Integrated static mixer with treatment tool shower head

Abstract

An example is disclosed relating to a static mixer integrated inside a pathway used to supply a treatment chemical to the head of a showerhead. One example provides a showerhead for a substrate treatment tool. The showerhead comprises a plurality of outlets. The showerhead further comprises a stem with a hollow interior for supplying the treatment chemical to the plurality of outlets of the head. The stem further comprises a first stem portion adjacent to the head. The stem further comprises a second stem portion fused to the first stem portion. The second stem portion comprises a static mixer fused to the second stem portion within its hollow interior.

Description

Background Art

[0001] Semiconductor manufacturing processes include various steps for depositing, patterning, and removing materials to fabricate integrated circuits. In a deposition process, one or more process chemicals are flowed into a process chamber to react with a substrate disposed within the process chamber to form a film on the substrate. In a dry etching process, one or more process chemicals are flowed into the process chamber to react with a material on a substrate within the process chamber to form volatile products, thereby removing the material from the substrate.

[0002] A processing tool may include a showerhead for directing vapor-phase process chemicals onto a substrate. The showerhead includes a plurality of effluent holes distributed over an area for distributing the flow of the process chemical over the surface of the substrate.

Summary of the Invention

[0003] A summary of this invention is provided to introduce, in a simplified form, selected ones of the concepts detailed below in the mode for carrying out the invention. This summary of the invention is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. Further, the claimed subject matter is not limited to embodiments that solve any disadvantages recited in any part of this disclosure.

[0004] Examples are disclosed related to a static mixer integrated within a path used to supply a process chemical to a head of a showerhead. One example provides a showerhead for a substrate processing tool. The showerhead includes a plurality of effluent holes. The showerhead further includes a stem having a hollow interior for supplying the process chemical to the plurality of effluent holes of the head. The stem further includes a first stem portion adjacent to the head. The stem further includes a second stem portion fused to the first stem portion. The second stem portion includes a static mixer fused to the second stem portion within the hollow interior.

[0005] In some such examples, the static mixer extends over at least the length of the second stem portion.

[0006] Alternatively or additionally, in some such examples, the static mixer has three or more blade segments.

[0007] Alternatively or additionally, in some such examples, the showerhead and static mixer each contain aluminum.

[0008] Alternatively or additionally, in some such examples, the static mixer is welded to a second stem portion at a first end of the static mixer and at a second end of the static mixer opposite the first end.

[0009] Alternatively or additionally, in some such examples, the static mixer comprises a first ring at the first end of the static mixer.

[0010] Alternatively or additionally, in some such examples, the static mixer further comprises a second ring at the second end of the static mixer.

[0011] Alternatively or additionally, in some such examples, the static mixer further comprises two or more ribs extending from the first ring to the second ring.

[0012] Alternatively or additionally, in some such examples, the static mixer is welded inside the cylinder, and the cylinder is welded to the second stem portion within its hollow interior.

[0013] Another example provides a processing tool. The processing tool comprises a processing chamber. The processing tool further comprises a showerhead. The showerhead comprises a head with multiple outlets for supplying the processing chemical to the processing chamber. The showerhead further comprises a stem with a hollow interior for supplying the processing chemical to the multiple outlets of the head. The processing tool further comprises a junction coupled to the stem of the showerhead. The junction comprises multiple processing chemical inlets for receiving the processing chemical from each of the multiple processing chemical sources. The junction further comprises processing chemical outlets for supplying the processing chemical from the multiple processing chemical inlets to the stem of the showerhead. The junction further comprises a static mixer located within the processing chemical outlets of the junction and fused to the junction.

[0014] In some such cases, a portion of the static mixer extends into the hollow interior of the showerhead stem.

[0015] Alternatively or additionally, in some such examples, the confluence includes a ceramic material.

[0016] Alternatively or additionally, in some such examples, the confluence includes metal.

[0017] Alternatively or additionally, in some such examples, the static mixer has three or more blade segments.

[0018] Alternatively or additionally, in some such examples, the junction includes additively manufactured parts.

[0019] Another example provides a processing tool. The processing tool comprises a processing chamber. The processing tool further comprises a shower head. The shower head comprises a head with multiple outlets for supplying the processing chemical to the processing chamber. The shower head further comprises a stem with a hollow interior for supplying the processing chemical to the multiple outlets of the head. The stem comprises a first stem portion adjacent to the head and a second stem portion welded to the first stem portion. The shower head further comprises a static mixer fused to the second stem portion within the hollow interior.

[0020] In some such examples, the static mixer extends over at least the length of the second stem portion.

[0021] Alternatively or additionally, in some such examples, the showerhead and static mixer each contain aluminum.

[0022] Alternatively or additionally, in some such examples, the static mixer is welded to a second stem portion at a first end of the static mixer and at a second end of the static mixer opposite the first end.

[0023] Alternatively or additionally, in some such examples, the static mixer comprises a first ring at the first end of the static mixer and a second ring at the second end of the static mixer. [Brief explanation of the drawing]

[0024] [Figure 1] A schematic diagram showing an example of a processing tool equipped with a showerhead.

[0025] [Figure 2] A schematic diagram showing an example of a showerhead.

[0026] [Figure 3]Partial cross-sectional view of the shower head of FIG. 2 showing an example of a static mixer integrated into the stem of the shower head within the hollow interior of the stem.

[0027] [Figure 4] Figure showing the static mixer of FIG. 3 separated from the stem.

[0028] [Figure 5] Schematic diagram showing another example of a static mixer. [Figure 6] Schematic diagram showing another example of a static mixer. [Figure 7] Schematic diagram showing another example of a static mixer.

[0029] [Figure 8] Schematic diagram showing an example of a confluence section equipped with a static mixer.

[0030] [Figure 9] Figure showing an example of the confluence section of FIG. 8 combined with an example of a shower head.

[0031] [Figure 10] Flowchart showing an example of a process for integrating a static mixer into the stem of a shower head within the stem.

Mode for Carrying Out the Invention

[0032] The term "additive manufacturing" generally refers to a controlled process of creating a three-dimensional object by selectively depositing materials layer by layer.

[0033] The term "flow rate control hardware" generally refers to components configured to fluidly connect one or more process chemical sources to a processing chamber. The flow rate control hardware can include, for example, one or more mass flow controllers, valves, manifolds, and / or conduits.

[0034] The term "electron beam welding" generally refers to a process that fuses two parts together using a focused electron stream.

[0035] The term "confluence" generally refers to a component of a chemical treatment supply system that merges the flows of chemical treatments from different inlets into a common flow.

[0036] The term "laser welding" generally refers to the process of fusing two parts together using laser energy.

[0037] The term "processing chamber" generally refers to a container in which chemical and / or physical treatments are performed on a substrate. The pressure, temperature, and / or atmospheric composition within the processing chamber are controllable for performing the chemical and / or physical treatments.

[0038] The term "processing chemical" refers to the compounds introduced into the processing chamber during substrate processing.

[0039] The term "showerhead" generally refers to a component of a processing tool that has multiple outlets for distributing processing chemicals across a substrate.

[0040] The term "static mixer" generally refers to a structure that mixes different processing chemicals by agitating a gas flow before directing it onto a substrate.

[0041] The term "substrate" generally refers to any object on which a film can be deposited.

[0042] The term "substrate support" generally refers to any structure used to support a substrate in a processing chamber during substrate processing.

[0043] As described above, the manufacture of electronic devices involves many processes of material deposition, patterning, and removal. For example, atomic layer deposition (ALD) can be used to form a film on a substrate in a layer-by-layer process by sequentially adsorbing film precursors onto the substrate and then converting the precursors into layers of film (e.g., by oxidation). Chemical vapor deposition (CVD) is another method used to deposit films. CVD involves exposing the substrate to a continuous stream of one or more processing chemicals. The processing chemicals react to continuously grow a film on the substrate surface. Dry etching is an example of a material removal process. Some dry etching processes may involve exposing the substrate to a mixture of processing chemicals that volatilize the material on the substrate surface. Deposition and dry etching processes can be accelerated using heat and / or plasma.

[0044] The treatment chemical can be introduced into the treatment chamber through a showerhead. The showerhead comprises a head and a stem. The head has multiple outlets for distributing the treatment chemical across the substrate. The stem has a hollow interior for supplying the treatment chemical to the multiple outlets of the head.

[0045] Different processing chemicals may be combined into a common flow upstream of the showerhead. These different processing chemicals may mix, at least partially, as they flow through the showerhead stem into the head. However, insufficient mixing may occur, for example, due to the viscous flow of the processing chemicals. Insufficient mixing can lead to uneven gas concentration flow across the substrate. This can cause deposition or removal processes to be relatively fast in some areas of the substrate and relatively slow in others.

[0046] To facilitate the mixing of treatment chemicals, a static mixer may be used upstream of the showerhead. The static mixer influences the flow of the treatment chemicals, mixing them together. The use of a static mixer may help provide a more uniform mixing of the treatment chemicals flowing on the substrate than in cases where a static mixer is not used.

[0047] A static mixer may be manufactured separately from the showerhead head and stem. Such a static mixer may be installed within the showerhead stem during showerhead assembly. To hold the static mixer in place within the showerhead stem, it may have a ring or other structure at one end that is larger than the inner diameter of the showerhead stem. The ring suspends the static mixer from the stem's inlet. However, such a static mixer is not fixed within the stem. Therefore, the flow of the processing chemical may cause the static mixer to vibrate and / or rotate within the stem. This vibration and / or rotation may cause the static mixer to rub against the inside of the stem. This may generate particles inside the showerhead stem. These particles may flow into the processing chamber and deposit onto the substrate. This can affect the device's yield. Showerheads are typically replaced when particles cause problems. Frequent replacement of showerheads can increase the cost of semiconductor manufacturing processes.

[0048] One possible way to address the rotation of the static mixer within the showerhead step is to form a notch on the upper edge of the showerhead stem and a corresponding bump on the static mixer. The bump can be positioned within the notch to prevent rotation. Another possible method is to weld a ring on the static mixer to the stem of the showerhead to help prevent rotation. However, even in such examples, the static mixer can still vibrate. This vibration can lead to deterioration of the showerhead and the formation of particles.

[0049] Therefore, we disclose an example relating to a static mixer that addresses such problems. As will be detailed later, the static mixer may be fused to the stem of the showerhead and / or to the upstream confluence of the showerhead stem. In one example, the showerhead comprises a head and a stem. The stem has a hollow interior. The stem further comprises a first stem portion adjacent to the head and a second stem portion fused to the first stem portion by welding or the like. The showerhead further comprises a static mixer fused to the second stem portion within the hollow interior by welding or the like. By welding the static mixer to the stem, the vibration and rotation of the static mixer are reduced. This helps to prevent deterioration of the showerhead and also helps to prevent the formation of metal particles. As a result, the lifespan of the showerhead can be extended compared to examples where the static mixer is not welded inside the stem. In some examples, the lifespan of the showerhead can be extended by more than four times. Extending the lifespan of the showerhead can reduce the operating costs of the processing tool. Furthermore, by preventing showerhead degradation, the disclosed example may enable the use of higher processing temperatures than in the example without an integrated static mixer. This helps to deposit a more uniform film at higher processing temperatures than in the example without a static mixer.

[0050] As will be detailed later, an example of a showerhead according to this disclosure may be manufactured by laser welding a static mixer into the interior of a second stem portion. Laser welding allows the static mixer to be fused to the showerhead stem without the use of additional filler material. This helps to avoid problems of chemical compatibility between the filler material and the treatment chemicals. This also avoids the increase in inflow static pressure at the showerhead inlet compared to a static mixer welded with filler material. Such an increase in inflow static pressure can cause difficulties, for example, when igniting a remote plasma that provides radical species through the showerhead.

[0051] An example is also disclosed relating to the integration of a static mixer into a junction connected to a showerhead. In such an example, the static mixer is positioned within the treatment chemical outlet of the junction and fused to the junction. This fixes the static mixer in position relative to the showerhead stem. Fixing the static mixer in position relative to the showerhead helps to avoid friction between the static mixer and the hollow interior of the stem. Thus, a junction with an integrated mixer may help to avoid particle formation in the showerhead stem. This may help to improve the lifespan and reliability of the showerhead.

[0052] Before discussing these examples in detail, Figure 1 shows a schematic diagram of an example of a processing tool 100 in which a static mixer can be used, according to the disclosed example. Processing tool 100 is described in the context of an ALD tool. However, the disclosed static mixer is available in showerheads for other types of tools. Examples include CVD tools and dry etching tools.

[0053] The processing tool 100 comprises a processing chamber 102 and a substrate support 104 within the processing chamber. The substrate support 104 is configured to support a substrate 106 placed inside the processing chamber 102.

[0054] The processing tool 100 further comprises a shower head 110. The shower head 110 comprises a head 112 and a stem 114. The head 112 has multiple outlet holes for supplying the processing chemical across the surface of the substrate 106, as indicated by arrow 116. The stem 114 has a hollow interior for supplying the processing chemical to the outlet holes of the head 112. The shower head 110 may contain any suitable material. Examples include aluminum metal and various aluminum alloys.

[0055] In some examples, the processing tool 100 is configured to form a radio frequency (RF) plasma inside the processing chamber 102. This can be used to perform plasma-enhanced ALD (PEALD) processing. In such examples, the showerhead 110 may be configured as an electrode for forming the RF plasma, and the substrate support 104 may be configured as a counter electrode. In some examples, RF power may be supplied to the showerhead 110, and the substrate support 104 is configured as a grounded counter electrode. In other examples, RF power may be supplied to the substrate support 104, and the showerhead 110 is configured as a grounded counter electrode. An RF power supply (not shown) may be used to provide RF power in such examples.

[0056] The processing tool 100 further includes a confluence 118 connected to the stem 114 of the showerhead 110. In this example, the confluence 118 has two gas inlets, each connected to the respective flow control hardware 120A, 120B. The flow control hardware 120A, 120B fluidly connects the processing chemical sources 121A, 121B to the confluence 118, respectively. The flow control hardware 120A, 120B may each include, among other possible hardware, one or more valves, mass flow controllers, manifolds, and / or conduits. In other examples, the confluence may have three or more gas inlets for connecting to three or more processing chemical sources. In an example where the ALD tool is configured for PEALD, the confluence 118 may be formed from a ceramic material to provide insulation from RF power. Any suitable one or more ceramic materials may be used. One example is aluminum oxide. In some examples, the confluence 118 may contain metal. Examples include aluminum, aluminum alloys, and stainless steel. In some examples, the confluence 118 may be additively manufactured.

[0057] The processing tool 100 further comprises an exhaust system 130. The exhaust system 130 is configured to receive gases flowing out of the processing chamber 102. In some examples, the exhaust system 130 is configured to actively remove gases from the processing chamber 102 and / or apply a partial vacuum. The exhaust system 130 may include any suitable hardware, such as a low vacuum pump, a high vacuum pump, and one or more valves.

[0058] The processing tool 100 further comprises a controller 150. The controller 150 is operably connected to the exhaust system 130, flow control hardware 120A, and flow control hardware 120B, among other components of the processing tool 100. The controller 150 is configured to control various functions of the processing tool 100 in order to perform ALD processing. For example, the controller 150 is configured to operate the flow control hardware 120A and flow control hardware 120B so that a selected processing chemical or a mixture of processing chemicals flows into the processing chamber 102 at a selected rate.

[0059] During processing, different processing chemicals may be flowed into the confluence 118 from processing chemical sources 121A and 121B. For example, the ALD process may include flowing an inert gas from processing chemical source 121A and an oxidizing agent from processing chemical source 121B. The different processing chemicals may be at least partially mixed as they flow through the confluence 118 and stem 114. However, insufficient mixing may occur, for example, due to the viscous flow of the gas through the confluence 118 and stem 114. Insufficient mixing can lead to non-uniformity of the gas concentration flowing over the substrate 106. This can cause the deposition or removal process to be relatively fast in some areas of the substrate 106 and relatively slow in other areas. This can affect the uniformity of the process across areas of the substrate 106.

[0060] As described above, a static mixer can be used to help mix the treatment chemicals and avoid heterogeneity. In the example in Figure 1, a static mixer 160 is located within the stem 114. The static mixer 160 agitates the gas flow through the stem 114. This helps to mix the different treatment chemicals before they are flowed into the head 112 of the showerhead 110. This results in a more uniform distribution of the different treatment chemicals across the surface of the substrate 106 than in the example where the static mixer is omitted.

[0061] Figure 2 schematically shows an example shower head 200 with an integrated static mixer. Shower head 200 is an example of the shower head 110 of the processing tool 100. Figure 3 shows a partial cross-section of the stem of the shower head in Figure 2 and an example of the static mixer. Figure 4 shows the static mixer in Figure 3 separated from the stem of the shower head.

[0062] Referring to Figure 2, the shower head 200 comprises a head 202. The head 202 comprises a plurality of outlets 204 for distributing the treatment chemical across the substrate. The shower head 200 further comprises a hollow interior 206 for supplying the treatment chemical to the plurality of outlets 204. The shower head 200 further comprises a hollow stem 208 comprising a first stem portion 208A and a second stem portion 208B. The first stem portion 208A is adjacent to the head 202. The second stem portion 208B is fused to the first stem portion 208A and is shown as a welded joint 210. In some examples, the welded joint 210 may be formed using electron beam (e-beam) welding. E-beam welding can help produce a high-quality weld with relatively deep penetration and a narrow fusion area. In other examples, any other suitable welding method may be used.

[0063] Figure 3 schematically shows a partial cross-section of the second stem portion 208B. The partial cross-sectional view shows an example 300 of a static mixer fused to the second stem portion 208B within a hollow interior 206. In the example shown, the static mixer 300 is fused to the second stem portion 208B at or adjacent to the upper end of the static mixer 300, indicated by welded joints 304A and 304B. The static mixer 300 is fused to the second stem portion 208B at or adjacent to the lower end of the static mixer 300, indicated by welded joints 304C and 304D. In some examples, the welded joints 304A, 304B, 304C, and 304D are formed using laser welding. Laser welding makes it possible to form the welded joints 304A, 304B, 304C, and 304D without the use of any further filler material. This may help avoid problems with chemical compatibility with the processing chemicals. The absence of filler material may also help avoid changes in the gas flow that could cause a pressure drop. In other examples, any other suitable welding method may be used. The term “adjacent” with respect to the location of the weld indicates a location where welding can be achieved by laser welding accessed from the corresponding end of the static mixer.

[0064] In the example shown in Figure 3, the static mixer 300 extends over the length of the second stem portion 208B. This facilitates welding the static mixer 300 to the second stem portion 208B, as weld joints 304A, 304B, 304C, and 304D are easily accessible. In other examples, the static mixer may be shorter or longer than the second stem portion. Furthermore, by forming the first stem 208A and the second stem portion 208B separately, weld joints 304C and 304D are accessible for welding. Thus, the static mixer 300 can be fused to the second stem portion 208B by welding before joining the first stem portion 208A and the second stem portion 208B.

[0065] Figure 4 shows a static mixer 300 separated from the shower head 200. The static mixer 300 comprises five blade segments 306A, 306B, 306C, 306D, and 306E. In other examples, the static mixer may have a different number of blade segments. In the example shown, each blade segment has a helical shape. In other examples, the blade segments may have any other suitable shape, structure, and arrangement. Furthermore, in some examples, the static mixer may be continuous without division. The blade segments 306A, 306B, 306C, 306D, and 306E may be laser-welded together or joined in any other suitable way to form the static mixer 300. The shower head 200 may contain any suitable material. In some examples, the head 202, stem 208, and static mixer 300 are formed from aluminum or an aluminum alloy.

[0066] Figures 5-7 schematically illustrate other examples of static mixers that can be used as static mixer 160. Figure 5 shows a static mixer 500 with five blade segments 502. The static mixer 500 further includes a ring 504 at one end of the static mixer 500. Figure 6 shows another example of a static mixer 600 with a first ring 604 and a second ring 606 at the end of the static mixer 600 opposite to the ring 304. The rings 504, 604, and 606 can be used to position the static mixers 500, 600 within the hollow interior of a stem. Furthermore, the rings 504, 604, and 606 can also be used as positions for welding the static mixer 500 or 600 within the stem. When a single ring 504 is used on a static mixer, the blade segments may be welded to the inside of the showerhead at the end of the static mixer opposite the ring 504.

[0067] Figure 7 shows another example 700 of a static mixer having a first ring 704, a second ring 706, and ribs 708. Each rib 708 extends axially from ring 704 to ring 706. In some such examples, each blade segment 710 is welded to one or more ribs 708. This can provide structural support and further help limit vibration. In the example shown in Figure 7, the static mixer 700 has four ribs 708. Two ribs 708 are partially hidden because they are behind the blade segments 710. In other examples, the static mixer may have any appropriate number of ribs.

[0068] In further examples, the static mixer may include a cylinder surrounding it. In such examples, each blade segment may be fused into the cylinder. Furthermore, the cylinder may be fused into the hollow interior of the showerhead stem by laser welding or the like. In some such examples, the hollow interior of the second stem portion of the showerhead is wider than that of the first stem portion. This may help to house the static mixer and cylinder within the second stem portion. In even further examples, the static mixer may have any other suitable structure.

[0069] As described above, the integrated static mixer may be located in a different part of the treatment chemical inlet rather than in the showerhead. Figure 8 schematically shows a junction 800 including a static mixer integrated with the junction. The junction 800 is an example 118 of the junction of the treatment tool 100. The junction 800 comprises a treatment chemical outlet 802 and treatment chemical inlets 804A and 804B. The treatment chemical outlet 802 is configured to be coupled to the stem of the showerhead (e.g., stem 114). The treatment chemical inlet 804A may be connected to a treatment chemical source 121A through flow control hardware 120A. Furthermore, the treatment chemical inlet 804B is connected to another treatment chemical source 121B through flow control hardware 120B. The treatment chemical from the treatment chemical inlet 804A may flow through the junction 800 to the treatment chemical outlet 802, as indicated by arrow 808A. Furthermore, the treated chemicals from the gas inlet 804B may flow through the confluence 800 to the gas outlet 802, as indicated by arrow 808B.

[0070] The confluence 800 includes a static mixer 820 that facilitates the mixing of different treatment chemicals. The static mixer 820 is located inside the treatment chemical outlet 802 and is fused to the confluence 800. The static mixer 820 comprises four blade segments 822A, 822B, 822C, and 822D. In other examples, the static mixer 820 may have a different number of blade segments or may have an undivided configuration.

[0071] The treated chemical outlet 802 is configured to connect to the stem of the showerhead. Figure 9 shows an example configuration in which the confluence 800 is connected to the showerhead 110 as shown in 902. In some examples, one or more blade segments may extend into the hollow interior of the stem 114. For example, as shown in Figure 8, blade segment 822D extends outward from the treated chemical outlet 802. Thus, blade segment 822D extends into the stem 114 when the confluence 800 is connected to the showerhead 110. In other examples, such as when blade segment 822D is omitted, the static mixer does not extend into the stem of the showerhead.

[0072] The static mixer 820 and the confluence 800 may include any suitable material. In some examples, the confluence 800 may include a ceramic such as aluminum oxide. Forming the confluence from a ceramic material may help insulate the components of the processing tool from the RF power applied to the showerhead. In some examples, the confluence 800 may include a metal such as aluminum or stainless steel. For example, in an example where RF power is applied to a substrate support and the showerhead acts as a grounded counter electrode, the confluence 800 may include a metal. In some examples, the static mixer 820 may be welded to the confluence 800. Furthermore, in some examples, the confluence 800 may include additively manufactured parts.

[0073] Figure 10 shows a flowchart of an example of a method for manufacturing a shower head with an integrated static mixer. Method 1000 can be used, for example, to manufacture a shower head 200. In step 1002, Method 1000 optionally includes a step of fusing two or more blade segments to form a static mixer. In some examples, the static mixer has three or more blade segments. In examples where the static mixer has a non-divided configuration and / or is manufactured as a continuous body, step 1002 can be omitted.

[0074] Method 1000 further comprises step 1004 of fusing a static mixer into the interior of the second stem portion of the showerhead. As described above, the second stem portion and the first stem portion may be formed separately. This may be helpful for the fusing process by making them more accessible by a welded joint. For example, welded joints 304C and 304D become accessible by the second stem portion having a portion separated from the first stem portion. In some examples, Method 1000 comprises step 1006 of laser welding the static mixer to the second stem portion. The laser welding in step 1006 may be performed without further filler material. This may help to avoid problems of chemical compatibility with the treatment chemical. This may also help to avoid changes in the treatment chemical flow that could cause a pressure drop. In other examples, any other suitable method may be used.

[0075] Method 1000 comprises step 1008 of fusing a second stem portion to a first stem portion of a showerhead. For example, a welded joint 210 may be formed in this manner. In some examples, Method 1000 comprises step 1010 of e-beam welding the second stem portion to the first stem portion. E-beam welding can help produce a high-quality weld with relatively deep penetration and a narrow fusion area. In other examples, any other suitable method may be used.

[0076] Therefore, a showerhead with an integrated static mixer can help avoid vibration and rotation of the static mixer caused by the flow of the processing chemicals. This helps avoid the generation of metal particles that could contaminate the substrate during processing. Furthermore, integrating the static mixer at the confluence can also help avoid metal particles. By avoiding showerhead degradation, the disclosed example can extend the lifespan of the showerhead. This can provide cost savings. Furthermore, by avoiding showerhead degradation, the disclosed example can also help enable the use of an integrated static mixer at relatively high processing temperatures (e.g., above 250°C). This can provide a more uniform film than examples where high-temperature processing is performed without a static mixer.

[0077] The configurations and / or approaches described herein are provided as examples, and many variations are possible; therefore, it should be understood that these specific configurations and / or approaches are not to be considered limiting. The specific routines or methods described herein may represent one or more of any number of processing strategies. Accordingly, the various operations illustrated and / or described may be performed in the order illustrated and / or described, in other orders, in parallel, or omitted. Similarly, the order of the processing described above may be changed.

[0078] The subject matter of this disclosure includes all novel and non-obvious combinations and partial combinations of various processes, systems, and configurations, as well as other features, functions, operations, and / or characteristics disclosed herein, and all their equivalents.

Claims

1. A shower head for a circuit board processing tool, A head equipped with multiple outlet holes, A stem having a hollow interior for supplying a processing chemical to the plurality of outlet holes of the head, wherein the stem comprises a first stem portion adjacent to the head and a second stem portion fused to the first stem portion, The static mixer fused to the second stem portion within the hollow interior, A shower head equipped with [a specific feature].

2. A shower head according to claim 1, wherein the static mixer extends over at least the length of the second stem portion.

3. A shower head according to claim 1, wherein the static mixer comprises three or more blade segments.

4. A shower head according to claim 1, wherein the shower head and the static mixer each contain aluminum.

5. A shower head according to claim 1, wherein the static mixer is welded to the second stem portion by a first end of the static mixer and a second end of the static mixer opposite to the first end.

6. A shower head according to claim 1, wherein the static mixer is provided with a first ring at the first end of the static mixer.

7. A shower head according to claim 6, wherein the static mixer further comprises a second ring at the second end of the static mixer.

8. A shower head according to claim 7, wherein the static mixer further comprises two or more ribs extending from the first ring to the second ring.

9. A shower head according to claim 1, wherein the static mixer is welded inside a cylinder, and the cylinder is welded to the second stem portion inside the hollow interior.

10. It is a processing tool, Processing chamber and Shower head and Equipped with, The aforementioned shower head is A head having multiple outlet holes for supplying the treatment chemical to the treatment chamber, The head comprises a stem having a hollow interior for supplying the treatment chemical to the plurality of outlet holes, The shower head comprises a junction connected to the stem, and the junction is Multiple treatment chemical inlets for receiving treatment chemicals from multiple treatment chemical sources, A treatment chemical outlet for supplying the treatment chemical from the plurality of treatment chemical outlets to the stem of the shower head, A static mixer is located within the outlet of the treated chemical substance in the confluence section and is integrated into the confluence section. A processing tool equipped with these features.

11. A processing tool according to claim 10, wherein a portion of the static mixer extends into the hollow interior of the stem of the shower head.

12. A processing tool according to claim 10, wherein the confluence portion includes a ceramic material.

13. A processing tool according to claim 10, wherein the confluence portion includes metal.

14. A processing tool according to claim 10, wherein the static mixer comprises three or more blade segments.

15. A processing tool according to claim 10, wherein the merging portion includes an additively manufactured component.

16. It is a processing tool, Processing chamber and Shower head and Equipped with, The aforementioned shower head is A head having multiple outlet holes for supplying the treatment chemical to the treatment chamber, A stem having a hollow interior for supplying a processed chemical substance to the plurality of outlet holes of the head, wherein the stem comprises a first stem portion adjacent to the head and a second stem portion welded to the first stem portion, The static mixer fused to the second stem portion within the hollow interior, A processing tool equipped with these features.

17. A processing tool according to claim 16, wherein the static mixer extends over at least the length of the second stem portion.

18. A processing tool according to claim 16, wherein the shower head and the static mixer each include aluminum.

19. A processing tool according to claim 16, wherein the static mixer is welded to the second stem portion at a first end of the static mixer and at a second end of the static mixer opposite to the first end.

20. A processing tool according to claim 16, wherein the static mixer comprises a first ring at the first end of the static mixer and a second ring at the second end of the static mixer.

Images