Method for inducing diffusion device bracket and diffusion device retention
The bracket system for substrate containers addresses cleanliness and yield issues by allowing external installation of diffusion devices with larger cross-sectional areas, reducing particle generation and improving operational efficiency.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- ENTEGRIS INC
- Filing Date
- 2024-06-03
- Publication Date
- 2026-07-08
AI Technical Summary
Existing substrate containers face challenges in maintaining cleanliness and reducing particle generation during the installation of diffusion devices due to the need for operations within the container body, which can introduce contaminants.
A bracket system is designed to receive and hold diffusion devices externally, with larger cross-sectional areas at the ends and along the length to facilitate insertion and alignment, reducing the need for internal operations and minimizing particle generation.
This design improves the cleanliness of substrate containers and enhances processing yield by minimizing contaminant introduction and operational complexity.
Smart Images
Figure 2026522562000001_ABST
Abstract
Description
Technical Field
[0001]
[0001] This disclosure is directed to a substrate container, specifically, a bracket for receiving and holding a diffusion device within such a substrate container.
Summary of the Invention
[0002]
[0002] The substrate container may include a diffusion device for introducing a gas, such as a purge gas, into the container. The diffusion device is typically installed in the substrate container by an operation performed within the body of the container (e.g., snap-fitting the diffusion device to a feature provided inside the substrate container).
[0003]
[0003] This disclosure is directed to a substrate container, specifically, a bracket for receiving and holding a diffusion device within such a substrate container.
[0004]
[0004] Even when the diffusion device is inserted from the outside of the substrate container, by having an opening larger than the holding area of the diffusion device bracket, the diffusion device can be received and guided to a predetermined position. This can reduce or eliminate the number of operations performed within the container body itself, and thus reduce the generation of particles or the introduction of contaminants that may result from such operations. As a result, the cleanliness of the substrate container is improved, and the resulting yield obtained from processing substrates using such containers in the process is improved.
[0005]
[0005] In one embodiment, the substrate container includes a shell and a bracket disposed on the shell. The bracket at least partially defines a space. The bracket includes a receiving portion having a first internal cross-sectional area at an end configured to receive the diffusion device, and a holding area having a second internal cross-sectional area along the length of the bracket. The first internal cross-sectional area is larger than the second internal cross-sectional area, and the second internal cross-sectional area is at least the cross-sectional area of the diffusion device configured to be received at the end.
[0006]
[0006] In one embodiment, the substrate container further includes a second bracket disposed on the shell. The second bracket defines at least partially a second space. The second bracket includes a receiving portion having a third internal cross-sectional region at the end configured to receive a second diffusion device, and a fourth internal cross-sectional region in a holding region along the length of the bracket. The third internal cross-sectional region is larger than the fourth internal cross-sectional region, and the fourth internal cross-sectional region is at least the cross-sectional region of the diffusion device configured to receive the end.
[0007]
[0007] In one embodiment, the substrate container includes a diffusion device, the diffusion device being at least partially enclosed by a bracket, and the diffusion device extending through a portion of the bracket having a second internal cross-sectional region.
[0008]
[0008] In one embodiment, the diffusion device has a chamfered face at an end that is configured to be inserted into a bracket.
[0009]
[0009] In one embodiment, the diffusion device has a rounded end that is configured to be inserted into the bracket.
[0010]
[0010] In one embodiment, the bracket includes a second end opposite to the end configured to receive a diffusion device, and at the second end, the bracket includes a second receiving portion having a third internal cross-sectional region, the third internal cross-sectional region being larger than the second internal cross-sectional region. In one embodiment, the third internal cross-sectional region and the first internal cross-sectional region are equal.
[0011]
[0011] In one embodiment, the bracket includes a plurality of openings along the length of the bracket.
[0012]
[0012] In one embodiment, the bracket is located on the rear wall of the shell. In one embodiment, the bracket is attached to the rear wall by welding.
[0013]
[0013] In one embodiment, a method for inserting a diffusion device into a substrate container includes guiding the diffusion device into an opening defined by a receiving portion provided at the end of a bracket. The bracket has a first internal cross-sectional region in the receiving portion and a second internal cross-sectional region in a holding region along the length of the bracket. The first internal cross-sectional region is larger than the second internal cross-sectional region.
[0014]
[0014] In one embodiment, the method further includes guiding the diffusion device through an opening in the shell of the substrate container before guiding it into the receiving portion. In one embodiment, the diffusion device is bonded to the purge module when it is guided through the opening in the shell of the substrate container.
[0015]
[0015] In one embodiment, when the diffusion device is inserted into the substrate container, the diffusion device extends through a portion of a bracket having a second internal cross-sectional region.
[0016]
[0016] In one embodiment, the method further includes guiding the second diffusion device into an opening defined by a receiving portion provided at the end of the second bracket. The second bracket has a third internal cross-sectional region in the receiving portion and a fourth internal cross-sectional region in a holding region along the length of the bracket. The third internal cross-sectional region is larger than the fourth internal cross-sectional region. In one embodiment, the method further includes guiding the second diffusion device through an opening in the shell of the substrate container before guiding the second diffusion device into an opening defined by the receiving portion of the second bracket. In one embodiment, the second diffusion device is bonded to the purge module when it is guided through the opening in the shell of the substrate container. [Brief explanation of the drawing]
[0017] [Figure 1] A front view of a substrate container according to one embodiment is shown. [Figure 2] A bracket according to one embodiment is shown. [Figure 3]A bracket according to one embodiment is shown. [Figure 4] A flowchart of a method for providing a diffusion device in a substrate container according to one embodiment is shown. [Modes for carrying out the invention]
[0018]
[0021] This disclosure relates to substrate containers, and more specifically, brackets for receiving and holding diffusion devices within such substrate containers.
[0019]
[0022] Figure 1 shows a front view of a substrate container according to one embodiment. The substrate container 100 includes a shell 102 and a bottom plate 104. The substrate container 100 further includes a bracket 106, a purge module 108, and a diffusion device 110.
[0020]
[0023] The substrate container 100 is configured to house these substrates (e.g., semiconductor wafers or any other suitable substrates) during transport, storage, and / or processing. The substrate container 100 includes a shell 102 capable of defining an internal space capable of housing one or more substrates. The shell 102 can define the internal space by its top, bottom, sides, and rear walls and has an open front provided to allow insertion of substrates into or removal of substrates from the internal space.
[0021]
[0024] The bottom plate 104 may be contained within the substrate container 100. The bottom plate 104 may be configured to facilitate handling of the substrate container, include an interface for receiving and holding the purge module 108 and / or diffusion device 110, or for other purposes. In one embodiment, the bottom plate 104 is a transport plate for the substrate container 100.
[0022]
[0025] Bracket 106 is a bracket configured to receive and hold diffusion device 110 when the diffusion device is fully inserted into substrate container 100, as shown, for example, for bracket 106 and diffusion device 110 provided on the left side of substrate container 100 shown in FIG. 1. The bracket can be attached to shell 102, for example, to the rear wall of shell 102.
[0023]
[0026] Purge module 108 can optionally be included within substrate container 100. Purge module 108 can be configured to interface with a source of purge gas (e.g., a purge gas line of a tool configured to use substrate container 100 in common). In one embodiment, purge module 108 can include a plurality of components each inserted into a purge port included in bottom plate 104 and / or shell 102 and attached via a mechanical connector such as a retainer. In one embodiment, purge module 108 can be an assembly of components attached to each other that can be received and held within a purge port included in bottom plate 104 and / or shell 102. In one embodiment, purge module 108 includes diffusion device 110. In one embodiment, diffusion device 110 can be attached to purge module 108. In one embodiment, diffusion device 110 can be configured to be partially held within shell 102 by features provided on one or more of purge module 108, bottom plate 104, and shell 102.
[0024]
[0027] The diffusion device 110 is configured to be able to diffuse a gas such as a purge gas into the internal space defined by the shell 102. In one embodiment, the gas supplied by the diffusion device 110 can be used to purge the internal space defined by the shell 102, for example, but not limited to, removing contaminants including moisture, volatile organic compounds (VOCs), etc. As a non-limiting example, the gas can be nitrogen, an inert gas, clean dry air (CDA), extra clean dry air (xCDA), etc. The diffusion device 110 can be, for example, a diffuser tower. The diffusion device 110 can be made of a porous material to enable the diffusion of the gas through the diffusion device 110. The diffusion device 110 can receive the gas supplied to the internal space by the purge module 108. The diffusion device 110 has respective ends 112. The ends 112 are shown as flat in FIG. 1, but in alternative embodiments, the ends 112 can be hemispherical, or the transition from the body of the diffusion device 110 to the ends 112 can be of an inclined shape, chamfered shape, rounded shape, acute angle shape, or other shape to facilitate insertion into the bracket 106 of the diffusion device 110.
[0025]
[0028] FIG. 2 shows a bracket according to one embodiment. The bracket 200 includes a first receiving portion 202, a holding region 204, and a second receiving portion 206. An opening 208 can be defined within the bracket 200. The bracket further includes mounting tabs 210 and mounting points 212.
[0026]
[0029] The bracket 200 is a bracket configured to receive and hold a part of a diffusion device such as the diffusion device 110 described above and shown in FIG. 1. The bracket 200 can be used as the bracket 106 provided within the substrate container 100 described above and shown in FIG. 1.
[0027]
[0030] The first receiving portion 202 is provided at the first end of the bracket 200. The first receiving portion 202 can define at least partially a first internal cross-sectional area. The first internal cross-sectional area may be configured to receive the diffusion device without interfering with the diffusion device at the first receiving portion 202. In one embodiment, the shape of the first internal cross-sectional area may correspond to the shape of the cross-sectional area of the diffusion device. The first internal cross-sectional area is larger than the cross-sectional area of the diffusion device that is received and held by the bracket 200. The first internal cross-sectional area may be selected based on facilitating the insertion of the diffusion device and avoiding interference with the capacity of the substrate container that houses the substrate. In one embodiment, the first internal cross-sectional area may be 10% to 1000% larger than the cross-sectional area of the diffusion device used in the bracket 200.
[0028]
[0031] The retaining region 204 may be provided along the length of the bracket 200 between a first end provided with a first receiving portion 202 and a second end provided with a second receiving portion 206. The retaining region 204 is a region of the bracket 200 that defines a second internal cross-sectional region configured to accommodate a diffusion device. The second internal cross-sectional region is configured to accommodate a diffusion device such that the diffusion device is held by the bracket 200 in a specific position and / or alignment. The total area of the second internal cross-sectional region is smaller than either the first internal cross-sectional region defined by the first receiving portion 202 or the third internal cross-sectional region defined by the second receiving portion 206. The second internal cross-sectional region is equal to or larger than the cross-sectional region of the diffusion device at a point along the diffusion device configured to extend through the retaining region 204 when the diffusion device is fully inserted into the substrate container.
[0029]
[0032] The second receiving portion 206 may be provided at the second end of the bracket 200, opposite the first end where the first receiving portion 202 is provided. The second receiving portion 206 may at least partially define a third internal cross-sectional area. The third internal cross-sectional area may be configured to receive a diffusion device. In one embodiment, the shape of the third internal cross-sectional area may correspond to the shape of the cross-sectional area of the diffusion device. The third internal cross-sectional area is larger than the cross-sectional area of the diffusion device that is received and held by the bracket 200. The third internal cross-sectional area may be selected based on facilitating the insertion of the diffusion device and avoiding interference with the ability of the substrate container to house the substrate. In one embodiment, the third internal cross-sectional area may be 10% to 1000% larger than the cross-sectional area of the diffusion device used in the bracket 200. In one embodiment, the cross-sectional shape of the bracket 200 is the same for both the first receiving portion 202 and the second receiving portion 206. In one embodiment, the first internal cross-sectional area and the third internal cross-sectional area have the same total area. In one embodiment, the first internal cross-sectional region and the third internal cross-sectional region have different shapes and / or total areas.
[0030]
[0033] By providing first and second receiving portions 202 and 206 on both sides of the holding area 204, the bracket 200 can be provided in a side-independent configuration, and as shown in Figure 1, it can be installed to hold either the left-side diffusion device or the right-side diffusion device. The bracket 200 can rotate 180 degrees between a position that presents the first receiving portion 202 for receiving the diffusion device when the diffusion device is installed through the bottom of the substrate container shell, and another position that presents the second receiving portion 206 for receiving the diffusion device when the diffusion device is installed through the bottom of the substrate container shell. This makes it possible to install it on both sides of the rear wall of the shell, although only a portion needs to be manufactured.
[0031]
[0034] The opening 208 may be provided in the portion of the bracket 200 that includes the first receiving portion 202 and the second receiving portion 206, as well as the holding area 204. The size and shape of the opening 208 may be shaped, for example, to reduce material usage or to reduce blockage of outflow from the diffusion structure.
[0032]
[0035] The mounting tab 210 may extend from a portion of the bracket 200, including the first receiving portion 202 and the second receiving portion 206 and the retaining area 204. The mounting tab 210 provides a region that enables the bracket 200 to be attached to a substrate container, for example, to the rear wall of the shell 102, as described above and as shown in Figure 1. In one embodiment, the mounting tab 210 may include a mounting point 212 into which the attachment to the substrate container is formed. In one embodiment, the entire mounting tab can be attached to the substrate container. Attachment of the mounting tab 210 or the mounting point 212 to the substrate container can be made via any suitable attachment (including, but not limited to, welding such as ultrasonic welding, mechanical interfaces such as corresponding engagement features, and the use of mechanical fasteners such as screws and adhesives).
[0033]
[0036] Figure 3 shows a bracket according to one embodiment. The bracket 300 includes a receiving portion 302, a holding area 304, a mounting tab 306, and a mounting point 308. A diffusion device 310 is shown in Figure 3.
[0034]
[0037] Bracket 300 is configured to receive and hold a portion of a diffusion device, such as the diffusion device 110 shown in Figure 1, as described above. Bracket 300 can be used as bracket 106 provided inside the substrate container 100 shown in Figure 1, as described above.
[0035]
[0038] The receiving portion 302 is provided at the first end of the bracket 200. The receiving portion 302 can define at least partially a first internal cross-sectional area. The first internal cross-sectional area can be configured to receive a diffusion device. In one embodiment, the shape of the first internal cross-sectional area may correspond to the shape of the cross-sectional area of the diffusion device. The first internal cross-sectional area is larger than the cross-sectional area of the diffusion device that is received and held by the bracket 300. The first internal cross-sectional area may be selected based on facilitating the insertion of the diffusion device and avoiding interference with the ability of the substrate container to house the substrate. In one embodiment, the first internal cross-sectional area may be 10% to 1000% larger than the cross-sectional area of the diffusion device used in the bracket 300.
[0036]
[0039] The retaining region 304 may be provided along the length of the bracket 300. The retaining region 304 is a region of the bracket 300 that defines a second internal cross-sectional region configured to accommodate the diffusion device. The second internal cross-sectional region is configured to accommodate the diffusion device so that the diffusion device is held by the bracket 300 in a specific position and / or alignment. The second internal cross-sectional region has a smaller total area than the first internal cross-sectional region defined by the receiving portion 302. The third internal cross-sectional region is equal to or larger than the cross-sectional region of the diffusion device at a point along the diffusion device that is configured to extend through the retaining region 304 when the diffusion device is fully inserted into the substrate container.
[0037]
[0040] The mounting tab 306 may extend from a portion of the bracket 300, including the first receiving portion 302 and the retaining region 304. The mounting tab 306 provides a region that enables the bracket 300 to be attached to a substrate container, for example, to the rear wall of the shell 102, as described above and as shown in Figure 1. In one embodiment, the mounting tab 306 may include a mounting point 308 into which the attachment to the substrate container is formed. In one embodiment, the entire mounting tab can be attached to the substrate container. Attachment of the mounting tab 306 or the mounting point 308 to the substrate container can be made via any suitable attachment (including, but not limited to, welding such as ultrasonic welding, mechanical interfaces such as corresponding engagement features, and the use of mechanical fasteners such as screws and adhesives).
[0038]
[0041] Figure 3 shows the diffusion device 310. As shown in Figure 3, the diffusion device 310 may include chamfered faces at its ends, which are configured to facilitate insertion of the diffusion device 310 into the bracket 300.
[0039]
[0042] The bracket 300 may be located on the side of a substrate container that is configured, for example, to accept and hold only the left-side diffusion device or only the right-side diffusion device within the substrate container. A mirror image bracket of the bracket 300 may be provided and installed on a substrate container, such as the substrate container 100 described above and shown in Figure 1, to accept and hold the other of the left-side or right-side diffusion device.
[0040]
[0043] Figure 4 shows a flowchart of a method for providing a diffusion device in a substrate container according to one embodiment. Method 400 includes, in 402, inserting the diffusion device into an opening formed in the shell of the substrate container; in 404, guiding the tip of the diffusion device into a receiving portion of a bracket inside the substrate container; and in 406, inserting the diffusion device so that it extends through the holding region of the bracket. Method 400 can optionally be further repeated for each diffusion device to be installed in the substrate container.
[0041]
[0044] In 402, the diffusion device is inserted into an opening formed in the shell of the substrate container. The diffusion device can be inserted into the opening from the outside of the substrate container. In one embodiment, in 402, the diffusion device can be inserted on its own. In one embodiment, in 402, the diffusion device can be attached to the purge module when inserted. The opening formed in the shell may have a corresponding opening in the bottom plate. In one embodiment, the diffusion device can also be inserted in 402 through an opening in the bottom plate.
[0042]
[0045] The tip of the diffusion device is guided into the receiving portion of the bracket at 404. The tip of the diffusion device may be flat, hemispherical, or beveled, chamfered, or rounded, as shown in Figure 1. When this tip enters the bracket provided in the internal space of the substrate container, the tip can be guided so that it is within the range of the internal cross-sectional area defined by the receiving portion of the bracket (for example, the first receiving portion 202, the second receiving portion 204, or the receiving portion 302), as described above and shown in Figures 2 and 3.
[0043]
[0046] The diffusion device is inserted in 406 so as to extend within or through the retaining region of the bracket. As the diffusion device continues to be inserted through the bracket, it is guided by a narrowing internal cross-sectional region defined by the body of the bracket until its tip passes through the retaining region. Within the retaining region, the diffusion device is surrounded or in contact with the bracket so as to be held in a specific position and / or orientation by the bracket. In one embodiment, the tip of the diffusion device is within the retaining region of the bracket in 406 after insertion. In one embodiment, the tip of the diffusion device passes through the retaining region of the bracket, and a portion of the body of the diffusion device is located within the retaining region of the bracket after insertion in 406.
[0044]
[0047] manner
[0048] It is understood that any of embodiments 1 to 11 can be combined with any of embodiments 12 to 18.
[0045]
[0049] Embodiment 1: A substrate container, shell, and Brackets positioned on the shell, Equipped with, A substrate container wherein the bracket defines a space at least partially, and the bracket includes a receiving portion having a first internal cross-sectional region at an end configured to receive a diffusion device, and a holding region having a second internal cross-sectional region along the length of the bracket, wherein the first internal cross-sectional region is larger than the second internal cross-sectional region, and the second internal cross-sectional region is at least the cross-sectional region of the diffusion device configured to receive the end.
[0046]
[0050] Embodiment 2 A substrate container according to Embodiment 1, comprising a second bracket disposed on the shell, wherein the second bracket defines at least partially a second space, and the second bracket includes a receiving portion having a third internal cross-sectional region at an end configured to receive a second diffusion device, and a fourth internal cross-sectional region in a holding region along the length of the bracket, wherein the third internal cross-sectional region is larger than the fourth internal cross-sectional region, and the fourth internal cross-sectional region is at least the cross-sectional region of the diffusion device configured to receive the end.
[0047]
[0051] Embodiment 3: The substrate container according to Embodiment 2, wherein the second bracket has the same shape as the first bracket.
[0048]
[0052] Embodiment 4: The substrate container according to any one of Embodiments 1 to 3, further comprising the diffusion device, wherein the diffusion device is at least partially surrounded by the bracket, and the diffusion device extends through a portion of the bracket having the second internal cross-sectional region.
[0049]
[0053] Embodiment 5: A substrate container according to any one of Embodiments 1 to 4, wherein the diffusion device has a chamfered surface at an end configured to be inserted into the bracket.
[0050]
[0054] Embodiment 6: A substrate container according to any one of Embodiments 1 to 5, wherein the diffusion device has a radius formed at the end configured to be inserted into the bracket.
[0051]
[0055] Embodiment 7 The substrate container according to Embodiments 1 to 6, wherein the bracket includes a second end opposite to the end configured to receive the diffusion device, and at the second end, the bracket has a third internal cross-sectional region, the third internal cross-sectional region being larger than the second internal cross-sectional region.
[0052]
[0056] Embodiment 8: The substrate container according to Embodiment 7, wherein the third internal cross-sectional region and the first internal cross-sectional region are equal.
[0053]
[0057] Embodiment 9 A substrate container according to any one of Embodiments 1 to 8, wherein the bracket includes a plurality of openings along the length of the bracket.
[0054]
[0058] Embodiment 10 A substrate container according to any one of Embodiments 1 to 9, wherein the bracket is located on the rear wall of the shell.
[0055]
[0059] Embodiment 11: The substrate container according to Embodiment 10, wherein the bracket is attached to the rear wall by welding.
[0056]
[0060] Embodiment 12: A method for inserting a diffusion device into a substrate container, A method comprising guiding the diffusion device into an opening defined by a receiving portion provided at the end of a bracket, wherein the bracket has a first internal cross-sectional region in the receiving portion and a second internal cross-sectional region in a holding region along the length of the bracket, the first internal cross-sectional region being larger than the second internal cross-sectional region.
[0057]
[0061] Embodiment 13 The method according to Embodiment 12, further comprising guiding the diffusion device through an opening in the shell of the substrate container before guiding the diffusion device into the opening defined by the receiving portion.
[0058]
[0062] Embodiment 14 The method according to Embodiment 13, wherein the diffusion device is joined to a purge module when the diffusion device is guided through the opening of the shell of the substrate container.
[0059]
[0063] Embodiment 15: The method according to any one of Embodiments 12 to 14, wherein when the diffusion device is inserted into the substrate container, the diffusion device extends through the holding region.
[0060]
[0064] Embodiment 16 The method according to any one of claims 12 to 15, further comprising guiding a second diffusion device into an opening defined by a receiving portion provided at the end of a second bracket, wherein the second bracket has a third internal cross-sectional region in the receiving portion and a fourth internal cross-sectional region in a holding region along the length of the bracket, the third internal cross-sectional region being larger than the fourth internal cross-sectional region.
[0061]
[0065] Embodiment 17 The method of claim 16, further comprising guiding the second diffusion device through an opening in the shell of the substrate container before guiding the second diffusion device into the opening defined by the receiving portion of the second bracket.
[0062]
[0066] Embodiment 18 The method of Embodiment 17, wherein the second diffusion device is joined to the purge module when the second diffusion device is guided through the opening of the shell of the substrate container.
[0063]
[0067] The embodiments disclosed in this application should be considered in all respects to be illustrative and not limiting. The scope of the invention is indicated by the appended claims rather than the foregoing description, and all modifications of the meaning and scope of the claims are intended to be contained therein.
Claims
1. A substrate container, shell, and Brackets disposed on the aforementioned shell Equipped with, A substrate container wherein the bracket defines a space at least partially, and the bracket includes a receiving portion having a first internal cross-sectional region at an end configured to receive a diffusion device, and a holding region having a second internal cross-sectional region along the length of the bracket, wherein the first internal cross-sectional region is larger than the second internal cross-sectional region, and the second internal cross-sectional region is at least the cross-sectional region of the diffusion device configured to receive the end.
2. The substrate container according to claim 1, comprising a second bracket disposed on the shell, wherein the second bracket defines a second space at least partially, and the second bracket includes a receiving portion having a third internal cross-sectional region at an end configured to receive a second diffusion device, and a fourth internal cross-sectional region in a holding region along the length of the bracket, wherein the third internal cross-sectional region is larger than the fourth internal cross-sectional region, and the fourth internal cross-sectional region is at least the cross-sectional region of the diffusion device configured to receive the end.
3. The substrate container according to claim 2, wherein the second bracket has the same shape as the first bracket.
4. The substrate container according to claim 1, further comprising the diffusion device, wherein the diffusion device is at least partially surrounded by the bracket, and the diffusion device extends through a portion of the bracket having the second internal cross-sectional region.
5. The substrate container according to claim 1, wherein the diffusion device has a chamfered surface at an end configured to be inserted into the bracket.
6. The substrate container according to claim 1, wherein the diffusion device has a radius formed at the end that is configured to be inserted into the bracket.
7. The substrate container according to claim 1, wherein the diffusion device has a beveled edge at an end configured to be inserted into the bracket.
8. The substrate container according to claim 1, wherein the diffusion device has a sharp edge at the end configured to be inserted into the bracket.
9. The substrate container according to claim 1, wherein the bracket includes a second end opposite to the end configured to receive the diffusion device, and at the second end, the bracket includes a second receiving portion having a third internal cross-sectional region, the third internal cross-sectional region being larger than the second internal cross-sectional region.
10. The substrate container according to claim 9, wherein the third internal cross-sectional region and the first internal cross-sectional region are equal.
11. The substrate container according to claim 1, wherein the bracket includes a plurality of openings along the length of the bracket.
12. The substrate container according to claim 1, wherein the bracket is disposed on the rear wall of the shell.
13. The substrate container according to claim 12, wherein the bracket is attached to the rear wall by welding.
14. A method for inserting a diffusion device into a substrate container, A method comprising guiding the diffusion device into an opening defined by a receiving portion provided at the end of a bracket, wherein the bracket has a first internal cross-sectional region in the receiving portion and a second internal cross-sectional region in a holding region along the length of the bracket, the first internal cross-sectional region being larger than the second internal cross-sectional region.
15. The method according to claim 14, further comprising guiding the diffusion device through an opening in the shell of the substrate container before guiding the diffusion device into the opening defined by the receiving portion.
16. The method according to claim 15, wherein the diffusion device is joined to the purge module when the diffusion device is guided through the opening of the shell of the substrate container.
17. The method according to claim 14, wherein when the diffusion device is inserted into the substrate container, the diffusion device extends through the holding region.
18. The method according to claim 14, further comprising guiding a second diffusion device into an opening defined by a receiving portion provided at the end of a second bracket, wherein the second bracket has a third internal cross-sectional region in the receiving portion and a fourth internal cross-sectional region in a holding region along the length of the bracket, the third internal cross-sectional region being larger than the fourth internal cross-sectional region.
19. The method according to claim 18, further comprising guiding the second diffusion device through an opening in the shell of the substrate container before guiding the second diffusion device into the opening defined by the receiving portion of the second bracket.
20. The method according to claim 19, wherein the second diffusion device is joined to the purge module when the second diffusion device is guided through the opening of the shell of the substrate container.