Process tank temperature measuring device and substrate processing device

Abstract

The present invention provides a process tank temperature measuring device and a substrate processing device. The process tank temperature measuring device is for detecting the temperature of a chemical solution in a process tank having a process tank opening at its upper end. The process tank temperature measuring device comprises a temperature measuring section and an extension section that are sequentially connected and electrically conductive to each other. One end of the temperature measuring section away from the extension section is sealed to form a protective tube bottom, and one end of the extension section away from the temperature measuring section is open to form a protective tube inlet. The protective tube has a preset angle between the axial direction of the temperature measuring section and the axial direction of the extension section. The temperature measuring probe is provided inside the temperature measuring section and located at the bottom of the protective tube. The bottom of the protective tube is immersed in the chemical solution of the process tank and positioned so that the temperature measuring probe detects the temperature of the chemical solution in the process tank. The protective tube inlet is positioned outside of the area directly above the process tank opening. Thus, a process tank temperature measuring device with a simple structure and excellent corrosion resistance has been realized.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor tank-type cleaning devices, and further relates to a process tank temperature measuring device and a substrate processing device.

Background Art

[0002] During operation, a tank-type wafer cleaning machine needs to monitor the chemical solution temperatures at different depths inside the process tank in real time, and accordingly adjust the power of the heater to achieve closed-loop control of the process temperature. However, there is a large amount of strong acid and strong alkali in the process tank, and a general temperature measurement probe cannot operate for a long time in a strong corrosive environment. To avoid corrosion of the temperature measurement probe, in the conventional method, it is common to wrap a layer of corrosion-resistant material outside the temperature measurement probe.

[0003] Currently, there are mainly two methods to wrap an anti-corrosion material outside the probe.

[0004] As Method 1, a layer of standard PFA (tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer, Polyfluoroalkoxy) tube is coated outside the probe, and then one end immersed in the chemical solution is sealed. This method has the following two drawbacks. 1. Since the PFA tube is a flexible tube, its supportability is not strong, so this structure is easily crushed in the pipeline and may cause liquid leakage. 2. One end immersed in the chemical solution is a PFA tube经过后续二次加工, which may cause leakage and easily corrode the temperature measurement probe.

[0005] Method 2 involves covering the outside of the probe with a single layer of standard quartz tube, sealing one end immersed in the chemical solution, and connecting the other end with a non-standard connector to bring out the signal transmission line of the measuring probe. This method has the following two drawbacks: 1. Because the non-standard connector is located directly above the chemical solution tank, acidic or alkaline vapors may penetrate along the connection point between the quartz tube and the non-standard connector during the production process, thereby corroding the measuring temperature probe. 2. The manufacturing technology for the non-standard connector is relatively complex, and the manufacturing cost is relatively high.

[0006] Therefore, it is necessary to improve the process tank temperature measuring device of conventional tank-type wafer washing machines to meet the requirements for a product with a simple structure and excellent corrosion resistance. [Overview of the project]

[0007] The present invention has been made in view of the above technical problems, and aims to provide a process tank temperature measuring device for substrate processing devices that has a simple structure and excellent corrosion resistance. To achieve the above objective, the present invention provides a process tank temperature measuring device and a substrate processing device.

[0008] In some embodiments, the above-described process tank temperature measuring device is for detecting the temperature of a chemical liquid in a process tank having a process tank opening at its upper end, and comprises a temperature measuring section and an extension section that are sequentially connected and electrically conductive to each other, with one end of the temperature measuring section away from the extension section sealed to form a protective tube bottom, and one end of the extension section away from the temperature measuring section open to form a protective tube inlet, and a protective tube having a preset angle between the axial direction of the temperature measuring section and the axial direction of the extension section, and a temperature measuring probe provided inside the temperature measuring section and located at the bottom of the protective tube, wherein the bottom of the protective tube is immersed in the chemical liquid of the process tank and is arranged so that the temperature measuring probe detects the temperature of the chemical liquid, and the protective tube inlet is located outside of directly above the process tank opening.

[0009] In some embodiments, the substrate processing device described above includes a process tank for containing the chemical solution required for the substrate undergoing liquid processing, and the process tank temperature measuring device described above.

[0010] Compared to the prior art, the process tank temperature measuring device claimed for protection in this application comprises a protective tube and a temperature measuring probe. The protective tube comprises a temperature measuring section and an extension section that are sequentially connected and electrically conductive to each other. One end of the temperature measuring section away from the extension section is sealed to form the bottom of the protective tube, and the other end of the extension section away from the temperature measuring section is open to form the inlet of the protective tube. Furthermore, there is a predetermined angle between the axial direction of the temperature measuring section and the axial direction of the extension section. The temperature measuring probe is provided inside the temperature measuring section and located at the bottom of the protective tube. By positioning the bottom of the protective tube so as to be immersed in a chemical solution, the temperature measuring probe can detect the temperature of the chemical solution. Furthermore, by positioning the inlet of the protective tube outside the direct surface of the process tank opening, it is possible to prevent the inlet from being directly exposed above the process tank opening and corroded by chemical solution vapors. Additionally, it is possible to prevent the chemical solution from entering the protective tube and corroding the temperature measuring probe, thus avoiding prolonged erosion by strong acid or strong alkali vapors. As a result, the structure is simple and highly corrosion-resistant. [Brief explanation of the drawing]

[0011] The features and performance of the present invention will be further described by the following embodiments and accompanying drawings. [Figure 1] This is one embodiment of the process tank temperature measuring device of the present invention. [Figure 2] This is one embodiment of the process tank temperature measuring device of the present invention. [Figure 3A] This is a schematic diagram of the three-dimensional structure of a fixing bracket in a process tank temperature measuring device according to one embodiment of the present invention. [Figure 3B] Figure 3A shows the explosion diagram. [Figure 4] This is a schematic diagram of the explosion structure of a process tank temperature measuring device according to one embodiment of the present invention. [Figure 5]This is a schematic diagram of the entire cross-sectional structure of a process tank temperature measuring device according to one embodiment of the present invention, before assembly. [Figure 6] This is a schematic diagram of the entire cross-sectional structure of a process tank temperature measuring device after assembly according to one embodiment of the present invention. [Modes for carrying out the invention]

[0012] Hereinafter, in order to more clearly explain embodiments of the present invention or technical proposals in the prior art, specific embodiments of the present invention will be described with reference to the accompanying drawings. Clearly, the drawings in the following description represent only some embodiments of the present invention, and those skilled in the art can, without paying the labor of inventive step, obtain other drawings and other embodiments based on these drawings.

[0013] To simplify the drawings, each drawing schematically shows only the parts relating to the present invention and does not represent the actual structure of the product. Furthermore, to make the drawings easy to understand, in some drawings, only one of the components having the same structure or function is schematically illustrated, or only one is shown. In this application, "one" may mean not only "only one," but also "one or more."

[0014] In this specification, unless otherwise explicitly defined and limited, the terms “attachment,” “connection,” and “connection” should be understood in a broad sense, for example, a fixed connection, a detachable connection, or an integral connection. Furthermore, it may be a mechanical connection or an electrical connection. Furthermore, it may be a direct connection, an indirect connection via an intermediate medium, or a connection between the interiors of two elements. Those skilled in the art will understand the specific meaning of these terms in the present invention depending on the specific circumstances.

[0015] Furthermore, in the description of this application, the terms "first" and "second" are used solely to distinguish between the descriptions and cannot be understood as indicating or implying relative importance.

[0016] As shown in Figure 1, a process tank temperature measuring device 200 according to one embodiment of the present invention is disclosed. In practical terms, the process tank temperature measuring device 200 is installed on the process tank 100 to measure the temperature of the chemical liquid inside the process tank 100. Specifically, this process tank temperature measuring device 200 comprises a protective tube 210 and a temperature measuring probe 220, where one end of the protective tube 210 is located inside the process tank 100 and the other end of the protective tube 210 is located outside the process tank 100. To detect the temperature of the chemical liquid inside the process tank 100, the temperature measuring probe 220 is positioned inside the protective tube 210 and at one end of the protective tube 210 inside the process tank 100.

[0017] Specifically, the protective tube 210 is a hollow, curved tube and comprises a temperature measuring section 211 and an extension section 212 that are sequentially connected and electrically conductive to each other. One end of the temperature measuring section 211 away from the extension section 212 is sealed to form the bottom of the protective tube 214, and the other end of the extension section 212 away from the temperature measuring section 211 is open to form the inlet of the protective tube 213. There is a predetermined angle between the axial direction of the temperature measuring section 211 and the axial direction of the extension section 212. The temperature measuring probe 220 is provided inside the temperature measuring section 211 and is located at the bottom of the protective tube 214.

[0018] As shown in Figures 1 and 4, the temperature measuring probe 220 is elongated and has a fixed length. One end of the temperature measuring probe 220 is located at the bottom 214 of the protective tube, and the other end is located inside the pipe of the temperature measuring unit 211. In some embodiments, one end of the temperature measuring probe 220 abuts against the bottom 214 of the protective tube. Typically, since the temperature measuring probe 220 has a certain degree of rigidity, the length of the temperature measuring unit 211 is greater than the length of the temperature measuring probe 220, and it is necessary that the temperature measuring probe 220 be in a perfectly vertical position when the process tank temperature measuring device 200 is in use. The temperature measuring unit 211 can fix the temperature measuring probe 220 at a preset height to detect the chemical liquid temperature within a corresponding height range, and the protective tube 210 can prevent the temperature measuring probe 220 from being corroded by the chemical liquid in the process tank 100.

[0019] Of these, the bottom portion 214 of the protective tube is immersed in the chemical solution of the process tank 100, and the temperature measuring probe 220 is positioned to detect the temperature of the chemical solution in the process tank 100. Furthermore, the protective tube inlet 213 is positioned outside the opening of the process tank 100. As shown in Figure 1, since the protective tube inlet 213 extends away from the process tank opening 110, corrosion of the protective tube inlet 213, which is directly exposed above the process tank opening 110, by chemical solution vapors can be avoided, and furthermore, the chemical solution can be prevented from entering the protective tube 210 and corroding the temperature measuring probe 220.

[0020] This application does not impose any restrictions on the length of the temperature measuring section 211 and the extension section 212. Referring to Figure 1, the length of the temperature measuring section 211 should be such that the bottom of the protective tube 214 reaches below the liquid level of the chemical solution and the temperature measuring probe 220 is located entirely inside the process tank 100, and the length of the extension section 212 should be such that the inlet of the protective tube 213 is away from the process tank opening 110.

[0021] This application does not impose any restrictions on the method of fixing the protection tube 210. The protection tube 210 may be fixed above the process tank 100 by, for example, brackets, suspension devices, or the like.

[0022] In some embodiments, the process tank temperature measuring device 200 of this application is provided at one end near the protection tube inlet 213 of the extension portion 212, and further includes an interface assembly 240 for protecting the protection tube inlet 213. Accordingly, the interface assembly 240 is also located at a spatial position away from the process tank opening 110. According to such a setting, it is possible to avoid the interface assembly 240 provided at the protection tube inlet 213 from being directly exposed directly above the process tank opening 110 and being corroded by chemical liquid vapor, and further prevent chemical liquid from penetrating from the interface assembly 240 into the protection tube 210 and corroding the temperature measurement probe 220.

[0023] In the assembly process of the process tank temperature measuring device 200, first, the temperature measurement probe 220 penetrates from the protection tube inlet 213 into the protection tube 210, passes through the extension portion 212 and enters the temperature measurement portion 211, and then the interface assembly 240 is attached to one end of the extension portion 212 close to the protection tube 213. The data transmission line and the power supply line connected to the temperature measurement probe 220 sequentially pass through the inside of the temperature measurement portion 211, the extension portion 212, and the interface assembly 240, are led out to the outside of the protection tube 210, and may be connected to a control device or a power supply device. Preferably, the above-mentioned temperature measurement portion 211 and the extension portion 212 are a protection tube 210 made of an integral quartz material, the axial direction of the temperature measurement portion 211 and the axial direction of the extension portion 212 are perpendicular to each other, that is, the temperature measurement portion 211 and the extension portion 212 form a preset angle of 90° in the axial direction, and an arc transition portion 215 is provided at the connection location between the temperature measurement portion 211 and the extension portion 212, which is convenient for the temperature measurement probe 220 to smoothly pass through the connection location between the temperature measurement portion 211 and the extension portion 212 during the process of incorporating the temperature measurement probe 220 into the protection tube 210.

[0024] In the present application, the process tank temperature measuring device 200 is not limited to arranging one protection tube 210. For example, in the embodiment shown in FIG. 1, only one protection tube 210 is arranged in the process tank temperature measuring device 200. Also, as in the embodiment shown in FIG. 2, a plurality of protection tubes 210 may be mounted on the same process tank temperature measuring device 200. As shown in FIG. 2, the process tank temperature measuring device 200 includes four protection tubes 210 each provided with an interface assembly 240, and one temperature measuring probe 220 is mounted inside each protection tube 210. Note that the lengths of the temperature measuring portions 211 of the four protection tubes 210 are different, and the heights of the temperature measuring probes 220 installed corresponding to each protection tube 210 in the process tank 100 are also different, so that the chemical liquid temperatures at different heights in the process tank 100 can be monitored simultaneously. In particular, in the process of adding or replenishing liquid into the process tank 100, since the temperature of the newly added chemical liquid in the process tank 100 is different from the temperature of the original chemical liquid in the process tank 100, the temperatures of the old and new chemical liquids when they are not sufficiently mixed are not uniform and cannot be directly supplied to the subsequent process. At this time, the temperature difference between the chemical liquids at different heights in the process tank 100 can be detected by the above-described temperature measuring probes 220 at different heights, to confirm whether the temperature of the chemical liquid in the process tank 100 is in a uniform state, and to determine whether it can be supplied to the subsequent process.

[0025] In a preferred embodiment of the present invention, with reference to Figures 1 and 2, the process tank temperature measuring device 200 is further provided with a fixing bracket 230, specifically, as shown in Figures 3A and 3B, the fixing bracket 230 comprises a base 231, a first press plate 232, and a second press plate 233. Here, on the opposing sides of the base 231 and the first press plate portion 232, a plurality of first semicircular grooves 237 that fit together are provided, and on the opposing sides of the first press plate 232 and the second press plate 233, a plurality of second semicircular grooves 234 that fit together are provided. When the first press plate 232 is fixed to the base 231 and the second press plate 233 is fixed to the first press plate 232, a plurality of fixing holes are formed between the base 231 and the first press plate 232, and between the first press plate 232 and the second press plate 233, and the plurality of fixing holes are arranged as two layers, each described as a first layer fixing hole 235 and a second layer fixing hole 236. The first layer fixing hole 235 comprises a plurality of first fixing holes (e.g., 2351, 2352, 2353), and the second layer fixing hole 236 comprises a plurality of second fixing holes (e.g., 2361, 2362, 2363). The sizes of the plurality of fixing holes may be the same or different.

[0026] Preferably, the process tank temperature measuring device 200 further comprises a cover plate 250 that covers part or all of the process tank opening 110. Referring to Figure 1, the cover plate 250 partially covers the process tank opening 110, and a fixing bracket 230 is provided on the surface of the cover plate 250, and the fixing bracket 230 has a plurality of fixing holes for fixing the protective tube 210 to the process tank opening 110. A plurality of through holes are provided on the surface of the cover plate 250, and these through holes are all located on the side of the fixing bracket 230 closer to the center of the process tank opening 110. The sizes of the plurality of through holes may be the same or different. The temperature measuring portion 211 of the protective tube 210 penetrates through the above-mentioned through holes and enters the interior of the process tank 100, the extension portion 212 of the protective tube 210 is fixed in the fixing hole of the fixing bracket 230, and the protective tube inlet 213 and interface assembly 240 are located on the side of the fixing bracket 230 away from the center of the process tank opening 110. Furthermore, those skilled in the art may fix the protective tube 210 to other structures surrounding the process tank 100, such as the side wall of the process tank, immerse the bottom 214 of the protective tube in the chemical liquid of the process tank 100, and position the inlet 213 of the protective tube outside the opening of the process tank 100.

[0027] Specifically, as shown in Figures 3A and 3B, the base 231 of the fixing bracket 230 is fixed to the surface of the cover plate 250, and the first press plate 232 and the second press plate 233 are sequentially stacked and fixed to the base 231 with screws. In other embodiments, the base 231, the first press plate 232, and the second press plate 233 may be detachably connected by other methods such as snapping or adhesive. Furthermore, as shown in Figure 1, the surface of the cover plate 250 has through holes 251 of the first group and through holes 252 of the second group arranged in parallel. The through holes 251 of the first group include multiple first through holes (e.g., 2511, 2512, 2513), and the through holes 252 of the second group include multiple second through holes (e.g., 2521, 2522, 2523). The first layer fixing holes 235 correspond one-to-one with the through holes 251 of the first group and have the same inner diameter, and the second layer fixing holes 236 correspond one-to-one with the through holes 252 of the second group and have the same inner diameter. This achieves the technical effect of fixing the same protective tube 210 and allowing multiple protective tubes 210 to be mounted simultaneously on the same process tank temperature measuring device 200.

[0028] As shown in Figures 4, 5, and 6, in a preferred embodiment of the present invention, the interface assembly 240 applied to the process tank temperature measuring device 200 described above comprises a seal nut 241, a seal ring 242, a lock nut 243, and a standard joint 244 that are sequentially mounted axially on the extension 212.

[0029] Of these, the seal ring 242 has a large end and a small end. The inner diameter of the seal ring 242 is slightly larger than the outer diameter of the protective tube 210, and the outer diameter of the seal ring 242 gradually decreases along the direction from the large end to the small end, meaning that the entire seal ring 242 has a wedge-shaped structure. Referring to Figure 5, the large end of the seal ring 242 is located to the left of the seal ring 242, close to the arc transition section 215, and the small end of the seal ring 242 is located to the right of the seal ring 242, close to the protective tube inlet 213.

[0030] The seal nut 241 has a first receiving area 241a for mounting the seal ring 242, the first receiving area 241a has an axial limit portion 241b inside, and a chamfered portion 241c is provided on the side of the axial limit portion 241b closer to the seal ring 242, the outer diameter of the large end of the seal ring 242 is larger than the inner diameter of the axial limit portion 241b, and the first receiving area 241a has an internal thread.

[0031] The lock nut 243 has a first end and a second end, the first end having a second housing area 2431 for attaching the seal ring 242 and a male thread that fits the female thread of the seal nut 241, and an axial extrusion portion 2431a is provided inside the second housing area 2431, and the second end is screw-connected to the standard joint 244.

[0032] Here, the inner diameter of the axial limit portion 241b is smaller than the outer diameter of the large end of the seal ring 242. The inner diameter of the axial extrusion portion 2431a is larger than the outer diameter of the small end of the seal ring 242, and smaller than the outer diameter of the large end of the seal ring 242. When the lock nut 243 and the seal nut 241 are screwed together, the seal ring 242 is positioned between the axial limit portion 241b and the axial extrusion portion 2431a, with the large end of the seal ring 242 in contact with the axial limit portion 241b and the small end of the seal ring 242 in contact with the axial extrusion portion 2431a.

[0033] On the other hand, as the lock nut 243 is screwed onto the seal nut 241, the inner wall of the lock nut 243 gradually increases the degree of radial pressure against the seal ring 242, causing the lock nut 243, seal ring 242, and protective tube 210 to be in close contact radially. On the other hand, as the lock nut 243 is screwed onto the seal nut 241, the axial pressing portion 2431a of the lock nut 243 gradually increases the degree of axial pressure against the seal ring 242, causing the lock nut 243, seal ring 242, and seal nut 241 to be in close contact axially, resulting in a better sealing effect. One end of the standard joint 244 closest to the lock nut 243 has a male thread that fits the female thread of the lock nut 243, and the other end of the standard joint 244 can be connected to a PFA pipe.

[0034] In the actual assembly process, first, the seal nut 241 is sleeved onto the extension 212 of the protective tube 210 from the protective tube inlet 213, and then the seal ring 242 is sleeved onto the protective tube 210 with its large end facing inward and its small end facing outward. After that, the lock nut 243 is sleeved onto the protective tube inlet 213, and as the lock nut 243 is screwed onto the seal nut 241, the lock nut 243 slides from the small end to the large end of the seal ring 242, and as the outer diameter of the seal ring 242 gradually increases, the pressure from the inner surface of the lock nut 243 to the outer surface of the seal ring 242 gradually increases, the inner diameter of the seal ring 242 decreases, pushing out the protective tube 210, and eliminating the gap between the lock nut 243, seal ring 242 and the protective tube 210. Meanwhile, the lock nut 243 presses the seal ring 242 axially, causing the other end of the seal ring 242 to press against the chamfered portion 241c of the axial limit portion 241b. As the other end of the seal ring 242 presses against the chamfered portion 241c, the chamfered portion 241c acts a component force on the seal ring 242 toward the lock nut 243, thereby eliminating the gap between the lock nut 243, the seal ring 242, and the seal nut 241. Finally, the standard joint 244 is screwed onto the tail of the lock nut 243 and can then be connected to a standard PFA tube, and the signal transmission line of the temperature measuring probe 220 is drawn out along the hollow portion of the protective tube 210 and connected to other devices (e.g., a temperature display device).

[0035] The present invention also discloses a substrate processing device comprising a process tank 100 and a process tank temperature measuring device 200 as described in any of the embodiments above. Here, the process tank 100 is for containing the chemical solution necessary for processing the substrate, and the process tank temperature measuring device 200 measures the temperature of the chemical solution in the process tank to accurately detect the temperature of the chemical solution in the process tank 100 and to reduce corrosion of the device by chemical solution vapor. The substrate processing device includes, but is not limited to, a tank-type wafer cleaning machine, and the chemical solution in the process tank includes, but is not limited to, solutions such as HF, DIO3, SPM, and DIW.

[0036] Furthermore, the above embodiments can be freely combined as needed. The above are merely preferred embodiments of the present invention, and a person ordinary in the art can make several improvements and modifications without departing from the principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A process tank temperature measuring device for detecting the temperature of a chemical liquid inside a process tank having a process tank opening at its upper end, A protective tube comprising a temperature measuring section and an extension section that are sequentially connected and electrically conductive to each other, wherein one end of the temperature measuring section away from the extension section is sealed to form the bottom of the protective tube, and one end of the extension section away from the temperature measuring section is open to form the inlet of the protective tube, and the protective tube has a predetermined angle between the axial direction of the temperature measuring section and the axial direction of the extension section. The system comprises a temperature measuring probe provided inside the temperature measuring section and located at the bottom of the protective tube, A process tank temperature measuring device characterized in that the bottom of the protective tube is immersed in the chemical solution of the process tank and positioned so that the temperature measuring probe detects the temperature of the chemical solution, and the inlet of the protective tube is positioned outside the opening of the process tank.

2. A process tank temperature measuring device according to claim 1, A process tank temperature measuring device characterized by further comprising an interface assembly provided at one end of the extension portion near the protective tube inlet.

3. A process tank temperature measuring device according to claim 2, The interface assembly comprises a seal nut, a seal ring, a lock nut, and a standard joint that are sequentially mounted axially on the extension. The seal ring has a large end and a small end, the inner diameter of the seal ring is slightly larger than the outer diameter of the protective tube, and the outer diameter of the seal ring gradually decreases along the large end toward the small end. The seal nut has a first receiving area for attaching the seal ring, the first receiving area has an axial limit portion inside, and the first receiving area has an internal thread. The lock nut has a first end and a second end, the first end having a second housing area for attaching the seal ring and a male thread that fits the female thread of the seal nut, the second housing area having an axially protruding portion inside, and the second end is screw-connected to the standard joint. A process tank temperature measuring device characterized in that the inner diameter of the axial limit portion is smaller than the outer diameter of the large end of the seal ring, the inner diameter of the axial extrusion portion is larger than the outer diameter of the small end of the seal ring and smaller than the outer diameter of the large end of the seal ring, and when the lock nut and seal nut are screwed in, the seal ring is positioned between the axial limit portion and the axial extrusion portion, the large end of the seal ring abuts against the axial limit portion, and the small end of the seal ring abuts against the axial extrusion portion.

4. A process tank temperature measuring device according to claim 3, A process tank temperature measuring device characterized in that a chamfered portion is provided in the axial limit portion.

5. A process tank temperature measuring device according to claim 1, A process tank temperature measuring device further comprising a fixing bracket for fixing the protective tube to the opening of the process tank.

6. A process tank temperature measuring device according to claim 5, The aforementioned fixing bracket comprises a detachably connected base, a first press plate, and a second press plate. On the opposing sides of the base and the first press plate, a plurality of corresponding first semicircular grooves are provided, and when the first press plate is fixed above the base, the plurality of corresponding first semicircular grooves form a plurality of first layer fixing holes. A process tank temperature measuring device characterized in that a plurality of corresponding second semicircular grooves are provided on the opposing sides of the first press plate and the second press plate, and when the second press plate is fixed above the first press plate, the plurality of corresponding second semicircular grooves form a plurality of second layer fixing holes.

7. A process tank temperature measuring device according to claim 6, The system further comprises a cover plate that covers part or all of the opening of the process tank, has a plurality of through holes on its surface that communicate with the inside of the process tank, and has the fixing bracket on its surface, A process tank temperature measuring device characterized in that the temperature measuring section is drilled in the through hole, and the extension section is fixed to the fixing bracket.

8. A process tank temperature measuring device according to claim 7, The process tank temperature measuring device is characterized in that the through holes comprise a first group of through holes and a second group of through holes arranged in parallel, the first group of through holes correspond one-to-one with the first layer fixing holes, and the second group of through holes correspond one-to-one with the second layer fixing holes.

9. A process tank temperature measuring device according to claim 5, A process tank temperature measuring device characterized in that, when a plurality of protective tubes are provided on the fixed bracket, the lengths of the temperature measuring sections of at least two of the protective tubes are different so that the temperature measuring probes of at least two of the protective tubes are located at different heights within the process tank, in order to detect the chemical liquid temperatures at different heights.

10. A process tank temperature measuring device according to any one of claims 1 to 9, The process tank temperature measuring device is characterized in that the protective tube is a quartz tube and has an arc-shaped transition section at the connection point between the temperature measuring section and the extension section.

11. A substrate processing device, A process tank for containing the chemical solutions required for the substrate undergoing liquid treatment, A substrate processing device comprising a process tank temperature measuring device according to any one of claims 1 to 10.

Images