Industrial robots

Abstract

This reduces the wiring space below the arm used to move the hand horizontally, and avoids interference between the arm and the cable. [Solution] The industrial robot 1 includes a hand 2 for holding an object to be transported, an arm 3 to which the hand 2 is connected, an arm support to which the arm 3 is connected, an arm drive mechanism for rotating the arm 3 relative to the arm support 4, a support column 61 and a lifting mechanism 7 for raising and lowering the arm support along the support column 61, a cable 8 with one end connected to the support column 61 and the other end connected to the arm support via a joint member 83, and a first guide member 10 for guiding the cable 8. The joint member 83 is rotatably connected to the arm support about a rotation axis L2 that intersects the Z direction, which is the lifting direction of the arm support. The first guide member 10 restricts the movement of the cable 8 to a position that interferes with the passage area R through which the arm 3 passes when the arm 3 rotates.

Description

Technical Field

[0001] The present invention relates to an industrial robot.

Background Art

[0002] Patent Document 1 describes an industrial robot for use in a semiconductor manufacturing system. The industrial robot described in Patent Document 1 includes a hand that holds a semiconductor wafer, an arm to which the hand is connected on the distal end side, an arm support member to which the base end portion of the arm is connected, and an arm elevating mechanism that moves the arm support member up and down relative to a pillar portion extending in the vertical direction. Between the arm support member and the pillar portion, a cable with wiring housed inside a flexible tube is routed. One end of the cable is connected to the lower surface of the arm support member, folded back in a U-shape below the arm support member, and connected to the vertical center position of the pillar portion.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of Invention

Problems to be Solved by the Invention

[0004] When the cable is drawn out downward from the arm support member as in Patent Document 1, it is necessary to secure a wiring space for arranging the U-shaped bent cable below the arm support member. Therefore, the downward movement of the arm is restricted, and there is a risk that required operations cannot be performed. For example, when wafers are arranged in multiple stages, the arm cannot be lowered to a position where the lowermost wafer can be taken out. Alternatively, securing the wiring space increases the product height.

[0005] To reduce the restriction on the downward movement of the arm, the cable can be routed to the side instead of downward. However, a cable routed to the side is more likely to interfere with the arm when it moves horizontally. Therefore, it may hinder the arm's movement.

[0006] In view of the above, the object of the present invention is to reduce the wiring space below the arm for moving the hand horizontally, and to avoid interference between the arm and the cable. [Means for solving the problem]

[0007] To solve the above problems, one embodiment of the industrial robot according to the present invention comprises a hand for holding an object to be transported, an arm to which the hand is connected, an arm support to which the arm is connected, an arm drive mechanism for rotating the arm relative to the arm support, a support column and a lifting mechanism for raising and lowering the arm support along the support column, a cable with one end connected to the support column and the other end connected to the arm support via a joint member, and a first guide member for guiding the cable, wherein the joint member is rotatably connected to the arm support about a rotation axis intersecting the lifting direction of the arm support, and the first guide member restricts the cable from moving to a position that interferes with the arm when the arm rotates. [Brief explanation of the drawing]

[0008] [Figure 1] Figure 1 is an external perspective view of an industrial robot. [Figure 2] Figure 2 is an exploded perspective view of an industrial robot. [Figure 3] Figure 3 is a front view of the industrial robot when the arm support is raised to its upper end position. [Figure 4] Figure 4 is a front view of the industrial robot when the arm support is lowered to its lower end position, and a cross-sectional view of the first guide member and the second guide member (cross-sectional view cut at position AA). [Modes for carrying out the invention]

[0009] The following describes an embodiment of an industrial robot to which the present invention is applied, with reference to the drawings.

[0010] (Overall structure) Figure 1 is an external perspective view of the industrial robot 1. Figure 2 is an exploded perspective view of the industrial robot 1. Figure 3 is a front view of the industrial robot 1 when the arm support 4 is raised to the upper end position P1. Figure 4 is a front view of the industrial robot 1 when the arm support 4 is lowered to the lower end position P2, and also shows cross-sectional views of the first guide member 10 and the second guide member 20 (cross-sectional view cut at position AA).

[0011] In this specification, the three directions X, Y, and Z are mutually orthogonal. One side of the X direction is designated as X1, and the other side as X2. One side of the Y direction is designated as Y1, and the other side as Y2. One side of the Z direction is designated as Z1, and the other side as Z2. The Z direction is the vertical direction (up and down). Z1 is downward. Z2 is upward.

[0012] The industrial robot 1 transports an object by combining the operation of raising and lowering the hand 2 that holds the object to be transported, and the operation of moving the hand 2 in a horizontal plane. The object to be transported is, for example, a thin semiconductor wafer. As shown in Figures 1, 2, and 3, the industrial robot 1 comprises an arm 3 to which the hand 2 is connected, an arm support part 4 to which the arm 3 is connected, an arm drive mechanism 5 for rotating the arm 3, a support frame 6 that supports the arm 3 via the arm support part 4, a lifting mechanism 7 for raising and lowering the arm support part 4 along the support frame 6, a cable 8 connecting the support frame 6 and the arm support part 4, and a base 9 that supports the support frame 6.

[0013] The base 9 is fixed to the mounting surface on which the industrial robot 1 is installed. The base 9 comprises a housing 91 extending linearly in the Y direction and a traveling mechanism 92 located inside the housing 91. A guide groove 93 extending in the Y direction is provided on the X1 side of the housing 91. The support frame 6 comprises two support columns 61 and 62 extending in the Z direction, an upper frame 63 connecting the upper ends of the support columns 61 and 62, a lower frame 64 connecting the lower ends of the support columns 61 and 62, and a traveling member 65 fixed to the X2 side of the lower end portions of the support columns 61 and 62. When the traveling mechanism 92 is driven, the traveling member 65 connected to the traveling mechanism 92 moves in the Y direction along the guide groove 93. As a result, the support frame 6 moves in the Y direction, and the arm 3 and hand 2 supported by the support frame 6 move in the Y direction.

[0014] As shown in Figure 2, the arm support section 4 comprises a lifting member 41 that moves up and down in the Z direction along the support columns 61 and 62, and a rectangular parallelepiped-shaped arm drive unit 42 fixed to or integrally formed with the lifting member 41. The lifting member 41 includes a pair of sliders 43 and 44 that extend in the Z direction along the X1 direction side of the support columns 61 and 62. The arm drive unit 42 is positioned on the X1 side of the lifting member 41. Guide grooves 66 are provided on the X1 direction side of the support columns 61 and 62 to move the sliders 43 and 44 linearly in the Z direction.

[0015] The lifting mechanism 7 is positioned inside the support columns 61 and 62. When the lifting mechanism 7 is driven, the sliders 43 and 44 connected to the lifting mechanism 7 move in the Z direction along the guide groove 66. This causes the arm support 4, arm 3, and hand 2 to move up and down in the Z direction. The lifting mechanism 7 is, The arm support 4 is raised and lowered within a range from the upper end position P1 shown in Figures 1, 2, and 3 to the lower end position P2 shown in Figure 4. The lifting mechanism 7 can be, for example, a belt mechanism equipped with a belt stretched between a drive pulley and a driven pulley, and a motor that rotates the drive pulley. In Figures 1 and 2, the belt mechanism of the lifting mechanism 7 that is located inside the support column 62 is not shown.

[0016] In this embodiment, the arm drive unit 42 of the arm support 4 is positioned below the arm 3. The arm 3 is connected to the output member (not shown) of the arm drive mechanism 5, which is housed inside the arm drive unit 42. When the arm drive mechanism 5 is driven, the arm 3 pivots around the central axis L1, which extends in the Z direction relative to the arm support 4. When the arm 3 pivots, the arm 3 and the hand 2 move through a cylindrical passage region R, shown by the dashed line in Figures 1 to 4.

[0017] (cable) Cable 8 is a flexible tube with wiring running through it. One end of cable 8 is connected to a cable fixing part 67 provided on the support frame 6. The cable fixing part 67 is located on the X1-direction side of a support column 61, which is located at the Y1-side end of the support frame 6. One end of cable 8 extends from the cable fixing part 67 in the Z1 direction. The other end of cable 8 is connected to the arm support part 4 via a joint member 83. The joint member 83 is located at the X1-direction end of the Y1-direction end of the arm support part 4. The joint member 83 is rotatably connected to the arm support part 4 via a rotation axis L2 extending in the Y direction.

[0018] As shown in Figure 2, the joint member 83 includes a first end 85 connected to the arm support 4, a second end 86 connected to the cable 8, and a curved portion 84 connecting the first end 85 and the second end 86. The curved portion 84 is a cylindrical portion curved in an R shape. The second end 86 faces in a direction perpendicular to the first end 85. The arm support 4 includes a cylindrical portion 46 extending in the Y1 direction from the X1 direction side of the arm drive unit 42. The first end 85 is rotatably connected to a flange portion 47 provided at the tip of the cylindrical portion 46, about a rotation axis L2 that coincides with the center line of the cylindrical portion 46. As a result, the joint member 83 is rotatable within a rotation range that includes a first rotation position 83A where the second end 86 faces in the Z1 direction and a second rotation position 83B where the second end 86 faces in the X2 direction.

[0019] As shown in Figure 1, Figure 2 and Figure 3, the first rotational position 83A is a position where the cable 8 connected to the second end portion 86 extends in the Z1 direction. As shown in Figure 4, the second rotational position 83B is a position where the cable 8 connected to the second end portion 86 extends in the X2 direction. The cable 8 deforms from a first shape 8A curved in a downward U-shape to a second shape 8B with its lower end bent in the X1 direction as the arm support portion 4 moves up and down.

[0020] As shown in Figure 3, when the arm support portion 4 rises to the upper end position P1, the cable 8 assumes a first shape 8A that extends linearly from the cable fixing portion 67 in the Z1 direction, then curves in a U-shape, and extends linearly in the Z2 direction toward the joint member 83. At this time, the joint member 83 is located at the first rotational position 83A where the second end portion 86 faces the Z1 direction.

[0021] As shown in Figure 4, when the arm support portion 4 descends to the lower end position P2, the cable 8 assumes a second shape 8B that extends linearly from the cable fixing portion 67 in the Z1 direction, then bends into an R shape near the lower end of the support column 61, and extends in the X1 direction toward the joint member 83. At this time, the joint member 83 is located at the second rotational position 83B where the second end portion 86 faces the X2 direction.

[0022] (Guide member) The industrial robot 1 includes a first guide member 10 and a second guide member 20 that guide the cable 8 when the arm support portion 4 descends. The first guide member 10 guides the cable 8 from three directions: the Z2 direction, the Y1 direction, and the Y2 direction. The second guide member 20 guides the cable 8 from the Z1 direction and restricts movement of the cable 8 in the Z1 direction. In the present embodiment, the first guide member 10 is disposed on the arm support portion 4. The second guide member 20 is disposed on the support frame 6.

[0023] When the arm support 4 moves up and down between the upper end position P1 and the lower end position P2, the cable 8 deforms between the first shape 8A and the second shape 8B, but it does not become a shape that interferes with the arm 3. In other words, the cable 8 does not become a shape that interferes with the cylindrical passage area R shown by the dashed line in Figures 1 to 4. The first guide member 10 restricts the cable 8 from moving to a position that interferes with the passage area R when it deforms from the first shape 8A to the second shape 8B.

[0024] As shown in Figure 2, the first guide member 10 is fixed to the lifting member 41 via a mounting member 48. The first guide member 10 is fixed to the tip of the mounting member 48 which extends from the lifting member 41 in the Y1 direction. As a result, the first guide member 10 is positioned on the X1 side with respect to the support column 61 and the cable fixing part 67, and on the X2 side with respect to the joint member 83. As a result, the first guide member 10 is positioned opposite the curved portion of the cable 8 of the first shape 8A from the Z2 direction. In addition, the first guide member 10 is positioned on the Y1 side with respect to the passage area R through which the arm 3 passes when it rotates (see Figure 1).

[0025] The first guide member 10 is provided with a groove 11 that opens in the Z1 direction. The groove 11 extends linearly in the X direction. As shown in Figure 2, the cable 8 extends from the cable fixing part 67 in the Z1 direction, then curves in the X1 direction, and extends through the Z1 side of the groove 11 to the joint member 83. Therefore, as the arm support part 4 descends, the groove 11 approaches the curved portion of the cable 8. When the curved portion of the cable 8 enters the groove 11, the cable 8 is guided by the groove 11.

[0026] The groove 11 includes a first guide portion 12 that guides the cable 8 from the Z2 direction. The first guide portion 12 is a curved surface that is convex in the Z1 direction and has an R shape that slopes toward the Z2 direction as it moves toward the X2 direction. Therefore, as shown in Figure 4, when the arm support portion 4 descends to the lower end position P2, the portion of the cable 8 that extends from the cable fixing portion 67 toward the Z1 direction and then curves toward the X1 direction extends along the first guide portion 12 within the groove 11.

[0027] The groove 11 includes a second guide portion 13 extending in the Z1 direction from the Y1 edge of the first guide portion 12, and a third guide portion 14 extending in the Z1 direction from the Y2 edge of the first guide portion 12. The second guide portion 13 guides the cable 8 that has entered the groove 11 from the Y1 direction. The third guide portion 14 guides the cable 8 that has entered the groove 11 from the Y2 direction. The third guide portion 14 restricts the movement of the cable 8 toward the passage area R that the arm 3 passes through when it rotates.

[0028] As shown in the cross-sectional view AA of Figure 4, the groove 11 includes a first tapered portion 15 provided at the Z1-direction tip of the second guide portion 13, and a second tapered portion 16 provided at the Z1-direction tip of the third guide portion 14. The first tapered portion 15 and the second tapered portion 16 are inclined in a direction in which the distance between them increases as they move toward the Z1 direction. Therefore, even if there is variation in the Y-direction position of the cable 8 when the arm support portion 4 descends, there is little risk that the cable 8 will not be able to be accommodated in the groove 11.

[0029] The second guide member 20 extends linearly in the X1 direction from the Z1 direction end of the support column 61. The second guide member 20 has a sliding surface 21 that faces the first guide member 10 in the Z direction. The sliding surface 21 guides the cable 8 from the Z1 direction. As shown in Figure 2, the sliding surface 21 has a constant width in the Y direction and extends linearly in the X direction. The sliding surface 21 is treated with a surface finish such as a fluororesin coating that has a low coefficient of friction with respect to the cable 8.

[0030] The sliding surface 21 is positioned opposite the curved portion of the cable 8 of the first shape 8A from the Z1 direction. As the arm support 4 descends, the lower end portion of the U-shaped curved cable 8 comes into contact with the sliding surface 21. As the arm support 4 descends further, the joint member 83 rotates from the first rotation position 83A to the second rotation position 83B, causing the cable 8 to slide along the sliding surface 21 in the X2 direction. When the first guide member 10 descends to the height of the cable 8, the cable 8 is housed in the groove 11. As shown in Figure 4, when the arm support 4 descends to the lower end position P2, the sliding surface 21 supports the cable 8 housed in the groove 11 from the Z1 direction.

[0031] The second guide member 20 includes a third tapered portion 22 rising from the edge of the sliding surface 21 in the Y1 direction and a fourth tapered portion 23 rising from the edge of the sliding surface 21 in the Y2 direction. The third tapered portion 22 and the fourth tapered portion 23 are inclined in a direction in which the distance between them increases as they move toward the Z2 direction. The third tapered portion 22 guides the cable 8, which is supported by the sliding surface 21 from the Z1 direction, from the Y1 direction. The fourth tapered portion 23 guides the cable 8, which is supported by the sliding surface 21 from the Z1 direction, from the Y2 direction.

[0032] (Effects and Benefits) As described above, the industrial robot 1 of this embodiment includes a hand 2 for holding an object to be transported, an arm 3 to which the hand 2 is connected, an arm support 4 to which the arm 3 is connected, an arm drive mechanism 5 for rotating the arm 3 relative to the arm support 4, a support column 61 and a lifting mechanism 7 for raising and lowering the arm support 4 along the support column 61, a cable 8 with one end connected to the support column 61 and the other end connected to the arm support 4 via a joint member 83, and a first guide member 10 for guiding the cable 8. The joint member 83 is rotatably connected to the arm support 4 about a rotation axis L2 that intersects the Z direction, which is the lifting direction of the arm support 4. The first guide member 10 restricts the movement of the cable 8 to a position that interferes with the passage area R through which the arm 3 passes when the arm 3 rotates.

[0033] In this configuration, the arm support 4 and the cable 8 are connected via a joint member 83, and when the arm support 4 is lowered, the orientation of the cable 8 changes due to the rotation of the joint member 83. Therefore, the wiring space for the cable 8 that needs to be secured below the arm support 4 can be reduced. Furthermore, because the first guide member 10 is provided, interference between the cable 8 and the arm 3 can be avoided when the arm support 4 is raised or lowered.

[0034] In this configuration, the first guide member 10 is fixed to the arm support 4 and positioned between the cable fixing portion 67 and the joint member 83 provided on the support column 61. This arrangement allows the first guide member 10 to move up and down together with the arm support 4, making it easier to restrict the cable 8 from moving to a position that interferes with the passage area R through which the arm 3 passes. Furthermore, this arrangement allows the first guide member 10 to be positioned above the curved portion of the cable 8, which is routed downwards from the cable fixing portion 67 towards the joint member 83. Therefore, when the arm support 4 descends, the cable 8 can be guided by the first guide member 10, which descends together with the arm support 4.

[0035] In this embodiment, the first guide member 10 has a groove 11 that extends in the X direction from the joint member 83 towards the cable fixing portion 67 and opens in the Z1 direction (downward). In this way, the curved portion of the cable 8, which is routed in a downward-bending shape from the cable fixing portion 67 towards the joint member 83, is guided by the groove 1 when the arm support portion 4 descends. It is housed in 1. By holding the cable 8 in the groove 11, it is possible to restrict the movement of the cable 8 to a position that interferes with the passage area R.

[0036] In this embodiment, the groove 11 includes a first guide portion 12 that guides the cable 8 from the Z2 direction (above). The first guide portion 12 is curved in a shape that is convex in the Z1 direction (downward), and is inclined in the Z2 direction (upward) as it moves from the joint member 83 side toward the cable fixing portion 67 side. With such a shape, the curved portion of the cable 8 slides easily along the first guide portion 12. Therefore, the cable 8 can be deformed smoothly. In addition, since the first guide portion 12 is shaped to conform to the curved shape of the cable 8, the cable 8 is less likely to come off the first guide member 10.

[0037] In this embodiment, a second guide member 20 is provided, which is fixed to the support column 61. The second guide member 20 has a sliding surface 21 that restricts the movement of the cable 8 in the Z1 direction (downward). By supporting the cable 8 with the sliding surface 21 in this way, there is less resistance when the cable 8 moves in the X direction along the sliding surface 21, so the joint member 83 rotates smoothly. Therefore, the cable 8 can be smoothly deformed into the second shape 8B.

[0038] In this embodiment, the sliding surface 21 faces the first guide member 10 in the Z direction. With this arrangement, when the arm support 4 descends, the cable 8 guided by the first guide member 10 can be supported from below by the sliding surface 21.

[0039] In this embodiment, the first guide member 10 has a groove 11 that extends from the joint member 83 toward the cable fixing portion 67 provided on the support column 61 and opens in the Z1 direction (downward). The sliding surface 21 supports the cable 8 housed in the groove 11 from the Z1 direction (downward) when the arm support portion 4 is at its lowest point. In this way, the cable 8 can be held between the groove 11 and the sliding surface 21. Therefore, it is possible to restrict the movement of the cable 8 to a position that interferes with the passage area R. In addition, the cable 8 can be smoothly deformed into the second shape 8B.

[0040] (summary) The present invention can take the following forms. (1) A handle for holding the object to be transported, The arm to which the aforementioned hand is connected, The arm support portion to which the aforementioned arm is connected, An arm drive mechanism for rotating the arm relative to the arm support portion, A support column and a lifting mechanism for raising and lowering the arm support along the support column, A cable having one end connected to the support column and the other end connected to the arm support via a joint member, It has a first guide member that guides the cable, The joint member is rotatably connected to the arm support portion about a rotation axis that intersects the vertical direction of the arm support portion. The industrial robot is characterized in that the first guide member restricts the movement of the cable to a position that interferes with the passage area through which the arm passes when the arm rotates.

[0041] (2) The industrial robot according to (1) above, characterized in that the first guide member is fixed to the arm support and is positioned between the cable fixing portion provided on the support column and the joint member.

[0042] (3) The industrial robot according to (1) or (2) above, characterized in that the first guide member has a groove that extends in a direction toward the cable fixing portion and opens downward.

[0043] (4) The groove portion includes a first guide portion that guides the cable from above, The industrial robot according to (3) above, characterized in that the first guide portion is curved in a shape that is convex downward and is inclined upward as it moves from the side of the joint member toward the side of the cable fixing portion.

[0044] (5) It includes a second guide member fixed to the aforementioned support column, The industrial robot according to any one of (1) to (4) above, characterized in that the second guide member has a sliding surface that restricts the downward movement of the cable.

[0045] (6) The industrial robot according to (5) above, characterized in that the sliding surface faces the first guide member in the vertical direction.

[0046] (7) The first guide member has a groove that extends in a direction toward the cable fixing portion provided on the support column and opens downward, The industrial robot according to (6) above, characterized in that the sliding surface supports the cable housed in the groove from below when the arm support is in its lowest position. [Explanation of Symbols]

[0047] 1...Industrial robot, 2...Hand, 3...Arm, 4...Arm support, 5...Arm drive mechanism, 6...Support frame, 7...Lifting mechanism, 8...Cable, 8A...First shape, 8B...Second shape, 9...Base, 10...First guide member, 11...Groove, 12...First guide section, 13...Second guide section, 14...Third guide section, 15...First tapered section, 16...Second tapered section, 20...First guide member, 21...Sliding surface, 22...Third tapered section, 23...Fourth tapered section, 41...Lifting member, 42...Arm drive Unit, 43, 44... Slider, 46... Cylinder section, 47... Flange section, 48... Mounting member, 61, 62... Support column, 63... Upper frame, 64... Lower frame, 65... Running member, 66... ​​Guide groove, 67... Cable fixing section, 83... Joint member, 83A... First rotation position, 83B... Second rotation position, 84... Curved section, 85... First end, 86... Second end, 91... Housing, 92... Running mechanism, 93... Guide groove, L1... Center axis, L2... Rotation axis, P1... Upper end position, P2... Lower end position, R... Passage area

Claims

1. A handle for holding the object to be transported, The arm to which the aforementioned hand is connected, The arm support portion to which the aforementioned arm is connected, An arm drive mechanism for rotating the arm relative to the arm support portion, A support column and a lifting mechanism for raising and lowering the arm support along the support column, A cable having one end connected to the support column and the other end connected to the arm support via a joint member, It has a first guide member that guides the cable, The joint member is rotatably connected to the arm support portion about a rotation axis that intersects the vertical direction of the arm support portion. The industrial robot is characterized in that the first guide member restricts the movement of the cable to a position that interferes with the passage area through which the arm passes when the arm rotates.

2. The industrial robot according to claim 1, characterized in that the first guide member is fixed to the arm support and is positioned between the cable fixing portion provided on the support column and the joint member.

3. The industrial robot according to claim 2, characterized in that the first guide member has a groove that extends in a direction toward the cable fixing portion and opens downward.

4. The groove portion includes a first guide portion that guides the cable from above, The industrial robot according to claim 3, characterized in that the first guide portion is curved in a shape that is convex downward and is inclined upward as it moves from the side of the joint member toward the side of the cable fixing portion.

5. It includes a second guide member fixed to the aforementioned support column, The industrial robot according to claim 1, characterized in that the second guide member has a sliding surface that restricts the downward movement of the cable.

6. The industrial robot according to claim 5, characterized in that the sliding surface faces the first guide member in the vertical direction.

7. The first guide member has a groove that extends in a direction toward the cable fixing portion provided on the support column and opens downward, The industrial robot according to claim 6, characterized in that the sliding surface supports the cable housed in the groove from below when the arm support is in its lowest position.

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