Conveyor hand and conveying device

Abstract

The outer periphery of a thin, plate-like object to be transported is stably held by suction, which places minimal stress on the object. [Solution] The conveying hand of the conveying device 1 has a first adsorption part 10 that contacts and adsorbs the outer peripheral region of a plate-shaped workpiece W, and a second adsorption part 20 that adsorbs the inner peripheral region of the workpiece W without contact. The first adsorption part 10 is a porous adsorption part 12 that has a first adsorption surface 11 formed of a first porous material and adsorbs the workpiece W through the pores of the first porous material. The second adsorption part 20 is a non-contact adsorption part 22 that has a second adsorption surface 21 formed of a second porous material and has suction holes provided on the second adsorption surface 21. The second adsorption part 20 holds the workpiece W at a position away from the second adsorption surface 21 by blowing pressurized gas from the pores of the second porous material and sucking it in through the suction holes.

Description

Technical Field

[0001] The present invention relates to a transport hand and a transport apparatus.

Background Art

[0002] Patent Document 1 describes a transport apparatus that transports thin-plate shaped transport objects (workpieces) while sucking and holding them one by one. The transport apparatus of Patent Document 1 includes a transport hand (suction holding unit) that sucks and holds the upper surface of a workpiece. The suction holding unit includes suction pads that come into contact with and suck the outer peripheral portion of the workpiece. Further, the suction holding unit includes a Bernoulli chuck that holds the workpiece on the inner peripheral side relative to the suction pads. When the workpiece is a substrate for manufacturing semiconductors, the inner peripheral region of the surface of the workpiece is a region where process processing is performed, and contact is not permitted. Accordingly, the inner peripheral region of the workpiece is held by the non-contact Bernoulli chuck.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] When the outer peripheral region of a workpiece is sucked by suction pads, if there is positional deviation or deflection of the workpiece, a gap may be formed between the suction surface of the suction pad and the workpiece, which may cause an air leak. Accordingly, the suction holding force for sucking and holding the outer peripheral region decreases, and the holding of the workpiece tends to be insufficient. In addition, since the suction pads have a small suction area, marks are likely to be left on the workpiece.

[0005] When transporting thin plate-shaped workpieces, one method is to hold the inner circumference of the workpiece with a Bernoulli chuck and then hold the outer circumference with a suction pad, as described in Patent Document 1, or to hold the outer circumference with a guide plate or the like. However, as mentioned above, using a suction pad often results in insufficient hold on the workpiece. Also, when holding the outer circumference with a guide plate, if the workpiece is thin plate-shaped, there is a risk of cracking due to the load applied to the workpiece.

[0006] In view of the above, the object of the present invention is to stably hold the outer periphery of a thin plate-shaped object being conveyed by suction with minimal load on the object being conveyed. [Means for solving the problem]

[0007] To solve the above problems, one aspect of the present invention provides a conveying hand for holding a plate-shaped object to be conveyed, comprising: a first adsorption portion that contacts and adsorbs the outer peripheral region of the object to be conveyed; and a second adsorption portion that adsorbs the inner peripheral region of the object to be conveyed without contact, wherein the first adsorption portion comprises a first adsorption surface formed of a first porous body, and adsorbs the object to be conveyed through the pores of the first porous body.

[0008] Furthermore, one embodiment of the conveying device according to the present invention is characterized by comprising the above-mentioned conveying hand, a lifting mechanism for moving the conveying hand in the vertical direction, and a moving mechanism for moving the conveying hand in a direction intersecting the vertical direction. [Brief explanation of the drawing]

[0009] [Figure 1] Figure 1 is a schematic diagram illustrating the conveying device, the first suction unit, and the second suction unit. [Figure 2] Figure 2 is a schematic plan view of the workpiece. [Figure 3] Figure 3 shows a plan view and a cross-sectional view of the transfer hand that holds the first workpiece by suction. [Figure 4] Figure 4 is a plan view showing the first unit in its disassembled state. [Figure 5]Figure 5 shows a plan view and a cross-sectional view of the transfer hand that holds the second workpiece by suction. [Figure 6] Figure 6 is a plan view showing the state after separating the second unit from the first unit. [Figure 7] Figure 7 is a plan view showing the state in which the first suction part for the second shape is shifted toward the outer circumference. [Figure 8] Figure 8 shows a plan view and a cross-sectional view of a conveyor hand equipped with reinforcing ribs. [Modes for carrying out the invention]

[0010] The following describes embodiments of a transport hand and transport device to which the present invention is applied, with reference to the drawings.

[0011] (Conveyor device) Figure 1 is a schematic diagram illustrating the transport device 1, the first suction unit 10, and the second suction unit 20. The transport device 1 holds and transports workpieces W, which are plate-shaped objects to be transported, one by one. The transport device 1 is used, for example, in a semiconductor manufacturing system. In this case, the workpieces W are thin, plate-shaped semiconductor package substrates. The semiconductor manufacturing system includes the transport device 1 for transporting the workpieces W and a processing device (not shown) for processing the workpieces W.

[0012] In this specification, the three directions X, Y, and Z are mutually orthogonal. One side of the X direction is designated as X1, and the other side as X2. One side of the Y direction is designated as Y1, and the other side as Y2. One side of the Z direction is designated as Z1, and the other side as Z2. The X direction is the second direction. The Y direction is the first direction. The Z direction is the vertical direction (up and down). The Z1 direction is downward. The Z2 direction is upward.

[0013] As shown in Figure 1, the transport device 1 includes a transport hand 2 that suctions and holds a workpiece W placed on a mounting section 101, a lifting mechanism 102 that moves the transport hand 2 in the Z direction, and a horizontal movement mechanism 103 that moves the transport hand 2 in a direction intersecting the Z direction. The horizontal movement mechanism 103 includes, for example, an arm 104 that supports the transport hand 2, and performs at least one of a rotational movement that rotates the arm 104 in the XY plane, and an extension / retraction movement that extends or retracts the arm 104 in the XY plane.

[0014] The transport hand 2 includes a first suction section 10 and a second suction section 20. The first suction section 10 and the second suction section 20 are each connected to a vacuum suction device (not shown) via an air tube 105. The second suction section 20 is also connected to an air supply device (not shown) via an air tube 106. Pressurized gas is supplied to the second suction section 20 via the air tube 106.

[0015] The first suction part 10 has a first suction surface 11 facing in the Z1 direction. The second suction part 20 has a second suction surface 21 facing in the Z1 direction. When the first suction surface 11 is in close contact with the upper surface of the workpiece W, the second suction surface 21 faces the upper surface of the workpiece W without contact. The first suction part 10 adheres to the outer peripheral region of the workpiece W by contact. The second suction part 20 adheres to the inner peripheral region of the workpiece W without contact.

[0016] The conveying device 1 moves the conveying hand 2 above the workpiece W placed on the mounting section 101. Subsequently, it lowers the conveying hand 2 to a position where the workpiece W can be picked up by the first suction section 10 and the second suction section 20. After that, it drives the vacuum suction device and the air supply device. As a result, the workpiece W is held in place by the conveying hand 2. After that, the conveying hand 2 is raised, and then moved horizontally, thereby lifting the workpiece W held in place by the conveying hand 2 and conveying it to the target position.

[0017] (Work) Figure 2 is a plan view schematically showing a workpiece W. The transport device 1 can suction and hold workpieces W of a plurality of shapes by selectively using a plurality of transport hands 2. In the present embodiment, as the transport target (workpiece W), a first workpiece W1 shown in the left diagram of Figure 2 and a second workpiece W2 shown in the right diagram of Figure 2 are assumed. The first workpiece W1 has a first shape. The second workpiece W2 has a second shape that is larger than the first shape. Each of the first workpiece W1 and the second workpiece W2 includes a strip-shaped contactable region R1 extending along the outer peripheral edge. A non-contact region R2 is provided inside the contactable region R1. When the workpiece W is a semiconductor package substrate, the non-contact region R2 is a region where a circuit is formed by a process treatment.

[0018] The transport device 1 can selectively use, as the transport hand 2, a transport hand 2A shown in Figure 3 and a transport hand 2B shown in Figure 5. In the transport hand 2A, the first suction part 10 comes into contact with and suctions the contactable region R1 provided in the outer peripheral region of the first workpiece W1, and the second suction part 20 suctions the non-contact region R2 provided in the inner peripheral region of the first workpiece W1 in a non-contact manner. In the transport hand 2B, the first suction part 10 comes into contact with and suctions the contactable region R1 provided in the outer peripheral region of the second workpiece W2, and the second suction part 20 suctions the non-contact region R2 provided in the inner peripheral region of the first workpiece W1 in a non-contact manner.

[0019] (First suction part) As shown in Figure 1, the first suction part 10 includes a porous suction portion 12. The porous suction portion 12 includes a first suction surface 11 formed by a first porous body 13. The porous suction portion 12 includes a groove-shaped case 14, and the first porous body 13 is held in the opening of the case 14. The first porous body 13 is, for example, a porous carbon pad provided with fine pores. A suction hole 15 connected to an air tube 105 is provided on the bottom surface of the case 14. Accordingly, when a vacuum suction device connected to the air tube 105 is driven, a negative pressure is formed in the space on the back side of the first porous body 13, and suction is performed from the pores of the first porous body 13 over the entire range of the first suction surface 11. As a result, the workpiece W is suction-held on the first suction surface 11.

[0020] (Second suction part) As shown in Figure 1, the second adsorption section 20 includes a non-contact adsorption section 22. The non-contact adsorption section 22 includes a second adsorption surface 21 formed by a second porous body 23. The non-contact adsorption section 22 includes a holder 24 that supports the second porous body 23 from the back side. The second porous body 23 is, for example, a porous carbon pad having fine pores. The holder 24 is provided with groove-shaped pressurized gas channels 25 along the back surface of the second porous body 23. The pressurized gas channels 25 are arranged at regular intervals on the back surface of the second porous body 23. For example, a grid-like arrangement of pressurized gas channels 25 is arranged on the back surface of the second porous body 23. The pressurized gas channels 25 are connected to an air tube 106. Therefore, when the air supply device connected to the air tube 106 is driven, pressurized gas is ejected from the pores of the second porous body 23 over the entire area of ​​the second adsorption surface 21. This generates a force that levitates the workpiece W.

[0021] Suction holes 26 are opened in the second suction surface 21, penetrating the second porous body 23. The suction holes 26 are arranged at regular intervals across the entire area of ​​the second suction surface 21. The suction holes 26 are connected to the air tube 105 via a suction channel provided in the holder 24. Therefore, when the vacuum suction device connected to the air tube 105 is driven, suction is generated from the suction holes 26, creating a force that causes the workpiece W to adhere to the surface of the second porous body 23. The non-contact suction unit 22 holds the workpiece W by adsorbing it without contact by appropriately controlling the balance between the ejection of pressurized gas from the pores of the second porous body 23 and the suction from the suction holes 26.

[0022] (Conveyor handle) Figure 3 shows a plan view and a cross-sectional view of the transfer hand 2A that holds the first workpiece W1 by suction. The upper part of Figure 3 is a plan view. The lower part of Figure 3 is a cross-sectional view taken at position AA. Figure 4 is a plan view showing the first unit 3 in a disassembled state. Figure 5 is a plan view and a cross-sectional view of the transfer hand 2B that holds the second workpiece W2 by suction. The upper part of Figure 5 is a plan view. The lower part of Figure 5 is a cross-sectional view taken at position BB. Figure 6 is a plan view showing the second unit 4 separated from the first unit 3. Note that the cross-sectional views in Figures 3 and 5 schematically show the cross-sectional shape of each component, and the actual thickness of the components and workpiece W may differ from that shown in Figure 3.

[0023] First, with reference to Figures 3 and 4, the transfer hand 2A that holds the first workpiece W1 by suction will be described. The transfer hand 2A comprises a first unit 3. The first unit 3 comprises a first frame 30, a first suction part 10, and a second suction part 20. The first frame 30 comprises two straight frames 31 and 32 extending parallel to the X direction, and three connecting frames 33, 34, and 35 extending parallel to the Y direction. The connecting frame 33 connects the ends of the straight frames 31 and 32 in the X1 direction. The connecting frame 34 connects the straight frames 31 and 32 near their centers in the X direction. The connecting frame 35 connects the ends of the straight frames 31 and 32 in the X2 direction.

[0024] The first adsorption section 10, positioned on the first frame 30, comprises a first adsorption section 5 for a first shape and a first adsorption section 6 for a second shape. The first adsorption section 5 for the first shape and the first adsorption section 6 for the second shape each include a porous adsorption section 12 that extends linearly with a constant width. The porous adsorption section 12 includes a first adsorption surface 11. In the plan views of Figures 3 and 4, the hatched band-shaped areas indicate the planar shapes of the porous adsorption sections 12 provided on the first adsorption section 5 for the first shape and the first adsorption section 6 for the second shape.

[0025] The first adsorption portion 5 for the first shape is positioned to adsorb the outer peripheral region of the first workpiece W1. As shown in Figure 4, the linear frames 31 and 32 include first frame portions 31A and 32A extending from connecting frame 33 to connecting frame 34, and second frame portions 31B and 32B extending from connecting frame 34 to connecting frame 35. The first adsorption portion 5 for the first shape is fixed to the first frame portions 31A and 32A extending parallel to the X direction, and to connecting frames 33 and 34 extending parallel to the Y direction. As a result, the porous adsorption portion 12 is arranged in a strip shape along the outer peripheral region of the first workpiece W1, which has a dimension of D1 in the X direction and a dimension of D2 in the Y direction.

[0026] The first unit 3 has straight frames 31 and 32 whose length in the X direction is greater than the X-direction dimension D2 of the first workpiece W1, and the second frame portions 31B and 32B extend outward from the first workpiece W1. The first suction portion 6 for the second shape is fixed to a connecting frame 35 that connects the ends of the second frame portions 31B and 32B that extend outward from the first workpiece W1, and is positioned outward from the first workpiece W1.

[0027] As shown in Figures 3 and 4, the second suction part 20 is positioned in the center of a rectangular area enclosed by the first frame portions 31A and 32A and the connecting frames 33 and 34, and suctions the inner circumferential region of the first workpiece W1. The second suction part 20 includes a non-contact suction part 22 supported by the first frame 30 via a holding member (not shown).

[0028] In this specification, the first suction part 5 for the first shape fixed to the first frame portions 31A and 32A is referred to as the first suction part 5A for the first shape. The first suction part 5 for the first shape fixed to the connecting frame 34 is referred to as the first suction part 5B for the first shape. The first suction part 5 for the first shape fixed to the connecting frame 33 is referred to as the first suction part 5C for the first shape. The first suction part 5A for the first shape, the first suction part 5B for the first shape, and the first suction part 5C for the first shape are all fixed to the first frame 30 by fixing members such as bolts and are detachable from the first frame 30.

[0029] As shown in the cross-sectional view of Figure 3, the first suction part 5A for the first shape comprises a porous suction part 12, a mounting plate 51, and a position adjustment member 52. The mounting plate 51 is fixed to the porous suction part 12 from the back side. The mounting plate 51 has an edge portion 54 that extends to the outside of the porous suction part 12. The porous suction part 12 is fixed to the first frame 30 via the edge portion 54 of the mounting plate 51. The position adjustment member 52 has an L-shaped cross-section and has a recess 53 into which the edge portion 54 fits. The first suction part 5A for the first shape is fixed to the first frame 30 by sandwiching the edge portion 54 between the position adjustment member 52 and the first frame 30 and fastening them together with a fixing member such as a bolt.

[0030] The first suction part 5B for the first shape, like the first suction part 5A for the first shape, is equipped with a porous suction part 12, a mounting plate 51, and a position adjustment member 52, and is fixed to the first frame 30 by the same fixing structure as the first suction part 5A for the first shape. The cross-sectional configuration of the location where the first suction part 5B for the first shape is fixed is the same as the cross-sectional configuration of the location where the first suction part 5A for the first shape is fixed, as shown in the cross-sectional view of Figure 3.

[0031] The first suction part 5C for the first shape comprises a porous suction part 12 and a mounting plate 51, but does not include a position adjustment member 52. The edge 54 of the mounting plate 51, which extends outward from the porous suction part 12, overlaps the connecting frame 33 from the Z1 direction and is fixed to the connecting frame 33 by a fixing member such as a bolt. In this way, the first suction part 5C for the first shape is fixed to the first frame 30. Note that the first suction part 5C for the first shape does not necessarily have to be detachable from the first frame 30.

[0032] Next, with reference to Figures 5 and 6, the transfer hand 2B that holds the second workpiece W2 by suction will be described. The transfer hand 2B comprises a first unit 3 and a second unit 4. As described above, the first unit 3 is used alone as the transfer hand 2A. As shown in Figure 5, by connecting the second unit 4 to both sides of the first unit 3 in the Y direction, it can be used as the transfer hand 2B that suctions and transfers the second workpiece W2. The connecting frame 35 of the first unit 3 is positioned to correspond to the outer peripheral area of ​​the second workpiece W2. The first suction part 6 for the second shape, fixed to the connecting frame 35 of the first unit 3, is not used when the first unit 3 alone suctions the first workpiece W1, but is used when the second unit 4 is connected and suctions the second workpiece W2.

[0033] As shown in Figure 6, the second unit 4 comprises a second frame 40 and a first suction part 10. The second frame 40 comprises two straight frames 41 and 42 extending parallel to the X direction and two connecting frames 43 and 44 extending parallel to the Y direction. The connecting frame 43 connects the ends of the straight frames 41 and 42 in the X1 direction. The connecting frame 44 connects the ends of the straight frames 41 and 42 in the X2 direction.

[0034] As shown in Figure 6, the second unit 4 positioned in the Y1 direction of the first unit 3 and the second unit 4 positioned in the Y2 direction of the first unit 3 have the arrangement of the straight frames 41 and 42 in the Y direction reversed, and the positions of the straight frames 41 and 42 are swapped. As shown in Figure 5, the straight frame 41 of the second unit 4 located on the Y1 side of the first unit 3 is connected to the straight frame 31 of the first frame 30. The straight frame 41 of the second unit located on the Y2 side of the first unit 3 is connected to the straight frame 32 of the first frame 30.

[0035] The first suction part 10 located in the second unit 4 is the first suction part 6 for the second shape. The first suction part 6 for the second shape, like the first suction part 6 for the second shape located in the first unit 3, has a porous suction part 12 that extends linearly with a constant width. The first suction part 6 for the second shape is fixed to the linear frame 42 and connecting frames 43 and 44 of the second frame 40. In the plan views of Figures 5 and 6, a band-shaped hatching is provided that extends along the outer edge of the transport hand 2B. The region shows the planar shape of the porous adsorption section 12.

[0036] At the X1 end of the transport hand 2B, the first suction part 5C for the first shape, which is fixed to the connecting frame 33 of the first unit 3, and the first suction part 6 for the second shape, which is fixed to the connecting frame 43 of the second unit 4, are aligned in a straight line in the Y direction. When the first unit 3 is used as a transport hand 2A by itself, the first suction part 5C for the first shape holds the outer periphery of the first workpiece W1, and when the first unit 3 and the second unit 4 are connected and used as a transport hand 2B, the first suction part 5C holds the outer periphery of the second workpiece W2.

[0037] At the X2 end of the transport hand 2B, the second shape first suction part 6 fixed to the connecting frame 35 of the first unit 3 and the second shape first suction part 6 fixed to the connecting frame 44 of the second unit 4 are aligned in a straight line in the Y direction.

[0038] As shown in Figures 5 and 6, the transport hand 2B has two second suction parts 20. When assembling the transport hand 2B, the second suction parts 20 are additionally attached to the first unit 3 shown in Figure 3. The additional second suction parts 20 are positioned in the center of a rectangular area enclosed by the second frame portions 31B and 32B and the connecting frames 34 and 35. Both second suction parts 20 are equipped with a non-contact suction part 22 that is supported by the first frame 30 via a holding member (not shown).

[0039] (Retraction of the first suction part for the first shape) In the transport hand 2B, the first suction parts 5A and 5B for the first shape, provided on the first unit 3, are positioned opposite the inner circumferential region of the second workpiece W2. Therefore, when assembling the transport hand 2B, the porous suction parts 12 provided on the first suction parts 5A and 5B for the first shape are moved out of contact with the inner circumferential region of the second workpiece W2.

[0040] As shown in the cross-sectional view of Figure 3, when the first unit 3 is used as a transport hand 2A by itself, the edge 54 of the mounting plate 51 is sandwiched and fixed between the position adjustment member 52 of the first suction part 5A for the first shape and the first frame 30. When fixed in this manner, the porous suction part 12 of the first suction part 5A for the first shape is positioned at a suction position P1 in which the first suction surface 11 protrudes from the first frame 30 in the Z1 direction.

[0041] In contrast, when the first unit 3 is connected to the second unit 4 and used as a transport hand 2B, the first suction part 5A for the first shape is temporarily removed from the first frame 30 and the mounting method is changed. Specifically, as shown in the cross-sectional view of Figure 5, the position adjustment member 52 is turned over in the Z direction and the edge 54 of the mounting plate 51 is brought into contact with the recess 53 of the position adjustment member 52. Then, the position adjustment member 52 is sandwiched and fixed between the edge 54 and the first frame 30. When fixed in this manner, the porous suction part 12 of the first suction part 5A for the first shape is positioned with its first suction surface 11 at a retracted position P2, which is retracted in the Z2 direction from the suction position P1.

[0042] Similarly, the first suction part 5B for the first shape is also removed from the first frame 30 and its mounting method is changed in the same way as the first suction part 5A for the first shape. As a result, the porous suction part 12 of the first suction part 5B for the first shape is positioned at a retracted position P2, where the first suction surface 11 is retracted from the suction position P1 in the Z2 direction. In Figures 5 and 6, the areas with coarse hatched lines show the planar shape of the porous suction part 12 with the first suction surface 11 retracted to the retracted position P2.

[0043] (Work to address the dimensional changes of the second workpiece) As shown in the cross-sectional view of Figure 5, the first adsorption part 6 for the second shape comprises a porous adsorption part 12 and a mounting plate 61. The mounting plate 61 has an edge portion 62 that extends to the outside of the porous adsorption part 12. The part 62 is fixed to the second frame 40 by fixing members such as bolts. When the edge 62 contacts the second frame 40 from the Z2 direction, the porous adsorption part 12 is positioned at an adsorption position P1 in which the first adsorption surface 11 protrudes from the second frame 40 in the Z1 direction.

[0044] The second unit 4 includes a position adjustment section 7 for adjusting the mounting position of the first suction part 6 for the second shape relative to the second frame 40. The position adjustment section 7 is an elongated hole provided in the edge 62 of the mounting plate 61. Here, the first suction part 6 for the second shape comprises two types: the first suction part 6A for the second shape which includes the position adjustment section 7, and the first suction part 6B for the second shape which does not include the position adjustment section 7. The mounting position of the first suction part 6A for the second shape relative to the second frame 40 in the X or Y direction can be adjusted by sliding a bolt within the elongated hole which is the position adjustment section 7.

[0045] Figure 7 is a plan view showing the second shape first suction part 6A shifted toward the outer periphery. The second shape first suction part 6A is fixed to the straight frame 42 and connecting frame 44 of the second frame 40, and to the connecting frame 35 of the first frame 30. The second shape first suction part 6A fixed to the straight frame 42 has an elongated hole, which is the position adjustment part 7, extending in the Y direction. Therefore, it can be slid in the Y direction as shown by the arrow in Figure 7. The second shape first suction part 6A fixed to the connecting frame 44 and connecting frame 35 has an elongated hole, which is the position adjustment part 7, extending in the X direction. Therefore, it can be slid in the X direction as shown by the arrow in Figure 7.

[0046] As shown in Figure 7, the transport hand 2B has its first suction part 6A for the second shape shifted outward, resulting in a dimension D13 that is larger than D11 in the X direction and a dimension D14 that is larger than D12 in the Y direction. The transport hand 2B can shift the position of the first suction part 6A for the second shape within the range of the dimensions of the elongated hole, which is the position adjustment part 7. Therefore, it is possible to accommodate changes in the external dimensions of the second workpiece W2 without replacing parts.

[0047] (Reinforcement ribs) Figure 8 is a plan view and a cross-sectional view of the conveying hand 2B equipped with reinforcing ribs 8. The conveying hand 2B in Figure 8 comprises a first unit 3 and second units 4 connected to both sides of the first unit 3. The first unit 3 in Figure 8 is the first unit 3 with reinforcing ribs 8 added to prevent deflection. The reinforcing ribs 8 are integrally formed with straight frames 31 and 32 that extend parallel to the X direction at both ends of the first frame 30 in the Y direction. Alternatively, the reinforcing ribs 8 may be made as separate members from the straight frames 31 and 32, and the reinforcing ribs 8 may be fixed to the straight frames 31 and 32.

[0048] The straight frames 31 and 32 are connecting frames to which the second unit 4 is connected. As shown in the cross-sectional view of Figure 8, the reinforcing rib 8 protrudes from one end of the straight frame 31 in the width direction in the thickness direction of the straight frame 31. As shown in the plan view of Figure 8, the reinforcing rib 8 extends linearly in the X direction along the width direction edge of the straight frame 31. The upper end of the reinforcing rib 8 has an inclined portion that slopes in a direction in which the height in the Z direction decreases as it approaches the end of the first unit 3 in the X1 direction.

[0049] (Effects and Benefits) As described above, the conveying device 1 of this embodiment includes a conveying hand 2, a lifting mechanism 102 for moving the conveying hand 2 in the vertical direction, and a horizontal movement mechanism 103 for moving the conveying hand 2 in a direction intersecting the vertical direction. The conveying hand 2 of this embodiment is a conveying hand 2 that holds a plate-shaped workpiece W, and includes a first suction part 10 that contacts and adsorbs the outer peripheral region of the workpiece W, and a second suction part 20 that adsorbs the inner peripheral region of the workpiece W without contact. The first suction part 10 has a first suction surface 11 formed by a first porous body 13, and the pores of the first porous body 13 The workpiece W is attracted via this.

[0050] In this embodiment, since the inner circumferential region of the workpiece W is adsorbed non-contactually, the entire workpiece can be adsorbed with a flat surface even if the inner circumferential region of the workpiece W is a non-contact area. Furthermore, since the outer circumferential region of the workpiece W is adsorbed through the pores of the porous first adsorption surface 11, the adsorption force is less likely to decrease even if the position of the workpiece W shifts, compared to when an adsorption pad is used. Therefore, the workpiece W can be held stably by adsorption with less load on the workpiece W.

[0051] In this embodiment, the second adsorption section 20 includes a second adsorption surface 21 formed by a second porous body 23. Suction holes 26 are provided in the second adsorption surface 21. Pressurized gas is blown out from the pores of the second porous body 23 and sucked in through the suction holes 26 to hold the workpiece W at a position away from the second adsorption surface 21. Using such an adsorption means, the workpiece W can be supported with a uniform adsorption force, and the gap with the workpiece W can be kept uniform. Therefore, the workpiece W can be held stably, a highly accurate flat surface can be achieved, and the load on the workpiece W is reduced.

[0052] In this embodiment, the first suction part 10 extends in a strip shape along the outer edge of the workpiece W. This ensures a sufficient suction area for the first suction part 10. Therefore, even if the position of the workpiece W shifts, the suction force is less likely to decrease, and it can be held stably. In addition, compared to using a small suction pad, the load applied to the workpiece W is less, and it is less likely to leave marks on the workpiece W.

[0053] In this embodiment, the system comprises a first unit 3 and a second unit 4 connectable to the first unit 3. When the workpiece W is either a first workpiece W1 of a first shape or a second workpiece W2 of a second shape larger than the first shape, the first suction unit 10 comprises a first suction unit 5 for the first shape located on the first unit 3, and a first suction unit 6 for the second shape located on at least the second unit 4. The first suction unit 5 for the first shape contacts and adheres to the outer peripheral region of the first workpiece W1, and the first suction unit 6 for the second shape contacts and adheres to the outer peripheral region of the second workpiece W2. The second suction unit 20 is located on the first unit 3. The first unit 3 comprises a first frame 30 that supports the first suction unit 5 for the first shape. A part of the first suction unit 5 for the first shape is detachable from the first frame 30. In this way, by blocking the transport hand 2 into multiple units, it is possible to connect them as needed to pick up large workpieces W, or to use individual units to pick up small workpieces W. Furthermore, by making the suction parts on the units used individually detachable, unnecessary suction parts can be disabled when multiple units are connected.

[0054] In this embodiment, the first suction part 5 for the first shape comprises a porous suction part 12 provided with a first suction surface 11, a mounting plate 51 fixed to the porous suction part 12, and a position adjustment member 52. When the mounting plate 51 is sandwiched and fixed between the position adjustment member 52 and the first frame 30, the first suction surface 11 is positioned at a suction position P1 that contacts the workpiece W. When the position adjustment member 52 is sandwiched and fixed between the mounting plate 51 and the first frame 30, the first suction surface 11 is positioned at a retracted position P2 where a gap is created between the workpiece W and the first suction surface 11. In this way, the suction by the first suction part 5 for the first shape can be disabled without replacing or adding parts. Furthermore, since the first suction part 5 for the first shape can be disabled while still attached, there is no need to manage removed parts. Therefore, the effort required for parts management can be reduced.

[0055] In this embodiment, the second unit 4 includes a second frame 40 that supports the first suction part 6 for the second shape. The second unit 4 and the first unit 3 are connected by connecting the second frame 40 and the first frame 30. The second unit 4 includes a position adjustment part 7 for adjusting the mounting position of the first suction part 6 for the second shape relative to the second frame 40. In this way, the first suction part 6 for the second shape can be moved, so it is possible to accommodate changes in the dimensions of the second workpiece W2 without creating a new second unit 4.

[0056] In this embodiment, the first unit 3 and the second unit 4 are aligned in the first direction (Y direction). The first frame 30 includes a pair of connecting frames (straight frames 31, 32) extending in the X direction on both sides of the second suction part 20 in the Y direction. The second unit 4 is connected to each of the straight frames 31, 32. Reinforcing ribs 8 are fixed or integrally formed on the straight frames 31, 32, protruding in the thickness direction of the straight frames 31, 32 and extending in the second direction. In this way, the long frame to which the second unit 4 is connected can be reinforced, thereby suppressing the deflection of the first frame 30.

[0057] (Other embodiments) The second suction part 20 is not limited to the non-contact suction part 22 of the above-described form, but may be other non-contact suction means. For example, a Bernoulli chuck can be used as the second suction part 20.

[0058] (summary) The present invention can take the following forms. (1) A conveying hand for holding a plate-shaped workpiece, A first adsorption part that contacts and adsorbs the outer peripheral region of the workpiece, It has a second suction part that non-contactively adsorbs the inner circumferential region of the workpiece, The first adsorption portion comprises a first adsorption surface formed by a first porous body, A transport hand characterized by adsorbing the workpiece through the pores of the first porous body.

[0059] (2) The second adsorption portion comprises a second adsorption surface formed of a second porous body, and suction holes are provided on the second adsorption surface. The conveying hand according to (1) above, characterized in that it holds the workpiece at a position away from the second adsorption surface by blowing pressurized gas from the pores of the second porous body and drawing it in from the suction holes.

[0060] (3) The transport hand according to (1) or (2) above, characterized in that the first suction portion extends in a strip shape along the outer edge of the workpiece.

[0061] (4) It comprises a first unit and a second unit that can be connected to the first unit, When the workpiece is either a first workpiece with a first shape, or a second workpiece with a second shape that is larger than the first shape, The first adsorption portion comprises a first adsorption portion for a first shape arranged in the first unit, and a first adsorption portion for a second shape arranged in at least the second unit. The first suction portion for the first shape contacts and adsorbs the outer peripheral region of the first workpiece. The first suction part for the second shape contacts and adsorbs the outer peripheral region of the second workpiece. The second adsorption unit is arranged in the first unit, The first unit comprises a first frame that supports the first suction portion for the first shape, The transport hand according to any one of (1) to (3) above, characterized in that at least a portion of the first suction portion for the first shape is detachable from the first frame.

[0062] (5) The first adsorption portion for the first shape comprises a porous adsorption portion on which the first adsorption surface is provided, a mounting plate fixed to the porous adsorption portion, and a position adjustment member. When the mounting plate is sandwiched and fixed between the position adjustment member and the first frame, the first suction surface is positioned at a suction position that contacts the workpiece. The transport hand according to (4) above, characterized in that when the position adjustment member is sandwiched and fixed between the mounting plate and the first frame, the first suction surface is positioned in a retracted position where a gap is created between the workpiece and the first suction surface.

[0063] (6) The second unit comprises a second frame that supports the first suction part for the second shape, By connecting the second frame and the first frame, the second unit and the first unit are connected. The transport hand according to (4) or (5) above, wherein the second unit comprises a position adjustment unit for adjusting the mounting position of the first suction part for the second shape relative to the second frame.

[0064] (7) When the direction in which the first unit and the second unit are aligned is defined as the first direction, The first frame comprises a pair of connecting frames extending in a second direction intersecting the first direction on both sides of the first direction of the second suction portion, and the second unit is connected to each of the pair of connecting frames. The conveying hand according to any one of (4) to (6) above, characterized in that the connecting frame has reinforcing ribs fixed to or integrally formed thereon that protrude in the thickness direction of the connecting frame and extend in the second direction.

[0065] (8) A transport hand as described in any of (1) to (7) above, A lifting mechanism for moving the transport hand in the vertical direction, A conveying device characterized by having a moving mechanism that moves the conveying hand in a direction of movement intersecting the vertical direction. [Explanation of Symbols]

[0066] 1…Conveying device, 2, 2A, 2B…Conveying hand, 3…First unit, 4…Second unit, 5, 5A, 5B, 5C…First suction part for first shape, 6, 6A, 6B…First suction part for second shape, 7…Position adjustment part, 8…Reinforcement rib, 10…First suction part, 11…First suction surface, 12…Porous suction part, 13…First porous body, 14…Case, 15…Suction hole, 20…Second suction part, 21…Second suction surface, 22…Non-contact suction part, 23…Second porous body, 24…Holder, 25…Pressurized gas flow path, 26…Suction hole, 30…First frame, 31, 32…Straight frame, 31A, 32A ...First frame section, 31B, 32B...Second frame section, 33, 34, 35...Connecting frame, 40...Second frame, 41, 42...Straight frame, 43, 44...Connecting frame, 51...Mounting plate, 52...Position adjustment member, 53...Recess, 54...Edge, 61...Mounting plate, 62...Edge, 101...Placement section, 102...Lifting mechanism, 103...Horizontal movement mechanism, 104...Arm, 105...Air tube, 106...Air tube, P1...Adsorption position, P2...Retracted position, R1...Contactable area, R2...Contactless area, W...Workpiece, W1...First workpiece, W2...Second workpiece

Claims

1. A conveying hand for holding a plate-shaped workpiece, A first adsorption part that contacts and adsorbs the outer peripheral region of the workpiece, It has a second suction part that non-contactively adsorbs the inner circumferential region of the workpiece, The first adsorption portion comprises a first adsorption surface formed of a first porous body, A transport hand characterized by adsorbing the workpiece through the pores of the first porous body.

2. The second adsorption portion comprises a second adsorption surface formed of a second porous body, and suction holes are provided on the second adsorption surface. The transfer hand according to claim 1, characterized in that it holds the workpiece at a position away from the second adsorption surface by blowing pressurized gas from the pores of the second porous body and drawing it in from the suction holes.

3. The transport hand according to claim 1, characterized in that the first suction portion extends in a strip shape along the outer edge of the workpiece.

4. It comprises a first unit and a second unit that can be connected to the first unit, When the workpiece is either a first workpiece with a first shape, or a second workpiece with a second shape that is larger than the first shape, The first adsorption portion comprises a first adsorption portion for a first shape arranged in the first unit, and at least a first adsorption portion for a second shape arranged in the second unit. The first suction portion for the first shape contacts and adsorbs the outer peripheral region of the first workpiece. The first suction part for the second shape contacts and adsorbs the outer peripheral region of the second workpiece. The second adsorption unit is arranged in the first unit, The first unit comprises a first frame that supports the first suction portion for the first shape, The transport hand according to claim 1, characterized in that at least a portion of the first suction portion for the first shape is detachable from the first frame.

5. The first adsorption portion for the first shape comprises a porous adsorption portion on which the first adsorption surface is provided, a mounting plate fixed to the porous adsorption portion, and a position adjustment member. When the mounting plate is sandwiched and fixed between the position adjustment member and the first frame, the first suction surface is positioned at a suction position that contacts the workpiece. The transfer hand according to claim 4, characterized in that when the position adjustment member is sandwiched and fixed between the mounting plate and the first frame, the first suction surface is positioned in a retracted position where a gap is created between the workpiece and the first suction surface.

6. The second unit comprises a second frame that supports the first suction part for the second shape, By connecting the second frame and the first frame, the second unit and the first unit are connected. The transport hand according to claim 4, characterized in that the second unit includes a position adjustment unit for adjusting the mounting position of the first suction part for the second shape with respect to the second frame.

7. When the direction in which the first unit and the second unit are aligned is defined as the first direction, The first frame comprises a pair of connecting frames extending in a second direction intersecting the first direction on both sides of the first direction of the second suction portion, and the second unit is connected to each of the pair of connecting frames. The conveying hand according to claim 4, characterized in that the connecting frame has reinforcing ribs fixed to or integrally formed thereon that protrude in the thickness direction of the connecting frame and extend in the second direction.

8. A transport hand according to any one of claims 1 to 7, A lifting mechanism for moving the transport hand in the vertical direction, A conveying device characterized by having a moving mechanism that moves the conveying hand in a direction of movement intersecting the vertical direction.

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