Module retainer
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- ENTEGRIS INC
- Filing Date
- 2024-07-19
- Publication Date
- 2026-07-30
Smart Images

Figure 2026525459000001_ABST
Abstract
Claims
1. An assembly comprising a substrate container, wherein the substrate container is An opening formed in the substrate container, wherein the opening is configured to receive a module, One or more tabs, each of which extends inward from the opening over a portion of the outer periphery of the opening, and the one or more tabs define one or more gaps, Modules and, A module retainer attached to the module, wherein the module retainer includes one or more engagement mechanisms, the engagement mechanism being configured to be inserted through one or more corresponding gaps when in a first position, and to engage with one or more tabs when in a second position, and the module retainer being configured to be rotatable between the first position and the second position when the module retainer is inserted into the opening, and An assembly that includes this.
2. The assembly according to claim 1, wherein the module retainer includes a detent configured to contact one of the one or more gaps so as to resist rotation of the module retainer from the second position to the first position.
3. The assembly according to claim 1, wherein the module is selected from the group consisting of a purge module, a vent purge module, a getter module, and a sensor module.
4. The assembly according to claim 1, wherein the one or more tabs include at least three tabs, and the one or more engagement mechanisms include at least three engagement mechanisms.
5. The assembly according to claim 1, wherein the substrate container includes a shell that defines an internal space and a lower plate.
6. The assembly according to claim 5, wherein the opening is formed in the shell.
7. The assembly according to claim 5, wherein the opening is formed in both the shell and the lower plate.
8. The assembly according to claim 7, wherein one or more tabs are provided on the lower plate.
9. The assembly according to claim 1, wherein the module retainer includes one or more tooling interfaces on the outward-facing surface of the module retainer.
10. The assembly according to claim 9, wherein the tooling interface is distributed around a central opening formed on the outward-facing surface of the module retainer.
11. A method for installing a module in a substrate container, Inserting a module including a module retainer into an opening formed in the substrate container, wherein the module retainer is in a first position where the engaging mechanism of the module retainer can pass through the gap between tabs extending inward into the opening; Rotating the module retainer to a second position in which the engagement mechanism of the module retainer engages with the tab, Methods that include...
12. The method according to claim 11, wherein the module is selected from the group consisting of a vent module, a purge module, a getter module, a sensor module, and an interface module.
13. The method according to claim 11, further comprising attaching the module retainer to the module.
14. The method according to claim 13, wherein attaching the module retainer to the module includes forming a snap fit between at least one first snap-fit mechanism provided on the module retainer and at least one second snap-fit mechanism provided on the body of the module.
15. The method according to claim 11, wherein the opening is formed in the shell of the substrate container.
16. The method according to claim 11, wherein the opening is formed in the shell and lower plate of the substrate container, and the tab is provided on the lower plate.
17. The method according to claim 11, wherein rotating the module retainer includes inserting a tool into one or more tooling interfaces provided on the module retainer.
18. The method according to claim 17, wherein the tool is operated by automation.
19. The method according to claim 11, further comprising rotating the module retainer from the second position to the first position and removing the module from the opening.
20. The method according to claim 11, wherein the module is installed in the opening and the opening is sealed when the module retainer is in the second position.