Desiccator

Abstract

To obtain a desiccator that can suppress the decrease in nitrogen concentration and increase in humidity inside the box. [Solution] A box 1 for storing sample 2 is provided with an opening 3 for inserting and removing sample 2. An air intake 5 for supplying nitrogen into the inside of box 1 is provided in box 1. A door 4 is attached to the opening 3 so as to be openable and closable. Door 4 is a sliding door that opens and closes by sliding horizontally.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to a desiccator.

BACKGROUND ART

[0002] A desiccator is a container that stores samples such as semiconductor devices or precision instruments therein in a dry state (see, for example, Patent Document 1). In order to suppress oxidation and moisture absorption of the samples, the inside of the box of the desiccator is filled with nitrogen.

PRIOR ART DOCUMENTS

PATENT DOCUMENTS

[0003]

PATENT DOCUMENT 1

SUMMARY OF THE INVENTION

PROBLEMS TO BE SOLVED BY THE INVENTION

[0004] Since the door of a conventional desiccator opens frontward, when the door is opened and closed, the nitrogen inside the box is replaced by the outside atmosphere. Accordingly, there has been a problem that the nitrogen concentration inside the box decreases and the humidity also rises.

[0005] The present disclosure has been made to solve the above-described problems, and an object thereof is to obtain a desiccator capable of suppressing a decrease in nitrogen concentration and an increase in humidity inside a box.

MEANS FOR SOLVING THE PROBLEMS

[0006] A desiccator according to the present disclosure includes: a box for storing a sample; an opening portion provided in the box for taking the sample in and out; an air inlet port provided in the box for supplying nitrogen into the inside of the box; and a door attached to the opening portion so as to be openable and closable, wherein the door is a slide door that opens and closes by sliding laterally.

EFFECTS OF THE INVENTION

[0007] In this disclosure, the door is a sliding door that opens and closes by sliding horizontally. Therefore, airflow in the inward and outward directions of the box is less likely to occur when the door is opened and closed. In addition, the area that the door opens can be kept to the minimum necessary. Thus, the decrease in nitrogen concentration and the increase in humidity inside the box can be suppressed. [Brief explanation of the drawing]

[0008] [Figure 1] This is a perspective view showing a desiccator according to Embodiment 1. [Figure 2] This is a cross-sectional view showing the box of the desiccator in Figure 1. [Figure 3] This is a perspective view showing a modified example of the desiccator according to Embodiment 1. [Figure 4] This diagram shows the sequence of opening and closing the desiccator door in Figure 3. [Figure 5] This is a perspective view showing a desiccator according to Embodiment 2. [Figure 6] This is a cross-sectional view showing the inside of a desiccator according to Embodiment 2. [Figure 7] This is a perspective view showing the inside of the desiccator according to Embodiment 2. [Figure 8] This is a cross-sectional view showing a desiccator according to Embodiment 3. [Figure 9] This is a cross-sectional view showing a desiccator according to Embodiment 3. [Figure 10] This is a cross-sectional view showing a desiccator according to Embodiment 3. [Figure 11] This is a cross-sectional view showing a desiccator according to Embodiment 3. [Figure 12] This diagram shows the fixing frames for the first partition and the second partition. [Figure 13] This diagram shows the sliding partitions for the first and second partitions. [Figure 14] This diagram shows the first and second partitions in a closed state. [Figure 15]This is a diagram showing a state where the first partition and the second partition are open. [Figure 16] This is a diagram showing a sequence when opening and closing the door of the desiccator according to the third embodiment. [Mode for Carrying Out the Invention]

[0009] The desiccator according to the embodiment will be described with reference to the drawings. The same or corresponding components are denoted by the same reference numerals, and repeated descriptions may be omitted.

[0010] Embodiment 1 Figure 1 is a perspective view showing the desiccator according to the first embodiment. Four rectangular parallelepiped boxes 1 are provided at the top, bottom, left, and right positions. The boxes 1 each store a sample 2 such as a semiconductor device or a precision instrument. An opening 3 for taking the sample 2 in and out is provided on the front surface of each box 1. A door 4 is attached to the opening 3 so as to be openable and closable.

[0011] At the upper part of the box 1, an air inlet 5 is provided for supplying nitrogen from an external gas cylinder or a nitrogen generator (not shown) into the interior of the box 1. Filling the interior of the box 1 with nitrogen suppresses oxidation and moisture absorption of the sample 2. The supplied nitrogen has a purity of 99% or more and a humidity of approximately 0%.

[0012] A frame 6 extending beside the opening 3 of each box 1 is provided. Rails are provided on the opening 3 of the box 1 and the lower surface of the frame 6. When in the closed state, the door 4 is disposed at the opening 3 of the box 1, and when opened, it slides on the rails toward the frame 6.

[0013] The door 4 is a sliding door that opens and closes by sliding laterally. Therefore, even when the door 4 is opened and closed, airflow in the inward and outward directions of the box 1 is unlikely to be generated. In addition, the area where the door 4 is opened can be minimized to the necessary extent. Accordingly, a decrease in the nitrogen concentration and an increase in humidity inside the box 1 can be suppressed. Furthermore, since the nitrogen inside the box 1 is not released to the outside, the supply amount of nitrogen to the box 1 can be reduced.

[0014] In order to slide the door 4 laterally, a certain gap is required between the door 4 and the box 1, so nitrogen leaks from the gap between the door 4 and the box 1. Therefore, no exhaust port for exhausting nitrogen is provided in the box 1. This ensures the nitrogen concentration inside the box 1.

[0015] FIG. 2 is a cross-sectional view showing the box of the desiccator of FIG. 1. Inside the box 1, four curved plates 7 are provided respectively at the upper and lower front positions and the upper and lower rear positions. The circulator 8 generates an airflow inside the box 1, and circulates the airflow inside the box 1 along the curved plates 7. Thereby, the circulator 8 generates an air curtain 9 at the opening 3 while the door 4 is open. The air curtain 9 can prevent gas exchange between the inside and outside of the box 1. Therefore, a decrease in nitrogen concentration and an increase in humidity inside the box 1 can be further suppressed.

[0016] FIG. 3 is a perspective view showing a modification of the desiccator according to the first embodiment. Each box 1 is provided with two doors 4 that respectively open and close the left side and the right side of the opening 3. The two doors 4 are respectively disposed on two mutually parallel rails. When opening the opening 3, one door 4 is slid laterally to overlap the other door 4 in the front-rear direction.

[0017] Since nitrogen leaks from the gap between the doors 4 or the gap between the door 4 and the box 1, no exhaust port for exhausting nitrogen is provided in the box 1. A switch 10 for controlling the operation of the circulator 8 is provided on the side of the opening 3 on the outer side of the box 1. The switch 10 has a lamp that lights up red while the circulator 8 is stopped, and lights up blue while the circulator 8 is in operation.

[0018] Figure 4 shows the sequence of opening and closing the desiccator door shown in Figure 3. First, with the door 4 closed, switch 10 of the circulator 8 is turned ON (step S1). The lamp on switch 10 blinks red. The circulator 8 starts operating (step S2). When the output of the circulator 8 stabilizes, the lamp lights up blue (step S3). It becomes possible to open the door 4 and insert or remove samples (step S4). After the insertion and removal of samples is complete, the door 4 is closed (step S5). When switch 10 of the circulator 8 is turned OFF, the lamp lights up red (step S6).

[0019] As described above, the lamp on switch 10 is an indicator that shows when the output of the circulator 8 is stable. The door 4 can be opened only after confirming that the output of the circulator 8 is stable and an air curtain 9 has been generated at the opening 3. This prevents the exchange of gas between the inside and outside of box 1.

[0020] Embodiment 2 Figure 5 is a perspective view showing a desiccator according to Embodiment 2. Figure 6 is a cross-sectional view showing the interior of the desiccator according to Embodiment 2. Figure 7 is a perspective view showing the interior of the desiccator according to Embodiment 2.

[0021] An air intake 5 is provided at the top of box 1 to supply nitrogen to the inside of box 1. An exhaust vent 11 is provided at the bottom of box 1 to discharge nitrogen from box 1. An opening 3 is provided at the bottom of box 1 for inserting and removing sample 2. A door 4 is attached to the opening 3 so as to be openable and closable.

[0022] Inside box 1, a chain 12 is supported by four chain gears 13 and arranged in a loop. Multiple stands 14 for placing sample 2 are attached to the chain 12. When one of the chain gears 13 is rotated by a motor, the multiple stands 14 rotate together with the chain 12. Therefore, the stands 14 are provided to be vertically movable inside box 1. Note that the rotation of the chain 12 and stands 14 may also be performed manually.

[0023] Since nitrogen is lighter than air, the nitrogen concentration will be lower at the bottom of box 1. Therefore, by providing an opening 3 at the bottom of box 1 for inserting and removing sample 2, the exchange of nitrogen inside box 1 with the outside atmosphere can be reduced. This suppresses the decrease in nitrogen concentration and increase in humidity at the top of box 1. In addition, since nitrogen is not released to the outside, the amount of nitrogen supplied to the desiccator can be reduced. Note that, as in Embodiment 1, the door 4 may be a sliding door, and a circulator 8 and a switch 10 with a lamp may be provided.

[0024] Embodiment 3 Figures 8 to 11 are top views showing a desiccator according to Embodiment 3. A first partition 15 and a second partition 16, which can be opened and closed, are separately provided on the side of the box 1. A gas storage bag 17 is attached to the box 1 via the first partition 15. The second partition 16 is exposed to the outside. The gas storage bag 17 is bellows-shaped. The end of the gas storage bag 17 moves along the gear rail 19 by a gear motor 18, causing the gas storage bag 17 to inflate or deflate. The internal volume of the gas storage bag 17 and the internal volume of the box 1 are the same.

[0025] Figure 12 shows the fixed frames of the first partition and the second partition. Figure 13 shows the sliding partitions of the first partition and the second partition. Each of the first partition 15 and the second partition 16 has a fixed frame 21 having a plurality of openings 20 arranged in a grid pattern, and a sliding partition 23 having a plurality of openings 22 positioned complementary to the plurality of openings 20 of the fixed frame 21.

[0026] Figure 14 shows the first and second partitions in a closed state. Figure 15 shows the first and second partitions in an open state. The sliding partition 23 is placed on top of the fixed frame 21 and opens and closes each other's openings 20 and 22 by sliding against the fixed frame 21.

[0027] Figure 16 shows the sequence of opening and closing the door of the desiccator according to Embodiment 3. First, the first partition 15 and the second partition 16 are opened (step S11). In this state, the gas storage bag 17 is inflated (step S12). As a result, as shown in Figures 8 and 9, the nitrogen filled in the box 1 is stored in the gas storage bag 17 through the first partition 15, and the outside atmosphere is filled into the inside of the box 1 through the second partition 16. Next, the first partition 15 and the second partition 16 are closed (step S13). The door 4 is opened and the sample 2 is put in and taken out (step S14). The door 4 is closed (step S15).

[0028] Next, the first partition 15 and the second partition 16 are opened (step S16). In this state, the gas storage bag 17 is deflated (step S17). As a result, as shown in Figures 10 to 11, the nitrogen stored in the gas storage bag 17 is filled into the box 1 through the first partition 15, and the air filled inside the box 1 is discharged to the outside through the second partition 16. Finally, the first partition 15 and the second partition 16 are closed (step S18).

[0029] As described above, in this embodiment, the gas inside the box 1 can be replaced in a short time by inflating or deflating the gas storage bag 17. Therefore, the time that the sample 2 is exposed to the atmosphere can be shortened, thus reducing the risk of oxidation and moisture absorption of the sample 2. In addition, by inserting and removing the sample 2 while nitrogen is stored in the gas storage bag 17, the decrease in nitrogen concentration and the increase in humidity can be suppressed. Furthermore, since nitrogen is not released to the outside, the amount of nitrogen supplied to the desiccator can also be reduced.

[0030] Although preferred embodiments have been described in detail above, the invention is not limited to the embodiments described above, and various modifications and substitutions can be made to the embodiments described above without departing from the scope of the claims. Various aspects of this disclosure are described below as appendices. (Note 1) A box for storing the samples, The box is provided with an opening for inserting and removing the sample, The box is provided with an air intake port that supplies nitrogen into the interior of the box, The opening is fitted with a door that can be opened and closed, The desiccator is characterized in that the aforementioned door is a sliding door that opens and closes by sliding horizontally. (Note 2) The desiccator according to Appendix 1, characterized in that the box is not provided with an exhaust port for exhausting nitrogen. (Note 3) A box for storing the samples, An opening is provided at the bottom of the box for inserting and removing the sample, An air intake port is provided at the top of the box to supply nitrogen into the inside of the box, A door is installed in the aforementioned opening so as to be openable and closable, A desiccator characterized by having a platform that is movable up and down inside the box and on which to place the sample. (Note 4) The desiccator according to Appendix 3, further comprising an exhaust port provided at the lower part of the box for discharging the nitrogen from the box. (Note 5) The desiccator according to Appendix 3 or 4, characterized in that the aforementioned door is a sliding door that opens and closes by sliding horizontally. (Note 6) A desiccator according to any one of the appendices 1 to 5, further comprising a circulator that generates an air curtain at the aforementioned opening. (Note 7) The desiccator according to Appendix 6, further comprising a display unit that indicates when the output of the circulator is stable. (Note 8) A box for storing the samples, The box is provided with an opening for inserting and removing the sample, A door is installed in the aforementioned opening so as to be openable and closable, The box includes a first partition and a second partition, both of which are openable and closable, and The box is equipped with a gas storage bag attached via the first partition, A desiccator characterized in that the second partition is exposed to the outside. (Note 9) When the gas storage bag inflates with the first and second partitions open, the nitrogen filled in the box is stored in the gas storage bag through the first partition, and the outside atmosphere is filled into the inside of the box through the second partition. The desiccator according to Appendix 8, characterized in that when the gas storage bag deflates with the first and second partitions open, the nitrogen stored in the gas storage bag fills the box through the first partition, and the air filled inside the box is discharged to the outside through the second partition. (Note 10) It also features a gear rail and a gear motor, The desiccator according to Appendix 8 or 9, characterized in that the gas storage bag is bellows-shaped and expands or contracts along the gear rail by the gear motor. (Note 11) Each of the first partition and the second partition comprises a fixed frame having a plurality of openings arranged in a grid pattern, and a sliding partition having a plurality of openings positioned complementary to the plurality of openings of the fixed frame. The desiccator according to any one of appendices 8 to 10, characterized in that the sliding partition is superimposed on the fixed frame and opens and closes each other's openings by sliding relative to the fixed frame. [Explanation of Symbols]

[0031] 1 Box, 2 Sample, 3 Opening, 4 Door, 5 Air intake, 8 Circulator, 9 Air curtain, 10 Switch (Display), 11 Exhaust, 14 Unit, 15 First partition, 16 Second partition, 17 Gas storage bag, 18 Gear motor, 19 Gear rail, 20, 22 Opening, 21 Fixing frame, 23 Sliding partition

Claims

1. A box for storing the samples, The box is provided with an opening for inserting and removing the sample, The box is provided with an air intake port that supplies nitrogen into the interior of the box, The opening is fitted with a door that can be opened and closed, The desiccator is characterized in that the aforementioned door is a sliding door that opens and closes by sliding horizontally.

2. The desiccator according to claim 1, characterized in that the box is not provided with an exhaust port for exhausting nitrogen.

3. A box for storing the samples, An opening is provided at the bottom of the box for inserting and removing the sample, An air intake port is provided at the top of the box to supply nitrogen into the inside of the box, A door is installed in the aforementioned opening so as to be openable and closable, A desiccator characterized by having a platform that is movable up and down inside the box and on which to place the sample.

4. The desiccator according to claim 3, further comprising an exhaust port provided at the lower part of the box for discharging the nitrogen from the box.

5. The desiccator according to claim 3 or 4, characterized in that the aforementioned door is a sliding door that opens and closes by sliding horizontally.

6. The desiccator according to any one of claims 1 to 4, further comprising a circulator that generates an air curtain at the opening.

7. The desiccator according to claim 6, further comprising a display unit that indicates when the output of the circulator is stable.

8. A box for storing the samples, The box is provided with an opening for inserting and removing the sample, A door is installed in the aforementioned opening so as to be openable and closable, The box includes a first partition and a second partition, both of which are openable and closable and provided separately from each other. The box is equipped with a gas storage bag attached via the first partition, A desiccator characterized in that the second partition is exposed to the outside.

9. When the gas storage bag inflates with the first and second partitions open, the nitrogen filled in the box is stored in the gas storage bag through the first partition, and the outside atmosphere is filled into the inside of the box through the second partition. The desiccator according to claim 8, characterized in that when the gas storage bag deflates with the first partition and the second partition open, the nitrogen stored in the gas storage bag fills the box through the first partition, and the air filled inside the box is discharged to the outside through the second partition.

10. It also features a gear rail and a gear motor, The desiccator according to claim 8 or 9, characterized in that the gas storage bag is bellows-shaped and expands or contracts along the gear rail by the gear motor.

11. Each of the first and second partitions comprises a fixed frame having a plurality of openings arranged in a grid pattern, and a sliding partition having a plurality of openings positioned complementary to the plurality of openings of the fixed frame. The desiccator according to claim 8 or 9, characterized in that the sliding partition is superimposed on the fixed frame and opens and closes each other's openings by sliding relative to the fixed frame.

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