Foreline valve cleaning equipment for semiconductor manufacturing facilities and plasma generator for that purpose

Abstract

According to the present invention, a semiconductor manufacturing apparatus comprising a process chamber, a chamber exhaust pipe through which exhaust gas discharged from the process chamber flows, and a pressure regulating valve provided in the chamber exhaust pipe for adjusting the internal pressure of the chamber exhaust pipe, wherein a device is provided on the chamber exhaust pipe upstream of the pressure regulating valve for generating cleaning plasma to clean the pressure regulating valve, the device providing an internal passage through which the exhaust gas flows and comprising: a passage module extending along a central axis; an upstream flange module connected to the upstream end of the passage module; and a downstream flange module connected to the downstream end of the passage module. A plasma generator is provided, which includes a flow-side flange module, the passage module comprising a passage member of a dielectric material extending along the central axis and forming the passage inside, and a passage-side electrode member of an electrically conductive material surrounding the outer circumferential surface of the passage member, the upstream flange module comprising an upstream electrode member of an electrically conductive material, and the downstream flange module comprising a downstream electrode member of an electrically conductive material, wherein the cleaning plasma is generated in the passage by discharge between the passage-side electrode member and the upstream electrode member and discharge between the passage-side electrode member and the downstream electrode member.

Description

[Technical Field]

[0001] The present invention relates to semiconductor manufacturing equipment, and more specifically, to a technology for cleaning a valve provided in a foreline of semiconductor manufacturing equipment. [Background Art]

[0002] In semiconductor manufacturing equipment, gas in a process chamber is discharged through a foreline extending from the process chamber. Generally, a throttle valve for adjusting the internal pressure of the process chamber is provided in the foreline. Korean Registered Patent No. 10-1795980 describes a configuration in which a separate cleaning gas is directly injected into a throttle valve provided in the foreline to clean deposits from the throttle valve. However, such a method complicates the structure of the throttle valve and additionally requires equipment for supplying a separate cleaning gas. [Summary of the Invention] [Problem to be Solved by the Invention]

[0003] An object of the present invention is to provide a foreline valve cleaning equipment for semiconductor manufacturing equipment and a plasma generator therefor. [Means for Solving the Problem]

[0004] To achieve the object of the present invention, according to one aspect of the present invention, a semiconductor manufacturing apparatus comprising a process chamber, a chamber exhaust pipe through which exhaust gas discharged from the process chamber flows, and a pressure regulating valve provided in the chamber exhaust pipe for adjusting the internal pressure of the chamber exhaust pipe, wherein a device is provided on the chamber exhaust pipe upstream of the pressure regulating valve for generating cleaning plasma to clean the pressure regulating valve, the device comprising: a passage module providing a passage through which the exhaust gas flows and extending along a central axis; an upstream flange module connected to the upstream end of the passage module; and downstream of the passage module A plasma generator is provided, which includes a downstream flange module connected to a side end; the passage module comprises a passage member of a dielectric material extending along the central axis and forming the passage inside, and a passage-side electrode member of an electrically conductive material surrounding the outer circumferential surface of the passage member; the upstream flange module comprises an upstream electrode member of an electrically conductive material; and the downstream flange module comprises a downstream electrode member of an electrically conductive material; wherein the cleaning plasma is generated in the passage by discharge between the passage-side electrode member and the upstream electrode member and discharge between the passage-side electrode member and the downstream electrode member.

[0005] To achieve the object of the present invention, according to yet another aspect of the present invention, a valve cleaning system is provided which includes a plasma generator, a power supply unit that produces the power necessary for the operation of the plasma generator, and a power supply cable that supplies the power produced by the power supply unit to the plasma generator. [Effects of the Invention]

[0006] According to the present invention, all of the aforementioned objectives of the present invention can be achieved. Specifically, the plasma generator according to the present invention is installed on the foreline upstream of the throttle valve and generates cleaning plasma using a capacitively coupled plasma method, which is then introduced into the throttle valve. Therefore, the throttle valve can be cleaned more easily compared to conventional methods. [Brief explanation of the drawing]

[0007] [Figure 1] This is a diagram showing the schematic configuration of a semiconductor manufacturing facility equipped with a foreline valve cleaning device according to one embodiment of the present invention. [Figure 2] Figure 1 is a perspective view of a plasma generator provided in a foreline valve cleaning system according to one embodiment of the present invention. [Figure 3] Figure 2 is an exploded perspective view showing the plasma generator separated into its main components. [Figure 4] Figure 2 is a cross-sectional view of the plasma generator shown along the line A-A'. [Figure 5] Figure 4 shows a plan view and exploded perspective view of the passage module in the plasma generator. [Figure 6] Figure 4 shows a plan view and exploded perspective view of the passage module in the plasma generator. [Figure 7] Figure 4 is an exploded perspective view of the upstream flange module of the plasma generator shown. [Figure 8] Figure 4 is an exploded perspective view of the downstream flange module of the plasma generator shown. [Figure 9] This is a cross-sectional view of a plasma generator according to another embodiment of the present invention. [Modes for carrying out the invention]

[0008] The configuration and operation of embodiments of the present invention will be described in detail below with reference to the drawings.

[0009] Figure 1 shows a schematic configuration of a semiconductor manufacturing facility equipped with a plasma device for cleaning foreline valves according to one embodiment of the present invention. Referring to Figure 1, the semiconductor manufacturing facility (A) includes a process chamber (C) in which the semiconductor manufacturing process proceeds using various process gases, a vacuum pump (P) that forms a gas discharge pressure so that gas is discharged from the process chamber (C), a scrubber (S) that processes the gas discharged from the process chamber (C), a chamber exhaust pipe (F) that connects the process chamber (C) and the vacuum pump (P) and forms a foreline through which the gas discharged from the process chamber (C) flows, a throttle valve (V) which is a pressure regulating valve provided on the chamber exhaust pipe (F) to adjust the internal pressure of the process chamber (C), a foreline valve cleaning device 100 according to one embodiment of the present invention for cleaning the throttle valve (V), and a pump exhaust pipe (D) that connects the process chamber (C) and the scrubber (S) and through which the gas discharged from the vacuum pump (P) flows. The distinguishing feature of the present invention is the foreline valve cleaning equipment 100. The remaining components of the semiconductor manufacturing equipment (A) shown in Figure 1, excluding the foreline valve cleaning equipment 100, are the process chamber (C), vacuum pump (P), scrubber (S), chamber exhaust pipe (F), throttle valve (V), and pump exhaust pipe (D). These components are within the normal technical scope related to the present invention, and therefore, a detailed explanation of them is omitted here.

[0010] The foreline valve cleaning equipment 100 is for cleaning the throttle valve (V) and includes a plasma generator 105 mounted on the chamber exhaust pipe (F) for generating plasma, a power supply unit 190 for producing the power necessary for the operation of the plasma generator 105, and a power supply cable 195 for supplying the power produced by the power supply unit 190 to the plasma generator 105.

[0011] The plasma generator 105 is installed on the chamber exhaust pipe (F) and generates plasma. The plasma generator 105 is operated by power supplied by the power supply unit 190 via the power supply cable 195. The plasma generator 105 is positioned upstream of the throttle valve (V) on the chamber exhaust pipe (F), and the plasma generated by the plasma generator 105 flows into the throttle valve (V). The plasma generated by the plasma generator 105 and flowed into the throttle valve (V) removes deposits inside the throttle valve (V). In this embodiment, the plasma generator 105 is supplied with argon (Ar) gas and nitrogen trifluoride (NF3) gas from the process chamber (C) to generate plasma for cleaning the throttle valve (V). Referring to Figures 2, 3, and 4, the plasma generator 105 comprises a passage module 110 extending along a central axis (X) that extends in an approximately straight line, an inlet-side flange module 130 connected to the inlet-side end 110a of the passage module 110, an outlet-side flange module 150 connected to the outlet-side end 110b of the passage module 110, a plurality of connecting rods 170 connecting the inlet-side flange module 130 and the outlet-side flange module 150, and a protective cover portion 180 surrounding the outer circumference of the passage module 110.

[0012] The passage module 110 is a circular tubular shape overall, extending approximately in a straight line along its central axis (X). A passage 111 through which gas flows is formed inside the passage module 110. The passage 111 formed in the passage module 110 is substantially identical to the passage formed in the chamber exhaust pipe (F). An inlet flange module 130 is tightly connected to the inlet end 110a of the passage module 110, and an outlet flange module 150 is tightly connected to the outlet end 110b of the passage module 110. The passage module 110 is shown as a plan view in Figure 5 and as an exploded perspective view in Figure 6. Referring to Figures 3, 4, 5, and 6, the passage module 110 comprises a passage member 112 that forms a passage 111 inside, a passage-side electrode member 114 that surrounds the outer circumferential surface of the passage member 112, an electrode fixing means 120 for fixing the passage-side electrode member 114, and a buffer member 128 disposed between the passage member 112 and the passage-side electrode member 114.

[0013] The passage member 112 is a circular tube extending along a central axis (X), with a linearly extending circular cross-sectional passage 111 formed inside. The passage member 112 is made of a dielectric material, and in this embodiment, it is made of aluminum nitride (AlN). Gas flowing in from the process chamber (C) side through the passage 111 of the passage member 112 flows and is supplied to the throttle valve (V) side. The passage 111 is also a region where plasma is generated. A buffer member 116 is in close contact with the outer circumferential surface of the passage member 112. The inlet end of the passage member 112 forms the inlet end 110a of the passage module 110, and the outlet end of the passage member 112 forms the outlet end 110b of the passage module 110.

[0014] The passage-side electrode member 114 is made of an electrically conductive material, but in this embodiment, it is made of copper (Cu). The passage-side electrode member 114 comprises a passage electrode portion 115 that surrounds the outer circumferential surface of the passage member 112, and a first connecting piece 117 and a second connecting piece 119 that are bent radially outward from both ends of the passage electrode portion 115.

[0015] The passage electrode portion 115 is generally belt-shaped, extends along the circumferential direction of the passage member 112, and completely surrounds the outer peripheral surface of the passage member 112. A first coupling piece 117 and a second coupling piece 119 are respectively connected to both circumferential ends of the passage electrode portion 115. The passage electrode portion 115 is spaced apart from both ends of the passage member 112. The inner peripheral surface of the passage electrode portion 115 is in close contact with the buffer member 116.

[0016] The first coupling piece 117 and the second coupling piece 119 are respectively bent radially outward from both circumferential ends of the passage electrode portion 115 and extend therefrom. The first coupling piece 117 and the second coupling piece 119 are adjacent to and oppose each other in the circumferential direction. In the first coupling piece 117, three first through holes 117a are formed spaced apart along the width direction of the belt-shaped passage electrode portion 115. In the second coupling piece 119, three second through holes 119a are formed spaced apart along the width direction of the belt-shaped passage electrode portion 115. Each of the three first through holes 117a and the three second through holes 119a is positioned to correspond and oppose one-to-one. An electrode fixing means 120 is coupled to the first coupling piece 117 and the second coupling piece 119.

[0017] The electrode fixing means 120 fixes the passage-side electrode member 114 to the passage module 110. The electrode fixing means 120 includes a first coupling rod 122 to which the first coupling piece 117 of the passage-side electrode member 114 is coupled, a second coupling rod 124 to which the second coupling piece 119 of the passage-side electrode member 114 is coupled, and three fasteners 126 that fasten the first coupling rod 122 and the second coupling rod 124 together.

[0018] The first coupling rod 122 is generally rod-shaped, and has a size and shape corresponding to the first coupling piece 117 of the passage-side electrode member 114. The first coupling rod 122 is made of an electrically conductive material. The first coupling rod 122 is formed with a first slot 122a into which the first coupling piece 117 of the passage-side electrode member 114 is closely inserted. The first coupling rod 122 is formed with three first bolt holes 123 positioned respectively corresponding to the three first through holes 117a formed in the first coupling piece 117 of the passage-side electrode member 114.

[0019] The second coupling rod 124 is substantially rod-shaped, and has a size and shape corresponding to the second coupling piece 119 of the passage-side electrode member 114. The second coupling rod 124 is made of an electrically conductive material. A second slot 124a into which the second coupling piece 119 of the passage-side electrode member 114 is closely inserted is formed in the second coupling rod 124. Three second bolt holes 125 positioned corresponding to each of the three second through holes 119a formed in the second coupling piece 119 of the passage-side electrode member 114 are formed in the second coupling rod 124.

[0020] The three fasteners 126 fasten the first coupling rod 122 and the second coupling rod 124. Each of the three fasteners 126 includes a fastening bolt 127a and a fastening nut 127b. Each of the three fastening bolts 127a passes through the second bolt hole 125 formed in the second coupling rod 124 and the first bolt hole 123 formed in the first coupling rod 122, and is fastened to the fastening nut 127b. The passage-side electrode member 114 coupled to the first coupling rod 122 and the second coupling rod 124 is clamped by the three fasteners 126. For any one of the three fasteners 126, a power supply cable 195 is fastened and coupled by the fastening nut 127b, whereby power is supplied to the passage-side electrode member 114. In the present embodiment, it is described that the power supply cable 195 is connected to the fastener 126 located at the center among the three fasteners 126.

[0021] The buffer member 128 is substantially tubular, and is disposed between the passage member 112 and the passage-side electrode member 114. The inner peripheral surface of the buffer member 128 is in close contact with the outer peripheral surface of the passage member 112, and the outer peripheral surface of the buffer member 128 is in close contact with the inner peripheral surface of the passage-side electrode member 114. The buffer member 128 is made of an electrically conductive material, has appropriate elasticity, and functions to bring the passage-side electrode member 114 into close contact with the passage member 112. The buffer member 128 may be made of a conductive polymer material.

[0022] Referring to Figures 2, 3, and 4, the inlet flange module 130 is coupled to the inlet end 110a of the passage module 110. Figure 7 shows the inlet flange module 130 as an exploded perspective view. Referring to Figures 2, 3, 4, and 7, the inlet flange module 130 comprises an inlet flange body 132, a ring-shaped inlet insulating member 140 coupled to the inlet flange body 132, an inlet insulating block 145 coupled to the inlet flange body 132, and an upstream O-ring (inlet O-ring) 149 coupled to the inlet flange body 132.

[0023] The inlet flange body 132 comprises an inlet passage portion 133 that extends shortly along the central axis (X), and an inlet flange portion 136 that extends radially outward from the inlet passage portion 133. The chamber exhaust pipe (F) is detachably connected to the inlet flange body 132. The inlet flange body 132 is made of an electrically conductive material and is grounded to become an upstream electrode member. A plasma discharge occurs between the inlet flange body 132, which is the upstream electrode member, and the passage electrode member 114. In this embodiment, the inlet flange body 132 is described as being made of SUS304 material or an aluminum alloy material.

[0024] The inlet passage portion 133 is a short, tubular shape extending along the central axis (X). An inlet passage 134 is formed inside the inlet passage portion 133, communicating with a passage 111 formed in the passage module 110. At the end of the inlet passage portion 133 on the passage module 110 side, an inlet O-ring groove 135 is formed into which an inlet O-ring 149 is inserted.

[0025] The inlet-side flange portion 136 is formed to extend radially outward from the inlet-side passage portion 133, further than the passage module 110. On the surface of the inlet-side flange portion 136 facing the discharge-side flange module 150, an inlet-side ring groove 137 is formed to accommodate the inlet-side insulating member 140, and an inlet-side housing groove 138 is formed to accommodate the inlet-side insulating block 145.

[0026] The inlet-side insulating member 140 is ring-shaped and made of an insulating material. The inlet-side insulating member 140 fits into the inlet-side ring groove 137 formed in the inlet-side flange portion 136. The inlet-side insulating member 140 surrounds the tip of the outer circumferential surface of the passage member 112, electrically insulating the inlet-side flange body 132 from the passage-side electrode member 114.

[0027] The inlet-side insulating block 145 is made of an insulating material and fits into the inlet-side receiving groove 138 formed in the inlet-side flange portion 136. The inlet-side insulating block 145 prevents the inlet-side flange body 132 from coming into contact with the first coupling rod 122 and the second coupling rod 124 and being electrically connected.

[0028] The inlet-side O-ring 149 is inserted into the inlet-side O-ring groove 135 formed in the inlet-side passage portion 133 and coupled to the inlet-side flange body 132. The inlet-side O-ring 149 seals the connection between the inlet-side flange body 132 and the passage member 112.

[0029] Referring to Figures 2, 3, and 4, the discharge flange module 150 is coupled to the discharge end 110b of the passage module 110. Figure 8 shows the discharge flange module 150 as an exploded perspective view. Referring to Figures 2, 3, 4, and 8, the discharge flange module 150 comprises a discharge flange body 152, a ring-shaped discharge insulating member 160 coupled to the discharge flange body 152, a discharge insulating block 165 coupled to the discharge flange body 152, and a discharge O-ring 169, which is a downstream O-ring coupled to the discharge flange body 152.

[0030] The discharge-side flange body 152 comprises a short discharge-side passage portion 153 extending along the central axis (X), and a discharge-side flange portion 156 formed by extending radially outward from the discharge-side passage portion 153. The chamber exhaust pipe (F) is detachably connected to the discharge-side flange body 152. The discharge-side flange body 152 is made of an electrically conductive material and is grounded to become a downstream electrode member. A plasma discharge occurs between the discharge-side flange body 152, which is the downstream electrode member, and the passage-side electrode member 114. In this embodiment, the discharge-side flange body 152 is described as being made of SUS304 material or an aluminum alloy material.

[0031] The discharge-side passage section 153 is a short, tubular shape extending along the central axis (X). A discharge passage 154 is formed inside the discharge-side passage section 153, communicating with the passage 111 formed in the passage module 110. At the end of the discharge-side passage section 153 on the passage module 110 side, a discharge-side O-ring groove 155 is formed into which a discharge-side O-ring 169 is inserted.

[0032] The discharge-side flange portion 156 is formed to extend radially outward from the discharge-side passage portion 153, further than the passage module 110. On the surface of the discharge-side flange portion 156 facing the inlet-side flange module 130, a discharge-side ring groove 157 that accommodates the discharge-side insulating member 160 and a discharge-side housing groove 158 that accommodates the discharge-side insulating block 165 are formed.

[0033] The discharge-side insulating member 160 is ring-shaped and made of an insulating material. The discharge-side insulating member 160 fits into the discharge-side ring groove 157 formed in the discharge-side flange portion 156. The discharge-side insulating member 160 surrounds the tip of the outer circumferential surface of the passage member 112, electrically insulating the discharge-side flange body 152 from the passage-side electrode member 114.

[0034] The discharge-side insulating block 165 is made of an insulating material and fits into the discharge-side housing groove 158 formed in the discharge-side flange portion 156. The discharge-side insulating block 165 prevents the discharge-side flange body 152 from coming into contact with the first coupling rod 122 and the second coupling rod 124 and being electrically connected.

[0035] The discharge-side O-ring 169 is inserted into the discharge-side O-ring groove 155 formed in the discharge-side passage portion 153 and connected to the discharge-side flange body 152. The discharge-side O-ring 169 seals the connection between the discharge-side flange body 152 and the passage member 112.

[0036] Referring to Figures 3 and 4, each of the multiple connecting rods 170 connects the inlet flange module 130 and the outlet flange module 150. The multiple connecting rods 170 are arranged sequentially along the circumference outside the passage module 110, spaced apart. Both ends of each of the multiple connecting rods 170 are connected to the inlet flange portion 136 and the outlet flange portion 156. The multiple connecting rods 170 maintain a state in which the passage module 110 is firmly attached and connected between the inlet flange module 130 and the outlet flange module 150.

[0037] The protective cover section 180 surrounds and protects the passage module 110 and the multiple connecting rods 170 from the outside. The protective cover section 180 comprises a semicircular first cover member 181 and a semicircular second cover member 182. The first cover member 181 and the second cover member 185 are arranged circumferentially and surround the passage module 110 circumferentially. The first cover member 181 and the second cover member 185 are screwed into an inlet-side flange section 136 and an outlet-side flange section 156. The first cover member 181 and the second cover member 185 have numerous cooling holes 186 through which air can pass for cooling. In addition, a cable passage 188 is formed at the portion where the first cover member 181 and the second cover member 185 are connected, through which a power supply cable 195 passes.

[0038] Referring to Figure 1, the power supply unit 190 produces the AC power necessary for the operation of the plasma generator 105. The power produced by the power supply unit 190 is supplied to the plasma generator 105 through the power supply cable 195.

[0039] The power supply cable 195 supplies AC power produced by the power supply unit 190 to the plasma generator 105. When AC power is supplied to the plasma generator 105 through the power supply cable 195, cleaning plasma is generated in the passage 111 in a capacitively coupled plasma (CCP) manner by discharge between the passage-side electrode member 114 and the upstream electrode member 132 and between the passage-side electrode member 114 and the downstream electrode member 152, and this plasma flows into the throttle valve (V).

[0040] Figure 9 shows a cross-sectional view of a plasma generator according to another embodiment of the present invention. Referring to Figure 9, the plasma generator 205 is another embodiment of the plasma generator 105 described with reference to Figures 2 to 8, and comprises a passage module 110 extending along a central axis (X) that extends in an approximately straight line, an inlet flange module 230 connected to the inlet end 110a of the passage module 110, an outlet flange module 250 connected to the outlet end 110b of the passage module 110, and a side cover member 290 surrounding the outer periphery of the passage module 110.

[0041] Since the passage module 110 has roughly the same configuration as the passage module 110 provided in the plasma generator 105 described with reference to Figures 2 to 8, a detailed explanation of it will be omitted here.

[0042] The inlet flange module 230 comprises an inlet flange body 132, a ring-shaped inlet insulating member 140 coupled to the inlet flange body 132, an inlet O-ring 149 coupled to the inlet flange body 132, an additional inlet coupling member 245 coupled to the inlet flange body 132, and a first outer O-ring 249 coupled to the additional inlet coupling member 245.

[0043] The inlet flange body 132 has roughly the same configuration as the inlet flange body 132 provided in the inlet flange module 130 described with reference to Figures 2 to 4 and Figure 7, so a detailed explanation of it is omitted here.

[0044] The inlet-side insulating member 140 has approximately the same configuration as the inlet-side insulating member 140 provided in the inlet-side flange module 130 described with reference to Figures 2 to 4 and Figure 7, so a detailed explanation of it is omitted here.

[0045] The inlet O-ring 149 has approximately the same configuration as the inlet O-ring 149 provided in the inlet flange module 130 described with reference to Figures 2 to 4 and Figure 7, so a detailed explanation of it is omitted here.

[0046] The inlet-side additional coupling member 245 is an upstream-side additional coupling member that is roughly annular in shape and is positioned to surround the passage module 110 from the outside. The inlet-side additional coupling member 245 is coupled to the discharge-side flange module 250 on the outside of the inlet-side ring groove 137 of the inlet-side flange body 132. A first outer O-ring groove 247 is formed on the surface of the inlet-side additional coupling member 245 that contacts the inlet-side flange body 132, into which a first outer O-ring 249 is inserted.

[0047] The first outer O-ring 249 is inserted into a first outer O-ring groove 247 formed in the inlet-side additional coupling member 245 and coupled to the inlet-side additional coupling member 245. The first outer O-ring 249 seals the contact portion between the inlet-side flange body 132 and the inlet-side additional coupling member 245. In this embodiment, it is described that the groove into which the first outer O-ring 249 is inserted is formed in the inlet-side additional coupling member 245, but it may also be formed in the inlet-side flange body 132, or in both the inlet-side flange body 132 and the inlet-side additional coupling member 245, and these also fall within the scope of the present invention.

[0048] The discharge flange module 250 comprises a discharge flange body 152, a ring-shaped discharge insulating member 160 connected to the discharge flange body 152, a discharge O-ring 169 connected to the discharge flange body 152, an additional discharge coupling member 265 connected to the discharge flange body 152, and a second outer O-ring 269 connected to the additional discharge coupling member 265.

[0049] The discharge flange body 152 has roughly the same configuration as the discharge flange body 152 provided in the discharge flange module 150 described with reference to Figures 2 to 4 and Figure 8, so a detailed explanation of it is omitted here.

[0050] The discharge-side insulating member 160 has approximately the same configuration as the discharge-side insulating member 160 provided in the discharge-side flange module 150 described with reference to Figures 2 to 4 and Figure 8, so a detailed explanation of it is omitted here.

[0051] The discharge-side O-ring 169 has roughly the same configuration as the discharge-side O-ring 169 provided in the discharge-side flange module 150 described with reference to Figures 2 to 4 and Figure 8, so a detailed explanation of it is omitted here.

[0052] The discharge-side additional coupling member 265 is a roughly annular downstream-side additional coupling member, positioned to surround the passage module 110 from the outside. The discharge-side additional coupling member 265 is coupled to the inlet-side flange module 230 on the opposite side of the discharge-side annular groove 157 on the discharge-side flange body 152. A second outer O-ring groove 267 is formed on the surface of the discharge-side additional coupling member 265 that contacts the discharge-side flange body 152, into which a second outer O-ring 269 is inserted.

[0053] The second outer O-ring 269 is inserted into a second outer O-ring groove 267 formed in the discharge-side additional coupling member 265 and coupled to the discharge-side additional coupling member 265. The second outer O-ring 269 seals the contact portion between the discharge-side flange body 152 and the discharge-side additional coupling member 265. In this embodiment, it is described that the groove into which the second outer O-ring 269 is inserted is formed in the discharge-side additional coupling member 265, but it may also be formed in the discharge-side flange body 152, or in both the discharge-side flange body 152 and the discharge-side additional coupling member 265, and these also fall within the scope of the present invention.

[0054] The side cover member 290 is roughly annular in shape and surrounds the outer circumference of the passage module 110 between the inlet flange body 132 and the outlet flange body 152. Both ends of the side cover member 290 are joined to the inlet additional member 245 and the outlet additional member 265 without any gaps. The side cover member 290, together with the inlet O-ring 149, the outlet O-ring 169, the first outer O-ring 249, and the second outer O-ring 269, prevents gas passing through the plasma generator 205 from leaking to the outside.

[0055] Although the present invention has been described above through embodiments, the present invention is not limited thereto. The above embodiments can be modified or altered without departing from the spirit and scope of the present invention, and those skilled in the art will understand that such modifications and alterations also belong to the present invention.

Claims

1. A semiconductor manufacturing apparatus comprising a process chamber, a chamber exhaust pipe through which exhaust gas discharged from the process chamber flows, and a pressure regulating valve provided in the chamber exhaust pipe for adjusting the internal pressure of the chamber exhaust pipe, wherein a device is provided upstream of the pressure regulating valve on the chamber exhaust pipe for generating cleaning plasma to clean the pressure regulating valve, The aforementioned exhaust gas flows through a passage module which extends along the central axis, An upstream flange module connected to the upstream end of the passage module, The downstream flange module is connected to the downstream end of the passage module, The passage module comprises a passage member made of a dielectric material that extends along the central axis and forms the passage inside, and a passage-side electrode member made of an electrically conductive material that surrounds the outer surface of the passage member. The upstream flange module comprises an upstream electrode member made of an electrically conductive material, The downstream flange module comprises a downstream electrode member made of an electrically conductive material, A plasma generator in which the cleaning plasma is generated in the passage by a discharge between the passage-side electrode member and the upstream electrode member and a discharge between the passage-side electrode member and the downstream electrode member.

2. The passage-side electrode member comprises a passage electrode portion that extends circumferentially and surrounds the outer surface of the passage member, and a first connecting piece and a second connecting piece that protrude outward from both ends of the passage electrode portion. The plasma generator according to claim 1, wherein the passage module further comprises electrode fixing means for tightening the first coupling piece and the second coupling piece to fix the passage-side electrode member to the passage member.

3. The plasma generator according to claim 2, wherein the electrode fixing means comprises a first connecting rod to which the first connecting piece is connected, a second connecting rod to which the second connecting piece is connected, and fastening bolts and fastening nuts for fastening the first connecting rod and the second connecting rod.

4. The first connecting rod has a first slot formed therein into which the first connecting piece is inserted. The plasma generator according to claim 3, wherein the second connecting rod has a second slot into which the second connecting piece is inserted.

5. The plasma generating apparatus according to claim 4, wherein bolt holes are formed in the first connecting rod and the second connecting rod, and in the first connecting piece and the second connecting piece, through which the fastening bolts pass.

6. The plasma generator according to claim 1, wherein the passage module further comprises a buffer member made of an electrically conductive material, disposed between the passage member and the passage-side electrode member, with both sides in close contact with the outer circumferential surface of the passage member and the inner circumferential surface of the passage-side electrode member, respectively.

7. The upstream flange module further comprises an inlet-side insulating member made of an insulating material that surrounds the tip of the inlet-side outer peripheral surface of the passage member so as to block contact between the upstream electrode member and the passage-side electrode member. The plasma generator according to claim 1, wherein the downstream flange module further comprises an insulator-side insulating member made of an insulating material that surrounds the leading edge of the discharge-side outer surface of the passage member so as to block contact between the downstream electrode member and the passage-side electrode member.

8. The upstream electrode member has an inlet-side ring groove in which the inlet-side insulating member is housed. The plasma generator according to claim 7, wherein the downstream electrode member has an discharge-side ring groove formed therein in which the discharge-side insulating member is housed.

9. It further includes a protective cover portion that is positioned at a distance from the passage module and surrounds the outer periphery of the passage module, The plasma generator according to claim 1, wherein cooling holes for cooling are formed in the protective cover portion.

10. The aforementioned passage module further includes a plurality of connecting rods arranged sequentially along the circumferential direction on the outside of the passage module, The plasma generator according to claim 1, wherein both ends of each of the plurality of connecting rods are connected to the upstream flange module and the downstream flange module, respectively.

11. The upstream flange module further comprises an upstream O-ring that seals the contact portion between the upstream electrode member and the passage member, The plasma generator according to claim 1, wherein the downstream flange module further comprises a downstream O-ring that seals the contact portion between the downstream electrode member and the passage member.

12. The upstream flange module and the downstream flange module further include an annular wall-shaped side cover member that surrounds the passage module on the outside, The upstream flange module further comprises an upstream additional coupling member to which the upstream end of the side cover member is joined and which is coupled to the upstream electrode member, and a first outer O-ring that seals the contact portion between the upstream electrode member and the upstream additional coupling member. The plasma generator according to claim 11, wherein the downstream flange module further comprises a downstream additional coupling member to which the downstream end of the side cover member is joined and which is coupled to the downstream electrode member, and a second outer O-ring for sealing the contact portion between the downstream electrode member and the downstream additional coupling member.

13. A semiconductor manufacturing apparatus comprising a process chamber, a chamber exhaust pipe through which exhaust gas discharged from the process chamber flows, and a pressure regulating valve provided in the chamber exhaust pipe for regulating the internal pressure of the chamber exhaust pipe, wherein the equipment is for cleaning the pressure regulating valve, A plasma generator is provided on the chamber exhaust pipe upstream of the pressure control valve to generate cleaning plasma for cleaning the pressure control valve. A power supply unit that produces the power necessary for the operation of the plasma generator, Includes a power supply cable that supplies power produced by the power supply device to the plasma generator, The plasma generator comprises a passage member made of a dielectric material that forms a passage through which the exhaust gas flows and extends along a central axis, a passage-side electrode member made of an electrically conductive material that surrounds the outer surface of the passage member and is electrically connected to the power supply cable, an upstream flange module connected to the upstream end of the passage module, and a downstream flange module connected to the downstream end of the passage module. The upstream flange module comprises an upstream electrode member made of an electrically conductive material, The downstream flange module comprises a downstream electrode member made of an electrically conductive material, A valve cleaning device in which the cleaning plasma is generated in the passage by a discharge between the passage-side electrode member and the upstream electrode member and a discharge between the passage-side electrode member and the downstream electrode member.

14. The valve cleaning device according to claim 13, wherein the upstream electrode member and the downstream electrode member are grounded and function as ground electrodes.

15. The passage-side electrode member comprises a passage electrode portion extending circumferentially and surrounding the outer surface of the passage member, and a first connecting piece and a second connecting piece projecting outward from both ends of the passage electrode portion. The passage module further comprises electrode fixing means for tightening the first coupling piece and the second coupling piece to fix the passage-side electrode member to the passage member, The valve cleaning device according to claim 13, wherein the power supply cable is coupled to the electrode fixing means.

16. The electrode fixing means comprises a first connecting rod made of an electrically conductive material to which the first connecting piece is connected, a second connecting rod made of an electrically conductive material to which the second connecting piece is connected, and fastening bolts and fastening nuts for fastening the first connecting rod and the second connecting rod. The valve cleaning device according to claim 15, wherein the power supply cable is connected to the fastening bolt and the fastening nut.

Images