2 between the second transport vehicle 20 and the transfer target location in the second transport area A2 using the power stored in the power storage device 25. Specifically, the second transfer unit 23 is driven by the power stored in the power storage device 25, causing the second transport object W2 to be transferred between the second transport vehicle 20 and the transfer target location.

[0050] Thus, in the second transport area A2, the second transport vehicle 20 runs on the power stored in the energy storage device 25. For this reason, for example, if the amount of energy stored in the energy storage device 25 is less than the first set value, the upper limit of the travel speed of the second transport vehicle 20 can be set lower compared to when the amount of energy stored in the energy storage device 25 is equal to or greater than the first set value. This makes it less likely that the amount of energy stored in the energy storage device 25 will become insufficient while the second transport vehicle 20 is in motion. In addition, even in the second transport area A2 where the power supply device 4 is not provided along the route, the energy storage device 25 can be charged. For example, a power supply device (power supply station) that supplies power to the stationary second transport vehicle 20 (specifically, the energy storage device 25) may be provided at a specific location along the travel route 5 in the second transport area A2.

[0051] As described above, in this transport equipment 100, the on-route power supply device 4 is not provided in at least a portion of the second transport area A2. Therefore, it is not necessary to place the on-route power supply device 4 (power supply line 40 in this embodiment) in at least a portion of the travel path 5 within the second transport area A2, which has the advantage of making it easier to reduce the cost of the transport equipment 100 and shorten the construction time. Furthermore, in this transport equipment 100, the first transport vehicle 10 does not need to be equipped with a power storage device to store the power supplied from the on-route power supply device 4, which also makes it easier to reduce the cost of the transport equipment 100. In addition, there is the advantage that it is easier to change the layout (layout of the travel path 5) in the part of the second transport area A2 where the on-route power supply device 4 is not provided. These advantages are particularly significant when the on-route power supply device 4 is not provided in the second transport area A2 (the entire area of ​​the second transport area A2).

[0052] The second transport vehicle 20 is configured to be able to travel in sections of the travel path 5 where the on-path power supply device 4 is provided (in this embodiment, travel path 5 within the first transport area A1) using at least one of the power supplied from the on-path power supply device 4 and the power stored in the energy storage device 25. Specifically, the second transport vehicle 20 travels when the second travel unit 22 is driven by at least one of the power received by the second power receiving device 24 from the on-path power supply device 4 and the power stored in the energy storage device 25. Furthermore, the second transport vehicle 20 is configured to be able to transfer the second transport object W2 to and from the transfer target location using at least one of the power supplied from the on-path power supply device 4 and the power stored in the energy storage device 25 in sections of the travel path 5 where the on-path power supply device 4 is provided. Specifically, the second transfer unit 23 is driven by at least one of the power received by the second power receiving device 24 from the power supply device 4 along the path and the power stored in the power storage device 25, thereby transferring the second transport object W2 between the second transport vehicle 20 and the transfer target location.

[0053] If it is necessary to charge the energy storage device 25, the energy storage device 25 may be charged while the second transport vehicle 20 is traveling through a section of the travel path 5 where the on-route power supply device 4 is provided. In this case, by lowering the travel speed of the second transport vehicle 20, more power from the power supplied by the on-route power supply device 4 can be secured to be used to charge the energy storage device 25. For example, the upper limit of the travel speed of the second transport vehicle 20 can be set to be lowered in stages or continuously as the amount of energy stored in the energy storage device 25 decreases.

[0054] As described above, the control system 3 (specifically, the higher-level control device 30, hereinafter the same) executes a second task assignment process to assign a second transport task to the second transport vehicle 20, specifying the source and destination of the second transport object W2. Specifically, the control system 3 is configured to acquire the amount of charge stored in the energy storage device 25 of the second transport vehicle 20. The amount of charge is expressed, for example, as a percentage of the remaining capacity relative to the fully charged capacity. In this case, the amount of charge in a fully charged state is 100%, and the amount of charge in a completely discharged state is 0%. The amount of charge stored in the energy storage device 25 can be estimated, for example, based on the output voltage of the energy storage device 25, or based on the integrated value of the amount of power charged to the energy storage device 25 and the integrated value of the amount of power discharged from the energy storage device 25, or by a combination of these.

[0055] Furthermore, the control system 3 is configured not to assign the second transport task to a second transport vehicle 20 whose energy storage capacity in the energy storage device 25 is less than the second setpoint. In other words, the control system 3 is configured to assign the second transport task to a second transport vehicle 20 whose energy storage capacity in the energy storage device 25 is equal to or greater than the second setpoint. The energy storage capacity of the energy storage device 25 that is compared with the second setpoint may be the energy storage capacity at the time of assignment of the second transport task, or the energy storage capacity (predicted value) at the end of the second transport task. In the latter case, for example, the energy storage capacity at the end of the second transport task can be predicted by predicting the amount of electricity consumed by the execution of the second transport task based on past performance, etc.

[0056] In this embodiment, the control system 3 moves the second transport vehicle 20, which is not assigned a second transport task, to a location where a power supply device 4 is provided (in this embodiment, a location within the first transport area A1), and performs a charging process to charge the energy storage device 25 using the power supply device 4. Once the charging of the energy storage device 25 is complete, the second transport vehicle 20 either waits at that location, or moves to another location (for example, a location in the second transport area A2 where a power supply device 4 is not provided) and waits. In the latter case, the second transport vehicle 20 is moved to a location in the second transport area A2 where a power supply device 4 is not provided and waits there, for example, through a waiting process described later.

[0057] As shown in Figure 1, in this embodiment, a waiting section S is set up within the first transport area A1 where the second transport vehicle 20 can wait. The control system 3 is configured to move the second transport vehicle 20 to the waiting section S during the charging process. The second transport vehicle 20 labeled "20c" in Figure 1 is the second transport vehicle 20 that has been moved to the waiting section S by the charging process and is charging the energy storage device 25 in the waiting section S. Since the waiting section S is set up within the first transport area A1, it is preferable to set the waiting section S in a location that has little impact on the transport efficiency of the first transported object W1 by the first transport vehicle 10.

[0058] The waiting section S may be set in a location where the first transport vehicle 10 travels, or in a location where the first transport vehicle 10 does not travel. If the waiting section S is set in a location where the first transport vehicle 10 travels, the control system 3 controls the first transport vehicle 10 so that it does not travel through the waiting section S, for example, if the second transport vehicle 20 is waiting in the waiting section S. Alternatively, the control system 3 may be configured to control the second transport vehicle 20 so that, when the first transport vehicle 10 travels through the waiting section S, the second transport vehicle 20 waiting in the waiting section S is moved to a location that does not interfere with the travel of the first transport vehicle 10. On the other hand, if the waiting section S is set in a location where the first transport vehicle 10 does not travel, the waiting section S becomes a dedicated section for the second transport vehicle 20 to wait and charge. In this case, the control system 3 controls the first transport vehicle 10 so that it does not travel through the waiting section S at all times.

[0059] In this embodiment, the control system 3 performs a charge amount determination process to determine whether the amount of charge stored in the energy storage device 25 of the second transport vehicle 20 is equal to or greater than the third set value. If the control system 3 determines that the amount of charge stored in the energy storage device 25 of the second transport vehicle 20, which is not assigned a second transport task, is equal to or greater than the third set value, it performs a standby process to have the second transport vehicle 20 wait in a location in the second transport area A2 where no on-route power supply device 4 is provided. In this case, the control system 3 performs a standby process instead of a charging process for the second transport vehicle 20, which is not assigned a second transport task. In this embodiment, no on-route power supply device 4 is provided in the second transport area A2. Therefore, in this embodiment, basically any location in the second transport area A2 can be used as a waiting location for the second transport vehicle 20 during the standby process. In Figure 1, the second transport vehicle 20 labeled "20b" is the second transport vehicle 20 that is waiting in the second transport area A2 due to the standby process.

[0060] As described above, in this embodiment, the control system 3 is configured to assign the second transport task to the second transport vehicle 20 whose stored energy in the energy storage device 25 is equal to or greater than the second set value. The reason for having the second transport vehicle 20 stand by during the standby process is to quickly start the second transport task by assigning it to the standby second transport vehicle 20 when the second transport task arises. Therefore, in this embodiment, the third set value is set to the same value as or greater than the second set value. In this embodiment, the third set value corresponds to the "set value".

[0061] Furthermore, a waiting area may be designated where the second transport vehicle 20 cannot wait. In this case, the control system 3 will have the second transport vehicle 20, which is not assigned a second transport task, wait in a location other than the waiting area (for example, waiting area S). For example, the entire area of ​​the second transport area A2 can be designated as a waiting area.

[0062] Incidentally, in this embodiment, the second transport area A2 does not have a power supply device 4 along the route. Therefore, the number of power supply devices 4 along the route can be reduced compared to the case where a power supply device 4 is provided in the second transport area A2. On the other hand, in order to drive the second transport vehicle 20 with electricity in the second transport area A2, it is necessary to provide a power storage device 25 on the second transport vehicle 20. From the viewpoint of reducing the cost of the transport equipment 100, it is desirable that the cost reduction due to the reduction of the power supply device 4 along the route exceeds the cost increase due to providing a power storage device 25 on the second transport vehicle 20.

[0063] In view of the above, it is preferable to configure the system such that the total length of the travel path 5 of the first transport vehicle 10 in the first transport area A1 is defined as the first travel path length, and the total length of the travel path 5 of the second transport vehicle 20 in the second transport area A2 is defined as the second travel path length, and the value obtained by dividing the second travel path length by the number of second transport vehicles 20 is greater than the value obtained by dividing the first travel path length by the number of first transport vehicles 10. In other words, it is preferable to configure the system such that the number of second transport vehicles 20 per unit length of travel path 5 in the second transport area A2 is less than the number of first transport vehicles 10 per unit length of travel path 5 in the first transport area A1. With such a configuration, it is easier to ensure that the cost reduction due to the reduction of the on-path power supply device 4 exceeds the cost increase due to providing the energy storage device 25 on the second transport vehicle 20.

[0064] Of course, the cost reduction resulting from the elimination of the on-path power supply devices 4 does not necessarily exceed the cost increase resulting from installing the energy storage device 25 on the second transport vehicle 20. For example, if the installation cost of the on-path power supply devices 4 per unit length of the travel path 5 is high, even if the length of the second travel path is short (for example, shorter than the length of the first travel path), the cost reduction resulting from the elimination of the on-path power supply devices 4 can exceed the cost increase resulting from installing the energy storage device 25 on the second transport vehicle 20. In particular, when the second transported object W2 is a container that houses a photoresist mask 2, as in this embodiment, the layout of the travel path 5 of the second transport vehicle 20 in the second transport area A2 becomes more complex, which tends to increase the installation cost of the on-path power supply devices 4 per unit length of the travel path 5 in the second transport area A2. Therefore, in this embodiment, even when the second travel path length is shorter than the first travel path length, the cost reduction due to the reduction of the on-path power supply device 4 is more likely to exceed the cost increase due to the provision of a power storage device 25 on the second transport vehicle 20.

[0065] [Other Embodiments] (1) In the above embodiment, a configuration in which no on-path power supply device 4 is provided in the second transport area A2 was described as an example. However, the present disclosure is not limited to such a configuration, and a configuration in which an on-path power supply device 4 is provided in a part of the second transport area A2 is also possible. Specifically, a configuration in which an on-path power supply device 4 is provided along a part of the travel path 5 (travel path 5 of the second transport vehicle 20) within the second transport area A2 is also possible. In this case, the second transport vehicle 20 can receive power from the on-path power supply device 4 provided in the first transport area A1, as well as from the on-path power supply device 4 provided in the second transport area A2.

[0066] (2) In the above embodiment, a configuration was described as in which a waiting section S is set within the first transport area A1, and the control system 3 moves the second transport vehicle 20 to the waiting section S during the charging process. However, the present disclosure is not limited to such a configuration, and a configuration is also possible in which a waiting section S is not set within the first transport area A1, and the location to which the second transport vehicle 20 is moved during the charging process is set to a location that has little impact on the transport efficiency of the first transported object W1 by the first transport vehicle 10, depending on the state of the first transport area A1 at that time. Furthermore, if a power supply device 4 is provided in a part of the second transport area A2, the location to which the second transport vehicle 20 is moved during the charging process may be set to a location within the second transport area A2.

[0067] (3) In the above embodiment, the control system 3 was described as an example in which, when it determines that the amount of charge stored in the energy storage device 25 of the second transport vehicle 20, which is not assigned a second transport task, is equal to or greater than the third set value, it performs a waiting process to have the second transport vehicle 20 wait in a location in the second transport area A2 where no on-route power supply device 4 is provided. However, the disclosure is not limited to such a configuration, and the control system 3 may also be configured to perform a waiting process to have the second transport vehicle 20 wait in a location in the second transport area A2 where an on-route power supply device 4 is provided or in a location within the first transport area A1. Furthermore, the control system 3 may also be configured to perform a charging process regardless of whether the amount of charge stored in the energy storage device 25 of the second transport vehicle 20, which is not assigned a second transport task, is equal to or greater than the third set value. In this case, if there is no need to charge the energy storage device 25 of the second transport vehicle 20, which has been moved to a location where an on-route power supply device 4 is provided by the charging process, the energy storage device 25 will not be charged and the second transport vehicle 20 will wait in that location.

[0068] (4) In the above embodiment, the case in which the first control device 11, the second control device 21, and the higher-level control device 30 constitute the control system 3 was described as an example. However, the present disclosure is not limited to such a configuration, and the control system 3 may be composed of only the higher-level control device 30. Alternatively, the transport equipment 100 may not have a higher-level control device 30, and the control system 3 may be composed of the first control device 11 and the second control device 21, which can communicate with each other, working together.

[0069] (5) The configurations disclosed in each of the embodiments described above can be applied in combination with configurations disclosed in other embodiments (including combinations of embodiments described as other embodiments), as long as no inconsistencies arise. With regard to other configurations, the embodiments disclosed in this specification are merely illustrative in all respects. Therefore, various modifications can be made as appropriate without departing from the spirit of this disclosure.

[0070] [Summary of this embodiment] The following is a summary of the embodiments of the conveying equipment described above.

[0071] The transport equipment comprises a first transport vehicle for transporting a first transport object, a second transport vehicle for transporting a second transport object different from the first transport object, a first transport area which is the area on which the first transport vehicle travels to transport the first transport object, a second transport area which is the area on which the second transport vehicle travels to transport the second transport object, and an on-path power supply device provided along the travel path of the first transport vehicle or the second transport vehicle, which supplies power to the first transport vehicle or the second transport vehicle while it is on the travel path, wherein the on-path power supply device is provided in the first transport area, and the on-path power supply device is not provided in at least a part of the second transport area, the first transport vehicle is configured to be able to travel using the power supplied from the on-path power supply device, the second transport vehicle is configured to be able to travel in both the first transport area and the second transport area and to receive power from the on-path power supply device, and is equipped with a power storage device that stores the power supplied from the on-path power supply device, and is configured to be able to travel in the second transport area using the power stored in the power storage device.

[0072] According to this configuration, in the first transport area where a power supply device is provided along the transport route, the first transport vehicle can be driven by electricity and moved appropriately. Furthermore, the second transport vehicle, which can travel in both the first and second transport areas, is equipped with a power storage device that stores the electricity supplied from the power supply device along the transport route. Therefore, the second transport vehicle can be driven by electricity and moved appropriately not only in the first transport area where a power supply device along the transport route is provided, but also in the second transport area where a power supply device along the transport route is not provided in at least a part of it.

[0073] Thus, this configuration makes it possible to drive both the first and second transport vehicles using electricity to ensure proper operation without installing a power supply device along the route in at least a portion of the second transport area. Therefore, it is easier to reduce the cost of the transport equipment compared to the case where a power supply device is installed along the route throughout the entire second transport area.

[0074] As described above, with this configuration, when the transport equipment includes a first transport vehicle, a second transport vehicle, a first transport area, and a second transport area, it is possible to reduce the cost of the equipment while driving both the first and second transport vehicles with electricity to ensure proper operation.

[0075] Here, it is preferable to provide a control system for controlling the second transport vehicle, wherein the control system performs a task assignment process that assigns a transport task to the second transport vehicle specifying the source and destination of the second transported object, and a charging process that moves the second transport vehicle, which is not assigned a transport task, to a location where the on-route power supply device is provided, and charges the power storage device using the on-route power supply device.

[0076] With this configuration, the second transport vehicle's energy storage device can be charged during idle time when no transport task is assigned to it. Therefore, it is easier to improve the transport efficiency of the second transport vehicle.

[0077] In the configuration described above, where the control system performs the task assignment process and the charging process, it is preferable that a waiting section is set within the first transport area where the second transport vehicle can wait, and that the control system is configured to move the second transport vehicle to the waiting section during the charging process.

[0078] This configuration allows for the second transport vehicle to wait and its energy storage device to be charged appropriately within a designated waiting area within the first transport area. Furthermore, by having the second transport vehicle wait in a designated waiting area within the first transport area, rather than at any arbitrary location within the first transport area, the waiting second transport vehicle is less likely to interfere with the transport of the first transported goods by the first transport vehicle.

[0079] Furthermore, the control system preferably performs a power storage amount determination process to determine whether the amount of power stored in the power storage device is equal to or greater than a set value, and if it determines that the amount of power stored in the power storage device of the second transport vehicle, which is not assigned a transport task, is equal to or greater than the set value, it preferably performs a waiting process to have the second transport vehicle wait in a location in the second transport area where no power supply device is provided along the route.

[0080] This configuration allows a second transport vehicle, which has a relatively low need to charge its energy storage device, to be kept on standby within the second transport area. Therefore, when a transport task for the second transport item arises, the transport task can be started quickly, making it easier to improve the transport efficiency of the second transport item by the second transport vehicle.

[0081] In the conveying equipment of each of the above configurations, it is preferable that the equipment is equipped with multiple first conveyors and multiple second conveyors, where the total length of the travel path of the first conveyors in the first conveying area is defined as the first travel path length, and the total length of the travel path of the second conveyors in the second conveying area is defined as the second travel path length, and the value obtained by dividing the second travel path length by the number of second conveyors is greater than the value obtained by dividing the first travel path length by the number of first conveyors.

[0082] In the transport equipment disclosed herein, the number of on-route power supply devices can be reduced compared to the case where power supply devices are installed throughout the entire second transport area, but it is necessary to install a power storage device on the second transport vehicle. With this configuration, the value obtained by dividing the second travel route length by the number of second transport vehicles is greater than the value obtained by dividing the first travel route length by the number of first transport vehicles, so the cost reduction due to the reduction in on-route power supply devices is more likely to exceed the cost increase due to installing a power storage device on the second transport vehicle. Therefore, it is easier to reduce the cost of the transport equipment.

[0083] Furthermore, it is preferable to have multiple first transport vehicles and one or more second transport vehicles, with the number of second transport vehicles being less than the number of first transport vehicles.

[0084] This configuration allows for a reduction in the number of second transport vehicles that require a power storage device. This minimizes the cost increase associated with equipping the second transport vehicle with a power storage device, making it easier to reduce the overall cost of the transport equipment.

[0085] Furthermore, it is preferable that the total length of the travel path of the first transport vehicle in the first transport area is defined as the first travel path length, and the total length of the travel path of the second transport vehicle in the second transport area is defined as the second travel path length, with the second travel path length being shorter than the first travel path length.

[0086] This configuration makes it easier to keep the length of the route from a location in the second transport area where no on-route power supply device is provided to a location where an on-route power supply device is provided (for example, a location within the first transport area) short. Therefore, it is less likely that the amount of charge stored in the power storage device will become insufficient while the second transport vehicle, which needs to recharge the power storage device, is moving toward a location where an on-route power supply device is provided.

[0087] Furthermore, it is preferable that the first transported object is a container for housing a semiconductor substrate, and the second transported object is a container for housing a photoresist mask used in processing the semiconductor substrate.

[0088] In this configuration, where the first transported item is a container containing a semiconductor substrate and the second transported item is a container containing a photoresist mask, the number of second transport vehicles tends to be less than the number of first transport vehicles. One reason for this is that, for example, the frequency of transport tasks for containers containing photoresist masks is generally lower than the frequency of transport tasks for containers containing semiconductor substrates. Furthermore, in this configuration, where the first transported item is a container containing a semiconductor substrate and the second transported item is a container containing a photoresist mask, the cost of installing power supply equipment along the transport route to the second transport area tends to be higher (i.e., more expensive) despite the small number of second transport vehicles. One reason for this is that, for example, the layout of the transport route for containers containing photoresist masks tends to be more complex than the layout of the transport route for containers containing semiconductor substrates.

[0089] Thus, when the first transported object is a container containing a semiconductor substrate and the second transported object is a container containing a photoresist mask, the number of second transport vehicles tends to be less than the number of first transport vehicles, and the cost of installing on-path power supply equipment to the second transport area tends to be higher. However, according to the technology of this disclosure, although it is necessary to install a power storage device on the second transport vehicle, the number of on-path power supply devices in the second transport area can be reduced compared to the case where on-path power supply devices are installed throughout the entire second transport area. Therefore, in this configuration with the above tendencies, it is easy to reduce the cost of transport equipment by ensuring that the cost reduction from reducing on-path power supply devices exceeds the cost increase from installing a power storage device on the second transport vehicle. Accordingly, the technology of this disclosure is particularly suitable when the first transported object is a container containing a semiconductor substrate and the second transported object is a container containing a photoresist mask, as in this configuration.

[0090] The conveying equipment relating to this disclosure only needs to be able to achieve at least one of the effects described above. [Explanation of Symbols]

[0091] 1: Semiconductor substrate 2: Photoresist mask 3: Control System 4: Power supply device on the power supply path 5: Route 10: First transport vehicle 20: Second transport vehicle 25: Energy storage device 100: Conveying equipment A1: First transport area A2: Second transport area S: Waiting section W1: First transported item W2: Second transported item

Claims

1. The first transport vehicle transports the first transported item, A second transport vehicle that transports a second transport object different from the first transport object, A first transport area is an area in which the first transport vehicle travels to transport the first transported object, The second transport area is the area in which the second transport vehicle travels to transport the second transported object, The system includes a power supply device provided along the travel path of the first or second transport vehicle, which supplies power to the first or second transport vehicle while it is on the travel path, The first transport area is provided with the power supply device along the transport path. At least a portion of the second transport area is not provided with the power supply device along the path. The first transport vehicle is configured to be able to travel using power supplied from the power supply device along the route, The second transport vehicle is configured to be able to travel in both the first transport area and the second transport area and to receive power from the on-route power supply device, and is equipped with a power storage device for storing the power supplied from the on-route power supply device, and is configured to be able to travel in the second transport area using the power stored in the power storage device, as a transport facility.

2. The system includes a control system for controlling the second transport vehicle, The control system is A task assignment process that assigns a transport task to the second transport vehicle, specifying the source and destination of the transport for the second transport item, The transport equipment according to claim 1, which performs a charging process in which the second transport vehicle, which is not assigned the transport task, is moved to a location where the on-route power supply device is provided, and the on-route power supply device is used to charge the power storage device.

3. Within the first transport area, a waiting section is set up where the second transport vehicle can wait. The transport equipment according to claim 2, wherein the control system is configured to move the second transport vehicle to the waiting section during the charging process.

4. The transport equipment according to claim 2, wherein the control system performs a power storage amount determination process to determine whether the amount of power stored in the power storage device is equal to or greater than a set value, and if it determines that the amount of power stored in the power storage device of the second transport vehicle, which is not assigned a transport task, is equal to or greater than the set value, it performs a waiting process to cause the second transport vehicle to wait at a location in the second transport area where no power supply device is provided along the route.

5. The system is equipped with multiple first transport vehicles and multiple second transport vehicles, The total length of the travel path of the first transport vehicle in the first transport area is defined as the first travel path length, and the total length of the travel path of the second transport vehicle in the second transport area is defined as the second travel path length. The transport equipment according to any one of claims 1 to 4, wherein the value obtained by dividing the second travel path length by the number of second transport vehicles is greater than the value obtained by dividing the first travel path length by the number of first transport vehicles.

6. The system is equipped with multiple first transport vehicles and one or more second transport vehicles. The transport equipment according to any one of claims 1 to 4, wherein the number of second transport vehicles is less than the number of first transport vehicles.

7. The total length of the travel path of the first transport vehicle in the first transport area is defined as the first travel path length, and the total length of the travel path of the second transport vehicle in the second transport area is defined as the second travel path length. The conveying equipment according to any one of claims 1 to 4, wherein the second travel path length is shorter than the first travel path length.

8. The first transported object is a container for housing a semiconductor substrate, The transport equipment according to any one of claims 1 to 4, wherein the second transported object is a container for housing a photoresist mask used in processing the semiconductor substrate.

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