Design of droplet spray nozzles

Abstract

In one embodiment, the nozzle assembly includes a body having an inner surface that forms an internal cavity within the body. The assembly also includes a gas inlet located within the body, a fluid inlet located within the body, and a mixing chamber located within the internal cavity of the body such that an annular gap is formed between the inner and outer surfaces of the mixing chamber, the mixing chamber may include a body mixing region within the mixing chamber, one or more gas ports tangentially aligned with the inner surface of the mixing chamber for fluid connection of the gas inlet to the mixing chamber, a fluid port fluidly connected to the body mixing region of the mixing chamber and the fluid inlet of the body, and an outlet fluidly connected to the body mixing region configured to deliver a mixed fluid.

Claims

1. A nozzle assembly for semiconductor manufacturing, The main body, An inner surface defining an internal cavity located within the main body, A first inlet is located within the main body and is fluidly connected to the internal cavity, A second inlet is located inside the main body and is fluidly connected to the internal cavity. The main unit, An insert that is partially positioned within the aforementioned internal cavity and is a monolithic body, A mixing chamber disposed within the aforementioned internal cavity, A first port, which is positioned through the side wall of the insert, connects the first inlet of the main body to the mixing chamber, The second inlet of the main body is connected to the mixing chamber via a second port and A mixing chamber including, The outlet is fluidly connected to the mixing chamber. Includes inserts and A nozzle assembly comprising:

2. The nozzle assembly according to claim 1, wherein the second port is substantially parallel to the outlet of the insert.

3. The nozzle assembly according to claim 1, wherein the first port includes a cross-sectional area at least twice as large as the cross-sectional area of ​​the second port.

4. The system further comprises an accelerator located inside the insert and on the opposite side of the outlet, the accelerator being Accelerator ports located on the ends of the stem The nozzle assembly according to claim 1, including the following:

5. The nozzle assembly according to claim 4, wherein the stem of the accelerator extends into the mixing chamber.

6. The nozzle assembly according to claim 1, wherein the insert further includes an outlet, the outlet being formed by an accelerating tube, and the accelerating tube being positioned between the outlet and the mixing chamber.

7. The aforementioned accelerating tube is The first expansion chamber and A second expansion chamber is concentric with the first expansion chamber, positioned between the first expansion chamber and the outlet, and having a diameter greater than the diameter of the first expansion chamber. The nozzle assembly according to claim 6, including the following:

8. The nozzle assembly according to claim 1, further comprising a seal disposed between the main body and the insert, wherein the main body includes a shoulder portion having a chamfered surface disposed between the inner surface and the outer surface of the main body.

9. The nozzle assembly according to claim 8, wherein the shoulder portion is configured to apply axial force and radial force.

10. A nozzle assembly for semiconductor manufacturing, The main body, An inner surface defining an internal cavity located within the main body, A first inlet is located within the main body and is fluidly connected to the internal cavity, A first shoulder portion is disposed between the inner surface and the outer surface of the main body, A second inlet is located inside the main body and is fluidly connected to the internal cavity. The main unit, An insert that is partially positioned within the aforementioned internal cavity and is a monolithic body, A mixing chamber formed within the insert, A first port is positioned tangentially on the inner surface of the mixing chamber, which fluidly connects the first inlet of the main body to the mixing chamber, The second inlet of the main body is connected to the mixing chamber via a second port and A mixing chamber including, The outlet, which is fluidly connected to the mixing chamber, A seal positioned in contact with the second shoulder of the main body, wherein the second shoulder is positioned between the mixing chamber and the second inlet, and the second shoulder is configured to apply radial and axial forces to the seal, and Includes inserts and A nozzle assembly comprising:

11. The nozzle assembly according to claim 10, wherein the outlet is located on the outside of the main body.

12. The nozzle assembly according to claim 10, further comprising a seal disposed between the body and the insert, wherein the body includes the first shoulder portion having a chamfered surface disposed between the inner surface and the outer surface of the body.

13. The nozzle assembly according to claim 12, wherein the first shoulder portion is configured to apply axial force and radial force when the insert is screwed into the main body.

14. The nozzle assembly according to claim 10, further comprising a seal disposed within the internal cavity of the main body and between the second shoulder and the insert, wherein the second shoulder has a chamfered surface disposed between the inner surface and the second inlet.

15. A nozzle assembly for semiconductor manufacturing, The main body, An inner surface defining an internal cavity located within the main body, A first inlet is located within the main body and is fluidly connected to the internal cavity, A first shoulder portion is disposed between the inner surface and the outer surface of the main body, A second inlet is located inside the main body and is fluidly connected to the internal cavity. The main unit, An insert that is partially positioned within the aforementioned internal cavity and is a monolithic body, A mixing chamber disposed within the aforementioned internal cavity, The first inlet of the main body is fluidly connected to the mixing chamber, and the first port is perpendicular to the axis of the mixing chamber, The mixing chamber is fluidly connected to the outlet that defines the acceleration tube. Mixing chamber Includes inserts, An accelerator located inside the insert and on the opposite side of the outlet, wherein the first port is located between the outlet and the accelerator, A stem extending within the mixing chamber, A second port located on the opposite side of the stem connects the second inlet of the main body to the mixing chamber, The accelerator port located on the opposite side of the second port and Accelerators and A nozzle assembly comprising:

16. The nozzle assembly according to claim 15, wherein the stem has an outer diameter that is three times or more larger than the inner diameter of the stem.

17. The nozzle assembly according to claim 15, wherein the outlet has a diameter of approximately four times or more the inner diameter of the stem.

18. The nozzle assembly according to claim 15, wherein the acceleration tube fluidly couples the mixing chamber to the outlet.

19. The nozzle assembly according to claim 15, wherein the diameter of the accelerating tube increases along the length of the accelerating tube.

20. The nozzle assembly according to claim 15, wherein the distance between the accelerator port and the accelerating tube is less than half the length of the accelerating tube.

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