X-ray source including vacuum enclosure and vacuum enclosure having multiple sealable openings

Abstract

Embodiments include a vacuum enclosure comprising a housing including a first sealable opening and a second sealable opening separate from the first sealable opening; a first compressible seal positioned near the first sealable opening and configured to form at least a portion of a vacuum seal over the first sealable opening when compressed; and a second seal for sealing the second sealable opening.

Description

[BRIEF DESCRIPTION OF THE DRAWINGS]

[0001] [Figure 1] FIG. 1 is a block diagram of a vacuum envelope having a compressible seal according to some embodiments.

[0002] [Figure 2] FIG. 2 is a block diagram of a sealable opening of the vacuum envelope of FIG. 1 according to some embodiments.

[0003] [Figure 3] FIG. 3 is a block diagram of a sealable opening of the vacuum envelope of FIG. 1 having a screw according to some embodiments.

[0004] [Figure 4A] FIG. 4 is a block diagram of a sealable opening of the vacuum envelope of FIG. 1 having various counterbore holes according to some embodiments. [Figure 4B] FIG. 5 is a block diagram of a sealable opening of the vacuum envelope of FIG. 1 having various counterbore holes according to some embodiments. [Figure 4C] FIG. 6 is a block diagram of a sealable opening of the vacuum envelope of FIG. 1 having various counterbore holes according to some embodiments.

[0005] [Figure 5A] FIG. 7 is a block diagram of a sealable opening of the vacuum envelope of FIG. 1 having an alternative compression structure according to some embodiments. [Figure 5B] FIG. 8 is a block diagram of a sealable opening of the vacuum envelope of FIG. 1 having an alternative compression structure according to some embodiments.

[0006] [Figure 6] FIG. 9 is a block diagram of an X-ray source according to some embodiments.

[0007] [Figure 7]This is a block diagram of an X-ray imaging system according to several embodiments. [Modes for carrying out the invention]

[0008] Embodiments include a vacuum enclosure and an X-ray source having a vacuum enclosure with a plurality of sealable openings. Treatment of the vacuum enclosure, and in particular the vacuum enclosure for the X-ray source, may include purging the vacuum enclosure with a gas such as an inert gas such as nitrogen (N2) or argon (Ar). The gas may be used to pressurize the vacuum enclosure. The gas may also be used to remove other materials, such as adsorbent materials, such as water (H2O), from the surface of the vacuum enclosure and the components enclosed therein, so that they are suspended in the gas. The gas may be evacuated to remove the materials.

[0009] The embodiments described herein may include a sealable opening separate from the opening through which the gas is supplied. The gas may escape along with the material through the sealable opening (or vent) to remove the material. The embodiments described herein may also apply to pressurized vessels rather than vacuum enclosures. However, vacuum enclosures are used as examples.

[0010] Figure 1 is a block diagram of a vacuum enclosure with a compressible seal according to several embodiments. In some embodiments, the apparatus includes a vacuum enclosure 100 which includes a housing 104 including a first sealable opening 112 and a second sealable opening 108 separate from the first sealable opening 112. The vacuum enclosure 100 separates the interior 103 from the exterior 101. When the vacuum enclosure 100 is sealed, a vacuum may be formed inside 103. The housing 104 may include a vacuum-compatible material or metal, such as stainless steel.

[0011] The apparatus may include any apparatus having a vacuum enclosure 100. For example, as will be described in more detail below, the vacuum enclosure 100 may be part of an X-ray source or X-ray tube.

[0012] An example of the first sealable opening 112 includes a cylindrical hole that penetrates the housing 104. In other embodiments, the first sealable opening 112 may have a different shape, such as a rectangular cross-section, an elliptical cross-section, or the like.

[0013] An example of the second sealable opening 108 includes a metal tube, such as a copper tube or the like.

[0014] Figure 2 is a block diagram of the sealable opening of the vacuum enclosure of Figure 1 according to several embodiments. Referring to Figures 1 and 2, in some embodiments, region 116 is the region containing the first sealable opening 112.

[0015] The first compressible seal 120 is positioned at least around the first sealable opening 112 and is configured to form at least a portion of a vacuum seal over the first sealable opening 112 when compressed. The first compressible seal 120 may include a material that is compressible and vacuum-compatible, such as copper, stainless steel, oxygen-free high thermal conductivity (OFHC) material, oxygen-free electronic (OFE) copper, or the like. The first compressible seal 120 may include a material with a hardness lower than that of the housing 104, such as indenter hardness.

[0016] In some embodiments, the first compressible seal 120 may include a sphere. A sphere is used as an example; however, the first compressible seal 120 may have other shapes, such as a cylinder, a rectangular prism, an ellipsoid, a torus, a washer, or the like. The first compressible seal 120 may match the shape of the first sealable opening 112.

[0017] In a particular example, the first compressible seal 120 is a copper sphere that coincides with a cylindrical hole serving as the first sealable opening 112. The diameter of the copper sphere may be 20%, 50%, or more than that of the first sealable opening 112.

[0018] As will be described in more detail below, a second seal may seal the second sealable opening 108. For example, the second seal may include a clamped copper tube.

[0019] In some embodiments, the first compressible seal 120 is disposed over the entire first sealable opening 112 when compressed. The copper sphere described above is an example of the first compressible seal 120 that covers the entire first sealable opening 112. However, in other embodiments, the first compressible seal 120 may include a torus or a washer. The torus or washer may be disposed around the first sealable opening 112. The compression structure 124, when used to compress the first compressible seal 120, may include a structure that also forms part of a complete vacuum seal over the first sealable opening 112. In contrast, in some embodiments, the first compressible seal 120 may form a complete vacuum seal over the first sealable opening 112 without relying on the compression structure 124 when compressed. The compression structure 124 may include a region or shape corresponding to the opening of the recess 126, such as a cylinder or a rectangular prism.

[0020] In some embodiments, the compression structure 124 may be attached to the housing 104 in various ways. As an example, the compression structure 124 may be welded to the housing 104 while the compression structure 124 compresses the first compressible seal 120. In another example, while the compression structure 124 compresses the first compressible seal 120, the compression structure 124 may be peened to attach the compression structure 124 to the housing 104.

[0021] In some embodiments, the housing 104 includes a convex region 104a. The convex region 104a may allow the first compressible seal 120 to deform around the convex 104a to form a vacuum seal.

[0022] When a vacuum seal is formed over the first sealable opening 112, the vacuum seal operates at a rate of 1 × 10⁻¹⁶ per second. -11 Millibar (1.0 x 10 -9 Pascals)·liter (mbar*L / sec) or 7.50 × 10 -12 Tall (1.0 x 10 -9 The leakage rate may be lower than or equal to Pascals* liters / second (Thor liters per second).

[0023] In some embodiments, the first compressible seal 120 may be replaced with a first seal 120 that seals in a non-compressive manner.

[0024] In some embodiments, the first compressible seal 120 may include a tubular structure that may be sealed by compression of the pipe. For example, a copper pipe may be used as the first compressible seal 120, and it may be sealed by compressing the wall of the copper pipe.

[0025] In some embodiments, the compression structure 124 may be omitted. The first compressible seal 120 may be compressed by peening to form a vacuum seal over the first sealable opening 112, and the first compressible seal 120 may be attached to the housing 104.

[0026] Figure 3 is a block diagram of a sealable opening of the vacuum enclosure of Figure 1, having a screw, according to several embodiments. In some embodiments, these components may be similar to those of Figure 2. However, the compression structure 124 may include a screw 124a. The screw 124a is configured to compress the first compressible seal 120. In some embodiments, the screw 124a may include a set screw without a head, while in other embodiments, the screw 124a may include a head. The screw 124a may be long enough not to create a vacuum seal, and the head may not contact the housing 104 within the range of compression of the first compressible seal 120. As a result, the head of the screw 124a will not limit the compression of the compressible seal 120. An area of ​​the housing 104 adjacent to the first sealable opening 112 (e.g., within the recess 126) includes a thread 125a that engages with the thread 125b of the screw 124a. In some embodiments, the engagement of the threads 125 may also form an additional portion of the vacuum seal over the first sealable opening 112.

[0027] In some embodiments, the first sealable opening 112 is located within a recess 126 in the outer wall of the housing 104. The recess 126 extends the wall of the housing 104 into the interior 103 of the vacuum enclosure 100. When compressed, the metal sphere comes into contact with the periphery of the first sealable opening in region 104a and the side wall 126a of the recess 126.

[0028] In some embodiments, the threads 125a on the housing 104 do not extend completely into the recess 126. The threads 125a may stop on the side wall 126a where the threads 125a are not present, allowing the first compressible seal 120 to deform. In some embodiments, the threads 124a extend beyond the end of the threads 125 in the recess 126. As a result, even if the first compressible seal 120 deforms around the threads 124a, it does not come into contact with the threads 125a.

[0029] Although the tip of the screw 124a that contacts the first compressible seal 120 is shown to be flat, in other embodiments the shape may be different. For example the shape may be a convex cone, a concave cone, a convex or concave spherical shape, or similar.

[0030] Figures 4A-4C are block diagrams of the sealable openings of the vacuum enclosure of Figure 1, having various counterbores according to several embodiments. In some embodiments, the housing 104 of the vacuum enclosure 100 includes a counterbore 127 as a recess 126. A first sealable opening 112 is located at the bottom of the counterbore 127.

[0031] The bottom of the counterbore 127 may include a variety of shapes. For example, the bottom of the counterbore 127 may include a flat surface as shown in Figure 2, a curved surface as shown in Figure 4B, a concave conical surface as shown in Figure 4A, a convex conical surface as shown in Figure 4C, or similar. Each of these shapes may still have a region 104a around which the first compressible seal 120 may deform. In some embodiments, the angle 127a of the counterbore 127 may be about 118 ± 10 degrees. The angle 127b of the counterbore 127 may be about 62 ± 10 degrees. While specific angles or ranges of angles are used as examples, in other embodiments, these angles may differ.

[0032] Figures 5A-5B are block diagrams of the sealable opening of the vacuum enclosure of Figure 1, with alternative compression structures according to several embodiments. Referring to Figure 5A, in some embodiments, the compression structure 124b may include a portion 124b-1 that contacts the first compressible seal 120. The second portion 124b-2 may be sufficiently far from portion 124b-1 so that the second portion 124b-2 does not come into contact with the housing 104 when the second portion 124b-2 is attached to the housing 104 by the fastener 129. Thus, the first compressible seal 120 may be compressed to create a vacuum seal with the required force before the second portion 124b-2 comes into contact with the housing 104. The alternative compression structures of Figure 5 may be used after the screw 124a or other compression structures 124 described in Figure 3 fail to maintain a proper seal.

[0033] Referring to Figure 5B, in some embodiments, the compression structure 124b may be similar to that in Figure 5A. However, instead of having multiple fasteners 129, the compression structure 124b may be attached to the housing 104 at anchor points 131. Examples of anchor points 131 include hinges, bars attached to the housing 104 and mating with corresponding channels of the compression structure 124b, slots mating with corresponding tabs of the compression structure 124b, or similar. A hinge is illustrated as an example of an anchor point 131.

[0034] The anchor point 131 may allow the compression structure 124b to rotate about the anchor point 131. In some embodiments, the anchor point 131 is configured to resist rotation of the compression structure 124b when force is applied to the compression structure 124b by the fastener 129 and the first compressible seal 120. That is, when the fastener 129 is tightened, the anchor point 131 applies at least a portion of the force to the first compressible seal 120.

[0035] Figure 6 is a block diagram of an X-ray source according to several embodiments. In some embodiments, the X-ray source 200 includes the vacuum enclosure 100 described above. The X-ray source 200 may also include an electron source 140 configured to generate an electron beam 160. A target 156 is placed on the anode assembly within the vacuum enclosure and is configured to generate radiation in response to the electron beam 160. Examples of the target 156 include materials configured to generate X-rays in response to the electron beam 160, such as tungsten (W), molybdenum (Mo), rhodium (Rh), silver (Ag), rhenium (Re), palladium (Pd), or similar.

[0036] In some embodiments, the target 156 is positioned on the shortest gas path between the first sealable opening 112 and the second sealable opening 108. As a result, gas entering the second sealable opening 108 is more likely to pass near the target 156 as it exits through the first sealable opening 112 to the outside.

[0037] In some embodiments, the target 156 is positioned on the rotor assembly 144 (or bearing assembly or anode assembly). For brevity, the rotor assembly or bearing assembly or anode assembly is referred to herein as the rotor 144. The rotor 144 may be configured to rotate the bearing assembly during operation. The first sealable opening is positioned on the first side of the rotor 144, and the second sealable opening 108 is positioned on the second side of the rotor 144, opposite to the first side. As a result, gas flowing from the second sealable opening 108 to the first sealable opening 112 may be more likely to pass over the rotor 144. As used herein, "side" refers to the plane formed by the principal surface of the target area. The first side of the rotor 144 is the side facing the electron source 140, and the second side of the rotor 144 is the side facing away from the electron source 140 (towards the stator or heat sinks 148 and 152).

[0038] In some embodiments, the rotor 144 includes a first heatsink 148 on the side of the rotor 144 opposite to the target 156. The housing 104' includes a second heatsink 152 that meshes with the first heatsink 148. A gap may exist between the heatsinks 148 and 152 to allow the rotor 144 to move relative to the housing 104'. The gap may be relatively small to accommodate multiple fins of the heatsinks 148 and 152, and to increase energy transfer from the rotor 144 to the housing 104', among other things. As a result, adsorbent material on the heatsinks 148 and 152 may be difficult to remove by simply pressurizing the housing 104' with gas and exhausting the gas, as used in conventional purging processes. However, if the shortest gas path between the first sealable opening 112 and the second sealable opening 108 includes the space between the interlocking portions of the first heat sink 148 and the second sheet sink 152, the gas flowing along that path is more likely to pass over the surface having the adsorbent material, thereby removing the adsorbent material from the housing 104'.

[0039] In some embodiments, a plurality of sealable openings similar to the first sealable opening 112 may be arranged on the housing 104'. For example, the housing 104' of the vacuum enclosure for the X-ray source 200 includes a third sealable opening 116' separate from the first sealable opening 112 and the second sealable opening 108. A third compressible seal (unnumbered) is positioned at least around the third sealable opening 116' and, when compressed, is configured to form at least a portion of a vacuum seal over the third sealable opening 116', similar to the first compressible seal 120 described above.

[0040] Some embodiments include a method for evacuating the vacuum enclosure. Various vacuum enclosures 100 and X-ray sources 200 and their components are used as examples. In some embodiments, a vacuum enclosure 100 is provided that includes a housing 104 having a first sealable opening 112 and a second sealable opening 108 separate from the first sealable opening 112. Gas is passed through the vacuum enclosure 100 from the second sealable opening 108 to the first sealable opening 112 until a threshold condition is reached. For example, a vacuum / gas source 111 may be configured to supply gaseous nitrogen into the interior of the housing 104 / 104'.

[0041] The threshold condition can be a variety of conditions. For example, the threshold may be a quantity of time. Thus, the gas may be supplied by the vacuum / gas source 111 for a predetermined amount of time which is determined to be sufficient to remove the desired amount of material from the vacuum enclosure 100, and as a result, 10 -7 ~10 -9 Tall (1.33 x 10 -5 ~1.33 × 10 -7 A desired vacuum level can be obtained, such as a vacuum level of the order of Pascals or similar. In another example, the threshold may include the characteristics of the gas escaping from the first sealable opening 112, which may indicate that a sufficient amount of material has been removed. The threshold condition may be any condition indicating that a sufficient amount of material has been removed.

[0042] Once the conditions arise, the first compressible seal 120 may be compressed at the first sealable opening 112 to create a vacuum seal over the first sealable opening 112. Compression may be caused by the various compression structures 124 described above. In some embodiments, sealing may be repeated for all sealable openings except one that may be used to evacuate the housing 104 / 104'. In some embodiments, a cover is formed over the first compressible seal 120. For example, after compressing the first compressible seal 120 using a screw 124a or other compression structure 124, a cover such as epoxy, a press-fit cap, or the same may be placed over the screw 124a or other compression structure 124.

[0043] The gas may be evacuated from the vacuum enclosure 100 by the vacuum / gas source 111. Once the desired vacuum level is reached, the gas is evacuated from the vacuum enclosure 100, and the second sealable opening 108 may be sealed to form a vacuum seal over it. For example, the second sealable opening 108 may be an opening in a copper tube. The copper tube may be compressed or pinched off so that a vacuum-compatible seal is formed across the opening in the copper tube.

[0044] As described above, in some embodiments, the screw 124a may be used to compress the first compressible seal 120. For example, the copper sphere may be placed over the first sealable opening 112 while the gas escapes through the first sealable opening 112. The set screw 124a may be inserted into the screwed recess 126. In other embodiments, the copper sphere and the set screw 124a may be installed before the gas is supplied, but the gas is still able to escape through the first sealable opening 112. While the gas is escaping, the set screw 124a may be tightened until a desired compression level is reached for the desired quality of the vacuum seal. Sealing the first sealable opening 112 with the copper sphere is an example of compressing the first compressible seal 120 over the entire first sealable opening 112. As part of compressing the copper sphere, the copper sphere may be compressed into the side wall 126a of the recess 126.

[0045] The first compressible seal 120 may have advantages over tubular seals, such as pinch-off or compressed copper tubing used to seal the second sealable opening 108. For example, the first compressible seal 120 may be reusable and can be opened and resealed. The first compressible seal 120 may be more durable than a tubular seal when force is applied to the seal, where a tubular seal may be damaged, open, and leak due to force. The first compressible seal 120 may be safer to handle because it may not have sharp edges like a tubular seal that could cut or scratch a worker or user.

[0046] As described above, the vacuum enclosure 100 or the X-ray source 200 may include a plurality of sealable openings. Gas may pass through each of these from the second sealable opening 108. Each of these may be sealed as described above with respect to the first sealable opening 112.

[0047] In some embodiments, the vacuum enclosure 100 includes an electron source 140 and a rotor 144. Passing gas through the vacuum enclosure 100 from a second sealable opening 108 to a first sealable opening 112 involves passing the gas between the rotor 144 and the housing 104' along the path between the second sealable opening 108 and the first sealable opening 112. As described above, this path may include the space between the heat sinks 148 and 152.

[0048] Some embodiments include means for enclosing the vacuum, e.g., housing 104 / 104'. Some embodiments include means for generating X-rays, e.g., electron source 140 and target 156, disposed within the means for enclosing the vacuum. Some embodiments include first means for penetrating the means for enclosing the vacuum, e.g., first sealable opening 112 or third sealable opening 116. Some embodiments include second means for penetrating the means for enclosing the vacuum, e.g., second sealable opening 108. Some embodiments include first compressible means for sealing the first means for penetrating the means for enclosing the vacuum, e.g., first compressible seal 120. Some embodiments include second means for sealing the second means for penetrating the means for enclosing the vacuum, e.g., copper tube seal. Some embodiments include means for compressing the first compressible means, e.g., screw 124a.

[0049] Figure 7 is a block diagram of an X-ray imaging system according to several embodiments. The X-ray imaging system 700 includes an X-ray source 702 and a detector 710. The X-ray source 702 may include the X-ray source 200 described above or a similar one. In some embodiments, the X-ray source 702 includes a plurality of field emitters (FEs) 724. The electron beam from the field emitters 724 can be directed toward an anode 726 to generate X-rays 720. The X-ray source 702 is positioned relative to the detector 710 so that the X-rays 720 are generated so that they pass through a sample 722 and can be detected by the detector 710. In some embodiments, the detector 710 is part of a medical imaging system. In other embodiments, the X-ray imaging system 700 may include a portable vehicle scanning system as part of a cargo scanning system. System 700 may be any system which may include an X-ray source 702.

[0050] Some embodiments include a vacuum enclosure 100 comprising a housing 104, 104' including a first sealable opening 112 and a second sealable opening 108 separate from the first sealable opening 112; a first compressible seal 120 positioned near the first sealable opening 112 and configured to form at least a portion of a vacuum seal over the first sealable opening 112 when compressed; and a second seal for sealing the second sealable opening 108.

[0051] In some embodiments, the first compressible seal 120 is positioned across the entire first sealable opening 112 when compressed.

[0052] In some embodiments, the apparatus further comprises a screw 124a for compressing the first compressible seal 120; and areas of the housing 104, 104' adjacent to the first sealable opening 112 include threads that engage with the threads of the screw 124a.

[0053] In some embodiments, the housings 104, 104' of the vacuum enclosure 100 include counterbores; and the first sealable opening 112 is located at the bottom of the counterbores.

[0054] In some embodiments, the bottom of the counterbore includes a flat surface; a curved surface; a concave conical surface; or a convex conical surface.

[0055] In some embodiments, the first compressible seal 120 was a metal sphere before compression.

[0056] In some embodiments, the first sealable opening 112 is located within a recess in the outer wall of the housing 104, 104'; the metal ball, when compressed, contacts the periphery of the first sealable opening 112 and the side wall of the recess.

[0057] In some embodiments, the housings 104, 104' of the vacuum enclosure 100 include a third sealable opening 116' separate from the first sealable opening 112 and the second sealable opening 108; the apparatus further comprises a third compressible seal 120 positioned at least around the third sealable opening 116' and configured to form at least a portion of a vacuum seal over the third sealable opening 116' when compressed.

[0058] In some embodiments, the device further comprises compression structures 124, 124b configured to compress the first compressible seal 120; and fasteners 129 configured to apply force to the compression structures 124, 124b, causing the compression structures 124, 124b to compress the first compressible seal 120.

[0059] In some embodiments, the device further comprises anchor points 131 that are attached to housings 104, 104' and connect the compression structure to housings 104, 104'.

[0060] In some embodiments, the apparatus further comprises an electron source 140 located within a vacuum enclosure 100 and configured to generate an electron beam 160; and a target 156 located within the vacuum enclosure 100 and configured to generate radiation in response to the electron beam 160, wherein the apparatus is a radiation tube or an X-ray source.

[0061] In some embodiments, the target 156 is positioned on the shortest gas path between the first sealable opening 112 and the second sealable opening 108.

[0062] In some embodiments, the target 156 is positioned on the rotor assembly 144; the first sealable opening 112 is on the first side of the target; and the second sealable opening 108 is on the second side of the target, opposite to the first side of the target 156.

[0063] In some embodiments, the target 156 is positioned on the rotor assembly 144; the rotor assembly 144 includes a first heatsink 148 on the side of the rotor assembly opposite the target; the housing 104, 104' includes a second heatsink 152 that meshes with the first heatsink 148; and the shortest gas path between the first sealable opening 112 and the second sealable opening 108 includes the space between the meshed portions of the first heatsink 148 and the second heatsink 152.

[0064] Some embodiments include: providing a vacuum enclosure 100 including a housing 104, 104' including a first sealable opening 112 and a second sealable opening 108 separate from the first sealable opening 112; passing gas through the vacuum enclosure 100 from the second sealable opening 108 to the first sealable opening 112 until a threshold condition is reached; and compressing a first compressible seal 120 in the first sealable opening 112 to create a vacuum seal over the first sealable opening 112.

[0065] In some embodiments, the method further comprises the steps of: evacuating gas from the vacuum enclosure 100; and sealing the second sealable opening 108 after evacuating gas from the vacuum enclosure 100 to form a vacuum seal over the second sealable opening 108.

[0066] In some embodiments, the compression of the first compressible seal 120 in the first sealable opening 112 includes compressing the first compressible seal 120 with a screw 124a.

[0067] In some embodiments, the step of compressing the first compressible seal 120 in the first sealable opening 112 includes the step of compressing the first compressible seal 120 over the entire first sealable opening 112.

[0068] In some embodiments, the step of compressing the first compressible seal 120 in the first sealable opening 112 includes the step of compressing a metal sphere onto the first sealable opening 112.

[0069] In some embodiments, the step of compressing the first compressible seal 120 in the first sealable opening 112 includes the step of compressing a metal sphere against the side wall of a recess in the housing 104, 104' containing the first sealable opening 112.

[0070] In some embodiments, the housing 104, 104' of the vacuum enclosure 100 includes a third sealable opening 116' separate from the first sealable opening 112 and the second sealable opening 108; the method further comprises the steps of passing gas through the vacuum enclosure 100 from the second sealable opening 108 to the third sealable opening 116' until a threshold condition is reached; and compressing a third compressible seal 120 in the third sealable opening 116' to create a vacuum seal over the third sealable opening 116'.

[0071] In some embodiments, the vacuum enclosure 100 includes an electron source and a rotor; the step of passing gas from a second sealable opening 108 to a first sealable opening 112 within the vacuum enclosure 100 includes the step of passing gas between the rotor 144 and the housings 104, 104' along the path between the second sealable opening 108 and the first sealable opening 112.

[0072] Some embodiments include an X-ray device comprising: means for enclosing a vacuum; means for generating X-rays positioned within the means for enclosing the vacuum; a first means for penetrating the means for enclosing the vacuum; a second means for penetrating the means for enclosing the vacuum; a first compressible means for sealing the first means for penetrating the means for enclosing the vacuum; and a second means for sealing the second means for penetrating the means for enclosing the vacuum.

[0073] In some embodiments, the X-ray device further comprises means for compressing the first compressible means.

[0074] Some embodiments include: a vacuum enclosure 100 including a housing 104, 104, which includes a first sealable opening 112 and a second sealable opening 108 separate from the first sealable opening 112; a first seal positioned at least around the first sealable opening 112 and configured to form at least a portion of a vacuum seal over the first sealable opening 112 when sealed; and a second seal for sealing the second sealable opening 108.

[0075] While structures, devices, methods, and systems according to specific embodiments have been described, it will be readily apparent to those skilled in the art that many modifications are possible to these specific embodiments, and therefore any modifications should be considered to fall within the spirit and scope disclosed herein. Accordingly, many modifications can be made by those skilled in the art without departing from the spirit and scope set forth in the appended claims.

[0076] The claims following this written disclosure are thus explicitly incorporated into this written disclosure, and each claim stands independently as a separate embodiment. This disclosure includes all substitutions of independent claims and their dependent claims. Furthermore, additional embodiments that can be derived from the subsequent independent and dependent claims are also explicitly incorporated into this written specification. These additional embodiments are determined by replacing the dependency relationship of a given dependent claim with the wording "any of the claims beginning with claim [x] and ending with the claim immediately preceding this claim," where the term in parentheses "[x]" is replaced by the number of the most recently described independent claim. For example, with respect to a first set of claims beginning with independent claim 1, claim 4 may depend on either claims 1 or 3, and these distinct dependencies result in two separate embodiments; claim 5 may depend on any one of claims 1, 3, or 4, and these distinct dependencies result in three separate embodiments; claim 6 may depend on any one of claims 1, 3, 4, or 5, and these distinct dependencies result in four separate embodiments; and so on.

[0077] Any use of the term “first” in the claims relating to a feature or element does not necessarily imply the existence of a second or additional such feature or element. Where elements are specifically described in means-function correspondence form, they are intended to be construed to cover the corresponding structures, materials, or actions and their equivalents described herein in accordance with 35 U.S.C. § 112(f). Embodiments of the invention for which exclusive property rights or privileges are claimed are set forth below.

Claims

1. A vacuum enclosure including a housing that includes a first sealable opening and a second sealable opening separate from the first sealable opening; A first compressible seal positioned near the first sealable opening and configured to form at least a portion of a vacuum seal over the first sealable opening when compressed; and The second seal that seals the second sealable opening. A device equipped with the following features.

2. The apparatus according to claim 1, wherein the first compressible seal is positioned over the entirety of the first sealable opening when compressed.

3. The first compressible seal is further comprising a screw for compressing the seal; The region of the housing adjacent to the first sealable opening includes a thread that engages with the thread of the screw. The apparatus according to claim 1.

4. The housing of the vacuum enclosure includes a counterbore; The first sealable opening is located at the bottom of the counterbore hole. The apparatus according to claim 1.

5. The bottom of the aforementioned counterbore hole is: flat surface; Curved surface; Concave cone surface; or Including a convex conical surface The apparatus according to claim 4.

6. The apparatus according to claim 1, wherein the first compressible seal is a metal sphere before compression.

7. The first sealable opening is located in a recess in the outer wall of the housing; When compressed, the metal sphere contacts the periphery of the first sealable opening and the side wall of the recess. The apparatus according to claim 6.

8. The housing of the vacuum enclosure includes a third sealable opening, separate from the first sealable opening and the second sealable opening; The apparatus further comprises a third compressible seal positioned at least around the third sealable opening and configured to form at least a portion of a vacuum seal over the third sealable opening when compressed. The apparatus according to claim 1.

9. A compression structure configured to compress the first compressible seal; and A fastener configured to compress the first compressible seal by applying force to the compression structure is provided. The apparatus according to claim 1, further comprising:

10. The housing is further equipped with anchor points that are attached to the housing and connect the compression structure to the housing. The apparatus according to claim 9.

11. An electron source disposed within the vacuum enclosure and configured to generate an electron beam; and A target, placed inside the vacuum enclosure and configured to generate radiation in response to the electron beam, wherein the device is a radiation tube or an X-ray source. The apparatus according to claim 1, further comprising:

12. The apparatus according to claim 9, wherein the target is located on the shortest gas path between the first sealable opening and the second sealable opening.

13. The target is positioned on the rotor assembly; The first sealable opening is located on the first side of the target; The second sealable opening is located on the second side of the target, opposite to the first side of the target. The apparatus according to claim 9.

14. The target is positioned on the rotor assembly; The rotor assembly includes a first heat sink on the side of the rotor assembly opposite to the target; The housing includes a second heat sink that meshes with the first heat sink; The shortest gas path between the first sealable opening and the second sealable opening includes the space between the interlocking portions of the first and second heat sinks. The apparatus according to claim 9.

15. A step of providing a vacuum enclosure including a housing that includes a first sealable opening and a second sealable opening separate from the first sealable opening; A step of passing gas through the vacuum enclosure from the second sealable opening to the first sealable opening until a threshold condition is met; A step of compressing the first compressible seal in the first sealable opening to create a vacuum seal on the first sealable opening. A method that includes [a certain feature].

16. The step of exhausting the gas from the vacuum enclosure; and After exhausting the gas from the vacuum enclosure, the second sealable opening is sealed to form a vacuum seal over the second sealable opening. The method according to claim 13, further comprising:

17. The method according to claim 13, wherein the step of compressing the first compressible seal in the first sealable opening includes the step of compressing the first compressible seal by screw.

18. The method according to claim 13, wherein the step of compressing the first compressible seal in the first sealable opening includes the step of compressing the first compressible seal over the entire first sealable opening.

19. The method according to claim 13, wherein the step of compressing the first compressible seal in the first sealable opening includes the step of compressing a metal sphere on the first sealable opening.

20. The method according to claim 17, wherein the step of compressing the first compressible seal in the first sealable opening includes the step of compressing the metal ball against the side wall of a recess in the housing including the first sealable opening.

21. The housing of the vacuum enclosure includes a third sealable opening, separate from the first sealable opening and the second sealable opening; The aforementioned method: The step of passing the gas through the vacuum enclosure from the second sealable opening to the third sealable opening until the threshold condition is met; and The method further comprises the step of compressing a third compressible seal in the third sealable opening to create a vacuum seal over the third sealable opening. The method according to claim 13.

22. The vacuum enclosure includes an electron source and a rotor; The step of passing the gas from the second sealable opening to the first sealable opening within the vacuum enclosure includes the step of passing the gas between the rotor and the housing along the path between the second sealable opening and the first sealable opening. The method according to claim 13.

23. Means for enclosing a vacuum; Means for generating X-rays, disposed within the means for enclosing the vacuum; A first means for penetrating the means for enclosing the vacuum; A second means for penetrating the means for enclosing the vacuum; and A first compressible means for sealing the first means for penetrating the means for enclosing the vacuum; and A second means for sealing the second means for penetrating the means for enclosing the vacuum. An X-ray device equipped with the following features.

24. The X-ray device according to claim 21, further comprising means for compressing the first compressible means.

25. A vacuum enclosure including a housing that includes a first sealable opening and a second sealable opening separate from the first sealable opening; A first seal positioned at least around the first sealable opening and configured to form at least a portion of a vacuum seal over the first sealable opening when sealed; and The second seal that seals the second sealable opening. A device equipped with the following features.

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