pump

Abstract

We provide highly convenient pumps. [Solution] The pump 1 has a housing 5, a movable part 7 having elastic support members 72 and 73 extending in the X-axis direction with one end supported by the housing 5, a movable body 71 connected to the other end of the elastic support members 72 and 73 and a magnet 77 provided on the movable body 71, a coil core part 8 provided on the housing 5 and arranged opposite to the magnet 77 in the X-axis direction, a vibration actuator 3 in which the movable body 71 vibrates in the Y-axis direction while elastically deforming the elastic support members 72 and 73 due to the electromagnetic action between the magnet 77 and the coil core part 8, a pump part 4 having an airtight chamber 42 and a diaphragm 416 as a movable wall that changes the volume of the airtight chamber 42 when driven by the vibration actuator 3, and a contact part 11 that comes into contact with the movable part 7 when driven by the vibration actuator 3, and vibration is generated when the contact part 11 comes into contact with the movable part 7.

Description

Technical Field

[0001] The present invention relates to a pump.

Background Art

[0002] For example, as shown in FIG. 1, a pump 9 described in Patent Document 1 includes a movable body 92 that reciprocatingly rotates around a shaft portion 91, magnets 93a and 93b disposed at both end portions of the movable body 92, a pair of coil core portions 94a and 94b disposed to face each other in the longitudinal direction of the pump 9 with the movable body 92 interposed therebetween, and a pair of pump portions 95a and 95b disposed to face each other in the lateral direction of the pump 9 with the movable body 92 interposed therebetween.

[0003] Further, the coil core portion 94a includes a core portion 941a and a coil 942a wound around the core portion 941a. The core portion 941a has an inverted C shape, and the coil 942a is wound around the central portion thereof. Both end portions of the core portion 941a are magnetic poles facing the magnet 93a. Similarly, the coil core portion 94b includes a core portion 941b and a coil 942b wound around the core portion 941b. The core portion 941b has a C shape, and the coil 942b is wound around the central portion thereof. Both end portions of the core portion 941b are magnetic poles facing the magnet 93b.

[0004] In such a pump 9, by alternately switching between a state where an alternating current is applied to the coils 942a and 942b to generate a thrust that rotates the movable body 92 clockwise around the shaft portion 91, and a state where a thrust that rotates the movable body 92 counterclockwise around the shaft portion 91 is generated, the movable body 92 reciprocatingly rotates. The reciprocating rotation of the movable body 92 drives the pump portions 95a and 95b.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of Invention

[0006] However, such a pump 9 can only perform the function of a pump. Therefore, it has the problem of being inconvenient to use.

[0007] This invention has been made in view of the above, and aims to provide a highly convenient pump that, in addition to its function as a pump, also has the function of generating vibration. [Means for solving the problem]

[0008] These objectives are achieved by the present invention described in (1) below.

[0009] (1) The three mutually orthogonal axes are defined as the X-axis, Y-axis, and Z-axis, When the direction along the X-axis is defined as the X-axis direction, the direction along the Y-axis is defined as the Y-axis direction, and the direction along the Z-axis is defined as the Z-axis direction, The casing and A vibration actuator comprising: an elastic support member extending in the X-axis direction and one end supported by the housing; a movable part having a movable body connected to the other end of the elastic support member and a magnet provided on the movable body; and a coil core part arranged opposite the magnet in the X-axis direction, wherein the movable body vibrates in the Y-axis direction while elastically deforming the elastic support member due to the electromagnetic action between the magnet and the coil core part, A pump unit having an airtight chamber and a movable wall that changes the volume of the airtight chamber by driving the vibration actuator, It has a contact portion that comes into contact with an object when the vibration actuator is driven, A pump characterized in that vibration is generated when the contact portion comes into contact with the object it contacts. [Effects of the Invention]

[0010] In the pump of the present invention, the pump section is driven by a vibration actuator, thereby enabling it to function as a pump. Furthermore, by driving the vibration actuator to bring the contact part into contact with a mating surface and generate vibration, it can also function as a vibration generator. Thus, the pump of the present invention can not only function as a pump but also generate vibrations. Therefore, it is a highly convenient pump.

[0011] Specifically, for example, if a device requires both a pumping function and a vibration generating function, conventional pumps require the installation of a separate vibration generating device such as a vibrator, which can lead to a larger and more expensive device. In contrast, with the pump of the present invention, since the pump also functions as a vibration generating device, it is not necessary to install a separate vibration generating device, thus enabling a smaller and less expensive device. [Brief explanation of the drawing]

[0012] [Figure 1] This is a top view illustrating the conventional technology. [Figure 2] This is a top view showing the internal structure of the pump according to the first embodiment. [Figure 3] Figure 2 is an exploded perspective view of the pump. [Figure 4] Figure 2 is an exploded top view of the pump. [Figure 5] This is a cross-sectional view along line AA in Figure 4. [Figure 6] Figure 2 is an exploded perspective view of the vibration actuator of the pump shown. [Figure 7] Figure 6 is a top view of the vibration actuator. [Figure 8] This is an enlarged top view of the connection point between the movable part and the housing. [Figure 9] This is a cross-sectional view of line BB in Figure 8, showing how the elastic support member fixing part is inserted. [Figure 10] Figure 2 is a bottom view of the pump. [Figure 11] This is a top view of the pump section included in the pump shown in Figure 2. [Figure 12] This is a cross-sectional view showing the internal structure of the pump section. [Figure 13] This is a diagram showing the drive modes of the pump. [Figure 14] This is a circuit diagram showing the circuit configuration of the control board included in the pump shown in Figure 2. [Figure 15] This is a top view for explaining the first resonance mode. [Figure 16] This is a top view for explaining the first resonance mode. [Figure 17] This is a cross-sectional view showing the state inside the pump section during pump operation. [Figure 18] This is a cross-sectional view showing the state inside the pump section during pump operation. [Figure 19] This is a top view showing the behavior of the movable body in the second drive mode. [Figure 20] This is a top view showing the behavior of the movable body in the first drive mode. [Figure 21] This is a diagram showing an example of the drive voltage. [Figure 22] This is a diagram showing an example of the drive voltage. [Figure 23] This is a diagram showing an example of the drive voltage. [Figure 24] This is a cross-sectional view for explaining the second resonance mode. [Figure 25] This is a perspective view showing a modified example of the movable section. [Figure 26] This is a cross-sectional view showing the state inside the pump section during rapid exhaust. [Figure 27] This is a top view showing the internal structure of the pump according to the second embodiment. [Figure 28] This is a top view showing the behavior of the movable body in the second drive mode. [Figure 29] This is a top view showing the internal structure of the pump according to the third embodiment. [Figure 30] This is a top view showing the internal structure of a modified example of the pump shown in Figure 29. [Mode for Carrying Out the Invention]

[0013] The pump of the present invention will be described in detail below based on preferred embodiments shown in the accompanying drawings.

[0014] <First Embodiment> Figure 2 is a top view showing the internal structure of the pump according to the first embodiment. Figure 3 is an exploded perspective view of the pump shown in Figure 2. Figure 4 is an exploded top view of the pump shown in Figure 2. Figure 5 is a cross-sectional view taken along line AA in Figure 4. Figure 6 is an exploded perspective view of the vibration actuator of the pump shown in Figure 2. Figure 7 is a top view of the vibration actuator shown in Figure 6. Figure 8 is an enlarged top view of the connection point between the movable part and the housing. Figure 9 is a cross-sectional view taken along line BB in Figure 8, showing how the elastic support member fixing part is inserted. Figure 10 is a bottom view of the pump shown in Figure 2. Figure 11 is a top view of the pump section of the pump shown in Figure 2. Figure 12 is a cross-sectional view showing the internal structure of the pump section. Figure 13 is a diagram showing the pump's drive modes. Figure 14 is a circuit diagram showing the circuit configuration of the control board of the pump shown in Figure 2. Figure 15 is a top view for explaining the first resonance mode. Figure 16 is a top view for explaining the first resonance mode. Figure 17 is a cross-sectional view showing the inside of the pump section during pump operation. Figure 18 is a cross-sectional view showing the inside of the pump section during pump operation. Figure 19 is a top view showing the behavior of the movable body in the second drive mode. Figure 20 is a top view showing the behavior of the movable body in the first drive mode. Figures 21 to 23 are diagrams showing examples of drive voltages, respectively. Figure 24 is a cross-sectional view for explaining the second resonance mode. Figure 25 is a perspective view showing a modified example of the movable body. Figure 26 is a cross-sectional view showing the inside of the pump section during rapid exhaust.

[0015] For the sake of clarity, each diagram shows the three mutually orthogonal axes: the X-axis, Y-axis, and Z-axis. In the following, the direction along the X-axis will also be referred to as the "X-axis direction," the direction along the Y-axis as the "Y-axis direction," and the direction along the Z-axis as the "Z-axis direction." The side with the arrow on each axis will also be referred to as the "positive side," and the opposite side as the "negative side." Furthermore, the positive side of the Z-axis direction will be referred to as "up," and the negative side as "down."

[0016] As shown in Figures 2 and 3, the pump 1 comprises a case 2, a vibration actuator 3 housed in the case 2, a pump section 4, and a contact section 11. The case 2 also comprises a housing 5 on which the vibration actuator 3, pump section 4, and contact section 11 are arranged, and a cover 6 that fits over the housing 5 and covers the vibration actuator 3, pump section 4, and contact section 11. The vibration actuator 3 comprises a movable section 7 that is pivotably supported relative to the housing 5, a coil core section 8 fixed to the housing 5, and a control board 10 that controls the supply of power to the coil core section 8. Each of these parts will be described in order below.

[0017] Case 2 As shown in Figures 2 and 3, Case 2 is a roughly rectangular parallelepiped with its longitudinal direction in the X-axis direction and flattened in the Z-axis direction. Such Case 2 has a housing 5 in which the vibration actuator 3 and pump unit 4 are arranged, and a lid 6 that covers the housing 5. The side walls of the lid 6 are formed only on both sides in the Y-axis direction, and not on both sides in the X-axis direction.

[0018] The constituent materials of the housing 5 and the lid 6 are not particularly limited. In this embodiment, the housing 5 is made of PBT (polybutylene terephthalate), a resin material, and the lid 6 is made of stainless steel, particularly SUS304, a metal material. By making the lid 6 out of a metal material in this way, the lid 6 functions as a shield. Therefore, electromagnetic noise radiated from inside the case 2 to the outside of the case 2 can be suppressed, and the impact on electronic equipment placed around the pump 1 can be reduced. It can also block electromagnetic noise received from outside the case 2, and the operation of the pump 1 can be stabilized. In particular, by making the lid 6 out of a non-magnetic material such as stainless steel, as in this embodiment, in addition to the above effects, magnetic coupling between the lid 6 and the vibration actuator 3 is prevented, and the operation of the vibration actuator 3 can be stabilized.

[0019] As shown in Figure 4, the housing 5 has a notch 50 formed at one corner on the positive side in the X-axis direction. The pump unit 4 is positioned in the notch 50. The notch 50 and the pump unit 4 are almost identical in shape, and the plan view shape when the pump unit 4 is fixed to the housing 5 is a roughly rectangular shape with the X-axis direction as the longitudinal direction.

[0020] Such a housing 5 has a plate-shaped base 51 that extends in the XY plane, and side wall portions 52 that are erected above the outer edge of the base 51. The side wall portions 52 are not formed at the end on the negative side in the X-axis direction, but are arranged in a U-shape to surround the remaining three sides, namely the positive side in the X-axis direction and both sides in the Y-axis direction.

[0021] Furthermore, a through-hole 511 is formed in the base 51 at a position offset from the center of the base 51 towards the negative side in the X-axis direction, penetrating the base 51 in the thickness direction (Z-axis direction). The coil core portion 8 is positioned in the region Q1 that overlaps with the through-hole 511, and the movable portion 7, pump portion 4, and contact portion 11 are positioned in the region Q2 that is on the positive side in the X-axis direction from the through-hole 511.

[0022] Furthermore, the housing 5 is positioned in region Q3 located on the negative side of the X-axis direction from the through hole 511, and has a coil core positioning section 53 for positioning the coil core section 8 relative to the housing 5. As a result, deviation of the coil core section 8 from the design position is suppressed, and the drive of the pump 1 is stabilized. This coil core positioning section 53 has a pair of protrusions 531 and 532 arranged side by side in the Y-axis direction.

[0023] Furthermore, the housing 5 is positioned at the positive end in the X-axis direction and has a fixing portion 54 for fixing the elastic support members 72 and 73 (described later) to support the movable part 7. The fixing portion 54 is configured as part of the side wall portion 52 and has a first side wall portion 541 and a second side wall portion 542 that are arranged opposite each other in the Y-axis direction. The movable part 7 is supported by the housing 5 so as to be displaceable by sandwiching and fixing the elastic support members 72 and 73 between the first and second side wall portions 541 and 542 using the elastic support member fixing portion 74 (described later). As shown in Figure 5, the bottom surface of the portion located between the first and second side wall portions 541 and 542, that is, the portion that overlaps with the elastic support member fixing portion 74, is located above the upper surface of region Q2. This effectively suppresses contact between the portions of the elastic support members 72 and 73 other than their base ends and the base 51, thereby stabilizing the drive of the movable part 7.

[0024] Furthermore, as shown in Figure 4, the housing 5 has a movable part positioning part 55 for positioning the movable part 7 relative to the housing 5. As a result, deviation of the movable part 7 from the design position is suppressed, and the drive of the pump 1 is stabilized. This movable part positioning part 55 has a concave portion 551 formed on the inner surface of the first side wall portion 541 (the surface facing the second side wall portion 542) and extending in the Z-axis direction, and a concave portion 552 formed on the inner surface of the second side wall portion 542 (the surface facing the first side wall portion 541) and extending in the Z-axis direction.

[0025] Furthermore, as shown in Figure 4, the housing 5 has a pump section positioning section 56 for positioning the pump section 4 relative to the housing 5. Therefore, deviation from the design position of the pump section 4 is suppressed, and the drive of the pump 1 is stabilized. This pump section positioning section 56 has a pair of protrusions 563 and 564 that project from the side wall section 52 into the notch section 50. The pair of protrusions 563 and 564 are spaced apart in the X-axis direction. The pump section 4 is inserted into the protrusions 563 and 564 and is positioned in contact with the outer surface of the side wall section 52.

[0026] By positioning the pump unit 4 on the outside of the housing 5 in this way, the housing 5 can be made smaller and its rigidity can be increased. Furthermore, by making the wall thickness of the part of the side wall 52 that is in contact with the pump unit 4 sufficiently large, the rigidity of that part can be increased and unwanted vibrations of the pump unit 4 can be effectively suppressed. As a result, the operation of the pump 1 becomes stable.

[0027] The above describes Case 2. As mentioned above, the housing 5 has a coil core positioning section 53 for positioning the coil core section 8, a movable section positioning section 55 for positioning the movable section 7, and a pump section positioning section 56 for positioning the pump section 4. Therefore, all of the main parts of the pump 1, namely the coil core section 8, the movable section 7, and the pump section 4, are assembled with the housing 5 as the reference. Consequently, by simply assembling the coil core section 8, the movable section 7, and the pump section 4 to the housing 5 individually, their arrangement and relative positional relationships can be easily and accurately controlled. As a result, the manufacturing of the pump 1 becomes easier.

[0028] However, the configuration of Case 2 is not particularly limited. For example, at least one of the coil core positioning unit 53, the movable part positioning unit 55, and the pump part positioning unit 56 may be omitted.

[0029] ≪Vibration Actuator 3≫ As shown in Figures 2 and 3, the vibration actuator 3 has a movable part 7 that is displaceably supported by the housing 5 and a coil core part 8 that is fixed to the housing 5. The movable part 7 is located in region Q2 and the coil core part 8 is located in region Q1.

[0030] As shown in Figures 6 and 7, the movable part 7 has an elongated shape extending in the X-axis direction. The movable part 7 also includes a movable body 71, a pair of elastic support members 72 and 73 that support the movable body 71 so as to be displaceable in the Y-axis direction relative to the housing 5, an elastic support member fixing part 74 that fixes the pair of elastic support members 72 and 73 to the housing 5, a pair of fixing plates 791 and 792 that fix the pair of elastic support members 72 and 73 to the movable body 71, a yoke 76 fixed to the movable body 71, and a magnet 77 fixed to the yoke 76.

[0031] The movable body 71 is located in the center of the housing 5. The movable body 71 also has a base portion 711, a pump section connecting portion 712 located on the positive side of the base portion 711 in the X-axis direction, and a pair of pressers 713 and 714 protruding from the pump section connecting portion 712 in both directions in the Y-axis direction.

[0032] The base portion 711 is plate-shaped, extending in the Y-axis direction and having thickness in the X-axis direction. The pump section connecting portion 712 is rod-shaped, with a shorter Y-axis length than the base portion 711 and extending in the X-axis direction. Furthermore, the length of the pump section connecting portion 712 decreases in stages toward the base end (positive X-axis direction). This prevents contact between the pump section connecting portion 712 and the elastic support members 72 and 73 during operation. As a result, the operation of the pump 1 is stable. The presser 713 protrudes from the pump section connecting portion 712 toward the positive Y-axis direction, and the presser 714 protrudes from the pump section connecting portion 712 toward the negative Y-axis direction.

[0033] Furthermore, as shown in Figure 7, the pump section connecting portion 712 has a recess 712a formed on the side surface on the positive side in the Y-axis direction, and a projection 712b protruding from the bottom surface of the recess 712a toward the positive side in the Y-axis direction. Similarly, the pump section connecting portion 712 has a recess 712c formed on the side surface on the negative side in the Y-axis direction, and a projection 712d protruding from the bottom surface of the recess 712c toward the negative side in the Y-axis direction.

[0034] The material used to construct the movable body 71 is not particularly limited, but in this embodiment, it is made of PBT (polybutylene terephthalate), a resin material, and the base 711, the pump section connecting section 712, and the pressers 713 and 714 are integrally molded.

[0035] Furthermore, as shown in Figures 6 and 7, a long yoke 76 extending in the Y-axis direction is fixed to the tip surface (side on the negative side in the X-axis direction) of the base 711. In addition, a long magnet 77 extending in the Y-axis direction is fixed to the tip surface (side on the negative side in the X-axis direction) of the yoke 76. The material of the yoke 76 is not particularly limited, but in this embodiment it is made of SECC (Steel Electrolytic Cold Commercial), that is, a steel plate that has been electro-galvanized. Alternatively, a silicon steel plate may be used as the material of the yoke 76. The magnet 77 is a permanent magnet, and is made of, for example, an Nd sintered magnet.

[0036] The magnet 77 has a magnetic pole surface 771 facing the coil core portion 8. The magnetic pole surface 771 is a YZ plane extending in the Y-axis direction. Furthermore, S poles and N poles are alternately arranged along the Y-axis direction on the magnetic pole surface 771. In particular, as shown in Figure 7, the magnetic pole surface 771 of this embodiment is a three-pole magnetic pole surface with N poles arranged on both sides of one S pole.

[0037] As shown in Figures 6 and 7, the pair of elastic support members 72 and 73 are arranged side by side in the Y-axis direction at a predetermined distance apart, sandwiching the pump section connecting portion 712 of the movable body 71 from both sides in the Y-axis direction. These elastic support members 72 and 73 each extend in the X-axis direction and have a shape that extends in the Y-axis direction with thickness. The elastic support members 72 and 73 are each fixed to the pump section connecting portion 712 at their tip ends (the ends on the negative side in the X-axis direction).

[0038] Specifically, as shown in Figure 7, the elastic support member 72 is inserted through the projection 712b of the pump section connecting portion 712 at its tip and abuts against the side surface of the pump section connecting portion 712. The elastic support member 72 is then fixed to the pump section connecting portion 712 by a fixing plate 791 inserted through the projection 712b from the outside. Similarly, the elastic support member 73 is inserted through the projection 712d of the pump section connecting portion 712 at its tip and abuts against the side surface of the pump section connecting portion 712. The elastic support member 73 is then fixed to the pump section connecting portion 712 by a fixing plate 792 inserted through the projection 712d from the outside. The fixing plates 791 and 792 are fixed to the projections 712b and 712d, respectively, by various fixing means such as adhesive, press-fitting, welding, and tightening.

[0039] Furthermore, the elastic support members 72 and 73 are fixed to the housing 5 by being sandwiched between the elastic support member fixing portion 74 and the first and second side wall portions 541 and 542 at their base ends (ends on the positive side in the X-axis direction). The elastic support members 72 and 73 also have concave notches 722 and 732 formed at their base ends (ends on the positive side in the X-axis direction) and opening on their upper surfaces. The notches 722 and 732 are used to position the elastic support members 72 and 73 relative to the housing 5, as will be described later.

[0040] Furthermore, the elastic support members 72 and 73 have through holes 721 and 731 that are widely formed in the center and penetrate both sides. The presser 713 is inserted through the through hole 721 of the elastic support member 72, and the presser 714 is inserted through the through hole 731 of the elastic support member 73. This avoids contact between the elastic support members 72 and 73 and the pressers 713 and 714, thereby stabilizing the drive of the vibration actuator 3. In addition, since the elastic support members 72 and 73 and the pressers 713 and 714 can be arranged in a crisscross pattern, it is no longer necessary to offset the pressers 713 and 714 in the vertical direction (Z-axis direction) relative to the elastic support members 72 and 73, thus enabling a lower profile for the pump 1.

[0041] The constituent material of the elastic support members 72 and 73 is not particularly limited, and may be an elastic synthetic resin material (for example, a thermoplastic elastomer). However, in this embodiment, it is made of a metallic material, bronze (an alloy of copper Cu and tin Sn), and in particular, phosphor bronze containing phosphorus P. Furthermore, the constituent shape of the elastic support members 72 and 73 is not particularly limited as long as it elastically supports the movable body 71 so that it can be displaced in the Y-axis direction relative to the housing 5. In this embodiment, it is made of a plate-shaped leaf spring, but for example, if it is made of a synthetic resin material, it may be made of a plate-shaped leaf spring or a columnar column spring, and if it is made of a metallic material, it may be made of a plate-shaped leaf spring or a linear or coil spring-shaped wire spring.

[0042] The elastic support member fixing portion 74 is a rectangular parallelepiped block. As shown in Figures 8 and 9, the elastic support member fixing portion 74 is inserted, or more specifically, press-fitted, between the first and second side wall portions 541 and 542 formed in the housing 5. The elastic support member 72 is sandwiched between the elastic support member fixing portion 74 and the first side wall portion 541, and the elastic support member 73 is sandwiched between the elastic support member fixing portion 74 and the second side wall portion 542. With this configuration, fixing the elastic support members 72 and 73 to the housing 5 becomes easy.

[0043] Furthermore, the elastic support member fixing portion 74 has a pair of protrusions 741 and 742 that are inserted into the concave portions 551 and 552 provided by the movable portion positioning portion 55. Protrusion 741 protrudes from the positive side of the Y-axis direction of the elastic support member fixing portion 74 and is inserted into the concave portion 551 formed in the first side wall portion 541 and the notch 722 provided by the elastic support member 72. Similarly, protrusion 742 protrudes from the negative side of the Y-axis direction of the elastic support member fixing portion 74 and is inserted into the concave portion 552 formed in the second side wall portion 542 and the notch 732 provided by the elastic support member 73. With this configuration, the elastic support members 72 and 73 and the elastic support member fixing portion 74 can be positioned relative to the housing 5 in a simple manner.

[0044] The material used for the elastic support member fixing portion 74 is not particularly limited, but in this embodiment, it is made of PBT (polybutylene terephthalate), which is a synthetic resin material.

[0045] The movable part 7 has been described above, but the configuration of the movable part 7 is not particularly limited. For example, the movable body 71 may be supported by one elastic support member, or it may be supported by three or more elastic support members. Also, for example, the fixing plates 791 and 792 may be omitted, and the elastic support members 72 and 73 may be directly fixed to the movable body 71. The yoke 76 may also be omitted. Furthermore, the magnetic pole surface of the magnet 77 may be a single-pole or double-pole magnetic pole surface, or it may be a four-pole or more magnetic pole surface.

[0046] Next, the coil core portion 8 will be described. As shown in Figures 6 and 7, the coil core portion 8 is located on the negative side of the X-axis direction of the movable body 71. Such a coil core portion 8 has a core portion 81 and a pair of coils 82 and 83 arranged on the core portion 81.

[0047] The core portion 81 has a base portion 811 extending in the Y-axis direction and a pair of core portions 812 and 813 extending from the base portion 811 in the positive X-axis direction. Through holes 811a and 811b are formed at both ends of the base portion 811, penetrating the upper and lower surfaces. As shown in Figure 4, projections 531 and 532 are inserted into the through holes 811a and 811b, thereby positioning the coil core portion 8 relative to the housing 5. Of the through holes 811a and 811b, through hole 811b is an elongated hole extending in the Y-axis direction, allowing for dimensional errors between the housing 5 and the core portion 81 that may occur during manufacturing. Also, as shown in Figures 2 and 3, a control board 10 for controlling the supply of current to the coil core portion 8 is located on the upper surface of the base portion 811.

[0048] The core portions 812 and 813 are arranged side by side in the Y-axis direction. Each of the core portions 812 and 813 extends from the base portion 811 toward the positive side in the X-axis direction, with its tip facing the magnet 77. The tip surfaces of the core portions 812 and 813 form core pole surfaces 812a and 813a, respectively, which face the magnet pole surface 771. Core pole surface 812a faces the boundary between the N pole and S pole on one side (positive side in the Y-axis direction) of the magnet pole surface 771, and core pole surface 813a faces the boundary between the N pole and S pole on the other side (negative side in the Y-axis direction) of the magnet pole surface 771.

[0049] Furthermore, the core pole surfaces 812a and 813a are opposite the magnet pole surface 771 and are in the YZ plane parallel to the magnet pole surface 771. As will be described later, when the vibration actuator 3 is driven, the movable body 71 moves in the Y-axis direction. By arranging the core pole surfaces 812a and 813a parallel to the magnet pole surface 771, contact between them can be avoided while reducing the gap between them. Therefore, the driving efficiency of the vibration actuator 3 can be increased.

[0050] Furthermore, since the coil core 8 has two core magnetic pole surfaces 812a and 813a, and the magnet 77 has three magnetic pole surfaces 771, attractive and repulsive forces acting in the same direction can be simultaneously applied between the coil core 8 and the magnet 77 with a small number of magnetic poles. Therefore, it is possible to generate a larger thrust while reducing the cost of the coil core 8 and the magnet 77. As a result, a pump 1 is obtained that is low cost and has high driving efficiency.

[0051] The core portion 81 is not particularly limited in terms of its constituent material, but in this embodiment, it is composed of SECC (Steel Electrolytic Cold Commercial), that is, an SECC laminate made by stacking multiple electro-galvanized steel sheets.

[0052] Coils 82 and 83 are formed by winding wire around cylindrical bobbins 84 located in the core sections 812 and 813. The materials used for the bobbins 84 and wire are not particularly limited, but in this embodiment, the bobbins 84 are made of PBT (polybutylene terephthalate), a resin material, and the wire is made of polyurethane copper wire (UEW).

[0053] Furthermore, coils 82 and 83 are electrically connected to a control board 10 located on the upper surface of the base 811. By applying a drive voltage from the control board 10 to coils 82 and 83, the core 81 can be excited.

[0054] Furthermore, as shown in Figure 10, the coils 82 and 83 are positioned overlapping the through-holes 511 formed in the base 51 and are exposed to the outside of the case 2 through the through-holes 511. This allows heat from the coils 82 and 83 to easily dissipate to the outside of the case 2, effectively suppressing excessive temperature rise inside the pump 1. In addition, the core pole surfaces 812a and 813a are also positioned overlapping the through-holes 511. Therefore, the position and condition of the core pole surfaces 812a and 813a can be visually confirmed from the outside of the case 2 through the through-holes 511.

[0055] Pump section 4 As shown in Figures 2 to 4, the pump unit 4 is positioned alongside the movable unit 7 in the Y-axis direction. Specifically, the pump unit 4 is positioned on the negative Y-axis side of the movable unit 7. By positioning the pump unit 4 alongside the movable unit 7 in the Y-axis direction in this way, they can be arranged in an efficient layout, minimizing wasted space within the case 2 and enabling a smaller pump 1.

[0056] As shown in Figure 11, the pump section 4 has a longitudinal shape extending in the X-axis direction. In other words, the pump section 4 extends in the same direction as the movable section 7. Therefore, the pump section 4 can be positioned in an efficient layout relative to the movable section 7, and the pump 1 can be made smaller.

[0057] Such a pump unit 4 can discharge air (fluid). The pump unit 4 is equipped with a rapid exhaust mechanism 45 and has a configuration in which a nozzle plate 411, a first valve plate 412, a sub cover 413, a second valve plate 414, a chamber plate 415, and a diaphragm 416 as a movable wall are stacked in order from the outside (negative side in the Y-axis direction). Of these, the first valve plate 412, the second valve plate 414, and the diaphragm 416 are each made of an elastically deformable material such as rubber, and in this embodiment, in particular, silicone rubber. The diaphragm 416 is inserted into the housing 5 through a through hole 521 formed in the side wall portion 52 of the housing 5 and is connected to a presser 714 of the movable part 7. Therefore, when the vibration actuator 3 is driven, the diaphragm 416 is pressed by the presser 714, and the diaphragm 416 deforms accordingly.

[0058] As shown in Figure 12, such a pump unit 4 has an airtight chamber 42 formed between the chamber plate 415 and the diaphragm 416. The airtight chamber 42 is connected to an intake port 43 for drawing in air from the outside and an exhaust port 44 for discharging air from the airtight chamber 42. The intake port 43 and exhaust port 44 are each formed on the side surface of the nozzle plate 411 and are nozzle-shaped, protruding in the negative direction in the Y-axis direction. This makes it easy to connect tubes, etc., for connection to the object W to the intake port 43 and exhaust port 44. An intake valve B1 is provided between the airtight chamber 42 and the intake port 43. The intake valve B1 is a check valve that allows air to be drawn in from the intake port 43 to the airtight chamber 42. An exhaust valve B2 is provided between the airtight chamber 42 and the exhaust port 44. The exhaust valve B2 is a check valve that allows air to be discharged from the airtight chamber 42 to the exhaust port 44. These intake valve B1 and exhaust valve B2 are each formed on the first valve plate 412.

[0059] Furthermore, the pump unit 4 is equipped with a rapid exhaust mechanism 45. The rapid exhaust mechanism 45 has a first air chamber 451 connected to the exhaust port 44 on the downstream side of the exhaust valve B2 in the exhaust direction, and a rapid exhaust port 452 that discharges the air in the first air chamber 451. These first air chamber 451 and rapid exhaust port 452 are each formed in the nozzle plate 411. In addition, a part of the rapid exhaust port 452 is orifice-shaped with a reduced diameter. This stabilizes the airflow from the first air chamber 451 to the rapid exhaust port 452, effectively suppressing unwanted vibrations, noise, etc. A rapid exhaust valve B3 is also provided between the first air chamber 451 and the rapid exhaust port 452. The rapid exhaust valve B3 switches between a state that allows the discharge of air from the first chamber 451 to the rapid exhaust port 452 and a state that restricts the discharge of air from the first chamber 451 to the rapid exhaust port 452. The rapid exhaust valve B3 is formed on the first valve plate 412 together with the intake valve B1 and the exhaust valve B2.

[0060] Furthermore, the rapid exhaust mechanism 45 has a second air chamber 453 connected to the airtight chamber 42 on the upstream side of the exhaust valve B2 in the exhaust direction. The second air chamber 453 is formed in the sub-cover 413. An exhaust valve B4 is provided between the second air chamber 453 and the airtight chamber 42. The exhaust valve B4 is a check valve that allows air to be discharged from the airtight chamber 42 to the second air chamber 453. The exhaust valve B4 is formed in the second valve plate 414.

[0061] Furthermore, the second air chamber 453 is positioned overlapping the first air chamber 451 in the Y-axis direction and is spatially separated from the first air chamber 451 by the rapid exhaust valve B3. In other words, the first air chamber 451 and the second air chamber 453 are adjacent to each other via the rapid exhaust valve B3. Also, the second air chamber 453 has a smaller volume than the first air chamber 451 and is configured to build up pressure more easily than the first air chamber 451. The opening and closing of the rapid exhaust valve B3 is controlled by the pressure difference between the first air chamber 451 and the second air chamber 453. Specifically, if the pressure in the second chamber 453 is higher than the pressure in the first chamber 451, the rapid exhaust valve B3 is biased toward the first chamber 451 and closes (restricting the intake of air from the rapid exhaust port 452 into the first chamber 451). Conversely, if the pressure in the second chamber 453 is lower than the pressure in the first chamber 451, the rapid exhaust valve B3 is biased toward the second chamber 453 and opens (allowing the discharge of air from the first chamber 451 to the rapid exhaust port 452).

[0062] Furthermore, the rapid exhaust mechanism 45 has a fine air leak port 454 that slowly discharges the air in the second air chamber 453 to the outside of the pump section 4. The air leak port 454 is formed by a notch formed on the lower surface of the second valve plate 414 (the surface that contacts the sub-cover 413).

[0063] The pump unit 4 has been described above, but the configuration of the pump unit 4 is not particularly limited. For example, it does not need to be equipped with a rapid exhaust mechanism 45.

[0064] ≪Abutting part 11≫ The contact portion 11 is a component that generates vibration by contacting the movable portion 7, which is the object it contacts. As shown in Figures 2 to 4, such a contact portion 11 is located in the housing 5. By arranging the contact portion 11 in the housing 5 in this way, its placement becomes easier. Furthermore, the contact portion 11 is located parallel to the movable portion 7 in the Y-axis direction. Specifically, the contact portion 11 is located on the positive Y-axis side of the movable body 71. In other words, the pump section 4 is located on one side (negative side) of the Y-axis direction relative to the movable portion 7, and the contact portion 11 is located on the other side (positive side). This arrangement allows the pump section 4 and the contact portion 11 to be arranged in an efficient layout, minimizing wasted space within the case 2 and enabling miniaturization of the pump 1.

[0065] The material used to construct the contact portion 11 is not particularly limited, but it is preferably an elastic material such as various rubber materials or various elastomers, and in this embodiment, it is made of silicone rubber. By constructing the contact portion 11 from an elastic material in this way, the impact when the movable body 71 makes contact can be appropriately absorbed and mitigated. As a result, the vibration of the movable body 71 is less likely to become unstable. It is also possible to suppress the contact noise with the movable body 71.

[0066] The contact portion 11 has been described above, but its configuration is not particularly limited. For example, the contact portion 11 may be integrally formed with the housing 5. In other words, the housing 5 may also serve as the contact portion 11. Furthermore, as will be described later, in this embodiment, the contact portion 11 contacts the fixing plate 791 of the movable part 7, but the contact point is not particularly limited as long as it contacts the movable part 7, and may be, for example, the movable body 71, the yoke 76, the magnet 77, etc.

[0067] The configuration of pump 1 has been described above. Next, the driving method of pump 1 will be described. As shown in Figure 13, pump 1 has a first resonance mode M1 and a second resonance mode M2 ​​as driving modes for the vibration actuator 3. Furthermore, the first resonance mode M1 has a first driving mode M11 and a second driving mode M12.

[0068] Of these, the first drive mode M11 is a mode that drives the pump unit 4 and makes the pump 1 function as a pump, the second drive mode M12 is a mode that generates vibration and makes the pump 1 function as a vibration generator, and the second resonance mode M2 ​​is a mode that generates sound and makes the pump 1 function as a sound generator. In this way, by appropriately selecting one of these three drive modes, the pump 1 can perform functions such as generating vibration and sound in addition to its function as a pump. For example, if there is a device that requires pumping, vibration generation, and sound generation functions, conventional pumps require the installation of a separate vibration generator such as a vibrator and a sound generator such as a speaker, which leads to a larger and more expensive device. In contrast, with the pump 1, since the pump 1 also functions as a vibration generator and a sound generator, it is not necessary to install a separate vibration generator or sound generator, thereby making the device smaller and less expensive.

[0069] Furthermore, the use of the vibrations and sounds generated by pump 1 is not particularly limited and can be used for any purpose through the user's ingenuity. Typically, it can be suitably used as a notification means to inform the user of predetermined information (e.g., work start, work end, normal, abnormal, warning, etc.) using vibrations and sounds.

[0070] The first resonance mode M1 and the second resonance mode M2 ​​will be explained in order below, but first, a brief explanation of the difference between the first resonance mode M1 and the second resonance mode M2 ​​will be given. The first resonance mode is a mode in which the movable body 71 vibrates in the Y-axis direction in the first resonance mode (fundamental resonance mode) while the elastic support members 72 and 73 are elastically deformed in the Y-axis direction. In contrast, the second resonance mode M2 ​​is a mode in which the movable body 71 vibrates in the Z-axis direction in a second or higher-order resonance mode (second-order resonance mode in this embodiment) while the elastic support members 72 and 73 are elastically deformed in the Z-axis direction. Since the second resonance mode M2 ​​is a higher-order resonance mode than the first resonance mode M1, the resonance frequency fr2 of the second resonance mode is higher than the resonance frequency fr1 of the first resonance mode M1. <fr2である。

[0071] In pump 1, the vibration actuator 3 is driven in the first resonant mode M1 by applying a drive voltage Vm1 with a frequency equal to the resonant frequency fr1 to coils 82 and 83 from the control board 10, and the vibration actuator 3 is driven in the second resonant mode M2 ​​by applying a drive voltage Vm2 with a frequency equal to the resonant frequency fr2 to coil 82 from the control board 10. However, as long as the vibration actuator 3 can be driven in the first and second resonant modes M1 and M2, the frequencies of the drive voltages Vm1 and Vm2 may be slightly different from the resonant frequencies fr1 and fr2.

[0072] The circuit configuration of the control board 10 that generates the drive voltages Vm1 and Vm2 is not particularly limited, but for example, it can be a circuit using four MOSFETs (MOS field-effect transistors) as shown in Figure 14. This makes it easy to generate the drive voltages Vm1 and Vm2. In the figure, Rg is the gate resistance and Rgs is the gate-source resistance.

[0073] Furthermore, the movable part 7 is a spring-mass system structure having a spring system consisting of a physical spring formed from elastic support members 72 and 73, a magnetic spring formed by the magnetic force acting between the coil core 8 and the magnet 77, and a mass system supported by this spring system consisting of a movable body 71, a yoke 76, a magnet 77, etc. Therefore, the resonant frequencies fr1 and fr2 can be expressed, for example, by the following equations (1) and (2). In particular, since the elastic support members 72 and 73 have the Y-axis direction as the thickness direction, they are easily elastically deformed in the Y-axis direction and difficult to elastically deform in the Z-axis direction. Therefore, the resonant frequency fr1 of the first resonant mode M1 that causes elastic deformation of the elastic support members 72 and 73 in the Y-axis direction can be made lower, and the resonant frequency fr2 of the second resonant mode M2 ​​that causes elastic deformation of the elastic support members 72 and 73 in the Z-axis direction can be made higher. Therefore, these resonant frequencies fr1 and fr2 can be sufficiently separated, and the superposition of the first resonant mode M1 and the second resonant mode M2 ​​can be effectively suppressed.

[0074]

number

[0075] Next, we will describe the first resonant mode M1. The first resonant mode M1 has a first drive mode M11 and a second drive mode M12, but the first drive mode M11 and the second drive mode M12 are similar except for the amplitude of the movable body 71. Therefore, we will first describe these first and second drive modes M11 and M12 without distinguishing between them.

[0076] In the first resonance mode M1, a drive voltage Vm1 is applied to coils 82 and 83 to elastically deform the elastic support members 72 and 73 in the Y-axis direction, while simultaneously vibrating the movable body 71 in the Y-axis direction. This causes a first state in which the movable body 71 is displaced to the positive side in the Y-axis direction, as shown in Figure 15, and a second state in which the movable body 71 is displaced to the negative side in the Y-axis direction, as shown in Figure 16, to alternately repeat. In the first state shown in Figure 15, the core pole surface 812a on the positive side in the Y-axis direction is excited to the N pole, and the core pole surface 813a on the negative side in the Y-axis direction is excited to the S pole. Conversely, in the second state shown in Figure 16, the core pole surface 812a on the positive side in the Y-axis direction is excited to the S pole, and the core pole surface 813a on the negative side in the Y-axis direction is excited to the N pole.

[0077] In the first state shown in Figure 15, a thrust F1 in the positive direction of the Y-axis is generated by the magnetic force acting between the magnet 77 and the coil core 8. The movable body 71 is then displaced in the direction of the thrust F1, i.e., in the positive direction of the Y-axis, while elastically deforming the elastic support members 72 and 73 in the positive direction of the Y-axis. As a result, in the pump section 4, as shown in Figure 17, the diaphragm 416 is expanded by the presser 714, increasing the volume inside the airtight chamber 42, and air flows into the airtight chamber 42 from the intake port 43.

[0078] On the other hand, in the second state shown in Figure 16, a thrust F2 in the opposite direction to thrust F1 is generated by the magnetic force (attraction and repulsion) acting between the magnet 77 and the coil core 8. As a result, the movable body 71 is displaced in the direction of thrust F2, i.e., the negative direction of the Y-axis, while elastically deforming the elastic support members 72 and 73 to the negative side of the Y-axis. Consequently, in the pump section 4, as shown in Figure 18, the diaphragm 416 is pressed by the presser 714, reducing the volume inside the airtight chamber 42, and the air inside the airtight chamber 42 is discharged from the exhaust port 44.

[0079] When the air in the airtight chamber 42 is discharged from the exhaust port 44, the exhaust valve B4 opens and some of the air in the airtight chamber 42 is introduced into the second chamber 453. The air introduced into the second chamber 453 is slowly discharged from the leak port 454, but since the amount of air supplied from the airtight chamber 42 is greater than the amount of air exhausted from the leak port 454, the pressure in the second chamber 453 is maintained at a higher level than the pressure in the first chamber 451. Therefore, the rapid exhaust valve B3 is biased toward the first chamber 451 and maintained in a closed state that blocks the rapid exhaust port 452, thereby restricting the discharge (leakage) of air from the rapid exhaust port 452. When the drive of the vibration actuator 3 is stopped, the pressure in the second chamber 453 gradually decreases due to the exhaust from the leak port 454 and eventually balances with atmospheric pressure.

[0080] In this way, by alternately repeating the first state shown in Figure 15 and the second state shown in Figure 16, air is continuously discharged from the pump unit 4 and supplied to the object W.

[0081] As mentioned above, the coil core 8 has two core magnetic pole surfaces 812a and 813a, and the magnet 77 has three magnetic pole surfaces 771 with alternating polarities in the Y-axis direction. Therefore, in the first state shown in Figure 15, that is, when the core magnetic pole surface 812a on the positive side in the Y-axis direction is the N pole and the core magnetic pole surface 813a on the negative side in the Y-axis direction is the S pole, a repulsive force in the positive Y-axis direction is generated between the core magnetic pole surface 812a on the positive side in the Y-axis direction and the N pole on the positive side in the Y-axis direction of the magnet magnetic pole surface 771, and an attractive force in the positive Y-axis direction is generated between the core magnetic pole surface 812a on the positive side in the Y-axis direction and the S pole in the center of the magnet magnetic pole surface 771 in the Y-axis direction. Also, a repulsive force in the positive Y-axis direction is generated between the core magnetic pole surface 813a on the negative side in the Y-axis direction and the S pole in the center of the magnet magnetic pole surface 771 in the Y-axis direction, and an attractive force in the positive Y-axis direction is generated between the core magnetic pole surface 813a on the negative side in the Y-axis direction and the N pole on the negative side in the Y-axis direction of the magnet magnetic pole surface 771. These attractive and repulsive forces combine to produce a greater thrust F1.

[0082] Similarly, in the second state shown in Figure 16, that is, when the core pole surface 812a on the positive side in the Y-axis direction is the S pole and the core pole surface 813a on the negative side in the Y-axis direction is the N pole, an attractive force in the negative side in the Y-axis direction is generated between the core pole surface 812a on the positive side in the Y-axis direction and the N pole on the positive side in the Y-axis direction of the magnet pole surface 771, and a repulsive force in the negative side in the Y-axis direction is generated between the core pole surface 812a on the positive side in the Y-axis direction and the S pole at the center of the magnet pole surface 771 in the Y-axis direction. In addition, an attractive force in the negative side in the Y-axis direction is generated between the core pole surface 813a on the negative side in the Y-axis direction and the S pole at the center of the magnet pole surface 771 in the Y-axis direction, and a repulsive force in the negative side in the Y-axis direction is generated between the core pole surface 813a on the negative side in the Y-axis direction and the N pole on the negative side in the Y-axis direction of the magnet pole surface 771. These attractive and repulsive forces result in a larger thrust F2.

[0083] Furthermore, as shown in Figures 15 and 16, the movable body 71 moves parallel to the Y-axis while elastically deforming the elastic support members 72 and 73 in an S-shape in the Y-axis direction. In other words, the movable body 71 moves in the Y-axis direction while maintaining a constant orientation (posture). As a result, the presser 714 of the movable body 71 presses the diaphragm 416 in the Y-axis direction perpendicular to its wall surface. Consequently, the diaphragm 416 deforms more significantly, increasing the airflow rate discharged from the pump section 4. Moreover, because the orientation of the movable body 71 can be kept constant, contact between the magnet 77 and the coil core section 8 can be avoided, and the gap between them can be made smaller. Therefore, the driving efficiency of the vibration actuator 3 can be increased.

[0084] Next, the first drive mode M11 and the second drive mode M12, which are included in the first resonance mode M1, will be described. As mentioned above, the amplitude of the movable body 71 differs between the first drive mode M11 and the second drive mode M12. The amplitude of the movable body 71 in the first drive mode M11 is smaller than the amplitude of the movable body 71 in the second drive mode M12. In the first drive mode M11, the movable part 7 is vibrated without contacting the contact part 11, while in the second drive mode M12, the movable part 7 is vibrated while in contact with the contact part 11.

[0085] Specifically, in the second drive mode M12, as shown in Figure 19, the amplitude of the movable body 71 is large, and the movable body 71 vibrates in the Y-axis direction while the fixed plate 791 comes into contact with the contact portion 11. As the fixed plate 791 repeatedly comes into contact with the contact portion 11, vibration is generated from the pump 1. Thus, the second drive mode M12 is a mode in which the pump section 4 is driven while generating vibration. In contrast, in the first drive mode M11, as shown in Figure 20, the amplitude of the movable body 71 is small, and the movable body 71 vibrates in the Y-axis direction without the fixed plate 791 coming into contact with the contact portion 11. Therefore, vibration caused by the contact between the movable part 7 and the contact portion 11, as in the second drive mode M12, does not occur. Thus, the first drive mode M11 is a mode in which the pump section 4 is driven without generating vibration.

[0086] As described above, if the vibration actuator 3 is driven in the first drive mode M11, the pump 1 can be used as a pump, and if the vibration actuator 3 is driven in the second drive mode M12, the pump 1 can be used as a vibration generator. In the second drive mode M12, the pump 1 functions not only as a vibration generator but also as a pump, but by keeping the driving time in the second drive mode M12 short, the supply of unnecessary air to the object W can be suppressed. Alternatively, for example, a solenoid valve for venting to the atmosphere may be placed in the middle of the flow path connecting the pump 1 and the object W, and when driven in the second drive mode M12, the air supplied from the pump 1 may be vented to the atmosphere through the solenoid valve so that it is not supplied to the object W.

[0087] The resonant frequency fr1 of the first resonant mode M1 is not particularly limited, but is preferably, for example, 50Hz to 500Hz, and in this embodiment, it is set to 200Hz. With this configuration, the drive of the pump unit 4, in particular the opening and closing of the intake valve B1 and exhaust valves B2 and B4 can be performed stably, and a stable and sufficient amount of air can be discharged. In addition, the generation of sound associated with the vibration of the movable body 71 can be effectively suppressed, and the driving noise of the pump 1 can be made even quieter.

[0088] Here, the amplitude of the movable body 71 can be changed, for example, based on the magnitude of the drive voltage Vm1. Therefore, by changing the magnitude of the drive voltage Vm1, it is possible to switch between the first drive mode M11 and the second drive mode M12. Specifically, the larger the drive voltage Vm1, the larger the amplitude of the movable body 71. As shown in Figure 21, the drive voltage Vm1 should be set to a small value in the first drive mode M11 and to a large value in the second drive mode M12.

[0089] Furthermore, the amplitude of the movable body 71 can be changed, for example, based on the duty cycle of the drive voltage Vm1. Therefore, by changing the duty cycle of the drive voltage Vm1, it is possible to switch between the first drive mode M11 and the second drive mode M12. Specifically, the larger the duty cycle of the drive voltage Vm1, the larger the amplitude of the movable body 71. As shown in Figure 22, the duty cycle of the drive voltage Vm1 should be set to be small in the first drive mode M11 and large in the second drive mode M12.

[0090] Furthermore, it is possible to switch between the first drive mode M11 and the second drive mode M12 without changing the amplitude of the movable body 71. Specifically, by applying a drive voltage Vm1 as shown in Figure 23, the first drive mode M11 can be switched by causing the movable body 71 to vibrate only on the negative side of the Y-axis (towards the pump section 4), and the second drive mode M12 can be switched by causing the movable body 71 to vibrate on both sides of the Y-axis. Note that "causing the movable body 71 to vibrate only on the negative side of the Y-axis" means periodically applying only a thrust F2 in the negative side of the Y-axis to the movable body 71, and does not mean prohibiting the movable body 71 from being displaced beyond the neutral point to the positive side of the Y-axis due to the inertia caused by the vibration.

[0091] The first resonance mode M1 has been described above. Next, the second resonance mode M2 ​​will be described. In the second resonance mode M2, a drive voltage Vm2 is applied to coils 82 and 83 to vibrate the movable body 71 in the Z-axis direction. Specifically, as shown in Figure 24, the movable body 71 is oscillating around the Y-axis while the elastic support members 72 and 73 are elastically deformed in the Z-axis direction. This vibration causes the surrounding air to vibrate, generating sound. The human audible range is approximately 20 Hz to 20 kHz, and the frequency range that is particularly easy to hear is said to be approximately 2 kHz to 4 kHz. Therefore, the resonance frequency fr2 of the second resonance mode M2 ​​is preferably, for example, 1 kHz to 5 kHz, and more preferably 2.5 kHz to 3.5 kHz. In particular, in this embodiment, the resonance frequency fr2 is set to around 3.0 kHz. By setting it to such a value, it is possible to generate a sound that is easy for more people to hear, regardless of gender or age.

[0092] In this embodiment, to facilitate the generation of the second resonance mode M2, the magnet 77 and the coil core 8 are positioned slightly offset in the Z-axis direction, as shown in Figure 5. In the illustrated example, the coil core 8 is slightly lower (negative Z-axis direction) relative to the magnet 77. This arrangement allows a magnetic force in the Z-axis direction to act between the magnet 77 and the coil core 8, making it easier for the second resonance mode M2 ​​to occur.

[0093] Furthermore, in the second resonance mode M2, the movable part 7 vibrates in the Z-axis direction, so virtually no pressure is applied to the diaphragm 416 by the presser 714. Therefore, in the second resonance mode M2, the pump unit 4 is not driven at all. In other words, in the second resonance mode M2, the pump 1 can function solely as a sound generator. Consequently, the usability of the pump 1 is greatly improved.

[0094] The second resonance mode M2 ​​has been described above, but the second resonance mode M2 ​​is not particularly limited as long as it can generate sound. For example, the vibration of the movable body 71 is not limited to oscillating vibration in the Z-axis direction, but may also be torsional vibration around the X-axis. In addition, the presser 714 may press against the diaphragm 416, allowing it to function as both a sound generator and a pump. Furthermore, for example, as shown in Figure 25, the resonance frequency fr2 may be adjusted to be higher by forming a weight-reducing section 710 in the movable body 71 and decreasing its mass. Conversely, although not shown, the resonance frequency fr2 may be adjusted to be lower by forming a weight in the movable body 71 and increasing its mass.

[0095] The first resonance mode M1 and the second resonance mode M2 ​​have been described above. In addition to these first and second resonance modes M1 and M2, pump 1 also has a rapid exhaust mode that rapidly discharges the air from inside the object W. Note that the rapid exhaust mode differs from the first and second resonance modes M1 and M2 in that it does not drive the vibration actuator 3. As shown in Figure 26, in the rapid exhaust mode, the air inside the object W flows back and is introduced into the first air chamber 451 from the exhaust port 44, increasing the pressure inside the first air chamber 451. As mentioned above, in the first resonance mode M1, the pressure inside the second air chamber 453 drops to atmospheric pressure after the vibration actuator 3 stops. Therefore, when the air inside the object W is introduced into the first air chamber 451, the pressure inside the first air chamber 451 becomes higher than the pressure inside the second air chamber 453. In other words, the pressure inside the first air chamber 451 becomes higher than the pressure inside the second air chamber 453. As a result, the rapid exhaust valve B3 is biased toward the second air chamber 453, opening the rapid exhaust port 452, and the air inside the object W is rapidly discharged from the rapid exhaust port 452.

[0096] The rapid exhaust mode has been explained above. As mentioned earlier, the rapid exhaust port 452 has an orifice-like structure in which part of it is narrowed in diameter, and the amount of air flowing through the rapid exhaust port 452 is appropriately restricted. Therefore, the airflow within the rapid exhaust port 452 is stabilized, and unwanted vibrations, noise, etc., during rapid exhaust can be effectively suppressed.

[0097] This concludes the explanation of Pump 1. As described above, such a pump 1 has a housing 5, elastic support members 72 and 73 extending in the X-axis direction and one end supported by the housing 5, a movable part 7 having a movable body 71 connected to the other end of the elastic support members 72 and 73 and a magnet 77 provided on the movable body 71, a coil core part 8 positioned opposite the magnet 77 in the X-axis direction, and a vibration actuator 3 in which the movable body 71 vibrates in the Y-axis direction while elastically deforming the elastic support members 72 and 73 due to the electromagnetic action between the magnet 77 and the coil core part 8, a pump part 4 having an airtight chamber 42 and a diaphragm 416 as a movable wall that changes the volume of the airtight chamber 42 when driven by the vibration actuator 3, and a contact part 11 that contacts the movable part 7 which is the contacting partner when driven by the vibration actuator 3. Then, vibration is generated when the contact portion 11 comes into contact with the movable portion 7, which is the object of contact. With this configuration, the pump 1 can be used as a pump by driving the pump portion 4 with the drive of the vibration actuator 3. Furthermore, by driving the vibration actuator 3 to bring the movable portion 7 into contact with the contact portion 11 and generating vibration, the pump 1 can be used as a vibration generator. In this way, the pump 1 can be used not only as a pump but also as a vibration generator, making it a highly convenient pump 1.

[0098] Furthermore, as mentioned above, the contact portion 11 is located on the housing 5, and the object it contacts is the movable portion 7. This configuration makes it easy to position the contact portion 11.

[0099] Furthermore, as mentioned above, the pump section 4 is positioned on one side (negative side) of the Y-axis direction relative to the movable section 7, and the contact section 11 is positioned on the other side (positive side). By positioning the pump section 4 and the contact section 11 separately on both sides of the Y-axis direction of the movable section 7 in this way, they can be arranged in an efficient layout, reducing wasted space within the housing 5 and enabling a miniaturization of the pump 1.

[0100] Furthermore, as mentioned above, the pump 1 has a first drive mode M11 in which the pump section 4 is driven without the contact portion 11 contacting the movable portion 7 that it contacts, and a second drive mode M12 in which the pump section 4 is driven while the contact portion 11 is in contact with the movable portion 7 that it contacts. With this configuration, the pump 1 can function as a pump by driving it in the first drive mode M11, and can function as a vibration generator by driving it in the second drive mode M12. In this way, the pump 1 can be switched between functioning as a pump and functioning as a vibration generator, thus increasing its convenience.

[0101] Furthermore, as mentioned above, for example, in the second drive mode M12, the amplitude of the movable body 71 is larger than in the first drive mode M11. With this configuration, the second drive mode M12 and the first drive mode M11 can be switched with simple control.

[0102] Furthermore, as mentioned above, for example, the second drive mode M12 causes the movable body 71 to vibrate on both sides in the Y-axis direction, while the first drive mode M11 causes the movable body 71 to vibrate only on the pump section 4 side in the Y-axis direction. With this configuration, the second drive mode M12 and the first drive mode M11 can be switched with simple control.

[0103] Furthermore, as mentioned above, the movable part 7 has a first resonance mode M1 in which the movable body 71 vibrates in the Y-axis direction, and a second resonance mode M2 ​​in which the resonance frequency fr1 is higher than that of the first resonance mode M1 and the movable body 71 vibrates in a direction different from that of the first resonance mode M1. The first resonance mode M1 includes the first drive mode M11 and the second drive mode M12, and sound is generated by vibrating the movable body 71 in the second resonance mode M2. With this configuration, the pump 1 can be used as a sound generating device by driving it in the second resonance mode M2. Therefore, the pump 1 becomes a highly convenient device.

[0104] Furthermore, as mentioned above, in the second resonance mode M2, the movable body 71 vibrates in the Z-axis direction. With this configuration, the pump section 4 is not driven in effect in the second resonance mode M2. Therefore, in the second resonance mode M2, the pump 1 can be used solely as a sound generating device.

[0105] Furthermore, as mentioned above, the resonant frequency fr2 of the second resonant mode M2 ​​is 1kHz to 5kHz. With this configuration, it is possible to generate sounds that are easily audible to a wider range of people, regardless of gender or age.

[0106] Furthermore, as mentioned above, the pump 1 has a pair of elastic support members 72 and 73 arranged side by side in the Y-axis direction, with the movable body 71 positioned between the pair of elastic support members 72 and 73. With this configuration, the torsional rigidity of the elastic support members 72 and 73 is increased, and unwanted vibrations of the movable body 71 in directions other than the Y-axis direction can be effectively suppressed. As a result, the drive of the vibration actuator 3 becomes stable, and the drive efficiency of the pump 1 is increased.

[0107] <Second Embodiment> Figure 27 is a top view showing the internal structure of the pump according to the second embodiment. Figure 28 is a top view showing the behavior of the movable body in the second drive mode.

[0108] Pump 1 in this embodiment is the same as pump 1 in the first embodiment described above, except for the arrangement of the contact portion 11. Therefore, in the following description, this embodiment will be described mainly for the differences from the first embodiment described above, and similar matters will be omitted from the description. Also, in each figure of this embodiment, the same reference numerals are used for components that are the same as in the previously described embodiment.

[0109] As shown in Figure 27, in the pump 1 of this embodiment, the contact portion 11 is located on the movable portion 7. In particular, in the illustrated example, the contact portion 11 is located on the fixed plate 791. When the vibration actuator 3 is driven in the second drive mode M12, as shown in Figure 28, the contact portion 11 comes into contact with the housing 5, which is the object of contact, and vibration is generated. With this configuration, the arrangement of the contact portion 11 becomes easier.

[0110] As described above, in the pump 1 of this embodiment, the contact portion 11 is located on the movable portion 7, and the object it contacts is the housing 5. With this configuration, the placement of the contact portion 11 becomes easier.

[0111] This second embodiment can also achieve the same effects as the first embodiment described above.

[0112] <Third Embodiment> Figure 29 is a top view showing the internal structure of a pump according to the third embodiment. Figure 30 is a top view showing the internal structure of a modified example of the pump shown in Figure 29.

[0113] The pump 1 of this embodiment is the same as the pump 1 of the first embodiment described above, except that a pair of pump units 4 are arranged. Therefore, in the following description, this embodiment will be described mainly for the differences from the first embodiment described above, and similar matters will be omitted from the description. Also, in each figure of this embodiment, the same reference numerals are used for components that are the same as in the previously described embodiment.

[0114] As shown in Figure 29, in the pump 1 of this embodiment, pump sections 4 are arranged on both sides of the movable section 7 in the Y-axis direction. For the sake of explanation, in the following, the pump section 4 located on the positive side in the Y-axis direction relative to the movable section 7 will be referred to as pump section 4A, and the pump section 4 located on the negative side in the Y-axis direction will be referred to as pump section 4B. These pump sections 4A and 4B have similar configurations, and pump section 4A is arranged in a position where pump section 4B has been rotated 180° around the X-axis (inverted upside down). With this configuration, pump sections 4A and 4B can be used interchangeably, thereby reducing the manufacturing cost of the pump 1.

[0115] Such a pump 1 is driven in the same manner as in the first embodiment described above. When driving the first resonance mode M1, although not shown in the figure, the movable body 71 is displaced to the positive side in the Y-axis direction, and a first state in which air is discharged from the pump section 4A and air flows into the pump section 4B is repeated alternately, and a second state in which the movable body 71 is displaced to the negative side in the Y-axis direction, and air is discharged from the pump section 4B and air flows into the pump section 4A is repeated alternately, so that air is continuously discharged from the pump 1. As a result, air can be efficiently supplied to the object W. By arranging the pair of pump sections 4A and 4B in this way, the flow rate of air discharged from the pump 1 can be further increased.

[0116] The third embodiment described above can also achieve the same effects as the first embodiment described above. In this third embodiment, as shown in Figure 30, contact portions 11 may be arranged on both sides of the movable portion 7 in the Y-axis direction. Although not shown, in the second drive mode M12, vibration is generated when the movable body 71 contacts each contact portion 11. With this configuration, since the movable body 71 contacts the contact portions 11 on both sides of the vibration, it is possible to generate vibrations with twice the frequency compared to the first embodiment described above.

[0117] Although the pump of the present invention has been described above based on the illustrated embodiment, the present invention is not limited thereto, and the configuration of each part can be replaced with any configuration having a similar function. Furthermore, other arbitrary components may be added to the present invention. Also, each embodiment may be combined as appropriate. In addition, the fluid discharged by the pump section 4 is not limited to a gas such as air, but may be a liquid such as ethylene glycol.

[0118] Furthermore, in the embodiment described above, the pump 1 had a first resonant mode M1 and a second resonant mode M2 ​​as drive modes, and the first resonant mode M1 had a first drive mode M11 and a second drive mode M12. However, the drive modes are not particularly limited as long as they have at least a second drive mode M12. Therefore, at least one of the first drive mode M11 and the second resonant mode M2 ​​may be omitted. [Explanation of Symbols]

[0119] 1...Pump, 10...Control board, 11...Contact part, 2...Case, 3...Vibration actuator, 4...Pump section, 4A...Pump section, 4B...Pump section, 411...Nozzle plate, 412...First valve plate, 413...Sub cover, 414...Second valve plate, 415...Chamber plate, 416...Diaphragm, 42...Airtight chamber, 43...Intake port, 44...Exhaust port, 45...Rapid exhaust mechanism, 451...First air chamber, 452...Rapid exhaust port, 453...Second air chamber, 454...Leak port, 5...Housing, 50...Notch, 51...Base, 511...Through hole, 52...Side wall 521...Through hole, 53...Coil core positioning part, 531...Protrusion, 532...Protrusion, 54...Fixing part, 541...First side wall part, 542...Second side wall part, 55...Movable part positioning part, 551...Concave part, 552...Concave part, 56...Pump part positioning part, 563...Protrusion, 564...Protrusion, 6...Lid, 7...Movable part, 71...Movable body, 710...Weight reduction part, 711...Base part, 712...Pump part connecting part, 712a...Recess, 712b...Protrusion, 712c...Recess, 712d...Protrusion, 713...Presser, 714...Presser, 72...Elastic support member, 721 ...through hole, 722...notch, 73...elastic support member, 731...through hole, 732...notch, 74...elastic support member fixing part, 741...projection, 742...projection, 76...yoke, 77...magnet, 771...magnet pole surface, 791...fixing plate, 792...fixing plate, 8...coil core part, 81...core part, 811...base part, 811a...through hole, 811b...through hole, 812...core part, 812a...core pole surface, 813...core part, 813a...core pole surface, 82...coil, 83...coil, 84...bobbin, 9...pump, 91...shaft part, 92...possible Moving body, 93a...Magnet, 93b...Magnet, 94a...Coil core section, 94b...Coil core section, 941a...Core section, 941b...Core section, 942a...Coil, 942b...Coil, 95a...Pump section, 95b...Pump section, B1...Intake valve, B2...Exhaust valve, B3...Rapid exhaust valve, B4...Exhaust valve, F1...Thrust, F2...Thrust, M1...First resonance mode, M11...First drive mode, M12...Second drive mode, M2...Second resonance mode, Q1...Region, Q2...Region, Q3...Region, Vm1...Drive voltage, W...Target object

Claims

1. The three mutually orthogonal axes are defined as the X, Y, and Z axes. When the direction along the X-axis is defined as the X-axis direction, the direction along the Y-axis is defined as the Y-axis direction, and the direction along the Z-axis is defined as the Z-axis direction, The casing and A vibration actuator comprising: an elastic support member extending in the X-axis direction and one end supported by the housing; a movable part having a movable body connected to the other end of the elastic support member and a magnet provided on the movable body; and a coil core part arranged opposite the magnet in the X-axis direction, wherein the movable body vibrates in the Y-axis direction while elastically deforming the elastic support member due to the electromagnetic action between the magnet and the coil core part, A pump unit having an airtight chamber and a movable wall that changes the volume of the airtight chamber by driving the vibration actuator, It has a contact portion that comes into contact with an object when the vibration actuator is driven, A pump characterized in that vibration is generated when the contact portion comes into contact with the object it contacts.

2. The aforementioned contact portion is arranged on the housing, The pump according to claim 1, wherein the contacting object is the movable part.

3. The contact portion is positioned on the movable portion. The pump according to claim 1, wherein the mating surface is the housing.

4. The pump according to claim 1, wherein the pump portion is positioned on one side in the Y-axis direction with respect to the movable portion, and the contact portion is positioned on the other side.

5. A first drive mode in which the pump section is driven without the contact section coming into contact with the contact surface, The pump according to claim 4, comprising a second drive mode in which the contact portion is brought into contact with the contact object while the pump portion is driven.

6. The pump according to claim 5, wherein the second drive mode has a larger amplitude of the movable body than the first drive mode.

7. The second drive mode causes the movable body to vibrate on both sides in the Y-axis direction, The pump according to claim 5, wherein the first drive mode causes the movable body to vibrate only on the pump side in the Y-axis direction.

8. The movable part has a first resonance mode in which the movable body vibrates in the Y-axis direction, and a second resonance mode in which the movable body vibrates in a direction different from the first resonance mode, with a resonance frequency higher than that of the first resonance mode. The first resonance mode includes the first drive mode and the second drive mode, The pump according to claim 5, wherein sound is generated by vibrating the movable body in the second resonance mode.

9. The pump according to claim 8, wherein in the second resonance mode, the movable body vibrates in the Z-axis direction.

10. The pump according to claim 8, wherein the resonant frequency of the second resonant mode is 1 kHz to 5 kHz.

11. The elastic support members are arranged in the Y-axis direction, The pump according to claim 1, wherein the movable body is disposed between a pair of elastic support members.

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