Measurement configuration for determining the position of movable components
JP2026532044APending Publication Date: 2026-09-25CARL ZEISS SMT GMBH
Patent Information
- Application Number
- JP2026513888
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2023-09-04
- Filing Date
- 2024-08-30
- Publication Date
- 2026-09-25
AI Technical Summary
Benefits of technology
【0012】 一方の共振器ミラーの曲率を、その曲率中心が測定ミラー上に又は測定ミラーから作動距離の20%以下、特に10%以下、5%以下、又は1%以下の距離に配置されるように測定ミラーに整合させることにより、測定ミラーの傾斜が他方の共振器ミラーに横方向変位を生じさせない、又はごく僅かな横方向変位しか生じさせないことが確実となり、これにより、測定光は共振器キャビティ内へ入力結合されるのが有利である。したがって、本発明による構成を用いて、共振器のモード場への入力結合場の結合効率を高いレベルに維持することができることで、高い測定精度を得ることができる。
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Figure 2026532044000001_ABST
Abstract
A measurement configuration (10;110, 210;310) for determining the position of a movable component (526) of a microlithography optical system (500) comprises an optical resonator (26) having two resonator mirrors (28, 30) surrounding a resonator cavity (32), and a movable measurement mirror (14) assigned to the component and positioned within the resonator cavity to cause measurement light to travel back and forth between the resonator mirrors. The measurement mirror is positioned at a working distance (34) from one of the resonator mirrors having a curvature suited to the measurement mirror, such that the center (31) of the curvature is located on the measurement mirror or at a distance of 20% or less of the working distance from the measurement mirror.
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Citation Information
Patent Citations
US11,274,914