Door body drive mechanism, process chamber, and semiconductor process equipment

Abstract

This application provides a door body drive mechanism, a process chamber, and a semiconductor process apparatus. The door body drive mechanism includes a first drive unit, a second drive unit, and a connecting part connected to the door body and drivably connected to the first and second drive units. The first drive unit drives the connecting part to move along a first direction, thereby driving the connecting part to move the door body along the first direction. The second drive unit drives the connecting part to move along a second direction intersecting the first direction, thereby driving the connecting part to move the door body relative to the first drive unit along the second direction. The door body drive mechanism of this application, by installing the second drive unit, allows the door body to be moved laterally, thereby pressing the door body against the liner structure to achieve sealing or separating the door body from the liner, ensuring the sealing effect of the door body and effectively avoiding friction between the door body and the liner structure.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing, and more specifically, to a door body drive mechanism, a process chamber, and a semiconductor processing apparatus.

Background Art

[0002] In the field of semiconductor manufacturing, a process chamber is a very important device, and many semiconductor processing apparatuses require a process chamber. Taking an etching apparatus as an example, inside the etching apparatus, a process chamber is installed. At the top of the process chamber, an upper electrode is installed, and inside the process chamber, a liftable lower electrode is installed. At the top of the process chamber, a liner is installed. The liner has its top connected to the upper electrode and an assembly port at the bottom that fits with the lower electrode. When the lower electrode rises to the assembly port, an internal cavity for performing an etching process is formed, surrounded by the upper electrode, the inner wall of the liner, and the lower electrode, and an external cavity is formed between the outer wall of the liner and the inner wall of the process chamber.

[0003] To facilitate the entry and exit of wafers into and out of the process chamber, the process chamber has a transfer port communicating with the external cavity installed on its outer wall, and a wafer transfer port communicating with the internal cavity installed on the liner. The transfer port corresponds to the wafer transfer port, and the wafer is transported by a robot arm through the transfer port and the wafer transfer port. Since it is necessary to ensure the integrity of the internal cavity during the etching process, a liftable internal door mechanism is installed in the external cavity. During the etching process, the internal door shields the wafer transfer port, making the internal cavity approximately circular, thereby improving the uniformity of the process environment inside the chamber and the uniformity of etching.

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in conventional technology, the internal door mechanism moves up and down in close contact with the outer wall of the liner during the opening and closing process. To avoid friction between the internal door and the outer wall of the liner during this process, a movable gap is provided between the internal door and the liner. As a result, the internal cavity is not completely sealed, which is detrimental to the stability and uniformity of the airflow, and the plasma is not completely shielded, creating a risk of plasma leakage. Furthermore, although there is a movable gap between the internal door and the liner, the lifting rod is long, making the raising and lowering of the internal door unstable. Over time, the guide rod may tilt, creating a risk of the lifting rod rubbing against the inner wall of the reaction chamber or the liner. Therefore, ensuring the sealing effect of the internal cavity and effectively preventing friction between the internal door and the liner are urgent problems that need to be solved in this field. [Means for solving the problem]

[0005] This invention provides a door body drive mechanism, a process chamber, and a semiconductor process apparatus to solve the problem in the prior art of not being able to completely seal the space between the inner door and the liner, which poses a risk of friction.

[0006] To achieve the object of the present invention, a door body drive mechanism is provided, the door body drive mechanism comprising a first drive unit, a second drive unit, and a connecting portion connected to a door body and drivably connected to the first drive unit and the second drive unit, wherein the first drive unit drives the connecting portion to move along a first direction, thereby driving the connecting portion to move the door body along the first direction, and the second drive unit drives the connecting portion to move along a second direction intersecting the first direction, thereby driving the connecting portion to move the door body relative to the first drive unit along the second direction.

[0007] Furthermore, the second drive device includes a second housing having a mounting opening and a mounting space communicating with the mounting opening, which is attached to a support and the mounting opening is sealed by the support, and a second drive member installed in the mounting space and providing a driving force in the second direction to drive the connection to move along the second direction.

[0008] Furthermore, the second drive unit further includes a transmission assembly connected between the second drive member and the connection portion, the transmission assembly including a connection plate movably installed in the mounting space and movably connected to the second drive member, and a guide shaft inserted into the second housing, having its axis set along the second direction and movable relative to the second housing in the second direction, with its first end located within the mounting space and fixedly connected to the connection plate, and its second end located outside the second housing, wherein a mounting seat is provided at the second end of the guide shaft, the connection portion is installed on the mounting seat, the mounting seat is driven by the guide shaft to move along the second direction, the connection portion and the mounting seat are relatively movable in the first direction, and the connection portion and the mounting seat are relatively fixed in the second direction, thereby driving the mounting seat to move the connection portion along the second direction.

[0009] Furthermore, the second housing includes a first housing having a first end and a second end installed opposite to each other along a second direction, and a second housing having a first end and a second end installed opposite to each other along a second direction, wherein the first end of the first housing is connected to the support, the mounting opening is provided at the first end of the first housing, the first end of the second housing is connected to the second end of the first housing, the interior of the first housing and the interior of the second housing are in communication to form the mounting space, the connecting plate is installed in the first housing so as to be movable along the second direction, and the second drive member is installed in the second housing.

[0010] Furthermore, a stepped structure is formed at the connection point between the first end of the second housing and the second end of the first housing, and a guide hole is provided in the first housing that communicates with its interior along the second direction, the guide hole is located in the stepped structure, and the guide shaft is inserted into the guide hole so as to be movable along the second direction.

[0011] Furthermore, the connecting plate includes a plate body and a connecting arm, the connecting arm is installed on the outer circumference of the plate body, the plate body is drivably connected to the second drive member, and the connecting arm is connected to the guide shaft.

[0012] Furthermore, a first mounting groove is provided within the first housing, the opening of the first mounting groove is located on the surface of the first end of the first housing to form the mounting opening, the bottom of the first mounting groove is located at the second end of the first housing, the first mounting groove includes a main groove and a sub-groove, the sub-groove is provided on the outer circumference of the main groove, a second mounting groove is provided within the second housing, the opening of the second mounting groove is located at the bottom of the first mounting groove and communicates with the main groove, the bottom of the second mounting groove is located at the second end of the second housing, the first mounting groove and the second mounting groove together form the mounting space, the plate body is located within the main groove, and the connecting arm is located within the sub-groove.

[0013] Furthermore, the space between the guide shaft and the second housing is sealed.

[0014] Furthermore, a positioning column is installed inside the second housing, the positioning column is installed along the second direction, a positioning hole is provided in the connecting plate, the positioning column is located within the positioning hole, the connecting plate is movable relative to the positioning column, and is positioned and guided by the fitting of the positioning column and the positioning hole.

[0015] Furthermore, there are two positioning columns, which are installed at intervals within the second housing, and a positional restriction space for attaching the second drive member is formed between two adjacent positioning columns.

[0016] Furthermore, the connecting portion includes a connecting rod, the mounting seat has a through mounting hole provided along the first direction, the connecting rod is inserted into the mounting hole, and the connecting portion is movable along the first direction within the mounting hole.

[0017] Furthermore, the first drive device includes a first drive member that is movably installed along the first direction and has a first sliding portion installed thereon, and a second sliding portion is installed at the connecting portion, and the first sliding portion and the second sliding portion are fitted together with positional restrictions in the first direction and slidably fitted together in the second direction, thereby driving the first drive member to move the connecting portion along the first direction, and the connecting portion slides against the first drive member in the second direction.

[0018] Furthermore, the connecting portion includes a connecting rod whose first end is connected to the door body, and a sliding plate fixedly connected to the second end of the connecting rod and on which the second sliding portion is installed, wherein the first sliding portion is a sliding rail or sliding groove installed along the second direction, and the second sliding portion is a sliding groove or sliding rail that fits the first sliding portion.

[0019] Furthermore, the first drive device further includes a frame on which the first drive member is mounted so as to be movable along the first direction, and a detection device mounted on the frame for detecting the position of the first drive member.

[0020] Furthermore, the door body drive mechanism further includes a first connecting member connected to a support, the first connecting member having an elongated hole penetrating along the first direction, the connecting portion being inserted into the elongated hole, the radial longitudinal direction of the elongated hole being set along the second direction, the connecting portion and the elongated hole being slidably fitted in the first direction, the connecting portion and the elongated hole being slidably fitted in the second direction, and the space between the connecting portion and the elongated hole being sealed.

[0021] A second aspect of the present application further discloses a process chamber comprising: a chamber body; a liner structure installed within the chamber body, partitioning the chamber body into an internal cavity and an external cavity, and having a wafer transport opening that connects the internal cavity and the external cavity; a door body movably installed within the external cavity for opening and closing the wafer transport opening; and a door body drive mechanism drivably connected to the door body for driving the door body to open and close the wafer transport opening.

[0022] Furthermore, the door body has a first position, a second position and a third position, in the first position the door body is located at the wafer transport opening and closes the wafer transport opening, in the second position the door body is located away from the wafer transport opening in the second direction and a movable gap is formed between the door body and the outer wall of the liner structure, in the third position the door body is located away from the wafer transport opening in the first direction, the first drive unit drives the door body to move between the second position and the third position and the second drive unit drives the door body to move between the first position and the second position.

[0023] Furthermore, the liner structure has a first mating end face, the wafer transport opening is located on the first mating end face, the door body has a second mating end face, and at the first position of the door body, the second mating end face covers the first mating end face to seal the wafer transport opening.

[0024] Furthermore, an induction coil is installed on the second fitting end face of the door body, and at the first position of the door body, the door body brings the induction coil into contact with the liner structure.

[0025] Furthermore, a housing groove is provided on the first fitting end face, and in the first position of the door body, the induction coil is located within the housing groove and abuts against the bottom of the housing groove.

[0026] Furthermore, a boss structure is installed on the second fitting end face of the door body, the induction coil is installed on the outer peripheral side of the boss structure, the liner structure has a first end extending to the first fitting end face to form the wafer transfer port, and a second end further has a sealed passage communicating with the internal cavity. When the door body is in the first position, the boss structure is located within the sealed passage, and the surface of the protruding end of the boss structure is flush with the inner wall surface of the internal cavity, thereby forming a complete symmetrical space inside the internal cavity. A first sealing gap is formed between the outer peripheral wall of the boss structure and the inner wall of the sealed passage.

[0027] Furthermore, from the first end to the second end of the sealed passage, the distance between the inner walls installed opposite to each other within the sealed passage gradually decreases, and the boss structure is a wedge-shaped boss that fits the sealed passage.

[0028] Furthermore, at least one annular protrusion is installed along the outer periphery of the boss structure on the second fitting end face of the door body, the annular protrusion is located inside the induction coil, at least one annular groove is installed on the first fitting end face of the liner structure, the annular protrusion is located within the corresponding annular groove, and a second sealing gap is formed between the annular protrusion and the annular groove.

[0029] Furthermore, when the door body is in the second position, the boss structure disengages from the sealed passage, thereby forming the movable gap between the door body and the outer wall of the liner structure. The second driving device drives the door body to move, thereby causing the boss structure to enter or disengage from the sealed passage.

[0030] According to the third aspect of the present application, a semiconductor process device including at least one of the above process chambers is further disclosed.

[0031] In the door body drive mechanism of the present invention, in addition to the first drive unit driving the door body to move along a first direction by the connecting part, the second drive unit can also drive the door body to move along a second direction by the connecting part. Since the connecting part is movable in the second direction relative to the first drive unit and is not restricted by the first drive unit, the door body can be driven by the second drive unit to move along the second direction (for example, the lateral direction), thereby pressing the door body against the liner structure to achieve sealing or separating the door body from the liner, thereby ensuring the sealing effect of the door body and effectively avoiding friction between the door body and the liner structure. [Brief explanation of the drawing]

[0032] [Figure 1] This is a schematic diagram of the door body drive mechanism according to Embodiment 1 of the present application. [Figure 2] This is a schematic diagram of the second drive unit of the door body drive mechanism according to Embodiment 1 of the present application. [Figure 3] This is a front view of the second drive unit of the door body drive mechanism according to Embodiment 1 of the present application. [Figure 4] This is a cross-sectional view of the second housing of the second drive unit of the door body drive mechanism according to Embodiment 1 of the present application, along the AA direction. [Figure 5] This is a cross-sectional view of the entire second drive unit of the door body drive mechanism according to Embodiment 1 of the present application, along the AA direction. [Figure 6] This is a cross-sectional view of the entire second drive unit of the door body drive mechanism according to Embodiment 1 of the present application, along the BB direction. [Figure 7] This is a magnified view of part A in Figure 5. [Figure 8] This is a schematic diagram of the first drive unit of the door body drive mechanism according to Embodiment 1 of the present application. [Figure 9] This is a plan view of the first connecting member of the first drive device of the door body drive mechanism according to Embodiment 1 of the present application. [Figure 10] This is a front view of the first drive unit of the door body drive mechanism according to Embodiment 1 of the present application. [Figure 11] This is a cross-sectional view of the plan view of the first drive unit of the door body drive mechanism according to Embodiment 1 of the present application. [Figure 12] This is a schematic diagram showing the configuration when the door body of the process chamber according to Embodiment 1 of the present application is in a first position. [Figure 13] This is a schematic diagram showing the configuration when the door body of the process chamber according to Embodiment 1 of the present application is located in the second position. [Figure 14] This is a schematic diagram showing the configuration when the door body of the process chamber according to Embodiment 1 of the present application is located in the third position. [Figure 15] This is a schematic diagram showing how the liner structure of the process chamber according to Embodiment 1 of the present application is fitted to the door body. [Figure 16] This is a magnified view of section C in Figure 15. [Figure 17] This is a schematic diagram of the door body of the process chamber according to Embodiment 1 of the present application. [Figure 18] This is a magnified view of section D of Figure 17. [Figure 19] This is a magnified view of section B of Figure 14. [Figure 20] This is a schematic diagram showing the configuration when the boss structure and the sealing passage of the process chamber according to Embodiment 1 of the present application are fitted together. [Modes for carrying out the invention]

[0033] To enable those skilled in the art to better understand the technical means of this application, the door body drive mechanism, process chamber, and semiconductor process apparatus relating to this application will be described in detail below with reference to the drawings.

[0034] To achieve the objectives of the present application, as shown in Figure 1, an embodiment of the present application discloses a door body drive mechanism which can be applied to various types of semiconductor process equipment, such as etching equipment, and can drive the door body to seal or detach from a wafer transport opening. The door body drive mechanism according to the embodiment of the present application may include a first drive unit 10, a second drive unit 20, and a connecting unit 30. The connecting unit 30 is connected to the door body 70 and is drivably connected to the first drive unit 10. The first drive unit 10 drives the connecting unit 30 to move along a first direction, thereby driving the connecting unit 30 to move the door body 70 along the first direction. In a second direction intersecting the first direction, the connecting portion 30 is movable relative to the first drive unit 10, and the connecting portion 30 is also movably connected to the second drive unit 20, which drives the connecting portion 30 to move along the second direction, thereby driving the connecting portion 30 to move the door body 70 along the second direction relative to the first drive unit 10.

[0035] During use, the first drive unit 10 drives the connecting part 30 to move, and the connecting part 30 drives the door body 70 to move along the first direction. When the door body 70 moves to a predetermined position, the first drive unit 10 stops, and the movement of the connecting part 30 in the first direction stops. At this time, the second drive unit 20 drives the connecting part 30 to move along the second direction. Since the connecting part 30 is movable in the second direction relative to the first drive unit 10 and is not restricted by the first drive unit 10, the connecting part 30 can be driven by the second drive unit 20 to drive the door body 70 to move along the second direction.

[0036] When the door body drive mechanism is assembled to the process chamber, in this embodiment, the first direction is the vertical direction, i.e., the up and down direction in Figure 1, and the second direction is the horizontal direction, i.e., the left and right direction in Figure 1. When closing the door body 70, the first drive unit 10 drives the connection part 30 and the door body 70 to rise together, and after they have risen to the appropriate position, the second drive unit 20 drives the connection part 30 to move the door body 70 along the side (i.e., the second direction), thereby pressing the door body 70 against the liner structure 60 (shown in Figure 12) and achieving a seal. When opening the door body 70, first the second drive unit 20 drives the connection part 30 to move the door body 70 along the side (i.e., the second direction) to separate the door body 70 from the liner structure 60, and then the first drive unit 10 drives the second drive unit 20 and the door body 70 to descend together, completing the opening of the door body 70.

[0037] In the door body drive mechanism of the present invention, in addition to the first drive unit 10 driving the door body 70 to move along a first direction by the connecting part 30, the second drive unit 20 can also drive the door body 70 to move along a second direction by the connecting part 30. Since the connecting part 30 is movable in the second direction relative to the first drive unit 10 and is not restricted by the first drive unit 10, the door body 70 can be driven by the second drive unit 20 to move along a second direction (for example, the lateral direction). This makes it possible to press the door body 70 against the liner structure 60 to achieve sealing or to separate the door body 70 from the liner structure 60, thereby ensuring the sealing effect of the door body 70 and effectively avoiding friction between the door body 70 and the liner structure 60.

[0038] As shown in Figure 1, in this embodiment, the connecting portion 30 includes a connecting rod 31, which is installed on the second drive unit 20, the axial direction of the connecting rod 31 is set along the first direction, and the connecting rod 31 is movable in the first direction relative to the second drive unit 20. One end of the connecting rod 31 is installed on the first drive unit 10 so as to be movable along the second direction, and the second end of the connecting rod 31 is connected to the door body 70. In other words, as shown in Figure 1, the connecting rod 31 is installed on the second drive unit 20 along the vertical direction (i.e., the first direction) in Figure 1. The connecting rod 31 is movable relative to the second drive unit 20 in the vertical direction, thereby avoiding being constrained by the second drive unit 20 when the first drive unit 10 drives the connecting rod 31 up and down. Similarly, the connecting rod 31 is movable relative to the first drive unit 10 along the horizontal direction (i.e., the second direction) in Figure 1, thereby avoiding being constrained by the first drive unit 10 when the second drive unit 20 drives the connecting rod 31 to move horizontally.

[0039] Specifically, as shown in Figure 2, in this embodiment, the second drive device 20 includes a second housing 21 and a second drive member 22. As shown in Figure 3, the second housing 21 has a mounting opening 411 and a mounting space 40 communicating with the mounting opening 411. The second housing 21 is attached to a support, and the mounting opening 411 is sealed by the support. The second drive member 22 is installed in the mounting space 40 and provides driving force in the second direction to drive the connection portion 30 to move along the second direction.

[0040] The support is a component for attaching the second housing 21. In this embodiment, as shown in Figure 12, the inside of the process chamber includes an internal cavity 51 and an external cavity 52, and the support is the inner wall of the external cavity 52. ​​When the second housing 21 is attached to the inner wall of the external cavity 52, the inner wall surface of the external cavity 52 seals the mounting opening 411. This isolates the mounting space 40 from the external cavity 52, preventing process gases in the process chamber from entering the mounting space 40 and adversely affecting the components inside the second drive unit 20, while also preventing particulate matter generated by friction and collisions of internal components of the second drive unit 20 from entering the process chamber and affecting the product, thus achieving two objectives.

[0041] The second drive unit 20 further includes a transmission assembly connected between the second drive member 22 and the connector 30, the second drive member 22 driving the connector 30 to move along the second direction by applying a driving force in the second direction to the connector 30 through the transmission assembly. In some embodiments, the transmission assembly includes a connecting plate 23, a guide shaft 24, and a mounting seat 25.

[0042] The connecting plate 23 is movably installed within the mounting space 40 and is movably connected to the second drive member 22. The guide shaft 24 is inserted into the second housing 21, and the axis of the guide shaft 24 is positioned along the second direction and is movable relative to the second housing 21 in the second direction. The first end of the guide shaft 24 is located within the mounting space 40 and is fixedly connected to the connecting plate 23, and the second end of the guide shaft 24 is located outside the second housing 21. A mounting seat 25 is installed at the second end of the guide shaft 24, and the connecting portion 30 is installed on the mounting seat 25. The mounting seat 25 is driven by the guide shaft 24 and is movable along the second direction. In the first direction, the connecting portion 30 and the mounting seat 25 are relatively movable, and in the second direction, the connecting portion 30 and the mounting seat 25 are relatively fixed, thereby driving the mounting seat 25 to move the connecting portion 30 along the second direction.

[0043] In some embodiments, as shown in Figure 4, the second housing 21 includes a first housing 211 and a second housing 212. The first housing 211 has a first end and a second end that are positioned opposite each other along a second direction, and the first end of the first housing 211 is connected to a support. Furthermore, in some embodiments, a first mounting groove 41 is provided within the first housing 211, and the first mounting groove 41 is inside the first housing 211. The opening of the first mounting groove 41 is located on the surface of the first end of the first housing 211, forming a mounting opening 411, and the bottom of the first mounting groove 41 is located at the second end of the first housing 211.

[0044] The second housing section 212 has a first end and a second end that are positioned opposite each other along a second direction, and the first end of the second housing section 212 is connected to the second end of the first housing section 211. Furthermore, in some embodiments, a second mounting groove 42 is installed within the second housing section 212, and the second mounting groove 42 is an internal space of the second housing section 212, with the opening of the second mounting groove 42 located at the bottom of the first mounting groove 41 and communicating with the first mounting groove 41, and the bottom of the second mounting groove 42 located at the second end of the second housing section 212. The first mounting groove 41 and the second mounting groove 42 together form a mounting space 40.

[0045] Furthermore, in some embodiments, as shown in Figure 4, the first mounting groove 41 includes a main groove 41a and a sub-groove 41b, the sub-groove 41b is installed on the outer circumference of the main groove 41a and communicates with the main groove 41a, and the second mounting groove 42 communicates with the main groove 41a.

[0046] In some embodiments, a stepped structure 214 is formed at the connection point between the first end of the second housing 212 and the second end of the first housing 211. A guide hole 213 is further provided in the first housing 211 along the second direction, and the guide hole 213 communicates with the interior of the first housing 211 and is located in the stepped structure 214. In other words, as shown in Figure 4, one end of the guide hole 213 extends to the bottom of the sub-groove 41b, and the other end of the guide hole 213 extends to the outer surface of the second end of the first housing 211. The axial direction of the guide hole 213 is set along the second direction.

[0047] Furthermore, in some embodiments, positioning columns 27 are installed within the second housing 21. The positioning columns 27 are installed along the second direction, with the first end of the positioning column 27 connected to the bottom of the second mounting groove 42, and the second end of the positioning column 27 extending to the opening (mounting opening 411) of the first mounting groove 41. There are two positioning columns 27, which are spaced apart inside the second housing 212, and a positional limiting space is formed between the two adjacent positioning columns 27 for mounting the second drive member 22.

[0048] As shown in Figures 4 and 5, in this embodiment, the second drive member 22 is an air cylinder, which is installed in the second mounting groove 42 and located within a position-restricting space formed by the two positioning columns 27. The piston rod 221 of the air cylinder is fixedly connected to the connecting plate 23 toward the mounting opening 411, thereby driving the connecting plate 23 to move along the second direction.

[0049] The connecting plate 23 is installed in the first mounting groove 41 so as to be movable along the second direction. In some embodiments, the connecting plate 23 includes a plate body 23a and a connecting arm 23b, the connecting arm 23b being installed on the outer circumference of the plate body 23a, the plate body 23a being located in the main groove 41a and the connecting arm 23b being located in the sub-groove 41b. The plate body 23a is drivably connected to a second drive member 22 and the connecting arm 23b is connected to a guide shaft 24.

[0050] Specifically, as shown in Figure 5, the plate body 23a of the connecting plate 23 is fixedly connected to the piston rod 221 of the air cylinder. A positioning hole 231 is further provided in the plate body 23a of the connecting plate 23, and the positioning column 27 is located within the positioning hole 231. The connecting plate 23 is movable relative to the positioning column 27 and is positioned and guided by the fitting of the positioning column 27 and the positioning hole 231. When installing the connecting plate 23, it is necessary to align the positioning hole 231 with the positioning column 27 in order to install the connecting plate 23 in the first mounting groove 41.

[0051] As shown in Figure 5, the guide shaft 24 is inserted into the guide hole 213 and is movable relative to the second housing 21 in a second direction. As shown in Figure 3, the first end of the guide shaft 24 is located in the sub-groove 41b of the first mounting groove 41 and is fixedly connected to the connecting plate 23. As shown in Figure 5, the second end of the guide shaft 24 is located outside the second housing 21. As shown in Figures 1 and 5, the mounting seat 25 is installed on the second end of the guide shaft 24, the connecting portion 30 is installed on the mounting seat 25, and the mounting seat 25 is driven by the guide shaft 24 and is movable along the second direction.

[0052] As shown in Figure 6, the mounting base 25 has a through mounting hole 251 along the first direction, and the connecting part 30 is installed through the mounting hole 251 and moves along the first direction within the mounting hole 251. As a result, the connecting part 30 and the mounting base 25 are relatively movable in the first direction. In the second direction, the connecting part 30 and the mounting base 25 are relatively fixed, thereby driving the mounting base 25 to move the connecting part 30 along the second direction.

[0053] Furthermore, in order to ensure the stability of the movement of the connecting portion 30, as shown in Figure 2, a positioning sleeve 28 and a lock nut 29 are installed in the mounting hole 251. The positioning sleeve 28 is positioned between the connecting portion 30 and the mounting hole 251, and the lock nut 29 is attached to the positioning sleeve 28, thereby preventing the connecting portion 30 from shaking within the mounting hole 251.

[0054] In some embodiments, the space between the guide shaft 24 and the second housing 21 is sealed. For example, as shown in Figure 7, a sealing ring is installed between the guide shaft 24 and the guide hole 213 to ensure the sealing of the mounting space 40. To ensure smooth movement of the guide shaft 24 in the second direction, a buffer ring 26 is installed on the guide shaft 24, positioned between the guide shaft 24 and the inner wall of the guide hole 213.

[0055] In this embodiment, as shown in Figures 5 and 6, there are two connecting rods 31, which are spaced apart, ensuring that the door body 70 receives a uniform force and that its operation is more stable. Correspondingly, there are two guide holes 213 and two guide shafts 24, and the second housing section 212 is located between the two guide shafts 24. This arrangement not only facilitates the installation of the second housing 21, but also allows the second housing 21 to be housed by making full use of the space between the two connecting rods 31, making full use of the narrow internal space of the process chamber to achieve horizontal movement, improving the sealing effect of the door body 70, and effectively preventing friction between the door body 70 and the liner structure 60.

[0056] Furthermore, by installing the positioning column 27, the position of the air cylinder is restricted, making it easier to install and fix the air cylinder. In addition, the fitting of the positioning column 27 with the positioning hole 231 makes it easier to position the connecting plate 23 during assembly. Moreover, by installing the two positioning columns 27 in parallel, it is ensured that the assembly angle of the connecting plate 23 is perpendicular to the second direction, that the positions of the guide shafts 24 connected to both sides of the connecting plate 23 coincide, and furthermore, that the positions of the two connecting rods 31 coincide. Ultimately, this ensures a tight fit between the door body 70 and the liner structure 60, which is a typical example of realizing multiple uses with a single component.

[0057] In some embodiments, the first drive unit 10 includes a first drive member 13 that is movably mounted along a first direction and has a first sliding portion 14 installed on it. Furthermore, in some embodiments, in order to make the connecting portion 30 movable relative to the first drive member 13, a second sliding portion 321 is installed on the connecting portion 30 (e.g., connecting rod 31), as shown in Figure 10. The first sliding portion 14 and the second sliding portion 321 are fitted in a position-restricted manner in the first direction and slidably fitted in the second direction. This drives the first drive member 13 to move the connecting portion 30 (e.g., connecting rod 31) along the first direction, and the connecting portion 30 (e.g., connecting rod 31) slides relative to the first drive member 13 in the second direction.

[0058] Specifically, in this embodiment, as shown in Figure 8, the first sliding part 14 is a sliding rail installed along the second direction, and the second sliding part 321 is a sliding groove that fits the first sliding part 14. The sliding rail is fixedly installed on the first drive member 13 along the second direction, and to ensure stability, the two sliding rails are installed with a gap between them, as shown in Figure 10. Of course, in actual applications, the first sliding part 14 may be a sliding groove installed along the second direction, and the second sliding part 321 may be a sliding rail that fits the first sliding part 14.

[0059] In some embodiments, as shown in Figures 1 and 8, the door body drive mechanism further includes a first connecting member 11. The first connecting member 11 is connected to a support and is slidably fitted with a connecting portion 30 (e.g., a connecting rod 31) in a first direction and slidably fitted with the connecting portion 30 (e.g., a connecting rod 31) in a second direction. Specifically, the first connecting member 11 is provided with an elongated hole 111 that penetrates along the first direction, and the connecting portion 30 (e.g., a connecting rod 31) is inserted into the elongated hole 111. The radial longitudinal direction of the elongated hole 111 is set along the second direction. The connecting portion 30 and the elongated hole 111 are slidably fitted in the first direction and slidably fitted in the second direction. The connection between the connecting portion 30 and the elongated hole 111 is sealed.

[0060] In this embodiment, as shown in Figures 1, 8, and 9, the first connecting member 11 is a mounting plate, and the mounting plate is provided with an elongated hole 111 (shown in Figure 9) that penetrates the mounting plate along a first direction (up and down direction in Figure 1), and the connecting portion 30 is inserted into the elongated hole 111. The radial length direction of the elongated hole 111 is set along a second direction (up and down direction in Figure 9), and the connecting portion 30 and the elongated hole 111 are slidably fitted together in the first direction, so that the connecting portion 30 is driven to move by the first drive member 13. The connecting portion 30 and the elongated hole 111 are slidably fitted together in the second direction, that is, they can move left and right as a whole in Figure 1, so that the connecting portion 30 is driven to move by the second drive member 22. Because the space between the connecting portion 30 and the elongated hole 111 is sealed, it is possible to prevent process gas from leaking from the elongated hole 111 after the mounting plate has been assembled into the process chamber. Preferably, as shown in Figures 1 and 8, the space between the connecting portion 30 and the elongated hole 111 is sealed by a bellows, thereby enabling both sealing and movement.

[0061] Furthermore, in some embodiments, the first drive unit 10 further includes a frame 12. As shown in Figure 10, the first connecting member 11 is fixed to the first end of the frame 12, for example, by bolts.

[0062] As shown in Figure 12, when assembled into a process chamber, the first connecting member 11 is connected to the chamber body 50. An opening is provided at the bottom of the chamber body 50, and the external cavity 52 communicates with the outside through the opening. The first connecting member 11 is attached to the opening position of the chamber body 50, and the frame 12 is fixedly connected to the chamber body 50 by the first connecting member 11.

[0063] The connecting rod 31 of the connecting portion 30 is inserted into both the first connecting member 11 and the chamber body 50, and the first connecting member 11 and the connecting portion 30 are slidably fitted in a first direction and slidably fitted in a second direction.

[0064] Furthermore, in some embodiments, as shown in Figure 10, the first drive unit 10 further includes a sliding mechanism 16 and a servo motor 17. The servo motor 17 is fixed to the second end of the frame 12, and the sliding mechanism 16 is mounted on the frame 12 and located between the first and second ends of the frame 12. The servo motor 17 is drivably connected to the sliding mechanism 16, and the first drive member 13 is fixedly connected to the sliding mechanism 16. That is, the first drive member 13 is movably mounted on the frame 12 by the sliding mechanism 16, a connecting portion 30 (e.g., a connecting rod 31) is mounted on the first drive member 13, and the first drive member 13 drives the connecting portion 30 to move along a first direction, and the connecting portion 30 is movable along a second direction on the first drive member 13.

[0065] During use, the sliding mechanism 16 is driven by the servo motor 17, which drives the first drive member 13 to move between the first and second ends of the frame 12. While moving, the first drive member 13 drives the connecting portion 30 to move in the first direction. After moving to a predetermined position, the connecting portion 30 is driven by the second drive device 20 to move along the second direction on the first drive member 13, thereby driving the door body 70 to move along the second direction.

[0066] After being assembled into the process chamber, the servo motor 17 drives the sliding mechanism 16, which in turn drives the sliding mechanism 16 to move the first drive member 13, and the moving first drive member 13 drives the connecting portion 30 to move in a first direction. Furthermore, the connecting portion 30 drives the door body 70 to move between the position shown in Figure 13 and the position shown in Figure 14. When the first drive member 13 moves to the first end of the frame 12, the connecting portion 30 drives the door body 70 to move to the position shown in Figure 13. At this time, driven by the second drive device 20, the connecting portion 30 moves along the first drive member 13 in a second direction, driving the door body 70 to move along the second direction to the position shown in Figure 12, thereby closing the wafer transport opening 61.

[0067] The connecting section 30 includes a connecting rod 31 and a sliding plate 32. There are, for example, two connecting rods 31, the first ends of both connecting rods 31 fixedly connected to the door body 70, and the second ends of both connecting rods 31 fixedly connected to the sliding plate 32. That is, the sliding plate 32 is fixedly connected to the second ends of the connecting rods 31, and the sliding plate 32 is installed on a sliding rail so as to be movable along a second direction. A sliding groove is provided in the sliding plate 32, and the sliding rail is located within the sliding groove and slidably fitted into the sliding groove. In other words, the sliding plate 32 is installed on the first drive member 13 so as to be movable by the sliding rail, and the connecting rods 31 are fixedly connected to the sliding plate 32, thereby enabling movement in the second direction relative to the first drive member 13. This method ensures that the two connecting rods 31 move simultaneously, and thus ensures the smooth movement of the door body 70. Furthermore, in this embodiment, the cross-section of the sliding rail has a T-shaped structure.

[0068] In this embodiment, the first sliding portion 14 is a sliding rail installed on the first drive member 13 along the second direction, and the second sliding portion 321 is a sliding groove installed on the sliding plate 32 and fitted with the first sliding portion 14. However, it is not limited to this, and in several other embodiments not shown, the first sliding portion 14 may be a sliding groove and the second sliding portion 321 may be a sliding rail. Any structure that enables the first sliding portion 14 and the second sliding portion 321 to be fitted with positional restrictions in the first direction and to slide-fit in the second direction is within the scope of protection of this application.

[0069] To easily obtain the position of the door body 70, the first drive unit 10 further includes a detection device 15, as shown in Figure 8. The detection device 15 is installed on the frame 12 and detects the position of the first drive member 13 in order to indirectly obtain the position of the door body 70. Specifically, as shown in Figure 11, the detection device 15 is an optical sensor and has a transmitting end 151 and a receiving end 152 installed opposite each other, with a detection space formed between the transmitting end 151 and the receiving end 152. A shielding member 131 is installed on the first drive member 13, and when the first drive member 13 moves to a position corresponding to the detection device 15, the shielding member 131 is located within the detection space, thereby detecting the position of the first drive member 13 and enabling the indirect acquisition of the position of the door body 70.

[0070] In this embodiment, as shown in Figure 8, there are two detection devices 15, which are installed on the frame 12 at intervals from each other. The two detection devices 15 correspond to the upper and lower limits of the first drive member 13 moving in the first direction, that is, to the two limit positions of the door body 70 in the first direction. However, the embodiment is not limited to this, and in some other embodiments not shown, the detection devices 15 may be installed only in positions close to the first end of the frame 12, thereby allowing the detection devices 15 to detect whether or not the first drive member 13 is at the upper limit of its stroke in the first direction. In this case, the position corresponding to the door body 70 is the same as the height of the wafer transport opening, which facilitates the movement control of the second drive unit 20.

[0071] As shown in Figures 12 to 14, the present invention further discloses a process chamber including a chamber body 50, a liner structure 60, a door body 70, and a door body drive mechanism. The liner structure 60 is installed inside the chamber body 50 and divides the chamber body 50 into an internal cavity 51 and an external cavity 52, and the liner structure 60 has a wafer transport opening 61 that connects the internal cavity 51 and the external cavity 52. ​​The door body 70 is movably installed inside the external cavity 52 and opens and closes the wafer transport opening 61. The door body drive mechanism is drivably connected to the door body 70 and drives the door body 70 to open and close the wafer transport opening 61.

[0072] In the process chamber according to the present invention, the door body 70 can be moved laterally (i.e., in the second direction) by connecting the door body drive mechanism according to the present invention to the door body 70 in a drivable manner. This makes it possible to bring the door body 70 into contact with the liner structure 60 to achieve sealing, or to separate the door body 70 from the liner, thereby ensuring the sealing effect of the door body 70 and effectively avoiding friction between the door body 70 and the liner.

[0073] In some embodiments, as shown in Figures 12 and 13, the door body 70 has a first position, a second position, and a third position.

[0074] As shown in Figure 12, in the first position, the door body 70 is located at the wafer transport opening 61 and closes the wafer transport opening 61.

[0075] As shown in Figure 13, in the second position, the door body 70 is located away from the wafer transport opening 61 in the second direction, and a movable gap is formed between the door body 70 and the outer wall of the liner structure 60.

[0076] As shown in Figure 14, in the third position, the door body 70 is positioned to avoid the wafer transport opening 61 in the first direction. The first drive unit 10 drives the door body 70 to move between the second and third positions, and the second drive unit 20 drives the door body 70 to move between the first and second positions.

[0077] In some embodiments, the process chamber according to the present invention further includes a control device, which is electrically connected to a detection device 15, a servo motor 17, and a second drive device 20, respectively, and controls the second drive device 20 based on the position of the first drive member 13 to drive the door body 70 to switch between a first position and a second position.

[0078] In some embodiments, as shown in Figures 15 and 16, the liner structure 60 has a first mating end face 62, and the wafer transport opening 61 is located on the first mating end face 62. The door body 70 has a second mating end face 71, and in the first position of the door body 70, the second mating end face 71 covers the first mating end face 62 and seals the wafer transport opening 61.

[0079] In some embodiments, as shown in Figures 17 and 18, an induction coil 80 is installed on the second fitting end face 71 of the door body 70, and in the first position of the door body 70, the door body 70 brings the induction coil 80 into contact with the liner structure 60. By installing the induction coil 80, in the first position of the door body 70, the door body 70 brings the induction coil 80 into contact with the liner structure 60, thereby creating electrical contact between the liner structure 60 and the door body 70, and establishing a completely sealed radio frequency environment.

[0080] In some embodiments, as shown in Figure 19, a accommodating groove 621 is provided on the first fitting end face 62, and as shown in Figure 20, in the first position of the door body 70, the induction coil 80 is located within the accommodating groove 621 and abuts against the bottom of the accommodating groove 621. By providing a accommodating groove 621 on the first fitting end face 62, when the door body 70 is in the first position, the induction coil 80 is located within the accommodating groove 621 and abuts against the bottom of the accommodating groove 621, ensuring tight contact between the first fitting end face 62 and the second fitting end face 71 and improving the sealing effect.

[0081] In some embodiments, as shown in Figures 17 and 18, a boss structure 72 is installed on the second mating end face 71 of the door body 70, and the induction coil 80 is installed on the outer periphery side of the boss structure 72. As shown in Figure 19, the liner structure 60 has a first end that extends to the first mating end face 62 to form a wafer transport opening 61, and a second end that further has a sealed passage 63 communicating with the internal cavity 51. As shown in Figure 20, in the first position of the door body 70, the boss structure 72 is located within the sealed passage 63, and the surface of the protruding end of the boss structure 72 is flush with the inner wall surface of the internal cavity 51, thereby forming a perfectly symmetrical space inside the internal cavity 51. A first sealed gap 91 (shown in Figure 16) is formed between the outer periphery wall of the boss structure 72 and the inner wall of the sealed passage 63. By installing the boss structure 72 and the sealing passage 63 to form the first sealing gap 91, the first sealing gap 91 can prevent particulate matter generated by the collision between the liner structure 60 and the door body 70 from contaminating the wafer, while also protecting the induction coil 80 by blocking the passage of plasma in the process gas.

[0082] As shown in Figure 16, from the first end to the second end of the sealed passage 63, the distance between the opposing inner walls installed within the sealed passage 63 gradually decreases, and the boss structure 72 is a wedge-shaped boss that fits the sealed passage 63. In other words, the inner wall of the sealed passage 63 is installed at an incline. In this embodiment, the distance between the outer periphery wall of the boss structure 72 and the inner wall of the sealed passage 63 is d, and the range of d is 0.5 mm to 1.3 mm. The inner wall of the sealed passage 63 and the arc tangent at that position form an angle α, and the range of α is 30° to 60°, which increases the ratio of the gap depth to width, thereby achieving the objective of extinguishing the plasma.

[0083] As shown in Figures 16 to 20, an annular projection 73 is provided on the second fitting end face 71 of the door body 70 along the outer circumference of the boss structure 72, and the annular projection 73 is located inside the induction coil 80. An annular groove 622 is provided on the first fitting end face 62 of the liner structure 60, and the annular projection 73 is located inside the annular groove 622, forming a second sealing gap 92 between the annular projection 73 and the annular groove 622. The first sealing gap 91 and the second sealing gap 92 communicate to form a labyrinth sealing structure 90. By positioning the first sealing gap 91 and the second sealing gap 92 so that they communicate to form a labyrinth sealing structure 90, the distance the process gas flows to the induction coil 80 is increased, the flow resistance is increased, and consequently the difficulty of the process gas reaching the induction coil 80 is increased, as is the probability of plasma extinction, thereby better protecting the induction coil 80.

[0084] As shown in Figures 13 and 19, in the second position of the door body 70, the boss structure 72 disengages from the sealing passage 63, thereby creating a movable gap between the door body 70 and the outer wall of the liner structure 60. The second drive unit 20 drives the door body 70 to move, thereby causing the boss structure 72 to enter or disengage from the sealing passage 63.

[0085] To ensure that the door body 70 is firmly pressed against the liner structure 60, and to ensure a constant compression amount (20% to 25% compression) of the induction coil 80, and because the boss structure 72 must enter the sealing passage 63 and the first sealing gap 91 must be maintained at 0.5 mm to 1.3 mm, it is necessary to improve the fitting accuracy between the door body 70 and the liner structure 60. Therefore, the conventional door body structure is divided into a first drive unit 10 that drives the door body 70 to move along a first direction and a second drive unit 20 that drives the door body 70 to move along a second direction. The servo motor 17 of the first drive unit 10 precisely controls the lifting height of the door body 70 in the first direction, and the added second drive unit 20 ensures that the door body 70 moves smoothly in the second direction, presses the arc-shaped induction coil 80, ensures the integrity of the radio frequency circuit, and further improves process uniformity.

[0086] The present invention further discloses a semiconductor process apparatus including at least one of the above-described process chambers. By installing a second drive unit 20, the door body 70 can be moved laterally, thereby pressing the door body 70 against the liner structure 60 to achieve sealing, or separating the door body 70 from the liner structure 60, thereby ensuring the sealing effect of the door body 70 and effectively avoiding friction between the door body 70 and the liner structure 60.

[0087] It should be understood that the embodiments described above are merely exemplary embodiments used to illustrate the principles of the present application, and that the present application is not limited thereto. Those skilled in the art can make various modifications and improvements without departing from the spirit and essence of the present application, and these modifications and improvements will also be deemed to fall within the scope of protection of the present application. [Explanation of Symbols]

[0088] 10 First drive unit 11 First connecting member 111 Long hole 12 frames 13 First drive member 131 Shielding member 14. First sliding part 15 Detection device 151 Transmitter 152 Receiving end 16. Sliding mechanism 17 Servo motor 20 Second drive unit 21 Second Housing 211 First Detention Unit 212 Second Detention Unit 213 Guide hole 214 Step structure 22 Second drive member 221 Piston Rod 23 Connection Plate 23a Board body 23b Connecting Arm 231 Positioning holes 24 Guide axis 25 Mounting base 251 mounting holes 26 cushioning ring 27 Positioning column 28 Positioning sleeve 29 Lock nuts 30 Connection part 31 Connecting Rod 32 Sliding plate 321 Second sliding part 40 mounting space 41 First mounting groove 41a Main groove 41b Minor groove 411 Mounting port 42 Second mounting groove 50 Chamber body 51 Internal Cavity 52 External Cavity 60 Liner structure 61 Wafer transport port 62 First mating end face 621 Retaining groove 622 Annular groove 63 Sealed passage 70 Door Body 71 Second mating end face 72 Boss structure 73 Annular projection 80 Induction Coil 90 Labyrinth Sealed Structure 91 First sealing gap 92 Second sealing gap

Claims

1. First drive unit and The second drive unit, It includes a connection part that is connected to the door body and is drivable to the first drive unit and the second drive unit, The first drive device drives the connecting portion to move along the first direction, thereby driving the connecting portion to move the door body along the first direction. The second drive device drives the connecting portion to move along a second direction intersecting the first direction, thereby driving the connecting portion to move the door body along the second direction relative to the first drive device. The second drive device is A second housing having a mounting opening and a mounting space communicating with the mounting opening, attached to a support, and the mounting opening being sealed by the support, Includes a second drive member installed within the mounting space and providing a driving force in the second direction to drive the connection portion to move along the second direction, A door body drive mechanism characterized by the following features.

2. The second drive device further includes a transmission assembly connected between the second drive member and the connection portion, The aforementioned transmission assembly is A connecting plate is movably installed within the aforementioned mounting space and is movably connected to the second drive member, Includes a guide shaft inserted into the second housing, having an axis set along the second direction and movable relative to the second housing in the second direction, with a first end located within the mounting space and fixedly connected to the connecting plate, and a second end located outside the second housing, A mounting seat is provided at the second end of the guide shaft, the connecting portion is mounted on the mounting seat, and the mounting seat is driven by the guide shaft and is movable along the second direction. In the first direction, the connecting portion and the mounting seat are relatively movable. In the second direction, the connecting portion and the mounting seat are fixed relative to each other, thereby driving the mounting seat to move the connecting portion along the second direction. The door body drive mechanism according to feature 1.

3. The preceding 2 housing is A first housing section having a first end and a second end that are positioned opposite each other along the second direction, It includes a second housing having a first end and a second end that are positioned opposite each other along a second direction, The first end of the first housing is connected to the support, the mounting opening is provided at the first end of the first housing, and the first end of the second housing is connected to the second end of the first housing. The interior of the first housing and the interior of the second housing are in communication, forming the mounting space. The connecting plate is installed in the first housing so as to be movable along the second direction, The second drive member is installed in the second housing, The door body drive mechanism according to feature 2.

4. A stepped structure is formed at the connection point between the first end and the second end of the second housing portion, a guide hole is provided in the first housing portion that communicates with its interior along the second direction, the guide hole is located in the stepped structure, and the guide shaft is inserted into the guide hole so as to be movable along the second direction. The door body drive mechanism according to feature 3.

5. The connecting plate includes a plate body and a connecting arm, the connecting arm is installed on the outer circumference of the plate body, the plate body is drivably connected to the second drive member, and the connecting arm is connected to the guide shaft. The door body drive mechanism according to feature 3.

6. A first mounting groove is provided within the first housing portion, the opening of the first mounting groove is located on the surface of the first end of the first housing portion to form the mounting opening, the bottom of the first mounting groove is located at the second end of the first housing portion, the first mounting groove includes a main groove and a sub-groove, the sub-groove is provided on the outer circumference of the main groove, A second mounting groove is installed within the second housing portion, the opening of the second mounting groove is located at the bottom of the first mounting groove and communicates with the main groove, the bottom of the second mounting groove is located at the second end of the second housing portion, and the first mounting groove and the second mounting groove together form the mounting space. The plate body is located within the main groove, and the connecting arm is located within the secondary groove. The door body drive mechanism according to feature 5.

7. The space between the guide shaft and the second housing is sealed. The door body drive mechanism according to feature 2.

8. A positioning column is installed inside the second housing, and the positioning column is installed along the second direction. The connecting plate is provided with a positioning hole, the positioning column is located within the positioning hole, the connecting plate is movable relative to the positioning column, and is positioned and guided by the fitting of the positioning column and the positioning hole. The door body drive mechanism according to feature 3.

9. There are two positioning columns, which are installed at intervals within the second housing, and a positional restriction space for attaching the second drive member is formed between two adjacent positioning columns. The door body drive mechanism according to feature 8.

10. The connecting portion includes a connecting rod, the mounting base has a through mounting hole provided along the first direction, the connecting rod is inserted into the mounting hole, and the connecting portion is movable along the first direction within the mounting hole. The door body drive mechanism according to feature 2.

11. The first drive device is It includes a first drive member that is movably installed along the first direction and has a first sliding portion installed on it, A second sliding portion is provided in the connecting portion, and the first sliding portion and the second sliding portion are fitted together with their positions restricted in the first direction and slidably fitted together in the second direction, thereby driving the first drive member to move the connecting portion along the first direction, and the connecting portion slides relative to the first drive member in the second direction. The door body drive mechanism according to feature 1.

12. The aforementioned connection part is A connecting rod, the first end of which is connected to the door body, It includes a sliding plate fixedly connected to the second end of the connecting rod and on which the second sliding portion is installed, The first sliding portion is a sliding rail or sliding groove installed along the second direction, and the second sliding portion is a sliding groove or sliding rail that fits the first sliding portion. The door body drive mechanism according to feature 11.

13. The first drive device is The first drive member is mounted on a frame that is movable along the first direction, The frame further includes a detection device installed thereon for detecting the position of the first drive member, The door body drive mechanism according to feature 12.

14. The aforementioned door body drive mechanism is It further includes a first connecting member connected to a support, The first connecting member is provided with an elongated hole that penetrates along the first direction, the connecting portion is inserted into the elongated hole, and the longitudinal direction of the elongated hole in the radial direction is set along the second direction. The connecting portion and the elongated hole are slidably fitted together in the first direction. The connecting portion and the elongated hole are slidably fitted together in the second direction. The connection portion and the elongated hole are sealed and fitted together. The door body drive mechanism according to feature 1.

15. Chamber body and A liner structure is installed inside the chamber body, partitions the chamber body into an internal cavity and an external cavity, and has a wafer transport port that connects the internal cavity and the external cavity, A door body is movably installed within the external cavity and opens and closes the wafer transport opening, The door body drive mechanism according to claim 1, which is drivably connected to the door body and drives the door body to open and close the wafer transport opening, A process chamber characterized by the following features.

16. The door body has a first position, a second position and a third position, In the first position, the door body is located at the wafer transport opening and closes the wafer transport opening. In the second position, the door body is located away from the wafer transport opening in the second direction, and a movable gap is formed between the door body and the outer wall of the liner structure. In the third position, the door body is positioned in a location that avoids the wafer transport opening in the first direction. The first drive device drives the door body to move between the second position and the third position. The second drive device drives the door body to move between the first position and the second position. The process chamber according to feature 15.

17. The liner structure has a first mating end face, and the wafer transport opening is located on the first mating end face. The door body has a second fitting end face, and in the first position of the door body, the second fitting end face covers the first fitting end face and seals the wafer transport opening. The process chamber according to claim 16.

18. An induction coil is installed on the second fitting end face of the door body, and in the first position of the door body, the door body brings the induction coil into contact with the liner structure. The process chamber according to feature 17.

19. A suction groove is provided on the first fitting end face, and in the first position of the door body, the induction coil is located within the suction groove and abuts against the bottom of the suction groove. The process chamber according to feature 18.

20. A boss structure is installed on the second fitting end face of the door body, and the induction coil is installed on the outer circumference side of the boss structure. The liner structure further has a first end that extends to the first mating end face to form the wafer transport opening, and a second end that has a sealed passage communicating with the internal cavity. When the door body is in the first position, the boss structure is located within the sealing passage, and the surface of the protruding end of the boss structure is flush with the inner wall surface of the inner cavity, thereby forming a perfectly symmetrical space inside the inner cavity. A first sealing gap is formed between the outer circumferential wall of the boss structure and the inner wall of the sealing passage. The process chamber according to feature 18.

21. From the first end to the second end of the sealing passage, the distance between the inner walls installed opposite each other within the sealing passage gradually decreases, and the boss structure is a wedge-shaped boss that fits into the sealing passage. The process chamber according to claim 20.

22. At least one annular projection is provided on the second fitting end face of the door body along the outer circumference of the boss structure, and the annular projection is located inside the induction coil. At least one annular groove is provided on the first fitting end face of the liner structure, the annular projection is located within the corresponding annular groove, and a second sealing gap is formed between the annular projection and the annular groove. The process chamber according to claim 20.

23. When the door body is in the second position, the boss structure disengages from the sealing passage, thereby forming the movable gap between the door body and the outer wall of the liner structure. The second drive device drives the door body to move, thereby causing the boss structure to enter or exit the sealing passage. The process chamber according to claim 20.

24. The process chamber comprises at least one according to any one of claims 15 to 23, A semiconductor process apparatus characterized by the following features.

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