Methods for automated mechanical adjustment of particle beam columns, related computer program products, and particle beam columns
JP2026521471APending Publication Date: 2026-06-30カールツァイスマルティセムゲゼルシヤフトミットベシュレンクテルハフツングカールツァイスマルティセムゲゼルシヤフトミットベシュレンクテルハフツングカールツァイスマルティセムゲゼルシヤフトミットベシュレンクテルハフツング
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- カールツァイスマルティセムゲゼルシヤフトミットベシュレンクテルハフツングカールツァイスマルティセムゲゼルシヤフトミットベシュレンクテルハフツングカールツァイスマルティセムゲゼルシヤフトミットベシュレンクテルハフツング
- Filing Date
- 2024-06-05
- Publication Date
- 2026-06-30
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Figure 2026521471000001_ABST
Abstract
The present invention discloses several automated mechanical adjustment methods for particle beam columns. For example, beam generators, condenser lens systems, detection systems, and objective lens systems can therefore be adjusted quickly and precisely. The mechanical adjustment methods can be combined with electrical adjustment methods.
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