Spectrometer, module, and method

Abstract

The present invention provides a spectrometer with a beam alignment monitoring function. The spectrometer comprises a laser for generating a laser beam, a lens for guiding the laser beam to the position of a sample, and a component for guiding the laser beam to the lens so as to be coaxial with the optical axis of the lens, wherein the spectrometer includes a beam splitter for guiding a portion of the laser beam toward a sensor positioned so that a portion of the laser beam can be used to monitor the alignment of the laser beam with respect to the optical axis of the lens. The spectrometer also includes a laser beam path correction element. Optionally, the spectrometer includes an element for guiding a portion of the laser beam toward the sensor.

Description

[Technical Field]

[0001] The present invention relates to a spectrometer, a module for a spectrometer, and a method. [Background Art]

[0002] WO92 / 22793A1 discloses a spectrometer, particularly a Raman spectrometer. An input laser beam 10 is reflected at an angle of 90° by a dichroic filter 12. Then, the laser beam 10 passes through an objective lens 16, and the objective lens 16 focuses the laser beam to a single point at a focal spot 19 on a sample 18.

[0003] At the time of installation, the components of the spectrometer are configured such that after reflection by the dichroic filter 12, the laser beam 10 is coaxial and parallel with respect to the optical axis of the objective lens 16. [Summary of the Invention]

[0004] A spectrometer is provided according to a first aspect of the present invention, comprising a laser for generating a laser beam, a lens for guiding the laser beam to a sample position, and a component for guiding the laser beam to the lens so as to be coaxial with the optical axis of the lens. The spectrometer further comprises a beam splitter for guiding a portion of the laser beam toward a sensor positioned for use in monitoring the alignment of the laser beam relative to the optical axis of the lens. The spectrometer further comprises a laser beam path correction element. Optionally, the laser beam path correction element is positioned between the beam splitter and the lens. The portion of the laser beam used to monitor the alignment may be smaller than the entire laser beam. The beam splitter for guiding a portion of the laser beam toward the sensor may be movable between a first position where the beam splitter for guiding a portion of the laser beam toward the sensor is in the path of the laser beam and a second position where the beam splitter for guiding a portion of the laser beam toward the sensor is not in the path of the laser beam. Optionally, the laser path correction element can move between a first position where the laser beam path correction element is within the laser beam path and a second position where the laser beam path correction element is not within the laser beam path. Optionally, the beam splitter and the laser path correction element can move in conjunction between the first and second positions.

[0005] The spectrometer may include a second beam splitter for splitting a portion of the laser beam such that a first portion is guided toward a sensor and a second portion is guided toward a second sensor. Here, the path length of the laser beam between the component and the sensor is different from the path length of the laser beam between the component and the second sensor. Monitoring the alignment of the laser beam with respect to the optical axis of the lens may include monitoring the position of the laser beam on the component. Optionally, monitoring the alignment of the laser beam with respect to the optical axis of the lens may include monitoring the direction of the laser beam toward the component (i.e., the direction of the laser beam before it reflects toward the lens) and / or the direction away from the component (i.e., the direction of the laser beam after it reflects toward the lens). The spectrometer may be configured to reduce misalignment of the laser beam with respect to the optical axis of the lens based on monitoring. The spectrometer may include a first beam path director that is movable in two degrees of freedom. The first beam path director is controlled to reduce misalignment of the laser beam with respect to the optical axis of the lens based on monitoring. Optionally, a first beam path director may be located in the laser beam path and positioned prior to the components for guiding the laser beam to the lens. Optionally, the spectrometer may include a second beam path director that is movable in two degrees of freedom. The second beam path director may be controlled, based on monitoring, to reduce the misalignment of the laser beam relative to the optical axis of the lens. Optionally, the first and / or second beam path directors are mirrors.

[0006] By incorporating a spectrometer capable of monitoring the alignment of the laser beam with respect to the lens's optical axis, it is possible to correct for misalignment of the laser beam with respect to the lens's optical axis during the spectrometer's lifespan. This allows for more accurate and / or more stable targeting for irradiating the sample with the input laser beam, which in turn enables improved spectroscopy. By allowing for correction of laser beam misalignment, the spectrometer can be made more resistant to vibration, temperature changes, or other factors that may cause misalignment of the laser beam with respect to the lens's optical axis.

[0007] A second aspect of the present invention provides a method for monitoring the alignment of a spectrometer's laser beam with respect to the optical axis of the spectrometer's lens. The method comprises the steps of using information relating to the position of the laser beam on a component, and / or the direction of the laser beam toward the component (i.e., the direction of the laser beam before it is reflected toward the lens), and / or the direction of the laser beam away from the component (i.e., the direction of the laser beam after it has been reflected toward the lens), and moving the beam splitter and laser beam path corrector from a position where the beam splitter and laser beam path corrector are not in the laser beam path to a position where the beam splitter and laser beam path corrector are in the laser beam path. Optionally, the component is a component for guiding the laser beam to the lens so that it is coaxial with the lens. The method may include the step of using a portion of the laser beam from the beam splitter to determine the position of the laser beam on the component, and / or the direction of the laser beam toward the component, and / or the direction of the laser beam away from the component. Optionally, the method includes a step of adjusting the position of at least one beam path director based on the monitoring results to reduce the misalignment of the laser beam with respect to the optical axis of the lens.

[0008] A spectrometer module is provided according to a third aspect of the present invention. The module comprises a first sensor for detecting the position of a laser beam on itself, a second sensor for detecting the position of a laser beam on itself, and a beam splitter for guiding at least a portion of the laser beam toward the first and second sensors. The module comprises a laser beam path correction element. Optionally, the beam splitter for guiding a portion of the laser beam toward the first and second sensors and the laser path correction element are movable between a first position where the beam splitter and laser path correction element are within the laser beam path and a second position where the beam splitter and laser path correction element are not within the laser path. Optionally, a second beam splitter is positioned between the beam splitter and the first and second sensors.

[0009] A fourth aspect of the present invention provides a processor configured to cause the movement of a beam splitter and a laser beam path correction element to the laser beam path, and to receive a first input related to the position of the laser beam and a second input related to the position of the laser beam. Based on the first and second inputs, the processor calculates parameters for reducing the misalignment of the laser beam with respect to the optical axis of the lens.

[0010] Furthermore, the present invention provides a data carrier on which instructions are stored. When these instructions are executed by a processor, they cause the processor to operate according to a processor as defined in the fourth embodiment of the present invention.

[0011] The data carrier of the present invention may be a suitable medium for providing instructions to a machine and may be a non-temporary data carrier, such as a floppy disk, CD-ROM, DVD-ROM / RAM (including -R / -RW and +R / +RW), HD DVD, Blu-ray® disk, memory (such as Memory Stick®, SD card, CompactFlash card, or the like), disk drive (such as a hard disk drive), tape, any magnetic / optical storage, or a temporary data carrier, such as a signal over a wired or optical fiber, or a wireless signal, such as a signal transmitted over a wired or wireless network (Internet download, FTP transfer, or the like).

[0012] A spectrometer is also disclosed. This spectrometer may include a laser for generating a laser beam. This spectrometer may include a lens for guiding the laser beam to the position of a sample. This spectrometer may include a component for guiding the laser beam to the lens so that it is coaxial with the optical axis of the lens. This spectrometer may include a beam splitter for guiding a portion of the laser beam toward a sensor. This spectrometer may be positioned so that a portion of the laser beam can be used to monitor the alignment of the laser beam with respect to the optical axis of the lens. This spectrometer may include a laser beam path correction element.

[0013] Features from one aspect of the present invention may be incorporated so as to be included in other aspects of the present invention. [Brief explanation of the drawing]

[0014] Herein, the present invention will be described below with reference to the following drawings, which are for illustrative purposes only.

[0015] [Figure 1] This is a diagram showing a prior art spectrometer. [Figure 2] This figure illustrates a part of the spectrometer according to the present invention. [Figure 3] This diagram schematically illustrates a portion of the laser beam path. [Figure 4] Figure 2 schematically illustrates further features of the spectrometer. [Figure 5] This figure shows a processor for receiving signals from a spectrometer according to the present invention. [Modes for carrying out the invention]

[0016] Figure 1 shows a prior art spectrometer, in particular a Raman spectrometer. In the illustrated Raman spectrometer, the input laser beam 10 is reflected at a 90° angle by a dichroism filter 12 positioned at a 45° angle to the optical path. The optical path of the laser beam after reflection by the dichroism filter 12 is coaxial with the optical axis of the microscope objective lens 16. The laser beam 10 then passes through the microscope objective lens 16, which focuses the laser beam to a single point at a focal point 19 on the sample 18. At this point of illumination, the light is scattered by the sample, focused by the microscope objective lens 16, and converted into a parallel beam. This light passes through the dichroism filter 12, which blocks Rayleigh scattered light (elastic scattered light having the same wavelength as the input laser beam 10). The dichroism filter 12 transmits Raman scattered light. The Raman scattered light is then sent to a Raman analyzer 20. The Raman analyzer 20 may include a tunable nondispersive filter for selecting the target Raman line. Alternatively, the Raman analyzer 20 may include a dispersive element such as a diffraction grating. Light from the Raman analyzer 20 is focused by a lens 22 to a suitable photodetector 24. In this example, a CCD (charge-coupled device) 24 containing a two-dimensional pixel array is used, and the CCD 24 is connected to a computer 25, which collects data from each of the pixel groups and analyzes the data as needed. If the Raman analyzer 20 includes a tunable nondispersive filter, light of the selected Raman frequency is focused to a point 26 on the CCD 24. If the Raman analyzer 20 includes a dispersive element (such as a diffraction grating), the analyzer 20 generates a spectrum with various bandwidths, as indicated by a dashed line 28 extending along a line on the CCD 24.

[0017] The example of a spectrometer illustrated in Figure 1 shows a dichroism filter 12 as an optical element that reflects the laser beam 10 so that it is coaxial with the optical axis of the microscope objective lens 16, but this is only one example. Other components, such as mirrors or other optical components, may be used to guide the laser beam so that it is coaxial with the optical axis of the microscope objective lens 16. When using a dichroism filter 12, it may be advantageous for the laser beam 10 to be reflected at an angle other than 90°. In this case, after reflection by the dichroism filter 12, the laser beam 10 should be coaxial with the optical axis of the microscope objective lens 16, but the orientation of the dichroism filter 12 will be different from the angle at which the laser beam 10 approaches the dichroism filter 12 before reflection.

[0018] During the manufacturing of a spectrometer, it is known that the laser beam is aligned with the dichroism filter 12 (or alternative component) so that the laser beam is coaxial with the optical axis of the microscope objective lens 16. However, after manufacturing, the laser beam may become misaligned with the optical axis of the microscope objective lens. This may be due to vibration, mechanical wear of other laser beam directing components (not shown), distortion of optical components due to heating from the laser beam or the room, or other reasons.

[0019] Figure 2 shows a portion of the Raman spectrometer 100 according to the present invention (other components of the spectrometer are omitted for clarity). Similar to the prior art spectrometer illustrated in Figure 1, the arrangement shown in Figure 2 includes a microscope objective lens that forms a portion of the microscope objective lens 160. The spectrometer also includes a component 120 (a mirror 120 in this embodiment) for guiding the laser beam to the lens so as to be coaxial with the optical axis of the microscope objective lens 160. The mirror 120 in the embodiment in Figure 2 is similar to the dichroism filter 12 in Figure 1, because both the mirror 120 and the dichroism filter 12 guide the input laser beam toward the microscope objective lens so as to be coaxial with the optical axis of the lens.

[0020] Figure 2 shows an input laser beam 110 guided toward a mirror 120, which reflects the input laser beam 110 toward the lens of a microscope objective lens 160, and the reflected laser beam is shown as laser beam 111. A first beam splitter 130 is positioned between the mirror 120 and the microscope objective lens. The first beam splitter 130 splits the laser beam 111 into two parts: a first laser beam portion 112 that travels toward the microscope objective lens 160, and a second laser beam portion 114. The second laser beam portion 114 can be used to monitor the alignment of the laser beam with respect to the optical axis of the lens of the microscope objective lens 160. The second laser beam portion 114 is guided toward a first sensor 140, which in this embodiment is a position sensitivity detector. A second beam splitter 132 is positioned between the first beam splitter 130 and the first sensor 140. The second beam splitter 132 divides the second laser beam portion 114 into two portions: a laser beam portion 116 that travels toward the first sensor 140 and a laser beam portion 118 that is guided toward the second sensor 142. In this embodiment, the second sensor 142 is a position sensitivity detector. The distance traveled by the laser beam portion 116 between the second beam splitter 132 and the first sensor 140 is different from the distance traveled by the laser beam portion 118 between the second beam splitter 132 and the second sensor 142. The different travel distances by the laser beam portions 116, 118 between the second beam splitter 132 and the first and second sensors 140, 142 make it possible to determine the position of the input laser beam 110 on the mirror 120, and also to determine the direction of the laser beam 110 toward the mirror 120 and / or the direction of the laser beam 111 away from the mirror 120, as will be explained in relation to Figure 3 below.

[0021] The first beam splitter 130 splits the laser beam 111, and the first laser beam portion 112 passes through the first beam splitter 130. When the laser beam enters the first beam splitter 130, it is refracted, passes through the first beam splitter 130, and is refracted a second time when it exits the first beam splitter 130. The first laser beam portion 112 that results from exiting the first beam splitter 130 is parallel to the path of the laser beam 111, but is offset from this path. To correct the beam offset of the laser beam portion 112, a laser path correction element 150 is provided between the first beam splitter 130 and the microscope objective lens 160. In this embodiment, the laser path correction element 150 corrects the path of the laser beam portion 112 by causing refraction that corresponds to, but is opposite to, the refraction that occurs when the laser beam passes through the first beam splitter 130. The result is that the path of the laser beam portion 112 is restored to be coaxial with the path of the laser beam 111. By providing the laser path correction element 150, the laser beam portion 112 and the laser beam 111 come to have the same relationship with respect to the optical axis of the microscope objective lens 160.

[0022] A portion of the laser beam 111 is reflected by the first beam splitter 130 to guide the second laser beam portion 114 in a direction different from that of the first laser beam portion 112. By splitting the laser beam 111 into the first laser beam portion 112 and the second laser beam portion 114, the intensity of the first laser beam portion 112 is reduced compared to the laser beam 111. The intensity of the first laser beam portion 112 may also be reduced due to losses associated with transmission through the first beam splitter 130 and the laser path correction element 150. The reduction in the intensity of the first laser portion 112 compared to the laser beam 111 may result in a reduction in the Raman signal generated when the first laser beam portion 112 interacts with the sample.

[0023] By providing the laser path correction element 150, the laser beam portion 112 and the laser beam 111 have the same relationship with respect to the optical axis of the lens of the microscope objective lens 160. This gives the present embodiment which has the advantage that the first beam splitter 130 and the laser path correction element 150 can be moved between a first position and a second position (as shown in Figure 2). In the second position, the first beam splitter 130 and the laser path correction element 150 are removed from the path of the laser beam 111, while the relationship that the laser beam (or laser beam portion) has with respect to the lens of the microscope objective lens 160 is maintained. This allows the first beam splitter 130 and the laser path correction element 150 to be inserted into the beam to monitor the alignment of the laser beam with respect to the optical axis of the lens, and also allows the first beam splitter 130 and the laser path correction element 150 to be removed between laser beam alignment monitoring events. This makes it possible to maximize the intensity of the Raman signal obtained from the sample between laser beam alignment monitoring events.

[0024] Figure 3 shows laser beam portions 116, 118, a second beam splitter 132, a first sensor 140 and a second sensor 142. Although this figure shows the laser beam portions 116 and 118 as coinciding, this is merely a schematic representation of the arrangement of these components, which corresponds to the arrangement of these components in Figure 2.

[0025] In FIG. 3, it can be seen that the laser beam portion 116 travels a distance d2 between the second beam splitter 132 and the first sensor 140, while the laser beam portion 118 travels a different distance d3 (a longer distance in this case) between the second beam splitter 132 and the second sensor 142. Since the first sensor 140 and the second sensor 142 are position-sensitive detectors, both the first sensor 140 and the second sensor 142 can detect the position of the incident laser beam portions 116 and 118 on their respective sensors. As can be seen from FIG. 3, since distances d2 and d3 between the second beam splitter 132 and the first sensor 140 as well as the second sensor 142 are different, it is possible to determine distance d1 using the outputs of the first sensor 140 and the second sensor 142. FIG. 3(a) shows a situation where d1 has a first value d1a, while FIG. 3(b) shows a second situation where d1 has a different value d1b. Using the value of d1 and the known difference between distance d2 and d3, it is possible to determine the traveling direction of each laser beam portion 116, 118. By using the information on the traveling direction and either the position of the laser beam portion 116 on the first sensor 140 or the position of the laser beam portion 118 on the second sensor 142, it is possible to determine the position from which the laser beam portions 116, 118 depart from the second beam splitter 132 and travel toward the first sensor 140 and the second sensor 142. Furthermore, due to the known relationship between the sensors 140, 142, the first beam splitter 130, and the mirror 120, it is possible to determine the traveling direction of the laser beam 111, and consequently the position of the laser beam 110 on the mirror 120. It is also possible to determine the direction in which the laser beam 110 travels before being reflected by the mirror 120.

[0026] Information derived from the first sensor 140 and the second sensor 142 (for example, the position of the laser beam 110 on the mirror 120 and the direction of the laser beam 111) can be used to monitor the alignment of the laser beam 111 with respect to the optical axis of the microscope objective lens 160.

[0027] Figure 4 schematically shows some further components of the spectrometer 100 as a plan view. Figure 4 shows the laser 102 for generating the laser beam 110. The path of the laser beam 110 between the laser 102 and the mirror 120 is shown in this figure. The laser beam follows a path from the laser 102 toward the mirror 104. The mirror 104 is a movable mirror and can be moved in two degrees of freedom by a motor. In this embodiment, the mirror 104 can be rotated about an axis perpendicular to the plane of Figure 4, and / or about an axis in the plane of the paper that is parallel to the surface of the mirror. After being reflected by the mirror 104, the laser beam is guided toward the mirror 106. The mirror 106 can be moved in two degrees of freedom by a motor. In this embodiment, the mirror 106 can be rotated about an axis perpendicular to the plane of Figure 4, and / or about an axis in the plane of the paper that is parallel to the surface of the mirror. Mirror 106 guides the laser beam to a notch filter 108, from which the laser beam 110 is guided to mirror 120. Mirror 120 guides the laser beam 110 (as shown in Figure 2, laser beam 111) to a first beam splitter 130 (located immediately behind mirror 120 in Figure 4, but not labeled). The first beam splitter 130 splits the laser beam as described in relation to Figure 2, and Figure 4 shows that the second laser beam portion 114 is guided toward the second beam splitter 132, and the laser beam portions 116 and 118 are guided toward the first sensor 140 and the second sensor 142.

[0028] To maintain the laser beam coaxial with the optical axis of the lens, information from the first sensor 140 and the second sensor 142 can be used to determine the position of the laser beam 110 on the mirror 120, and then the position of the laser beam 110 on the mirror 120 can be changed based on the information from the first sensor 140 and the second sensor 142 by adjusting the mirror 104 and / or mirror 106. By adjusting the mirror 104 and / or mirror 106, the degree of misalignment of the laser beam 111 with respect to the optical axis of the lens of the microscope objective lens 160 can be reduced. In addition to adjusting the position of the laser beam 110 on the mirror 120, the direction of the laser beam 110 toward the mirror 120 and / or the direction of the laser beam 111 away from the mirror 120 can be determined using information from the first sensor 140 and the second sensor 142. The direction of the laser beam 110 toward the mirror 120 can be changed by adjusting mirrors 104 and / or 106, which in turn change the direction of the laser beam 111 away from mirror 120, thereby reducing the degree of misalignment of the laser beam 111 with respect to the optical axis of the microscope objective lens 160. In this embodiment, both the position of the laser beam 110 and the direction of the laser beam 110 toward the mirror 120 may be adjusted together or separately (i.e., the position of the laser beam 110 on mirror 120 may be adjusted independently of the adjustment of the direction of the laser beam 110 on mirror 120).

[0029] Figure 5 shows the controller 250. In this embodiment, the processor 250 forms part of the computer. In the current embodiment, the computer can receive data from the CCD, as described in relation to the computer 25 of the spectrometer shown in Figure 1. In addition to the functions performed by the computer 25 in Figure 1, in this application, the processor 250 is configured to receive a first input 1400 related to the output of a first sensor 140 and a second input 1420 related to the output of a second sensor 142. Based on the first input 1400 and the second input 1420, the processor 250 can output a first signal 1060 and / or a second signal 1040. The first signal 1040 is related to adjustments made to the orientation of the mirror 104. The second signal 1060 is related to adjustments made to the orientation of the mirror 106. In this embodiment, the first signal 1040 and / or the second signal 1060 are output to a controller configured to control the orientation of the first mirror 104 and / or the second mirror 106 via a motor.

[0030] Although one embodiment of the present invention has been described in detail above, the present invention is not limited to such embodiments, and other embodiments of the present invention are also possible. For example, in the embodiments described above, the mirror 120 is used to guide the laser beam toward the microscope objective lens, but in other embodiments, this is not necessarily the case, and the laser beam may be guided toward the microscope objective lens by a dichroism filter (as in the situation shown in Figure 1 of the prior art) or any other optical element capable of guiding the laser beam as needed. One embodiment of the present invention is described using a position-sensitive detector, but in other embodiments, other sensors capable of detecting the position of the input laser beam, such as a position quadrant detector, may be used. In other embodiments, the first beam splitter 130 and the laser path correction element 150 may be fixed in the path of the laser beam. The present invention is usually described so that a portion of the laser beam can be used to monitor the alignment of the laser beam with respect to the optical axis of the lens after the initial setup, but in some embodiments, a portion of the laser beam can be used during setup to align the laser beam with respect to the optical axis of the lens. In the embodiments described above, the first beam splitter 130 is positioned between the mirror 120 (i.e., a component for guiding the laser beam toward the lens of the microscope objective lens) and the microscope objective lens 160. In other embodiments, the first beam splitter (and, if present, the laser path correction element 150) may be positioned between the mirror 120 and the laser 102, i.e., before the laser beam 110 is guided toward the microscope objective lens by the mirror 120. In these embodiments, laser beam monitoring events occur separately from spectroscopic measurement events.

Claims

1. A laser for generating a laser beam, A lens for guiding the laser beam to the position of the sample, A component for guiding the laser beam to the lens so that it is coaxial with the optical axis of the lens, A spectrometer comprising, The spectrometer includes a beam splitter for guiding a portion of the laser beam toward a sensor positioned so that a portion of the laser beam can be used to monitor the alignment of the laser beam with respect to the optical axis of the lens. The spectrometer includes a laser beam path correction element. Spectrometer.

2. The spectrometer according to claim 1, wherein the beam splitter for guiding a portion of the laser beam toward a sensor is movable between a first position in the path of the laser beam and a second position not in the path of the laser beam.

3. The spectrometer according to claim 1 or 2, wherein the laser beam path correction element is movable between a first position in the path of the laser beam and a second position not in the path of the laser beam.

4. A spectrometer according to any one of claims 1 to 3, comprising a second beam splitter for splitting a portion of the laser beam such that a first portion is guided toward the sensor and a second portion is guided toward the second sensor.

5. The spectrometer according to claim 4, wherein the path length of the laser beam between the component and the sensor is different from the path length of the laser beam between the component and the second sensor.

6. The spectrometer according to any one of claims 1 to 5, wherein monitoring the alignment of the laser beam with respect to the optical axis of the lens includes monitoring the position of the laser beam on the component.

7. The spectrometer according to any one of claims 1 to 6, wherein monitoring the alignment of the laser beam with respect to the optical axis of the lens includes monitoring the direction of the laser beam toward the component and / or the direction of the laser beam away from the component.

8. A spectrometer according to any one of claims 1 to 7, configured to reduce the misalignment of the laser beam with respect to the optical axis of the lens based on the aforementioned monitoring.

9. The spectrometer according to claim 8, comprising a first beam path director movable in two degrees of freedom, wherein the first beam path director is controlled to reduce the misalignment of the laser beam with respect to the optical axis of the lens based on the monitoring.

10. The spectrometer according to claim 9, comprising a second beam path director movable in two degrees of freedom, the second beam path director being controlled to reduce the misalignment of the laser beam with respect to the optical axis of the lens based on the monitoring.

11. The spectrometer according to claim 10, wherein the first beam path director and / or the second beam path director includes a mirror.

12. A step of using information related to the position of the laser beam on the component, and / or, A step of using information regarding the direction of the laser beam toward the component and / or the direction of the laser beam away from the component. A method for monitoring the alignment of the laser beam of a spectrometer with respect to the optical axis of the lens of the spectrometer, comprising: The method includes the step of moving the beam splitter and the laser beam path correction element from a position where the beam splitter and the laser beam path correction element are not in the path of the laser beam to a position where the beam splitter and the laser beam path correction element are in the path of the laser beam. method.

13. A method for monitoring the laser beam alignment of a spectrometer according to claim 12, comprising the step of using a portion of the laser beam from the beam splitter to determine the position of the laser beam on the component, and / or the direction of the laser beam toward the component, and / or the direction of the laser beam away from the component.

14. A method for monitoring the alignment of a laser beam in a spectrometer according to claim 12 or 13, comprising the step of adjusting the position of at least one beam path director to reduce the misalignment of the laser beam with respect to the optical axis of the lens based on the results of the monitoring.

15. A first sensor for detecting the position of the laser beam above itself, A second sensor for detecting the position of the laser beam located on itself, A beam splitter for guiding at least a portion of the laser beam toward the first sensor and the second sensor, A module for a spectrometer comprising, The module includes a laser beam path correction element, A module for a spectrometer.

16. This causes the beam splitter and laser beam path correction elements to move to the laser beam path, Receiving a first input related to the position of the laser beam and a second input related to the position of the laser beam. A processor configured to perform the following: Based on the first and second inputs, the processor calculates parameters to reduce the misalignment of the laser beam with respect to the optical axis of the lens. Processor.

17. A data carrier on which instructions are stored, When the instruction is executed by the processor, it causes the processor to operate according to the processor as defined in claim 16. Data carrier.

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