Strain generation structure and force sensor

Abstract

This application provides a strain generation structure and a force sensor. The strain generation structure includes at least one strain generating body configured to generate strain under the action of an external force, wherein at least one uneven structure is formed on the surface of at least one strain generating body, the uneven structure has a recess and a protrusion adjacent to the recess, and at least one strain gauge is provided on the protrusion of at least one uneven structure, the strain gauge is configured to sense the strain generated by the strain generating body, and the strain generation structure has a reference plane perpendicular to its axis, and each strain gauge of the strain generation structure is provided parallel to the reference plane. The strain generation structure allows each strain gauge to be mounted on a plane that is easy for the equipment to operate, and also guarantees the measurement performance of a 6-dimensional force sensor.

Description

Technical Field

[0001] The present invention relates to the technical field of force detection, and particularly to a strain generating structure and a force sensor.

Background Art

[0002] As the research on artificial intelligence technology continues to deepen, while many platforms equipped with artificial intelligence technologies are rapidly developing, among them, the robot industry, as the apex of the industrial field pyramid, has become a hot spot for development and research in recent years due to the utilization of artificial intelligence technology. The field of humanoid robots in the robot industry is the most suitable platform for installing artificial intelligence. The humanoid robot and its related parts industries have developed rapidly and are expected to become another large-scale and platform-based emerging industry with high added value after the new energy vehicle industry.

[0003] There are still many technical problems in the process of industrializing humanoid robots, one of which is the development design and mass production of a six-dimensional force sensor in space. The six-dimensional force sensor can collect the forces in the three axial directions of X, Y, and Z in the space coordinate system and the moments around these three axes. In principle, most six-dimensional force sensors utilize the resistance change effect after the deformation of the resistor to construct a Wheatstone bridge and collect the change in voltage on the bridge, thereby obtaining the corresponding relationship between the output voltage and the strain. Furthermore, through calibration technology, the corresponding relationship between the output voltage and the force and / or moment is determined.

[0004] However, 6D force sensors are not used in the consumer sector due to the high technical requirements of their application scenarios. As a result, the demand for these products is not high, preventing mass production and keeping unit prices high. Humanoid robots have the potential for large-scale and industrialization, and are well-suited to the consumer sector. Therefore, to align with the characteristics of the humanoid robot industry, it is necessary to develop novel 6D force sensors, reduce the difficulty of production, improve the yield rate of products, and guarantee the performance and technical indicators of 6D force sensor products. [Overview of the project] [Problems that the invention aims to solve]

[0005] Therefore, the present invention aims to provide an improved strain generation structure and force sensor, thereby solving at least one of the above-mentioned problems. [Means for solving the problem]

[0006] In a first aspect, the present application provides a strain generating structure comprising at least one strain generating body, wherein the strain generating body is configured to generate strain under the action of an external force. However, at least one uneven structure is formed on the surface of at least one of the strain generating bodies, the uneven structure has a recess and a protrusion adjacent to the recess, at least one strain gauge is provided on the protrusion of at least one of the uneven structures, and the strain gauge is configured to sense the strain generated by the strain generating body. Furthermore, the strain generating structure has a reference plane perpendicular to its axis, and each of the strain gauges in the strain generating structure is provided parallel to the reference plane.

[0007] In the strain generation structure described above, on the one hand, all strain gauges are provided parallel to the reference plane, thereby enabling the subsequent mounting process to be carried out using equipment, significantly reducing the difficulty of production and improving the production efficiency of the 6-dimensional force sensor and the yield rate of the product. On the other hand, by forming an uneven structure on the surface of the strain generating body on which the strain gauges are provided, when an external force is introduced, the strain generating body has different stress distributions at the recessed and convex positions of the uneven structure. Furthermore, the strain generated by the strain generating body near the recesses is relatively small, and the strain generated by the strain generating body farther from the recesses is relatively large. In this case, the strain gauges located at the convex parts of the uneven structure can obtain a usable strain to a certain extent and output an electrical signal with a certain strength, which is advantageous in ensuring the measurement performance of the 6-dimensional force sensor while each strain gauge is provided parallel to the reference plane.

[0008] In a second aspect, the present invention provides a strain generating structure comprising at least one strain generating body, wherein the strain generating body is configured to generate strain under the action of an external force, wherein the at least one strain generating body has at least one target surface perpendicular to the axis of the strain generating structure, at least one recess is formed on the at least one target surface and at least one strain gauge is provided on the non-recessed portion, the strain gauge is configured to sense the strain generated by the strain generating body, and the strain gauge is not provided on the non-target surface of each strain generating body.

[0009] In the strain generation structure described above, on the one hand, strain gauges are provided only at non-indented positions on the target surface perpendicular to the axis of the strain generation structure of the strain generating body, and strain gauges are not provided on the non-target surface. This allows for subsequent mounting processes to be carried out using equipment, significantly reducing the difficulty of production and improving the production efficiency and yield rate of the 6D force sensor. On the other hand, by forming indentations on the target surface where the strain gauges are provided, when an external force is introduced, the strain generating body has different stress distributions at the indentation and non-indentation positions. Furthermore, the strain generated by the strain generating body near the indentation is relatively small, while the strain generated by the strain generating body farther from the indentation is relatively large. In this case, strain gauges located on the target surface other than the indentation can obtain a certain degree of usable strain and output an electrical signal with a certain strength. This is advantageous in ensuring the measurement performance of the 6D force sensor while each strain gauge is provided on the target surface.

[0010] In a third aspect, the present invention provides a strain generating structure comprising a first rigid body, a second rigid body, and at least one strain generating body connected between the first and second rigid bodies, wherein the strain generating body is configured to generate strain under the action of an external force, wherein the strain generating body and the portion of the first and second rigid bodies connected to the strain generating body jointly form a passage for transmitting force and / or moment between the first and second rigid bodies, wherein at least one recess is formed in at least one of the passages and at least one strain gauge is provided in the non-recessed portion, wherein the strain gauge is located on the strain generating body and is configured to sense the strain generated by the strain generating body, wherein the strain generating structure has a reference plane perpendicular to its axis, and each of the strain gauges in the strain generating structure is provided parallel to the reference plane.

[0011] In the strain generation structure described above, on the one hand, all strain gauges are provided parallel to the reference plane, thereby enabling the subsequent mounting process to be carried out using equipment, significantly reducing the difficulty of production and improving the production efficiency of the 6D force sensor and the yield rate of the product. On the other hand, by forming at least one recess in the passage for transmitting force and / or moment between the first rigid body and the second rigid body, and providing at least one strain gauge in the non-recessed area, the strain generated by the strain source near the recess is relatively small, and the strain generated by the strain source far from the recess is relatively large. In this case, the strain gauges located outside the recess can obtain a usable strain to a certain extent and output an electrical signal with a certain strength, which is advantageous in ensuring the measurement performance of the 6D force sensor while each strain gauge is provided parallel to the reference plane.

[0012] In a fourth aspect, the present invention provides a strain generating structure comprising at least one strain generating body including a strain beam, wherein the strain beam is configured to generate strain under the action of an external force, wherein at least one recess is formed on the surface of at least one of the strain generating bodies and at least one strain gauge is provided on the non-recessed portion, each of the strain gauges is provided on the strain beam and is configured to sense the strain generated by the strain beam, and the recess satisfies the relation 0.001H ≤ D ≤ 0.8H, A ≥ W, where D represents the depth of the recess, A represents the width of the recess, H represents the height of the strain beam, and W represents the width of the strain beam, and the strain generating structure has a reference plane perpendicular to its axis, and each of the strain gauges of the strain generating structure is provided parallel to the reference plane.

[0013] In the strain generation structure described above, on the one hand, all strain gauges are provided parallel to the reference plane, thereby enabling the subsequent mounting process to be carried out using equipment, significantly reducing the difficulty of production and improving the production efficiency of the 6D force sensor and the yield rate of the product. On the other hand, by forming depressions on the surface of the strain beam on which the strain gauges are provided, and satisfying the above relationship in the depressions, the strain generating body has different stress distributions at the depression and non-depression locations when an external force is introduced. Furthermore, the strain generated by the strain beam close to the depression is relatively small, and the strain generated by the strain beam far from the depression is relatively large. In this case, the strain gauge located at the non-depression location can obtain a usable strain to a certain extent and output an electrical signal with a certain strength, which is advantageous in guaranteeing the measurement performance of the 6D force sensor while each strain gauge is provided parallel to the reference plane.

[0014] In a fifth aspect, the present invention provides a method for manufacturing a strain generating structure, the strain generating structure comprising at least one strain generating body, a first rigid body connected to one end of the strain generating body, and a second rigid body connected to the end of the strain generating body furthest from the first rigid body. The manufacturing method includes: creating at least one through groove in a base body to form a first rigid body and a second rigid body provided at intervals from each other, and at least one strain generating body connected to the first rigid body and the second rigid body; thinning a portion of the strain generating body to form at least one uneven structure; and mounting all strain gauges parallel to a reference plane on the protrusions of at least one of the uneven structures, wherein the strain gauges are configured to sense the strain generated by the strain generating body, and the reference plane is perpendicular to the axis of the strain generating structure.

[0015] In the manufacturing method of the strain generating structure described above, on the one hand, by mounting all strain gauges parallel to the reference plane on the strain generating body, the difficulty of implementation can be greatly reduced, thereby improving the production efficiency and yield rate of the 6-dimensional force sensor. On the other hand, by thinning a portion of the strain generating body and forming an uneven structure on the surface of the strain generating body on which the strain gauges are provided, when an external force is introduced, the strain generating body has different stress distributions at the recessed and convex positions of the uneven structure. Furthermore, the strain generated by the strain generating body near the recesses is relatively small, and the strain generated by the strain generating body farther from the recesses is relatively large. In this case, the strain gauges located at the convex parts of the uneven structure can obtain a usable strain to a certain extent and output an electrical signal with a certain strength. This is advantageous in ensuring the measurement performance of the 6-dimensional force sensor while each strain gauge is mounted parallel to the reference plane.

[0016] In a sixth aspect, the present invention provides a force measurement module comprising any of the strain generating structures described above and a measuring circuit coupled to each of the strain gauges in the strain generating structure, wherein the measuring circuit is configured to measure the direction and magnitude of a force and / or moment applied to the strain generating structure based on an electrical signal originating from at least one of the strain gauges.

[0017] In a seventh aspect, the present invention provides a force sensor including any of the force measurement modules described above.

[0018] In an eighth aspect, the present invention provides a robot including the aforementioned force sensors located at at least one joint position, or at the robot arm, mechanical pull rod position. [Brief explanation of the drawing]

[0019] To more clearly explain the technical solutions of the embodiments or the prior art in this specification, the drawings used in the description of the embodiments or the prior art are briefly introduced below. The drawings described below are only some of the embodiments described in this specification. It is self-evident that those skilled in the art can obtain other drawings based on these drawings without performing inventive work.

[0020] [Figure 1] It is a plan view of the strain generation structure of an embodiment of the present application. [Figure 2] It is a schematic side view of the first concavo-convex structure of an embodiment of the present application. [Figure 3] It is a schematic side view of the second concavo-convex structure of an embodiment of the present application. [Figure 4] It is a schematic side view of the third concavo-convex structure of an embodiment of the present application. [Figure 5] It is a schematic side view of the fourth concavo-convex structure of an embodiment of the present application. [Figure 6] It is a schematic side view of the combined recess of an embodiment of the present application. [Figure 7] It is a plan view of the strain generation structure of another embodiment of the present application. [Figure 8] It is a schematic side view of the combined protrusion of an embodiment of the present application. [Figure 9] It is a schematic view of the reference plane of an embodiment of the present application. [Figure 10] It is a schematic view of each orthographic projection on the reference plane of an embodiment of the present application. [Figure 11] It is a plan view of the strain generation structure of another embodiment of the present application. [Figure 12] It is a schematic side view of the strain generating body of an embodiment of the present application. [Figure 13] It is a schematic structural view of the first specific embodiment of the present application. [Figure 14] It shows the deformation situation of the strain beam when the strain generation structure of the first specific embodiment receives a force / moment parallel to the XY plane. [Figure 15] It shows the deformation situation of the strain beam when the strain generation structure of the first specific embodiment receives a force / moment perpendicular to the XY plane. [Figure 16] This is a schematic diagram of the structure of a second specific embodiment of the present application. [Figure 17] These are schematic side views of various modifications of the strain beam of a third optional embodiment of the present application. [Figure 18] This is a schematic diagram of the resistor type and connection configuration of a fourth optional embodiment of the present application. [Figure 19] This is a plan view of the strain generation structure of another embodiment of the present invention. [Figure 20] This is an enlarged schematic diagram of section K in Figure 19. [Figure 21] This is a schematic diagram of the structure of a PCB substrate according to one embodiment of the present invention. [Figure 22] This is a schematic diagram of the cable winding mechanism of a force measurement module according to one embodiment of the present invention. [Modes for carrying out the invention]

[0021] To make the above-mentioned objectives, features, and advantages of the present invention clearer and easier to understand, specific embodiments of the present invention will be described in detail below in conjunction with the drawings. In the following description, many details are specifically stated for a full understanding of the present invention. Nevertheless, the present invention may be carried out in many other ways different from those described herein, and those skilled in the art can improve it within the bounds of the spirit of the invention, and therefore the present invention is not limited to the specific embodiments disclosed below.

[0022] In the description of this invention, the directions or positional relationships indicated using terms such as "center," "vertical direction," "horizontal direction," "length," "width," "thickness," "top," "bottom," "front," "back," "left," "right," "vertical," "horizontal," "top," "bottom," "inside," "outside," "clockwise," "counterclockwise," "axial direction," "radial direction," and "circumferential direction" are based on the directions or positional relationships shown in the drawings and are used to describe the invention concisely. However, this does not indicate or suggest that the device or element in question necessarily has a specific direction or must be configured and operated in a specific direction, and therefore cannot be considered a limitation on this invention.

[0023] Furthermore, terms such as "first" and "second" used in the description cannot be interpreted as indicating or suggesting relative importance or the number of technical features being referred to. Therefore, features limited by "first" and "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, unless otherwise clearly and specifically defined, "multiple" means at least two, such as two, three, etc.

[0024] When an element is described as being "fixed" or "attached" to another element, it may be directly located on the other element or there may be an intervening element. When one element is described as being "connected" to another element, it may be directly connected to the other element or there may be an intervening element simultaneously. In this specification, the terms "vertical," "horizontal," "up," "down," "left," "right," and similar terms are used for explanatory purposes only and do not imply that these are the only embodiments.

[0025] In the process of realizing the present invention, the inventors found that conventional 6-dimensional force sensors have the following problems. 1. Production efficiency is low, and the yield rate is low. The elastomer components of a 6D force sensor are designed to receive multidimensional forces and moments and transmit deformation to resistors via a beam structure, forming a core part of the mechanical structure design of the 6D force sensor. Elastomer components have been developed to date, with various structures such as T-beam, 4-beam, 8-beam, E-membrane, and 3-beam structures. Of these, the 3-beam structure has advantages such as structural stability, low difficulty of processing, and the ability to achieve miniaturization, and is currently becoming the mainstream structure used in commercial products. However, conventional 3-beam structures require resistors to be attached to all four faces of each strain beam, and the resistors on the opposite side of each strain beam are connected in series to form a half-bridge. However, the resistors on the sides must be attached manually, resulting in low production efficiency and a low yield rate.

[0026] 2. Product suitability is low. Currently, silicon-based semiconductor materials are widely used as the substrate for resistors in commercially available 6D force sensors. While silicon-based semiconductor materials have advantages such as high tensile strength, high sensitivity coefficient, and stable properties, they are difficult to process and produce, requiring processes such as cutting, photolithography, corrosion, and vapor deposition in the chip field. Consequently, the resistors currently used in 6D force sensors are almost all lot products purchased from external sources. These products are all individual resistors, do not have a high degree of integration, and have long axial sizes, resulting in poor suitability for 6D force sensor products.

[0027] Due to the above-mentioned problems, this invention designs a novel 6-dimensional force sensor with the following concept. First, each strain gauge on the elastomer component is mounted on a plane that is easy for the device to operate. Next, the structure of the elastomer component is improved so that when an external force is introduced, the elastomer component generates enough strain on the surface on which the strain gauges are mounted to be utilized by the bridge circuit formed by the strain gauges. Finally, the strain generated on the surface on which the strain gauges are mounted due to the influence of the external force has a determinable trend of change.

[0028] The embodiment of the present application provides an improved strain generation structure from the aforementioned inventive concept. By positioning all strain gauges parallel to the reference plane, the subsequent mounting process can be performed using equipment, significantly reducing the difficulty of production and improving the production efficiency and yield rate of the 6-dimensional force sensor. Furthermore, by forming an uneven surface on the strain-generating body on which the strain gauges are provided, when an external force is introduced, the strain-generating body has different stress distributions at the recessed and convex positions of the uneven structure. Moreover, the strain generated by the strain-generating body near the recesses is relatively small, while the strain generated by the strain-generating body farther from the recesses is relatively large. In this case, the strain gauges located at the convex portions of the uneven structure can obtain a usable strain to a certain extent and output an electrical signal with a certain strength. This is advantageous in ensuring the measurement performance of the 6-dimensional force sensor while positioning each strain gauge parallel to the reference plane.

[0029] As shown in Figures 1 and 2, embodiments of the present invention provide a strain generating structure 100 including at least one strain generating body 110, wherein the strain generating body 110 is configured to generate strain under the action of an external force, wherein at least one uneven structure 111A is formed on the surface of at least one strain generating body 110, the uneven structure 111A has a recess 111A1 and a protrusion 111A2 adjacent to the recess 111A1, at least one strain gauge 112 is provided on the protrusion 111A2 of at least one uneven structure, the strain gauge 112 is configured to sense the strain generated by the strain generating body 110, and the strain generating structure 100 has a reference plane P1 perpendicular to its axis AX1, and each strain gauge 112 of the strain generating structure 100 is provided parallel to the reference plane P1.

[0030] For example, in the uneven structure 111A, the recessed portion 111A1 represents a depressed portion on the surface of the strain-generating body 110, and the convex portion 111A2 represents a portion on the surface of the strain-generating body 110 that protrudes relative to the recessed portion 111A1. For example, referring to Figures 2 to 5, it can be seen that the height of any point on the bottom or side surface of the recessed portion 111A1 is lower than the height of any point on the top surface of the convex portion 111A2, and if no boundary is provided, the recessed portion 111A1 may extend in a direction away from the convex portion 111A2, and the convex portion 111A2 may extend in a direction away from the recessed portion 111A1. Optionally, as shown in Figure 3, the side and bottom surfaces of the recess 111A1 are both flat surfaces, and the side surface of the recess 111A1 is provided at an angle with respect to the reference plane P1, and the angle α between these two surfaces may be greater than 0° and less than 180°, in particular when the angle is 90°, the recess 111A1 and the convex portion 111A2 form the uneven structure shown in Figure 2, optionally, as shown in Figure 4, the surface of the recess 111A1 may be curved, optionally, the surface of the recess 111A1 is smoothly connected to the surface of the convex portion 111A2, in which case at least one of the surfaces of the recess 111A1 and the convex portion 111A2 is curved, as shown in Figure 5, both the surface of the recess 111A1 and the surface of the convex portion 111A2 are curved and smoothly connected, optionally, the uneven structure may be a notch formed on the edge of the strain generating body 110 (not shown). By forming a recess 111A1 on the surface of at least one strain generating body 110, when an external force is introduced, a stress distribution can be formed that is more concentrated on the corresponding strain generating body 110 in the recess 111A1. As a result, the strain on the convex portion closer to the recess 111A1 is smaller than the strain on the convex portion 111A2 further away from the recess 111A1. In this case, the strain gauge 112 provided on the convex portion 111A2 can obtain a certain amount of usable strain from the strain generating body 110, and furthermore, a voltage signal can be output by the bridge circuit, and the output voltage can be changed proportionally to the force applied to the strain generating structure 100.

[0031] Illustratively, multiple strain gauges are provided on the protrusions of at least one uneven structure, provided that at least two strain gauges are spaced apart. Spaced-apart placement of at least two strain gauges is advantageous for measuring forces and moments in different directions. Optionally, taking Figure 1 as an example, at least one uneven structure 111A is formed on the surface of the lower right strain generating body 110, and two strain gauges 112 are spaced apart on the protrusions 111A2 of 111A, perpendicular to the radial direction of the strain generating structure 100. This is advantageous for making full use of the lateral space of the strain generating body 110 and reducing the volume of the strain generating structure 100. Naturally, as shown in Figure 7, at least one uneven structure 111A may be formed on the surface of the lower right strain generating body 110, and two strain gauges 112 may be sequentially spaced apart on the protrusions 111A2 of 111A, radially in the direction of the strain generating structure 100.

[0032] Illustratively, as shown in Figures 1 and 6, when a plurality of uneven structures are formed on the surface of the strain generating body 110, the recesses 111A1 of at least one pair of adjacent uneven structures 111A may be connected or integrally form a combined recess with protrusions on both sides, and at least one strain gauge is provided on one or both protrusions of at least one combined recess. Referring to Figure 6, it can be seen that both sides of the combined recess are bounded by the protrusions 111A2 of two uneven structures 111A, thereby limiting the length of the combined recess. Optionally, as shown in Figure 7, the combined recess may be a first groove 111 crossing the surface of the strain generating body 110, or a second groove 114 forming an opening on the surface of the strain generating body 110. Optionally, referring to Figure 7, the two side walls of the second groove 114 have a first arc structure, which is advantageous in avoiding stress concentration and transferring stress more effectively to the strain generating body 110, as well as improving the overload capacity of the strain generating structure 100.

[0033] Furthermore, as shown in Figures 7 and 8, when a plurality of combination recesses are formed on the surface of the strain generating body 110, the protrusions between at least one pair of adjacent combination recesses may be connected or the combination protrusion 113 may be integrally formed, and at least two strain gauges 112 are provided at intervals on the combination protrusion 113. This is advantageous for measuring forces and moments in different directions, and also advantageous for the strain gauges 112 to obtain more usable strain, thereby improving the measurement accuracy of the 6-dimensional force sensor. Furthermore, at least two strain gauges 112 are sequentially provided at intervals on the combination protrusion 113 along the direction in which the pair of combination recesses are aligned. This is advantageous for effectively measuring forces and moments by making full use of the strain distribution provided by the combination recesses, and also advantageous for making the strain generating body 110 narrower, thereby making the strain generating body 110 more prone to generating strain, and advantageous for measuring smaller forces and / or moments. For example, referring to Figure 8, it can be seen that both sides of the combined protrusion 113 are bounded by the combined recess 111 and the combined recess 114, respectively, which limits the length of the combined protrusion 113. Also, the phrase "formed integrally" in this application may be replaced with "integral molding".

[0034] Exemplary, the strain gauge 112 may include one or more Wheatstone bridges. When it includes multiple Wheatstone bridges, the distribution of the multiple Wheatstone bridges may be arbitrarily arranged or each may straddle an arbitrary angle, for example, distributed vertically or horizontally. The Wheatstone bridge may be one of a Wheatstone full bridge circuit, a Wheatstone half bridge circuit, or a Wheatstone quarter bridge circuit. A larger output voltage can be obtained when the Wheatstone bridge is a Wheatstone full bridge circuit. In particular, when the Wheatstone bridge is a Wheatstone half bridge circuit, the circuit and resistors on the circuit board of the 6-dimensional force sensor may be configured to form a Wheatstone full bridge circuit, or the Wheatstone half bridge circuit may be used directly without configuration. When the Wheatstone bridge is a Wheatstone quarter bridge circuit, the circuit and resistors on the circuit board of the 6-dimensional force sensor may be configured to form a Wheatstone full bridge circuit or a Wheatstone half bridge circuit, but of course, the Wheatstone quarter bridge circuit may be used directly without configuration.

[0035] Exemplary, a Wheatstone bridge may consist of several resistors, and structurally, the resistors may include at least one of a single resistor, a half-bridge resistor, or a full-bridge resistor, of which the integration density of a full-bridge resistor is greater than that of a half-bridge resistor, and the integration density of a half-bridge resistor is greater than that of a single resistor. The higher the integration density of the strain gauges, the more advantageous it is in meeting the mounting requirements of a smaller installation space and higher accuracy for the 6-dimensional force sensor. Specifically, a single resistor includes a resistor and upper and lower pads connected to opposite ends of the resistor, respectively; a half-bridge resistor includes two resistors connected in series by an intermediate pad and upper and lower pads connected to opposite ends of the two series-connected resistors, respectively; and a full-bridge resistor includes two half-bridge resistors connected in series by a bridge pad. Therefore, the statement "the strain gauge is mounted parallel to the reference plane" can be rephrased as "the distribution surface of each resistance in the strain gauge is parallel to the reference plane," and since each resistance in the strain gauge is mounted on the convex part of the uneven structure, it can be further guaranteed that the surface forming the concave part and the mounting surface of the strain gauge are the same surface, thereby guaranteeing both the measurement performance of the 6D force sensor and the requirement that the strain gauge be mounted on a perfectly flat surface. Furthermore, when a full bridge is constructed using highly integrated resistors (half-bridge resistors or full-bridge resistors), it is possible to not only guarantee the consistency of the resistance values ​​of the resistors but also eliminate the influence of temperature on the measurement. When combined with the subsequent printing and adhesive coating process on the same surface, it can be guaranteed that the thickness of the adhesive coated at different target locations will be the same, which is advantageous in further reducing errors in the full-bridge circuit, thereby significantly improving the measurement accuracy of the 6D force sensor.

[0036] In some embodiments of the present application, as shown in Figures 9 and 10, the strain generating structure 100 has a reference plane P2 parallel to the external force introduction end face of the strain generating body 110, the external force introduction end face 115 of the strain generating body having at least one uneven structure formed thereon has a first orthographic projection S1 on the reference plane P2, the cross section of the strain generating body 110 corresponding to the recess 111A1 of at least one uneven structure 111A has a second orthographic projection S2 on the reference plane P2, and the first orthographic projection S1 covers the second orthographic projection S2. This is advantageous in ensuring that after the external force is transmitted to the strain generating body 110, the stress distribution on the strain gauge installation surface is influenced by the recess 111A1, resulting in a stress distribution (strain distribution) where the stress is smaller (strain is smaller) closer to the recess 111A1 and larger (strain is larger) further away from the recess 111A1. If the first orthographic projection S1 does not cover the second orthographic projection S2, it is likely to affect the stress distribution on the strain gauge installation surface, and further affect the measurement accuracy of the 6-dimensional force sensor. Furthermore, as shown in Figures 9 and 10, the cross-section of the strain-generating body 110 corresponding to the convex portion 111A2 of at least one uneven structure 111A has a third orthographic projection S3 in the reference plane P2, and the first orthographic projection S1 covers the third orthographic projection S3. Since the second orthographic projection S2 in the reference plane P2 of the cross-section of the strain-generating body 110 corresponding to the concave portion 111A1 is clearly smaller than the third orthographic projection S3 in the reference plane P2 of the cross-section of the strain-generating body 110 corresponding to the convex portion 111A2, it is advantageous to have the third orthographic projection S3 cover the first orthographic projection S1, thereby further ensuring the strain distribution generated by the concave portion 111A1 when an external force is introduced.

[0037] In some embodiments of the present application, referring again to Figure 1, the recessed depth of the recesses 111A1 of the uneven structure 111A is less than or equal to a first set value. In principle, as the recessed depth of the recesses 111A increases, the small strain areas on the surface of the strain body 110 gradually increase, eventually resulting in insufficient available strain on the convex portions 111A2. Therefore, to avoid the small strain areas formed on the surface of the strain body 110 becoming too large, there is an upper limit (i.e., a first set value) to the recessed depth of the recesses 111A1. Optionally, the recessed depth represents the height difference between the lowest point of the recess and the lowest point of the convex portion in a single uneven structure. Optionally, the recessed depth D of the recesses 111A may be determined based on the height of the strain body 110 (i.e., the thickness of the strain body 110 along the z-direction). Optionally, as shown in Figure 1, when a combination recess 111 is formed in the strain generating body 110, the width of the combination recess 111 may be determined based on the width of the strain generating body 110, where the width represents the length perpendicular to the radial direction of the strain generating structure 100.

[0038] In some embodiments of the present invention, referring again to Figure 1, in at least one strain gauge 112, the distance of the resistance closest to the recess 111A1 of the corresponding uneven structure 111A to the recess 111A1 is less than or equal to a second set value. This ensures that the resistance in the strain gauge 112 is not too far from the recess 111A1, and that the resistance closest to the recess 111A1 of the corresponding uneven structure 111A is located in a small strain region formed on the surface of the strain-generating body 110, further ensuring that the strain gauge 112 obtains a certain degree of usable strain to achieve effective measurement of force and moment.

[0039] In some embodiments of the present invention, referring again to Figure 1, in at least one strain gauge 112, the distance of the resistance furthest from the recess 111A1 of the corresponding uneven structure 111A to the recess 111A1 is greater than or equal to a third set value. Due to the influence of the recess 111A1, the strain on the surface of the strain-generating body 110 decreases in the direction approaching the recess 111A1 and increases in the direction away from the recess 111A1, thereby ensuring that the resistance furthest from the recess 111A1 of the corresponding uneven structure 111A is located in a large strain region formed on the surface of the strain-generating body 110, and furthermore, that the strain gauge 112 obtains a certain degree of usable strain, enabling effective measurement of force and moment.

[0040] In some embodiments of the present invention, referring to Figure 7, the strain generating body 110 has a ridged structure 111A and a ridged structure 111B, and at least one strain gauge 112 is provided on a combined ridged portion 113 formed by connecting or integrally forming the ridges of the two, wherein the distance of at least one resistance of the strain gauge 112 to the center of the combined ridged portion 113 is less than or equal to a fourth set value. Because at least one strain gauge 112 is provided on the combined ridged portion 113 (located between the two recesses), the strain is greatest in the central region of the combined ridged portion 113 when an external force is introduced to the strain generating body 110, thereby ensuring that at least one resistance of the strain gauge 112 is located in the central region on the combined ridged portion 113 where the strain is greatest, and further ensuring that the strain gauge 112 obtains a usable strain to some extent, thereby enabling effective measurement of force and moment.

[0041] In some embodiments of the present invention, the strain generating body 110 has a first surface and a second surface that are opposite to each other and parallel to the reference plane P1, and at least one uneven structure is formed on the first surface and / or the second surface, and at least one strain gauge 112 is provided on the protrusion 111A2 of at least one uneven structure 111A of each strain generating body 110. This is advantageous in that it fully utilizes the strain distribution provided by the recess 111A1, increases the number of strain gauges 112 installed, thereby further improving the measurement accuracy of the 6-dimensional force sensor, and also satisfies the requirement that the strain gauges 112 are provided on a perfectly flat surface, thereby improving production efficiency and the yield rate of products.

[0042] In some embodiments of the present application, with reference to Figures 1 and 7, the strain generating structure further includes a first rigid body 120 connected to one end of a strain generating body 110, a second rigid body 130 connected to the other end of the strain generating body 110 farther from the first rigid body 120, and at least one through groove 140 provided between the first rigid body 120 and the second rigid body 130 and alternately with the strain generating body 110 along the circumferential direction of the strain generating structure 100, wherein the strain generating body 110 generates strain when a force and / or moment between the first rigid body 120 and the second rigid body 130 is transmitted to the strain generating body 110. Optionally, the first rigid body 120 may be connected to an external fixed component, and the second rigid body 130 may be connected to an external attachment component, and it is ensured that there is no connection between the first rigid body 120 and the second rigid body 130 when no force is applied. As a result, by applying forces to the first rigid body 120 and the second rigid body 130, a tendency for relative motion can be created between the first rigid body 120 and the second rigid body 130. When the force and / or moment between the first rigid body 120 and the second rigid body 130 is transmitted to the strain generating body 110, strain is generated in the strain generating body 110.

[0043] Optionally, the first rigid body 120, each strain-generating body 110, and the second rigid body 130 are integrally molded. Optionally, the strain-generating structure 100 may be manufactured using an elastic material as the base material. Optionally, the elastic material may be one of stainless steel, aircraft-grade aluminum, or titanium alloy. This is advantageous because, on the one hand, the elastic material can guarantee the sensitivity of strain sensing, and on the other hand, the integrally molded structure is advantageous in guaranteeing the overload resistance of the strain-generating structure 100. Furthermore, when stainless steel is used for manufacturing, the manufacturing cost of the strain-generating structure 100 is lower than that of aircraft-grade aluminum and titanium alloy, which is advantageous in realizing the industrial production of 6-dimensional force sensors. Note that the first rigid body 120, each strain-generating body 110, and the second rigid body 130 may each be independent parts, and they may be connected to form the strain-generating structure 100.

[0044] Optionally, the through groove 140 has a first groove wall in the first rigid body 120, and the through groove 140 has a second groove wall in the second rigid body 130, wherein at least a portion of the contour of the second groove wall conforms to at least a portion of the contour of the first groove wall. This prevents destructive buffering between the first and second groove walls in the event of overload, thereby improving the overload resistance of the strain generating structure 100 and extending the service life of the 6-dimensional force sensor.

[0045] Optionally, the strain generating body 110 includes an elastic structure and a strain beam connected to the elastic structure, wherein one end of the elastic structure is connected to a first rigid body, the other end farther from the first rigid body is connected to the strain beam, and the other end of the strain beam farther from the elastic structure is connected to a second rigid body, wherein the convex portion of at least one convex structure of at least one strain generating body is located on the strain beam. The elastic structure may be a thin plate-like structure, which allows it to function as a floating beam, that is, when an external force is applied to the strain generating structure 100, it causes bending deformation, reducing interdimensional interference of the 6-dimensional force sensor, and thus introducing an elastic structure helps to improve the measurement accuracy and stability of the sensor. Optionally, the strain generating body further includes a first connection connected to the elastic structure of the strain beam and a second connection connected to the second rigid body of the strain beam, thereby the uneven structure on the strain generating body 110 may be provided on at least one of the first connection, the strain beam, and the second connection, and it is sufficient that the protrusions of at least one of the uneven structures are located on the strain beam, thereby ensuring that the stress distribution (strain distribution) produced by the recesses of the uneven structure when an external force is introduced is formed on the strain beam and can be sensed by a strain gauge.

[0046] Optionally, a notch groove is provided through the elastic structure, and the notch groove extends inward along the radial direction of the strain generating structure 100, away from the elastic structure on one side of the first rigid body 120, and connects to the strain beam. Providing the notch groove is advantageous in blocking the external stress transmission path and concentrating the stress more on the strain beam, thereby increasing the strain available to the strain gauge 112 and improving the measurement performance of the 6-dimensional force sensor.

[0047] Optionally, a smoothly continuous second arc structure is provided at the position where the first rigid body 120 is connected to the elastic structure, and / or a smoothly continuous third arc structure is provided at the position where the elastic structure is connected to the strain beam, and / or a smoothly continuous fourth arc structure is provided at the position where the strain beam is connected to the second rigid body 130. Providing these arc structures is advantageous in preventing stress from concentrating at the connection points of each component, in transferring more stress to the strain beam, and increasing the available strain, as well as improving the overload capacity of the strain generating structure 100.

[0048] The first rigid body 120 and the second rigid body 130 are optionally positioned at different heights along the axis of the strain generating structure 100. This is advantageous for forming a cavity for housing the circuit board.

[0049] Optionally, as shown in Figure 7, a through-hole 131 may be provided in the central region of the second rigid body 130. This is advantageous for wiring inside the robot arm and robot, enabling concealed wiring of the robot arm and robot. If internal wiring is not required, the through-hole may be filled to eliminate the need for via holes.

[0050] Optionally, the first rigid body 120 has a first assembly connected to the first object, and the second rigid body 130 has a second assembly connected to the second object, wherein the force and / or moment between the first and second objects is transmitted to the strain generating structure 100 by the first and second assemblies. With this setup, the strain generating structure 100 can be coupled to an external object to receive and introduce external forces. Optionally, the assembly may be a screw hole, a locking groove, etc. Optionally, the first object may be the upper protective housing of a 6D force sensor or a flange bolt of a robot arm / robot, and the second object may be the lower protective housing of a 6D force sensor or a flange bolt of a robot arm / robot.

[0051] Embodiments of the present application provide, from the aforementioned inventive concept, another improved strain generating structure 200, as shown in Figures 11 and 12, comprising at least one strain generating body 110', the strain generating body 110' configured to generate strain under the action of an external force, wherein at least one strain generating body 110' has at least one target surface 116 perpendicular to the axis AX2 of the strain generating structure 200, at least one recessed portion 111' formed on the at least one target surface 116 and at least one strain gauge 112 provided on the non-recessed portion, the strain gauge 112 configured to sense the strain generated by the strain generating body 110', and no strain gauge 112 is provided on the non-target surface of each strain generating body 110'.

[0052] In the strain generation structure 200 described above, on the one hand, strain gauges 112 are provided only at non-indented positions on the target surface perpendicular to the axis AX2 of the strain generation structure 200 of the strain generating body 110', and strain gauges 112 are not provided on the non-target surface. This allows for subsequent mounting processes to be carried out using equipment, significantly reducing the difficulty of production and improving the production efficiency and yield rate of the 6-dimensional force sensor. On the other hand, by forming indentations on the target surface where strain gauges 112 are provided, the strain generating body 110' will indent when an external force is introduced. The recessed portion 111' and the non-recessed portion have different stress distributions. Furthermore, the strain generated by the strain generating body 110' near the recessed portion 111' is relatively small, while the strain generated by the strain generating body 110' farther from the recessed portion 111' is relatively large. In this case, the strain gauges 112 located on the target surface other than the recessed portion 111' can obtain a usable strain to some extent and output an electrical signal with a constant strength. This is advantageous in ensuring the measurement performance of the 6-dimensional force sensor while each strain gauge 112 is provided on the target surface.

[0053] In some embodiments of the present invention, a plurality of depressions 111' are formed on at least one target surface, and at least two strain gauges 112 are spaced apart on the target surface between at least one pair of adjacent depressions 111'. This is advantageous for measuring forces and moments in different directions, and also advantageous for improving the measurement accuracy of the 6-dimensional force sensor by allowing the strain gauges 112 to obtain more available strain.

[0054] In some embodiments of the present application, the side surface of at least one recessed portion 111' is provided at an angle to the surface of the non-recessed portion, or the surface of at least one recessed portion 111' is curved, or the surface of at least one recessed portion 111' is smoothly connected to the surface of the non-recessed portion.

[0055] In some embodiments of the present invention, referring again to Figure 11, the strain generating body 110' has a first target surface 116 and a second target surface 117 that are opposite each other and perpendicular to the axis AX2 of the strain generating structure 200, wherein at least one recessed portion 111' is formed on the first target surface 116 and at least one strain gauge 112 is provided on the non-recessed portion, and / or at least one recessed portion 111' is formed on the second target surface 117 and at least one strain gauge 112 is provided on the non-recessed portion. This is advantageous in fully utilizing the strain distribution brought about by the recessed portion 111A1, increasing the number of strain gauges 112 installed, thereby further improving the measurement accuracy of the 6-dimensional force sensor, and also in satisfying the requirement that the strain gauges 112 are provided on a perfectly flat surface, thereby improving production efficiency and the yield rate of products.

[0056] In some embodiments of the present invention, the strain generating structure 200 has a reference plane (not shown, but similar to a reference plane P2) parallel to the external force introduction end face of the strain generating body 110', the external force introduction end face of the strain generating body 110' where at least one depression 111' is formed has a fourth orthogonal projection on the reference plane, the cross section of the strain generating body 110' corresponding to at least one depression 111' has a fifth orthogonal projection on the reference plane, and the fourth orthogonal projection covers the fifth orthogonal projection. This is advantageous in ensuring that after the external force is transmitted to the strain generating body 110, the stress distribution on the strain gauge installation surface will be influenced by the depression 111', resulting in a stress distribution (strain distribution) where the stress is smaller (strain is smaller) closer to the depression 111' and larger (strain is larger) further away from the depression 111'. If the fourth orthogonal projection does not cover the fifth orthogonal projection, it is likely to affect the stress distribution on the strain gauge installation surface and further affect the measurement accuracy of the 6-dimensional force sensor.

[0057] An embodiment of the present application, based on the aforementioned inventive concept, provides another improved strain generating structure 1, as shown in Figure 13, further comprising a first rigid body 2, a second rigid body 6, and at least one strain generating body connected between the first rigid body 2 and the second rigid body 6, wherein the strain generating body is configured to generate strain under the action of an external force. However, the strain generating body and the portion of the first rigid body 2 and the portion of the second rigid body 6 connected to the strain generating body jointly form a passage R for transmitting force and / or moment between the first rigid body 2 and the second rigid body 6 (shown by an elliptical dotted line), at least one recess is formed in at least one passage R (as shown in Figure 16, one strain groove is formed in each passage R), and at least one strain gauge 5 is provided in the non-recessed portion. However, the strain gauge 5 is located on the strain generating body and is configured to sense the strain generated by the strain generating body. The strain generating structure 1 has a reference plane perpendicular to its axis, and each strain gauge 5 of the strain generating structure 1 is provided parallel to the reference plane.

[0058] In the strain generation structure 1 described above, on the one hand, all strain gauges 5 are provided parallel to the reference plane, thereby enabling the subsequent mounting process to be carried out using equipment, significantly reducing the difficulty of production and improving the production efficiency of the 6-dimensional force sensor and the yield rate of the product. On the other hand, by forming at least one recess in the passage R for transmitting force and / or moment between the first rigid body 2 and the second rigid body 6, and providing at least one strain gauge in the non-recessed area, the strain generated by the strain source near the recess is relatively small, and the strain generated by the strain source far from the recess is relatively large. In this case, the strain gauges located outside the recess can obtain a usable strain to a certain extent and output an electrical signal with a certain strength, which is advantageous in ensuring the measurement performance of the 6-dimensional force sensor while each strain gauge is provided parallel to the reference plane.

[0059] In some embodiments of the present invention, referring again to Figure 13, one recess on the passage R (i.e., a second strain groove 9) is formed in the second rigid body 6, which is advantageous in miniaturizing the strain generating structure 1 and thereby expanding the range of application of the strain generating structure 1. Exemplarily, the width of the second strain groove 9 (i.e., the length perpendicular to the radial direction of the strain generating structure 1) is greater than the width of the strain beam 3.

[0060] In some embodiments of the present invention, referring to Figure 13, at least one passage R is provided with at least two recesses (e.g., a first strain groove 8 and a second strain groove 9) spaced apart along the direction of extension of the passage R, and at least two strain gauges 5 are provided between at least one pair of adjacent recesses along the direction of extension of the passage R. This is advantageous for measuring forces and moments in different directions, and also advantageous for the strain gauges 112 to obtain more available strain, thereby improving the measurement accuracy of the 6-dimensional force sensor.

[0061] An embodiment of the present application, as shown in Figures 19 and 20, further provides another improved strain generating structure 300, which, based on the inventive concept described above, further includes at least one strain generating body 110' including a strain beam 118, wherein the strain beam 118 is configured to generate strain under the action of an external force, wherein at least one recessed portion 111' is formed on the surface of at least one strain generating body 110' and at least one strain gauge 112 is provided on the non-recessed portion, and each strain gauge 112 is connected to the strain beam 118 The strain generating structure is provided and configured to sense the strain generated by the strain beam 118, and the recessed portion 111' satisfies the relationship 0.001H≦D≦0.8H, A≧W, where D represents the depth of the recessed portion 111', A represents the width of the recessed portion 111', H represents the height of the strain beam 118, and W represents the width of the strain beam 118, and the strain generating structure has a reference plane P3 perpendicular to its axis AX3, and each strain gauge 112 of the strain generating structure 300 is provided parallel to the reference plane P3.

[0062] In the strain generation structure 300 described above, on the one hand, all strain gauges 112 are provided parallel to the reference plane P3, thereby enabling the subsequent mounting process to be carried out using equipment, significantly reducing the difficulty of production and improving the production efficiency of the 6-dimensional force sensor and the yield rate of the product. On the other hand, recessed portions 111' are formed on the surface of the strain generating body 110' on which the strain gauges 112 are provided, and the above relational equation is satisfied in the recessed portions 111'. As a result, when an external force is introduced, the strain generating body 110 has different stress distributions at the recessed portion 111' position and the non-recessed portion position. Furthermore, the strain generated by the strain beam 118 close to the recessed portion 111' is relatively small, and the strain generated by the strain beam 118 far from the recessed portion 111' is relatively large. In this case, the strain gauge 112 located at the non-recessed portion position can obtain a usable strain to some extent and output an electrical signal with a certain strength. This is advantageous in ensuring the measurement performance of the 6-dimensional force sensor while each strain gauge 112 is provided parallel to the reference plane P3.

[0063] Exemplarily, the depth D of at least one recess 111' may be one of 0.001H, 0.01H, 0.1H, 0.2H, 0.4H, 0.6H, 0.8H. The magnitude of the depth D affects the range of the small strain region on the strain beam 118.

[0064] In some embodiments of the present application, referring to FIG. 20, the strain gauge 112 further satisfies the relational expression 0 < P ≤ 0.4L, where P represents the distance between the strain gauge 112 and the edge of the recess 111', L represents the length of the strain beam 118, and / or the strain gauge 112 satisfies the relational expression 0 < Q ≤ 0.4W, where Q represents the distance between the strain gauge 112 and the side edge of the strain beam 118. Exemplarily, P may be one of 0.05L, 0.1L, 0.2L, 0.3L, 0.4L. Exemplarily, Q may be one of 0.05W, 0.1W, 0.2W, 0.3W, 0.4W. In principle, the smaller the values of P and Q, the better. Also, if the values of P and Q are very large, it will cause a decrease in the signal output intensity of the bridge arm of the Wheatstone bridge.

[0065] The inventive concept and effects of the present application will be further described below using two specific embodiments.

[0066] (First Specific Embodiment) As shown in Figure 13, the strain generating structure 1 is fabricated from a single cylindrical metal substrate and includes a first rigid body 2, a second rigid body 6, an elastic structure 4, and a strain beam 3. However, one end of the elastic structure 4 is connected to the first rigid body 2, and the other end farther from the first rigid body 2 is connected to the strain beam, and the other end of the strain beam 3 farther from the elastic structure 4 is connected to the second rigid body 6. Thus, the first rigid body 2 and the second rigid body 6 are connected only by the elastic structure 4 and the strain beam 3. The strain generating structure 1 has a total of three elastic structures 4 and three strain beams 3, all of which are polyhedral beam structures. The first rigid body 2 is connected to each of the three elastic structures 4, each elastic structure 4 extending inward to form a "T" shape. The three strain beams 3 are connected to the "T" shape formed by the extension of the elastic structures 4. The three strain generating bodies, consisting of the strain beams 3 and elastic structures 4, may be uniformly distributed along the circumferential direction of the strain generating structure 1 or may have non-uniform angled connections.

[0067] Three through grooves 12 are provided between the first rigid body 2 and the second rigid body 6. These three through grooves 12 are uniformly distributed or have non-uniform angled positions. Furthermore, the first rigid body 2 and the second rigid body 6 are located at different heights along the axis of the strain generating structure 1. Together with the elastic structure 4 and the strain beam 3, they form a cavity for housing the PCB substrate. The first rigid body 2 is the outer rigid structure of the 6-dimensional force sensor and is used to transmit forces and / or moments originating from components connected in the positive direction of the Z axis. In this case, the force transmission path is from the first rigid body 2 to the elastic structure 4 and then to the upper end of the strain beam 3. The second rigid body 6 is an internal rigid structure of the 6-dimensional force sensor and is used to transmit forces and / or moments originating from components connected in the negative direction of the Z axis. In this case, the force transmission path is from the second rigid body 6 to the bottom end of the strain beam 3, and thus the strain of the three strain beams 3 can characterize the force state acting on the 6-dimensional force sensor. In this specific embodiment, there are continuous arc structures between the second rigid body 6 and the strain beam 3, between the elastic structure 4 and the strain beam 3, and between the elastic structure 4 and the first rigid body 2, which is advantageous in avoiding stress concentration and improving the overload capacity of the strain generating structure 1. In this specific embodiment, a through-hole 10 is made in the center of the second rigid body 6. The central through-hole 10 is used for wiring inside the robot arm to realize concealed wiring of the robot arm and humanoid robot. If internal wiring is not required, the through-hole 10 may be filled and configured without via holes.

[0068] Continuing with Figure 13, a first strain groove 8 is provided where the strain beam 3 is connected to the elastic structure 4, and a second strain groove 9 is provided where the strain beam 3 is connected to the second rigid body 6. The first strain groove 8 and the second strain groove 9 are formed by milling as shallow groove structures having polygonal or rounded polygonal shapes. At least one strain gauge 5 is installed between the first strain groove 8 and the second strain groove 9. The strain gauge 5 converts the strain of the strain beam 3 into an electrical signal. The strain gauge 5 and the strain beam 3 are solidified integrally at high temperature using a non-metallic material, thereby enabling the strain of the strain beam 3 to be completely transmitted to the strain gauge 5. The role of the first strain groove 8 and the second strain groove 9 is to gradually reduce the strain of the strain beam 3 near the strain grooves and gradually increase the strain of the strain beam 3 farther away from the strain grooves when a force is applied to the strain generating structure. By utilizing this characteristic and configuring a bridge circuit for the strain gauge 5, the output voltage of the strain gauge 5 can be changed proportionally to the force applied to the elastomer. The first strain groove 8 and the second strain groove 9 may have various application forms, appearances, and shapes, including, but not limited to, bosses, grooves, etc., milled onto the upper and lower surfaces of the strain beam 3.

[0069] Figure 14 shows the deformation of the strain beam 3 when the strain generating structure 1 is subjected to a force / moment parallel to the XY plane. When the elastomer is subjected to a force / moment parallel to the XY plane, the strain beam 3 divides along a neutral layer perpendicular to the XY plane, obtaining strains in opposite directions. As shown in Figure 14, the left region of the strain beam 3 is compressed, and the right region is stretched. In this case, the resistance value of the resistor on the left side of the strain gauge 5 decreases, and the resistance value of the resistor on the right side increases. The strain beam 3 is divided into three regions: 1A, 1B, and 1C. Region 1A is close to the first strain groove 8, region 1C is close to the second strain groove 9, and region 1B is between regions 1A and 1C. Due to the action of the first strain groove 8 and the second strain groove 9, the strain in regions 1A and 1C is smaller than the strain in region 1B. In this case, the change in the resistance value of the resistors located in regions 1A and 1C of the strain gauge 5 is smaller than the change in the resistance value of the resistor located in region 1B. Ultimately, the strain gauge 5 can utilize the difference in resistance values ​​of the resistors to construct a voltage output that is proportional to the strain.

[0070] Figure 15 shows the deformation of the strain beam 3 when the strain generating structure 1 is subjected to a force / moment perpendicular to the XY plane. When the strain generating structure 1 is subjected to a force / moment perpendicular to the XY plane, the strain beam 3 is divided along a neutral layer parallel to the XY plane, obtaining strains in opposite directions. As shown in Figure 15, the upper surface of the strain beam 3 is tensed, and the lower surface is compressed. In this case, the resistance values ​​of the resistors on the left and right sides of the strain gauge 5 increase in sync. The strain beam 3 is divided into three regions: 2A, 2B, and 2C. Region 2A is close to the first strain groove 8, region 2C is close to the second strain groove 9, and region 2B is between regions 2A and 2C. Due to the action of the first strain groove 8 and the second strain groove 9, the strain in regions 2A and 2C is smaller than the strain in region 2B. In this case, the change in the resistance value of the resistors located in regions 2A and 2C of the strain gauge 5 is smaller than the change in the resistance value of the resistor located in region 2B. Ultimately, the strain gauge 5 can utilize the difference in resistance values ​​of the resistors to construct a voltage output that is proportional to the strain.

[0071] (Second specific example) As shown in Figure 16, the overall structure of the second specific embodiment is substantially the same as that of the first specific embodiment, but the second specific embodiment differs in that it comprises six elastic structures 4 and corresponding six strain beams 3, and each strain beam 3 corresponds to one strain groove. Specifically, referring to Figure 16, three of the six strain beams 3 are provided with corresponding first strain grooves 8, and three of the strain beams 3 are provided with corresponding second strain grooves 9. A strain gauge 5 may be mounted below the first strain groove 8 or above the second strain groove 9. The strain gauge 5 converts the strain of the strain beam 3 into an electrical signal, and the strain gauge 5 and strain beam 3 are solidified integrally at high temperature using a non-metallic material, thereby completely transmitting the strain of the strain beam 3 to the strain gauge 5. The roles of the first strain groove 8 and the second strain groove 9 are the same as those of the strain generation structure 1 of the three-beam structure six-dimensional force sensor described above, so their explanation is omitted here.

[0072] The following provides a first specific embodiment as an example, and several optional embodiments that can be used in the first and second specific embodiments described above.

[0073] (First optional embodiment) As shown in Figure 13, several through-holes are made in the elastic structure 4, and the through-holes are connected to each other by notched grooves 7. When the 6D force sensor is subjected to a force or moment parallel to the XY plane, the strain beam 3 can obtain a strain in the opposite direction along the neutral layer perpendicular to the XY plane, and when the 6D force sensor is subjected to a force or moment perpendicular to the XY plane, the strain beam 3 can obtain a strain in the opposite direction along the neutral layer parallel to the XY plane.

[0074] (Second optional embodiment) As shown in Figure 13, several main screw holes 14 are drilled in the first rigid body 2, and the first rigid body 2 is connected by the main screw holes 14 to the upper protective housing of the 6D force sensor or directly to the flange bolts of the robot arm. The first rigid body 2 is further drilled with several main pin holes 15 for positioning and preventing reverse mounting when attaching and detaching the upper protective housing of the 6D force sensor and the flange of the robot arm. The second rigid body 6 is further drilled with several secondary screw holes 16, and the second rigid body 6 is connected by the secondary screw holes 16 to the lower protective housing of the 6D force sensor or directly to the flange bolts of the robot arm. The second rigid body 6 is further drilled with several secondary pin holes 20 for positioning and preventing reverse mounting when attaching and detaching the lower protective housing of the 6D force sensor and the flange of the robot arm. The second rigid body 6 is further drilled with several PCB mounting screw holes 17, and the PCB board is fixed to the second rigid body 6 using bolts. The mechanical connection method for the first rigid body 2 and the second rigid body 6 to the outside includes, but is not limited to, connections using bolts, and may also include locking, welding, etc.

[0075] (Third optional embodiment) Figure 17 shows various modifications of the strain beam 3 and various optional layouts of the strain gauges 5 provided on the strain beam 3.

[0076] In Figure 17a, the first strain groove 8 and the second strain groove 9 are both located on the upper surface of the strain beam 3, each strain beam 3 uses one strain gauge 5, and the strain gauge 5 is mounted between the first strain groove 8 and the second strain groove 9. This is the first modified form of the strain beam 3. In Figure 17b, the first strain groove 8 and the second strain groove 9 are both located on the lower surface of the strain beam 3, each strain beam 3 uses one strain gauge 5, and the strain gauge 5 is mounted between the first strain groove 8 and the second strain groove 9. This is the second modified form of the strain beam 3. In Figure 17c, the first strain groove 8 and the second strain groove 9 are located on the upper and lower surfaces of the strain beam 3, respectively, and both the first strain groove 8 and the second strain groove 9 are located at the upper end of the strain beam 3, each strain beam 3 uses two strain gauges 5, and the strain gauges 5 are mounted below the first strain groove 8 and the second strain groove 9. This is the third modified form of the strain beam 3. In Figure 17d, the first strain groove 8 and the second strain groove 9 are located on the upper and lower surfaces of the strain beam 3, respectively, and both the first strain groove 8 and the second strain groove 9 are located at the bottom end of the strain beam 3. Each strain beam 3 uses two strain gauges 5, and the strain gauges 5 are mounted above the first strain groove 8 and the second strain groove 9. This is a fourth modification of the strain beam 3. In Figure 17e, the first strain groove 8 and the second strain groove 9 are located on the upper and lower surfaces of the strain beam 3, respectively, or the first strain groove 8 is located on the lower surface of the strain beam 3 and the second strain groove is located on the upper surface of the strain beam 3, and the first strain groove 8 is located at the upper end of the strain beam 3 and the second strain groove 9 is located at the bottom end of the strain beam 3. Each strain beam 3 uses two strain gauges 5, and the strain gauges 5 are mounted between the first strain groove 8 and the second strain groove 9. This is a fifth modification of the strain beam 3. In Figure 17f, the first strain groove 8 and the second strain groove 9 are located on the upper and lower surfaces of the strain beam 3, respectively. The first strain groove 8 is located at both the upper and lower ends of the strain beam 3, and similarly, the second strain groove 9 is located at both the upper and lower ends of the strain beam 3. Each strain beam 3 uses two strain gauges 5, and the strain gauges 5 are mounted between the first strain groove 8 and the second strain groove 9. This is a sixth modified example of the strain beam 3.

[0077] (Fourth optional embodiment) Figure 18 shows plan views of various resistor structures. The resistor may be a sheet-like element made by etching diffused silicon.

[0078] Figure 18a shows a single-unit resistor 510, which consists of an upper pad 5101, a silicon sheet resistor 5102, and a lower pad 5103. The silicon sheet resistor 5102 is a stress-sensitive element, and its resistance value can change according to the stress it receives. The silicon sheet resistor 5102 is located in the center and is connected to the upper pad 5101 and the lower pad 5103, respectively. The single-unit resistor 510 achieves an electrical circuit connection to the outside through the upper pad 5101 and the lower pad 5103. Figure 18b shows a half-bridge resistor 511, which consists of two single-unit resistors 510 connected in series. An intermediate pad 5111 connects the two single-unit resistors 510, and the half-bridge resistor 511 achieves an electrical circuit connection to the outside through the upper pad 5101, the intermediate pad 5111, and the lower pad 5103. In Figure 18c, the first full-bridge resistor 512 consists of two half-bridge resistors 511 connected in series. Generally, the first bridge pad 5121 integrally connects the lower pads 5103 of the two half-bridge resistors 511 to form a tail-to-tail connection. In this case, the first full-bridge resistor 512 achieves an external electrical circuit connection through its two upper pads 5101, two intermediate pads 5111, and the first bridge pad 5121. In particular, the first bridge pad 5121 may integrally connect the upper pads 5101 of the two half-bridge resistors 511 to form a head-to-head connection. In this case, the first full-bridge resistor 512 achieves an external electrical circuit connection through its first bridge pad 5121, two intermediate pads 5111, and two lower pads 5103.In Figure 18, d represents the second full-bridge resistor 513, which consists of two half-bridge resistors 511 connected in series. The second bridge pad 5131 integrally connects the lower pads 5103 and upper pads 5101 of the two half-bridge resistors 511, forming a head-to-tail connection. In this case, the second full-bridge resistor 513 achieves an electrical circuit connection to the outside through one upper pad 5101, two intermediate pads 5111, one lower pad 5103, and the second bridge pad 5131. The first Wheatstone bridge 501 and the second Wheatstone bridge 502 may be constructed using one or more of the above-mentioned resistors.

[0079] Embodiments of the present application also provide a method for manufacturing a strain generating structure, the manufacturing method comprising: creating at least one through groove in a base body to form a first rigid body and a second rigid body provided at intervals from each other, and at least one strain generating body connected to the first rigid body and the second rigid body; thinning a portion of the strain generating body to form at least one uneven structure; and mounting all strain gauges parallel to a reference plane on the protrusions of at least one of the uneven structure, wherein the strain gauges are configured to sense the strain generated by the strain generating body, and the reference plane is perpendicular to the axis of the strain generating structure.

[0080] In the above manufacturing method, on the one hand, by mounting all strain gauges parallel to the reference plane on the strain generating body, the difficulty of implementation can be greatly reduced, thereby improving the production efficiency and yield rate of the 6-dimensional force sensor. On the other hand, by thinning a portion of the strain generating body to form an uneven structure on the surface of the strain generating body on which the strain gauges are provided, when an external force is introduced, the strain generating body has different stress distributions at the recessed and convex positions of the uneven structure. Furthermore, the strain generated by the strain generating body near the recesses is relatively small, and the strain generated by the strain generating body farther from the recesses is relatively large. In this case, the strain gauges located at the convex parts of the uneven structure can obtain a usable strain to a certain extent and output an electrical signal with a certain strength. This is advantageous in ensuring the measurement performance of the 6-dimensional force sensor while each strain gauge is mounted parallel to the reference plane.

[0081] In some embodiments of this application, strain gauges may be attached using an adhesive. Optionally, the adhesive may be glue, glass powder, or the like. When using glue for attachment, a uniform thickness of glue may be applied to the surface of the strain body using a printer, thereby avoiding the uneven thickness of the glue affecting the resistance value of the resistors in the bridge.

[0082] Embodiments of the present invention also provide a force measurement module comprising any of the strain generating structures described above and a measurement circuit coupled to each strain gauge in the strain generating structure, wherein the measurement circuit is configured to measure the direction and magnitude of the force and / or moment applied to the strain generating structure based on an electrical signal originating from at least one strain gauge.

[0083] Exemplary, the strain generating structure further includes a first rigid body connected to one end of a strain generating body, a second rigid body connected to the other end of the strain generating body farther from the first rigid body, and at least one through groove formed between the first and second rigid bodies and alternately provided with the strain generating body along the circumferential direction of the strain generating structure, wherein the strain generating body generates strain when a force and / or moment between the first and second rigid bodies is transmitted to the strain generating body, the first and second rigid bodies are located at different heights along the axis of the strain generating structure, and the measurement circuit includes a circuit board provided in a cavity formed by the first rigid body, each strain generating body, and the second rigid body, wherein wiring grooves corresponding to each strain gauge are provided in the circuit board, and bridge pads connected to the pads of the strain gauges are provided near the wiring grooves.

[0084] Optionally, the measurement circuit includes a PCB board, which is placed within a cavity inside the strain generating structure and is used to collect and amplify strain electrical signals, convert them into force and moment signals, and calculate their direction.

[0085] Optionally, as shown in Figure 21, several polygonal grooves 19 are made in the PCB substrate 13, and the area surrounded by each polygonal groove 19 corresponds to the area where the strain gauge 5 of each strain beam 3 is located. Mounting through-holes 22 are made in the PCB substrate 13 at the position where it is connected to the second rigid body 6 to realize the mechanical connection between the PCB substrate 13 and the second rigid body 6. Bolt via holes 21 are made in the PCB substrate 13 at positions corresponding to the secondary screw holes 16, allowing mounting bolts for the lower protective housing or robot arm flange to pass through the PCB substrate 13, thereby realizing various mechanical connection methods for the robot arm.

[0086] Optionally, as shown in Figure 22, the PCB board 13 uses bonding technology to connect metal wires from the pads of the strain gauge 5 to the pads of the PCB board. Several bridge pads are provided on the PCB board 13 in this embodiment, and depending on the type of resistor used in the first Wheatstone bridge 501 and the second Wheatstone bridge 502 on the strain gauge 5, several metal wires 18 are connected from the pads of the resistor to the bridge pads 23 of the PCB board 13 using the corresponding bonding technology, one end of the metal wire 18 is fixed to the pad of the resistor, and the other end is fixed to the bridge pad 23 of the PCB board 13, thereby achieving an electrical connection of the strain gauge 5 to the PCB board 13.

[0087] Embodiments of the present invention also provide a force sensor including any of the force measurement modules described above. The force sensor is advantageous in ensuring measurement accuracy and reducing labor, thereby improving production efficiency and the yield rate of products, and is also advantageous in reducing size and production costs.

[0088] Embodiments of the present invention also provide a robot including the aforementioned force sensors located at at least one joint position, or at the robot arm, mechanical pull rod position.

[0089] For example, the robots mentioned above may include at least one of the following: industrial collaborative robots, quadruped robots, transport robots, surgical robots, and humanoid robots. For instance, when 6D force sensors are attached to the wrists and ankles of a humanoid robot for tasks such as assembling, grinding and polishing, transporting and towing robot arms in industrial production, remote surgery in the medical field, wind tunnel testing and on-orbit assembly of space stations in the aerospace field, and research on robot arm control algorithms and development of teaching aids in the education and scientific research field, they provide the robot with mechanically collected signals and assist in the force control algorithms of the humanoid robot, making them core components of the humanoid robot assembly.

[0090] As can be seen from the above embodiments of this application, it is possible to develop a 6-dimensional force sensor product that is highly accurate, high-resolution, miniaturized, lightweight, and low-cost based on the inventive concept of this application, and furthermore, a wide range of applications in the field of robotics can be expected.

[0091] Furthermore, it should be understood that any numbers or characteristics relating to certain embodiments described and protected in this application are, as may be, modified by the terms “approximately,” “about,” “approximately,” or “basic.” For example, unless otherwise specified, “approximately,” “about,” “approximately,” or “basic” may indicate that the value described using them varies by ±20%. Accordingly, in some embodiments, all numerical parameters used in the specification and claims are approximate values, and such approximations may vary depending on the characteristics of the particular embodiment. In some embodiments, numerical parameters are limited to a specified number of significant digits, and a standard method of maintaining the number of significant digits is used. While the numerical ranges and parameters used to confirm the breadth of the range in some embodiments of this application are approximate values, in specific embodiments, such numbers are set as accurately as possible.

[0092] The technical features of the embodiments described above can be combined in any way, and for the sake of brevity, not all possible combinations of the technical features of the embodiments described above are described. However, any combination of these technical features that does not result in a contradiction is considered to fall within the scope described herein.

[0093] The embodiments described above merely illustrate some of the embodiments of the present invention and, although described in relatively specific and detailed terms, should not be considered as limitations on the scope of the invention. Those skilled in the art will note that several modifications and improvements may be made as long as they do not deviate from the concept of the present invention, and all of these will fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention is in accordance with the claims set forth below.

Claims

1. A strain-generating structure, It includes at least one strain-generating body configured to generate strain under the action of an external force, however, At least one uneven structure is formed on the surface of at least one strain-generating body, the uneven structure has a recess and a protrusion adjacent to the recess, at least one strain gauge is provided on the protrusion of at least one of the uneven structures, and the strain gauge is configured to sense the strain generated by the strain-generating body. and, The strain generating structure is characterized in that it has a reference plane perpendicular to its axis, and each of the strain gauges of the strain generating structure is provided parallel to the reference plane.

2. The strain generating structure according to claim 1, characterized in that a plurality of strain gauges are provided on the protruding portion of at least one of the uneven structures, provided that at least two of the strain gauges are provided at intervals.

3. The strain generating structure according to claim 2, characterized in that at least two of the strain gauges are provided sequentially at intervals along the direction away from / towards the recess of the uneven structure.

4. The strain generating structure according to claim 1, wherein a plurality of the uneven structures are formed on the surface of at least one strain generating body, provided that at least one pair of adjacent uneven structures have recesses connected or integrally form a combined recess with protrusions on both sides, and at least one strain gauge is provided on one or both protrusions of at least one combined recess.

5. The strain generating structure according to claim 4, characterized in that a plurality of combination recesses are formed on the surface of at least one strain generating body, provided that each protrusion between at least one pair of adjacent combination recesses is connected or the combination protrusion is integrally formed, and at least two strain gauges are provided at intervals on the combination protrusions.

6. The strain generating structure according to claim 5, characterized in that at least two of the strain gauges are sequentially provided at intervals on the combined protrusions along the direction in which the pair of combined recesses are aligned.

7. The strain generating structure according to any one of claims 4 to 6, characterized in that the type of the combined recess includes at least one of a first recess that crosses the surface of the strain generating body and a second recess that forms an opening on the surface of the strain generating body.

8. The strain generating structure according to any one of claims 4 to 6, characterized in that at least one side wall of the combination recess has a smoothly continuous first arc structure.

9. The strain generating structure according to claim 1, characterized in that at least one strain generating body is provided opposite to one other and has a first surface and a second surface parallel to the reference plane, at least one of the uneven structures is formed on the first surface and / or the second surface, and at least one of the strain gauges is provided on the protrusions of at least one of the uneven structures.

10. The distortion generating structure according to claim 1, characterized in that at least one of the uneven structures has a side surface of a recess that is positioned at an angle with respect to the reference surface, or at least one of the uneven structures has a curved surface on the recess, or at least one of the uneven structures has a surface of a recess that is smoothly connected to the surface of a convex portion.

11. The strain generating structure according to claim 1, characterized in that the recessed depth of at least one of the uneven structures is less than or equal to a first set value.

12. The strain generating structure according to claim 1, characterized in that the strain generating structure has a reference plane parallel to the external force introduction end face of the strain generating body, the external force introduction end face of the strain generating body on which at least one of the uneven structures is formed has a first orthogonal projection onto the reference plane, the cross-section of the strain generating body corresponding to a recess of at least one of the uneven structures has a second orthogonal projection onto the reference plane, and the first orthogonal projection covers the second orthogonal projection.

13. The strain generating structure according to claim 12, characterized in that the cross-section of the strain generating body corresponding to at least one of the protrusions of the uneven structure has a third orthogonal projection on the reference plane, and the first orthogonal projection covers the third orthogonal projection.

14. The strain gauge includes at least one Wheatstone bridge, and the Wheatstone bridge includes at least one of a single resistor, a half-bridge resistor, and a full-bridge resistor. however, The single-unit resistor includes a resistor and upper and lower pads connected to opposite ends of the resistor, respectively. The half-bridge resistor includes two resistors connected in series by an intermediate pad, and an upper pad and a lower pad connected to opposite ends of the two resistors connected in series. The strain generating structure according to any one of claims 1 to 6, characterized in that the full-bridge resistor includes two half-bridge resistors connected in series by a bridge pad.

15. In at least one of the strain gauges, The strain generating structure according to claim 14, characterized in that the distance of the resistor closest to the corresponding recess of the uneven structure to the recess is less than or equal to a second set value, and / or the distance of the resistor furthest from the corresponding recess of the uneven structure to the recess is greater than or equal to a third set value.

16. At least one of the strain-generating bodies has a plurality of the uneven structures, However, at least one pair of adjacent protrusions of the aforementioned uneven structure are connected or a combined protrusion is integrally formed, and at least one strain gauge is provided on the combined protrusion. However, the strain generating structure according to claim 14 is characterized in that the distance of at least one resistor in at least one strain gauge to the center of the combined protrusion is less than or equal to the fourth set value.

17. The aforementioned strain generation structure is A first rigid body connected to one end of the strain generating body, A second rigid body connected to the end of the strain-generating body that is farther from the first rigid body, The structure further includes at least one through groove, which is formed between the first rigid body and the second rigid body and is alternately provided with the strain generating body along the circumferential direction of the strain generating structure, however, The strain generating structure according to claim 1, characterized in that the strain generating body generates strain when a force and / or moment between the first rigid body and the second rigid body is transmitted to the strain generating body.

18. The strain generating structure according to claim 17, characterized in that the through groove has a first groove wall in the first rigid body, and the through groove has a second groove wall in the second rigid body, wherein the contour of at least a part of the second groove wall conforms to the contour of at least a part of the first groove wall.

19. The strain generating body includes an elastic structure and a strain beam connected to the elastic structure. However, one end of the elastic structure is connected to the first rigid body, the other end farther from the first rigid body is connected to the strain beam, and the other end of the strain beam farther from the elastic structure is connected to the second rigid body. However, the strain generating structure according to claim 17 or 18, characterized in that at least one of the convex portions of the uneven structure of at least one of the strain generating bodies is located on the strain beam.

20. A smoothly continuous second arc structure is provided at the position where the first rigid body is connected to the elastic structure, and / or A smoothly continuous third arc structure is provided at the position where the elastic structure is connected to the strain beam, and / or The strain generating structure according to claim 19, characterized in that a smoothly continuous fourth arc structure is provided at the position where the strain beam is connected to the second rigid body.

21. The strain generating structure according to claim 19, characterized in that a notch groove is provided through the elastic structure, the notch groove extends inward along the radial direction of the strain generating structure away from the elastic structure on one side of the first rigid body and is connected to the strain beam.

22. The strain generating structure according to claim 17 or 18, wherein the first rigid body has a first assembly connected to a first object, and the second rigid body has a second assembly connected to a second object, wherein the force and / or moment between the first object and the second object is transmitted to the strain generating structure by the first assembly and the second assembly.

23. A strain-generating structure, It includes at least one strain-generating body configured to generate strain under the action of an external force, however, At least one of the strain generating bodies has at least one target surface perpendicular to the axis of the strain generating structure, at least one recessed portion is formed on at least one of the target surfaces, and at least one strain gauge is provided on the non-recessed portion, and the strain gauge is configured to sense the strain generated by the strain generating body. and, A strain generation structure characterized in that the strain gauge is not provided on the non-target surface of each of the strain generating bodies.

24. The strain generating structure according to claim 23, characterized in that a plurality of depressions are formed on at least one target surface, and at least two strain gauges are provided at intervals on the target surface between at least one pair of adjacent depressions.

25. The strain generating structure according to claim 23, characterized in that the strain generating structure has a reference plane parallel to the external force introduction end face of the strain generating body, the external force introduction end face of the strain generating body on which at least one recess is formed has a fourth orthogonal projection onto the reference plane, the cross-section of the strain generating body corresponding to at least one recess has a fifth orthogonal projection onto the reference plane, and the fourth orthogonal projection covers the fifth orthogonal projection.

26. A strain-generating structure, It includes a first rigid body, a second rigid body, and at least one strain-generating body connected between the first and second rigid bodies, wherein the strain-generating body is configured to generate strain under the action of an external force. however, The strain generating body and the portion of the first rigid body and the portion of the second rigid body connected to the strain generating body jointly form a passage for transmitting force and / or moment between the first rigid body and the second rigid body, with at least one recess formed in at least one of the passages and at least one strain gauge provided in the non-recessed portion. however, The strain gauge is located on the strain generating body and is configured to sense the strain generated by the strain generating body. The strain generating structure is characterized in that it has a reference plane perpendicular to its axis, and each of the strain gauges of the strain generating structure is provided parallel to the reference plane.

27. A strain-generating structure, It includes at least one strain-generating body containing a strain beam, wherein the strain beam is configured to generate strain under the action of an external force, however, At least one recess is formed on the surface of at least one of the strain generating bodies, and at least one strain gauge is provided on the non-recessed portion, and each strain gauge is provided on the strain beam and configured to sense the strain generated by the strain beam. and, The aforementioned depression satisfies the relationship 0.001H ≤ D ≤ 0.8H, A ≥ W, where D represents the depth of the depression, A represents the width of the depression, H represents the height of the strain beam, and W represents the width of the strain beam. and, The strain generating structure is characterized in that it has a reference plane perpendicular to its axis, and each of the strain gauges of the strain generating structure is provided parallel to the reference plane.

28. The strain gauge further satisfies the relation 0 ≤ P ≤ 0.4L, where P represents the distance between the strain gauge and the edge of the depression, L represents the length of the strain beam, and / or The strain generating structure according to claim 27, characterized in that the strain gauge satisfies the relation 0 ≤ Q ≤ 0.4W, where Q represents the distance between the strain gauge and the side edge of the strain beam.

29. A method for manufacturing a strain-generating structure, The strain generating structure includes at least one strain generating body, a first rigid body connected to one end of the strain generating body, and a second rigid body connected to the end of the strain generating body that is farther from the first rigid body. The aforementioned manufacturing method is To form at least one through groove in the base body, and to create the first rigid body and the second rigid body which are spaced apart, and at least one strain-generating body which is connected to the first rigid body and the second rigid body, A portion of the strain-generating body is thinned to form at least one uneven structure, A method for manufacturing a strain generating structure, comprising mounting all strain gauges parallel to a reference plane on at least one protrusion of the uneven structure, wherein the strain gauges are configured to sense the strain generated by the strain generating body, and the reference plane is perpendicular to the axis of the strain generating structure.

30. A force measurement module comprising a strain generating structure according to any one of claims 1 to 28, and a measuring circuit coupled to each of the strain gauges in the strain generating structure, wherein the measuring circuit is configured to measure the direction and magnitude of the force and / or moment applied to the strain generating structure based on an electrical signal originating from at least one of the strain gauges.

31. A force sensor characterized by including the force measurement module described in claim 30.

32. A robot characterized by including a force sensor according to claim 31, provided at at least one joint position, or at the position of a robot arm or mechanical pull rod.

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