Laser irradiation device

Abstract

This invention provides a technology that makes it possible to suppress distortion on the surface of a mirror when a thin mirror is attached to a member having a recess using adhesive. [Solution] The mirror adjustment member 90 is located in the center of the recess 93 and has a contact surface 95 that abuts against the fixing surface 110B of the first mirror 110, an adhesive groove 94 which is recessed more than the contact surface 95 and is an annular groove surrounding the outer edge of the contact surface 95, and a first through hole 96A and a second through hole 96B that communicate with the adhesive groove 94. The first mirror 110 is held by the mirror adjustment member 90 by the adhesive introduced into the adhesive groove 94, which causes the portion of the fixing surface 110B facing the adhesive groove 94 to adhere to it.

Description

Technical Field

[0001] The present application relates to a laser irradiation apparatus that irradiates a laser beam.

Background Art

[0002] Patent Document 1 describes an objective lens mounting structure that consists of an objective lens provided with an outer ring having a flat surface on the outer periphery of a lens curved surface, and a lens holder having a hole into which the objective lens is inserted, the lens holder being provided with an annular portion at the bottom of the hole, the annular portion having an inner diameter equal to or larger than the inner periphery of the outer ring and having a plurality of recesses, wherein the objective lens is inserted into the hole, the objective lens is positioned by the side wall of the hole and the annular portion, and the outer ring and the lens holder are fixed with an adhesive at the positions where the recesses are located.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of Invention

Problem to be Solved by the Invention

[0004] However, in the objective lens mounting structure described in Patent Document 1, when a thin mirror is attached to a member having recesses with an adhesive, distortion occurs on the mirror surface.

[0005] The present application aims to provide a technology that makes it possible to suppress distortion occurring on the mirror surface when a thin mirror is attached to a member having recesses with an adhesive.

Means for Solving the Problem

[0006] To achieve the above objective, the laser irradiation device described in the embodiment comprises a laser oscillator that emits laser light, an optical path member that guides the laser light in a predetermined direction, and a main body housing that houses the laser oscillator and the optical path member inside, wherein the optical path member comprises a first mirror having a reflective surface and a fixed surface that is the back surface of the reflective surface, a second mirror having a reflective surface, a first member having a recess larger than the outer shape of the first mirror and holding the first mirror in the recess, and a second member holding the second mirror, wherein the reflective surface of the first mirror reflects the laser light, which is then reflected by the reflective surface of the second mirror and guided in a predetermined direction, wherein the first member is located in the center of the recess and has a contact surface that abuts the fixed surface of the first mirror, an adhesive groove which is recessed more than the contact surface and surrounds the outer edge of the contact surface and is an annular groove, and a first through hole and a second through hole that communicate with the adhesive groove, wherein the first mirror is held by the first member by the portion of the fixed surface facing the adhesive groove being bonded by an adhesive introduced into the adhesive groove. [Effects of the Invention]

[0007] According to the laser irradiation device described in the embodiment, adhesive is poured into the adhesive groove, the first mirror is attached to the first member, and when the adhesive dries, the adhesive shrinks, causing the surface of the first mirror to become convex. However, since the back surface of the first mirror conforms to the contact surface, the convex tendency, that is, the distortion that occurs on the surface of the first mirror, is suppressed. [Brief explanation of the drawing]

[0008] [Figure 1] This is a perspective view showing the appearance of a laser marker according to one embodiment of the present application. [Figure 2] Figure 1 is a perspective view showing the laser marker with its cover removed. [Figure 3] Figure 2 is a perspective view of the periscope included in the laser marker, seen from the upper right rear. [Figure 4] This is a cross-sectional view along line AA in Figure 3. [Figure 5] Figure 3 is a perspective view of the base of the periscope, seen from the rear and above. [Figure 6]Figure 3 shows a perspective view of the mirror adjustment member included in the periscope, viewed from the rear and above ((a)) and from the left front and below ((b)). [Figure 7] This figure illustrates how to attach the first mirror to the mirror mount included in the mirror adjustment member shown in Figure 6. Figure 7(a) shows an example of a jig for attaching the first mirror to the mirror mount, and Figure 7(b) shows a magnified view of the mirror mount when it is installed on the jig. [Figure 8] This diagram illustrates a method for attaching the second mirror to the retaining member formed at the base of Figure 5. [Modes for carrying out the invention]

[0009] The embodiments of this application will be described in detail below with reference to the drawings. In the drawings used in the following description, some of the basic components may be omitted, and the dimensional ratios of the depicted parts are not necessarily accurate. In each figure, the front-to-back direction D1, the up-and-down direction D2, and the left-to-right direction D3 are as indicated in each figure.

[0010] As shown in Figure 1, a laser marker 1 according to one embodiment of the present application comprises a first body 2, a second body 3, and a third body 4. The laser marker 1 is an example of a laser irradiation device. Processing laser light R for marking (printing) is emitted from the third body 4. Processing laser light R is an example of laser light. The processing laser light R is oscillated by a processing laser oscillator 9 (see Figure 2) installed inside the first body 2, passes through the second body 3, and is scanned and focused by a galvanometer scanner and fθ lens (not shown) installed inside the third body 4. The processing laser oscillator 9 is an example of laser oscillation.

[0011] The first main body 2 has a roughly rectangular parallelepiped shape that is elongated in the front-to-back direction D1, and comprises a main body housing 23 and a cover 25. The cover 25 is composed of a top cover 25A, a left-side cover 25B, and a right-side cover 25C. However, the outer shape of the right-side cover 25C is not visible in Figure 1, but it is the same as the outer shape of the left-side cover 25B. The main body housing 23 and the cover 25 are fixed together with multiple screws 27.

[0012] Figure 2 shows the first main body 2 with the cover 25 removed. The main body housing 23 comprises a base plate 23A, a rear plate 23B, and a front plate 23C. The rear plate 23B is screwed in to stand upright from the rear end of the base plate 23A. The rear plate 23B is provided with terminals 21, etc., for connecting a control device (not shown) for controlling the laser marker 1 and a cable (not shown) for connecting the laser marker 1 to the laser marker 1. The front plate 23C is screwed in to stand upright from the front end of the base plate 23A. The second main body 3 (and the third main body 4) are connected to the front plate 23C. A cable 100 for the galvanometer scanner is stretched between the first main body 2 and the third main body 4. The cable 100 is routed through cable glands 11A and 11B to the front plate 23C of the first main body 2 and the rear of the third main body 4.

[0013] The processing laser oscillator 9 is arranged on the base plate 23A along the front-to-back direction D1. The laser light source 10 is an integrated unit consisting of the processing laser oscillator 9, a periscope 8, a telescope 7, and other components. If the processing laser oscillator 9 needs to be replaced, for example due to its lifespan or malfunction, the laser light source 10, including the processing laser oscillator 9, is replaced. The periscope 8 is an example of an optical path component. The telescope 7 is an example of a second optical path component.

[0014] The processing laser oscillator 9 has a roughly rectangular parallelepiped shape that is long in the front-to-back direction D1, and emits processing laser light R horizontally in the forward direction from a predetermined position on its front surface. A roughly rectangular parallelepiped shape periscope 8, which is long in the up-to-down direction D2, is positioned on a part of the upper front surface of the oscillator. The periscope 8 is equipped with two first mirrors 110 and a second mirror 120 (see Figure 3), and the emission position and emission angle of the processing laser light R emitted from the processing laser oscillator 9 are adjusted by adjusting the angle of the first mirror 110. The detailed configuration of the periscope 8 will be described later based on Figures 3 to 8.

[0015] A telescope 7 is positioned in front of the periscope 8. The telescope 7 has a cylindrical portion 7A extending forward, and within the cylindrical portion 7A is a lens assembly (not shown) that corrects (expands or reduces) the optical diameter of the processing laser beam R emitted from the periscope 8. The telescope 7 is the same as a so-called beam expander.

[0016] A shutter unit 6 is positioned in front of the laser light source 10, more specifically adjacent to the front of the telescope 7. The shutter unit 6 is a component that can switch between blocking and allowing the processing laser beam R emitted from the telescope 7 to pass through to the downstream stage. Specifically, it may be a mechanical shutter equipped with a shielding plate (blade) that can move between the optical path and outside the optical path of the processing laser beam R, and having an actuator to switch the position of the shielding plate. Alternatively, it may be an optical shutter that changes transmittance using liquid crystal. The shutter unit 6 is attached to the inner surface 23C1 of the front plate 23C.

[0017] FIG. 3 is a perspective view of the periscope 8 as viewed from the upper right rear. FIG. 4 is a cross-sectional view taken along line A-A in FIG. 3. As shown in FIG. 4, the periscope 8 reflects the machining laser beam R, which is emitted horizontally forward from a predetermined position on the front surface of the machining laser oscillator 9, in the vertical direction by the first mirror 110, and reflects it in the horizontal direction by the second mirror 120. Thereby, the periscope 8 displaces the machining laser beam R, which is emitted horizontally forward from the predetermined position of the machining laser oscillator 9, upward by a predetermined distance, and makes it enter the telescope 7 at the subsequent stage. That is, the periscope 8 functions to displace the machining laser beam R emitted from the machining laser oscillator 9 to the incident position of the telescope 7.

[0018] As shown in FIG. 3, the periscope 8 has a base portion 80. In the periscope 8, a mirror adjustment member 90 is disposed inside the base portion 80, and the second mirror 120 is fixedly held. The mirror adjustment member 90 is an example of the first member.

[0019] The mirror adjustment member 90 is mainly composed of a substantially rectangular parallelepiped-shaped pedestal portion 91 and a mirror mount 92. As shown in FIG. 3, the mirror mount 92 holds the first mirror 110 and is placed on the surface 91A of the pedestal portion 91. The pedestal portion 91 is installed on an installation surface 81 (see FIG. 5) formed at the lower part of the base portion 80. Further, as shown in FIG. 4, the pedestal portion 91 is fixed to the base portion 80 by screwing a bolt 100 into a screw hole 91C1 formed in the front wall 91C of the pedestal portion via a screw hole 80A1 formed in the front wall 80A of the base portion 80.

[0020] The mirror mount 92, which is placed on the base portion 91, is fixed to the base portion 91 by three hex socket head bolts 97A to 97C that penetrate upward from the back surface 91B of the base portion 91, as shown in Figure 6(b). More specifically, the three hex socket head bolts 97A to 97C are passed upward from the back surface 91B of the base portion 91 and screwed into threaded holes 99A to 99C (see Figure 7(b)) formed on the back surface 92C of the mirror mount 92 via cylindrical spring washers 98A to 98C, thereby fixing the mirror mount 92 to the base portion 91. The spring washers 98A to 98C maintain the position of the base portion 91 relative to the base portion 80, which is adjusted by the hex socket head bolts 97A to 97C, using the reaction force of the springs. Furthermore, the spring washers 98A to 98C absorb vibrations transmitted from the base 80 to the base 91, and have the function of making it difficult for those vibrations to be transmitted to the mirror mount 92.

[0021] When each hex socket head bolt 97A to 97C is rotated clockwise when viewed from below, each hex socket head bolt 97A to 97C tightens the corresponding screw holes 99A to 99C, so the back surface 92C of the mirror mount 92 near the screw holes 99A to 99C moves closer to the surface 91A of the base portion 91. On the other hand, when each hex socket head bolt 97A to 97C is rotated counterclockwise when viewed from below, each hex socket head bolt 97A to 97C loosens the corresponding screw holes 99A to 99C, so the back surface 92C of the mirror mount 92 near the screw holes 99A to 99C moves away from the surface 91A of the base portion 91. This allows adjustment of the angle between the plane constituting the inclined portion 92B of the mirror mount 92 and the plane constituting the surface 91A of the mirror mount 92, thereby allowing adjustment of the emission position and emission angle of the processing laser beam R emitted from the processing laser oscillator 9.

[0022] Next, the detailed configuration of the mirror mount 92 and the method for attaching the first mirror 110 to the mirror mount 92 will be described. Figure 6 shows the mirror adjustment member 90 with the first mirror 110 not attached. As shown in Figure 6(a), the mirror mount 92 is composed of a flat portion 92A and an inclined portion 92B. The angle between the plane constituting the surface of the flat portion 92A and the plane constituting the surface of the inclined portion 92B is, for example, 45 degrees.

[0023] A circular recess 93, visible in plan view, is formed on the surface of the inclined portion 92B for holding the first mirror 110. The inner diameter of the recess 93 is slightly larger than the outer diameter of the first mirror 110.

[0024] A contact surface 95 is formed in the center of the recess 93, which contacts the fixed surface 110B (see Figure 4), which is the back surface of the reflective surface 110A (see Figure 4) of the first mirror 110. The contact surface 95 is formed such that its area is at least 1 / 3 of the area of ​​the fixed surface 110B of the first mirror 110. An annular groove 94 is formed surrounding the outer edge of the contact surface 95. As will be described later based on Figure 7, the groove 94 is a groove through which adhesive is poured to hold and fix the first mirror 110 in the recess 93, and therefore, the groove 94 will be referred to as the adhesive groove 94 below. The adhesive groove 94 is formed in a recessed state compared to the contact surface 95. The depth of the adhesive groove 94 is smaller than the width of the adhesive groove 94. The reason for this is to widen the cross-sectional area of ​​the adhesive groove 94 so that the high-viscosity adhesive can flow easily. The height of the bottom surface 93A between the outer edge of the adhesive groove 94 and the inner edge of the recess 93 is the same as the height of the contact surface 95. Furthermore, a first through-hole 96A and a second through-hole 96B are formed, communicating with the adhesive groove 94. The first through-hole 96A and the second through-hole 96B are formed to be located on opposite sides of the contact surface 95. The first through-hole 96A is used as a hole for injecting adhesive into the adhesive groove 94, as will be described later based on Figure 7. On the other hand, the second through-hole 96B is used as a hole for checking the amount of adhesive injected into the adhesive groove 94.

[0025] Figure 7(a) shows an example of a jig 200 for attaching the first mirror 110 to the mirror mount 92. The jig 200 has multiple (for example, 10) holes 210 for installing the first mirror 110. In the example in Figure 7(a), the first mirror 110 is installed in each hole 210. Since the back surface of the reflective surface 110A of the first mirror 110 is the fixed surface 110B, it is installed in each hole 210 so that the fixed surface 110B is the front surface.

[0026] Figure 7(a) shows a jig 200 with one mirror mount 92 installed. The mirror mount 92 is installed in the jig 200 so that the surface of the inclined portion 92B is horizontal. The upper end 92B1 of the inclined portion 92B of the mirror mount 92 is placed against the contact portion 220 for positioning, and the rear end 92C1 of the back surface 92C of the mirror mount 92 is placed against the pressing portion 230 for fixing. This ensures that the fixing surface 110B of the first mirror 110 and the contact surface 95 and bottom surface 93A of the recess 93 of the mirror mount 92 are in close contact. In this state, adhesive is injected through the first through hole 96A. The adhesive is injected until the second through hole 96B is blocked with adhesive. Since the adhesive is usually injected with a nozzle, the inner diameter of the first through hole 96A must be large enough for the adhesive nozzle to be inserted. In contrast, the second through-hole 96B only needs to be able to confirm whether or not the adhesive fills the adhesive groove 94, so its inner diameter only needs to be of a size that can be confirmed. However, in this embodiment, the sizes of the first through-hole 96A and the second through-hole 96B are the same. If the sizes of the first through-hole 96A and the second through-hole 96B are the same, the second through-hole 96B may be used as a hole for injecting the adhesive, and the first through-hole 96A may be used as a hole for checking the amount of adhesive.

[0027] Furthermore, a notch 92C2 is formed near the first through-hole 96A on the back surface 92C of the mirror mount 92. The notch 92C2 is formed in this way to facilitate the insertion of the adhesive nozzle into the first through-hole 96A.

[0028] In this way, adhesive is poured into the adhesive groove 94, and the first mirror 110 is attached to the mirror mount 92. When the adhesive dries, it shrinks, causing the fixing surface 110B of the first mirror 110 to shrink in the planar direction. As a result, the surface of the reflective surface 110A tends to become convex upward. However, the convex tendency of the surface of the reflective surface 110A is suppressed because the fixing surface 110B of the first mirror 110 conforms to the contact surface 95. For this reason, the absolute value of the radius of curvature of the surface of the reflective surface 110A of the first mirror 110 is 20m or more.

[0029] Next, the configuration of the retaining member 83 formed within the base 80 that permanently holds the second mirror 120, and the method for attaching the second mirror 120 to the retaining member 83 will be described.

[0030] As shown in Figure 4, a retaining member 83 is formed at a position extending from the upper part of the rear wall 80B of the base 80 to a predetermined depth into the interior of the base 80. The retaining member 83 is an example of a second member. The retaining member 83 holds the second mirror 120 in a fixed position. As shown in Figure 5, the retaining member 83 is composed of a circular hole 85 located in the center, an annular contact surface 84 surrounding the outer edge of the hole 85, and three holes 86A to 86C formed at equal intervals on the outer edge of the contact surface 84. As shown in Figure 4, a part of the reflective surface 120A of the second mirror 120, that is, the annular portion formed by extending from the outer edge of the reflective surface 120A to the center by the width of the contact surface 84, contacts the contact surface 84. The holes 86A to 86C are holes for injecting adhesive. Further holes 86A1 to 86C1 are formed on the bottom surface of the holes 86A to 86C. These holes 86A1 to 86C1 are used as markers when injecting adhesive. Then, the portion of the reflective surface 120A corresponding to hole 85 is exposed to the path 82 through which the processing laser beam R passes. Therefore, as shown in Figure 4, the processing laser beam R reflected by the reflective surface 110A of the first mirror 110 is reflected by the reflective surface 120A of the second mirror 120 and guided in a predetermined direction. The angle between the plane constituting the contact surface 84 and the horizontal plane is, for example, 45 degrees.

[0031] Figure 8 shows how the second mirror 120 is attached to the retaining member 83 by adhesive bonding. In the example in Figure 8, the base 80 is tilted by 45 degrees so that the plane constituting the contact surface 84 is horizontal. In practice, a jig is used to bond the second mirror 120 to the retaining member 83, but the specific shape and description of that jig are omitted.

[0032] The second mirror 120 is placed on the holding member 83 so that its reflective surface 120A faces the contact surface 84. Then, adhesive is injected into each of the holes 86A to 86C. At this time, the adhesive is injected targeting each of the holes 86A1 to 86C1.

[0033] Furthermore, the portion where the holes 86A to 86C and the outer edge of the contact surface 84 come into contact is formed to increase the contact area. This is to prevent the second mirror 120 from easily coming off after it has been bonded and held to the retaining member 83.

[0034] In this way, adhesive is injected into the holes 86A to 86C, and the second mirror 120 is attached to the holding member 83 from the reflective surface 120A side. When the adhesive dries, it shrinks, causing the reflective surface 120A of the second mirror 120 to shrink in the planar direction, and the surface of the reflective surface 120A tends to become concave in the receiving direction. However, since the holes 86A to 86C are formed at equal intervals on the outer edge of the contact surface 84, the outer edge of the second mirror 120 is pulled symmetrically outward by the adhesive injected into the holes 86A to 86C. As a result, the concave tendency of the surface of the reflective surface 120A of the second mirror 120 is suppressed. For this reason, the absolute value of the radius of curvature of the surface of the reflective surface 120A of the second mirror 120 is also set to 20m or more so that the influence of distortion of the second mirror 120 on the reflection of the laser beam R is minimized.

[0035] In the above embodiment, an example was given in which the surface of the reflective surface 110A of the first mirror 110 attached to the mirror adjustment member 90 tends to be convex upward, and the surface of the reflective surface 120A of the second mirror 120 attached to the holding member 83 tends to be concave upward. However, even if the opposite occurs, such that the surface of the reflective surface 110A of the first mirror 110 is concave upward and the surface of the reflective surface 120A of the second mirror 120 tends to be convex upward, the processing laser light R is reflected by the first mirror 110 and the second mirror 120 with its distortion reduced and guided in the predetermined direction. In short, it is sufficient that the convex and concave tendencies of the respective reflective surfaces 110A and 120A of the first mirror 110 and the second mirror 120 are opposite to each other.

[0036] As described above, the laser marker 1 of this embodiment comprises a processing laser oscillator 9 that emits processing laser light R, a periscope 8 that guides the processing laser light R in a predetermined direction, and a main body housing 23 that houses the processing laser oscillator 9 and the periscope 8 inside. The periscope 8 comprises a first mirror 110 having a reflective surface 110A and a fixed surface 110B that is the back surface of the reflective surface 110A, a second mirror 120 having a reflective surface 120A, a mirror adjustment member 90 having a recess 93 larger than the outer shape of the first mirror 110 and holding the first mirror 110 in the recess 93, and a holding member 83 that holds the second mirror 120. The processing laser light R reflected by the reflective surface 110A of the first mirror 110 is further reflected by the reflective surface 120A of the second mirror 120, guiding it in a predetermined direction. The mirror adjustment member 90 is located in the center of the recess 93 and has a contact surface 95 that abuts against the fixed surface 110B of the first mirror 110, an adhesive groove 94 which is recessed more than the contact surface 95 and is an annular groove surrounding the outer edge of the contact surface 95, and a first through hole 96A and a second through hole 96B that communicate with the adhesive groove 94. The first mirror 110 is held by the mirror adjustment member 90 by the adhesive introduced into the adhesive groove 94, which causes the portion of the fixed surface 110B facing the adhesive groove 94 to adhere.

[0037] As described above, in the laser marker 1 of this embodiment, adhesive is poured into the adhesive groove 94 to attach the first mirror 110 to the mirror mount 92. When the adhesive dries, it shrinks, causing the surface of the reflective surface 110A of the first mirror 110 to become convex. However, the fixing surface 110B, which is the back surface of the reflective surface 110A of the first mirror 110, conforms to the contact surface 95, thereby suppressing the convex tendency of the surface of the reflective surface 110A of the first mirror 110.

[0038] Furthermore, the first through-hole 96A and the second through-hole 96B are located on opposite sides of the contact surface 95. This allows adhesive to be introduced into the adhesive groove 94 through the first through-hole 96A, and the amount of adhesive in the adhesive groove 94 can be checked through the second through-hole 96B.

[0039] Furthermore, the area of ​​the contact surface 95 is characterized by being at least one-third of the area of ​​the fixed surface 110B of the first mirror 110. As a result, the area of ​​the fixed surface 110B, which is the back surface of the reflective surface 110A of the first mirror 110, that conforms to the contact surface 95 becomes larger, and the convex tendency of the surface of the reflective surface 110A of the first mirror 110 is further suppressed.

[0040] Furthermore, the diameter of the first through-hole 96A is larger than the width of the adhesive groove 94. This makes it easier to introduce the adhesive into the adhesive groove 94.

[0041] Furthermore, the depth of the adhesive groove 94 is smaller than the width of the adhesive groove 94. This increases the cross-sectional area of ​​the adhesive groove 94, making it easier for high-viscosity adhesives to flow.

[0042] Furthermore, the periscope 8 has a base 80, a mirror adjustment member 90 is positioned on the base 80 so as to be able to adjust the angle of the first mirror 110, and a holding member 83 is fixedly positioned on the base 80. This makes it possible to adjust the emission position and emission angle of the processing laser light R emitted from the processing laser oscillator 9.

[0043] Furthermore, the first mirror 110 and the mirror adjustment member 90, and the second mirror 120 and the retaining member 83 are all integrally fixed together with adhesive. This allows the first mirror 110 and the second mirror 120 to be easily attached to the mirror adjustment member 90 and the retaining member 83, respectively.

[0044] Furthermore, the system includes a telescope 7 connected to the periscope 8, the telescope 7 having a cylindrical portion 7A, and containing an optical component consisting of a lens assembly that corrects the beam diameter of the processing laser beam R within the cylindrical portion 7A. This allows the beam diameter of the processing laser beam R, whose emission position and emission angle have been adjusted by the periscope 8, to be corrected.

[0045] Furthermore, the second mirror 120 is characterized in that its reflective surface 120A is held facing the holding member 83. As a result, the surface irregularities of the reflective surface 110A of the first mirror 110 and the reflective surface 120A of the second mirror 120 are reversed, and the periscope 8 guides the processing laser light R reflected by the reflective surface 110A of the first mirror 110 to a predetermined direction by further reflection by the reflective surface 120A of the second mirror 120. Therefore, even if distortion occurs in the first mirror 110 and the second mirror 120 when they are held by the mirror adjustment member 90 and the holding member 83, it is possible to reflect the processing laser light R with reduced distortion and guide it to a predetermined direction.

[0046] It should be noted that the present invention is not limited to the embodiments described above, and various modifications are possible without departing from the spirit of the invention.

[0047] (1) In the above embodiment, two through holes, a first through hole 96A and a second through hole 96B, were used as examples to describe the holes communicating with the adhesive groove 94. However, the number of through holes is not limited to two; there may be three or more. However, it is preferable that the rotation angles of adjacent through holes are the same.

[0048] (2) In the above embodiment, an example was given in which three holes were formed at equal intervals on the outer edge of the contact surface 84 of the retaining member 83, but this number may be four or more. However, even if four or more holes are formed, it is desirable that they be formed at equal intervals on the outer edge of the contact surface 84.

[0049] (3) In the above embodiment, the periscope 8 was integrated with the processing laser oscillator 9 as a component of the laser light source 10, but the periscope 8 may be provided separately and replaceably from the laser marker 1. Also, although the telescope 7 and the processing laser oscillator 9 are attached to and detached from the laser marker 1 as a component, the telescope 7 and the processing laser oscillator 9 may be connected in a way that allows them to be separated.

[0050] (4) In the above embodiment, a telescope 7 was used as an example of the second optical path member, but it is not limited to a telescope 7 as long as it has a cylindrical portion that extends in the direction of emission of the processing laser light, and the type and number of lenses that can be provided are also not limited.

[0051] (5) In the above embodiment, the front-to-back direction D1, the up-and-down direction D2, and the left-to-right direction D3 may be reversed depending on the installation environment and usage environment of the laser marker 1. [Explanation of Symbols]

[0052] 1...Laser marker, 7...Telescope, 7A...Tube section, 8...Periscope, 9...Processing laser oscillator, 80...Base section, 83...Holding member, 86A~86C...Hole section, 90...Mirror adjustment member, 91...Base section, 92...Mirror mounter, 93...Recess, 94...Adhesive groove, 95...Applying surface, 96A...First through hole, 96B...Second through hole, 110...First mirror, 110A...Reflective surface, 110B...Fixed surface, 120...Second mirror, 120A...Reflective surface, R...Processing laser beam.

Claims

1. A laser oscillator that emits laser light, An optical path member that guides the laser light in a predetermined direction, A laser irradiation device comprising a main body housing that houses the laser oscillator and the optical path member inside, The optical path member is A first mirror having a reflective surface and a fixed surface that is the back surface of the reflective surface, A second mirror having a reflective surface, A first member having a recess larger than the outer shape of the first mirror, and holding the first mirror in the recess, The device comprises a second member that holds the second mirror, wherein the reflective surface of the first mirror reflects the laser light, which has been reflected by the reflective surface of the first mirror, and guides it in the predetermined direction. The first member is, A contact surface located in the center of the recess and in contact with the fixed surface of the first mirror, An adhesive groove, which is recessed from the aforementioned contact surface and is an annular groove surrounding the outer edge of the aforementioned contact surface, It has a first through hole and a second through hole that communicate with the adhesive groove, The first mirror is held to the first member by the adhesive introduced into the adhesive groove, which causes the portion of the fixing surface facing the adhesive groove to adhere to the first mirror. A laser irradiation device characterized by the following features.

2. The first through hole and the second through hole are located on opposite sides of the contact surface, The laser irradiation device according to feature 1.

3. The area of ​​the contact surface is at least one-third of the area of ​​the fixed surface of the first mirror. The laser irradiation device according to feature 1.

4. The diameter of the first through hole is greater than the width of the adhesive groove. The laser irradiation device according to feature 1.

5. The depth of the adhesive groove is smaller than the width of the adhesive groove. The laser irradiation device according to feature 1.

6. The optical path member is a periscope that adjusts the optical axis of the laser beam. The laser irradiation device according to feature 1.

7. The optical path member has a base, The first member is positioned on the base so as to be able to adjust the angle of the first mirror, The second member is fixedly positioned on the base. The laser irradiation device according to feature 1.

8. The first mirror and the first member, and the second mirror and the second member are all fixed together with adhesive. The laser irradiation device according to feature 1.

9. The optical path member further comprises a second optical path member connected to the aforementioned optical path member, The second optical path member is, It has a cylindrical portion, and within the cylindrical portion, it includes an optical component consisting of a lens assembly that corrects the beam diameter of the laser light. The laser irradiation device according to feature 1.

10. The second mirror is held such that the reflective surface of the second mirror faces the second member. The laser irradiation device according to feature 1.

Images