Ultrafast lasers using metaoptics

Abstract

A pulsed laser light source is provided. The pulsed laser light source may comprise a light-emitting structure configured to generate a continuous wave of coherent electromagnetic radiation at a predetermined frequency. The pulsed laser light source may further comprise at least one mirror structure. The mirror structure may include a plurality of optical nanoelements. The plurality of optical nanoelements are configured to have a resonance frequency corresponding to the frequency of the coherent electromagnetic radiation such that the continuous wave of coherent electromagnetic radiation is substantially reflected from the mirror structure.

Description

Technical Field

[0001] The present disclosure relates to components for generating ultrashort laser pulses.

Background Art

[0002] Ultra-high-speed laser pulses can be designed by active elements or passive elements. In conventional ultra-high-speed lasers, since mirrors are arranged in the optical resonator of the laser, there are restrictions on converting a continuous-wave laser into a pulsed laser. Examples of active elements include acousto-optic modulators and electro-optic modulators, etc., which are highly complex and the pulse length is on the order of picoseconds. Examples of passive elements include saturable absorbers, and the pulse length is on the order of femtoseconds.

Summary of the Invention

Problems to be Solved by the Invention

[0003] An object of the present invention is to provide a pulsed laser light source having improved integration.

Means for Solving the Problems

[0004] In one aspect, a pulsed laser light source is provided that includes a light-emitting structure configured to generate a continuous wave of coherent electromagnetic radiation of a predetermined frequency. The pulsed laser light source may further include at least one mirror structure. The mirror structure includes a plurality of optical nano-elements. The plurality of optical nano-elements are configured to have a resonance frequency corresponding to the frequency of the coherent electromagnetic radiation so that the continuous wave of the coherent electromagnetic radiation is substantially reflected from the mirror structure.

[0005] The optical element utilizes the resonance properties of optical nanoelements. Thus, the optical component can be a passive optical element capable of generating femtosecond laser pulses. In other words, an array of resonant optical nanoelements with a mirror structure can essentially function as a time-dependent mirror. The mirror structure can behave like an optical mirror with respect to continuous waves (CW). The optical component can be transparent to short pulses. Therefore, a laser utilizing a mirror structure can reflect continuous waves of laser light while transmitting short pulses of laser light. Consequently, a laser using a mirror structure as a mirror can passively provide short pulses of laser light. The properties of the mirror structure can be theoretically explained using the Ewald-Oseen extinction theorem in the transient region.

[0006] Thus, the mirror structure can be used as a time-dependent mirror for a coherent laser source that emits laser pulses. This mirror structure can simplify the design of ultrafast lasers. A vertical cavity surface-emitting laser (VCSEL) component can include, for example, an optical resonator formed by a layer of coherent electromagnetic emission generation structure, a dielectric layer, a distributed Bragg reflector (DBR), and an (optional) embedding layer. The mirror structure can be placed outside the optical resonator, for example, outside the optical resonator. This can sometimes simplify the design process of the VCSEL component. In other words, the mirror structure does not need to be placed inside the laser resonator, as is done in the comparable laser component, but can be placed outside the optical resonator, for example, as a mirror of the laser. In this way, there is no principle constraint on converting any continuous-wave laser into a pulsed laser.

[0007] In another embodiment, a method for manufacturing a pulsed laser light source is provided. The method includes forming a light-emitting structure configured to generate a continuous wave of coherent electromagnetic radiation of a predetermined frequency, and forming at least one mirror structure comprising a plurality of optical nanoelements, wherein the plurality of optical nanoelements are configured to have resonant frequencies corresponding to the frequency of the coherent electromagnetic radiation such that the continuous wave of coherent electromagnetic radiation is substantially reflected from the mirror structure.

[0008] In this way, a pulsed laser light source with improved vertical integration can be provided.

[0009] In the drawings, similar reference numerals indicate generally the same parts across different drawings. The drawings are not necessarily to scale and instead focus on illustrating the general principles of the invention. In the following description, various aspects of the invention will be described with reference to the following drawings. [Brief explanation of the drawing]

[0010] [Figure 1A] This demonstrates the properties of an optical metasurface. [Figure 1B] This demonstrates the properties of an optical metasurface. [Figure 2A] The characteristics of a metasurface according to one aspect of the present invention are shown. [Figure 2B] The characteristics of a metasurface according to one aspect of the present invention are shown. [Figure 3] A schematic cross-sectional view of a pulsed laser light source according to one aspect of the present invention is shown. [Figure 4A] A diagram of an optical metasurface according to another aspect of the present invention is shown. [Figure 4B] A diagram of an optical metasurface according to another aspect of the present invention is shown. [Figure 5A] A diagram of an optical metasurface according to another aspect of the present invention is shown. [Figure 5B] A diagram of an optical metasurface according to another aspect of the present invention is shown. [Figure 6]This shows a flowchart of the manufacturing method for optical metalens components. [Modes for carrying out the invention]

[0011] The following detailed descriptions refer, as illustrative examples, to the accompanying drawings illustrating specific details and embodiments in which this disclosure may be implemented. One or more embodiments are described with sufficient detail to enable a person skilled in the art to implement this disclosure. Other embodiments may be used, and structural, logical, and electrical modifications may be made without departing from the scope of this disclosure. The various embodiments described herein are not necessarily mutually exclusive, and some embodiments may be combined with one or more other embodiments to form new embodiments. Some embodiments are described in relation to methods, and others in relation to apparatus. However, it may be understood that embodiments described in relation to methods may also be applicable to apparatus, and vice versa. Throughout the drawings, similar reference numerals should be noted to indicate identical or similar elements, features, and structures. Throughout the drawings, proportions should not necessarily be to scale, and the size of technical features may be exaggerated to facilitate illustration.

[0012] Exemplary, a vertical-cavity surface-emitting laser (VCSEL) component is provided, having at least one metasurface mirror (a mirror structure containing multiple optical nanoelements) that emits a pulsed laser beam (also called a laser pulse). The operating wavelength of the pulsed laser light source can be flexibly adjusted by scaling the dimensions of the individual optical nanoelements that form the metasurface of the mirror structure. One feature of the VCSEL component is that it can emit light in both directions (up and down). However, it is also possible to emit light in one direction by using non-identical mirror structures with slightly detuned resonance frequencies, thereby making one mirror more transparent (less reflective) to ensure unidirectional emission.

[0013] Figure 1A shows a schematic cross-sectional side view of a VCSEL component. Figure 1B shows a schematic cross-sectional top view of a VCSEL component. The vertical-cavity surface-emitting laser (VCSEL) component 100 may include a coherent electromagnetic radiation generation structure 190 configured to generate a continuous wave of coherent electromagnetic radiation 180 at a predetermined frequency. A dielectric layer 104 may be formed on or above the coherent electromagnetic radiation generation structure 190. At least one mirror structure 110 may be placed on or above the dielectric layer 104, or on or above the radiation generation structure 190 if the dielectric layer 104 is optional. For example, the coherent electromagnetic radiation generation structure 190, the mirror structure 110, and the dielectric layer 104 may be integrated on a shared semiconductor substrate (not shown).

[0014] Furthermore, the dielectric layer 104 is transparent or nearly transparent (transmittance greater than 0.95) to the light 180 generated by the coherent electromagnetic radiation generation structure 190. Multiple optical nanoelements 102-i may be formed directly on the surface of the dielectric layer 104.

[0015] The mirror structure 110 has a plurality of optical nanoelements 102-i (where i is an integer). An optically coupled array of optical nanoelements 102-i, for example, a pillar array, has a resonant frequency (or resonant wavelength) in the pillar library, depending in particular on the size 106 (e.g., diameter) and pitch 108 of the pillars forming the array. Optically coupled can be understood as the optical nanoelements 102-i being capable of optical resonance in the light spectrum. Thus, an array of optically coupled optical nanoelements 102-i can reflect a continuous wave 304 of coherent electromagnetic radiation whose frequency corresponds to the resonant frequency of the array of optically coupled optical nanoelements 102-i, as shown in Figure 2A. Laser pulses 302 corresponding to the resonant aspect of the continuous wave can be transmitted by the mirror structure, as shown in Figure 2A and described in more detail in Figures 4B and 5B.

[0016] Note that resonance is not caused by the shape of a single optical nanoelement, but is a collective phenomenon of optically coupled optical nanoelements 102-i in an array of optically coupled optical nanoelements.

[0017] In other words, the pulsed laser light source 100 may include a light emitting structure 190 configured to generate a continuous wave of coherent electromagnetic radiation at a predetermined frequency. Further, the pulsed laser light source 100 may include at least one mirror structure 110. The mirror structure 110 may include a plurality of optical nanoelements 102-i. The plurality of optical nanoelements 102-i may be configured to have a resonance frequency (see FIG. 2B) corresponding to the frequency of the coherent electromagnetic radiation so that the continuous wave of the coherent electromagnetic radiation is substantially reflected from the mirror structure 110.

[0018] In other words, the pulsed laser light source 100 may be configured such that none, or substantially none, of the continuous wave of the coherent electromagnetic radiation is emitted into the surrounding environment of the pulsed laser light source.

[0019] As shown in the schematic top view of FIG. 1B, at least some of the plurality of optical nanoelements are arranged at the array position 120. The resonance frequency may correspond to the pitch 108 between the optical nanoelements 102-i at the array position. For example, at least some of the plurality of optical nanoelements are arranged in a grid of regular positions.

[0020] Alternatively (not shown), or for some of the plurality of optical nanoelements, at least some of the plurality of optical nanoelements are arranged at array positions corresponding to array positions offset from a grid of regular positions, and each arrangement position corresponds to a grid position and an offset vector with respect to the grid position. The offset vector is configured such that the length of the offset vector follows a predetermined distribution function. Thus, the line width of the resonance, and thus the pulse length of the laser pulse, can be made as desired.

[0021] In other words, either the structure of the optical nanoelement 102-i or the arrangement of the array positions of the optical nanoelements 102-i can be configured such that the plurality of optical nanoelements 102-i can include an optical resonance frequency corresponding to the frequency of the light 180 generated by the coherent electromagnetic radiation generation structure 190.

[0022] The optical resonance frequencies of the plurality of optical nanoelements 102-i correspond to any one of the lateral extension 106 of the optical nanoelement 102-i, the taper angle "a" of the optical nanoelement 102-i, the lateral distance 108 between adjacent optical nanoelements 102-i (e.g., between centers or between sidewalls; also referred to as pitch), the height 114 of the optical nanoelement 102-i, the shape of the optical nanoelement 102-i (e.g., any one of a circular cross-sectional shape, an elliptical cross-sectional shape, a linear cross-sectional shape), the material of the plurality of optical nanoelements 102-i (e.g., refractive index), the arrangement of the plurality of optical nanoelements 102-i, the incident angle of the light 180 onto the plurality of optical nanoelements 102-i, or any combination thereof. The optical nanoelements 102-i can be separated by a distance 108 in the range of about 100 nm to about 1000 nm, for example in the range of about 200 nm to about 600 nm, for example in the range of about 250 nm to about 500 nm. The optical nanoelements 102-i can have a height 114 in the range of about 10 nm to about 10000 nm, for example in the range of about 200 nm to about 1600 nm, for example in the range of about 450 nm to about 800 nm. The optical nanoelements 102-i can have a lateral extension 106 in the range of about 10 nm to about 1000 nm, for example in the range of about 50 nm to about 700 nm, for example in the range of about 100 nm to about 350 nm. The optical nanoelements 102-i can have a taper angle "a" in the range of about 80° to about 90°, for example in the range of about 82° to about 90°, for example in the range of about 85° to about 88°.

[0023] The plurality of optical nanoelements 102-i can be arranged in a regular pattern. The arrangement of the array positions of the optical nanoelements can correspond to a regular grid of positions, and each array position corresponds to a grid position. The regular grid can be any one of a monoclinic lattice, an orthorhombic lattice, a square lattice, and a hexagonal lattice.

[0024] The mirror structure 110 having multiple optical nanoelements 102-i may have high reflectivity and low transmittance with respect to continuous electromagnetic waves having frequencies corresponding to the optical resonance frequencies of the multiple optical nanoelements 102-i.

[0025] The pulsed laser light source 100 may further include a sealing layer 112 on or above a plurality of optical nanoelements 102-i. The sealing layer 112 may further be formed in the gaps between adjacent optical nanoelements 102-i. The sealing layer 112 can protect the plurality of optical nanoelements 102-i from physical damage and interaction with dust. Alternatively, or in addition, the sealing layer 112 may provide a surface with lower roughness (e.g., root mean square roughness (RMS)) than the surface of the dielectric layer 104 having the multiple optical nanoelements 102-i. However, the sealing layer 112 may be optional depending on the application of the pulsed laser light source 100. The sealing layer 112 may be any kind of organic or inorganic material having a refractive index of about 1.50 for electromagnetic radiation received from the radiative structure 190. Thus, the surface of the mirror structure 110 may include or correspond to the emission surface of the pulsed laser light source 100 for emitting pulsed electromagnetic radiation generated by the mirror structure 110 based on the resonance of coherent electromagnetic radiation into the surrounding environment of the pulsed laser light source 100. The sealing layer 112 may at least partially fill or overfill the spaces between the optical nanoelements.

[0026] The pulsed laser light source 100, for example, the mirror structure 110, may include a substrate which may be one of amorphous silica, glass, or plastic, for example, a polycarbonate substrate or an epoxide substrate. The substrate may have a planar shape and may be, for example, a wafer. Alternatively, the substrate may have a curved shape and may be, for example, the glass of AR or VR glasses.

[0027] Figures 2A and 2B show the characteristics of a metasurface according to one embodiment of the present invention. Figure 2A shows a perspective view of the optical nanoelement 102-i of the mirror structure 110, 110-1 of the pulsed laser light source, and the electromagnetic radiation 180 generated by the coherent electromagnetic radiation generation structure. The pulsed light 304 can be transmitted through the mirror structure 110, 110-1, while the continuous wave 302 is reflected by the mirror structure 110, 110-1, which can be explained using the Ewald-Oseen extinction theorem in the transient region.

[0028] Figure 2B shows Figure 306, which illustrates the transmittance T and phase shift φ of light transmitted through the mirror structures 110 and 110-1.

[0029] The terms light and coherent electromagnetic radiation may refer to any type of coherent electromagnetic radiation in the visible and invisible electromagnetic radiation spectrum, including ultraviolet (UV) radiation, near-infrared (IR) radiation, mid-infrared radiation, and microwaves. For example, electromagnetic pulses emitted by a laser light source can be generated in a microwave waveguide at frequencies / wavelengths not used for guiding.

[0030] As shown in Figure 2B, the amplitude of the transmitted continuous wave decreases to zero at resonance 308, which corresponds to the phase shift of the transmitted radiation. However, the transmittance does not decrease to zero in a steep, stepwise manner as shown in Figures 4B and 5B, but rather decreases over a time constant of 406. The time constant 406 corresponds to the pulse width of the laser pulse transmitted through the mirror structure.

[0031] Figure 3 shows a schematic cross-sectional view of a pulsed laser light source 100 according to one embodiment of the present invention. The coherent electromagnetic radiation generation structure 190 may include a p-contact semiconductor layer 206, an n-contact semiconductor layer 204, and an active region 202 disposed between the p-contact semiconductor layer 206 and the n-contact semiconductor layer 204. A transparent contact layer 210, for example, made of transparent conductive oxide (TCO), may be formed on the p-contact semiconductor layer 206. A current aperture structure 208 may be formed between the p-contact semiconductor layer 206 and the transparent contact layer 210.

[0032] For example, the optical nanoelement 102-i may be formed from TiO2 having a refractive index of about 2.6, and the dielectric layer 104 may be formed from SiO2 having a refractive index of about 1.45. The contact layer 210 may be formed from indium tin oxide (ITO), and the current-opening structure 208 may be formed from a dielectric material, such as an oxide. The p-contact semiconductor layer 206 may be formed from p-GaN, and the n-contact semiconductor layer 204 may be formed from n-GaN having a refractive index of about 2.5.

[0033] The coherent electromagnetic radiation generation structure 190 may have a first side and a second side opposite to the first side. The mirror structure 110 described above may be a first mirror structure 110-1 located on the first side of the coherent electromagnetic radiation generation structure 190. The pulsed laser light source 100 may further include a second mirror structure 110-2 located on the second side of the coherent electromagnetic radiation generation structure 190. The second mirror structure 110-2 may be configured to correspond to the first mirror structure 110-1. Alternatively, the plurality of optical nanoelements 102-i of the first mirror structure 110-1 may differ from the plurality of optical nanoelements 102-i of the second mirror structure 110-2 in at least one characteristic. The characteristic may be the distance between adjacent nano-optical elements, the lateral extension of the nano-optical elements, the shape of the nano-optical elements, and the taper angle of some of the nano-optical elements. Alternatively, the second mirror structure 110-2 may include a distributed Bragg reflector (DBR). Alternatively, or in addition, the second mirror structure 110-2 may include a plurality of optical nanoelements, which may be configured to have resonant frequencies corresponding to the frequencies of coherent electromagnetic radiation, such that a continuous wave of coherent electromagnetic radiation is substantially reflected from the mirror structure. For example, the second mirror structure 110-2 may be configured to increase the purity of the reflected light (corresponding to 302 in Figure 2A), and the first mirror structure 110-1 may emit laser pulses.

[0034] Figures 4A and 4B show diagrams of optical metasurfaces according to another embodiment of the present invention. Figure 4A shows a perspective view of an optical nanoelement formed in the shape of a pillar. At least some of the multiple optical nanoelements may include pillar-shaped nanoelements. Figure 4B shows an electric field evolution 400 showing the electric field amplitude 404 as a function of time 402 at resonance condition 308 for a pillar-shaped optical nanoelement such as the one shown in Figure 4A, having a pillar diameter of 187 nm. A transient region 406 is shown leading to a steady-state region 412, which corresponds to a fully compensated incident wave 410. Thus, in the transient region 406, the wave is transmitted, and an uncompensated incident wave (also called a laser pulse) 408 with a time constant of, for example, 30 fs is transmitted.

[0035] Figures 5A and 5B illustrate optical metasurfaces according to another embodiment of the present invention. Figure 5A shows a perspective view of an optical nanoelement formed in a line shape. At least some of the multiple optical nanoelements may include line-shaped nanoelements. Figure 5B shows an electric field evolution 400, which represents the electric field amplitude as a function of time at resonance condition 308 for a line-shaped optical nanoelement as shown in Figure 5A, having a line width of 236 nm, a height of 500 nm, a pitch of 500 nm, and a wall angle of 90°, and using a wavelength of 940 nm. A transient region 406 is shown leading to a steady-state region 412, which corresponds to a fully compensated incident wave 410. Thus, in the transient region 406, the wave is transmitted, and an uncompensated incident wave (also referred to as a laser pulse) 408 with a time constant of, for example, 20 fs is transmitted.

[0036] Figure 6 shows a flowchart of a method for manufacturing an optical metalens component. Method 600 may include forming a light-emitting structure 602 configured to generate a continuous wave of coherent electromagnetic radiation at a predetermined frequency, and forming at least one mirror structure 604, the mirror structure may include a plurality of optical nanoelements, the plurality of optical nanoelements may be configured to have resonant frequencies corresponding to the frequency of the coherent electromagnetic radiation such that the continuous wave of coherent electromagnetic radiation is substantially reflected from the mirror structure.

[0037] Coherent electromagnetic radiation may have a coherence length, and the mirror structure is positioned within the coherence length. The pulsed laser light source may be configured such that no, or substantially any, continuous wave coherent electromagnetic radiation is emitted into the surrounding environment of the pulsed laser light source 100.

[0038] The mirror structure is a first mirror structure, and the pulsed laser light source may further include a second mirror structure, the second mirror structure being formed as a distributed Bragg reflector. Alternatively, the second mirror structure may include a plurality of optical nanoelements, the plurality of optical nanoelements may be configured to have resonant frequencies corresponding to the frequencies of coherent electromagnetic radiation, such that a continuous wave of coherent electromagnetic radiation is substantially reflected from the mirror structure.

[0039] The above method may further include any of the features described for the apparatus described above.

[0040] Some examples relating to those described herein and shown in the drawings are described below.

[0041] Example 1 is a pulsed laser light source comprising a light-emitting structure configured to generate a continuous wave of coherent electromagnetic radiation at a predetermined frequency, and at least one mirror structure including a plurality of optical nanoelements, wherein the plurality of optical nanoelements are configured to have resonance frequencies corresponding to the frequency of the coherent electromagnetic radiation such that the continuous wave of coherent electromagnetic radiation is substantially reflected from the mirror structure.

[0042] In Example 2, the subject of Example 1 may optionally include the pulsed laser light source including an optical resonator, and a plurality of optical nanoelements arranged outside the optical resonator.

[0043] In Example 3, the subject of Example 1 or 2 may optionally include the fact that at least some of the multiple optical nanoelements include pillar-shaped nanoelements.

[0044] In Example 4, any one of the themes in Examples 1 to 3 may optionally include the fact that at least a portion of the multiple optical nanoelements include line-shaped nanoelements.

[0045] In Example 5, any one of the themes from Examples 1 to 4 may optionally include the fact that at least some of the optical nanoelements of the multiple optical nanoelements are arranged in an array position, and the resonance frequency corresponds to the pitch between the optical nanoelements in the array position.

[0046] In Example 6, any one of the themes from Examples 1 to 5 may optionally include the arrangement of at least some of the optical nanoelements of the multiple optical nanoelements in a grid of regularly spaced positions.

[0047] In Example 7, any one of the themes from Examples 1 to 6 may optionally include the fact that at least some of the optical nanoelements of a plurality of optical nanoelements are arranged in array positions corresponding to array positions offset from a grid of regularly spaced positions, and each array position corresponds to a grid position and an offset vector with respect to the grid position.

[0048] In Example 8, the subject of Example 7 may optionally include the configuration such that the offset vector is configured such that the length of the offset vector corresponds to a predetermined distribution function.

[0049] In Example 9, any one of the themes from Examples 1 to 8 may optionally include the fact that coherent electromagnetic radiation has a coherence length and the mirror structure is located within the coherence length.

[0050] In Example 10, any one of the themes in Examples 1 to 9 may optionally include the configuration such that the pulsed laser source is configured such that substantially none of the continuous-wave coherent electromagnetic radiation is emitted into the surrounding environment of the pulsed laser source.

[0051] In Example 11, any one of the themes from Examples 1 to 10 may optionally include the mirror structure being a first mirror structure, the pulsed laser light source further including a second mirror structure, and the second mirror structure including a distributed Bragg reflector.

[0052] In Example 12, any one subject from Examples 1 to 10 may optionally include the mirror structure being a first mirror structure, the pulsed laser light source further comprising a second mirror structure, the second mirror structure comprising a plurality of optical nanoelements, the plurality of optical nanoelements being configured to have resonant frequencies corresponding to the frequencies of coherent electromagnetic radiation such that a continuous wave of coherent electromagnetic radiation is substantially reflected from the mirror structure.

[0053] Example 13 is a method for manufacturing a pulsed laser light source, the method comprising forming a light-emitting structure configured to generate a continuous wave of coherent electromagnetic radiation of a predetermined frequency, and forming at least one mirror structure comprising a plurality of optical nanoelements, the plurality of optical nanoelements configured to have resonant frequencies corresponding to the frequency of the coherent electromagnetic radiation such that the continuous wave of coherent electromagnetic radiation is substantially reflected from the mirror structure.

[0054] In Example 14, the subject of Example 13 may optionally include the fact that the coherent electromagnetic radiation has a coherence length and the mirror structure is located within the coherence length.

[0055] In Example 15, any one of the themes in Examples 13-14 may optionally include the configuration such that the pulsed laser source is configured such that substantially none of the continuous-wave coherent electromagnetic radiation is emitted into the surrounding environment of the pulsed laser source.

[0056] In Example 16, any one of the themes from Examples 13 to 15 may optionally include the mirror structure being a first mirror structure, and the pulsed laser light source further including a second mirror structure, the second mirror structure being formed as a distributed Bragg reflector.

[0057] In Example 17, any one subject from Examples 13 to 15 may optionally include the mirror structure being a first mirror structure, the pulsed laser light source further comprising a second mirror structure, the second mirror structure being formed comprising a plurality of optical nanoelements, the plurality of optical nanoelements being configured to have resonant frequencies corresponding to the frequencies of coherent electromagnetic radiation such that a continuous wave of coherent electromagnetic radiation is substantially reflected from the mirror structure.

[0058] The above method may further include any of the features described for the apparatus described above.

[0059] The term “exemplary” is used herein to mean “serving as an example, example, or illustration.” Any example or design described herein as “exemplary” should not necessarily be construed as being preferable or more advantageous than other examples or designs.

[0060] In the specification or claims, the words “multiple” and “multiple” explicitly refer to a quantity greater than one. Terms such as “group,” “set,” “collection,” “series,” “sequence,” and “grouping,” and similar expressions, refer to one or more quantities, i.e., one or more, in the specification or claims. Similarly, plural terms that do not explicitly state “multiple” or “multiple” also refer to one or more quantities.

[0061] The term "connected" can be understood in the sense of connection and / or interaction, for example, direct or indirect, (e.g., mechanical, optical, and / or electrical). For example, some elements may be mechanically connected so that they are physically held (e.g., a plug connected to a socket) and electrically connected so that they have an electrically conductive path (e.g., a signal path exists along a communication chain).

[0062] While the components of an optical device may be depicted as separate elements in the above specification and associated figures, those skilled in the art will understand the various possibilities of combining or integrating discrete optical functions into a single element. This may include combining two or more components from a single component. Conversely, those skilled in the art will recognize the possibility of separating a single element into two or more discrete elements, for example, by dividing a single component into two or more distinct components.

[0063] Implementations of the methods detailed herein are illustrative in nature and are therefore understood to be implementable in corresponding apparatuses. Similarly, implementations of the apparatuses detailed herein are understood to be implementable as corresponding methods. Therefore, apparatuses corresponding to the methods detailed herein may include one or more components configured to perform each aspect of the relevant method.

[0064] All acronyms defined in the above description are retained in all claims contained herein.

[0065] While the disclosure has been specifically shown and described with reference to certain embodiments, those skilled in the art should understand that various modifications in form and detail may be made without departing from the spirit and scope of the disclosure as defined by the appended claims. The scope of the disclosure is therefore indicated by the claims, and all modifications that fall within the meaning and equivalents of the claims are therefore intended to be encompassed. [Explanation of symbols]

[0066] 100 Optical Metalens Components 102-i Optical nanodevices (e.g., pillars) 104 Substrate, dielectric layer 106 Lateral extension of optical nanodevices (e.g., pillar diameter) 108 distance, pitch 110 Mirror structure 112 Coating layer 120 Central axis of optical nanodevices 180 Light from a light source 190 Light source 202 Active region 204 n contact layer 206p contact layer 208 Opening structure 210 Contact layer 302 Transmitted laser pulse 304 Reflected continuous wave Figure 306 308 Resonance 400 Electric field development 402 hours 404 Electric field amplitude 406 Transient region 408 Uncompensated incident wave 410 Fully compensated incident wave 412 Steady-state region 600, 602, 604 Methods and Steps of the Method

Claims

1. A light-emitting structure configured to generate a continuous wave of coherent electromagnetic radiation at a predetermined frequency, A mirror structure comprising a plurality of optical nanoelements, wherein the plurality of optical nanoelements are configured to have a resonance frequency corresponding to the frequency of the coherent electromagnetic radiation such that the continuous wave of the coherent electromagnetic radiation is substantially reflected from the mirror structure, A pulsed laser light source equipped with the following features.

2. The optical resonator is provided, and the plurality of optical nanoelements are arranged outside the optical resonator. The pulsed laser light source according to claim 1.

3. At least some of the optical nanoelements of the plurality of optical nanoelements are arranged in an array position, and the resonance frequency corresponds to the pitch between the optical nanoelements in the array position. The pulsed laser light source according to claim 1 or 2.

4. At least some of the optical nanoelements of the plurality of optical nanoelements are arranged in a regular grid-like configuration. A pulsed laser light source according to any one of claims 1 to 3.

5. The aforementioned coherent electromagnetic radiation has a coherence length, The mirror structure is arranged within the coherence length. A pulsed laser light source according to any one of claims 1 to 4.

6. The pulsed laser light source is configured such that substantially none of the coherent electromagnetic radiation of the continuous wave is emitted into the surrounding environment of the pulsed laser light source. A pulsed laser light source according to any one of claims 1 to 5.

7. The mirror structure is a first mirror structure, and the pulsed laser light source further comprises a second mirror structure, the second mirror structure including a distributed Bragg reflector. A pulsed laser light source according to any one of claims 1 to 6.

8. The mirror structure is a first mirror structure, and the pulsed laser light source further comprises a second mirror structure, the second mirror structure including a plurality of optical nanoelements, the plurality of optical nanoelements having a resonance frequency corresponding to the frequency of the coherent electromagnetic radiation, such that the continuous wave of the coherent electromagnetic radiation is substantially reflected from the mirror structure. A pulsed laser light source according to any one of claims 1 to 6.

9. The mirror structure is positioned on the light emission side of the pulsed laser light source. A pulsed laser light source according to any one of claims 1 to 8.

10. A method for manufacturing a pulsed laser light source, The steps include forming a light-emitting structure configured to generate a continuous wave of coherent electromagnetic radiation at a predetermined frequency, A step of forming at least one mirror structure comprising a plurality of optical nanoelements, wherein the plurality of optical nanoelements are configured to have a resonance frequency corresponding to the frequency of the coherent electromagnetic radiation such that the continuous wave of the coherent electromagnetic radiation is substantially reflected from the mirror structure, Methods that include...

11. The aforementioned coherent electromagnetic radiation has a coherence length, The mirror structure is arranged within the coherence length. The method according to claim 10.

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