Heat treatment equipment

Abstract

This technology provides a way to reduce deformation of cushioning materials. [Solution] A heat treatment apparatus according to one aspect of the present disclosure comprises a cylindrical reaction tube having an opening at its lower end, a lid that closes the opening, and an annular sealing member held by the lid between the reaction tube and the lid, wherein the lid has an annular cushioning material fixed to the lid between the reaction tube and the lid, radially outward from the sealing member, and the cushioning material includes a plurality of divided cushioning materials in the circumferential direction.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to a heat treatment apparatus.

BACKGROUND ART

[0002] Patent Document 1 discloses a configuration in which a hermetic seal and a buffer material are provided between a reaction tube and a lid that closes a furnace port of the reaction tube in a heat treatment apparatus. Patent Document 2 discloses a configuration in which an airtight member and a contact regulating member are provided between a processing container and a lid that closes a furnace port of the processing container in a heat treatment apparatus.

PRIOR ART DOCUMENTS

PATENT DOCUMENTS

[0003]

PATENT DOCUMENT 1

PATENT DOCUMENT 2

SUMMARY OF THE INVENTION

PROBLEMS TO BE SOLVED BY THE INVENTION

[0004] The present disclosure provides a technique capable of reducing deformation of a buffer material.

MEANS FOR SOLVING THE PROBLEMS

[0005] A heat treatment apparatus according to one aspect of the present disclosure includes a cylindrical reaction tube having an opening at a lower end, a lid that closes the opening, and an annular seal member held by the lid between the reaction tube and the lid, wherein the lid has an annular buffer material fixed to the lid between the reaction tube and the lid on a radially outer side than the seal member, and the buffer material includes a divided buffer material that is divided into a plurality of pieces in a circumferential direction.

EFFECTS OF THE INVENTION

[0006] According to the present disclosure, deformation of the buffer material can be reduced.

BRIEF DESCRIPTION OF THE DRAWINGS

[0007] [Figure 1] This is a cross-sectional view showing a heat treatment apparatus according to an embodiment. [Figure 2] This is a cross-sectional view (1) showing an enlarged view of region A1 in Figure 1. [Figure 3] This is a cross-sectional view (2) showing an enlarged view of region A1 in Figure 1. [Figure 4] This is a cross-sectional view (3) showing an enlarged view of region A1 in Figure 1. [Figure 5] This is a plan view showing an example of a cushioning material. [Figure 6] This is a perspective view showing an enlarged view of region A2 in Figure 5. [Figure 7] This is a plan view showing an enlarged view of region A2 in Figure 5. [Figure 8] This is a side view from the direction of arrow A3 in Figure 7. [Modes for carrying out the invention]

[0008] Hereinafter, exemplary embodiments of the present disclosure, not limited to those described herein, will be described with reference to the attached drawings. In all attached drawings, identical or corresponding members or components are denoted by the same or corresponding reference numerals, and redundant descriptions are omitted.

[0009] [Heat treatment equipment] Figure 1 is a cross-sectional view showing a heat treatment apparatus 1 according to an embodiment. As shown in Figure 1, the heat treatment apparatus 1 includes a heat treatment furnace 2. The heat treatment apparatus 1 houses a substrate W in the heat treatment furnace 2 and performs heat treatment on the substrate W. The substrate W is, for example, a semiconductor wafer. The heat treatment furnace 2 has a reaction tube 4, a lid 5, and a heater 6.

[0010] The reaction tube 4 is cylindrical. The reaction tube 4 has an opening 3 at its lower end. The opening 3 is also called the furnace mouth. The reaction tube 4 is made of, for example, quartz. A bottom flange 4a is provided at the lower end of the reaction tube 4. The bottom flange 4a is an outward-facing flange. The bottom flange 4a is held to the lower part of the base plate 8 via a flange retaining member 7. The flange retaining member 7 and the base plate 8 are made of metal such as SUS.

[0011] A gas supply pipe 9 is attached to the bottom flange 4a. A gas supply unit 9a is connected to the gas supply pipe 9. The gas supply pipe 9 supplies the process gas introduced from the gas supply unit 9a into the reaction tube 4. The gas supply unit 9a may include a gas source, a valve, and a mass flow controller. There may be one gas supply pipe 9 or two or more.

[0012] The top of the reaction tube 4 is gradually reduced in diameter, and an exhaust port 10 is provided at the top. An exhaust section 10a is connected to the exhaust port 10. The exhaust section 10a reduces the pressure inside the reaction tube 4. The exhaust section 10a may include a vacuum pump and a pressure controller.

[0013] The lid 5 is configured to be able to move up and down by a lifting mechanism 13. The lid 5 opens and closes the opening 3 of the reaction tube 4. When the lid 5 rises, it closes the opening 3 of the reaction tube 4. When the lid 5 lowers, it opens the opening 3 of the reaction tube 4. The lid 5 has, for example, a roughly disc shape. Details of the lid 5 will be described later. The lid 5 is held on a holding plate 15 via a plurality of buffer mechanisms 14. The holding plate 15 is connected to the lifting mechanism 13. A rotation introduction mechanism 26 is provided in the lower central part of the lid 5. The rotation introduction mechanism 26 has a rotating shaft portion 27 for rotating the boat 16.

[0014] The boat 16 is made of, for example, quartz. The boat 16 has a boat body 17 and legs 18. The boat body 17 supports multiple substrates W, for example 25 to 200, in a horizontal position with vertical spacing between them in multiple stages. The legs 18 support the boat body 17. The boat body 17 and the legs 18 are formed integrally, for example. The legs 18 are connected to a rotating shaft 27.

[0015] The boat main body 17 has a bottom plate 22, a top plate 23, and a plurality of support posts 24. The plurality of support posts 24 are provided between the bottom plate 22 and the top plate 23, and connect the bottom plate 22 and the top plate 23. The bottom plate 22, the top plate 23, and the plurality of support posts 24 may be integrally formed. The plurality of support posts 24 are arranged at predetermined intervals in the circumferential direction so as to surround the substrate W. The plurality of support posts 24 are not arranged on the front side (the left side in FIG. 1). This is because the substrate W is loaded and unloaded by a transfer mechanism (not shown) on the front side. Each support post 24 is provided with a groove portion 25 for holding a plurality of substrates W in multiple stages.

[0016] The rotation introduction mechanism 26 has a rotation shaft portion 27 and a housing 28. The rotation shaft portion 27 is provided integrally with the lid 5 at the lower central portion of the lid 5. The housing 28 has a cylindrical shape. The housing 28 rotatably supports the rotation shaft portion 27. On the lower outer periphery of the housing 28, a bottomed cylindrical rotary cylinder (not shown) having a rotary shaft integrally at the axial center portion is rotatably provided, and the rotary shaft erected from the center of the bottom of the rotary cylinder penetrates the inside of the housing 28 in an airtight manner via a sealing means such as an O-ring or a magnetic fluid seal. A motor is connected to the rotary cylinder via a belt (not shown). Thereby, the rotary shaft is rotationally driven. A shaft hole portion 34 through which the rotation shaft portion 27 penetrates is provided at the central portion of the lid 5.

[0017] A furnace opening heating mechanism 62 is provided on the lid 5. The furnace opening heating mechanism 62 has a plurality of support posts 64, a heating resistor 65, and a heat shielding plate 66. The plurality of support posts 64 are erected on the upper surface of the lid 5 at appropriate intervals in the circumferential direction. The heating resistor 65 is provided at the upper end portion of the support post 64. The heat shielding plate 66 is provided below the heating resistor 65. A plurality of heat shielding plates 66 may be provided. In FIG. 1, two heat shielding plates 66 are provided.

[0018] The support pillars 64 and the heat shielding plate 66 are made of quartz, for example. The heating resistor 65 and the heat shielding plate 66 are provided with through holes 67 through which the leg portions 18 including the flange portions 19 of the boat 16 pass. A conduction tube 68 for conducting a cable that supplies power to the heating resistor 65 is provided in a state of airtightly penetrating from the holding plate 15 through the lid 5.

[0019] The heater 6 is installed on the base plate 8. The heater 6 is provided around the reaction tube 4. The heater 6 heats the inside of the reaction tube 4 to a predetermined temperature. The predetermined temperature is, for example, 300°C or higher and 1200°C or lower.

[0020] [Lid Body] FIG. 2 to FIG. 4 are cross-sectional views showing an enlarged view of region A1 in FIG. 1. As shown in FIG. 2 to FIG. 4, the lid 5 has a first lid 51, a second lid 52, a first ring 53, a second ring 54, and a buffer material 100.

[0021] The first lid 51 has a substantially disc shape. The first lid 51 is made of a metal such as SUS, for example.

[0022] The second lid 52 has a substantially disc shape. The second lid 52 is made of quartz. The second lid 52 is supported by the first lid 51. The second lid 52 closes the opening 3 of the reaction tube 4. An annular recessed portion 52a recessed downward is provided in the upper part of the outer periphery of the second lid 52. A flange portion 52b is provided on the lower side portion of the outer periphery of the second lid 52.

[0023] The first ring 53 is located in the annular recess 52a and holds the flange portion 52b of the second lid 52. A sealing member 55 is provided on the upper part of the first ring 53, which contacts the lower surface of the open end of the reaction tube 4. The sealing member 55 has a Q-shaped cross-section. A refrigerant flow path 53a is provided inside the first ring 53. By passing a refrigerant such as cooling water through the refrigerant flow path 53a, the sealing member 55 can be cooled. The first ring 53 has a roughly inverted L-shaped cross-section. The first ring 53 has an annular shape that covers the flange portion 52b, which is the periphery of the second lid 52. The first ring 53 is detachably fixed to the first lid 51 by mounting screws 56 while holding the flange portion 52b (Figure 2). Multiple mounting screws 56 may be provided along the circumferential direction.

[0024] The second ring 54 is fixed on the first ring 53. The second ring 54, together with the second cover 52 and the first ring 53, holds the sealing member 55. The second ring 54 is detachably fixed to the first ring 53 by mounting screws 57 (Figure 3). Multiple mounting screws 57 may be provided along the circumferential direction.

[0025] The cushioning material 100 is detachably fixed onto the second ring 54 by mounting screws 58 (Figure 4). When the opening 3 of the reaction tube 4 is sealed with the lid 5, the second ring 54 contacts the lower surface of the flange retaining member 7 via the cushioning material 100, and a gap G is formed between the second lid 52 and the bottom flange 4a of the reaction tube 4. This suppresses damage to the second lid 52 and the reaction tube 4, as well as the generation of particles, caused by contact between the second lid 52 and the reaction tube 4. Details of the cushioning material 100 will be described later.

[0026] A circumferential groove 52c is provided on the upper surface of the second cover 52, radially inward of the sealing member 55. The circumferential groove 52c blocks heat from being transmitted radially outward from the center of the second cover 52 along the upper surface of the second cover 52. This prevents heat from being transmitted from the center of the second cover 52 to the sealing member 55. A circumferential projection 52d is provided on the upper surface of the second cover 52, radially outward of the circumferential groove 52c. The gap G between the second cover 52 and the bottom flange 4a is located on the circumferential projection 52d.

[0027] [Buffer material] Figure 5 is a plan view showing an example of the cushioning material 100. Figure 6 is a perspective view showing an enlarged view of area A2 in Figure 5. Figure 7 is a plan view showing an enlarged view of area A2 in Figure 5. Figure 8 is a side view seen from the direction of arrow A3 in Figure 7.

[0028] The cushioning material 100 is provided between the flange retaining member 7 and the second ring 54, radially outward from the sealing member 55. The cushioning material 100 is fixed to the second ring 54. The cushioning material 100 has an annular shape. The cushioning material 100 is made of resin. The resin is, for example, polyimide. The cushioning material 100 includes divided cushioning materials 111 to 116 which are divided into a plurality (for example, 6) in the circumferential direction. In this case, deformation of the cushioning material 100 due to thermal expansion can be relieved.

[0029] The segmented cushioning material 111, segmented cushioning material 112, segmented cushioning material 113, segmented cushioning material 114, segmented cushioning material 115, and segmented cushioning material 116 are provided in this order along the circumferential direction.

[0030] The following will explain the configuration of the divided cushioning material 111, the configuration of the divided cushioning material 112, and the positional relationship between the divided cushioning material 111 and the divided cushioning material 112, using these as examples.

[0031] The divided cushioning material 111 has a main body portion 111a, a first flat plate portion 111b, a second flat plate portion 111c, and a projection portion 111d.

[0032] The main body portion 111a has a flat plate shape. The main body portion 111a has an arc shape in plan view. The main body portion 111a has a first end and a second end opposite to the first end. The first end is adjacent to the divided cushioning material 112. The second end is adjacent to the divided cushioning material 116. The first end of the main body portion 111a is fixed to the second ring 54 by a mounting screw 58, and the second end is a free end. In this case, deformation due to thermal expansion of the divided cushioning material 111 can be absorbed.

[0033] The first flat plate portion 111b has a flat shape. The first flat plate portion 111b extends circumferentially from the first end of the main body portion 111a. The upper surface of the first flat plate portion 111b is lower than the upper surface of the main body portion 111a. In other words, there is a step between the upper surface of the first flat plate portion 111b and the upper surface of the main body portion 111a, where the upper surface of the first flat plate portion 111b is lower than the upper surface of the main body portion 111a. In this case, pressure is less likely to be applied to the upper surface of the first flat plate portion 111b, thus suppressing deformation of the first flat plate portion 111b. The corner at the tip of the first flat plate portion 111b has a chamfered shape. In this case, if the divided cushioning material 111 deforms due to thermal expansion or the like, it is possible to suppress the first flat plate portion 111b from catching on other members. The chamfered shape is, for example, a C-chamfered shape. The chamfered shape may also be an R-chamfered shape. The base end of the first flat plate portion 111b may have a curved shape.

[0034] The second flat plate portion 111c has a flat shape. The second flat plate portion 111c extends circumferentially from the second end of the main body portion 111a. The upper surface of the second flat plate portion 111c is lower than the upper surface of the main body portion 111a. In other words, there is a step between the upper surface of the second flat plate portion 111c and the upper surface of the main body portion 111a, where the upper surface of the second flat plate portion 111c is lower than the upper surface of the main body portion 111a. In this case, pressure is less likely to be applied to the upper surface of the second flat plate portion 111c, thus suppressing deformation of the second flat plate portion 111c.

[0035] The projection 111d protrudes upward from the radially inward upper surface of the second flat plate portion 111c. The projection 111d extends circumferentially from the second end of the main body portion 111a. The upper surface of the projection 111d is lower than the upper surface of the main body portion 111a. In other words, there is a step between the upper surface of the projection 111d and the upper surface of the main body portion 111a, where the upper surface of the projection 111d is lower than the upper surface of the main body portion 111a. In this case, pressure is less likely to be applied to the upper surface of the projection 111d, thus suppressing deformation of the projection 111d.

[0036] The divided cushioning material 112 has a main body portion 112a, a first flat plate portion 112b, a second flat plate portion 112c, and a projection portion 112d.

[0037] The main body portion 112a has a flat plate shape. The main body portion 112a has an arc shape in plan view. The main body portion 112a has a first end and a second end opposite to the first end. The first end is adjacent to the divided cushioning material 113. The second end is adjacent to the divided cushioning material 111. The first end of the main body portion 112a is fixed to the second ring 54 by a mounting screw 58, and the second end is a free end. In this case, deformation due to thermal expansion of the divided cushioning material 112 can be absorbed.

[0038] The first flat plate portion 112b has a flat plate shape. The first flat plate portion 112b extends circumferentially from the first end of the main body portion 112a. The upper surface of the first flat plate portion 112b is lower than the upper surface of the main body portion 112a. In other words, there is a step between the upper surface of the first flat plate portion 112b and the upper surface of the main body portion 112a, where the upper surface of the first flat plate portion 112b is lower than the upper surface of the main body portion 112a. In this case, pressure is less likely to be applied to the upper surface of the first flat plate portion 112b, thus suppressing deformation of the first flat plate portion 112b. The corner at the tip of the first flat plate portion 112b has a chamfered shape. In this case, if the divided cushioning material 112 deforms due to thermal expansion or the like, the first flat plate portion 112b can be prevented from catching on other members. The chamfered shape is, for example, a C-chamfered shape. The chamfered shape may also be an R-chamfered shape.

[0039] The second flat plate portion 112c has a flat shape. The second flat plate portion 112c extends circumferentially from the second end of the main body portion 112a. The upper surface of the second flat plate portion 112c is lower than the upper surface of the main body portion 112a. In other words, there is a step between the upper surface of the second flat plate portion 112c and the upper surface of the main body portion 112a, where the upper surface of the second flat plate portion 112c is lower than the upper surface of the main body portion 112a. In this case, pressure is less likely to be applied to the upper surface of the second flat plate portion 112c, thus suppressing deformation of the second flat plate portion 112c.

[0040] The projection 112d protrudes upward from the radially inner upper surface of the second flat plate portion 112c. The projection 112d extends circumferentially from the second end of the main body portion 112a. The upper surface of the projection 112d is lower than the upper surface of the main body portion 112a. In other words, there is a step between the upper surface of the projection 112d and the upper surface of the main body portion 112a, where the upper surface of the projection 112d is lower than the upper surface of the main body portion 112a. In this case, pressure is less likely to be applied to the upper surface of the projection 112d, thus suppressing deformation of the projection 112d.

[0041] The first flat plate portion 111b of the divided cushioning material 111 extends from the first end of the main body portion 111a toward the second end of the main body portion 112a of the divided cushioning material 112. The circumferential end face of the first flat plate portion 111b of the divided cushioning material 111 faces the circumferential end face on the second end side of the main body portion 112a of the divided cushioning material 112. There is a first gap G1 between the circumferential end face of the first flat plate portion 111b of the divided cushioning material 111 and the circumferential end face on the second end side of the main body portion 112a of the divided cushioning material 112. In this case, deformation in the circumferential direction of the divided cushioning material 111 and the divided cushioning material 112 due to thermal expansion or the like can be absorbed.

[0042] The second flat plate portion 112c of the divided cushioning material 112 extends from the second end of the main body portion 112a toward the first end of the main body portion 111a of the divided cushioning material 111. The circumferential end face of the second flat plate portion 112c of the divided cushioning material 112 faces the circumferential end face on the first end side of the main body portion 111a of the divided cushioning material 111. There is a second gap G2 between the circumferential end face of the second flat plate portion 112c of the divided cushioning material 112 and the circumferential end face on the first end side of the main body portion 111a of the divided cushioning material 111. In this case, deformation in the circumferential direction of the divided cushioning material 111 and the divided cushioning material 112 due to thermal expansion or the like can be absorbed.

[0043] At least a portion of the lower surface of the first flat plate portion 111b of the divided cushioning material 111 faces the upper surface of the second flat plate portion 112c of the divided cushioning material 112. In this case, if an upward bending force is applied to the second flat plate portion 112c, the first flat plate portion 111b can press down on the upper surface of the second flat plate portion 112c, thereby suppressing the upward bending of the second flat plate portion 112c.

[0044] A third gap G3 exists between the lower surface of the first flat plate portion 111b of the divided cushioning material 111 and the upper surface of the second flat plate portion 112c of the divided cushioning material 112. In this case, if the horizontal position of the first flat plate portion 111b and the horizontal position of the second flat plate portion 112c change relatively due to thermal expansion or the like, friction between the lower surface of the first flat plate portion 111b and the upper surface of the second flat plate portion 112c can be suppressed.

[0045] At least a portion of the inner circumferential surface of the first flat plate portion 111b of the divided cushioning material 111 faces the outer circumferential surface of the projection 112d of the divided cushioning material 112. The second end of the divided cushioning material 112 is a free end. Therefore, if the divided cushioning material 112 deforms due to thermal expansion or the like, the other end of the divided cushioning material 112 may protrude radially outward. However, if the outer circumferential surface of the projection 112d of the divided cushioning material 112 faces at least a portion of the inner circumferential surface of the first flat plate portion 111b of the divided cushioning material 111, the outer circumferential surface of the projection 112d will come into contact with the inner circumferential surface of the first flat plate portion 111b. This prevents the divided cushioning material 112 from protruding radially outward.

[0046] The configuration of the divided cushioning materials 113 to 116 may be the same as that of the divided cushioning materials 111 and 112. That is, the divided cushioning material 113 has a main body portion 113a, a first flat plate portion 113b, a second flat plate portion 113c, and a projection portion 113d. The divided cushioning material 114 has a main body portion 114a, a first flat plate portion 114b, a second flat plate portion 114c, and a projection portion 114d. The divided cushioning material 115 has a main body portion 115a, a first flat plate portion 115b, a second flat plate portion 115c, and a projection portion 115d. The divided cushioning material 116 has a main body portion 116a, a first flat plate portion 116b, a second flat plate portion 116c, and a projection portion 116d.

[0047] The positional relationship between the divided cushioning material 112 and the divided cushioning material 113, the positional relationship between the divided cushioning material 113 and the divided cushioning material 114, the positional relationship between the divided cushioning material 114 and the divided cushioning material 115, the positional relationship between the divided cushioning material 115 and the divided cushioning material 116, and the positional relationship between the divided cushioning material 116 and the divided cushioning material 111 may be the same as the positional relationship between the divided cushioning material 111 and the divided cushioning material 112.

[0048] The embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. The above embodiments may be omitted, replaced, or modified in various ways without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0049] 3 aperture 4 reaction tubes 5. Lid 55 sealing member 100 Cushioning material 111, 112, 113, 114, 115, 116 split buffer material

Claims

1. A cylindrical reaction tube having an opening at its lower end, A cover that closes the aforementioned opening, Between the reaction tube and the lid, an annular sealing member held by the lid, Equipped with, The lid has an annular cushioning material fixed to the lid between the reaction tube and the lid, radially outward from the sealing member. The cushioning material includes a divided cushioning material that is divided into multiple parts in the circumferential direction. Heat treatment equipment.

2. The divided cushioning material has a main body having a first end and a second end opposite to the first end, The main body portion has its first end fixed to the lid and its second end being a free end. The heat treatment apparatus according to claim 1.

3. The aforementioned divided cushioning material is A first flat plate portion extending from the first end of the main body portion along the circumferential direction, A second flat plate portion extending from the second end of the main body portion along the circumferential direction, It has, Of the two adjacent divided cushioning materials in the circumferential direction, at least a portion of the lower surface of the first flat plate portion of one of the divided cushioning materials faces the upper surface of the second flat plate portion of the other divided cushioning material. The heat treatment apparatus according to claim 2.

4. Of the two adjacent divided cushioning materials in the circumferential direction, the circumferential end face of the first flat plate portion of one of the divided cushioning materials faces the circumferential end face of the main body portion of the other divided cushioning material. There is a first gap between the circumferential end face of the first flat plate portion of one of the divided cushioning materials and the circumferential end face of the main body portion of the other divided cushioning material. The heat treatment apparatus according to claim 3.

5. Of the two adjacent divided cushioning materials in the circumferential direction, the circumferential end face of the main body portion of one of the divided cushioning materials faces the circumferential end face of the second flat plate portion of the other divided cushioning material. There is a second gap between the circumferential end face of the main body portion of one of the divided cushioning materials and the circumferential end face of the second flat plate portion of the other divided cushioning material. The heat treatment apparatus according to claim 3.

6. There is a third gap between the lower surface of the opposing first flat plate portion and the upper surface of the second flat plate portion. The heat treatment apparatus according to claim 3.

7. The upper surface of the first flat plate portion is located below the upper surface of the main body portion. The heat treatment apparatus according to claim 3.

8. The divided cushioning material has a projection that protrudes upward from the upper surface on the radially inward side of the second flat plate portion. The outer circumferential surface of the projection of the other divided cushioning material faces at least a portion of the inner circumferential surface of the first flat plate portion of one of the divided cushioning materials. The heat treatment apparatus according to claim 3.

9. The upper surface of the projection is located below the upper surface of the main body. The heat treatment apparatus according to claim 8.

10. The aforementioned cushioning material is made of resin. The heat treatment apparatus according to any one of claims 1 to 9.

11. The aforementioned cover is The first lid is made of metal, A second cover is supported by the first cover and closes the opening, The annular first ring covers the periphery of the second lid, A second ring fixed to the first ring, which together with the second lid and the first ring holds the sealing member, It has, The cushioning material is fixed to the second ring. The heat treatment apparatus according to any one of claims 1 to 9.

12. The reaction tube has a bottom flange made of quartz, At least a portion of the lower surface of the bottom flange contacts the sealing member. The heat treatment apparatus according to any one of claims 1 to 9.

13. The reaction tube has a metal flange retaining portion that holds the bottom flange, At least a portion of the lower surface of the flange retaining portion faces the upper surface of the cushioning material, The heat treatment apparatus according to claim 12.

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