Improved pest control head unit

Abstract

The present invention provides a head unit for placement at the inlet of a combustion chamber of a filtration device, the head unit comprising a head plate configured to cover the combustion chamber, an exhaust flow conduit having an exhaust flow contact surface for transporting an exhaust flow toward the combustion chamber of the filtration device, and an injection flow conduit having an injection flow contact surface for transporting an injection flow toward the exhaust flow, wherein the exhaust flow contact surface and / or injection flow contact surface are defined, preferably substantially completely defined, by the head plate.

Description

Technical Field

[0001] The present invention relates to a head unit for abatement apparatuses, an abatement apparatus, and a method of manufacturing the same.

Background Art

[0002] Abatement apparatuses treat exhaust gas streams from various manufacturing processes, such as semiconductor or flat panel display manufacturing. The components of these exhaust gas streams need to be treated to remove selected gases and solids before being discharged to the atmosphere.

[0003] In general, abatement apparatuses treat exhaust gas streams by combustion. Fuel and other reagents and / or purge gas are mixed with the exhaust gas stream and supplied through the head unit to the abatement chamber for abatement.

[0004] There is a continuing need to reduce downtime associated with maintenance of the head unit. Current head units have many complex fluid (such as gas) connections, each of which needs to be maintained separately. Current head units have many complex fluid (e.g. gas) connections, each of which needs to be serviced individually, all within the limited space of the cabinet of the abatement apparatus.

Summary of Invention

Problems to be Solved by the Invention

[0005] The present invention aims to solve the above and other problems of the prior art.

Means for Solving the Problems

[0006] Accordingly, in a first embodiment, the present invention provides a head unit for placement at the inlet of the combustion chamber of a filtration device. The head unit comprises a head plate configured to cover the combustion chamber, an exhaust flow conduit having an exhaust flow contact surface for transporting an exhaust flow toward the combustion chamber of the filtration device, and an injection flow conduit having an injection flow contact surface for transporting an injection flow toward the exhaust flow. The exhaust flow contact surface and / or injection flow contact surface are defined by the head plate.

[0007] In other words, the discharge flow conduit and / or injection flow conduit can be substantially internally located within the head plate.

[0008] The inventors of this invention have found that this configuration offers several advantages.

[0009] In particular, by providing a head plate that defines the discharge flow contact surface and / or the injection flow contact surface, a significant portion of conventional potential leak points is eliminated.

[0010] In existing head units, numerous separate fluid (e.g., gas) lines are provided, which must be removed, reconnected, and checked for leaks during periodic maintenance and before restarting the head unit. In addition, a separate quarter of a known head unit must be removed from the rest of the unit to maintain the inlet nozzle. The quarter then needs to be properly reattached to ensure a fluid sealing. In short, known head units contain numerous separable components, which pose a significant risk of leaks and maintenance burden. The configuration of the present invention allows for a significant reduction in head unit downtime.

[0011] In contrast, when the fluid contact surface (either the discharge fluid or the injection fluid) is defined by the head plate of the present invention, there are fewer separate components (i.e., potential points of failure) including connections, seals, or gaskets.

[0012] If the head plate defines an injection flow conduit, and therefore the head plate substantially includes internally arranged fluid (e.g., gas) flow channels, various fluid channels, such as discharge flow conduits, can be arranged more effectively, allowing for improved access to other components of the head unit.

[0013] For example, in an embodiment, the injection flow conduit may be located at least partially in a different area of ​​the head unit, e.g., a compartment, from the associated discharge flow conduit when the head unit is viewed from above. In contrast, known head units generally have separate injection flow conduits that extend directly from the corresponding discharge flow conduits away from the head plate, and these are generally located within the same head unit compartment as the corresponding discharge flow conduits when the head unit is viewed from above.

[0014] In this invention, when the injection flow contact surface is defined by the head plate, more free space is provided around the corresponding discharge flow conduit. In other words, the head unit has a less complex configuration.

[0015] The two improvements described above result in (i) more efficient maintenance, particularly a reduction in the number of leak tests, and (ii) engineers having better access to the components of the head unit, allowing them to work more quickly, thus significantly reducing head unit downtime.

[0016] In known head units, at least one injection port can generally be located closer to the corresponding exhaust inlet than to the combustion chamber of the abatement device. In the configuration of the present invention, the need to place such an injection port further upstream, for example, closer to the exhaust inlet, is eliminated or at least reduced, or such an injection port can be reused for another purpose, thereby reducing the complexity of the head unit. By reducing complexity, the manufacturing of the head unit by additive manufacturing, for example, becomes easier.

[0017] Furthermore, the inventors have found that by arranging the discharge and / or injection channels inside the head plate, improved temperature control of the head unit, such as temperature uniformity, and the fluid being transported thereby can be provided.

[0018] For example, in the case of existing head units, it is generally necessary to incorporate a heat-heating jacket around the inlet, which is time-consuming and difficult due to the location and number of inlets. If a jacket is not provided, cold spots will cause undesirable gas condensation and accumulation of contaminants within the head unit.

[0019] In contrast, the head unit of the present invention provides improved flow regulation due to the internally arranged flow conduit(s) defined by the head plate.

[0020] More specifically, by defining the fluid flow path and thereby providing a head plate in which the fluid flow path is internally arranged within the head plate, it becomes possible to utilize the heat generated by the downstream combustor. The heat is conducted through the head plate material, heating the head unit and adequately warming the internally arranged conduits and the fluid carried within them. Thus, the internally arranged flow conduits are configured to regulate the final stage flow, particularly by preheating the injected gas before it interacts with the exhaust flow. In contrast, known head units have relatively flexible, externally arranged gas paths connected to the injection inlet point on the head unit and do not function as a final stage flow regulating element.

[0021] Furthermore, known head unit components generally require a ceramic protective layer to provide thermal protection. Since the head unit of the present invention has improved thermal properties, this is either unnecessary or significantly less necessary.

[0022] A further advantage associated with the configuration of the present invention is that less material is required to form the head unit. As a result, the head unit is reduced in weight. Reducing the material and weight of the head unit improves the ease with which an engineer can remove the head unit from the abatement cabinet.

[0023] As used herein, the term "head plate" refers to the part of the head unit that covers the combustion chamber of the abatement apparatus. Typically, the head plate is the final stage of gas flow conditioning (e.g., mixing, redirection and / or reconditioning) before the fluid conveyed thereto reaches the combustion chamber. Typically, the head plate may be configured such that exhaust fluid and / or injection fluid flow into the downstream combustion chamber in a generally coaxial flow direction, which flow direction is substantially coaxial with the longitudinal axis of the head unit.

[0024] As used herein, the term "injection" may refer to reagents such as fuel and / or oxygen, or purge fluids, or inert fluids configured to maintain a forward flow of an exhaust gas stream. The term "injection" may also refer to a fluid configured to provide ambient pressure sensing data.

[0025] For example, the head plate may define injection flow conduits configured to convey fuel and / or fluids including oxygen, nitrogen, water, hydrogen, or ammonia.

[0026] The head unit may have a generally cylindrical body. When disposed at the inlet of the combustion chamber of the abatement apparatus, the head unit may define a portion of the combustion chamber. The head unit may have an upstream side that faces generally outward from the combustion chamber in use, and a downstream side that faces the combustion chamber in use.

[0027] For the purposes of the present invention, the terms "upstream" and "downstream" may refer to the relative positional relationship of components along the flow path of an exhaust fluid stream.

[0028] The head unit may be configured to receive exhaust fluid flowing in from one or more sources. For example, the exhaust fluid stream may be an exhaust stream from one or more process tools. The head unit may be configured to direct the stream(s) to the combustion chamber of the abatement apparatus.

[0029] In an embodiment, the exhaust flow contact surface and / or the injection flow contact surface may be defined substantially entirely by the head plate. In an embodiment, both the exhaust flow contact surface and the injection flow contact surface may preferably be defined substantially entirely by the head plate. In other words, the exhaust flow conduit and the injection flow conduit may be integrally formed by the head plate.

[0030] In an embodiment, the exhaust flow conduit or the injection flow conduit may be defined by a single exhaust flow contact surface or a single injection flow contact surface, respectively.

[0031] For the avoidance of doubt, the exhaust flow contact surface(s) and the injection flow contact surface(s) defined by the head plate are in direct contact with the exhaust fluid stream and the injection stream, respectively, during use. Preferably, the surface of the head plate that defines the exhaust flow contact surface or the injection flow contact surface may be an inner surface. The head units of prior art apparatuses generally have openings into which nozzles are inserted, and the nozzles and / or separate exhaust flow components define the flow path for the exhaust flow (rather than the head plate itself comprising the fluid flow contact surfaces).

[0032] Typically, the head unit may be disposed above the combustion chamber of the abatement apparatus to which the head unit is coupled. In an embodiment, the exhaust flow may have a generally downward primary flow direction. The primary flow direction may be substantially toward the combustion chamber of the abatement apparatus. In other words, the exhaust flow may be substantially parallel to the main axis of the head unit.

[0033] In this embodiment, the discharge conduit may have a discharge inlet through which the discharge flow enters the conduit. The discharge inlet may be located upstream of the head unit. The discharge conduit may also have a discharge outlet through which the discharge flow exits the conduit during use. The discharge outlet may be located downstream of the head unit.

[0034] In this embodiment, the discharge flow conduit can be substantially non-linear.

[0035] In embodiments, the head plate may have a substantially planar portion configured to connect with the combustion chamber of the abatement device. In embodiments, the or each injection flow conduit may be substantially internally disposed within the substantially planar portion of the head plate.

[0036] In embodiments, the injection flow may generally have a primary flow direction that is lateral. In other words, the injection flow conduit may extend substantially perpendicular to the main axis of the head unit. Thus, the injection flow carried by the injection flow conduit may be substantially perpendicular to the main axis of the head unit. In embodiments, the injection flow conduit or each injection flow conduit extends substantially laterally within the head plate.

[0037] In embodiments, the head plate can be substantially a single, integrated structure. Therefore, when the head plate defines one or more discharge conduits and / or one or more injection conduits, fewer separable components of the head unit are provided, thus reducing the number of potential leak points. As used herein, the term “integrated structure” can be defined as the head plate being in the form of a single, standalone component. In other words, an integrated head plate can be in the form of a single, molded material. An integrated head plate may include components that are welded to each other or permanently fixed together.

[0038] In some embodiments, the head unit can be substantially a single unit. For example, the head unit can be substantially a single unit except for one or more inlet nozzles. The head unit may include a flow path for receiving the inlet nozzles. The inlet nozzles may be configured to at least partially direct the fluid flow. In other embodiments, the entire head unit can be substantially a single unit, for example, including one or more inlet nozzles. In some embodiments, the head unit may include one or more discharge flow conduits that extend substantially perpendicularly from a planar portion and can be formed substantially integrally with it.

[0039] In some embodiments, an integrated head unit may not include components that are detachably attached thereto. For example, components that are fastened, bolted, screwed, or otherwise joined via detachable fasteners may not form part of the integrated head unit. Furthermore, an integrated head unit may not include components that are detachably inserted into the integrated head unit.

[0040] In embodiments, the head unit may comprise a plurality of injection flow conduits associated with the discharge flow conduit. For example, the head unit may comprise a plurality of discharge flow conduits, each having a plurality of injection flow conduits associated with it. In embodiments, the injection flow contact surface of each injection flow conduit may be defined by the head plate. In embodiments, the injection flow contact surface of each injection flow conduit may be substantially entirely defined by the head plate.

[0041] In embodiments, the or each injection flow conduit may include one or more bends. The bends in the conduit improve the pre-mixing of the discharge fluid and the injection fluid before combustion. In embodiments, the bends may be substantially lateral bends.

[0042] In embodiments, the or each injection conduit may have a bending radius of at least 1:x, where x is the orifice diameter of the same injection conduit. In other words, the injection conduit does not substantially have any excessively sharp bends that would otherwise lead to the accumulation of contaminants or cause a pressure drop within the injection conduit during normal use. In embodiments, the or each injection conduit may have a bending radius greater than 1:x. For example, the or each injection conduit may have a bending radius at least 1.5 times larger than the orifice diameter of the same injection conduit, for example, 1.5 times larger. Thus, potential pressure loss within the injection conduit is eliminated or at least significantly reduced.

[0043] In one embodiment, at least two of the multiple injection flow conduits can be arranged substantially concentrically within the head plate.

[0044] In the embodiment, at least one injection flow conduit associated with the discharge flow conduit may be positioned substantially closer to the outer periphery of the head unit than to the center of the head unit. In the embodiment, each injection flow conduit may be positioned substantially closer to the outer periphery of the head unit than to the center of the head unit.

[0045] In one embodiment, the head plate can define a plurality of injection flow conduits. In another embodiment, the head plate can define a combination of injection flow conduits arranged substantially concentrically and injection flow conduits arranged substantially non-concentrically.

[0046] In an embodiment, the head unit can define a plurality of discharge conduits. In an embodiment, the head unit may have 4 to 8 discharge conduits. For example, the head unit may have 6 discharge conduits. Preferably, each discharge conduit may be as defined above.

[0047] Each exhaust conduit can be configured to connect to a process tool during operation. In some embodiments, each exhaust conduit can be configured to connect to a separate process tool during operation. Typically, the exhaust conduits can be arranged around the central axis of the head unit. When viewed along the central axis of the head unit, the exhaust conduits can generally be arranged in a circular arrangement. The exhaust conduits can be spaced substantially uniformly with respect to the outer circumference of the head unit. During use, the central axis of the head unit can be substantially coaxial with the central axis of the combustion chamber.

[0048] In embodiments, the head plate may include one or more flow paths configured to receive an inlet nozzle or "plug" associated with a discharge flow conduit.

[0049] In the embodiment, the discharge flow contact surface of each discharge flow conduit can be defined by a head plate. In the embodiment, the discharge flow contact surface of each discharge flow conduit can be defined substantially entirely by a head plate.

[0050] In embodiments, the injection flow conduit or each injection flow conduit may extend from the injection flow port. The head unit may include a bank containing injection flow ports associated with a plurality of discharge flow conduits. The bank may include injection flow ports associated with all of the discharge flow conduits of the head unit.

[0051] In some embodiments, the injection flow port can be defined by the head plate. In other words, the injection flow port can be formed substantially integrally with the head plate.

[0052] In some embodiments, the head unit can be formed substantially symmetrically with respect to a radial cross-section that substantially passes through the center of the bank of injection flow ports. This configuration provides engineers with a more intuitive layout for servicing the head unit.

[0053] In embodiments, the head unit may include a coolant flow conduit having a coolant flow contact surface for transporting the coolant flow. In embodiments, the coolant flow contact surface may be defined by a head plate.

[0054] In this embodiment, the coolant conduit can be arranged so that the temperature of the head unit can be controlled by the coolant flow rate passing through the coolant conduit during use.

[0055] In embodiments, the outward-facing surface of the head unit may define one or more recesses. As used herein, the term “recess” may refer to a notch, recess or similar defined by the head unit. One or more recesses can reduce the amount of material required to form the head unit and thus reduce its weight, as well as function as a heat sink to dissipate heat from the abatement device. In embodiments, one or more of the above recesses are located on the outward-facing surface of the head plate.

[0056] In embodiments, a plurality of the above-mentioned recesses may be provided. In embodiments, the plurality of above-mentioned recesses may have substantially similar depths. In embodiments, at least two of the plurality of above-mentioned recesses may have substantially different depths. The depth of each recess may depend at least in part on the area of ​​the head unit in which they are located. For example, a recess in an area that becomes relatively hotter than other areas during use may have a greater depth than a recess in an area that is relatively cooler.

[0057] In one embodiment, the head unit can define a region that includes a repeating pattern of recesses.

[0058] In one embodiment, the recess may have a substantially hexagonal cross-section.

[0059] In some embodiments, the head unit may have one or more relief cutouts. For example, the downstream side of the head unit may have one or more relief cutouts. This reduces the risk of the head unit deforming (e.g., bending) during manufacturing and further reduces the weight of the head unit.

[0060] In an embodiment, the head unit may be made of a metal material. In an embodiment, the head unit may be made of an aluminum alloy or a stainless steel alloy. In an embodiment, the head unit may be made of an additively manufactured, for example, printed, material.

[0061] In embodiments, the discharge flow contact surface and / or the injection flow contact surface and / or the coolant flow contact surface may include a corrosion-resistant surface layer. In embodiments, each of the discharge flow contact surface, injection flow contact surface, and coolant flow contact surface may include a corrosion-resistant surface layer. In embodiments, the corrosion-resistant surface layer may be a nickel-based surface layer.

[0062] In a further embodiment, the present invention provides a method for manufacturing a head unit according to some of the above-described embodiments by additive manufacturing. In an embodiment, the method may include powder bed melting, for example, direct metal laser sintering. In an embodiment, the head unit may be manufactured substantially entirely by additive manufacturing techniques, or a portion of the head unit may be manufactured by additive manufacturing techniques.

[0063] Advantageously, this method allows for the production of components with complex shapes from a variety of materials with high reproducibility, using minimal raw materials and without requiring expensive, specialized tools for each component being manufactured.

[0064] Typically, the method may further include the step of adding a surface layer to the surface defining the discharge flow conduit. Preferably, this step may include adding a nickel surface layer.

[0065] In a further embodiment, the present invention provides a decontamination device including a head unit according to some of the above-described embodiments, or a head unit manufactured according to the preceding embodiment.

[0066] The abatement device may comprise a main body that defines a combustion chamber having an inlet and an outlet. The head unit may be positioned at or toward the inlet of the combustion chamber and configured to direct the exhaust fluid flow away from the combustion chamber.

[0067] In a further embodiment, the present invention provides a method for transporting an exhaust gas flow to a pollution control device. This method is A step of providing a pollution control device as defined in the above embodiment, The steps include transporting the exhaust gas flow through the exhaust flow conduit of the head unit, The steps include transporting the exhaust gas flow to the combustion chamber of the abatement device, Includes.

[0068] It should be understood that the pollution control device may include further features known to those skilled in the art.

[0069] To avoid misunderstanding, the features of the embodiments and models described herein can be combined and still fall within the scope of the present invention.

[0070] The preferred features of the present invention will be described below with reference to the accompanying drawings. [Brief explanation of the drawing]

[0071] [Figure 1] A perspective view of the head unit according to the present invention is shown.

[0072] [Figure 2]Figure 1 shows a schematic perspective view of the head unit.

[0073] [Figure 3] A schematic plan view of the head unit according to the present invention is shown. [Modes for carrying out the invention]

[0074] Figure 1 shows a generally cylindrical head unit, generally referred to as 10. The head unit is intended to be placed at the inlet of the combustion chamber of a defoliant (not shown). When placed at the inlet of the combustion chamber of the defoliant, the head unit 10 defines a portion of the combustion chamber.

[0075] The head unit 10 includes a head plate 12 configured to cover the combustion chamber (not shown).

[0076] The head unit 10 further comprises six discharge conduits 14a-14f for receiving discharge flows from multiple sources, such as process tools. The discharge flows are received through the discharge inlet (e.g., 26) of each discharge conduit and discharged through the discharge outlet (e.g., 34).

[0077] Each discharge conduit 14 has a discharge contact surface (e.g., 16) configured to transport the discharge flow (from the upstream process tool) toward the combustion chamber of the abatement device. Each discharge contact surface is defined by the head plate 12. In other words, each discharge conduit 14 is an integral part of the head plate 12.

[0078] The head unit 10 in Figure 1 is essentially monolithic. In the head unit 10 of Figure 1, the head unit 10 is a single unit except for a separate nozzle (not shown) that is inserted into the flow path 36 during use.

[0079] As shown in Figures 2 and 3, the head unit 10 also includes a number of injection flow conduits 18, 20, 22 associated with each discharge flow conduit 14. Each injection flow conduit terminates at an injection flow port such as 24a-24c. In the embodiment of Figure 1, the injection flow conduits terminating at injection flow ports 24a-24c are associated with the discharge flow conduit 14c.

[0080] Each exhaust flow conduit in Figure 1 includes a fuel injection pipe 18, an oxygen injection pipe 20, and a nitrogen injection pipe 22. Typically, the nitrogen injection pipe 22 is configured to maintain the forward flow of the exhaust gas flow during use.

[0081] Each of the injection flow conduits has an injection flow contact surface defined by the head plate 12. In other words, each of the injection flow conduits 18, 20, and 22 is an integral part of the head plate 12. Therefore, the injection flow conduits are substantially internally arranged within the head plate 12.

[0082] As shown in Figure 2, the injection flow ports associated with the discharge flow conduits can be located in different sections of the head unit 10 relative to the corresponding discharge flow conduits when viewed from above. For example, the discharge flow conduit 14c is located in a different sub-section of the head unit 10 from the injection flow ports 24a-c.

[0083] As shown in Figure 1, each of the injection flow conduits is defined by the head plate 12, which provides more space upstream of the head unit compared to known head units.

[0084] More specifically, the head plate 12 has a substantially planar portion 28. The planar portion 28 of the head plate 12 is typically configured to connect to the combustion chamber. Each injection flow conduit 18, 20, 22 is substantially internally disposed within the planar portion 28 of the head plate 12.

[0085] Referring to Figure 2, it can be seen that each injection flow conduit 18, 20, and 22 generally has a primary flow direction in the lateral direction. In other words, during use, the injected gas flows into the injection flow conduit through the corresponding injection flow port, and the injected gas is transported substantially laterally within the head plate 12 toward the corresponding discharge flow.

[0086] Furthermore, each of the injection conduits 18, 20, and 22 includes one or more bends or lateral curves. In addition, the injection conduits 18, 20, and 22 may include one or more axial bends. More specifically, each injection conduit 18, 20, and 22 has a bending radius equal to or greater than the orifice diameter of at least the same injection conduit, for example, greater than 1.5 times.

[0087] Furthermore, referring to Figure 2, several injection flow conduits 18, 20, and 22 are arranged substantially concentrically within the head plate 12.

[0088] In the head unit 10 shown in Figure 1, each of the injection flow ports 24 is located in an injection flow port bank 32. The injection flow port bank 32 is typically positioned so that each of the injection flow ports is presented to the engineer when the cabinet in which the abatement equipment is located is opened. The internal arrangement of the injection flow conduits makes it possible to position each injection flow port in its bank 32.

[0089] Figure 3 shows another head unit 10, and when viewed from above, the injection flow ports are arranged in pairs within a sub-section or compartment of the head unit 10. There are three pairs of injection flow ports, which together form an injection flow port bank. The head unit 10 includes a combination of concentrically arranged injection flow conduits and non-concentrically arranged injection flow conduits, for example, between two points.

[0090] In both head unit 10 in Figures 1 and 2, and in Figure 3, one or more injection flow conduits are typically located closer to the outer periphery than to the center of the head unit 10. Therefore, more space is provided on the central side of the head unit for other components and / or for improved engineer access.

[0091] The head unit 10 in Figures 1 and 2, and Figure 3, is formed substantially symmetrically with respect to a radial cross-section passing through the center of the injection flow port bank, as indicated by the dashed line "A" in Figure 3.

[0092] Returning to Figure 1, the outward-facing surface of the head plate 12 is defined with a pattern of depressions or recesses (e.g., 30), each of which has a substantially hexagonal cross-section. The multiple depressions have substantially similar depths in Figure 1, but their depths can vary depending on the corresponding arrangement of injection flow conduits within the head plate 12.

[0093] It should be understood that various modifications can be made to the embodiments shown without departing from the spirit and scope of the invention as defined by the attached claims as interpreted under patent law. [Explanation of Symbols]

[0094] 10 Head Units 12 Headplate 14 Exhaust flow conduit 16 Discharge flow contact surface 18 Injection flow conduit 20 Injection flow conduit 22 Injection flow conduit 24 Injection flow ports 26 Discharge inlet 28 Plane section 30 indentations 32 Injection Flow Port Bank 34 Discharge outlet 36 channels

Claims

1. A head unit for placement at the inlet of the combustion chamber of a pollution control device, A head plate configured to cover the combustion chamber, A discharge flow conduit having a discharge flow contact surface for transporting the discharge flow toward the combustion chamber of the abatement device, An injection flow conduit having an injection flow contact surface for transporting the injection flow toward the discharge flow, Equipped with, A head unit in which the discharge flow contact surface and / or the injection flow contact surface are defined, preferably substantially completely defined, by the head plate.

2. The head plate is substantially a single unit, and optionally the head unit is substantially a single unit, according to claim 1.

3. The head unit according to claim 1 or 2, comprising a plurality of injection flow conduits associated with the discharge flow conduit, wherein the injection flow contact surface of each of the injection flow conduits is defined, preferably substantially completely defined, by the head plate.

4. The head unit according to claim 3, wherein at least two of the plurality of injection flow conduits are arranged substantially concentrically within the head plate.

5. The head unit according to any one of claims 1 to 4, wherein at least one, preferably each, injection flow conduit associated with the discharge flow conduit is disposed substantially closer to the outer circumference of the head unit than to the center of the head unit.

6. The head unit according to any one of claims 1 to 5, comprising a plurality of discharge flow conduits, preferably 4 to 8 discharge flow conduits, wherein optionally, the discharge flow contact surface of each of the discharge flow conduits is defined by the head plate.

7. The above or each injection conduit may have a bending radius greater than 1:x, where x is the orifice diameter of the injection conduit. A head unit according to any one of claims 1 to 6.

8. The head unit according to any one of claims 1 to 7, wherein the injection flow conduit or each injection flow conduit extends from an injection inlet, each of the injection inlets is located in an injection flow port bank, and optionally the injection flow port bank is defined by the head plate.

9. The head unit according to claim 8, wherein the head unit is formed substantially symmetrically with respect to a radial cross-section substantially passing through the center of the injection flow port bank.

10. The head unit according to any one of claims 1 to 9, wherein the outward-facing surface of the head unit defines one or more recesses, optionally the head unit defines a region including a repeating pattern of recesses, and optionally the recesses have substantially hexagonal cross-sections.

11. The head unit according to any one of claims 1 to 10, wherein the head unit is made of a metal material, and preferably, the head unit is made of an aluminum alloy or a stainless steel alloy.

12. The head unit according to any one of claims 1 to 11, further comprising a coolant flow conduit having a coolant flow contact surface, wherein the coolant flow contact surface is defined by the head plate, and preferably the coolant flow conduit is arranged such that the temperature of the head unit can be controlled by the coolant flow rate passing through the coolant flow conduit during use.

13. The head unit according to any one of claims 1 to 12, wherein the discharge flow contact surface and / or the injection flow contact surface and / or the coolant flow contact surface includes a corrosion-resistant surface layer, preferably a nickel-based surface layer.

14. A method for manufacturing the head unit according to any one of claims 1 to 13 by additive manufacturing, preferably by direct metal laser sintering.

15. A decontamination device comprising a head unit according to any one of claims 1 to 13 or a head unit manufactured in accordance with claim 14.

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