Liquid material vaporization system
The liquid material vaporization system addresses residual liquid and contamination issues by incorporating a purge and exhaust gas treatment system, enhancing vaporization efficiency and environmental safety in semiconductor manufacturing.
JP2026523264APending Publication Date: 2026-07-13BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- JP2026500154
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2023-07-14
- Filing Date
- 2024-07-12
- Publication Date
- 2026-07-13
AI Technical Summary
Technical Problem
Existing liquid-state process media vaporization methods in semiconductor manufacturing face issues such as residual liquid in pipelines, limited applicability due to high heat resistance limitations, and environmental contamination from unvaporized media.
Method used
A liquid material vaporization system with a purge pipeline, control units, and exhaust gas treatment pipeline to manage vaporization, purge, and exhaust processes, reducing residual liquid and contaminants.
Benefits of technology
Effectively vaporizes liquid media, minimizes pipeline residue, and prevents environmental pollution by treating contaminants, ensuring safe and efficient semiconductor processing.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure 2026523264000001_ABST
Abstract
This application provides a liquid material vaporization system applicable to semiconductor process equipment. The system includes a vaporizer 20, a liquid material pipeline 10, a purge pipeline 40, a first control unit 50, a delivery pipeline 30, an exhaust gas treatment pipeline 62, and a second control unit 70, wherein the first control unit 50 selectively controls the purge pipeline 40 or the liquid material pipeline 10 to communicate with the vaporizer, and the second control unit 70 selectively controls the exhaust gas treatment pipeline 62 or the delivery pipeline 30 to communicate with the vaporizer.
Need to check novelty before this filing date? Find Prior Art