Power generation element, power generation device, electronic device, and method for manufacturing a power generation element

Abstract

The present invention provides a power generation element, a power generation device, an electronic device, and a method for manufacturing a power generation element that can improve yield. [Solution] A power generation element 1 that does not require a temperature difference between electrodes 11 and 12 when converting thermal energy into electrical energy, comprising: a first electrode 11 and a second electrode 12 having different work functions and provided spaced apart in a first direction Z; and an intermediate portion 14 provided between the first electrode 11 and the second electrode 12. The first electrode 11 is characterized by including a plurality of extending portions 11a that extend along a second direction Y intersecting the first direction Z and are spaced apart via at least one of the intermediate portion 14 and a space 15; and a base portion 11b connected to the plurality of extending portions 11a.

Description

Technical Field

[0001] The present invention relates to a power generation element, a power generation device, an electronic apparatus, and a method for manufacturing a power generation element that do not require a temperature difference between electrodes when converting thermal energy into electrical energy.

Background Art

[0002] In recent years, development of power generation elements that generate electrical energy using thermal energy has been actively carried out. In particular, regarding power generation elements that do not require a temperature difference between electrodes, for example, the power generation element disclosed in Patent Document 1 has been proposed. Such power generation elements are expected to be used in various applications compared to configurations that generate electrical energy using a temperature difference applied between electrodes.

[0003] Patent Document 1 discloses a power generation element manufactured by a method for manufacturing a power generation element, the method including: a first electrode forming step of forming a first electrode; an intermediate portion forming step of forming an intermediate portion including a solid insulating layer on the first electrode; and a second electrode forming step of forming a second electrode having a work function different from that of the first electrode on the insulating layer. In the power generation element disclosed in Patent Document 1, the intermediate portion includes nanoparticles fixed in a state of being dispersed in the insulating layer.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Here, in a power generation element as disclosed in Patent Document 1, when a defect occurs in a part of the electrode or the intermediate portion, it is necessary to treat the element as a defective product regardless of the scale of the defect. For this reason, an increase in defective products is a concern as the power generation element is made larger. Therefore, a method for improving the yield is desired.

[0006] Therefore, the present invention was devised in view of the above-mentioned problems, and its objective is to provide a power generation element, a power generation device, an electronic device, and a method for manufacturing a power generation element that can improve yield. [Means for solving the problem]

[0007] The power generation element according to the first invention is a power generation element that does not require a temperature difference between electrodes when converting thermal energy into electrical energy, and comprises a first electrode and a second electrode having different work functions and being spaced apart in a first direction, and an intermediate portion provided between the first electrode and the second electrode, wherein the first electrode includes a plurality of extending portions extending along a second direction intersecting the first direction and separated by at least one of the intermediate portion and space, and a base end portion connected to the plurality of the extending portions.

[0008] The power generation element according to the second invention is characterized in that, in the first invention, the intermediate portion includes fine particles exhibiting a perovskite structure.

[0009] The power generation element according to the third invention is characterized in that, in the second invention, the fine particles contain at least one of barium, strontium, zirconium, and titanium.

[0010] The power generation element according to the fourth invention is characterized in that, in the third invention, the intermediate portion includes a non-conductive layer that contains the fine particles and supports the first electrode.

[0011] The power generation element according to the fifth invention is characterized in that, in the fourth invention, the insulator layer includes a hydrophilic material.

[0012] The power generation element according to the sixth invention is characterized in that, in the fifth invention, the insulator layer contains an organic polymer compound.

[0013] The power generation device according to the seventh invention is characterized by comprising the power generation element described in the first invention, a first wiring connected electrically to the first electrode, and a second wiring connected electrically to the second electrode.

[0014] The electronic device according to the eighth invention is characterized by comprising a power generation element described in the first invention and an electronic component that is driven using the power generation element as a power source.

[0015] The method for manufacturing a power generation element according to the ninth invention is a method for manufacturing a power generation element that eliminates the need for a temperature difference between electrodes when converting thermal energy into electrical energy, and comprises an element formation step of forming a first electrode and a second electrode having different work functions and being spaced apart in a first direction, and an intermediate portion provided between the first electrode and the second electrode, wherein the element formation step includes forming the first electrode which includes a plurality of extending portions extending along a second direction intersecting the first direction and spaced apart via at least one of the intermediate portion and space, and a base end portion connected to the plurality of extending portions. [Effects of the Invention]

[0016] According to the first to sixth inventions, the first electrode includes a plurality of extending portions that extend along a second direction intersecting a first direction and are separated by at least one of an intermediate portion and / or space, and a base end connected to the plurality of extending portions. Therefore, by separating the extending portion corresponding to the location where a defect occurs from the base end, the element can be treated as a good product. This makes it possible to improve the yield.

[0017] In particular, the second invention includes fine particles exhibiting a perovskite structure. Therefore, protons generated from water molecules contained in the atmosphere surrounding the power generation element move to the lower potential electrode through the space formed between the multiple extended portions due to the electric field between the electrodes. As a result of the proton movement, the movement of electrons between the electrodes is activated. This makes it possible to improve the amount of power generated.

[0018] In particular, according to the fourth invention, the intermediate portion includes a non-conductive layer enclosing fine particles. That is, the non-conductive layer suppresses the movement of the fine particles between the electrodes. Therefore, it is possible to suppress the situation where the fine particles are unevenly distributed on one electrode side over time and the electron transfer amount decreases. This makes it possible to stabilize the power generation amount.

[0019] In particular, according to the fourth invention, the intermediate portion includes a non-conductive layer that supports the first electrode. Therefore, compared with the case where a solvent or the like is used instead of the non-conductive layer, there is no need to provide a support portion or the like for maintaining the distance (gap) between the electrodes, and gap variations caused by the formation accuracy of the support portion can be eliminated. This makes it possible to increase the power generation amount.

[0020] In particular, according to the fifth invention, the non-conductive layer includes a hydrophilic material. Therefore, the state where water molecules are close to the fine particles can be easily maintained. This makes it possible to further stabilize the power generation amount.

[0021] In particular, according to the sixth invention, the non-conductive layer includes an organic polymer compound. Therefore, the non-conductive layer can be formed flexibly. This makes it possible to obtain a power generating element having a shape adapted to the application.

[0022] In particular, according to the seventh invention, a power generation apparatus includes the power generating element according to the first invention. Therefore, it is possible to realize a power generation apparatus that achieves improved yield.

[0023] In particular, according to the eighth invention, an electronic device includes the power generating element according to the first invention. Therefore, it is possible to realize an electronic device that achieves improved yield.

[0024] According to the ninth invention, the element forming step forms a first electrode that includes extending portions extending along a second direction intersecting with the first direction and spaced apart via at least one of an intermediate portion and a space, and a base end portion connected to the plurality of extending portions. Therefore, by separating the extending portion corresponding to the position where a defect occurs from the base end portion, the element can be treated as a non-defective product. This makes it possible to improve the yield. [Brief Description of the Drawings]

[0025] [Figure 1] FIG. 1(a) is a schematic cross-sectional view showing an example of the power generating element and the power generating device in the present embodiment, FIG. 1(b) is a schematic cross-sectional view taken along line A-A in FIG. 1(a), FIG. 1(c) is a schematic cross-sectional view taken along line B-B in FIG. 1(a), and FIG. 1(d) is a schematic cross-sectional view taken along line C-C in FIG. 1(a). [Figure 2] FIG. 2 is a schematic cross-sectional view showing a modification of the first electrode. [Figure 3] FIG. 3 is a schematic cross-sectional view showing an example of the intermediate portion. [Figure 4] FIG. 4 is a schematic diagram showing an operation example of the power generating element in the embodiment. [Figure 5] FIG. 5(a) is a schematic cross-sectional view showing a modification of the power generating element in the present embodiment, and FIG. 5(b) is a schematic cross-sectional view taken along line D-D in FIG. 5(a). [Figure 6] FIG. 6 is a flowchart showing an example of the method for manufacturing the power generating element in the embodiment. [Figure 7] FIG. 7(a) to FIG. 7(d) are schematic block diagrams showing examples of electronic apparatuses provided with the power generating element, and FIG. 7(e) to FIG. 7(h) are schematic block diagrams showing examples of electronic apparatuses provided with a power generating device including the power generating element. [Description of Embodiments]

[0026] Hereinafter, an example of a power generation element, power generation device, electronic device, and method for manufacturing a power generation element as embodiments of the present invention will be described with reference to the drawings. In each figure, the height direction in which each electrode is stacked is defined as the first direction Z, one planar direction intersecting, for example, orthogonal to, the first direction Z is defined as the second direction Y, and another planar direction intersecting, for example, orthogonal to, both the first direction Z and the second direction Y is defined as the third direction X. Furthermore, the configurations in each figure are schematically described for explanatory purposes, and the size of each component, the size comparison between components, etc., may differ from those shown in the figures.

[0027] (First embodiment: power generation element 1, power generation device 100) Figures 1(a) to 1(d) are schematic diagrams showing an example of the power generation element 1 and power generation device 100 in this embodiment. Figure 1(a) is a schematic cross-sectional view showing an example of the power generation element 1 and power generation device 100 in this embodiment, Figure 1(b) is a schematic cross-sectional view along AA in Figure 1(a), Figure 1(c) is a schematic cross-sectional view along BB in Figure 1(a), and Figure 1(d) is a schematic cross-sectional view along CC in Figure 1(a).

[0028] (Power generator 100) As shown in Figure 1(a), the power generation device 100 comprises a power generation element 1, a first wiring 101, and a second wiring 102. The power generation element 1 converts thermal energy into electrical energy. The power generation device 100 equipped with such a power generation element 1 is mounted or installed on, for example, a heat source (not shown), and uses the thermal energy of the heat source to output electrical energy generated from the power generation element 1 to a load R via the first wiring 101 and the second wiring 102. One end of the load R is electrically connected to the first wiring 101, and the other end is electrically connected to the second wiring 102. The load R represents, for example, an electrical device. The load R is driven, for example, using the power generation device 100 as a main power source or auxiliary power source.

[0029] Examples of heat sources for the power generation element 1 include electronic devices or components such as CPUs (Central Processing Units), light-emitting elements such as LEDs (Light Emitting Diodes), engines such as those in automobiles, factory production equipment, the human body, sunlight, and ambient temperature. For example, electronic devices, electronic components, light-emitting elements, engines, and production equipment are artificial heat sources. The human body, sunlight, and ambient temperature are natural heat sources. The power generation device 100 equipped with the power generation element 1 can be installed inside mobile devices such as IoT (Internet of Things) devices and wearable devices, or autonomous sensor terminals, and can be used as a substitute or supplement for batteries. Furthermore, the power generation device 100 can also be applied to larger power generation devices such as solar power generation.

[0030] (Power generation element 1) The power generation element 1 converts, for example, the thermal energy emitted by the artificial heat source or the thermal energy possessed by the natural heat source into electrical energy and generates an electric current. The power generation element 1 can be installed not only within the power generation device 100, but also inside the mobile device or the self-contained sensor terminal. In this case, the power generation element 1 itself can serve as a substitute or auxiliary component for the battery in the mobile device or the self-contained sensor terminal.

[0031] The power generation element 1 comprises, for example, a first electrode 11, a second electrode 12, and an intermediate portion 14, as shown in Figure 1(a). The first electrode 11 and the second electrode 12 are spaced apart in the first direction Z. The first electrode 11 and the second electrode 12 each have different work functions. The intermediate portion 14 is provided between the first electrode 11 and the second electrode 12.

[0032] For example, the work function of the second electrode 12 is higher than the work function of the first electrode 11. In this case, as shown in Figure 1(b), for example, an electric field is generated in the gap G, which represents the distance between the first electrode 11 and the second electrode 12, and for example, the first electrode 11 shows a high potential and the second electrode 12 shows a low potential. Note that, for example, the work function of the second electrode 12 may be lower than the work function of the first electrode 11.

[0033] The first electrode 11 includes a plurality of extended portions 11a and a base portion 11b. The plurality of extended portions 11a extend along the second direction Y and are separated by at least one of the intermediate portion 14 and the space 15. The base portion 11b is connected to the plurality of extended portions 11a. In a power generation element 1 having the above configuration, for example, by separating the extended portion 11a corresponding to the location where a defect occurs from the base portion 11b, the element can be treated as a good product. This makes it possible to improve the yield of the power generation element 1.

[0034] The following provides a detailed explanation of each component.

[0035] <First electrode 11, second electrode 12> The first electrode 11 and the second electrode 12 are separated by an intermediate portion 14. The second electrode 12 extends, for example, in a second direction Y and a third direction X, and faces a plurality of extending portions 11a.

[0036] Conductive materials are used for the first electrode 11 and the second electrode 12. For example, materials with different work functions are used for the first electrode 11 and the second electrode 12. Alternatively, the same material may be used for both electrodes 11 and 12, in which case they will each have different work functions.

[0037] As the material for each electrode 11 and 12, a single-element material such as iron, aluminum, or copper may be used, or an alloy material composed of two or more elements may be used. As the material for each electrode 11 and 12, a non-metallic conductor may be used, for example. Examples of non-metallic conductors include silicon (Si: for example, p-type Si or n-type Si) and carbon-based materials such as graphene.

[0038] The thickness of the first electrode 11 and the second electrode 12 along the first direction Z is, for example, 4 nm to 10 μm. The thickness of the first electrode 11 and the second electrode 12 along the first direction Z may also be, for example, 4 nm to 50 nm.

[0039] The gap G, which indicates the distance between the first electrode 11 and the second electrode 12, can be arbitrarily set, for example, by changing the thickness of the intermediate portion 14. For example, by narrowing the gap G, the electric field generated between each electrode 11 and 12 can be increased, thereby increasing the amount of power generated by the power generation element 1. Also, by narrowing the gap G, for example, the thickness of the power generation element 1 along the first direction Z can be reduced.

[0040] The gap G is a finite value, for example, 500 μm or less. The gap G is, for example, between 10 nm and 1 μm. For example, if the gap G is 200 nm or less, it may lead to a decrease in power generation due to variations in the gap G in the plane along the second direction Y and the third direction X. Also, if the gap G is greater than 1 μm, the electric field generated between each electrode 11, 12 may weaken. For these reasons, it is preferable that the gap G is greater than 200 nm and less than or equal to 1 μm.

[0041] Multiple extending portions 11a are provided spaced apart along the third direction X. The number of extending portions 11a and the distance between each extending portion 11a can be arbitrarily set according to the application. Note that the second electrode 12 is not placed between a pair of extending portions 11a.

[0042] The distance between each extended portion 11a is, for example, shorter than the width of the extended portion 11a in the third direction X. In this case, the above-mentioned countermeasures for defects can be applied while suppressing the reduction in the area of ​​the opposing electrodes 11 and 12. This makes it possible to improve the yield while suppressing the reduction in the amount of power generated in the power generation element 1.

[0043] The base end portion 11b connects to the end of the extension portion 11a in the second direction Y, for example, as shown in Figure 1(a). That is, the base end portion 11b is provided integrally with a plurality of extension portions 11a. In addition to connecting to a plurality of extension portions 11a on one side, the base end portion 11b may also connect to a plurality of extension portions 11a on two opposing sides, for example, as shown in Figure 2, and can be arbitrarily set according to the application.

[0044] A slit-shaped space 15 is formed between each extended portion 11a. For example, an intermediate portion 14 may be provided in at least a part of the space 15.

[0045] <Intermediate section 14> The intermediate portion 14 includes fine particles 141, as shown in Figure 3, for example. The fine particles 141 exhibit, for example, a perovskite structure. Here, as shown in Figure 4, for example, water molecules contained in the atmosphere surrounding the power generation element 1 can react with metal ions such as barium contained in the perovskite structure. As a result, the water molecules react with hydronium (H3O + ), and hydroxide ions (OH - ) is produced. Hydronium is released by a proton (H) into an adjacent water molecule. + ) is transmitted. In this case, the proton transfer rate is expected to be extremely fast compared to ionic conduction, etc. Here, due to the electric field of the gap G generated based on the work function difference of each electrode 11 and 12, the proton moves toward the electrode on the lower potential side (second electrode 12 in Figure 4), and the hydroxide ion moves toward the electrode on the higher potential side (first electrode 11 in Figure 4). Subsequently, the proton receives electrons from the second electrode 12 on the lower potential side, and the hydroxide ion supplies electrons to the first electrode 11 on the higher potential side. As a result, the movement of electrons between each electrode 11 and 12 is activated. This makes it possible to improve the amount of power generated.

[0046] In particular, in the power generation element 1 of this embodiment, the intermediate portion 14 is exposed in the slit-shaped space 15 formed between each extended portion 11a. In this case, the space 15 is open to the outside of the power generation element 1, and the exposed portion of the intermediate portion 14 is exposed to the surrounding atmosphere. That is, water molecules contained in the surrounding atmosphere can easily enter the intermediate portion 14. Therefore, the amount of electron movement between each electrode 11 and 12 can be increased compared to when the space 15 is not formed. This makes it possible to further improve the amount of power generated.

[0047] The intermediate section 14 further includes, for example, an insulated layer 142. The insulated layer 142 contains fine particles 141 and supports the first electrode 11 and the second electrode 12. In this case, the insulated layer 142 suppresses the movement of the fine particles 141 in the gap G. Therefore, it is possible to suppress the uneven distribution of the fine particles 141 to one side of the electrodes 11 and 12 over time, which would reduce the amount of electron movement. This makes it possible to stabilize the amount of power generated.

[0048] The insulated layer 142 is formed, for example, by curing an insulated material. The insulated layer 142 is, for example, a solid. The insulated layer 142 may contain, for example, the residue of the diluent or uncured parts of the insulated material. In this case as well, it is possible to stabilize the amount of power generated, as described above. The fine particles 141 are fixed in a dispersed state in the insulated layer 142, for example. In this case as well, it is possible to stabilize the amount of power generated, as described above.

[0049] The intermediate portion 14 is provided on the second electrode 12. The multiple extended portions 11a are provided on the insulated layer 142. In this power generation element 1, which does not require a temperature difference between electrodes when converting thermal energy into electrical energy, the amount of power generated can be increased by suppressing variations in the gap G along the planes in the second direction Y and the third direction X. In this regard, when a liquid such as a solvent is used as the intermediate portion, it is necessary to provide support parts to maintain the gap G. However, since the tips of the multiple extended portions 11a are spaced apart from each other, there was a concern that the formation of support parts to support each extended portion 11a could lead to large variations in the gap G corresponding to each extended portion 11a. In contrast, in the power generation element 1 of this embodiment, since the multiple extended portions 11a are provided on the insulated layer 142, it is not necessary to provide support parts to maintain the gap G of each extended portion 11a, and variations in the gap G caused by the formation accuracy of the support parts can be eliminated. This makes it possible to increase the amount of power generated.

[0050] The intermediate portion 14 extends in a plane along the second direction Y and the third direction X, as shown in Figures 1(a) to 1(d), for example. The intermediate portion 14 is in contact with the opposing main surfaces of each electrode 11 and 12, and may also be in contact with the side surface of the extended portion 11a, for example.

[0051] The fine particles 141 are dispersed in the insulated layer 142, and for example, a portion of them may be exposed from the insulated layer 142. The fine particles 141 may be filled in a gap G, and the insulated layer 142 may be provided in the gaps between the fine particles 141. The particle diameter of the fine particles 141 is smaller than the gap G, for example. The particle diameter of the fine particles 141 is set to a finite value of 1 / 10 or less of the gap G, for example. Setting the particle diameter of the fine particles 141 to 1 / 10 or less of the gap G makes it easier to form an intermediate portion 14 containing the fine particles 141 in the gap G. This makes it possible to improve workability when manufacturing the power generation element 1.

[0052] Here, "fine particles" refers to a mixture containing multiple particles. The fine particles 141 may include particles having a particle diameter of, for example, 2 nm to 1000 nm. The fine particles 141 may also include particles having a median diameter (central diameter: D50) of 3 nm to 8 nm, or particles having an average particle size of 3 nm to 8 nm. The median diameter or average particle size can be measured, for example, using a particle size distribution analyzer. As a particle size distribution analyzer, for example, a particle size distribution analyzer using dynamic light scattering (e.g., Malvern Panalytical's Zetasizer Ultra) may be used.

[0053] If the fine particles 141 exhibit a perovskite structure, they contain, for example, at least one of barium, strontium, zirconium, and titanium. The fine particles 141 contain, for example, at least one of barium titanate (BaTiO3), strontium titanate (SrTiO3), calcium titanate (CaTiO3), lead titanate (PbTiO3), tin titanate (SnTiO3), cadmium titanate (CdTiO3), and strontium zirconate (SrZrO3).

[0054] The fine particles 141 include, for example, a coating 141a on their surface. The thickness of the coating 141a is, for example, a finite value of 20 nm or less. By providing such a coating 141a on the surface of the fine particles 141, aggregation when dispersing them in, for example, the insulator layer 142 can be suppressed. Furthermore, it becomes possible to increase the possibility that electrons can move between the first electrode 11 and the fine particles 141, between multiple fine particles 141, and between the second electrode 12 and the fine particles 141, by utilizing the tunnel effect or the like.

[0055] The coating 141a is preferably one that can disperse the fine particles 141 in the non-conductive layer 142 without aggregation, and for example, a material having a carboxyl group, a phosphate group, a thiol group, or a disulfide group can be used. As a material having a carboxyl group, for example, a fatty acid such as oleic acid can be used. As a material having a phosphate group, for example, a long-chain alkyl phosphate such as oleyl phosphate can be used. As a material having a thiol group, for example, an alkanethiol such as dodecanethiol can be used. As a material having a disulfide group, for example, an alkane disulfide can be used. Depending on the combination of the non-conductive layer 142 and the fine particles 141, the coating 141a may not be necessary.

[0056] The insulated layer 142 is provided between each electrode 11 and 12, and is in contact with each electrode 11 and 12, for example. The thickness of the insulated layer 142 is a finite value, for example, 500 μm or less. The thickness of the insulated layer 142 affects the value and variation of the gap G mentioned above. For example, if the thickness of the insulated layer 142 is 200 nm or less, it may lead to a decrease in power generation due to variations in the gap G in the planes along the second direction Y and the third direction X. Also, if the thickness of the insulated layer 142 is greater than 1 μm, the electric field generated between each electrode 11 and 12 may weaken. For these reasons, it is preferable that the thickness of the insulated layer 142 is greater than 200 nm and 1 μm or less.

[0057] The insulator layer 142 may contain, for example, one type of material, or it may contain multiple materials depending on the application. For example, materials described in ISO 1043-1 or JIS K 6899-1 may be used as the insulator layer 142. The insulator layer 142 may also include, for example, multiple layers containing different materials, with each layer being laminated. If the insulator layer 142 contains multiple layers, for example, each layer may contain (e.g., dispersed) fine particles 141 containing different materials.

[0058] The insulated layer 142 has, for example, insulating properties. The material used for the insulated layer 142 can be any insulated material that can fix the fine particles 141 in a dispersed state, but an organic polymer compound is preferred. When the insulated layer 142 contains an organic polymer compound, the insulated layer 142 can be formed flexibly, so a power generation element 1 having a shape suitable for the application, such as bending or curving, can be formed.

[0059] Examples of organic polymer compounds that can be used include polyimide, polyamide, polyester, polycarbonate, poly(meth)acrylate, radical polymerization-based photo- or thermosetting resins, photocationic polymerization-based photo- or thermosetting resins, or epoxy resins, copolymers containing acrylonitrile components, polyvinylphenol, polystyrene, novolac resin, and polyvinylidene fluoride.

[0060] The non-conductive layer 142 includes, for example, a hydrophilic material. In this case, the state in which water molecules are close to the fine particles 141 can be easily maintained. As the non-conductive layer 142, for example, materials such as polyvinyl alcohol, methylcellulose, and polyethylene glycol can be used. Known materials that have hydrophilic properties include, for example, nonionic polymers, anionic polymers, cationic polymers, acrylic resins, polyester resins, and polyurethane resins.

[0061] For example, an inorganic material may be used as the insulator layer 142. Examples of inorganic materials include porous inorganic materials such as zeolites and diatomaceous earth, as well as cage-like molecules.

[0062] The intermediate portion 14 may contain a solvent instead of, for example, the insulated layer 142. In this case, the fine particles 141 are dispersed in the solvent. Each electrode 11 and 12 is supported by a support portion (not shown). A known liquid such as water or toluene can be used as the solvent. Even in this case, it is possible to improve the amount of power generated by including the fine particles 141 exhibiting the perovskite structure described above.

[0063] The intermediate section 14 does not necessarily have to include, for example, the insulated layer 142. In this case, the fine particles 141 fill the gap G. Furthermore, each electrode 11 and 12 is supported by a support portion (not shown). Even in this case, including the fine particles 141 exhibiting the perovskite structure described above makes it possible to improve the amount of power generated.

[0064] <First substrate 16, second substrate 17> For example, the power generation element 1 may include at least one of the first substrate 16 and the second substrate 17. The first substrate 16 and the second substrate 17 are provided spaced apart in the first direction Z, with the electrodes 11, 12 and the intermediate portion 14 in between, as shown in Figures 5(a) and 5(b), for example.

[0065] The first substrate 16 is in contact with the first electrode 11 and spaced apart from the second electrode 12. The first substrate 16 fixes the first electrode 11. The shape of the first substrate 16 is, for example, the same as that of the first electrode 11. Therefore, even when the first substrate 16 is provided, the space 15 is open to the outside of the power generation element 1, and the exposed portion of the intermediate part 14 is exposed to the surrounding atmosphere of the power generation element 1.

[0066] The second substrate 17 is in contact with the second electrode 12 and spaced apart from the first electrode 11. The second substrate 17 fixes the second electrode 12. The shape of the second substrate 17 is, for example, similar to that of the second electrode 12.

[0067] The thickness of each substrate 16 and 17 along the first direction Z is, for example, 10 μm or more and 2 mm or less. The thickness of each substrate 16 and 17 can be set arbitrarily.

[0068] Each substrate 16, 17 can be, for example, an insulating plate-shaped member, and known materials such as silicon, quartz, and Pyrex (registered trademark) can be used. Each substrate 16, 17 may also be, for example, a film-like member, and known film-like members such as PET (polyethylene terephthalate), PC (polycarbonate), and polyimide may be used.

[0069] Each substrate 16, 17 can be made of, for example, a conductive material, such as iron, aluminum, copper, or an alloy of aluminum and copper. In addition, each substrate 16, 17 may be made of a conductive semiconductor such as Si or GaN, or a conductive polymer. When conductive materials are used for each substrate 16, 17, wiring for connecting to each electrode 11, 12 becomes unnecessary.

[0070] <Example of operation of power generation element 1> For example, when thermal energy is supplied to the power generation element 1, an electric current is generated between the first electrode 11 and the second electrode 12, and the thermal energy is converted into electrical energy. The amount of current generated between the first electrode 11 and the second electrode 12 depends on the thermal energy, as well as the difference between the work function of the second electrode 12 and the work function of the first electrode 11.

[0071] The amount of current generated can be increased, for example, by increasing the work function difference between the first electrode 11 and the second electrode 12, and by decreasing the gap G. For example, the amount of electrical energy generated by the power generation element 1 can be increased by considering at least one of the above-mentioned work function difference and the above-mentioned gap G. In addition, by providing fine particles 141 between each electrode 11 and 12, the amount of electrons moving between each electrode 11 and 12 can be increased, which can lead to an increase in the amount of current.

[0072] In addition to the above, the power generation element 1 of this embodiment includes, for example, fine particles 141 exhibiting a perovskite structure. Therefore, due to the characteristics of protons described above, the movement of electrons between each electrode 11 and 12 is activated. This makes it possible to improve the amount of power generated.

[0073] The "work function" refers to the minimum energy required to extract electrons from a solid into a vacuum. The work function can be measured using, for example, ultraviolet photoelectron spectroscopy (UPS), X-ray photoelectron spectroscopy (XPS), or Auger electron spectroscopy (AES). In addition to using measured values ​​for each component of the power generation element 1 as the "work function," known values ​​measured for materials, for example, may also be used.

[0074] (Embodiment: Method for manufacturing the power generation element 1) Next, an example of a method for manufacturing the power generation element 1 in this embodiment will be described. Figure 6 is a flowchart showing an example of a method for manufacturing the power generation element 1 in this embodiment.

[0075] The method for manufacturing the power generation element 1 includes an element formation step S100, and may also include, for example, an electrode separation step S140.

[0076] <Element Formation Process S100> The element formation step S100 forms the first electrode 11, the intermediate portion 14, and the second electrode 12, respectively. In the element formation step S100, the first electrode 11, the intermediate portion 14, and the second electrode 12 are formed, respectively, using, for example, known formation techniques. The element formation step S100 includes, for example, the second electrode formation step S110, the intermediate portion formation step S120, and the first electrode formation step S130. The order in which each step S110, S120, and S130 are performed is arbitrary.

[0077] <Second electrode formation step S110> The second electrode formation step S110 forms the second electrode 12. In the second electrode formation step S110, the second electrode 12 is formed on, for example, the second substrate 17. The second electrode 12 is formed, for example, by sputtering or vacuum deposition under a reduced pressure environment, or by using known electrode formation techniques. In addition, in the second electrode formation step S110, the second electrode 12 may be formed by processing a stretched electrode material to an arbitrary size instead of using the second substrate 17. In this case, the second substrate 17 may not be used.

[0078] In the second electrode formation step S110, if a film-like material is used as the second substrate 17, the second electrode 12 is applied onto the second substrate 17, and the second substrate 17 and the second electrode 12 are wound into a roll. Thereafter, in at least one of the intermediate part formation step S120, the first electrode formation step S130, and the electrode separation step S140, which will be described later, the material may be cut to an area appropriate for the application.

[0079] <Middle part forming process S120> The intermediate part formation step S120 involves forming an intermediate part 14 on, for example, the second electrode 12. In the intermediate part formation step S120, an insulated material containing fine particles 141 is applied to the surface of the second electrode 12, etc., and the insulated material is hardened to form an insulated layer 142. This forms an intermediate part 14 including an insulated layer 142 containing fine particles 141.

[0080] The intermediate forming step S120 involves applying a non-conductive material to the surface of the second electrode 12 using known coating techniques such as screen printing or spin coating. The thickness of the film to which the non-conductive material is applied can be arbitrarily set in accordance with the design of the gap G described above.

[0081] As the insulator, known insulating polymer materials such as epoxy resins are used. Thermosetting resins are used as the insulator, as well as, for example, ultraviolet curing resins. In the intermediate forming step S120, depending on the properties of the insulator, the coated insulator may be heated or irradiated with UV light to form the insulator layer 142.

[0082] In the intermediate part formation step S120, for example, fine particle material may be mixed into any inorganic material and laser irradiation may be performed. This forms a non-conductive layer 142 containing fine particles 141, and the intermediate part 14 is formed.

[0083] <First electrode formation step S130> The first electrode formation step S130 involves forming a first electrode 11 on, for example, a non-conductive layer 142. The first electrode 11 is formed using, for example, a material having a smaller work function than the second electrode 12. The first electrode 11 is formed using, for example, a known electrode formation technique such as nanoimprinting.

[0084] In the first electrode formation step S130, the first electrode 11 is formed on the surface of the insulator layer 142, for example, using a sputtering method or a vacuum deposition method under reduced pressure. In this case, at the time the first electrode 11 is formed, the main surface of the first electrode 11 is in contact with the insulator layer 142 without being exposed to the atmosphere or the like. Therefore, fluctuations in the work function of the first electrode 11 can be suppressed. This makes it possible to further stabilize the amount of power generated.

[0085] In the first electrode formation step S130, the first electrode 11 may be formed by bringing the surface of the first electrode 11, which has been previously provided on the first substrate 16, into contact with the surface of the insulated layer 142. In this case, compared to the case in which the first electrode 11 is formed directly on the surface of the insulated layer 142, variations in the surface state of the first electrode 11 caused by the surface state of the insulated layer 142 can be suppressed. This makes it possible to increase the amount of power generated.

[0086] In the first electrode formation step S130, the first electrode 11 is formed on the intermediate portion 14 or the first substrate 16, and then a slit is formed along the second direction Y. This forms the aforementioned multiple extended portions 11a and base portion 11b. A known technique such as anisotropic etching, which can remove a portion of the first electrode 11, is used to form the slit.

[0087] In the first electrode formation step S130, the width and number of slits formed in the first electrode 11 are arbitrary. Here, the width and number of slits formed in the first electrode 11 affect the magnitude of the internal resistance of the manufactured power generation element 1. For this reason, in the first electrode formation step S130, by controlling the width and number of slits which have been set in advance, it is possible to manufacture a power generation element 1 having an internal resistance suitable for the application.

[0088] For example, if a film-like material is used as the first substrate 16, this can be achieved by preparing the first substrate 16 with the first electrode 11 coated on it. Alternatively, the first substrate 16 and the first electrode 11 may be prepared in a rolled state. Subsequently, they may be cut to an area appropriate for the application, for example, before or after the electrode separation process S140 described later.

[0089] <Electrode separation process S140> For example, after the first electrode formation step S130, an electrode separation step S140 may be performed. The electrode separation step S140 separates at least one of the multiple extended portions 11a from the base portion 11b. Whether or not to separate the extended portion 11a is determined by criteria set according to the application, such as whether it contains defects. A known technique such as anisotropic etching, which can remove a part of the first electrode 11, is used to form the slit.

[0090] By carrying out the steps described above, the power generation element 1 in this embodiment is formed. Furthermore, by forming, for example, the wiring 101, 102, etc., the power generation device 100 in this embodiment is formed.

[0091] (Embodiment: Electronic device 500) <Electronic equipment 500> The power generation element 1 and power generation device 100 described above can be mounted, for example, on an electronic device. Several embodiments of such electronic devices will be described below.

[0092] Figures 7(a) to 7(d) are schematic block diagrams showing examples of electronic equipment 500 equipped with a power generation element 1. Figures 7(e) to 7(h) are schematic block diagrams showing examples of electronic equipment 500 equipped with a power generation device 100 including the power generation element 1.

[0093] As shown in Figure 7(a), the electronic device 500 (electric product) comprises an electronic component 501, a main power supply 502, and an auxiliary power supply 503. Each of the electronic device 500 and the electronic component 501 is an electrical device.

[0094] The electronic component 501 is powered by the main power supply 502. Examples of the electronic component 501 include a CPU, motor, sensor terminal, and lighting. If the electronic component 501 is, for example, a CPU, the electronic device 500 includes electronic equipment that can be controlled by the built-in master (CPU). If the electronic component 501 includes, for example, at least one of a motor, sensor terminal, and lighting, the electronic device 500 includes electronic equipment that can be controlled by an external master or by a person.

[0095] The main power supply 502 is, for example, a battery. This includes rechargeable batteries. The positive terminal (+) of the main power supply 502 is electrically connected to the Vcc terminal (Vcc) of the electronic component 501. The negative terminal (-) of the main power supply 502 is electrically connected to the GND terminal (GND) of the electronic component 501.

[0096] The auxiliary power supply 503 is a power generation element 1. The power generation element 1 includes at least one of the power generation elements 1 described above. In the electronic device 500, the auxiliary power supply 503 can be used, for example, in conjunction with the main power supply 502, as a power source to assist the main power supply 502, or as a power source to back up the main power supply 502 when the capacity of the main power supply 502 is depleted. If the main power supply 502 is a rechargeable battery, the auxiliary power supply 503 can also be used as a power source to charge the battery.

[0097] As shown in Figure 7(b), the main power supply 502 may be the power generation element 1. The electronic device 500 shown in Figure 7(b) comprises the power generation element 1 used as the main power supply 502 and electronic components 501 that can be driven using the power generation element 1. The power generation element 1 is an independent power source (e.g., an off-grid power source). Therefore, the electronic device 500 can be, for example, self-sufficient (standalone). Moreover, the power generation element 1 is an energy harvesting type. The electronic device 500 shown in Figure 7(b) does not require battery replacement.

[0098] As shown in Figure 7(c), the electronic component 501 may include a power generation element 1. The anode of the power generation element 1 is electrically connected, for example, to the GND wiring of a circuit board (not shown). The cathode of the power generation element 1 is electrically connected, for example, to the Vcc wiring of a circuit board (not shown). In this case, the power generation element 1 can be used as, for example, an auxiliary power supply 503 for the electronic component 501.

[0099] As shown in Figure 7(d), if the electronic component 501 includes a power generation element 1, the power generation element 1 can be used as, for example, the main power supply 502 of the electronic component 501.

[0100] As shown in Figures 7(e) to 7(h), the electronic device 500 may include a power generation device 100. The power generation device 100 includes a power generation element 1 as a source of electrical energy.

[0101] The embodiment shown in Figure 7(d) includes a power generation element 1 in which the electronic component 501 is used as a main power source 502. Similarly, the embodiment shown in Figure 7(h) includes a power generation device 100 in which the electronic component 501 is used as a main power source. In these embodiments, the electronic component 501 has an independent power source. For this reason, the electronic component 501 can be, for example, a self-sustaining type. A self-sustaining electronic component 501 can be effectively used in electronic devices that include, for example, multiple electronic components, and where at least one electronic component is separated from the other electronic components. An example of such an electronic device 500 is a sensor. The sensor includes a sensor terminal (slave) and a controller (master) located away from the sensor terminal. Both the sensor terminal and the controller are electronic components 501. If the sensor terminal includes the power generation element 1 or the power generation device 100, it becomes a self-sustaining sensor terminal and does not require wired power supply. Since the power generation element 1 or the power generation device 100 is of the harvesting type, battery replacement is also unnecessary. The sensor terminal can also be considered as one of the electronic devices 500. Sensor terminals considered to be electronic devices 500 include, in addition to sensor terminals, IoT wireless tags, and the like.

[0102] What is common to each embodiment shown in Figures 7(a) to 7(h) is that the electronic device 500 includes a power generation element 1 that converts thermal energy into electrical energy, and an electronic component 501 that can be driven using the power generation element 1 as a power source.

[0103] The electronic device 500 may be autonomous with an independent power supply. Examples of autonomous electronic devices include robots. Furthermore, the electronic component 501 equipped with the power generation element 1 or power generation device 100 may also be autonomous with an independent power supply. Examples of autonomous electronic components include mobile sensor terminals.

[0104] According to the embodiment described above, the first electrode 11 includes a plurality of extending portions 11a that extend along a second direction Y intersecting the first direction Z and are separated by at least one of the intermediate portion 14 and the space 15, and a base portion 11b that is connected to the plurality of extending portions 11a. Therefore, by separating the extending portion 11a corresponding to the location where a defect occurs from the base portion 11b, the element can be treated as a good product. This makes it possible to improve the yield.

[0105] Furthermore, according to the embodiment described above, the element includes fine particles 141 exhibiting a perovskite structure. As a result, protons generated from water molecules contained in the atmosphere surrounding the power generation element 1 move to the lower potential electrode through the space 15 formed between the multiple extended portions 11a by the electric field between electrodes 11 and 12. Along with the movement of protons, the movement of electrons between electrodes 11 and 12 is activated. This makes it possible to improve the amount of power generated.

[0106] Furthermore, according to the embodiment described above, the intermediate portion 14 includes a non-conductive layer 142 containing fine particles 141. That is, the non-conductive layer 142 suppresses the movement of fine particles 141 between electrodes 11 and 12. Therefore, it is possible to suppress the uneven distribution of fine particles 141 to one side of electrodes 11 or 12 over time, which would reduce the amount of electron movement. This makes it possible to stabilize the amount of power generated.

[0107] Furthermore, according to the embodiment described above, the intermediate portion 14 includes a non-conductive layer 142 that supports the first electrode 11. Therefore, compared to the case where a solvent or the like is used instead of the non-conductive layer 142, there is no need to provide a support portion to maintain the distance (gap G) between electrodes 11 and 12, and variations in the gap caused by the precision of forming the support portion can be eliminated. This makes it possible to increase the amount of power generated.

[0108] Furthermore, according to the above-described embodiment, the non-conductive layer 142 includes a hydrophilic material. Therefore, it is easy to maintain a state in which water molecules are in close proximity to the fine particles 141. This makes it possible to further stabilize the amount of power generated.

[0109] Furthermore, according to the above-described embodiment, the insulated layer 142 contains an organic polymer compound. Therefore, the insulated layer 142 can be formed flexibly. This makes it possible to create a power generation element 1 with a shape that suits the application.

[0110] Furthermore, according to the embodiment described above, the element formation step S100 forms a first electrode 11 which includes an extended portion 11a that extends along a second direction Y intersecting the first direction Z and is separated from the intermediate portion 14 and the space 15 via at least one of them, and a base portion 11b that is connected to the multiple extended portions 11a. Therefore, by separating the extended portion 11a corresponding to the location where a defect occurs from the base portion 11b, the element can be treated as a good product. This makes it possible to improve the yield.

[0111] Furthermore, according to the embodiment described above, for example, the intermediate portion 14 may be provided on the first electrode 11 and may include a solid insulated layer 142 and fine particles 141 fixed in a dispersed state within the insulated layer 142. That is, the insulated layer 142 suppresses the movement of fine particles 141 between the electrodes (first electrode 11, second electrode 12). In this case, it is possible to suppress the uneven distribution of fine particles 141 to one electrode side over time, which would reduce the amount of electron movement. This makes it possible to stabilize the amount of power generated.

[0112] Furthermore, according to the above-described embodiment, for example, the intermediate portion 14 may be provided on the first electrode 11 and may include a solid insulated layer 142. Also, the second electrode 12 may be provided on the insulated layer 142 and may have a different work function than the first electrode 11. In this case, compared to the case where a solvent or the like is used instead of the insulated layer 142, there is no need to provide support parts to maintain the distance (gap G) between the electrodes, and variations in the gap G caused by the formation accuracy of support parts can be eliminated. This makes it possible to increase the amount of power generated.

[0113] In the embodiments described above, the intermediate portion 14 mainly contained fine particles 141 was described, but instead of fine particles 141, layers such as the "donor layer" and "acceptor layer" disclosed in Japanese Patent Application Publication No. 2022-183933 may be included. In this case as well, by separating the extended portion 11a corresponding to the location where the defect occurred from the base portion 11b, the element can be treated as a good product. This makes it possible to improve the yield.

[0114] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of Symbols]

[0115] 1: Power generation element 11: 1st electrode 11a: Extension part 11b: Proximal end 12:Second electrode 14: Middle section 15: Space 16: First board 17: Second board 100: Power generation device 101: 1st wiring 102:Second wiring 141: Fine particles 141a: Coating 142: Insulated layer 500:Electronic equipment S100: Element formation process S110: Second electrode formation process S120: Middle part forming process S130: First electrode formation process S140: Electrode separation process X: 3rd direction Y: Second direction Z: Direction 1

Claims

1. A power generation element that does not require a temperature difference between electrodes when converting thermal energy into electrical energy, A first electrode and a second electrode, having different work functions and spaced apart in a first direction, An intermediate portion provided between the first electrode and the second electrode, Equipped with, The first electrode extends along a second direction intersecting the first direction and has a plurality of extending portions separated by at least one of the intermediate portion and the space, A base end connected to a plurality of the aforementioned extensions, including A power generation element characterized by the following.

2. The aforementioned intermediate portion includes fine particles exhibiting a perovskite structure. The power generation element according to claim 1, characterized by the following:

3. The fine particles contain at least one of barium, strontium, zirconium, and titanium. The power generation element according to claim 2, characterized by the above.

4. The intermediate portion includes a non-conductive layer that contains the fine particles and supports the first electrode. The power generation element according to claim 3, characterized by the above.

5. The insulator layer includes a hydrophilic material. The power generation element according to claim 4, characterized by the above.

6. The aforementioned insulator layer contains an organic polymer compound. The power generation element according to claim 5, characterized by the above.

7. The power generation element according to claim 1, The first electrode and the first wiring electrically connected, The second wiring is electrically connected to the second electrode, To be prepared A power generation device characterized by the following.

8. The power generation element according to claim 1, An electronic component that is driven using the aforementioned power generation element as a power source and To be prepared Electronic devices characterized by the following:

9. A method for manufacturing a power generation element that eliminates the need for a temperature difference between electrodes when converting thermal energy into electrical energy, The process includes forming an element comprising a first electrode and a second electrode having different work functions and being spaced apart in a first direction, and an intermediate portion provided between the first electrode and the second electrode, The above-mentioned element formation step is, A plurality of extending portions that extend along a second direction intersecting the first direction and are separated by at least one of the intermediate portion and the space, A base end connected to a plurality of the aforementioned extensions, Forming a first electrode that includes including A method for manufacturing a power generation element characterized by the following.

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