System and method for enhanced surface inspection involving specular reflection

Abstract

An inspection system is provided for enhancing diffuse scattering from a sample during inspection. The inspection system comprises a stage and an optical subsystem including an illumination source, one or more optical elements, and a camera. The inspection system also comprises one or more fluid supply nozzles positioned near the stage. The one or more fluid supply nozzles are configured to supply fluid to one or more reflective components of the sample via a fluid flow, thereby temporarily adsorbing material onto the surface of one or more reflective components of the sample and temporarily enhancing diffuse scattering from one or more reflective components of the sample. The camera is configured to image one or more reflective components of the sample while diffuse scattering from one or more reflective components of the sample is temporarily enhanced.

Description

Technical Field

[0001] The present application relates to inspection of sample surfaces, and in particular to inspection of silicon wafer and PCB (printed circuit board) surfaces containing specular reflection components.

Background Art

[0002] Inspection of optically highly reflective structures such as metals is physically difficult. Because specular reflection from these surfaces is dominant, illumination of highly reflective structures typically causes glare on the surface, often resulting in saturation and distortion of the collected image brightness. Imaging of high-curvature surfaces (e.g., the spherical surfaces of ball grid arrays (BGAs)) brings additional complexity. When light reflects from a plane mirror, it reflects off the mirror at the same angle that it struck the mirror, but in the opposite direction. This type of reflection, often called "specular reflection", is the dominant reflection mode on mirror-like surfaces. Unlike mirror-like surfaces, for surfaces that exhibit diffuse reflection, light reflection scatters at many angles rather than at a single angle like specular reflection. The root cause of the difference in reflection characteristics lies in the surface microstructure such as roughness and scattering centers existing under the surface. On a highly polished metal surface, reflection is essentially specular: light is reflected in an angular cone spanned by the light source, and diffuse reflection (that is, reflection uniformly scattered in other directions) is negligible. For example, as shown in Fig. 1, consider the optical inspection of a curved surface illuminated by a light source incident at a predetermined angle. Light incident from different positions on the surface is reflected in different directions according to the orientation of the surface. A camera placed at any angle relative to the surface only collects light coming from a very small area of the surface, and light reflected from other parts of the surface does not reach the camera. The small amount of diffuse light that reaches the camera is easily overwhelmed by strong specular reflection coming from different parts of the curved surface. Therefore, inspection and extraction of structural data (e.g., object height and shape factor) requires illumination and camera arrangements to cover a very wide angular spectrum. This leads to complex imaging and illumination modalities.

Prior Art Literature

Patent Literature

[0003] [Patent Document 1] U.S. Patent Application Publication No. 2022 / 375062 [Patent Document 2] U.S. Patent Application Publication No. 2015 / 233708 [Patent Document 3] U.S. Patent Application Publication No. 2017 / 052022 [Overview of the project] [Problems that the invention aims to solve]

[0004] Techniques currently employed to overcome the physical challenge of imaging highly reflective curved surfaces include i) white light interferometry, ii) general interferometry, iii) structured illumination, iv) time-of-flight (ToF) measurement, and v) depth from focus. These techniques are complex and expensive, have limitations in sample size and geometric shape, and often result in low-quality and low-resolution images. Therefore, there is a need to provide inspection systems and methods that overcome the limitations of the conventional approaches described above. [Means for solving the problem]

[0005] An inspection system is disclosed according to one or more embodiments of the present disclosure. In an embodiment, the inspection system comprises a stage configured to hold a sample comprising one or more reflective components. In an embodiment, the inspection system comprises an optical subsystem comprising an illumination source, one or more optical elements, and a camera. In an embodiment, the inspection system comprises one or more fluid supply nozzles located near the stage. In an embodiment, one or more fluid supply nozzles are configured to supply a fluid (e.g., a gas and / or liquid) to one or more reflective components of a sample via a fluid flow, thereby temporarily adsorbing a material onto the surface of one or more reflective components of the sample and temporarily enhancing diffuse scattering from one or more reflective components of the sample. In an embodiment, a camera is configured to image one or more reflective components of a sample while diffuse scattering from one or more reflective components of the sample is temporarily enhanced.

[0006] Methods for inspecting a sample are disclosed according to one or more embodiments of the present disclosure. In an embodiment, the method includes arranging a sample containing one or more reflective components for inspection by an inspection tool. In an embodiment, the method includes treating one or more reflective components of the sample with a fluid flow to temporarily adsorb a material onto the surface of one or more reflective components of the sample, thereby temporarily enhancing the diffuse scattering from one or more reflective components of the sample. In an embodiment, the method includes imaging one or more reflective components of the sample while the diffuse scattering from one or more reflective components of the sample is temporarily enhanced.

[0007] It should be understood that the above general description and the following detailed description are illustrative and descriptive only and do not necessarily limit this disclosure. The accompanying drawings incorporated into and forming part of the specification illustrate the subject matter of this disclosure. Together, the descriptions and drawings serve to illustrate the principles of this disclosure. [Brief explanation of the drawing]

[0008] Many of the advantages of this disclosure may be better understood by those skilled in the art by referring to the accompanying drawings. [Figure 1] This is a conceptual diagram of light reflected from a curved reflective surface according to one or more embodiments of the present disclosure. [Figure 2A] This is a simplified schematic diagram of an inspection system configured to provide enhanced diffuse scattering from a reflective surface, according to one or more embodiments of the present disclosure. [Figure 2B] This is a conceptual diagram illustrating the enhancement of diffuse scattering from the surface of the reflective component of a sample, according to one or more embodiments of the present disclosure. [Figure 2C] This is a conceptual diagram illustrating the enhancement of diffuse scattering from the surface of the reflective component of a sample, according to one or more embodiments of the present disclosure. [Figure 2D] This is a simplified schematic diagram of an inspection system according to one or more embodiments of the present disclosure, comprising a plurality of fluid supply nozzles for providing a plurality of fluid flows and configured to provide enhanced diffuse scattering from a reflective surface. [Figure 3] This is a process flow diagram illustrating a method for inspecting a sample with enhanced diffuse scattering from a reflective surface, according to one or more embodiments of the present disclosure. [Figure 4A] A series of images showing a transient enhancement of diffuse scattering from the surface of the reflective component of a sample, according to one or more embodiments of the present disclosure. [Figure 4B] A series of images showing a transient enhancement of diffuse scattering from the surface of the reflective component of a sample, according to one or more embodiments of the present disclosure. [Figure 4C] A series of images showing a transient enhancement of diffuse scattering from the surface of the reflective component of a sample, according to one or more embodiments of the present disclosure. [Modes for carrying out the invention]

[0009] Hereinafter, we will refer in detail to the subject matter disclosed as shown in the accompanying drawings. This disclosure has been shown and described in particular with respect to specific embodiments and their specific functions. The embodiments described herein are to be considered illustrative and not restrictive. It will be readily apparent to those skilled in the art that various changes and modifications in form and detail can be made without departing from the spirit and scope of this disclosure.

[0010] Embodiments of this disclosure are directed toward methods and systems for reducing the physical complexity associated with imaging highly reflective surfaces by transiently and reversibly changing the reflective properties of a surface from specular reflection to more diffuse reflection. Diffuse scattering / reflection from a particular surface can be achieved by creating a film on the surface of an object via adsorption of a material (e.g., a gas). Note that adsorption is the attachment of molecules, atoms, or ions from a gas, liquid, or dissolved solid to a surface. This process forms a film of adsorbate on the surface of the adsorbent. In embodiments of this disclosure, the adsorbate is from a fluid phase (e.g., a gas phase, a liquid phase, or a mixture of gas and liquid). Note that adsorption is a surface phenomenon and is different from absorption, where a fluid is dissolved by a solid or penetrates a solid. In one embodiment of this disclosure, the reflective properties are transiently and reversibly changed by stimulating water condensation on the reflective surface by rapidly cooling the surface. In additional and / or alternative embodiments of this disclosure, the reflective properties of a reflective surface of a sample are changed by adsorption of a material from a fluid flow supplied to the surface from a fluid supply nozzle.

[0011] Figure 2A shows an inspection system 100 according to one or more embodiments of the present disclosure. The inspection system 100 may be configured to inspect or measure a sample 102. In one embodiment, the inspection system 100 includes an optical subsystem 104, a stage 106, and one or more fluid supply nozzles 108. In one embodiment, the optical subsystem 104 includes one or more optical components 110 (e.g., illumination optics and / or collection optics), an illumination light source 111, and a camera 112. In one embodiment, the inspection system 100 is housed in a chamber 114. In one embodiment, the stage 106 is configured to hold a sample containing one or more reflective components 116. In one embodiment, one or more fluid supply nozzles 108 are located near the stage 106. One or more fluid supply nozzles 108 are configured to supply fluid to one or more reflective components 116 of the sample 102 via a fluid flow 118, thereby temporarily adsorbing material onto the surface of one or more reflective components 116 of the sample 102 and temporarily enhancing the diffuse scattering 120 from one or more reflective components 116 of the sample 102. In one embodiment, a camera 112 is configured to image one or more reflective components 116 of the sample 102 while the diffuse scattering 120 from one or more reflective components 116 of the sample 102 is temporarily enhanced.

[0012] Figures 2B and 2C illustrate the enhancement of diffuse scattering 120 from the reflective component 116. For example, Figure 2B shows the original state of sample 102 with the reflective component 116, where specular reflection 122 is dominant over diffuse scattering 120. In contrast, as shown in Figure 2C, following treatment of sample 102 to form an adsorption layer 124 on the surface of the reflective component 116, the intensity of diffuse scattering 120 is enhanced against the intensity of specular reflection. In an embodiment, sample 102 is placed under an inspection head and a fluid flow is applied for a predetermined period of time during which adsorption occurs and an adsorption layer 124 is formed on the surface of one or more reflective components 116. Once the surface changes to diffuse reflection, an image or a series of images is acquired by the camera 112 and controller 121. This procedure can be repeated several times with different gases before moving to a new inspection site.

[0013] In embodiments, the fluid flow 118 supplied by one or more fluid nozzles 108 may include a gas, a liquid, or a gas-liquid mixture. In embodiments, the fluid flow 118 is an ambient fluid flow. For example, the ambient fluid flow may include an ambient gas flow formed from the same gas contained within the chamber 114. In embodiments, the fluid flow 118 cools one or more reflective components 116 to cause adsorption of water onto the surface of one or more reflective components 116. For example, an ambient gas flow may cool one or more reflective components 116 through the adiabatic expansion of the ambient gas (e.g., air) surrounding the reflective components 116, thereby causing adsorption of water onto the surface of one or more reflective components. In this embodiment, the reflective properties can be altered temporarily and reversibly by stimulating water condensation on the reflective surface by rapidly cooling the surface. When the surface is rapidly cooled above its dew point, a thin film of water condensation forms on the surface, provided that humidity is present in the ambient atmosphere. The water droplets in the condensate act as light scattering centers, increasing the diffusivity of the reflection. When the surface temperature reaches equilibrium with the ambient temperature, the condensate evaporates, and the surface returns to its original state. Rapid cooling of a surface can be achieved by forcibly expelling gas from a small nozzle placed near the surface being inspected. Thermodynamically, the adiabatic expansion of a gas results in cooling through work done on the surrounding atmosphere. Simply put, when a gas (e.g., air) expands, its volume increases, which has the effect of increasing its internal energy. Since the energy required to raise the temperature must be supplied from somewhere, the gas absorbs energy from the surrounding system, resulting in a cooling effect.

[0014] In an embodiment, the fluid flow comprises a fluid flow containing a fluid different from the ambient fluid surrounding the sample. For example, fluid flow 118 may comprise a gas flow formed from a gas different from the gas contained within chamber 114. For example, fluid flow 118 may comprise a carbon monoxide gas flow or a hydrogen gas flow. In this embodiment, depending on the metal composition of the surface and the composition of the fluid, under specific thermodynamic conditions (e.g., temperature, pressure, etc.) and / or electrostatic potential, a film of adsorbate is formed on the surface. Condensed molecules of the gas function as light scattering centers and enhance the diffuse reflection properties of the surface. For example, adsorption onto metal surfaces used in catalytic reactions may be applied in embodiments of the present disclosure. For example, a gold surface can catalyze the oxidation of carbon monoxide (CO) to carbon dioxide (CO₂). As another example, a nickel surface can catalyze hydrogen reaction with various compounds.

[0015] In an embodiment, one or more reflective components of a sample may be treated with an additional fluid flow. Then, subsequent to treating the one or more reflective components 116 of the sample 102 with the additional fluid flow, the one or more reflective components of the sample may be imaged. For example, the additional fluid flow may supply the same fluid as the first fluid flow 118. As another example, the additional fluid flow may supply a fluid different from that of the first fluid flow 118. In an embodiment, the one or more fluid supply nozzles 108 may comprise a plurality of fluid supply nozzles. For example, the plurality of fluid supply nozzles may be independently and selectively operated to apply fluid from a plurality of directions, to provide a combination of fluids, or to designate some nozzles to supply fluid at high temperature for rapid heating. For example, as shown in FIG. 2D, a first fluid supply nozzle 108a may supply a first fluid flow 118a, and a second fluid supply nozzle 108b may supply a second fluid flow 118b.

[0016] The sample 102 may include any sample known in the art, including but not limited to wafers, reticles, photomasks, and the like. The dimensions of the sample 102 to be inspected are typically such that inspecting the entire sample 102 involves scanning the sample relative to an inspection head. Scanning may be achieved by moving the stage and / or moving the inspection head relative to the sample 102. The stage 106 may include any stage known in the art, including but not limited to an X-Y stage, an R-θ stage, and the like.

[0017] The illumination light source 111 may include any illumination light source known in the art. For example, the illumination light source 111 may include one or more lasers. As another example, the illumination light source 111 may include one or more broadband light sources. The one or more optical element components 110 of the inspection system 100 may include any illumination optics or collection optics known in the art. For example, in the case of illumination optics, the one or more optical components 110 may include, but are not limited to, beam splitters, mirrors, lenses, apertures, and wave plates configured to condition light and direct the light toward the sample 102. The optical components may be configured to illuminate a region, line, or spot on the sample 102. In the case of collection optics, the one or more optical components 110 may include, but are not limited to, beam splitters, mirrors, lenses, apertures, and wave plates configured to collect, condition, and direct light toward the camera 112.

[0018] The camera 112 may include any sensor or detector known in the art. For example, the camera 112 may include, but is not limited to, a charge-coupled device (CCD), a complementary metal oxide semiconductor (CMOS) device, a time delay integration (TDI) device, and the like.

[0019] In one embodiment, the camera 112 is communicatively coupled to the controller 121. The controller may include one or more processors and memory. The controller 121 is configured to store and / or analyze data from the camera 112 under the control of program instructions stored in memory. The program instructions may be further configured to cause one or more processors in the controller 121 to control other elements of the inspection system 100, such as the stage 106, the fluid nozzle 108 (or a valve coupled to the nozzle), the illumination source 111, the camera 112, and / or one or more optical components 110.

[0020] One or more processors in this disclosure may include any one or more processing elements known in the art. In this sense, one or more processors may include any microprocessor type device configured to execute software algorithms and / or instructions. In embodiments, one or more processors may consist of a desktop computer, mainframe computer system, workstation, image computer, parallel processor, or other computer system (e.g., a network computer) configured to execute a program configured to operate as described throughout this disclosure. It should be recognized that the steps described throughout this disclosure may be performed by a single computer system or, alternatively, by multiple computer systems. Generally, the term “processor” may be broadly defined to include any device having one or more processing elements that execute program instructions from a non-temporary storage medium. Furthermore, different subsystems of the various systems disclosed may include processors or logic elements suitable for performing at least some of the steps described throughout this disclosure. Accordingly, the above description should not be construed as limiting this disclosure, but merely as an example.

[0021] The storage medium may include any storage medium known in the art that is suitable for storing program instructions that can be executed by one or more processors involved. For example, the storage medium may include non-temporary storage mediums. For example, the storage medium may include, but is not limited to, read-only memory, random-access memory, magnetic or optical memory devices (e.g., disks), magnetic tape, solid-state drives, etc. In embodiments, the memory is configured to store one or more results and / or outputs of various steps described herein. Furthermore, it should be noted that the memory may be housed in a common controller housing together with one or more processors. In alternative embodiments, the memory may be located remotely from the physical location of the processors. For example, one or more processors may access remote memory (e.g., a server) accessible via a network (e.g., the Internet, an intranet, etc.). In embodiments, the storage medium holds program instructions for one or more processors to perform various steps described throughout this disclosure.

[0022] Figure 3 is a flowchart showing the steps performed in a reflection-enhanced inspection method 300 according to one embodiment of the present disclosure. It should be noted herein that the steps of method 300 may be performed in whole or in part by system 100. However, it should be further recognized that method 300 is not limited to system 100, in that additional or alternative system-level embodiments may perform all or in part of the steps of method 300.

[0023] In step 302, the sample is placed on the stage for inspection by the inspection tool. For example, as shown in Figure 2, a sample 102 containing one or more reflective components 116 is placed on the stage 102 for inspection of the sample 102.

[0024] In step 304, one or more reflective components of the sample are treated with a fluid flow. For example, as shown in Figure 2A-2C, one or more reflective components 116 of sample 102 are treated with a fluid flow 118 (e.g., gas or liquid) to temporarily adsorb material and create an adsorption layer 124 on the surface of one or more reflective components 116 of sample 102. The adsorbed material in the adsorption layer 124 causes a temporary enhancement of diffuse scattering 120 from one or more reflective components 116 of sample 102 compared to specular reflection 122.

[0025] In step 306, one or more reflective components 116 of the sample 102 are imaged. For example, as shown in Figure 2C, one or more reflective components 116 are imaged by the camera 112 while the diffuse scattering 120 from one or more reflective components of the sample is temporarily enhanced.

[0026] In step 308, one or more reflective components 116 of the sample 102 may be treated with an additional fluid flow. For example, the additional fluid flow may supply the same fluid (e.g., gas) as the first fluid flow. Alternatively, the additional fluid flow may supply a different fluid (e.g., gas 2) than the first fluid flow (e.g., gas 1). For example, as shown in Figure 2D, the first fluid supply nozzle 108a may supply the first fluid flow 118a and the second fluid supply nozzle 108b may supply the second fluid flow 118b. It should be noted that the scope of this disclosure is not limited to two fluid supply nozzles / fluid flows, and it is assumed that the system 100 may include any number (e.g., 1, 2, 3, 4, etc.) of fluid flows (e.g., 1, 2, 3, 4, etc.) of any type of fluid.

[0027] In step 310, following processing of one or more reflective components 116 of the sample 102 with an additional fluid flow, one or more reflective components 116 of the sample 102 are imaged. For example, as shown in Figure 2C, one or more reflective components 116 are imaged by the camera 112 while the diffuse scattering 120 from one or more reflective components of the sample is temporarily enhanced.

[0028] Figures 4A–4C illustrate a series of images obtained from a sample with a reflective curvature component, illustrating the enhanced inspection capabilities of this disclosure. As shown in Figure 4A, a bright-field microscope image 400 is shown detecting specular reflection of a 3D metallic structure (more specifically, a ball structure with solder metal such as Sn). It is clearly visible that the upper part of the surface is highly reflective, and therefore the contrast difference between the upper part and the rest of the ball structure, and the contrast difference with the substrate signal, is very large. In contrast, Figure 4B illustrates image 410 showing the same structure after gas flow has been applied as described throughout this disclosure. In image 410, the metallic ball surface appears as a diffuse surface. Next, Figure 4C illustrates image 420 illustrating the reversibility of the process, where gas adsorption to the surface of an object is observed to revert to its original state, as observed by a change from diffuse reflection to specular reflection after a certain period of time.

[0029] With regard to substantially all use of plural and / or singular terms herein, those skilled in the art can appropriately translate from plural to singular and / or singular to plural depending on the context and / or use. Various singular / plural substitutions are not explicitly listed herein for clarity.

[0030] This description is presented to enable those skilled in the art to create and use the disclosures provided in the context of a particular use and its requirements. Where used herein, directional terms such as “upper,” “lower,” “upward,” “downward,” “upper,” “upward,” “lower,” “downward,” and “downward” are intended to provide relative positions for illustrative purposes and not to specify absolute reference frames. Various modifications to preferred embodiments will be apparent to those skilled in the art, and the general principles defined herein may also apply to other embodiments. Therefore, this disclosure is not intended to be limited to the specific embodiments shown and described, but should be given the broadest scope consistent with the principles and novel features disclosed herein.

[0031] Furthermore, it should be understood that the present invention is defined by the appended claims. It will be understood by those skilled in the art that the terms used herein, in particular in the appended claims (e.g., in the body of the claims), are generally intended to be “open” terms (for example, the term “includes” should be interpreted as “includes but not limited to,” the term “have” should be interpreted as “have at least,” and the term “includes” should be interpreted as “includes but not limited to,” etc.). It will be further understood by those skilled in the art that if a particular number of claims introduced is intended, such intent is explicitly stated in the claims, and if such statement is not present, such intent does not exist. For example, to aid understanding, the following appended claims may include the use of the introductory phrases “at least one” and “one or more” to introduce the claims. However, the use of such phrases should not be interpreted as implying that the introduction of a claim description with the indefinite article "a" or "an" limits a particular claim containing such introduced description to an invention containing only one such description, even if the same claim contains the introductory phrase "one or more" or "at least one" and an indefinite article such as "a" or "an" (for example, "a" and / or "an" should generally be interpreted as meaning "at least one" or "one or more"). The same applies to the use of definite articles used to introduce a claim description. Furthermore, even if a particular number of introduced claims is explicitly stated, a person skilled in the art will recognize that such description should generally be interpreted as meaning at least the number stated (for example, the mere statement "two descriptions" without other modifying phrases usually means at least two descriptions, or two or more descriptions).Furthermore, when idiomatic expressions similar to "at least one of A, B, and C, etc." are used, such configurations are generally intended to be understood by those skilled in the art (for example, "a system having at least one of A, B, and C" includes, but is not limited to, systems having only A, only B, only C, both A and B, both A and C, both B and C, and / or systems having A, B, and C together, etc.). Furthermore, it will be understood by those skilled in the art that virtually all separate words and / or phrases presenting two or more options in the specification, claims, or drawings should be understood to include the possibility of including one of the terms, either of the terms, or both. For example, the phrase “A or B” is understood to include the possibilities of “A” or “B” or “A and B.”

[0032] Many of the present disclosure and its associated advantages are to be understood from the foregoing description, and it will be clear that various modifications can be made to the form, configuration, and arrangement of the components without departing from the disclosed subject matter or sacrificing all of its substantial advantages. The described forms are for illustrative purposes only, and the following claims are intended to cover and encompass such modifications. Furthermore, it should be understood that the present invention is defined by the appended claims.

Claims

1. Placing a sample containing one or more reflective components on a stage, The one or more reflective components of the sample are treated with a fluid flow to temporarily adsorb a material onto the surface of the one or more reflective components of the sample, thereby temporarily enhancing the diffuse scattering from the one or more reflective components of the sample. The process involves imaging the one or more reflective components of the sample while the diffuse scattering from the one or more reflective components of the sample is temporarily enhanced, A method that includes this.

2. The transient enhancement of diffuse scattering from one or more reflective components of the sample The method according to claim 1, comprising increasing the amount of diffuse scattering from one or more reflective components relative to the amount of specular scattering from one or more reflective components.

3. The method according to claim 1, wherein the fluid flow is supplied by a fluid nozzle.

4. The method according to claim 1, wherein the fluid flow includes ambient fluid flow.

5. The method according to claim 4, wherein the ambient fluid flow cools the one or more reflective components, causing water to adsorb onto the surface of the one or more reflective components.

6. The method according to claim 5, wherein the ambient fluid flow cools one or more reflective components through the adiabatic expansion of the ambient fluid surrounding the reflective components.

7. The method according to claim 1, wherein the fluid flow includes at least one of a gas or a liquid.

8. The method according to claim 1, wherein the fluid flow includes a supply fluid different from the ambient fluid surrounding the sample.

9. The method according to claim 8, wherein the fluid flow includes a carbon monoxide fluid flow or a hydrogen fluid flow.

10. The one or more reflective components of the sample are treated with an additional fluid flow, After processing the one or more reflective components of the sample with the additional fluid flow, the one or more reflective components of the sample are imaged. The method according to claim 1, further comprising:

11. The method according to claim 10, wherein the additional fluid flow supplies the same fluid as the fluid flow.

12. The method according to claim 10, wherein the additional fluid flow supplies a fluid different from the fluid flow.

13. A stage configured to fix a sample containing one or more reflective components, An optical subsystem including an illumination light source, one or more optical elements, and a camera, One or more fluid supply nozzles disposed near the stage, configured to supply fluid to one or more reflective components of the sample via a fluid flow, to temporarily adsorb material onto the surface of one or more reflective components of the sample, and to temporarily enhance diffuse scattering from the one or more reflective components of the sample, Equipped with, An inspection system wherein the camera is configured to image the one or more reflective components of the sample while the diffuse scattering from the one or more reflective components of the sample is temporarily enhanced.

14. The system according to claim 13, further comprising a controller including one or more processors and memory, wherein the memory stores program instructions.

15. The system according to claim 14, wherein the program instructions are configured to control the fluid flow through one or more fluid supply nozzles.

16. The system according to claim 15, wherein the program instruction is configured to cause one or more fluid nozzles to supply at least one of the fluid flow or an additional fluid flow to one or more reflective components.

17. The system according to claim 13, wherein the additional fluid flow supplies the same fluid as the fluid flow.

18. The system according to claim 13, wherein the additional fluid flow supplies a fluid different from the fluid flow.

19. The system according to claim 13, wherein the fluid flow includes at least one of a gas or a liquid.

20. The system according to claim 13, wherein the program instructions are configured to control the camera to collect an image while the diffuse scattering from the one or more reflective components of the sample is temporarily enhanced.

21. The system according to claim 13, wherein the program instructions are configured to cause one or more processors to control the movement of at least one of the stage or the imaging head of the optical subsystem in order to generate relative scanning motion between the stage and the imaging head of the optical subsystem.

22. The transient enhancement of diffuse scattering from one or more reflective components of the sample The system according to claim 13, comprising increasing the amount of diffuse scattering relative to the amount of specular scattering from one or more reflective components.

23. The system according to claim 13, wherein the fluid flow includes ambient fluid flow.

24. The system according to claim 23, wherein the ambient fluid flow cools the one or more reflective components, causing water to adsorb onto the surface of the one or more reflective components.

25. The system according to claim 24, wherein the ambient fluid flow cools one or more reflective components through the adiabatic expansion of the ambient fluid surrounding the reflective components.

26. The system according to claim 13, wherein the fluid flow includes a fluid flow different from the surrounding fluid surrounding the sample.

27. The system according to claim 26, wherein the fluid flow, which is different from the ambient fluid, includes a carbon monoxide fluid flow or a hydrogen fluid flow.

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